TW457133B - A conveying mechanism for printed wiring substrates - Google Patents

A conveying mechanism for printed wiring substrates Download PDF

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Publication number
TW457133B
TW457133B TW89122429A TW89122429A TW457133B TW 457133 B TW457133 B TW 457133B TW 89122429 A TW89122429 A TW 89122429A TW 89122429 A TW89122429 A TW 89122429A TW 457133 B TW457133 B TW 457133B
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TW
Taiwan
Prior art keywords
printed wiring
conveying
wiring board
conveying mechanism
rollers
Prior art date
Application number
TW89122429A
Other languages
Chinese (zh)
Inventor
Kisaburo Niiyama
Original Assignee
Tokyo Kakoki Kk
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Application filed by Tokyo Kakoki Kk filed Critical Tokyo Kakoki Kk
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Publication of TW457133B publication Critical patent/TW457133B/en

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  • Rollers For Roller Conveyors For Transfer (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Spray Control Apparatus (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

The invention relates to a conveying mechanism for printed wiring substrates. The first is to prevent the printed wiring substrates conveyed from being wrapped, folded, dropped, and damaged. Moreover, the second is to prevent the outer surfaces of the printed wiring substrates from being contact scratched by conveying rollers. The third is to limit flow of a treating liquid that is injected to the printed wiring substrates to left and right directions in order to improve uniformity of treated surfaces. The solution of the invention consists of a conveying mechanism 8 used for, at the same time, conveying the printed wiring substrates and injecting the treating liquid to implement the treating of surfaces of printed wiring substrates in a process of printed wiring substrates, and consists of a plurality of conveying rollers 15. The conveying rollers 15 form, on their outer surfaces, a recess and projection shape that is composed of a plurality of recesses 17 and projections 18, with the exception of a spacing space for injecting the treating liquid, the front conveying rollers and the back conveying rollers are engaged with one another without contact.

Description

457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(ί) 【發明所屬之技術領域】 本發明係關於印刷配線基板材之輸送機構。亦即使用於印 刷配線基板材之製程,邊輸送印刷配線基板材一邊噴射處 理液以施加表面處理。 【習知技術】 〈關於技術背景〉 近年,印刷配線基板顯著地更加趨於小型化、輕量化、 微細化、極薄化、撓性化、多層化等,形成於外表面之電 路,逐漸進行高密度化、微細化、高精度化等。 並且,這種印刷配線基板係如所公知,在絕緣基材張貼 銅箔之印刷配線基板材1爲經由Θ貫通孔用之鑽孔加工, 電鍍,感光性抗蝕劑之塗佈或張貼,-&gt; 抵住電路用負片進 行曝光,—溶化去除電路部分以外之感光性抗蝕劑之顯像 ,—溶化去除電路部分以外之銅箔之蝕刻,—溶解去除電 路部分之感光性抗蝕劑之剝離等等製程,來加以製造。 並H.,於此印刷配線基板材之顯像、蝕刻、剝離等各步 驟,係將印刷配線基板材使用輸送機構邊搬送,將顯像液 、腐蝕液、剝離液等處理液,使用噴霧噴嘴噴射,时對於 印刷配線基板材進行顯像 '蝕刻、剝離等之藥液處理、表 面處理。 又,在如這種各步驟及其他製程,分別附帶著車後,必 須進行噴射水洗液所成之處理液之洗淨處理、表面處理。 〈關於習知例〉 本紙張尺度適用中國國家標準(CNS)A4規格&lt;210 X 297公釐〉 裝--------訂------—線 &lt;靖先閲讀背面之注意事項再填窝本頁&gt; 4 57 1 33 A7 ____B7 五、發明說明(&gt; ) 第6圖、第7圖係提供說明此種習知例之印刷配線基板 材之輸送機構,第6圖係提供說明使用輸送滾輪之此種習 知例之要部之側面圖,第7圖係提供說明使用輪子之此種 習知例,(1 )圖係要部之側面圖,(2 )圖係平面圖。 也如這些圖面所示,於顯像、蝕刻、剝離等之各步驟, 各個印刷配線基板材A於第6圖之例係由輸送機構1之 上下多數之直線輸送滾輪2間所挾住,於第7圖之例,係 由輸送機構3之上下多數之輸送輪4前端之間所挾住,而 以水平方式被進給輸送° 與此同時,對於輸送滾輪2或輸送輪4間所形成之間隔 空間5從對向配設之多數噴霧噴嘴6所噴出之顯像液、腐 蝕液、剝雜液,或水洗液等之處理液B,將對於被運送過 來之印刷配線基板材A加以噴射。 經此,印刷配線基板材A,就受到顯像、蝕刻、剝離、 洗淨等,進行藥液處理或洗淨處理之表面處理。圖中7, 係輸送滾輪2或輸送輪4之驅動軸u 【發明所欲解決之冏題】 〈第1問題〉 然而,於此習知例,被指摘有下列問題。苻先,於第1 ,在第6圖之習知例之輸送機構1 ,係被輸送之印刷配線 基板材A,頻頻發生貼住,捲繞於輸送滾輪2之事故。 亦即,a 印刷配線基板材A &gt;係如上述最近進展成輕 量化、極薄化、富有撓性化。b ·印刷配線基板材A爲由 本紙張尺度適用中國困家標準(CNS)A4規格(210 X 297公* ) -------------裝-----訂----I線, (請先閱讀背面之注意事項再壤寫本頁) 經濟部智慧財產局員工消費合作社印製 4 經濟部智慧財產局員工消費合作社印製 57 1 33 A7 __B7__ 五、發明說明($ ) 所噴射之處理液B而濕潤,具有附著性。c ·藉由輸送滾 輪2從上下挾住被運送,對於印刷配線基板材A作用加壓 力。d 相對於此,輸送機構1之輸送滾輪2 ’係分別成爲 1條直線之圓柱狀。 由於這些a ' b、c、d ’被運送之印刷配線基板材A ,例如從前端部通過後即對被迴轉驅動之輸送滾輪2外 周面,發生許多緊緊貼住、捲繞之事故。如圖面上以實線 表示,雖然表示捲繞於下側輸送滾輪2外周面之例’但是 如虛線所示,捲繞於上側輸送滾輪2外周面之情形也很多 0 像這樣,當印刷配線基板材A捲繞於輸送滾輪2時,其 流暢之輸送就受到障礙而會發生不確定化,產生製造不良 〇 亦即1起因於道種捲繞,不但印刷配線基板材A會折彎 ,折疊,或掉落,或損傷,並且,藥液處理或洗淨處理等 之表面處理不能如所需狀態進行。 發生這種事態 &gt; 係如上述進展微密化、電路之高密度化 、微細化、高精度化之印刷配線基板來說,降低其可靠性 不僅變成致命性缺陷,並R良率也會惡化而生產力也發生 問題。第6圖之習知例之輸送機構1 ,係被指摘具有起因 於這種捲繞之問題。 〈第2問題〉 接著,第2係於第7圖所示之習知例之輸送機構3 ^在 本紙張尺度適用中國囷家標準(CNS)A4規格(210 X 297公釐) II -1 I -------訂---I!-線 (請先閱讀背面之注意事項再填寫本頁) 457133 經濟部智慧財產局員Η消費合作杜印製 A7 B7 五、發明說明(4 ) 被運送之印刷配線基板材A外表面,頻頻發生損傷之事故457133 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (Technical Field to which the Invention belongs) The present invention relates to a conveying mechanism for printed wiring board. Even if it is used in the process of printing the wiring-based board, the processing liquid is sprayed to apply the surface treatment while the printed wiring-based board is being conveyed. [Knowledge technology] <About the technical background> In recent years, printed wiring boards have become significantly smaller, lighter, thinner, extremely thin, flexible, and multilayered. Circuits formed on the outer surface have gradually progressed. High density, miniaturization, and high precision. In addition, this printed wiring board is a printed wiring board 1 on which a copper foil is pasted on an insulating substrate, as is well known. It is drilled through Θ through-holes, electroplated, and coated or applied with a photosensitive resist. &gt; Exposure against the negative film for the circuit,-dissolving the image of the photoresist except the circuit part,-dissolving the etching of the copper foil other than the circuit part,-dissolving the photoresist of the circuit part Stripping and other processes. And H. In this step of developing, etching, peeling and other steps of the printed wiring board, the printed wiring board is transported by using a conveying mechanism, and the processing liquid such as the developing solution, the corrosive solution, and the peeling solution is sprayed using a spray nozzle. When spraying, the printed wiring board material is subjected to chemical treatment, surface treatment such as imaging, etching, and peeling. In addition, after such steps and other processes are separately attached to the car, it is necessary to perform a cleaning treatment and a surface treatment of a treatment liquid formed by spraying a water washing liquid. 〈About examples〉 This paper size is applicable to China National Standard (CNS) A4 specifications &lt; 210 X 297 mm &gt; Note for refilling this page> 4 57 1 33 A7 ____B7 V. Description of the invention (&gt;) Figures 6 and 7 provide the printed wiring board material conveying mechanism explaining this conventional example. The drawing is a side view showing the main part of this conventional example using a transport roller, and FIG. 7 is a side view showing the conventional example of using a wheel, (1) the side view of the main part, (2) Department plan. As shown in these drawings, in each step of development, etching, peeling, etc., each printed wiring board material A in the example of FIG. 6 is held by a plurality of linear transport rollers 2 above and below the transport mechanism 1. In the example in FIG. 7, it is held between the front ends of most of the conveying wheels 4 above and below the conveying mechanism 3 and is fed and conveyed horizontally. At the same time, it is formed between the conveying rollers 2 or 4 The separation space 5 sprays the printed wiring board material A that has been transported from the processing liquid B such as the developing liquid, the corrosive liquid, the stripping liquid, or the water washing liquid sprayed from the plurality of spray nozzles 6 arranged oppositely. . After this, the printed wiring board A is subjected to surface treatment such as development, etching, peeling, cleaning, etc., and is subjected to a chemical solution treatment or a cleaning treatment. 7 in the figure is the driving shaft u of the conveying roller 2 or the conveying wheel 4. [Problem to be Solved by the Invention] <First Problem> However, in the conventional example, the following problems have been pointed out. First, in the first example, the conveying mechanism 1 of the conventional example shown in FIG. 6 is the printed wiring base sheet A that was conveyed, and it frequently stuck to and was wound on the conveying roller 2. That is, a printed wiring base sheet A &gt; has recently been reduced in weight, thickness, and flexibility as described above. b · Printing and wiring base board A is based on this paper size and applies China Standards for Household Standards (CNS) A4 (210 X 297 male *) ------------- Installation ----- Order-- --I line, (Please read the notes on the back before writing this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 57 1 33 A7 __B7__ V. Description of the invention ( $) The sprayed treatment liquid B is moist and has adhesion. c. It is carried by being picked up and down by the conveying roller 2 to apply a pressing force to the printed wiring board material A. d In contrast, the conveying rollers 2 'of the conveying mechanism 1 are each formed into a straight cylindrical shape. Due to the printed wiring board material A being conveyed by these a'b, c, and d ', for example, after passing through the front end portion, the outer peripheral surface of the conveying roller 2 that is driven by rotation, many closely abutting and winding accidents occur. It is indicated by a solid line as shown in the figure. Although it shows an example of being wound around the outer peripheral surface of the lower conveying roller 2, as shown by a dotted line, it is often wound around the outer peripheral surface of the upper conveying roller 2. As such, when printing wiring When the base sheet A is wound around the conveying roller 2, its smooth conveyance is impeded and uncertainty will occur, resulting in manufacturing defects. That is, 1 due to winding, not only the printed wiring base sheet A will be bent and folded. , Or drop, or damage, and surface treatment such as chemical solution treatment or cleaning treatment can not be performed as required. The occurrence of such a situation is that, as described above, for a printed wiring board that has been miniaturized, the circuit has become denser, miniaturized, and highly precise, lowering its reliability has not only become a fatal defect, but the R yield has also deteriorated. And productivity issues. The conventional conveying mechanism 1 of FIG. 6 is accused of having a problem due to such winding. 〈Second question〉 Next, the second example is the conventional conveying mechanism shown in Figure 7. 3 ^ The Chinese paper standard (CNS) A4 specification (210 X 297 mm) is applied to this paper size II -1 I ------- Order --- I! -Line (please read the precautions on the back before filling this page) 457133 Member of Intellectual Property Bureau of the Ministry of Economic Affairs Η Consumption Cooperation Du printed A7 B7 V. Description of Invention (4) Frequent damage to the outer surface of the printed wiring board A during transportation

D 亦即,於此輸送機構3,在其各驅動軸7 1分別外嵌固 定有以既定問隔節距寬度極狹窄之多數輸送輪4,並FL, 關於前後之輸送輪4間,向左右方向C配設成各邊偏移半 節距,其前端間成爲向運送方向D重疊之位置關係。 藉此,於這種輸送機構3,使用直線輸送滾輪2之輸送 機構1被指摘之上述第1之捲繞問題雖然受到防止,但是 ,關於被運送之印刷配線基板材A之電路形成面、屬於表 面處理對象面之外表面,例如,所塗佈之感光性抗蝕劑或 銅箔,容易發生由於輸送輪4所引起之接觸傷或擦傷。 亦即,a .印刷配線基板材A,係如上述具有最近所推 動之輕量化、極薄化,富有可撓性。b ·並且,對於這種 印刷配線基板材A噴射處理液B,並且c ·印刷配線基板 材A係由被迴轉驅動之寬度極窄之各輸送輪4,以近於點 接觸之狀態從上下被挾住而被保持、運送。 藉這些a 、b、c ,如第5圖之(2 )圖之正剖面圖所 示,印刷配線基板材A爲由所噴射處理液B之重量或噴吹 壓而受到壓力。並1L,印刷配線基板材A,係不但被迴轉 驅動並且對於約略成點接觸狀態之各輸送輪4集屮性地 被推壓運送,致使在其電路形成面、表面處理對象而,發 生許多與輸送輪4之接觸傷或擦傷。 並且,這種事態之發生,係如上述由電路之高密度化、 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐〉 -裝--------訂---------線 &lt;請先閱讀背面之注意事項再填寫本頁&gt; 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(Γ ) 微細化、高精度化之進展之印刷配線基板來說,不但變成 不良之原因,發生致命性缺陷,並且,良率也惡化生產力 也發生問題。於第7圖之習知例之輸送機構3,係被指摘 具有起因於這些損傷之問題。 〈第3問題〉 並且關於第3圖,第7圖所示之習知例之輸送機構3, 將損及藥液處理或洗淨處理等之表面處理之均勻性,有發 生偏差現象之問題。 亦即,從噴霧噴嘴6所噴射之處理液B,流過被運送之 印刷配線基板材A外表面朝向左右方向C (參照第5圖之 (2 )圖)後,從印刷配線基板材A之左右兩側流下。並 且1由於像這樣之左右方向C之處理液B之流動,依序更 新處理液B ‘以所需之表面處理將可對於印刷配線基板材 A外表面均勻地實施表面處理。 然而,於第7圖之習知例,噴射於印刷配線基板材A外 表面之處理液B,係經由各輸送輪4間,也朝與左右方向 C方向直交之前後運送方向D流動(參照第7圖之(1 ) 圖)。亦即,關於印刷配線丛板材A外表面|發生從間隔 空間5向前後脫離之處理液B之亂流,在印刷配線基板材 A之中央部等變成液池而成爲滯留,容易妨礙處理液B之 更新。 於是,關於印刷配線基板材A之電路形成而、屬於表面 處理對象面之外表面,對於表面處埋發生快慢,偏差,被 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 111]---------裝 ---訂-------- (請先閱讀背面之注意事項再填窝本頁) 457133 A7 B7 五、發明說明(t) 指摘有損及表面處理之整體均勻性之問題。 ------------ 1 裝--- (請先閱讀背面之注意事項再填寫本頁) 這種事態之發生,係對於推動電路之高密度化、微細化 、高精度化之印刷配線基板來說,不僅變成致命性問題, 而良率也惡化生產力也發生問題。 關於第7圖之習知例之輸送機構3,被指摘起因於這種 處理液B向運送方向D流動之問題。 〈關於本發明〉 本發明係鑑於這種實況,欲解決上述習知例之問題’經 由發明人之努力硏究結果所發明者,關於印刷配線基板材 之運送機構,其特徵爲,不但採用外周面爲由多數之凹部 與凸部成爲凹凸狀之特殊輸送滾輪,並ft,將這種輸送滾 輪,組合成在前後以不接觸狀態嚙合。 本發明之目的係提供一種印刷配線基板材之運送機構, 第1爲不但可防止被輸送之印刷配線基板材之捲繞’並且 ,第2爲也可防止印刷配線基板材損傷之發生,第3係並 且可提升印刷配線基板材之表面處理之均勻性。 【解決問題之方法】 〈關於技術性問題〉 經濟部智慧財產局員工消費合作社印製 欲解決這種問題之本發明之解決方法係如下。首先,關 於申請專利範圍第1項係如下。亦即’此申請專利範園之 第1項之印刷配線基板材之輸送機構,係使用於邊輸送印 刷配線基板材邊噴射處理液進行表面處理之印刷配線基 板之製程,具有挾住該印刷配線基板材輸送之上下多數之 本紙張尺度適用中國困家楳準(CNS)A4規格(210 X 297公釐) 457133 A7 B7 五、發明說明(7 ) 運送浪輪所形成。 (請先閲讀背面之注意事項再填寫本頁) 該運送滾輪,其特徵爲:不但外周面成爲凹凸狀,並且 ,前後者係除了該處理液噴射用之間隔空間以外可迴轉 驅動狀態嚙合。 接著,關於申請專利範圍第2項係如下。亦即,此申請 專利範圍第2項之印刷配線基板材之輸送機構,其特徵爲 :該運送滾輪係向左右方向交互地以等節距形成外周面 有多數之凹部與凸部。 關於申請專利範圍第3項係如下。亦即,此申請專利範 圍第3項之印刷配線基板材之輸送機構,係如申請專利範 圍第2項之印刷配線基板材之輸送機構,其特徵爲:除广 該處理液噴射用之間隔空間,於前後之該輸送滾輪間,係 該凹部與凸部位於對應位置,不僅在一方之該凹部內遊插 另方之凸部成互相嚙合,並且,被遊插之該凹部與凸部, 所留下前後之間隔與左右之間隙變成不接觸狀態。 並且,其特徵爲:除了該處理液噴射用之間隔空間,於 上下之該輸送滾輪間,在上下該凹部與凹部不僅位於對應 之位置,並且,該凸部與凸部也位於對應之位置。 經濟部智慧財產局員工消費合作社印製 關於申請專利範圍第4項係如下。亦即,此中請專利範 圍第4項之印刷配線基板材之輸送機構,係如申請專利範 圍第3項之印刷配線基板材之輸送機構,其特徵爲:上下 之該輸送滾輪,係於該凸部間將該印刷配線基板材挾成面 接觸狀態進給。 本紙張尺度適用中國國家標準(CNS)A4規格&lt;210 X 297公釐) 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(《 ) 其次,關於申請專利範圍第5項係如下。亦即,此申請 專利範圍第5項之印刷配線基板材之輸送機構,係如申請 專利範圍第2項之印刷配線基板材之輸送機構,其特徵爲 :該輸送滾輪,係對於驅動軸,該門部或鬥部形成用之多 數單位構件係由被外嵌固定之集合體所構成。 關於申請專利範圍第6項係如下。亦即,此申請專利範 圍桌6項之印刷配線基板材之輸送機構,係如申請專利範 圍第1項之印刷配線基扳材之輸送機構,該印刷配線基板 材,係極薄而富有可撓性,該處理液係由顯像液、腐蝕液 、剝雜液或水洗液等所構成,從對於該間隔空間所對向位 置之噴霧噴嘴之噴射所噴射。 並且,其特徵爲:在左右方向平行地向前後輸送方向配 設有多數該移送滾輪,並且,除了該處理液噴射用之間隔 空間以外向上下配設成對應,被迴轉驅動,將該印刷配線 基板材以水平姿勢運送。 〈關於作用〉 本發明係成爲如此 &gt; 所以將變成如卜。於此輸送機構, 輸送滾輪,爲向前後運送方向配設有多數,並且,除f該 處理液噴射用之間隔空問以外向上下配設成對應,被迴轉 驅動,而以挾住印刷配線丛板材成水平姿勢運送。 並且,於此輸送機構所採用之輸送滾輪’係在外周面有 凹部與凸部向左右方向交互地以等節距形成有多數|而外 周面係成爲凹凸狀。 -1 0- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) I I I I I ! — 裝! — 訂----•線 (請先W讀背面之注^f項再填寫本頁&gt; 457133 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(1 ) 前後之輸送滾輪’除了處理液噴射用之間隔空間,凹部 與凸部位於對應位置,在一方之凹部內另方之凸部遊嵌成 不接觸狀態’而以吋迴轉狀態嚙合。上下之輸送滾輪,係 除f處理液噴射用之間隔空間以外在上下凸部與凹部位 於對應位位置’將印刷配線基板材以面接觸狀態輸送。 並目此輸送機構係使用於印刷配線基板之製程,極薄 而可撓性之印刷配線基板材不僅以輸送滾輪輸送,並且, 從對於輸送滾輪間之間到間隔空間所對向位置之噴霧噴 嘴,噴射顯像液、腐蝕液、剝離液、或水洗液等之處理液 ,而實施表面處理。 於此,因於此輸送機構,第1爲前後之輸送滾輪之凹部 與凸部嚙合’所以可防止被輸送之印刷配線基板材捲撓於 輸送滾輪。 第2,上下之輸送滾輪之凸部與凸部,爲將印刷配線基 板材挾住成面接觸狀態輸送,並且,在間隔空間係相反側 之輸送滾輪之凸部,因將印刷配線基板材以面接觸狀態保 持輸送,所以,在印刷配線基板材外表面,不至於發生接 觸傷或擦傷。 第3,採用具有許多凸部之輸送滾輪,並且,因在其各 凹部前後之移送滾輪之凸部嚙合’所以從噴霧噴嘴所噴射 等之處理液,係前後輸送方向之流動將受到阻ih,只向所 需之左右方向流動。 【發明之實施形態】 -1 1 - 本紙張尺度適用中國國家標準(CNS)A4規格&lt;210 X 297公S ) -裝--------訂---------線 (請先Μ讀背面之注意事項再填寫本頁) 在57133 經濟部智慧財產局員工消費合作社印製 A7 __B7 __ 五、發明說明() 〈關於印刷配線基板E之製造工程等〉 首先,參照第4圖及第8圖說明印刷配線基板E之製造 工程等如下。本發明之印刷配線基板材A之輸送機構8 ’ 係使用於印刷配線基板材E之製造工程’在處理室9內邊 運送印刷配線基板材A噴射處理液B施加表面處理。 印刷配線基板E係廣泛地被使用於各種〇 A機器用之基 板,其他之電子機器用之基板,具有單面基板’兩面基板 ,多層基板(包括最近之内建(build up)工法者)等, 各種者,作爲其…環巳出現有半導體晶片、封裝有關之 C S P、P B G A。並且,印刷配線基板E,係近年進行著 更加小型化、輕量化、微細化、極薄化、可撓化、多層化 等,形成於外表面之電路F很顯著地進行高密度化、微細 化、高精度化等。 例如,印刷配線基板E之厚度,係絕緣基材部分爲 6 0 A m左右,而電路F部分爲被極薄化到從5 5 // m到 0 . 1 8 // m左右,多層基板時,整體之厚度也逐漸被極薄化 具從1 . 0 m到0 . 4 a m左右之厚度而Li。電路F也 逐漸趨向於微細化,其寬度也從7 〇 β m到2 0 &quot; m左右 «並Η.,印刷配線基板E係如公知依序沿莕下而製程製造 。首先,對於樹脂或玻璃布製之絕緣基材使用熱壓器等張 貼銅箔之後,進行使銅萡表面粗化之軟蝕刻’切斷成-丁-件 尺寸。D. In other words, in this conveying mechanism 3, a plurality of conveying wheels 4 with extremely narrow widths of predetermined intervals are fixed to each of the drive shafts 71 of the conveying mechanism 3 and FL. The direction C is arranged so that each side is offset by half a pitch, and the front ends thereof are in a positional relationship that overlaps in the conveying direction D. With this, in such a conveying mechanism 3, the above-mentioned first winding problem of the conveying mechanism 1 using the linear conveying roller 2 is prevented, but the circuit forming surface of the printed wiring board material A that is conveyed belongs to The surface other than the surface to be treated, for example, the applied photoresist or copper foil, is prone to contact scratches or abrasions caused by the transport wheel 4. In other words, a. The printed wiring base sheet A is lightweight, extremely thin, and flexible as recently promoted. b. Moreover, the printed wiring board material A is sprayed with the processing liquid B, and c. the printed wiring board material A is driven by the conveying wheels 4 with extremely narrow widths, which are driven by the rotation, and are closed from above and below in a point contact state. Stay and be transported. By these a, b, and c, as shown in the front cross-sectional view of FIG. 5 (2), the printed wiring board sheet A is pressured by the weight or spray pressure of the sprayed treatment liquid B. In 1L, the printed wiring board A is not only driven by rotation, but also is pushed and transported intensively to each of the conveying wheels 4 in a state of almost point contact. As a result, a lot of contact with the circuit forming surface and surface treatment object occurs. Contact injury or abrasion of the conveying wheel 4. Moreover, the occurrence of this kind of situation is caused by the high density of the circuit as described above, and the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) -installation -------- order-- ------- line &lt; Please read the notes on the back before filling out this page &gt; 457133 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (Γ) Miniaturization and high precision As for the progress of the printed wiring board, not only the cause of the defect, fatal defects occur, but also the yield deteriorates, and productivity problems also occur. The conventional conveying mechanism 3 in FIG. 7 is accused of having these causes. The problem of damage. <Third question> Also, regarding the conventional conveying mechanism 3 shown in Figs. 3 and 7, the uniformity of the surface treatment such as the chemical liquid treatment or the cleaning treatment may be impaired. That is, the processing liquid B sprayed from the spray nozzle 6 flows through the outer surface of the printed wiring board material A that is conveyed to the left and right direction C (refer to (2) in FIG. 5), and then from the printed wiring The left and right sides of the base plate A flow down. And 1 due to this The flow of the processing liquid B in the left and right direction C, and the processing liquid B 'is sequentially updated, and the surface treatment of the printed wiring board material A can be uniformly performed with the required surface treatment. However, as shown in FIG. For example, the processing liquid B sprayed on the outer surface of the printed wiring board A is passed through each of the transport wheels 4 and flows in the forward and backward transport direction D orthogonal to the left and right direction C (refer to FIG. 7 (1)). That is, regarding the outer surface of the printed wiring board sheet A | a turbulent flow of the processing liquid B detached forward and backward from the partition space 5 becomes a liquid pool in the central portion of the printed wiring base sheet A and the like, and it is likely to hinder the processing liquid B Therefore, regarding the formation of the circuit of the printed wiring base sheet A, which belongs to the surface other than the surface treatment target surface, the speed and deviation of the surface burial occur, and this paper standard applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 111] --------- installation --- order -------- (Please read the precautions on the back before filling in this page) 457133 A7 B7 V. Description of the invention ( t) Refers to problems that impair the overall uniformity of the surface treatment. ------------ 1 Pack --- (Please read the precautions on the back before filling out this page) This kind of state of affairs happens to promote the high density, miniaturization, and high power of the circuit. For a precision printed wiring board, not only a fatal problem, but also a deterioration in productivity and a problem in productivity. The conventional conveying mechanism 3 of FIG. 7 is alleged to be caused by the processing liquid B moving in the conveying direction. The problem of the flow of D. <About the present invention> In view of such a situation, the present invention intends to solve the problems of the above-mentioned conventional examples. Therefore, not only a special conveying roller whose outer peripheral surface has a large number of concave portions and convex portions becoming concave-convex, but also a combination of such conveying rollers are engaged in a non-contact state in front and rear. The purpose of the present invention is to provide a printed wiring board-based board conveying mechanism. The first is not only to prevent the winding of the printed wiring board being conveyed, but also the second is to prevent the damage of the printed wiring board. It can also improve the uniformity of the surface treatment of printed wiring board materials. [Method for solving the problem] <About technical issues> Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The solution of the present invention to solve this problem is as follows. First, the first item concerning the scope of patent application is as follows. That is, the conveying mechanism of the printed wiring board material in the first item of this patented patent garden is a process for printing the printed wiring board used for conveying the printed wiring board material while spraying the processing liquid for surface treatment, and has the function of holding the printed wiring. The majority of the paper sizes used for the transportation of the base board are applicable to the Chinese Standard for Household Standards (CNS) A4 (210 X 297 mm) 457133 A7 B7 5. Description of the invention (7) Formed by the shipping wave. (Please read the precautions on the back before filling out this page.) This transport roller is characterized in that not only the outer peripheral surface becomes uneven, but also that the former and the latter are rotatably engaged except for the space for spraying the treatment liquid. Next, the second item of patent application scope is as follows. That is, the conveying mechanism of the printed wiring base sheet according to item 2 of this application is characterized in that the conveying rollers alternately form left and right directions with equal pitches on the outer peripheral surface and have a large number of concave and convex portions. The third item regarding the scope of patent application is as follows. That is, the conveying mechanism of the printed wiring-based sheet material in item 3 of the patent application scope is the conveying mechanism of the printed wiring-based sheet material in item 2 of the patent application scope, which is characterized by the widening of the space for spraying the treatment liquid. Between the front and rear conveying rollers, the concave portion and the convex portion are located at corresponding positions. Not only does the concave portion of one of the concave portions intersect with the other convex portion, but also the concave portion and the convex portion of the concave portion are moved. The space left and right and the space left and right become non-contact. In addition, it is characterized in that, in addition to the space for spraying the processing liquid, between the upper and lower conveying rollers, the concave portion and the concave portion are not only located at corresponding positions, but also the convex portion and the convex portion are located at corresponding positions. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The fourth item on the scope of patent application is as follows. That is, the conveying mechanism of the printed wiring-based sheet material in item 4 of the patent scope here is the conveying mechanism of the printed wiring-based sheet material in item 3 of the patent scope, which is characterized in that the upper and lower conveying rollers are attached to the The printed wiring base sheet material is fed between the convex portions in a surface contact state. This paper size applies to the Chinese National Standard (CNS) A4 specifications &lt; 210 X 297 mm) 457133 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (") Secondly, the fifth aspect of the scope of patent application as follows. That is, the conveying mechanism of the printed wiring-based sheet material in item 5 of the patent application scope is the conveying mechanism of the printed wiring-based sheet material in item 2 of the patent application scope, which is characterized in that the conveying roller is for the drive shaft. Most unit members for forming a door or a bucket are composed of an assembly that is fixed by external fitting. The sixth item regarding the scope of patent application is as follows. That is, the conveying mechanism of the printed wiring-based sheet material in Table 6 of this patent application scope is the conveying mechanism of the printed wiring-based panel material as described in Item 1 of the patent application scope. The printed wiring-based plate material is extremely thin and flexible. In general, the processing liquid is composed of a developing liquid, an etching liquid, a stripping liquid or a water washing liquid, and is sprayed from a spray nozzle of a spraying position facing the space. Further, it is characterized in that a plurality of the transfer rollers are arranged parallel to the front-back direction in the left-right direction, and are arranged up and down correspondingly except for the space for spraying the processing liquid, and are driven to rotate to rotate the printed wiring. The base plate is carried in a horizontal position. <About the action> The present invention becomes so &gt; so it will become like Bu. In this conveying mechanism, a plurality of conveying rollers are provided for the forward and backward conveying directions. In addition to the space for spraying the processing liquid, the conveying rollers are arranged up and down correspondingly and are driven to rotate to hold the printed wiring cluster. The plates are carried in a horizontal position. In addition, the conveying rollers used in the conveying mechanism have a plurality of concave portions and convex portions on the outer peripheral surface that are alternately formed at equal pitches in the left-right direction, and the outer peripheral surface is irregular. -1 0- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) I I I I I! — Install! — Order ---- • Line (please read the note ^ f on the back before filling in this page> 457133 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (1) Conveyor rollers before and after ' Except for the space for spraying the treatment liquid, the concave portion and the convex portion are located at corresponding positions, and the other convex portion is embedded in a non-contact state in one concave portion and meshes in an inch-turning state. The upper and lower conveying rollers are treated in addition to f Outside of the space for liquid ejection, the printed wiring board is conveyed in surface contact with the upper and lower convex parts and recessed parts at the corresponding positions. The conveying mechanism is used in the process of printed wiring boards. It is extremely thin and flexible. The printed wiring board is not only conveyed by conveying rollers, but also sprays processing liquids such as developing liquid, corrosive liquid, peeling liquid, or washing liquid from the spray nozzles between the conveying rollers to the position opposite to the space. Surface treatment is performed. Here, because of the conveying mechanism, the first is that the concave and convex portions of the front and rear conveying rollers mesh with each other, so that the conveyed printed wiring board can be prevented from being twisted by the conveyer. Roller. Second, the convex part and convex part of the upper and lower conveying rollers are conveyed in order to hold the printed wiring substrate sheet in a surface contact state, and the convex part of the conveying roller on the opposite side of the space system is used to convey the printed wiring substrate. The sheet is conveyed in a surface contact state, so that no contact injury or abrasion will occur on the outer surface of the printed wiring board sheet. Third, a conveying roller having a plurality of convex portions is used. The convex part is engaged, so the processing liquid sprayed from the spray nozzle will be blocked in the forward and backward conveying direction, and will only flow in the required left and right direction. [Embodiment of the invention] -1 1-This paper is applicable to China National Standard (CNS) A4 Specification &lt; 210 X 297 Male S) -Installation -------- Order --------- Line (Please read the precautions on the back before filling this page) Printed on A57 __B7 __ by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention () <About the manufacturing process of printed wiring board E> First, the manufacturing process of printed wiring board E will be described with reference to FIGS. 4 and 8. And so on. The conveying mechanism 8 'of the printed wiring-based board A of the present invention is used in the manufacturing process of the printed wiring-based board E' and transports the printed wiring-based board A and sprays the treatment liquid B in the processing chamber 9 to apply surface treatment. The printed wiring board E is widely used as a substrate for various OA devices, and other electronic device substrates, including single-sided substrates, double-sided substrates, and multi-layer substrates (including recent build-up methods). Various types of semiconductor chips and packages related to CSP and PBGA have appeared as ... In addition, in recent years, the printed wiring board E has been further reduced in size, weight, miniaturization, ultra-thinning, flexibility, and multilayering. The circuit F formed on the outer surface has been significantly densified and miniaturized. And high precision. For example, the thickness of the printed wiring board E is about 60 A m for the insulating base material, and the part of the circuit F is extremely thinned from 5 5 // m to about 0. 1 8 // m. For a multilayer substrate, The thickness of the whole is gradually reduced by a thickness of about 1.0 m to about 0.4 am. The circuit F also gradually tends to be miniaturized, and its width also ranges from 70 β m to about 20 m, and the printed wiring board E is manufactured in accordance with the order of the known processes. First, a copper foil is applied to an insulating base material made of resin or glass cloth using a heat press, etc., and then soft etching is performed to roughen the surface of the copper foil to cut it to a size of -d.

之後,關於準備屬於襯銅之積層板之印刷配線基板材A -1 2 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) I —II--— If— i I I I--I ^ίιί — i (請先閲讀背面之注^^項再填寫本頁) 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(II ) 之許多情況’施加貫通孔用之多數鑽孔加工之後,施加面 板電鍍’然後電鍍貫通孔內壁。然後,關於印刷配線基板 材A外表面’屬於感光保護膜之感光性抗蝕劑,成膜狀加 以塗佈或張貼。 (按,圖示例之印刷配線基板材A,係在表面與背面之 兩外表面由形成電路F之兩面基板型式所構成,雖然使用 兩面襯銅積層板,但是不依據這種圖示例,對於只在單面 外表面形成電路F之單面基板型式所構成,使用於單面襯 銅積層板,當然也可適用木發明。) 此後,對於這種印刷配線基板材A,抵住屬於電路F負 軟片之電路照ΓΓ加以曝光。以此,被覆印刷配線基板材A 外表面之感光性抗蝕劑就被曝光留下硬化之電路形成部 分,其他+需要部分,藉由屬於處迎液B之顯像液之噴射 加以溶解去除。 然後,這種印刷配線基板材A外表面之銅箔,留下感光 性抗蝕劑硬化而被覆、保護之電路形成部分,以上述,溶 解去除感光性抗蝕劑之不需要部分,爲由屬於處理液B之 腐蝕液、蝕刻液之噴射,被溶解去除、蝕刻。 然後,所留下之硬化電路形成部分之感光性抗蝕劑,爲 由廍於處理液B之剝離液之噴射被溶解去除,所以巾留下 之電路形成部分之銅箱,在印刷配線基板材A外表面形成 既定之電路F,以製造印刷配線基板E。 按1關於按照這種製程所製造之印刷配線基板E,將作 -1 3 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)After that, about the preparation of printed wiring base sheet A-1 which is a copper-clad laminated board-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) I —II --— If— i II I --I ^ ίιί — i (Please read the note ^^ on the back before filling out this page) 457133 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Many cases of the invention description (II) 'Applied to the through hole After most of the drilling operations, a panel plating is applied and then the inner wall of the through-hole is plated. Next, the photosensitive resist on the outer surface of the printed wiring board material A, which is a photosensitive protective film, is formed into a film and coated or stuck. (According to the figure, the printed wiring base sheet A is composed of two types of substrates that form the circuit F on the outer surface and the back surface. Although two-sided copper-clad laminated boards are used, they are not based on this example. As for the single-sided substrate type in which the circuit F is formed only on the single-sided outer surface, it is used for single-sided copper-clad laminated boards, of course, wood inventions can also be applied.) Thereafter, for this printed wiring board A, it belongs to the circuit The circuit of the F negative film is exposed according to ΓΓ. In this way, the photosensitive resist covering the outer surface of the printed wiring board A is exposed to leave the hardened circuit forming part, and the other + required parts are dissolved and removed by spraying the developing liquid belonging to the solution B. Then, the copper foil on the outer surface of the printed wiring board A is left with the photoresist hardened to cover and protect the circuit forming part. The unnecessary part of the photoresist is dissolved and removed as described above. The spray of the etching liquid and the etching liquid of the processing liquid B is dissolved, removed, and etched. Then, the remaining photoresist of the hardened circuit formation portion is dissolved and removed by the spray of the peeling liquid which is immersed in the processing liquid B. Therefore, the copper box of the circuit formation portion left by the towel is printed on the printed wiring board. A predetermined circuit F is formed on the outer surface of A to manufacture a printed wiring board E. According to 1, the printed wiring board E manufactured according to this process will be -1 3-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm)

It I — J· — --------— — — — — — &lt;請先«讀背面之注意事項再填寫本頁) 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(α) 後續之處理工程,依照h述工程所形成之電路F之保護被 膜就由感光性抗蝕劑來形成。 按,於這種印刷配線基板材A之顯像、蝕刻、剝離等之 各製程,係如第4圖之左部所示,在各個處理室9內,印 刷配線基板材A爲由輸送機構8成水平姿勢向運送方向 D輸送。 與此同時,從在處理室9內向上下對向配設之多數噴霧 噴嘴1 0將顯像液、腐蝕液、剝離液等處理液B爲對於被 運送之印刷配線基板材A噴射,以此印刷配線基板材A就 受到顯像、蝕刻、剝離等之藥液處理、表面處理。 又,這種顯像、蝕刻、剝離之各製程,於再包括其前處 理製程之其他製造程,係分別伴隨進行事後之洗淨處理 、表面處理。例如,如第4圖之右部所示,於洗淨用之處 理室9內,邊運送印刷配線基板材A,屬於水洗液之處理 液B就從噴霧噴嘴1 〇噴射,以進行洗淨處理、表面處理 0 按,於處埋宽9内從各噴霧噴嘴1 0所噴射之顯像液、 腐蝕液、剝離液、水洗液等處理液B,將被輸送之印刷配 線基板材A外表面從左右力向C之寬度力向流動,以此將 印刷配線基板材A,進行藥液處理或洗淨處理等施加表面 處理後,流F、回收、貯留於形成在處理室9下部之液槽 1卜 貯留於液槽1 1之處理液B,其許多爲經由配管1 2或 -1 4 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 * 297公釐) 1!!! _ ! I I ! I 訂 (請先閲讀背面之注意事項再填寫本頁) 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(I》) 泵浦1 3被壓送至噴霧管1 4而循環使用。 印刷配線基板E之製造工程係成爲如下。 〈關於輸送機構8 &gt; 本發明之印刷配線基板材A之輸送機構8 ·係於這種印 刷配線基板E之製造工程,使用於將印刷配線基板材A進 行表面處理之處理室9。茲參照第1圖、第2圖、第3圖 、第4圖、第5圖之(1 )圖等說明如下。 此輸送機構8,係使用於印刷配線基板E之製造工程, 邊運送印刷配線基板材A噴射處理液B實施表面處理,由 具有挾住印刷配線基板材A輸送之上下之多數輸送滾輪 15。 此印刷配線基板材A,係極薄而富於可撓性°處理液B 係由顯像液、腐蝕液、剝離液、或水洗液等所形成,從對 向位於形成在輸送滾輪1 5間之間隔空間1 6之噴霧噴 嘴1 0所噴射。 噴霧噴嘴1 0,係依各間隔空間1 6,如第5圖之(1 ) 圖正剖面圖所示,在左右方向C各配設有多數個。 輸送機構8之輸送滾輪1 5 1係首先’分別向左右方向 C沿著平行,向前後之運送方向D配設有多數個,並H, 除Γ處理液B噴射用之問隔空間1 6成上下對應配設,由 驅動源(未圖示)迴轉驅動,將印刷配線基板材A成水7ρ 姿勢輸送。 亦即,輸送滾輪1 5之左右方向C之寬度尺寸,係如第 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ------------i --------訂---------線 C請先閱讀背面之注項再瑱寫本頁) 經濟部智慧財產局員Η消費合作社印製 457133 A7 _B7 五、發明說明(i今) 5圖之(1 )圖所示,設定爲比印刷配線基板材A之左右 方向C之寬度尺、」·爲長。並H ’如第1圖、第3圖、第4 圖等所示,於處理液B内輸送滾輪1 5 ’係向前後運送方 向D於圖示例係使用3支1組,在各組間,形成1支份量 弱之間隔空問1 6而去除/輸送滾輪1 5。 又,經由被運送之印刷配線基板材A ’上位之輸送滾輪 1 5與下位之輸送滾輪1 5,係向運送方向D偏移節距, 間隔空間1 6之形成位置也偏移。 於圖示例,對於上位之3支1組之輸送滾輪1 5屮央者 ,下位之間隔空間1 6位於其對應位置,下位之3支1組 之輸送滾輪1 5之中央者,對應其位置有上位之間隔空間 16。 〈關於輸送滾輪1 5之構成〉 並且,此輸送機構8之輸送滾輪1 5係構成爲如下。 亦即1如第2圖之平剖面圖或第5圖之(1 )圖之正剖 面圖所示’此輸送滾輪1 5,係在外周面有R1部1 7與凸 部1 8,爲向左右方向C交互地以等節距形成多數個,外 周面成爲FI Λ狀、略Μ齒型狀。 凸部1 8係例如左右方向C之寬度爲1 4 in m,上下方 向之直徑成爲4 0 m 左右之外環狀,凹部1 7係例如左 右方向之寬度爲比凸部1 8稍長,成爲上下方向之商徑;^ 1 2 m m左右之內環狀。固定這種凹部1 7或凸部1 8之 驅動軸1 9之齒徑爲約8 m m。 ^ 1 6 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) --- II-----— —— — —— - I 1 I I I I I - In — — — — — — (請先閱讀背面之注項再填寫本頁) 457133 A7 __B7 五、發明說明(β ) 關於輸送滾輪1 5,對於這種凹部1 7或凸部1 8之形 成方式可想到各種方式。例如,將各凹部1 7與凸部1 8 向左右方向C交互地連續地成形爲一體,也可形成於中心 之貫通孔2 0,嵌插、固定驅動軸1 9。並且,這種單位 構件2 1爲向左右方向C連續地被結合集合。 與此相對,第5圖之(1 )圖所示之輸送滾輪1 5,係 對於驅動軸1 9,凹部1 7或凸部1 8形成用之多數單位 構件2 1爲被外嵌固定之集合體所形成。於此第5圖之( 1 )圖之例,單位構件2 1係備有1個凸部1 8,與其左 右一半之凹部1 7所形成,在其中心之貫通孔2 0嵌插、 固定驅動軸1 9。並且,這種單位構件2 1爲向左右方向 C連續地被結合集合3 關於像這種集聚單位構件2 1所形成之輸送滾輪1 5 ,也有可能更加另外之例。例如,也可使用凹部1 7專用 之單位構件2 1與凸部1 8專用之單位構件2 1之例子 ,又,也可考慮使用集合2〜3個凹部1 7與凸部1 8成 爲1個單位構件2 1之例。 無論仟一,就1個輸送滾輪1 5形成例如約3 0個之凹 llijii· . I — — I I 訂--1 I I I I I 1^. &lt;請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員Η消費合作社印製 如等射 爲圖噴 係面 B 關 β 液 之之理 間圖處 相 3 之 ft 第述 之 ' 上 者圖了 &gt; 後 1 除 係前第係 關之如 , 後 5 再 5 αΗΙ1—I ’ 11 之輪圖輪 0 5 滾面滾 8 1送剖送 1 輪輸平輸 部滚於之之 凸送關圖後 與輸 ,2 前 7 於次第, 1 關其。示 部 &lt; 下所 本紙張尺度適用中國國家標準(CNS)A4規格(210 * 297公釐) 457133 Α7 Β7 五、發明說明(α) 用之間隔空間1 6,成αί迥轉驅動之狀態嚙合。 &lt;請先閲讀背面之注意事項再瑱寫本頁) 亦即,除了處理液Β噴射用之間隔空間1 6 1於前後之 輸送滾輪1 5間,凹部1 7與凸部1 8爲位於對應位置, 在一方凹部1 7內遊嵌Μ 之凸部1 8而互相嚙合,並且 ’被遊嵌之凹部1 7與凸部1 8,係具有前後之間隔G與 左右之間隙Η變成不接觸狀態。 關於這種輸送滾輪1 5之前後關係將再詳述之。於圖示 例,係以3個成1組所使用之上位及下位之輸送滾輪1 5 ,係分別沿著運送方向D第1個之輸送滾輪1 5之凹部 1 7或凸部1 8,與第2個之輸送滾輪1 5之凸部1 8或 凹部1 7爲被設定爲嚙合之位置關係。同樣地,第2個之 輸送滾輪1 5之凸部1 8或凹部1 7,與第3個之輸送滾 輪1 5之凸部1 8或凹部1 7被設定爲嚙合之位置關係 〇 亦即,於鄰接之輸送滾輪1 5互相之間,爲了使凹部1 7與凸部1 8能夠成爲對應關係,不僅偏移其節距,並且 ,對應於如此位置之四部1 7與凸部1 8係靠近嚙合。 經濟部智慧財產局員工消費合作社印製 並且,這種嚙合,係以不接觸狀態實現。亦即,如第2 圖所不,於嚙合之輸送滾輪1 5間,在一方之凹部1 7與 另方之凸部1 8間,在前後之運送方向D至少形成有例如 5 ni m左右以上之間隔G。…力之凸部1 8與另方之凸部 1 8間,也向左右方向C例如形成1 m m左右以上之間隔 Η (於第2圖之圖面,係省略間隔Η之正確表示,間隔Η -]8 - 本紙張尺度適用中國國家標準(CNS)A4規格&lt;210 X 297公釐) 經濟部智慧財產局員工消費合作社印製 457133 Α7 _ Β7 五、發明說明(Π ) 係以1條線表示)^ 然而’間隔G 1係於第1圖、第2圖之圖示例爲小,第 3圖之圖示例係形成爲大。 亦即’第1圖、第2圖之例之輸送機構8,係被運送之 印刷配線基板材A之厚度爲極薄(例如6 0 v m左右), 使用於極爲容易發生對於輸送滾輪1 5之捲繞之情形。因 而’嚙合輸送滾輪1 5間之輸送滾輪1 5間之運送方向D 之間隔G ’亦即嚙合之.方凹部1 7與另方之凸部1 8間 之間隔G爲被設定爲小(例如2〜4 m m左右)。 亦即’於嚙合之輸送滾輪1 5間,互相之凸部1 8,係 大的,深入地嚙合,前後之運送方向D之互相間之嚙合距 離、重疊尺寸爲變大(例如1 〇 m m前後程度)。 如此,因應被輸送之印刷配線基板材A之厚度大小,關 於輸送滾輪1 5,嚙合之間隔G之大小,並且嚙合距離, 重疊尺寸之大小將被變更設定。 輸送滾輪1 5間之前後關係係成爲如下。 〈關於輸送滾輪1 5之上下關係〉 其次,關於輸送滾輪1 5之上下之互相關係係如下。 如第1圖或第3圖之側ώ圖所示,除了處理液B喷射用 之間隔空間1 6 ·於上下之輸送滾輪1 5間,係於上下不 僅凹部1 7與凹部1 7爲位於對應位置,並且凸部1 8與 凸部1 8也位於對應位置° 以這種對應位置之上下輸送滾輪1 5間,於上下之凸部 -1 9 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 χ 297公爱) ----- - - - - -- ---* I ----II ^ « — — — — — — II (請先閲讀背面之注意事項再填寫本頁) 457133 經濟部智慧財產局員工消費合作社印製 A7 __B7__ 五、發明說明(iX ) 1 8間’成爲將印刷配線基板材A以面接觸狀態挾住輸送 〇 這種關於輸送滾輪1 5之上下關係再詳述之。於圖示例 ,係以3個1組所使用之上位及下位之輸送滾輪1 5,係 首先,上F各個之間隔空間1 6之形成處所,所對應之相 反側之輸送滾輪1 5以單獨使用。 與此相對,於間隔空間1 6形成處所以外,係上下之輸 送滾輪1 5係位於對應位置,不但在上下凹部1 7與凹部 1 7位於對應位置,並且,凸部1 8與凸部1 8被設定爲 對應之位置關係。 於是,像這樣對應位置之上下之輸送滾輪1 5之凸部1 8,爲分別從上下對於印刷配線基板材A進行闹接觸,將 印刷配線基板材A從上下挾住藉邊被迴轉驅動,進給於運 送方向D。 輸送滾輪1 5間之上下關係成爲如下。 〈關於作動等〉 本發明係構成爲如以上所說明。所以成爲如卜。 於此輸送機構8,係輸送滾輪1 5爲向左右方向C平行 地向前後之運送方向D配設存多數個,並’除广處现液 B噴射之間隔空間1 6在上K配設成對應’而被迴轉驅動 ,挾住印刷配線基板材A進給以水平姿勢運送(參照第4 圖等)。並且,於此輸送機構8所採用之輸送滾輪1 5 ’ 係在外周面有凹部1 7與凸部1 8向左右方向C交互地 -20 - 本紙張尺度適用中圉國家標準(CNS)A4規格(210 X 297公爱) ------- ------丨灯·--- ----- &lt;锖先聞讀背面之注意事項再填寫本頁) 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(β) 以等節距形成多數個,以此外周面成爲凹凸狀(參照第2 圖)。此輸送滾輪1 5係例如對於驅動軸1 9形成凹部1 7或凸部1 8用之多數單位構件2 1 ,爲由外嵌固定之集 合體所構成(參照第5圖之(1 )圖)。 並且,屬於運送方向D之前後之輸送滾輪1 5間,除了 處理液B噴射用之間隔空間1 6,凹部1 7與凸部1 8位 於對應位置,在一方之凹部1 7內遊嵌另方之凸部1 8使 兩者嚙合,並且,被遊嵌之凹部17與凸部18,係具有 前後之間隔G與左右之間隙Ή成爲不接觸狀態。像這樣前 後之輸送滾輪1 5,係成可迴轉狀態嚙合(參照第1圖、 第2圖、第3圖等)。 與此相對|於上下之輸送滾輪1 5間,除了處理液Β噴 射用之間隔空間1 6,於上下凹部1 7與凹部1 7位於對 應位置,並且,凸部1 8與凸部1 8位於對應位置,在凸 部1 8間將印刷配線基板材Α挾住成面接觸狀態輸送(參 照第1圖、第3圖、第4圖等)。 並且,採用這種特殊之輸送滾輪1 5之本發明之輸送機 構8爲被使用於印刷配線基板E (參照第8圖)之製造工 程。 並且,極薄而富於可撓性之印刷配線基板材A,係由這 種輸送機構8之輸送滾輪1 5所輸送’並且’從對向位置 之輸送滾輪1 5間之間隔空間1 6之噴霧噴嘴1 0 ’對於 被運送之印刷配線基板材A,噴射顯像液' 腐蝕液、剝離 -21 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 * 297公;S ) 裝--------訂---------線 (請先|»讀背面之注意ί項再填寫本頁) 經濟部智慧財產局員Η消費合作社印製 457133 A7 B7 五、發明說明(w) 液或水洗液等之處理液B。 並且,處理液B爲將印刷配線基板材A外表面向左右方 向C (左方向或右方向)流動後,雖然從左右兩側流下’ 但是經此處理液B之流動對於印刷配線基板材進行表面 處理。 〈第1 ,關於防土捲繞〉 按,於此,關於此印刷配線基板材A之輸送機構8 ’將 變成下面之第1、第2、第3。 第1 ,於此輸送機構8,係將前後之輸送滾輪1 5 ’組 合成凹部1 7與凸部1 8互相嚙合》於是1被運送之印刷 配線基板材A,例如捲繞於通過即後之輸送滾輪1 5外周 面等,藉其前後之輸送滾輪1 5就可確實地被防止。 關於這種捲繞防止,再詳述之。a _首先,印刷配線基 板E用之印刷配線基板材A,係輕量化•極薄化有所進展 富於可撓性。b ·並且這種印刷配線基板材A,係處理B 被噴射濕潤,富於附著性。c ·並且被輸送之印刷配線基 板材A係藉由從上下挾住進給,將作用加壓力。 起因於這些a ,b · c對於通過即後之輸送滾輪1 5 (2 )之外周面,從其下游側張貼,以此變成容易捲繞( 也參照此種關於習知例之第6圖),若依據此輸送機構8 ,就可確實地防止這種捲繞。 亦即,被迴轉驅動之上下之輸送滾輪1 5之凸部1 8間 所挾住輸送之印刷配線基板材A,係對於通過即後之輸送 -11, 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) — — — — — — — — — — —J — - I I — I — II ^ — — — — — — — — 1 (請先Μ讀背面之注意事項再填寫本頁) 457133 A7 B7 五、發明說明(&gt;1 ) 滾輪1 5各凸部1 8外周面,從前端部欲加以張貼。 (請先閲讀背面之注項再填寫本頁) 然而,對於這種輸送滾輪1 5之各凸部1 8,於左右方 向C所鄰接位於各凹部1 7,位於運送方向D之前後之輸 送滾輪1 5之各凸部1 8爲伴隨其迴轉驅動依序嚙合。 於是,藉上述欲張貼於輸送滾輪1 5之各凸部1 8外表 面之印刷配線基板材A前端部,就這樣地’藉接觸於咬入 於其輸送滾輪15之各凹部17之前後之輸送滾輪15 之凸部1 8立即被剝去。 像這樣,被輸送之印刷配線基板材A將可防止捲繞於被 迴轉驅動之輸送滾輪1 5之凸部1 8外周面之情形。 〈第2,關於防止發生損傷〉 第2,於此輸送機構8,係上下之輸送滾輪1 5之各凸 部1 8與凸部1 8,係將印刷配線基板材A以面接觸狀態 挾住輸送。又,於間隔空間1 6 ,上下方向相反側之輸送 滾輪1 5之各凸部1 8,爲將印刷配線基板材A以面接觸 狀態保持輸送。 於是,可確實防止在印刷配線基板材A之外表面發生接 觸傷或擦傷。 經濟部智慧財產局員工消費合作社印製It I — J · — --------— — — — — — &lt; Please «read the precautions on the back before filling out this page) 457133 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (α) In the subsequent processing process, the protective film of the circuit F formed in accordance with the process described above is formed of a photosensitive resist. According to the processes of development, etching, and peeling of the printed wiring board material A, as shown in the left part of FIG. 4, the printed wiring board material A is conveyed by the conveying mechanism 8 in each processing chamber 9. It is conveyed in the horizontal direction toward the conveyance direction D. At the same time, a plurality of spray nozzles 10 arranged upward and downward in the processing chamber 9 spray the processing liquid B such as a developing liquid, an etching liquid, and a peeling liquid onto the printed wiring board A to be transported, and print. The wiring base sheet A is subjected to chemical treatment and surface treatment such as development, etching, and peeling. In addition, each of the processes of development, etching, and peeling, including the other manufacturing processes including the previous processing process, is accompanied by subsequent cleaning treatment and surface treatment. For example, as shown in the right part of FIG. 4, in the processing chamber 9 for cleaning, the printed wiring board A is transported, and the processing liquid B belonging to the water washing liquid is sprayed from the spray nozzle 10 to perform the cleaning treatment. 、 Surface treatment 0 Press the treatment liquid B, such as imaging liquid, corrosive liquid, peeling liquid, and water washing liquid, sprayed from each spray nozzle 10 within the buried width 9 to remove the outer surface of the printed wiring board A being transported. The left and right forces flow toward the width of C, so that the printed wiring board A is subjected to a surface treatment such as chemical solution treatment or cleaning treatment, and then flows F, is recovered, and is stored in a liquid tank 1 formed in the lower part of the processing chamber 9. Bulk of the treatment liquid B stored in the liquid tank 11, many of which are through the pipe 1 2 or -1 4-This paper size applies the Chinese National Standard (CNS) A4 specification (210 * 297 mm) 1 !!! _! II Order I (Please read the precautions on the back before filling this page) 457133 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (I) The pump 1 3 is fed to the spray tube 1 4 and recycle. The manufacturing process of the printed wiring board E is as follows. &Lt; Conveying mechanism 8 &gt; The conveying mechanism 8 of the printed wiring board A of the present invention is a manufacturing process of such a printed wiring board E, and is used in a processing chamber 9 where the printed wiring board A is subjected to surface treatment. With reference to Figures (1), (2), (3), (4), and (5) of Figure 5, the description is as follows. This conveying mechanism 8 is used in the manufacturing process of the printed wiring board E. The printed wiring board A is sprayed with the treatment liquid B to carry out surface treatment while conveying the printed wiring board E. The conveying mechanism 8 has a plurality of conveying rollers 15 that hold the printed wiring board A above and below. The printed wiring board A is extremely thin and flexible. The treatment liquid B is formed of a developing solution, an etching solution, a stripping solution, or a water washing solution, and is formed between the conveying rollers 15 in the opposite direction. It is sprayed by the spray nozzle 10 of the space 16. A plurality of spray nozzles 10 are arranged in the left and right directions C, as shown in the front cross-sectional view of FIG. The conveying rollers 1 5 1 of the conveying mechanism 8 are firstly parallel to the left and right directions C, and a plurality of forward and backward conveying directions D are provided, and H is divided into 16 to 60% of the space for spraying the treatment liquid B. It is arranged up and down correspondingly, and is driven by a driving source (not shown) to rotate and transport the printed wiring board A in a posture of 7ρ. That is, the width dimension of the conveying roller 15 in the left-right direction C is the same as the first paper size applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------------ i -------- Order --------- Line C, please read the note on the back before writing this page) Member of the Intellectual Property Bureau of the Ministry of Economic Affairs ΗPrinted by Consumer Cooperative 457133 A7 _B7 V. Description of Invention (I now) As shown in (1) of FIG. 5, the length is set to be longer than the width rule of the printed wiring board sheet A in the left-right direction C. As shown in Fig. 1, Fig. 3, Fig. 4, etc., the rollers 1 5 'are conveyed in the processing liquid B in the forward and backward conveying direction D. In the example shown in the figure, three groups and one group are used. , Forming a space of 16 with a weak portion and removing / conveying rollers 15. In addition, the upper transport roller 15 and the lower transport roller 15 passing through the printed wiring substrate sheet A 'to be transported are shifted in the transport direction D by a pitch, and the formation position of the space 16 is also shifted. In the example shown in the figure, for the upper 3 sets of conveying rollers 1 and 5, the lower space 16 is at its corresponding position, and the lower 3 sets and 1 conveying rollers 15 are at the corresponding position. There is an upper space of 16. <About the structure of the conveyance roller 15> Moreover, the conveyance roller 15 of this conveyance mechanism 8 is comprised as follows. That is, 1 is shown in the flat cross-sectional view of FIG. 2 or the front cross-sectional view of (1) of FIG. 5 'This conveying roller 15 is provided with R1 portions 17 and convex portions 18 on the outer peripheral surface. The left and right directions C alternately form a plurality at equal pitches, and the outer peripheral surface has a FI Λ shape and a slightly M tooth shape. The width of the convex portion 18 is, for example, 14 in m in the left-right direction, and the diameter in the up-down direction is approximately 40 m. The width of the recess 17 is, for example, slightly longer than the width of the convex portion 18 in the left-right direction. Business path in the up and down direction; ^ 1 2 mm or so inside ring. The tooth diameter of the drive shaft 19 to which such a concave portion 17 or a convex portion 18 is fixed is about 8 mm. ^ 1 6-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) --- II ------------I 1 IIIII-In------ (Please read the note on the back before filling out this page) 457133 A7 __B7 V. Description of the invention (β) Concerning the conveying roller 15, various ways can be conceived for the formation of such a concave portion 17 or a convex portion 18. For example, each of the concave portions 17 and the convex portions 18 are alternately and continuously formed into a single body in the left-right direction C alternately, or may be formed in a central through-hole 20 to insert and fix the drive shaft 19. In addition, such unit members 21 are successively combined and assembled in the left-right direction C. In contrast, the conveying rollers 15 shown in (1) of FIG. 5 are a plurality of unit members 21 for forming a driving shaft 19, a concave portion 17 or a convex portion 18, which are externally fixed. Body formation. In the example of (1) in FIG. 5, the unit member 21 is provided with a convex portion 18 formed with the concave portions 17 on the left and right sides thereof. The through hole 20 in the center is inserted and fixedly driven. Axis 1 9. In addition, the unit member 21 is continuously combined in the left-right direction C and is assembled. 3 Conveying rollers 15 formed by the unit member 2 1 may be another example. For example, an example of a unit member 21 for exclusive use of the recessed part 17 and a unit member 21 for exclusive use of the raised part 18 may be used, and it is also conceivable to use a collection of 2 to 3 recesses 17 and one protrusion 18 An example of a unit member 21. Regardless of the number of points, one concave roller 15 is formed, for example, about 30 recesses llijii ·. I — — II order--1 IIIII 1 ^. &Lt; Please read the precautions on the back before filling this page) Ministry of Economic Affairs Printed by the Intellectual Property Bureau and the Consumer Cooperative, such as the shot on the surface of the system, the B-phase of the β-liquid, the inter-phase map of the phase 3, the ft described in the above's picture>> 1 except for the previous system , The next 5 and then 5 αΗΙ1—I '11 wheel map wheel 0 5 roll surface roll 8 1 send profile send 1 roll transfer flat roll to roll the convex to send the map after and lose, 2 before 7 next time, 1 off its. The paper size of the display section below applies to the Chinese national standard (CNS) A4 specification (210 * 297 mm) 457133 Α7 Β7 V. Description of the invention (α) The space used is 16 and it is engaged in the state of α 迥 turn driving . &lt; Please read the precautions on the back before writing this page) That is, except for the space 1 6 1 for spraying the treatment liquid B, there are 15 transport rollers in front and back, and the recesses 17 and 18 are located correspondingly. Position, the convex portion 18 of M is embedded in one of the concave portions 17 and meshed with each other, and the recessed portion 17 and the convex portion 18 that are embedded in each other have a front-to-back gap G and a left-to-right gap Η to be in a non-contact state. . The relationship between the conveying rollers 15 before and after will be described in detail. In the example shown in the figure, three sets of upper and lower conveying rollers 1 5 are used, which are respectively the concave portion 17 or convex portion 18 of the first conveying roller 15 in the conveying direction D, and The convex part 18 or the concave part 17 of the second conveyance roller 15 is set in a positional relationship in which it meshes. Similarly, the convex portion 18 or the concave portion 17 of the second conveying roller 15 is set in a positional relationship with the convex portion 18 or the concave portion 17 of the third conveying roller 15. That is, In order to make the corresponding relationship between the concave portion 17 and the convex portion 18 between the adjacent conveying rollers 15, not only the pitch is shifted, but also the four portions 17 and convex portions 18 corresponding to this position are close to each other. Mesh. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, and this engagement is achieved without contact. That is, as shown in FIG. 2, at least one of the meshing conveying rollers 15 and one of the concave portions 17 and the other convex portion 18 have a forward and backward conveyance direction D of, for example, about 5 nim or more. The interval G. … The distance between the convex portion 18 of the force and the convex portion 18 of the other side is also formed in the left-right direction C by, for example, an interval of about 1 mm or more. (In the drawing of FIG. 2, the correct indication of the interval 省略 is omitted, and the interval Η -] 8-This paper size applies to China National Standard (CNS) A4 specifications &lt; 210 X 297 mm) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 457133 Α7 _ Β7 V. Description of the invention (Π) is based on 1 line (Indication) ^ However, the interval G 1 is shown in Figures 1 and 2 as small, and the figure 3 is shown as large. That is, the conveying mechanism 8 of the example of FIG. 1 and FIG. 2 is that the thickness of the printed wiring board material A to be transported is extremely thin (for example, about 60 vm), which is extremely easy to occur for the conveying roller 15 Winding situation. Therefore, 'the interval G between the transport direction D between the 15 transport rollers 15 and the transport direction D' is the engagement. The interval G between the square concave portion 17 and the other convex portion 18 is set to be small (for example, 2 ~ 4 mm). That is, 'the meshing transport rollers 15 and the mutually convex portions 18 are large and deeply meshed, and the meshing distance and overlap size between the forward and backward conveying directions D are larger (for example, about 10 mm) degree). In this way, the thickness of the printed wiring board material A that is to be conveyed, the size of the meshing interval G, the meshing distance, and the overlap size of the conveying roller 15 will be changed and set. The relationship between the front and back of the 15 transport rollers is as follows. <About the top-bottom relationship of the transport roller 15> Next, the relationship between the top-bottom of the transport roller 15 is as follows. As shown in the side view of FIG. 1 or FIG. 3, except for the space 16 for spraying the treatment liquid B, the upper and lower conveying rollers 15 are connected to each other, and not only the recesses 17 and the recesses 17 are located correspondingly. Position, and the convex part 18 and convex part 18 are also located at the corresponding position ° In this corresponding position, the upper and lower conveying rollers are 15 and the upper and lower convex parts are -1 9-This paper size applies Chinese National Standard (CNS) A4 Specifications (210 χ 297 public love) ------------* I ---- II ^ «— — — — — — II (Please read the notes on the back before filling this page ) 457133 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7__ V. Description of the Invention (iX) 1 8 'becomes the printed wiring base sheet A holding and conveying in a surface contact state. This relationship between the conveyer rollers 15 More details. In the example shown in the figure, three sets of upper and lower conveying rollers 15 are used. First, the space between each of the upper F space 16 is formed, and the corresponding opposite conveying rollers 15 are separated. use. In contrast, apart from where the space 16 is formed, the upper and lower conveying rollers 15 are located at corresponding positions, not only at the corresponding positions at the upper and lower recesses 17 and 17 but also at the convex portions 18 and 18 It is set as a corresponding positional relationship. Therefore, in this way, the convex portions 18 of the conveying rollers 15 above and below correspond to the printed wiring base sheet A from above and below, respectively, and the printed wiring base sheet A is swiveled and driven from the upper side to the lower side. Give the transport direction D. The up-down relationship between the transport rollers 15 is as follows. <About operation, etc.> The present invention is configured as described above. So it becomes Ru Bu. Here, the conveying mechanism 8 is provided with a plurality of conveying rollers 15 for the forward and backward conveying direction D parallel to the left-right direction C, and the space 16 for ejecting the liquid B in the wide area 16 is arranged on the upper K In response to this, it is driven to rotate, and the printed wiring board material A is fed in a horizontal posture (refer to FIG. 4 and the like). In addition, the conveying rollers 15 ′ used in the conveying mechanism 8 have concave portions 17 and convex portions 18 on the outer peripheral surface alternately in the left-right direction C. -20-This paper standard applies the China National Standard (CNS) A4 specification (210 X 297 public love) ------- ------ 丨 Lamp · --- ----- &lt; 锖 Read the notes on the back before filling in this page) 457133 Wisdom of the Ministry of Economic Affairs Printed by the Consumer Bureau of the Property Bureau A7 B7 V. Description of the invention (β) A large number are formed at equal pitches, and the peripheral surface is uneven (see Figure 2). This conveying roller 15 is, for example, a plurality of unit members 2 1 for forming a concave portion 17 or a convex portion 18 for the drive shaft 19, and is composed of an externally fixed assembly (refer to FIG. 5 (1)). . In addition, there are 15 transport rollers before and after the transport direction D. In addition to the space 16 for spraying the processing liquid B, the recesses 17 and 18 are located at corresponding positions, and the other recesses 17 are embedded in one of the recesses 17 The convex portion 18 engages the two, and the recessed recessed portion 17 and the convex portion 18 that are loosely fitted have a front-to-back distance G and a left-to-right gap Ή in a non-contact state. The forward and backward conveying rollers 15 are engaged in a rotatable state (see Figs. 1, 2 and 3). On the other hand, in contrast to the upper and lower conveying rollers 15, except for the space 16 for spraying the processing liquid B, the upper and lower recesses 17 and 17 are located at corresponding positions, and the convex portions 18 and 18 are located. Corresponding positions, the printed wiring base sheet A is held between the convex portions 18 and conveyed in a surface-contact state (see Figs. 1, 3, and 4). In addition, the conveyor mechanism 8 of the present invention using such a special conveyor roller 15 is a manufacturing process used for the printed wiring board E (see FIG. 8). In addition, the extremely thin and flexible printed wiring board A is conveyed by the conveying rollers 15 of the conveying mechanism 8 and the space 16 between the conveying rollers 15 from the opposite position. Spray nozzle 10 0 'For the printed wiring board A being transported, spray the developing solution' Corrosive solution, peeling -21-This paper size applies to China National Standard (CNS) A4 specification (210 * 297 males; S) Packing- ------ Order --------- line (please read the »Note on the back side and fill in this page first) Member of the Intellectual Property Bureau of the Ministry of Economic Affairs ΗPrinted by Consumer Cooperatives 457133 A7 B7 V. Description of Invention (W) Treatment liquid B such as liquid or water washing liquid. In addition, the processing liquid B flows from the outer surface of the printed wiring board material A to the left and right direction C (left or right direction) and flows down from the left and right sides. However, the flow of the processing solution B is used to surface-process the printed wiring board material. . <First, about soil-proof winding> Press here, and the conveying mechanism 8 'of the printed wiring board A will become the first, second, and third in the following. First, here the conveying mechanism 8 is a combination of the front and rear conveying rollers 15 'to form a concave portion 17 and a convex portion 18 to mesh with each other. "Therefore, the printed wiring board A is transported, for example, wound after passing The outer peripheral surface of the conveyance roller 15 can be reliably prevented by the forward and backward conveyance rollers 15. This winding prevention will be described in detail. a _ First, the printed wiring board A for the printed wiring board E has been made lighter and thinner, and is more flexible. b. And this printed wiring base sheet A, system treatment B is spray-moistened, and is rich in adhesion. c. And the printed wiring board A is conveyed by holding it up and down to apply pressure. As a result of these a, b and c are placed on the outer peripheral surface of the passing roller 1 5 (2) from the downstream side, and it becomes easy to wind up (refer also to FIG. 6 of the conventional example) If this conveying mechanism 8 is used, such winding can be reliably prevented. That is, the printed wiring board A, which is held and conveyed by the conveying rollers 15 of the upper and lower conveying rollers 15, is conveyed through the immediate conveying -11. This paper size applies the Chinese National Standard (CNS) A4 specifications (210 X 297 mm) — — — — — — — — — — — — — — — — — — — — — — — — — 1 (Please read the notes on the back before filling in this (Page) 457133 A7 B7 V. Description of the invention (> 1) The outer peripheral surface of each convex portion 18 of the roller 15 is intended to be posted from the front end. (Please read the note on the back before filling in this page.) However, for each of the convex rollers 18 of this conveying roller 15, the conveying rollers located adjacent to each concave portion 17 in the left-right direction C and before and after the conveying direction D Each of the convex portions 18 of 15 is sequentially engaged with its turning drive. Therefore, the front end portion of the printed wiring base sheet A which is to be posted on the outer surface of each convex portion 18 of the conveying roller 15 is conveyed in front of and behind the concave portion 17 biting into the conveying roller 15 in this way. The convex portion 18 of the roller 15 is immediately peeled off. In this manner, the printed wiring board base material A to be transported can be prevented from being wound around the outer peripheral surface of the convex portion 18 of the transporting roller 15 driven by rotation. <Second, the prevention of damage> Second, here, the conveying mechanism 8 is the convex portions 18 and 18 of the upper and lower conveying rollers 15 and the printed wiring board material A is held in a surface contact state. delivery. In addition, each of the convex portions 18 of the transport rollers 15 on the side opposite to the vertical direction in the space 16 is transported to keep the printed wiring board A in a surface contact state. Therefore, it is possible to surely prevent contact damage or abrasion from occurring on the outer surface of the printed wiring board material A. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

關於這種防止傷齊之發生再詳述之。印刷配線基板材A 之外表面,係電路F (參照第8圖)形成面,其係由處理 液B之表面處理之對象面。 並且 &gt; 印刷配線基板材A,係如上述輕量化、極薄化之 進展,而富於可撓性。於是印刷配線基板材A係以所噴射 -23 - 本紙張尺度適用中國國家標準(CNS)A4規格&lt;210^ 297公釐) 457133 經濟部智慧財產局員Η消費合作社印製 A7 B7 五、發明說明(u) 之處理液B之重Μ或噴霧壓,容易受到推壓力。 與此相對,於此輸送機構8係被迴轉驅動之上下之輸送 滾輪1 5之各凸部1 8與凸部1 8,爲從上下將印刷配線 基板材A,並非點接觸狀態,以面接觸狀態挾住輸送。 又,處理液B爲從噴霧管1 4所噴射之間隔空間1. 6, 係與噴射位於上下之相反側之輸送滾輪1 5之各凸部1 8 ’藉其迴轉驅動,將印刷配線基板材A並非點接觸狀態 (參照第5圖之(2 )圖),而以面接觸狀態保持輸送( 第5圖之(1 )圖與(2 )圖比較對照,再參照第1圖、 第3圖)。 像這樣,於此輸送機構8 1係輸送滾輪1 5爲在各凸部 1 8,以接觸面積大的面接觸狀態,將印刷配線基板材A 從上下挾住輸送•或從上或下保持輸送。 於是,被運送之可撓性印刷配線基板材A,係以被噴射 之處理液B之重量或噴霧壓受到推壓力,但是可避免以集 中性地成點接觸狀態推壓於輸送滾輪1 5。印刷配線基板 材A,係以被迴轉驅動之輸送滾輪1 5,成面接觸狀態輸 送。 错此,在印刷配線基板材A之外表面,就可確苡防止由 於輸送滾輪1 5發生接觸傷或擦傷。 〈第3 ,關於處理液B之流動〉 第3,於此輸送機構8,係採用備有許多凸部1 8之輸 送滾輪1 5,並且,對於各凹部1 7組合成前後之輸送滾 -24 - 本紙張尺度適用中國國家標準(CNS)A4規格&lt;210 X 297公釐) .!裝--------訂---------線‘ 《請先《讀背面之注$項再填寫本頁) 457133 A7 B7 五、發明說明) 輪1 5之凸部1 8互相嚙合。 (請先閱讀背面之注意事項再填寫本頁) 於是,從噴霧喷嘴1 〇所噴射之處理液b,m於具有這 種輸送滾輪1 5而阻止對於前後運送方向D之流動,如所 需只向左右方向C流動受到限制。 關於這種處理液B之流動,再詳述之。從噴霧噴嘴1 ◦ 所噴射之處理液B,係將被運送之印刷配線基板材A外表 面,在間隔空間1 6內附近向左右方向C流動後,從印刷 配線基板材A之左右兩側流下。 並且,藉這種左右方向C之處理液C之流動,處理液B 依序被更新,以此進行所需之表面處理,關於印刷配線基 板材A之外表面,將被均勻地實施。 並且,於此輸送機構8 1這種左右方向C之處理液B, 就可確實地實現。 亦即,於間隔空間1 6從噴霧噴嘴1 0所噴射之處理液 B,首先,作爲第1階段,係位於其下游側之輸送滾輪1 5之各凸部1 8,來防止向前後運送方向D之流動(參照 第1圖、第3圖)。 經濟部智慧財產局員工消費合作社印製 再將作爲第2階段,關於其輸送滾輪1 5之各凹部1 7 ,位於其K游側或上游側之輸送滾輪1 5之ι&quot;ι部1 8,由 於依序被咬入’而被關閉。這樣地,其輸送滾輪1 5之各 門部1 7也被關閉,所以被噴射之處理液B向前後運送方 向D之流動,從此面也被防止流入(參照第2圖)。 藉這種第1階段與第2階段之組合,從噴霧噴嘴1 〇所 -25- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(w) 噴射之處理液B,係如所需在間隔空間1 6內附近,將被 輸送之印刷配線基板材A外表面,受到限制成爲確實向左 右方向C流動。 【發明效果】 關於本發明之印刷配線基板材之輸送機構,係如以卜.所 說明,其特徵爲;採用外周面爲於多數之凹部與凸部成爲 凹凸狀之特殊輸送滾輪,並且,將這種輸送滾輪,在前後 以非接觸狀態組合成互相嚙合。所以,本發明將發揮以下 之效果。 (第1效果〉 第1 ,可防ih被輸送之印刷配線基板材之捲繞。亦即, 於此印刷配線基板材之輸送機構,將前後之運送滾輪,組 合成其凹部與凸部互相嚙合。 於是,被運送之印刷配線基板材1例如從前端部張貼、 捲繞於通過即後之被迴轉驅動之輸送滾輪外周面之事,係 可由其前後之輸送滾輪,就可確實防止。亦即,如使用直 線之輸送滾輪之上述此種習知例一般,被輸送之印刷配線 基板材,爲例如張貼 '捲繞於從前端部到通過即後之輸送 滾輪之外周向,致使折曲’折疊’掉落,損傷等現象將吋 避免。 像這樣,印刷配線基板材將被順利地運送,顯像、蝕刻 、剝離等藥液處理或洗淨處理等之表面處理將如預期地 實施。 -26 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -------I - i I — II I I 訂 II---- (請先閱讀背面之注意事項再填寫本頁) 457 1 33 Α7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明(A ) 〈第2效果〉 第2 ’與此同時也可防止印刷配線基板材之發生傷害=&gt; 亦即,於此印刷配線基板材之運送機構,係上下之輸送滾 輪之各凸部與凸部1將印刷配線基板材以面接觸狀態挾住 輸送,或,於間隔空間係相反側之輸送滾輪之各凸部,將 印刷配線基板材以面接觸狀態保持輸送。 於此,被輸送之印刷配線基板材之電路形成面 '屬於表 面處理對象面之外表面,例如對於塗佈感光性抗蝕劑或銅 箔,由於輸送滾輪所引起之接觸傷或擦傷將可確實地防止 〇 亦即|使用輸送輪之上述此種如習知例,被輸送之印刷 配線基板材約略以點接觸狀態對於各輸送輪集中地推壓 致使發生接觸傷或擦傷將可避免。 〈第3效果〉 第3,並且可提升印刷配線基板材之表面處理之均勻性 。亦即,於此印刷配線基板材之輸送機構,係採用備有|Π| 部之運送滾輪,並且,組合成在其凹部前後之運送滾輪之 凸部互相嚙合。 於此,從噴霧噴嘴所噴射之處理液,係由於具有這種輸 送滾輪,於間隔空間內附近將印刷配線基板材之外表面, 限制成只向左右方向流動。 亦即,使用輸送輪之上述此種如習知例,所噴射之處理 液,爲對於與左右方向成直交方向之前後之輸送力向也變 -21 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ------------I --II —--I ^--I I I I I--^ (請先閱讀背面之注項再填寫本頁) 457133 經濟部智慧財產局員工消費合作社印製 A7 __B7_ 五、發明說明(4 ) 成亂流流動,在印刷配線基板材之中央部等變成液池而滯 留之現象,將可避免處理液更新之妨礙。 因此,本發明係關於印刷配線基板材之電路形成面 '屬 於表面處理對象面之外表面,消除表面處理之快慢、偏差 現象,而可確實保持表面處理之整體性均勻性》 〈效果之組合〉 於本發明之印刷配線基板材之運送機構,像這樣,第1 ,可防止捲繞,同時,第2,也防止損傷之發生,第3, 表面處理之均勻性也會提升。亦即,若依據本發明,上述 之此種於習知例同時達成被認爲困難之3點效果,才能同 時達成。 並且,這種3項效果之同時發揮,關於小型化、輕量化 、微細化、極薄化、可撓性化 '多層化有進展之印刷配線 基板材,尤其其高密度化、微細化、高精度化顯著之其電 路而言,其意義可謂極大。並且,減少不良,良率變成良 好1生產力會提升等:在成本上之效果也很人。 像這樣,存在於此種習知例之問題全部將得到解決等, 本發明之發揮效果極爲顯著而大° 圖式之簡單說明 第1圖關於有關本發明之印刷配線基板材之輸送機構,供 爲發明實施形態之說明,輸送滾輪等之側面圖《 第2圖係供爲本發明之實施形態之說明,輸送滾輪之平剖 面圖。 -28 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ----------- I' I * 11-----訂· 1-------線 (請先閱讀背面之注項再填寫本頁&gt; 457133 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(4 ) 第3圖係供爲本發明之實施形態之說明’輸送滾輪等另外 例之側面圖。 第4圖係供爲本發明之實施形態之說明’而是處理室之全 體側面圖。 第5圖,(1 )圖供爲本發明之實施形態之說明’而是輸 送滾輪之正剖面圖,(2 )圖係供爲使用輪子之此種習知 例之說明之正剖面圖。 第6圖係供爲使用運送輪之此種習知例之說明之要部側 面圖。 第7圖係供爲使用輪+之此種習知例之說明,(1 )圖係 要部之側面圖,(2 )圖係平面圖。 第8圖係印刷配線基板材之平面說明圖。 【符號之說明】 1 輸送機構(習知例者) 2 輸送滾輪(習知例者) 3 輸送機構(習知例者) 4 輸送輪 5 間隔空間(習知例者) 6 噴霧噴嘴(習知例奍) 7 驅動軸(習知例者) 8 輸送機構(本發明者) 9 處理室 1 0 噴霧噴嘴 -29 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)The occurrence of such injury prevention will be described in detail. The outer surface of the printed wiring board A is the surface on which the circuit F (see Fig. 8) is formed, and it is the surface to be treated by the surface of the treatment liquid B. And &gt; The printed wiring base sheet A is rich in flexibility as described above in terms of progress in weight reduction and extremely thinning. Therefore, printed wiring board A is based on the sprayed -23-This paper size applies Chinese National Standard (CNS) A4 specifications &lt; 210 ^ 297 mm) 457133 Member of Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives printed A7 B7 V. Description of the invention (U) The weight M or spray pressure of the treatment liquid B is susceptible to a pushing force. On the other hand, the conveying mechanism 8 is the convex part 18 and convex part 18 of the conveying rollers 15 which are driven up and down by the rotation, and the printed wiring board A is not in a point contact state, and is in surface contact. The state holds the conveyor. Further, the treatment liquid B is a space 1.6 sprayed from the spray tube 14 and is a convex portion 1 8 ′ of the conveying roller 15 located on the opposite side of the upper and lower sides from the spraying. A is not in a point contact state (refer to Figure (2) of Figure 5), but is maintained in a surface contact state (Figures (1) and (2) of Figure 5 are compared and contrasted, and then refer to Figures 1 and 3) ). In this way, here the conveying mechanism 8 1 is a conveying roller 15 that conveys the printed wiring base sheet A from above and below at each convex portion 18 in a surface contact state with a large contact area, or maintains conveying from above or below. . Therefore, the transported flexible printed wiring board A is pressed by the weight of the sprayed treatment liquid B or the spray pressure, but it can be prevented from being pressed on the conveying roller 15 in a point-contact state in a centralized manner. The printed wiring board material A is conveyed in a surface contact state by a conveying roller 15 which is driven by rotation. If this is not the case, it is possible to surely prevent contact damage or abrasion due to the transport roller 15 on the outer surface of the printed wiring substrate A. <Third, regarding the flow of the processing liquid B> Third, here, the conveying mechanism 8 uses a conveying roller 15 provided with a plurality of convex portions 18, and each concave portion 17 is combined to form a forward and backward conveying roller-24. -This paper size is applicable to China National Standard (CNS) A4 specifications &lt; 210 X 297 mm).! Installed -------- order --------- line '"Please read the back" (Note the item $, then fill in this page) 457133 A7 B7 V. Description of the invention) The convex portions 18 of the wheels 15 mesh with each other. (Please read the precautions on the back before filling in this page.) Therefore, the treatment liquid b, m sprayed from the spray nozzle 10 has the conveying roller 15 to prevent the flow in the forward and backward conveying direction D. Flow in the left-right direction C is restricted. The flow of this treatment liquid B will be described in detail. From the spray nozzle 1 ◦ The sprayed treatment liquid B is the outer surface of the printed wiring board A that will be transported in the vicinity of the space 16 and flows to the left and right direction C, and then flows down from the left and right sides of the printed wiring board A. . In addition, by the flow of the processing liquid C in the left-right direction C, the processing liquid B is sequentially updated to perform the required surface treatment, and the outer surface of the printed wiring substrate A will be uniformly implemented. Further, the processing liquid B in the left-right direction C such as the conveying mechanism 81 can be surely realized. That is, the treatment liquid B sprayed from the spray nozzle 10 in the space 16 is firstly, as the first stage, the projections 18 of the transport rollers 15 located on the downstream side of the treatment liquid B to prevent the forward and backward transport directions. The flow of D (see Figures 1 and 3). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs will be used as the second stage. Conveying rollers 15 on its conveying rollers 15 and conveying rollers 15 on the K side or upstream side of the conveying rollers 15 and 18, Closed due to being bitten in sequence. In this way, the doors 17 of the transport rollers 15 are also closed, so that the sprayed treatment liquid B flows forward and backward in the direction D, and inflow is prevented from this side as well (see Fig. 2). With this combination of the first stage and the second stage, from the spray nozzle 10 to 25-this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 457133 Employee Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printed A7 B7 V. Description of the invention (w) The sprayed treatment liquid B is restricted to the outer surface of the printed wiring board A to be transported to the right and left direction C, if necessary, within the space 16 . [Effects of the Invention] The conveying mechanism of the printed wiring board material of the present invention is as described in the following. It is characterized by adopting a special conveying roller whose outer peripheral surface has a large number of concave and convex portions, and The conveying rollers are combined in a non-contact state to mesh with each other. Therefore, the present invention has the following effects. (First effect> First, it can prevent the winding of the printed wiring board material being conveyed by ih. That is, the conveying mechanism of the printed wiring board material here combines the front and rear transport rollers to form the concave and convex portions of each other to mesh with each other. Therefore, the printed wiring board material 1 to be transported, for example, is attached from the front end and wound around the outer peripheral surface of the conveying roller that is driven to be rotated immediately afterward, which can be reliably prevented by the conveying rollers before and after it. As in the above-mentioned conventional example using a linear conveying roller, the printed wiring board material to be conveyed is, for example, posted 'wound from the front end to the outer circumferential direction of the immediately passing conveying roller, causing bending' to fold 'Falling, damage and other phenomena will be avoided. In this way, printed wiring board materials will be smoothly transported, and surface treatments such as chemical solution treatment such as development, etching, and peeling will be carried out as expected. -26 -This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) ------- I-i I — II II Order II ---- (Please read the notes on the back before filling (This page) 457 1 33 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (A) <Second Effect> At the same time, it can also prevent the harm of printed wiring board materials = &gt; That is, here printed wiring board The conveying mechanism of the plate is that the convex portions of the upper and lower conveying rollers and the convex portion 1 hold and convey the printed wiring base plate in a surface contact state, or the convex portions of the conveying rollers on the opposite side of the space system convey the printed wiring. The base material is conveyed in a state of surface contact. Here, the circuit forming surface of the printed wiring base material to be conveyed is the surface other than the surface treatment target surface. For example, for coating a photosensitive resist or copper foil, The contact injury or abrasion caused by it will be reliably prevented. That is, the above-mentioned conventional use of the conveyer wheel, the printed wiring board material being conveyed is approximately point-contacted, and the contact is caused by the concentrated pressing of each conveyer wheel. Wounds or abrasions can be avoided. <3rd effect> 3rd, and can improve the uniformity of the surface treatment of the printed wiring board material. That is, the printed wiring board material is printed there. The conveying mechanism adopts a conveying roller provided with a | Π | section, and the convex parts of the conveying roller assembled before and after the concave part are engaged with each other. Here, the processing liquid sprayed from the spray nozzle is provided with such conveyance. The roller restricts the outer surface of the printed wiring board material in the vicinity of the space to flow in the left-right direction. That is, as described above, using the conveyer wheel, the sprayed treatment liquid is for the left-right direction. The conveying force direction before and after the orthogonal direction also changes -21-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------------ I --II — --I ^-IIII I-^ (Please read the note on the back before filling out this page) 457133 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7_ V. Description of the invention (4) Flowing in disorder The phenomenon that the central part of the printed wiring board material becomes a liquid pool and stays can prevent the treatment liquid from being hindered. Therefore, the present invention relates to a circuit forming surface of a printed wiring board material, which belongs to the surface other than the surface treatment target surface, eliminates the speed and deviation of the surface treatment, and can surely maintain the overall uniformity of the surface treatment. In the conveying mechanism of the printed wiring board material of the present invention, like this, the first can prevent winding, the second can also prevent damage, and the third, the uniformity of the surface treatment can be improved. That is, according to the present invention, it is possible to achieve the above three effects which are considered difficult at the same time in the conventional examples. In addition, these three effects are exerted at the same time, and printed wiring board materials have progressed in terms of miniaturization, weight reduction, miniaturization, ultra-thinning, and flexibility, and multilayered printed wiring boards, especially their high density, miniaturization, and high As far as precision is concerned, its circuit is of great significance. In addition, it reduces the bad, the yield becomes good, and productivity increases, etc .: The effect on cost is also very impressive. In this way, all the problems existing in such conventional examples will be solved, etc. The effect of the present invention is extremely significant and large. Brief Description of the Drawings Fig. 1 is about the conveying mechanism of the printed wiring board material related to the present invention. To illustrate the embodiment of the invention, a side view of the conveying roller and the like "FIG. 2 is a plan sectional view of the conveying roller for the purpose of explaining the embodiment of the invention. -28-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ----------- I 'I * 11 ----- Order · 1 ---- --- Line (Please read the note on the back before filling this page> 457133 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (4) Figure 3 is for the implementation of the present invention A side view illustrating another example of a conveying roller and the like. Fig. 4 is a view for explaining an embodiment of the present invention, but an entire side view of a processing chamber. Fig. 5 and (1) are views for an embodiment of the present invention. Explanation 'is a front sectional view of a conveying roller, (2) is a front sectional view for explaining such a conventional example using a wheel. FIG. 6 is a description for this conventional example using a conveying wheel. Figure 7 is a side view of the main part. Figure 7 is a description of such a conventional example using a wheel +, (1) is a side view of the main part, and (2) is a plan view. Figure 8 is a printed wiring board Explanation of the plane. [Explanation of the symbols] 1 Conveying mechanism (known person) 2 Conveying rollers (known person) 3 Conveying mechanism (known person) 4 Conveying Wheel 5 Space (conventional example) 6 Spray nozzle (conventional example) 7 Drive shaft (conventional example) 8 Conveying mechanism (inventor) 9 Processing chamber 1 0 Spray nozzle-29-Applicable to this paper size China National Standard (CNS) A4 specification (210 X 297 mm)

----------I - I I I I — I I . I ----I 1 I (請先閲讀背面之注意事項再填寫本頁J 457133 經濟部智慧財產局員工消費合作社印製 A7 _B7 五、發明說明(Μ ) 1 1 液 槽 1 2 配 管 1 3 泵 浦 1 4 噴 霧 管 1 5 輸 送 滾 輪 ( 本 發 明 者) 1 6 間 隔 空 間 ( 本 發 明 者) 1 7 凹 部 1 8 凸 部 1 9 驅 動 軸 (. 本 發 明 者 ) 2 0 貫 通 孔 2 1 單 位 構 件 A 印 刷 配 線: 基 板材 B 處 理 液 C 左 右 方 向 D 輸 送 方 向 E 印 刷 配 線; 板 5 F 電 路 G 間 隔 Η 問 隙 -30- --------I ί 裝 -- ----J 訂-------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)---------- I-IIII — II. I ---- I 1 I (Please read the notes on the back before filling in this page J 457133 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _B7 V. Description of the invention (M) 1 1 Liquid tank 1 2 Piping 1 3 Pump 1 4 Spray tube 1 5 Conveying roller (inventor) 1 6 Space (inventor) 1 7 Concave part 1 8 Convex part 1 9 Drive Shaft (. The inventor) 2 0 through-hole 2 1 unit member A printed wiring: base plate B processing liquid C left and right direction D conveying direction E printed wiring; board 5 F circuit G interval Η interstitial -30- ---- ---- I ί installed----- J order ------- line (please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm)

Claims (1)

133 133 經濟郎智慧財'?厂?4工消赍合作社印製 A8 B8 C8 D8 六、申請專利範圍 1 . 一種印刷配線基板材之輸送機構,係使用於邊輸送印刷 配線基板材邊噴射處理液實施表面處理之印刷配線基板 之製程,將該印刷配線基板材挾住輸送之具有上下多數 之輸送滾輪所構成,其特徵爲1該輸送滾輪,係外周面 成爲凹凸狀,並且,前後者爲除了該處理液噴射用之間 隔空間成爲可迴轉驅動狀態嚙合。 2 .如申請專利範圍第1項之印刷配線基板材之輸送機構 ,其中,該輸送滾輪,係在外周面有凹部與凸部,而向 左右方向交互地以等節距形成有多數。 3 .如申請專利範圍第2項之印刷配線基板材之輸送機構 ,其中,除了該處理液噴射用之間隔空間,於前後之該 輸送滾輪間,該凹部與凸部爲位於對應位置,使一方之 該凹部內遊插另方之凸部使兩者互相嚙合,並且,被遊 插之該凹部與凸部,係具有前後之間隔與左右之間隙成 爲非接觸狀態, 並且,除了該處理液噴射用之間隔空間,於上下之該 輸送滾輪間,在上下該凹部與凹部爲位於對應位置,並 且·該凸部與凸部爲位於對應位置。 4 .如申請專利範圍第3項之印刷配線基板材之輸送機構 ,其屮,上下之該輸送滾輪,係於該凸部間將該印刷配 線基板材以面接觸狀態挾住輸送。 5 .如申請專利範圍第2項之印刷配線基板材之輸送機構 ,其中,該輸送滾輪爲由,驅動軸被外嵌固定凹部或凸 本紙張尺度適用中國國家標舉(CNS ) A4规格(210X 297公鼇) ----------裝---I---訂------線 (請先閲讀背面之注意事項再填寫本頁) 經濟部ί3·,Α}时,r-^θ工消費合作社印製 457133 A8 B8 C8 D8 __ 六、申請專利範圍 部形成用之多數單位構件之集合體所構成。 6 .如申請專利範圍第1項之印刷配線基板材之輸送機構 ,其中,該印刷配線基板材1係極薄而富於可撓性,該 處理液係由顯像液、腐蝕液、剝離液、或水洗液等所構 成,從位於對向位置之噴霧噴嘴所噴射, 該輸送滾輪,係向左右方向平行地向前後輸送方向配 設有多數個,並且,除Γ該處理液噴射用之間隔空間, 在上下對應配設,而被迴轉驅動,將該印刷配線基板材 以水平方式輸送。 -32 - 表紙S:尺度通用中國國家榡率((μ ) M规格(210X297公釐} ---------^---K---#------0 (請先閲讀背面之注意事項再填寫本頁)133 133 Economy Lang Smart Money '? plant? 4Printing A8, B8, C8, D8 by Cooperative Cooperatives 6. Scope of patent application 1. A printed wiring substrate conveying mechanism is a process for printing printed wiring substrates that is used to spray surface treatment liquid while conveying printed wiring substrates. The printed wiring board is held by a conveying roller having a large number of upper and lower rollers. The conveying roller is characterized in that the outer peripheral surface is uneven, and the former and the latter are spaced apart from the space for spraying the treatment liquid. Engaged in swing driving state. 2. The conveying mechanism of the printed wiring board material according to the first patent application scope, wherein the conveying roller has a concave portion and a convex portion on the outer peripheral surface, and a plurality of alternately formed at equal pitches in the left and right directions. 3. The conveying mechanism of the printed wiring board material according to item 2 of the scope of patent application, wherein, in addition to the space for spraying the processing liquid, between the conveying rollers in front and back, the concave portion and the convex portion are located at corresponding positions, so that one side The recessed part of the recess is inserted into the other convex part to mesh the two with each other, and the recessed part and the protruding part that are inserted are in a non-contact state with a front-to-back distance and a left-to-right gap, and except for the treatment liquid spray The used space is between the conveying rollers above and below, the recessed portion and the recessed portion are located at corresponding positions on the upper and lower sides, and the convex portion and the convex portion are positioned at corresponding positions. 4. If the conveying mechanism of the printed wiring board material according to item 3 of the patent application scope, the upper and lower conveying rollers are held between the convex portions to convey the printed wiring board material in a surface contact state. 5. If the conveying mechanism of the printed wiring board is applied for item 2 of the scope of the patent application, wherein the conveying roller is used as the driving roller, the drive shaft is externally fixed and recessed or convex. The size of the paper is applicable to China National Standards (CNS) A4 specifications (210X 297 Gongao) ---------- installation --- I --- order ------ line (please read the notes on the back before filling this page) Ministry of Economic Affairs 3, Α} At the time, printed by r- ^ θ Industrial Consumer Cooperative Co., Ltd. 457133 A8 B8 C8 D8 __ VI. It is composed of the assembly of most unit components for forming the scope of patent application. 6. The conveying mechanism of the printed wiring-based board according to item 1 of the scope of patent application, wherein the printed wiring-based board 1 is extremely thin and flexible, and the processing liquid is composed of a developing solution, an etching solution, and a stripping solution. It is sprayed from a spray nozzle located at the opposite position, or a washing liquid, etc. The transport rollers are arranged in parallel to the left and right directions in a forward and backward transport direction, and the processing liquid is sprayed apart from the interval. The space is arranged corresponding to the upper and lower sides, and is driven to rotate, and the printed wiring board material is conveyed horizontally. -32-Sheet S: Standard Chinese national standard ((μ) M specification (210X297 mm) --------- ^ --- K --- # ------ 0 (Please (Read the notes on the back before filling out this page)
TW89122429A 2000-08-28 2000-10-25 A conveying mechanism for printed wiring substrates TW457133B (en)

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JP2000257113A JP3479636B2 (en) 2000-08-28 2000-08-28 Printed wiring board material transfer mechanism

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Publication number Priority date Publication date Assignee Title
JP4892276B2 (en) * 2006-05-18 2012-03-07 本田技研工業株式会社 Liquid coating method and liquid coating apparatus
JP2015084407A (en) 2013-09-17 2015-04-30 アイケイ株式会社 Surface treatment device of substrate material
CN204660915U (en) * 2015-04-10 2015-09-23 宇宙电路板设备(深圳)有限公司 A kind of soft board feedway
CN117046646B (en) * 2023-10-12 2023-12-19 启东中冶润滑液压设备有限公司 Material-saving spraying device for electromechanical product plates

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