JP5347452B2 - Surface inspection machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a color filter surface inspection machine provided in a conveyance system between an application device 12 and an exposure device 13, capable of total inspection by shortening a time required for inspection. <P>SOLUTION: A conveyance roller 33 provided in the color filter surface inspection machine is used for reception of a glass substrate 1 from a conveyance route using a conveyance roller 53 into the color filter surface inspection machine 40, and for transfer of the glass substrate from the color filter surface inspection machine onto the conveyance route. The conveyance roller is provided in a roller unit 30, and is evacuated out of the conveyance route during inspection. A plurality of imaging cameras 44 are provided, to thereby image an effective area 1a on the glass substrate to be divided simultaneously. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a surface inspection machine in a production line for producing a color filter, and in particular, 100% inspection is possible so that even a defect due to sudden fluctuation in a coating apparatus can be always detected, The present invention relates to a color filter surface inspection machine provided in a transport system between a coating apparatus and an exposure apparatus.

  As a method of manufacturing a color filter used in a liquid crystal display device, first, a black matrix is formed on a glass substrate, and then a colored pixel is aligned with the black matrix pattern on the glass substrate on which the black matrix is formed. In addition, a method of forming a transparent conductive film, a photospacer, an alignment control protrusion, and the like in sequence is widely used.

  The black matrix is a light-shielding layer with a predetermined part as an opening, determines the position of the colored pixels of the color filter at the opening, makes the size uniform, and when used in a display device, It has a function of blocking unwanted light and making the image of the display device a uniform image with no unevenness and an improved contrast. For example, the black matrix is formed by a photolithography method using a black photoresist.

In addition, the colored pixels formed in the openings of the black matrix have, for example, a filter function that allows light in a predetermined wavelength range of red, green, and blue to pass through. On the glass substrate on which the black matrix is formed In addition, for example, a method of forming a negative photoresist coating film in which a pigment such as a pigment is dispersed and forming colored pixels by exposing and developing the coating film is employed.
The transparent conductive film is formed on a glass substrate on which colored pixels and a black matrix are formed by, for example, forming a transparent conductive film by sputtering using ITO (Indium Tin Oxide).

  In addition, the photo spacer, the alignment control protrusion, and the like are formed by a photolithography method in the same manner as the black matrix or the colored pixel.

  When these black matrix and colored pixels are formed as a pattern by a photolithography method, for example, a glass substrate is subjected to a cleaning process by a cleaning device (11), and then a photoresist is applied by a coating device (12). Pattern exposure by the exposure device (13), development processing by the development device (14), and post-baking processing by the heating device (15) are sequentially performed to form a predetermined pattern on the glass substrate.

  FIG. 1 is a plan view showing an example of an array of production lines for forming a predetermined pattern on a glass substrate. As shown in FIG. 1, each apparatus which comprises a production line (10) is connected, and as shown by the white thick arrow, in FIG. 1, the glass substrate carried into the washing | cleaning apparatus (11) on the left in FIG. Are sequentially subjected to a cleaning process and a post-bake process to form a predetermined pattern on the glass substrate.

The appearance defects generated in the manufacturing process of the color filter are divided into a wide area defect and a narrow area (point) defect depending on the size (range). Wide area defects are represented by color unevenness, which is a color density defect over a wide range on a color filter. This color unevenness mainly occurs due to film thickness unevenness of the photoresist coating film in the coating process. In addition, the narrow area (point) defect is a chipped pattern, a pattern remaining, a foreign matter adhesion, etc., but in the coating process, the foreign matter adhesion is mainly mentioned.

FIG. 2 is a plan view showing an example of an appearance inspection of a coating film performed between the coating apparatus (12) and the exposure apparatus (13) shown in FIG. As shown in FIG. 2, a transfer device (C1) such as a roller conveyor is provided between the coating device (12) and the exposure device (13). A transfer robot (R1) for transferring the glass substrate is provided between the front part (C1a) and the rear part (C1b) of the transfer device (C1).
Moreover, the color filter surface inspection machine (20) which performs the external appearance inspection of a coating film is provided in the side part of the manufacturing line (10) adjacent to the transfer robot (R1).

  This color filter surface inspection machine (20) is a surface inspection machine that mainly inspects film thickness unevenness and adhesion of foreign matter. When the size of the glass substrate is as large as 730 × 920 mm and 1100 × 1300 mm, the time required to inspect one glass substrate is the time required for each of the devices constituting the production line to process. Since it becomes longer than the time, as indicated by the flow line 1 (D1), the transfer robot (R1), for example, pulls out the glass substrate at a rate of one out of several sheets to the color filter surface inspection machine (20). Transfer. After the inspection by the color filter surface inspection machine (20), the transfer robot (R1) transfers this glass substrate to the rear part (C1b) of the transfer device (C1) as indicated by the flow line 3 (D3). Then, the rear part (C1b) is conveyed to the exposure apparatus (13).

Further, as indicated by the flow line 0 (D0), the transfer robot (R1) transfers the glass substrate that has not been removed from the front part (C1a) to the rear part (C1b) of the transfer device (C1), and the rear part. (C1b) is conveyed to the exposure apparatus (13).
The glass substrate determined to be defective by the color filter surface inspection machine (20) is not subjected to, for example, the processing after the exposure apparatus (13), and is removed from the line after unloading from the production line (10).

3 is a plan view showing an example of the color filter surface inspection machine (20) shown in FIG. 2, FIG. 4 is a sectional view taken along line AA in FIG. 3, and FIG. 5 is taken along line BB in FIG. FIG.
There are two types of inspection of color filters, transmission inspection using transmitted light and reflection inspection using reflected light. For film thickness unevenness and foreign matter adhesion, it is easier and more accurate to detect a defect and identify whether it is good or bad by transmission inspection. FIG. 3 shows an example in which a surface inspection machine using transmission inspection is used. In FIG. 3, for the sake of explanation, it is assumed that the XY axes shown in FIG. 2 are rotated by 90 °.

As shown in FIGS. 3 to 5, the color filter surface inspection machine (20) includes a frame (21), a substrate catch (22), an air cylinder (23), an imaging camera (24), and a light source (25). Has been.
The glass substrate (1) provided with the coating film on the upper surface is held on the frame (21) via the substrate catching nail (22), and the light source (25) transmits the inspection light to the glass substrate (1). Irradiate above the lower surface of The transmitted light that has passed through the glass substrate (1) is received by the imaging camera (24), and the signal is transmitted to an image processing device (not shown). The image processing device processes the signal to detect defects (mainly The film thickness unevenness and the adhesion of foreign matter are identified and the quality is judged.

  The frame (21) for holding the glass substrate (1) is a rectangular frame having a width (W1), and the peripheral portion of the glass substrate (1) is placed on the upper surface of the glass substrate (1) via the substrate catching nail (22). Hold. The frame (21) is fixed in the color filter surface inspection machine (20) and is not movable.

The air cylinder (23) is provided on the upper surface of the frame (21), and is an elevating mechanism that elevates and lowers the glass substrate (1) through the substrate receiving claws (22). The raising and lowering of the glass substrate (1) is provided with a sufficient interval for entering / retreating when a robot fork described later enters or retreats between the frame (21) and the glass substrate (1). Is to be done.
In FIG. 3, three air cylinders (23) are provided at each of the four edges of the frame (21).

  The substrate catching claw (22) is Z-shaped in cross section, and its upper lower surface is connected to the air cylinder (23), and receives and holds the peripheral edge of the glass substrate (1) on the lower upper surface. The substrate catching claw (22) is provided corresponding to each of the air cylinders (23) and moves up and down as the air cylinder (23) moves up and down. When the substrate catching claw (22) is holding the peripheral edge of the glass substrate (1), the frame (21) is moved up and down while holding the glass substrate (1) as the air cylinder (23) is moved up and down. To do.

The imaging camera (24) is provided above the frame (21), and is an imaging camera for color filter defect inspection using, for example, a CCD area sensor as an imaging device. The upper surface of the glass substrate (1) shown in FIGS. 4 and 5 is the focal plane of the imaging camera (24), and the distance (H1) between them is constant.
The imaging camera (24) can move stepwise horizontally from the position (Y ₁ , X ₁ ) above the frame (21) shown in FIGS. 4 and 5 in the direction of two axes (Y axis, X axis). It is like that.

The light source (25) is a light source for transmission inspection. It is provided below the frame (21), and the planar shape is a rectangle having a long side in the direction of one axis (X axis). As shown in FIGS. 4 and 5, the long side dimension (a) of the light source (25) is larger than the short side dimension (c) of the glass substrate (1), and the short side direction of the glass substrate (1) is It is possible to sufficiently irradiate. The short side dimension (b) of the light source (25) is approximately half the long side dimension (d) of the glass substrate (1). Accordingly, when the light source (25) irradiates the right half of the long side of the glass substrate (1) in FIG. 4, from the position (Y ₁ ) shown in FIG. Step movement can be performed horizontally in the direction.

  Although a side wall is provided around the color filter surface inspection machine (20), an opening for the robot fork (R1-f) to enter / retreat is provided on the right side wall in FIG. Is provided. When the imaging camera (24) images the glass substrate (1) at the time of inspection, the opening is provided with a shutter that can be opened and closed in order to shield external light from the opening. In FIG. 5, the shutter is omitted.

  FIG. 6 is a plan view for explaining a method for inspecting the glass substrate (1) by dividing the region. As shown in FIG. 6, when the size of the glass substrate (1) is large (730 × 920 mm) to (1100 × 1300 mm), one entire glass substrate (1) is taken from the resolution of the image sensor. The image pickup camera (24) cannot pick up images and inspect them at all, but divides them for inspection. FIG. 6 shows an example of a method in which the effective area of the glass substrate (1) is divided into four to form four inspection areas, and the four inspection areas are individually inspected.

  In FIG. 6, reference numeral (1) represents a glass substrate having a size of about (730 × 920 mm) to (1100 × 1300 mm). Reference numeral (1a) represents an effective area on the glass substrate on which various patterns constituting the color filter are formed. Reference numeral (1b) represents the boundary of the inspection area obtained by dividing the effective area (1a) into four.

The effective area (1a) is divided into a first inspection area (1Ar), a second inspection area (2Ar), a third inspection area (3Ar), and a fourth inspection area (4Ar). The center of the first inspection area (1Ar) is the first inspection point (K1) (Y ₁ , X ₁ ), and the imaging camera (24) images the first inspection area (1Ar) from above this point.

The center of the second inspection area (2aR) ~ fourth test area (4aR), each second inspection point _{(K2) (Y 2, X} 1) ~ fourth test point _{(K4) (Y 1, X} 2 ). First, an imaging camera (24) is moved above the first inspection point (K1) (Y _1, X _1), to inspect the first inspection area (1AR). Then, the imaging camera (24) is moved above the second inspection point (K2) (Y _2, X _1), inspect the second inspection area (2aR). Similarly, the third inspection area (3Ar) and the fourth inspection area (4Ar) are inspected.

In FIG. 6, a code | symbol (1c) is an area | region on the glass substrate (1) when an imaging camera (24) images the 1st inspection area (1Ar). Although slightly larger than the area of the first inspection area (1Ar), the second inspection area (2Ar) and the subsequent images are similarly picked up, and the above-described image processing apparatus performs inspections with no omission and no overlap between the inspection areas. I am doing so.
The position in the image pickup camera (24) shown in FIGS. 3 to 5 are above the first inspection point shown in FIG. _{6 (K1) (Y 1,} X 1).

7 to 10 show a first inspection area (1Ar) to a fourth inspection area obtained by dividing the effective area (1a) on the glass substrate (1) into four by using the color filter surface inspection machine (20) shown in FIG. It is explanatory drawing which shows the operation | movement which test | inspects (4Ar).
FIG. 7 shows an operation in which the fork (R1-f) of the robot on which the glass substrate (1) is placed enters the color filter surface inspection machine, and the glass substrate (1) is transferred to the substrate receiving claw (22). FIG. 8 shows an operation of inspecting the first inspection area (1Ar) of the glass substrate (1) held on the frame (21) through the substrate catching nail (22). FIG. 9 shows an operation of inspecting the second inspection area (2Ar) of the glass substrate (1) held on the frame (21) through the substrate catching nail (22). In FIG. 10, the inspection of the third inspection area (3Ar) and the fourth inspection area (4Ar) is completed, and the glass substrate (1) is carried out of the color filter surface inspection machine by the fork (R1-f) of the robot. The operation is shown.

As shown in FIG. 7, the imaging camera (24) has moved to its standby position (Y ₀ ), and the light source (25) has moved to its standby position. First, the air cylinder (23) is actuated to raise the substrate catch (22), and the robot fork (R1-f) is colored between the lower surface of the substrate catch (22) and the upper surface of the frame (21). An interval (S1) at which the filter surface inspection machine can be retracted is provided.

  Next, the robot fork (R1-f) with the glass substrate (1) placed on the upper surface thereof enters the color filter surface inspection machine from the right side in FIG. The fork (R1-f) horizontally enters the space above the substrate catch (22) raised by the air cylinder (23). This fork (R1-f) is the fork (R1-f) shown on the right side of the color filter surface inspection machine (20) in FIG. 3, and as shown by the flow line 2 (D2), the color filter surface inspection. Enter the color filter surface inspection machine from the right side of the machine (20).

In the flow line 2 (D2) shown in FIG. 7, the fork (R1-f) on which the glass substrate (1) is placed enters, and the tip of the glass substrate (1) is the left and right substrate catches (22) in FIG. The fork (R1-f) is lowered vertically while moving the glass substrate (1) onto the substrate catching nail (22), and further lowered to the substrate. The flow line which retreats out of the space | interval (S1) between the lower surface of a receiving nail | claw (22) and the upper surface of a frame (21) out of a color filter surface inspection machine is represented.
As shown in FIG. 3, in plan view, the substrate catching claw (22) is provided at a position where it does not interfere when the fork (R1-f) retreats / enters. The retreat is done without any problem.

As shown in FIG. 8, after the fork (R1-f) retreats, the air cylinder (23) lowers the substrate catching claw (22), and the glass substrate (1) is moved to the frame (22) via the substrate catching claw (22). 21) and the imaging camera (24) moves above the first inspection point (K1) (Y ₁ , X ₁ ) to inspect the first inspection area (1Ar), and the light source ( 25) moves below the first inspection point (K1) (Y ₁ , X ₁ ). In this state, the first inspection area (1Ar) is inspected.

FIG. 9 shows that after the inspection of the first inspection area (1Ar), the imaging camera (24) and the light source (25) are connected to the second inspection point (K2) (Y ₂ , FIG. 7 shows a state where the step movement (Py) shown in FIG. 6 is performed above and below X ₁ ). In this state, the second inspection area (2Ar) is inspected.
Continued third inspection area (3aR), examination of the fourth test area (4aR) is shown in FIG. 6, the third test point _{(K3) (Y 2, X} 2), the fourth test point (K4) (Y ₁ , X ₂ ).

FIG. 10 shows an operation in which the inspection of the first inspection area (1Ar) to the fourth inspection area (4Ar) is completed and the glass substrate (1) is carried out from the color filter surface inspection machine. The imaging camera (24) horizontally moves to the standby position (Y ₀ ), and the light source (25) horizontally moves to the standby position. Further, the air cylinder (23) is operated to raise the substrate catching claw (22), and the robot fork (R1-f) is colored between the lower surface of the substrate catching claw (22) and the upper surface of the frame (21). An interval (S1) that allows entry into the filter surface inspection machine is provided.

Next, the fork (R1-f) on which the glass substrate is not placed enters the color filter surface inspection machine from the right side in FIG. The fork (R1-f) enters the space (S1) between the lower surface of the substrate receiving claw (22) and the upper surface of the frame (21) horizontally and stops when it reaches a predetermined position. The glass substrate (1) held by the substrate receiving claws (22) is supported by the lower surface while being lifted vertically while maintaining the horizontal state, and is lifted upward to place the glass substrate (1) on the fork (R1-f).
After the fork (R1-f) further rises, the fork (R1-f) retreats horizontally in the space above the substrate catching claw (22). The flow line 4 (D4) represents the flow line of the fork (R1-f) during this period.

  The above-described example is an example of a method in which the effective area of the glass substrate (1) is divided into four to form four inspection areas, and the four inspection areas are individually inspected. In actual work, when manufacturing a large glass substrate with multiple color filters, the number of areas that can be divided is limited by the number of impositions and the definition of the pattern to be formed. ~ 12 inspection area.

  Therefore, the time required for inspecting one glass substrate is, for example, about 90 to 120 seconds. This is because the time required for the production line required to process one glass substrate is, for example, about 20 seconds, so (90 seconds / 20 seconds) to (120 seconds / 20 seconds), that is, Surface inspection is performed by extracting one sheet from 4.5 to 6.0 sheets.

For example, even if the surface inspection is performed by sampling one out of four sheets, an abnormality in the coating apparatus can be detected as long as film thickness unevenness and foreign matter adhesion change over time. It is easy. However, in an actual operation, in the case of a sudden change in the coating apparatus, there is a problem that the glass substrates that have been extracted, that is, the glass substrates that have not been extracted flow out as defective products.
JP-A-8-94493 JP 2006-234217 A

The present invention has been made to solve the above problems, and in a surface inspection machine between a coating apparatus and an exposure apparatus in a production line for manufacturing a color filter, even if a defect is caused by a sudden change in the coating apparatus. An object of the present invention is to provide a color filter surface inspection machine that can reduce the time required for inspection so that all inspections can be performed so that it can always be detected, and can be provided in a transport system between a coating apparatus and an exposure apparatus. Is.
As a result, the inspection of film thickness unevenness and foreign matter adhesion caused by the coating apparatus can be applied to the total number of glass substrates, and film thickness unevenness and foreign matter adhesion outflow due to sudden fluctuations can be prevented. . Further, by providing the surface inspection machine provided on the side of the production line in the transport system of the production line, the area of the clean room is reduced, and the initial investment and maintenance costs are reduced.

In the present invention, it detect defects of the coating film on the glass substrate provided on the conveying path of the manufacturing line front surface inspection machine,
To pass glass substrate, and the conveyance rollers provided on the front surface inspection machine,
A roller unit comprising the left roller unit and the right roller unit, each of which includes the transfer roller and retracts outside the transfer path in the left and right directions orthogonal to the transfer path,
A rectangular frame-like frame for holding the glass substrate;
An elevating mechanism for elevating the frame;
A light source that emits inspection light from below the glass substrate;
An imaging camera for imaging the glass substrate from above;
With
1) When the glass substrate is transported to a predetermined position in the transport path,
2) By the operation of the elevating mechanism, the frame ascends vertically from its standby position and lifts upward while supporting the lower surface of the peripheral edge of the glass substrate on the conveying roller, and the upper surface of the glass substrate is the imaging camera Rising until reaching the focal plane of
3) The left roller unit and right roller unit of the transfer path are retracted out of the transfer path,
By 4) the light source, a front surface inspecting machine characterized that you captured using the imaging camera for effective area of the glass substrate with light irradiation.

The present invention is provided in a color filter surface inspection machine for receiving a glass substrate from a conveyance path using a conveyance roller to a color filter surface inspection machine and delivering a glass substrate from the color filter surface inspection machine to the conveyance path. Using a transfer roller, and dividing the effective area of the glass substrate with multiple imaging cameras and simultaneously capturing images, the time required for inspection is shortened and 100% inspection is possible, and the transfer system between the coating device and the exposure device It becomes a color filter surface inspection machine which can be provided in the.
As a result, the inspection of film thickness unevenness and foreign matter adhesion caused by the coating apparatus can be applied to the total number of glass substrates, and film thickness unevenness and foreign matter adhesion outflow due to sudden fluctuations can be prevented. . Further, by providing the surface inspection machine provided on the side of the production line in the transport system of the production line, the area of the clean room is reduced, and the initial investment and maintenance costs are reduced.

  Hereinafter, embodiments of the present invention will be described in detail.

  FIG. 11 is a plan view showing a space between a coating apparatus and an exposure apparatus in an example of a color filter production line in which color filter surface inspection machines according to the present invention are arranged. The conveyance path shown in FIG. 11 uses a conveyance roller, and a conveyance device (C11) using the conveyance roller is provided between the coating device (12) and the exposure device (13). A color filter surface inspection machine according to the present invention is arranged between the front part (C11a) and the rear part (C11b) of the transport device (C11).

As indicated by the flow line 11 (D11), the color filter surface inspection machine (40) according to the present invention is provided in the color filter surface inspection machine from the front portion (C11a) of the transfer device (C11) using the transfer roller. The glass substrate is received using the transport roller, the glass substrate is inspected, and the glass substrate is transferred to the rear part (C11b) using the transport roller provided in the color filter surface inspection machine.
In the color filter surface inspection machine (40) according to the present invention, not the sampling inspection of the glass substrate but the total number of the glass substrates being conveyed is received, the total number is inspected and transferred to the rear part (C11b). .

  12 is a plan view showing an example of the color filter surface inspection machine (40) according to the present invention shown in FIG. 11, FIG. 13 is a sectional view taken along line AA in FIG. 12, and FIG. 14 is in FIG. It is sectional drawing in the BB line. This color filter surface inspection machine (40) is a surface inspection machine by transmission inspection.

  As shown in FIGS. 12-14, the color filter surface inspection machine (40) is comprised by the flame | frame (41), the imaging camera (44), the light source (45), and the roller unit (30). The roller unit (30) includes a left roller unit (30L) provided at a left position orthogonal to the conveyance path (white arrow) and a right roller unit (30R) provided at a right position. The conveyance roller (33) is provided in each of the left roller unit (30L) and the right roller unit (30R).

12 to 14 show that the left roller unit (30L) and the right roller unit (30R) are retracted in the left direction and the right direction orthogonal to the conveyance path (white thick arrow), and the glass substrate (1) is effective. In this state, a space (60) is provided below the area (1a). Inspection light from the light source (45) provided below the roller unit (30) irradiates the glass substrate (1) above the roller unit (30) from below through this space (60).
The color filter surface inspection machine (40) is provided with four imaging cameras ((44-1) to (44-4)) and one light source (45).

  The glass substrate (1) provided with the coating film on the upper surface is held on the frame (41), and the light source (45) irradiates the lower surface of the glass substrate (1) with the emitted inspection light from below. To do. The transmitted light that has passed through the glass substrate (1) is simultaneously received by four imaging cameras ((44-1) to (44-4)), and the signal is transmitted to an image processing device (not shown). In the image processing apparatus, the signal is processed to identify defects (mainly film thickness unevenness, foreign matter adhesion) and determine whether or not the product is good.

The frame (41) for holding the glass substrate (1) has a rectangular frame shape having a width (W2), and holds the peripheral edge of the glass substrate (1) on its upper surface. The frame (41) is moved up and down in the color filter surface inspection machine (40) by a lifting mechanism (not shown). In FIGS. 13 and 14, the upper surface of the glass substrate (1) is the focal plane of the imaging camera. The distance between the glass substrate (1) and the imaging camera is represented by reference numeral (H11).

  As the imaging camera, four imaging cameras ((44-1) to (44-4)) are provided above the frame (41), and a color image using a CCD area sensor, for example, is used as the imaging device. It is an imaging camera for defect inspection of a filter. The four imaging cameras are fixed in the color filter surface inspection machine (40).

The light source (45) is a light source for transmission inspection. It is provided below the frame (41), the planar shape is rectangular, and its size is large enough to irradiate the entire surface of the glass substrate (1). The light source (45) is fixed in the color filter surface inspection machine (40).
In FIGS. 12 to 14, as with FIGS. 3 to 5, an openable / closable shutter for shielding external light is omitted.

  FIG. 15 is a plan view for explaining a method for inspecting the glass substrate (1) by dividing the region. FIG. 15 shows that when the size of the glass substrate (1) becomes large (730 × 920 mm) to (1100 × 1300 mm), the entire glass substrate (1) is taken as one imaging camera in view of the resolution of the imaging device. In this case, the inspection cannot be performed at once, and the inspection is divided. FIG. 15 shows an example of a method in which the effective area of the glass substrate (1) is divided into four to form four inspection areas, and the four inspection areas are simultaneously inspected by four imaging cameras.

  In FIG. 15, reference numeral (1) represents a glass substrate having a size of about (730 × 920 mm) to (1100 × 1300 mm). Reference numeral (1a) represents an effective area on the glass substrate on which various patterns constituting the color filter are formed. Reference numeral (1b) represents the boundary of the inspection area obtained by dividing the effective area (1a) into four.

The effective area (1a) is divided into a first inspection area (1Ar), a second inspection area (2Ar), a third inspection area (3Ar), and a fourth inspection area (4Ar).
The center of the first inspection area (1AR) ~ fourth test area (4aR) is in each first inspection point _{(K11) (X 1, Y} 1) ~ fourth test point _{(K14) (X 1, Y} 2) is there.
The first inspection point (K11) to the fourth inspection point (K14) are inspection points corresponding to the first inspection point (K1) to the fourth inspection point (K4) shown in FIG.
The four imaging cameras are respectively provided above the first inspection point (K11) to the fourth inspection point (K14). Therefore, the imaging camera can simultaneously image the entire effective area of the glass substrate (1) without step-moving between inspection points.

  FIG. 16 is a plan view for explaining an example of the roller unit (30) in the present invention. FIG. 16 shows the state of the roller unit (30) when the glass substrate (1) is received by the color filter surface inspection machine (40). 17 is a cross-sectional view taken along line AA in FIG. 18 is a cross-sectional view taken along line BB in FIG.

  As shown in FIGS. 16 to 18, the roller unit (30) includes a left left roller unit (30L) and a right right roller unit (30R) perpendicular to the conveyance path. The left roller unit (30L) and the right roller unit (30R) each include a conveyance roller (33) including a roller (32) and a roller shaft (31), and a gear box (34). The gear box (34) accommodates transmission parts such as a transmission shaft and a gear mechanism for transmitting driving from a rotary drive part (not shown).

The left roller unit (30L) and right roller unit (30R) are connected to the center line (X ₀ -X
₀ )). Moreover, the conveyance roller (33) of the left roller unit (30L) and the right roller unit (30R) is on the extension of the conveyance path of the front part (C11a) and the rear part (C11b) of the conveyance device (C11). Moreover, the upper part of the conveyance roller (33) of the left roller unit (30L) and the right roller unit (30R) is the upper part of the conveyance roller (53) of the front part (C11a) and the rear part (C11b) of the conveyance device (C11). On the same plane. This same surface is the pass line (PL) of the glass substrate (1).

  The left roller unit (30L) and the right roller unit (30R) always perform synchronized rotation / stop. The conveyance rollers (33) of the left roller unit (30L) and the right roller unit (30R) rotate at the same speed as the conveyance rollers (53) of the front part (C11a) and the rear part (C11b) of the conveyance device (C11), The glass substrate (1) on the pass line (PL) is transferred from the front part (C11a) of the transfer device (C11) to the roller unit (30), and at a predetermined position on the transfer roller (33) as indicated by a dotted line. The glass substrate (1) is stopped.

FIG. 19 shows the state of the roller unit (30) when inspecting the glass substrate (1). 20 is a cross-sectional view taken along line AA in FIG. FIG. 21 is a sectional view taken along line BB in FIG.
As shown in FIGS. 19 to 21, the left roller unit (30 </ b> L) and the right roller unit (30 </ b> R) are moved to the left and right at right angles to the conveyance path by a unit moving mechanism (not shown) as indicated by arrows. Retreating to the right, each conveyance roller (33) of the left roller unit (30L) and the right roller unit (30R) is positioned outside the conveyance path and at least outside the effective area (1a) of the glass substrate.

  Thereby, a space (60) is provided between the lower surface of the glass substrate (1) and the upper surface of the light source (45) in the effective area (1a) of the glass substrate. The inspection light from the light source (45) can irradiate the glass substrate (1) from below the glass substrate (1) through this space without any obstacles.

22 to 25 show a first inspection area (1Ar) to a fourth inspection area obtained by dividing the effective area (1a) on the glass substrate (1) into four parts using the color filter surface inspection machine (40) shown in FIG. It is explanatory drawing which shows the operation | movement which test | inspects (4Ar).
In FIG. 22, the conveyance roller (33) provided in the roller unit (30) receives the glass substrate (1) from the conveyance roller (53) at the front portion (C11a) of the conveyance device (C11), and the conveyance roller (33). ) Represents a state stopped at a predetermined position above.

As shown in FIG. 17, each of the transport rollers (33) of the left roller unit (30L) and the right roller unit (30R) is an extension of the transport path of the front part (C11a) and the rear part (C11b) of the transport device (C11). It is above. The upper part of the conveying roller (33) of the left roller unit (30L) and the right roller unit (30R) is flush with the upper part of the conveying roller (53) of the front part (C11a) and rear part (C11b) of the conveying device (C11). (Pass line (PL)). The frame (41) is at a standby position (Z ₀ ) below the pass line (PL).
As shown by the arrow, the glass substrate (1) is conveyed from the left to the right on the pass line (PL) in FIG. 22, and transferred from the conveyance roller (53) onto the conveyance roller (33). Is done.

Next, as shown in FIG. 23, the frame (41) rises vertically from its standby position (Z ₀ ) by the operation of a lifting mechanism (not shown), and the glass substrate on the conveying roller (33) while rising. The lower surface of the peripheral edge of (1) is supported and lifted upward, and the glass substrate (1) rises when the upper surface reaches the focal plane (Z ₁ ) of the imaging camera.

Next, as shown in FIG. 24, imaging of the first inspection area (1Ar) to the fourth inspection area (4Ar) in which the effective area of the glass substrate (1) is divided into four is performed.
Prior to this imaging, as shown by the arrows in FIG. 19, the left roller unit (30L) and the right roller unit (30R) are left and right at right angles to the conveyance path by means of a unit moving mechanism (not shown). The transport rollers (33) of the left roller unit (30L) and the right roller unit (30R) are positioned outside the transport path and at least outside the effective area (1a) of the glass substrate.

Thereby, a space (60) for imaging is provided between the lower surface of the glass substrate (1) and the upper surface of the light source (45) in the effective area (1a) of the glass substrate. The inspection light from the light source (45) can irradiate the glass substrate (1) from below the glass substrate (1) through this space (60) without any obstacles.
FIG. 24 shows a state where a space (60) for imaging is provided. In this state, four imaging cameras are used to simultaneously image the first inspection area (1Ar) to the fourth inspection area (4Ar).

  Next, as shown in FIG. 25, a unit moving mechanism (not shown) is operated to return the left roller unit (30L) and the right roller unit (30R) that have been retracted outside the conveyance path to their original positions. That is, as shown in FIG. 17, the conveyance roller (33) of the left roller unit (30L) and the right roller unit (30R) is extended to the conveyance path of the front part (C11a) and the rear part (C11b) of the conveyance device (C11). The upper part of the transport roller (33) of the left roller unit (30L) and the right roller unit (30R) is the upper part of the transport roller (53) of the front part (C11a) and rear part (C11b) of the transport device (C11). On the same plane.

Subsequently, as shown by an arrow (e) in FIG. 25, the frame (41) moves the glass substrate (1) on the frame (41) onto the transfer roller (33) while vertically descending, Return to the standby position (Z ₀ ) below the pass line.
The glass substrate (1) is received from the conveyance roller (33) onto the conveyance roller (53) by the operation of the conveyance roller (33) and the conveyance roller (53) as shown by an arrow (f) in FIG. Passed.

  As described above, in the color filter surface inspection machine according to the present invention, the glass substrate is received from the conveyance path using the conveyance roller to the color filter surface inspection machine, and the glass substrate is transferred from the color filter surface inspection machine to the conveyance path. In addition, since the transfer roller provided in the color filter surface inspection machine is used, the time required for the color filter surface inspection machine shown in FIG. .

In addition, since the color filter surface inspection machine according to the present invention includes four imaging cameras, four inspection areas can be simultaneously imaged without stepping one imaging camera, and the required time is as follows. It will be shortened.
In addition, the four imaging cameras are provided at fixed positions, and the time required to move to the standby position when one imaging camera is used is unnecessary.

  Therefore, the time required for the color filter surface inspection machine according to the present invention to inspect one glass substrate is specifically about 20 seconds. This corresponds to, for example, about 20 seconds of the time required for the production line required to process one glass substrate, and the color filter surface inspection machine according to the present invention is transported between the coating apparatus and the exposure apparatus. 100% inspection can be performed in the system.

It is a top view which shows the arrangement | sequence of an example of the manufacturing line which forms a predetermined pattern in a glass substrate. It is a top view which shows an example of the external appearance inspection of the coating film performed between a coating device and an exposure apparatus. It is a top view which shows an example of the color filter surface inspection machine shown in FIG. It is sectional drawing in the AA in FIG. It is sectional drawing in the BB line in FIG. It is a top view explaining the method of dividing | segmenting and inspecting the area | region of a glass substrate It is explanatory drawing which shows the operation | movement which test | inspects a 1st inspection area-a 4th inspection area. It is explanatory drawing which shows the operation | movement which test | inspects a 1st inspection area-a 4th inspection area. It is explanatory drawing which shows the operation | movement which test | inspects a 1st inspection area-a 4th inspection area. It is explanatory drawing which shows the operation | movement which test | inspects a 1st inspection area-a 4th inspection area. It is a top view which shows between the coating device and exposure apparatus in an example of the color filter manufacturing line which arranged the color filter surface inspection machine by this invention. It is a top view which shows an example of the color filter surface inspection machine by this invention. It is sectional drawing in the AA in FIG. It is sectional drawing in the BB line in FIG. It is a top view explaining the method to divide | segment and test | inspect the area | region of a glass substrate. It is a top view explaining an example of a roller unit in the present invention. It is sectional drawing in the AA of FIG. It is sectional drawing in the BB line of FIG. It shows the state of the roller unit when inspecting the glass substrate. It is sectional drawing in the AA of FIG. It is sectional drawing in the BB line of FIG. It is explanatory drawing which shows the operation | movement which test | inspects the 1st inspection area-the 4th inspection area which divided the effective area on a glass substrate into 4 parts. It is explanatory drawing which shows the operation | movement which test | inspects the 1st inspection area-the 4th inspection area which divided the effective area on a glass substrate into 4 parts. It is explanatory drawing which shows the operation | movement which test | inspects the 1st inspection area-the 4th inspection area which divided the effective area on a glass substrate into 4 parts. It is explanatory drawing which shows the operation | movement which test | inspects the 1st inspection area-the 4th inspection area which divided the effective area on a glass substrate into 4 parts.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Glass substrate 1a ... Effective area 1Ar-4Ar of glass substrate ... 1st inspection area-4th inspection area 10 ... Example of color filter production line 11 ... Cleaning apparatus 12 ... Coating device 13 ... Exposure device 14 ... Developing device 15 ... Heating device 20 ... Color filter surface inspection machine 21, 41 ... Frames 24, 44 ... Imaging cameras 25, 45 ... Light source 30 ... Roller unit 30L ... Left roller unit 30R ... Right roller unit 33 ... Conveyor roller 34 ... Gear box 40 ... Color filter surface inspection machine 53 according to the present invention ... Conveyor Transport rollers C1, C11 of the apparatus: Transport devices C1a, C11a: Front portions C1b, C11b of the transport device: Front portions K1 to K4 of the transport device: First inspection point to fourth inspection point K11 ~ 14 ... of the first inspection point to fourth test point R1 ... transfer robot R1-f ... transfer robot in the present invention Fork

Claims (1)

In the front surface inspection apparatus that detect defects in the coating on the glass substrate provided on the conveying path of the manufacturing line,
To pass glass substrate, and the conveyance rollers provided on the front surface inspection machine,
A roller unit comprising the left roller unit and the right roller unit, each of which includes the transfer roller and retracts outside the transfer path in the left and right directions orthogonal to the transfer path,
A rectangular frame-like frame for holding the glass substrate;
An elevating mechanism for elevating the frame;
A light source that emits inspection light from below the glass substrate;
An imaging camera for imaging the glass substrate from above;
With
1) When the glass substrate is transported to a predetermined position in the transport path,
2) By the operation of the elevating mechanism, the frame ascends vertically from its standby position and lifts upward while supporting the lower surface of the peripheral edge of the glass substrate on the conveying roller, and the upper surface of the glass substrate is the imaging camera Rising until reaching the focal plane of
3) The left roller unit and right roller unit of the transfer path are retracted out of the transfer path,
4) by the light source, the front surface inspection machine characterized that you captured using the imaging camera for effective area of the glass substrate with light irradiation.

Images