JP4268187B2 - Conveyor for surface treatment equipment - Google Patents

Description

  The present invention relates to a conveyor of a surface treatment apparatus. That is, the present invention relates to a conveyor of a surface treatment apparatus used in a substrate manufacturing process.

《Technical background》
Circuit boards used in electronic devices are remarkably progressing in miniaturization, weight reduction, ultrathinning, and flexibility, and circuits to be formed are remarkably miniaturized and densified. And in the manufacturing process of a board | substrate, the surface treatment apparatus is used and the board | substrate material is surface-treated with a chemical | medical solution, a washing | cleaning liquid, etc.

<Conventional technology>
In this type of surface treatment apparatus, a chemical solution, a cleaning solution, or the like is sprayed from a spray nozzle while a substrate material is horizontally conveyed by a conveyor, and thus surface treatment is sequentially performed to form a circuit and manufacture a substrate. FIGS. 6A and 6B are explanatory views of a main part of the conveyor of the surface treatment apparatus of this type of conventional example. FIG. 6A shows one example, and FIG. 6B shows another example.
As shown in the figure, in the surface treatment apparatus 1, as shown in FIG. 6 (1), the straight roller 3 is used as a conveying roller as the conveyor 2 for the substrate material A, and the front and rear conveying direction B is used. As shown in FIG. 6 (2), a type in which the wheels 4 are used as a conveyance roller and a type in which the wheels 4 are arranged at a constant pitch so as to be engaged in the front-rear conveyance direction B is typically used. It was. In the figure, 5 is a rotation drive shaft.
On the other hand, the present inventor and the applicant have invented and developed a type of conveyor that employs a wave roller as a transport roller and is arranged in the transport direction, and applied for a patent as Japanese Patent Application No. 2005-135522.

《Information on prior art documents》
This Japanese Patent Application No. 2005-135522 is published as the following Patent Document 1.
JP 2006-312515 A

By the way, the following point was made into the subject about such a prior art example.
<First issue>
First, the conventional conveyor 2 using the straight roller 3 has been pointed out that a problem of winding of the substrate material A is likely to occur.
That is, since the substrate material A is extremely thin and soft, and is wet with a chemical solution or the like, the substrate material A is easily wound around the straight roller 3, thereby hindering the stable conveyance of the substrate material A and causing a conveyance trouble. It was the cause. Further, it has been pointed out that the substrate material A enters the front and rear gaps between the straight rollers 3 due to the pressure and weight of a chemical solution or the like and cannot cross the straight rollers 3.

<Second issue>
Secondly, the conventional conveyor 2 using the wheel 4 does not cause such a problem of wrapping or crossing, but it is pointed out that the substrate material A is liable to be broken. It had been.
That is, a gap space is indispensably present between the front, rear, left, and right wheels 4 in terms of structure, and the soft substrate material A that is weak and soft has a corner of the end that comes into the gap space. There are many cases where it hangs down due to pressure or weight, and it breaks at a corner. From this aspect, problems in stable conveyance have been pointed out.

<Third issue>
Thirdly, the conventional conveyor 2 using the wheel 4 has also been pointed out that the substrate material A is easily distorted and adversely affects the surface treatment accuracy.
That is, each wheel 4 is disposed on the rotary drive shaft 5 at a constant pitch interval, and the soft substrate material A with a weak waist is greatly distorted in a large wave shape up and down due to the pressure and weight of a chemical solution, Therefore, it has been pointed out that the flow of chemicals and the like on the surface of the substrate material A is hindered, and the etching accuracy and other surface treatment accuracy are lowered. Furthermore, a problem has been pointed out that the substrate material A is rubbed with the wheel 4 to make a mark.

<Fourth issue>
Fourthly, the technique of Patent Document 1 that employs a wave roller is an excellent technique that has solved the first, second, and third problems of the conveyor 2 that uses the straight roller 3 and the wheel 4.
However, when the substrate material A is extremely thin with a plate thickness of 25 μm or less, the substrate material A sometimes enters and drops into the front and rear gaps of about 0.5 mm to 1.0 mm between the wave rollers. That is, due to the flexibility of the substrate material A, the pressure of the chemical solution, the weight, and the like, a drop accident cannot be completely prevented, which has been a problem in stable conveyance.

<Fifth issue>
Fifth, regarding the technique of Patent Document 1, when the substrate material A is extremely thin but the plate thickness is still relatively large, the contact area between the substrate material A and the wave roller becomes insufficient. There was an indication that there was something. That is, the wave pitch of the wave roller is about 75 mm, and when the substrate material A is relatively hard, the top surface area of the wave convex portion rotating in contact with the substrate material A may be insufficient. Therefore, it may be desired to secure the conveyance capability as a conveyor.

<< About the present invention >>
The conveyor of the surface treatment apparatus of this invention is made | formed in order to solve the subject of the said prior art example in view of such a situation.
And the present invention relates to the substrate material to be conveyed, firstly, winding is prevented, secondly, corner breakage is also prevented, thirdly, distortion and marks are prevented, and fourthly, falling Fifthly, the object of the present invention is to propose a conveyor for a surface treatment apparatus that improves the conveying ability, and sixthly, avoids warping and curling and improves the lower spray efficiency.

<About Claim>
The technical means of the present invention for solving such a problem is as follows. First, claim 1 is as follows.
The conveyor of the surface treatment apparatus according to claim 1 is used in a surface treatment apparatus for carrying out surface treatment while conveying a substrate material during a substrate manufacturing process, and a plurality of conveying rollers are alternately arranged with free rollers for each rotary drive shaft. Installed.
The conveying roller is mounted and fixed at a predetermined pitch in the left-right direction on the rotation drive shaft disposed in the left-right direction with the axial direction thereof, and is driven to rotate by the rotation drive shaft.
The free roller has the same thickness in the left-right direction as the transport roller, fills the left-right gap pitch space between the transport rollers, and is freely attached to the rotary drive shaft. The posture is maintained without being driven to rotate.
Claim 2 is as follows. According to a second aspect of the present invention, in the conveyor according to the first aspect, the conveying rollers and the free rollers attached to the rotary drive shaft form an upper and lower wave curved surface as a whole. In the wave curved surface, a large number of tapered irregularities are repeatedly formed in a small wave shape at a constant pitch and height in the left-right direction.

Claim 3 is as follows. According to a third aspect of the present invention, in the second aspect, the rotational drive shafts are arranged in pairs in the upper and lower directions and are arranged in multiple rows in the front and rear conveying directions. The conveying roller and the free roller are arranged to face each other without any gap in a vertical pair and to be opposed to each other without any gap in the front and rear conveying directions.
Claim 4 is as follows. In a conveyor according to a fourth aspect, in the third aspect, the conveying roller has a short cylindrical shape with a horizontal axis, and an outer peripheral surface has a convex curved shape. The free roller has an arc shape corresponding to the conveying roller at the upper and lower sides, a notch arc shape corresponding to the conveying roller at the front and the rear, and an outer peripheral surface having a concave curved shape. Further, the convex curved shape of the upper and lower outer peripheral surfaces of the conveying roller forms the convex of the wave curved surface, and the concave curved shape of the upper and lower peripheral surfaces of the free roller forms a concave of the wave curved surface, And
Claim 5 is as follows. According to a fifth aspect of the present invention, in the conveyor according to the third aspect, the adjacent upper and lower conveying rollers and the front and rear conveying rollers overlap each other at the position of the intervening free roller. It is characterized by this.

Claim 6 is as follows. The conveyor according to a sixth aspect is the conveyor according to the third aspect, wherein the substrate material is sandwiched between the upper and lower transport rollers and the free roller, and is received between the front and rear transport rollers and the free roller. It is conveyed while being delivered. Accordingly, the substrate material is characterized in that the curved uneven shape is wave-formed based on the wave curved surface, and the substrate is correspondingly stretched to give strength.
Claim 7 is as follows. The conveyor according to claim 7 is the conveyor according to claim 3, wherein the conveying roller and the free roller have the same thickness in the left-right direction, and the difference between the maximum diameter and the minimum diameter of the outer periphery is 0.5 mm, respectively. It is set to be 5 mm or less. Further, the left-right pitch between the transport rollers and the front-rear pitch between the rotary drive shafts are set to have substantially the same size.
Claim 8 is as follows. According to an eighth aspect of the present invention, in the third aspect, the surface treatment apparatus is used in a development process, an etching process, a peeling process, a cleaning process, or a drying process in the substrate manufacturing process. In the surface treatment apparatus, a developer, an etching solution, a stripping solution, a cleaning solution, or drying air is sprayed from above and below. Further, the substrate material is characterized by comprising a flexible substrate material or other ultra-thin and flexible substrate material.

<About the action>
Since the present invention comprises such means, the following is achieved.
(1) This surface treatment apparatus is used in a substrate manufacturing process.
(2) The conveyor has a wave curved surface formed by conveying rollers and free rollers alternately mounted on the rotation drive shaft, and is opposed to the gap without any gap.
(3) Accordingly, the substrate material is transferred between the front and rear transport rollers and the free rollers while being sandwiched between the upper and lower transport rollers and the free rollers.
(4) Thus, the substrate material is formed with a corrugated concave-convex shape so that it can be stretched and given strength.
(5) Therefore, the substrate material that has been weak and flexible has the strength to withstand the pressure and weight of a chemical solution or the like.

(6) Now, in this conveyor, first, by applying strength to the substrate material, removing the free roller, and storing the chemical solution etc. on the lower free roller, Winding is prevented.
Secondly, the substrate material is prevented from being bent by giving strength to the substrate material and eliminating the front-rear gap and the left-right gap pitch space between the transport rollers by the free roller.
Third, the substrate material is prevented from being distorted by providing strength to the substrate material and eliminating the left and right gap pitch space between the transport rollers by the free roller and supporting the lower surface of the substrate material. In addition, accumulation of a lower chemical solution or the like is added, and rubbing of the substrate material is avoided.
Fourth, the substrate material is smoothly transported by imparting strength to the substrate material, the absence of a front-rear gap between the front and rear transport rollers and the free roller, and the overlap of the front and rear transport rollers.
Fifth, since the conveyance roller and the free roller are alternately arranged, the contact area between the conveyance roller and the substrate material is increased.
Sixth, by imparting strength to the substrate material, warping, curling, and the like are prevented, and the lower spray zone can be set as appropriate.
(7) Then, the conveyor of the surface treatment apparatus of this invention exhibits the following effect.

<< First effect >>
First, a substrate material winding accident is prevented. That is, in the conveyor according to the present invention, first, the substrate material can be stiffened by the formation of corrugated irregularities, and the free roller exhibits a peeling function. A reservoir is formed to float the substrate material.
Thus, as in the above-described conventional example, an accident in which the substrate material is wound around the conveyance roller is prevented, so that stable conveyance of the substrate material is realized and conveyance trouble is avoided.

<< Second effect >>
Secondly, corner breakage of the substrate material is also prevented. That is, in the conveyor of the present invention, first, the substrate material is stiff and given strength, and further, the front and rear gaps and the left and right gaps between the transport rollers are filled with free rollers. The left-right gap pitch space between the conveying rollers fixed and attached to the rotational drive shaft in the left-right direction is filled with free rollers having the same thickness in the left-right direction as the conveying rollers.
Therefore, as in the conventional example of this type described above, an accident in which the end portion of the substrate material is bent in the gap space is prevented, and also from this surface, stable conveyance is realized and occurrence of conveyance trouble is avoided.

《Third effect》
Third, distortion and traces of the substrate material are also prevented. That is, in the conveyor of the present invention, the substrate material can be stiffened and given strength, the left and right gaps between the transport rollers are filled with free rollers, and the lower surface is supported by the free rollers. The left and right gap pitch space between the conveying rollers is filled with a free roller having the same thickness in the left and right direction as the conveying rollers. The lower surface of the substrate material is also supported by free rollers.
Thus, unlike the above-described conventional example, the substrate material is not greatly distorted up and down, so that a smooth flow of a chemical solution or the like on the outer surface of the substrate material is ensured, and etching accuracy and other surfaces are ensured. Processing accuracy is improved. In addition, a storage of chemicals or the like is formed near the lower free roller, and friction with the substrate material and generation of traces are avoided.

<< 4th effect >>
Fourth, the fall of the substrate material is surely prevented. That is, in the conveyor of the present invention, the substrate material can be stiff and given strength, and the front and rear transport rollers and the free roller are opposed to each other without a front and rear gap, and the front and rear transport rollers overlap. .
As a result, the substrate material is smoothly transferred and transferred in the transfer direction, and the falling accident is eliminated and stable transfer is realized as compared with the above-described conventional example.

《Fifth effect》
Fifth, the conveyance capacity of the substrate material is also improved. That is, in the conveyor of the present invention, the conveyance rollers and the free rollers are alternately arranged, and the contact rotation area with the substrate material is greatly increased as compared with the above-described conventional example, so that the conveyance capability is excellent. The conveyance power is improved.

<< Sixth Effect >>
Sixth, warping or curling of the substrate material is avoided, and the lower spray efficiency is improved. In other words, in the conveyor according to the present invention, the substrate material is stiff and imparted with strength, thereby preventing the occurrence of warping, curling, wrinkling, turning, bending, bending, etc., and stable conveyance is also realized from this surface. . In addition, it is possible to efficiently and quickly realize spraying of a chemical liquid or a cleaning liquid on the lower surface of the substrate material.
As described above, the effects exerted by the present invention are remarkably large, such as all the problems existing in this type of conventional example are solved.

《About drawing》
Hereinafter, the conveyor of the surface treatment apparatus of this invention is demonstrated in detail based on the best form for implementing invention shown in drawing.
1 to 4 are used to explain the best mode for carrying out the present invention. FIG. 1A is a front sectional view of the conveying roller and the like, and FIG. 1B is a front sectional view of the main part of the conveyor. FIG. 2 is a plan view of the main part of the conveyor. (1) in FIG. 3 is an exploded side view of the main part of the conveyor, (2) is a side view of the conveying roller, (3) is a side view of the free roller, and (4) is a side view of the conveyor. It is an enlarged side view of the principal part. FIG. 4 is an explanatory front sectional view of the surface treatment apparatus. FIG. 5 is an explanatory side view of the surface treatment apparatus.

<About the board>
The surface treatment apparatus 6 of the present invention is used in a substrate manufacturing process. First, the substrate will be described.
Circuit boards such as printed wiring boards used in electronic devices have made remarkable progress in miniaturization and weight reduction, ultrathinning, microcircuits, high density circuits, and multilayers. The circuit board is also harder and softer than conventional rigid boards such as rigid boards, and the development and increase of flexible boards and other ultra-thin and flexible flexible boards is remarkable, and semiconductor packages in which semiconductor components are integrated with the circuit are integrated. The spread of substrates is also rapid.
Therefore, as recent substrate requirements, the plate thickness is reduced to about 50 μm to 25 μm and further to a level of 25 μm or less, and the circuit width and inter-circuit space are reduced to about 30 μm to 20 μm and further to 15 μm, respectively. It has been miniaturized.
Such a substrate is manufactured, for example, by following the following manufacturing process. That is, after applying or pasting a photosensitive resist on the outer surface of the substrate material A made of a copper-clad laminate, and then exposing by applying a negative film of a circuit, developing a resist other than a circuit forming portion by development After dissolving and removing the copper foil other than the circuit forming portion by etching, removing the resist of the circuit forming portion by stripping the copper foil on the outer surface of the substrate material A with the copper foil A circuit is formed and then a substrate is manufactured.
The substrate is like this.

<< About the surface treatment apparatus 6 >>
The surface treatment apparatus 6 is used in such a substrate manufacturing process, and surface-treats the substrate material A with a chemical solution C or the like. First, the surface treatment apparatus 6 (1) will be generally described with reference to FIGS.
The surface treatment apparatus 6 (1) is used as a developing apparatus, an etching apparatus, a peeling apparatus, a cleaning apparatus, or a drying process in a manufacturing process of a substrate, for example, in a developing process, an etching process, a peeling process, a cleaning process, or a drying process. Is done. In each processing chamber 7, for example, a chemical solution C such as a developing solution, an etching solution, and a peeling solution, a cleaning solution, and a drying solution are supplied from the spray nozzle 9 and the like to the substrate material A conveyed by the conveyor 8 (2). Air or the like (hereinafter simply referred to as “chemical solution C” or the like) is sprayed, and the substrate material A is subjected to surface treatment such as chemical treatment, cleaning treatment, and drying treatment.

A typical example of the surface treatment apparatus 6 (1) is that the treatment chamber 7 includes a conveyor 8 (2), a spray nozzle 9, a liquid tank 10, and the like.
A large number of spray nozzles 9 are disposed directly above and below the substrate material A that is horizontally conveyed by the conveyor 8 (2), and thus are opposed to the circuit forming surface of the substrate material A with a vertical space therebetween. A large number of rows are arranged at predetermined pitch intervals across the front-rear conveyance direction B and the left-right width direction D. In addition, in the spray zone E in which the spray nozzle 9 is disposed, the disposition of the conveyor 8 (2) is lacking.
The chemical solution C and the like are pumped from the liquid tank 10 below the processing chamber 7 to each spray nozzle 9 via the pump 11 and the pipe 12 and sprayed onto the substrate material A. And after surface-treating the outer surface of the board | substrate material A toward the left-right width direction D, it flows down from the right-and-left both sides of the board | substrate material A, is collect | recovered by the liquid tank 10, and is used after circulation. The spray nozzle 9 shown in the figure is disposed so as to face both the front and back surfaces of the substrate material A. However, when the substrate material A is a single-sided substrate whose circuit forming surface is only on one side, the spraying nozzle 9 is arranged only on one side. There may be cases where it is installed.
The surface treatment apparatus 6 is as described above.

<< About the outline of the conveyor 8 >>
Hereinafter, the conveyor 8 of the surface treatment apparatus 6 of the present invention will be described with reference to FIGS.
This conveyor 8 is used in the surface treatment apparatus 6 that performs surface treatment while horizontally conveying the substrate material A during the substrate manufacturing process, and a large number of conveying rollers 13 are provided in each of the rotational drive shafts 14 in the left-right width direction D. The free rollers 15 are alternately mounted.

These will be further described in detail. First, the rotational drive shafts 14 are arranged with the axial direction thereof directed in the left-right width direction D. The rotational drive shafts 14 are vertically paired except for the spray zone E (see FIG. 5), and are arranged in multiple rows in the front-rear transport direction B. ing. Each is connected to a drive source such as a motor via a drive mechanism 16 such as a gear or a shaft.
Next, a large number of conveyance rollers 13 are attached and fixed to the respective rotational drive shafts 14 and are rotationally driven by the rotational drive shafts 14. And while making the horizontal-axis short cylinder shape and disk shape, the whole outer peripheral surface protrudes in the convex-curved shape 17, and the whole has comprised substantially donut shape.
The dimensional relationship of the transport roller 13 is such that the diameter is about 10 mm to 30 mm, for example, the large diameter is 25 mm and the small diameter is 23 mm, and one pitch in the left-right width direction D via the free roller 15 of the same thickness is 25 mm (that is, The thickness is about 12.5 mm). Note that the size of the substrate material A in the left-right width direction D is, for example, about 800 mm, and the conveyance roller 13 and the like are disposed between the left and right sizes corresponding to the size.
And the conveyance roller 13 considers that the outer peripheral surface makes the convex curve shape 17, and the difference of the large diameter and a small diameter is about 0.5 mm-5 mm. In addition, one pitch in the left-right width direction D of the transport roller 13 is approximately the same as one pitch in the front-rear transport direction B between the rotation drive shafts 14.
By setting these numerical values, the environment setting is optimum for stable conveyance of the substrate material A.

Next, each free roller 15 fills the left and right gap space between the transport rollers 13 and is freely attached to the rotation drive shaft 14, and maintains its posture without being driven to rotate by the rotation drive shaft 14. . The free roller 15 has an arc shape corresponding to the conveying roller 13 at the top and bottom, a notch arc shape corresponding to the conveying roller 13 at the front and rear, and a concave curved shape 18 at the outer peripheral surface.
That is, a typical example of the free roller 15 is a convex shape with a horizontal axis short cylindrical shape having the same dimensions as the transport roller 13 and a wall thickness in the left-right width direction D having the same dimensions as the transport roller 13. It is processed into a concave curved shape 18 instead of being processed into a curved shape 17, and has a shape in which front and rear portions are notched in a reverse arc shape corresponding to the circular arc of the conveying roller 13. In such a free roller 15, the rotational drive shaft 14 is loosely inserted in the horizontal through-hole, and the transport roller 13 is opposed to the front and rear, so that the posture is always kept stationary. In the figure, reference numeral 19 denotes a conveyor frame that holds the rotary drive shaft 14.
The conveyor 8 is roughly like this.

<< Wave curved surface F etc. of conveyor 8 >>
The conveyor 8 includes the rotational drive shaft 14, the transport roller 13, the free roller 15, and the like, and is disposed as follows, thereby forming a wave curved surface F.
First, the transport roller 13 and the free roller 15 are disposed in a relationship in which they are opposed to each other without any gap in a vertical pair and are opposed to each other in the front-rear transport direction B without a gap. That is, the convex curve 17 on the outer peripheral surface of the transport roller 13 and the concave curve 18 on the outer peripheral surface of the free roller 15 are opposed to each other without a gap.
In addition, by attaching a large number of conveying rollers 13 and free rollers 15 to one rotational drive shaft 14 instead of attaching a single conveying roller, the path to the opposing positional relationship without a front-rear gap in this way is provided. As soon as it opens. Now, there is a slight overlap between the adjacent upper and lower transport rollers 13 and between the adjacent front and rear transport rollers 13 at the position of the intervening free roller 15 so as to slightly bite up and down and front and rear. . That is, the adjacent conveyance rollers 13 overlap each other by the amount of the convex curve 17.

In this way, the transport rollers 13 and the free rollers 15 attached to the respective rotation drive shafts 14 form an upper and lower wave curved surface F as a whole.
That is, when observing one rotation drive shaft 14, the convex and concave portions 17 on the upper and lower outer peripheral surfaces of the conveying rollers 13 form the convex surface of the wave curved surface F, and the concave and convex shapes 18 on the upper and lower outer peripheral surfaces of the free rollers 15. However, the concave portion of the wave curved surface F is formed, and the wave curved surface F is formed vertically by these aggregates. In the formed wave curved surface F, a large number of tapered irregularities are continuously formed with a constant pitch and height in the left-right width direction D while being repeatedly inverted up and down in a small wave shape.
The wave curved surface F of the conveyor 8 is as described above.

《Action etc.》
The conveyor 8 of the surface treatment apparatus 6 of the present invention is configured as described above. Therefore, it becomes as follows.
(1) The surface treatment apparatus 6 is used in a substrate manufacturing process, and surface-treats the substrate material A with a chemical solution C or the like. That is, a circuit is formed by spraying a chemical solution C or the like from a spray nozzle 9 while transporting an ultra-thin and flexible substrate material A on a conveyor 8 while being used in a manufacturing process of a flexible substrate and other ultra-thin flexible substrates. Surface treatment for

(2) In this conveyor 8, a large number of conveying rollers 13 are attached to the respective rotational drive shafts 14, and are alternately attached in the left-right width direction D via free rollers 15.
Then, each conveying roller 13 and free roller 15 form an upper and lower wave curved surface F for each rotation drive shaft 14, and each conveying roller 13 and free roller 15 in the vertical direction and the front and rear conveying direction B have no gap. There is a relationship of facing each other. Adjacent transport rollers 13 are in a positional relationship where the free rollers 15 slightly overlap each other.

  (3) Therefore, the substrate material A is sandwiched between the upper and lower transport rollers 13 and the free roller 15 of the conveyor 8 and is also transferred between the front and rear transport rollers 13 and the free roller 15. It is conveyed while.

(4) Therefore, the substrate material A has a large number of curved irregularities based on the wave curved surface F, and is waved and formed in a small wave shape (see FIGS. 1 (2) and 4). Is granted. Since the pitch of the conveying roller 13 is as small as about 25 mm and the difference between the large diameter and the small diameter of the conveying roller 13 is about 5 mm or less, the wave surface F of the wave and the wave of the substrate material A also have gentle small curves with small height differences. Many are formed while drawing.
Now, the substrate material A has a load resistance as compared with the case of a flat planar shape due to the curved uneven shape (so-called substantially tin shape) which is formed in a small number in the left-right width direction D in this manner. Is greatly enhanced.

  (5) Although the substrate material A has a very thin tendency and is soft and flexible, and the chemical liquid C or the like is injected with an injection pressure or weight (for example, an injection pressure of 31 kg), such a curve The formation of the corrugated undulations provides strength that can sufficiently withstand these. In particular, since the copper foil other than the circuit forming portion is removed after the etching step, the substrate material A becomes extremely thin and flexible, but it can sufficiently withstand this.

(6) Now, according to the conveyor 8 employed in the surface treatment device 6, the following first, second, third, fourth, fifth and sixth are obtained.
First, the substrate material A to be transported is stretched and given strength by forming a corrugated shape with fine curved irregularities (see FIGS. 1 (2) and 4). Furthermore, the free roller 15 that is not driven to rotate exhibits the winding and peeling function. Further, a reservoir G for the chemical solution C or the like is formed around the vicinity of the lower free roller 15 (see FIG. 3 (4)), and the substrate material A is conveyed so as to float.
By such waist, peeling, and storage G, the substrate material A is reliably prevented from being wound around the transport roller 13 (comparative to the conventional example of FIG. 6A).

Secondly, the substrate material A to be transported can be stretched and given strength as described above. Further, the left and right gaps in the left-right width direction D between the transport rollers 13 are filled with the free rollers 15.
That is, the left and right gap pitch space between the conveying rollers 13 fixedly attached to the rotational drive shaft 14 in the left-right width direction D is fixed by the free rollers 15 having the same thickness in the left-right width direction D as the conveying rollers 13. Buried. At the same time, the conveyance roller 13 and the free roller 15 in the front-rear conveyance direction B are also opposed to each other without a front-rear gap (see FIG. 2).
Due to the absence of the waist and the gap, the end of the substrate material A is reliably prevented from being bent (comparative to the conventional example of FIG. 6B).

Thirdly, the substrate material A to be transported is stiff and given strength as described above. Further, the left and right gaps between the transport rollers 13 are filled with free rollers 15, respectively.
That is, the left and right gap pitch space between the conveying rollers 13 fixedly attached to the rotational drive shaft 14 in the left-right width direction D is fixed by the free rollers 15 having the same thickness in the left-right width direction D as the conveying rollers 13. Buried. Further, the lower surface of the substrate material A is supported by each of such free rollers 15 (see FIG. 1, (2), FIG. 2, etc.).
By such waist and support, the substrate material A is not greatly distorted up and down, and on the outer surface of the substrate material A, a smooth flow of the injected chemical liquid C and the like in the left-right width direction D is ensured. (Comparison with the conventional example in FIG. 6 (2)). Further, since the storage G of the chemical solution C is formed around the vicinity of each free roller 15 in the lower stage (see FIG. 3 (4)), the free roller 15 and the substrate material that maintain the stationary posture are also added. Rubbing between A is also avoided.

  Fourthly, the substrate material A to be transported is stiff and has strength as described above. Further, the transport roller 13 and the free roller 15 in the front-rear transport direction B are opposed to each other without a front-rear gap, and the adjacent transport rollers 13 in the left-right width direction D overlap so as to bite each other. (See FIG. 2 etc.). The substrate material A is smoothly transferred and transferred in the front-rear transport direction B between the front-rear transport rollers 13 and the free rollers 15 due to such waist, no gap and overlap.

  Fifthly, the conveying roller 13 and the free roller 15 are alternately attached to the rotary drive shaft 14 with, for example, the same wall thickness (see FIG. 1 (1), (2), FIG. 2, etc.). reference). Accordingly, a large contact area between the transport roller 13 and the substrate material A to be transported is ensured and the transport capability is improved.

Sixth, the substrate material A to be transported can be stretched and given strength as described above. Therefore, the substrate material A is transported without warping, curling, wrinkling, turning, bending, bending, or the like. Even on a single-sided substrate that easily curls, the curling is reliably prevented.
Further, even if one or two of the lower rotational drive shafts 14 are removed and the conveying roller 13 and the free roller 15 are not provided, the substrate material A can be reliably conveyed. That is, even if the spray zone E (see FIG. 5) is appropriately provided on the lower side, the substrate material A can be reliably passed to the next, so that a large number of spray zones E can be set. The spray efficiency of the chemical liquid C by the spray nozzle 9 is improved.

About the conveyor of the surface treatment apparatus which concerns on this invention, it uses for description of the best form for implementing this invention, (1) A figure is front sectional drawing, such as a conveyance roller, (2) FIG. It is a top view of the principal part of a conveyor for description of the best form for implementing the same invention. For the explanation of the best mode for carrying out the invention, (1) is an exploded side view of the main part of the conveyor, (2) is a side view of the conveying roller, and (3) is a free roller. The side view of (4) is an enlarged side view of the main part of the conveyor. FIG. 2 is a front sectional view of a surface treatment apparatus for explaining the best mode for carrying out the invention. It is side surface explanatory drawing of a surface treatment apparatus. It provides for description of this kind of conventional example, and is a plane explanatory view of a principal part, (1) figure shows the example 1 and (2) figure shows the other example.

Explanation of symbols

1 Surface treatment equipment (conventional example)
2 Conveyor (conventional example)
3 Straight roller 4 Wheel 5 Rotating drive shaft (conventional example)
6 Surface treatment apparatus (present invention)
7 Processing chamber 8 Conveyor (present invention)
9 Spray nozzle 10 Liquid tank 11 Pump 12 Pipe 13 Transport roller 14 Rotation drive shaft (present invention)
DESCRIPTION OF SYMBOLS 15 Free roller 16 Drive mechanism 17 Convex shape 18 Concave shape 19 Conveyor frame A Substrate material B Front-back conveyance direction C Chemical solution D Left-right width direction E Spray zone F Wave curved surface G Storage

Claims (8)

A conveyor used in a surface treatment apparatus for carrying out surface treatment while conveying a substrate material during a substrate manufacturing process, wherein a plurality of conveyance rollers are attached alternately to free rollers for each rotation drive shaft,
The transport roller is fixedly mounted at a predetermined pitch in the left-right direction on the rotational drive shaft disposed in the left-right direction with the axial direction thereof, and is rotationally driven by the rotational drive shaft.
The free roller has the same thickness in the left-right direction as the transport roller, fills the left-right gap pitch space between the transport rollers, and is freely attached to the rotary drive shaft, and is rotated by the rotary drive shaft. A conveyor for a surface treatment apparatus, characterized in that the attitude is maintained without being driven. The conveyor of the surface treatment apparatus according to claim 1, wherein each of the transport rollers and the free rollers attached to the rotation drive shaft forms an upper and lower wave curved surface as a whole.
A conveyor for a surface treatment apparatus, wherein a plurality of tapered irregularities are repeatedly formed in a small wave shape at a constant pitch and height in the left-right direction on the wave curved surface. In the conveyor of the surface treatment apparatus according to claim 2, the rotational drive shafts are paired up and down and arranged in multiple rows in the front and rear transport directions.
A conveyor for a surface treatment apparatus, wherein the conveying roller and the free roller are opposed to each other without any gap in a vertical pair, and are disposed to face each other without any gap in the front and rear conveying directions. In the conveyor of the surface treatment apparatus according to claim 3, the transport roller has a short cylindrical shape on the horizontal axis, and an outer peripheral surface has a convex shape.
The free roller has an arc shape corresponding to the conveying roller at the top and bottom, a notch arc shape corresponding to the conveying roller at the front and the back, and an outer peripheral surface has a concave curved shape,
The convex curved shape of the upper and lower outer peripheral surfaces of the conveying roller forms the convex of the wave curved surface, and the concave curved shape of the upper and lower outer peripheral surfaces of the free roller forms a concave of the wave curved surface. Conveyor for surface treatment equipment.   The conveyor of the surface treatment apparatus according to claim 3, wherein the adjacent upper and lower transport rollers and the front and rear transport rollers overlap each other at the position of the intervening free roller. A conveyor for a surface treatment apparatus. In the conveyor of the surface treatment apparatus according to claim 3, the substrate material is sandwiched between the upper and lower transport rollers and the free roller, and between the front and rear transport rollers and the free roller. It is conveyed while being delivered,
Thus, the substrate material is a conveyor for a surface treatment device characterized in that a curved uneven shape is corrugated and formed into a small wave shape based on the wave curved surface, and the substrate material is stiffened and strength is provided accordingly. 4. The conveyor of the surface treatment apparatus according to claim 3, wherein the transport roller and the free roller are set to have the same thickness in the left-right direction, and the difference between the maximum diameter and the minimum diameter of the outer periphery is 0. It is set to 5 mm or more and 5 mm or less,
And the left-right pitch between each said conveyance roller, and the front-back pitch between each this rotational drive shaft are set to the substantially same dimension, The conveyor of the surface treatment apparatus characterized by the above-mentioned. In the conveyor of the surface treatment apparatus according to claim 3, the surface treatment apparatus is used in a development process, an etching process, a peeling process, a cleaning process, or a drying process in a substrate manufacturing process,
In the surface treatment apparatus, a developing solution, an etching solution, a stripping solution, a cleaning solution, or drying air is sprayed from above and below, and the substrate material is made of a flexible substrate material or other extremely thin and flexible substrate material. The conveyor of the surface treatment apparatus characterized by the above-mentioned.

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