JP4349101B2 - Substrate transfer device - Google Patents

Substrate transfer device Download PDF

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JP4349101B2
JP4349101B2 JP2003392706A JP2003392706A JP4349101B2 JP 4349101 B2 JP4349101 B2 JP 4349101B2 JP 2003392706 A JP2003392706 A JP 2003392706A JP 2003392706 A JP2003392706 A JP 2003392706A JP 4349101 B2 JP4349101 B2 JP 4349101B2
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substrate
transport
roller
glass substrate
transport roller
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JP2005154040A (en
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希遠 石橋
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株式会社Ihi
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この発明は、例えば液晶用ガラス等の薄板基板の下面両側縁部及び下面中央部をそれぞれ接触及び非接触に支持しながら搬送する基板搬送装置に関する。   The present invention relates to a substrate transport apparatus that transports while supporting both side edge portions and bottom surface center portion of a thin plate substrate such as glass for liquid crystal in contact and non-contact, respectively.

例えば液晶表示パネルの製造に用いられるガラス基板等を搬送するコンベヤ(基板搬送装置)として、ガラス基板の下面両側縁部及び下面中央部をそれぞれ接触及び非接触に支持しながら搬送するコンベヤが知られている。
この種のコンベヤは、例えば特許文献1〜3に示すように、搬送ローラと気体浮上部との間に段差を設け、基板自重の一部を搬送ローラへ預けることにより、ローラ駆動に必要な摩擦力を確保している。
特開2001−196438号公報 特開2003−063643号公報 特開平10−110891号公報
For example, as a conveyor (substrate transport device) for transporting a glass substrate or the like used for manufacturing a liquid crystal display panel, a conveyor that transports while supporting both the lower side edges and the lower center of the glass substrate in contact and non-contact, respectively, is known. ing.
For example, as shown in Patent Documents 1 to 3, this type of conveyor is provided with a step between the conveyance roller and the gas floating portion, and deposits a part of the substrate's own weight on the conveyance roller. The power is secured.
JP 2001-196438 A JP 2003-063643 A JP-A-10-110891

しかしながら、搬送物であるガラス基板が大型化・薄型化するのに伴い、基板自重のみで搬送に必要な摩擦力を得ることが難しくなってきており、搬送時の加減速度が制限されるという課題がある。
他方、搬送ローラと気体浮上部との段差を大きくすれば、必要な摩擦力は確保できるものの、段差を大きくするに従い、搬送ローラと気体浮上部に支持されていない部分の反り(垂れ下がりによる撓み変形)が大きくなり、基板への悪影響が懸念されるという課題もある。
However, as the glass substrate, which is a conveyed product, becomes larger and thinner, it has become difficult to obtain the frictional force necessary for conveyance only by the weight of the substrate, and the acceleration / deceleration during conveyance is limited. There is.
On the other hand, the required frictional force can be ensured by increasing the level difference between the transport roller and the gas floating part, but as the level difference increases, the warp of the part not supported by the transport roller and the gas floating part (deflection deformation due to drooping) ) Increases, and there is a problem that there is a concern about adverse effects on the substrate.

この発明は、上記事情に鑑みてなされたものであり、その目的は、基板を変形させることなく搬送すること、及び搬送時間の短縮化を図ることにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to carry the substrate without deforming it and to shorten the carrying time.

上記課題を解決するために、この発明は、基板の下面両側縁部をそれぞれ支持し得るように複数対の搬送ローラを搬送方向と交差する方向に間隔をおいて配置すると共に、これら搬送ローラの間に基板の下面中央部を非接触に支持するエア浮上ユニットを設け、前記搬送ローラを回転させることにより基板を前記搬送方向に搬送する基板搬送装置において、前記基板を前記搬送ローラ側へ付勢する付勢手段が設けられている、という手段を採用する。   In order to solve the above-described problems, the present invention arranges a plurality of pairs of transport rollers at intervals in a direction intersecting the transport direction so as to respectively support both side edges of the lower surface of the substrate. An air levitation unit that supports the lower surface central portion of the substrate in a non-contact manner is provided, and in the substrate transport apparatus that transports the substrate in the transport direction by rotating the transport roller, the substrate is biased toward the transport roller A means that an urging means is provided is employed.

前記付勢手段による付勢力が前記搬送ローラの近傍、特に、前記搬送ローラを挟んで前記基板の幅方向内側及び外側に対をなして作用している、という手段を採用することもできる。
前記付勢手段は、前記エア浮上ユニットに形成された吸引孔と、この吸引孔と接続された吸引源とを備えて構成されている、という手段を採用することもできる。
It is also possible to adopt a means in which the urging force by the urging means acts in pairs in the vicinity of the transport roller, particularly on the inner side and the outer side of the substrate across the transport roller.
The biasing means may be configured to include a suction hole formed in the air levitation unit and a suction source connected to the suction hole.

以上の手段によれば、基板から搬送ローラへの押圧力が、基板自重を搬送ローラとエア浮上ユニットとで負担していた場合における搬送ローラの負担分だけでなく、これに付勢手段による付勢力を加えたものになる。
これにより、基板と搬送ローラ間に生じる摩擦力が高められ、搬送時における加減速度を従来よりも大きく設定し得るようになるので、基板が大型化しても変形を生じさせることなく搬送でき、その搬送時間も短縮することができる。
According to the above means, the pressing force from the substrate to the transport roller not only applies the load on the transport roller when the weight of the substrate is borne by the transport roller and the air levitation unit, but also applies the biasing means to this. It becomes the thing which added power.
As a result, the frictional force generated between the substrate and the transport roller is increased, and the acceleration / deceleration during transport can be set larger than the conventional one, so that the substrate can be transported without causing deformation even if the substrate is enlarged. The conveyance time can also be shortened.

また、基板と搬送ローラ間の摩擦力を高めるに際し、基板の幅方向中央部における変形を抑えつつ、搬送ローラの内側と外側に作用する付勢力をバランスさせることができる。
さらに、付勢手段の一部が既設のエア浮上ユニット内に組み込まれるので、装置全体の小型化を図ることができる。
Further, when increasing the frictional force between the substrate and the transport roller, it is possible to balance the urging force acting on the inner side and the outer side of the transport roller while suppressing deformation at the central portion in the width direction of the substrate.
Furthermore, since a part of the urging means is incorporated in the existing air levitation unit, the entire apparatus can be reduced in size.

以下、この発明の最良の形態である実施例を図1〜図4の図面を参照して説明する。
この実施例による基板搬送装置は、例えば液晶表示パネル(LCD)やプラズマディスプレイパネル(PDP)等に用いられるガラス基板のように、大型かつ薄板状で、しかも、汚染防止等のために搬送物の両側縁部を支持しながら搬送することが要求されるものの搬送に用いて好適であり、図1に示すように、搬送ローラユニット1とエア浮上ユニット2とを備えて構成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments which are the best mode of the present invention will be described below with reference to the drawings of FIGS.
The substrate transfer apparatus according to this embodiment is a large and thin plate like a glass substrate used in a liquid crystal display panel (LCD), a plasma display panel (PDP), etc. It is suitable for transporting what is required to be transported while supporting both side edges. As shown in FIG. 1, the transport roller unit 1 and the air floating unit 2 are provided.

搬送ローラユニット1は、図3に示すように、搬送物であるガラス基板3の幅方向、言い換えればガラス基板3の搬送方向(図2の白抜矢印)と直交する方向に間隔をおいて対向配置された一対のフレーム11を備え、これらフレーム11の上端部には、ベアリング等の軸サポート12を介して、搬送ローラ13のローラシャフト14が回転自在に支持されている。このローラシャフト14は、ガラス基板3の搬送方向に相互間隔をおいて複数列設けられている。   As shown in FIG. 3, the transport roller unit 1 is opposed to the width direction of the glass substrate 3 as a transported object, in other words, in the direction orthogonal to the transport direction of the glass substrate 3 (the white arrow in FIG. 2). A pair of frames 11 are provided, and a roller shaft 14 of a conveying roller 13 is rotatably supported on an upper end portion of the frames 11 via a shaft support 12 such as a bearing. The roller shafts 14 are provided in a plurality of rows at intervals in the conveyance direction of the glass substrate 3.

各ローラシャフト14の一端(先端)には、ガラス基板3をその下面両側縁部(幅方向両端部)3a,3bへの接触によって支持する搬送ローラ13のローラ本体15が設けられている。また、各ローラシャフト14の他端(基端)には、駆動モータ(図示略)からの回転駆動力をローラシャフト14に伝達するローラ駆動ギヤ16が設けられている。
駆動モータは、制御装置(図示略)からの指令に基づいて、その回転を制御される。
At one end (tip) of each roller shaft 14, there is provided a roller body 15 of a transport roller 13 that supports the glass substrate 3 by contacting the lower side edges (both ends in the width direction) 3a, 3b. A roller driving gear 16 that transmits a rotational driving force from a driving motor (not shown) to the roller shaft 14 is provided at the other end (base end) of each roller shaft 14.
The rotation of the drive motor is controlled based on a command from a control device (not shown).

エア浮上ユニット2は、ガラス基板3の下面中央部3cを非接触に支持するものであり、箱状のチャンバ21を備えている。
チャンバ21の幅方向両端部には、図2に示すように、ローラ本体15の配置及び設置数に対応して複数の窓部22が貫通形成されており、ローラ本体15の頂部15Aがチャンバ上面21Aよりも適宜の寸法だけ上方に位置決めされることにより、基板自重の一部を搬送ローラ13に預け、残自重をエア浮上ユニット2で非接触に支持するようになっている。
The air levitation unit 2 supports the lower surface central portion 3 c of the glass substrate 3 in a non-contact manner, and includes a box-shaped chamber 21.
As shown in FIG. 2, a plurality of window portions 22 are formed through both ends of the chamber 21 in the width direction corresponding to the arrangement and the number of the roller main bodies 15, and the top portion 15A of the roller main body 15 is formed on the upper surface of the chamber. By positioning the substrate by an appropriate dimension above 21A, a part of the substrate weight is deposited on the transport roller 13, and the remaining weight is supported by the air floating unit 2 in a non-contact manner.

チャンバ21の内部には、気体の吹出孔23及び吸引孔24が形成されている。
吹出孔23は、チャンバ上面21Aの略全面にわたって、例えば格子状や千鳥状等の配置となるように略等間隔に多数形成されている。
この吹出孔23には、管路(図示略)を介して送気ブロワ(図示略)が接続されていて、上記制御装置からの指令に基づき送気ブロワが駆動すると、管路を経てチャンバ21に圧送された気体が基板下面3Aに向かって噴射される。
A gas blowing hole 23 and a suction hole 24 are formed in the chamber 21.
A large number of blowout holes 23 are formed at substantially equal intervals over the substantially entire surface of the chamber upper surface 21A so as to be arranged in, for example, a lattice shape or a staggered shape.
An air supply blower (not shown) is connected to the blowout hole 23 via a pipe line (not shown). When the air supply blower is driven based on a command from the control device, the chamber 21 passes through the pipe line. The gas fed to the substrate is injected toward the lower surface 3A of the substrate.

他方、吸引孔24は、図3に示すように、各窓部22の周囲であって、各窓部22を挟んでチャンバ21の幅方向内側及び外側に振り分けて形成されている。つまり、この実施例の吸引孔24は、ローラ本体15の近傍にのみ形成されており、各ローラ本体15を挟んでガラス基板3の幅方向内側及び外側に対をなして配置されている。また、吸引孔24のチャンバ上面21Aでの開口面積は吹出孔23よりも大径に設定されている。
この吸引孔24には、管路(図示略)を介して図示せぬ吸気ブロワ(吸引源)が接続されていて、上記制御装置からの指令に基づき吸気ブロワが駆動すると、図4の矢印で示す吸引力がガラス基板3に作用し、ガラス基板3が下方に引き付けられる。つまり、ガラス基板3が搬送ローラ13側に付勢される。
On the other hand, as shown in FIG. 3, the suction holes 24 are formed around the respective window portions 22 so as to be distributed inside and outside in the width direction of the chamber 21 with the respective window portions 22 interposed therebetween. That is, the suction holes 24 of this embodiment are formed only in the vicinity of the roller main body 15 and are arranged in pairs on the inner side and the outer side in the width direction of the glass substrate 3 with the roller main bodies 15 interposed therebetween. Further, the opening area of the suction hole 24 on the chamber upper surface 21 </ b> A is set to be larger than that of the blowout hole 23.
An intake blower (suction source) (not shown) is connected to the suction hole 24 via a pipe line (not shown). When the intake blower is driven based on a command from the control device, an arrow in FIG. The suction force shown acts on the glass substrate 3, and the glass substrate 3 is attracted downward. That is, the glass substrate 3 is urged toward the conveyance roller 13 side.

以上の如く構成された基板搬送装置においては、各駆動モータが同期して回転すると、その回転駆動力はローラ駆動ギヤ16を介してローラシャフト14に伝達され、各搬送ローラ13が揃って一方向に回転する。
これにより、基板搬送装置の上流側に移送されてきたガラス基板3は、その下面3Aに対する搬送ローラ13との接触によって生じる摩擦力により、搬送方向前方に向かう搬送力を付与されて基板搬送装置内に引き込まれ、さらにその下流側へと連続的に搬送される。
In the substrate transport apparatus configured as described above, when the drive motors rotate in synchronization, the rotational driving force is transmitted to the roller shaft 14 via the roller drive gear 16, and the transport rollers 13 are aligned in one direction. Rotate to.
As a result, the glass substrate 3 transferred to the upstream side of the substrate transport apparatus is given a transport force forward in the transport direction by the frictional force generated by the contact with the transport roller 13 with respect to the lower surface 3A. And is continuously conveyed downstream thereof.

このとき、ガラス基板3の下面両側縁部3a,3bは、そこに転がり接触している搬送ローラ13によって下方より支持されている。
また、送気ブロワを運転し、管路を経てチャンバ21に気体を圧送することにより、圧搾空気が吹出孔23から基板下面3Aに向かって噴射されているので、これにより基板下面3Aとチャンバ上面21Aとの間にはエア浮上層25が形成され、ガラス基板3の幅方向中央部は、このエア浮上層25を介して非接触に支持されている。
At this time, the lower side edge portions 3a and 3b of the glass substrate 3 are supported from below by the conveying roller 13 which is in rolling contact therewith.
Further, by operating the air supply blower and pumping gas to the chamber 21 through the pipe line, the compressed air is jetted from the blowout hole 23 toward the substrate lower surface 3A. An air floating layer 25 is formed between the glass substrate 3 and the central portion in the width direction of the glass substrate 3 via the air floating layer 25 in a non-contact manner.

さらに、この実施例による基板搬送装置においては、吸気ブロワを運転し、管路を経てチャンバ21の吸引孔24から気体を吸引することにより、ガラス基板3の下面両側縁部3a,3bであって搬送ローラ13に支持されている部分4の両脇部分(幅方向内側部分と外側部分)5a,5bを吸引しているので、ガラス基板3の下面両側縁部3a,3bは搬送ローラ13側に引き付けられている。
これにより、基板下面3Aに対する搬送ローラ13の接触によって生じる摩擦力は、単に基板自重を搬送ローラ13とエア浮上ユニット2とで負担していた場合よりも大きくなる。
Furthermore, in the substrate transfer apparatus according to this embodiment, the suction blower is operated, and the gas is sucked from the suction hole 24 of the chamber 21 through the pipe line. Since both sides (width direction inner side portion and outer side portion) 5a and 5b of the portion 4 supported by the transport roller 13 are sucked, both lower side edges 3a and 3b of the glass substrate 3 are placed on the transport roller 13 side. Has been attracted.
As a result, the frictional force generated by the contact of the transport roller 13 with the substrate lower surface 3 </ b> A is larger than that when the weight of the substrate is simply borne by the transport roller 13 and the air floating unit 2.

つまり、ガラス基板3と搬送ローラ13間に生じる摩擦力の大きさを決定づけるガラス基板3から搬送ローラ13への押圧力が、基板自重を搬送ローラ13とエア浮上ユニット2とで負担していた場合における搬送ローラ13の負担分だけでなく、これに吸引孔24からの基板吸引による引付力を加えたものになる。
このため、搬送ローラ13とチャンバ上面21Aとの段差を大きくして搬送ローラ13による基板自重の負担分を増やすといった手法によらずとも、基板搬送に必要十分な摩擦力を確保し得るようになり、搬送時における加減速度を従来よりも大きく設定することが可能となる。
That is, when the pressing force from the glass substrate 3 to the transport roller 13 that determines the magnitude of the frictional force generated between the glass substrate 3 and the transport roller 13 bears the weight of the substrate between the transport roller 13 and the air floating unit 2. In addition to the burden of the conveying roller 13 in FIG. 1, the pulling force by suction of the substrate from the suction hole 24 is added thereto.
For this reason, it is possible to ensure a sufficient and sufficient frictional force for transporting the substrate without increasing the step between the transport roller 13 and the chamber upper surface 21A and increasing the burden of the substrate's own weight by the transport roller 13. The acceleration / deceleration at the time of conveyance can be set larger than the conventional one.

以上説明したように、この実施例による基板搬送装置によれば、近年、大型化・薄型化の著しいガラス基板3(例えば、縦1850mm×横1500mm、厚さ0.7mm)を搬送する場合であっても、ガラス基板3を変形(反り)させることなく、あるいは変形したとしてもガラス基板3に悪影響を与えない範囲での変形に抑えつつ搬送することができ、しかも、その搬送時間の短縮化を図ることができるという効果を奏する。   As described above, according to the substrate transfer apparatus of this embodiment, in recent years, a glass substrate 3 (for example, 1850 mm long × 1500 mm wide, 0.7 mm thick) that has been significantly increased in size and thickness has been transferred. However, the glass substrate 3 can be transported without being deformed (warped), or even if deformed, while suppressing deformation within a range that does not adversely affect the glass substrate 3, and the transport time can be shortened. There is an effect that it can be achieved.

また、吸引孔24を搬送ローラ13の近傍にのみ形成し、さらには各搬送ローラ13を挟んでガラス基板3の幅方向内側及び外側に対をなすように配置しているので、ガラス基板3の幅方向中央部における変形(反り)を抑えつつ、搬送ローラ13よりも基板方向の内側と外側に作用する付勢力をもバランスさせながら、ガラス基板3と搬送ローラ13間に生じる摩擦力を高めることができるという効果も奏する。   Further, since the suction holes 24 are formed only in the vicinity of the transport rollers 13 and are arranged so as to form a pair on the inner side and the outer side in the width direction of the glass substrate 3 with the transport rollers 13 interposed therebetween, The frictional force generated between the glass substrate 3 and the transport roller 13 is increased while balancing the urging force acting on the inner side and the outer side in the substrate direction rather than the transport roller 13 while suppressing deformation (warpage) in the central portion in the width direction. There is also an effect that can be done.

なお、この発明は上記実施例に限定されるものではなく、その要旨を逸脱しない範囲で種々の設計変更が可能である。
例えば、ガラス基板3を搬送ローラ13側へ付勢する付勢力は、基板下面3A側からの気体吸引力に代えて、基板上面側からの気体吹出力によるものであってもよい。
また、吸引孔24の形成位置は、搬送ローラ13の周囲のみに限定されるものではなく、当該位置に代えて又は加えて、他の位置に形成してもよい。
In addition, this invention is not limited to the said Example, A various design change is possible in the range which does not deviate from the summary.
For example, the urging force for urging the glass substrate 3 toward the transport roller 13 may be based on a gas blowing output from the substrate upper surface side instead of the gas suction force from the substrate lower surface 3A side.
Further, the formation position of the suction hole 24 is not limited to the periphery of the transport roller 13, and may be formed at other positions instead of or in addition to the position.

この発明の一実施例による基板搬送装置の正面図である。It is a front view of the board | substrate conveyance apparatus by one Example of this invention. 図1に示す基板搬送装置の平面図である。It is a top view of the board | substrate conveyance apparatus shown in FIG. 図1の要部拡大図である。It is a principal part enlarged view of FIG. 図3の更なる要部拡大図である。It is the further principal part enlarged view of FIG.

符号の説明Explanation of symbols

1 搬送ローラユニット
2 エア浮上ユニット
3 ガラス基板
3a、3b 下面両側縁部
3c 下面中央部
13 搬送ローラ
24 吸引孔(付勢手段の一部)
DESCRIPTION OF SYMBOLS 1 Conveyance roller unit 2 Air floating unit 3 Glass substrate 3a, 3b Lower side edge part 3c Lower surface center part 13 Conveyance roller 24 Suction hole (a part of biasing means)

Claims (3)

  1. 基板の下面両側縁部をそれぞれ支持し得るように複数対の搬送ローラを搬送方向と交差する方向に間隔をおいて配置すると共に、これら搬送ローラの間に基板の下面中央部を非接触に支持するエア浮上ユニットを設け、前記搬送ローラを回転させることにより基板を前記搬送方向に搬送する基板搬送装置において、
    前記エア浮上ユニットに形成された吸引孔と、この吸引孔と接続された吸引源とを備え、前記基板を前記搬送ローラ側へ付勢する付勢手段が設けられていることを特徴とする基板搬送装置。
    A plurality of pairs of transport rollers are arranged at intervals in the direction crossing the transport direction so that both side edges of the bottom surface of the substrate can be supported, and the center of the bottom surface of the substrate is supported in a non-contact manner between these transport rollers. In the substrate transport apparatus that includes the air levitation unit that transports the substrate in the transport direction by rotating the transport roller,
    A substrate comprising a suction hole formed in the air levitation unit and a suction source connected to the suction hole, and provided with a biasing means for biasing the substrate toward the transport roller. Conveying device.
  2. 前記付勢手段による付勢力が前記搬送ローラに作用していることを特徴とする請求項1記載の基板搬送装置。 2. The substrate transfer apparatus according to claim 1, wherein an urging force by the urging unit acts on the transfer roller .
  3. 前記付勢力が前記搬送ローラを挟んで前記基板の幅方向内側及び外側に対をなして作用していることを特徴とする請求項2記載の基板搬送装置。   3. The substrate transfer apparatus according to claim 2, wherein the biasing force acts in a pair on the inner side and the outer side in the width direction of the substrate across the transfer roller.
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KR20080059207A (en) * 2005-09-15 2008-06-26 코레플로우 사이언티픽 솔루션스 리미티드 An apparatus and method for enhencing conveying performance of conveyers
CN101410761A (en) * 2006-06-14 2009-04-15 日本精工株式会社 Exposing apparatus
JP4896148B2 (en) * 2006-10-10 2012-03-14 株式会社日本設計工業 Thin plate material conveyor
JP4753313B2 (en) * 2006-12-27 2011-08-24 東京エレクトロン株式会社 Substrate processing equipment
WO2008093419A1 (en) * 2007-01-31 2008-08-07 Hirata Corporation Transfer apparatus and transfer method
WO2009028279A1 (en) * 2007-08-24 2009-03-05 Sintokogio, Ltd. Air blowout structure and air blowout unit for air-floating conveyor apparatus, and air-floating conveyor apparatus having the same
JP2009073660A (en) * 2007-08-24 2009-04-09 Meikikou:Kk Air blowout structure and air blowout unit for air floating conveyor apparatus, and air floating conveyor apparatus
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