JP6690980B2 - Glass substrate transfer method and glass substrate transfer device - Google Patents

Description

  The present invention relates to a glass substrate carrying method and a glass carrying device.

  A flat glass plate is used as a component of a display unit of a display such as a liquid crystal display device or a plasma display device. In the following description, such a glass plate is referred to as a flat panel display (FPD) glass substrate or simply a glass substrate. For example, in a liquid crystal display device, a moving image can be displayed by changing the electric field applied to the liquid crystal enclosed between the glass substrates to change the orientation of the liquid crystal. Since it is necessary to change the electric field when displaying an image on the liquid crystal display device, a transparent electrode for applying a voltage is formed on the glass substrate.

  In order to control the on / off of the voltage applied to the electrodes on the glass substrate, liquid crystal display devices used in television receivers, etc., which require high quality display, use an active matrix method using thin film transistors (TFT). Control is adopted. This TFT is also formed on the glass substrate. Specifically, in a liquid crystal display, a TFT (Thin Film Transistor) that controls the amount of light transmission, a liquid crystal, and a color filter are components. A method for manufacturing a color filter panel in a liquid crystal display is usually a method of forming a black matrix on the surface of a glass substrate, and then sequentially forming different hues of red, green and blue in a stripe or mosaic color pattern. Method is used.

  The line width and the pitch of the black matrix arranged on the surface of the glass substrate have become smaller as the display becomes finer. For example, in order to achieve a high display contrast, the black matrix has a high fine line and high definition (specifically, a line width of less than 20 μm) to improve the aperture ratio, and a high dimensional accuracy of the black matrix. It is necessary to improve the light blocking effect. Further, as the number of display pixels is increased, the pattern size varies depending on the use of the color filter and each color. As an example, the red, green, and blue pixels are changed from 200 to 300 μm to 100 μm, and the black matrix is 20 μm. To 10 μm, and further to 5 μm, fine line technology has been developed.

  In this way, since electrodes and active elements are formed on the glass surface of the glass substrate for flat panel displays with an extremely thin metal film or semiconductor, the glass surface of the glass substrate has extremely high flatness and extremely high cleanliness. Sex is required.

  A transport method using a transport roller is widely used for transporting such a glass substrate. As an example of a transportation method using a transportation roller, for example, the method described in Patent Document 1 has been proposed. In Patent Document 1, a plurality of glass substrates are arranged on a carrier roller by rotatably driving a plurality of rollers arranged side by side along the carrying direction of the glass substrate and having a plurality of rollers attached to a shaft. Is transported along the transport direction in a substantially horizontal posture.

JP, 2008-285243, A

  The thinner the glass substrate is and the larger the glass substrate is, the more easily the glass substrate is bent. When a glass substrate with a small thickness or a large size is transported using the conventional transport method, the glass substrate bends during transportation, and the front end of the glass substrate in the transport direction is located below the roller in front. There was a case to get in.

  On the other hand, in the glass substrate manufacturing process, foreign matter such as chips is generated in the cutting process of cutting the formed glass plate into a predetermined substrate size, the end face processing process of processing the end face of the glass substrate, and the like. It may adhere to the surface of the substrate. If foreign matter is present on the glass substrate, the pattern is not formed well, which causes a defect in the final product FPD. Further, the foreign matter attached to the glass substrate may cause scratches on the surface of the glass substrate and reduce the mechanical strength of the glass substrate.

  It is an object of the present invention to provide a glass substrate carrying method and a glass substrate carrying device capable of removing foreign matter adhering to the surface of the glass substrate while suppressing the bending of the glass substrate during carrying.

The present invention provides the following (1) to (4).
(1) maintaining a floating state of the glass substrate by spraying a fluid on the glass substrate to give a floating force to the glass substrate;
Transporting the glass substrate in one direction while maintaining the floating state,
A first direction out of the direction along the one direction or the direction crossing the one direction so that gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction crossing the one direction. Side, the step of blowing the gas on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, and sucking the gas that has flowed to the second side opposite to the first side, ,,
In the step of maintaining the levitated state, a portion of the levitating force in the first region of the glass substrate located on the first side is levitated so that the glass substrate is transported in a substantially horizontal posture. Adjusting a first levitation force and a second levitation force that levitates a portion of the second region of the glass substrate located on the second side;
It said first area portion of the glass substrate on the basis of the contact pressure substantially equal to the reference pressure received in the thickness direction from the gas, first lift force applied to the portion of the first region for receiving the contact pressure A method of transporting a glass substrate, the method comprising:

(2) A levitation unit that maintains a levitation state of the glass substrate by applying a levitation force to the glass substrate by blowing a fluid onto the glass substrate,
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state,
A first direction out of the direction along the one direction or the direction crossing the one direction so that gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction crossing the one direction. Side, on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, the gas is blown out, and the gas that has flowed to the second side opposite to the first side is sucked in And a unit,
The levitation unit includes a first levitation unit for levitation a portion of the levitation force in a first region of the glass substrate located on the first side so that the glass substrate is transported in a substantially horizontal posture. An adjustment mechanism for adjusting a force and a second levitation force for levitating a portion of the second region of the glass substrate located on the second side,
At the position on the transfer path where the gas is blown out, the adjustment mechanism is configured such that, based on a reference pressure that is substantially equal to a pressing pressure that the portion of the first region receives from the gas in the plate thickness direction, A glass substrate transfer device characterized by adjusting the levitation force.

(3) giving floating force to glass substrate, maintaining a floating state of the glass substrate,
Transporting the glass substrate in one direction while maintaining the floating state,
The gas flows on the main surface of the glass substrate in a direction along the one direction or in a direction intersecting the one direction, on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied. And a step of blowing out gas,
In the step of maintaining the levitation state, the levitation force applied to the region of the glass substrate, which receives the pressing pressure received from the gas in the plate thickness direction, is adjusted so that the glass substrate is transported in a substantially horizontal posture. A method of transporting a glass substrate, comprising:

(4) a floating unit that gives floating force to glass substrate, to maintain the floating state of the glass substrate,
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state,
The gas flows on the main surface of the glass substrate in a direction along the one direction or in a direction intersecting the one direction, on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied. A blowing unit that blows out gas,
The levitation unit has a reference pressure substantially equal to a pressing pressure received in the plate thickness direction from the gas at a position on the transfer path where the gas is blown so that the glass substrate is transferred in a substantially horizontal posture. A glass substrate transporting device having an adjusting mechanism for adjusting the levitation force based on the above.

  ADVANTAGE OF THE INVENTION According to this invention, the foreign material adhering to the surface of a glass substrate can be removed, suppressing the bending of the glass substrate during conveyance.

It is a figure which shows an example of the process of the manufacturing method of a glass substrate. It is a figure which shows the outline of a glass substrate conveying apparatus. It is a figure which shows a glass substrate conveyance apparatus seeing from a side. It is a perspective view which shows a glass substrate conveying apparatus. (A) is a perspective view which shows the modification of a glass substrate conveying apparatus, (b) is a perspective view which shows another modification of a glass substrate conveying apparatus. It is a perspective view explaining another modification of a glass substrate conveyance device. It is a figure which shows the glass substrate conveyance apparatus of FIG. 6 seeing from above.

Hereinafter, the glass substrate carrying method and the glass substrate carrying device of the present embodiment will be described.
(1) Outline of Method for Manufacturing Glass Substrate The glass substrate manufactured in the present embodiment is used for a flat panel display (FPD) such as a liquid crystal display, a plasma display and an organic EL display. The glass substrate G has, for example, a thickness of 0.2 mm to 0.8 mm, and a size of 680 mm to 2200 mm in length and 880 mm to 2500 mm in width.

  As an example of the glass substrate G, glass having the following composition can be given.

(A) SiO ₂ : 50% by mass to 70% by mass,
(B) Al ₂ O ₃ : 10% by mass to 25% by mass,
(C) B ₂ O ₃ : 5% by mass to 18% by mass,
(D) MgO: 0% by mass to 10% by mass,
(E) CaO: 0% by mass to 20% by mass,
(F) SrO: 0% by mass to 20% by mass,
(G) BaO: 0% by mass to 10% by mass,
(H) RO: 5% by mass to 20% by mass (R is at least one selected from Mg, Ca, Sr and Ba),
(I) R ′ ₂ O: 0% by mass to 2.0% by mass (R ′ is at least one selected from Li, Na and K),
(J) At least one metal oxide selected from SnO ₂ , Fe ₂ O ₃ and CeO ₂ .

  In the glass having the above composition, the presence of other trace components is allowed within the range of less than 0.1% by mass.

  FIG. 1 is an example of a flowchart showing a manufacturing process of the glass substrate G. The manufacturing process of the glass substrate G mainly includes a forming process (step S1), a plate collecting process (step S2), a cutting process (step S3), an end surface processing process (step S4), and a roughening process (step). S5), a cleaning step (step S6), an inspection step (step S7), and a packing step (step S8).

  In the molding step S1, a glass sheet is continuously molded from a molten glass obtained by heating a glass raw material by a down draw method or a float method. The formed glass sheet is cooled to the glass annealing point or lower while controlling the temperature so that distortion and warpage do not occur.

  In the plate-drawing step S2, the glass sheet formed in the forming step S1 is cut to obtain a raw glass sheet having a predetermined size.

  In the cutting step S3, the raw glass plate obtained in the plate collecting step S2 is cut to obtain a product-sized glass substrate G. Generally, sheet glass is cut using a cutter or a laser.

  In the end surface processing step S4, the end surface processing of the glass substrate G obtained in the cutting step S3 is performed. The end surface processing is, for example, polishing and grinding of the end surface of the glass substrate G, and corner cutting of the glass substrate G.

  In the surface roughening step S5, a surface roughening treatment for increasing the surface roughness of the glass substrate G, which has been subjected to the edge surface processing in the edge surface processing step S4, is performed. The roughening treatment of the glass substrate G is, for example, wet etching using an etchant containing hydrogen fluoride.

  In the cleaning step S6, the glass substrate G that has been roughened in the roughening step S5 is cleaned. To the glass substrate G, minute glass pieces produced by cutting the raw glass and processing the end surface of the glass substrate G, and foreign substances such as organic substances existing in the atmosphere are attached. By cleaning the glass substrate G, these foreign matters are removed.

  In the inspection step S7, the glass substrate G cleaned in the cleaning step S6 is inspected. Specifically, while the glass substrate G is being conveyed, scratches and cracks existing on the surface of the glass substrate G, foreign matters attached to the surface of the glass substrate G, and minute particles existing inside the glass substrate G. Defects such as bubbles are optically detected.

  In the packing step S8, the glass substrates G that have passed the inspection in the inspection step S7 are stacked on the pallet alternately with the interleaving paper for protecting the glass substrate G and packed. The packed glass substrate G is shipped to the FPD manufacturer or the like.

  The method of transporting a glass substrate of the present embodiment is performed, for example, after each of the plate collecting step (S2), the cutting step (S3), and the end surface processing step (S4). FIG. 2 schematically shows, as an example, the conveyance of the glass substrate G performed after the cutting step (S5). The cutting step (S3) is performed by the cutting device 10 arranged in the cutting zone 1 in the example shown in FIG. The glass substrate G is transported along the transport direction (X direction) so as to pass through the cutting zone 1 after the cutting step (S3) and before the end surface processing step (S4). The glass substrate G conveyed to the cutting zone 1 is subjected to end face processing by the cutting device 10 while the conveyance is stopped or while being conveyed, and the end face processed glass substrate G is conveyed to the downstream side and cut. Unloaded from zone 1. The glass substrate carrying device for carrying out the glass substrate carrying method of the present embodiment is arranged in the cutting zone 1 on the downstream side of the cutting device 10 in the example shown in FIG.

(2) Details of Glass Substrate Conveying Device The glass substrate conveying device of the present embodiment conveys a glass substrate while maintaining a floating state by applying a levitation force to the glass substrate to maintain the floating state of the glass substrate. A transport unit that transports in one direction along the path, and a main surface of the glass substrate to which a levitation force is applied so that gas flows on the main surface of the glass substrate in a direction along the one direction or in a direction intersecting with the one direction. And a blowing unit that blows out gas on the opposite main surface side (for example, toward the main surface), and the levitation unit is a transfer path through which gas is blown out so that the glass substrate is transferred in a substantially horizontal posture. At the upper position, there is an adjusting mechanism that adjusts the levitation force based on a reference pressure that is substantially equal to the pressing pressure received from the gas in the plate thickness direction.
In this glass substrate transporting apparatus, of the main surfaces of the glass substrate that are transported while being kept in a floating state, gas is blown out on the side of the main surface opposite to the main surface to which the levitation force is applied, and the gas is blown over the main surface. , The gas flows in a direction along the transport direction (one direction) or in a direction intersecting the transport direction. The foreign matter is removed from the main surface by contacting the foreign matter attached to the main surface of the glass substrate with the flow of the gas. On the other hand, by adjusting the levitation force applied to the glass substrate as described above, it is possible to prevent the portion of the glass substrate that receives the pressing pressure from the blown gas from sinking against the levitation force. . For this reason, the occurrence of bending of the glass substrate is suppressed, and the glass substrate can be transported in a substantially horizontal posture. That is, according to the present embodiment, it is possible to remove the foreign matter attached to the surface of the glass substrate while suppressing the bending of the glass substrate during transportation. In addition to the aspect of blowing the gas toward the main surface, the aspect of blowing the gas toward the main surface includes the aspect in which at least a part of the blown gas is blown to the main surface. Further, when referring to the main surface side, a position within a plane extending in a direction parallel to the main surface and outside the edge of the glass substrate is also included in the main surface side.

  The glass substrate transfer apparatus 100 according to the present embodiment will be described more specifically with reference to FIGS. 3, 4, and 7. FIG. 3 is a diagram showing the glass substrate transport device 100 as viewed from the side (in the Y direction in FIG. 7). FIG. 4 is a perspective view showing the glass substrate transfer device. FIG. 7 is a diagram showing a modified example of the glass substrate transport device 100 as viewed from above. The glass substrate transfer apparatus 100 mainly includes a floating unit 20, a transfer unit 30 (see FIG. 7), and a blow-in suction unit 50. The levitation unit 20 has the same configuration in the modification of FIG. 7, and therefore will be described with reference to FIG. 7 for convenience. 3 and 4, the illustration of the transport unit 30 is omitted. In FIG. 3 and FIG. 7, the blowout suction unit 50 is not shown. 3, 4, and 7, the horizontal direction in the plane orthogonal to the transport direction (X direction) of the glass substrate G is the width direction (Y direction) of the glass substrate G, and the transport direction of the glass substrate G. The vertical direction in the plane orthogonal to is the plate thickness direction (Z direction) of the glass substrate G. In the following description, the end portions of the glass substrate G parallel to the transport direction of the glass substrate G are referred to as side end portions, and the end portions parallel to the width direction of the glass substrate G are referred to as the front end portion and the rear end portion. The side end G1 (see FIG. 6) and the side end G2 (see FIG. 6) of the glass substrate may not be parallel to each other.

(2-1) Levitation Unit The levitation unit 20 is a unit that blows gas onto the lower surface of the glass substrate G conveyed in a substantially horizontal posture to levitate the glass substrate G. The horizontal posture means the posture of the glass substrate G in which the plate thickness direction of the glass substrate G coincides with the vertical direction, in other words, the posture of the glass substrate G in which the main surface of the glass substrate G faces the vertical direction. The substantially horizontal posture includes not only a horizontal posture but also a posture in which the thickness direction of the glass substrate G is inclined within a range of ± 10 degrees with respect to the vertical direction. In the following description, of the main surfaces of the glass substrate G, the main surface facing upward is referred to as the upper surface, and the main surface facing downward is referred to as the lower surface.

The levitation unit 20 has a plurality of float panels 22 (see FIG. 7) and an adjusting mechanism 26.
In the example shown in FIG. 7, the plurality of float panels 22 form rows of the float panels 22 arranged along the transport direction of the glass substrate G, and the rows of the float panels 22 extend in the width direction of the glass substrate G. A float panel array 24 is formed along with each other. The rows of the float panels 22 that are adjacent to each other in the width direction are connected by the connecting member 28. The upper surfaces of all the float panels 22 forming the float panel array 24 are located at the same height position, and one flat surface facing the glass substrate G to be transported is formed. Further, in the example shown in FIG. 7, the position of the float panel 22 in the transport direction is offset between the rows of the float panels 22 adjacent in the width direction.
The float panel 22 is made of, for example, a porous material or a solid metal material in which a large number of holes are formed. The porous material is, for example, a material such as carbon, alumina, or zirconia formed and sintered. Note that, in FIG. 3, the float panel array 24 is shown only in a partial region along the transport direction of the glass substrate G.

As shown in FIG. 3, the float panel 22 has a jetting mechanism 22a and a suction mechanism 22c.
The ejection mechanism 22a is a mechanism that ejects gas toward the upper side of the float panel 22. The ejection mechanism 22a ejects gas from, for example, a large number of minute holes formed on the surface of the float panel 22. The gas is, for example, compressed air. It should be noted that in FIG. 3, the ejection mechanism 22 a is illustrated as being located at two positions on one float panel 22 for convenience. The jetted gas is blown onto the lower surface of the glass substrate G being conveyed. As a result, the glass substrate G being conveyed receives an upward force and floats above the upper surface of the float panel 22. The gas ejected from the ejection mechanism 22a is not limited to air and may be, for example, nitrogen gas, rare gas, or the like. Further, the ejection mechanism 22a may eject a liquid such as water instead of the gas.

  The suction mechanism 22c is a mechanism that sucks gas from the upper surface of the float panel 22 into the float panel 22. The suction mechanism 22c sucks gas from, for example, a hole opened on the upper surface side of the float panel 22. As the gas is sucked by the suction mechanism 22c, the space in the vicinity of the suction mechanism 22c between the lower surface of the glass substrate G being conveyed and the upper surface of the float panel 22 is in a negative pressure state. As a result, the glass substrate G being conveyed receives a downward force. This downward force has a function of forcing the shape of the transported glass substrate G to some extent. The resultant force of the upward force of the ejection mechanism 22a and the downward force of the suction mechanism 22c, which is generated in the region of the float panel array 24 facing the conveyed glass substrate G, is the levitation force for levitating the glass substrate G. The levitation force is a force directed upward in the vertical direction. By applying the levitation force to the glass substrate G, the levitation state of the glass substrate G is maintained.

  The dimension of the float panel array 24 in the width direction is longer than the dimension of the glass substrate G in the width direction. The dimension of the float panel 22 in the carrying direction is, for example, 100 mm to 150 mm. The distance between the lower surface of the floating glass substrate G and the upper surface of the float panel 22 is, for example, 25 μm to 35 μm. In FIG. 3, the distance between the glass substrate G and the float panel 22 is exaggerated.

The adjusting mechanism 26 is a side (first side) on which the blowing device 51 (described later) is arranged with respect to the suction device 52 (described later) of the blowing suction unit 50 so that the glass substrate G is transported in a substantially horizontal posture. Of the glass substrate G on the side where the suction device 52 is arranged (second side) with respect to the blowing device 51. And a second levitation force for levitating the portion (second portion). In the example shown in FIG. 4, the first portion is a portion of the region of the glass substrate G to which the gas blown out from the blowout device 51 (described later) of the blowout suction unit 50 is blown. In the example shown in FIG. 4, the second portion is an area that is located downstream from the first portion in the transport direction, and has the same width direction position as the area where the first portion is located. It is a part of the area. The length in the width direction in which the first portion and the second portion extend is, for example, 1/10 to 1/3 of the distance in the transport direction between the blowing device 51 and the suction device 52. is there.
Specifically, the adjusting mechanism 26 adjusts the first levitation force and the second levitation force by controlling the pressure of the gas ejected from the ejection mechanism 22a and the gas suction pressure of the suction mechanism 22c. . More specifically, the adjusting mechanism 26 adjusts the first levitation force based on a reference pressure that is substantially equal to a pressing pressure (described later) that the first portion receives from the gas in the plate thickness direction. And the second levitation force of the. A specific adjusting method will be described later.

  In the glass substrate carrying device 100 shown in FIG. 4, the floated glass substrate G is supported by the rollers 40 arranged on the upstream side and the downstream side of the float panel array 24 in the carrying direction.

(2-2) Transport Unit The transport unit 30 is a unit that transports the glass substrate G floated by the levitation unit 20 along the transport direction. The transport unit 30 mainly includes a holding section 32 and a transport section 34, as shown in FIG. 7.

  The holding portion 32 holds the end portion (side end portion G1 in FIG. 7) of the glass substrate G. The holding part 32 includes, for example, a suction mechanism for holding the glass substrate G. The transport unit 34 includes a linear drive mechanism that moves the holding unit 32 along the transport direction.

(2-3) Blow-out suction unit The blow-out suction unit 50 is a gas on the first side of the glass substrate G from a position above the glass substrate G transported by the transport unit 30 toward the upper surface of the glass substrate G. Is a unit for sucking in the gas flowing toward the second portion side. The blow-out suction unit 50 specifically blows and sucks the gas on the upper surface of the glass substrate G so that the gas flows from the first side to the second side. The gas flow direction is the direction along the transport direction of the glass substrate G in the example shown in FIG. 4, but the air flow that flows from the side on which the blowing device 51 is arranged to the side on which the suction device 52 is arranged. If the is formed, the gas flowing direction may be inclined with respect to the glass conveying direction or the width direction. Further, there may be a plurality of gas flow directions. In this case, as shown by a plurality of arrows pointing in the width direction in FIG. 5 (a), the flowing directions of adjacent gases may be opposite to each other, and in FIG. 5 (b), they may face the carrying direction. As shown by the arrow, the upstream side and the downstream side of the blowing device 51 may be opposite to each other. 5A is a perspective view showing a modified example of the glass substrate carrying device 100, and FIG. 5B is a perspective view showing another modified example of the glass substrate carrying device 100. The blowout suction unit 50 shown in FIG. 5A includes a plurality of blowout devices 51 and a plurality of suction devices 52. The blowing device 51 blows out gas on both sides in the width direction. In FIG. 5B, the suction device 52 blows out gas on both sides in the transport direction. The blowout suction unit 50 shown in FIG. 5B has one blowout device 51 and a plurality of suction devices 52.

The blowout suction unit 50 has a blowout device 51 and a suction device 52.
The blowing device 51 is a device that blows gas toward the upper surface of the glass substrate G. The gas is, for example, air, nitrogen gas, a rare gas, or the like. The blowout device 51 has a blowout port 51a (see FIG. 6) opened so as to extend along the width direction of the glass substrate G. FIG. 6 is a perspective view illustrating still another modified example of the glass substrate carrying device 100. The blowout port 51a is located above the transported glass substrate G and in the vicinity of the glass substrate G, and in the example shown in FIG. 4, the width direction region that exceeds the width direction region of the transported glass substrate G. It is located over. When the gas is blown from the blowing device 51, the pressing pressure of the blown gas, which is directed downward in the plate thickness direction, acts on the first portion of the glass substrate G that is being conveyed. The blowing device 51 is arranged so as not to contact the holding unit 32 that moves in the transport direction. The pressure of the gas blown from the blowing device 51 is preferably higher than the blowout pressure generally used in the air knife in order to enhance the foreign matter removing force.

The suction device 52 is a device that sucks the gas blown from the blowing device 51 and flowing on the upper surface of the glass substrate G to the second side. The gas is sucked by the suction device 52, so that a flow of gas flowing from the first side to the second side is formed on the upper surface of the glass substrate G to be transported. The foreign matter attached to the glass substrate G is detached from the glass substrate G and removed by coming into contact with the gas flow. The foreign matter is, for example, minute glass pieces (shavings) generated by plate taking, cutting, and end face processing of a glass substrate, dust existing in the atmosphere, and the like.
The suction device 52 has a suction port 52a opened so as to extend along the width direction of the glass substrate G. In the example shown in FIG. 4, the suction port 52a is arranged at substantially the same vertical position as the blowing device 51.

The blowing amount of the blowing device 51 and the suction amount of the suction device 52 may be equal, and the suction amount of the suction device 52 may be larger than the blowing amount of the blowing device 51. In addition, although the blow-in suction unit 50 is fixed at a predetermined position on the transport path of the glass substrate G in the example shown in FIG. 4, it may be configured to move in the transport direction. In this case, for example, by temporarily stopping the transportation of the glass substrate G and moving the blow-in suction unit 50 in the transportation direction, the foreign substances can be removed from the glass substrate G over the entire transportation direction.
The blow-in suction unit 50 may be arranged at a plurality of positions on the transport path. In this case, the arrangement positions of the blowout device and the suction device may be different between the blowout suction units 50. For example, contrary to the example shown in FIG. 4, the blowing device 51 may be arranged on the second side and the suction device 52 may be arranged on the first side. Further, the blowout amount and the suction amount may be different between the blowout suction units 50.
In addition, the blowing device 51 may blow out gas or may further irradiate ultrasonic waves in order to vibrate and remove foreign matter attached to the glass substrate G.

Next, a method of transporting the glass substrate of this embodiment will be described.
The method of transporting a glass substrate of the present embodiment, a step of applying a levitation force to the glass substrate to maintain the floating state of the glass substrate, a step of transporting the glass substrate in one direction while maintaining the floating state, the glass substrate The main surface of the glass substrate opposite to the main surface of the glass substrate to which the levitation force is applied so that the gas flows on the main surface of the glass in a direction along the direction or a direction intersecting with the one direction (for example, toward the main surface). ) A step of blowing out a gas, and in the step of maintaining the floating state, in order to convey the glass substrate in a substantially horizontal posture, the glass substrate is applied to a region of the glass substrate that receives a pressing pressure received from the gas in the plate thickness direction. Adjust the levitation force applied.
In this glass substrate transporting method, of the main surfaces of the glass substrate that are transported while being maintained in a floating state, gas is blown out on the side of the main surface opposite to the main surface to which the levitation force is applied, and The gas flows in a direction along the transport direction (one direction) or in a direction intersecting the transport direction. The foreign matter is removed from the main surface by contacting the foreign matter attached to the main surface of the glass substrate with the flow of the gas. On the other hand, by adjusting the levitation force applied to the glass substrate as described above, it is possible to prevent the portion of the glass substrate that receives the pressing pressure from the blown gas from sinking against the levitation force. . For this reason, the occurrence of bending of the glass substrate is suppressed, and the glass substrate can be transported in a substantially horizontal posture. That is, according to the present embodiment, it is possible to remove the foreign matter attached to the surface of the glass substrate while suppressing the bending of the glass substrate during transportation. In addition to the aspect of blowing the gas toward the main surface, the aspect of blowing the gas toward the main surface includes the aspect in which at least a part of the blown gas is blown to the main surface. Further, when referring to the main surface side, a position within a plane extending in a direction parallel to the main surface and outside the edge of the glass substrate is also included in the main surface side.

More specifically, the method of transporting the glass substrate of this embodiment will be described.
In the example shown in FIG. 2, when the end surface processing step (S4) is completed, the glass substrate G is transported by the glass substrate transport device 100 in the transport direction. Specifically, while being supported by the rollers 40, the glass substrate G is maintained in a state of being floated to a predetermined floating height from the upper surface of the float panel array 24 by the gas blown from the floating unit 20. By being transported in this state, the glass substrate G is transported while maintaining the floating state. Then, the glass substrate G comes into contact with the air flow formed by the blow-in suction unit 50 and flowing from the first portion side to the second portion side at a predetermined position on the transport path, whereby the glass substrate G Foreign substances such as glass chips attached to the upper surface are detached from the upper surface of the glass substrate G and removed.

  At this time, a pressing pressure acts on the first portion of the glass substrate G downward in the plate thickness direction by the gas blown by the blowing device 51, and the first portion tries to sink downward. The adjustment mechanism 26 adjusts the first levitation force and the second levitation force in order to suppress such sinking. Specifically, the first levitation force and the second levitation force are adjusted by adjusting the first levitation force based on a reference pressure substantially equal to the pressing pressure. The reference pressure substantially equal to the pressing pressure means a pressure in which the magnitude of the pressure is substantially equal to the pressing pressure and the direction of the pressure is opposite to the pressing pressure. That the magnitudes of the pressures are substantially equal means that the magnitudes of the reference pressures are, for example, within ± 10% of the absolute value of the pressing pressure. Further, adjusting the first levitation force based on the reference pressure means, specifically, based on the force calculated by multiplying the reference pressure by the area of the region of the first portion from which the gas is blown, Adjusting the first levitation force. The area of the region of the first portion is calculated, for example, by multiplying the length in the width direction of the first portion by the length in the transport direction of the first portion. Specifically, the first levitation force is an upward force of the gas ejected from the ejection mechanism 22a in the region of the float panel array 24 facing the first portion, and the gas is sucked by the suction mechanism 22c. It is the resultant force with the downward force. As a specific mode of adjusting the first levitation force based on the reference pressure, it is possible to adjust the ejection mechanism 22a and the suction mechanism 22c so that the first levitation force is equal to the calculated force. Can be mentioned. By adjusting the first levitation force based on the reference pressure in this way, the levitation height of the first portion can be maintained against the pressing force, and the glass substrate G is kept in a substantially horizontal state. be able to. The adjustment of the first levitation force can be performed, for example, while measuring the levitation height of the first portion from the upper surface of the float panel array 24.

  By adjusting the first levitation force in this way, the first portion of the glass substrate G is prevented from sinking downward and the bending of the glass substrate G is suppressed. As a result, the glass substrate G can be transported in a substantially horizontal posture. According to the present embodiment, it is possible to remove the foreign matter attached to the surface of the glass substrate G while suppressing the bending of the glass substrate G during transportation.

  In addition, in adjusting the first levitation force and the second levitation force by the adjusting mechanism 26, the second levitation force is adjusted relative to the first levitation force by performing the first levitation force. It also includes being done. In other words, only the first levitation force may be adjusted and the second levitation force may not be adjusted. On the other hand, both the first levitation force and the second levitation force may be adjusted. The adjustment of the second levitation force can be performed by adjusting the ejection mechanism 22a and the suction mechanism 22c in the second portion or in the region of the float panel array 24 facing the blowing device 51.

The adjustment of the first floating force can be performed by adjusting at least one of the ejection mechanism 22a and the suction mechanism 22c in order to maintain the suction force to the extent that the glass substrate G is not blown off. In addition, in order to adjust the first levitation force with high accuracy, the adjustment mechanism 26 includes, for each of the ejection mechanism 22a and the suction mechanism 22c existing in the conveyance direction, the ejection mechanism 22a and the suction mechanism 22c located at the same conveyance direction position. , The first levitation force may be adjusted.
Further, the adjustment by the adjusting mechanism 26 is not limited to the adjustment of the second levitation force of the first levitation force, and includes the adjustment of the levitation force in the region excluding the first portion and the second portion. Alternatively, the levitation force for levitating the entire glass substrate G may be adjusted.

A modified example of the glass substrate transport device 100 will be described with reference to FIG.
The configuration of this modified example and the method of transporting a glass substrate performed by the modified example are the same as those of the above-described embodiment, except for the following description.
Note that, in FIG. 6, the illustration of the transport unit 30 is omitted. Further, in the float panel array 24 shown in FIG. 6, the region including both ends of the region in the width direction of the glass substrate G is omitted in order to explain the blow-in suction unit 50 in an easily understandable manner. In FIG. 6, the distance between the glass substrate G and the float panel 22 is exaggerated.

  The adjusting mechanism 26 of this modification has a first levitation force that levitates one side end portion G1 (first end portion) of the glass substrate G so that the glass substrate G is conveyed in a substantially horizontal posture. This is a mechanism for adjusting the other side end portion G2 (second end portion) and a second levitation force for levitating. The side end portion G1 and the side end portion G2 are portions including the widthwise end of the glass substrate G and extending from the widthwise end toward the widthwise inner side. The lengths in the width direction in which the side end portions G1 and G2 respectively extend are, for example, 1/10 to 1/3 of the length in the width direction of the glass substrate G, and, for example, in the width direction. The length is more than 0 mm and 40 mm or less in the width direction from the end of the. In FIG. 6, the side end portion G1 is shown by a region in which gas is blown out by the blowout suction unit 50 described later, and the side end portion G2 is shown by a region at the same conveyance direction position as this region.

  The transport unit is the transport unit 30 described above.

  The blow-in suction unit 50 blows gas toward the upper surface of the glass substrate G from a position above the glass substrate G transported by the transport unit 30 on the side of the side end portion G1 of the glass substrate G, and the side end It is a unit that sucks in the gas that has flowed to the side of the portion G2. The blow-out suction unit 50 specifically blows and sucks gas on the upper surface of the glass substrate G so that the gas flows from the side end G1 side to the side end G1 side. The gas flow direction is the direction along the width direction of the glass substrate G in the example shown in FIG. 6, but the suction device 52 is located from the width direction side (first side) where the blowing device 51 is arranged. If an airflow that flows on the side (second side) in the width direction in which the is arranged is formed, the gas flow direction is the X direction side or the X direction with respect to the glass conveyance direction or the width direction. The direction may be inclined to the opposite side.

The blowout suction unit 50 has a blowout device 51 and a suction device 52.
The blowing device 51 is a device that blows gas toward the upper surface of the glass substrate G. The gas is, for example, air, nitrogen gas, a rare gas, or the like. The blowout device 51 has a blowout port 51a that is opened so as to extend along the conveyance direction of the glass substrate G. The blowout port 51a is located above the transported glass substrate G, and is located outside the transported glass substrate G in the width direction in the example shown in FIG. When the gas is blown from the blowing device 51, a pressing pressure directed downward in the plate thickness direction acts on the side end portion G1 of the glass substrate G to be conveyed, the magnitude corresponding to the pressure of the blown gas. . The blowing device 51 is arranged so as not to contact the holding unit 32 that moves in the transport direction.

The suction device 52 is a device that sucks the gas blown from the blowing device 51 and flowing on the upper surface of the glass substrate G toward the side end G2. The gas is sucked by the suction device 52, so that a flow of gas that flows from the side end portion G1 side toward the side end portion G2 side is formed on the upper surface of the transported glass substrate G.
The suction device 52 has a suction port 52a that is opened so as to extend along the transport direction of the glass substrate G. In the example shown in FIG. 6, the suction port 52a is arranged at substantially the same vertical position as the transported glass substrate G, and is located outside the transported glass substrate G in the width direction.

In the example shown in FIG. 6, the blow-in suction unit 50 is fixed at a predetermined position on the transport path of the glass substrate G, but may be configured to move in the transport direction. In this case, for example, the transport of the glass substrate G is temporarily stopped by the transport unit 34, and the blow-in suction unit 50 is moved in the transport direction, so that the foreign substances are removed from the glass substrate G over the entire transport direction. You can
In the blow-in suction unit 50, for example, the blow-out device 51 is arranged on the side of the side end G2 and the suction device 52 is arranged on the side of the side end G1 contrary to the example shown in FIG. Good.

  In the modification shown in FIG. 6, the glass substrate G has a side end G1 held by the holding part 32 and is floated by a predetermined blowing height from the upper surface of the float panel array 24 by the gas blown from the floating unit 20. Is maintained. By being transported by the transport unit 34 in this state, the glass substrate G is transported while maintaining the floating state. Then, the glass substrate G comes into contact with the airflow that is formed by the blow-in suction unit 50 and that flows from the side end portion G1 side to the side end portion G2 side at a predetermined position on the transport path. Foreign substances such as glass chips attached to the upper surface are detached from the upper surface of the glass substrate G and removed.

  At this time, a pressing pressure acts on the side end portion G1 of the glass substrate G downward in the plate thickness direction by the gas blown out by the blowing device 51, and the side end portion G1 tries to sink downward. The adjustment mechanism 26 adjusts the first levitation force and the second levitation force in order to suppress such sinking. Specifically, the first levitation force and the second levitation force are adjusted by adjusting the first levitation force based on a reference pressure substantially equal to the pressing pressure. The reference pressure substantially equal to the pressing pressure means a pressure in which the magnitude of the pressure is substantially equal to the pressing pressure and the direction of the pressure is opposite to the pressing pressure. That the magnitudes of the pressures are substantially equal means that the magnitudes of the reference pressures are, for example, within ± 10% of the absolute value of the pressing pressure. Further, adjusting the first levitation force based on the reference pressure means, specifically, based on the force calculated by multiplying the reference pressure by the area of the region of the side end G1 from which the gas is blown, Adjusting the first levitation force. Specifically, the first levitation force is an upward force due to the gas ejected from the ejection mechanism 22a in the area of the float panel array 24 facing the side end G1 and the gas is sucked by the suction mechanism 22c. It is the resultant force with the downward force. As a specific mode of adjusting the first levitation force based on the reference pressure, it is possible to adjust the ejection mechanism 22a and the suction mechanism 22c so that the first levitation force is equal to the calculated force. Can be mentioned. By adjusting the first levitation force based on the reference pressure in this way, the levitation height of the side end portion G1 can be maintained against the pressing force, and the glass substrate G is maintained in a substantially horizontal state. be able to. The adjustment of the first levitation force can be performed, for example, while measuring the levitation height of the side end portion G1 from the upper surface of the float panel array 24.

  By adjusting the first levitation force in this way, the side end portion G1 of the glass substrate G is suppressed from sinking downward, and the bending of the glass substrate G is suppressed. As a result, the glass substrate G can be transported in a substantially horizontal posture. According to the present embodiment, it is possible to remove the foreign matter attached to the surface of the glass substrate G while suppressing the bending of the glass substrate G during transportation.

  The adjustment of the second levitation force can be performed by adjusting the ejection mechanism 22a and the suction mechanism 22c in the region of the float panel array 24 facing the side end portion G2. Further, the adjustment by the adjusting mechanism 26 is not limited to the adjustment of the second levitation force of the first levitation force, and includes the adjustment of the levitation force in the region excluding the side end portions G1 and G2. Alternatively, the levitation force for levitating the entire glass substrate G may be adjusted.

Although the glass substrate transporting method and the glass substrate transporting device of the present invention have been described above in detail, the present invention is not limited to the above-described embodiments, and various improvements and changes are made without departing from the gist of the present invention. Of course it is okay.
The method of transporting the glass substrate is not limited after the end surface processing step, and may be performed after the plate collecting step and after the end surface processing step, for example. Moreover, it may be performed after a plurality of steps.
Further, the application of the levitation force to the glass substrate is not limited to the application of the fluid to the glass substrate, and other means may be used.

20 Floating Unit 26 Adjusting Mechanism 30 Transport Unit 50 Blow-In Suction Unit 100 Glass Substrate Transport Device G Glass Substrate G1 First Side End G2 Second Side End

Claims (4)

A step of maintaining a floating state of the glass substrate by applying a levitation force to the glass substrate by spraying a fluid on the glass substrate,
Transporting the glass substrate in one direction while maintaining the floating state,
A first direction out of the direction along the one direction or the direction crossing the one direction so that gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction crossing the one direction. Side, the step of blowing the gas on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, and sucking the gas that has flowed to the second side opposite to the first side, ,,
In the step of maintaining the levitated state, a portion of the levitating force in the first region of the glass substrate located on the first side is levitated so that the glass substrate is transported in a substantially horizontal posture. Adjusting a first levitation force and a second levitation force that levitates a portion of the second region of the glass substrate located on the second side;
It said first area portion of the glass substrate on the basis of the contact pressure substantially equal to the reference pressure received in the thickness direction from the gas, first lift force applied to the portion of the first region for receiving the contact pressure A method of transporting a glass substrate, the method comprising: A levitation unit that maintains the levitation state of the glass substrate by applying a levitation force to the glass substrate by spraying a fluid on the glass substrate,
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state,
A first direction out of the direction along the one direction or the direction crossing the one direction so that gas flows on the main surface of the glass substrate in the direction along the one direction or in the direction crossing the one direction. Side, on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied, the gas is blown out, and the gas that has flowed to the second side opposite to the first side is sucked in And a unit,
The levitation unit includes a first levitation unit for levitation a portion of the levitation force in a first region of the glass substrate located on the first side so that the glass substrate is transported in a substantially horizontal posture. An adjustment mechanism for adjusting a force and a second levitation force for levitating a portion of the second region of the glass substrate located on the second side,
At the position on the transfer path where the gas is blown out, the adjustment mechanism is configured such that, based on a reference pressure that is substantially equal to a pressing pressure that the portion of the first region receives from the gas in the plate thickness direction, A glass substrate transfer device characterized by adjusting the levitation force. Giving floating force to glass substrate, maintaining a floating state of the glass substrate,
Transporting the glass substrate in one direction while maintaining the floating state,
The gas flows on the main surface of the glass substrate in a direction along the one direction or in a direction intersecting the one direction, on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied. And a step of blowing out gas,
In the step of maintaining the levitation state, the levitation force applied to the region of the glass substrate, which receives the pressing pressure received from the gas in the plate thickness direction, is adjusted so that the glass substrate is transported in a substantially horizontal posture. A method of transporting a glass substrate, comprising: Giving floating force to glass substrate, a floating unit to maintain the floating state of the glass substrate,
A transport unit that transports the glass substrate in one direction along a transport path while maintaining the floating state,
The gas flows on the main surface of the glass substrate in a direction along the one direction or in a direction intersecting the one direction, on the side of the main surface opposite to the main surface of the glass substrate to which the levitation force is applied. A blowing unit that blows out gas,
The levitation unit has a reference pressure substantially equal to a pressing pressure received in the plate thickness direction from the gas at a position on the transfer path where the gas is blown so that the glass substrate is transferred in a substantially horizontal posture. A glass substrate transporting device having an adjusting mechanism for adjusting the levitation force based on the above.

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