JP2013118307A - Transport device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably transport a workpiece even if the workpiece is thinly formed.SOLUTION: A transport device 100 includes: multiple rotors 110; multiple transport parts 112 endlessly extended in a tension state by the multiple rotors, transporting the flexible workpiece W, and placed in parallel to the transportation direction so as to face each other; multiple protruding part 114 which are disposed on surfaces of the multiple transport parts and contact and support the workpiece; and levitation parts 116 disposed between the multiple transport parts and generating a pressure, which is lower than a pressure at which the workpiece is maintained in a horizontal state, below the workpiece.

Description

  The present invention relates to a transport device that transports a relatively thin plate glass or the like.

  Conventionally, for example, a roller conveyor or a belt conveyor is used for conveying a thin plate-like workpiece such as a plate glass. In the former case, the rollers are arranged such that the rotation axis is horizontal and perpendicular to the conveyance direction. Then, the workpiece is placed on the vertical upper side of the roller, and is conveyed in the conveying direction by rotating the roller with a driving force such as a motor.

  For the latter, a conveying device that conveys the work by rotating the belt conveyor by bringing the resin protrusions on the belt conveyor into contact with the lower surface of the plate glass while jetting air is proposed (For example, Patent Document 1). In such a conveying apparatus, by providing an interval for arranging the protrusions, the number of protrusions contacting the work can be reduced, and the contact area between the protrusion and the work can be reduced.

JP 2008-66661 A

  The thickness of the glass plate transported by such a transport device is, for example, about 0.5 mm to 0.7 mm, and thus has a certain degree of rigidity although it is a thin plate. However, in recent years, there has been a demand for reducing the thickness of glass plates due to demands for thinner and lighter liquid crystal displays.

  When the plate thickness is reduced, the glass plate is easily bent like paper or film. Then, in the roller conveyor, the end portion of the workpiece located on the front side in the conveyance direction is bent vertically downward as it crosses between the rollers, and comes into contact with the roller at a position lower than the conveyance surface. There is a possibility of giving a shock to the workpiece. Such a tendency becomes more remarkable as the workpiece becomes thinner.

  On the other hand, in the case of the conveying device of Patent Document 1, the workpiece and the projection are always kept in contact with each other while the workpiece is being conveyed in one belt conveyor, so the thickness of the workpiece is thin. Such unintended contact with the roller does not occur. However, when the end portion of the workpiece being transported is positioned between adjacent projections, the end portion of the workpiece is bent vertically downward, and the workpiece may easily vibrate.

  An object of the present invention is to provide a transport apparatus capable of performing stable work transport even when the work plate is thin.

  In order to solve the above-described problems, a transport apparatus according to the present invention is arranged opposite to each other in parallel with a transport direction, which is stretched endlessly by a plurality of rotating bodies and transports a flexible workpiece. Arranged between the plurality of transported parts, the plurality of protrusions disposed on the surfaces of the plurality of transported parts and supporting the workpiece in contact with each other, and the work is kept horizontally below the work And a floating part that generates a lower pressure than the generated pressure.

  In order to solve the above-mentioned problems, another conveying device of the present invention includes a plurality of rotating bodies and endlessly stretched by the plurality of rotating bodies, and conveys a flexible work in parallel to the conveying direction. A plurality of conveying units arranged opposite to each other, a plurality of protrusions arranged on the surfaces of the plurality of conveying units and supporting the workpiece in contact with each other, arranged between the plurality of conveying units, and a part of the workpiece below the workpiece And a projecting height of the plurality of projecting portions is higher than a height at which the work is kept horizontal when the surfacing portion generates pressure. .

  The conveyance unit may include a suction unit that sucks a gas below the workpiece and draws a part of the workpiece vertically downward.

  You may further provide the attraction | suction part distribute | arranged in parallel with the conveyance part between the floating part and the conveyance part, and attracts | sucks the gas below a workpiece | work and draws a part of workpiece | work vertically below.

  The levitation unit may further include a circulation unit that generates pressure by ejecting gas and supplies the gas sucked by the suction unit to the levitation unit.

  The tip portions of the plurality of protrusions may be inclined toward the direction in which the conveying unit is opposed, the floating part side may be low, and the floating part and the opposite side may be high.

  According to the present invention, even when the workpiece is thin, the workpiece can be stably conveyed.

It is explanatory drawing for demonstrating the structure of the conveying apparatus in 1st Embodiment. It is explanatory drawing for demonstrating the comparison with a belt conveyor with a pin and a roller conveyor. It is explanatory drawing for demonstrating the shape of the edge part of the workpiece | work in conveyance. It is explanatory drawing for demonstrating the pressure of the floating part of the conveying apparatus in 1st Embodiment. It is explanatory drawing for demonstrating the height of the projection part of the conveying apparatus in 2nd Embodiment. It is explanatory drawing for demonstrating the suction part of the conveying apparatus in 3rd Embodiment. It is explanatory drawing for demonstrating the suction part and the floating part of the conveying apparatus in 4th Embodiment. It is explanatory drawing for demonstrating the structure of a verification apparatus. It is a graph which shows a verification result.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

  The conveying apparatus of this embodiment conveys a thin plate-like workpiece, and here, a conveying apparatus that conveys a flexible glass plate having a plate thickness of about 0.1 mm to 0.3 mm as a workpiece will be described. .

  FIG. 1 is an explanatory diagram for explaining the structure of the transport apparatus according to the first embodiment. In particular, FIG. 1 (a) shows a top view of the transfer device 100, FIG. 1 (b) shows a side view of FIG. 1 (a), and FIG. 1 (c) shows FIG. The side view of the arrow B of a) is shown.

  As illustrated in FIGS. 1A to 1C, the transport apparatus 100 includes a rotating body 110, a transport unit 112, a protrusion 114, and a floating part 116.

  The rotating body 110 is an annular member having a through hole in the center, and a plurality (two in this embodiment) are arranged in the transport direction (indicated by the arrow X). Further, the rotating body 110 has a plurality of rotating shafts (two in the present embodiment) that have horizontal axes and are perpendicular to the conveying direction, and one shaft 110a is inserted through the through holes of the facing rotating bodies 110. Is done. And a key fits in the keyway provided in the internal peripheral surface of the through-hole of the rotary body 110, and the outer peripheral surface of the shaft 110a, and the rotary body 110 and the shaft 110a can rotate integrally. .

  A through hole 102 a is provided in the upper part of the support leg 102 that supports the load of the transport device 100. The shaft 110a is rotatably supported via a bearing provided on the inner peripheral surface of the through hole 102a.

  A gear 110b is attached to the shaft 110a. Similarly to the rotator 110, the gear 110b is also provided with a through hole in the center, and the gear 110b and the shaft 110a can be rotated together by the fitting structure of the key and the key groove.

  The gear 110b and the gear 110d installed in the driving device 110c such as a motor mesh with each other, and the gear 110d is rotated by the driving force of the driving device 110c, thereby rotating through the gear 110b and the shaft 110a. The body 110 rotates.

  The conveyance unit 112 is configured by, for example, a belt, is stretched endlessly by a plurality of rotating bodies 110, and rotates in the direction of arrow Y as the rotating body 110 rotates. As shown in FIG. 1 (a), a plurality (two in the present embodiment) of the conveying units 112 are arranged to face each other in parallel with the conveying direction.

  The protrusions 114 are made of, for example, resin, and a plurality of protrusions 114 are arranged on the surface of the conveyance unit 112 to support and support the workpiece. The conveyance unit 112 rotates in the direction of the arrow Y, thereby conveying the workpiece supported by the protrusion 114 in the direction of the arrow X.

  Moreover, the conveyance part 112 has the suction part 112a comprised with a tubular body, for example. A through hole 112 b that communicates with the suction unit 112 a and penetrates from the outer peripheral surface to the inner peripheral surface of the transport unit 112 is provided at a position of the transport unit 112 where the suction unit 112 a is provided. FIG. 1B shows the through-hole 112a on the fracture surface.

  A suction groove 112 b connected to an air suction means (not shown) is installed on the inner peripheral surface side of the transport unit 112. When the suction unit 112a reaches a position facing vertically upward as the transport unit 112 rotates, the suction unit 112a, the through hole of the transport unit 112, and the suction groove 112b are communicated with each other. Then, air is sucked from the suction part 112a to the air suction means. Thus, the suction part 112a sucks the gas below the work supported by the protrusion 114, and draws a part of the work vertically downward.

  If the weight of the work is reduced due to thinning or the like, and the frictional force between the protrusion 114 and the work cannot be secured sufficiently, the work may slide with respect to the protrusion 114, and the transport section 112 may idle. There is sex. Therefore, the configuration including the suction portion 112a can sufficiently ensure the frictional force between the protrusion 114 and the workpiece, and the workpiece can be reliably conveyed.

  Here, the suction part 112a is exemplified as a configuration having a height lower than that of the protrusion 114. However, the height of the suction part 112a is designed to be an appropriate height according to the conveyance conditions, and may be the same height as the protrusion 114, for example.

  The floating portion 116 is configured by, for example, an ejection device that ejects compressed air. In the present embodiment, the floating portion 116 forms three rows and is arranged between a plurality of conveyance units 112 arranged in parallel to the conveyance direction. . The floating portion 116 is placed on a support base 118, and support legs 118 a are fixed to the four corners of the support base 118.

  And when the floating part 116 spouts gas (compressed air) in the state which the workpiece | work is contact-supported by the projection part 114, the pressure of the air between the floating part 116 and a workpiece | work will increase. The workpiece is supported by the vertically upward force due to the pressure of the air, the suction force by the suction part 112a, and the reaction force of the protrusion 114 during the conveyance.

  At this time, the floating part 116 uses the static pressure at which the air in the space below the work tends to disperse in all directions as the pressure of the air supporting the work, rather than the dynamic pressure in the direction of jetting the compressed air. Work can be supported with less power.

  FIG. 2 is an explanatory diagram for explaining a comparison between a belt conveyor with pins and a roller conveyor. In particular, FIG. 2 (a) shows a state in which the workpiece W is conveyed by the conveying device 100 using a belt conveyor with a pin (conveying unit 112), and FIGS. 2 (b) and 2 (c) use the roller conveyor 10. The conveyance state of the workpiece | work W by the conveyed conveying apparatus is shown.

  As shown in FIG. 2B, the workpiece W placed on the vertical upper side of the roller conveyor 10 is conveyed along with the rotation of each roller 10 a of the roller conveyor 10. At this time, if the workpiece W is thin and has low rigidity, the front and rear end portions Wa in the conveyance direction of the workpiece W hang down between the adjacent rollers 10a. In this case, when the work W is transported, the end Wa of the work W collides with the side of the roller 10a as shown in FIG. This phenomenon becomes more remarkable as the workpiece W becomes thinner.

  In this embodiment, as shown to Fig.2 (a), the workpiece | work W and the perpendicular | vertical upper part of the conveyance part 112 progress integrally in the conveyance direction, and the workpiece | work W and the projection part 114 maintain a contact state in the meantime. . Therefore, even if the conveyance part 112 is conveying, it becomes possible to avoid the collision as mentioned above of the workpiece | work W. FIG.

  FIG. 3 is an explanatory diagram for explaining the shape of the end portion Wa of the workpiece being conveyed. As shown in FIG. 3, even if it is the conveying apparatus 1 using the belt conveyor 2 with a pin, if the workpiece | work W becomes thin and the rigidity falls too much, the edge part of the workpiece | work W located between the projection parts 3 will be shown. Wa hangs down and curves downward vertically.

  FIG. 4 is an explanatory diagram for explaining the pressure of the floating portion 116 of the transport apparatus 100 according to the first embodiment. In particular, FIG. 4A shows the transfer state of the workpiece W of the transfer device 100, and FIG. 4B shows the transfer state of the workpiece W of the conventional transfer device 1 as a comparative example. The conveyance device 1 is the same as the conveyance device 100 except for the tip portion of the protrusion 3.

  FIG. 4B shows a state in which the pressure of the air below the workpiece W is increased by the floating portion 4 of the transport device 1 and the workpiece W is supported horizontally. On the other hand, in the present embodiment, the floating portion 116 generates a pressure below the work W lower than the pressure at which the work W is kept horizontal. Therefore, as for the workpiece | work W, the center part Wb will dent vertically downward along a conveyance direction. The size of the recess is, for example, about 1 mm to 2 mm in the thickness direction with respect to a width of 300 mm.

  As shown in FIG. 4A, in order to maintain the frictional force between the workpiece W and the projection 114 even when the workpiece W is conveyed in a state where the central portion Wb of the workpiece W is depressed, the tip of the projection 114 is provided. The portion 114a is provided with an inclination. The inclination direction of the tip end portion 114a is the direction in which the conveyance unit 112 is opposed, and is low on the floating part 116 side and high on the opposite side to the floating part 116 (outside the conveyance device 100).

  As described above, according to the transport apparatus 100 of the present embodiment, the center portion Wb of the work W can be maintained in a state of being recessed vertically downward from the horizontal while the work W is transported. Therefore, the rigidity of the workpiece W can be made higher than that of the workpiece W that is conveyed while being maintained in a substantially horizontal state. In this way, the conveying device 100 avoids a situation in which the end portion Wa of the workpiece W positioned between the protrusions 114 is bent vertically downward and easily vibrates, suppresses the vibration of the workpiece W during conveyance, and is stable. Thus, the workpiece W can be conveyed.

  Moreover, since the floating part 116 should just make the pressure of the air under the workpiece | work W lower than the pressure by which the workpiece | work W is kept horizontal, the conveying apparatus 100 requires little energy in order to float the workpiece | work W. Energy saving can be realized.

(Second Embodiment)
Next, the protrusion 214 in the transport device 200 according to the second embodiment will be described. In the second embodiment, only the protrusion 214 is different from the first embodiment. Therefore, the description of the same configuration as that of the first embodiment is omitted here, and only the protrusion 214 having a different configuration will be described.

  FIG. 5 is an explanatory diagram for explaining the height of the protrusion 214 of the transport device 200 according to the second embodiment. In particular, FIG. 5A shows the transfer state of the workpiece W of the transfer device 200, and FIG. 5B shows the transfer state of the workpiece W of the conventional transfer device 1 as a comparative example.

  As shown in FIG. 5A, the projection 214 is arranged on the surface of the transport unit 112 like the projection 114, and the tip end portion 214 a is inclined to support and support the workpiece W. 5A and 5B, the pressure generated by the floating portion 116 is the same as the pressure generated by the floating portion 4 of the transport apparatus 1 in the comparative example shown in FIG. 4B.

  Unlike the first embodiment, in the second embodiment, the central portion Wb of the workpiece W is recessed according to the height of the protrusion 214, instead of adjusting the pressure generated by the floating portion 116. That is, as can be seen by comparing FIGS. 5A and 5B, the protrusion height L1 of the protrusion 214 shown in FIG. 5A is the floating height of the transfer device 1 shown in FIG. 4 is higher than the projection height L2 at which the workpiece W is kept horizontal when pressure is generated.

  As described above, the transport apparatus 200 according to the present embodiment also maintains the central portion Wb of the work W in a state of being recessed vertically below the horizontal while the work W is being transported, similarly to the transport apparatus 100 according to the first embodiment. Therefore, the rigidity of the workpiece W can be increased, vibration of the workpiece W during conveyance can be suppressed, and the workpiece W can be conveyed stably. Moreover, according to the conveying apparatus 200, the workpiece | work W in conveyance can be maintained in the dent state with simple means of maintaining the pressure of the floating part 116 and making the height of the protrusion 214 high.

(Third embodiment)
Next, the suction part 312a, the suction container 312b, and the support leg 312c in the conveyance apparatus 300 of 3rd Embodiment are demonstrated. In the third embodiment, only the suction part 312a, the suction container 312b, and the support leg 312c are different from the first embodiment. Therefore, the description of the same configuration as in the first embodiment is omitted here, and only the suction part 312a, the suction container 312b, and the support leg 312c having different configurations will be described.

  FIG. 6 is an explanatory diagram for explaining the suction unit 312a of the transport apparatus 300 according to the third embodiment. FIG. 6A shows a top view of the transfer device 300, and FIG. 6B shows a side view as seen from the arrow B in FIG. 6A.

  In the first embodiment, the suction part 112 a is formed integrally with the transport part 112. As shown in FIGS. 6A and 6B, the suction unit 312a of the third embodiment forms a plurality of two rows, and is in the vicinity of the transport unit 112, in the present embodiment, the transport unit 112 and the floating part. One row is arranged between each other in parallel along the conveyance unit 112.

  Specifically, one suction container 312b is arranged vertically below each row of the suction unit 312a, and an air suction means (not shown) is connected to the suction container 312b. The suction container 312b is supported by a support leg 312c. Further, the support base 118 is also fixedly supported by the support legs 312c.

  And the suction part 312a attracts | sucks the gas below the workpiece | work W, and draws a part of workpiece | work W vertically downward similarly to the suction part 112a.

  With the configuration including the suction unit 312a, the transfer device 300 can sufficiently secure the frictional force between the protrusion 114 and the workpiece W, and can reliably transfer the workpiece W, as in the first embodiment. In addition, since the suction unit 312a is provided separately from the transport unit 112, the suction unit 312a is arranged at an appropriate interval according to the workpiece W without being limited to avoid the protrusion 114. Is possible.

(Fourth embodiment)
Next, the circulation unit 420 in the transport apparatus 400 according to the fourth embodiment will be described. In the fourth embodiment, only the circulation unit 420 is different from the third embodiment. Therefore, the description of the same configuration as that of the third embodiment is omitted here, and only the circulation unit 420 having a different configuration is described.

  FIG. 7 is an explanatory diagram for explaining the circulation unit 420 of the transport apparatus 400 according to the fourth embodiment. 7 shows a side view of the transport apparatus 400 in the same direction as FIG. 6B showing a side view of the transport apparatus 300.

  The circulation unit 420 is composed of a fan or the like, and generates a flow in the gas. A suction container 312b is connected to a side (upstream side) where gas is sucked by the circulation unit 420 via a pipe 420a. That is, the circulation unit 420 functions as an air suction unit connected to the suction container 312b.

  Further, the floating portion 116 is connected to the side (downstream side) where the gas is sent out by the circulation unit 420 via the pipe 420b. That is, the circulation part 420 functions as a means for supplying compressed air to the floating part 116.

  In this way, the gas flows from the suction part 312a to the floating part 116 by the circulation part 420. That is, the circulation unit 420 supplies the gas sucked by the suction unit 312 a to the floating portion 116.

  In this way, with the configuration in which the circulation unit 420 circulates the gas, the transfer device 400 can divert the energy of the gas flow sucked by the suction unit 312a as the energy for the floating portion 116 to eject the gas, thereby saving energy. Can be realized.

  In the fourth embodiment described above, the example in which the suction unit 312a is provided separately from the transport unit 112 has been described. However, the circulation unit 420 is as in the first embodiment and the second embodiment. Alternatively, the suction unit 112a and the transport unit 112 may be disposed in the transport apparatuses 100 and 200 provided integrally.

  Further, the configuration of the transfer apparatuses 300 and 400 may include the protrusion 214 in the transfer apparatus 200 of the second embodiment. In this case, the conveyance devices 300 and 400 adjust the height of the protrusion 214 instead of adjusting the pressure by the floating portion 116, thereby conveying the central portion Wb of the workpiece W in a vertically downward direction.

(Verification of effect)
Subsequently, the effect of stabilizing the conveyance of the workpiece W by the conveyance devices 100, 200, 300, and 400 according to the above-described embodiment will be verified.

  FIG. 8 is an explanatory diagram for explaining the configuration of the verification apparatuses 500 and 502. In particular, FIG. 8A shows a top view of the verification device 500, FIG. 8B shows a side view of the verification device 502 in FIG. 8A, and FIG. 8C shows the verification device 502. FIG. 9 is a side view of a position corresponding to FIG. Here, an aluminum plate of 1300 mm × 1000 mm × 0.3 mm was used as the workpiece W.

  As shown in FIGS. 8A and 8B, the verification device 500 includes a floating part 504 and a protrusion 506. The floating part 504 is configured by, for example, an ejection device that ejects compressed air, as with the floating part 116, and generates a pressure lower than the pressure at which the work W is maintained horizontally below the work W. Therefore, the workpiece W is supported by the protrusions 506, while the central portion Wb is recessed vertically downward.

  Further, as shown in FIG. 8C, the verification device 502 is configured to include a floating part 504 and a protruding part 508. The protruding portion 508 is lower in height than the protruding portion 506, and the floating portion 504 stops the function of generating pressure. The workpiece W is supported in a flat state by the protrusions 508 and the floating portion 504.

  In any of the verification devices 500 and 502, the workpiece W is held by protruding the length L2 of the lower end Wa from the protrusions 506 and 508 in FIG. 8A. Here, the length L2 was 200 mm.

  FIG. 9 is a graph showing the verification results. In particular, FIG. 9A shows the shape of the end portion Wa of the workpiece W in the direction of arrow D in FIG. 8A, and FIG. 9B shows the damping characteristics of the workpiece W when initial vibration is applied. Is shown. In FIG. 9A, the horizontal axis indicates the position of the end portion Wa of the workpiece W protruding from the protrusions 506 and 508, and the vertical axis indicates the height at the protruding position indicated by the horizontal axis of the end portion Wa. Indicates. In FIG. 9B, the horizontal axis indicates time (seconds), and the vertical axis indicates the height of a measurement point having the end portion Wa.

  Here, a solid line 510 indicates a measurement result when the central portion Wb of the workpiece W is held in the vertically downward direction by the verification device 500, and a broken line 512 indicates a state when the workpiece W is flat by the verification device 502. The measurement results are shown.

  As shown in FIG. 9A, in the state where the workpiece W is held flat, the end portion Wa droops greatly. On the other hand, in the state where the central portion Wb of the workpiece W is recessed vertically downward, the hanging width of the end portion Wa is reduced to about ３ of that when the workpiece W is flat.

  Next, the time taken for the vibration to converge after the initial vibration is given and the maximum amplitude is compared is compared. As shown in FIG. 9B, the time t2 in the state where the central portion Wb of the work W is recessed vertically downward is reduced to half or less of the time t1 in the state where the work W is held flat. It was.

  As described above, in the verification apparatus 502, the workpiece W is in contact with the floating portion 504, but the contact between the workpiece W and the floating portion 504 has almost no influence on the speed of convergence of the vibration of the workpiece W. The absence of this has been confirmed by a separate verification experiment.

  As is clear from this verification, if the workpiece W is conveyed by the conveying devices 100, 200, 300, and 400 while the central portion Wb of the workpiece W is recessed vertically downward, the end portion Wa of the workpiece W is suspended. It is possible to suppress the vibration of the workpiece W and perform stable conveyance.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  INDUSTRIAL APPLICABILITY The present invention can be used for a transport device that transports a relatively thin plate glass or the like.

DESCRIPTION OF SYMBOLS 100, 200, 300, 400 ... Conveying device 110 ... Rotating body 112 ... Conveying part 112a, 312a ... Suction part 114, 214 ... Protruding part 116 ... Flying part 420 ... Circulating part W ... Workpiece

Claims (6)

A plurality of rotating bodies;
A plurality of conveying units that are stretched endlessly by the plurality of rotating bodies and convey a flexible workpiece;
A plurality of protrusions arranged on the surfaces of the plurality of transport units and supporting the workpiece in contact;
A floating portion that is arranged between the plurality of transport units and generates a pressure below the pressure at which the workpiece is kept horizontal, below the workpiece;
A conveying device comprising: A plurality of rotating bodies;
A plurality of conveying units that are stretched endlessly by the plurality of rotating bodies and convey a flexible workpiece;
A plurality of protrusions arranged on the surfaces of the plurality of transport units and supporting the workpiece in contact;
A floating part that is arranged between the plurality of transfer units and generates a pressure under which the part of the work is lifted below the work;
With
The height of the protrusions of the plurality of protrusions is higher than the height at which the work is kept horizontal when the floating part generates pressure.   The said conveying part is equipped with the suction part which attracts | sucks the gas below the said workpiece | work and draws a part of said workpiece | work vertically downward, The conveying apparatus of Claim 1 or 2 characterized by the above-mentioned.   The apparatus further includes a suction unit that is arranged in parallel with the transfer unit between the floating part and the transfer unit and sucks a gas below the work and draws a part of the work vertically downward. The transport apparatus according to claim 1 or 2. The floating part generates pressure by jetting gas,
The transport apparatus according to claim 3, further comprising a circulation unit that supplies the gas sucked by the suction unit to the floating portion.   6. The tip of the plurality of protrusions is provided with an inclination in a direction opposite to the transport unit, wherein the floating part side is low and the opposite side to the floating part is high. The transport apparatus according to item 1.

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