TWI602763B - Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate - Google Patents
Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate Download PDFInfo
- Publication number
- TWI602763B TWI602763B TW102134370A TW102134370A TWI602763B TW I602763 B TWI602763 B TW I602763B TW 102134370 A TW102134370 A TW 102134370A TW 102134370 A TW102134370 A TW 102134370A TW I602763 B TWI602763 B TW I602763B
- Authority
- TW
- Taiwan
- Prior art keywords
- glass substrate
- substrate
- floating
- unit
- glass
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Electroluminescent Light Sources (AREA)
Description
本發明係關於一種玻璃基板之搬送裝置及玻璃基板之製造方法。 The present invention relates to a glass substrate transfer device and a glass substrate manufacturing method.
於液晶顯示裝置等平板顯示器(FPD,Flat Panel Display)之製造步驟中,在玻璃基板之表面形成有包括TFT(Thin Film Transistor,薄膜電晶體)等半導體元件及黑矩陣樹脂等之圖案。於供圖案形成之玻璃基板之表面上,若存在損傷、裂痕及異物等缺陷,則不會良好地形成圖案,而成為作為最終製品之FPD之不良之原因。尤其,形成於玻璃基板之表面之微小之損傷及裂痕會使玻璃基板之機械強度降低,而成為於FPD之製造步驟中玻璃基板裂開之原因。因此,要求玻璃基板之表面不存在缺陷。 In the manufacturing process of a flat panel display (FPD) such as a liquid crystal display device, a pattern including a semiconductor element such as a TFT (Thin Film Transistor) and a black matrix resin is formed on the surface of the glass substrate. When there are defects such as damage, cracks, and foreign matter on the surface of the glass substrate on which the pattern is formed, the pattern is not formed satisfactorily, which is a cause of failure of the FPD as a final product. In particular, minute damage and cracks formed on the surface of the glass substrate cause a decrease in the mechanical strength of the glass substrate, which causes cracking of the glass substrate in the manufacturing process of the FPD. Therefore, it is required that the surface of the glass substrate is free from defects.
於玻璃基板之製造步驟中,將經成形之玻璃片切斷為特定之大小,獲得作為製品出貨之尺寸之玻璃基板。其後,玻璃基板經過利用研削及研磨所進行之端面加工步驟、清洗步驟及檢查步驟並經捆包而出貨。於檢查步驟中,例如一面搬送玻璃基板,一面對存在於玻璃基板之表面之損傷、裂痕及異物等缺陷進行光學檢測。 In the manufacturing step of the glass substrate, the formed glass piece is cut into a specific size to obtain a glass substrate which is a product shipped in size. Thereafter, the glass substrate is subjected to end surface processing steps, cleaning steps, and inspection steps by grinding and polishing, and is shipped by being bundled. In the inspection step, for example, the glass substrate is conveyed, and defects such as damage, cracks, and foreign matter existing on the surface of the glass substrate are optically detected.
於玻璃基板之檢查步驟中,先前使用輥式輸送機作為玻璃基板之搬送裝置。然而,若玻璃之微小片等異物附著於輥式輸送機之輥,則因與旋轉之輥接觸而於被搬送之玻璃基板之表面形成有由異物所導致之損傷。為解決該問題,近年來,如專利文獻1(日本專利特開 2006-188313號公報)中所揭示般,使用對玻璃基板之表面吹送氣體而使玻璃基板上浮,且吸附保持玻璃基板之端部而對其進行搬送之玻璃基板之搬送裝置。於使用該搬送裝置之方法中,玻璃基板係不與搬送裝置接觸而於上浮狀態下被搬送。因此,因玻璃基板與搬送裝置接觸而導致於玻璃基板之表面產生缺陷之情況得到抑制。 In the inspection step of the glass substrate, a roller conveyor was previously used as a conveying means for the glass substrate. However, if foreign matter such as a small piece of glass adheres to the roll of the roller conveyor, the surface of the glass substrate to be conveyed is damaged by foreign matter due to contact with the rotating roll. In order to solve this problem, in recent years, as in Patent Document 1 (Japanese Patent Laid-Open) In the same manner as disclosed in JP-A-2006-188313, a glass substrate transfer device that blows a gas onto a surface of a glass substrate to float the glass substrate and sucks and holds the end portion of the glass substrate is used. In the method of using the conveying device, the glass substrate is conveyed in a floating state without coming into contact with the conveying device. Therefore, the occurrence of defects on the surface of the glass substrate due to the contact of the glass substrate with the transfer device is suppressed.
然而,於使玻璃基板上浮而對其進行搬送之情形時,存在因玻璃基板本身之翹曲而導致玻璃基板與搬送裝置接觸之情形。而且,玻璃基板之翹曲因以下3個原因而難以完全地測定。作為第1原因,對於大量生產之玻璃基板之各者,實際上難以測定其自由形狀。作為第2原因,即便藉由自大量生產之玻璃基板中抽取檢查用之玻璃基板測定翹曲而預測特定之生產批次中的翹曲之傾向,玻璃基板之自由形狀亦會於某程度之範圍內產生變化。作為第3原因,采自大型母玻璃之複數個小型玻璃基板之自由形狀的測定尤其困難。 However, when the glass substrate is floated and transported, the glass substrate itself may be in contact with the transfer device due to warpage of the glass substrate itself. Further, the warpage of the glass substrate is difficult to completely measure due to the following three reasons. As a first reason, it is actually difficult to measure the free shape of each of the glass substrates produced in large quantities. For the second reason, even if warpage is measured by extracting a glass substrate for inspection from a glass substrate for mass production to predict warpage in a specific production batch, the free shape of the glass substrate is also in a certain range. There is a change within. For the third reason, the measurement of the free shape of a plurality of small glass substrates taken from a large mother glass is particularly difficult.
為解決該問題,於專利文獻2(日本專利特開2012-96920號公報)中,揭示有於對玻璃基板之表面吹送氣體而使玻璃基板上浮之同時抽吸氣體而對玻璃基板施加向下之力的玻璃基板之搬送裝置。於使用該搬送裝置之搬送方法中,由於在上浮狀態下被搬送之玻璃基板之形狀於某程度上得到矯正,故而減輕玻璃基板之翹曲之影響。 In order to solve this problem, it is disclosed in the patent document 2 (Japanese Laid-Open Patent Publication No. 2012-96920) that the gas is blown onto the surface of the glass substrate, and the glass substrate is floated while the gas is being sucked, and the glass substrate is applied downward. A transfer device for a glass substrate. In the conveying method using the conveying device, since the shape of the glass substrate conveyed in the floating state is corrected to some extent, the influence of the warpage of the glass substrate is reduced.
[專利文獻1]日本專利特開2006-188313號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-188313
[專利文獻2]日本專利特開2012-96920號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2012-96920
然而,如專利文獻2所揭示般,於玻璃基板之搬送裝置包括沿著玻璃基板之搬送方向隔開特定之間隔地配置之複數個浮動面板之情形 時,會產生因玻璃基板之翹曲而引起之其他問題。具體而言,於沿著玻璃基板之搬送方向相鄰之浮動面板間之區域內,玻璃基板未受到向下之力,因此玻璃基板之形狀未得到矯正。因此,於該區域內,存在玻璃基板恢復至自身之固有之形狀而導致玻璃基板產生翹曲之可能性。因此,有於玻璃基板通過浮動面板間之區域時,因翹曲而下垂之玻璃基板之端部與搬送裝置接觸而使玻璃基板裂開之虞。 However, as disclosed in Patent Document 2, the conveying device for the glass substrate includes a plurality of floating panels arranged at a predetermined interval along the conveying direction of the glass substrate. At the time, other problems due to warpage of the glass substrate occur. Specifically, in the region between the floating panels adjacent to the transport direction of the glass substrate, the glass substrate is not subjected to a downward force, and thus the shape of the glass substrate is not corrected. Therefore, in this region, there is a possibility that the glass substrate returns to its original shape and causes warpage of the glass substrate. Therefore, when the glass substrate passes through the region between the floating panels, the end portion of the glass substrate that hangs down due to the warpage contacts the conveying device to rupture the glass substrate.
本發明之目的在於提供一種藉由使玻璃基板穩定地上浮而對其進行搬送,從而可抑制玻璃基板之缺陷之產生的玻璃基板之搬送裝置及玻璃基板之製造方法。 An object of the present invention is to provide a glass substrate transfer apparatus and a glass substrate production method capable of suppressing the occurrence of defects in a glass substrate by stably floating the glass substrate.
本發明之玻璃基板之搬送裝置包括基板上浮單元與基板搬送單元。基板上浮單元係對玻璃基板之表面吹送氣體而使玻璃基板上浮之單元。基板搬送單元係沿著搬送方向搬送利用基板上浮單元予以上浮之玻璃基板之單元。基板檢查單元係檢查由基板搬送單元所搬送之玻璃基板之單元。基板上浮單元包括沿著搬送方向隔開間隔地配置之複數個浮動面板。浮動面板包括氣體噴出機構與基板對向面。氣體噴出機構將對玻璃基板之表面吹送之氣體噴出。基板對向面係與被搬送之玻璃基板之吹送有氣體之表面對向的面。浮動面板係以基板對向面之高度位置隨著朝向搬送方向逐漸下降之方式配置。 The glass substrate transfer apparatus of the present invention includes a substrate floating unit and a substrate transfer unit. The substrate floating unit is a unit that blows a gas onto the surface of the glass substrate to float the glass substrate. The substrate transfer unit transports the unit of the glass substrate that is floated by the substrate floating unit in the transport direction. The substrate inspection unit inspects the unit of the glass substrate conveyed by the substrate transfer unit. The substrate floating unit includes a plurality of floating panels that are arranged at intervals along the transport direction. The floating panel includes a gas ejection mechanism and a substrate facing surface. The gas ejecting mechanism ejects the gas blown onto the surface of the glass substrate. The opposite surface of the substrate faces the surface on which the gas-coated surface of the glass substrate to be conveyed is blown. The floating panel is disposed such that the height position of the opposing surface of the substrate gradually decreases toward the transport direction.
本發明之玻璃基板之搬送裝置係沿著特定之搬送方向搬送玻璃基板之裝置。使玻璃基板上浮之基板上浮單元具有沿著玻璃基板之搬送方向隔開特定之間隔地配置有複數個浮動面板之構成。 The glass substrate transfer device of the present invention is a device that transports a glass substrate in a specific transport direction. The substrate floating unit that floats the glass substrate has a configuration in which a plurality of floating panels are arranged at a predetermined interval along the conveying direction of the glass substrate.
於該玻璃基板之搬送裝置中,上浮而被搬送之玻璃基板於基板上浮單元之上方,其形狀於某程度上得到矯正。因此,於基板上浮單元之上方,減輕玻璃基板之翹曲。另一方面,上浮而被搬送之玻璃基板於通過沿著搬送方向相鄰之浮動面板間之區域之期間,其形狀未得 到矯正,因此恢復至自身之固有之形狀。因此,存在於浮動面板間之區域內玻璃基板會產生翹曲之可能性。然而,浮動面板係以與被搬送之玻璃基板之下表面對向的基板對向面之高度位置沿著玻璃基板之搬送方向逐漸下降之方式配置為階梯狀。因此,即便於通過浮動面板間之區域的玻璃基板之端部因翹曲而下垂之情形時,亦抑制玻璃基板之端部與浮動面板接觸。 In the glass substrate transfer apparatus, the glass substrate that has been lifted and transported is placed above the substrate floating unit, and its shape is corrected to some extent. Therefore, the warpage of the glass substrate is reduced above the floating unit of the substrate. On the other hand, the glass substrate that has been transported up and down is not in the shape of the region between the floating panels adjacent to each other in the transport direction. To the correction, it returns to its own shape. Therefore, there is a possibility that the glass substrate may be warped in the region between the floating panels. However, the floating panel is arranged in a stepped shape such that the height of the opposing surface of the substrate facing the lower surface of the glass substrate to be conveyed gradually decreases along the conveying direction of the glass substrate. Therefore, even when the end portion of the glass substrate passing through the region between the floating panels is sag due to warpage, the end portion of the glass substrate is prevented from coming into contact with the floating panel.
因此,該玻璃基板之搬送裝置藉由使玻璃基板穩定地上浮而對其進行搬送,可抑制玻璃基板之缺陷之產生。 Therefore, the glass substrate transfer apparatus can transport the glass substrate by stably floating it, thereby suppressing the occurrence of defects in the glass substrate.
又,沿著搬送方向配置之浮動面板之基板對向面較佳為與水平面平行。 Further, the opposing surface of the substrate of the floating panel disposed along the transport direction is preferably parallel to the horizontal plane.
又,基板上浮單元較佳為使自浮動面板之氣體噴出機構噴出之氣體之流量隨著朝向搬送方向而逐漸增加。 Further, it is preferable that the substrate floating unit gradually increases the flow rate of the gas ejected from the gas ejecting mechanism of the floating panel toward the conveying direction.
於自浮動面板之氣體噴出機構噴出之氣體之流量為沿著玻璃基板之搬送方向固定之情形時,被搬送之玻璃基板之高度位置配合浮動面板之基板對向面之高度位置而逐漸下降。然而,藉由使自氣體噴出機構噴出之氣體之流量沿著玻璃基板之搬送方向逐漸增加,可抑制被搬送之玻璃基板之高度位置之降低。藉此,可抑制由基板搬送單元所搬送之玻璃基板之變形。 When the flow rate of the gas ejected from the gas ejecting mechanism of the floating panel is fixed along the conveying direction of the glass substrate, the height position of the glass substrate to be conveyed gradually decreases in accordance with the height position of the opposing surface of the substrate of the floating panel. However, by gradually increasing the flow rate of the gas ejected from the gas ejecting mechanism along the transport direction of the glass substrate, it is possible to suppress a decrease in the height position of the glass substrate to be transported. Thereby, deformation of the glass substrate conveyed by the substrate transfer unit can be suppressed.
又,本發明之玻璃基板之搬送裝置較佳為進而包括基板檢查單元。基板檢查單元係檢查由基板搬送單元所搬送之玻璃基板之光學器件。浮動面板沿著作為與搬送方向正交之方向的玻璃基板之寬度方向延伸。基板檢查單元配置於相鄰之浮動面板之間。 Moreover, it is preferable that the glass substrate transfer apparatus of the present invention further includes a substrate inspection unit. The substrate inspection unit inspects the optical device of the glass substrate conveyed by the substrate transfer unit. The floating panel extends in the width direction of the glass substrate in the direction orthogonal to the transport direction. The substrate inspection unit is disposed between adjacent floating panels.
該玻璃基板之搬送裝置可檢測形成於玻璃基板之表面之缺陷。於該裝置中,可於沿著玻璃基板之搬送方向相鄰之浮動面板間設置於玻璃基板之寬度方向延伸之基板檢查單元。因此,可抑制玻璃基板之搬送方向上之基板檢查單元之設置空間。 The glass substrate transfer device can detect defects formed on the surface of the glass substrate. In this apparatus, a substrate inspection unit extending in the width direction of the glass substrate can be provided between the floating panels adjacent to each other in the conveyance direction of the glass substrate. Therefore, the installation space of the substrate inspection unit in the conveyance direction of the glass substrate can be suppressed.
本發明之玻璃基板之製造方法包括基板上浮步驟、基板搬送步驟、及基板處理步驟。基板上浮步驟係對玻璃基板之表面吹送氣體而使玻璃基板上浮之步驟。基板搬送步驟係沿著搬送方向搬送藉由基板上浮步驟而上浮之玻璃基板之步驟。基板處理步驟係對於基板搬送步驟中被搬送之玻璃基板進行加工或檢查之步驟。於基板上浮步驟中,藉由沿著搬送方向隔開間隔地配置之複數個浮動面板使玻璃基板上浮。浮動面板包括氣體噴出機構、及基板對向面。氣體噴出機構將對玻璃基板之表面吹送之氣體噴出。基板對向面係與被搬送之玻璃基板之吹送有氣體之表面對向的面。浮動面板係以基板對向面之高度位置隨著朝向搬送方向逐漸下降之方式配置。 The method for producing a glass substrate of the present invention includes a substrate floating step, a substrate transfer step, and a substrate processing step. The substrate floating step is a step of blowing a gas onto the surface of the glass substrate to float the glass substrate. The substrate transfer step is a step of transporting the glass substrate that has been lifted by the substrate floating step in the transport direction. The substrate processing step is a step of processing or inspecting the glass substrate conveyed in the substrate transfer step. In the substrate floating step, the glass substrate is floated by a plurality of floating panels arranged at intervals along the transport direction. The floating panel includes a gas ejection mechanism and a substrate facing surface. The gas ejecting mechanism ejects the gas blown onto the surface of the glass substrate. The opposite surface of the substrate faces the surface on which the gas-coated surface of the glass substrate to be conveyed is blown. The floating panel is disposed such that the height position of the opposing surface of the substrate gradually decreases toward the transport direction.
又,沿著搬送方向配置之浮動面板之基板對向面較佳為與水平面平行。 Further, the opposing surface of the substrate of the floating panel disposed along the transport direction is preferably parallel to the horizontal plane.
又,於本發明之玻璃基板之製造方法中較佳為,基板處理步驟係檢查於基板搬送步驟中被搬送之玻璃基板之基板檢查步驟。於基板檢查步驟中,利用配置於相鄰之浮動面板之間之光學器件檢查玻璃基板。 Further, in the method for producing a glass substrate of the present invention, it is preferable that the substrate processing step is a substrate inspection step of inspecting the glass substrate conveyed in the substrate transfer step. In the substrate inspection step, the glass substrate is inspected using an optical device disposed between adjacent floating panels.
本發明之玻璃基板之搬送裝置及玻璃基板之製造方法藉由使玻璃基板穩定地上浮而對其進行搬送,可抑制玻璃基板之缺陷之產生。 In the glass substrate transfer apparatus and the glass substrate manufacturing method of the present invention, the glass substrate is stably floated and transported, whereby the occurrence of defects of the glass substrate can be suppressed.
10‧‧‧玻璃基板 10‧‧‧ glass substrate
10a‧‧‧下表面 10a‧‧‧lower surface
20‧‧‧基板上浮單元 20‧‧‧Substrate floating unit
22‧‧‧浮動面板 22‧‧‧ floating panel
22a‧‧‧氣體噴出機構 22a‧‧‧ gas ejection mechanism
22b‧‧‧基板對向面 22b‧‧‧substrate opposite
22c‧‧‧氣體抽吸機構 22c‧‧‧ gas suction mechanism
24‧‧‧浮動面板陣列 24‧‧‧Floating panel array
26‧‧‧狹縫 26‧‧‧Slit
30‧‧‧基板搬送單元 30‧‧‧Substrate transport unit
32‧‧‧基板保持部 32‧‧‧Substrate retention department
34‧‧‧基板搬送部 34‧‧‧Substrate transport department
40‧‧‧基板檢查單元 40‧‧‧Substrate inspection unit
40a‧‧‧相機 40a‧‧‧ camera
40b‧‧‧光源 40b‧‧‧Light source
100‧‧‧玻璃基板搬送裝置 100‧‧‧Glass substrate transfer device
120‧‧‧基板上浮單元 120‧‧‧Substrate floating unit
200‧‧‧玻璃基板搬送裝置 200‧‧‧Glass substrate transfer device
D1‧‧‧搬送方向 D1‧‧‧Transfer direction
D2‧‧‧寬度方向 D2‧‧‧width direction
L1‧‧‧尺寸 L1‧‧‧ size
L2‧‧‧尺寸 L2‧‧‧ size
L3‧‧‧距離 L3‧‧‧ distance
L4‧‧‧高度位置之差 L4‧‧‧ height difference
S1‧‧‧步驟 S1‧‧‧ steps
S2‧‧‧步驟 S2‧‧‧ steps
S3‧‧‧步驟 S3‧‧‧ steps
S4‧‧‧步驟 S4‧‧‧ steps
S5‧‧‧步驟 S5‧‧ steps
S6‧‧‧步驟 S6‧‧ steps
S7‧‧‧步驟 S7‧‧ steps
S8‧‧‧步驟 S8‧‧‧ steps
圖1係實施形態之玻璃基板之製造步驟之流程圖。 Fig. 1 is a flow chart showing the steps of manufacturing the glass substrate of the embodiment.
圖2係玻璃基板搬送裝置之外觀圖。 2 is an external view of a glass substrate transfer device.
圖3係基板上浮單元之俯視圖。 Figure 3 is a plan view of the substrate floating unit.
圖4係基板上浮單元之側視圖。 Figure 4 is a side view of the substrate floating unit.
圖5係圖4之一部分之放大圖。 Figure 5 is an enlarged view of a portion of Figure 4.
圖6係表示作為參考例之浮動面板之配置的基板上浮單元之俯視 圖。 6 is a plan view showing a substrate floating unit in a configuration of a floating panel as a reference example. Figure.
(1)使用玻璃基板搬送裝置之玻璃基板之製造步驟之概略 (1) Outline of manufacturing steps of a glass substrate using a glass substrate transfer device
一面參照圖式一面對本發明之玻璃基板之搬送裝置之實施形態進行說明。首先,對使用於本實施形態中所使用之玻璃基板搬送裝置100的玻璃基板10之製造步驟進行說明。玻璃基板10係用於液晶顯示器、電漿顯示器及有機EL(electroluminescence,電致發光)顯示器等平板顯示器(FPD)之製造。玻璃基板10具有例如0.2mm~0.8mm之厚度,且具有長680mm~2200mm及寬880mm~2500mm之尺寸。 An embodiment of the transport apparatus for a glass substrate of the present invention will be described with reference to the drawings. First, a manufacturing procedure of the glass substrate 10 used in the glass substrate conveying apparatus 100 used in the present embodiment will be described. The glass substrate 10 is used for the manufacture of a flat panel display (FPD) such as a liquid crystal display, a plasma display, and an organic EL (electroluminescence) display. The glass substrate 10 has a thickness of, for example, 0.2 mm to 0.8 mm, and has a length of 680 mm to 2200 mm and a width of 880 mm to 2500 mm.
作為玻璃基板10之一例,可列舉具有以下組成之玻璃。 An example of the glass substrate 10 is glass having the following composition.
(a)SiO2:50質量%~70質量%、(b)Al2O3:10質量%~25質量%、(c)B2O3:5質量%~18質量%、(d)MgO:0質量%~10質量%、(e)CaO:0質量%~20質量%、(f)SrO:0質量%~20質量%、(g)BaO:0質量%~10質量%、(h)RO:5質量%~20質量%(R係選自Mg、Ca、Sr及Ba中之至少1種)、(i)R'2O:0質量%~2.0質量%(R'係選自Li、Na及K中之至少1種)、(j)選自SnO2、Fe2O3及CeO2中之至少1種之金屬氧化物。 (a) SiO 2 : 50% by mass to 70% by mass, (b) Al 2 O 3 : 10% by mass to 25% by mass, (c) B 2 O 3 : 5% by mass to 18% by mass, (d) MgO : 0% by mass to 10% by mass, (e) CaO: 0% by mass to 20% by mass, (f) SrO: 0% by mass to 20% by mass, (g) BaO: 0% by mass to 10% by mass, (h) RO: 5 mass% to 20 mass% (R is at least one selected from the group consisting of Mg, Ca, Sr, and Ba), and (i) R' 2 O: 0% by mass to 2.0% by mass (R' is selected from At least one of Li, Na, and K) and (j) a metal oxide selected from at least one of SnO 2 , Fe 2 O 3 , and CeO 2 .
再者,具有上述組成之玻璃於未達0.1質量%之範圍內,容許存在其他微量成分。 Further, the glass having the above composition is allowed to have other trace components in the range of less than 0.1% by mass.
圖1係表示玻璃基板10之製造步驟之流程圖之一例。玻璃基板10之製造步驟主要包括成形步驟(步驟S1)、板狀裁切步驟(步驟S2)、切斷步驟(步驟S3)、粗面化步驟(步驟S4)、端面加工步驟(步驟S5)、清 洗步驟(步驟S6)、檢查步驟(步驟S7)、及捆包步驟(步驟S8)。 FIG. 1 is a view showing an example of a flow chart of a manufacturing step of the glass substrate 10. The manufacturing steps of the glass substrate 10 mainly include a forming step (step S1), a plate-shaped cutting step (step S2), a cutting step (step S3), a roughening step (step S4), an end surface processing step (step S5), clear The washing step (step S6), the checking step (step S7), and the packing step (step S8).
於成形步驟S1中,藉由下拉法或浮式法自加熱玻璃原料而獲得之熔融玻璃連續地成形玻璃片。經成形之玻璃片一面以不產生變形及翹曲之方式予以控制溫度,一面被冷卻至玻璃徐冷點以下。 In the forming step S1, the molten glass obtained by self-heating the glass raw material by a down-draw method or a floating method continuously forms a glass piece. The formed glass piece is controlled to a temperature so as not to be deformed or warped, and is cooled to a temperature below the glass freezing point.
於板狀裁切步驟S2中,對於成形步驟S1中經成形之玻璃片進行切斷而獲得具有特定之尺寸之母板玻璃。 In the plate-like cutting step S2, the formed glass piece in the forming step S1 is cut to obtain a mother glass having a specific size.
於切斷步驟S3中,對於板狀裁切步驟S2中所獲得之母板玻璃進行切斷而獲得製品尺寸之玻璃基板10。一般而言,母板玻璃係使用切割器或雷射予以切斷。 In the cutting step S3, the mother glass obtained in the plate-like cutting step S2 is cut to obtain a glass substrate 10 having a product size. In general, the mother glass is cut using a cutter or laser.
於粗面化步驟S4中,進行使於切斷步驟S3所獲得之玻璃基板10之表面粗糙度增加之粗面化處理。玻璃基板10之粗面化處理例如為使用包含氟化氫之蝕刻劑之濕式蝕刻。 In the roughening step S4, the roughening treatment for increasing the surface roughness of the glass substrate 10 obtained in the cutting step S3 is performed. The roughening treatment of the glass substrate 10 is, for example, wet etching using an etchant containing hydrogen fluoride.
於端面加工步驟S5中,進行於粗面化步驟S4中經粗面化處理之玻璃基板10之端面加工。端面加工例如為玻璃基板10之端面之研磨及研削、玻璃基板10之切角。 In the end surface processing step S5, the end surface processing of the glass substrate 10 subjected to the roughening treatment in the roughening step S4 is performed. The end surface processing is, for example, polishing and grinding of the end surface of the glass substrate 10, and chamfering of the glass substrate 10.
於清洗步驟S6中,清洗於端面加工步驟S5中經端面加工處理之玻璃基板10。於玻璃基板10上,附著有因母板玻璃之切斷、及玻璃基板10之端面加工而產生之微小之玻璃片、或存在於環境中之有機物等異物。藉由清洗玻璃基板10而去除該等異物。 In the cleaning step S6, the glass substrate 10 subjected to the end surface processing in the end surface processing step S5 is cleaned. On the glass substrate 10, a small piece of glass which is cut by the cutting of the mother glass and the end surface of the glass substrate 10, or an organic substance such as an organic substance existing in the environment is adhered. The foreign matter is removed by cleaning the glass substrate 10.
於檢查步驟S7中,檢查於清洗步驟S6中經清洗之玻璃基板10。具體而言,一面搬送玻璃基板10,一面對存在於玻璃基板10之表面之損傷及裂痕、附著於玻璃基板10之表面之異物、及存在於玻璃基板10之內部之微小之泡等缺陷進行光學檢測。 In the inspection step S7, the cleaned glass substrate 10 in the cleaning step S6 is inspected. Specifically, the glass substrate 10 is conveyed to face defects such as damage and cracks on the surface of the glass substrate 10, foreign matter adhering to the surface of the glass substrate 10, and minute bubbles existing inside the glass substrate 10. Optical inspection.
於捆包步驟S8中,將檢查步驟S7中之檢查合格之玻璃基板10與用以保護玻璃基板10之間隔紙交替地積層於托板上並捆包。經捆包之玻璃基板被10向FPD之製造業者等出貨。 In the packing step S8, the glass substrate 10 which has passed the inspection in the inspection step S7 and the spacer paper for protecting the glass substrate 10 are alternately laminated on the pallet and bundled. The bundled glass substrate is shipped from 10 to the manufacturer of the FPD.
(2)玻璃基板搬送裝置之詳細 (2) Details of the glass substrate transfer device
其次,對本實施形態之玻璃基板搬送裝置100進行說明。圖2係玻璃基板搬送裝置100之外觀圖。玻璃基板搬送裝置100用於在檢查步驟S7中一面搬送玻璃基板10一面檢查存在於表面之缺陷。玻璃基板搬送裝置100一面於特定之方向搬送被支持為水平狀態之玻璃基板10,一面對存在於玻璃基板10之表面之缺陷進行光學檢查。玻璃基板搬送裝置100主要包括基板上浮單元20、基板搬送單元30、及基板檢查單元40。玻璃基板搬送裝置100具備包括基板上浮單元20及基板搬送單元30之玻璃基板之搬送裝置。以下,如圖2所示,將搬送水平狀態之玻璃基板10之方向稱作「搬送方向D1」,將與玻璃基板10之搬送方向正交之水平面內之方向稱作「寬度方向D2」。又,將為玻璃基板10之端部、且與搬送方向D1平行之端部稱作「側端部」,將為玻璃基板10之端部、且與寬度方向D2平行之端部稱作「前後端部」。在圖2中,玻璃基板10係於符號D1所示之箭頭之方向被搬送。 Next, the glass substrate transfer apparatus 100 of the present embodiment will be described. FIG. 2 is an external view of the glass substrate transfer device 100. The glass substrate transfer apparatus 100 is for inspecting the defect existing in the surface while carrying the glass substrate 10 in the inspection step S7. The glass substrate transfer apparatus 100 conveys the glass substrate 10 supported in a horizontal state in a specific direction, and optically inspects a defect existing on the surface of the glass substrate 10. The glass substrate transfer apparatus 100 mainly includes a substrate floating unit 20, a substrate transfer unit 30, and a substrate inspection unit 40. The glass substrate transfer apparatus 100 includes a transfer apparatus including a glass substrate of the substrate floating unit 20 and the substrate transfer unit 30. Hereinafter, as shown in FIG. 2, the direction in which the glass substrate 10 in the horizontal state is conveyed is referred to as "transport direction D1", and the direction in the horizontal plane orthogonal to the transport direction of the glass substrate 10 is referred to as "width direction D2". In addition, the end portion of the glass substrate 10 and the end portion parallel to the transport direction D1 is referred to as a "side end portion", and the end portion of the glass substrate 10 and the end portion parallel to the width direction D2 is referred to as "before and after". Ends". In FIG. 2, the glass substrate 10 is conveyed in the direction of the arrow shown by the symbol D1.
(2-1)基板上浮單元 (2-1) Substrate floating unit
基板上浮單元20係對水平狀態之玻璃基板10之下表面10a吹送氣體而使玻璃基板10上浮之單元。基板上浮單元20主要包括複數個浮動面板22。圖3係基板上浮單元20之俯視圖。於圖3中,浮動面板22係由陰影區域表示。圖4係基板上浮單元20之側視圖。圖5係圖4之一部分之放大圖。於圖4及圖5中,誇大了鉛垂方向之尺寸。複數個浮動面板22藉由沿著寬度方向D2未隔開間隔地配置而形成浮動面板陣列24。複數個浮動面板陣列24係沿著搬送方向D1隔開特定之間隔地配置。以下,將沿著搬送方向D1相鄰之2個浮動面板陣列24間之空間稱作「狹縫26」。如圖3所示,狹縫26係於寬度方向D2延伸之空間。 The substrate floating unit 20 is a unit that blows gas to the lower surface 10a of the glass substrate 10 in a horizontal state to float the glass substrate 10. The substrate floating unit 20 mainly includes a plurality of floating panels 22. 3 is a plan view of the substrate floating unit 20. In Figure 3, the floating panel 22 is represented by a shaded area. 4 is a side view of the substrate floating unit 20. Figure 5 is an enlarged view of a portion of Figure 4. In FIGS. 4 and 5, the size in the vertical direction is exaggerated. The plurality of floating panels 22 are formed by the floating panel array 24 without being spaced apart in the width direction D2. The plurality of floating panel arrays 24 are arranged at a predetermined interval along the transport direction D1. Hereinafter, the space between the two floating panel arrays 24 adjacent to each other in the transport direction D1 is referred to as "slit 26". As shown in FIG. 3, the slit 26 is a space in which the width direction D2 extends.
如圖5所示,浮動面板22包括氣體噴出機構22a、基板對向面22b、及氣體抽吸機構22c。基板對向面22b為浮動面板22之上端面, 且如圖4所示,為與被搬送之玻璃基板10之下表面10a對向之面。沿著搬送方向D1配置之浮動面板22之基板對向面22b相互平行。於本實施形態中,基板對向面22b與水平面平行,但基板對向面22b亦可沿著搬送方向D1略微傾斜。浮動面板22係以其基板對向面22b成為與水平面平行之方式設置。構成各浮動面板陣列24之所有浮動面板22之基板對向面22b具有相同之高度位置。即,在圖3中,於寬度方向D2相鄰地設置之複數個浮動面板22之基板對向面22b具有相同之高度位置。 As shown in FIG. 5, the floating panel 22 includes a gas ejecting mechanism 22a, a substrate opposing surface 22b, and a gas suction mechanism 22c. The substrate facing surface 22b is an upper end surface of the floating panel 22, Further, as shown in FIG. 4, it faces the lower surface 10a of the glass substrate 10 to be conveyed. The substrate opposing faces 22b of the floating panel 22 disposed along the conveying direction D1 are parallel to each other. In the present embodiment, the substrate facing surface 22b is parallel to the horizontal plane, but the substrate facing surface 22b may be slightly inclined along the conveying direction D1. The floating panel 22 is provided such that the substrate facing surface 22b is parallel to the horizontal plane. The substrate facing faces 22b of all the floating panels 22 constituting each of the floating panel arrays 24 have the same height position. That is, in FIG. 3, the substrate opposing faces 22b of the plurality of floating panels 22 which are adjacently disposed in the width direction D2 have the same height position.
氣體噴出機構22a係用以將空氣等氣體自基板對向面22b朝向上方噴出之機構。氣體噴出機構22a例如為形成於基板對向面22b之多數之微小孔。自氣體噴出機構22a朝向上方噴出之氣體碰撞被搬送之玻璃基板10之下表面10a。藉此,被搬送之玻璃基板10受到向上之力。該向上之力使玻璃基板10自浮動面板22之基板對向面22b上浮。 The gas discharge mechanism 22a is a mechanism for discharging a gas such as air upward from the substrate facing surface 22b. The gas ejecting mechanism 22a is, for example, a plurality of minute holes formed in the opposing surface 22b of the substrate. The gas ejected upward from the gas ejecting mechanism 22a collides with the lower surface 10a of the glass substrate 10 to be transported. Thereby, the glass substrate 10 to be conveyed receives an upward force. This upward force causes the glass substrate 10 to float from the substrate facing surface 22b of the floating panel 22.
氣體抽吸機構22c係用以自基板對向面22b之上方之空間朝向基板對向面22b抽吸氣體之機構。氣體抽吸機構22c例如為形成於基板對向面22b之孔。藉由利用氣體抽吸機構22c抽吸氣體,於被搬送之玻璃基板10之下表面10a與基板對向面22b之間,氣體抽吸機構22c之附近之空間成為負壓之狀態。藉此,被搬送之玻璃基板10受到向下之力。該向下之力於某程度上矯正被搬送之玻璃基板10之形狀。 The gas suction mechanism 22c is a mechanism for sucking gas from the space above the substrate opposing surface 22b toward the substrate facing surface 22b. The gas suction mechanism 22c is, for example, a hole formed in the opposing surface 22b of the substrate. The gas is sucked by the gas suction mechanism 22c, and the space in the vicinity of the gas suction mechanism 22c is in a state of a negative pressure between the lower surface 10a of the glass substrate 10 to be conveyed and the substrate facing surface 22b. Thereby, the glass substrate 10 to be conveyed receives a downward force. This downward force corrects the shape of the glass substrate 10 to be conveyed to some extent.
浮動面板陣列24之寬度方向D2之尺寸長於玻璃基板10之寬度方向D2之尺寸。浮動面板22之搬送方向D1之尺寸L1例如為100mm~150mm。狹縫26之搬送方向D1之尺寸L2例如為25mm~30mm。上浮之玻璃基板10之下表面10a與浮動面板22之基板對向面22b之間之距離L3例如為25μm~35μm。 The dimension of the width direction D2 of the floating panel array 24 is longer than the dimension of the width direction D2 of the glass substrate 10. The dimension L1 of the transport direction D1 of the floating panel 22 is, for example, 100 mm to 150 mm. The dimension L2 of the transport direction D1 of the slit 26 is, for example, 25 mm to 30 mm. The distance L3 between the lower surface 10a of the floating glass substrate 10 and the substrate facing surface 22b of the floating panel 22 is, for example, 25 μm to 35 μm.
如圖4所示,浮動面板陣列24係以浮動面板22之基板對向面22b之高度位置隨著朝向搬送方向D1逐漸下降之方式配置。具體而言,隨著於搬送玻璃基板10之方向推進,基板對向面22b之高度位置以10 μm~20μm為單位下降。即,如圖5所示,關於在搬送方向D1上相鄰之2個浮動面板陣列24,浮動面板22之基板對向面22b之高度位置之差L4為10μm~20μm。 As shown in FIG. 4, the floating panel array 24 is disposed such that the height position of the substrate facing surface 22b of the floating panel 22 gradually decreases toward the transport direction D1. Specifically, as the direction in which the glass substrate 10 is conveyed is advanced, the height position of the opposite surface 22b of the substrate is 10 The range of μm~20μm decreases. That is, as shown in FIG. 5, the difference L4 between the height positions of the substrate facing surfaces 22b of the floating panel 22 in the two floating panel arrays 24 adjacent to each other in the transport direction D1 is 10 μm to 20 μm.
又,於基板上浮單元20中,自浮動面板22之氣體噴出機構22a噴出之氣體之流量隨著朝向搬送方向D1逐漸增加。即,浮動面板22之基板對向面22b之高度位置越低,自浮動面板22之氣體噴出機構22a噴出之氣體之流量越大。 Further, in the substrate floating unit 20, the flow rate of the gas ejected from the gas ejecting mechanism 22a of the floating panel 22 gradually increases toward the transport direction D1. That is, the lower the height position of the substrate facing surface 22b of the floating panel 22, the larger the flow rate of the gas ejected from the gas ejecting mechanism 22a of the floating panel 22.
(2-2)基板搬送單元 (2-2) Substrate transport unit
基板搬送單元30係沿著搬送方向D1搬送藉由基板上浮單元20而上浮之玻璃基板10之單元。基板搬送單元30主要包括基板保持部32、及基板搬送部34。 The substrate transfer unit 30 transports the unit of the glass substrate 10 that has been floated by the substrate floating unit 20 along the transport direction D1. The substrate transfer unit 30 mainly includes a substrate holding portion 32 and a substrate transfer portion 34.
基板保持部32保持玻璃基板10之一側端部。基板保持部32包括例如用以保持玻璃基板10之吸附機構。基板搬送部34包括使基板保持部32沿著搬送方向D1移動之線性驅動機構。 The substrate holding portion 32 holds one end portion of the glass substrate 10 . The substrate holding portion 32 includes, for example, an adsorption mechanism for holding the glass substrate 10. The substrate transport unit 34 includes a linear drive mechanism that moves the substrate holding unit 32 in the transport direction D1.
玻璃基板10係於由基板搬送單元30沿著搬送方向D1搬送時,交替地通過浮動面板陣列24之上方之空間、及狹縫26之上方之空間。 When the glass substrate 10 is transported by the substrate transport unit 30 in the transport direction D1, the glass substrate 10 alternately passes through the space above the floating panel array 24 and the space above the slit 26.
(2-3)基板檢查單元 (2-3) Substrate inspection unit
基板檢查單元40係檢查由基板搬送單元30所搬送之玻璃基板10之單元。基板檢查單元40係具有對存在於玻璃基板10之表面之損傷及裂痕、附著於玻璃基板10之表面之異物、及存在於玻璃基板10之內部之微小之泡等缺陷進行光學檢測之功能的光學器件。 The substrate inspection unit 40 inspects the unit of the glass substrate 10 conveyed by the substrate transfer unit 30. The substrate inspection unit 40 has an optical function of optically detecting defects such as damage and cracks on the surface of the glass substrate 10, foreign matter adhering to the surface of the glass substrate 10, and minute bubbles existing inside the glass substrate 10. Device.
於本實施形態中,如圖4所示,基板檢查單元40包括設置於一條狹縫26之複數個相機40a。相機40a拍攝通過上方之玻璃基板10之表面。基板檢查單元40進而包括設置於設置有相機40a之狹縫26之上方之空間的光源40b。光源40b朝通過下方之玻璃基板10之表面照射高亮度之光。基板檢查單元40亦可具有將光源40b設置於狹縫26,且將相 機40a設置於狹縫26之上方之空間之構成。再者,搬送方向D1上之浮動面板22之基板對向面22b之高度位置之變化量係設定於不脫離相機40a之景深之範圍內。 In the present embodiment, as shown in FIG. 4, the substrate inspection unit 40 includes a plurality of cameras 40a disposed in one slit 26. The camera 40a photographs the surface of the glass substrate 10 passing through it. The substrate inspection unit 40 further includes a light source 40b disposed in a space above the slit 26 provided with the camera 40a. The light source 40b illuminates high-intensity light toward the surface of the glass substrate 10 passing through below. The substrate inspection unit 40 may also have a light source 40b disposed in the slit 26, and the phase The machine 40a is disposed in a space above the slit 26. Further, the amount of change in the height position of the substrate facing surface 22b of the floating panel 22 in the transport direction D1 is set within a range not deviating from the depth of field of the camera 40a.
基板檢查單元40之複數個相機40a以可檢查玻璃基板10之寬度方向D2之全部區域之方式沿著寬度方向D2設置於一條狹縫26內。即,設置於一條狹縫26內之相機40a可拍攝通過上方之玻璃基板10之寬度方向D2之全部區域。 The plurality of cameras 40a of the substrate inspection unit 40 are disposed in one slit 26 along the width direction D2 so that the entire area D2 of the glass substrate 10 can be inspected. That is, the camera 40a provided in one slit 26 can capture the entire area of the glass substrate 10 in the width direction D2.
基板檢查單元40進而包括控制部(未圖示)。控制部係具有檢測存在於被搬送之玻璃基板10之表面之缺陷之功能的電腦。例如,控制部係對由相機40a所拍攝之玻璃基板10之表面之圖像進行解析而檢測存在於玻璃基板10之表面之損傷及裂痕、或附著於玻璃基板10之表面之異物等。 The substrate inspection unit 40 further includes a control unit (not shown). The control unit has a computer that detects a function of a defect existing on the surface of the glass substrate 10 to be conveyed. For example, the control unit analyzes an image of the surface of the glass substrate 10 captured by the camera 40a, and detects damage or cracks on the surface of the glass substrate 10 or foreign matter adhering to the surface of the glass substrate 10.
基板檢查單元40之控制部連接於在捆包步驟S8中將玻璃基板10捆包之玻璃基板捆包裝置(未圖示)。控制部具有對基板捆包裝置通知檢測出具有表面缺陷之玻璃基板10之功能。藉此,於捆包步驟S8中,玻璃基板捆包裝置可防止將具有表面缺陷之玻璃基板10捆包。 The control unit of the substrate inspection unit 40 is connected to a glass substrate packaging device (not shown) that bundles the glass substrate 10 in the packaging step S8. The control unit has a function of notifying the substrate packing device that the glass substrate 10 having the surface defect is detected. Thereby, in the packing step S8, the glass substrate packing apparatus can prevent the glass substrate 10 which has a surface defect from being bundled.
(3)特徵 (3) Features
(3-1) (3-1)
本實施形態之玻璃基板搬送裝置100一面沿著搬送方向D1搬送玻璃基板10,一面檢測形成於玻璃基板10之表面之缺陷。使玻璃基板10上浮之基板上浮單元20具有沿著搬送方向D1隔開特定之間隔L2地設置有複數個浮動面板22之構成。 The glass substrate conveying apparatus 100 of the present embodiment detects the defects formed on the surface of the glass substrate 10 while conveying the glass substrate 10 along the conveying direction D1. The substrate floating unit 20 that floats the glass substrate 10 has a configuration in which a plurality of floating panels 22 are provided at a predetermined interval L2 along the transport direction D1.
藉由自氣體噴出機構22a噴出之氣體將向上之力作用於通過浮動面板22之上方之玻璃基板10。又,藉由被抽吸至氣體抽吸機構22c之氣體將向下之力作用於通過浮動面板22之上方之玻璃基板10。向上之力為使玻璃基板10上浮之力,向下之力為於某程度上矯正玻璃基板10 之形狀之力。玻璃基板10具有固有之形狀,例如於玻璃基板10之表面形成有凹部及凸部。藉由矯正上述玻璃基板10之形狀之力,玻璃基板10之表面成為不形成凹部及凸部之狀態。 The upward force is applied to the glass substrate 10 passing over the floating panel 22 by the gas ejected from the gas ejecting mechanism 22a. Further, a downward force is applied to the glass substrate 10 passing over the floating panel 22 by the gas sucked to the gas suction mechanism 22c. The upward force is the force for floating the glass substrate 10, and the downward force is to correct the glass substrate 10 to some extent. The power of the shape. The glass substrate 10 has a specific shape, and for example, a concave portion and a convex portion are formed on the surface of the glass substrate 10. By correcting the force of the shape of the glass substrate 10, the surface of the glass substrate 10 is in a state in which the concave portion and the convex portion are not formed.
然而,在於搬送方向D1上相鄰之浮動面板陣列24之間,存在設置有基板檢查單元40之相機40a之狹縫26。因此,由基板搬送單元30沿著搬送方向D1搬送之玻璃基板10具有通過狹縫26之上方之區域。於該區域內,未作用利用氣體噴出機構22a所得之向上之力、及利用氣體抽吸機構22c所得之向下之力。因此,通過狹縫26之上方之玻璃基板10之區域恢復至固有之形狀。 However, between the adjacent floating panel arrays 24 in the transport direction D1, there is a slit 26 in which the camera 40a of the substrate inspection unit 40 is provided. Therefore, the glass substrate 10 conveyed by the substrate transfer unit 30 along the transport direction D1 has a region above the slit 26. In this region, the upward force obtained by the gas discharge mechanism 22a and the downward force obtained by the gas suction mechanism 22c are not applied. Therefore, the region of the glass substrate 10 passing over the slit 26 is restored to its original shape.
尤其,於玻璃基板10之前後端部通過狹縫26之上方之期間,存在玻璃基板10之前後端部因玻璃基板10之固有之翹曲而下垂之情形。然而,於本實施形態中,構成浮動面板陣列24之浮動面板22係以基板對向面22b之高度位置沿著搬送方向D1逐漸下降之方式配置為階梯狀。因此,即便於通過狹縫26之上方之玻璃基板10之前後端部因翹曲而下垂之情形時,亦可充分地確保玻璃基板10之前後端部與浮動面板22之基板對向面22b之間隔。 In particular, during the period in which the rear end portion of the glass substrate 10 passes over the slit 26, the front end portion of the glass substrate 10 may sag due to the inherent warpage of the glass substrate 10. However, in the present embodiment, the floating panel 22 constituting the floating panel array 24 is arranged in a stepped manner such that the height position of the substrate facing surface 22b gradually decreases in the transport direction D1. Therefore, even when the rear end portion of the glass substrate 10 above the slit 26 is sagged due to warpage, the front end portion of the glass substrate 10 and the substrate facing surface 22b of the floating panel 22 can be sufficiently ensured. interval.
再者,於玻璃基板10之厚度為0.5mm、玻璃基板10之比重為2.19g/cm3、玻璃基板10之楊式模數為70000N/mm2之情形時,且於將玻璃基板10之前後端部之搬送方向D1之尺寸設為30mm之情形時,玻璃基板10之前後端部之向下方之撓曲量之理論值為1.49μm。於本實施形態中,由於狹縫26之搬送方向D1之尺寸L2為30mm,故而預測由玻璃基板10之自重所導致之撓曲量未達2μm。又,於搬送方向D1上相鄰之浮動面板22之基板對向面22b之高度位置之差L4為10μm~20μm。因此,既便於通過狹縫26之上方之玻璃基板10之前後端部因自重而向下方彎曲之情形時,亦抑制玻璃基板10之前後端部與位於搬送方向D1之前方之浮動面板22之基板對向面22b接觸。 In addition, when the thickness of the glass substrate 10 is 0.5 mm, the specific gravity of the glass substrate 10 is 2.19 g/cm 3 , and the Young's modulus of the glass substrate 10 is 70,000 N/mm 2 , and the front end of the glass substrate 10 is used When the dimension of the transport direction D1 of the section is 30 mm, the theoretical value of the amount of deflection of the rear end portion of the glass substrate 10 downward is 1.49 μm. In the present embodiment, since the dimension L2 of the transport direction D1 of the slit 26 is 30 mm, it is predicted that the amount of deflection caused by the self weight of the glass substrate 10 is less than 2 μm. Moreover, the difference L4 between the height positions of the substrate facing surfaces 22b of the adjacent floating panel 22 in the transport direction D1 is 10 μm to 20 μm. Therefore, when the front end portion of the glass substrate 10 above the slit 26 is bent downward due to its own weight, the front end portion of the glass substrate 10 and the substrate of the floating panel 22 located before the transport direction D1 are also suppressed. The opposite surface 22b is in contact.
根據以上內容,本實施形態之基板上浮單元20可抑制通過狹縫26之上方之玻璃基板10之前後端部與浮動面板22接觸。若玻璃基板10之前後端部與浮動面板22接觸,則存在玻璃基板10破損之可能性。因此,玻璃基板搬送裝置100可抑制玻璃基板10之缺陷之產生。 According to the above, the substrate floating unit 20 of the present embodiment can prevent the rear end portion of the glass substrate 10 passing over the slit 26 from coming into contact with the floating panel 22. If the front end portion of the glass substrate 10 is in contact with the floating panel 22, there is a possibility that the glass substrate 10 is broken. Therefore, the glass substrate transfer apparatus 100 can suppress the occurrence of defects of the glass substrate 10.
(3-2) (3-2)
近年來,市售之浮動面板22具備具有較高之平面度之基板對向面22b。又,與浮動面板22及基板上浮單元20整體之水平度相關之不確定要素,可藉由構成基板上浮單元20之各零件之加工精度管理、及基板上浮單元20之位置之精密之測量及調整而大致去除。然而,與玻璃基板10之固有之形狀相關之不確定要素則難以完全地去除。尤其,難以完全地測定連續地被搬送之玻璃基板10之翹曲。 In recent years, the commercially available floating panel 22 is provided with a substrate facing surface 22b having a high degree of flatness. Moreover, the uncertainties related to the levelness of the floating panel 22 and the substrate floating unit 20 as a whole can be measured and adjusted by the processing precision of each component constituting the substrate floating unit 20 and the position of the substrate floating unit 20. And roughly removed. However, the uncertain elements related to the inherent shape of the glass substrate 10 are difficult to completely remove. In particular, it is difficult to completely measure the warpage of the glass substrate 10 that is continuously conveyed.
本實施形態之基板上浮單元20即便於無法完全地測定玻璃基板10之翹曲之情形時,亦可抑制玻璃基板10之前後端部與浮動面板22接觸。因此,玻璃基板搬送裝置100可抑制玻璃基板10之缺陷之產生。 In the substrate floating unit 20 of the present embodiment, even when the warpage of the glass substrate 10 cannot be completely measured, the front end portion of the glass substrate 10 can be prevented from coming into contact with the floating panel 22. Therefore, the glass substrate transfer apparatus 100 can suppress the occurrence of defects of the glass substrate 10.
(3-3) (3-3)
於本實施形態之玻璃基板搬送裝置100中,自浮動面板22之氣體噴出機構22a噴出之氣體之流量隨著朝向搬送方向D1而逐漸增加。 In the glass substrate transfer apparatus 100 of the present embodiment, the flow rate of the gas ejected from the gas ejecting mechanism 22a of the floating panel 22 gradually increases toward the transport direction D1.
於自浮動面板22之氣體噴出機構22a噴出之氣體之流量為沿著玻璃基板10之搬送方向D1固定之情形時,被搬送之玻璃基板10之高度位置會與浮動面板22之基板對向面22b之高度位置一同逐漸下降。然而,藉由使自氣體噴出機構22b噴出之氣體之流量沿著玻璃基板10之搬送方向D1逐漸增加,被搬送之玻璃基板10之高度位置之降低得到抑制。即,被搬送之玻璃基板10之高度位置之變化量變得小於搬送方向D1上之基板對向面22b之高度位置之變化量。藉此,因基板對向面22b之高度位置之變化所引起的被搬送之玻璃基板10之變形得到抑制。 When the flow rate of the gas ejected from the gas ejecting mechanism 22a of the floating panel 22 is fixed along the transport direction D1 of the glass substrate 10, the height position of the glass substrate 10 to be transported and the substrate facing surface 22b of the floating panel 22. The height position gradually decreases. However, by gradually increasing the flow rate of the gas ejected from the gas ejecting mechanism 22b along the transport direction D1 of the glass substrate 10, the decrease in the height position of the glass substrate 10 to be transported is suppressed. In other words, the amount of change in the height position of the glass substrate 10 to be conveyed is smaller than the amount of change in the height position of the substrate facing surface 22b in the transport direction D1. Thereby, deformation of the conveyed glass substrate 10 due to a change in the height position of the opposing surface 22b of the substrate is suppressed.
因此,本實施形態之玻璃基板搬送裝置100可抑制由基板搬送單元30所搬送之玻璃基板10之變形。 Therefore, the glass substrate conveying apparatus 100 of the present embodiment can suppress deformation of the glass substrate 10 conveyed by the substrate conveying unit 30.
(3-4) (3-4)
於本實施形態之玻璃基板搬送裝置100中,包括複數個浮動面板22之浮動面板陣列24沿著寬度方向D2延伸。又,基板檢查單元40之相機40a設置於在搬送方向D1上相鄰之浮動面板陣列24間之狹縫26內。 In the glass substrate transfer apparatus 100 of the present embodiment, the floating panel array 24 including a plurality of floating panels 22 extends in the width direction D2. Further, the camera 40a of the substrate inspection unit 40 is disposed in the slit 26 between the adjacent floating panel arrays 24 in the transport direction D1.
作為參考例,如圖6所示,為抑制因玻璃基板10之翹曲所引起之玻璃基板10與浮動面板22之接觸,考慮將浮動面板22配置為格紋狀之基板上浮單元120。圖6係基板上浮單元之俯視圖。於圖6中,浮動面板22係由陰影區域表示。於該基板上浮單元120中,為檢查玻璃基板10之寬度方向D2之全部區域,需要將基板檢查單元40之相機40a沿著搬送方向D1配置為複數行。因此,存在基板檢查單元40之構成變得複雜、且玻璃基板搬送裝置200整體大型化之問題。 As a reference example, as shown in FIG. 6, in order to suppress contact between the glass substrate 10 and the floating panel 22 due to warpage of the glass substrate 10, it is conceivable to arrange the floating panel 22 as a lattice-like substrate floating unit 120. Fig. 6 is a plan view of the substrate floating unit. In Figure 6, the floating panel 22 is represented by a shaded area. In the substrate floating unit 120, in order to inspect all the areas in the width direction D2 of the glass substrate 10, it is necessary to arrange the cameras 40a of the substrate inspection unit 40 in a plurality of rows along the transport direction D1. Therefore, there is a problem that the configuration of the substrate inspection unit 40 is complicated and the entire glass substrate transfer device 200 is enlarged.
於本實施形態之玻璃基板搬送裝置100中,如圖3所示,藉由將基板檢查單元40之相機40a沿著寬度方向D2設置於一條狹縫26內,可檢查玻璃基板10之寬度方向D2之全部區域。因此,玻璃基板搬送裝置100由於可抑制基板檢查單元40之設置空間,故而可抑制玻璃基板搬送裝置100整體之大型化。 In the glass substrate transfer apparatus 100 of the present embodiment, as shown in FIG. 3, the width direction D2 of the glass substrate 10 can be inspected by providing the camera 40a of the substrate inspection unit 40 in a slit 26 along the width direction D2. All areas. Therefore, since the glass substrate transfer apparatus 100 can suppress the installation space of the board|substrate inspection unit 40, the enlargement of the whole glass substrate conveyance apparatus 100 can be suppressed.
(4)變化例 (4) Variations
以上,雖對本發明之玻璃基板之製造方法進行了說明,但本發明並不限定於上述實施形態,亦可於不脫離本發明之主旨之範圍內,實施各種改良及變更。又,於本實施形態中,雖對玻璃基板之檢查步驟之例進行了說明,但本發明之玻璃基板之搬送裝置亦可用於其他玻璃基板之處理步驟中。 Although the method of manufacturing the glass substrate of the present invention has been described above, the present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention. Further, in the present embodiment, an example of the inspection procedure of the glass substrate has been described. However, the glass substrate transfer apparatus of the present invention can also be used in the processing steps of other glass substrates.
(4-1)變化例A (4-1) Change A
於本實施形態中,基板上浮單元20包括對被搬送之玻璃基板10產生向下之力之氣體抽吸機構22c。然而,亦可於基板上浮單元20之上方設置向下方噴出氣體之其他氣體噴出機構代替氣體抽吸機構22c。自該氣體噴出機構噴出之氣體碰撞被搬送之玻璃基板10之上表面,藉此對被搬送之玻璃基板10賦予向下之力。因此,既便於該情形時,亦對由基板搬送單元30所搬送之玻璃基板10賦予於某程度上矯正玻璃基板10之形狀之力。 In the present embodiment, the substrate floating unit 20 includes a gas suction mechanism 22c that generates a downward force on the glass substrate 10 to be conveyed. However, instead of the gas suction mechanism 22c, another gas discharge mechanism that discharges gas downward may be provided above the substrate floating unit 20. The gas ejected from the gas ejecting mechanism collides with the upper surface of the glass substrate 10 to be transported, thereby imparting a downward force to the glass substrate 10 to be transported. Therefore, in this case, the force of correcting the shape of the glass substrate 10 to some extent is imparted to the glass substrate 10 conveyed by the substrate transfer unit 30.
(4-2)變化例B (4-2) Change B
於本實施形態中,基板檢查單元40之相機40a係如圖4所示設置於一條狹縫26內,但亦可設置於複數條狹縫26內。藉由將基板檢查單元40之相機40a設置於複數條狹縫26內,例如可於每條狹縫26進行測定範圍不同之光學檢查。於該情形時,基板檢查單元40例如可於一條狹縫26內,進行檢測形成於玻璃基板10之表面之損傷及裂痕之光學檢查,於其他狹縫26內,進行檢測存在於玻璃基板10之內部之微小之泡之光學檢查。 In the present embodiment, the camera 40a of the substrate inspection unit 40 is disposed in one slit 26 as shown in FIG. 4, but may be disposed in the plurality of slits 26. By providing the camera 40a of the substrate inspection unit 40 in the plurality of slits 26, for example, an optical inspection having a different measurement range can be performed for each slit 26. In this case, the substrate inspection unit 40 can perform optical inspection for detecting damage and cracks formed on the surface of the glass substrate 10 in one slit 26, and detecting the presence of the glass substrate 10 in the other slits 26, for example. Optical inspection of tiny bubbles inside.
又,於檢查具有經蝕刻處理之表面之玻璃基板之情形時,基板檢查單元40例如可於一條狹縫26內,進行通常之光學檢查,於其他狹縫26內,進行使照度及感光度降低之光學檢查。 Further, in the case of inspecting the glass substrate having the surface to be etched, the substrate inspection unit 40 can perform normal optical inspection in one slit 26, for example, and lower the illuminance and sensitivity in the other slits 26. Optical inspection.
10‧‧‧玻璃基板 10‧‧‧ glass substrate
10a‧‧‧下表面 10a‧‧‧lower surface
22‧‧‧浮動面板 22‧‧‧ floating panel
22a‧‧‧氣體噴出機構 22a‧‧‧ gas ejection mechanism
22b‧‧‧基板對向面 22b‧‧‧substrate opposite
22c‧‧‧氣體抽吸機構 22c‧‧‧ gas suction mechanism
24‧‧‧浮動面板陣列 24‧‧‧Floating panel array
26‧‧‧狹縫 26‧‧‧Slit
40a‧‧‧相機 40a‧‧‧ camera
100‧‧‧玻璃基板搬送裝置 100‧‧‧Glass substrate transfer device
D1‧‧‧搬送方向 D1‧‧‧Transfer direction
L1‧‧‧尺寸 L1‧‧‧ size
L2‧‧‧尺寸 L2‧‧‧ size
L3‧‧‧距離 L3‧‧‧ distance
L4‧‧‧高度位置之差 L4‧‧‧ height difference
Claims (7)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012218267A JP5943799B2 (en) | 2012-09-28 | 2012-09-28 | Glass substrate transfer apparatus and glass substrate manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201412623A TW201412623A (en) | 2014-04-01 |
TWI602763B true TWI602763B (en) | 2017-10-21 |
Family
ID=50536226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102134370A TWI602763B (en) | 2012-09-28 | 2013-09-24 | Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5943799B2 (en) |
KR (1) | KR101929764B1 (en) |
CN (1) | CN203568482U (en) |
TW (1) | TWI602763B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6457802B2 (en) * | 2014-12-05 | 2019-01-23 | AvanStrate株式会社 | Glass plate manufacturing method and glass plate manufacturing apparatus |
JP6741394B2 (en) * | 2014-12-29 | 2020-08-19 | AvanStrate株式会社 | Glass substrate manufacturing method |
JP2016161007A (en) * | 2015-02-27 | 2016-09-05 | 株式会社日本製鋼所 | Gas flotation workpiece support device and non-contact workpiece support method |
JP6595276B2 (en) * | 2015-09-18 | 2019-10-23 | 株式会社Screenホールディングス | Substrate processing apparatus and substrate processing method |
CN108106996B (en) * | 2017-12-25 | 2024-05-28 | 通彩智能科技集团有限公司 | Glass detects holds platform |
USD956790S1 (en) | 2018-08-30 | 2022-07-05 | Samsung Electronics Co., Ltd. | Display screen or portion thereof with graphical user interface |
JP6853520B2 (en) * | 2018-09-20 | 2021-03-31 | 株式会社Nsc | Floating transfer device |
WO2024043280A1 (en) * | 2022-08-25 | 2024-02-29 | 株式会社ナノシステムソリューションズ | Wafer inspection device and wafer transport device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008192718A (en) * | 2007-02-02 | 2008-08-21 | Dainippon Printing Co Ltd | Substrate supporting device, substrate supporting method, substrate processing device, substrate processing method, method of manufacturing component for display device, inspecting device, and inspecting method |
JP2009098052A (en) * | 2007-10-18 | 2009-05-07 | Toppan Printing Co Ltd | Substrate gripping mechanism for substrate transferring device |
JP2011105497A (en) * | 2009-11-20 | 2011-06-02 | Seiko Epson Corp | Apparatus for conveying workpiece and apparatus for ejecting droplet |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07137842A (en) * | 1993-11-17 | 1995-05-30 | Ebara Corp | Magnetic levitating conveyer |
KR101068384B1 (en) * | 2004-06-28 | 2011-09-28 | 엘지디스플레이 주식회사 | Glass support system and support pin structure |
JP4529794B2 (en) * | 2005-05-19 | 2010-08-25 | シンフォニアテクノロジー株式会社 | Gas levitation transfer device |
JP2008254858A (en) * | 2007-04-04 | 2008-10-23 | Yokogawa Electric Corp | Substrate conveying device |
-
2012
- 2012-09-28 JP JP2012218267A patent/JP5943799B2/en active Active
-
2013
- 2013-09-13 KR KR1020130110396A patent/KR101929764B1/en active IP Right Grant
- 2013-09-24 TW TW102134370A patent/TWI602763B/en active
- 2013-09-26 CN CN201320599361.3U patent/CN203568482U/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008192718A (en) * | 2007-02-02 | 2008-08-21 | Dainippon Printing Co Ltd | Substrate supporting device, substrate supporting method, substrate processing device, substrate processing method, method of manufacturing component for display device, inspecting device, and inspecting method |
JP2009098052A (en) * | 2007-10-18 | 2009-05-07 | Toppan Printing Co Ltd | Substrate gripping mechanism for substrate transferring device |
JP2011105497A (en) * | 2009-11-20 | 2011-06-02 | Seiko Epson Corp | Apparatus for conveying workpiece and apparatus for ejecting droplet |
Also Published As
Publication number | Publication date |
---|---|
JP5943799B2 (en) | 2016-07-05 |
KR20140043025A (en) | 2014-04-08 |
KR101929764B1 (en) | 2018-12-17 |
JP2014069936A (en) | 2014-04-21 |
TW201412623A (en) | 2014-04-01 |
CN203568482U (en) | 2014-04-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI602763B (en) | Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate | |
US9273953B2 (en) | Apparatus for inspecting warpage of sheet-like member and method for inspecting warpage of sheet-like member | |
TWI447381B (en) | Glass substrate inspection device and glass substrate inspection method | |
JP6721949B2 (en) | Glass substrate manufacturing method and glass substrate manufacturing apparatus | |
JP2008166348A (en) | Substrate transfer apparatus | |
KR102638514B1 (en) | Glass substrate group and manufacturing method thereof | |
TWI637928B (en) | Glass plate manufacturing method and glass plate manufacturing device | |
JP2007051001A (en) | Method and apparatus for conveying thin sheet-like material | |
WO2021192543A1 (en) | Glass plate production method and production device therefor | |
JP6026603B2 (en) | Glass substrate transfer apparatus and glass substrate manufacturing method | |
TW201732273A (en) | Glass plate manufacturing method | |
JP2012148858A (en) | Substrate floating apparatus | |
JP2014089111A (en) | Display glass substrate shape measurement device and glass substrate manufacturing method | |
JP2013207106A (en) | Production method, transfer method and damage detection method of glass plate | |
JP6259372B2 (en) | Glass substrate manufacturing method and glass substrate manufacturing apparatus | |
JP6690980B2 (en) | Glass substrate transfer method and glass substrate transfer device | |
JP6571413B2 (en) | GLASS PLATE MANUFACTURING METHOD AND GLASS PLATE MANUFACTURING DEVICE | |
JP6549906B2 (en) | Method of manufacturing glass substrate, and apparatus for manufacturing glass substrate | |
CN107857479B (en) | Glass plate | |
JP6484477B2 (en) | Glass substrate manufacturing method and glass substrate manufacturing apparatus | |
KR20200140591A (en) | System and method for detecting defects in a substrate | |
KR20160052192A (en) | Apparatus for transferring substrate and apparatus for inspecting substrate including the same | |
JP5732822B2 (en) | Defect judgment method of glass substrate | |
JP2017014053A (en) | Production method for glass sheet for display, and production apparatus for glass sheet for display | |
JP2013075807A (en) | Method for producing glass substrate with organic thin film, and glass substrate with organic thin film |