JP2004123254A

JP2004123254A - Method of carrying large sheet material and its device

Info

Publication number: JP2004123254A
Application number: JP2002286424A
Authority: JP
Inventors: Nariyuki Nagura; 名倉　成之
Original assignee: Toray Engineering Co Ltd; Nihon Sekkei Kogyo Co Ltd
Current assignee: Toray Engineering Co Ltd; Nihon Sekkei Kogyo Co Ltd
Priority date: 2002-09-30
Filing date: 2002-09-30
Publication date: 2004-04-22
Anticipated expiration: 2022-09-30
Also published as: JP4229670B2

Abstract

PROBLEM TO BE SOLVED: To reduce the floor area of a device for carrying large sheet materials such as glass substrates, eliminating the need for adjusting carrying rollers even when the glass substrates are changed in size and preventing meandering during carriage. SOLUTION: The carrying device 10 carries the large sheet substrates 12 along a vertical plane or a carriage plane 14 in inclination approximate thereto in a horizontal direction. A carrying roller train 16 supports the substrates 12 at their lower edges 12A and a fluid membrane F consisting of static pressure gas formed between a face plate 20 of a floating chamber 18 and the substrate 12 floats and supports the substrates 12 at their central portions 12B in the direction of their heights. In this state, the carrying roller train 16 provides carrying force for carriage. COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
この発明は、液晶表示（ＬＣＤ）パネル、プラズマディスプレイパネル（ＰＤＰ）などの平面板ディスプレイに用いる大型で薄いガラス基板、装飾用金属薄板、金属箔に高分子フィルムをラミネートした積層材のような大型薄板状材を搬送する方法及び装置に関する。
【０００２】
【従来の技術】
大型のＬＣＤ用ガラス基板は、サイズが、例えば７５０ｍｍ×９５０ｍｍ、厚さが０．７ｍｍなどであって、大きさに比べて非常に薄く、近い将来、１２００ｍｍ×１５００ｍｍあるいは１４００ｍｍ×１７００ｍｍと更に大型化が考えられている。
【０００３】
上記のような大型のガラス基板を水平に搬送する際に、その幅方向両端のみならず、幅方向中央部を支持しなければ大きく垂れ下がってしまうが、このようなガラス基板は、特にその外周端部を除いた部分に搬送装置などが接触しないことが要求されている。
【０００４】
このための手段としては、例えば、特許文献１、特許文献２、特許文献３等に開示されるような、空気などの気体を用いて基板を浮上させ非接触で搬送する技術が提案されている。
【０００５】
【特許文献１】
特開平１０−１３９１６０号公報
【０００６】
【特許文献２】
特開平１１−２６８８３０号公報
【０００７】
【特許文献３】
特開平１１−２６８８３１号公報
【０００８】
【発明が解決しようとする課題】
しかしながら、上記のような搬送装置は、複数のノズルから圧縮空気などを噴出するようにし、且つ、その噴出方向、噴出及び停止を複雑に制御することによって、基板を浮上させ、目的の方向に搬送させるようにしているので、製造コスト及び運転コストが非常に高くなると共に、例えばクリーンルーム内においては、複数のノズルから比較的高い圧力の空気などが噴出するので、クリーンルーム内に気流の乱れを生じてしまうという問題点がある。
【０００９】
更に、このような問題点を解決するために、例えば多孔質セラミクス板を水平に配置し、その下側から空気を送り込んで、搬送されるガラス基板と多孔質セラミクス板との間に流体膜を形成し、これによってガラス基板を浮上させるようにしたものがある。
【００１０】
しかしながら、この多孔質セラミクス板は非常に高価であり、製造コストが増大してしまうと共に、大型の薄いガラス基板を多孔質セラミクス板からなる搬送装置から他の搬送手段に渡したり、逆に受け取ったりする際に、ガラス基板の中央部の垂れ下がりに対応できないので、フォーク状のリフト装置を用いなければならないという問題点がある。
【００１１】
又、上記いずれの場合でも基板の搬送面が水平であるために、搬送装置の床面積が大きく、面積効率が低いという問題点があり、更に、このように搬送装置の床面積が大きいと、搬送装置のラインを作業者が横断し難く、装置のメンテナンスや基板の点検作業姿勢が悪く作業効率が低くなるという問題点も生じる。
【００１２】
更に又、上記のような、空気等の気体を用いて基板を浮上させて非接触で搬送する際に、そのガイド及び搬送力付与のために、基板の搬送方向に対して幅方向両端を搬送ローラによって支持するものが提案されているが、搬送する基板のサイズが異なる場合、その基板幅に応じて両端の搬送ローラ間距離あるいはガイドローラ間距離を調整する必要があり、更には、ガラス基板のサイズが同一の場合であっても、その幅に対して両端の搬送ローラ間距離やガイドローラ幅が大きい場合にはガラス基板が蛇行して発塵の原因となり易いという問題点がある。
【００１３】
この発明は、上記従来の問題点に鑑みてなされたものであって、低コストで、搬送のための装置の床面積が小さく、且つ、ガラス基板等の幅が変更されても搬送ローラの調整が不要であり、搬送中にガラス基板等の蛇行が生じないようにした大型薄板状材の搬送方法及び装置を提供することを目的とする。
【００１４】
【課題を解決するための手段】
本方法発明は、大型薄板状材の、略水平の搬送方向に対して直交する幅方向一方の端縁を下側にして、且つ、幅方向他方の縁端を上側にして、前記下側の端縁を搬送ローラ列により下方から接触支持すると共に、面板に形成された多数の気体噴出孔から気体を噴出して面板と大型薄板状材との間に静圧気体からなる流体膜を形成し、前記大型薄板状材の幅方向少なくとも中間部を、大型薄板状材厚さ方向の少なくとも一方から、前記流体膜により押し、且つ、前記流体膜が途切れる位置で、動圧気体により前記大型薄板状材の搬送方向先端を押して、大型薄板状材を、その板面が鉛直又は鉛直に近い状態で傾斜する姿勢となるように支持しつつ、前記搬送ローラ列により搬送することを特徴とする大型薄板状材の搬送方法により、上記目的を達成するものである。
【００１５】
又、前記大型薄板状材の搬送方法において、前記板面の、搬送方向と平行な鉛直面に対する傾斜角度θを、５°＜θ≦３０°とすると共に、前記静圧気体からなる流体膜を傾斜した大型薄板状材の裏側に形成し、且つ、大型薄板状材の表側に、前記流体膜により押される位置よりも高い位置で、気流を吹き付けて、大型薄板状材の倒れ防止をするようにしてもよい。
【００１６】
更に、前記大型薄板状材の表側に吹き付ける気流を斜め下向きとしてもよい。
【００１７】
又、前記基板面の、鉛直面に対する傾斜角度θを０≦θ≦５°とすると共に、前記静圧気体からなる流体膜を、大型薄板状材を挟み込むように対向して、大型薄板状材の両面に沿って形成してもよい。
【００１８】
更に又、前記流体膜の幅Ｗｔを、前記大型薄板状材における上下方向の幅Ｗｓに対して、Ｗｓ／６≦Ｗｔ≦Ｗｓ／２の範囲となるように形成してもよい。
【００１９】
本装置発明は、鉛直面又はこれから３０°以内の傾斜面を搬送面として、大型薄板状材を、その上下方向の下端縁を、搬送ローラ列により支持して搬送する搬送装置であって、前記搬送面上の大型薄板状材における上下方向の少なくとも中央部に相当する位置に配置された搬送方向に長い箱状体の浮上チャンバを、前記搬送面に沿って少なくとも１個を有してなり、この浮上チャンバは、前記搬送面と平行で、これと隣接する面板を備え、この面板には多数の気体噴出孔が形成され、この気体噴出孔から気体を供給して前記面板と大型薄板状材との間に、前記中央部を前記面板から離間させる静圧気体からなる流体膜を形成するようにされたことを特徴とする大型薄板状材の搬送装置により、上記目的を達成するものである。
【００２０】
又、前記大型薄板状材の搬送装置において、前記搬送面は、搬送方向と平行な鉛直面に対する傾斜角度θが、５°＜θ≦３０°に設定され、前記浮上チャンバは、前記搬送面上の前記大型薄板状材の裏面側に配置されてなり、前記搬送面を挟んで前記浮上チャンバの反対側で、且つ、これよりも高い位置に配置され、前記大型薄板状材の表側に気流を吹き付ける気体吹出ノズルを設けるようにしてもよい。
【００２１】
更に、前記搬送面は、鉛直面に対する傾斜角度θが、０≦θ≦５°とされてなり、前記浮上チャンバは、前記搬送面を挟んで対向して一対配置され、前記搬送面上の大型薄板状材の両側に、これを挟み込む流体膜を形成するようにしてもよい。
【００２２】
又、前記搬送ローラ列は、各搬送ローラの回転軸が、水平面に対して角度θだけ傾斜して配置されるようにしてもよい。
【００２３】
又、前記浮上チャンバにおける搬送方向後側の端部位置に、前記搬送面に向けて直角又は僅かに斜めに、前記大型薄板状材の搬送方向先端を押す動圧気体を噴出する動圧浮上手段を設けてもよい。
【００２４】
更に又、前記動圧浮上手段は、前記浮上チャンバを構成する箱状体の搬送方向後側の端面板の搬送面側端縁と前記面板の搬送方向後側端縁との間の、前記面板の表面よりも、前記搬送面から退った位置での隙間から加圧気体を噴出させるように構成してもよい。
【００２５】
又、前記隙間は、前記端面板の内側面と前記面板の前記搬送方向後側端縁との間に形成され、前記端面板の搬送面側端縁は、前記面板の表面よりも低く、且つ、内側面よりも突出する位置に配置してもよい。
【００２６】
又、前記端面板の搬送面側端における、前記隙間と反対側の角部が面取りされた傾斜面としてもよい。
【００２７】
面板に形成された多数の気体噴出孔から気体を噴出して面板と大型薄板状材との間に静圧気体からなる流体膜を形成し、更に又、前記浮上チャンバの少なくとも１個所に気体を送り込むブロワーと、このブロワーと前記浮上チャンバとの間の気体通路に配置され、前記ブロワーからの気体の供給速度を一定にするフィルターと、を設けるようにしてもよい。
【００２８】
この発明においては、大型薄板状材を垂直あるいはこれから一定角度傾けられた搬送面に沿って、下端を搬送ローラにより支持し、且つ上下方向中間部を静圧気体からなる流体膜により押して非接触で支持しつつ搬送するので、低コストで前記流体膜装置面積の大幅な低減、粉塵の発生等を防止することができる。
【００２９】
【発明の実施の形態】
以下本発明の実施の形態の例を図面を参照して詳細に説明する。
【００３０】
図１、図２に示されるように、本発明の実施の形態の第１例に係る大型薄板状材の搬送装置１０は、大型薄板状材（以下基板）１２を、鉛直面から３０°以内の傾斜面を搬送面１４としてその下端縁１２Ａを、搬送ローラ列１６より支持して搬送するものであって、前記搬送面１４上の基板１２における上下方向の中央部１２Ｂに相当する位置に配置された搬送方向に長い箱状体の浮上チャンバ１８を搬送面１４に沿って１又は複数設け、この浮上チャンバ１８により、基板１２の前記中央部１２Ｂを非接触で斜め下側から支持するように構成されている。
【００３１】
前記浮上チャンバ１８は、前述のように、搬送方向に長い箱状体であって、前記搬送面１４と平行でこれと隣接する面板２０を有し、この面板２０には多数の気体噴出孔２２が形成され、この気体噴出孔２２から気体を供給して前記面板２０と基板１２との間に、該１２基板の中央部１２Ｂを面板２０に接触しない程度に僅かに離間させる静圧気体からなる流体膜Ｆを形成できるようにされている（詳細後述）。
【００３２】
前記搬送面１４は、更に詳細には、図２に示されるように、搬送方向と平行な鉛直面に対する傾斜角度θが、５°＜θ≦３０°に設定され、前記浮上チャンバ１８は、前記搬送面１４上の前記基板１２の裏面側に配置されている。
【００３３】
又、前記搬送面１４を挟んで、前記浮上チャンバ１８の反対側で、且つ、これよりも高い位置には、前記基板１２の表側に、斜め下向の気流を吹きつける気体吹出ノズル２６が配置されている。
【００３４】
又、前記搬送ローラ列１６は、複数の搬送ローラ１７を搬送面１４の下端に沿って一列に並べたものであり、各搬送ローラ１７は、その回転軸１７Ａが水平面に対して角度θだけ傾斜し、且つ、前記搬送面１４と直交して配置されている。更に、この搬送ローラ１７は、支持する基板１２の下端縁１２Ａにおける裏面側が接触可能な大径の鍔部１７Ｂを備えていて、いわゆる段付ローラとされている。
【００３５】
図１、図２の符号１９は、前記各搬送ローラ１７毎にその下側及び各搬送ローラ１７間の適宜位置に配置された吸引ノズルを示す。この吸引ノズル１９は一本の集合吸気管１９Ａを介して負圧が印加されて、搬送ローラ１７との接触により基板１２の下端縁１２Ａから発生する微塵を吸引して排出するようにされている。
【００３６】
ここで、前記浮上チャンバ１８における面板２０の上下方向の幅Ｗｔは、基板１２における上下方向の幅Ｗｓに対して、Ｗｓ／６≦Ｗｔ≦Ｗｓ／２の範囲となるようにされている。
【００３７】
前記浮上チャンバ１８は、図３に示されるように、その搬送方向後側の端部位置に、前記搬送面１４に向けて直角又は僅かに斜めに、前記基板１２の搬送方向先端を押す動圧気体を噴出する動圧浮上手段２４を備えている。
【００３８】
この動圧浮上手段２４は、前記浮上チャンバ１８を構成する箱状体の搬送方後側の端面板２１の搬送面側端縁２１Ａと前記面板２０の搬送方向後側端縁２０Ａとの間の、前記面板２０の表面よりも前記搬送面１４から退った位置での隙間２８から加圧気体を噴出させるように構成されている。
【００３９】
更に詳細には、前記隙間２８は、前記面板２０の内側面２０Ｂと前記搬送方向後側端縁２０Ａとの間に形成され、前記端面板２１の搬送面側端縁２１Ａは、前記面板２０の表面よりも低く、且つ、内側面２０Ｂよりも突出する位置に配置されている。
【００４０】
前記箱状の浮上チャンバ１８に対しては、図４に示されるように、ブロワー３２からフィルター３４を介して、ダクトホース３６により比較的低圧の空気が供給され、前記多数の気体噴出孔２２及び隙間２８から噴出されるようになっている。
【００４１】
前記気体噴出小孔２２の径は隙間２８と比較して小さくされ、ここから噴出した空気が基板１２の裏面と、面板２０の表面との間に静圧領域である空気膜Ｆを形成できるようにされている。又、前記隙間２８からは気体噴出小孔２２と比較して大量の空気が噴出されるので、この部分では動圧気体である空気流が形成されることになる。
【００４２】
前記のような浮上チャンバ１８は、搬送面１４に沿って必要に応じて１又は複数整列して配置されるが、搬送方向最前位置にある浮上チャンバ１８においては、図３の右半分に示されるように、その搬送方向前端の端面板２５の上端縁２５Ａと、面板２０の前側端縁２０Ｄとの間に隙間３０が形成され、この隙間３０を含んで、前述の動圧浮上手段２４と同様の前側動圧浮上手段３８が設けられている。
【００４３】
この隙間３０は前述の隙間２８と同様に形成され、ここから動圧気体としての空気流を噴出して、基板１２の搬送方向後端を斜め下方から噴き上げて、該後端の幅方向中央部１２Ｂが斜め下向きの凸形状に湾曲しないようにする。
【００４４】
この実施の形態の例に係る搬送装置１０に対しては、例えば搬送ロボットにより基板１２を上方から搬入したり、あるいは搬送方向上流側からコンベア等によって搬入するが、このとき、浮上チャンバ１８において、その面板２０における気体噴出小孔２２から所定の圧力で空気流を噴出させると共に、前記隙間２８から動圧気体としての空気流を噴出させる。
【００４５】
このようにすると、搬入されてくる基板１２の先端の幅方向中央部１２Ｂが斜め下向きの凸形状に湾曲することを防止されて、該湾曲した幅方向中央部１２Ｂが搬送装置１０に衝突して損傷することがない。
【００４６】
このとき、前記気体吹出ノズル２６は、基板１２の上部に、浮上チャンバ１８の反対側から空気を吹き付けて基板１２を浮上チャンバ１８方向に押すので、基板１２は、浮上チャンバ１８から離間する方向に傾いたりすることがなく安定して、搬送面１４上に維持される。
【００４７】
又、搬送ローラ１７の回転軸１７Ａが水平面に対して角度θ傾けられているので、基板１２の下端縁１２Ａに対して垂直になり、この下端縁１２Ａを安定して支持でき、且つ、鍔部１７が下端縁１２Ａの横滑りを抑制しているので、搬送中の基板１２の、搬送面１４からのずれを規制する。
【００４８】
基板１２の搬送は、浮上チャンバ１８によって基板１２の幅方向中央部１２Ｂを斜め下側から浮上させた状態で、該基板１２の下端縁１２Ａを搬送ローラ列１６で支持し、且つ搬送力を付与してなされるので、浮上チャンバ１８における気体噴出小孔２２から供給される空気は、単に流体膜Ｆを形成して基板１２が浮上チャンバ１８に接触しないようにしているのみであって、搬送力を発生させる必要がない。
【００４９】
従って、気体噴出小孔２２から噴出される空気の量及び圧力は従来の動圧気体による搬送装置と比較して少なく、且つ、低圧であってもよい。又、搬送ローラ列１６は、基板１２の荷重のかなりの部分を支えるが、基板１２は薄板状であり、１個当たりの搬送ローラ１７が負担する荷重が少ないので、僅かな搬送力によって基板１２を搬送面１４に沿って搬送することができると共に、搬送ローラ１７との接触による下端縁１２Ａの損傷を少なくすることができる。
【００５０】
ここで、前記浮上チャンバを搬送面１４に沿って搬送方向に長く、例えば１つの箱状体から形成した場合、基板１２が通過中の位置における気体噴出孔２２から流出された気体は流体膜Ｆを形成できるが、基板１２が通過中でない位置の気体噴出孔２２からは無駄に気体が流出してしまって、気体の消費量が増大してしまう。又、場合によっては、大部分の気体が、基板１２がない位置から流出してしまって、基板１２と面板２０との間に流体膜Ｆを形成できないことも有り得る。
【００５１】
この実施の形態の例に係る搬送装置１０においては、浮上チャンバ１８が搬送方向に複数直列に配置され、その各々に、ブロワー３２から空気が供給される構成となっている。
【００５２】
従って、基板１２が通過中の気体噴出孔２２の位置では、確実に流体膜Ｆを形成することができると共に、例えば、基板１２の通過センサを設け、基板１２が通過中でない浮上チャンバ１８では、空気供給を停止させることによって、無駄な気体の消費を抑制することができる。
【００５３】
基板１２が浮上チャンバ１８及び搬送ローラ列１６により搬送面１４に沿って搬送されていき、搬送装置１０の搬送面１４から他の搬送装置に渡されるとき、当然、該他の搬送装置側では基板１２を支えて湾曲しないようにする。
【００５４】
しかし、搬送面１４から基板１２が抜け出すとき、その後端が斜め下方に凸に湾曲して浮上チャンバ１８の搬送方向前側端縁２０Ｄに衝突することが考えられる。
【００５５】
この搬送装置１０においては、搬送方向最前端の浮上チャンバ１８における搬送方向前端には前述の如く前側動圧浮上手段３８が設けられていて、隙間３０から動圧気体としての空気流が噴出されるので、該基板１２の後端が斜め上向きに持ち上げられて、搬送方向前側端縁２０Ｄに衝突して損傷したりすることがない。
【００５６】
又、上記のように、搬送装置１０においては、気体吹出ノズル２６が基板１２に対して斜め下向きに気体を吹き出すようにされているので、基板１２の表面に付着している埃等が吹き飛ばされ、且つこれが下方に運ばれて、吸気ノズル１９から吸引搬出される。
【００５７】
更に、気体吹出ノズル２６から吹き出した気体によって、基板１２を流体膜Ｆに押し付けるようにしているので、装置周囲の微風、基板１２に対する横風、地震等の遥動に対して、基板１２を安定して搬送面１４に位置させたりすることができる。
【００５８】
更に又、吸気ノズル１９は、例えばクリーンルーム内で基板１２に沿って流下する気体中に含まれる浮遊微塵、基板１２のエッジ、特に下端縁１２Ａと搬送ローラ列１６あるいは４８との接触によるチッピング片を吸入して排出させることができる。
【００５９】
上記搬送装置１０は、搬送面１４の上下方向中央位置における水平方向に１列の浮上チャンバ１８と下端縁１２Ａを支持する搬送ローラ列１６、及び気体吹出ノズル２６とにより構成されているが、本発明はこれに限定されるものでなく、浮上チャンバは基板１２における幅方向中央部１２Ｂを少なくとも斜めに浮上させるものであればよく、又、他の位置に別個の浮上チャンバを設けてもよい。更に、搬送力付与手段としての搬送ローラ列は、コンベア等の他の搬送手段としてもよい。
【００６０】
なお、上記搬送装置１０において、搬送面１４を鉛直面に近い角度に設定すると、搬送装置１０の装置面積が減少し、且つ、浮上チャンバ１８から噴出される空気による基板１２の支持荷重が減少する。
【００６１】
従って、傾斜角θが小さい程本発明の効果が大きいことになるが、搬送面１４を鉛直に近い状態とすると、基板１２を搬送面１４内に維持するためには、次の実施の形態の第２例に係る搬送装置４０におけるように、浮上チャンバを基板１２の両側に設けなければならない。
【００６２】
従って、基板１２の片側にのみ浮上チャンバ１８を設ける場合は、傾斜角の最小値は５°を越えるものとする。又、傾斜角があまりにも大きいと装置面積の減少率が少なく、浮上チャンバ１８における空気消費量も増大してしまうので、傾斜角θの限界は３０°とする。
【００６３】
搬送装置１０における搬送面１４の傾斜角θと、搬送装置１０の装置面積（床面積）減少率と、浮上チャンバ１８での空気消費量との関係を次の表に示す。
【００６４】
【表１】

【００６５】
次に、図５に示されるように、傾斜角θが５°以下の場合の、本発明の実施の形態の第２例に係る搬送装置４０について説明する。
【００６６】
この搬送装置４０は、搬送面４２の鉛直面に対する傾斜角度θを、０≦θ≦
５°とすると共に、この搬送面４２を挟んで対向して一対の浮上チャンバ４４、４６を搬送方向に配置し、基板１２の幅方向中央部１２Ｂを挟み込むようにして流体膜Ｆがその両側に形成されるようにしたものである。
【００６７】
なお、浮上チャンバ４４、４６の構成は、前記浮上チャンバ１８と同一であり、これらに対する気体供給手段も同一であるので、詳細な説明は省略する。
【００６８】
この搬送装置４０においても、搬送面１４上の基板１２の下端縁１２Ａを下方から支持する搬送ローラ列４８が設けられているが、この搬送ローラ列４８を構成する搬送ローラ４９はその回転軸４９Ａが水平に配置され、且つ搬送ローラ４９の軸方向中間部が細径となった鼓形状とされている。
【００６９】
又、各搬送ローラ４９の下側には、搬送装置１０におけると同様に、吸気ノズル１９、吸気集合管１９Ａが配置されている。
【００７０】
この実施の形態の第２例に係る搬送装置４０においては、基板１２をその両側から挟み込むように流体膜Ｆが形成され、且つ、基板１２は鉛直面又は略鉛直面上にあって、その両側から均等な面圧を受けるので、湾曲したりすることがない。
【００７１】
従って、搬送装置４０においては、搬送装置１０におけるような気体吹出ノズル２６が設けられていない。
【００７２】
ここで、搬送面４２に対する一対の浮上チャンバ４４、４６の距離（隙間）は、それぞれをＧ１、Ｇ２としたとき、Ｇ１＝Ｇ２であってもよいが、例えばＧ１＞Ｇ２に設定しておいて、更に、浮上チャンバ４４の空気吹出し量を一定にした上で、浮上チャンバ４６側からの空気吹出し量を調整することにより、基板１２が搬送面４２上に位置されるように設定するとよい。
【００７３】
なお、この搬送装置４０の場合、前述のように、搬送装置１０におけるような気体吹出ノズル２６が設けられていないので、浮上チャンバ４４、４６の位置が低く設定されると、これよりも上方に突出した位置で基板１２が湾曲し易くなる。この湾曲を抑制するために、浮上チャンバ４４、４６は基板１２の重心（１／２Ｗｓ）よりもやや高めの位置に設定するとよい。
【００７４】
図６は、前記浮上チャンバ１８又は４４、４６における面板と端面板との間に形成される隙間からなる動圧浮上手段の変形例を示す断面図である。
【００７５】
この変形例は、浮上チャンバ５０における搬送方向後側（図において左側）の端面板５１を、面板５２の搬送方向後側端縁５２Ａよりも更に搬送方向に離間して配置して、隙間５４を形成したものである。
【００７６】
端面板５１の上端縁は、前記面板５２の厚さ方向中間位置になるように設けられ、且つ、該上端縁の搬送方向後側の角部は面取りされて傾斜面５６とされている。
【００７７】
これによって、隙間５４から噴出される動圧気体としての空気流は、面板５２とほぼ垂直に向けられ、搬送されてきた基板１２の前端の幅方向中央部１２Ｂを効果的に浮上させることができる。
【００７８】
又、このときガラス基板１２の前端が、浮上チャンバ５０側に凸に若干湾曲していても、傾斜面５６が設けられているので、浮上チャンバ５０の角部に衝突して損傷したりすることがない。
【００７９】
上記のような各実施の形態の例において、浮上チャンバは単純な箱型であり、上面板に気体噴出小孔を形成して、且つ面板と端面板との間に隙間を設ければよく、従って、低コストで簡単に製造することができる。
【００８０】
特に、気体噴出小孔２２は搬送されてくる基板１２と面板１２、５２との間に流体膜を形成するものであればよく、その孔の方向、大きさ等の設計の自由度が大きい。
【００８１】
又、動圧気体による従来の浮上搬送手段と比較すると、ブロワー３２から低圧の気体を供給するのみで足りるので、ブロワー３２を含めた装置の製造コストを大幅に低減させることができ、更に、エアノズルの複雑な制御が不要であるので、構造が簡単である。
【００８２】
なお、上記の実施の形態の例は、ガラス基板を搬送するためのものであるが、本発明はこれに限定されるものでなく、面積に比較して板厚の薄い大型薄板状材を搬送する場合について適用されるものである。従って、金属薄板、樹脂の薄板等の撓みを生じ易い材料の搬送の場合に適用される。
【００８３】
又、浮上用の気体は、空気に限定されるものでなく、窒素ガス、希ガス等であってもよい。
【００８４】
【発明の効果】
本発明は、上記のように構成したので、低コストで、且つ、クリーンルーム内等の空気の乱れを生じたりすることがなく、又装置床面積を小さくして大型ガラス基板等の大型薄板状材を安定して搬送することができるという優れた効果を有する。
【図面の簡単な説明】
【図１】本発明の実施の形態の例に係る搬送装置を示す正面図
【図２】図１のＩＩ−ＩＩ線に沿う断面図
【図３】同搬送装置における浮上チャンバを示す断面図
【図４】同搬送装置における浮上用空気供給系を示すブロック図
【図５】本発明の実施の形態の第２例に係る搬送装置を示す断面図
【図６】本発明の搬送装置における動圧浮上手段の変形例を示す断面図
【符号の説明】
１０、４０…搬送装置
１２…大型薄板状材（基板）
１２Ａ…下端縁
１２Ｂ…中央部
１４、４２…搬送面
１６、４８…搬送ローラ列
１７…搬送ローラ
１７Ａ、４９Ａ…回転軸
１７Ｂ…鍔部
１８、４４、４６、５０…浮上チャンバ
１９…吸気ノズル
２０、５２…面板
２０Ａ…搬送面方向後側端縁
２０Ｂ…内側面
２０Ｃ…傾斜面
２０Ｄ…前側端縁
２１、２５、５１…端面板
２２…気体噴出孔
２４…動圧浮上手段
２５Ａ…上端縁
２６…気体吹出ノズル
２８、３０、５４…隙間
３２…ブロワー
３４…フィルター
３８…前側動圧浮上手段
５６…傾斜面[0001]
BACKGROUND OF THE INVENTION
The present invention is a large-sized thin glass substrate used for flat plate displays such as liquid crystal display (LCD) panels and plasma display panels (PDP), a thin metal plate for decoration, and a large material such as a laminated material in which a polymer film is laminated on a metal foil. The present invention relates to a method and an apparatus for conveying a thin plate material.
[0002]
[Prior art]
A large LCD glass substrate has a size of, for example, 750 mm × 950 mm, a thickness of 0.7 mm, etc., which is very thin compared to the size, and will become even larger in the near future, 1200 mm × 1500 mm or 1400 mm × 1700 mm. Is considered.
[0003]
When horizontally transporting a large glass substrate as described above, not only the width direction both ends but also the width direction central portion will droop drastically, but such a glass substrate is particularly its outer peripheral end. It is required that the conveying device or the like does not come into contact with a portion other than the portion.
[0004]
As a means for this purpose, for example, a technique has been proposed in which a substrate is levitated and conveyed in a non-contact manner using a gas such as air, as disclosed in Patent Document 1, Patent Document 2, Patent Document 3, and the like. .
[0005]
[Patent Document 1]
JP-A-10-139160
[0006]
[Patent Document 2]
JP-A-11-268830
[0007]
[Patent Document 3]
Japanese Patent Laid-Open No. 11-268831
[0008]
[Problems to be solved by the invention]
However, the transport apparatus as described above ejects compressed air or the like from a plurality of nozzles, and controls the ejection direction, ejection, and stop in a complicated manner, thereby floating the substrate and transporting it in the target direction. Therefore, the manufacturing cost and the operation cost become very high. For example, in a clean room, air with a relatively high pressure is ejected from a plurality of nozzles. There is a problem that.
[0009]
Furthermore, in order to solve such problems, for example, a porous ceramic plate is horizontally arranged, air is sent from the lower side thereof, and a fluid film is formed between the conveyed glass substrate and the porous ceramic plate. Some of them are formed to float the glass substrate.
[0010]
However, this porous ceramic plate is very expensive, increasing the manufacturing cost, and passing a large thin glass substrate from the transfer device made of the porous ceramic plate to other transfer means or receiving it in reverse. In this case, since it cannot cope with the drooping of the central portion of the glass substrate, there is a problem that a fork-like lift device must be used.
[0011]
In any of the above cases, since the substrate transfer surface is horizontal, there is a problem that the floor area of the transfer device is large and the area efficiency is low, and furthermore, when the floor area of the transfer device is large as described above, There is also a problem that it is difficult for an operator to cross the line of the transfer apparatus, the maintenance of the apparatus and the inspection work posture of the substrate are poor, and the work efficiency is lowered.
[0012]
Furthermore, when the substrate is lifted using a gas such as air as described above and transported in a non-contact manner, both ends in the width direction are transported with respect to the transport direction of the substrate in order to provide the guide and transport force. Although it has been proposed to support by a roller, if the size of the substrate to be transported is different, it is necessary to adjust the distance between the transport rollers at both ends or the distance between the guide rollers according to the width of the substrate. Even if the sizes are the same, if the distance between the conveying rollers at both ends and the width of the guide rollers are larger than the width, the glass substrate meanders and is likely to cause dust generation.
[0013]
The present invention has been made in view of the above conventional problems, and is low in cost, has a small floor area of the apparatus for conveyance, and adjusts the conveyance roller even if the width of the glass substrate or the like is changed. It is an object of the present invention to provide a method and apparatus for transporting a large thin plate-shaped material in which meandering of a glass substrate or the like does not occur during transport.
[0014]
[Means for Solving the Problems]
The present invention relates to a large thin plate-like material having one end in the width direction orthogonal to the substantially horizontal conveying direction on the lower side and the other end in the width direction on the upper side. The edge is contacted and supported from below by the transport roller row, and a gas film is ejected from a number of gas ejection holes formed in the face plate to form a fluid film made of static pressure gas between the face plate and the large thin plate-like material. , At least an intermediate portion in the width direction of the large thin plate material, from at least one of the large thin plate material thickness directions, Said At the position where the fluid film is pressed and the fluid film is interrupted, the leading end of the large thin plate material in the conveying direction is pushed by dynamic pressure gas, and the large thin plate material is inclined with its plate surface vertical or nearly vertical. The above object is achieved by a method for conveying a large thin plate-like material, characterized in that it is conveyed by the conveying roller row while being supported in a posture.
[0015]
Further, in the method for transporting the large thin plate-like material, an inclination angle θ of the plate surface with respect to a vertical plane parallel to the transport direction is set to 5 ° <θ ≦ 30 °, and a fluid film made of the static pressure gas is provided. It is formed on the back side of the inclined large thin plate-like material, and air current is blown on the front side of the large thin plate-like material at a position higher than the position pressed by the fluid film so as to prevent the large thin plate-like material from collapsing. It may be.
[0016]
Furthermore, it is good also considering the airflow sprayed on the front side of the said large sized plate-shaped material as diagonally downward.
[0017]
Further, the inclination angle θ of the substrate surface with respect to the vertical plane is set to 0 ≦ θ ≦ 5 °, and the fluid film made of the static pressure gas is opposed so as to sandwich the large thin plate material. You may form along both surfaces.
[0018]
Furthermore, the width Wt of the fluid film may be formed to be in the range of Ws / 6 ≦ Wt ≦ Ws / 2 with respect to the vertical width Ws of the large thin plate-like material.
[0019]
The present invention is a conveying device that conveys a large thin plate-like material with a vertical surface or an inclined surface within 30 ° from this as a conveying surface, with its lower end in the vertical direction supported by a conveying roller array, A floating chamber of a box-like body long in the transport direction disposed at a position corresponding to at least the central portion in the vertical direction of the large thin plate-like material on the transport surface, and having at least one along the transport surface; The levitation chamber is provided with a face plate adjacent to and parallel to the transport surface. A large number of gas ejection holes are formed in the face plate, and gas is supplied from the gas ejection holes to supply the face plate and the large thin plate-like material. The above-mentioned object is achieved by a large thin plate-shaped material conveying device characterized in that a fluid film made of a static pressure gas that separates the central portion from the face plate is formed between .
[0020]
Further, in the large thin plate material conveying apparatus, the conveying surface has an inclination angle θ with respect to a vertical plane parallel to the conveying direction set to 5 ° <θ ≦ 30 °, and the levitation chamber is located on the conveying surface. Is disposed on the back side of the large thin plate-shaped material, and is disposed on the opposite side of the floating chamber with the conveyance surface interposed therebetween and at a position higher than the floating chamber. A gas blowing nozzle for blowing may be provided.
[0021]
Further, the transport surface has an inclination angle θ with respect to the vertical surface of 0 ≦ θ ≦ 5 °, and a pair of the levitation chambers are arranged opposite to each other with the transport surface interposed therebetween, and a large size on the transport surface. You may make it form the fluid film which pinches | interposes this on both sides of a thin plate-shaped material.
[0022]
Further, the transport roller row may be arranged such that the rotation shaft of each transport roller is inclined by an angle θ with respect to a horizontal plane.
[0023]
Also, a dynamic pressure levitation means for ejecting a dynamic pressure gas that pushes the leading end of the large thin plate material in the conveyance direction at a right angle or slightly obliquely toward the conveyance surface at the end position on the rear side in the conveyance direction in the levitation chamber. May be provided.
[0024]
Furthermore, the dynamic pressure levitation means includes the face plate between the conveyance surface side edge of the end surface plate on the rear side in the conveyance direction of the box-shaped body constituting the levitation chamber and the rear edge in the conveyance direction of the face plate. You may comprise so that pressurized gas may be ejected from the clearance gap in the position retreated from the said conveyance surface rather than the surface of this.
[0025]
Further, the gap is formed between an inner surface of the end face plate and a rear edge in the transport direction of the face plate, a transport surface side edge of the end face plate is lower than a surface of the face plate, and , You may arrange in the position which protrudes from the inner surface.
[0026]
Moreover, it is good also as an inclined surface by which the corner | angular part on the opposite side to the said clearance gap was chamfered in the conveyance surface side edge of the said end surface board.
[0027]
A gas is ejected from a number of gas ejection holes formed in the face plate to form a fluid film composed of static pressure gas between the face plate and the large thin plate-like material, and further, the gas is introduced into at least one location of the levitation chamber. You may make it provide the blower to send in and the filter which is arrange | positioned in the gas passage between this blower and the said floating chamber, and makes the supply speed | rate of the gas from the said blower constant.
[0028]
In the present invention, a large thin plate-like material is supported by a conveyance roller along a conveyance surface that is perpendicular or inclined at a certain angle from this, and the intermediate portion in the vertical direction is pushed by a fluid film made of static pressure gas in a non-contact manner. Since it is transported while being supported, it is possible to significantly reduce the area of the fluid film device and prevent generation of dust at low cost.
[0029]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below in detail with reference to the drawings.
[0030]
As shown in FIG. 1 and FIG. 2, the large thin plate-shaped material conveying apparatus 10 according to the first example of the embodiment of the present invention is configured to move the large thin plate-shaped material (hereinafter referred to as a substrate) 12 within 30 ° from the vertical plane. The lower end edge 12A is supported by the transport roller row 16 and transported with the inclined surface of the transport surface 14 being disposed at a position corresponding to the center portion 12B of the substrate 12 on the transport surface 14 in the vertical direction. One or a plurality of box-like floating chambers 18 that are long in the transfer direction are provided along the transfer surface 14, and the floating chamber 18 supports the central portion 12B of the substrate 12 from the lower side in a non-contact manner. It is configured.
[0031]
As described above, the levitation chamber 18 is a box-like body that is long in the transport direction, and has a face plate 20 that is parallel to and adjacent to the transport surface 14. The face plate 20 has a number of gas ejection holes 22. And is formed of a static pressure gas that supplies a gas from the gas ejection hole 22 to slightly separate the central portion 12B of the 12 substrates from the face plate 20 and the substrate 12 so as not to contact the face plate 20. A fluid film F can be formed (details will be described later).
[0032]
More specifically, as shown in FIG. 2, the transport surface 14 has an inclination angle θ with respect to a vertical plane parallel to the transport direction set to 5 ° <θ ≦ 30 °, and the levitation chamber 18 It is disposed on the back side of the substrate 12 on the transport surface 14.
[0033]
Further, a gas blowing nozzle 26 for blowing a downward airflow is disposed on the front side of the substrate 12 on the opposite side of the floating chamber 18 and higher than the floating surface 18 with the transfer surface 14 in between. Has been.
[0034]
Further, the transport roller row 16 has a plurality of transport rollers 17 arranged in a line along the lower end of the transport surface 14, and each transport roller 17 has its rotation shaft 17A inclined at an angle θ with respect to a horizontal plane. In addition, they are arranged orthogonal to the transport surface 14. Further, the transport roller 17 includes a large-diameter flange portion 17B that can contact the back surface side of the lower end edge 12A of the substrate 12 to be supported, and is a so-called stepped roller.
[0035]
Reference numeral 19 in FIG. 1 and FIG. 2 indicates a suction nozzle arranged at an appropriate position between the lower side of each transport roller 17 and between the transport rollers 17. A negative pressure is applied to the suction nozzle 19 via a single collective intake pipe 19 A, and fine dust generated from the lower edge 12 A of the substrate 12 due to contact with the transport roller 17 is sucked and discharged. .
[0036]
Here, the vertical width Wt of the face plate 20 in the levitation chamber 18 is set to be in the range of Ws / 6 ≦ Wt ≦ Ws / 2 with respect to the vertical width Ws of the substrate 12.
[0037]
As shown in FIG. 3, the floating chamber 18 has a dynamic pressure that pushes the front end of the substrate 12 in the transport direction at a right end or a slight angle toward the transport surface 14 at an end position on the rear side in the transport direction. Dynamic pressure levitation means 24 for ejecting gas is provided.
[0038]
This dynamic pressure levitation means 24 is provided between the conveyance surface side edge 21A of the end surface plate 21 on the rear side in the conveyance direction of the box-shaped body constituting the levitation chamber 18 and the rear edge 20A in the conveyance direction of the face plate 20. The pressurized gas is ejected from a gap 28 at a position retreated from the transport surface 14 relative to the surface of the face plate 20.
[0039]
More specifically, the gap 28 is formed between the inner side surface 20B of the face plate 20 and the rear edge 20A in the carrying direction, and the carrying surface side edge 21A of the end face plate 21 is formed on the face plate 20. It is arranged at a position lower than the surface and protruding from the inner side surface 20B.
[0040]
As shown in FIG. 4, relatively low pressure air is supplied from the blower 32 through the filter 34 to the box-shaped floating chamber 18 by the duct hose 36, and the plurality of gas ejection holes 22 and It is ejected from the gap 28.
[0041]
The diameter of the gas ejection small hole 22 is made smaller than that of the gap 28 so that the air ejected therefrom can form an air film F that is a static pressure region between the back surface of the substrate 12 and the surface of the face plate 20. Has been. Further, since a large amount of air is ejected from the gap 28 as compared with the gas ejection small hole 22, an air flow which is a dynamic pressure gas is formed in this portion.
[0042]
One or more floating chambers 18 as described above are arranged along the transfer surface 14 as necessary. The floating chamber 18 at the foremost position in the transfer direction is shown in the right half of FIG. Thus, a gap 30 is formed between the upper end edge 25A of the end face plate 25 at the front end in the conveying direction and the front end edge 20D of the face plate 20, and the gap 30 is included and is similar to the above-described dynamic pressure levitation means 24. The front dynamic pressure levitation means 38 is provided.
[0043]
The gap 30 is formed in the same manner as the gap 28 described above. From here, an air flow as a dynamic pressure gas is ejected, and the rear end in the transport direction of the substrate 12 is ejected obliquely from below. 12B is prevented from curving into an obliquely downward convex shape.
[0044]
For the transfer apparatus 10 according to the example of this embodiment, for example, the substrate 12 is transferred from above by a transfer robot, or is transferred by a conveyor or the like from the upstream side in the transfer direction. An air flow is ejected from the gas ejection small hole 22 in the face plate 20 at a predetermined pressure, and an air flow as a dynamic pressure gas is ejected from the gap 28.
[0045]
In this way, the widthwise central portion 12B at the tip of the substrate 12 that is carried in is prevented from curving into a diagonally downward convex shape, and the curved widthwise central portion 12B collides with the transport device 10. There is no damage.
[0046]
At this time, the gas blowing nozzle 26 blows air on the upper portion of the substrate 12 from the opposite side of the floating chamber 18 to push the substrate 12 toward the floating chamber 18, so that the substrate 12 moves away from the floating chamber 18. It is stably maintained on the conveyance surface 14 without tilting.
[0047]
Further, since the rotation shaft 17A of the transport roller 17 is inclined at an angle θ with respect to the horizontal plane, it is perpendicular to the lower end edge 12A of the substrate 12, and this lower end edge 12A can be stably supported, and the collar portion Since 17 suppresses the side slip of the lower end edge 12A, the deviation of the substrate 12 being transferred from the transfer surface 14 is restricted.
[0048]
The substrate 12 is transported with the bottom edge 12 A of the substrate 12 supported by the transport roller row 16 and imparting transport force in a state where the center 12 B in the width direction of the substrate 12 is lifted obliquely from below by the floating chamber 18. Therefore, the air supplied from the gas ejection small holes 22 in the floating chamber 18 merely forms the fluid film F so that the substrate 12 does not come into contact with the floating chamber 18. It is not necessary to generate.
[0049]
Therefore, the amount and pressure of the air ejected from the gas ejection small hole 22 are small as compared with the conventional conveying device using dynamic pressure gas, and may be a low pressure. Further, the transport roller row 16 supports a considerable portion of the load of the substrate 12, but the substrate 12 is thin and has a small load on the transport roller 17, so that the substrate 12 can be transported by a small transport force. Can be transported along the transport surface 14, and damage to the lower end edge 12A due to contact with the transport roller 17 can be reduced.
[0050]
Here, when the floating chamber is long in the transport direction along the transport surface 14 and is formed from, for example, one box-like body, the gas flowing out from the gas ejection holes 22 at the position where the substrate 12 is passing is fluid film F. However, gas is unnecessarily discharged from the gas ejection holes 22 at positions where the substrate 12 is not passing, and the amount of gas consumption increases. In some cases, most of the gas flows out from the position where the substrate 12 is not present, and the fluid film F cannot be formed between the substrate 12 and the face plate 20.
[0051]
In the transfer apparatus 10 according to the example of this embodiment, a plurality of the levitation chambers 18 are arranged in series in the transfer direction, and air is supplied from the blower 32 to each of them.
[0052]
Accordingly, the fluid film F can be reliably formed at the position of the gas ejection hole 22 through which the substrate 12 is passing, and for example, a passage sensor for the substrate 12 is provided, and in the floating chamber 18 where the substrate 12 is not passing, By stopping the air supply, wasteful gas consumption can be suppressed.
[0053]
When the substrate 12 is conveyed along the conveyance surface 14 by the floating chamber 18 and the conveyance roller row 16 and is transferred from the conveyance surface 14 of the conveyance device 10 to another conveyance device, the substrate is naturally on the other conveyance device side. 12 is supported so as not to bend.
[0054]
However, it is conceivable that when the substrate 12 comes out of the transport surface 14, the rear end thereof is curved obliquely downward and collides with the front edge 20 D in the transport direction of the floating chamber 18.
[0055]
In the transport apparatus 10, the front dynamic pressure levitation means 38 is provided at the front end in the transport direction of the floating chamber 18 at the front end in the transport direction, as described above, and an air flow as a dynamic pressure gas is ejected from the gap 30. Therefore, the rear end of the substrate 12 is not lifted obliquely upward, and does not collide with and damage the front end edge 20D in the transport direction.
[0056]
Further, as described above, in the transfer device 10, the gas blowing nozzle 26 blows the gas obliquely downward with respect to the substrate 12, so that dust or the like adhering to the surface of the substrate 12 is blown off. And this is carried down and sucked out from the intake nozzle 19.
[0057]
Further, since the substrate 12 is pressed against the fluid film F by the gas blown from the gas blowing nozzle 26, the substrate 12 can be stabilized against a slight wind around the apparatus, a cross wind against the substrate 12, a shaking such as an earthquake. Can be positioned on the transfer surface 14.
[0058]
Further, the intake nozzle 19 removes, for example, floating dust contained in the gas flowing down along the substrate 12 in a clean room, chipping pieces caused by contact between the edge of the substrate 12, particularly the lower edge 12A and the conveying roller row 16 or 48. Can be inhaled and discharged.
[0059]
The transport device 10 includes a row of floating chambers 18 in the horizontal direction at the center of the transport surface 14 in the vertical direction, a transport roller row 16 that supports the lower end edge 12A, and a gas blowing nozzle 26. The invention is not limited to this, and the floating chamber may be any that floats at least the central portion 12B in the width direction of the substrate 12 at an angle, and a separate floating chamber may be provided at another position. Furthermore, the conveyance roller row as the conveyance force applying unit may be another conveyance unit such as a conveyor.
[0060]
In the transfer apparatus 10, when the transfer surface 14 is set to an angle close to the vertical plane, the apparatus area of the transfer apparatus 10 is reduced, and the support load of the substrate 12 by the air ejected from the floating chamber 18 is reduced. .
[0061]
Therefore, the effect of the present invention is greater as the inclination angle θ is smaller. However, in order to maintain the substrate 12 in the transport surface 14 when the transport surface 14 is in a nearly vertical state, the following embodiment will be described. As in the transfer apparatus 40 according to the second example, the floating chamber must be provided on both sides of the substrate 12.
[0062]
Therefore, when the floating chamber 18 is provided only on one side of the substrate 12, the minimum value of the inclination angle is over 5 °. If the tilt angle is too large, the reduction rate of the apparatus area is small and the air consumption in the floating chamber 18 is also increased. Therefore, the limit of the tilt angle θ is set to 30 °.
[0063]
The following table shows the relationship between the inclination angle θ of the transfer surface 14 in the transfer device 10, the reduction rate of the device area (floor area) of the transfer device 10, and the air consumption in the floating chamber 18.
[0064]
[Table 1]

[0065]
Next, as shown in FIG. 5, a transport device 40 according to a second example of the embodiment of the present invention when the inclination angle θ is 5 ° or less will be described.
[0066]
The transport device 40 has an inclination angle θ of the transport surface 42 with respect to the vertical plane, 0 ≦ θ ≦
The pair of floating

chambers

44 and 46 are arranged in the transport direction so as to face each other with the transport surface 42 interposed therebetween, and the fluid film F is placed on both sides so as to sandwich the width direction central portion 12B of the substrate 12. It is designed to be formed.
[0067]
The structure of the

levitation chambers

44 and 46 is the same as that of the levitation chamber 18, and the gas supply means for these is the same.
[0068]
Also in the transport device 40, a transport roller row 48 is provided to support the lower end edge 12A of the substrate 12 on the transport surface 14 from below, and the transport roller 49 constituting the transport roller row 48 has a rotation shaft 49A. Are arranged in a horizontal shape, and the intermediate portion in the axial direction of the conveying roller 49 has a small diameter.
[0069]
Further, the intake nozzle 19 and the intake manifold 19 A are arranged below the respective conveyance rollers 49 as in the conveyance device 10.
[0070]
In the transfer device 40 according to the second example of this embodiment, the fluid film F is formed so as to sandwich the substrate 12 from both sides thereof, and the substrate 12 is on a vertical surface or a substantially vertical surface, and the both sides thereof. Since it receives an equal surface pressure, it does not bend.
[0071]
Therefore, in the conveying apparatus 40, the gas blowing nozzle 26 as in the conveying apparatus 10 is not provided.
[0072]
Here, the distance (gap) between the pair of floating

chambers

44 and 46 with respect to the transfer surface 42 may be G1 = G2 when G1 and G2, respectively, but for example, G1> G2 is set. Further, the substrate 12 may be set to be positioned on the transport surface 42 by adjusting the air blowing amount from the floating chamber 46 side after making the air blowing amount of the floating chamber 44 constant.
[0073]
In the case of the transfer device 40, as described above, the gas blowing nozzle 26 as in the transfer device 10 is not provided. Therefore, if the positions of the floating

chambers

44 and 46 are set to be lower, The substrate 12 is easily bent at the protruding position. In order to suppress this bending, the floating

chambers

44 and 46 are preferably set at a position slightly higher than the center of gravity (1/2 Ws) of the substrate 12.
[0074]
FIG. 6 is a cross-sectional view showing a modified example of the dynamic pressure levitation means including a gap formed between the face plate and the end face plate in the

levitation chamber

18, 44, 46.
[0075]
In this modified example, the end face plate 51 on the rear side (left side in the drawing) in the levitation chamber 50 is arranged farther in the transport direction than the rear end edge 52A of the face plate 52 in the transport direction, and the gap 54 is formed. Formed.
[0076]
An upper end edge of the end face plate 51 is provided so as to be an intermediate position in the thickness direction of the face plate 52, and a corner portion on the rear side in the transport direction of the upper end edge is chamfered to be an inclined surface 56.
[0077]
As a result, the air flow as the dynamic pressure gas ejected from the gap 54 is directed substantially perpendicular to the face plate 52, and can effectively levitate the central portion 12 B in the width direction of the front end of the substrate 12 that has been conveyed. .
[0078]
Further, at this time, even if the front end of the glass substrate 12 is slightly curved convexly toward the floating chamber 50, the inclined surface 56 is provided, so that the glass substrate 12 may collide with the corner of the floating chamber 50 and be damaged. There is no.
[0079]
In the example of each embodiment as described above, the floating chamber is a simple box shape, it is only necessary to form a gas ejection small hole in the upper surface plate and provide a gap between the face plate and the end surface plate, Therefore, it can be easily manufactured at low cost.
[0080]
In particular, the gas ejection small hole 22 may be any one that forms a fluid film between the substrate 12 and the face plates 12 and 52 to be conveyed, and the degree of freedom in designing the direction and size of the hole is large.
[0081]
Further, as compared with the conventional levitation conveying means using dynamic pressure gas, it is only necessary to supply a low-pressure gas from the blower 32, so that the manufacturing cost of the apparatus including the blower 32 can be greatly reduced. Therefore, the structure is simple.
[0082]
In addition, although the example of said embodiment is for conveying a glass substrate, this invention is not limited to this, A large-sized thin plate-shaped material with a thin plate | board thickness compared with an area is conveyed. It applies to the case of doing. Therefore, the present invention is applied to the case of transporting a material that is likely to be bent, such as a thin metal plate or a thin resin plate.
[0083]
Further, the levitation gas is not limited to air, and may be nitrogen gas, rare gas, or the like.
[0084]
【The invention's effect】
Since the present invention is configured as described above, it is low-cost, does not cause air turbulence in a clean room, etc., and has a large sheet-like material such as a large glass substrate by reducing the floor area of the apparatus. It has the outstanding effect that it can convey stably.
[Brief description of the drawings]
FIG. 1 is a front view showing a transport apparatus according to an example of an embodiment of the present invention.
2 is a sectional view taken along line II-II in FIG.
FIG. 3 is a cross-sectional view showing a floating chamber in the transfer apparatus
FIG. 4 is a block diagram showing a floating air supply system in the transfer apparatus
FIG. 5 is a cross-sectional view showing a transfer apparatus according to a second example of an embodiment of the present invention.
FIG. 6 is a cross-sectional view showing a modified example of the dynamic pressure levitation means in the transport device of the present invention.
[Explanation of symbols]
10, 40 ... Conveying device
12 ... Large sheet material (substrate)
12A ... Bottom edge
12B ... Central part
14, 42 ... Conveying surface
16, 48 ... Conveying roller row
17 ... Conveying roller
17A, 49A ... Rotating shaft
17B ... Buttocks
18, 44, 46, 50 ... Levitation chamber
19 ... Intake nozzle
20, 52 ... Face plate
20A: Rear edge in the conveyance surface direction
20B ... inside
20C ... Inclined surface
20D ... front edge
21, 25, 51 ... end face plate
22 ... Gas outlet
24. Dynamic pressure levitation means
25A ... Upper edge
26 ... Gas blowing nozzle
28, 30, 54 ... Gap
32 ... Blower
34 ... Filter
38. Front dynamic pressure levitation means
56 ... Inclined surface

Claims

The large thin plate-shaped material has one edge in the width direction orthogonal to the substantially horizontal conveyance direction as the lower side and the other edge in the width direction as the upper side, and the lower edge as the conveyance roller. The row is supported by a row from below, and a fluid film made of static pressure gas is formed between the face plate and the large thin plate material by ejecting gas from a number of gas ejection holes formed in the face plate, and the large thin plate shape At least a middle portion in the width direction of the material is pushed by at least one of the large thin plate materials in the thickness direction by the fluid film, and at the position where the fluid film is interrupted, the leading end in the conveyance direction of the large thin plate material by dynamic pressure gas The large thin plate material is conveyed by the conveying roller row while supporting the large thin plate material so that the plate surface is inclined in a vertical or nearly vertical state. .

2. The large thin plate-like material according to claim 1, wherein an inclination angle θ of the plate surface with respect to a vertical plane parallel to the conveying direction is set to 5 ° <θ ≦ 30 °, and the fluid film made of the static pressure gas is inclined. A large thin plate that is formed on the back side and blows an airflow on the front side of the large thin plate material at a position higher than the position pressed by the fluid film to prevent the large thin plate material from collapsing. Material transport method.

3. The method for transporting a large thin plate material according to claim 2, wherein the airflow blown to the front side of the large thin plate material is inclined downward.

In Claim 1, the inclination angle θ of the plate surface with respect to the vertical plane is set to 0 ≦ θ ≦ 5 °, and the fluid film made of the static pressure gas is opposed so as to sandwich the large thin plate-like material. A method for transporting a large thin plate material, characterized by being formed along both surfaces of the thin plate material.

5. The fluid film according to claim 1, wherein a width Wt of the fluid film is set to be in a range of Ws / 6 ≦ Wt ≦ Ws / 2 with respect to a vertical width Ws of the large thin plate material. A method for transporting a large thin plate-like substrate.

A conveying device that conveys a large thin plate-like material by supporting a vertical lower surface or an inclined surface within 30 ° from the vertical surface with a conveying roller row, and conveying the large thin plate-like material on the conveying surface. The sheet-like material has at least one box-like floating chamber that is long in the transfer direction and is arranged at a position corresponding to at least the central portion in the vertical direction. Parallel to the transport surface, provided with a face plate adjacent thereto, a number of gas ejection holes are formed in the face plate, and gas is supplied from the gas ejection holes between the face plate and the large thin plate-like material, A transport apparatus for a large thin plate material, wherein a fluid film made of a static pressure gas for separating the central portion from the face plate is formed.

7. The conveyance surface according to claim 6, wherein an inclination angle θ with respect to a vertical plane parallel to the conveyance direction is set to 5 ° <θ ≦ 30 °, and the levitation chamber is formed of the large thin plate-like material on the conveyance surface. Arranged on the back side, provided on the opposite side of the levitation chamber across the transport surface and at a position higher than this, and provided with a gas blowing nozzle for blowing airflow on the front side of the large thin plate-like material A conveying device for a large thin plate-like material.

7. The conveyance surface according to claim 6, wherein an inclination angle θ with respect to the vertical surface is 0 ≦ θ ≦.
A pair of the levitation chambers are arranged opposite to each other across the conveyance surface, and a fluid film is formed on both sides of the large thin plate-like material on the conveyance surface. A conveying device for a large thin plate-like material.

9. The apparatus for transporting a large thin plate material according to claim 7, wherein the transport roller row is arranged such that a rotation shaft of each transport roller is inclined by an angle θ with respect to a horizontal plane.

In any one of Claims 6 thru | or 9, the dynamic pressure which pushes the conveyance direction front-end | tip of the said large sized plate-shaped material to the edge part position of the conveyance direction back side in the said floating chamber at right angle or slightly diagonally toward the said conveyance surface. A conveying apparatus for a large thin plate-like material, characterized in that a dynamic pressure levitation means for ejecting gas is provided.

The dynamic pressure levitation means according to claim 10, wherein the dynamic pressure levitation means is provided between a conveyance surface side edge of a conveyance direction rear end face plate of the box-shaped body constituting the levitation chamber and a conveyance direction rear edge of the face plate. A conveying device for a large thin plate-like material, characterized in that the pressurized gas is ejected from a gap at a position retreated from the conveying surface rather than the surface of the face plate.

In Claim 11, the said clearance gap is formed between the inner surface of the said end surface plate, and the said conveyance direction rear side edge of the said surface plate, and the conveyance surface side edge of the said end surface plate is rather than the surface of the said surface plate. A large-sized thin plate-shaped material conveying apparatus, which is disposed at a position that is lower and protrudes from an inner surface.

13. The transport apparatus for a large thin plate material according to claim 11 or 12, wherein the end face plate has an inclined surface in which a corner opposite to the gap is chamfered at a transport surface side end.

14. The blower according to claim 6, wherein the blower feeds gas to at least one location of the levitation chamber, and a gas passage between the blower and the levitation chamber, and the gas supply rate from the blower is constant. And a large-sized thin plate-shaped material conveying device.