JP2007051001A - Method and apparatus for conveying thin sheet-like material - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for conveying a thin sheet-like material which smoothly convey a glass substrate along a predetermined conveying face while surely holding it in a nearly horizontal attitude and having high reliability. <P>SOLUTION: This conveying apparatus 10 comprises an air guide unit 24 having: a lower side air guide 18 jetting a gas from the plurality of portions of a generally flat upper surface part 16 upward and disposed so that the upper surface part 16 is positioned in proximity to the lower side of the conveying face 14; and an upper side air guide 22 jetting the gas from the plurality of portions of a generally flat lower surface part 20 downward and disposed so that the lower surface part 20 is positioned in proximity to the upper side of the conveying face 14. The movement of the glass substrate 12 is restrained on both vertical sides in the state of non-contact. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method and an apparatus for conveying a thin plate-like material such as a large and thin glass substrate used in a flat plate display such as a liquid crystal display (LCD) panel and a plasma display panel (PDP).

  Since glass substrates for liquid crystal display panels and plasma display panels have a significant effect on quality even with slight scratches and dust, glass substrates should be used to prevent scratches on the surface of the glass substrate and to prevent foreign objects from adhering to such glass substrates. Is required to be smoothly transported along a predetermined transport surface while maintaining a shape close to a flat surface.

  In addition, the glass substrate may be subjected to processing such as application of a liquid material, exposure or irradiation with ultraviolet rays or an electron beam, or inspection processing for inspecting scratches on the surface of the glass substrate or adhesion of foreign substances. In such processing and inspection processing, it is particularly required to hold the glass substrate in a shape close to a flat surface. Therefore, processing and inspection processing is performed by transferring the glass substrate to a dedicated fixed table. In order to improve performance, there is a demand for performing processing and inspection processing of such a glass substrate while the glass substrate is being conveyed.

  On the other hand, in the liquid crystal display panel, the size of the glass substrate is becoming larger and larger, for example, in the 8th generation, it is 2200 mm × 2500 mm, the thickness is 0.7 mm, etc., which is very thin compared to the size. When the glass substrate is transported horizontally, not only the outer peripheral end portion but also the inner portion of the glass substrate is supported, the central portion droops greatly.

  Thus, the glass substrate transport device is devised to support the glass substrate as uniformly as possible over the entire surface and transport the glass substrate while maintaining a shape close to a flat surface.

  For example, a transport device is known in which a plurality of rollers are installed at an appropriate pitch in the transport direction of the transport surface and in the width direction perpendicular to the transport direction, and the glass substrate is supported and driven from below by the plurality of rollers.

  Further, there is known a transfer device that uses an air table to float a glass substrate and drive it by air pressure to transfer it in a non-contact manner (for example, see Patent Documents 1, 2, and 3).

  Further, the glass substrate is driven by supporting the vicinity of both ends in the width direction perpendicular to the conveying direction of the glass substrate from below with a roller, and an air table is installed near the center in the width direction of the glass substrate. A conveying device that suppresses the drooping of the central portion is known (see, for example, Patent Documents 4 and 5).

JP-A-10-139160 JP-A-11-268830 Japanese Patent Laid-Open No. 11-268831 JP 2001-196438 A JP 2003-63643 A

  However, the conveying device that supports and drives the glass substrate from below with a plurality of rollers vibrates because the glass substrate repeats contact with the roller and separation from the roller, thereby causing noise and dust generation, The surface of the glass substrate may be damaged. In addition, there is a problem that the glass substrate cannot be processed or inspected in this transfer device due to vibration.

  On the other hand, since the conveying device that conveys the glass substrate with the air table supports the glass substrate with uniform pressure and non-contact on the entire surface, the glass substrate vibrates due to contact with the conveying device, the glass substrate is broken, the glass substrate The control of the compressed air ejected from the air table is complicated, the manufacturing cost and the operating cost are high, and a considerable amount of air is ejected from the air table. There is a problem of causing air turbulence. In addition, due to such air turbulence, foreign substances such as dust may easily adhere to the glass substrate. Further, the glass substrate is unstable because it is completely floating, and the glass substrate may be damaged due to irregular displacement or deformation of the glass substrate due to disturbance such as vibration of other peripheral devices. In addition, since the air table has a structure that supports the entire surface of the glass substrate from below, it is difficult to perform processing and inspection processing of the glass substrate in this transport device.

  Further, a conveying device that drives the glass substrate by supporting the vicinity of both ends in the width direction of the glass substrate from below with a roller and supports the vicinity of the center of the glass substrate in the width direction in a non-contact manner by the air table, ejects from the air table. Although the flow rate of air is relatively small and the control of compressed air ejected from the air table is relatively easy, the glass substrate is locally contacted with the roller from the roller in the vicinity of both ends in the width direction of the glass substrate. In order to repeat the separation, the glass substrate vibrates. Although this vibration is suppressed compared to a conveying device that supports the glass substrate only with rollers, the glass substrate is unstable in the floating state near the center of the glass substrate in the width direction. The whole surface vibrates. Therefore, it is difficult to perform processing and inspection processing of the glass substrate. Furthermore, since the air table is close to the lower surface near the center in the width direction of the glass substrate over the entire length in the conveyance direction of the glass substrate, it is difficult to perform processing and inspection processing of the glass substrate also in this respect. .

  The present invention has been made in view of the above problems, and transports a highly reliable thin plate material that can be smoothly transported along a predetermined transport surface while securely holding a glass substrate in a shape close to a flat surface. It is an object to provide a method and apparatus.

  The present invention relates to a lower air guide capable of injecting gas upward from a plurality of portions of a substantially flat upper surface in a method for transporting a thin plate material in a transport direction along a predetermined transport surface. And an air guide unit having an upper air guide capable of injecting gas downward from a plurality of portions of the substantially flat lower surface portion, the upper surface portion of the lower air guide being close to the lower surface of the thin plate material. And the lower surface portion of the upper air guide is disposed so as to be close to the upper surface of the thin plate material above the lower air guide, and from the upper surface portion of the lower air guide and the lower surface portion of the upper air guide. A thin plate material is transported along the transport surface while injecting gas to the thin plate material to regulate movement of the thin plate material in a non-contact manner on both sides in the vertical direction. For transport method Ri is intended to achieve the above object.

  In the method for transporting the thin plate material, a plurality of the air guide units are arranged spaced apart in the transport direction at intervals shorter than the length of the thin plate material in the transport direction, and movement of the thin plate material is performed in the transport direction. You may restrict | limit in several positions spaced apart.

  Further, the thin plate material may be driven in the transport direction on the upstream side and the downstream side in the transport direction with respect to the plurality of air guide units.

  In this case, a driving member may be brought into contact with the lower surface of the thin plate material to drive the thin plate material in the transport direction.

  In this case, the thin plate material may be driven in the transport direction in a non-contact manner by injecting a gas from below toward the lower surface of the thin plate material and in a direction inclined in the transport direction.

  In these cases, the thin plate material and the processing for processing the thin plate material between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. You may make it perform at least one of the test | inspection process which test | inspects.

  Further, in the method for transporting the thin plate material, the transport surface is set to be inclined with respect to a horizontal plane by a tilt angle of 15 degrees or less in a width direction perpendicular to the transport direction, and the lower air of the air guide unit is set. An upper surface portion of the guide and a lower surface portion of the upper air guide are also inclined with respect to the horizontal plane by the inclination angle in the width direction, and a driving member is provided at a lower side end of the thin plate material in the width direction. May be driven to drive the thin plate material in the transport direction.

  The present invention provides an apparatus for transporting a thin plate material for transporting a thin plate material in a transport direction along a predetermined transport surface, and can inject gas upward from a plurality of portions of a substantially flat upper surface portion. Gas can be jetted downward from a plurality of portions of a substantially flat lower surface portion, and the lower surface portion is located above the conveyance surface. An air guide unit having an upper air guide disposed above the lower air guide so as to be close to each other, and restricts movement of the thin plate-like material in a non-contact manner on both sides in the vertical direction. The above-mentioned object is achieved by a thin plate material conveying device characterized in that it is configured as described above.

  The thin plate-shaped material conveyance device may be configured such that a plurality of the air guide units are spaced apart in the conveyance direction at intervals shorter than the length of the thin plate-shaped material in the conveyance direction.

  Furthermore, in the conveyance apparatus of the said thin plate-shaped material, as a structure provided with the drive unit for driving the said thin plate-shaped material to the said conveyance direction in the upstream and downstream of the said conveyance direction rather than the said several air guide unit. Also good.

  In this case, the drive unit may include a drive member that contacts the lower surface of the thin plate material and drives the thin plate material in the transport direction.

  In this case, the drive unit is configured to drive the thin plate-like material in the transport direction in a non-contact manner by injecting a gas from below toward the transport surface and in a direction inclined in the transport direction. Also good.

  In these cases, a processing unit for processing the thin plate material and the thin plate between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. It is good also as a structure provided with at least one of the test | inspection unit for test | inspecting a material.

  In the thin plate material conveying apparatus, the conveying surface is set to be inclined with respect to a horizontal plane by a tilt angle of 15 degrees or less in a width direction perpendicular to the conveying direction, and the air guide unit is configured to have the lower air The upper surface portion of the guide and the lower surface portion of the upper air guide are configured to be inclined with respect to the horizontal plane by the inclination angle in the width direction, and are in contact with the lower side edge of the sheet material in the width direction. The drive unit having a drive member for driving the thin plate material in the transport direction may be provided.

  In the present invention, since the movement of the thin plate material is regulated in a non-contact manner on both sides in the vertical direction by the air guide unit having the lower air guide and the upper air guide, the glass substrate is securely held in a shape close to a flat surface. However, it can be smoothly transported along a predetermined transport surface.

  Embodiments of the present invention will be described below in detail with reference to the drawings.

  As shown in FIGS. 1 to 3, the transport apparatus 10 according to the first embodiment of the present invention transports, for example, a large glass substrate (thin plate-like material) 12 for a PDP along a transport surface 14. The lower surface is arranged so that air (gas) can be jetted upward from a plurality of portions of the substantially flat upper surface portion 16 and the upper surface portion 16 is close to the lower side of the conveying surface 14. Air can be jetted downward from a plurality of portions of the side air guide 18 and the substantially flat lower surface portion 20, and the lower surface portion 20 is disposed above the lower air guide 18 so as to be close to the upper side of the conveying surface 14. The air guide unit 24 having the upper air guide 22 is provided, and is configured to regulate the movement of the glass substrate 12 in a non-contact manner on both sides in the vertical direction.

  The lower air guide 18 is a substantially rectangular parallelepiped hollow box whose width in the width direction perpendicular to the transport direction is larger than the width of the glass substrate 12 (in the width direction), and is attached via attachment members 26 at both ends in the width direction. The column 28 is supported. The mounting member 26 is slidable in the vertical direction with respect to the column 28 and can be fixed / released to / from the column 28, whereby the position of the lower air guide 18 in the vertical direction can be adjusted.

  The upper surface portion 16 of the lower air guide 18 is formed with a large number of ventilation holes 16A that penetrate the upper surface portion 16 in the vertical direction and communicate with the outside and the inside of the lower air guide 18. An air supply unit 34 such as a blower or a compressor and an air filter 36 are connected to the lower air guide 18 via an air supply pipe 32, and the air from which foreign matter has been removed by the air filter 36 is a ventilation hole 16 </ b> A in the upper surface portion 16. It is designed to be ejected upward. In addition, it is preferable that the clearance gap between the upper surface part 16 of the lower air guide 18 and the lower surface of the glass substrate 12 on the conveyance surface 14 is about several mm or less.

  The upper air guide 22 is a substantially rectangular parallelepiped hollow box having a symmetrical structure in the vertical direction with respect to the lower air guide 18 so that the lower surface portion 20 faces the upper surface portion 16 of the lower air guide 18. Has been placed. The upper air guide 22 is also supported by the support column 28 via attachment members 26 at both ends in the width direction, and the vertical position can be adjusted.

  Further, the lower surface portion 20 of the upper air guide 22 is formed with a large number of vent holes 20 </ b> A that penetrate the lower surface portion 20 in the vertical direction and communicate with the outer side and the inner side of the upper air guide 22. An air supply unit 34 and an air filter 36 are also connected to the upper air guide 22 via an air supply pipe 32, and air from which foreign matter has been removed by the air filter 36 is jetted downward from the vent hole 20 </ b> A of the lower surface portion 20. It is like that. In addition, it is preferable that the clearance gap between the lower surface part 20 of the upper side air guide 22 and the upper surface of the glass substrate 12 on the conveyance surface 14 is also about several mm or less.

  Drive units 38 for driving the glass substrate 12 in the transport direction are provided upstream and downstream of the air guide unit 24 in the transport direction.

  The drive unit 38 has a plurality of rollers (drive members) 40 that are in contact with the lower surface of the glass substrate 12 and drive the glass substrate 12 in the transport direction, and these rollers 40 are arranged at an appropriate pitch in the width direction and have a width. It is attached to a common shaft 42 arranged parallel to the direction. The shaft 42 is connected to a rotation drive unit (not shown), and the plurality of rollers 40 rotate together with the shaft 42 to drive the glass substrate 12 in the transport direction.

  Next, the operation of the transport device 10 will be described.

  In the transport device 10, the plurality of rollers 40 of the drive unit 38 contacts the lower surface of the glass substrate 12 to drive the glass substrate 12 in the transport direction, but the lower air guide 18 supports the glass substrate 12 without contact. Therefore, the force acting on the glass substrate 12 at the contact portion with the roller 40 is small, and surface defects and adhesion of foreign matters due to contact with the roller 40 are suppressed.

  Further, the glass substrate 12 is repeatedly contacted with and separated from the plurality of rollers 40 locally, but the glass substrate 12 is not only supported by the lower air guide 18 from the lower side but also from the upper air. Since the movement is regulated in a non-contact manner on the upper side by the guide 22 as well, the glass substrate 12 is securely held in a shape close to a flat surface, and vibration of the glass substrate 12 is also suppressed.

  That is, the transport device 10 regulates the movement of the glass substrate 12 in a non-contact manner on both sides in the vertical direction by the air guide unit 24 having the lower air guide 18 and the upper air guide 22, so that the glass substrate 12 is made flat. The glass substrate 12 can be smoothly transported along the transport surface 14 so that the surface of the glass substrate 12 is not scratched or foreign matter adheres while being securely held in a close shape.

  Further, the lower air guide 18 and the upper air guide 22 are simple hollow boxes, and it is only necessary to form the vent holes 16A and 20A in the upper surface portion 16 and the lower surface portion 20, respectively. Can do.

  In particular, the vent holes 16A and 20A only need to be capable of forming an air film between the glass substrate 12 being transferred and the upper surface portion 16 and the lower surface portion 20, and the direction and size of the holes can be freely designed. The degree is great.

  Further, as compared with the conventional levitation transfer means that applies the driving force by the air pressure, it is only necessary to supply low-pressure air for holding the glass substrate 12 from the air supply unit 34. In addition, the manufacturing cost of the apparatus can be greatly reduced, and the structure is simple because complicated control of air is unnecessary.

  Next, a second embodiment of the present invention will be described.

  As shown in FIG. 4, the transport device 50 according to the second embodiment includes a plurality of air guide units 24 spaced apart in the transport direction at intervals shorter than the length of the glass substrate 12 in the transport direction (this second embodiment). Two features are provided in the form. Since other configurations are the same as those of the transport apparatus 10 according to the first embodiment, the same reference numerals as those in FIGS.

  The transport device 50 regulates the movement of the glass substrate 12 at positions where the plurality of air guide units 24 are spaced apart in the transport direction at intervals shorter than the length of the glass substrate 12 in the transport direction. The glass substrate 12 is more reliably held in a shape close to a plane than in the transfer device 10, and the vibration of the glass substrate 12 is further reliably suppressed.

  Next, a third embodiment of the present invention will be described.

  As shown in FIG. 5, the transport device 60 according to the third embodiment is characterized in that an inspection unit 62 for inspecting the glass substrate 12 is provided between the two air guide units 24. . Since other configurations are the same as those of the transport apparatus 50 according to the second embodiment, the same reference numerals as those in FIG.

  The inspection unit 62 includes a light source 64 disposed below the conveyance surface 14 and a camera 66 disposed above the light source 64, and is configured to detect scratches on the glass substrate 12 and adhesion of foreign matter. Has been.

  The transport device 60 regulates the movement of the glass substrate 12 at positions where the plurality of air guide units 24 are spaced apart in the transport direction at intervals shorter than the length of the glass substrate 12 in the transport direction. The glass substrate 12 can be inspected with high accuracy because it is securely held in a shape close to a flat surface between 24. Thus, since the glass substrate 12 can be inspected in the transport device 60, productivity can be improved as compared with the case where the glass substrate is transferred to a dedicated fixed table and the glass substrate is inspected.

  Next, a fourth embodiment of the present invention will be described.

  As shown in FIGS. 6 and 7, the transport device 70 according to the fourth embodiment is a roller in which the drive unit 72 drives the glass substrate 12 by supporting the vicinity of both ends of the glass substrate 12 in the width direction from below. 74 and an air table 76 that supports the vicinity of the center in the width direction of the glass substrate 12 in a non-contact manner. Since other configurations are the same as those of the transfer device 60 according to the third embodiment, the same reference numerals as those in FIG.

  The roller 74 has a roller portion 74 </ b> A that contacts the lower surface of the glass substrate 12 and a flange portion 74 </ b> B that restricts the movement of the glass substrate 12 in the width direction.

  The air table 76 is a substantially rectangular parallelepiped hollow box having the same configuration as that of the lower air guide 18. The width of the air table 76 is slightly smaller than the width (in the width direction) of the glass substrate 12. It arrange | positions so that the lower surface of the board | substrate 12 may be adjoined.

  A large number of ventilation holes 78A are formed in the upper surface portion 78 of the air table 76 so as to penetrate the upper surface portion 78 in the vertical direction and communicate with the outside and the inside of the air table 76. An air supply unit such as a blower or a compressor and an air filter (both not shown) are connected to the air table 76 via an air supply pipe, and air from which foreign matter has been removed by the air filter is a vent hole 78A in the upper surface portion 78. It is designed to be ejected upward.

  The driving unit 72 includes a roller 74 that drives the glass substrate 12 by supporting the vicinity of both ends in the width direction of the glass substrate 12 from below, and an air table 76 that supports the vicinity of the center of the glass substrate 12 in the width direction in a non-contact manner. Therefore, it is possible to suppress adhesion of foreign matters to regions other than the vicinity of both ends of the glass substrate 12, and it is possible to suppress vibration of the glass substrate 12 and chipping of the glass substrate associated therewith.

  Next, a fifth embodiment of the present invention will be described.

  As shown in FIG. 8, the conveyance device 80 according to the fifth embodiment is configured such that the conveyance surface 82 is inclined with respect to a horizontal plane by an inclination angle δ of 15 degrees or less in a width direction perpendicular to the conveyance direction. The air guide unit 24 is configured such that the upper surface portion 16 of the lower air guide 18 and the lower surface portion 20 of the upper air guide 22 are inclined with respect to the horizontal plane by an inclination angle δ in the width direction, and in the width direction of the glass substrate 12. A drive unit 86 having a roller (drive member) 84 that contacts the lower side end and drives the glass substrate 12 in the transport direction is provided. Since other configurations are the same as those of the transport apparatus 10 according to the first embodiment, the same reference numerals as those in FIGS.

  The drive unit 86 has a rotation axis of the roller 84 inclined in the width direction with respect to the vertical direction by an inclination angle δ, and is connected to a rotation drive mechanism (not shown). The circumferential side surface of the roller 84 has a shape that increases in diameter from the central portion in the axial direction toward both end portions in the axial direction, and contacts the lower side end in the width direction of the glass substrate 12 at the central portion having the smallest outer diameter. Then, the glass substrate 12 is driven in the transport direction.

  Thus, even if the conveyance surface 82 is inclined in the width direction with respect to the horizontal plane, the air guide unit 24 also has the upper surface portion 16 of the lower air guide 18 and the lower surface portion 20 of the upper air guide 22 in the width direction with respect to the horizontal plane. The structure is inclined by the inclination angle δ, and the movement of the glass substrate 12 is regulated in a non-contact manner on both sides in the vertical direction, so that the glass substrate 12 is reliably held in a shape close to a plane.

  Furthermore, the roller 84 contacts the lower side edge of the glass substrate 12 in the width direction to drive the glass substrate 12 in the transport direction, so that the behavior of the glass substrate 12 in the width direction is also stabilized.

  In the first to fourth embodiments, the drive units 38 and 72 are configured such that the rollers 40 and 74 contact the lower surface of the glass substrate 12 to drive the glass substrate 12 in the transport direction. Like the drive unit comprised only by it, it is good also as a structure which drives the glass substrate 12 to a conveyance direction non-contactingly toward a conveyance surface from the downward direction, and injecting in the direction inclined in the conveyance direction.

  Also in this case, since the movement of the glass substrate 12 is regulated by the air guide unit 24 on both sides in the vertical direction, the front glass substrate 12 is moved along the transport surface 14 while the glass substrate 12 is securely held in a shape close to a plane. Can be transported smoothly.

  In the first to fifth embodiments, the lower air guide 18 is a box. However, if the upper surface portion is substantially flat and gas can be ejected upward from a plurality of portions on the upper surface portion, the lower air guide 18 The shape and structure of the guide are not particularly limited. For example, the lower air guide 18 has a structure in which a ventilation hole 16A penetrating the upper surface portion 16 in the vertical direction is formed in the upper surface portion 16. The upper surface portion may be made of a material having The same applies to the upper air guide 22 and the air table of the drive unit.

  In the first to fifth embodiments, the gas ejected from the lower air guide 18 and the upper air guide 22 is air. From the lower air guide 18 and the upper air guide 22, for example, nitrogen gas, rare gas Other gases such as gas may be ejected.

  Further, in the third embodiment, the inspection unit 62 for inspecting the surface of the glass substrate 12 and the adhesion of foreign matter is provided between the two air guide units 24. An inspection unit for performing other inspections may be provided in between. In addition, a processing unit that performs processing such as application of a liquid material, exposure to ultraviolet rays or electron beams, or irradiation may be provided between the two air guide units 24.

  In the second to fourth embodiments, the two air guide units 24 are provided. However, three or more air guide units may be provided according to the length of the glass substrate 12 or the like.

  Moreover, although the said 1st-5th embodiment is for conveying the glass substrate 12, if it is what is called a thin plate-like material whose plate | board thickness is thin compared with an area, this material is also used for conveyance of other materials. The invention is applicable. For example, the present invention is applied to the case of transporting a material that is likely to be bent, such as a metal thin plate material or a resin thin plate material.

  The present invention can be used for transporting a thin plate-like material such as a large thin glass substrate used in a flat plate display such as a liquid crystal display (LCD) panel or a plasma display panel (PDP).

The side view which shows the conveying apparatus which concerns on 1st Embodiment of this invention. Plan view Front view The side view which shows the conveying apparatus which concerns on 2nd Embodiment of this invention. The side view which shows the conveying apparatus which concerns on 3rd Embodiment of this invention. The side view which shows the conveying apparatus which concerns on 4th Embodiment of this invention. Sectional drawing which follows the VII-VII line in FIG. The front view which shows the conveying apparatus which concerns on 5th Embodiment of this invention.

Explanation of symbols

10, 50, 60, 70, 80 ... conveying device 12 ... glass substrate (thin plate-like material)
DESCRIPTION OF SYMBOLS 14, 82 ... Conveying surface 16 ... Upper surface part 16A, 20A, 78A ... Vent 18 ... Lower air guide 20 ... Lower surface part 22 ... Upper air guide 24 ... Air guide unit 38, 72, 86 ... Drive unit 40, 74, 84: Roller (drive member)

Claims (14)

In the conveyance method of the thin plate material that conveys the thin plate material in the conveyance direction along the predetermined conveyance surface,
Air having a lower air guide capable of injecting gas upward from a plurality of parts on a substantially flat upper surface part and an upper air guide capable of injecting gas downward from a plurality of parts on a substantially flat lower surface part In the guide unit, the upper surface portion of the lower air guide is close to the lower surface of the thin plate material, and the lower surface portion of the upper air guide is close to the upper surface of the thin plate material above the lower air guide. The gas is ejected from the upper surface portion of the lower air guide and the lower surface portion of the upper air guide to the thin plate material, and the movement of the thin plate material is regulated in a non-contact manner on both sides in the vertical direction. A method for transporting a thin plate material, comprising transporting the thin plate material along the transport surface. In claim 1,
A plurality of the air guide units are spaced apart in the transport direction at intervals shorter than the length of the thin plate material in the transport direction, and the movement of the thin plate material is restricted at a plurality of positions spaced in the transport direction. A method for transporting a thin plate material. In claim 2,
A method for transporting a thin plate material, wherein the thin plate material is driven in the transport direction on the upstream side and the downstream side in the transport direction with respect to the plurality of air guide units. In claim 3,
A method for transporting a thin plate material, wherein a driving member is brought into contact with the lower surface of the thin plate material to drive the thin plate material in the transport direction. In claim 3,
A thin plate-like material characterized by driving gas in a non-contact manner in the transport direction by injecting gas from below to a lower surface of the thin plate-like material and in a direction inclined in the transport direction. Transport method. In any of claims 2 to 5,
A processing process for processing the thin plate material and an inspection process for inspecting the thin plate material between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. A method for conveying a thin plate material, wherein at least one of them is performed. In claim 1 or 2,
The conveying surface is set to be inclined with respect to a horizontal plane by an inclination angle of 15 degrees or less in a width direction perpendicular to the conveying direction, and the upper surface portion of the lower air guide and the lower surface of the upper air guide of the air guide unit The part is also arranged to be inclined by the inclination angle in the width direction with respect to a horizontal plane, and a driving member is brought into contact with a lower side end of the thin plate material in the width direction to convey the thin plate material. A method for conveying a thin plate material, characterized by being driven in a direction. In the thin plate material transport device for transporting the thin plate material in the transport direction along the predetermined transport surface,
A lower air guide that is capable of injecting gas upward from a plurality of portions of a substantially flat upper surface portion and is arranged so that the upper surface portion is close to the lower side of the transport surface, and a plurality of substantially flat lower surface portions And an upper air guide disposed above the lower air guide so that gas can be injected downward from the portion and the lower surface portion is close to the upper side of the transport surface. The thin plate-shaped material conveying device is configured to restrict the movement of the thin plate-shaped material in a non-contact manner on both sides in the vertical direction. In claim 8,
A thin plate material conveying apparatus comprising a plurality of the air guide units spaced apart in the conveying direction at intervals shorter than the length of the thin plate material in the conveying direction. In claim 9,
A thin plate-shaped material conveying apparatus comprising a drive unit for driving the thin plate-shaped material in the conveying direction on the upstream side and the downstream side in the conveying direction with respect to the plurality of air guide units. In claim 10,
The drive unit for a thin plate material, wherein the drive unit includes a drive member that contacts the lower surface of the thin plate material and drives the thin plate material in the transport direction. In claim 10,
The drive unit is configured to drive the thin plate-like material in the transport direction in a non-contact manner by injecting gas in a direction inclined from the bottom toward the transport surface and in the transport direction. A device for transporting thin plate materials. In any of claims 9 to 12,
A processing unit for processing the thin plate material and an inspection of the thin plate material between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. At least one of the inspection units is provided. In claim 8 or 9,
The conveyance surface is set to be inclined with respect to a horizontal plane by an inclination angle of 15 degrees or less in a width direction perpendicular to the conveyance direction, and the air guide unit includes an upper surface portion of the lower air guide and a lower surface of the upper air guide. The part is configured to be inclined in the width direction by the inclination angle with respect to a horizontal plane, and contacts the lower side edge of the sheet material in the width direction to drive the sheet material in the transport direction. A thin plate-shaped material conveying apparatus comprising a driving unit having a driving member.

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