JP2008130892A - Air float carrying apparatus and air carrying method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air float carrying apparatus allowed to be flexibly constituted according to the size and weight of a plane substrate such as a liquid crystal substrate and capable of carrying the plane substrate in a stable state. <P>SOLUTION: A plurality of lines each of which arrays air float units 1 forming a carrier of a plane substrate 10 like a line in the carrying direction of the plane substrate 10 are arrayed in parallel. The air float unit 1 is constituted of a rear plate 13 forming the carrier of the plane substrate 10 and a pair of air feeding pipes 11, 12 having inclined nozzles 21 arranged on both the side faces of the rear plate 13 in parallel with the carrier direction to jet air to the upper of the center part of the rear plate 13. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a transport device for a flat substrate such as a semiconductor substrate and a liquid crystal substrate, and more particularly to an air levitation transport device and an air transport method that can be transported stably without being damaged or damaged by being levitated by air. It is about.

  In general, various apparatuses have been proposed for conveying a flat plate while air levitation. For example, there is a floater shown in FIG. 6 (see Non-Patent Document 1). FIG. 6 (A) shows an overview of the floater, and FIG. 6 (B) shows a cross-sectional view of the floater (cross-sectional view in the traveling direction of the strip steel material).

  A floater 101 shown in FIG. 6 is provided with a pair of inwardly-facing slit nozzles 102 at its end, and ejects fluid in a direction parallel to the moving direction of the steel strip 103 to float the steel strip 103. The fluid ejected from the slit nozzle 102 generates a static pressure due to a change in momentum when the direction changes on the lower surface of the steel strip 103 and flows out, and the steel strip 103 is floated.

However, the floater 101 is for levitating a continuously-shaped conveyance object such as a steel strip 103. When the individual float substrate 101 such as a semiconductor substrate or a liquid crystal substrate is to be conveyed, the floater 101 is used. Therefore, there is a problem that the number of floaters 101 increases.
In addition, the upstream side and the downstream side in the transport direction of the continuously-shaped transported object are always supported, and the end of the transported object does not cross (over) the floater 101. However, there is a problem that the substrates undulate and vibrate between the floaters 101 and the end portions of the substrate collide with the floaters.

  In addition, there is a conventional substrate transfer apparatus (see Patent Document 1). The purpose of this substrate transfer apparatus is to carry in and out glass substrates stored in multiple stages at high density with arbitrary and minimum contamination. FIG. 7 shows the storage state of one glass substrate 110 among the glass substrates stored in multiple stages, and shows one edge portion of both side edge portions of the glass substrate 110. As shown in FIG. 7, the transport roller 113 transports the glass substrate 110 while supporting the glass substrate 110 at both side edges 110 a (transport in a direction perpendicular to the paper surface). Further, when the glass substrate 110 is transported, compressed air is sprayed between the glass substrate 110 supported by the transport roller 113 and the back plate 111 by the air ejection pipe 112.

However, the substrate transport apparatus of the above prior art blows air between the back plate 111 and the glass substrate 110 when transporting the glass substrate 110 while supporting the glass substrate 110 at both side edges 110a by the transport rollers 113, thereby The purpose is to prevent the face plate 111 and the glass substrate 110 from contacting each other, both ends are supported, most of the load on the substrate is received by the rollers at both ends, and the substrate is completely contactless. Not suitable for transport.
JP 2005-159141 A Takahara, Hirai, Tanizaki, Kanda, Tachihara, “Practical application of strip steel levitation conveyor for steel manufacturing process line”, Mitsubishi Heavy Industries Technical Report, Vol.29, No.1 (1992-1), p36-41

  As described above, various transport devices that can be transported without being damaged or damaged by being levitated by air have been proposed. However, recently, liquid crystal substrates and the like have been increased in size, and it has been difficult to say that it is sufficient as an air levitation transfer device that can stably transfer the liquid crystal substrate.

  The present invention has been made to solve such a problem, and its object is to select the number and arrangement of air levitation units according to the size and weight of a flat substrate such as a liquid crystal substrate. The levitation transfer device can be configured flexibly so that the flat substrate can be transferred in a stable state, and the manufacturing cost of the air levitation transfer device can be reduced by using an air levitation unit with a simple configuration. An object of the present invention is to provide an air levitation transfer device and an air transfer method.

The present invention has been made to solve the above-described problems, and an air levitation transport apparatus according to the present invention includes a plurality of air levitation units that form a transport path for a planar substrate, and ejects air from the air levitation unit. And an air levitation transport device that levitates and transports the planar substrate, wherein a plurality of rows of air levitation units in which the air levitation units are arranged in a line toward the transport direction of the planar substrate are arranged in parallel. The air levitation unit includes a mechanism for ejecting air from both side directions orthogonal to the transport direction of the planar substrate toward the lower surface of the planar substrate.
With such a configuration, a plurality of rows of air levitation units are arranged in parallel, and in each air levitation unit, air is ejected from both sides orthogonal to the plane substrate transport direction toward the lower surface of the plane substrate.
Accordingly, the plane substrate can be stably conveyed by selecting the number and arrangement of the air levitation units according to the size and weight of the plane substrate such as the liquid crystal substrate. In addition, since the air levitation unit having a simple configuration can be used, the manufacturing cost of the air levitation transport device can be reduced. Furthermore, by selecting the number and arrangement of the air levitation units, the air levitation transport device can be configured flexibly.

Moreover, the air levitation transport apparatus of the present invention is characterized in that the air levitation unit is arranged in two rails.
With such a configuration, the air levitation units are arranged in the form of two rails, so that the plane substrate can be stably levitated.

Moreover, the air levitation transport apparatus of the present invention is characterized in that the air levitation unit includes a mechanism for ejecting air from the downstream side in the transport direction of the planar substrate toward the lower surface of the planar substrate.
With such a configuration, air is ejected from the downstream side in the conveyance direction of the planar substrate toward the lower surface of the planar substrate, and the leading end of the planar substrate is lifted.
As a result, even when the flat substrate has low rigidity and a sagging portion occurs at the tip portion, the sagging portion can be lifted, so that the tip portion interferes with the air levitation unit when the plane substrate moves over the air levitation unit. Can be suppressed.

Moreover, the air levitation transport device of the present invention is such that the air levitation unit is
A mechanism is provided for ejecting air from the downstream side and the upstream side in the transport direction of the planar substrate toward the lower surface.
With such a configuration, air is ejected from the downstream side and the upstream side in the transport direction of the planar substrate toward the lower surface of the planar substrate, and the leading end of the planar substrate is lifted.
As a result, even if the rigidity of the flat substrate is small or the distance between the air levitation units is long, not only the downstream side in the conveyance direction of the flat substrate but also the flat substrate between the prayer and the air levitation unit from the upstream side. When the sagging occurs at the tip of the flat substrate being sent, the tip sacrificial portion of the flat substrate is lifted upward, resulting in the tip of the flat substrate being lifted up. Can be prevented from colliding with the air levitation unit.

In the air levitation transport apparatus according to the present invention, the air levitation unit includes a back plate that faces a lower surface of the flat substrate and forms a transport path of the flat substrate, and both side surfaces parallel to the transport path direction of the back plate. And a pair of air supply pipes having an inclined nozzle that ejects air toward the upper center of the back plate.
With such a configuration, the air supply pipes are arranged on both sides of the back plate that forms the conveyance path of the planar substrate, and air is ejected from the inclined nozzle provided on the air supply pipe toward the upper center of the back plate.
Thereby, the structure of an air levitation unit can be simplified.

In the air levitation transport apparatus according to the present invention, the air levitation unit is located on a side surface on the downstream side perpendicular to the transport path direction of the back plate, and air is directed upward or above the center portion of the back plate. And an air supply pipe having a nozzle for ejecting the gas.
With such a configuration, an air supply pipe is disposed on the downstream side of the back plate, and air is ejected from an inclined nozzle provided in the air supply pipe toward the upper side of the back plate or the upper center portion.
For this reason, it can suppress that a front-end | tip part interferes with an air floating unit, when a plane board | substrate transfers an air floating unit with the simple structure using an air supply pipe | tube.

In addition, the air transfer method of the present invention is composed of a plurality of air levitation units that form a transfer path for a planar substrate, and in an air levitation transfer apparatus that blows air from the air levitation unit to float and transfer the plane substrate. A method of air conveyance, wherein a plurality of rows of air levitation units in which the air levitation units are arranged in a line in the direction of conveyance of the planar substrate are arranged in parallel, and the plane levitation unit is conveyed by the air levitation unit. And a procedure of ejecting air from both sides orthogonal to the direction toward the lower surface of the planar substrate.
By such a procedure, a plurality of rows of air levitation units are arranged in parallel, and in each air levitation unit, air is ejected from both sides perpendicular to the transport direction of the planar substrate toward the lower surface of the planar substrate.
Accordingly, the plane substrate can be stably conveyed by selecting the number and arrangement of the air levitation units according to the size and weight of the plane substrate such as the liquid crystal substrate. In addition, since the air levitation unit having a simple configuration can be used, the manufacturing cost of the air levitation transport device can be reduced. Furthermore, by selecting the number and arrangement of the air levitation units, the air levitation transport device can be configured flexibly.

  In the air levitation transport device of the present invention, the air levitation transport device is flexibly configured by selecting the number and arrangement of air levitation units according to the size and weight of a flat substrate such as a liquid crystal substrate. The substrate can be transported in a stable state. In addition, since the air levitation unit having a simple configuration can be used, the manufacturing cost of the air levitation transport device can be reduced.

Next, the best mode for carrying out the present invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1 is a diagram showing a configuration example of a first embodiment of an air levitation transport apparatus according to the present invention. FIG. 1A is a diagram showing an example of an air levitation unit 1 that is a structural unit of an air levitation transport device of the present invention.
As shown in FIG. 1A, the air levitation unit 1 is configured by arranging a pair of air supply pipes 11 and 12 on both sides of a back plate 13. Compressed air is supplied to the air supply pipes 11 and 12. The air supply pipes 11 and 12 are provided with inclined nozzles 21, and are configured to eject air toward the diagonally upper side of the back plate 13 as indicated by arrows.

  As shown in FIG. 1B, air is ejected from the inclined nozzle 21 obliquely upward of the back plate 13 so that an air pool is formed between the flat substrate 10 to be transferred and the back plate 13. The flat substrate 10 is lifted from the back plate 13.

  FIG. 1C is a diagram showing a configuration example of the air levitation transport device of the present invention, in which the air levitation unit 1 is arranged in two rails toward the transport direction A of the flat substrate 10. . In the example shown in the figure, two rows of air levitation units 1 are shown. However, depending on the size and weight of the flat substrate 10, three or more rows may be used.

  With such a configuration, by arranging the air levitation units 1 having a simple configuration in parallel, the air levitation transport device can be flexibly configured according to the size and weight of the planar substrate 10. Further, each air levitation unit 1 has a simple configuration, and can reduce the manufacturing cost of the air levitation transport device.

[Second Embodiment]
2 and 3 are diagrams showing a configuration example of the second embodiment of the air levitation transport apparatus of the present invention.
FIG. 2A is a diagram illustrating a configuration example of the air levitation unit 2 in the second embodiment of the air levitation transport device.

  The air levitation unit 2 shown in FIG. 2A is obtained by adding an air supply pipe 31 to the front side of the back plate 13 of the air levitation unit 1 shown in FIG. It is. The air supply pipe 31 is provided with an inclined nozzle 32, and is inclined when the rigidity of the flat substrate 10 is small and the sagging portion 10a is generated at the tip of the flat substrate 10 as shown in FIG. Air is ejected obliquely upward from the back plate 13 from the nozzle 32 to lift the sagging portion 10a at the tip of the flat substrate 10 upward.

  As a result, as shown in FIG. 2C, when the flat substrate 10 is transferred from the air levitation unit 2 to the next air levitation unit, the sagging portion 10a at the tip of the flat substrate 10 is To prevent interference.

  FIG. 3 shows an example in which the air levitation unit 2 is configured by arranging the air levitation units 2 in a rail shape in the conveyance direction A of the flat substrate 10. In the example shown in the figure, two rows of air levitation units 2 are shown. However, depending on the size and weight of the flat substrate 10, three or more rows can be used.

  With such a configuration, by using a plurality of air levitation units 2 having a simple configuration, the air levitation transport device can be configured flexibly according to the size and weight of the planar substrate 10.

[Third embodiment]
4 and 5 are diagrams showing a configuration example of the third embodiment of the air levitation transport apparatus of the present invention.
FIG. 4A is a diagram illustrating a configuration example of the air levitation unit 2 in the third embodiment of the air levitation transport apparatus.

The air levitation unit 2 shown in FIG. 4 (A) supplies air to the front side and the rear side (downstream side and upstream side in the plane substrate conveyance direction) of the back plate 13 of the air levitation unit 1 shown in FIG. 1 (A). Tubes 31 and 31-1 are added. The air supply pipes 31 and 31-1 are provided with inclined nozzles 32 and 32-1. As shown in FIG. 4B, the rigidity of the flat substrate 10 is small, and the tip sagging portion of the flat substrate 10. When 10a occurs, air is ejected obliquely upward of the back plate 13 from the inclined nozzle 32-1, thereby lifting the tip substrate 10a of the flat substrate 10 upward. However, when the distance between the air levitation units is long or the rigidity of the substrate is small, for example, when the substrate reaches the next air levitation unit, sagging occurs, and a sufficient levitation amount cannot be obtained. May contact the levitation unit.
At this time, air is ejected from the inclined nozzle 32-1 between the substrate and the air floating unit from the upstream side of the substrate, thereby lifting the flat substrate 10 upward and avoiding collision between the flat substrate 10 and the air floating unit.

  As a result, as shown in FIG. 4C, when the flat substrate 10 is transferred from the air levitation unit 2 to the next air levitation unit, the sagging portion 10a at the tip of the flat substrate 10 is To prevent interference.

  FIG. 5 shows an example in which the air levitation transport device is configured by arranging the air levitation units 2 in a rail shape in the transport direction A of the flat substrate 10. In the example shown in the figure, two rows of air levitation units 2 are shown. However, depending on the size and weight of the flat substrate 10, three or more rows can be used.

  With such a configuration, by using a plurality of air levitation units 2 having a simple configuration, the air levitation transport device can be configured flexibly according to the size and weight of the planar substrate 10.

  Although the embodiment of the present invention has been described above, the air levitation unit 1 shown in FIG. 1A can be configured as shown in FIG. The air levitation unit 3 shown in FIG. 6A has an air supply path 41 and an inclined nozzle 42 formed in the back plate 13. Thereby, the air supply pipes 11 and 12 shown to FIG. 1 (A) are omissible. Note that FIG. 6B is a cross-sectional view in the AA ′ direction of FIG.

As shown in FIG. 7, the air supply pipe 31 and the inclined nozzle 32 shown in FIG. 2 can also be formed in the back plate 13. Similarly, although not shown, the air supply pipes 31, 31-1 and the inclined nozzles 32, 32-1 shown in FIG. 4 can also be formed in the back plate 13.
The air levitation unit 4 shown in FIG. 7 has a configuration in which an inclined nozzle 43 is added to the air supply path 41 with the air levitation unit 3 shown in FIG. 6 as a basic configuration.

  As mentioned above, although embodiment of this invention was described, the air levitation conveyance apparatus of this invention is not limited only to the above-mentioned illustration example, A various change can be added in the range which does not deviate from the summary of this invention. Of course.

It is a figure which shows the structural example of 1st Embodiment of an air levitation conveyance apparatus. It is a figure which shows the structural example of the air levitation unit in 2nd Embodiment of an air levitation conveyance apparatus. It is a figure which shows the structural example of 2nd Embodiment of an air levitation conveyance apparatus. It is a figure which shows the structural example of the air levitation unit in 3rd Embodiment of an air levitation conveyance apparatus. It is a figure which shows the structural example of 3rd Embodiment of an air levitation conveyance apparatus. It is a figure which shows the other structural example of an air floating unit. It is a figure which shows the other structural example of an air floating unit. It is a figure which shows the structure of the floater of a prior art. It is a figure which shows the structure of the board | substrate conveyance apparatus of a prior art.

Explanation of symbols

1, 2, 3, 4 Air floating unit 10 Planar substrate 11, 12 Air supply pipe 13 Back plate 21 Inclined nozzle 31, 31-1 Air supply pipe 32, 32-1 Inclined nozzle 41 Air supply path 42, 43 Inclined nozzle

Claims (7)

An air levitation transport device that is composed of a plurality of air levitation units that form a transport path for a planar substrate, jets air from the air levitation unit, and levitates and transports the planar substrate,
While arranging a plurality of rows of air levitation units arranged in a line in the direction of conveyance of the flat substrate in the air levitation unit,
The air levitation unit is provided with a mechanism for ejecting air from both sides orthogonal to the plane substrate transport direction toward the lower surface of the plane substrate. The air levitation transport device according to claim 1, wherein the air levitation unit is configured by arranging in two rails. The air levitation transport apparatus according to claim 1, wherein the air levitation unit includes a mechanism that ejects air from a downstream side in the transport direction of the planar substrate toward a lower surface of the planar substrate. The air levitation unit is
The air levitation transport apparatus according to claim 1, further comprising a mechanism for ejecting air from a downstream side and an upstream side in the transport direction of the planar substrate toward a lower surface. The air levitation unit is
A back plate facing the lower surface of the planar substrate and forming a transport path for the planar substrate;
A pair of air supply pipes having inclined nozzles that are located on both side surfaces parallel to the conveyance path direction of the back plate, and have an inclined nozzle that jets air toward the upper center of the back plate;
The air levitation transport apparatus according to any one of claims 1 to 4, further comprising: The air levitation unit is
It further comprises an air supply pipe having a nozzle that is located on the side of the downstream side perpendicular to the conveyance path direction of the back plate and that ejects air toward the upper side or the upper center of the back plate. The air levitation conveyance apparatus according to claim 5. An air conveyance method in an air levitation conveyance apparatus which is composed of a plurality of air levitation units forming a conveyance path of a planar substrate, ejects air from the air levitation unit and floats and conveys the planar substrate,
A procedure for arranging a plurality of rows of air levitation units in which the air levitation units are arranged in a line in the conveyance direction of the planar substrate,
A step of ejecting air from both sides orthogonal to the transport direction of the planar substrate toward the lower surface of the planar substrate by the air levitation unit;
An air conveyance method comprising:

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