JP5732822B2 - Defect judgment method of glass substrate - Google Patents

Description

  The present invention relates to an apparatus for manufacturing a liquid crystal display device. More specifically, it is necessary to detect the occurrence of cracks, chips and cracks during the manufacturing process of a glass substrate used in a liquid crystal display device, and to eliminate such a glass substrate so that it is not subjected to the next processing. The present invention relates to an apparatus for manufacturing a liquid crystal display device.

  Several methods are used for manufacturing a liquid crystal color filter used in a liquid crystal display device. On the basis of photolithography, there are some that partially use an inkjet apparatus, and some that use a screen printing apparatus and an offset printing apparatus.

  For example, a case where a liquid crystal color filter is manufactured by photolithography will be described as an example. In order to form a black matrix (resin BM) made of resin, first, a black photosensitive resin that becomes resin BM is formed on a cleaned glass substrate. Apply and dry and solidify. Next, in order to pattern the resin BM, the resin BM is formed on the glass substrate by exposure using a photomask and an exposure apparatus on which a desired pattern is formed, followed by development and drying. The

  Next, for the color layers such as red, green, and blue, a necessary color layer is formed by repeating the same process as that for the resin BM corresponding to the number of color layers to be formed.

  In addition, a pattern for aligning photo spacers or liquid crystals may be formed. Moreover, a protective layer etc. may be formed as needed. Polishing may be applied. Moreover, in order to function as a liquid crystal display device, a transparent electrode is formed. An alignment process for aligning the liquid crystal material is also performed.

  The liquid crystal color filter is manufactured through the above-described processes, but in each processing apparatus such as a cleaning apparatus, a drying apparatus, a coating apparatus, an exposure apparatus, a polishing apparatus, and a thin film forming apparatus. The glass substrate will be processed. In addition, a transfer device such as a transfer robot is always installed at the entrance and exit of these devices.

  Glass substrates are manufactured by repeating the process of being transported into and processed by these conveyors, processed, and exiting the processor and transported to the next processor by the conveyor. In the middle of the process, the glass substrate may be cracked, chipped or cracked.

  When a defect such as a crack, a chip or a crack occurs in a glass substrate, there is a possibility that it can no longer be used as a product. Whether it is a defect that can be used or not is not known until it is inspected by an inspection apparatus in the process. Therefore, even if the glass substrate is defective due to a defect, the process flows and wasteful costs are incurred.

  Therefore, for example, in Patent Document 1, a device is devised in which a pattern is formed on a glass substrate so that the degree of size of cracks and chips can be visually determined.

However, the method of Patent Document 1 can deal with cracks and chips, but cannot deal with cracks. In addition, there is a problem that it is difficult to deal with when there are many types of cracks and chips.

JP 2003-279919 A

The object of the present invention is to detect not only cracks / chips in the glass substrate but also cracks, and detect defects before entering the next process from the process where cracks / chips / cracks occur, thereby To provide a defect inspection method capable of eliminating a defective glass substrate.

As means for solving the above problems, claim 1 of the present invention, while conveying and supporting the glass substrate by a plurality of conveying rollers comprising a load measuring mechanism, the method for determining the presence or absence of a defect of the glass substrate, the load applied to each of the transport rollers is measured by the respective load measuring mechanism of a plurality of transport rollers, a defect determination method for a glass substrate, characterized in that to determine the presence or absence of a defect by the previous yn weight difference.

  According to the present invention, it is possible to detect cracks, chips, and cracks in the glass substrate by the transport device used in the manufacturing process of the liquid crystal display device.

Conceptual diagram showing an example of a transport device of the present invention Conceptual diagram showing an example of a glass substrate with cracks and chips Example of load data indicating cracks and chips obtained from the transfer device of the present invention Example of load data indicating cracks and chips obtained from the transfer device of the present invention Conceptual diagram showing an example of a cracked glass substrate Example of load data indicating cracks obtained from the transfer device of the present invention Example of load data indicating cracks obtained from the transfer device of the present invention Example of load data indicating a normal glass substrate obtained from the transfer device of the present invention Example of load data indicating a normal glass substrate obtained from the transfer device of the present invention

The present invention will be described with reference to the drawings.
Figure 1 is a conceptual diagram showing a conveying apparatus for conveying in contact with glass substrate, as shown in diagram showing the right side of FIG. 1, for conveying without damaging while supporting the glass substrate A conveyance roller 2 and a driving roller (not shown) are provided, and the glass substrate 5 that has come out of the processing apparatus of the previous process is conveyed by the conveyance roller 2 while being driven and pulled out by the driving roller. Transport to processing equipment.

  The conveyance device 1 is provided with a conveyance roller 2 and a driving roller (not shown). At least the conveyance roller 2 is provided with a load measuring mechanism 3 for measuring the load of the glass substrate 5. The load that the transport roller 2 receives from the glass substrate 5 is measured. When measuring a load, conveyance of a glass substrate is stopped temporarily, after measuring a load, conveyance is restarted and it conveys to the following processing apparatus. At that time, when the measurement result of the load is not a non-defective product, the transfer device discharges the glass substrate from the process. If it is determined that the product is a non-defective product, it is transported to the next processing device. As the load measuring mechanism 3, a special one is not required, and a load measuring mechanism used in various commercially available weight measuring devices such as a scale can be adopted.

  FIG. 2 is a conceptual diagram showing an example of a glass substrate in which cracks and chips have occurred. An example in which the end of the glass substrate 5 is lost due to cracking and chipping is shown.

Figure 3 shows an example of the load data indicating a crack resulting from the transport device of FIG. 1, the chipping. It is the example which represented the measurement data when a crack and a chip | tip generate | occur | produce in the site | parts shown in FIG. 2 on the three-dimensional graph. In this way, when the transport roller is located in a portion where the glass substrate is lost due to cracking or chipping, no load is applied, so that a load smaller than the surroundings is measured.

Figure 4 also shows an example of the load data indicating cracks resulting from the conveying device of FIG. 1, the chipping 6. This is a graph expressed as a two-dimensional graph. The load is 0 at the cracks and cracks (same meaning as cracks and chippings 6). Moreover, it shows that the load decreases as the distance from the crack / bake portion increases. It is considered that there is no influence from cracks and burrs at sufficiently distant sites. In the case of a crack or chip, the weight is 0, as can be seen from this data. From this, it can be determined that this defect is cracked or chipped. Also, even if the cracked or chipped part is not applied to the transport roller, the load decreases as it moves away from the crack or chip as shown in FIG. it can.

  FIG. 5 is a conceptual diagram illustrating an example of a glass substrate on which cracks have occurred.

Figure 6 is an example of the load data indicating a crack resulting from the conveying device of FIG. If there is a crack in the glass substrate portion shown in FIG. 5, a change in load as shown in FIG. 6 is observed.

7, likewise shows an example of the load data indicating a crack resulting from the conveying device of FIG. As for the load of the cracked portion, a load smaller than the surrounding area is measured. The difference from the case where there are cracks and cracks is that there is only cracks and the overall load has not changed. The phenomenon of increasing load is measured. A constant load is applied at a sufficiently distant portion. In the case of cracks, as can be seen from this data, the load is not zero. Also, the load on the cracked part is smaller compared to the separated part, but as it gets away from the cracked part, it becomes once lower than the further separated part, and it shows that it shows a constant value. Yes. When such a measurement result that the load fluctuates is obtained, it can be determined that the defect is a crack.

8 and 9, an example of the load data indicating a normal glass substrate obtained from the conveying device of FIG. In this case, it can be seen that the load is uniformly applied to the transport roller. In such a case, it can be seen that the glass substrate is free from defects such as cracks, chips and cracks.

As described above, the conveying apparatus having a load weight measuring mechanism, cracks in the glass substrate, even when the crack even if chipping occurs occurs, it is possible to detect their presence.

DESCRIPTION OF SYMBOLS 1 ... Conveying device 2 ... Conveying roller 3 ... Load measuring mechanism 4 ... Shaft 5 ... Glass substrate 6 ... Crack, chipping 7 ... Crack

Claims (1)

In the method of determining the presence or absence of defects in the glass substrate while supporting and transporting the glass substrate with a plurality of transport rollers provided with a load measuring mechanism, the load measuring mechanism of each of the plurality of transport rollers causes each of the transport rollers to such load is measured, defect determination method for a glass substrate, characterized in that to determine the presence or absence of a defect by the previous yn weight difference.