JP2017186098A - Conveying method of glass substrate, glass substrate conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveying method of a glass substrate which can remove foreign matters adhered to a surface of the glass substrate while suppressing bending of the glass substrate during conveyance.SOLUTION: A conveying method of a glass substrate includes a step of floating the glass substrate, a step of conveying the floated glass substrate along a conveyance direction, and a step of blowing gas from an upper position than the conveyed glass substrate to a main surface on a first end part side, and sucking the gas flowing on a second end part side so that the gas flows from the first end part side to the second end part side on the main surface of the glass substrate. In the step of floating, first floating force for floating a first end part and second floating force for floating a second end part are adjusted so that the glass substrate is conveyed in an approximately horizontal posture. The first floating force is adjusted based on a reference pressure approximately equal to a pressing pressure which the first end part of the glass substrate receives from the gas in a thickness direction.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a glass substrate transport method and a glass transport device.

  A flat glass plate is used as a display part of a display such as a liquid crystal display device or a plasma display device. In the following description, such a glass plate is referred to as a flat panel display (FPD) glass substrate, or simply a glass substrate. For example, in a liquid crystal display device, a moving image can be displayed by changing the electric field applied to the liquid crystal sealed between the glass substrates and changing the orientation of the liquid crystal. Since it is necessary to change the electric field when displaying an image on the liquid crystal display device, a transparent electrode for applying a voltage is formed on the glass substrate.

  In liquid crystal display devices used in television receivers that require high-quality display in order to control the on / off of the voltage applied to the electrodes on the glass substrate, an active matrix system using thin film transistors (TFTs) is used. Control is adopted. This TFT is also formed on the glass substrate. Specifically, a liquid crystal display includes a TFT (Thin Film Transistor) that controls the amount of transmitted light, a liquid crystal, and a color filter as components. A method for manufacturing a color filter panel in a liquid crystal display usually forms a black matrix on the surface of a glass substrate, and then sequentially forms different hues of red, green, and blue in a striped or mosaic color pattern. Method is used.

  As the display becomes higher in definition, the line width and pitch of the black matrix arranged on the surface of the glass substrate are reduced. For example, in order to achieve a high contrast of the display, the aperture ratio is improved by increasing the fineness and definition of the black matrix (specifically, the line width of less than 20 μm) and the high dimensional accuracy of the black matrix. There is a need for improved light shielding. As the number of display pixels increases, the pattern size varies depending on the use of the color filter and each color. For example, red, green, and blue pixels are changed from 200 to 300 μm to 100 μm, and the black matrix is 20 μm. Fine wire technology has been developed from 10 μm to 5 μm.

  As described above, electrodes and active elements are formed by a very thin metal film or semiconductor on the glass surface of a glass substrate for a flat panel display. Therefore, the glass surface of the glass substrate has extremely high flatness and extremely high cleanliness. Sex is required.

  For transporting such glass substrates, a transport system using transport rollers is widely used. As an example of a conveyance method using a conveyance roller, for example, a method described in Patent Document 1 has been proposed. In Patent Document 1, a plurality of glass substrates are arranged at intervals along the conveyance direction of the glass substrate, and a conveyance roller having a plurality of rollers attached to a shaft is driven to rotate, whereby the glass substrate is placed on the conveyance roller. Are transported along the transport direction in a substantially horizontal posture.

JP 2008-285243 A

  The glass substrate is more easily bent as the plate thickness is thinner and the size is larger. When a thin or large glass substrate is transported using a conventional transport method, the glass substrate bends during transport, and the tip in the transport direction of the glass substrate is below the front roller. There was a case where it crawls in.

  On the other hand, in the glass substrate manufacturing process, foreign substances such as chips are generated in a cutting process for cutting a molded glass plate into a predetermined substrate size or an end surface processing process for processing the end surface of the glass substrate. It may adhere to the surface of the substrate. If foreign substances are present on the glass substrate, the pattern is not formed well, which causes a failure of the final product FPD. Moreover, the foreign material adhering to a glass substrate may cause a damage | wound on the surface of a glass substrate, and may reduce the mechanical strength of a glass substrate.

  An object of the present invention is to provide a method for transporting a glass substrate and a glass substrate transport apparatus capable of removing foreign matter adhering to the surface of the glass substrate while suppressing bending of the glass substrate being transported.

The present invention provides the following (1) to (4).
(1) maintaining a floating state of the glass substrate by spraying a fluid on the glass substrate to give a floating force to the glass substrate;
Conveying the glass substrate in one direction while maintaining the floating state;
The first of the directions along the one direction or the direction intersecting with the one direction so that the gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction intersecting with the one direction. On the side, blowing out the gas on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, and sucking in the gas that has flowed to the second side opposite to the first side; With
In the step of maintaining the floating state, a portion of the first region of the glass substrate located on the first side of the floating force is levitated so that the glass substrate is transported in a substantially horizontal posture. Adjusting a first levitation force and a second levitation force for levitating a portion of the second region of the glass substrate located on the second side;
Based on a reference pressure that is substantially equivalent to the pressing pressure that the first region of the glass substrate receives in the thickness direction from the gas, a first levitation force that is applied to the first region that receives the pressing pressure is provided. A method for transporting a glass substrate, characterized by adjusting.

(2) A levitation unit that maintains a floating state of the glass substrate by spraying a fluid onto the glass substrate to give a levitation force to the glass substrate;
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state;
The first of the directions along the one direction or the direction intersecting with the one direction so that the gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction intersecting with the one direction. On the side, blow-out suction for blowing out the gas on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, and sucking in the gas that has flowed to the second side opposite to the first side A unit,
The levitation unit levitates a portion of the first region of the glass substrate located on the first side of the levitation force so that the glass substrate is conveyed in a substantially horizontal posture. An adjustment mechanism for adjusting a force and a second levitation force for levitating a portion of the second region of the glass substrate located on the second side;
The adjusting mechanism is configured to perform the first based on a reference pressure that is substantially equivalent to a pressing pressure that the portion of the first region receives in the plate thickness direction from the gas at a position on the transport path where the gas is blown out. A glass substrate transfer device characterized by adjusting a floating force.

(3) applying a levitation force to the glass substrate to maintain the levitation state of the glass substrate;
Conveying the glass substrate in one direction while maintaining the floating state;
The main surface on the opposite side of the main surface of the glass substrate to which the levitation force is applied so that gas flows in a direction along the one direction or in a direction crossing the one direction on the main surface of the glass substrate. Blowing out gas, and
In the step of maintaining the floating state, the floating force applied to the region of the glass substrate that receives the pressing pressure that the glass substrate receives in the thickness direction from the gas is adjusted so that the glass substrate is conveyed in a substantially horizontal posture. A method for transporting a glass substrate.

(4) A levitation unit that applies a levitation force to the glass substrate and maintains the levitation state of the glass substrate;
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state;
The main surface on the opposite side of the main surface of the glass substrate to which the levitation force is applied so that gas flows in a direction along the one direction or in a direction crossing the one direction on the main surface of the glass substrate. A blowing unit for blowing out gas,
The levitation unit has a reference pressure substantially equal to a pressing pressure received in the plate thickness direction from the gas at a position on the conveyance path where the gas is blown out so that the glass substrate is conveyed in a substantially horizontal posture. An apparatus for transporting a glass substrate, comprising an adjusting mechanism for adjusting the levitation force based on the adjusting mechanism.

  ADVANTAGE OF THE INVENTION According to this invention, the foreign material adhering to the surface of a glass substrate can be removed, suppressing the bending of the glass substrate in conveyance.

It is a figure which shows an example of the process of the manufacturing method of a glass substrate. It is a figure which shows the outline of a glass substrate conveying apparatus. It is a figure which shows a glass substrate conveying apparatus seeing from the side. It is a perspective view which shows a glass substrate conveying apparatus. (A) is a perspective view which shows the modification of a glass substrate conveying apparatus, (b) is a perspective view which shows another modification of a glass substrate conveying apparatus. It is a perspective view explaining another modification of a glass substrate conveying device. It is a figure which shows the glass substrate conveying apparatus of FIG. 6 seeing from upper direction.

Hereinafter, the glass substrate transport method and the glass substrate transport apparatus of the present embodiment will be described.
(1) Outline of Manufacturing Method of Glass Substrate The glass substrate manufactured in the present embodiment is used for a flat panel display (FPD) such as a liquid crystal display, a plasma display, and an organic EL display. For example, the glass substrate G has a thickness of 0.2 mm to 0.8 mm, and a size of 680 mm to 2200 mm in length and 880 mm to 2500 mm in width.

  An example of the glass substrate G includes glass having the following composition.

(A) SiO ₂ : 50% by mass to 70% by mass,
(B) Al ₂ O ₃ : 10% by mass to 25% by mass,
(C) B ₂ O ₃ : 5% by mass to 18% by mass,
(D) MgO: 0% by mass to 10% by mass,
(E) CaO: 0% by mass to 20% by mass,
(F) SrO: 0% by mass to 20% by mass,
(G) BaO: 0% by mass to 10% by mass,
(H) RO: 5% by mass to 20% by mass (R is at least one selected from Mg, Ca, Sr and Ba),
(I) R ′ ₂ O: 0% by mass to 2.0% by mass (R ′ is at least one selected from Li, Na and K),
(J) At least one metal oxide selected from SnO ₂ , Fe ₂ O ₃ and CeO ₂ .

  The glass having the above composition is allowed to contain other trace components in the range of less than 0.1% by mass.

  FIG. 1 is an example of a flowchart showing a manufacturing process of the glass substrate G. The manufacturing process of the glass substrate G mainly includes a forming process (step S1), a plate-making process (step S2), a cutting process (step S3), an end face processing process (step S4), and a roughening process (step). S5), a cleaning process (step S6), an inspection process (step S7), and a packing process (step S8).

  In the forming step S1, a glass sheet is continuously formed from a molten glass obtained by heating a glass raw material by a downdraw method or a float method. The molded glass sheet is cooled to a glass annealing point or lower while the temperature is controlled so that distortion and warpage do not occur.

  In the plate-drawing step S2, the glass sheet formed in the forming step S1 is cut to obtain a base plate glass having a predetermined dimension.

  In the cutting step S3, the raw glass obtained in the plate-drawing step S2 is cut to obtain a product-sized glass substrate G. Generally, a base glass is cut | disconnected using a cutter or a laser.

  In the end surface processing step S4, the end surface processing of the glass substrate G obtained in the cutting step S3 is performed. The end face processing is, for example, polishing and grinding of the end face of the glass substrate G, and corner cutting of the glass substrate G.

  In the roughening step S5, a roughening process is performed to increase the surface roughness of the glass substrate G that has been subjected to the end face processing in the end face processing step S4. The roughening treatment of the glass substrate G is, for example, wet etching using an etchant containing hydrogen fluoride.

  In the cleaning step S6, the glass substrate G that has been subjected to the roughening process in the roughening step S5 is cleaned. On the glass substrate G, foreign substances such as minute glass pieces generated by cutting the base glass and end face processing of the glass substrate G, and organic substances existing in the atmosphere are attached. By cleaning the glass substrate G, these foreign substances are removed.

  In the inspection step S7, the glass substrate G cleaned in the cleaning step S6 is inspected. Specifically, scratches and cracks existing on the surface of the glass substrate G, foreign matters adhering to the surface of the glass substrate G, and minute particles existing inside the glass substrate G while the glass substrate G is being conveyed. A defect such as a bubble is detected optically.

  In the packing step S8, the glass substrate G that has passed the inspection in the inspection step S7 is stacked and packed on the pallet alternately with the slip sheet for protecting the glass substrate G. The packed glass substrate G is shipped to an FPD manufacturer or the like.

  The glass substrate transport method of the present embodiment is performed after, for example, each of the plate-drawing step (S2), the cutting step (S3), and the end face processing step (S4). FIG. 2 schematically shows the conveyance of the glass substrate G performed after the cutting step (S5) as an example. The cutting step (S3) is performed by the cutting device 10 arranged in the cutting zone 1 in the example shown in FIG. The glass substrate G is transported along the transport direction (X direction) so as to pass through the cutting zone 1 after the cutting step (S3) and before the end face processing step (S4). The glass substrate G transported to the cutting zone 1 is subjected to end surface processing by the cutting device 10 in a state where transport is stopped or while being transported, and the glass substrate G subjected to end surface processing is transported downstream and cut. Unload from Zone 1 The glass substrate transport apparatus that performs the glass substrate transport method of the present embodiment is disposed on the downstream side of the cutting device 10 in the cutting zone 1 in the example shown in FIG.

(2) Details of Glass Substrate Conveying Device The glass substrate conveying device of the present embodiment conveys a glass substrate while maintaining a floating state by applying a floating force to the glass substrate and maintaining the floating state of the glass substrate. A transport unit that transports in one direction along the path, and a main surface of the glass substrate to which a levitation force is applied so that a gas flows on the main surface of the glass substrate in a direction along one direction or in a direction crossing the one direction. A blowout unit that blows out gas on the opposite main surface side (for example, toward the main surface), and the levitation unit has a conveyance path through which gas is blown so that the glass substrate is conveyed in a substantially horizontal posture. In the upper position, an adjustment mechanism is provided that adjusts the levitation force based on a reference pressure substantially equal to the pressing pressure received from the gas in the thickness direction.
In this glass substrate transport device, gas is blown out on the main surface side opposite to the main surface to which the levitation force is applied, among the main surfaces of the glass substrate that is transported while being kept in a floating state. The gas flows in a direction along the transport direction (one direction) or in a direction crossing the transport direction. The gas flow comes into contact with the foreign matter attached to the main surface of the glass substrate, so that the foreign matter is removed from the main surface. On the other hand, by adjusting the levitation force applied to the glass substrate as described above, the portion of the glass substrate that has been subjected to pressing pressure from the blown-out gas is suppressed from sinking against the levitation force. . For this reason, generation | occurrence | production of the bending of a glass substrate is suppressed and a glass substrate can be conveyed with a substantially horizontal attitude | position. That is, according to this embodiment, the foreign material adhering to the surface of a glass substrate can be removed, suppressing the bending of the glass substrate in conveyance. In addition, as an aspect which blows off gas by the side of the main surface, the aspect in which at least one part of the blown-out gas is sprayed on the said main surface other than the aspect which blows off gas toward the said main surface is included. In addition, when referring to the main surface side, a position in a plane extending in a direction parallel to the main surface and outside the end of the glass substrate is also included in the main surface side.

  The glass substrate transport apparatus 100 according to the present embodiment will be described more specifically with reference to FIGS. 3, 4, and 7. FIG. 3 is a diagram showing the glass substrate transport apparatus 100 as viewed from the side (in the Y direction in FIG. 7). FIG. 4 is a perspective view showing the glass substrate transfer device. FIG. 7 is a view showing a modified example of the glass substrate transport apparatus 100 as viewed from above. The glass substrate transport apparatus 100 mainly includes a levitation unit 20, a transport unit 30 (see FIG. 7), and a blowout suction unit 50. The levitation unit 20 is configured similarly in the modification of FIG. 7, and will be described with reference to FIG. 7 for convenience. 3 and 4, the illustration of the transport unit 30 is omitted. 3 and 7, the blowout suction unit 50 is not shown. 3, 4, and 7, the horizontal direction in a plane orthogonal to the transport direction (X direction) of the glass substrate G is the width direction (Y direction) of the glass substrate G, and the transport direction of the glass substrate G A vertical direction in a plane orthogonal to the plane is the thickness direction (Z direction) of the glass substrate G. In the following description, an end portion of the glass substrate G parallel to the conveyance direction of the glass substrate G is referred to as a side end portion, and an end portion parallel to the width direction of the glass substrate G is referred to as a front end portion and a rear end portion. In addition, the side edge part G1 (refer FIG. 6) and the side end part G2 (refer FIG. 6) of a glass substrate do not need to be mutually parallel.

(2-1) Levitation unit The levitation unit 20 is a unit that levitates the glass substrate G by blowing gas onto the lower surface of the glass substrate G conveyed in a substantially horizontal posture. The horizontal posture means the posture of the glass substrate G in which the thickness direction of the glass substrate G coincides with the vertical direction, in other words, the posture of the glass substrate G in which the main surface of the glass substrate G faces the vertical direction. In addition to the horizontal posture, the substantially horizontal posture includes a posture in which the thickness direction of the glass substrate G is inclined within a range of ± 10 degrees with respect to the vertical direction. In the following description, the main surface facing upward is referred to as the upper surface among the main surfaces of the glass substrate G, and the main surface facing downward is referred to as the lower surface.

The levitation unit 20 includes a plurality of float panels 22 (see FIG. 7) and an adjustment mechanism 26.
In the example shown in FIG. 7, the plurality of float panels 22 form a row of float panels 22 arranged along the conveyance direction of the glass substrate G, and the rows of the float panels 22 extend in the width direction of the glass substrate G. A float panel array 24 arranged along the line is formed. Rows of float panels 22 adjacent in the width direction are connected by a connecting member 28. The upper surfaces of all the float panels 22 constituting the float panel array 24 are located at the same height, and one flat surface facing the glass substrate G to be conveyed is formed. In the example shown in FIG. 7, the position of the float panel 22 in the transport direction is offset between the rows of float panels 22 adjacent in the width direction.
The float panel 22 is made of, for example, a porous material or a solid metal material in which a large number of holes are formed. The porous material is obtained by molding and sintering a material such as carbon, alumina, or zirconia. In FIG. 3, the float panel array 24 shows only a partial region along the transport direction of the glass substrate G.

As illustrated in FIG. 3, the float panel 22 includes an ejection mechanism 22 a and a suction mechanism 22 c.
The ejection mechanism 22 a is a mechanism that ejects gas upward of the float panel 22. The ejection mechanism 22a ejects gas from a large number of minute holes formed on the surface of the float panel 22, for example. The gas is, for example, compressed air. In FIG. 3, the ejection mechanism 22 a is shown to be located at two places on one float panel 22 for convenience. The jetted gas is blown onto the lower surface of the glass substrate G being transported. Thereby, the conveyed glass substrate G receives an upward force and floats from the upper surface of the float panel 22. The gas ejected from the ejection mechanism 22a is not limited to air, and may be nitrogen gas, rare gas, or the like, for example. Moreover, the ejection mechanism 22a may eject liquids, such as water, instead of gas.

  The suction mechanism 22 c is a mechanism that sucks gas into the float panel 22 from the upper surface of the float panel 22. The suction mechanism 22c sucks gas from a hole opened on the upper surface side of the float panel 22, for example. When the gas is sucked by the suction mechanism 22c, the space near the suction mechanism 22c is in a negative pressure state between the lower surface of the glass substrate G to be transported and the upper surface of the float panel 22. Thereby, the conveyed glass substrate G receives a downward force. This downward force has a function of forcing the shape of the glass substrate G to be conveyed to some extent. The resultant force of the upward force generated by the ejection mechanism 22a and the downward force generated by the suction mechanism 22c, which is generated in the region of the float panel array 24 facing the glass substrate G being conveyed, is a levitation force that causes the glass substrate G to float. The levitation force is a force that points upward in the vertical direction. When the flying force is applied to the glass substrate G, the floating state of the glass substrate G is maintained.

  The dimension in the width direction of the float panel array 24 is longer than the dimension in the width direction of the glass substrate G. The dimension in the conveyance direction of the float panel 22 is, for example, 100 mm to 150 mm. The distance between the lower surface of the floating glass substrate G and the upper surface of the float panel 22 is, for example, 25 μm to 35 μm. In FIG. 3, the distance between the glass substrate G and the float panel 22 is exaggerated.

The adjustment mechanism 26 is a side (first side) on which a blowing device 51 (described later) is arranged with respect to a suction device 52 (described later) of the blowing suction unit 50 so that the glass substrate G is conveyed in a substantially horizontal posture. Area of the glass substrate G of the glass substrate G and the area of the glass substrate G on the side (second side) on which the suction device 52 is disposed with respect to the blowing device 51 This is a mechanism for adjusting the second levitation force for levitating the portion (second portion). A 1st part is a part of the area | region of the glass substrate G where the gas blown from the blowing apparatus 51 (after-mentioned) of the blowing suction unit 50 is sprayed in the example shown by FIG. In the example shown in FIG. 4, the second part is an area located at a distance from the first part on the downstream side in the transport direction, and has the same width direction position as the area where the first part is located. Part of the region. The length in the width direction in which each of the first part and the second part extends is, for example, 1/10 to 1/3 of the interval in the transport direction between the blowing device 51 and the suction device 52. is there.
Specifically, the adjusting mechanism 26 controls the first levitation force and the second levitation force by controlling the pressure of the gas ejected from the ejection mechanism 22a and the gas suction pressure by the suction mechanism 22c. . More specifically, the adjusting mechanism 26 adjusts the first levitation force based on a reference pressure that is substantially equivalent to a pressing pressure (described later) that the first portion receives in the thickness direction from the gas. The levitation force and the second levitation force are adjusted. A specific adjustment method will be described later.

  In the glass substrate transport apparatus 100 shown in FIG. 4, the glass substrate G that is levitated and transported is supported by rollers 40 arranged on the upstream side and the downstream side in the transport direction with the float panel array 24 interposed therebetween.

(2-2) Transport Unit The transport unit 30 is a unit that transports the glass substrate G levitated by the levitation unit 20 along the transport direction. As shown in FIG. 7, the transport unit 30 mainly includes a holding unit 32 and a transport unit 34.

  The holding part 32 holds the end of the glass substrate G (the side end G1 in FIG. 7). The holding unit 32 includes, for example, a suction mechanism for holding the glass substrate G. The transport unit 34 includes a linear drive mechanism that moves the holding unit 32 along the transport direction.

(2-3) Blow-out Suction Unit The blow-out suction unit 50 is a gas from the position above the glass substrate G transported by the transport unit 30 toward the upper surface of the glass substrate G on the first side of the glass substrate G. Is a unit that sucks in the gas that has flowed toward the second portion. The blowout suction unit 50 specifically blows out and sucks gas so that the gas flows on the upper surface of the glass substrate G from the first side to the second side. The direction in which the gas flows is the direction along the conveying direction of the glass substrate G in the example shown in FIG. 4, but the airflow that flows from the side on which the blowing device 51 is disposed to the side on which the suction device 52 is disposed. If formed, the direction in which the gas flows may be inclined with respect to the glass transport direction or the width direction. Further, there may be a plurality of gas flowing directions. In this case, as indicated by a plurality of arrows pointing in the width direction in FIG. 5A, the directions in which the adjacent gases flow may be opposite to each other, and in FIG. As indicated by the arrows, the upstream and downstream sides of the blowing device 51 may be opposite to each other. 5A is a perspective view showing a modification of the glass substrate transport apparatus 100, and FIG. 5B is a perspective view showing another modification of the glass substrate transport apparatus 100. As shown in FIG. The blowout suction unit 50 shown in FIG. 5A has a plurality of blowout devices 51 and a plurality of suction devices 52. The blowing device 51 blows gas to both sides in the width direction. In FIG.5 (b), the suction apparatus 52 blows off gas to the both sides of a conveyance direction. The blowout suction unit 50 shown in FIG. 5B has one blowout device 51 and a plurality of suction devices 52.

The blowout suction unit 50 includes a blowout device 51 and a suction device 52.
The blowing device 51 is a device that blows gas toward the upper surface of the glass substrate G. The gas is, for example, air, nitrogen gas, rare gas, or the like. The blow-out device 51 has a blow-out opening 51a (see FIG. 6) opened so as to extend along the width direction of the glass substrate G. FIG. 6 is a perspective view illustrating still another modified example of the glass substrate transport apparatus 100. The blower outlet 51a is located above the glass substrate G to be transported and in the vicinity of the glass substrate G. In the example shown in FIG. 4, the width direction region exceeds the width direction region of the glass substrate G to be transported. Is located over. When the gas is blown out from the blowing device 51, a pressing pressure directed downward in the thickness direction of the blown gas pressure acts on the first portion of the glass substrate G to be conveyed. In addition, the blowing device 51 is arrange | positioned so that it may not contact with the holding | maintenance part 32 which moves to a conveyance direction. The pressure of the gas blown out from the blowing device 51 is preferably higher than the blowing pressure generally used in air knives in order to increase the foreign substance removing power.

The suction device 52 is a device that sucks in gas that has been blown out from the blowing device 51 and has flowed to the second side on the upper surface of the glass substrate G. A gas flow flowing from the first side toward the second side is formed on the upper surface of the glass substrate G to be transported by sucking the gas by the suction device 52. The foreign matter adhering to the glass substrate G is detached from the glass substrate G and removed by coming into contact with the gas flow. The foreign matter is, for example, a minute glass piece (chip) generated by sampling, cutting, or end face processing of a glass substrate, dust present in the atmosphere, or the like.
The suction device 52 has a suction port 52a that is opened so as to extend along the width direction of the glass substrate G. In the example shown in FIG. 4, the suction port 52 a is disposed at substantially the same vertical position as the blowing device 51.

The blowing amount of the blowing device 51 and the suction amount of the suction device 52 may be equal, and the suction amount of the suction device 52 may be larger than the blowing amount of the blowing device 51. Further, in the example shown in FIG. 4, the blowout suction unit 50 is fixed at a predetermined position on the conveyance path of the glass substrate G, but may be configured to move in the conveyance direction. In this case, for example, by temporarily stopping the conveyance of the glass substrate G and moving the blow-in suction unit 50 in the conveyance direction, the foreign substances can be removed over the entire glass substrate G in the conveyance direction.
Moreover, the blowing suction unit 50 may be arrange | positioned in the several position on a conveyance path | route. In this case, the arrangement positions of the blowing device and the suction device may differ between the blowing and suction units 50. For example, contrary to the example shown in FIG. 4, the blowing device 51 may be disposed on the second side, and the suction device 52 may be disposed on the first side. Further, the blowout amount and the suction amount may be different between the blowout suction units 50.
Moreover, in order to vibrate and remove the foreign material adhering to the glass substrate G, the blowing device 51 may further emit ultrasonic waves in addition to blowing out gas.

Next, the conveyance method of the glass substrate of this embodiment is demonstrated.
The method for transporting a glass substrate according to the present embodiment includes a step of applying a floating force to the glass substrate to maintain the floating state of the glass substrate, a step of transporting the glass substrate in one direction while maintaining the floating state, and a glass substrate. On the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied so that the gas flows on the main surface of the glass substrate in a direction along one direction or crossing the one direction (for example, toward the main surface) A step of blowing out gas, and in the step of maintaining the floating state, the glass substrate is applied to the region of the glass substrate that receives the pressing pressure that the glass substrate receives from the gas in the thickness direction so that the glass substrate is conveyed in a substantially horizontal posture. Adjust the levitation force applied.
In this method of transporting a glass substrate, gas is blown out on the main surface side opposite to the main surface to which levitation force is applied, among the main surfaces of the glass substrate that is transported while being kept in a floating state. The gas flows in a direction along the transport direction (one direction) or in a direction crossing the transport direction. The gas flow comes into contact with the foreign matter attached to the main surface of the glass substrate, so that the foreign matter is removed from the main surface. On the other hand, by adjusting the levitation force applied to the glass substrate as described above, the portion of the glass substrate that has been subjected to pressing pressure from the blown-out gas is suppressed from sinking against the levitation force. . For this reason, generation | occurrence | production of the bending of a glass substrate is suppressed and a glass substrate can be conveyed with a substantially horizontal attitude | position. That is, according to this embodiment, the foreign material adhering to the surface of a glass substrate can be removed, suppressing the bending of the glass substrate in conveyance. In addition, as an aspect which blows off gas by the side of the main surface, the aspect in which at least one part of the blown-out gas is sprayed on the said main surface other than the aspect which blows off gas toward the said main surface is included. In addition, when referring to the main surface side, a position in a plane extending in a direction parallel to the main surface and outside the end of the glass substrate is also included in the main surface side.

More specifically, the method for transporting the glass substrate of the present embodiment will be described.
In the example shown in FIG. 2, when the end face processing step (S4) is completed, the glass substrate G is transported along the transport direction by the glass substrate transport device 100. Specifically, the glass substrate G is maintained at a predetermined flying height from the upper surface of the float panel array 24 by the gas blown from the flying unit 20 while being supported by the roller 40. By being conveyed in this state, the glass substrate G is conveyed while maintaining the floating state. And the glass substrate G contacts the airflow which flows in the predetermined position on a conveyance path | route from the 1st part side to the 2nd part side formed by the blowing suction unit 50. Foreign substances such as glass dust adhering to the upper surface are detached from the upper surface of the glass substrate G and removed.

  At this time, a pressing pressure acts on the first portion of the glass substrate G downward in the thickness direction by the gas blown out by the blowing device 51, and the first portion tends to sink downward. The adjusting mechanism 26 adjusts the first levitation force and the second levitation force in order to suppress such sinking. Specifically, the first levitation force and the second levitation force are adjusted by adjusting the first levitation force based on a reference pressure substantially equal to the pressing pressure. The reference pressure substantially equivalent to the pressing pressure refers to a pressure whose pressure is approximately the same as the pressing pressure and whose direction is opposite to the pressing pressure. The fact that the magnitudes of pressure are substantially equal means that the magnitude of the reference pressure is within a range of ± 10% of the absolute value of the pressing pressure, for example. Further, adjusting the first levitation force based on the reference pressure is specifically based on a force calculated by multiplying the reference pressure by the area of the region of the first portion where the gas is blown out. It means adjusting the first levitation force. The area of the region of the first part is calculated by, for example, multiplying the length in the width direction of the first part by the length in the transport direction of the first part. Specifically, the first levitation force is the upward force generated by the gas ejected from the ejection mechanism 22a in the region of the float panel array 24 facing the first portion, and the gas is sucked by the suction mechanism 22c. It is the resultant force with the downward force generated by this. As a specific aspect of adjusting the first levitation force based on the reference pressure, adjusting the ejection mechanism 22a and the suction mechanism 22c so that the first levitation force becomes equal to the calculated force. Can be mentioned. By adjusting the first levitation force based on the reference pressure in this way, the flying height of the first portion can be maintained against the pressing force, and the glass substrate G is maintained in a substantially horizontal state. be able to. The adjustment of the first levitation force can be performed, for example, while measuring the levitation height of the first portion from the upper surface of the float panel array 24.

  By adjusting the first levitation force in this way, the first portion of the glass substrate G is suppressed from sinking downward, and the bending of the glass substrate G is suppressed. Thereby, the glass substrate G can be conveyed with a substantially horizontal attitude | position. According to this embodiment, the foreign material adhering to the surface of the glass substrate G can be removed, suppressing the bending of the glass substrate G in conveyance.

  The adjustment of the first levitation force and the second levitation force by the adjusting mechanism 26 is performed by adjusting the second levitation force relative to the first levitation force by performing the first levitation force. It is also included. That is, only the first levitation force is adjusted, and the second levitation force may not be adjusted. On the other hand, both the first levitation force and the second levitation force may be adjusted. The adjustment of the second levitation force can be performed by adjusting the ejection mechanism 22a and the suction mechanism 22c in the area of the float panel array 24 facing the second portion or the blowing device 51.

The first levitation force can be adjusted by adjusting at least one of the ejection mechanism 22a and the suction mechanism 22c in order to maintain an adsorption force that does not cause the glass substrate G to blow off. Further, in order to accurately adjust the first levitation force, the adjustment mechanism 26 is provided for each of the ejection mechanism 22a and the suction mechanism 22c that are located in the same transport direction position among the ejection mechanism 22a and the suction mechanism 22c that exist in the transport direction. The first levitation force may be adjusted.
The adjustment by the adjustment mechanism 26 is not limited to the adjustment of the second levitation force of the first levitation force, but includes adjustment of the levitation force in the region excluding the first portion and the second portion. Alternatively, adjustment of the levitation force that causes the entire glass substrate G to float may be used.

With reference to FIG. 6, the modification of the glass substrate conveying apparatus 100 is demonstrated.
The configuration of this modified example and the method for transporting the glass substrate performed by the modified example are the same as those in the above embodiment except for the following explanation.
In addition, in FIG. 6, illustration of the conveyance unit 30 is abbreviate | omitted. Further, in the float panel array 24 shown in FIG. 6, regions including both ends of the region in the width direction of the glass substrate G are omitted in order to easily explain the blowout suction unit 50. In FIG. 6, the distance between the glass substrate G and the float panel 22 is exaggerated.

  The adjustment mechanism 26 of this modified example has a first levitation force for levitating one side end G1 (first end) of the glass substrate G so that the glass substrate G is conveyed in a substantially horizontal posture, This is a mechanism for adjusting the second levitation force that causes the other side end G2 (second end) to float. The side edge part G1 and the side edge part G2 are parts including the edge of the width direction of the glass substrate G, and say the part extended toward the inner side of the width direction from the edge of the width direction. The length in the width direction in which each of the side end G1 and the side end G2 extends is, for example, 1/10 to 1/3 the length in the width direction of the glass substrate G, for example, in the width direction. It is a length of more than 0 mm and 40 mm or less in the width direction from the end. In FIG. 6, the side end G1 is indicated by a region where gas is blown out by a blow-in and suction unit 50 described later, and the side end G2 is indicated by a region in the same conveyance direction position as this region.

  The transport unit is the transport unit 30 described above.

  The blowout suction unit 50 ejects gas toward the upper surface of the glass substrate G from a position above the glass substrate G transported by the transport unit 30 on the side end G1 side of the glass substrate G. It is a unit that sucks in gas that has flowed to the side of the part G2. The blowout suction unit 50 specifically blows out and sucks gas so that the gas flows on the upper surface of the glass substrate G from the side end G1 side to the side end G1 side. In addition, although the direction through which gas flows is a direction along the width direction of the glass substrate G in the example shown by FIG. 6, the suction apparatus 52 is from the width direction side (1st side) in which the blowing apparatus 51 was arrange | positioned. If the airflow that flows on the side in the width direction (second side) where the gas is disposed is formed, the direction of gas flow is the X direction side or the X direction with respect to the glass transport direction or the width direction. The direction may be inclined to the opposite side.

The blowout suction unit 50 includes a blowout device 51 and a suction device 52.
The blowing device 51 is a device that blows gas toward the upper surface of the glass substrate G. The gas is, for example, air, nitrogen gas, rare gas, or the like. The blow-out device 51 has a blow-out opening 51 a that is opened so as to extend along the conveyance direction of the glass substrate G. The blower outlet 51a is located above the glass substrate G to be conveyed, and in the example shown in FIG. 6, is located outside the width direction of the glass substrate G to be conveyed. When the gas is blown out from the blowing device 51, a pressing pressure directed downward in the thickness direction acts on the side end portion G1 of the glass substrate G to be conveyed, in a size corresponding to the pressure of the blown gas. . In addition, the blowing device 51 is arrange | positioned so that it may not contact with the holding | maintenance part 32 which moves to a conveyance direction.

The suction device 52 is a device that sucks in gas that is blown out from the blowing device 51 and flows on the upper surface of the glass substrate G toward the side end portion G2. When the gas is sucked in by the suction device 52, a gas flow that flows from the side end G1 side toward the side end G2 side is formed on the upper surface of the glass substrate G to be transported.
The suction device 52 has a suction port 52a opened so as to extend along the transport direction of the glass substrate G. In the example shown in FIG. 6, the suction port 52 a is disposed at substantially the same vertical position as the glass substrate G to be transported, and is located outside the width direction of the glass substrate G to be transported.

In the example shown in FIG. 6, the blowout suction unit 50 is fixed at a predetermined position on the conveyance path of the glass substrate G, but may be configured to move in the conveyance direction. In this case, for example, the conveyance of the glass substrate G is temporarily stopped by the conveyance unit 34, and the blowout suction unit 50 is moved in the conveyance direction, so that the glass substrate G is removed in the entire conveyance direction. Can do.
Further, in the blowout suction unit 50, for example, in contrast to the example shown in FIG. 6, the blowout device 51 is arranged on the side end G2 side, and the suction device 52 is arranged on the side end G1 side. Also good.

  In the modification shown in FIG. 6, the glass substrate G is held at the side end G1 by the holding unit 32 and is floated to a predetermined flying height from the upper surface of the float panel array 24 by the gas blown from the floating unit 20. Is maintained. By being transported by the transport unit 34 in this state, the glass substrate G is transported while maintaining a floating state. And the glass substrate G contacts the airflow which flows in the predetermined position on a conveyance path | route from the side edge part G1 side to the side edge part G2 side formed by the blowing suction unit 50, and the glass substrate G Foreign substances such as glass dust adhering to the upper surface are detached from the upper surface of the glass substrate G and removed.

  At this time, a pressing pressure acts on the side end G1 of the glass substrate G downward in the thickness direction by the gas blown out by the blowing device 51, and the side end G1 tends to sink downward. The adjusting mechanism 26 adjusts the first levitation force and the second levitation force in order to suppress such sinking. Specifically, the first levitation force and the second levitation force are adjusted by adjusting the first levitation force based on a reference pressure substantially equal to the pressing pressure. The reference pressure substantially equivalent to the pressing pressure refers to a pressure whose pressure is approximately the same as the pressing pressure and whose direction is opposite to the pressing pressure. The fact that the magnitudes of pressure are substantially equal means that the magnitude of the reference pressure is within a range of ± 10% of the absolute value of the pressing pressure, for example. Further, adjusting the first levitation force based on the reference pressure is specifically based on a force calculated by multiplying the reference pressure by the area of the region of the side end G1 where the gas is blown out. It means adjusting the first levitation force. Specifically, the first levitation force is the upward force generated by the gas ejected from the ejection mechanism 22a in the region of the float panel array 24 facing the side end G1, and the gas is sucked by the suction mechanism 22c. It is the resultant force with the downward force generated by this. As a specific aspect of adjusting the first levitation force based on the reference pressure, adjusting the ejection mechanism 22a and the suction mechanism 22c so that the first levitation force becomes equal to the calculated force. Can be mentioned. Thus, by adjusting the first levitation force based on the reference pressure, the flying height of the side end G1 can be maintained against the pressing force, and the glass substrate G is maintained in a substantially horizontal state. be able to. The adjustment of the first levitation force can be performed, for example, while measuring the flying height of the side end G1 from the upper surface of the float panel array 24.

  By adjusting the first levitation force in this way, the side end portion G1 of the glass substrate G is suppressed from sinking downward, and the bending of the glass substrate G is suppressed. Thereby, the glass substrate G can be conveyed with a substantially horizontal attitude | position. According to this embodiment, the foreign material adhering to the surface of the glass substrate G can be removed, suppressing the bending of the glass substrate G in conveyance.

  The second levitation force can be adjusted by adjusting the ejection mechanism 22a and the suction mechanism 22c in the region of the float panel array 24 that faces the side end G2. Further, the adjustment by the adjustment mechanism 26 is not limited to the adjustment of the second levitation force of the first levitation force, and includes adjustment of the levitation force in the region excluding the side end portion G1 and the side end portion G2. Alternatively, adjustment of the levitation force that causes the entire glass substrate G to float may be used.

The glass substrate transport method and the glass substrate transport apparatus according to the present invention have been described in detail above, but the present invention is not limited to the above-described embodiments, and various improvements and modifications can be made without departing from the spirit of the present invention. Of course.
The conveyance method of a glass substrate is not restrict | limited after an end surface processing process, For example, it may be performed after an end surface processing process after a plate-making process. Moreover, you may perform after several processes.
Moreover, it is not restricted to giving a levitation force to a glass substrate by spraying a fluid on a glass substrate, You may carry out using another means.

20 floating unit 26 adjustment mechanism 30 conveyance unit 50 blow-in suction unit 100 glass substrate conveyance device G glass substrate G1 first side end G2 second side end

Claims (4)

Maintaining a floating state of the glass substrate by spraying a fluid on the glass substrate to give a floating force to the glass substrate;
Conveying the glass substrate in one direction while maintaining the floating state;
The first of the directions along the one direction or the direction intersecting with the one direction so that the gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction intersecting with the one direction. On the side, blowing out the gas on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, and sucking in the gas that has flowed to the second side opposite to the first side; With
In the step of maintaining the floating state, a portion of the first region of the glass substrate located on the first side of the floating force is levitated so that the glass substrate is transported in a substantially horizontal posture. Adjusting a first levitation force and a second levitation force for levitating a portion of the second region of the glass substrate located on the second side;
Based on a reference pressure that is substantially equivalent to the pressing pressure that the first region of the glass substrate receives in the thickness direction from the gas, a first levitation force that is applied to the first region that receives the pressing pressure is provided. A method for transporting a glass substrate, characterized by adjusting. A levitation unit that maintains a floating state of the glass substrate by spraying a fluid onto the glass substrate to give a levitation force to the glass substrate,
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state;
The first of the directions along the one direction or the direction intersecting with the one direction so that the gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction intersecting with the one direction. On the side, blow-out suction for blowing out the gas on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, and sucking in the gas that has flowed to the second side opposite to the first side A unit,
The levitation unit levitates a portion of the first region of the glass substrate located on the first side of the levitation force so that the glass substrate is conveyed in a substantially horizontal posture. An adjustment mechanism for adjusting a force and a second levitation force for levitating a portion of the second region of the glass substrate located on the second side;
The adjusting mechanism is configured to perform the first based on a reference pressure that is substantially equivalent to a pressing pressure that the portion of the first region receives in the plate thickness direction from the gas at a position on the transport path where the gas is blown out. A glass substrate transfer device characterized by adjusting a floating force. Applying a levitation force to the glass substrate to maintain the floating state of the glass substrate;
Conveying the glass substrate in one direction while maintaining the floating state;
The main surface on the opposite side of the main surface of the glass substrate to which the levitation force is applied so that gas flows in a direction along the one direction or in a direction crossing the one direction on the main surface of the glass substrate. Blowing out gas, and
In the step of maintaining the floating state, the floating force applied to the region of the glass substrate that receives the pressing pressure that the glass substrate receives in the thickness direction from the gas is adjusted so that the glass substrate is conveyed in a substantially horizontal posture. A method for transporting a glass substrate. A levitation unit that provides levitation force to the glass substrate and maintains the levitation state of the glass substrate;
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state;
The main surface on the opposite side of the main surface of the glass substrate to which the levitation force is applied so that gas flows in a direction along the one direction or in a direction crossing the one direction on the main surface of the glass substrate. A blowing unit for blowing out gas,
The levitation unit has a reference pressure substantially equal to a pressing pressure received in the plate thickness direction from the gas at a position on the conveyance path where the gas is blown out so that the glass substrate is conveyed in a substantially horizontal posture. An apparatus for transporting a glass substrate, comprising an adjusting mechanism for adjusting the levitation force based on the adjusting mechanism.

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