JP5943799B2 - Glass substrate transfer apparatus and glass substrate manufacturing method - Google Patents

Description

  The present invention relates to a glass substrate transfer apparatus and a glass substrate manufacturing method.

  In a manufacturing process of a flat panel display (FPD) such as a liquid crystal display device, a pattern made of a semiconductor element such as a TFT (Thin Film Transistor) and a black matrix resin is formed on the surface of a glass substrate. If defects such as scratches, cracks, and foreign matters are present on the surface of the glass substrate on which the pattern is formed, the pattern is not formed well, which causes a failure of the final product FPD. In particular, minute scratches and cracks formed on the surface of the glass substrate lower the mechanical strength of the glass substrate and cause the glass substrate to break in the FPD manufacturing process. Therefore, it is demanded that no defects exist on the surface of the glass substrate.

  In the manufacturing process of the glass substrate, the molded glass sheet is cut into a predetermined size, and a glass substrate having a size shipped as a product is obtained. Thereafter, the glass substrate is packed and shipped through an end face processing step by grinding and polishing, a cleaning step, and an inspection step. In the inspection process, for example, defects such as scratches, cracks, and foreign matters existing on the surface of the glass substrate are optically detected while the glass substrate is being conveyed.

  In the inspection process of a glass substrate, a roller conveyor is conventionally used as a glass substrate transfer device. However, when a foreign substance such as a small glass piece adheres to the rollers of the roller conveyor, a flaw due to the foreign substance is formed on the surface of the glass substrate conveyed by contacting with the rotating roller. In order to solve this problem, as disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 2006-188313) in recent years, gas is blown to the surface of the glass substrate to float the glass substrate, and the edge of the glass substrate is 2. Description of the Related Art A glass substrate transfer device that holds and conveys a glass substrate is used. In the method using this transport device, the glass substrate is transported in a floating state without contacting the transport device. Therefore, it is suppressed that a defect arises on the surface of a glass substrate when a glass substrate contacts a conveyance device.

  However, when the glass substrate is lifted and transported, the glass substrate may come into contact with the transport device due to warpage of the glass substrate itself. And the curvature of a glass substrate is difficult to measure completely for the following three reasons. As a first reason, it is practically difficult to measure the free shape of each of the mass-produced glass substrates. As a second reason, even if an attempt is made to predict a warp tendency in a specific production lot by extracting a glass substrate for inspection from a glass substrate that is mass-produced and measuring the warp, the free shape of the glass substrate is somewhat Varies with range. As a third reason, it is particularly difficult to measure the free shape of a plurality of small glass substrates collected from a large mother glass.

  In order to solve this problem, Patent Document 2 (Japanese Patent Application Laid-Open No. 2012-96920) discloses that a gas is blown to the surface of the glass substrate to float the glass substrate, and at the same time, the gas is sucked to face the glass substrate downward A glass substrate transfer device that applies force is disclosed. In the transport method using this transport device, the shape of the glass substrate transported in the floated state is forced to some extent, so that the influence of the warp of the glass substrate is reduced.

  However, as disclosed in Patent Document 2, when the glass substrate transport device is composed of a plurality of float panels arranged at predetermined intervals along the glass substrate transport direction, the glass substrate warps. Another problem arises due to. Specifically, the glass substrate does not receive a downward force in the region between the adjacent float panels along the conveyance direction of the glass substrate, so that the shape of the glass substrate is not forced. Therefore, in this region, the glass substrate may be warped as it tries to return to its own shape. Therefore, when the glass substrate passes through the region between the float panels, the end portion of the glass substrate that hangs down due to warpage may come into contact with the transfer device, and the glass substrate may break.

  An object of the present invention is to provide a glass substrate transport apparatus and a glass substrate manufacturing method capable of suppressing the occurrence of defects in the glass substrate by stably levitating and transporting the glass substrate. is there.

  A glass substrate transfer apparatus according to the present invention includes a substrate floating unit and a substrate transfer unit. The substrate floating unit is a unit that floats a glass substrate by blowing a gas onto the surface of the glass substrate. The substrate transport unit is a unit that transports the glass substrate levitated by the substrate floating unit along the transport direction. The substrate inspection unit is a unit that inspects the glass substrate transported by the substrate transport unit. The substrate levitation unit has a plurality of float panels arranged at intervals along the transport direction. The float panel has a gas ejection mechanism and a substrate facing surface. The gas ejection mechanism ejects a gas that is blown onto the surface of the glass substrate. A board | substrate opposing surface is a surface which opposes the surface where the gas is sprayed of the glass substrate conveyed. The float panel is arranged so that the height position of the substrate facing surface gradually decreases as it goes in the transport direction.

  The glass substrate transport device according to the present invention is a device for transporting a glass substrate along a predetermined transport direction. A substrate levitation unit that levitates a glass substrate has a configuration in which a plurality of float panels are arranged at predetermined intervals along the conveyance direction of the glass substrate.

  In this glass substrate transport apparatus, the glass substrate that is lifted and transported is forced to a certain extent above the substrate floating unit. Therefore, the warp of the glass substrate is reduced above the substrate floating unit. On the other hand, the glass substrate that is lifted and transported tries to return to its own unique shape because its shape is not forced while passing through a region between adjacent float panels along the transport direction. Therefore, the glass substrate may be warped in the region between the float panels. However, the float panel is arranged stepwise so that the height position of the substrate facing surface facing the lower surface of the glass substrate to be transported gradually decreases along the transport direction of the glass substrate. Therefore, even when the edge part of the glass substrate which has passed through the area | region between float panels hangs down by curvature, it is suppressed that the edge part of a glass substrate contacts a float panel.

  Therefore, this glass substrate transport apparatus can suppress the occurrence of defects in the glass substrate by stably floating and transporting the glass substrate.

  Moreover, it is preferable that the board | substrate opposing surface of the float panel arrange | positioned along a conveyance direction is parallel to a horizontal surface.

  Moreover, it is preferable that the substrate floating unit gradually increases the flow rate of the gas ejected from the gas ejection mechanism of the float panel as it goes in the transport direction.

  When the flow rate of the gas ejected from the gas ejection mechanism of the float panel is constant along the transport direction of the glass substrate, the height position of the transported glass substrate is the height position of the substrate facing surface of the float panel. At the same time, it gradually decreases. However, by gradually increasing the flow rate of the gas ejected from the gas ejection mechanism along the transport direction of the glass substrate, it is possible to suppress a decrease in the height position of the transported glass substrate. Thereby, a deformation | transformation of the glass substrate conveyed by the board | substrate conveyance unit can be suppressed.

  The glass substrate transport device according to the present invention preferably further includes a substrate inspection unit. The substrate inspection unit is an optical device that inspects the glass substrate transported by the substrate transport unit. A float panel is extended along the width direction of the glass substrate which is a direction orthogonal to a conveyance direction. The substrate inspection unit is disposed between adjacent float panels.

  This glass substrate transfer device can detect defects formed on the surface of the glass substrate. In this apparatus, a substrate inspection unit extending in the width direction of the glass substrate can be installed between adjacent float panels along the conveyance direction of the glass substrate. Therefore, the installation space for the substrate inspection unit in the conveyance direction of the glass substrate can be suppressed.

  The manufacturing method of the glass substrate which concerns on this invention is equipped with a substrate floating process, a substrate conveyance process, and a substrate processing process. The substrate levitation step is a step in which a glass substrate is levitated by blowing gas onto the surface of the glass substrate. A board | substrate conveyance process is a process of conveying the glass substrate floated by the board | substrate floating process along a conveyance direction. A substrate processing process is a process of processing or inspecting the glass substrate conveyed by a substrate conveyance process. In the substrate floating step, the glass substrate is floated by a plurality of float panels arranged at intervals along the transport direction. The float panel has a gas ejection mechanism and a substrate facing surface. The gas ejection mechanism ejects a gas that is blown onto the surface of the glass substrate. A board | substrate opposing surface is a surface which opposes the surface where the gas is sprayed of the glass substrate conveyed. The float panel is arranged so that the height position of the substrate facing surface gradually decreases as it goes in the transport direction.

  Moreover, it is preferable that the board | substrate opposing surface of the float panel arrange | positioned along a conveyance direction is parallel to a horizontal surface.

  Moreover, in the manufacturing method of the glass substrate which concerns on this invention, it is preferable that a substrate processing process is a board | substrate inspection process which test | inspects the glass substrate conveyed by a board | substrate conveyance process. In the substrate inspection process, the glass substrate is inspected by an optical device arranged between adjacent float panels.

  The glass substrate transport device and the glass substrate manufacturing method according to the present invention can suppress the occurrence of defects in the glass substrate by stably floating and transporting the glass substrate.

It is a flowchart of the manufacturing process of the glass substrate which concerns on embodiment. It is an external view of a glass substrate inspection apparatus. It is a top view of a substrate floating unit. It is a side view of a substrate floating unit. FIG. 5 is a partially enlarged view of FIG. 4. It is a top view of the board | substrate floating unit showing arrangement | positioning of the float panel as a reference example.

(1) Outline of Manufacturing Process of Glass Substrate An embodiment of a glass substrate transfer apparatus according to the present invention will be described with reference to the drawings. Initially, the manufacturing process of the glass substrate 10 test | inspected by the glass substrate test | inspection apparatus 100 used by this embodiment is demonstrated. The glass substrate 10 is used for manufacturing flat panel displays (FPD) such as liquid crystal displays, plasma displays, and organic EL displays. The glass substrate 10 has a thickness of 0.2 mm to 0.8 mm, for example, and has a size of 680 mm to 2200 mm in length and 880 mm to 2500 mm in width.

  An example of the glass substrate 10 is glass having the following composition.

(A) SiO ₂ : 50% by mass to 70% by mass,
(B) Al ₂ O ₃ : 10% by mass to 25% by mass,
(C) B ₂ O ₃ : 5% by mass to 18% by mass,
(D) MgO: 0% by mass to 10% by mass,
(E) CaO: 0% by mass to 20% by mass,
(F) SrO: 0% by mass to 20% by mass,
(G) BaO: 0% by mass to 10% by mass,
(H) RO: 5% by mass to 20% by mass (R is at least one selected from Mg, Ca, Sr and Ba),
(I) R ′ ₂ O: 0% by mass to 2.0% by mass (R ′ is at least one selected from Li, Na and K),
(J) At least one metal oxide selected from SnO ₂ , Fe ₂ O ₃ and CeO ₂ .

  The glass having the above composition is allowed to contain other trace components in the range of less than 0.1% by mass.

  FIG. 1 is an example of a flowchart showing a manufacturing process of the glass substrate 10. The manufacturing process of the glass substrate 10 mainly includes a forming process (step S1), a plate-making process (step S2), a cutting process (step S3), a roughening process (step S4), and an end face processing process (step). S5), a cleaning process (step S6), an inspection process (step S7), and a packing process (step S8).

  In the forming step S1, a glass sheet is continuously formed from a molten glass obtained by heating a glass raw material by a downdraw method or a float method. The molded glass sheet is cooled to a glass annealing point or lower while the temperature is controlled so that distortion and warpage do not occur.

  In the plate-drawing step S2, the glass sheet formed in the forming step S1 is cut to obtain a base plate glass having a predetermined dimension.

  In the cutting step S3, the raw glass obtained in the plate-drawing step S2 is cut to obtain a glass substrate 10 having a product size. Generally, a base glass is cut | disconnected using a cutter or a laser.

  In the roughening step S4, a roughening treatment is performed to increase the surface roughness of the glass substrate 10 obtained in the cutting step S3. The roughening treatment of the glass substrate 10 is, for example, wet etching using an etchant containing hydrogen fluoride.

  In the end face processing step S5, end face processing of the glass substrate 10 that has been subjected to the roughening process in the roughening step S4 is performed. The end face processing is, for example, polishing and grinding of the end face of the glass substrate 10 and corner cutting of the glass substrate 10.

  In the cleaning step S6, the glass substrate 10 that has been subjected to the end surface processing in the end surface processing step S5 is cleaned. On the glass substrate 10, foreign substances such as fine glass pieces generated by cutting the base glass and end face processing of the glass substrate 10, and organic substances existing in the atmosphere are attached. These foreign matters are removed by cleaning the glass substrate 10.

  In the inspection step S7, the glass substrate 10 cleaned in the cleaning step S6 is inspected. Specifically, while the glass substrate 10 is being transported, scratches and cracks existing on the surface of the glass substrate 10, foreign matter adhering to the surface of the glass substrate 10, and minute particles existing inside the glass substrate 10. A defect such as a bubble is detected optically.

  In the packing step S8, the glass substrate 10 that has passed the inspection in the inspection step S7 is laminated and packed on a pallet alternately with a slip sheet for protecting the glass substrate 10. The packed glass substrate 10 is shipped to an FPD manufacturer or the like.

(2) Details of Glass Substrate Inspection Device Next, the glass substrate inspection device 100 according to the present embodiment will be described. FIG. 2 is an external view of the glass substrate inspection apparatus 100. The glass substrate inspection apparatus 100 is used for inspecting the glass substrate 10 in the inspection step S7. The glass substrate inspection apparatus 100 optically inspects defects present on the surface of the glass substrate 10 while conveying the glass substrate 10 supported in a horizontal state in a predetermined direction. The glass substrate inspection apparatus 100 mainly includes a substrate floating unit 20, a substrate transport unit 30, and a substrate inspection unit 40. The glass substrate inspection apparatus 100 includes a glass substrate transfer device including a substrate floating unit 20 and a substrate transfer unit 30. Hereinafter, as shown in FIG. 2, the direction in which the glass substrate 10 in the horizontal state is transported is referred to as “transport direction D1”, and the direction in the horizontal plane perpendicular to the transport direction of the glass substrate 10 is referred to as “width direction D2”. Call. Further, an end portion of the glass substrate 10 that is parallel to the transport direction D1 is referred to as a “side end portion”, and an end portion of the glass substrate 10 that is parallel to the width direction D2 is Called “front and rear ends”. The glass substrate 10 is conveyed in the direction of the arrow shown by the code | symbol D1 in FIG.

(2-1) Substrate Levitation Unit The substrate levitation unit 20 is a unit that floats the glass substrate 10 by blowing gas onto the lower surface 10a of the glass substrate 10 in a horizontal state. The substrate floating unit 20 is mainly composed of a plurality of float panels 22. FIG. 3 is a top view of the substrate floating unit 20. In FIG. 3, the float panel 22 is shown in a hatched area. FIG. 4 is a side view of the substrate floating unit 20. FIG. 5 is an enlarged view of a part of FIG. 4 and 5, the vertical dimension is exaggerated. The plurality of float panels 22 are arranged without a gap along the width direction D2, thereby forming the float panel array 24. The plurality of float panel arrays 24 are arranged at predetermined intervals along the transport direction D1. Hereinafter, the space between two float panel arrays 24 adjacent along the transport direction D1 is referred to as a “slit 26”. As shown in FIG. 3, the slit 26 is a space extending in the width direction D2.

  As shown in FIG. 5, the float panel 22 includes a gas ejection mechanism 22a, a substrate facing surface 22b, and a gas suction mechanism 22c. The substrate facing surface 22b is an upper end surface of the float panel 22 and is a surface facing the lower surface 10a of the glass substrate 10 to be conveyed as shown in FIG. The board | substrate opposing surfaces 22b of the float panel 22 arrange | positioned along the conveyance direction D1 are mutually parallel. In the present embodiment, the substrate facing surface 22b is parallel to the horizontal plane, but the substrate facing surface 22b may be slightly inclined along the transport direction D1. The float panel 22 is installed such that the substrate facing surface 22b is parallel to the horizontal plane. The substrate facing surfaces 22b of all the float panels 22 constituting each float panel array 24 have the same height position. That is, in FIG. 3, the board | substrate opposing surface 22b of the several float panel 22 installed adjacent to the width direction D2 has the same height position.

  The gas ejection mechanism 22a is a mechanism for ejecting a gas such as air upward from the substrate facing surface 22b. The gas ejection mechanism 22a is, for example, a large number of minute holes formed in the substrate facing surface 22b. The gas ejected upward from the gas ejection mechanism 22a collides with the lower surface 10a of the glass substrate 10 being conveyed. Thereby, the glass substrate 10 conveyed receives an upward force. This upward force causes the glass substrate 10 to float from the substrate facing surface 22 b of the float panel 22.

  The gas suction mechanism 22c is a mechanism for sucking gas from the space above the substrate facing surface 22b toward the substrate facing surface 22b. The gas suction mechanism 22c is, for example, a hole formed in the substrate facing surface 22b. When the gas is sucked by the gas suction mechanism 22c, the space near the gas suction mechanism 22c is in a negative pressure state between the lower surface 10a of the glass substrate 10 to be transported and the substrate facing surface 22b. Thereby, the glass substrate 10 conveyed receives the downward force. This downward force forces the shape of the glass substrate 10 to be conveyed to some extent.

  The dimension of the float panel array 24 in the width direction D2 is longer than the dimension of the glass substrate 10 in the width direction D2. A dimension L1 of the float panel 22 in the transport direction D1 is, for example, 100 mm to 150 mm. A dimension L2 of the slit 26 in the transport direction D1 is, for example, 25 mm to 30 mm. A distance L3 between the lower surface 10a of the floating glass substrate 10 and the substrate facing surface 22b of the float panel 22 is, for example, 25 μm to 35 μm.

  As shown in FIG. 4, the float panel array 24 is arranged so that the height position of the substrate facing surface 22 b of the float panel 22 gradually decreases in the transport direction D <b> 1. Specifically, as the glass substrate 10 is conveyed, the height position of the substrate facing surface 22b is lowered by 10 μm to 20 μm. That is, as shown in FIG. 5, regarding the two float panel arrays 24 adjacent in the transport direction D1, the height position difference L4 of the substrate facing surface 22b of the float panel 22 is 10 μm to 20 μm.

  Further, in the substrate floating unit 20, the flow rate of the gas ejected from the gas ejection mechanism 22a of the float panel 22 gradually increases in the transport direction D1. That is, the lower the height position of the substrate facing surface 22b of the float panel 22, the greater the flow rate of the gas ejected from the gas ejection mechanism 22a of the float panel 22.

(2-2) Substrate Transport Unit The substrate transport unit 30 is a unit that transports the glass substrate 10 levitated by the substrate levitation unit 20 along the transport direction D1. The substrate transport unit 30 mainly includes a substrate holding unit 32 and a substrate transport unit 34.

  The substrate holding unit 32 holds one of the side end portions of the glass substrate 10. The substrate holding unit 32 includes, for example, a suction mechanism for holding the glass substrate 10. The substrate transport unit 34 includes a linear drive mechanism that moves the substrate holding unit 32 along the transport direction D1.

  When the glass substrate 10 is transported along the transport direction D <b> 1 by the substrate transport unit 30, the glass substrate 10 alternately passes through the space above the float panel array 24 and the space above the slit 26.

(2-3) Substrate Inspection Unit The substrate inspection unit 40 is a unit that inspects the glass substrate 10 conveyed by the substrate conveyance unit 30. The substrate inspection unit 40 optically treats defects such as scratches and cracks present on the surface of the glass substrate 10, foreign matter adhering to the surface of the glass substrate 10, and minute bubbles existing inside the glass substrate 10. It is an optical device having a function to detect automatically.

  In this embodiment, the board | substrate inspection unit 40 has the some camera 40a installed in the one slit 26, as FIG. 4 shows. The camera 40a images the surface of the glass substrate 10 passing above. The board inspection unit 40 further includes a light source 40b installed in a space above the slit 26 in which the camera 40a is installed. The light source 40b irradiates light with high brightness toward the surface of the glass substrate 10 passing below. The substrate inspection unit 40 may have a configuration in which the light source 40 b is installed in the slit 26 and the camera 40 a is installed in a space above the slit 26. The amount of change in the height position of the substrate facing surface 22b of the float panel 22 in the transport direction D1 is set within a range that does not deviate from the depth of field of the camera 40a.

  The plurality of cameras 40a of the substrate inspection unit 40 are installed along the width direction D2 in one slit 26 so that the entire region of the glass substrate 10 in the width direction D2 can be inspected. That is, the camera 40a installed in one slit 26 can photograph the entire region in the width direction D2 of the glass substrate 10 passing above.

  The board inspection unit 40 further includes a control unit (not shown). The control unit is a computer having a function of detecting defects present on the surface of the glass substrate 10 being conveyed. For example, the control unit analyzes an image of the surface of the glass substrate 10 photographed by the camera 40a to detect scratches and cracks existing on the surface of the glass substrate 10, foreign matters attached to the surface of the glass substrate 10, and the like. To detect.

  The control part of the board | substrate inspection unit 40 is connected to the glass substrate packing apparatus (not shown) which packs the glass substrate 10 in packing process S8. The control unit has a function of notifying the substrate packing device that the glass substrate 10 having a surface defect has been detected. Thereby, in packing process S8, the glass substrate packing apparatus can prevent packing of the glass substrate 10 which has a surface defect.

(3) Features (3-1)
The glass substrate inspection apparatus 100 according to the present embodiment detects defects formed on the surface of the glass substrate 10 while conveying the glass substrate 10 along the conveyance direction D1. The substrate floating unit 20 that floats the glass substrate 10 has a configuration in which a plurality of float panels 22 are installed with a predetermined interval L2 along the transport direction D1.

  An upward force acts on the glass substrate 10 passing above the float panel 22 by the gas ejected from the gas ejection mechanism 22a. Further, a downward force acts on the glass substrate 10 passing above the float panel 22 by the gas sucked by the gas suction mechanism 22c. The upward force is a force that causes the glass substrate 10 to float, and the downward force is a force that forces the shape of the glass substrate 10 to some extent. The glass substrate 10 has a unique shape. For example, a concave portion and a convex portion are formed on the surface of the glass substrate 10. Due to the force forcing the shape of the glass substrate 10 described above, the surface of the glass substrate 10 is in a state in which no concave portion or convex portion is formed.

  However, there is a slit 26 in which the camera 40a of the substrate inspection unit 40 is installed between the float panel arrays 24 adjacent in the transport direction D1. Therefore, the glass substrate 10 transported along the transport direction D <b> 1 by the substrate transport unit 30 has a region that passes above the slit 26. The upward force by the gas ejection mechanism 22a and the downward force by the gas suction mechanism 22c do not act on this region. Therefore, the region of the glass substrate 10 that passes above the slit 26 tries to return to a unique shape.

  In particular, while the front and rear end portions of the glass substrate 10 pass above the slit 26, the front and rear end portions of the glass substrate 10 may hang down due to the inherent warpage of the glass substrate 10. However, in the present embodiment, the float panels 22 constituting the float panel array 24 are arranged in a stepped manner so that the height position of the substrate facing surface 22b gradually decreases along the transport direction D1. Therefore, even when the front and rear end portions of the glass substrate 10 that pass above the slit 26 hang down due to warping, a sufficient distance is ensured between the front and rear end portions of the glass substrate 10 and the substrate facing surface 22b of the float panel 22. can do.

When the thickness of the glass substrate 10 is 0.5 mm, the specific gravity of the glass substrate 10 is 2.19 g / cm ³ , and the Young's modulus of the glass substrate 10 is 70000 N / mm ² , the conveyance direction of the front and rear end portions of the glass substrate 10 When the dimension of D1 is 30 mm, the theoretical value of the downward deflection of the front and rear end portions of the glass substrate 10 is 1.49 μm. In this embodiment, since the dimension L2 of the slit 26 in the conveyance direction D1 is 30 mm, the amount of deflection due to the weight of the glass substrate 10 is predicted to be less than 2 μm. Further, the difference L4 in the height position of the substrate facing surface 22b of the float panel 22 adjacent in the transport direction D1 is 10 μm to 20 μm. Therefore, even when the front and rear end portions of the glass substrate 10 passing above the slit 26 are warped downward due to their own weight, the front and rear end portions of the glass substrate 10 are in front of the transport direction D1. The contact with the substrate facing surface 22b is suppressed.

  As described above, the substrate floating unit 20 according to this embodiment can suppress the front and rear end portions of the glass substrate 10 passing above the slit 26 from coming into contact with the float panel 22. If the front and rear ends of the glass substrate 10 are in contact with the float panel 22, the glass substrate 10 may be damaged. Therefore, the glass substrate inspection apparatus 100 can suppress the occurrence of defects in the glass substrate 10.

(3-2)
In recent years, the commercially available float panel 22 includes a substrate facing surface 22b having high flatness. In addition, the uncertain factor regarding the horizontal level of the entire float panel 22 and the substrate floating unit 20 is obtained by managing the processing accuracy of each component constituting the substrate floating unit 20 and by accurately measuring and adjusting the position of the substrate floating unit 20. Can be almost removed. However, it is difficult to completely remove uncertainties regarding the inherent shape of the glass substrate 10. In particular, it is difficult to completely measure the warp of the glass substrate 10 that is continuously conveyed.

  The substrate floating unit 20 according to the present embodiment can prevent the front and rear end portions of the glass substrate 10 from contacting the float panel 22 even when the warpage of the glass substrate 10 cannot be measured completely. Therefore, the glass substrate inspection apparatus 100 can suppress the occurrence of defects in the glass substrate 10.

(3-3)
In the glass substrate inspection apparatus 100 according to the present embodiment, the flow rate of the gas ejected from the gas ejection mechanism 22a of the float panel 22 gradually increases in the transport direction D1.

  When the flow rate of the gas ejected from the gas ejection mechanism 22 a of the float panel 22 is constant along the transport direction D <b> 1 of the glass substrate 10, the height position of the transported glass substrate 10 is opposite to the substrate of the float panel 22. It gradually decreases in accordance with the height position of the surface 22b. However, by gradually increasing the flow rate of the gas ejected from the gas ejection mechanism 22b along the transport direction D1 of the glass substrate 10, a decrease in the height position of the transported glass substrate 10 is suppressed. That is, the amount of change in the height position of the glass substrate 10 to be transported is smaller than the amount of change in the height position of the substrate facing surface 22b in the transport direction D1. Thereby, the deformation | transformation of the glass substrate 10 conveyed by the change of the height position of the board | substrate opposing surface 22b is suppressed.

  Therefore, the glass substrate inspection apparatus 100 according to the present embodiment can suppress deformation of the glass substrate 10 conveyed by the substrate conveyance unit 30.

(3-4)
In the glass substrate inspection apparatus 100 according to the present embodiment, the float panel array 24 including a plurality of float panels 22 extends along the width direction D2. The camera 40a of the substrate inspection unit 40 is installed in the slit 26 between the float panel arrays 24 adjacent in the transport direction D1.

  As a reference example, as shown in FIG. 6, in order to suppress the contact between the glass substrate 10 and the float panel 22 due to the warp of the glass substrate 10, the substrate floating in which the float panel 22 is arranged in a check pattern. Consider unit 120. FIG. 6 is a top view of the substrate floating unit. In FIG. 6, the float panel 22 is shown in a hatched area. In the substrate floating unit 120, in order to inspect the entire region of the glass substrate 10 in the width direction D2, it is necessary to arrange the cameras 40a of the substrate inspection unit 40 in a plurality of rows along the transport direction D1. Therefore, there is a problem that the configuration of the substrate inspection unit 40 becomes complicated and the entire glass substrate inspection apparatus 200 is enlarged.

  In the glass substrate inspection apparatus 100 of the present embodiment, as shown in FIG. 3, the camera 40 a of the substrate inspection unit 40 is installed in one slit 26 along the width direction D <b> 2, so that the width direction D <b> 2 of the glass substrate 10. The entire area can be inspected. Therefore, since the glass substrate inspection apparatus 100 can suppress the installation space of the substrate inspection unit 40, the overall size of the glass substrate inspection apparatus 100 can be suppressed.

(4) Modifications Although the method for manufacturing a glass substrate according to the present invention has been described above, the present invention is not limited to the above-described embodiment, and various improvements and modifications can be made without departing from the spirit of the present invention. May be. Moreover, although this embodiment demonstrated the example of the test process of a glass substrate, the conveying apparatus of the glass substrate which concerns on this invention may be used for the process process of another glass substrate.

(4-1) Modification A
In the present embodiment, the substrate floating unit 20 includes a gas suction mechanism 22c that generates a downward force on the glass substrate 10 being transported. However, instead of the gas suction mechanism 22c, another gas ejection mechanism that ejects gas downward may be installed above the substrate floating unit 20. The gas ejected from the gas ejection mechanism collides with the upper surface of the glass substrate 10 to be conveyed, whereby a downward force is applied to the glass substrate 10 to be conveyed. Therefore, also in this case, the glass substrate 10 transported by the substrate transport unit 30 is given a force that forces the shape of the glass substrate 10 to some extent.

(4-2) Modification B
In the present embodiment, the camera 40 a of the board inspection unit 40 is installed in one slit 26 as shown in FIG. 4, but may be installed in a plurality of slits 26. By installing the camera 40 a of the substrate inspection unit 40 in the plurality of slits 26, for example, optical inspection with different measurement ranges can be performed for each slit 26. In this case, for example, the substrate inspection unit 40 detects scratches and cracks formed on the surface of the glass substrate 10 in one slit 26 and exists inside the glass substrate 10 in the other slit 26. Optical inspection to detect minute bubbles can be performed.

  Further, when inspecting a glass substrate having an etched surface, the substrate inspection unit 40, for example, performed a normal optical inspection in one slit 26, and reduced illuminance and sensitivity in the other slit 26. Optical inspection can be performed.

DESCRIPTION OF SYMBOLS 10 Glass substrate 20 Substrate floating unit 22 Float panel 22a Gas ejection mechanism 22b Substrate facing surface 30 Substrate transport unit 40 Substrate inspection unit 100 Glass substrate inspection apparatus D1 Transport direction

JP 2006-188313 A JP 2012-96920 A

Claims (8)

A substrate levitation unit that levitates the glass substrate by blowing gas onto the surface of the glass substrate used in the manufacture of the flat panel display ;
A substrate transport unit for transporting the glass substrate levitated by the substrate levitation unit along a transport direction;
A substrate inspection unit that is an optical device for optically detecting defects of the glass substrate conveyed by the substrate conveyance unit;
With
The substrate floating unit has a plurality of float panels arranged at intervals along the transport direction,
The float panel has a substrate facing surface facing the surface of the glass substrate to be transported, a gas ejection mechanism that is formed on the substrate facing surface and ejects the gas, and is formed on the substrate facing surface to suck the gas. And a gas suction mechanism that is arranged so that the height position of the substrate facing surface gradually decreases as it goes in the transport direction,
The gas ejection mechanism generates an upward force on the glass substrate to float the glass substrate,
The gas suction mechanism, the glass substrate to the downward force has emerged by the gas ejection mechanism by raw time difference, to reduce the warp of the glass substrate has emerged by the gas ejection mechanism,
The optical device is disposed in a slit that is a space between adjacent float panels , and detects defects of the glass substrate in which warpage is reduced by the gas suction mechanism in a non-contact manner.
The substrate floating units, the higher the height position of the substrate-facing surface of the float panel is low, the flow rate of the gas blown from the gas ejection mechanism of the float panel rather large,
The amount of change in the height position of the substrate facing surface of the float panel in the transport direction is within the range of the depth of field of the camera that is the optical device.
Glass substrate transfer device. The substrate facing surface of the float panel arranged along the transport direction is parallel to a horizontal plane.
The conveyance apparatus of the glass substrate of Claim 1. The float panel extends along a width direction of the glass substrate which is a direction orthogonal to the transport direction.
The conveyance apparatus of the glass substrate of Claim 1 or 2. The optical device is disposed in a plurality of the slits,
The optical devices disposed in the slits different from each other optically detect defects in the glass substrate in different ways.
The conveyance apparatus of the glass substrate of any one of Claim 1 to 3. A substrate levitation step of levitation of the glass substrate by blowing a gas onto the surface of the glass substrate used in the manufacture of the flat panel display ;
A substrate transporting step for transporting the glass substrate levitated in the substrate surfacing step along a transport direction;
A substrate inspection step for inspecting the glass substrate conveyed in the substrate conveyance step;
With
In the substrate levitation step, the glass substrate is levitated by a plurality of float panels arranged at intervals along the transport direction,
The float panel has a substrate facing surface facing the surface of the glass substrate to be transported, a gas ejection mechanism that is formed on the substrate facing surface and ejects the gas, and is formed on the substrate facing surface to suck the gas. And a gas suction mechanism that is arranged so that the height position of the substrate facing surface gradually decreases as it goes in the transport direction,
The gas ejection mechanism generates an upward force on the glass substrate to float the glass substrate,
The gas suction mechanism, the glass substrate to the downward force has emerged by the gas ejection mechanism by raw time difference, to reduce the warp of the glass substrate has emerged by the gas ejection mechanism,
In the substrate inspection process, defects in the glass substrate that are transported in the substrate transport process and reduced in warpage by the gas suction mechanism are optically disposed by an optical device disposed in a slit that is a space between adjacent float panels. Detected non-contactively ,
In the substrate floating step, the higher the height position of the substrate-facing surface of the float panel is low, the flow rate of the gas blown from the gas ejection mechanism of the float panel rather large,
The amount of change in the height position of the substrate facing surface of the float panel in the transport direction is within the range of the depth of field of the camera that is the optical device.
A method for producing a glass substrate. The substrate facing surface of the float panel arranged along the transport direction is parallel to a horizontal plane.
The manufacturing method of the glass substrate of Claim 5. The optical device is disposed in a plurality of the slits,
The optical devices disposed in the slits different from each other optically detect defects in the glass substrate in different ways.
The manufacturing method of the glass substrate of Claim 5 or 6. The substrate transport step continuously transports the glass substrate along the transport direction.
The manufacturing method of the glass substrate of any one of Claim 5 to 7.

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