200920674 九、發明說明 【發明所屬之技術領域】 本發明’是關於使用壓縮空氣等之流體，使 浮的上浮裝置以及一面使之上浮一面進行搬運的 運裝置。 【先前技術】 使用壓縮空氣等之流體，一面使對象物上浮 行搬運的上浮式搬運裝置已被提案有數個。此等 搬運裝置，在典型上，爲具備有複數個：各別具 氣等流體通過之噴出孔的上浮裝置。噴出於上浮 象物之間的空氣等之流體產生壓力，對象物藉由 上浮’並受到由搬運裝置產生的驅動力而被搬運 技術’係揭示於日本特開2 0 0 6 - 1 8 2 5 6 3號公報。 【發明內容】 當對象物從一上浮裝置上往其他之上浮裝置 ’特別是對象物爲容易彎撓之材料之情形時，產 的端緣恐有碰撞到上述其他的上浮裝置前端之虞 之目的，在於提供一種，即使對象物的上浮高度 也可以迴避對象物的端緣碰撞到上浮裝置之問題 搬運裝置。 依據本發明之第1樣態，提供一種藉由施予 體使具有下表面的對象物上浮並用以從第1端朝ίΐ 對象物上 上浮式搬 而一面進 之上浮式 備可使空 裝置與對 此壓力而 。關連之 上移動時 生對象物 。本發明 爲一定， 的上浮式 壓力之流 ϋ第2端進 -4 - 200920674 行搬運的上浮式搬運裝置。上浮式搬運裝置， 上述第1端朝向上述第2端隔以間隔成列而配置 、以及用以搬運上述對象物的搬運裝置，上述 係各別具備：將上述流體通過的氣室予以劃分 具有：平面狀的上表面和包含鄰接於上述上表 述上表面的中心傾斜之斜面的側面，且以覆蓋 方式所配置的島構件；以及外廓構件，該外廓 圍上述島構件’並具有：與上述島構件的上述 的內面；及與上述上表面一同齊平於單一平面 面；以及配置在與上述第1端相對向的端部之 頂上表面還於下方後退的階段差面和可與上述 並可旋轉的輥子所成的群中，擇一選出者，且 述側面和上述內面與上述氣室連通而噴出上述 孔予以劃分。 較佳爲’上述噴出孔，係至少在上述頂上 沿著上述斜面而朝向上述島構件的中心傾斜。 上述島構件的上述斜面，是露出至比上述階段 。或較佳爲’上述噴出孔爲開口於上述階段差 【實施方式】 參照圖面說明本發明之實施形態於以下。 明書、申請專利範圍、以及圖面所說明之前方 方、以及右方，係於圖面中分別以標記爲FF、 及R之方向來定義。有關此定義是爲了說明上 具備有：從 的上浮裝置 上浮裝置， 的基部；及 面並朝向上 上述氣室之 構件，係包 側面相對向 上的頂上表 由：比上述 對象物接觸 將用以使上 流體的噴出 表面附近爲 又較佳爲， 差面還上方 面0 於本專利說 、後方、左 FR、L、以 的方便，本 -5- 200920674 發明並非受此所限定。 上浮式搬運裝置，是用以讓對象物W上浮於垂直方 向並搬運於水平之搬運方向（例如從前方FF朝向後方FR 的方向）的裝置。作爲對象物W者，係整體性爲平面狀 之比較薄的物體，例如，適合於L C D (液晶顯示器）所用 的玻璃基板等之薄板。對象物W，並不是非得要整體性爲 平面狀才可以，只要其下表面之至少一部分爲平面狀即可 。爲了使其上浮，故例如利用諸如空氣等流體。 對象物W，若爲LCD所用之薄的玻璃基板等之必須 在無塵潔淨的環境下進行搬運之物品時，上述上浮式搬運 裝置1則要使用在無塵室內等之無塵潔淨的環境下。 參照第1圖至第7圖說明本發明之第1實施形態於以下 。依本實施形態之上浮式搬運裝置1，如第1圖及第2圖所 示’係具備有：延伸於縱向方向的基台3、在基台3上於縱 向方向成列的搬運裝置5、以及在基台3上於縱向方向及橫 向方向之兩方隔以間隔分別成列的複數個上浮裝置2 1。上 浮式搬運裝置1的前端係顯示於第1圖下方，後端則位於第 1圖上方之視野之外。對象物w，是從上浮式搬運裝置丨之 例如前端而被朝向後端搬運。於上浮裝置2 1，連結著沒有 匱I示出之用以供給壓縮空氣的空氣供給裝置。也可以利用 胃氣^或氬氣等其他被加壓後的氣體、或是液體等其他被加 壓後的流體來取代壓縮空氣。 搬運裝置5，在基台3上的左端及右端附近，分別具有 於對象物W的搬運方向成列的複數個輥子7。各輥子7， -6- 200920674 分別經由旋轉軸7 s與蝸輪1 1 一體地連結著，並藉由托架9 可旋轉自如地被支持。以將基台3貫通於縱向方向之方式 具備有一對驅動軸13，各驅動軸13具備有能夠驅動地與各 蝸輪11齒合的蝸桿15。於各驅動軸13的前端，經由聯軸器 等可驅動地連結於馬達1 7的輸出軸1 7 s。藉此，各輕子7， 受到馬達1 7的驅動力，而成爲能夠以相同的旋轉速度旋轉 。如第2圖所示’上述各輥子7的上端部，僅比上述上浮裝 置21的上表面些微地突出於上方地，以平齊於單一平面上 之方式來配置。對象物W，即使在呈上浮的狀態下，如第 2圖所示’也可以接觸於須接受到驅動力的輥子7。 馬達1 7並不必須要有一對，兩驅動軸1 3也可以經由鏈 條等之適切的結合手段而連結於單一的馬達。又，也可以 將能夠驅動的夾持器（clamper)或輸送帶等之搬運手段 應用在搬運裝置5中來取代輥子。 參照第4圖及第5圖，各個上浮裝置21，係具備有基部 23’各基部23’是夾介托架25而被固定在基台3上。各基 部23 ’係於其內側’劃分有：使由空氣供給裝置所供給的 壓縮空氣暫時性通過的氣室（chamber) 27。 基部23，於其上部的中央，具備有：可覆蓋氣室27之 矩开< 的島構件3 1。島構件3 1的上表面，大致爲水平的平面 狀。島構件3 1的側面，是由：大致錯直的面、以及鄰接於 上述上表面並朝向上述上表面的中心而傾斜的斜面3〗a所 形成。 基部23’更進一步地具備有：以包圍著島構件31之方 200920674 式’由下部外廓構件29與上部外廓構件33所構成的外廓構 件2 9、3 3。上部外廓構件3 3的頂上表面，係與島構件3 i的 上表面可構成單一平面地，與上述平面齊平之高度。上部 外廓構件3 3的前端（於對象物之搬運方向中，朝向上流側 之端）’具有比上述頂上表面還於下方後退的階段差面3 9 〇 外廓構件2 9、3 3的內面與包含斜面3 1 a之島構件3 1的 側面，大致爲平行，亦即上部外廓構件3 3的內面3 3 a是沿 著斜面31a傾斜。包含斜面33a之外廓構件29、33的內面 與包含斜面3 1 a之島構件3 1的側面，係劃分出具有與氣室 27連通之均等寬幅的縫隙，該縫隙是具有引導氣室27中之 壓縮空氣使之作爲朝向上方噴出之噴出孔37的作用。 如第3圖所示，噴出孔37之朝向上浮裝置21之上表面 的開口，爲矩形的環狀。亦即，如第3圖至第5圖所示，噴 出孔37之整體爲連通於上述矩形之環狀開口的狹縫。階段 差面39，如上所述是比上浮裝置21的上表面還於下方後退 。因此，島構件3 1的斜面3 1 a之中，相向於前端的面，爲 部分性地朝向前方露出，噴出孔3 7之開口的一部分，是位 於階段差面3 9上。 如上所述，由於斜面3 1 a、3 3 a，是朝向島構件3 1之上 表面的中心而傾斜，故噴出孔3 7，至少在上浮裝置2 1之上 表面附近，爲朝向島構件3 1之上表面的中心（朝向內側） 而傾斜。傾斜角度例如爲45°爲佳，但不限於此。 噴出孔37，並不限定爲矩形的環狀，也可以是橢圓形 -8- 200920674 的環狀、或是環的一部分爲被閉塞的形狀等、或爲其他各 種形狀。島構件3 1 ’亦可以具備：可將噴出孔3 7的寬幅予 以均等化’之於其傾斜的外周3 1 a面上，具有同一高度的 複數個突起35。 較佳爲’複數個上浮裝置21’其上表面彼此以成爲單 一平面之方式齊平。此乃有利於將對象物W的上浮高度 予以安定化。 各上浮裝置的各氣室27，是藉由沒有圖示出的配管 而相互地連通’然後進一步地連通於空氣供給裝置。空氣 供給裝置，經由配管並能夠控制地將壓縮空氣供給至各上 浮裝置2 1。作爲空氣供給裝置，雖以具備有：電氣性地接 連於換流器電源的送風機馬達、以及藉由送風機馬達所驅 動的送風機，爲適切，但並非受此所限定。空氣供給裝置 ’亦可以具備：適宜讀取對象物W之資訊的讀取裝置、 或是控制空氣流量的控制器等。 當從空氣供給裝置將壓縮空氣朝向各氣室27供給時，. 從各噴出孔3 7噴出壓縮空氣。所噴出的壓縮空氣，如第3 圖至第5圖所示，在島構件31的上表面與對象物W的下表 面之間，於噴出孔37之開口所包圍的空間，形成產生使上 述壓縮空氣爲均等壓力的空間S。藉由在具有均等壓力之 空間S所支撐，對上述對象物W施予浮力使之上浮。另 〜方面，藉由驅動一對的馬達17，使一對的驅動軸13同步 地旋轉。藉由蝸輪1 1與蝸桿1 5的咬合，驅動軸1 3的旋轉傳 動給各輥子7。藉由接觸於旋轉的輥子7，被搬入於上浮式 -9- 200920674 搬運裝置1上的對象物w，在上浮的狀態下被搬運。 參照第6圖，當對象物W從圖中左方所示之一上浮裝 置21上’朝向圖中右方所示之其他的上浮裝置21上進行移 動時，對象物W的前端暫時地沒有受到浮力。若對象物 W爲易於彎撓的材料時，對象物w的前端會垂向下方， 產生恐有碰|里到上浮裝置2 1的前端之虞。然而依據本實施 形態’由於上部外廓構件3 3之前端的階段差面3 9是比上浮 裝置2 1的上表面還於下方後退，所以即使對象物w的前 端或多或少地垂向下方時也可以迴避碰撞到上浮裝置21之 問題。再者’由於壓縮空氣是沿著位於前方之部分性地露 出之島構件3 1的斜面3 1 a而朝向上方噴出，所以對象物w 的前端會被朝向上方吹起，而能夠朝向可取得浮力的空間 S上移動。上浮式搬運裝置1，由於具備有如此之輔助對 象物移動的手段’所以即使不特別地增高對象物的上浮高 度，也難以產生對象物的端緣碰撞到上浮裝置2 1的問題。 因此相較於藉由變動對象物的上浮高度來迴避朝向上浮裝 置2 1的碰撞，從消費能源的角度而言較爲有利。 各上浮裝置2 1，如第7圖所示的變形例，亦可以於前 端側與後端側之兩方’具備有比上表面還於下方後退的階 段差面3 9。島構件3 1的斜面3 1 a，係朝向前方與後方之兩 方，部分性地露出。依據此變形例，不僅是將對象物W 從前方FF搬運至後方FR之情形時’於朝該相反方向進 行搬運時亦可以迴避對象物W之前端碰撞於上浮裝置21 的問題。 -10- 200920674 爹照第8圖至第1 2圖說明本發明之第2實施形態於以下 依本貫施形態之上浮式搬運裝置4 1，取代上述的階段差 面3 9，具備藉由其他形態之輔助對象物移動的手段。在以 下的說明中’對於與上述之要素在實質上爲相同要素者則 標示以相同對照符號並省略其詳細說明，在此僅專以說明 與第1實施形態之相異點。 上浮式搬運裝置41 ’如第8圖所示，係具備：在基台 上於縱向方向及橫向方向之兩方隔以間隔分別成列的複數 個上浮裝置43。各個上浮裝置43，如第10圖所示，具備有 :於內側劃分氣室2 7的基部2 3、及覆蓋氣室2 7的島構件3 1 。並以包圍島構件31之方式，具備有：由下部外廓構件29 與上部外廓構件3 3所構成的外廓構件29、3 3。 參照第9圖與第1 0圖，上部外廓構件3 3的前端，具備 :取代階段差面39的階段差45、以及在階段差45上並藉由 托架49而能夠旋轉地被支撐的輥子47。階段差45，是位於 比上部外廓構件33的頂上表面還於下方後退，輥子47的頂 點是比上部外廓構件33的頂上表面還稍微地朝向上方突出 。在此，輥子4 7的頂點比上部外廓構件3 3的頂上表面還要 突出的高度，係以低於對象物W之標準的上浮高度爲理 想。又，輥子4 7，由於露出於前方’故能首先接觸到從前 方接近來的對象物W。輥子4 7的軸’係能夠容許輥子4 7之 縱向方向的旋轉地’朝向於與基台3相關之橫向方向一 & 的方向。輥子4 7的寬幅係以對齊於頂上表面的寬幅爲佳’ 但並不受此所限制。 -11 - 200920674 島構件3 1的斜面3〗&之中，相對向於前端的面，是與 第1實施形態之情形時不相同，爲隱藏於上部外廓構件3 3 ’而沒有朝向前方露出。或是，使該面朝向輥子47而露出 亦可。 參照第10圖’當對象物w，從圖中左方所示之—上浮 裝置43上’朝向圖中右方所示之其他上浮裝置43上移動時 ’對象物W的前端暫時性地沒有受到浮力。若對象物西 爲易於彎撓之材料時，恐會有對象物W的前端垂向下方 而碰撞到上浮裝置43前端之虞。不過，依據本實施形態， 上部外廓構件33的前端，由於在比上浮裝置43的上表面還 於下方後退的階段差45上，具備有輥子47，因而對象物W 的前端即使多少垂向下方，也會由於接觸到輥子47而越至 上方’而能夠朝向可取得浮力的空間S上移動。上浮式搬 運裝置4 1，由於具備有輔助如此之對象物移動的手段，所 以不必特別地增高對象物的上浮高度也不易產生對象物端 緣碰撞倒上浮裝置43的問題。相較於藉由變動對象物的上 浮高度來迴避朝上浮裝置43的碰撞，於消耗能源的觀點是 有利的。 各上浮裝置43，亦可以如第1 2圖所示的變形例，於前 端側與後端側之兩方，皆具備有輥子47。依據此變形例， 不僅對於將對象物W從前方FF搬運至後方FR之情形， 對於朝其相反方向搬運時亦可以迴避對象物W的前端碰 撞到上浮裝置2 1的問題。 以上參照適合於本發明之實施形態進行了說明’但本 -12- 200920674 發明並不受上述實施形態所限定。具有本技術領域之通常 技術者，可依據上述所揭示的內容，藉由對實施形態之修 正乃至於變形來實施本發明。 [產業上之可利用性] 本發明，提供一種即使對象物的上浮高度爲一定，也 可以迴避對象物的端緣碰撞到上浮裝置之問題的上浮式搬 運裝置。 【圖式簡單說明】 第1圖，是本發明之第1實施形態之上浮式搬運裝置的 部分上視圖。 第2圖，是沿著第1圖之Π-ΙΙ線截取後的部分斷面圖 〇 第3圖，是上述第1實施形態之上浮裝置的上視圖。 第4圖，是沿著第3圖之IV -1V線截取後之上述上浮裝 置的橫向斷面圖。 第5圖，是沿著第3圖之V-V線截取後之上述上浮裝 置的縱向斷面圖。 第6圖，是沿著第1圖之VI - VI線截取後之上述上浮裝 置的側面圖。 第7圖，是上述第1實施形態之變形例中之上浮裝置的 側面圖。 第8圖，是第2實施形態之上浮式搬運裝置的部分上視 -13- 200920674 圖。 第9圖，是上述第2實施形態中之上浮裝置的上視圖。 第10圖，是沿著第9圖之X-X線截取後之上述上浮裝 置的縱向斷面圖。 第1 1圖，是第8圖之XI-XI線截取後之上述上浮裝置 的側面圖。 第1 2圖，是上述第2實施形態之變形例中之上浮裝置 的側面圖。 【主要元件符號說明】 1、5 7 :上浮式搬運裝置 3 :基台 5 :搬運裝置 7 :上浮裝置 9、5 9 :氣體供給裝置 1 1 :輥子 1 1 s :旋轉軸 1 3 :托架 1 5 :蝸輪 1 7 :驅動軸 1 9 :蝸桿 2 1 :上浮裝置 2 3 :基部 2 5 :托架 -14- 200920674 27 :氣室 2 9 :下部外廓構件 3 1 :島構件 3 1 a :斜面[Technical Field] The present invention relates to a floating device that uses a fluid such as compressed air to transport a floating floating device and a floating surface. [Prior Art] Several types of floating transport apparatuses that use a fluid such as compressed air to transport an object on the surface have been proposed. Such a conveying device is typically a floating device having a plurality of discharge holes through which fluids such as respective gases pass. The fluid sprayed by the air such as the air between the floating objects generates pressure, and the object is transported by the floating force 'and is driven by the driving force generated by the conveying device'. It is disclosed in Japanese Patent Publication No. 2 0 0 6 - 1 8 2 5 6 Bulletin No. 3. SUMMARY OF THE INVENTION When an object is moved from a floating device to another floating device, in particular, when the object is a material that is easily bent, the edge of the product may collide with the front end of the other floating device. It is to provide a problem carrying device that can avoid the collision of the edge of the object with the floating device even if the object is raised in height. According to a first aspect of the present invention, an object having a lower surface is floated by an applicator and used to float upward from the first end toward the object, and the floating device can be placed on the floating device. This is the pressure. When you move up, you will get an object. The present invention is a floating floating type of conveying device that is carried by the second end of the flow-up type of the upper floating type -4 - 200920674. In the floating transport apparatus, the first end is disposed in a row with the second end interposed therebetween, and a transport device for transporting the object, and each of the units includes a gas chamber through which the fluid passes: a planar upper surface and a side surface including a side surface inclined to the upper surface of the upper surface of the upper surface, and an island member disposed in a covering manner; and an outer member, the outer circumference surrounding the island member' having: The inner surface of the island member; and the flat surface are flush with the upper surface; and the stepped surface of the top surface of the end portion facing the first end is further retracted below Among the groups of rotatable rollers, one is selected, and the side surface and the inner surface communicate with the air chamber to discharge the holes. Preferably, the discharge hole is inclined toward the center of the island member along the inclined surface at least on the top. The inclined surface of the island member is exposed to the above-described stage. Or preferably, the discharge hole is open at the above-described stage difference. [Embodiment] Embodiments of the present invention will be described below with reference to the drawings. The terms of the patent, the scope of the patent application, and the front and the right side of the drawing are defined in the drawings as FF and R. This definition is for the purpose of describing: the base of the upper floating device of the upper floating device; and the member facing the air chamber; the top surface of the side of the bag is relatively upward: the contact with the object is used to make The vicinity of the discharge surface of the upper fluid is preferably further, and the difference is also in the aspect of the patent, the rear, the left FR, the L, and the convenience of the invention is not limited thereto. The floating transporting device is a device for allowing the object W to float in the vertical direction and transport it in a horizontal transport direction (for example, from the front FF toward the rear FR). The object W is a relatively thin object having a planar shape as a whole, and is, for example, a thin plate suitable for a glass substrate used for L C D (Liquid Crystal Display). The object W does not have to be flat in shape as long as at least a part of the lower surface is flat. In order to make it float, for example, a fluid such as air is used. When the object W is a thin glass substrate used for an LCD and must be transported in a dust-free environment, the floating transport apparatus 1 is used in a dust-free environment such as a clean room. . The first embodiment of the present invention will be described below with reference to Figs. 1 to 7 . According to the present embodiment, the floating transport apparatus 1 is provided with a base 3 extending in the longitudinal direction and a transport device 5 arranged in the longitudinal direction on the base 3, as shown in FIGS. 1 and 2 And a plurality of floating devices 2 1 arranged in a row on the base 3 in the longitudinal direction and the lateral direction at intervals. The front end of the floating transport apparatus 1 is shown below the first figure, and the rear end is located outside the field of view above the first figure. The object w is transported toward the rear end from, for example, the front end of the floating transport device. The air supply means for supplying compressed air, which is not shown by 匮I, is connected to the floating device 2 1. It is also possible to use a pressurized gas such as stomach gas or argon gas or another pressurized fluid such as a liquid instead of compressed air. The conveying device 5 has a plurality of rollers 7 arranged in a row in the conveying direction of the object W in the vicinity of the left end and the right end of the base 3. Each of the rollers 7, -6- 200920674 is integrally coupled to the worm wheel 1 1 via a rotating shaft 7 s, and is rotatably supported by the bracket 9. A pair of drive shafts 13 are provided so as to penetrate the base 3 in the longitudinal direction, and each of the drive shafts 13 is provided with a worm 15 that is drivably coupled to each of the worm wheels 11. The front end of each drive shaft 13 is drivably coupled to the output shaft 1 7 s of the motor 17 via a coupling or the like. Thereby, each of the leppers 7 is driven by the driving force of the motor 17 and can be rotated at the same rotational speed. As shown in Fig. 2, the upper end portions of the respective rollers 7 are arranged slightly above the upper surface of the floating device 21 so as to be flush with a single plane. The object W can be brought into contact with the roller 7 to which the driving force is to be received, even in the state of being floated, as shown in Fig. 2'. The motor 1 7 does not have to have a pair, and the two drive shafts 1 3 may be coupled to a single motor via a suitable coupling means such as a chain. Further, instead of the roller, a conveyance means such as a clamper or a conveyor belt may be applied to the conveyance device 5. Referring to Figs. 4 and 5, each of the floating devices 21 is provided with a base portion 23'. Each of the base portions 23' is a clip bracket 25 and is fixed to the base 3. Each base portion 23' is defined on the inner side thereof: a chamber 27 for temporarily passing compressed air supplied from the air supply device. The base portion 23 is provided at the center of the upper portion thereof with an island member 31 that can cover the moment opening of the air chamber 27. The upper surface of the island member 31 is substantially horizontal and planar. The side surface of the island member 31 is formed by a substantially straight surface and a slope 3a that is inclined adjacent to the upper surface and directed toward the center of the upper surface. The base portion 23' is further provided with outer peripheral members 29 and 3 composed of the lower outer member 29 and the upper outer member 33 in a manner of surrounding the island member 31. The top surface of the upper outer member member 3 3 and the upper surface of the island member 3 i may constitute a single plane, which is flush with the plane. The front end of the upper outer member member 3 (the end toward the upstream side in the conveyance direction of the object) has a stepped surface 3 9 后 which is further retracted below the top surface, and the outer member 2 9 , 3 3 The side surface is substantially parallel to the side surface of the island member 31 including the inclined surface 3 1 a, that is, the inner surface 3 3 a of the upper outer member 3 3 is inclined along the inclined surface 31a. The inner surface including the outer surface members 29, 33 of the inclined surface 33a and the side surface of the island member 31 including the inclined surface 31a are divided into equal width gaps communicating with the air chamber 27, the slit having a guiding air chamber The compressed air in 27 functions as a discharge hole 37 that is ejected upward. As shown in Fig. 3, the opening of the discharge hole 37 facing the upper surface of the floating device 21 has a rectangular ring shape. That is, as shown in Figs. 3 to 5, the entire discharge hole 37 is a slit that communicates with the rectangular annular opening. The step surface 39, as described above, is retracted below the upper surface of the floating device 21. Therefore, among the slopes 31 1 a of the island member 31, the surface facing the front end is partially exposed toward the front, and a part of the opening of the discharge hole 37 is located on the step surface 39. As described above, since the inclined faces 3 1 a, 3 3 a are inclined toward the center of the upper surface of the island member 3 1 , the ejection holes 37 are at least near the upper surface of the floating device 2 1 toward the island member 3 1 is inclined at the center of the upper surface (toward the inside). The inclination angle is preferably 45°, for example, but is not limited thereto. The discharge hole 37 is not limited to a rectangular ring shape, and may be an oval shape of an elliptical shape -8 to 200920674, or a shape in which a part of the ring is closed, or other various shapes. The island member 3 1 ' may have a plurality of protrusions 35 having the same height, which can equalize the width of the discharge holes 37 to the outer circumference 3 1 a of the inclination. Preferably, the plurality of floating devices 21' have their upper surfaces flush with each other in a single plane. This is advantageous for stabilizing the floating height of the object W. Each of the air chambers 27 of each of the floating devices is in communication with each other by a pipe (not shown) and then further communicates with the air supply device. The air supply device supplies compressed air to each of the floating devices 21 via a pipe and controllably. The air supply device is preferably provided with a blower motor electrically connected to the inverter power supply and a blower driven by the blower motor, but is not limited thereto. The air supply device ‘ may include a reading device that is suitable for reading information of the object W or a controller that controls the flow rate of the air. When compressed air is supplied from the air supply means to the respective air chambers 27, compressed air is ejected from the respective discharge holes 37. The compressed air to be ejected, as shown in Figs. 3 to 5, is formed between the upper surface of the island member 31 and the lower surface of the object W, and the space surrounded by the opening of the ejection hole 37 is formed to cause the above compression. The air is a space S of equal pressure. By supporting the space S having an equal pressure, buoyancy is applied to the object W to float upward. On the other hand, by driving a pair of motors 17, the pair of drive shafts 13 are synchronously rotated. By the engagement of the worm wheel 11 and the worm 15, the rotation of the drive shaft 13 is transmitted to the rollers 7. By the roller 7 that is in contact with the rotation, the object w that has been carried in the floating -9-200920674 transporting device 1 is transported in a floating state. Referring to Fig. 6, when the object W is moved from the upper floating device 21 on the left side of the drawing to the other floating device 21 shown to the right in the figure, the front end of the object W is temporarily not subjected to buoyancy. When the object W is a material that is easy to bend, the front end of the object w is vertically downward, and the front end of the floating device 2 1 is generated. However, according to the present embodiment, since the step surface 39 of the front end of the upper outer member 3 3 is retracted below the upper surface of the floating device 2, even if the front end of the object w is more or less vertically downward. It is also possible to avoid the problem of collision with the floating device 21. In addition, since the compressed air is ejected upward along the inclined surface 3 1 a of the island member 3 1 which is partially exposed in the front, the front end of the object w is blown upward, and the buoyancy can be obtained. The space S moves on. Since the floating transport apparatus 1 has such a means for moving the auxiliary object, it is difficult to cause the end edge of the object to collide with the floating device 2 1 without particularly increasing the floating height of the object. Therefore, it is advantageous from the viewpoint of energy consumption as compared with the collision of the floating object with the floating height of the object to be moved toward the floating device 21. In the modification shown in Fig. 7, each of the floating device 2 1 may have a step surface 39 which is retracted from the upper surface and the lower side at the front end side and the rear end side. The slope 3 1 a of the island member 31 is partially exposed toward the front and the rear. According to this modification, not only when the object W is transported from the front FF to the rear FR, but also when the transport is performed in the opposite direction, the problem that the front end of the object W collides with the floating device 21 can be avoided. -10-200920674 A second embodiment of the present invention will be described with reference to Figs. 8 to 2, in which the floating transport apparatus 4 1 is replaced by the above-described step-type surface 3, which is provided by the other embodiment. The means by which the auxiliary object of the form moves. In the following description, the same reference numerals are given to the same elements as the above-mentioned elements, and the detailed description thereof will be omitted, and only the differences from the first embodiment will be specifically described. As shown in Fig. 8, the floating transport apparatus 41' includes a plurality of floating devices 43 which are arranged in a row on the base in the longitudinal direction and the lateral direction at intervals. As shown in Fig. 10, each of the floating devices 43 includes a base portion 2 3 that partitions the air chamber 27 from the inside, and an island member 3 1 that covers the air chamber 27. Further, the outer member members 29 and 33 including the lower outer member 29 and the upper outer member 33 are provided so as to surround the island member 31. Referring to FIGS. 9 and 10, the front end of the upper outer member 33 has a step difference 45 in place of the step surface 39, and is rotatably supported by the bracket 49 in the step 45. Roller 47. The step difference 45 is located further downward than the top surface of the upper outer member 33, and the apex of the roller 47 protrudes slightly upward from the top surface of the upper outer member 33. Here, the height at which the apex of the roller 47 protrudes more than the top surface of the upper outer member 3 3 is desirable to be lower than the standard floating height of the object W. Further, since the roller 47 is exposed to the front, it is possible to first contact the object W approaching from the front. The axis of the roller 47 is capable of allowing the rotation of the longitudinal direction of the roller 47 to be oriented toward the direction of the transverse direction associated with the base 3. The width of the roller 47 is preferably a width that is aligned with the top surface of the top surface, but is not limited thereto. -11 - 200920674 Among the slopes 3 & of the island member 31, the surface facing the front end is different from that in the case of the first embodiment, and is hidden from the upper outer member 3 3 ' without facing forward. Exposed. Alternatively, the surface may be exposed toward the roller 47. Referring to Fig. 10, when the object w is moved from the upper floating device 43 on the left side of the drawing to the other floating device 43 shown to the right in the drawing, the front end of the object W is temporarily not received. buoyancy. If the object is a material that is easy to bend, the front end of the object W may fall vertically and collide with the front end of the floating device 43. However, according to the present embodiment, the tip end of the upper outer member 33 is provided with the roller 47 at a step 45 which is further lower than the upper surface of the floating device 43, and the front end of the object W is vertically downward. It is also possible to move toward the space S in which buoyancy can be obtained by coming into contact with the roller 47. Since the floating transporting device 4 1 is provided with means for assisting the movement of such an object, it is not necessary to particularly increase the flying height of the object, and it is less likely to cause the object edge to collide with the inverted floating device 43. It is advantageous from the viewpoint of energy consuming to avoid collision with the floating device 43 by changing the floating height of the object. Each of the floating devices 43 may be provided with a roller 47 on both the front end side and the rear end side as in the modification shown in Fig. 2 . According to this modification, not only when the object W is transported from the front FF to the rear FR, but also when the object W is transported in the opposite direction, the front end of the object W can be prevented from colliding with the floating device 2 1 . The above description has been made with reference to the embodiments of the present invention. However, the invention of the present invention is not limited to the above embodiments. The present invention can be implemented by a person skilled in the art, based on the above-described disclosure, by modification or modification of the embodiment. [Industrial Applicability] The present invention provides a floating transport apparatus that can avoid the problem that the edge of the object collides with the floating device even if the floating height of the object is constant. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial top plan view of a floating transport apparatus according to a first embodiment of the present invention. Fig. 2 is a partial cross-sectional view taken along line ΙΙ-ΙΙ of Fig. 1 〇 Fig. 3 is a top view of the floating device of the first embodiment. Fig. 4 is a transverse sectional view of the above-mentioned floating device taken along line IV - 1V of Fig. 3. Fig. 5 is a longitudinal sectional view of the above-mentioned floating device taken along the line V-V of Fig. 3. Fig. 6 is a side view of the above-mentioned floating device taken along line VI-VI of Fig. 1. Fig. 7 is a side view showing a floating device in a modification of the first embodiment. Fig. 8 is a partial top view of the floating transport apparatus of the second embodiment - 13-200920674. Fig. 9 is a top view of the above-described floating device in the second embodiment. Fig. 10 is a longitudinal sectional view of the above-mentioned floating device taken along the line X-X of Fig. 9. Fig. 1 is a side view of the above-mentioned floating device taken along line XI-XI of Fig. 8. Fig. 2 is a side view showing a floating device in a modification of the second embodiment. [Description of main component symbols] 1, 5 7 : Floating transport device 3 : Abutment 5 : Transport device 7 : Floating device 9 , 5 9 : Gas supply device 1 1 : Roller 1 1 s : Rotary shaft 1 3 : Bracket 1 5 : worm gear 1 7 : drive shaft 1 9 : worm 2 1 : floating device 2 3 : base 2 5 : bracket 14 - 200920674 27 : air chamber 2 9 : lower outer member 3 1 : island member 3 1 a : Bevel
3 3 :上部外廓構件 33a :內面 35 :突起 3 7 :噴出孑L 3 9 :階段差面 4 1 :配管 4 3、6 1 :送風機 4 5、6 3 :送風機馬達 4 7、6 5 :換流器電源 49 :雷射長度測量器 51、69 :支撐臂 5 3、71 :控制器 5 5、7 9 :送風機控制部 6 7 :讀碼器 73 :記憶裝置 7 5 :輸入部 77 :處理器 FF :前方 FR :後方 L :左方 -15 200920674 R :右方 s :壓縮空氣爲均等壓力的空間 w :對象物 -16-3 3 : upper outer member 33a : inner surface 35 : projection 3 7 : discharge 孑 L 3 9 : step difference surface 4 1 : pipe 4 3, 6 1 : blower 4 5, 6 3 : blower motor 4 7 , 6 5 : Inverter power supply 49 : Laser length measuring device 51 , 69 : Support arm 5 3 , 71 : Controller 5 5 , 7 9 : Blower control unit 6 7 : Reader 73 : Memory device 7 5 : Input unit 77 : Processor FF : Front FR : Rear L : Left -15 200920674 R : Right s : Compressed air is equal pressure space w : Object - 16-