WO2013161376A1

WO2013161376A1 - Conveyance device

Info

Publication number: WO2013161376A1
Application number: PCT/JP2013/054989
Authority: WO
Inventors: 鵬王; 芳幸和田; 研吾松尾
Original assignee: 株式会社Ihi
Priority date: 2012-04-26
Filing date: 2013-02-26
Publication date: 2013-10-31
Also published as: TW201350412A; CN104245547A; KR20140144237A; KR101610215B1; TWI495607B; CN104245547B

Abstract

This conveyance device, which is for causing the floatation of a subject by means of a gas and conveying the subject in a first direction, is provided with: a floatation unit that causes the floatation of the subject by means of imparting pressure to the subject by jetting a gas; a conveyance unit configured in a manner so as to contact the subject, driving the subject in a first direction, and provided with a plurality of rollers, which can rotate in the first direction and that are arrayed in the first direction, and/or a belt that is an endless belt extending in a first direction and provided with a plurality of protrusions projecting in a manner so as to contact the subject; a cover that covers the conveyance unit or extends in parallel neighboring the conveyance unit, permits the protrusion of only the top ends of each of the plurality of protrusions or plurality of rollers, and is provided with a surface parallel to the bottom surface of the subject; and a suction unit that imparts negative pressure to the cover interior and causes the subject to contact the conveyance unit.

Description

Transport device

The present invention relates to a transport apparatus that floats and transports a substrate such as thin glass.

In the manufacture of a flat panel display typified by a liquid crystal display, in order to transport a substrate such as thin glass without damaging the substrate, a transport device that lifts and transports the substrate is used. Such a conveying device usually includes a floating device that ejects compressed air, and further includes a belt conveyer or a roller conveyer that contacts the levitated substrate and applies a driving force thereto.

埃 Dust adhering to the glass substrate and scratches on its surface have a significant effect on the quality of the display. One of the causes of dust adhesion and surface scratches is that the glass substrate comes into contact with the transfer device or the like. On the other hand, the glass substrate is flexible because it has a thickness of, for example, 0.7 mm or less. Therefore, in order to prevent contact during transportation, it is important to transport the substrate while keeping it flat. In recent years, there has been a demand for thinner glass, and it has become increasingly difficult to transport the glass while keeping it flat.

Patent Document 1 discloses the technology of a transport device provided with a belt conveyor. According to this technique, the belt includes protrusions arranged at equal intervals, and the protrusions are conveyed by contacting the glass substrate on which the protrusions have floated.

Patent Document 2 discloses a technology of a transport device provided with a roller conveyor. According to Patent Document 2, it is recognized as a technical problem that “the center part of the pass line of the glass substrate is greatly curved upward or drooping”. In order to solve this, the curvature of the glass substrate is suppressed by adjusting the air supply amount from the air table unit at the center position in the width direction.

Japanese Patent Application Publication No. 2008-066661 Japanese Patent Application Publication No. 2008-260591

The technology as described above makes it possible to keep the glass substrate generally flat. However, technical problems still remain with respect to local bending, such as bending at the tip with respect to the transport direction. That is, when the glass substrate moves from one roller to the next roller, or when moving from one transport device to the next transport device, there is nothing to support the tip, so the tip is bent downward by its own weight. End up. There is a problem that the tip easily collides with the roller or the conveying device.

The present invention has been made in view of the above problems. Contrary to the technical common sense as described above, the present inventors have confirmed that the bending of the tip is suppressed by flatly supporting only both ends in the width direction of the glass substrate and slightly bending the central portion of the glass substrate. Has come up with the present invention.

According to one aspect of the present invention, a transport device for levitating an object with a gas and conveying the object in a first direction causes the object to be levitated by ejecting the gas and pressurizing the object. A floating portion, an endless belt extending in the first direction, and a belt having a plurality of protrusions protruding to contact the object; and a belt rotatable in the first direction and the first A transport unit including at least one of a plurality of rollers arranged in the direction of the transport unit, the transport unit configured to contact the object and drive in the first direction, and the transport unit A cover that extends parallel to the cover or adjacent to the transport device and has only the upper ends of the plurality of protrusions or the plurality of rollers protruding, the cover having a surface parallel to the lower surface of the object And negative pressure in the cover Given and a suction unit brought into contact with the object to the transport section.

It is possible to prevent the tip of the substrate from being bent and to prevent the substrate from colliding with the transfer device.

FIG. 1 is a perspective view showing a part of a transport apparatus according to an embodiment of the present invention. FIG. 2 is a three-side view of the transport apparatus according to the present embodiment. FIG. 3 is a cross-sectional view of the transport unit and the suction unit according to the present embodiment. FIG. 4 is a cross-sectional view of a transport unit and a suction unit according to another embodiment. FIG. 5 is a cross-sectional view of a suction unit and a transport unit according to still another embodiment. FIG. 6 is a perspective view showing a part of a transport apparatus according to still another embodiment. FIG. 7 is a perspective view of the substrate showing that the tip is prevented from being bent by bending near the center.

Several exemplary embodiments of the present invention are described below with reference to the accompanying drawings.

The conveyance device according to the embodiment of the present invention can be suitably used for conveying a thin object such as a glass substrate in a clean room, for example. In the case of a glass substrate, not only a substrate having a thickness of about 0.7 mm but also a very thin substrate having a thickness of about 0.1 to 0.3 mm can be targeted.

Referring to FIG. 1, a transport apparatus 100 according to an embodiment of the present invention includes a floating part 116 that floats a workpiece W (object), and a transport unit 120 that drives the workpiece W in a direction X (first direction). And comprising. The floating portion 116 includes an opening 116a for ejecting a gas, and the ejected gas applies a positive pressure to the workpiece W, so that the workpiece W floats. The conveyance unit 120 includes a plurality of protrusions 114 that are driven in a direction X by a motor or the like, and the workpieces W are conveyed by the protrusions 114 coming into contact with the workpiece W. As will be described in detail later, the transport unit 120 includes a suction unit 128 to suck the gas around the protrusion 114 and bring the workpiece W into contact with the protrusion 114. The work W may be supported and transported only by the transport unit 120 without the floating part 116.

This will be described in more detail with reference to FIG. 2A is a plan view showing the conveying device together with the cover, and FIGS. 2B and 2C are an elevation view and a side view showing the conveying device with the cover removed.

Both the belt 112 and the floating portion 116 are supported by a support base 118, and the support base 118 is installed on a floor or a grating in a clean room via a support leg 118a. The floating portions 116 are arranged on the support base 118, for example, a plurality of floating portions 116 are arranged along the direction X, and a plurality of floating portions 116 are also arranged in a direction (width direction) orthogonal to the direction X. The number of arrangements can be freely selected. Therefore, the configuration of the apparatus can be arbitrarily changed according to the size of the object. The conveyance unit 120 is normally disposed at both ends in the width direction of the plurality of floating portions 116, but other arrangements are possible.

The entire floating portion 116 has a box shape, and its upper surface is generally flat. The upper surface includes an opening 116a that opens upward, and the opening 116a passes through the upper surface and communicates with the internal space. The opening 116a may be a circular slit as shown in FIGS. 1 and 2, for example, and may take various shapes such as a rectangle, a plurality of slits, or a large number of small holes. The opening 116a may penetrate the upper surface vertically or may have an inclination with respect to the upper surface. Alternatively, a part or the whole of the upper surface of the floating portion 116 may be a breathable mesh body or porous body.

A gas supply device is provided outside in communication with the opening 116a, and a gas G such as air or nitrogen is supplied and ejected from the opening 116a. The gas supply device is a pump or a compressor that pressurizes and supplies the gas G to the floating part 116. One gas supply device may be connected to one floating portion 116, or a single gas supply device may be connected to a plurality of floating portions 116. Further, a chamber for storing a certain amount of compressed gas may be interposed between the gas supply device and the floating portion 116.

The gas G ejected from the opening 116a creates a pressurized space P between the workpiece W and the floating portion 116, and thereby pressurizes the workpiece W to apply a levitation force. At this time, not only the force generated by the ejected gas G hitting the workpiece W but also the static pressure generated in the process in which the impinging gas G is dispersed toward the surroundings is a source of levitation force. Therefore, a large levitation force can be obtained with a relatively small pressure and the energy efficiency is excellent.

The belt 112 is generally an endless belt that circulates between two or more wheels 110, and the entire transport unit 120 is a belt conveyor. Each wheel 110 is supported by a frame 102. As described above, the conveyance units 120 are disposed at both ends in the width direction of the plurality of floating portions 116, and the belt 112 is directed so as to extend along the direction X.

A shaft 110 a is coupled to the wheel 110, and the shaft 110 a is pivotally supported by the support hole 102 a of the frame 102, so that the wheel 110 can rotate therearound. A gear 110b is coupled to the shaft 110a and rotates integrally. For the coupling, for example, a combination of a key and a key groove that fit each other may be adopted, or an integrated structure may be used instead of the fitting.

The transport device 100 further includes a drive device 110c such as an electric motor. The driving device 110 c includes a gear 110 d that meshes with the gear 110 b, so that the wheel 110 is rotated by the driving of the driving device 110 c and the belt 112 circulates between the wheels 110. Alternatively, the driving device may directly drive the wheel, or an appropriate gear and pinion device may be further interposed.

The belt 112 includes a plurality of protrusions 114 protruding outward. The plurality of protrusions 114 are also arranged to be aligned along the direction X. The protrusion 114 may be integrated with the belt 112 or may be a separate body that is engaged with the belt. As will be described later, the protrusion 114 is formed slightly higher than the flying height of the workpiece W. The shape may be a cylinder, a rectangular parallelepiped, a cone, or any other shape. The tip may be flat, or may be spherical or conical to reduce the contact area with the workpiece W. Furthermore, the tip may have a slope that descends toward the flying portion 116. This aspect will be described later.

Referring to FIG. 3A, the belt 112 and the protrusion 114 are preferably covered with a cover 126. The cover 126 has an opening 126c at its upper end, and the protrusion 114 protrudes upward from the opening 126c only at its upper end. As understood from FIG. 1, the opening 126c is a slit extending in the direction X, and the protrusion 114 is movable in the direction X with its upper end protruding. Preferably, the cover 126 covers not only the upper side (the outward path moving in the direction X) of the belt 112 but also the lower side (the backward path moving in the direction opposite to the direction X).

The transport unit 120 includes a suction unit 128 inside the cover 126 or in communication with the inside of the cover 126. The suction unit 128 is an intake means such as a fan, a blower, or a pump, and makes the inside of the cover 126 have a negative pressure. The inside of the cover 126 communicates with the space around the upper end of the protrusion 114 through the opening 126c, and the gas G 'in the space is sucked, thereby applying the negative pressure NP to the work W. The gas G ′ may be the same as the gas G described above, or may be another gas.

The upper end of the cover 126 may be tapered upward as shown in FIG. 3B, but preferably the upper end is provided with a flat surface 126a as shown in FIG. The surface 126a is substantially parallel to the lower surface of the workpiece W. A separate member may be added to the upper end to ensure parallelism.

Since the surface 126a of the cover 126 is substantially parallel to the lower surface of the workpiece W, as shown in FIG. 3A, a pair of flow paths f are held therebetween, and the gas G ′ is passed through these flow paths f. It is drawn toward the opening 126c. Each of the flow paths f is a relatively narrow flow path surrounded by two surfaces, and the pair of flow paths f are substantially symmetric with respect to the opening 126c and the protrusion 114. When the gas G ′ flows into the narrow flow path f from a wide space, according to Bernoulli's principle, the flow rate of the gas G ′ increases and the pressure decreases, thereby generating a negative pressure NP. Since the flow path f has a substantially constant width over the whole, the negative pressure NP is substantially constant over the entire flow path f.

The effect of the above configuration can be understood more clearly by comparing FIG. 3 (a) and FIG. 3 (b). The lower graphs in FIGS. 3A and 3B are graphs showing the magnitude (vertical axis) of the negative pressure NP with respect to the position D (horizontal axis), and the vertical axis is absolute to help understanding. It is displayed by the value (value with negative sign reversed). When the upper end 2a of the cover 2c is tapered as shown in FIG. 3 (b) and the belt 1 and the suction part 3 are covered with this, the negative pressure is concentrated around the center of the opening 2b. The negative pressure suddenly decreases when moving away from. The negative pressure NP is large near the center of the opening 2b (broken line a), but the negative pressure NP is extremely small near both shoulders (broken lines b and c) of the cover 2c away from the center of the opening 2b. On the other hand, when the upper end has a surface 126a substantially parallel to the lower surface of the workpiece W as shown in FIG. 3A, a substantially constant negative pressure NP is generated over the entire pair of flow paths f. A constant negative pressure NP is generated from (broken line a) to the vicinity of both ends of the surface 126a (broken lines b and c). That is, the width in which the end portion of the workpiece W is kept flat is increased. In addition, since the suction force acting on the workpiece W is an integral value of the negative pressure NP, the generation of the negative pressure NP in a wide range leads to a larger suction force. Therefore, even if the output of the suction unit 128 is relatively small, a large suction force can be obtained and the energy efficiency is also excellent.

For example, the lower end of the cover 126 further includes an opening, and the gas G ′ is exhausted to the outside through the opening. Preferably, the opening includes an air filter 126f. Since a rotating body such as a belt conveyor, a fan, or a blower is often a major dust generation source in a clean room, it is advantageous to provide an air filter at such a location in order to maintain the cleanliness of the clean room air.

Alternatively, the gas G may be circulated by connecting an opening to a gas supply device that supplies gas to the floating portion 116. These constitute a circulation part. The gas supply device is advantageous in terms of energy saving because energy efficiency is increased by balancing inflow and outflow. In this case, one of the intake means and the gas supply device may be omitted, and the other may serve as a means for sucking the gas and a means for pressurizing the gas.

* Various modifications can be made to the shape of the cover. For example, as shown in FIG. 4A, the upper surface 226 a of the cover 226 may be inclined according to the bending of the workpiece W. Specifically, the workpiece W is made parallel to the inclination of the lower surface of the end portion that occurs when the workpiece W bends at the center in the width direction. The opening 226c is provided on the inclined surface 226a. Not only is it advantageous for ensuring the parallelism between the surface 226a and the workpiece W, but also the workpiece W can be prevented from coming into contact with the cover 226.

As shown in FIG. 4B, the entire cover 126 may be tiltable. Specifically, the cover 126 includes an adjustment unit 320 configured to adjust the inclination thereof. The adjustment unit 320 includes a support body 320a that supports the cover 126, and a shaft 320b that supports the support body 320a. Since the cover 126 can be rotated around the shaft 320b, the inclination thereof can be adjusted. Driving means such as an electric motor may be coupled to the shaft 320b. The deflection of the workpiece W can vary depending on the type and thickness of the workpiece W or the conditions for driving the floating portion 116. If the adjustment unit 320 is provided as shown in FIG. 4B, the parallelism between the surface 126a and the workpiece W can be ensured corresponding to various deflections.

As shown in FIG. 4C, the upper end surface of the cover 326 may further include an inclined surface 326f. The inclined surface 326f starts from the shoulder of the upper end surface, and inclines in a direction away from the workpiece W as it moves away from the opening 326c. The inclined surface 326f may be a surface rounded as shown in the figure, or may be a plane or a set of planes whose angles are slightly changed. The gas G ′ first passes through the vicinity of the inclined surface 326 f and then flows into the flow path f. At this time, the gas G ′ passes through the gradually narrowing flow path, so that the flow velocity gradually increases and the pressure gradually decreases. That is, the pressure does not fluctuate rapidly at the inlet of the flow path f, and the flow of the gas G ′ is not easily disturbed. These are advantageous in ensuring the flatness of the end portion of the workpiece W. Further, since pressure loss hardly occurs, it is advantageous in terms of energy efficiency.

As shown in FIG. 4D, the upper surface of the cover 426 may include a flange portion 426a extending outward. Of course, the flange portion 426a is preferably substantially parallel to the lower surface of the workpiece W. Even in this case, the flow path f is formed between the flange portion 426a and the lower surface of the workpiece W, and a uniform negative pressure NP is generated in the range from the opening 426c to the flow path f. This is advantageous for expanding the range in which the uniform negative pressure NP is generated, and because a wide opening 426c can be secured, the pressure loss can be reduced, which is also advantageous in terms of energy efficiency.

The parallelism between the upper end surface of the cover and the lower surface of the workpiece W is not strictly required, and even if a slight angle is formed as shown in FIGS. 5 (a) and 5 (b). Good. In the example of FIG. 5A, the surface 526a is inclined toward the center of the workpiece W, and the surface 526a and the lower surface of the workpiece W form an angle. In the example of FIG. 5B, the surface 626a is symmetrically tilted with increasing distance from the center, and the surface 626a and the lower surface of the workpiece W form an angle. These angles are allowed to be, for example, about 10 °, and more preferably 5 ° or less in order to sufficiently obtain the effects described below.

The belt 112 and the protrusion 114 are not necessarily covered by the cover. In the example shown in FIG. 5C, the belt 112 and the protrusion 114 are provided outside the suction pipe 726, which is a member corresponding to the above-described cover. Preferably, the belt 112 and the protrusion 114 are outside the suction tube 726 in the width direction of the transport device. The upper end of the suction pipe 726 is an opening 726c communicating with the inside. The opening 726 c is a slit extending along the direction X. Further, a flange portion 726a is provided continuously from the opening 726c. Of course, the flange portion 726a is preferably substantially parallel to the lower surface of the workpiece W. The flange portion 726a may be provided on both sides of the opening 726c, or the flange portion 726a may be provided only on one side as shown. A suction unit 728 is provided inside the suction tube 726 or in communication with the inside of the suction tube 726. Although an opening for exhaust is provided in communication with the suction part 728, an air filter may be provided in this opening as in the embodiments described above. The negative pressure is not symmetric with respect to the protrusion 114, but the other effects are the same as those of the embodiments described so far.

In any of the above-described embodiments, the suction portion applies the negative pressure NP to the workpiece W through the opening, and the end portion of the workpiece W is brought into contact with the protrusion. The end portion of the workpiece W is in contact with the protrusion, proceeds with it, and is conveyed. Since the opening surrounds the protrusion and the negative pressure NP is generated in a wide range around the protrusion, the end portion of the work W is held flat in a wide range in the width direction. Further, since the opening is extended along the direction X, the end portion of the workpiece W is held flat in a wide range along the direction X.

Further, in the transport unit 120, instead of sucking the gas G ′ from the opening, the gas G ′ may be ejected. The gas G ′ flows out at a considerable flow rate through the gap between the lower surface of the workpiece W and the upper end of the cover. At this time, if the gap is increased, the flow velocity changes, and a negative pressure is generated according to Bernoulli's principle. If the gap and the flow rate satisfy a specific relationship, a negative pressure sufficient to suck the workpiece W is generated. That is, the conveyance unit 120 functions as a so-called Bernoulli chuck and applies a negative pressure NP to the workpiece W.

The end portion of the workpiece W is supported by a plurality of protrusions 114 arranged in a row and moves together with it, so that a flat shape is maintained like a ceiling supported by a pillar. As can be understood from FIGS. 3 and 4, the end of the workpiece W is supported flat, while the workpiece W is lowered downward by its own weight. Can be slightly bent. That is, when viewed along the direction X, the workpiece W can have a concave shape. Or you may provide the deformation | transformation means which bends the center vicinity of the workpiece | work W. FIG.

One such deformation means is a gas supply device that produces a specific flying height. In the pressurized gas supplied by the gas supply device, the flying height on the floating portion 116 can be made lower than the height of the workpiece W on the protrusion 114 by appropriately adjusting the pressing force. Alternatively, the levitation force may be reduced only in the central levitation portion 116 among the levitation portions 116 arranged in the width direction. Further alternatively, an appropriate pressure loss means or flow rate adjusting means may be provided in the gas supply device or the floating portion 116 to reduce the levitation force near the center. By such deformation means, the workpiece W can be made to have a concave shape. Or you may make the workpiece | work W take the shape of a convex character by strengthening the floating force by the floating part 116. FIG.

Another one of the deformation means is that the projection 114 is configured to bend the workpiece W. The workpiece W has a specific flying height on the flying portion 116 that is determined by the relationship between the weight of the workpiece W and the flying force by the flying portion 116. If the projection 114 is formed so as to support the workpiece W at a high height with respect to the height at which the projection 114 supports the workpiece W so as not to bend, the workpiece W can have a concave shape. Can do.

Still another deformation means is that each tip of the protrusion 114 has an inclination that descends toward the floating portion 116. Since the protrusion 114 is inclined, the vicinity of the center of the workpiece W is prompted to bend downward.

There may be various modifications to the above-described embodiment. In the following, some modified embodiments will be described particularly with respect to the transport unit and the suction unit.

Instead of the belt conveyor, a roller conveyor can be adopted as shown in FIG. The conveyance unit 120 </ b> B includes a plurality of rollers 314 arranged along the direction X instead of the belt 112 including the plurality of protrusions 114. A plurality of rollers 314 are covered with a single cover 126, and the upper ends of the rollers 314 protrude upward from the openings 126c of the cover 126, respectively. Similarly to the above-described embodiment, the gas G ′ is sucked through the opening 126 c and the negative pressure NP is applied to the workpiece W. The end of the workpiece W comes into contact with the roller 314 by the negative pressure NP, and is driven by the roller 314, so that the workpiece W is conveyed in the direction X. The surface around the opening 126c is substantially parallel to the lower surface of the workpiece W, generates a negative pressure NP over the range, and the flatness of the end portion of the workpiece W is maintained in a wide range.

The roller conveyor can be driven by a driving device as shown in FIG. A plurality of rollers 314 are arranged along the direction X, and are rotatably supported by the frame 302. Each shaft of the roller 314 is coupled to the pulley 310b, and a driving device 310 such as an electric motor is also coupled to the pulley 310b. By connecting these pulleys 310b to each other by the belt 310e, all the rollers 314 rotate in synchronization. The shaft 310c of the drive device 310 is preferably extended to the opposite end, causing the pulley 310b at the opposite end to rotate. Accordingly, the rollers 314 at both ends rotate in synchronization. Or you may comprise a drive device with a shaft and a gear mechanism irrespective of a belt.

Even in such a mode, both ends of the workpiece W in the width direction can be supported flat, and the vicinity of the center of the workpiece W can be slightly bent. Then, the workpiece | work W takes the shape of a concave character (or convex character), and there exists the following effect.

With reference to FIG. 7, the effect which each above-mentioned embodiment show | plays is demonstrated. Referring to FIG. 7A, when the overall shape of the workpiece W is to be held flat as in the prior art, when the tip of the workpiece W is not supported, the tip is lowered downward as indicated by an arrow H by its own weight. It will bend. For example, such a state can occur when the workpiece W moves from one roller to the next roller, or when the workpiece W moves from one transfer device to the next transfer device. The workpiece W is likely to collide with the roller or the conveying device by bending downward. On the other hand, according to the present embodiment, as shown in FIG. 7B, both ends of the workpiece W in the width direction are flat along the transport direction X, and the vicinity of the center is slightly bent. Then, since the workpiece W is wavy in the width direction, the workpiece W cannot be freely deformed in the transport direction X, and therefore the tip of the workpiece W bends downward even if it is not supported. There is nothing. Even when the workpiece W moves from one roller to the next roller, or when moving from one conveyance device to the next conveyance device, the tip of the workpiece W is prevented from colliding with the roller or the conveyance device. Is done.

Although the present invention has been described with reference to preferred embodiments, the present invention is not limited to the above embodiments. Based on the above disclosure, a person having ordinary skill in the art can implement the present invention by modifying or modifying the embodiment.

A transport device capable of preventing the bending of the tip of the substrate is provided.

100 Conveying

device

120,

120B Conveying part

2c, 126, 226, 326, 426

Cover

128, 728 Suction part 114 Protrusion 116 Lifting part 118 Supporting base 314 Roller X Conveying direction W Work G, G ′ Gas

Claims

A conveying device for levitating an object with a gas and conveying the object in a first direction,
A floating part that levitates the object by ejecting the gas and pressurizing the object;
An endless belt extending in the first direction, the belt having a plurality of protrusions protruding to contact the object, and rotatable in the first direction and arranged in the first direction A transport unit provided with at least one of the plurality of rollers, the transport unit configured to contact the object and drive in the first direction; and
A cover having only the upper ends of each of the plurality of protrusions or the plurality of rollers protruding, the cover having a surface parallel to the lower surface of the object;
A suction unit that applies a negative pressure in the cover to bring the object into contact with the transport unit;
Conveying device equipped with.
The transport apparatus according to claim 1, wherein the cover covers the transport unit or extends in parallel adjacent to the transport unit, and further extends in the first direction to the object. A transport device comprising a slit configured to exert a negative pressure.
2. The conveying apparatus according to claim 1, wherein the surface of the cover is parallel to an inclination of a lower surface of an end portion that occurs when the object is bent at a center in a width direction thereof.
2. The transport apparatus according to claim 1, wherein the surface of the cover is provided with an inclined surface inclined in a direction away from the object at an end thereof.
It is a conveying apparatus of Claim 1, Comprising:
The conveying apparatus further provided with the adjustment part comprised so that the inclination of the said cover might be adjusted.
2. The conveying apparatus according to claim 1, wherein the floating part or the conveying part includes a deformation means configured to bend the object at a center in a width direction thereof.
The transport apparatus according to claim 6, wherein the deforming unit is configured to cause a floating height lower than a height of the object on the plurality of protrusions to be generated in the floating part, or A conveying device that is the plurality of protrusions formed higher than the flying height of the object in the flying portion.
2. The transport apparatus according to claim 1, wherein the suction part is a fan, a blower or a pump provided in the cover.