JP5549311B2 - Levitation transport device and direction change device - Google Patents

Description

  The present invention relates to a levitation conveyance device that floats and conveys a substrate such as a glass substrate in the conveyance direction, and a substrate conveyance direction in the first conveyance direction when the substrate is received from the first levitation conveyance device and sent to the second levitation conveyance device. It is related with the conveyance direction change apparatus which changes to the 2nd conveyance direction orthogonal to a 1st conveyance direction.

  In recent years, various developments have been made on levitation conveyance devices in the field of clean conveyance, and there is one disclosed in Patent Document 1 as a prior art of levitation conveyance devices. Hereinafter, the configuration and the like of the levitation transport apparatus according to the prior art will be described.

  The levitation transfer apparatus according to the prior art includes an apparatus main body (apparatus frame) extending in the transfer direction, and a substrate is levitated on the apparatus main body using the pressure of compressed air (air) as a levitation gas. A plurality of floating units to be operated are arranged along the conveyance direction, and the plurality of floating units are arranged in a plurality of rows in the conveyance width direction orthogonal to the conveyance direction. Further, the interior of each floating unit is connected to a compressed air supply source (an example of a floating gas supply source) that supplies compressed air, and a nozzle that ejects compressed air is formed on the top surface of each floating unit. Yes.

  The apparatus main body is provided with a plurality of transport roller drive units as a transport mechanism for transporting the substrate in the transport direction, and the plurality of transport roller drive units are arranged in a plurality of rows in the transport width direction. ing. Each conveyance roller drive unit is provided in the apparatus main body and has an upper opening and a conveyance case. The conveyance roller drive unit is provided in the conveyance case so as to be rotatable about an axis parallel to the conveyance width direction. A transfer roller that protrudes upward with respect to the upper surface and supports the back surface of the substrate, and a transfer roller that is provided in the transfer case and rotates around the axis parallel to the transfer width direction. A transport motor and a transport suction fan that is provided on the lower surface of the transport case and sucks the air in the peripheral area of the transport roller downward from the opening side of the transport case.

Therefore, compressed air is supplied to the inside of each floating unit by the operation of the compressed air supply source, and the compressed air is ejected from the nozzle of each floating unit. In addition, the air in the peripheral area of each transport roller is sucked downward from the opening side of each transport case by operating each suction fan, and the peripheral area of each transport roller is in a negative pressure state. By driving each conveyance motor, each conveyance roller is rotated around an axis parallel to the conveyance width direction. Thereby, the substrate can be floated and conveyed in the conveyance direction while ensuring the contact pressure between the back surface of the substrate and the plurality of conveyance rollers.

JP 2008-254918 A

  By the way, in order to reduce the slip between the back surface of the substrate and the transport roller and increase the transport efficiency of the substrate, the negative pressure degree in the peripheral area of each transport roller is set high, and the back surface of the substrate and the transport roller. It is necessary to ensure a sufficient contact pressure with the roller for use. On the other hand, with the trend toward larger and thinner substrates, the substrates are easily deformed. If the negative pressure in the peripheral area of each transport roller is set high, the back surface of the substrate is not supported for the transport rollers. In addition, the end face of the substrate collides with the transport roller or the like, and damage such as cracking of the substrate or damage (damage) of the transport roller easily occurs.

  That is, there is a problem that it is not easy to prevent the substrate from being damaged or the transport roller from being damaged by increasing the transport efficiency of the substrate and avoiding the collision between the end surface of the substrate and the transport roller.

  Note that the above-mentioned problem occurs not only in the levitation transfer apparatus but also in the direction changing apparatus.

  Accordingly, an object of the present invention is to provide a levitating and conveying apparatus having a novel configuration that can solve the above-described problems.

A first feature of the present invention is a levitation transport apparatus that levitates and transports a substrate in a transport direction. A nozzle for ejecting a floating gas is formed on the top surface, a plurality of floating units that float the substrate using the pressure of the floating gas, and a conveyance width that is disposed in the apparatus main body and whose arrangement state is orthogonal to the conveyance direction A plurality of transport rollers that are rotatable about an axis parallel to the transport width direction and that support the back surface of the substrate, and a plurality of the transport rollers are parallel to the transport width direction. A transport mechanism for transporting a substrate in the transport direction, a transport motor that rotates around a central axis, a transport pressure generator that switches a peripheral area of each transport roller between a positive pressure state and a negative pressure state, and a substrate End face and said transport While avoiding collision with the rollers, to ensure the contact pressure between the rear surface and a plurality of the transporting rollers of the substrate, the substrate gets over each of the transfer rollers, the perimeter of each of the transfer rollers from the positive pressure The gist of the invention is that it includes a controller that controls each pressure generator for conveyance so as to switch to a negative pressure state.

  In the specification and claims of the present application, “arranged” means not only directly disposed but also indirectly disposed through another member such as a bracket. In other words, “provided” includes not only being provided directly, but also being provided indirectly via another member such as a bracket and being integrally formed. “Floating gas” means compressed air (air), argon gas, nitrogen gas and the like.

According to the first feature, the floating gas is supplied to the inside of each chamber by the operation of the floating gas supply source, and the floating gas is ejected from the nozzle of each floating unit. Further, while the switching appropriately a positive pressure state to a negative pressure state perimeter of each of the transfer rollers by actuation of each of the transfer pressure generator, the transporting said conveying width a plurality of the carrying roller by the drive motor Rotate around an axis parallel to the direction. Accordingly, the substrate can be floated and transported in the transport direction (conveyed in a floated state) while ensuring contact pressure between the back surface of the substrate and the plurality of transport rollers.

  Here, when the substrate passes over each transport roller during the floating transport of the substrate, the controller controls each transport pressure generator so that the peripheral area of each transport roller is switched from the positive pressure state to the negative pressure state by the controller. Therefore, even if the negative pressure in the peripheral area of each transport roller is set high, the collision between the end surface of the substrate and the transport roller can be avoided.

  According to a second aspect of the present invention, a substrate is received from a first levitation transport device that floats and transports a substrate in the first transport direction, and the substrate is levitated and transported in a second transport direction orthogonal to the first transport direction. In the direction changing device that changes the substrate transfer direction from the first transfer direction to the second transfer direction when the substrate is sent to the second levitation transfer device, the substrate is disposed in the apparatus main body, and the inside supplies the floating gas. A nozzle that is connected to a floating gas supply source and ejects a floating gas on the upper surface is formed, and a plurality of floating units that float the substrate using the pressure of the floating gas are disposed in the apparatus main body. A plurality of receiving rollers that are arranged in a plurality of rows in the second transport direction and are rotatable about an axis parallel to the second transport direction and that support the back surface of the substrate; Axis parallel to the second transport direction A receiving motor that rotates around, and a receiving pressure generator that switches a peripheral area of each receiving roller between a positive pressure state and a negative pressure state, while receiving a substrate from the first levitation transfer device, the first transfer direction; A receiving mechanism that conveys to the apparatus body, and a substrate that is arranged in a plurality of rows in the first conveying direction and that is disposed around the axis parallel to the first conveying direction and disposed in the apparatus body. A plurality of delivery rollers for supporting the back surface of the paper, a delivery motor for rotating the delivery rollers around an axis parallel to the first transport direction, and a peripheral area of each delivery roller in a positive pressure state and a negative pressure. A feed pressure generator for switching to a pressure state, a feed mechanism that feeds the substrate in the second transport direction while feeding the substrate to the second levitation transport device, and a substrate that receives each substrate when the receive mechanism receives the substrate. Get over Laura If that is the gist by comprising a controller for controlling the receiving Pressure generator to switch a negative pressure in the surrounding area of the receiving roller from the positive pressure, the.

  According to the second feature of the present invention, the floating gas is supplied to the inside of each chamber by the operation of the floating gas supply source, and the floating gas is ejected from the nozzle of each floating unit. Further, the plurality of receiving rollers are driven by the receiving motor while the peripheral area of each receiving roller is appropriately switched from the positive pressure state to the negative pressure state by the operation of each receiving pressure generator. Rotate around an axis parallel to the direction. Thus, the substrate can be levitated and conveyed in the first conveying direction while receiving the substrate from the first levitating and conveying device while ensuring the contact pressure between the back surface of the substrate and the plurality of receiving rollers. When the substrate is received from the first levitation transfer device, the peripheral area of each delivery roller is kept in a positive pressure state by the operation of each delivery pressure generator.

  Here, when receiving the substrate from the first levitation transfer device, when the substrate gets over each receiving roller, the controller switches the peripheral area of each receiving roller from the positive pressure state to the negative pressure state. Since the pressure generator is controlled, it is possible to avoid collision between the end face of the substrate and the receiving roller or the like even if the negative pressure in the peripheral area of each receiving roller is set high.

  After the substrate is completely received from the first levitation transfer device, the peripheral area of each delivery roller is switched from the positive pressure state to the negative pressure state by the operation of each delivery pressure generator. By actuating, the peripheral area of each receiving roller is switched from the negative pressure state to the positive pressure state. Then, in a state where the floating gas is ejected from the nozzle of each floating unit, the plurality of delivery rollers are rotated around an axis parallel to the first transport direction by driving the delivery motor. Accordingly, the substrate can be levitated and conveyed in the second conveying direction while sending the substrate to the second levitating and conveying device while ensuring the contact pressure between the back surface of the substrate and the plurality of receiving rollers.

  According to the first feature of the present invention, even if the negative pressure in the peripheral area of each transport roller is set high, collision between the end surface of the substrate and the transport roller or the like can be avoided. It is possible to reduce slippage between the transfer rollers and increase the transfer efficiency of the substrate, while minimizing damage such as cracking of the substrate or damage to the transfer roller.

  According to the second feature of the present invention, even if the negative pressure in the peripheral area of each receiving roller is set high, the collision between the end face of the substrate and the receiving roller can be avoided. It is possible to reduce the slip between the receiving roller and increase the substrate transport efficiency, while minimizing damage such as cracking of the substrate or damage to the receiving roller as much as possible.

1 is a schematic plan view of a cross levitation transport system according to an embodiment of the present invention. It is an expanded sectional view along the II-II line in FIG. It is an expanded sectional view along the II-II line in FIG. 1, Comprising: It is a figure explaining the pressure generator for conveyance of another aspect. It is an expanded sectional view along the IV-IV line in FIG. It is an expanded sectional view along the VV line in FIG. It is an expanded sectional view along the VI-VI line in FIG.

  An embodiment of the present invention will be described with reference to FIGS. In the drawings, “FF” indicates the forward direction, “FR” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  As shown in FIG. 1, a cross levitation transport system 1 according to an embodiment of the present invention is used in the field of clean transport. For example, a substrate W such as a glass substrate is placed in a first transport direction (in the embodiment of the present invention). Is a system that floats and transports in the front-rear direction, and floats and transports in the second transport direction (the left-right direction in the embodiment of the present invention) orthogonal to the first transport direction. The outline of the cross levitation transport system 1 is as follows.

  The cross levitation transport system 1 includes a first levitation transport device 3 that floats and transports a substrate W in the first transport direction. The substrate W is placed in the second transport direction in the vicinity of the first levitation transport device 3. A second levitating and conveying device 5 for levitating and conveying is disposed. A direction changing device 7 is disposed between the downstream side (unloading side) of the first levitation transfer device 3 and the upstream side (loading side) of the second levitation transfer device 5. When the substrate W is received from the first levitation transport apparatus 3 and sent out to the second levitation transport apparatus 5, the transport direction of the substrate W is changed from the first transport direction to the second transport direction.

  The specific configuration of the first levitation conveyance device 3 of the cross levitation conveyance system 1 is as follows.

  As shown in FIGS. 1 and 2, the first levitating and conveying apparatus 3 includes an apparatus main body (apparatus frame) 9 extending in the first conveying direction, and the apparatus main body 9 includes a plurality of columns 11. Yes. The apparatus main body 9 constitutes a part of the system main body of the cross levitation conveyance system 1.

  The apparatus main body 9 is provided with a plurality of chambers 13 for accommodating compressed air as a floating gas along the first transfer direction, and the arrangement state of the plurality of chambers 13 is the second transfer direction (in other words, For example, there are a plurality of rows (three rows in the embodiment of the present invention) in the first conveyance width direction orthogonal to the first conveyance direction. Further, a plurality of supply fans 15 (fan filter units in the embodiment of the present invention) for supplying compressed air into the chambers 13 are provided on the lower surface of each chamber 13, in other words, The interior of the chamber 13 is connected to a plurality of supply fans 15.

  On the upper surface of each chamber 13, a plurality of floating units 17 that float the substrate W using the pressure of compressed air are provided at intervals in the first transport direction (or the first transport direction and the first transport width direction). The plurality of floating units 17 are arranged in a plurality of rows (5 rows in the embodiment of the present invention) in the first conveyance width direction. Further, on the upper surface of each floating unit 17, a rectangular frame-shaped nozzle 17 n that ejects compressed air is formed along the outer edge (planar shape) of the upper surface of the floating unit 17. An air reservoir layer (pressure reservoir layer) S as a floating gas reservoir layer can be generated between the two and W. Here, as shown in JP 2006-182563 A, the nozzles 17n of each levitation unit 17 have a unit center side (center side of the levitation unit 17) with respect to the vertical direction (direction perpendicular to the upper surface of the levitation unit 17). ).

  The apparatus main body 9 is provided with a plurality of first transport roller drive units 19 along the first transport direction as an example of a first transport mechanism that transports the substrate W in the first transport direction. The arrangement state of the one conveyance roller drive unit 19 is in a plurality of rows (two rows in the embodiment of the present invention) in the first conveyance width direction. The specific configuration of each first transport roller drive unit 19 is as follows.

  The apparatus main body 9 is provided with a first transfer case 21 whose upper side is opened. In the first transfer case 21, a first transfer roller 23 that supports the back surface of the substrate W is first transferred. It is provided to be rotatable around an axis parallel to the width direction. The first transport roller 23 protrudes upward with respect to the first transport case 21, and the support height (uppermost height) of the first transport roller 23 is determined by the floating unit 17. It is set to the same height as the flying height position (pass line height) or slightly lower than the pass line height. A first transport motor 25 that rotates the first transport roller 23 about an axis parallel to the first transport width direction is provided in the first transport case 21, and the first transport motor The output shaft 25 is interlocked and connected to the first conveying roller 23 by a connecting mechanism 27 including a pair of pulleys and a belt.

A rear part of the lower surface of the first transfer case 21 is provided with a first transfer blower fan 29 that blows air from below toward the peripheral area of the first transfer roller 23. A first transport suction fan 31 that sucks air in the peripheral area of the first transport roller 23 downward from the opening side of the first transport case 31 is provided at the front portion of the lower surface of 21. Here, by switching the operation of the first conveying blower fan 29 and the operation of the first conveying suction fan 31, the peripheral area of the first conveying roller 23 is switched between the positive pressure state and the negative pressure state. In other words, the first transfer blower fan 29 and the first transfer suction fan 31 serve as a first transfer pressure generator that switches the peripheral area of the first transfer roller 23 between a positive pressure state and a negative pressure state. It has the function of.

  A plurality of reflective photoelectric sensors 33 are provided on the upper surface of the second row of chambers 13 (center chamber 13 in the first transport width direction) from the left, spaced apart in the first transport direction. The photoelectric sensor 33 detects that the substrate W has passed over the first transport rollers 23 by monitoring the reflection of the projected signal light P. Further, a controller 35 is disposed in the vicinity of the apparatus main body 9, and each reflective photoelectric sensor 33 is electrically connected to the controller 35. When the detection signal is output from each reflective photoelectric sensor 33, the controller 35 switches each first conveying blower fan so as to switch the peripheral area of each first conveying roller 23 from the positive pressure state to the negative pressure state. 29 and each first transport suction fan 31, specifically, the operation of each first transport blower fan 29 is stopped and the operation of each first transport suction fan 31 is started. Is to control.

  Instead of using the first conveying blower fan 29 and the first conveying suction fan 31 as the first conveying pressure generator, as shown in FIG. You may use the 1st conveyance forward / reverse fan 37 which can change a rotation direction to a reverse direction. Here, the peripheral area of the first conveyance roller 23 is switched between the positive pressure state and the negative pressure state by switching the rotation direction (operation state) of the first conveyance forward / reverse fan 37. In this case, when the detection signal from each reflective photoelectric sensor 33 is output, the controller 35 switches each first area so that the peripheral area of each first transport roller 23 is switched from the positive pressure state to the negative pressure state. The forward / reverse fan 37 for transport is controlled. Specifically, the first forward / reverse fan 37 for transport is controlled to be switched from the forward direction to the reverse direction.

  The specific configuration of the second levitation conveyance device 5 of the cross levitation conveyance system 1 is as follows.

  As shown in FIGS. 1 and 4, the second levitating and conveying apparatus 5 includes an apparatus main body (apparatus frame) 39 extending in the second conveying direction, and the apparatus main body 39 includes a plurality of columns 41. Yes. The apparatus main body 39 constitutes a part of the system main body of the cross levitation conveyance system 1.

  In the apparatus main body 39, a plurality of chambers 43 for accommodating compressed air are arranged along the second conveying direction, and the arrangement state of the plurality of chambers 43 is the first conveying direction (in other words, the second conveying direction). In the second conveyance width direction orthogonal to the conveyance direction, there are a plurality of rows (three rows in the embodiment of the present invention). A plurality of supply fans 45 (fan filter units in the embodiment of the present invention) for supplying compressed air into the chambers 43 are provided on the lower surface of each chamber 43. In other words, The interior of the chamber 43 is connected to a plurality of supply fans 45.

  On the upper surface of each chamber 43, a plurality of floating units 47 that float the substrate W using the pressure of compressed air are arranged at intervals in the second transport direction (or the second transport direction and the second transport width direction). The plurality of floating units 47 are arranged in a plurality of rows (5 rows in the embodiment of the present invention) in the second transport width direction. Further, on the upper surface of each floating unit 47, a rectangular frame-shaped nozzle 47 n that ejects compressed air is formed along the outer edge of the upper surface of the floating unit 47. The air pool layer S can be generated. The nozzle 47n of the levitation unit 47 has the same configuration as the nozzle 17n of the levitation unit 17 of the first levitation transport device 3.

  The apparatus main body 39 is provided with a plurality of second transport roller drive units 49 along the second transport direction as an example of a second transport mechanism for transporting the substrate W in the second transport direction. The arrangement state of the two-conveying roller drive unit 49 is in a plurality of rows (two rows in the embodiment of the present invention) in the second carrying width direction. The specific configuration of each second transport roller drive unit 49 is as follows.

  The apparatus main body 39 is provided with a second transfer case 51 whose upper side is opened. In the second transfer case 51, a second transfer roller 53 that supports the back surface of the substrate W is second transferred. It is provided to be rotatable around an axis parallel to the width direction. The second transport roller 53 protrudes upward with respect to the second transport case 51, and the support height (uppermost height) of the second transport roller 53 is determined by the levitation unit 47. It is set to the same height as the flying height position (pass line height) or a height lower than the pass line height. The second transport case 51 is provided with a second transport motor 55 that rotates the second transport roller 53 around an axis parallel to the second transport width direction. The output shaft 55 is interlocked and connected to the second conveying roller 53 by a connecting mechanism 57 including a pair of pulleys and a belt.

On the left part of the lower surface of the second transfer case 51, a second transfer blower fan 59 for blowing air from below toward the peripheral area of the second transfer roller 53 is provided. On the right side of the lower surface of the case 51, there is provided a second transport suction fan 61 that sucks air in the peripheral area of the second transport roller 53 downward from the opening side of the second transport case 51 . Here, by switching the operation of the second transfer blower fan 59 and the operation of the second transfer suction fan 61, the peripheral area of the second transfer roller 53 is switched between the positive pressure state and the negative pressure state. In other words, the second conveyance blower fan 59 and the second conveyance suction fan 61 serve as a second conveyance pressure generator that switches the peripheral area of the second conveyance roller 53 between a positive pressure state and a negative pressure state. It has the function of.

  On the top surface of the chamber 43 in the second row from the front (the central chamber 43 in the second transport width direction), a plurality of (only one shown) reflective photoelectric sensors 65 are provided at intervals in the second transport direction. Each reflection photoelectric sensor 65 detects that the substrate W has passed over each second transport roller 53 by monitoring the reflection of the projected signal light P. Further, a controller 67 is disposed in the vicinity of the apparatus main body 39, and each reflective photoelectric sensor 65 is electrically connected to the controller 67. Then, when a detection signal is output from each reflective photoelectric sensor 65, the controller 67 switches each second conveyance blower fan so as to switch the peripheral area of each second conveyance roller 53 from the positive pressure state to the negative pressure state. 59 and each second transport suction fan 61, specifically, the operation of each second transport blower fan 59 is stopped and the operation of each second transport suction fan 61 is started. Is to control.

  Instead of using the second conveying blower fan 59 and the second conveying suction fan 61 as the second conveying pressure generator, a second conveying forward / reverse fan (which can be rotated in the forward direction and the reverse direction) ( (Not shown) may be used.

  A specific configuration of the direction changing device 7 of the cross levitation conveyance system 1 is as follows.

  As shown in FIG. 1, FIG. 5, and FIG. 6, the direction changing device 7 is an apparatus main body 69 disposed in the middle between the downstream side of the first levitation conveyance device 3 and the upstream side of the second levitation conveyance device 5. The apparatus main body 69 includes a plurality of support columns 71. The apparatus main body 69 constitutes a part of the system main body of the cross levitation conveyance system 1, similarly to the apparatus main body 9 of the first levitation conveyance apparatus 3 and the apparatus main body 39 of the second levitation conveyance apparatus 5.

  The apparatus main body 69 is provided with a plurality of chambers 73 for storing compressed air, and a plurality of supply fans 75 for supplying the compressed air into the chambers 73 are provided on the lower surface of each chamber 73 (an embodiment of the present invention). In other words, a fan filter unit) is provided. In other words, the inside of each chamber 73 is connected to a plurality of supply fans 75.

  On the upper surface of each chamber 73, a plurality of floating units 77 that float the substrate W using the pressure of compressed air are disposed at intervals in the first transport direction and / or the second transport direction. The floating unit 77 is arranged in a plurality of rows in the first transport direction (second transport width direction) and the second transport direction (first transport width direction) (in the embodiment of the present invention, five rows). It has become. In addition, on the upper surface of each floating unit 77, a rectangular frame-shaped nozzle 77 n that ejects compressed air is formed along the outer edge of the upper surface of the floating unit 77. The air pool layer S can be generated. The nozzle 77n of the levitation unit 77 has the same configuration as the nozzle 17n of the levitation unit 17 of the first levitation transport device 3.

  As an example of a receiving mechanism for transporting the substrate W in the first transport direction while receiving the substrate W from the first levitation transport device 3 between the chambers 73 adjacent to each other in the second transport direction (first transport width direction) in the apparatus main body 69. A plurality of receiving roller drive units 79 are arranged along the first conveying direction, and the arrangement state of the plurality of receiving roller driving units 79 is a plurality of rows in the second conveying direction (in the embodiment of the present invention). In that case, there are two rows). The specific configuration of each receiving roller drive unit 79 is as follows.

  A receiving case 81 whose upper side is opened is provided between the chambers 73 adjacent to each other in the second transport direction in the apparatus main body 69, and the receiving case 81 supports the back surface of the substrate W. A roller 83 is provided to be rotatable about an axis parallel to the second transport direction. Further, the receiving roller 83 protrudes upward with respect to the receiving case 81, and the support height (uppermost height) of the receiving roller 83 is a flying height position (pass) by the flying unit 77. The height is set equal to the line height) or lower than the pass line height. The receiving case 81 is provided with a receiving motor 85 for rotating the receiving roller 83 around an axis parallel to the second conveying direction, and the output shaft of the receiving motor 85 has a pair of pulleys. Are coupled to the receiving roller 83 by a connecting mechanism 87 including a belt.

At the rear of the lower surface of the receiving case 81, there is provided a receiving blower fan 89 that blows air from below toward the peripheral area of the receiving roller 83, and at the front of the lower surface of the receiving case 81 A receiving suction fan 91 that sucks air in the peripheral area of the receiving roller 83 downward from the opening side of the receiving case 81 is provided. Here, by switching the operation of the receiving blower fan 89 and the operation of the receiving suction fan 91, the peripheral area of the receiving roller 83 is switched between the positive pressure state and the negative pressure state. The receiving blower fan 89 and the receiving suction fan 91 have a function as a receiving pressure generator for switching the peripheral area of the receiving roller 83 between a positive pressure state and a negative pressure state.

  In place of using the receiving blower fan 89 and the receiving suction fan 91 as the receiving pressure generator, a receiving forward / reverse fan (not shown) whose rotational direction can be changed in the forward direction and the reverse direction may be used. I do not care.

  As an example of a delivery mechanism that transports the substrate W in the second transport direction while feeding the substrate W to the second levitation transport device 5 between the chambers 73 adjacent to each other in the first transport direction (second transport width direction) in the apparatus main body 69. A plurality of delivery roller drive units 93 are arranged along the second conveyance direction, and the arrangement state of the plurality of delivery roller drive units 93 is a plurality of rows in the first conveyance direction (in the embodiment of the present invention). In that case, there are two rows). The specific configuration of each delivery roller drive unit 93 is as follows.

  Between the chambers 73 adjacent to each other in the first transport direction in the apparatus main body 69, a delivery case 95 having an upper opening is provided, and the delivery case 95 supports the back surface of the substrate W. A roller 97 is provided to be rotatable around an axis parallel to the first transport direction. Further, the sending roller 97 protrudes upward with respect to the sending case 95, and the support height (uppermost height) of the sending roller 97 is the flying height position (pass) by the flying unit 77. The height is set equal to the line height) or lower than the pass line height. In the delivery case 95, a delivery motor 99 for rotating the delivery roller 97 around an axis parallel to the first transport direction is provided, and the output shaft of the delivery motor 99 is a pair of pulleys. Are linked to the delivery roller 97 by a connecting mechanism 101 comprising a belt.

On the left side of the lower surface of the sending case 95, a sending fan 103 that blows air from below toward the peripheral area of the sending roller 97 is provided. Is provided with a sending suction fan 105 that sucks air in the peripheral area of the sending roller 97 downward from the opening side of the sending case 95 . Here, by switching the operation of the sending fan 103 and the sending suction fan 105, the peripheral area of the receiving roller 83 is switched between the positive pressure state and the negative pressure state, in other words, The receiving blower fan 89 and the receiving suction fan 91 have a function as a receiving pressure generator for switching the peripheral area of the receiving roller 83 between a positive pressure state and a negative pressure state.

  In place of using the receiving blower fan 89 and the receiving suction fan 91 as the receiving pressure generator, a receiving forward / reverse fan (not shown) whose rotational direction can be changed in the forward direction and the reverse direction may be used. I do not care.

  A plurality of reflective photoelectric sensors 107 are provided on the upper surface of the central chamber 73 at intervals in the first transport direction, and each reflective photoelectric sensor 107 monitors the reflection of the projected signal light P. Thus, it is detected that the substrate W has passed over each receiving roller 83. Further, a controller 109 is disposed in the vicinity of the apparatus main body 69, and each reflective photoelectric sensor 107 is electrically connected to the controller 109. When the controller 109 receives the substrate W from the first levitation transfer device 3 and outputs a detection signal from each reflective photoelectric sensor 107, the controller 109 moves the peripheral area of each receiving roller 83 from the positive pressure state to the negative pressure. Each receiving blower fan 89 and each receiving suction fan 91 are controlled so as to switch to a state. Specifically, the operation of each receiving blower fan 89 is stopped and each receiving suction fan 91 is controlled. It controls to start the operation.

  When the controller 109 receives the substrate W from the first levitation transfer device 3, the controller 109 controls each sending blower fan 103 and each sending suction fan 105 so as to keep the peripheral area of each sending roller 97 in a positive pressure state. Specifically, the control is performed such that each of the sending blower fans 103 is operated in a state where the operation of each of the sending suction fans 105 is stopped. Then, when the controller 109 sends out the substrate W to the second levitation transfer device 5, the controller 109 controls the receiving blower fans 89 and the receiving suction fans 91 so as to keep the peripheral area of each receiving roller 83 in a positive pressure state. Specifically, the control is performed so that each of the receiving air blowing fans 89 is operated in a state where the operation of each of the receiving suction fans 91 is stopped. Further, when the controller 109 sends the substrate W to the second levitating and conveying apparatus 5, the controller 109 controls the sending fan 103 and the sending suction fan 105 so as to keep the peripheral area of each sending roller 97 in a negative pressure state. Specifically, the control is performed so that each of the sending suction fans 105 is operated in a state where the operation of each of the sending blower fans 103 is stopped.

  Then, the effect | action and effect of embodiment of this invention are demonstrated.

  Compressed air is supplied to the inside of each chamber 13 by the operation of each supply fan 15, and the compressed air is ejected from the nozzles 17 n of each floating unit 17. Further, by switching the operation of each first conveying blower fan 29 and the operation of each first conveying suction fan 31, the peripheral area of each first conveying roller 23 is appropriately switched from the positive pressure state to the negative pressure state. Then, each first transport motor 25 is driven to rotate each first transport roller 23 around an axis parallel to the first transport width direction (second transport direction). Accordingly, the substrate W can be floated and transported (transported in a lifted state) in the first transport direction while ensuring the contact pressure between the back surface of the substrate W and the plurality of first transport rollers 23.

  Here, during the floating conveyance of the substrate W in the first conveyance direction, when the substrate W gets over each first conveyance roller 23, in other words, when a detection signal is output from each reflective photoelectric sensor 65, Since the controller 35 controls each of the first transfer blower fans 29 and each of the first transfer suction fans 31 so as to switch the peripheral area of each first transfer roller 23 from the positive pressure state to the negative pressure state, Even if the negative pressure in the peripheral region of the first transport roller 23 is set high, the collision between the end surface of the substrate W and the first transport roller 23 can be avoided.

  Before the end portion of the substrate W reaches a predetermined position on the downstream side of the first levitation transfer device 3, compressed air is supplied to the inside of each chamber 73 by the operation of each supply fan 75, and the nozzle 77 n of each levitation unit 77. Compressed air from Further, air is blown toward the surrounding area of each sending roller 97 by the operation of each sending fan 103, and the surrounding area of each sending roller 97 is brought into a positive pressure state. Each receiving motor 85 is switched while appropriately switching the peripheral area of each receiving roller 83 from the positive pressure state to the negative pressure state by switching the operation of each receiving blower fan 89 and each receiving suction fan 91. , Each receiving roller 83 is rotated around an axis parallel to the second transport direction (first transport width direction). Thereby, while ensuring the contact pressure between the back surface of the substrate W and the plurality of receiving rollers 83, the substrate W is received from the first floating conveying device 3 to the plurality of receiving roller driving units 79 in the first conveying direction. It can be levitated and conveyed. The complete reception of the substrate W from the first levitation transfer device 3 is detected by a reflective photoelectric sensor (not shown) or the like.

  Here, when receiving the substrate W from the first levitation transfer device 3, if the substrate W gets over each receiving roller 83, in other words, if a detection signal is output from each reflective photoelectric sensor 107, the controller 109 Since each receiving blower fan 89 and each receiving suction fan 91 are controlled so that the peripheral area of each receiving roller 83 is switched from a positive pressure state to a negative pressure state, the negative area in the peripheral area of each receiving roller 83 is controlled. Even if the pressure is set high, collision between the end surface of the substrate W and the receiving roller 83 can be avoided. Further, when receiving the substrate W from the first levitation transfer device 3, the controller 109 controls each of the sending blow fans 103 and each of the sending suction fans 105 so as to keep the peripheral area of each sending roller 97 in a positive pressure state. Therefore, collision between the end surface of the substrate W and the delivery roller 97 can be avoided.

After completely receiving the substrate W from the first levitation transport device 3, the operation of each receiving suction fan 91, the driving of each receiving motor 85, and the operation of each blowing fan 103 are stopped, and each sending By operating the suction fan 105, air in the peripheral area of each delivery roller 97 is sucked downward from the opening side of each delivery case 95, and the peripheral area of each delivery roller 97 is brought into a negative pressure state. Next, air is blown toward the peripheral area of each receiving roller 83 by the operation of each receiving air blowing fan 89, and the peripheral area of each receiving roller 83 is brought into a positive pressure state. Then, while the compressed air is ejected from the nozzles 77 n of the floating units 77 by the operation of the supply fans 75, the delivery rollers 97 are driven in the first conveyance direction (second conveyance width direction) by driving the delivery motors 99. Rotate around a parallel axis. Accordingly, the transport direction of the substrate W is changed from the first transport direction to the second transport direction, and the contact pressure between the back surface of the substrate W and the plurality of transport rollers 97 is secured, and the plurality of transport substrates W are transported. While being sent from the roller drive unit 93 side to the second levitating and conveying device 5, it can be levitated and conveyed in the second conveying direction.

  Here, when the substrate W is sent out to the second levitating and conveying apparatus 5, the controller 109 causes the receiving fan 83 and the receiving suction fan 91 to keep the peripheral area of each receiving roller 83 in a positive pressure state. Are controlled, and each sending blower fan 103 and each sending suction fan 105 are controlled so as to keep the peripheral area of each sending roller 97 in a negative pressure state.

  Before or when the substrate W is sent out to the second levitation transfer device 5, compressed air is supplied from the nozzles 47 n of the levitation units 47 by supplying compressed air into the chambers 43 by operating the supply fans 45. . Then, by switching the operation of each second transfer blower fan 59 and the operation of each second transfer suction fan 61, the peripheral area of each second transfer roller 53 is appropriately switched from the positive pressure state to the negative pressure state. Then, each second transport motor 55 is driven to rotate each second transport roller 53 around an axis parallel to the second transport width direction (first transport direction). Thereby, the substrate W can be levitated and conveyed in the second conveyance direction while ensuring the contact pressure between the back surface of the substrate W and the plurality of second conveyance rollers 53.

  Here, during the floating conveyance of the substrate W in the second conveyance direction, when the substrate W gets over each second conveyance roller 53, in other words, when a detection signal is output from each reflective photoelectric sensor 65, Since the controller 67 controls the second conveying blower fans 59 and the second conveying suction fans 61 so as to switch the peripheral area of each second conveying roller 53 from the positive pressure state to the negative pressure state, Even if the negative pressure in the peripheral area of the second transport roller 53 is set high, the collision between the end surface of the substrate W and the second transport roller 53 can be avoided.

  Therefore, according to the embodiment of the present invention, even if the negative pressure degree in the peripheral region of each transport roller (each first transport roller 23 and each second transport roller 53) is set high, the end surface of the substrate W Can be prevented from slipping between the back surface of the substrate and the transport rollers 23, 53, and the substrate W is moved in the first transport direction and the second transport direction. While improving the transfer efficiency of the substrate W during the floating transfer, it is possible to reduce damage such as cracking of the substrate W or damage to the transfer rollers 23 and 53 as much as possible.

  Further, even if the negative pressure in the peripheral area of each receiving roller 83 is set high, collision between the end surface of the substrate W and the receiving roller 83 can be avoided. It is possible to reduce slippage between the two and reduce the damage of the substrate W or damage to the receiving roller 83 as much as possible while increasing the transport efficiency of the substrate W when receiving the substrate W from the first levitating transport device 3. it can.

  In addition, this invention is not restricted to description of the above-mentioned embodiment, It can implement in a various aspect. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

W Substrate S Air reservoir layer (pressure reservoir layer)
DESCRIPTION OF SYMBOLS 1 Cross levitation conveyance system 3 1st levitation conveyance apparatus 5 2nd levitation conveyance apparatus 7 direction change apparatus 9 apparatus main body 11 support | pillar 13 chamber 15 supply fan 17 levitation unit 17n nozzle 19 1st conveyance roller drive unit 21 1st conveyance case 23 1st conveyance roller 25 1st conveyance motor 29 1st conveyance ventilation fan 31 1st conveyance suction fan 33 Reflection type photoelectric sensor 35 Controller 37 1st conveyance forward / reverse fan 39 Apparatus main body 43 Chamber 45 Supply fan 47 Floating unit 47n Nozzle 49 Second transport roller drive unit 51 Second transport case 53 Second transport roller 55 Second transport motor 57 Connection mechanism 59 Second transport blower fan 61 Second transport suction fan 65 Reflective type Photoelectric sensor 67 Controller 69 Device body 73 Chamber 75 Supply fan 77 Floating unit 77n Nozzle 79 Receiving roller drive unit 81 Receiving case 83 Receiving roller 85 Receiving motor 89 Receiving blower fan 91 Receiving suction fan 93 Sending roller drive unit 95 Sending case 97 Sending Roller 99 Sending motor 103 Sending blower fan 105 Sending suction fan 107 Reflective photoelectric sensor 109 Controller

Claims (9)

In a levitation transport device that levitates and transports a substrate in the transport direction,
The apparatus body is arranged along the transport direction, and the inside is connected to a floating gas supply source for supplying floating gas, and a nozzle for jetting the floating gas is formed on the upper surface, and the substrate is formed using the pressure of the floating gas. A plurality of levitation units to levitate,
Arranged in the apparatus main body, arranged in a plurality of rows in the conveyance width direction orthogonal to the conveyance direction, and rotatable about an axis parallel to the conveyance width direction and supporting the back surface of the substrate A plurality of transport rollers, a transport motor for rotating the plurality of transport rollers around an axis parallel to the transport width direction, and transport for switching a peripheral area of each transport roller between a positive pressure state and a negative pressure state A transport mechanism including a pressure generator for transporting the substrate in the transport direction;
In order to secure the contact pressure between the back surface of the substrate and the plurality of transport rollers while avoiding a collision between the end surface of the substrate and the transport rollers, when the substrate gets over each transport roller, And a controller for controlling each of the pressure generators for conveyance so as to switch the peripheral area from a positive pressure state to a negative pressure state. The transport mechanism is
A plurality of roller drive units arranged in the apparatus main body and arranged in a plurality of rows in the conveyance width direction;
Each roller drive unit is provided in the apparatus main body and has an upper opening, a transfer case, a rotation case provided in the transfer case and rotatable about an axis parallel to the transfer width direction. The apparatus further comprises the conveyance roller protruding upward, the conveyance motor provided in the conveyance case, and the conveyance pressure generator provided in the conveyance case. Item 2. The rising and conveying apparatus according to Item 1. Each transport pressure generator includes a transport fan that blows air from below toward the peripheral area of the transport roller, and air in the peripheral area of the transport roller from the opening side of the transport case. A suction fan for transporting in the direction, and switching the operation of the blower fan for transport and the operation of the suction fan for transport to switch the peripheral area of the transport roller between a positive pressure state and a negative pressure state. The levitation conveyance apparatus according to claim 1 or 2, wherein the levitation conveyance apparatus is configured.   Each of the transport pressure generators is a transport forward / reverse fan whose rotation direction can be changed in a forward direction and a reverse direction, and the peripheral area of the transport roller is changed by switching the rotation direction of the transport forward / reverse fan. The levitation conveyance apparatus according to claim 1 or 2, wherein the levitation transfer apparatus is switched between a positive pressure state and a negative pressure state. A substrate is received from a first levitation transport device that floats and transports a substrate in the first transport direction, and the substrate is sent out to a second levitation transport device that floats and transports the substrate in a second transport direction orthogonal to the first transport direction. In the direction changing device for changing the substrate transport direction from the first transport direction to the second transport direction,
A plurality of levitation units that are arranged in the apparatus main body, are connected to a levitation gas supply source for supplying levitation gas inside, and have nozzles for jetting levitation gas formed on the upper surface, and levitate the substrate using the pressure of the levitation gas When,
A plurality of arrangements arranged in the apparatus main body, the arrangement state being arranged in a plurality of rows in the second conveyance direction and being rotatable about an axis parallel to the second conveyance direction and supporting the back surface of the substrate; A receiving roller, a receiving motor for rotating the plurality of receiving rollers around an axis parallel to the second conveying direction, and a receiving pressure for switching a peripheral area of each receiving roller between a positive pressure state and a negative pressure state A receiving mechanism comprising a generator and transporting the substrate in the first transport direction while receiving the substrate from the first levitation transport device;
A plurality of arrangements arranged in the apparatus main body, arranged in a plurality of rows in the first conveyance direction, and capable of rotating around an axis parallel to the first conveyance direction and supporting the back surface of the substrate. A delivery roller, a delivery motor that rotates the plurality of delivery rollers around an axis parallel to the first transport direction, and a delivery pressure that switches a peripheral region of each delivery roller between a positive pressure state and a negative pressure state A delivery mechanism comprising a generator and transporting the substrate in the second transport direction while feeding the substrate to the second levitation transport device;
When receiving a substrate from the first levitation transfer device, if the substrate passes over each receiving roller, the receiving pressure generator is controlled to switch the peripheral area of each receiving roller from a positive pressure state to a negative pressure state. And a direction changing device. Wherein the controller, when receiving a substrate from said first levitation transportation device, as well as a possible control the delivery Pressure generator so as to keep the surrounding area of the delivery rollers in a positive pressure state, the second floating conveyor When the substrate is fed to the apparatus, the receiving pressure generator can be controlled so as to keep the peripheral area of each receiving roller in a positive pressure state, and the peripheral area of each sending roller is kept in a negative pressure state. 6. The direction changing device according to claim 5 , wherein the delivery pressure generator is controllable. The receiving mechanism is
A plurality of receiving roller drive units arranged in the apparatus main body and arranged in a plurality of rows in the second conveying direction;
Each receiving roller drive unit
A receiving case provided in the apparatus main body and having an upper opening, and provided in the receiving case so as to be rotatable about an axis parallel to the second transport direction and upward with respect to the receiving case The receiving roller protruding, the receiving motor provided in the receiving case, and the receiving pressure generator provided in the receiving case,
The delivery mechanism is
A plurality of delivery roller drive units arranged in the apparatus main body and arranged in a plurality of rows in the first transport direction;
Each delivery roller drive unit
A delivery case provided in the apparatus main body and having an upper opening, and provided in the delivery case so as to be rotatable around an axis parallel to the first transport direction and upward with respect to the delivery case. 6. The protruding delivery roller, the delivery motor provided in the delivery case, and the delivery pressure generator provided in the delivery case. 6. The direction changing apparatus according to 6. Each receiving pressure generator includes a receiving fan that blows air from below toward the peripheral area of the receiving roller, and air in the peripheral area of the receiving roller from the opening side of the receiving case. A receiving suction fan that sucks in the direction, and the peripheral area of the receiving roller is switched between a positive pressure state and a negative pressure state by switching between the operation of the receiving fan and the operation of the receiving suction fan. Because,
Each delivery pressure generator includes a delivery fan that blows air from below toward the peripheral area of the delivery roller, and air in the peripheral area of the delivery roller from the opening side of the delivery case downward. And a suction fan for sending out, and the peripheral area of the sending roller is switched between a positive pressure state and a negative pressure state by switching the operation of the sending fan and the operation of the sending suction fan. it has turning device according to any one of claims 7 from claim 5, characterized in. Each receiving pressure generator is a receiving forward / reverse fan whose rotational direction can be changed in a forward direction and a reverse direction, and the peripheral area of the receiving roller is changed by switching the rotational direction of the receiving forward / reverse fan. It switches to the positive pressure state and the negative pressure state,
Each of the delivery pressure generators is a delivery forward / reverse fan whose rotation direction can be changed in a forward direction and a reverse direction, and the peripheral area of the delivery roller is changed by switching the rotation direction of the delivery forward / reverse fan turning device according to any one of claims 7 from claim 5, characterized in that the switching to a positive pressure and negative pressure.

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