JP2012148858A - Substrate floating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the neutralization efficiency of a substrate without deteriorating maintainability in a substrate floating apparatus.SOLUTION: The substrate floating apparatus 2 includes: a floating stage 2a having an air floating mechanism that discharges air for floating on a back surface of a substrate (S); a storage space 2c formed on a substrate supporting surface of the floating stage 2a; and a cylindrical ionizer 3 on which a plurality of ejection holes 3a for spewing ionized air are formed, that is displaced in the storage space 2c and blows the ionized air on the back surface of the substrate (S).

Description

  The present invention relates to a substrate levitating apparatus that levitates a glass substrate used for a liquid crystal display (LCD) or other flat panel display (FPD) by air.

  Conventionally, in a manufacturing process for manufacturing a liquid crystal panel by performing resist patterning on a glass substrate (mother glass) by a photolithography process or an inspection process for inspecting a glass substrate, the mother glass substrate is levitated by air, and this non-contact state A floating stage is used that holds the mother glass substrate by a transfer unit and transfers the mother glass substrate at a constant speed.

  In the case of a levitation stage that levitates and conveys a glass substrate with air, a plurality of levitation plates with air discharge holes are arranged side by side in the conveyance direction, and the glass substrate is levitated by discharging air from the air discharge holes of the levitation plate. I am letting.

  When a glass substrate is levitated by air, static electricity accumulates on the glass substrate and an electrostatic attractive force acts between the glass substrate and the levitating stage, thereby causing a phenomenon that the glass substrate sticks to the levitating stage. When the glass substrate sticks to the levitation stage during conveyance in this way, a new problem arises that a large force is applied between the holding portion of the conveyance unit and the glass substrate and the glass substrate is damaged. Moreover, when static electricity accumulates on the glass substrate, static electricity may spark from the glass substrate during transportation, and the glass substrate may be destroyed.

Therefore, a method is adopted in which an ionizer is attached above the conveyance path and ionized air is blown from above the glass substrate.
However, even if ionized air is blown from above the glass substrate, static electricity accumulated on the back surface of the glass substrate cannot be effectively removed.

  In order to solve these problems, an ionizer is placed in the air supply flow path for levitation air, and a method is used in which the glass substrate is levitated by blowing ionized air from the discharge holes of the levitation stage toward the back surface of the glass substrate. (For example, see Patent Documents 1 and 2).

JP 2006-176289 A JP 2007-194453 A

  However, as described in Patent Documents 1 and 2, when an ionizer is disposed in the supply flow path of the levitation air, the generated ionized air is neutralized or attenuated when passing through a route such as a pipe / chamber. There is a problem that the static elimination efficiency is lowered before the air reaches the glass substrate.

  Furthermore, since the ionizer requires regular maintenance of electrodes and the like, if the ionizer is disposed in the supply air flow path as described in Patent Documents 1 and 2, there is a problem that the maintainability is poor. is there.

  The subject of this invention provides the board | substrate floating apparatus which can raise the static elimination efficiency of a board | substrate, without degrading maintainability in view of the said conventional situation.

  The substrate levitation apparatus of the present invention includes a levitation stage having an air levitation mechanism that ejects levitation air to the back surface of the substrate, a storage space formed on the substrate support surface of the levitation stage, and a discharge hole for ejecting ionized air. A plurality of ionizers that are arranged in the storage space and that blow ionized air against the back surface of the substrate.

  According to the present invention, the neutralization efficiency of the substrate can be increased without deteriorating the maintainability.

It is a principal part top view which shows the substrate processing apparatus provided with the substrate floating apparatus which concerns on 1st Embodiment of this invention. It is a principal part left view which shows the board | substrate floating apparatus which concerns on 1st Embodiment of this invention. It is explanatory drawing for demonstrating the ionizer in 1st Embodiment of this invention. It is a principal part top view which shows the substrate processing apparatus provided with the substrate floating apparatus which concerns on 2nd Embodiment of this invention. It is a principal part top view which shows the substrate processing apparatus provided with the substrate floating apparatus which concerns on 3rd Embodiment of this invention. It is a principal part top view which shows the substrate processing apparatus provided with the substrate floating apparatus which concerns on the modification of 3rd Embodiment of this invention. It is a principal part top view which shows the substrate processing apparatus provided with the substrate floating apparatus which concerns on 4th Embodiment of this invention.

Hereinafter, substrate floating devices according to first to fourth embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>
FIG.1 and FIG.2 is the principal part top view and principal part left view which show the substrate processing apparatus 1 provided with the substrate floating apparatus 2 which concerns on 1st Embodiment of this invention.

  The substrate processing apparatus 1 includes a substrate levitation apparatus 2 that floats and transports a rectangular glass substrate (mother glass substrate) S manufactured in a flat panel display (FPD) production line in the transport direction, and a direction orthogonal to the transport direction. Is provided with a substrate processing unit that performs processing such as inspection, correction, and pattern transfer on the glass substrate S. In the present embodiment, a substrate inspection unit that inspects defects on the glass substrate S is provided as the substrate processing unit. The substrate levitation apparatus 2 includes, for example, a levitation stage 2a having an air levitation mechanism that discharges levitation air to the back surface of the glass substrate S, and a substrate conveyance that holds the glass substrate S levitated on the levitation stage 2a and conveys it in the conveyance direction. A part 2b, a storage space 2c formed on a substrate transport surface that serves as a substrate support surface of the levitation stage 2a, and an ionizer 3 that is stored in the storage space 2c and blows ionized air toward the back surface of the glass substrate S.

  Further, in this embodiment, the substrate inspection unit is an inspection head 4 for inspecting the glass substrate S (illustrated by a two-dot chain line), and a portal gantry (illustrated by a two-dot chain line) arranged so as to straddle the floating stage 2a. 5 is provided. The levitation stage 2a includes a substrate transport unit 2b that transports the glass substrate S by sucking and holding the end or center of the glass substrate S, positioning means for positioning the glass substrate S at a reference position, and the like. In the present embodiment, an example of holding one side parallel to the transport direction of the glass substrate S formed in a rectangular shape is shown as an example of the substrate transport unit 2b.

  The substrate transport unit 2b according to the present embodiment sucks and holds one side of the glass substrate S (the glass substrate S at the position shown in FIG. 1) that has been transported to the transport position of the levitation stage 2a by a transport robot or the like. The inspection head 4 is inspected by moving it back and forth once or a plurality of times to the substrate inspection region R, which is the processing region of the glass substrate S that has floated, along the guide rail provided along the surface, and this inspection is completed. Later, the glass substrate S is transferred again to the carry-out position, which is the same position as the carry-in position. The glass substrate S returned to the carry-out position by the substrate carrying unit 2b is carried out from the floating stage 2a by a carrying robot or the like.

  The levitation stage 2a includes a plurality of transfer levitation plates 2a-1 having a rectangular tile shape for discharging levitation air from an ejection hole formed on the upper surface, and in the present embodiment, the entire substrate inspection region (processing region) R. A precision levitation plate 2a-2 for horizontally levitation of the glass substrate S at a constant height is disposed.

  The transport levitation plates 2a-1 are arranged in a plurality of rows with a predetermined gap in the stage width direction (X-axis direction) on each side of the substrate transport direction (Y-axis direction) across the substrate inspection region R. The The plurality of transport levitation plates 2a-1 disposed in each row are arranged in a straight line in close contact with the substrate transport direction (Y-axis direction). It is preferable that the transport levitation plates 2a-1 in each row are arranged in close contact with each other so that there is no gap between them and the precision levitation plate 2a-2.

Two precision levitation plates 2 a-2 are arranged across the substrate inspection region R, and the length in the stage width direction (X-axis direction) is the same as that of the substrate inspection region R. In the present embodiment, the substrate inspection region (processing region) R is configured as a gap penetrating linearly. In this gap, a light source for transmission illumination that irradiates illumination light from the back side of the glass substrate S is arranged. This gap can be used as a line-shaped storage space for storing the ionizer 3, and the ionizer 3 can be provided along the transmission illumination line so as not to interfere with the transmission illumination line of the light source for transmission illumination.
On both sides of this gap, precision levitation plates 2a-2 are arranged to face each other. In this case, it is desirable to dispose a roller that regulates the back surface of the glass substrate S to the flying height along the gap for transmitted illumination in the pair of precision floating plates 2a-2. By supporting the glass substrate S that passes through the gap for transmission illumination whose levitation pressure is reduced by this roller from the lower side, it is possible to prevent the conveyance tip of the glass substrate S from colliding with the precision levitation plate 2a-2.
As long as the flying height of the glass substrate S can be controlled with high precision, the precision flying plate 2a-2 may be a plurality of the flying plates 2a-1 arranged in the stage width direction without any gaps. This precision levitation plate 2a-2 has the amount of discharge of levitation air per unit area that is not separated by a predetermined gap in the stage width direction (X-axis direction) unlike the conveyance levitation plate 2a-1. The glass substrate S can be precisely levitated even with the same degree as the plate 2a-1. Further, when the processing area for performing processing such as inspection, correction, and pattern transfer is flat, it may be constituted by a single sheet formed to have a length equivalent to the length in the longitudinal direction of the substrate inspection area R (processing area). . It may be a dedicated precision levitation plate 2a-2 in which discharge holes and suction holes are formed and the flying height can be controlled with high accuracy by suction. The precision levitation stage 2a-2 only needs to be arranged along the substrate inspection region R without a gap.
Examples of the substrate inspection unit include a review device that magnifies and observes defects on the glass substrate S, or a macro inspection device that captures a macro image by imaging the glass substrate S with a line sensor. Examples of the processing apparatus that needs to support the glass substrate S horizontally in the processing region include an exposure apparatus that transfers a pattern, a repair apparatus that corrects defects on the glass substrate S, and the like.

The ionizer 3 is a line-shaped storage space 2c formed between the conveying and floating plates 2a-1 arranged in a plurality of rows at the loading / unloading position of the glass substrate S (the position of the glass substrate S shown in FIG. 1). Arranged in the gap in the stage width direction (X-axis direction). In the case of this embodiment, the ionizers 3 are respectively arranged in three line-shaped storage spaces (gap) 2c formed between the conveying and floating plates 2a-1 arranged in four rows. The ionizer 3 has an elongated cylindrical shape, and a plurality of discharge holes 3a for ejecting ionized air are provided on the surface in the longitudinal direction. The ionizer 3 is stored in the storage space 2c so that the upper end of the discharge hole 3a is below the upper surface of the floating stage 2a.
The ionizer 3 employed in the present embodiment has an elongated cylindrical shape that extends in the substrate transport direction (Y-axis direction) with the same length as the glass substrate S. The ionizer 3 blows ionized air directly onto the back surface of the glass substrate S from discharge holes 3a (only a part of which is shown in FIG. 1) provided at regular intervals so as to open upward. The flow paths are independent of air. The linear storage space 2c for storing the ionizer 3 only needs to be formed to have a depth dimension such that the tip of the discharge hole 3a of the ionizer 3 is below the upper surface of the floating stage 2a (the floating support surface of the glass substrate S). . Preferably, the ionizer 3 is arranged so that the tip of the discharge hole 3a is separated from the upper surface (floating surface) of the levitation stage 2a by several millimeters to several tens of millimeters (for example, 1 mm to 50 mm, preferably 1 mm to 10 mm). Thus, interference with the glass substrate S can be prevented, and ionized air can be favorably sprayed on the back surface of the glass substrate S.

  As shown in FIG. 3, an ionizer moving mechanism that moves the ionizer 3 in the horizontal direction (Y-axis direction) or the vertical direction (Z-axis direction), or an ionizer rotation that rotates the ionizer 3 about its longitudinal direction. By arranging the mechanism, for example, the ionization air spray position can be adjusted, the distance between the back surface of the glass substrate S and the ionizer 3 can be adjusted, or the ionization air spray direction can be adjusted.

  Further, instead of the ionizer rotating mechanism, the discharge holes 3a of the ionizer 3 may be formed so as to open in a plurality of directions (for example, a vertically upward direction, a direction inclined therefrom). By doing in this way, ionized air can be simultaneously sprayed on the back surface of the glass substrate S from two or more different directions without providing a complicated rotation mechanism. Further, the ionizer 3 may be configured using, for example, a rectangular pipe having a rectangular cross section instead of a cylindrical shape.

  The inspection head 4 constituting the substrate inspection unit includes a microscope and an imaging unit. In addition, as a board | substrate test | inspection part, you may use the line sensor which images the test | inspection area | region parallel to the width direction (X-axis direction) of the floating stage 2a in a line form. Further, the substrate inspection unit may be one in which a laser irradiation unit or the like used for laser repair is arranged on the inspection head 4.

  The inspection head 4 is movable in the width direction (X-axis direction) of the levitation stage 2a along, for example, a linear motor drive along a guide (not shown) provided on the side surface of the horizontal arm portion of the gantry 5. Therefore, the inspection head 4 can inspect the entire glass substrate S moving in the substrate transport direction (Y-axis direction) by a substrate transport unit (not shown). When the gantry 5 is configured to be movable in the Y-axis direction, the inspection can be performed with the glass substrate S fixed at the reference position, so that the substrate transport unit 2b can be omitted. In the present embodiment, the substrate floating apparatus 2 is applied to the substrate processing apparatus 1 as a substrate inspection apparatus. However, the substrate floating apparatus 2 can also be applied to an exposure apparatus, a repair apparatus, and the like. .

Hereinafter, the operation of the substrate processing apparatus 1 will be described.
First, the glass substrate S is carried into a carry-in position on the floating stage 2a by a carrying robot (not shown). At the time of carrying in, the lifter rises above the floating stage 2a, and the glass substrate S is delivered from the transfer robot to the lifter. When the hand of the transfer robot is pulled out from between the glass substrate S and the floating stage 2a, the lifter is lowered and the glass substrate S is placed in a state where it floats to the carry-in position of the floating stage 2a.

  The glass substrate S that has floated on the floating stage 2a is aligned to a reference position by an alignment means or the like. The glass substrate S aligned at the reference position is sucked and held by the suction pad of the substrate transport unit 2b.

  Since the ionizer 3 is disposed at the loading / unloading position of the glass substrate S, it is possible to blow ionized air directly on the back surface of the glass substrate S from when the glass substrate S is placed on the floating stage 2a. Thereby, even if the glass substrate S is charged in the apparatus of the previous process, the ionizer 3 can reliably remove static electricity at the carry-in stage.

  The substrate transport unit 2b is provided so as to be able to reciprocate along a guide rail provided on one side surface of the levitation stage 2, and reciprocates the glass substrate S to the substrate inspection region R one or more times. In the substrate inspection region R, the inspection head 4 performs enlargement observation and other inspections while appropriately moving along the horizontal arm portion of the gantry 5 in the X-axis direction. When the inspection is completed, the substrate transport unit 2b returns the glass substrate S to the carry-out position, which is the same position as the carry-in position, and after releasing the suction by the substrate transport unit 2b, the substrate transport unit 2b is moved outside the substrate processing apparatus 1 by a lifter, a transport robot, To unload. The ionizer 3 may be configured to continuously discharge ionized air from when the glass substrate S is loaded into the substrate processing apparatus 1 until it is unloaded. Moreover, the ionizer 3 is good also as a structure which discharges ionization air only at the time of carrying in of the glass substrate S, carrying out, immediately before a test | inspection.

  In the present embodiment described above, the ionizer 3 is arranged in the storage space between the transport levitation plates 2a-1 arranged in a plurality of rows, and directly blows ionized air against the back surface of the glass substrate S. Therefore, it is possible to prevent the ions from being neutralized or reduced before reaching the glass substrate S, as compared with the case where the ionizer 3 is arranged in the supply flow path of the levitation air as in the prior art. Further, since the ionizer 3 is disposed in the storage space 2c of the levitation plate 2a-1 independently of the air levitation mechanism, the electrodes of the ionizer 3 and the like can be viewed from above the levitation stage 2a without disassembling the levitation stage 2a. Replacement and maintenance can be performed easily. Therefore, according to this embodiment, the static elimination efficiency of the glass substrate S can be improved without deteriorating the maintainability.

In the present embodiment, the ionizer 3 can be easily attached to a desired position after assembling the levitation stage 2a by disposing the ionizer 3 in the gap between the plurality of transport levitation plates 2a-1. During the maintenance, the ionizer 3 can be easily removed and replaced from the upper side of the floating stage 2a.
In the present embodiment, the ionizer 3 extends in the transport direction (Y-axis direction) of the glass substrate S. For this reason, the glass substrate S can be neutralized in the substrate transport direction (Y-axis direction), and therefore the neutralization efficiency can be further improved.

  Moreover, in this embodiment, the ionizer 3 is arrange | positioned in the carrying-in position and carrying-out position (this embodiment mutually the same position) of the glass substrate S. By providing the ionizer 3 at the position where the glass substrate S is carried in, the glass substrate S charged by the previous process device (upstream device) can be discharged by the ionizer 3 simultaneously with the loading of the glass substrate S. Further, by providing the ionizer 3 at the unloading position of the glass substrate S, the glass substrate S charged in the substrate processing apparatus 1 at the same time as the unloading of the glass substrate S can be discharged by the ionizer 3 and sent to the next process apparatus. . In the case of carrying in by the transfer robot, the transfer robot may be placed beside the substrate processing apparatus 1 and the transfer robot hand may be taken in and out from the direction intersecting the longitudinal direction of the ionizer 3. In this way, by disposing the ionizer 3 so as to intersect the straight direction of the hand of the transfer robot, ionization air can be blown from the back side of the substrate when the glass substrate S is carried in or out by the transfer robot to eliminate static electricity. It becomes possible, and the transfer robot as well as the glass substrate S can be discharged at the same time.

  Further, by forming the discharge holes 3a of the ionizer 3 so as to open in a plurality of directions, ionized air can be blown over a wide area on the back surface of the substrate from two or more different directions, and the charge removal efficiency can be further improved. .

In the present embodiment, the ionizers 3 are arranged in all the gaps between the conveying and floating plates 2a-1 in the stage width direction (X-axis direction), but one or more ionizers 3 may be arranged.
In the present embodiment, an example of the floating stage 2a in which a plurality of rectangular floating tiles 2a-1 are arranged in a plurality of rows is shown. However, a single floating surface having the same size as the glass substrate S is shown. The levitation stage may be constituted by a plate. In the case of using this single floating table, it can be realized by forming a groove that is deep enough to embed the ionizer on the floating plate as a linear storage space for storing the ionizer. When this levitation stage is used as a fixed levitation stage for gantry movement, storage grooves that form a linear storage space for storing the ionizer are formed in a radial, grid or annular shape, and the ionizer is attached to these storage grooves. Thus, ionized air can be satisfactorily supplied to the entire back surface of the glass substrate S.

Second Embodiment
FIG. 4 is a plan view of a principal part showing a substrate processing apparatus 11 including the substrate floating apparatus 2 according to the second embodiment of the present invention.
In the present embodiment, the glass substrate S is loaded at a different position from the carry-out position, that is, the glass substrate S is transported only in one direction from the upstream to the downstream (from left to right in FIG. 3), and the glass substrate S is loaded. The configuration in which the ionizers 12 and 13 are arranged at the position (upstream side conveyance path) and the carry-out position (downstream side conveyance path), respectively, is mainly different from the above-described first embodiment, and the other points are almost the same. For the same points, the same reference numerals as those in FIGS. 1 to 3 are attached to FIG.

  The ionizer 12 on the side of the glass substrate S loading position (glass substrate S-1 in FIG. 4) is a linear storage formed between the transport and levitation plates 2a arranged in a plurality of rows (for example, 4 rows). Each (for example, a total of three) is arranged in each space (gap) 2c. The ionizer 12 has an elongated cylindrical shape extending from the vicinity of the carry-in side end of the levitation stage 2a to the vicinity of the carry-in precision levitation plate 2a-2. The ionizer 12 is provided with discharge holes 12a at regular intervals so as to open upward.

  Since the ionizer 12 is arranged from the vicinity of the carry-in side end of the levitation stage 2a to the vicinity of the carry-in precision levitation plate 2a-2, ionized air is directly applied to the back surface of the glass substrate S from the time of carry-in to before the inspection. Can be sprayed.

  The storage space in the form of a line formed between the transport and levitation plates 2a-1 arranged in a plurality of rows (for example, 4 rows) also for the ionizer 13 on the side where the glass substrate S is unloaded (glass substrate S-2 in FIG. 4). Each (for example, a total of three) is disposed in each (gap) 2c. Further, the ionizer 13 has an elongated cylindrical shape extending from the vicinity of the carry-out side precision levitation plate 2a-2 to the vicinity of the carry-out side end of the levitation stage 2a. The ionizer 13 is also provided with discharge holes 13a at regular intervals so as to open upward.

  Further, since the ionizer 13 is disposed from the vicinity of the carry-out precision levitating plate 2a-2 to the vicinity of the carry-out end of the levitation stage 2a, the ionizer 13 is directly attached to the back surface of the glass substrate S from the inspection to the carry-out. Ionized air can be blown.

  Also according to the second embodiment described above, the ionizers 12 and 13 are arranged independently of the air levitation mechanism including the conveyance levitation plate 2a-1 and the like, and ionized air is applied to the back surface of the glass substrate S. Spray directly. Therefore, also by this embodiment, the static elimination efficiency of the glass substrate S can be improved without deteriorating the maintainability.

  In the present embodiment, the ionizers 12 and 13 are arranged at the carry-in position (upstream conveyance path) and the carry-out position (downstream conveyance path) of the glass substrate S, so that the glass substrate S charged by the apparatus in the previous process is disposed. It can be safely inspected in the state of charge removal, and can be safely carried out to the next process apparatus in the state of charge removal of the glass substrate S charged during conveyance in the substrate processing apparatus.

<Third Embodiment>
FIG. 5 is a plan view of an essential part showing a substrate processing apparatus 21 including the substrate floating apparatus 2 according to the third embodiment of the present invention.
In the present embodiment, an ionizer is arranged in a direction orthogonal to the conveyance direction of the glass substrate S. For example, the substrate processing apparatus 21 which is an inline-type substrate inspection apparatus that inspects the glass substrate S conveyed from the previous process (upstream apparatus) while conveying it in one direction and carries it out to the next process (downstream apparatus). An example in which the substrate floating apparatus 2 is applied will be described. The arrangement of the ionizers 22, 23, 24, and 25 is mainly different from the above-described first and second embodiments, and the other points are substantially the same. For the same points, FIG. The same reference numerals as those in FIG.

  The substrate levitation apparatus 2 is arranged in a part of the conveyance line of the substrate manufacturing process, conveys the glass substrate S sent from the upstream side to the substrate processing unit, and moves the glass substrate S processed by the processing unit to the downstream side. Take it out. The ionizer 22 intersects with the conveyance direction of the glass substrate S in a line-shaped storage space formed at the carry-in side end of the upstream conveyance levitation plate 2a-1 that becomes a connection portion with the upstream conveyance line. Placed in. Moreover, in this embodiment, the ionizer 23 is arrange | positioned in the linear storage space formed in the carrying-out side edge part of the downstream conveyance floating plate 2a-1 used as a connection part with a downstream conveyance line. . Further, a line-shaped storage space formed in a connecting portion between the carry-in transfer levitation plate 2a-1 and the precision levitation plate 2a-2, or the carry-out transfer levitation plate 2a-1 and the precision levitation plate Ionizers 24 and 25 are arranged in a line-shaped storage space formed at the connecting portion between the plate 2a-2.

Each of the ionizers 22, 23, 24, and 25 has an elongated cylindrical shape extending in the stage width direction (X-axis direction) as a direction intersecting the substrate transport direction (Y-axis direction), and is constant so as to open upward. Discharge holes 22a to 25a are provided at intervals.
In the present embodiment, the line-shaped storage space for storing the ionizers 22, 23, 24, and 25 is provided so as to intersect the transport direction of the glass substrate S. However, the longitudinal direction of the storage space (X-axis direction) It is desirable to arrange rollers at predetermined intervals along the line. Each roller may be provided so as to protrude from the upper surface of the floating stage 2a so as to be the same as the flying height of the glass substrate S. By arranging the rollers on both sides of the storage space, the tip side of the glass substrate S can be horizontally supported by the roller and transported safely even if the flying pressure drops in the storage space. By arranging the rollers at least on the downstream side of the storage space, even if the flying pressure decreases in the storage space portion and the flying height of the front end side of the glass substrate S decreases, the front end side of the glass substrate S on the curved surface of the roller Is brought into contact and returned to the flying height position, so that the glass substrate S can be safely transported.

The ionizer 22 can spray ionized air directly on the back surface of the glass substrate S-1 at the carry-in position, and the ionizer 23 can spray ionized air directly on the back surface of the glass substrate S-2 at the carry-out position.
Further, the ionizers 24 and 25 can discharge electricity by blowing ionized air on the back surface of the glass substrate S at least upstream of the substrate inspection region R, and the glass in the substrate inspection region R is not affected by the electrostatic attraction action. The flying accuracy of the substrate S can be increased.

  Also according to the present embodiment described above, the ionizers 22 to 25 are arranged independently of the floating stage 2a composed of the conveying and floating plate 2a-1 and the like, and ionized air is directly applied to the back surface of the glass substrate S. Spray. Therefore, also by this embodiment, the static elimination efficiency of the glass substrate S can be improved without deteriorating the maintainability.

  In the present embodiment, the ionizers 22 to 25 extend in the stage width direction (X-axis direction) orthogonal to the substrate transport direction (Y-axis direction). Therefore, ionized air can be blown over the entire back side of the glass substrate S during the conveyance of the glass substrate S, and therefore the charge removal efficiency can be further increased.

  Further, in the present embodiment, by disposing the ionizer 22 at the carry-in side end of the levitation stage 2, it is possible to remove electricity while feeding the glass substrate S charged upstream into the apparatus. Further, by arranging the ionizer 23 at the carry-out side end of the levitation stage 2a, the glass substrate S charged in the apparatus can be carried out to the downstream side while removing electricity. By disposing the ionizers 22 and 23 in the direction intersecting the transport direction in this way, ionized air can be blown over the entire back surface of the glass substrate S while transporting the glass substrate S, and thus the charge removal efficiency is further improved. Can be increased. The ionizer may be provided at either the end of the carry-in side or the carry-out side of the levitation stage 2a, but is preferably provided at the carry-in end of the levitation stage 2a.

  In the present embodiment, the ionizers 24 and 25 are arranged along the precision levitation stages 2a-2 and 2a-2 arranged on both sides of the substrate inspection region R. The effect of electrostatic attraction can be removed by eliminating static electricity in the vicinity of the required substrate inspection region R. Thereby, it is possible to reliably prevent the glass substrate S from being attracted to the floating stage 2a side by electrostatic attraction, and thus it is possible to suppress the focus of the inspection head 4 from being shifted from the surface of the glass substrate S. Inspection accuracy can be increased. The ionizer should just be arrange | positioned at one of the carrying-in side or the carrying-out side of a board | substrate test | inspection area | region (processing area | region). Further, when the ionizer 22 is provided at the carry-in side end of the levitation stage 2a, the ionizers 24 and 25 arranged at the connection portion with the substrate inspection region (processing region) may be omitted.

  In the present embodiment, the example in which the ionizers 22 to 25 are arranged so as to extend in parallel with the stage width direction (X-axis direction) has been described. However, for example, ionizers 33 and 34 of the substrate processing apparatus 31 illustrated in FIG. Further, the ionizers 33 and 34 are arranged obliquely with respect to the transport direction so as to extend in the stage width direction (X-axis direction) and the substrate transport direction (Y-axis direction) as a direction intersecting the substrate transport direction (Y-axis direction). Also, ionized air can be sprayed over the entire back side of the glass substrate S. The ionizers 33 and 34 were arranged on the diagonal lines of the levitation stages 2a and 2a, but the same can be said by changing the inclination angle from several degrees to 10 degrees with respect to the stage width direction (X-axis direction). An effect can be obtained.

  By forming the line-shaped storage space 2c ′ for storing the ionizers 33, 34 obliquely with respect to the transport direction of the glass substrate S, the leading edge of the transported glass substrate S is always a line-shaped storage space 2c ′. And crossed. For this reason, since only a part of the front end side of the glass substrate S is hung on the storage space 2c ′ formed in a line shape, the glass substrate S can be safely prevented from being affected by a decrease in flying height due to the line-shaped storage space 2c ′. The glass substrate S can be conveyed. The linear storage space 2c shown in FIG. 4 can also be formed obliquely with respect to the conveyance direction of the glass substrate.

<Fourth embodiment>
FIG. 7 is a main part plan view showing a substrate processing apparatus 41 including a substrate floating apparatus 42 according to the fourth embodiment of the present invention.
In the present embodiment, the ionizers 43 are arranged in a staggered manner and the configuration of the transport levitation plate 42a-1 is mainly different from the first to third embodiments described above, and the other points are substantially the same. Therefore, the same points are denoted by the same reference numerals as those in FIGS. 1 to 6 in FIG.

  The ionizers 43 of the substrate levitation apparatus 42 are divided into a plurality of portions and are alternately shifted in a direction intersecting the transport direction of the glass substrate S. In the levitation stage 42a of the present embodiment, the conveying levitation plates 42a-1 formed in a rectangular shape are alternately arranged in the column direction (Y-axis direction) and the row direction (X-axis direction) alternately. The ionizers 43 are arranged in a staggered manner in a space portion at the end of each transport levitation plate 42a-1 orthogonal to the transport direction in a direction orthogonal to the transport direction.

  The ionizer 43 has an elongated cylindrical shape in the stage width direction (X-axis direction), and discharge holes 43a are provided at regular intervals so as to open upward. The length in the longitudinal direction of the ionizer 43 is approximately the same as the width dimension (X-axis direction) of the conveying and floating plate 42a-1 formed in a rectangular shape, that is, the conveying and floating plate 42a- arranged in the row direction. 1 is substantially the same as the width dimension of the gap (X-axis direction).

  Also according to the present embodiment described above, the ionizer 43 is arranged independently of the air levitation mechanism including the transport levitation plate 42a-1 and the like, and directly blows ionized air against the back surface of the glass substrate S. Therefore, also by this embodiment, the static elimination efficiency of the glass substrate S can be improved without deteriorating the maintainability.

  In the present embodiment, the ionizers 43 are arranged in a zigzag shape so as to be orthogonal to the transport direction of the glass substrate S, so that ionized air is favorably distributed over the entire back surface of the glass substrate S transported on the floating stage 42. Can supply. In this case, if the ionizers 43 divided into a plurality are arranged in a staggered pattern that is substantially straight and close to the end of the transfer floating plate 42a-1, the number of times the work table moves is reduced during maintenance work by the work table. Maintenance work efficiency can be improved, which is preferable. Further, by arranging the ionizers 43 in a staggered manner, the tip side of the glass substrate S is partially supported by the transport and floating plate 42 a-1, so that even if the flying pressure is lowered in the storage space of the ionizer 43. The glass substrate S can be maintained safely and transported safely. In this case, it is preferable to arrange the adjacent transport levitation plates 42a-1 so as to overlap in the transport direction when the transport levitation plates 42a-1 are alternately arranged in the direction orthogonal to the transport direction. Thereby, since the conveyance levitation plate 42a-1 is continuously arranged in the direction orthogonal to the conveyance direction between the ionizer 43 arranged on the downstream side and the ionizer 43 arranged on the upstream side, the glass substrate S Can be transported safely by keeping it horizontal.

  In addition, by arranging the ionizer 43 in a plurality of sections, it is possible to partially replace the ionizer 43 that is compact and inexpensive compared to replacement of an expensive ionizer that is arranged in a direction perpendicular to the transport direction. Therefore, there is an advantage that replacement and maintenance work can be facilitated and replacement of parts can be made inexpensively. The ionizers used in the above embodiments can also be divided into a plurality of parts.

  Furthermore, by dividing into multiple parts, even if one of the ionizers 43 fails and does not function, the other ionizers 43 can be used for static elimination, so that the failed ionizer 43 can be removed without stopping the production line for a long time. Can be exchanged.

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Substrate levitation apparatus 2a Floating stage 2a-1 Transport levitation plate 2a-2 Precision levitation plate 2b Substrate transport section 2c Storage space 3 Ionizer 3a Discharge hole 4 Inspection head 5 Gantry 11 Substrate levitation apparatus 12, 13 Ionizer 12a, 13a Discharge hole S Substrate 21 Substrate processing device 22, 23, 24, 25 Ionizer 22a, 23a, 24a, 25a Discharge hole 31 Substrate processing device 33, 34 Ionizer 33a, 34a Discharge hole 41 Substrate processing device 42 Substrate floating device 42a Ascending stage 42a-1 Conveying levitating plate 42a-2 Precise levitating plate 42b Substrate conveying part 43 Ionizer 43a Discharge hole

Claims (15)

A levitation stage having an air levitation mechanism for discharging levitation air to the back surface of the substrate;
A storage space formed on the substrate support surface of the levitation stage;
An ionizer that presents a cylindrical shape provided with a plurality of discharge holes for ejecting ionized air, and that blows ionized air against the back surface of the substrate disposed in the storage space;
A substrate levitation apparatus comprising: In the levitation stage, a rectangular tile-shaped levitation plate that discharges levitation air from an ejection hole formed on the upper surface is disposed with a predetermined gap therebetween.
The substrate floating apparatus according to claim 1. The floating plate is arranged in a plurality of rows with a predetermined gap therebetween, and a line-shaped gap formed between the rows is configured as the storage space in which the ionizer is stored.
The substrate floating apparatus according to claim 2. The levitation plates are alternately arranged in the column direction and every other row direction, and a space portion surrounded by each levitation plate is configured as the storage space.
The substrate floating apparatus according to claim 2. The floating plates are arranged so as to be partially overlapped with each other,
The substrate floating apparatus according to claim 4. The ionizers are alternately arranged in a staggered manner in the storage units arranged in the width direction of the stage.
The substrate floating apparatus according to claim 4. The levitation stage further includes a substrate transport unit that transports the substrate in a levitated state,
Arranged so that the longitudinal direction of the floating plate is along the substrate transport direction of the substrate transport unit,
The ionizer is disposed in the storage space along the substrate transport direction of the substrate transport unit.
The substrate floating apparatus according to claim 2 or 3, wherein The levitation stage further includes a substrate transport unit that transports the substrate in a levitated state,
Arranged so that the longitudinal direction of the floating plate is along the substrate transport direction of the substrate transport unit,
The ionizer is disposed in the storage space so as to intersect the substrate transport direction of the substrate transport unit.
5. The substrate floating apparatus according to claim 2, wherein the substrate floating apparatus is characterized. The levitation stage is constituted by a single levitation plate having the same size as the substrate, and the grooving stage has a radial groove, a lattice groove or an annular groove having a depth capable of embedding the ionizer. The substrate floating apparatus according to claim 1, wherein the substrate floating apparatus is configured as a space. The levitation stage further includes a substrate transport unit that transports the substrate in a levitated state,
The storage space is provided orthogonal to or inclined with respect to the transport direction of the substrate transport unit.
The substrate floating apparatus according to claim 1 or 2, wherein The levitation stage further includes a substrate transport unit that transports the substrate in a levitated state,
The storage space is provided at a connection portion between the levitation stage and a transfer line connected to the substrate levitation apparatus.
The substrate floating apparatus according to claim 1 or 2, wherein The levitation stage further includes a substrate transport unit that transports the substrate in a levitated state,
The levitation stage is disposed on both sides of the processing region with a precision levitation plate that floats the substrate horizontally at a constant height over the entire processing region of the substrate, and a discharge formed on the upper surface. A transport levitation plate for discharging the levitation air from the hole,
The storage space for storing the ionizer is provided in a connecting portion between the precision levitation plate and the transport levitation plate,
The ionizer is disposed in the storage space so as to intersect the transport direction of the substrate transport unit.
The substrate floating apparatus according to claim 1. The levitation stage further includes a substrate transport unit that transports the substrate in a levitated state,
The levitation stage has a precision levitation plate that levitates the substrate horizontally at a constant height over the entire processing region of the substrate,
Forming a gap for transmitted illumination in a direction intersecting the conveyance direction of the substrate conveyance section in the precision levitation plate, and also using this gap as the storage space;
The substrate floating apparatus according to claim 1. 14. The substrate floating according to claim 10, further comprising: a roller configured to regulate a back surface of the substrate to a flying height along the storage space formed in a direction intersecting a transport direction of the substrate transport unit. apparatus. The ionizer is divided into a plurality of and arranged in the storage space formed in a direction intersecting the transport direction of the substrate transport unit,
14. The substrate floating apparatus according to any one of claims 10 to 13, wherein