JP2001196438A - Apparatus for conveying thin plate-like material - Google Patents

Apparatus for conveying thin plate-like material

Info

Publication number
JP2001196438A
JP2001196438A JP2000006558A JP2000006558A JP2001196438A JP 2001196438 A JP2001196438 A JP 2001196438A JP 2000006558 A JP2000006558 A JP 2000006558A JP 2000006558 A JP2000006558 A JP 2000006558A JP 2001196438 A JP2001196438 A JP 2001196438A
Authority
JP
Japan
Prior art keywords
thin plate
glass substrate
gas injection
thin
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000006558A
Other languages
Japanese (ja)
Inventor
Sukeaki Hamanaka
亮明 濱中
Atsumori Hashimoto
敦守 橋本
Koji Maeda
耕志 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Engineering Co Ltd
Original Assignee
Toray Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co Ltd filed Critical Toray Engineering Co Ltd
Priority to JP2000006558A priority Critical patent/JP2001196438A/en
Publication of JP2001196438A publication Critical patent/JP2001196438A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

PROBLEM TO BE SOLVED: To convey a large-sized thin plate-like material such as a glass substrate or the like used to manufacture a liquid crystal display panel requiring contamination prevention or the like without slip-down. SOLUTION: The apparatus for conveying the thin-plate-like material supports one end and the other end of the material 1 by driven stepped rollers 2a, 2b, injects pressurized gas from a gas jet table 4 under the material 1 toward the material 1, and conveys the material 1 while holding the material 1 not to excessively deflect due its own weight.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、液晶表示パネルを
製造する為に用いられるガラス基板や金属箔に高分子フ
ィルムをラミネートした積層材等のような薄板状材の搬
送装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for transporting a thin plate-like material such as a glass substrate or a laminated material obtained by laminating a polymer film on a metal foil used for manufacturing a liquid crystal display panel.

【0002】[0002]

【従来の技術】従来、周知のように、液晶表示パネルを
製造する為にガラス基板が用いられているが、液晶表示
用ディスプレーの大型化に伴って、ガラス基板のより一
層の大形薄板化が推進されている。
2. Description of the Related Art Conventionally, as is well known, a glass substrate is used for manufacturing a liquid crystal display panel. However, as the size of a display for a liquid crystal display increases, the size of the glass substrate becomes larger and thinner. Is being promoted.

【0003】例えば、幅(W)が650mm、長さ
(L)が830mm、板厚(t)が0.7mmといった
ガラス基板が用いられるようになって来たと共に更に薄
いガラス基板を用いることが検討されつつある。
For example, a glass substrate having a width (W) of 650 mm, a length (L) of 830 mm, and a thickness (t) of 0.7 mm has come to be used and a thinner glass substrate has been used. It is being considered.

【0004】[0004]

【発明が解決しようとする課題】ところが、ガラス基板
の大形薄板化は、基板自体が変形し易くなる為にそれの
搬送を困難化し、従来の一般的な搬送技術では対応でき
ないようになって来た。
However, the thinning of the glass substrate makes it difficult to transport the glass substrate because the substrate itself is easily deformed, and the conventional general transport technology cannot cope with the problem. Came.

【0005】すなわち、従来においては、ガラス基板の
一端及び他端夫々の下面に対する接触によって前記ガラ
ス基板を支持しながら搬送し得るように構成された搬送
装置が用いられていたが、この搬送装置は、比較的小形
で厚いガラス基板の搬送には適していても、そのような
形態の装置で、大形薄板化されたガラス基板を搬送しよ
うとすると、かかるガラス基板が自重によって湾曲し撓
みが過大になってずれ落ちしたり或いは破損したりし易
くなるといった問題が惹起されると共に、その撓み量が
搬送中において変化して振動やうねりが発生し易く、従
って、発塵や騒音の原因になる為、大形薄板化されたガ
ラス基板の搬送には適していなかった。
That is, in the related art, a transfer device configured to be able to transfer the glass substrate while supporting the glass substrate by contacting the lower surface of one end and the other end of the glass substrate has been used. However, even if it is suitable for transporting a relatively small and thick glass substrate, if a large and thin glass substrate is transported by such an apparatus, such a glass substrate is bent by its own weight and excessively bent. Causes a problem of being easily displaced, dropped or damaged, and the amount of deflection thereof changes during conveyance, which easily causes vibration and undulation, thus causing dust and noise. Therefore, it is not suitable for transporting a large-sized thin glass substrate.

【0006】[0006]

【発明が解決しようとする課題】本発明は、上述の欠点
に鑑みて発明されたものであって、その目的は、大形薄
板化されたガラス基板等のような薄板状材を、ずれ落ち
や破損等が発生しないように良好に搬送することができ
る搬送装置を提供することである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-described drawbacks, and has as its object to shift a thin plate-like material such as a large-thin glass substrate into a sheet. An object of the present invention is to provide a transport device capable of favorably transporting such that no damage or breakage occurs.

【0007】[0007]

【課題を解決するための手段】上記目的を達成する本発
明に係る薄板状材の搬送装置は、請求項1に記載するよ
うに、薄板状材の一端及び他端夫々の下面に対する接触
によって前記薄板状材を支持しながら搬送し得るように
構成された搬送装置において、前記薄板状材の自重によ
る撓みが過大にならないように前記薄板状材の下面に向
って加圧気体を噴射する気体噴射テーブルを装着したこ
とを特徴とするものである。
According to a first aspect of the present invention, there is provided a sheet-like material conveying apparatus which achieves the above object by contacting the lower surfaces of one end and the other end of the sheet-like material. In a transfer device configured to be able to transfer while supporting a thin plate-shaped material, gas injection for injecting pressurized gas toward a lower surface of the thin plate-shaped material so that bending of the thin plate-shaped material due to its own weight is not excessive. It is characterized by having a table attached.

【0008】このように、搬送される薄板状材の自重に
よる撓みが過大にならないように前記薄板状材の下面に
向って加圧気体を噴射する気体噴射テーブルを装着して
いるから、ずれ落ちや破損等が発生しないように良好に
前記薄板状材を搬送することができる。
As described above, since the gas injection table for injecting the pressurized gas toward the lower surface of the thin sheet material is mounted so that the deflection of the thin sheet material to be conveyed does not become excessive due to its own weight, it is displaced. The thin plate-shaped material can be satisfactorily conveyed so as not to cause breakage or the like.

【0009】[0009]

【発明の実施の形態】正面図である図1及び図1の右側
面図である図2において、薄板状材1を搬送する為の搬
送装置が示されているが、この搬送装置は、一方の段付
きローラ2aと他方の段付きローラ2bとで薄板状材1
を支持して搬送し得るように構成されている。
FIG. 1 is a front view, and FIG. 2 is a right side view of FIG. 1. A transport device for transporting a thin plate 1 is shown. Of the sheet-like material 1 with the stepped roller 2a of
Is configured to be supported and transported.

【0010】なお、図示のように、一方の段付きローラ
2aは、薄板状材1の一端下面に対して接触して支持し
得るように装着されていると共に他方の段付きローラ2
aは、薄板状材1の他端下面に対して接触して支持し得
るように装着されている。
As shown in the figure, one stepped roller 2a is mounted so as to be able to contact and support the lower surface of one end of the thin plate-shaped material 1 and the other stepped roller 2a.
a is attached so as to be able to contact and support the lower surface of the other end of the thin plate-shaped material 1.

【0011】また、これらの段付きローラ2a,2b
は、図示されていない駆動装置に連携されて同期して駆
動回転され得るように装着されている軸3a,3bに装
着されていると共に、薄板状材1の幅(W)に対応して
両ローラ間の間隔を調整し得るように、基準側(固定
側)の段付きローラ2aに対して他方の段付きローラ2
bを水平方向(図2において示されている矢印方向)へ
移動自在に装着している。
In addition, these stepped rollers 2a, 2b
Are mounted on the shafts 3a and 3b mounted so as to be able to be driven and rotated in synchronization with a driving device (not shown). The reference step (fixed side) stepped roller 2a and the other stepped roller 2a are adjusted so that the distance between the rollers can be adjusted.
b is mounted movably in the horizontal direction (the direction of the arrow shown in FIG. 2).

【0012】また、一方の段付きローラ2aの装着ピッ
チと他方の段付きローラ2bのそれとは同一であって、
しかも、両者は同一レベルに装着されている。その為、
薄板状材1の一端及び他端の下面に対する段付きローラ
2a,2bの接触によって生じる摩擦力で薄板状材1を
図1において右側から左側へ搬送することができる。
The mounting pitch of one stepped roller 2a is the same as that of the other stepped roller 2b,
Moreover, both are mounted on the same level. For that reason,
The thin plate 1 can be conveyed from right to left in FIG. 1 by the frictional force generated by the contact of the stepped rollers 2a and 2b with the lower surfaces at one end and the other end of the thin plate 1.

【0013】加えて、一方の段付きローラ2aと他方の
段付きローラ2b間に気体噴射テーブル4が配設されて
いるが、この気体噴射テーブル4は、薄板状材1の下面
側に位置され、かつ、薄板状材1の下面に対して接近離
反し得るように装着されている。
In addition, a gas injection table 4 is arranged between one stepped roller 2a and the other stepped roller 2b, and the gas injection table 4 is located on the lower surface side of the thin plate material 1. And it is mounted so that it can approach and separate from the lower surface of the thin plate-shaped material 1.

【0014】よって、圧縮機5を運転し、管路6を経て
気体噴射テーブル4に気体を加圧供給することにより、
薄板状材1の下面に向って加圧気体を噴射することがで
きるが、その際、気体噴射テーブル4が薄板状材1の下
面に対して接近離反せしめられて所定レベルに位置決め
されると共に、薄板状材1の自重による撓みが過大にな
らないようにその噴射量が所定に制御される。
Therefore, by operating the compressor 5 and pressurizing and supplying the gas to the gas injection table 4 through the pipe 6,
Pressurized gas can be injected toward the lower surface of the thin plate 1, and at this time, the gas injection table 4 is moved toward and away from the lower surface of the thin plate 1 and positioned at a predetermined level, The injection amount is controlled to a predetermined value so that the bending of the thin sheet material 1 due to its own weight does not become excessive.

【0015】なお、薄板状材1の下面に対する気体噴射
テーブル4の接近離反は、圧縮機5等が装着されている
ベースプレート(図示されていない)を昇降手段(例え
ば、エアーシリンダー等)で水平に移動させて行うこと
ができる。
The approach and separation of the gas injection table 4 with respect to the lower surface of the thin plate-shaped material 1 are performed by moving a base plate (not shown) on which the compressor 5 and the like are mounted horizontally by means of elevating means (for example, an air cylinder or the like). It can be done by moving.

【0016】また、加圧気体の噴射に際しては、管路6
に装着されている弁7が開口されるが、この弁7は、薄
板状材1の有無を感知するセンサー(図示されていな
い)からの信号によって開閉制御される。その際、図示
のように、薄板状材1を略水平状態に保つように加圧気
体を噴射してもよい。
When the pressurized gas is injected, the pipe 6
The valve 7 is opened and closed. The valve 7 is controlled to open and close by a signal from a sensor (not shown) for detecting the presence or absence of the thin plate 1. At that time, as shown in the figure, a pressurized gas may be injected so as to keep the thin plate material 1 in a substantially horizontal state.

【0017】その為、この搬送装置によると、薄板状材
1が大形のものであっても、その搬送中等において、薄
板状材1が自重によって湾曲し撓みが過大になってずれ
落ちしたり或いは破損したりするといったトラブルの発
生を有効に防止することができ、しかも、かかる撓み量
の変化を略一定に保つことができて振動やうねりの発生
も有効に防止することができから、発塵や騒音が発生す
るといった問題も解消することができる。
Therefore, according to the transfer device, even when the thin plate-shaped material 1 is large, the thin plate-shaped material 1 is bent by its own weight and becomes excessively bent during the transfer or the like. In addition, it is possible to effectively prevent the occurrence of troubles such as breakage or the like, and furthermore, it is possible to keep the change in the amount of bending substantially constant, thereby effectively preventing the occurrence of vibration and undulation. Problems such as generation of dust and noise can be solved.

【0018】なお、上述の搬送装置は、水平に設置する
だけでなく、薄板状材1の搬送方向に下り状態に所定角
度に傾斜せしめて設置してもよい。
The above-described transport device may be installed not only horizontally but also at a predetermined angle in the downward direction in the transport direction of the thin sheet material 1.

【0019】また、薄板状材1は、その例として、液晶
表示パネルやプラズマ表示装置を製造する為に用いられ
るガラス基板、太陽電池を製造する為に用いられるアモ
ルファスシリコン蒸着基板、回路基板を製造する為に用
いられる高分子フィルム基板や金属箔に高分子フィルム
をラミネートした積層材、又は塗装や洗浄等の処理をし
た未乾燥状態の金属薄板等が挙げられるが、これらは、
汚染防止等の為に、その両端を支持して搬送することが
要求される。
Examples of the thin plate-like material 1 include a glass substrate used for manufacturing a liquid crystal display panel and a plasma display device, an amorphous silicon vapor-deposited substrate used for manufacturing a solar cell, and a circuit substrate. Although a laminated material obtained by laminating a polymer film on a polymer film substrate or a metal foil used for, or an undried metal thin plate that has been subjected to a treatment such as painting or washing, these may be mentioned.
In order to prevent contamination and the like, it is required that both ends be supported and transported.

【0020】その為、例えば、図3において示されてい
るように、幅(W)、長さ(L)の前記ガラス基板にあ
っては、一般に、その周縁部分(dが約5mm)を支持
して搬送することが許容されている。
Therefore, for example, as shown in FIG. 3, in the above-mentioned glass substrate having a width (W) and a length (L), generally, the peripheral portion (d is about 5 mm) is supported. Transport is allowed.

【0021】また、段付きローラ2a,2bは、図4に
おいて示されているように、同軸に装着してもよいが、
この例においては、段付きローラ2bは、その装着位置
を調整することができるように軸3に装着されている。
The stepped rollers 2a and 2b may be coaxially mounted as shown in FIG.
In this example, the stepped roller 2b is mounted on the shaft 3 so that its mounting position can be adjusted.

【0022】また、気体噴射テーブル4は、図5におい
て示されているように、複数個設けてもよく、その個数
は必要に応じて適宜に選択することができ、かつ、その
形態についても、図6〜9において示されているよう
に、各種形態に設けることができる。図6〜9中、8は
気体噴出孔を示している。
As shown in FIG. 5, a plurality of gas injection tables 4 may be provided, the number of which can be appropriately selected as needed. It can be provided in various forms, as shown in FIGS. 6 to 9, reference numeral 8 denotes a gas ejection hole.

【0023】また、気体噴射テーブル4に供給する気体
は、一般には、浄化された空気が用いられるが、必要に
応じて、不活性ガス等を選択することができる。
The gas supplied to the gas injection table 4 is generally purified air, but an inert gas or the like can be selected as necessary.

【0024】以上、本発明に係る搬送装置の一実施形態
について述べたが、本発明においては、上述の段付きロ
ーラ型搬送装置に限定されず、図10において示されて
いるような無限軌道型搬送装置であってもよい。
The embodiment of the transfer device according to the present invention has been described above. However, the present invention is not limited to the above-described stepped roller transfer device, but may be an endless track type as shown in FIG. It may be a transfer device.

【0025】正面図である図10において、左側の駆動
軸10に装着された鎖車11と図示されていない右側に
同様に設けられている駆動軸に装着された鎖車とに掛け
渡された無端チェン12にフィンガー13aが一定ピッ
チに装着されている。
In FIG. 10 which is a front view, the wheel is bridged between a chain wheel 11 mounted on the left drive shaft 10 and a chain wheel mounted on a drive shaft similarly provided on the right side (not shown). Fingers 13a are mounted on the endless chain 12 at a constant pitch.

【0026】なお、同図においては、薄板状材1の一端
をフィンガー13aで支持している姿が示されているに
すぎないが、薄板状材1の他端も同様に、左側の駆動軸
10に装着された一方の鎖車と右側の駆動軸に装着され
た他方の鎖車とに掛け渡された無端チェンに一定ピッチ
に装着されているフィンガーで支持されている。
Although FIG. 1 shows only a state in which one end of the thin plate 1 is supported by the fingers 13a, the other end of the thin plate 1 is also similarly driven on the left side. The wheel is supported by fingers mounted at a fixed pitch on an endless chain that is bridged between one of the wheel wheels mounted on the wheel 10 and the other wheel wheel mounted on the right drive shaft.

【0027】より具体的には、図11において、薄板状
材1の一端が左側のフィンガー13aで支持されている
と共に他端が右側のフィンガー13bで支持されてい
る。なお、一方のフィンガー13aの上端は、左側から
右側へ向って下り状態に傾斜され、また、他方のフィン
ガー13bの上端は、右側から左側へ向って下り状態に
傾斜されている。
More specifically, in FIG. 11, one end of the thin plate 1 is supported by the left finger 13a, and the other end is supported by the right finger 13b. The upper end of one finger 13a is inclined downward from left to right, and the upper end of the other finger 13b is inclined downward from right to left.

【0028】その為、この搬送装置によると、一対の無
端チェン12を所定方向へ回動させることにより薄板状
材1を同方向へ搬送、すなわち、薄板状材1の一端及び
他端の下面に対してフィンガー13a,13bの上端を
接触させて薄板状材1を支持し、図10において右側又
は左側へ搬送することができる。
Therefore, according to this transfer device, the thin plate 1 is transferred in the same direction by rotating the pair of endless chains 12 in a predetermined direction, that is, the lower end of one end and the other end of the thin plate 1 On the other hand, the thin plates 1 are supported by bringing the upper ends of the fingers 13a and 13b into contact with each other, and can be conveyed to the right or left in FIG.

【0029】その際、薄板状材1の下方に配設されてい
る気体噴射テーブル4から、薄板状材1の下面に向って
加圧気体が噴射され、従って、薄板状材1が大形のもの
であっても、その搬送中等において、薄板状材1が自重
によって湾曲し撓みが過大になってずれ落ちしたり或い
は破損したりするといったトラブルの発生を有効に防止
することができると共に、かかる撓み量の変化を略一定
に保つことができて振動やうねりの発生も有効に防止す
ることができから、発塵や騒音が発生するといった問題
も解消することができる。
At this time, pressurized gas is injected from the gas injection table 4 disposed below the thin plate 1 toward the lower surface of the thin plate 1, so that the thin plate 1 becomes large. Even during transport, it is possible to effectively prevent the occurrence of troubles such as the thin plate-shaped material 1 being bent by its own weight, being excessively bent, and being displaced or damaged during transportation, and the like. Since the change in the amount of flexure can be kept substantially constant and the generation of vibration and undulation can be effectively prevented, problems such as generation of dust and noise can be solved.

【0030】なお、気体噴射テーブル4は、その延長方
向(図10において左右方向)に複数個が連結されてい
るが、それらの気体噴射テーブル4からの加圧気体の噴
射は、薄板状材1を略水平状態に保つように噴射するこ
と(図11参照)に限定されず、図12において示され
ているように、薄板状材1が湾曲した状態に保たれるよ
うに噴射してもよく、要するに、薄板状材1の自重によ
る撓みが過大にならないように薄板状材1の下面に向っ
て加圧気体を噴射すればよい。
A plurality of gas injection tables 4 are connected in the direction of extension (the left-right direction in FIG. 10), and the injection of pressurized gas from these gas injection tables 4 Is not limited to being sprayed so as to maintain a substantially horizontal state (see FIG. 11), but may be sprayed so as to keep the thin sheet material 1 in a curved state as shown in FIG. In short, the pressurized gas may be injected toward the lower surface of the thin plate 1 so that the deflection of the thin plate 1 due to its own weight is not excessive.

【0031】また、図13において示されているよう
に、気体噴射テーブル4を中央部から破線で示されてい
る右側の位置へ移動せしめたり或いはそれと反対に左側
へ移動せしめたりし得るように設けてもよい。
As shown in FIG. 13, the gas injection table 4 is provided so that it can be moved from the center to the right position shown by the broken line, or conversely to the left. You may.

【0032】更に、薄板状材1の有無を感知するセンサ
ーを所定位置に設け、そこを通過する直前に気体噴射テ
ーブル4から加圧気体を噴射すると共にその通過直後に
おいて噴射停止させるようにしてもよい。
Further, a sensor for detecting the presence or absence of the thin plate-shaped material 1 is provided at a predetermined position, and the pressurized gas is injected from the gas injection table 4 immediately before passing through the sensor, and the injection is stopped immediately after the passage. Good.

【0033】[0033]

【発明の効果】上述のように、請求項1〜3に記載の発
明によると、大形の薄板状材であっても、その搬送中等
において、薄板状材が自重によって湾曲し撓みが過大に
なってずれ落ちしたり或いは破損したりするといったト
ラブルの発生を有効に防止することができ、しかも、か
かる撓み量の変化を略一定に保つことができて振動やう
ねりの発生も有効に防止することができから、発塵や騒
音が発生するといった問題も解消することができる搬送
装置を得ることができる。なお、特に、液晶表示パネル
を製造する為に用いられるガラス基板の搬送に適した搬
送装置を得ることができる。
As described above, according to the first to third aspects of the present invention, even in the case of a large-sized thin plate, the thin plate is bent by its own weight and excessively bent during transportation or the like. It is possible to effectively prevent the occurrence of troubles such as slippage or breakage, and it is possible to keep such a change in the amount of bending substantially constant, thereby effectively preventing the occurrence of vibration and undulation. Therefore, it is possible to obtain a transfer device that can also solve the problem of generating dust and noise. In particular, a transfer device suitable for transferring a glass substrate used for manufacturing a liquid crystal display panel can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】段付きローラ型搬送装置の正面図である。FIG. 1 is a front view of a stepped roller type transfer device.

【図2】図1の右側面図である。FIG. 2 is a right side view of FIG.

【図3】ガラス基板の平面図である。FIG. 3 is a plan view of a glass substrate.

【図4】段付きローラの他の装着態様を示す図である。FIG. 4 is a view showing another mounting mode of the stepped roller.

【図5】気体噴射テーブルの他の装着態様を示す図であ
る。
FIG. 5 is a view showing another mounting mode of the gas injection table.

【図6】気体噴射テーブルの縦断面図である。FIG. 6 is a vertical sectional view of a gas injection table.

【図7】気体噴射テーブルの他の態様を示す斜視図であ
る。
FIG. 7 is a perspective view showing another mode of the gas injection table.

【図8】気体噴射テーブルの他の態様を示す斜視図であ
る。
FIG. 8 is a perspective view showing another mode of the gas injection table.

【図9】気体噴射テーブルの他の態様を示す斜視図であ
る。
FIG. 9 is a perspective view showing another mode of the gas injection table.

【図10】無限軌道型搬送装置の正面図である。FIG. 10 is a front view of the endless track transfer device.

【図11】薄板状材の下面に向って加圧気体を噴射して
薄板状材を略水平状態に保っている姿を示す図である。
FIG. 11 is a view showing a state in which a pressurized gas is jetted toward the lower surface of the sheet material to keep the sheet material in a substantially horizontal state.

【図12】薄板状材の下面に向って加圧気体を噴射して
薄板状材を湾曲状態に保っている姿を示す図である。
FIG. 12 is a view showing a state in which a pressurized gas is jetted toward a lower surface of the sheet material to keep the sheet material in a curved state.

【図13】気体噴射テーブルを薄板状材の下方において
水平方向へ移動させる態様を示す図である。
FIG. 13 is a view showing a mode in which the gas injection table is moved below the thin plate material in the horizontal direction.

【符号の説明】[Explanation of symbols]

1:薄板状材 2a,2b:段付きローラ 4:気体噴射テーブル 8:気体噴射孔 11:鎖車 12:無端チェン 13a,13b:フィンガー 1: sheet-like material 2a, 2b: stepped roller 4: gas injection table 8: gas injection hole 11: chain wheel 12: endless chain 13a, 13b: finger

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) B65H 5/22 B65H 5/22 A Fターム(参考) 3F049 FA05 LA15 5F031 CA05 GA53 GA62 PA13 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) B65H 5/22 B65H 5/22 A F term (Reference) 3F049 FA05 LA15 5F031 CA05 GA53 GA62 PA13

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 薄板状材の一端及び他端夫々の下面に対
する接触によって前記薄板状材を支持しながら搬送し得
るように構成された搬送装置において、前記薄板状材の
自重による撓みが過大にならないように前記薄板状材の
下面に向って加圧気体を噴射する気体噴射テーブルを装
着したことを特徴とする薄板状材の搬送装置。
1. A transport device configured to be capable of transporting a thin plate while supporting the thin plate by contacting the lower surfaces of one end and the other end of the thin plate, wherein the deflection of the thin plate due to its own weight is excessive. An apparatus for transporting a thin plate, wherein a gas injection table for injecting a pressurized gas toward a lower surface of the thin plate is mounted so as not to be disturbed.
【請求項2】 気体噴射テーブルが薄板状材の下面に対
して接近離反し得るように装着されていることを特徴と
する請求項1に記載の薄板状材の搬送装置。
2. The thin plate conveying apparatus according to claim 1, wherein the gas injection table is mounted so as to be able to approach and separate from a lower surface of the thin plate.
【請求項3】 薄板状材がガラス基板であることを特徴
とする請求項1又は2に記載の薄板状材の搬送装置。
3. The apparatus according to claim 1, wherein the thin plate is a glass substrate.
JP2000006558A 2000-01-14 2000-01-14 Apparatus for conveying thin plate-like material Pending JP2001196438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000006558A JP2001196438A (en) 2000-01-14 2000-01-14 Apparatus for conveying thin plate-like material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000006558A JP2001196438A (en) 2000-01-14 2000-01-14 Apparatus for conveying thin plate-like material

Publications (1)

Publication Number Publication Date
JP2001196438A true JP2001196438A (en) 2001-07-19

Family

ID=18535070

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2001196438A (en)

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Publication number Priority date Publication date Assignee Title
JP2003063643A (en) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk Thin plate conveying system and apparatus
JP2005159141A (en) * 2003-11-27 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device and substrate storage and transfer device
JP2007246274A (en) * 2006-03-20 2007-09-27 Murata Mach Ltd Conveying system
JP2010189106A (en) * 2009-02-17 2010-09-02 Ihi Corp Floating carrying device
WO2011111728A1 (en) * 2010-03-10 2011-09-15 富士フイルム株式会社 Film conveyance device and method
JP2011201696A (en) * 2010-03-26 2011-10-13 Ihi Corp Floating carrying device and direction changing device
KR101216170B1 (en) 2005-08-19 2012-12-28 엘지디스플레이 주식회사 Apparatus for transferring the plate member
KR101235624B1 (en) * 2005-07-26 2013-02-21 엘아이지에이디피 주식회사 System for sensing the touch status of display panel
JP2013105775A (en) * 2011-11-10 2013-05-30 Ihi Corp Thin plate-like workpiece transfer device and thin plate-like workpiece transfer method
WO2013082357A1 (en) * 2011-11-30 2013-06-06 Corning Incorporated Methods and apparatuses for conveying flexible glass substrates
WO2013161375A1 (en) * 2012-04-26 2013-10-31 株式会社Ihi Conveyance device
WO2013161376A1 (en) * 2012-04-26 2013-10-31 株式会社Ihi Conveyance device
JP2014040315A (en) * 2012-08-23 2014-03-06 Ihi Corp Transport device
TWI491547B (en) * 2013-02-27 2015-07-11 Ihi Corp Handling device
CN104878180A (en) * 2015-05-25 2015-09-02 马钢(集团)控股有限公司 Electrical steel plasma stable suspension device and preparation method thereof
KR101773494B1 (en) * 2013-02-26 2017-08-31 가부시키가이샤 아이에이치아이 Transfer apparatus
CN111605976A (en) * 2020-06-10 2020-09-01 江苏福运达输送机械制造有限公司 Totally-enclosed belt conveyor

Citations (1)

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JPH09278181A (en) * 1996-04-11 1997-10-28 Canon Inc Work carrying device and carrying method

Patent Citations (1)

* Cited by examiner, † Cited by third party
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JPH09278181A (en) * 1996-04-11 1997-10-28 Canon Inc Work carrying device and carrying method

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Publication number Priority date Publication date Assignee Title
JP2003063643A (en) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk Thin plate conveying system and apparatus
JP4715088B2 (en) * 2003-11-27 2011-07-06 株式会社Ihi Substrate transfer device and substrate storage transfer device
JP2005159141A (en) * 2003-11-27 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device and substrate storage and transfer device
KR101235624B1 (en) * 2005-07-26 2013-02-21 엘아이지에이디피 주식회사 System for sensing the touch status of display panel
KR101216170B1 (en) 2005-08-19 2012-12-28 엘지디스플레이 주식회사 Apparatus for transferring the plate member
JP4605469B2 (en) * 2006-03-20 2011-01-05 村田機械株式会社 Transport system
JP2007246274A (en) * 2006-03-20 2007-09-27 Murata Mach Ltd Conveying system
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JP2013105775A (en) * 2011-11-10 2013-05-30 Ihi Corp Thin plate-like workpiece transfer device and thin plate-like workpiece transfer method
JP2015511204A (en) * 2011-11-30 2015-04-16 コーニング インコーポレイテッド Method and apparatus for transporting flexible glass substrates
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US9522800B2 (en) 2011-11-30 2016-12-20 Corning Incorporated Methods and apparatuses for conveying flexible glass substrates
US9428359B2 (en) 2011-11-30 2016-08-30 Corning Incorporated Methods and apparatuses for conveying flexible glass substrates
EP2785624A4 (en) * 2011-11-30 2017-02-01 Corning Incorporated Methods and apparatuses for conveying flexible glass substrates
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