KR101214888B1 - Levitation transportation device - Google Patents

Levitation transportation device Download PDF

Info

Publication number
KR101214888B1
KR101214888B1 KR1020107000549A KR20107000549A KR101214888B1 KR 101214888 B1 KR101214888 B1 KR 101214888B1 KR 1020107000549 A KR1020107000549 A KR 1020107000549A KR 20107000549 A KR20107000549 A KR 20107000549A KR 101214888 B1 KR101214888 B1 KR 101214888B1
Authority
KR
South Korea
Prior art keywords
surface
floating
object
conveying
island member
Prior art date
Application number
KR1020107000549A
Other languages
Korean (ko)
Other versions
KR20100018615A (en
Inventor
겐스케 히라타
가이 다나카
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007173425A priority Critical patent/JP5332142B2/en
Priority to JPJP-P-2007-173425 priority
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20100018615A publication Critical patent/KR20100018615A/en
Application granted granted Critical
Publication of KR101214888B1 publication Critical patent/KR101214888B1/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions

Abstract

Floating conveying apparatus for floating the object which has a lower surface by the pressurized fluid, and conveying it toward a 2nd end from a 1st end is disclosed. The floating conveying apparatus includes: a base portion partitioning a chamber through which the fluid passes; An island member having a planar upper surface and a side surface including an inclined surface inclined toward the center of the upper surface adjacent to the upper surface, the island member disposed to cover the chamber; An inner surface that surrounds the island member and faces the side surface of the island member, a top surface aligned on a single plane with the upper surface, and a stage opposite to the first end; An outer member having one selected from the group consisting of a stepped surface retracted downward from the surface and a rotatable roller contactable with the object, wherein the side surface and the inner surface communicate with the chamber to define a jet hole for ejecting the fluid A flotation device, each of which has a row and is arranged in a row at intervals from the first end toward the second end; And a conveying device for conveying the object.

Description

Injury Return Device {LEVITATION TRANSPORTATION DEVICE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flotation device that floats an object using a fluid such as compressed air, and a flotation carrier that conveys while floating.

There have been some proposals for a floating conveying device which conveys an object while using a fluid such as compressed air. These flotation conveying apparatuses are typically provided with a plurality of flotation apparatuses each provided with a blowing hole through which a fluid such as air passes. Fluid such as air blown out between the flotation device and the object generates a pressure, and the object floats by the pressure, and is conveyed under the driving force by the conveying device. Related arts are disclosed in Japanese Patent Laid-Open No. 2006-182563.

When an object moves from one floating device onto another floating device, particularly when the object is a flexible material, the tip of the object may collide with the front end of the other floating device. An object of the present invention is to provide a floating conveying apparatus capable of avoiding the problem that the tip of the object collides with the floating device even if the floating height of the object is constant.

According to the 1st aspect of this invention, the floating conveying apparatus for floating the object which has a lower surface by the pressurized fluid, and conveying it toward the 2nd end from a 1st end is provided. The floating conveying apparatus includes: a base portion partitioning a chamber through which the fluid passes; An island member having a planar upper surface and a side surface including an inclined surface inclined toward the center of the upper surface adjacent to the upper surface, the island member disposed to cover the chamber; An inner surface that surrounds the island member and faces the side surface of the island member, a top surface aligned on a single plane with the top surface, and disposed on an end opposite to the first end, and retreating downward from the top surface; An outer member having any one selected from the group consisting of a stepped surface and a rotatable roller that is in contact with the object, wherein the side surface and the inner surface communicate with the chamber to define a jet hole for ejecting the fluid. And a floating device arranged in a row at intervals from the first end to the second end, and a conveying device for conveying the object.

Preferably, the blowing hole is inclined toward the center of the island member along the inclined surface at least near the top surface. More preferably, the inclined surface of the island member is exposed upward than the stepped surface. More preferably, the blowing hole is opened in the step surface.

There is provided a floating conveying device which can avoid the problem that the tip of the object collides with the floating device even if the floating height of the object is constant.

1 is a partial plan view of a floating conveying apparatus according to a first embodiment of the present invention.
FIG. 2 is a partial cross-sectional view taken along the line II-II of FIG. 1.
3 is a plan view of the flotation device according to the first embodiment.
4 is a cross-sectional view of the flotation device according to line IV-IV of FIG. 3.
FIG. 5 is a longitudinal sectional view of the floating apparatus along the line VV of FIG. 3. FIG.
FIG. 6 is an elevation view of the flotation device taken along line VI-VI of FIG. 1.
Fig. 7 is an elevation view of a flotation device according to a modification of the first embodiment.
8 is a partial plan view of the floating conveying apparatus according to the second embodiment.
9 is a plan view of the flotation device according to the second embodiment.
10 is a longitudinal cross-sectional view of the flotation device taken along the line XX of FIG. 9.
FIG. 11 is an elevation view of the flotation device of FIG. 8 along line XI-XI. FIG.
12 is an elevation view of a flotation device according to a modification of the second embodiment.

Embodiments of the present invention will be described below with reference to the drawings. In the present specification, claims, and drawings, front, rear, left, and right sides are defined by directions written as FF, FR, L, and R in the drawings, respectively. This definition is for convenience of description, and the present invention is not necessarily limited thereto.

The floating conveying apparatus is an apparatus for conveying the object W in the vertical direction and conveying it in a horizontal conveying direction (for example, the direction from the rear FR toward the front FF). As the object W, a thin plate such as a relatively thin object which is generally planar, for example, a glass substrate for an LCD (liquid crystal display), is preferable. The object W does not necessarily need to be planar as a whole, and at least part of its lower surface may be planar. To float, a fluid such as air is used, for example.

When the object W needs to be conveyed in a clean environment, such as a thin glass substrate for LCD, the said floating conveyance apparatus 1 is used in clean environments, such as a clean room.

A first embodiment of the present invention will be described below with reference to FIGS. 1 to 7. As shown in FIG. 1 and FIG. 2, the floating conveying apparatus 1 according to the present embodiment has a column 3 extending in the longitudinal direction and a column formed on the base 3 in the vertical direction. On the conveying apparatus 5 and the base 3, the several floating apparatuses 21 lined up at both the longitudinal direction and the horizontal direction at intervals are provided. The front end of the floating conveying apparatus 1 is shown in the lower part of FIG. 1, and the rear end is outside the visual field of the upper part of FIG. The object W is conveyed toward the front end of the floating conveying apparatus 1, for example from a rear end. Although not shown, an air supply device for supplying compressed air is connected to the floating device 21. Instead of compressed air, other pressurized gases such as nitrogen and argon, or other pressurized fluids such as liquid may be used.

The conveying apparatus 5 has the several roller 7 which forms a row in the conveyance direction of the target object W in the vicinity of the left end and the right end on the base 3, respectively. Each roller 7 is integrally connected with the worm wheel 11 via the rotation shaft 7s, respectively, and is rotatably supported by the bracket 9. A pair of drive shafts 13 are provided to allow the base 3 to penetrate in the longitudinal direction, and each drive shaft 13 includes a worm 15 that engages with each worm wheel 11 so as to be able to drive. The output shaft 17s of the motor 17 is driveably connected to the front end of each drive shaft 13 via a coupling or the like. As a result, the rollers 7 receive the driving force of the motor 17 and rotate at the same rotational speed. As shown in FIG. 2, the upper end part of each said roller 7 is arrange | positioned so that it may protrude slightly upward rather than the upper surface of the said floating apparatus 21, and is aligned on a single surface. The object W can be in contact with the roller 7 in order to receive a driving force even in a floating state, as shown in FIG. 2.

The motors 17 need not be a pair, and the two drive shafts 13 may be connected to a single motor through suitable coupling means such as a chain. In addition, you may apply the conveying means, such as a clamper which can be driven, a belt conveyor, to the conveying apparatus 5 instead of a roller.

4 and 5, each of the floating devices 21 includes a base portion 23, and each base portion 23 is fixed on the base 3 via the bracket 25. have. Each base portion 23 partitions a chamber 27 through which compressed air supplied from an air supply device temporarily passes.

The base part 23 is provided with the rectangular island member 31 in the center of the upper part so that the chamber 27 may be covered. The upper surface of the island member 31 is a horizontal flat type. The side surface of the island member 31 consists of a substantially perpendicular surface and the inclined surface 31a which adjoins the said upper surface and inclines toward the center of the said upper surface.

The base part 23 is further provided with the outer member 29 and 33 which consist of the lower outer member 29 and the upper outer member 33 so that the island member 31 may be enclosed. The top surface of the upper outer member 33 is aligned with the plane so as to form a single plane with the upper surface of the island member 31. The rear end of the upper outer member 33 (end toward the upstream side in the conveying direction of the object) has a stepped surface 39 that is retracted downward from the top surface.

Side surfaces of the island members 31 including the inner surfaces of the outer members 29 and 33 and the inclined surfaces 31a are substantially parallel, that is, the inner surfaces 33a of the upper outer members 33 are inclined along the inclined surfaces 31a. have. The inner surface of the outer members 29 and 33 including the inclined surface 33a and the side surface of the island member 31 including the inclined surface 31a define a gap having a uniform width communicating with the chamber 27. This gap acts as a blowing hole 37 which guides compressed air in the chamber 27 and blows it upward.

As shown in FIG. 3, the opening of the blowing hole 37 to the upper surface of the floating apparatus 21 is a rectangular annular shape. In other words, as shown in Figs. 3 to 5, the entirety of the jet hole 37 is a slit communicating with the rectangular annular opening. As described above, the stepped surface 39 is retracted downward from the upper surface of the floating apparatus 21. Therefore, the surface facing the rear end of the inclined surface 31a of the island member 31 is partially exposed to the rear, and a part of the opening of the jet hole 37 is on the step surface 39.

As described above, since the inclined surfaces 31a and 33a are inclined toward the center of the upper surface of the island member 31, the ejection hole 37 is at least in the vicinity of the upper surface of the floating device 21, and thus the island member 31. It is inclined toward the center of the upper surface of the surface. The inclination is preferably, for example, 45 °, but is not limited thereto.

The blowing hole 37 is not limited to the rectangular annular shape, but may be other various shapes such as an elliptical annular shape or a shape in which part of the ring is occluded. The island member 31 may be provided with a plurality of projections 35 having the same height on the inclined outer circumferential 31a surface so as to make the width of the ejection hole 37 uniform.

Preferably, the plurality of floating devices 21 are aligned such that their upper surfaces form a single plane. This is advantageous for stabilizing the floating height of the object W.

Each chamber 27 of each floating apparatus 21 is mutually communicated by the piping which is not shown in figure, and also communicates with an air supply apparatus. The air supply device controllably supplies the compressed air to each floating device 21 through a pipe. As the air supply device, one having a blower motor electrically connected to the inverter power supply and a blower driven by the blower motor is preferable, but is not limited thereto. The air supply device may include a suitable reading device for reading the information of the object W, a controller for controlling the flow rate of air, and the like.

When compressed air is supplied to each chamber 27 from an air supply apparatus, compressed air is blown out from each blowing hole 37. FIG. The compressed air blown out is between the upper surface of the island member 31 and the lower surface of the object W, as shown in FIGS. 3 to 5, and the compressed air is uniform in a space surrounded by the opening of the blowing hole 37. It creates a space S that creates a pressure. By being supported by the space S having a uniform pressure, the object W is buoyant and floated. On the other hand, by driving the pair of motors 17, the pair of drive shafts 13 rotate in synchronization. By the engagement of the worm wheel 11 and the worm 15, the rotation of the drive shaft 13 is transmitted to each roller 7. The object W carried in on the floating conveying apparatus 1 is conveyed in the floating state by contacting the rotating roller 7.

Referring to FIG. 6, when the object W moves from one floating device 21 shown in the left direction in the drawing to another floating device 21 shown in the right in the drawing, the tip of the object W is temporarily Can not receive buoyancy. If the object W is made of a flexible material, the tip of the object W hangs downward, and there is a fear that the object W collides with the rear end of the floating device 21. However, according to this embodiment, since the stepped surface 39 of the rear end of the upper outer member 33 is retracted downward from the upper surface of the floating device 21, even if the front end of the object W is somewhat lowered, the floating device ( 21) is avoided. In addition, since compressed air is blown upward along the inclined surface 31a of the island member 31 partially exposed to the rear, the tip of the object W is lifted upward, thereby shifting to the space S phase where buoyancy is obtained. . Since the floating conveying apparatus 1 is provided with the means which assists the transition of such an object, the problem that the front-end | tip of an object collides with the floating device 21 does not arise easily, even if the floating height of an object is not specifically made high. It is advantageous in terms of energy consumption as compared to avoiding the floating device 21 by varying the floating height of the object.

Each floating apparatus 21 may be provided with the step surface 39 which retracted below the upper surface on both the front side and the rear end side, as in the modification shown in FIG. 7. The inclined surface 31a of the island member 31 is partially exposed toward both the front and the rear. According to this modification, not only the case where the object W is conveyed from the front FF to the rear FR but also when the object W is conveyed in the reverse direction, the problem that the tip of the object W collides with the floating device 21 can be avoided.

A second embodiment of the present invention will be described below with reference to Figs. Instead of the stepped surface 39 described above, the floating conveying apparatus 41 according to the present embodiment is provided with means for assisting the transfer of the object by another form. In the following description, the same reference numerals are given to elements substantially the same as those described above, and the detailed description thereof will be omitted, and only differences from the first embodiment will be described.

As shown in FIG. 8, the floating conveying apparatus 41 is equipped with the several floating apparatus 43 which lined up at both sides of the longitudinal direction and the horizontal direction on the base, respectively. Each floating apparatus 43 is provided with the base part 23 which partitions the chamber 27 inside, and the island member 31 so that the chamber 27 may be covered as shown in FIG. The outer member 29 and 33 which consist of the lower outer member 29 and the upper outer member 33 are provided so that the island member 31 may be enclosed.

9 and 10, the rear end of the upper outer member 33 is a roller rotatably supported by the bracket 49 on the step 45 and the step 45 instead of the step surface 39. 47 is provided. The step 45 retreats downward from the top surface of the upper outer member 33, and the apex of the roller 47 projects slightly upward from the top surface of the upper outer member 33. However, it is preferable that the height which the apex of the roller 47 protrudes more than the top surface of the upper outer member 33 is lower than the standard floating height of the target object W. As shown in FIG. In addition, since the roller 47 is exposed to the rear side, the roller 47 first comes into contact with the object W approaching from the rear side. The axis of the roller 47 is directed in the direction corresponding to the transverse direction with respect to the base 3 so as to allow rotation of the roller 47 in the longitudinal direction. The width of the roller 47 is preferably aligned with the width of the top surface, but is not limited thereto.

The surface facing the rear end of the inclined surface 31a of the island member 31 is different from the case of the first embodiment, is hidden in the upper outer member 33, and is not exposed toward the rear. Alternatively, the surface facing the front end may be exposed toward the roller 47.

Referring to FIG. 10, when the object W transitions from one floating device 43 shown in the left direction in the drawing to another floating device 43 shown in the right in the drawing, the tip of the object W is temporarily Can not receive buoyancy. If the object W is made of a flexible material, the tip of the object W hangs downward, which may cause a collision with the rear end of the floating device 43. However, according to the present embodiment, since the rear end of the upper outer member 33 is provided with the roller 47 on the step 45 retreating downward from the upper surface of the floating apparatus 43, the front end of the object W is Even if it is slightly lowered, it contacts with the roller 47 and rides upward, so that it shifts to the space S phase where buoyancy is obtained. Since the floating conveying apparatus 41 is provided with the means which assists the transition of such an object, the problem that the front-end | tip of an object collides with the floating device 43 does not arise easily, even if the height of an object does not raise especially. It is advantageous in terms of energy consumption as compared to avoiding collision with the floating device 43 by varying the floating height of the object.

Each floating apparatus 43 may be provided with the roller 47 in both the front end side and the rear end side like the modification shown in FIG. According to this modification, not only the case where the object W is conveyed from the front FF to the rear FR but also when the object W is conveyed in the reverse direction, the problem that the tip of the object W collides with the floating device 21 can be avoided.

Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited to the above embodiments. Based on the above disclosure, a person having ordinary skill in the art can carry out the present invention by modification or modification of the embodiment.

Claims (4)

  1. A floating carrier device for floating by a fluid pressurized an object having a lower surface and conveying from an upstream side to a downstream side,
    A base portion for partitioning the chamber through which the fluid passes;
    An island member having a planar upper surface and a side surface including an inclined surface inclined toward the center of the upper surface adjacent to the upper surface and arranged to cover the chamber;
    An element disposed on an inner surface of the island member and facing the side surface of the island member, a top surface aligned on a single plane with the top surface, and an end portion facing the upstream side; An outer member having a side surface and the inner surface communicating with the chamber to partition the ejection hole for ejecting the fluid, wherein the element is in contact with the stepped surface and the object retreating downward from the top surface; Any one selected from the group consisting of rotatable rollers
    And a floating apparatus, each of which is arranged in a row at intervals from the upstream side to the downstream side,
    Carrying apparatus for conveying the said object
    In the floating conveying device including,
    The inclined surface of the island member is exposed upward than the step surface,
    Levitation conveying device.
  2. The method of claim 1,
    The blowing hole is inclined toward the center of the island member along the inclined surface at least in the vicinity of the top surface.
  3. The method of claim 1,
    The said blowing hole is the floating conveyance apparatus opened in the said step surface.
  4. delete
KR1020107000549A 2007-06-29 2008-06-03 Levitation transportation device KR101214888B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007173425A JP5332142B2 (en) 2007-06-29 2007-06-29 Levitation transfer device
JPJP-P-2007-173425 2007-06-29

Publications (2)

Publication Number Publication Date
KR20100018615A KR20100018615A (en) 2010-02-17
KR101214888B1 true KR101214888B1 (en) 2012-12-24

Family

ID=40225939

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000549A KR101214888B1 (en) 2007-06-29 2008-06-03 Levitation transportation device

Country Status (5)

Country Link
JP (1) JP5332142B2 (en)
KR (1) KR101214888B1 (en)
CN (1) CN101711219B (en)
TW (1) TWI445654B (en)
WO (1) WO2009004883A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5540496B2 (en) * 2008-11-20 2014-07-02 株式会社Ihi Levitation transport device and levitation unit

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device
JP2004244186A (en) * 2003-02-14 2004-09-02 Ckd Corp Supporting device for transport of sheet
JP2006258727A (en) * 2005-03-18 2006-09-28 Olympus Corp Substrate-inspecting apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3901265B2 (en) * 1996-11-26 2007-04-04 忠弘 大見 Method and apparatus for transporting thin plate substrate
JP4732716B2 (en) * 2004-06-29 2011-07-27 株式会社アルバック Conveying apparatus, control method therefor, and vacuum processing apparatus
JP4626205B2 (en) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 Substrate delivery method and apparatus
JP4613800B2 (en) * 2004-12-01 2011-01-19 株式会社Ihi Levitation device and transfer device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device
JP2004244186A (en) * 2003-02-14 2004-09-02 Ckd Corp Supporting device for transport of sheet
JP2006258727A (en) * 2005-03-18 2006-09-28 Olympus Corp Substrate-inspecting apparatus

Also Published As

Publication number Publication date
KR20100018615A (en) 2010-02-17
WO2009004883A1 (en) 2009-01-08
TWI445654B (en) 2014-07-21
CN101711219B (en) 2013-02-13
JP2009012873A (en) 2009-01-22
JP5332142B2 (en) 2013-11-06
TW200920674A (en) 2009-05-16
CN101711219A (en) 2010-05-19

Similar Documents

Publication Publication Date Title
TWI498296B (en) Cutting method of glass film, manufacturing method of glass roll and cutting device of glass film
US7513716B2 (en) Workpiece conveyor and method of conveying workpiece
US6774978B2 (en) Device for cutting liquid crystal display panel and method for cutting using the same
US7128516B2 (en) Workpiece transport apparatus
KR101142809B1 (en) Transporting apparatus
TWI401201B (en) An apparatus and method for enhencing conveying performance of conveyers
CN101003416B (en) Laser cutting apparatus and method
CN100594584C (en) Substrate processing device
CN100431933C (en) Transporting apparatus
CN102060193B (en) Substrate conveying device
KR101353490B1 (en) Processing apparatus for substrate
CN101033041B (en) Workpiece conveyor and method of conveying workpiece
CN101211757B (en) Substrate processing apparatus and substrate processing method
CN101971320B (en) Method and conveyor belt system having at least one conveyor belt for transporting flat transport goods
CN101284603B (en) Roller unit for conveying sheet material and conveyer for sheet material
JP5403631B2 (en) Apparatus and method for operating a conveyor belt roller
TWI295659B (en) Transporting apparatus
CN101211812B (en) Substrate processing apparatus
KR20060047409A (en) Substrate-transporting device
CN101179101B (en) Laminating apparatus
CN101035725B (en) Board conveying device
CN100573820C (en) Substrate board treatment
JPWO2005074020A1 (en) Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same
JP2005136411A (en) System and method for transporting substrate
CN101175682A (en) Automated material handling system

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20151118

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20161123

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20171117

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20181115

Year of fee payment: 7