JP5332142B2 - Levitation transfer device - Google Patents

Abstract

A levitation transportation device for transporting an object with a lower surface from a first end toward a second end while levitating the object by pressurized fluid. The levitation transportation device has levitation devices and a transportation device. The levitation devices each includes an island member that has a base for defining a chamber for allowing the fluid to pass through it, has a flat upper surface, has a side surface including a slope surface contiguous to the upper surface and tilted toward the center of the upper surface, and is placed so as to cover the chamber; an inner surface that surrounds the island member and faces the side surface of the island member; a top surface that is flush with the upper surface; and a group that is selected from groups made up of step surfaces placed at an end that faces the first end and recessed downward from the top surface and of rotatable rollers capable of coming into contact with the object. The side surface and the inner surface respectively have outer shell members for forming an ejection hole communicating with the chamber and ejecting the fluid. The levitation devices are arranged with intervals in a row from the first end toward the second end. The transportation device transports the object.

Description

  The present invention relates to a levitation conveyance device that conveys a thin plate such as a glass substrate in a conveyance direction under a floating state.

  2. Description of the Related Art In recent years, various developments have been made on levitation conveyance devices, and the configuration of a typical levitation conveyance device is as follows.

  That is, a general levitation transport apparatus includes a base, and the base is provided with a transport unit that transports a thin plate such as a glass substrate in the transport direction. In addition, a plurality of levitation units that levitate the thin plate are arranged at intervals in the transport direction on the base, and nozzles that eject compressed air as levitation gas are formed on the upper surface of each levitation unit. Has been.

  Accordingly, by appropriately operating the transport unit while jetting compressed air from each nozzle, the thin plate loaded into the levitation transport device can be transported in the transport direction under the state of being levitated.

By the way, a thin plate such as a glass substrate is easy to bend, and when a thin plate is transferred from a preceding levitation unit to a subsequent levitation unit between levitation units adjacent to each other in the conveyance direction, a part of the thin plate is conveyed in the subsequent levitation unit. Interfering with the edge on the upstream side when viewed from the direction, hindering the work of transporting the thin plate by the levitation transport device. Therefore, in the conventional levitation conveyance device, (i) increase the levitation amount of the thin plate, (ii) the nozzle on the upstream side in the conveyance direction in the subsequent levitation unit (position on the upstream side among the plurality of nozzles). (Iii) when a thin plate is transferred from the preceding levitation unit to the subsequent levitation unit, Measures such as lowering the subsequent levitation unit relative to the previous levitation unit are taken (see Patent Document 1).
JP 2006-324510 A

  However, when the measures (i) and (ii) described above are taken, there is a problem that the consumption of compressed air increases and the running cost of the levitation transport device increases.

  Further, when the measure (iii) described above is taken, there is a need for an elevating mechanism that raises and lowers the subsequent levitating unit relative to the preceding levitating unit, which complicates the configuration of the levitating conveyance device. There is.

  Accordingly, an object of the present invention is to provide a levitating and conveying apparatus having a novel configuration that can solve the above-described problems.

The present invention is characterized in that, in a levitation transport apparatus that transports a thin plate in a transport direction in a state where the thin plate is levitated, a transport unit that is provided on the base and transports a thin plate in the transport direction, and the base Are provided with a plurality of rectangular floating units in plan view, which are arranged at intervals in the transport direction and float a thin plate, and each has a rectangular frame-shaped nozzle in plan view for ejecting floating gas on the upper surface of each floating unit. Each nozzle is configured to be inclined toward the unit center with respect to the vertical direction, and between the levitation units adjacent to each other in the conveyance direction, on the upstream edge as viewed from the conveyance direction in the subsequent levitation unit. It is necessary that a descending step is formed, the descending step communicates with an upstream edge of the nozzle, and the height of the descending step is higher than the height of the inlet of the nozzle. To.

According to the features of the present invention , the thin plate loaded in the levitation conveyance device is conveyed in the conveyance direction under the condition that the conveyance unit is appropriately operated while ejecting the floating gas from each nozzle. (General action of the levitating device).

  In addition to the general operation of the levitation conveyance device, the down step is formed at the upstream edge of the subsequent levitation unit, and the down step communicates with the nozzle. Is transferred from the preceding levitation unit to the subsequent levitation unit, the thin plate is supported by the levitation gas ejected from the descending step, and a portion of the thin plate and the upstream edge of the subsequent levitation unit Interference can be avoided. Thereby, without increasing the consumption of levitation gas or using a lifting mechanism for moving the subsequent levitation unit relative to the preceding levitation unit, the levitation conveyance device can carry out the thin plate conveyance work. Can be done appropriately.

  According to the present invention, the levitation conveying device can reduce the thickness of the thin plate without increasing the amount of levitation gas consumption or using a lifting mechanism that moves the subsequent levitation unit relative to the preceding levitation unit. Since the transfer work can be performed appropriately, the running cost of the levitation transfer apparatus can be reduced and the configuration of the levitation transfer apparatus can be simplified.

(First embodiment)
A first embodiment of the present invention will be described with reference to FIGS.

  Here, FIG. 1 is a partial plan view of the levitation transport apparatus according to the first embodiment, FIG. 2 is an enlarged view taken along line II-II in FIG. 1, and FIG. 3 is a levitation unit according to the first embodiment. 4 is a sectional view taken along line IV-IV in FIG. 3, FIG. 5 is a sectional view taken along line VV in FIG. 3, and FIG. 6 is taken along line VI-VI in FIG. An enlarged view and FIG. 7 are side views showing another aspect of the levitation unit of the first embodiment. In the drawings of the present application, “FF” indicates the forward direction, “FR” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  As shown in FIGS. 1 and 2, a levitating and conveying apparatus 1 according to an embodiment of the present invention is an apparatus that conveys a thin plate W such as a glass substrate in the conveying direction in a state where the thin plate W is levitated. A base 3 extending to the bottom is provided. The transport direction is in principle the forward direction, and there is an exceptional case where the transport direction is reversed from the front direction to the rear direction.

  The base 3 is provided with a transport unit 5 that transports the thin plate W in the transport direction. The specific configuration of the transport unit 5 is as follows.

  That is, a plurality of rotatable support rollers 7 (a plurality of left-side support rollers 7 and a plurality of right-side support rollers 7) that support the end portions of the thin plate W are provided near the left end portion and the right end portion of the base 3. The brackets 9 are provided at intervals in the front-rear direction, and the worm wheels 11 are integrally provided on the rotation shafts 7 s of the support rollers 7. In addition, drive shafts 13 extending in the front-rear direction are provided at the left end portion and the right end portion of the base 3 so as to be rotatable via bearings (not shown) or the like. Each has a plurality of worms 15 meshed with corresponding worm wheels 11. And the conveyance motor 17 which rotates the corresponding drive shaft 13 is each provided in the front left part and front side right part of the base 3 via the bracket 19, The output shaft 17s of each conveyance motor 17 is corresponding. The drive shaft 13 is integrally connected to the front end portion of the drive shaft 13 via a coupling or the like.

  Instead of rotating the two drive shafts 13 by the two transport motors 17, the two drive shafts 13 may be rotated by the single transport motor 17. Further, instead of the transport unit 5 including the plurality of support rollers 7 and the transport motor 17, another transport unit including a clamper that holds the end of the thin plate W and can move in the transport direction may be used. I do not care.

  Between the plurality of left-side support rollers 7 and the plurality of right-side support rollers 7 on the base 3, a plurality of levitation units 21 that float the thin plate W to the reference levitation height position are provided in the front-rear direction and the left-right direction (in other words, For example, they are arranged at intervals in the transport direction and the direction orthogonal to the transport direction. And the concrete structure of each levitation unit 21 is as follows.

  That is, as shown in FIG. 3 to FIG. 5, the base 3 is provided with a unit base member 23 of the floating unit 21 via the bracket 25, and this unit base member 23 is formed as a floating gas inside. It has the chamber 27 which can supply the compressed air of. The chamber 27 of the unit base member 23 is connected to a compressed air supply source (not shown) such as a blower.

  A frame-shaped lower outer member 29 is provided above the unit base member 23, and an island member 31 is integrally provided inside the lower outer member 29. Further, the upper part of the island member 31 protrudes upward from the lower shell member 29, and the island member 31 is approximately 45 toward the unit center side (center side of the floating unit 21) with respect to the vertical direction outside the upper part. The outer inclined surface 31a is inclined at a predetermined angle.

  A frame-shaped upper outer member 33 is provided on the upper side of the lower outer member 29 so as to surround the island member 31. The upper outer member 33 is approximately 45 degrees toward the unit center side in the vertical direction. It has an inclined inner inclined surface 33a. A plurality of positioning projections 35 that can come into contact with the outer inclined surface 31 a of the island member 31 are integrally provided on the inner inclined surface 33 a of the upper outer member 33. Instead of the positioning protrusion 35 being integrally provided on the inner inclined surface 33 a of the upper outer member 33, a positioning protrusion that can contact the inner inclined surface 33 a of the upper outer member 33 is provided on the outer inclined surface 31 a of the island member 31. You may make it provide integrally.

  A frame-like nozzle 37 that ejects compressed air is defined between the inner inclined surface 33a of the upper shell member 33 and the outer inclined surface 31a of the island member 31, in other words, the upper surface of the floating unit 21. Is formed with a frame-shaped nozzle 37, and the nozzle 37 communicates with the chamber 27. Further, as described above, since the outer inclined surface 31a of the island member 31 and the inner inclined surface 33a of the upper outer member 33 are inclined approximately 45 degrees toward the unit center with respect to the vertical direction, the nozzle 37 is arranged in the vertical direction. It is comprised so that it may incline about 45 degree | times toward the unit center side.

  Then, as shown in FIG. 6, between the floating units 21 adjacent to each other in the transport direction (forward direction), the rear edge (in other words, from the transport direction) of the upper outer member 33 of the subsequent floating unit 21. A descending step 39 is formed at the upstream edge), and the descending step 39 in the upper outer member 33 of the subsequent levitation unit 21 is configured to communicate with the nozzle 37.

  When the transport direction is reversed from the front direction to the rear direction, as shown in FIG. 7, the adjacent side of the upper outer member 33 of the levitation unit 21 between the levitation units 21 adjacent to each other in the front-rear direction. Downward stepped portions 39 are respectively formed at the edges.

  Then, the effect | action and effect of 1st Embodiment are demonstrated.

  The compressed air is supplied to the chamber 27 of each unit base member 23 by the compressed air supply source, and the compressed air is ejected from each nozzle 37. Further, by rotating the two drive shafts 13 synchronously by driving the two conveyance motors 17, a plurality of left support rollers 7 and a plurality of right support rollers 7 are engaged by the meshing action of the worm wheel 11 and the worm 15. Rotate in one direction. Thereby, the thin plate W carried into the levitation conveyance device 1 can be conveyed in the conveyance direction under the state of being levitated. Here, since each nozzle 37 is configured to be inclined by 45 degrees toward the unit center with respect to the vertical direction, a gas having a substantially uniform pressure is formed between the upper surface of each island member 31 and the rear surface of the thin plate W. Reservoir layers (compressed air reservoir layers) S can be respectively generated to sufficiently exhibit the floating performance of each floating unit 21 (general operation of the floating conveyance device 1).

  In addition to the general operation of the levitation conveyance device 1, a descending step 39 is formed at the upstream edge of the upper outer member 33 of the subsequent levitation unit 21, and the descending step 39 communicates with the nozzle 37. Therefore, when the thin plate W is transferred from the preceding levitation unit 21 to the subsequent levitation unit 21, the thin plate W is supported by the levitation gas ejected from the descending step 39, and a part of the thin plate W and the subsequent levitation unit 21 are supported. It is possible to avoid interference with the upstream edge of the. Thereby, the work of transporting the thin plate W by the levitation transport device 1 is performed without increasing the consumption of the levitation gas or using an elevating mechanism that moves the subsequent levitation unit 21 relative to the preceding levitation unit 21. Can be performed appropriately.

  Therefore, according to 1st Embodiment, the fall of the running cost of the levitation conveyance apparatus 1 and the simplification of the structure of the levitation conveyance apparatus 1 can be aimed at.

(Second Embodiment)
A second embodiment of the present invention will be described with reference to FIGS.

  Here, FIG. 8 is a partial plan view of the levitation transport apparatus according to the second embodiment, FIG. 9 is a plan view of the levitation unit according to the second embodiment, and FIG. 10 is a cross section taken along line XX in FIG. FIG. 11 is an enlarged view taken along line XI-XI in FIG. 8, and FIG. 12 is a side view showing another aspect of the floating unit of the second embodiment.

  As shown in FIGS. 8 to 10, the levitating and conveying apparatus 41 according to the second embodiment is an apparatus that conveys the thin plate W in the conveying direction under the floating state, and the levitating and conveying according to the first embodiment. Of the specific configuration of the levitating and conveying apparatus 41 according to the second embodiment, which has substantially the same configuration as the apparatus 1, a part different from the specific configuration of the levitating and conveying apparatus 1 according to the first embodiment (Characteristic part of the levitation unit 43 according to the second embodiment) will be described. Of the plurality of constituent elements in the levitation transport apparatus 41 according to the second embodiment, those corresponding to the constituent elements in the levitation transport apparatus 1 according to the first embodiment are denoted by the same reference numerals in the drawing. Description is omitted.

  That is, as shown in FIG. 11, between the floating units 43 adjacent to each other in the transport direction (forward direction), the rear edge (in other words, from the transport direction) of the upper outer member 33 of the subsequent floating unit 43. A downward step 45 is formed on the upstream edge), and a contact allowance roller 47 that allows contact with the thin plate W is provided on the lower step 45 in the upper outer member 33 of the subsequent floating unit 43 by a bracket 49. It is provided rotatably through the. Further, the support height position of each contact permitting roller 47 is equal to or higher than the height position of the upper surface of the floating unit 43 (the upper surface of the upper outer member 33) (preferably higher than the height position of the upper surface of the floating unit 43). ) And lower than the reference flying height position by the flying unit 43, and the rotation axis of each contact-allowing roller 47 is directed in a direction perpendicular to the conveying direction.

  When the transport direction is reversed from the front direction to the rear direction, as shown in FIG. 12, the adjacent side of the upper outer member 33 of the levitation unit 43 between the levitation units 43 adjacent to each other in the front-rear direction. A descending step 45 is formed at the edge of each of the two, and a contact allowing roller 47 is rotatably provided on the descending step 45 in the upper outer member 33 of the floating unit 43 via a bracket 49.

  Then, the effect | action and effect of 2nd Embodiment are demonstrated.

  Similarly to the general operation of the above-described levitation conveyance device 1, by operating the levitation conveyance device 41, the thin plate W carried into the levitation conveyance device 41 can be conveyed in the conveyance direction under the state of being levitated. Yes (general action of the levitation transport device 41).

  In addition to the general operation of the levitation conveyance device 41, a contact allowance roller 47 that allows the thin plate W to contact with the upstream edge of the subsequent levitation unit 43 is rotatably provided. When the thin plate W is transferred from the preceding levitating unit 21 to the succeeding levitating unit 21 because the vertical position is equal to or higher than the height position of the upper surface of the levitating unit 43 and lower than the reference levitating height position by the levitating unit 43. Furthermore, the thin plate W is supported by the contact allowing roller 47, and interference between a part of the thin plate W and the upstream edge portion of the subsequent floating unit 21 can be avoided. This makes it possible to appropriately carry the thin plate by the levitation conveyance device without increasing the amount of levitation gas consumption or using an elevating mechanism that raises and lowers the subsequent levitation unit 21 relative to the preceding levitation unit 21. Can be done.

  Therefore, according to the second embodiment, the running cost of the levitation conveyance device 41 can be reduced and the configuration of the levitation conveyance device 41 can be simplified.

  In addition, this invention is not restricted to description of the above-mentioned embodiment, In addition, it can implement in a various aspect. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

It is a partial top view of the levitation conveyance apparatus concerning a 1st embodiment. It is an enlarged view along the II-II line in FIG. It is a top view of the levitation unit concerning a 1st embodiment. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3, showing a state where a thin plate is levitated. It is sectional drawing along the VV line in FIG. 3, Comprising: The state which floated the thin plate is shown. It is an enlarged view along the VI-VI line in FIG. It is a side view which shows another aspect of the floating unit of 1st Embodiment. It is a partial top view of the levitating conveyance apparatus which concerns on 2nd Embodiment. It is a top view of the levitation unit concerning a 2nd embodiment. FIG. 10 is a cross-sectional view taken along the line XX in FIG. 9 and shows a state where the thin plate is levitated. It is an enlarged view along the XI-XI line in FIG. It is a side view which shows another aspect of the floating unit of 2nd Embodiment.

Explanation of symbols

W thin plate S gas accumulation layer 1 levitation transport device 3 base 5 transport unit 21 levitation unit 37 nozzle 39 descending step 41 levitation transport device 43 levitation unit 47 contact allowable roller

Claims (1)

In the levitation transport device that transports in the transport direction under the condition that the thin plate is levitated,
A base, a transport unit that is provided on the base and transports a thin plate in the transport direction, and a plurality of rectangular floating units that are arranged on the base at intervals in the transport direction and float the thin plate Comprising
The nozzles in the plan view rectangular frame shape for ejecting the floating gas are respectively formed on the upper surface of each floating unit, each nozzle is configured to be inclined toward the unit center side with respect to the vertical direction, and is adjacent to the transport direction. Between the levitation units, a descending step is formed at an upstream edge as viewed from the conveying direction in the subsequent levitation unit, and the descending step communicates with an upstream edge of the nozzle. The height of the nozzle is higher than the height of the inlet of the nozzle.

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