200843019 九、發明說明： 【發明所屬之技術領域】 輸送設備。亦即，關於使用在 處理裝置的端面輸送方式之輸 基板，在小型輕量化、極薄化、 體封裝化等等有顯著的進展， 化、高密度化亦明顯。 板之製造工程，使用有表面處 洗淨液等之處理液進行表面處 中，基板材係被輸送設備之上 一邊被噴射來自噴霧嘴之處理 來形成電子電路，而製造電路 或噴霧嘴係配設在大氣中、空 ‘空中所噴射之處理液來作表面 進展，使基板材無法忍受處理 量，時常發生有撓曲、卷縮、 本發明係關於基板材之 電路基板之製造工程之表面 送設備者。 【先前技術】 〈技術背景〉 使用於電子機器的電路 ^ 撓性化、以及多層化、半導 而所形成的電子電路之微細 而且，在這樣的電路基 理裝置，使基板材被藥液或 理。 〈先前技術〉 在此種之表面處理裝置 下運送輥子一邊水平運送，200843019 IX. Description of the invention: [Technical field to which the invention pertains] Conveying equipment. In other words, the substrate to be transported by the end face of the processing apparatus has been significantly reduced in size, weight, thickness, bulk, and the like, and the density and density are also remarkable. The manufacturing process of the board is carried out by using a treatment liquid having a surface cleaning liquid or the like, and the base sheet is sprayed from the spray nozzle on the side of the conveying device to form an electronic circuit, and the manufacturing circuit or the spray nozzle is equipped. The treatment liquid sprayed in the air and in the air is used for surface development, so that the substrate can not withstand the processing amount, and the deflection and curling often occur, and the surface of the circuit board for manufacturing the substrate of the present invention is sent. Equipment. [Prior Art] <Technical Background> The circuit used in an electronic device is flexible, and the electronic circuit formed by multilayering and semi-conducting is fine, and in such a circuit-based device, the substrate is medicated or Reason. <Prior Art> The roller is transported horizontally under such a surface treatment device,
I 液，用以依次施行表面處理 基板。 而且在以往，輸送設備 中，基板材係以在大氣中、 處理，但伴隨最近極薄化的 液的噴霧壓力或處理液之重 落下的事故。 於是爲因應此等情形，藉由將輸送設備或噴霧嘴配設 200843019 在充滿處理液的藥液槽中，使極薄而柔弱的基板材一邊在 液中運送，一邊以液中噴射的處理液來進行表面處理的表 面處理裝置，謀求解決上述發生事故的問題。 〈先行技術的文獻資訊〉 就這樣的表面處理裝置而言，係例如可列舉其次專利 文獻1、2中所示者。專利文獻1係關於空中噴射方式者， 專利文獻2係關於液中噴射方式者。 〔專利文獻1〕 日本國特開2002 - 68435號公報 〔專利文獻2〕 日本國特開平1 0 - 079565號公報 〈有關端面輸送方式之輸送設備〉 且說本發明人，係針對液中噴射方式之表面處理裝置 更進一步硏究，在日本平成18年9月28日提出特願2 006 -2 64 1 89號專利申請。此專利申請，係關於其輸送設備，其 要旨爲配設端面輸送輥子於液中，該端面輸送輥子係以無 接觸基板材之電路形成面而從上下僅夾持兩側端面來作輸 送者。 亦即，在習知的此種輸送設備，係在液中配設有從上 下夾持基板材之全外表面來進行運送的全面運送輥子，所 以容易在基板材之電路形成面發生擦傷、傷痕、損傷等之 損害，而發生可靠性或成品率的問題，但在本專利申請中， 則解決這樣的問題（本發明，係此申請專利之改良發明）。 【發明內容】 〈發明所欲解決之課題〉 可是，有關以這樣的液中噴射方式作端面輸送方式之 200843019 表面處理裝置的輸送設備，最近像如下各點乃成爲課題 者。亦即，被輸送的基板材搖動而蛇行，因而降低輸送精 度，有產生妨礙基板材之穩定輸送的情況。 茲對此作更進一步詳述。在此輸送設備中，極薄化進 展而柔弱的板材，係僅夾持裕度、把持裕度只有1 Omm左 右之寬度的狹窄兩側端面，一邊被夾入左右上下之端面輸 送輥子間被液中輸送，一邊使處理液噴射於液中。於是基 板材，就受到處理液之噴霧壓力或重量之影響而上下搖 f" 動、起波浪、撓曲、容易鬆弛。因而擔心有落下等之運送 事故發生。 再者，基板材之液中輸送係有達到數米〜數十米的情 況，要將遍及其全長設置的樹脂製輸送設備均質組裝（例 如，要使端面輸送輥子的夾持壓力均等）並不容易。於是再 加上前述噴霧壓力等之影響，這樣的輸送設備的缺點亦影 響，使基板材在途中左右偏移導致容易蛇行，由此亦擔心 有落下等的輸送事故發生。 I / 而且，亦被指摘因此等之輸送事故而引發基板材之表 面處理精度降低。 〈關於本發明〉 本發明之基板材輸送設備，係有鑒於這樣的實情，爲 解決上述習知例之課題而經發明人銳意硏究努力之結果 者。 而且本發明係提案一種可實現以下3點的基板材之輸 送設備爲目的，該輸送設備可實現：第1、防止基板材之 200843019 搖動或蛇行；第2、防止基板材之滑動；第3、此等第1、2 點不會對基板材造成損害。 〈用以解決課題的手段〉 〈關於申請專利範圍〉 解決這樣課題的本發明之技術的手段係如次所述。首 先有關申請專利範圍第1項係如次所述。 申請專利範圍第1項之基板材輸送設備，係使用於基 板材之表面處理裝置。該表面處理裝置具有：充滿處理液 Γ 的藥液槽；在該藥液槽內進行液中輸送基板材之該輸送設 備；在藥液槽內將處理液液中噴射於基板材的噴霧嘴，其 特徵爲： 該輸送設備之端面輸送輥子係列設於輸送方向，該端 面輸送輥子係無接觸於基板材之電路形成面且上下僅夾持 基板材之左右兩側端面而進行運送。作爲該端面輸送輥 子，係採用朝向輸送方向的直進輥子，及對輸送方向稍微 朝向外側的傾斜輥子之組合。 I / 關於申請專利範圍第2項係如次所述。申請專利範圍 第2項係如申請專利範圍第1項基板材輸送設備，其中該 直進I昆子係將基板材朝向輸送方向運送，該傾斜輥子，係 將基板材對輸送方向一邊朝稍斜外側拉引一邊運送。因而 使基板材以拉引狀態，一邊於輸送方向維持水平姿勢一邊 被輸送。 關於申請項3係如次所述。申請專利範圍第3項係如 申請專利軔圍弟2項之基板材之輸送設備，其中該直進聿毘 200843019 子與該傾斜輥子之組合，可以是在上下之組合模式、在左 右的組合模式、此等之倂用模式、或在輸送方向之每隔單 數或複數之互相混合模式者。 關於申請項4係如次所述。申請專利範圍第4項係如 申請專利範圍第1項之基板材之輸送設備，其中該端面輸 送輥子之外周面有施作止滑加工。 關於申請項5係如次所述。申請專利範圍第5項係如 申請專利範圍第4項之基板材之輸送設備，其中該端面輸 ί 送輥子之止滑加工，係例如刻設壓花狀之微細的凹凸網眼 而成，從上下確實地將液中輸送的該基板材夾持並把持， 以發揮防止因拉引所引起的滑動之機能。 〈關於作用等〉 本發明由於是這樣的手段所構成，所以會成爲如次那 樣。 (1) 此表面處理裝置使用在電路基板之製造工程，用 來對基板材作表面處理。 ^ (2)而且在處理液之藥液槽中配設輸送設備及噴霧 嘴。 (3) 在此輸送設備中，左右上下之端面輸送輥子係夾 持基板材之左右兩側端面來進行傳送。 (4) 就這樣的端面輸送輥子而言，係採用直進輥子及 傾斜輥子。 (5) 於是基板材，係左右寬度方向被賦予張力，以拉 緊張力的狀態一邊維持水平姿勢，一邊被輸送於輸送方向。 -10- 200843019 (6) 基板材係極薄化進展而柔弱’而且於液中輸送時 在液中被噴射，而儘管僅夾持兩側端面而被運送’但仍然 能防止發生搖動或蛇行。 (7) 而且爲阻止此搖動或蛇行的發生’直進輥子及傾 斜輥子之組合模式被自由且最合適地選擇採用。 (8) 而且這樣的端面輸送輥子也就是直進輥子及傾斜 輥子，係其外周面有施作止滑加工。於是被進行液中輸送 的基板材係從上下被確實把持，而在拉引張力下不滑動地 (^ 被水平輸送。 (9) 因此本發明基板材之輸送設備’係發揮其次之效 果。 〈發明之效果〉 〈第1效果〉 第1、防止基板材之搖動或蛇行，因而輸送精度提高， 實現穩定的水平輸送。 亦即，本發明基板材之輸送設備，就端面輸送輥子而 1;/ 言，由於採用組合直進輥子及傾斜輥子，儘管是將極薄化 進展而柔弱的基板材進行液中輸送、液中噴射、側端面輸 送，仍然能防止基板材之搖動、起波浪、撓曲、鬆弛等， 同時亦防止基板材之偏移、蛇行，因此能避免基板材落下 等之輸送事故發生。 由此看來，相較於前述此種習知例，基板材之表面處 理精度係更加提升。 〈第2效果〉 -11- 200843019 第2、防止基板材之滑動，因而由此亦提高輸送精度， 能實現穩定的水平輸送。 亦即在本發明之輸送設備中，就端面輸送輥子而言， 係採用附有止滑加工之直進輥子及傾斜輥子。被進行液中 輸送的基板材係在傾斜輥子受到拉引張力，同時在處理液 或融化的感光性保護模等之粘性中處於容易滑動的狀況， 但以這樣的止滑加工，而從上下被確實地把持。 因此基板材係確實地被夾持把持而在不滑動之下於液 f 中穩定的水平輸送。 〈第3效果〉 第3、實現這樣的穩定輸送是在不造成基板材損傷之 下而實現。 亦即本發明基板材之輸送設備，就端面輸送輥子而 言’依採用附有止滑加工之直進輥子及傾斜輥子之組合， 來實現前述第1、第2效果。 亦即爲實現穩定輸送亦無與基板材電路形成面接觸的 ^ 風險’在未與電路形成面接觸且不會造成擦傷、傷痕、損 胃等之損傷下可靠性或出品率亦優越。 如此一來，在解決此種所有存在於習知例的課題等， 本發明顯著地發揮很大的效果。 【實施方式】 <用以實施發明的最佳形態〉 〈關於圖式〉 &下’根據圖式所示之用以實施發明的最佳形態，詳 -12- 200843019 細說明本發明之基板材之輸送設備。 第1圖、第2圖、第3圖係提供用以實施本發明之最 佳形態的說明。而第1圖（1)係整體之正剖面圖，第1圖（2) 係左側端面輸送輥子之平面說明圖，第1圖（3)係右側端面 輸送輥子之平面說明圖。第2圖係第1圖（1)之要部放大圖。 第3圖係端面輸送輥子之組合模式平面說明圖，其第 3圖（1)係表示1例之要部，第3圖（2)係表示其他例之要部。 第4圖係整體之側剖面說明圖。 V' 〈關於電路基板〉 本發明之表面處理裝置1，係使用於電子電路用之電 路基板製造工程。於是，首先就電路基板作說明。 使用於電子機器的印刷配線基板等之電子電路基板， 係小型輕量化、極薄化、而且微細電路化、高密度電路化、 多層化等的進展驚人。關於其硬軟，相較於習知之剛性基 板等之硬性基板，在撓性基板的之極薄且柔軟的軟性基板 之進展、增加上極爲顯著，將半導體部件與電路一體組裝 的半導體封裝基板亦急速普及。 於是’就最近電路基板之要求度而言，其板厚係被極 薄化、微細化成板厚板厚爲ΙΟΟμιη〜25μιη左右、電路厚Η 爲ΙΟμιη左右、電路寬L或電路間空間S迄至3〇um〜20μιη 左右。 電路基板係形成爲如此。 〈關於表面處理裝置1〉 表面處理裝置1係使用在這樣的電路基板之製造工 1 200843019 程，用處理液B來對基板材A作表面處理。關於表面處理 裝置1，茲參照第1圖、第4圖來更詳細的說明。 在表面處理裝置1中，係於其處理室2內，對被輸送 設備3所輸送之貼有感光性保護膜的貼銅疊層板製之基板 材A，從噴霧嘴4例如依次噴射顯影液、蝕刻液、剝離液、 或洗淨液等處理液B，因而使基板材A被藥液處理或洗淨 處理等而被表面處理。 而且表面處理裝置1，係在其處理室2內具有藥液槽 ( 5、輸送設備3、噴霧嘴4、貯槽6等。首先藥液槽5係充 滿有處理液B。亦即藥液槽5係於處理室2上部使用兼用 輸送設備框架之框架區劃壁7來形成，同時被與從噴霧嘴 4所噴射的處理液B同樣處理液B所充滿。 輸送設備3係配設在藥液槽5之處理液B內，且具備 有將基板材A於輸送方向C進行液中輸送之多個端面輸送 輥子8、9。噴霧嘴4係配設多個於藥液槽5之處理液B內， 而將處理液B對所輸送的基板材A之電路形成面D進行液I liquid for sequentially performing surface treatment of the substrate. Further, in the conventional transportation equipment, the base material is treated in the atmosphere, but the spray pressure of the liquid which has recently been extremely thinned or the accident of the treatment liquid falls. Therefore, in order to cope with such a situation, the transporting device or the spray nozzle is disposed in the chemical liquid tank filled with the treatment liquid in 200843019, and the extremely thin and weak base material is transported in the liquid while the liquid is sprayed in the liquid. A surface treatment apparatus that performs surface treatment seeks to solve the above-mentioned problem of occurrence of an accident. <Document information of the prior art> The surface treatment apparatus is, for example, the one shown in the second patent documents 1 and 2. Patent Document 1 relates to an air jet method, and Patent Document 2 relates to a liquid jet method. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The surface treatment device was further studied, and the patent application No. 2 006 - 2 64 1 89 was filed on September 28, 1999 in Japan. This patent application relates to a conveying apparatus which is characterized in that an end surface conveying roller is disposed in a liquid, and the end conveying roller is a conveyor that faces only the circuit forming surface of the contactless base plate and sandwiches both end faces from above and below. In other words, in the conventional conveying apparatus, the entire conveying roller for transporting the entire outer surface of the base plate from the upper and lower sides is disposed in the liquid, so that it is easy to cause scratches and scratches on the circuit forming surface of the base plate. The problem of reliability or yield occurs due to damage such as damage, but in the present patent application, such a problem is solved (the present invention is an improved invention of the patent application). [Problem to be Solved by the Invention] However, the transportation equipment of the 200843019 surface treatment apparatus which uses the liquid-injection method as the end surface transportation method has recently become a subject. That is, the conveyed base material is shaken and snaked, thereby lowering the conveyance precision and causing a situation in which the stable conveyance of the base material is hindered. I will elaborate on this further. In this conveying apparatus, the sheet which is extremely thin and progressing is weak, and the narrow side faces which are only the width of the holding and the width of the gripping allowance of only about 1 Omm are sandwiched between the left and right end faces and the conveying liquid between the rollers. The medium is conveyed while the treatment liquid is sprayed into the liquid. Then, the base plate is shaken up and down by the spray pressure or weight of the treatment liquid, and is undulated, deflected, and easily slackened. Therefore, there is concern that there will be a transport accident such as a fall. Further, in the case where the liquid medium in the base plate is in the range of several meters to several tens of meters, the resin conveying device provided over the entire length thereof is homogeneously assembled (for example, the clamping pressure of the end face conveying roller is equal) easily. Then, with the influence of the aforementioned spray pressure and the like, the disadvantages of such a conveying apparatus are also affected, and the base material sheet is shifted to the left and right on the way to cause easy snakeing, and there is also concern that a conveyance accident such as dropping occurs. I / Moreover, it was also accused of causing a transport accident such that the surface treatment accuracy of the base material was lowered. <The present invention> The base material conveying apparatus of the present invention has been intensively researched by the inventors in order to solve the problems of the above-described conventional examples in view of such circumstances. Moreover, the present invention proposes a conveying apparatus capable of realizing the following three points, which can realize: first, preventing the base plate from being swayed or snaked; and second, preventing the sliding of the base plate; These points 1 and 2 will not cause damage to the base material. <Means for Solving the Problem> <Regarding the Patent Application Scope> The means for solving the technical problem of the present invention is as described below. The first item related to the scope of patent application is as follows. The base material conveying device of the first application of the patent scope is used for the surface treatment device of the base material. The surface treatment apparatus includes: a chemical liquid tank filled with the processing liquid enthalpy; the conveying device for conveying the liquid material in the liquid liquid tank; and a spray nozzle for spraying the processing liquid liquid into the base material in the chemical liquid tank, The utility model is characterized in that: the end surface conveying roller series of the conveying device is arranged in the conveying direction, and the end surface conveying roller is conveyed without contacting the circuit forming surface of the base plate and clamping the left and right end faces of the base plate up and down. As the end face conveying roller, a combination of a straight-moving roller facing the conveying direction and a tilting roller slightly directed to the outside in the conveying direction is used. I / The second item of the scope of patent application is as described below. The second item of the patent application scope is the base material conveying device of the first item of the patent application scope, wherein the straight-forward I Kunzi system transports the base plate toward the conveying direction, and the inclined roller is to slant the outer side of the base plate toward the conveying direction Pull and transport. Therefore, the base material is conveyed while maintaining the horizontal posture in the conveying direction in the pulled state. The application item 3 is described as follows. The third item of the patent application scope is the conveying equipment of the base plate of the patent application 轫 轫 2, which is the combination of the straight 聿 2008 200843019 and the inclined roller, and may be a combination mode of the upper and lower sides, a combination mode of the left and right, Such modes of use, or alternate modes of singular or plural in the transport direction. The application item 4 is described as follows. The fourth aspect of the patent application is the conveying apparatus of the base material of the first aspect of the patent application, wherein the outer peripheral surface of the end face conveying roller is applied as a slip preventing process. The application item 5 is described as follows. The fifth item of the patent application scope is the conveying device of the base material according to item 4 of the patent application scope, wherein the end surface of the feeding roller is subjected to the sliding processing, for example, an embossed fine embossed mesh is formed, The base plate conveyed in the liquid is surely clamped and held up and down to exert a function of preventing sliding caused by the pulling. <About action and the like> Since the present invention is constituted by such a means, it will be as it is. (1) This surface treatment apparatus is used in the manufacturing process of a circuit board for surface treatment of a base material. ^ (2) In addition, a conveying device and a spray nozzle are disposed in the liquid tank of the treatment liquid. (3) In this conveying apparatus, the left and right end face conveying rollers hold the left and right end faces of the base plate for conveying. (4) In the case of such an end face conveying roller, a straight feed roller and a tilt roller are used. (5) The base plate is then tensioned in the left and right width directions, and is conveyed in the conveying direction while maintaining the horizontal posture while pulling the tension. -10- 200843019 (6) The base sheet is extremely thin and progresses and is squirted and sprayed in the liquid when it is transported in the liquid, and is transported while gripping only the end faces on both sides, but shaking or meandering is prevented. (7) Moreover, in order to prevent the occurrence of this shaking or meandering, the combination mode of the straight-forward roller and the inclined roller is freely and most suitably selected. (8) Moreover, such an end face conveying roller is also a straight feed roller and a tilt roller, and the outer peripheral surface thereof is provided as a slip prevention process. Then, the base sheet conveyed by the liquid is surely held from above and below, and is not slid under the tension ((2) Therefore, the conveying apparatus of the base sheet of the present invention exerts the next effect. EFFECTS OF THE INVENTION <First effect> First, the base plate is prevented from being shaken or meandered, so that the conveyance precision is improved, and stable horizontal conveyance is realized. That is, the conveying device of the base plate of the present invention conveys the roller by the end face; In other words, due to the combination of the straight-forward roller and the inclined roller, the base plate can be prevented from being shaken, waved, flexed, and the like, even if the base plate which is extremely thin and progressing is weakly conveyed in the liquid, the liquid is sprayed, and the side end is conveyed. Relaxation, etc., and also prevent the offset and serpentine of the base plate, so that the transportation accident such as falling of the base plate can be avoided. From this point of view, the surface treatment accuracy of the base plate is further improved compared with the conventional example described above. <Second effect> -11- 200843019 The second step is to prevent the sliding of the base plate, thereby improving the conveying accuracy and achieving stable horizontal conveyance. In the conveying apparatus, in the case of the end conveying roller, a straight-moving roller and a slanting roller with a slip-stop process are used. The base plate conveyed by the liquid is subjected to pulling tension at the inclined roller while being treated or melted. In the case where the viscosity of the photosensitive protective mold or the like is easily slid, it is reliably held from above and below by the anti-slip processing. Therefore, the base sheet is surely held by the grip and is not slipped in the liquid f. Stable horizontal conveyance. <Third effect> Third, the realization of such stable conveyance is achieved without causing damage to the base plate. That is, the conveying device of the base plate of the present invention, in terms of the end face conveying roller, The combination of the straight-through roller and the inclined roller with the anti-slip processing realizes the first and second effects described above, that is, the stable risk of the surface contact with the substrate circuit is achieved, and the risk is not in contact with the circuit forming surface. It does not cause damage, scratches, damage to the stomach, etc., and reliability or yield is also excellent. In this way, all the problems existing in the conventional examples are solved. [Embodiment] <Best Mode for Carrying Out the Invention> <About the Drawings> &Bottom' The best mode for carrying out the invention according to the drawings, details - 12-200843019 A detailed description of the substrate conveying apparatus of the present invention. Fig. 1, Fig. 2, and Fig. 3 are diagrams for explaining the best mode for carrying out the invention, and Fig. 1(1) is integral to the whole. Sectional view, Fig. 1 (2) is a plan explanatory view of the transport roller on the left end face, and Fig. 1 (3) is a plan explanatory view of the transport roller on the right end face. Fig. 2 is an enlarged view of the main part of Fig. 1 (1) Fig. 3 is a plan view showing a combination mode of the end surface conveying rollers, wherein Fig. 3(1) shows a main part of one example, and Fig. 3(2) shows a main part of another example. Fig. 4 is a whole Side section illustration. V' <Circuit Substrate> The surface treatment apparatus 1 of the present invention is used in a circuit board manufacturing process for an electronic circuit. Therefore, the circuit substrate will first be described. The electronic circuit board used for a printed wiring board of an electronic device is surprisingly small, lightweight, and extremely thin, and has been progressing in fine circuit, high-density circuit, and multilayer. With respect to the hard substrate, the rigid substrate such as the rigid substrate is extremely high in the development and increase of the extremely thin and flexible flexible substrate of the flexible substrate, and the semiconductor package substrate in which the semiconductor component and the circuit are integrally assembled is also rapidly formed. popular. Therefore, in terms of the degree of demand for the circuit board, the thickness of the circuit board is extremely thinned and miniaturized to a thickness of about ιμηη~25μιη, the circuit thickness is about ΙΟμηη, the circuit width L or the inter-circuit space S is up to 3〇um~20μιη or so. The circuit substrate is formed as such. <Surface Treatment Apparatus 1> The surface treatment apparatus 1 is used in the manufacture of such a circuit board 1 200843019, and the substrate A is surface-treated with the treatment liquid B. The surface treatment apparatus 1 will be described in more detail with reference to Figs. 1 and 4 . In the surface treatment apparatus 1, in the processing chamber 2, a base material A made of a copper-clad laminate to which a photosensitive protective film is attached, which is transported by the transport apparatus 3, is ejected from the spray nozzle 4, for example, in order. The treatment liquid B such as an etching solution, a peeling liquid, or a cleaning liquid is surface-treated by the chemical solution treatment or the washing treatment. Further, the surface treatment apparatus 1 has a chemical liquid tank (5, a transport device 3, a spray nozzle 4, a storage tank 6, etc. in the processing chamber 2. First, the chemical liquid tank 5 is filled with the processing liquid B. That is, the chemical liquid tank 5 The upper portion of the processing chamber 2 is formed by using the frame partition wall 7 of the transport equipment frame, and is filled with the same processing liquid B as the processing liquid B sprayed from the spray nozzle 4. The conveying device 3 is disposed in the chemical tank 5 The processing liquid B is provided with a plurality of end surface conveying rollers 8 and 9 for conveying the liquid material in the conveying direction C. The spray nozzles 4 are disposed in the processing liquid B of the chemical liquid tank 5, The treatment liquid B is subjected to liquid on the circuit forming surface D of the substrate A to be conveyed.
C 中噴射。 處理液B從處理室2下部之貯槽6，藉由泵1 〇或配管 1 1而壓送於各噴霧嘴4，噴射於基板材A。然後從基板材A 被反射、跳回的處理液B，被吸收於藥液槽5中之處理液B 中’其結果爲，從藥液槽5溢流的處理液B，就回收於貯 槽6而貯藏，事後再度被循環使用。 此外，表示於第3圖中的噴霧嘴4，係朝向基板材A 之表裏兩面相對配設，但基板材A之電路形成面D爲僅單 -14- 200843019 面之單面基板情況時，亦可考量僅朝向其單面丨乍彳目胃@己設 的情況。 表面處理裝置1係構成爲如此。 〈關於端面輸送方式之輸送設備3等〉Jet in C. The treatment liquid B is sent from the storage tank 6 at the lower portion of the treatment chamber 2 to each of the spray nozzles 4 by means of a pump 1 or a pipe 1 and is sprayed on the base material A. Then, the treatment liquid B which is reflected and jumped back from the base material A is absorbed in the treatment liquid B in the chemical liquid tank 5, and as a result, the treatment liquid B overflowing from the chemical liquid tank 5 is recovered in the storage tank 6 The storage was re-used afterwards. Further, the spray nozzle 4 shown in Fig. 3 is disposed to face the front and back surfaces of the base material A, but when the circuit formation surface D of the base material A is a single-sided substrate of only a single-14-200843019 surface, It can be considered that only the one side of the eye is set to the stomach. The surface treatment apparatus 1 is configured as such. <Conveying device 3 for end face conveying method, etc.>
以下，就這樣的表面處理裝置1之輸送設備3 ’參照 第1圖作說明。輸送設備3爲，多數端面輸送輥子8、9係 列設於藥液槽5內之輸送方向C，該多數端面輸送輥子係 無接觸於基板材A之電路形成面D且上下僅夾持基板材A C 之左右兩側端面E而進行運送。 可是基板材A，係由中央部之寬的電路形成面D、及 其外周緣之狹窄的前後端面或左右兩側端面E所構成，前 後端面或兩側端面E係由寬度l〇mm左右所形成亦稱爲耳 部，而成爲非電路形成面。 而且將基板材A之左右兩側端面E作爲夾持裕度、把 持裕度’爲從上下夾持進行運送而上下成對，同時上側之 端面輸送輥子8及下側之端面輸送輥子9在左右列設於輸 / V / 送方向C。此端面輸送輥子8、9，係由被旋轉驅動的驅動 輥子（傳動輥子）構成，藉由軸1 2 !、1 2 2傳動齒輪1 3、驅動 齒輪1 4、驅動軸1 5等而連接於馬達等之驅動機構（未圖 示）。此外端面輸送輥子，雖係由樹脂製所成，但亦能夠爲 金屬製。 端面輸送方式之輸送設備3係槪略構成爲如此。 〈關於直進輥子R 1及傾斜輥子r2〉 兹就第1圖、第3圖所示之直進輥子R1及傾斜輥子 -15- 200843019 R 2作說明。在此輸送設備3中，就左右上下之端面輸送輥 子8、9而言，係採用直進輥子R1、傾斜輥子R2之組合。 直進輥子R 1係朝向輸送方向C直進旋轉，將基板材A 朝向輸送方向C筆直地傳送。傾斜輥子R2係對輸送方向C 稍微朝向外側旋轉，一邊將基板材A對輸送方向C稍微朝 向斜外側拉引一^邊傳送於輸送方向C。於是基板材A係以 拉住狀態被水平輸送於輸送方向C。 有關此等茲再詳述。直進輥子R 1係其軸1 2 ^在水平 ί 面，同時如第1圖（2)、（3)等所示，正確地朝向左右寬度方 向F。因此由直進輥子R1所成之端面輸送輥子8、9係與 此種習知例之端面輸送輥子同樣，朝與左右寬度方向F呈 直角之前後方向亦即朝向輸送方向C旋轉。 對此，傾斜輥子R2爲，其軸1 22在水平面，同時如第 1圖（2)所示，左側之軸122，係從左右寬度方向F只偏移外 側若干角度’又如第1圖（3)所示，左側之軸122，係從左 右寬度方向F只偏移外側若干角度。因而由傾斜輥子R2Hereinafter, the conveying apparatus 3' of such a surface treating apparatus 1 will be described with reference to Fig. 1 . The conveying device 3 is such that a plurality of end conveying rollers 8 and 9 are disposed in the conveying direction C in the chemical liquid tank 5, and the plurality of end conveying rollers are not in contact with the circuit forming surface D of the base material A and only sandwich the base plate AC from above and below. The left and right end faces E are transported. However, the base plate A is composed of a wide circuit forming surface D at the center portion, and a narrow front and rear end faces or left and right end faces E of the outer peripheral edge, and the front and rear end faces or both end faces E are separated by a width of about 10 mm. The formation is also referred to as the ear and becomes a non-circuit forming surface. Further, the left and right end faces E of the base material sheet A are used as the nip margin and the gripping margin 'to be transported from the upper and lower nips, and the upper end side transport rollers 8 and the lower end end transport rollers 9 are left and right. Set in the input / V / send direction C. The end face conveying rollers 8 and 9 are constituted by a driving roller (drive roller) that is rotationally driven, and are connected to the shaft 1 2 !, the 1 2 2 transmission gear 13 , the driving gear 14 , the drive shaft 15 , and the like. A drive mechanism (not shown) such as a motor. Further, the end surface conveying roller is made of resin, but it can also be made of metal. The conveying device 3 of the end face conveying method is configured as such. <About the straight feed roller R 1 and the inclined roller r2> The straight feed roller R1 and the inclined roller -15-200843019 R 2 shown in Figs. 1 and 3 will be described. In the conveying apparatus 3, a combination of the straight feed roller R1 and the inclined roller R2 is used for the left and right end face transport rollers 8, 9. The straight feed roller R 1 is rotated straight in the conveying direction C, and the base sheet A is conveyed straight toward the conveying direction C. The inclined roller R2 is slightly rotated outward in the conveying direction C, and is conveyed in the conveying direction C while the base sheet A is slightly pulled outward in the conveying direction C. Then, the base sheet A is horizontally conveyed in the conveying direction C in a pulled state. More details about this. The straight feed roller R 1 has its axis 1 2 ^ on the horizontal ί surface, and as shown in Fig. 1 (2), (3), etc., correctly faces the right and left width direction F. Therefore, the end face transport rollers 8, 9 formed by the straight feed roller R1 rotate in a direction perpendicular to the right and left width direction F, that is, toward the transport direction C, similarly to the end face transport rollers of the conventional example. In this regard, the inclined roller R2 has its axis 1 22 in a horizontal plane, and as shown in FIG. 1 (2), the left axis 122 is offset from the left and right width directions F by a few angles on the outer side as well as FIG. 1 ( 3) As shown, the left side shaft 122 is offset from the left and right width directions F by a few angles. Thus by the inclined roller R2
/ X K 所成之端面輸送輥子8、9，係對輸送方向C於稍微左右外 側僅朝向若干角度，而不同於此種習知例之端面輸送輥 子，係朝向輸送方向C之稍外側旋轉。 此外，就傾斜輥子R2而言，亦能夠使用‘ 2種角度者， 或倂用更多角度者。 端面輸送輥子8、9之直進輥子R 1或傾斜輥子R2係形 成爲如此者。 〈關於各種之組合模式〉 -16- 200843019 而且在此輸送設備3中，係採用組合這樣的直進輥子 R 1及傾斜輥子R2作爲左右上下之端面輸送輥子8、9，但 其組合模式能夠有各種。 亦即，直進輥子R1及傾斜輥子R2之組合，能將其任 一個作爲上側之端面輸送輥子8或下側之端面輸送輥子 9，又亦可將其任一個作爲右側或左側，依此等之組合能考 量各種模式。再者，關於上下之端面輸送輥子8、9，亦能 夠在輸送方向C每隔單數或複數之互相混合模式。 ' 茲再詳述這樣的組合模式。首先在第3圖（1)所示的模 式中’係使用傾斜輥子R 2作爲所有左側之上側端面輸送輥 子8 ’使用直進輥子R1作爲左側所有之下側端面輸送輥子 9。一起使用直進輥子R1作爲右側之上下端面輸送輥子8、 9。當然亦能夠使其左右相反的模式，或使其上下相反的模 式。 其次在第1圖（1)或第3圖（2)所示的模式中，係使用傾 斜輥子R2作爲左右之上側端面輸送輥子8，使用直進輥子 / R 1作爲左右之下側端面輸送輕子9。當然亦能夠使其上下 相反的模式。 亦即，（a)上側之端面輸送輥子8爲傾斜輥子R2，下側 之端面輸送輥子9爲直進輥子R1之組合，相反地（b)上側 之端面輸送輥子8爲直進輥子R 1，而下輥子9爲傾斜輥子 R2之組合，又（C)上下之端面輸送輥子8、9同時爲傾斜輥 子R2之組合，相反的，（d)上下端面輸送輥子8、9同時爲 直進輥子R1之組合等，而據此將此等（a)、（b)、（c)、（d) 200843019 之組合，針對右側及左側分別進行適用，可考量各種模式。 對此，關於上下之端面輸送輥子8、9，分別沿輸送方 向C例如每隔1個、每隔2個、每隔3個地交互組合直進 輥子R 1及傾斜輥子R2，依此將其組合進行適用於右側及 左側，而能夠爲各種模式。 又這樣的組合模式，可以是統一爲規則性的型式，但 不依此亦可爲不規則的零散型式，能夠自由地選擇。 這樣，可考量各種之組合模式。 I 〈關於止滑加工Η〉 其次參照第2圖，就有施作端面輸送輥子8、9的止滑 加工Η作說明。 於此基板材Α之輸送設備3，所使用的端面輸送輥子 8、9，係其外周面有施作止滑加工Η。 亦即，作爲端面輸送輥子8、9使用的直進輥子R 1或 傾斜輥子R2，係在與基板材Α接觸的外周面施作止滑加工 Η。 ^ ^ 茲就這樣的端面輸送輥子8、9之止滑加工Η作詳述。 此止滑加工Η，係例如作成壓花狀、網紋狀之微細的傾斜 或橫向的凹凸鋸齒網眼刻設花樣所構成，係在端面輸送輥 子8、9之全外周面全面施作。 而且，將被液中輸送的基板材Α確實地從上下夾持來 把持，因而，發揮確實地防止因傾斜輥子R2之拉引張力所 造成之滑動的機能。 此外，止滑加工Η之形狀、花樣、網眼之粗糙度程度 -18- 200843019 等等，係不受圖示例所限定者，能夠爲其他各種之形態等。 止滑加工Η係形成爲如此。 〈作用等〉 本發明基板材Α之表面處理裝置1之輸送設備3係建 構成如以上所説明。於是，會形成如下那樣， (1) 此表面處理裝置1使用於電子電路基板之製造工 程，以處理液B對基板材A進行表面處理。亦即使用在撓 性基板、其他之極薄而柔弱的軟性基板之製造工程，一邊 ί 輸送基板材A，一邊從噴霧嘴4噴射處理液B，進行電子電 路形成用的表面處理。 (2) 而且，在被處理液B充滿的藥液槽5中配設輸送 設備3及噴霧嘴4。 於是，從噴霧嘴4所液中噴射的處理液B，係在直進 藥液槽5之處理液B中之後，對在輸送設備3中被液中輸 送的基板材A之電路形成面D直射而進行表面處理。其後 處理液B被反射而被吸收於藥液槽5之處理液B中，所以 I / 亦不會在電路形成面D形成亂流或積存液。 (3) 又，在此輸送設備3，左右上下之端面輸送輥子 8、9係僅夾持基板材A之屬非電路形成面的左右兩側端面 E而作傳送。於是基板材A之電路形成面D，也就不會因 輸送中之接觸而產生擦傷、傷痕、損傷。 (4) 且說，在此輸送設備3中，作爲左右上下之端面 輸送輥子8、9，係採用朝向輸送方向C的直進輥子R1，及 稍微從輸送方向C朝向斜外側的傾斜輥子R2之組合。 -19- 200843019 (5)於是，基板材A在端面輸送輥子8、9之傾斜輥子 R2，於左右之寬度方向F被賦予張力，一邊亦利用處理液 B之浮力，一邊帶有拉力以拉緊的狀態維持水平姿勢。亦 即基板材A，係至少在左右任一方之傾斜輥子R2，及其另 一方之直進輥子R1或傾斜輥子R2之間被左右拉引。 這樣地，一邊維持在水平姿勢的基板材 A，係在端面 輸送輥子8、9亦即在直進輥子R 1及傾斜輥子R2，被朝向 前後之輸送方向C作輸送。 ( (6)基板材 A係進展爲極薄化而柔軟，且被液中輸 送、液中噴射，而且不論係以狹窄之若干寬度的夾持裕度、 把持裕度之兩側端面E來夾持傳送，亦能防止搖動或蛇行。 基板材 A係以拉引狀態仍舊維持在水平姿勢下作輸 送，而確實地阻止因處理液B之噴霧壓力或重量而上下搖 動，或是加上輸送設備之組裝缺點而於左右寬度方向F蛇 行的情形。 (7)然後，爲阻止發生這樣的搖動或蛇行，作爲端面 / K 輸送輥子8、9，直進輥子R 1及傾斜輥子R2之組合模式， 係可自由地選擇最合適者。 例如，基板材Α之輸送係有到達數米〜數十米者，要 將輸送設備3遍及全長均質組裝並非容易，會有很多基板 材A在途中左右蛇行的情況。在這樣的情況，爲矯正蛇行、 例如是基板材A容易靠近右側的情況，係在左側使用傾斜 輥子R2等，而順應情況的適當模式組合係從多數組合模式 中選擇採用。 -20 - 200843019 (8) 此外，不依據這樣的組合而僅使用傾斜輥子R2 作爲上下之端面輸送輥子8、9，因而將基板材A朝向輸送 方向C傳送，同時拉引於輸送方向C之稍斜外側，藉此亦 能夠作成使基板材A在拉引狀態下被水平輸送於輸送方向 C的情況。 (9) 而且這樣的端面輸送輥子8、9亦即直進輥子R1 及傾斜輥子R2，係其外周面有施作止滑加工Η。 被液中輸送的基板材A，係在傾斜輥子R2受到拉引張 f 力，同時在顯影液、蝕刻液、剝離液等之處理液B、或依 處理而融化的感光性保護膜等之粘性而處在容易滑動的狀 況。 可是此種的狀況，係用止滑加工Η來克服。基板材A 係被施作有止滑加工Η的端面輸送輥子8、9亦即直進輥子 R 1或傾斜輥子R2，從上下確實地把持，所以形成一邊防止 滑動，一邊穩定地在液中被水平輸送。 【圖式簡單說明】 ^ ' 第1圖係關於本發明基板材之輸送設備，提供用以實 施發明之最佳形態的說明，第1圖（1)係整體之正剖面圖、 第1圖（2)係左側之端面輸送輥子之平面說明圖、第1圖（3) 係右側之端面輸送輥子之平面說明圖。 第2圖係提供用以實施同一發明之最佳形態的説明’ 爲第1圖（1)之要部放大圖。 第3圖係提供用以實施同一發明之最佳形態的說明， 爲端面輸送輥子之組合模式的平面說明圖’第3圖（1)表示 200843019 其1例之要部，第3圖（2)係表示其他例之要部。 第4圖係提供說明用以實施同一發明之最佳形態，整 體之側剖面說明圖。 【主要元件符號說明】 1 表 面 處 理 裝 置 2 處 理 室 3 輸 送 設 備 4 噴 霧 嘴 5 藥 液 槽 6 貯 槽 7 框 架 區 劃 壁 8 端 面 輸 送 輥 子 (上） 9 端 面 輸 送 輥 子 (下） 10 泵 11 配 管 12i 、 122 軸 13 傳 動 齒 輪 14 驅 動 齒 輪 15 驅 動 軸 A 基 板 材 B 處 理 液 C 輸 送 方 向 D 電 路 形 成 面 E 兩 側 丄山 m 面 -22 - 200843019 F 寬度方向 R1 直進輥子 R2 傾斜輥子 H 止滑加工The end face transporting rollers 8, 9 formed by / X K are oriented only slightly at the right and left sides in the conveying direction C, and the end face conveying rollers different from the conventional example are rotated slightly outward in the conveying direction C. In addition, as for the inclined roller R2, it is also possible to use "two angles, or use more angles." The straight feed roller R 1 or the inclined roller R2 of the end face transport rollers 8, 9 is shaped like this. <Regarding various combinations of modes> -16- 200843019 Further, in the conveying apparatus 3, such a straight-rolling roller R1 and a tilting roller R2 are used as the left and right end-face conveying rollers 8, 9 but the combination mode can be various. . In other words, any combination of the straight feed roller R1 and the inclined roller R2 can be used as the upper end end transport roller 8 or the lower end end transport roller 9, or any one of them can be used as the right side or the left side, and the like. Combinations can take into account various modes. Further, the upper and lower end surface conveying rollers 8, 9 can also be mixed with each other in a single or plural number in the conveying direction C. ' I will elaborate on this combination mode. First, in the mode shown in Fig. 3 (1), the inclined roller R 2 is used as all of the upper left end end conveying rollers 8', and the straightening roller R1 is used as the lower left end conveying roller 9 on the left side. The straight feed roller R1 is used together as the upper upper and lower end transport rollers 8, 9. Of course, it is also possible to make the opposite mode or the opposite mode. Next, in the mode shown in Fig. 1 (1) or Fig. 3 (2), the inclined roller R2 is used as the left and right upper end end transport rollers 8, and the straight feed roller / R 1 is used as the left and right lower end faces to transport the lepton. 9. Of course, it can also make it the opposite mode. That is, (a) the upper end conveying roller 8 is the inclined roller R2, and the lower end conveying roller 9 is the combination of the straight feeding roller R1, and conversely (b) the upper end conveying roller 8 is the straight feeding roller R1 and the lower side The roller 9 is a combination of the inclined rollers R2, and (C) the upper and lower end surface conveying rollers 8 and 9 are simultaneously a combination of the inclined rollers R2, and conversely, (d) the upper and lower end conveying rollers 8 and 9 are simultaneously a combination of the straight feeding rollers R1 and the like. According to this, combinations of (a), (b), (c), and (d) 200843019 are applied to the right side and the left side, respectively, and various modes can be considered. On the other hand, the upper and lower end transport rollers 8 and 9 respectively combine the straight feed roller R 1 and the inclined roller R2 in the transport direction C, for example, every other, every two, every three, and combine them accordingly. Applicable to the right and left sides, and can be used in various modes. Such a combination mode can be unified into a regular pattern, but it can also be an irregular piece of the pattern, and can be freely selected. In this way, various combinations of modes can be considered. I <About the anti-slip processing 其次> Next, referring to Fig. 2, the anti-slip processing of the end-face conveying rollers 8, 9 will be described. In the conveying device 3 of the base sheet, the end face conveying rollers 8, 9 used are provided as a slip-stop process. In other words, the straight feed roller R 1 or the inclined roller R2 used as the end face transport rollers 8 and 9 is subjected to the anti-slip processing on the outer peripheral surface in contact with the base sheet weir. ^ ^ The details of the sliding processing of the end face conveying rollers 8, 9 are described in detail. The anti-slip processing is formed, for example, by embossing or stencil-like fine slanting or lateral embossing of the embossed mesh, and is applied to the entire outer peripheral surface of the end surface conveying rollers 8 and 9. Further, the base plate conveyed by the liquid is surely held by the upper and lower grips, and therefore, the function of sliding due to the tension of the inclined roller R2 is surely prevented. In addition, the shape of the anti-slip processing, the degree of roughness of the pattern, and the mesh are -18-200843019, etc., and are not limited to the examples of the drawings, and can be in various other forms and the like. The anti-slip processing system is formed as such. <Operation and the like> The conveying apparatus 3 of the surface treating apparatus 1 of the base sheet of the present invention is constructed as described above. Then, the surface treatment apparatus 1 is used in the manufacturing process of the electronic circuit board, and the base material A is surface-treated by the processing liquid B. In other words, in the manufacturing process of the flexible substrate and the other extremely thin and flexible flexible substrate, the substrate B is transported while the processing liquid B is ejected from the spray nozzle 4 to perform surface treatment for forming an electronic circuit. (2) Further, the transport device 3 and the spray nozzle 4 are disposed in the chemical solution tank 5 filled with the treatment liquid B. Then, the treatment liquid B ejected from the liquid in the spray nozzle 4 is placed in the treatment liquid B of the chemical solution tank 5, and then the circuit formation surface D of the base material A conveyed by the liquid in the transport apparatus 3 is directly irradiated. Surface treatment. Since the post-treatment liquid B is reflected and absorbed in the treatment liquid B of the chemical solution tank 5, I / / does not form a turbulent flow or accumulation liquid on the circuit formation surface D. (3) Further, in the conveying device 3, the left and right end face conveying rollers 8, 9 hold only the left and right end faces E of the non-circuit forming surface of the base material A for conveying. Therefore, the circuit of the base material A forms the surface D, so that scratches, scratches, and damage are not caused by the contact during transportation. (4) In the conveying apparatus 3, as the left and right end face conveying rollers 8, 9, a combination of the straightening roller R1 toward the conveying direction C and the inclined roller R2 slightly inclined from the conveying direction C to the outside is used. -19- 200843019 (5) Then, the base plate A conveys the tension roller R2 of the rollers 8 and 9 at the end faces, and applies tension to the left and right width directions F, and also uses the buoyancy of the treatment liquid B while pulling with tension to tighten The state maintains a horizontal posture. That is, the base sheet A is drawn at least to the left and right of the inclined roller R2, and the other straight roller R1 or the inclined roller R2. In this manner, the base sheet material A, which is maintained in the horizontal posture, is conveyed toward the front and rear conveying directions C by the end surface conveying rollers 8, 9, that is, the straight feeding rollers R1 and the inclined rollers R2. (6) The base material A is made to be extremely thin and soft, and is transported in the liquid and sprayed in the liquid, and is sandwiched between the end faces E of both sides of the narrowing gap and the grip margin of the holding margin. The transfer can also prevent shaking or snakes. The base plate A is still transported in a horizontal position for pulling, but does not prevent the spray pressure or weight of the treatment liquid B from being shaken up and down, or the conveying device is added. The assembly disadvantage is that it is meandering in the left and right width directions. (7) Then, in order to prevent such shaking or meandering, the combination mode of the end face/K conveying rollers 8, 9 and the straight roller R 1 and the inclined roller R2 is For example, if the delivery of the base plate is up to several meters to several tens of meters, it is not easy to homogenize the conveyor equipment for 3 times and full length. There will be many cases where the base plate A is meandering on the way. In such a case, in order to correct the meandering, for example, the base plate A is easily approached to the right side, the inclined roller R2 or the like is used on the left side, and the appropriate mode combination according to the case is from the majority combination mode. -20 - 200843019 (8) In addition, according to such a combination, only the inclined roller R2 is used as the upper and lower end surface conveying rollers 8, 9, so that the base material A is conveyed toward the conveying direction C while being pulled in the conveying direction. The outer side of the C is slightly inclined, whereby the base material A can be horizontally conveyed in the conveying direction C in the pulled state. (9) Moreover, such end conveying rollers 8, 9 are the straight feeding roller R1 and the inclined roller. R2 is applied to the outer peripheral surface to perform the anti-slip processing. The base material A conveyed by the liquid is subjected to the pulling force of the inclined roller R2, and the treatment liquid B of the developing solution, the etching liquid, the stripping liquid, etc. Or the viscous protective film or the like which is melted by the treatment is in a state of being easily slid. However, such a condition is overcome by the anti-slip processing. The base sheet A is applied to the end surface of the anti-slip processing crucible. The conveyance rollers 8 and 9, that is, the straight feed roller R 1 or the inclined roller R2 are held firmly from above and below, so that they are stably conveyed horizontally in the liquid while preventing slippage. [Simplified illustration] ^ ' Fig. 1 About this A description of the best mode for carrying out the invention is provided for the conveying apparatus of the base plate. Fig. 1 (1) is a front sectional view of the whole, and Fig. 1 (2) is a plan explanatory drawing of the end surface conveying roller of the left side, and the first Fig. 3 is a plan explanatory view of the end surface conveying roller on the right side. Fig. 2 is an explanatory view for providing the best mode for carrying out the same invention 'is an enlarged view of the main part of Fig. 1 (1). Fig. 3 is provided The explanation for the best mode for carrying out the same invention is a plan explanatory diagram of a combination mode of the end surface conveying rollers. FIG. 3(1) shows a main part of one example of 200843019, and FIG. 3(2) shows another example. Fig. 4 is a side cross-sectional explanatory view showing the best mode for carrying out the same invention. [Main component symbol description] 1 Surface treatment device 2 Processing chamber 3 Conveying device 4 Spray nozzle 5 Chemical solution tank 6 Storage tank 7 Frame partition wall 8 End conveyor roller (top) 9 End conveyor roller (bottom) 10 Pump 11 Piping 12i, 122 Shaft 13 Drive gear 14 drive Moving gear 15 Drive shaft A Base plate B Treatment liquid C Transmission direction D Circuit Forming surface E Two sides Lushan m surface -22 - 200843019 F Width direction R1 Straight forward roller R2 Inclined roller H Slippage processing