JP2007051001A - Method and apparatus for conveying thin sheet-like material - Google Patents

Method and apparatus for conveying thin sheet-like material Download PDF

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JP2007051001A
JP2007051001A JP2005239101A JP2005239101A JP2007051001A JP 2007051001 A JP2007051001 A JP 2007051001A JP 2005239101 A JP2005239101 A JP 2005239101A JP 2005239101 A JP2005239101 A JP 2005239101A JP 2007051001 A JP2007051001 A JP 2007051001A
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thin plate
air guide
plate material
transport
glass substrate
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Nariyuki Nagura
成之 名倉
Sukeaki Hamanaka
亮明 濱中
Tsutomu Oguri
勤 小栗
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Nihon Sekkei Kogyo Co Ltd
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Nihon Sekkei Kogyo Co Ltd
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<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for conveying a thin sheet-like material which smoothly convey a glass substrate along a predetermined conveying face while surely holding it in a nearly horizontal attitude and having high reliability. <P>SOLUTION: This conveying apparatus 10 comprises an air guide unit 24 having: a lower side air guide 18 jetting a gas from the plurality of portions of a generally flat upper surface part 16 upward and disposed so that the upper surface part 16 is positioned in proximity to the lower side of the conveying face 14; and an upper side air guide 22 jetting the gas from the plurality of portions of a generally flat lower surface part 20 downward and disposed so that the lower surface part 20 is positioned in proximity to the upper side of the conveying face 14. The movement of the glass substrate 12 is restrained on both vertical sides in the state of non-contact. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、液晶表示(LCD)パネル、プラズマディスプレイパネル(PDP)などの平面板ディスプレイに用いる大型で薄いガラス基板のような薄板状材料を搬送する方法及び装置に関する。   The present invention relates to a method and an apparatus for conveying a thin plate-like material such as a large and thin glass substrate used in a flat plate display such as a liquid crystal display (LCD) panel and a plasma display panel (PDP).

液晶表示パネルやプラズマディスプレイパネルのガラス基板は僅かな傷や埃でも品質に大きく影響するため、このようなガラス基板の搬送においてはガラス基板の表面に傷が生じたり異物が付着しないようにガラス基板を平面に近い形状に保持しつつ所定の搬送面に沿って滑らかに搬送することが要求されている。   Since glass substrates for liquid crystal display panels and plasma display panels have a significant effect on quality even with slight scratches and dust, glass substrates should be used to prevent scratches on the surface of the glass substrate and to prevent foreign objects from adhering to such glass substrates. Is required to be smoothly transported along a predetermined transport surface while maintaining a shape close to a flat surface.

又、ガラス基板は液状材料の塗布、紫外線や電子線による露光又は照射等の加工処理やガラス基板の表面の傷や異物の付着等を検査するための検査処理が行われることがある。このような加工処理や検査処理では特にガラス基板を平面に近い形状に保持することが要求されるため、専用の固定テーブルにガラス基板を移載して加工処理や検査処理が行われるが、生産性の向上のため、このようなガラス基板の加工処理や検査処理をガラス基板の搬送中に行いたいという要求がある。   In addition, the glass substrate may be subjected to processing such as application of a liquid material, exposure or irradiation with ultraviolet rays or an electron beam, or inspection processing for inspecting scratches on the surface of the glass substrate or adhesion of foreign substances. In such processing and inspection processing, it is particularly required to hold the glass substrate in a shape close to a flat surface. Therefore, processing and inspection processing is performed by transferring the glass substrate to a dedicated fixed table. In order to improve performance, there is a demand for performing processing and inspection processing of such a glass substrate while the glass substrate is being conveyed.

一方、液晶表示パネルでは、ガラス基板のサイズがますます大型化しており、例えば第8世代においては、2200mm×2500mm、厚さが0.7mmなどであって、大きさに比べて非常に薄いため、ガラス基板を水平に搬送する際に、その外周端部のみならず、これよりも内側の部分も支持しなければ中央部が大きく垂れ下がってしまう。   On the other hand, in the liquid crystal display panel, the size of the glass substrate is becoming larger and larger, for example, in the 8th generation, it is 2200 mm × 2500 mm, the thickness is 0.7 mm, etc., which is very thin compared to the size. When the glass substrate is transported horizontally, not only the outer peripheral end portion but also the inner portion of the glass substrate is supported, the central portion droops greatly.

そこでガラス基板の搬送装置は、ガラス基板を全面においてできるだけ均等に支持し、平面に近い形状に保持して搬送するように工夫されている。   Thus, the glass substrate transport device is devised to support the glass substrate as uniformly as possible over the entire surface and transport the glass substrate while maintaining a shape close to a flat surface.

例えば、搬送面の搬送方向及び搬送方向に垂直な幅方向に適宜なピッチで複数のローラを設置し、これら複数のローラでガラス基板を下方から支持して駆動する搬送装置が知られている。   For example, a transport device is known in which a plurality of rollers are installed at an appropriate pitch in the transport direction of the transport surface and in the width direction perpendicular to the transport direction, and the glass substrate is supported and driven from below by the plurality of rollers.

又、エアテーブルを用いてガラス基板を浮上させつつエアの圧力で駆動して非接触で搬送する搬送装置が知られている(例えば特許文献1、2、3参照)。   Further, there is known a transfer device that uses an air table to float a glass substrate and drive it by air pressure to transfer it in a non-contact manner (for example, see Patent Documents 1, 2, and 3).

又、ガラス基板における搬送方向に垂直な幅方向の両端近傍をローラで下方から支持してガラス基板を駆動し、且つ、ガラス基板の幅方向の中央近傍にはエアテーブルを設置してガラス基板の中央部の垂れ下がりを抑制するようにした搬送装置が知られている(例えば特許文献4、5参照)。   Further, the glass substrate is driven by supporting the vicinity of both ends in the width direction perpendicular to the conveying direction of the glass substrate from below with a roller, and an air table is installed near the center in the width direction of the glass substrate. A conveying device that suppresses the drooping of the central portion is known (see, for example, Patent Documents 4 and 5).

特開平10−139160号公報JP-A-10-139160 特開平11−268830号公報JP-A-11-268830 特開平11−268831号公報Japanese Patent Laid-Open No. 11-268831 特開2001−196438号公報JP 2001-196438 A 特開2003−63643号公報JP 2003-63643 A

しかしながら、複数のローラでガラス基板を下方から支持して駆動する搬送装置は、ガラス基板がローラとの接触とローラからの離間とを繰り返すため振動が生じ、これにより騒音や発埃が生じたり、ガラス基板の表面が欠損することがある。又、振動のため、この搬送装置においてガラス基板の加工処理や検査処理を行うことができないという問題がある。   However, the conveying device that supports and drives the glass substrate from below with a plurality of rollers vibrates because the glass substrate repeats contact with the roller and separation from the roller, thereby causing noise and dust generation, The surface of the glass substrate may be damaged. In addition, there is a problem that the glass substrate cannot be processed or inspected in this transfer device due to vibration.

一方、エアテーブルでガラス基板を搬送する搬送装置はガラス基板を全面において均一な圧力で、且つ、非接触で支持するので、搬送装置との接触によるガラス基板の振動やガラス基板の欠損、ガラス基板への異物の付着が抑制されるが、エアテーブルから噴出させる圧縮空気の制御が複雑で製造コスト及び運転コストが高く、又、エアテーブルから少なからぬ流量の空気を噴出するため、例えばクリーンルーム内の空気の乱れを生じさせるという問題がある。又、このような空気の乱れにより、却ってガラス基板に埃等の異物が付着しやすくなることもある。更に、ガラス基板は完全に浮上状態であるため不安定であり、他の周辺装置の振動等の外乱によりガラス基板に不規則な変位や変形が生じてガラス基板が欠損しうる。又、エアテーブルがガラス基板の全面を下方から支持する構造であるため、この搬送装置においてガラス基板の加工処理や検査処理を行うことは困難である。   On the other hand, since the conveying device that conveys the glass substrate with the air table supports the glass substrate with uniform pressure and non-contact on the entire surface, the glass substrate vibrates due to contact with the conveying device, the glass substrate is broken, the glass substrate The control of the compressed air ejected from the air table is complicated, the manufacturing cost and the operating cost are high, and a considerable amount of air is ejected from the air table. There is a problem of causing air turbulence. In addition, due to such air turbulence, foreign substances such as dust may easily adhere to the glass substrate. Further, the glass substrate is unstable because it is completely floating, and the glass substrate may be damaged due to irregular displacement or deformation of the glass substrate due to disturbance such as vibration of other peripheral devices. In addition, since the air table has a structure that supports the entire surface of the glass substrate from below, it is difficult to perform processing and inspection processing of the glass substrate in this transport device.

又、ガラス基板における幅方向の両端近傍をローラで下方から支持してガラス基板を駆動し、ガラス基板の幅方向の中央近傍をエアテーブルで非接触で支持する搬送装置は、エアテーブルから噴出する空気の流量が比較的少なく、又、エアテーブルから噴出させる圧縮空気の制御が比較的容易であるが、ガラス基板の幅方向の両端近傍では局部的にガラス基板がローラとの接触とローラからの離間とを繰り返すため、ガラス基板が振動する。この振動は、ローラだけでガラス基板を支持する搬送装置よりは抑制されるものの、ガラス基板の幅方向の中央近傍は浮上状態で不安定であるため、ガラス基板は、幅方向の両端近傍だけでなく、全面が振動する。従って、ガラス基板の加工処理や検査処理を行うことは困難である。更に、エアテーブルがガラス基板の搬送方向の全長に亘ってガラス基板の幅方向の中央近傍の下面に近接しているので、この点でもガラス基板の加工処理や検査処理を行うことが困難である。   Further, a conveying device that drives the glass substrate by supporting the vicinity of both ends in the width direction of the glass substrate from below with a roller and supports the vicinity of the center of the glass substrate in the width direction in a non-contact manner by the air table, ejects from the air table. Although the flow rate of air is relatively small and the control of compressed air ejected from the air table is relatively easy, the glass substrate is locally contacted with the roller from the roller in the vicinity of both ends in the width direction of the glass substrate. In order to repeat the separation, the glass substrate vibrates. Although this vibration is suppressed compared to a conveying device that supports the glass substrate only with rollers, the glass substrate is unstable in the floating state near the center of the glass substrate in the width direction. The whole surface vibrates. Therefore, it is difficult to perform processing and inspection processing of the glass substrate. Furthermore, since the air table is close to the lower surface near the center in the width direction of the glass substrate over the entire length in the conveyance direction of the glass substrate, it is difficult to perform processing and inspection processing of the glass substrate also in this respect. .

本発明は、以上の問題点に鑑みてなされたものであってガラス基板を平面に近い形状に確実に保持しつつ所定の搬送面に沿って滑らかに搬送できる信頼性が高い薄板状材料の搬送方法及び装置を提供することを目的とする。   The present invention has been made in view of the above problems, and transports a highly reliable thin plate material that can be smoothly transported along a predetermined transport surface while securely holding a glass substrate in a shape close to a flat surface. It is an object to provide a method and apparatus.

本方法発明は、薄板状材料を所定の搬送面に沿う搬送方向に搬送する薄板状材料の搬送方法において、略平坦な上面部の複数の部位から上方に気体を噴射可能である下側エアガイド及び略平坦な下面部の複数の部位から下方に気体を噴射可能である上側エアガイドを有してなるエアガイドユニットを、前記下側エアガイドの上面部が前記薄板状材料の下面に近接し、且つ、前記上側エアガイドの下面部が前記下側エアガイドの上方において前記薄板状材料の上面に近接するように配置し、前記下側エアガイドの上面部及び前記上側エアガイドの下面部から前記薄板状材料に気体を噴射して該薄板状材料の動きを上下方向の両側において非接触で規制しつつ該薄板状材料を前記搬送面に沿って搬送することを特徴とする薄板状材料の搬送方法により、上記目的を達成するものである。   The present invention relates to a lower air guide capable of injecting gas upward from a plurality of portions of a substantially flat upper surface in a method for transporting a thin plate material in a transport direction along a predetermined transport surface. And an air guide unit having an upper air guide capable of injecting gas downward from a plurality of portions of the substantially flat lower surface portion, the upper surface portion of the lower air guide being close to the lower surface of the thin plate material. And the lower surface portion of the upper air guide is disposed so as to be close to the upper surface of the thin plate material above the lower air guide, and from the upper surface portion of the lower air guide and the lower surface portion of the upper air guide. A thin plate material is transported along the transport surface while injecting gas to the thin plate material to regulate movement of the thin plate material in a non-contact manner on both sides in the vertical direction. For transport method Ri is intended to achieve the above object.

前記薄板状材料の搬送方法において、前記エアガイドユニットを前記薄板状材料の前記搬送方向の長さよりも短い間隔で該搬送方向に離間して複数配置し、前記薄板状材料の動きを前記搬送方向に離間した複数の位置において規制してもよい。   In the method for transporting the thin plate material, a plurality of the air guide units are arranged spaced apart in the transport direction at intervals shorter than the length of the thin plate material in the transport direction, and movement of the thin plate material is performed in the transport direction. You may restrict | limit in several positions spaced apart.

又、前記複数のエアガイドユニットよりも前記搬送方向の上流側及び下流側において前記薄板状材料を前記搬送方向に駆動してもよい。   Further, the thin plate material may be driven in the transport direction on the upstream side and the downstream side in the transport direction with respect to the plurality of air guide units.

この場合、前記薄板状材料の下面に駆動部材を接触させて該薄板状材料を前記搬送方向に駆動してもよい。   In this case, a driving member may be brought into contact with the lower surface of the thin plate material to drive the thin plate material in the transport direction.

又、この場合、下方から前記薄板状材料の下面に向けて、且つ、前記搬送方向に傾斜した方向に気体を噴射して該薄板状材料を非接触で前記搬送方向に駆動してもよい。   In this case, the thin plate material may be driven in the transport direction in a non-contact manner by injecting a gas from below toward the lower surface of the thin plate material and in a direction inclined in the transport direction.

又、これらの場合、前記複数のエアガイドユニットのうちのいずれかのエアガイドユニットとこれに隣り合う他のエアガイドユニットとの間において、前記薄板状材料を加工する加工処理及び前記薄板状材料を検査する検査処理の少なくとも一方を行うようにしてもよい。   In these cases, the thin plate material and the processing for processing the thin plate material between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. You may make it perform at least one of the test | inspection process which test | inspects.

又、前記薄板状材料の搬送方法において、前記搬送面を水平面に対して前記搬送方向と垂直な幅方向に15度以内の傾斜角だけ傾斜させて設定し、前記エアガイドユニットの前記下側エアガイドの上面部及び前記上側エアガイドの下面部も水平面に対して前記幅方向に前記傾斜角だけ傾斜させて配置し、且つ、前記薄板状材料における前記幅方向の下側の側端に駆動部材を接触させて該薄板状材料を前記搬送方向に駆動してもよい。   Further, in the method for transporting the thin plate material, the transport surface is set to be inclined with respect to a horizontal plane by a tilt angle of 15 degrees or less in a width direction perpendicular to the transport direction, and the lower air of the air guide unit is set. An upper surface portion of the guide and a lower surface portion of the upper air guide are also inclined with respect to the horizontal plane by the inclination angle in the width direction, and a driving member is provided at a lower side end of the thin plate material in the width direction. May be driven to drive the thin plate material in the transport direction.

本装置発明は、薄板状材料を所定の搬送面に沿う搬送方向に搬送するための薄板状材料の搬送装置において、略平坦な上面部の複数の部位から上方に気体を噴射可能であり該上面部が前記搬送面の下側に近接するように配置された下側エアガイドと、略平坦な下面部の複数の部位から下方に気体を噴射可能であり該下面部が前記搬送面の上側に近接するように前記下側エアガイドの上方に配置された上側エアガイドと、を有してなるエアガイドユニットが備えられ、前記薄板状材料の動きを上下方向の両側において非接触で規制するように構成されたことを特徴とする薄板状材料の搬送装置により、上記目的を達成するものである。   The present invention provides an apparatus for transporting a thin plate material for transporting a thin plate material in a transport direction along a predetermined transport surface, and can inject gas upward from a plurality of portions of a substantially flat upper surface portion. Gas can be jetted downward from a plurality of portions of a substantially flat lower surface portion, and the lower surface portion is located above the conveyance surface. An air guide unit having an upper air guide disposed above the lower air guide so as to be close to each other, and restricts movement of the thin plate-like material in a non-contact manner on both sides in the vertical direction. The above-mentioned object is achieved by a thin plate material conveying device characterized in that it is configured as described above.

前記薄板状材料の搬送装置において、前記エアガイドユニットが前記搬送方向の前記薄板状材料の長さよりも短い間隔で該搬送方向に離間して複数備えられた構成としてもよい。   The thin plate-shaped material conveyance device may be configured such that a plurality of the air guide units are spaced apart in the conveyance direction at intervals shorter than the length of the thin plate-shaped material in the conveyance direction.

更に、前記薄板状材料の搬送装置において、前記複数のエアガイドユニットよりも前記搬送方向の上流側及び下流側に前記薄板状材料を前記搬送方向に駆動するための駆動ユニットが備えられた構成としてもよい。   Furthermore, in the conveyance apparatus of the said thin plate-shaped material, as a structure provided with the drive unit for driving the said thin plate-shaped material to the said conveyance direction in the upstream and downstream of the said conveyance direction rather than the said several air guide unit. Also good.

この場合、前記駆動ユニットは、前記薄板状材料の下面に接触して該薄板状材料を前記搬送方向に駆動する駆動部材を有する構成としてもよい。   In this case, the drive unit may include a drive member that contacts the lower surface of the thin plate material and drives the thin plate material in the transport direction.

又、この場合、前記駆動ユニットは、下方から前記搬送面に向けて、且つ、前記搬送方向に傾斜した方向に気体を噴射して該薄板状材料を非接触で前記搬送方向に駆動する構成としてもよい。   In this case, the drive unit is configured to drive the thin plate-like material in the transport direction in a non-contact manner by injecting a gas from below toward the transport surface and in a direction inclined in the transport direction. Also good.

又、これらの場合、前記複数のエアガイドユニットのうちのいずれかのエアガイドユニットとこれに隣り合う他のエアガイドユニットとの間に、前記薄板状材料を加工するための加工ユニット及び前記薄板状材料を検査するための検査ユニットの少なくとも一方が備えられた構成としてもよい。   In these cases, a processing unit for processing the thin plate material and the thin plate between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. It is good also as a structure provided with at least one of the test | inspection unit for test | inspecting a material.

又、前記薄板状材料の搬送装置において、前記搬送面は水平面に対して前記搬送方向と垂直な幅方向に15度以内の傾斜角だけ傾斜して設定され、前記エアガイドユニットは前記下側エアガイドの上面部及び前記上側エアガイドの下面部が水平面に対して前記幅方向に前記傾斜角だけ傾斜した構成であり、且つ、前記薄板状材料における前記幅方向の下側の側端に接触して該薄板状材料を前記搬送方向に駆動する駆動部材を有する駆動ユニットが備えられた構成としてもよい。   In the thin plate material conveying apparatus, the conveying surface is set to be inclined with respect to a horizontal plane by a tilt angle of 15 degrees or less in a width direction perpendicular to the conveying direction, and the air guide unit is configured to have the lower air The upper surface portion of the guide and the lower surface portion of the upper air guide are configured to be inclined with respect to the horizontal plane by the inclination angle in the width direction, and are in contact with the lower side edge of the sheet material in the width direction. The drive unit having a drive member for driving the thin plate material in the transport direction may be provided.

本発明においては、下側エアガイド及び上側エアガイドを有してなるエアガイドユニットにより薄板状材料の動きを上下方向両側において非接触で規制するので、ガラス基板を平面に近い形状に確実に保持しつつ所定の搬送面に沿って滑らかに搬送できる。   In the present invention, since the movement of the thin plate material is regulated in a non-contact manner on both sides in the vertical direction by the air guide unit having the lower air guide and the upper air guide, the glass substrate is securely held in a shape close to a flat surface. However, it can be smoothly transported along a predetermined transport surface.

以下本発明の実施形態を図面を参照して詳細に説明する。   Embodiments of the present invention will be described below in detail with reference to the drawings.

図1〜3に示されるように、本発明の第1実施形態に係る搬送装置10は、例えば大型のPDP用のガラス基板(薄板状材料)12を、搬送面14に沿って略水平な搬送方向に搬送するものであり、略平坦な上面部16の複数の部位から上方に空気(気体)を噴射可能であり該上面部16が搬送面14の下側に近接するように配置された下側エアガイド18と、略平坦な下面部20の複数の部位から下方に空気を噴射可能であり該下面部20が搬送面14の上側に近接するように下側エアガイド18の上方に配置された上側エアガイド22と、を有してなるエアガイドユニット24が備えられ、ガラス基板12の動きを上下方向の両側において非接触で規制するように構成されている。   As shown in FIGS. 1 to 3, the transport apparatus 10 according to the first embodiment of the present invention transports, for example, a large glass substrate (thin plate-like material) 12 for a PDP along a transport surface 14. The lower surface is arranged so that air (gas) can be jetted upward from a plurality of portions of the substantially flat upper surface portion 16 and the upper surface portion 16 is close to the lower side of the conveying surface 14. Air can be jetted downward from a plurality of portions of the side air guide 18 and the substantially flat lower surface portion 20, and the lower surface portion 20 is disposed above the lower air guide 18 so as to be close to the upper side of the conveying surface 14. The air guide unit 24 having the upper air guide 22 is provided, and is configured to regulate the movement of the glass substrate 12 in a non-contact manner on both sides in the vertical direction.

下側エアガイド18は、略直方体の中空の箱体で搬送方向と垂直な幅方向の幅がガラス基板12の(幅方向の)幅よりも大きく、幅方向の両端において取付部材26を介して支柱28に支持されている。尚、取付部材26は支柱28に対して上下方向に摺動自在、且つ、支柱28に固定/解放自在であり、これにより下側エアガイド18は上下方向の位置が調整可能とされている。   The lower air guide 18 is a substantially rectangular parallelepiped hollow box whose width in the width direction perpendicular to the transport direction is larger than the width of the glass substrate 12 (in the width direction), and is attached via attachment members 26 at both ends in the width direction. The column 28 is supported. The mounting member 26 is slidable in the vertical direction with respect to the column 28 and can be fixed / released to / from the column 28, whereby the position of the lower air guide 18 in the vertical direction can be adjusted.

下側エアガイド18の上面部16には上面部16を上下方向に貫通し、下側エアガイド18の外側及び内側に連通する多数の通気孔16Aが形成されている。下側エアガイド18には給気管32を介してブロア又はコンプレッサ等の給気ユニット34及びエアフィルタ36が連結されており、エアフィルタ36で異物が除去された空気が上面部16の通気孔16Aから上方に噴出されるようになっている。尚、下側エアガイド18の上面部16と搬送面14上のガラス基板12の下面との隙間は数mm程度以下であることが好ましい。   The upper surface portion 16 of the lower air guide 18 is formed with a large number of ventilation holes 16A that penetrate the upper surface portion 16 in the vertical direction and communicate with the outside and the inside of the lower air guide 18. An air supply unit 34 such as a blower or a compressor and an air filter 36 are connected to the lower air guide 18 via an air supply pipe 32, and the air from which foreign matter has been removed by the air filter 36 is a ventilation hole 16 </ b> A in the upper surface portion 16. It is designed to be ejected upward. In addition, it is preferable that the clearance gap between the upper surface part 16 of the lower air guide 18 and the lower surface of the glass substrate 12 on the conveyance surface 14 is about several mm or less.

上側エアガイド22は、下側エアガイド18に対して上下方向に対称的な構造の略直方体の中空の箱体であり、下面部20が下側エアガイド18の上面部16に対向するように配置されている。上側エアガイド22も、幅方向の両端において取付部材26を介して支柱28に支持され、上下方向の位置が調整可能とされている。   The upper air guide 22 is a substantially rectangular parallelepiped hollow box having a symmetrical structure in the vertical direction with respect to the lower air guide 18 so that the lower surface portion 20 faces the upper surface portion 16 of the lower air guide 18. Has been placed. The upper air guide 22 is also supported by the support column 28 via attachment members 26 at both ends in the width direction, and the vertical position can be adjusted.

又、上側エアガイド22の下面部20には下面部20を上下方向に貫通し、上側エアガイド22の外側及び内側に連通する多数の通気孔20Aが形成されている。上側エアガイド22にも給気管32を介して給気ユニット34及びエアフィルタ36が連結されており、エアフィルタ36で異物が除去された空気が下面部20の通気孔20Aから下方に噴出されるようになっている。尚、上側エアガイド22の下面部20と搬送面14上のガラス基板12の上面との隙間も数mm程度以下であることが好ましい。   Further, the lower surface portion 20 of the upper air guide 22 is formed with a large number of vent holes 20 </ b> A that penetrate the lower surface portion 20 in the vertical direction and communicate with the outer side and the inner side of the upper air guide 22. An air supply unit 34 and an air filter 36 are also connected to the upper air guide 22 via an air supply pipe 32, and air from which foreign matter has been removed by the air filter 36 is jetted downward from the vent hole 20 </ b> A of the lower surface portion 20. It is like that. In addition, it is preferable that the clearance gap between the lower surface part 20 of the upper side air guide 22 and the upper surface of the glass substrate 12 on the conveyance surface 14 is also about several mm or less.

エアガイドユニット24よりも搬送方向の上流側及び下流側にはガラス基板12を搬送方向に駆動するための駆動ユニット38が備えられている。   Drive units 38 for driving the glass substrate 12 in the transport direction are provided upstream and downstream of the air guide unit 24 in the transport direction.

駆動ユニット38は、ガラス基板12の下面に接触してガラス基板12を搬送方向に駆動する複数のローラ(駆動部材)40を有し、これらローラ40は幅方向に適宜なピッチで配置され、幅方向に平行に配置された共通の軸42に取付けられている。軸42は図示しない回転駆動ユニットに連結され、軸42と共に複数のローラ40が回転することによりガラス基板12を搬送方向に駆動するようになっている。   The drive unit 38 has a plurality of rollers (drive members) 40 that are in contact with the lower surface of the glass substrate 12 and drive the glass substrate 12 in the transport direction, and these rollers 40 are arranged at an appropriate pitch in the width direction and have a width. It is attached to a common shaft 42 arranged parallel to the direction. The shaft 42 is connected to a rotation drive unit (not shown), and the plurality of rollers 40 rotate together with the shaft 42 to drive the glass substrate 12 in the transport direction.

次に、搬送装置10の作用について説明する。   Next, the operation of the transport device 10 will be described.

搬送装置10は、駆動ユニット38の複数のローラ40がガラス基板12の下面に接触してガラス基板12を搬送方向に駆動するが、下側エアガイド18が非接触でガラス基板12を支持しているので、ローラ40との接触部においてガラス基板12に作用する力が小さく、ローラ40との接触による表面の欠損や異物の付着が抑制される。   In the transport device 10, the plurality of rollers 40 of the drive unit 38 contacts the lower surface of the glass substrate 12 to drive the glass substrate 12 in the transport direction, but the lower air guide 18 supports the glass substrate 12 without contact. Therefore, the force acting on the glass substrate 12 at the contact portion with the roller 40 is small, and surface defects and adhesion of foreign matters due to contact with the roller 40 are suppressed.

更に、ガラス基板12が局部的には複数のローラ40との接触及びローラ40からの離間を繰り返すが、ガラス基板12は下側エアガイド18により非接触で下方から支持されるだけでなく上側エアガイド22により上側においても動きが非接触で規制されているので、ガラス基板12は平面に近い形状に確実に保持され、又、ガラス基板12の振動も抑制される。   Further, the glass substrate 12 is repeatedly contacted with and separated from the plurality of rollers 40 locally, but the glass substrate 12 is not only supported by the lower air guide 18 from the lower side but also from the upper air. Since the movement is regulated in a non-contact manner on the upper side by the guide 22 as well, the glass substrate 12 is securely held in a shape close to a flat surface, and vibration of the glass substrate 12 is also suppressed.

即ち、搬送装置10は、下側エアガイド18及び上側エアガイド22を有してなるエアガイドユニット24によりガラス基板12の動きを上下方向両側において非接触で規制するので、ガラス基板12を平面に近い形状に確実に保持しつつガラス基板12の表面に傷が生じたり異物が付着しないようにガラス基板12を搬送面14に沿って滑らかに搬送できる。   That is, the transport device 10 regulates the movement of the glass substrate 12 in a non-contact manner on both sides in the vertical direction by the air guide unit 24 having the lower air guide 18 and the upper air guide 22, so that the glass substrate 12 is made flat. The glass substrate 12 can be smoothly transported along the transport surface 14 so that the surface of the glass substrate 12 is not scratched or foreign matter adheres while being securely held in a close shape.

又、下側エアガイド18及び上側エアガイド22は単純な中空の箱体であり、それぞれ上面部16、下面部20に通気孔16A、20Aを形成すればよいので低コストで簡単に製造することができる。   Further, the lower air guide 18 and the upper air guide 22 are simple hollow boxes, and it is only necessary to form the vent holes 16A and 20A in the upper surface portion 16 and the lower surface portion 20, respectively. Can do.

特に、通気孔16A、20Aは搬送されてくるガラス基板12と上面部16、下面部20との間に空気膜を形成できるものであればよく、その孔の方向、大きさ等の設計の自由度が大きい。   In particular, the vent holes 16A and 20A only need to be capable of forming an air film between the glass substrate 12 being transferred and the upper surface portion 16 and the lower surface portion 20, and the direction and size of the holes can be freely designed. The degree is great.

又、空気の圧力で駆動力を付与する従来の浮上搬送手段と比較すると、給気ユニット34からガラス基板12を保持するだけの低圧の空気を供給するのみで足りるので、給気ユニット34を含めた装置の製造コストを大幅に低減させることができ、更に、エアの複雑な制御が不要であるので、構造が簡単である。   Further, as compared with the conventional levitation transfer means that applies the driving force by the air pressure, it is only necessary to supply low-pressure air for holding the glass substrate 12 from the air supply unit 34. In addition, the manufacturing cost of the apparatus can be greatly reduced, and the structure is simple because complicated control of air is unnecessary.

次に、本発明の第2実施形態について説明する。   Next, a second embodiment of the present invention will be described.

本第2実施形態に係る搬送装置50は、図4に示されるように、エアガイドユニット24が搬送方向のガラス基板12の長さよりも短い間隔で搬送方向に離間して複数(本第2実施形態では2つ)備えられたことを特徴としている。他の構成については前記第1実施形態に係る搬送装置10と同様であるので図1〜3と同一符号を用いることとして説明を適宜省略する。   As shown in FIG. 4, the transport device 50 according to the second embodiment includes a plurality of air guide units 24 spaced apart in the transport direction at intervals shorter than the length of the glass substrate 12 in the transport direction (this second embodiment). Two features are provided in the form. Since other configurations are the same as those of the transport apparatus 10 according to the first embodiment, the same reference numerals as those in FIGS.

搬送装置50は、複数のエアガイドユニット24が搬送方向のガラス基板12の長さよりも短い間隔で該搬送方向に離間した位置でガラス基板12の動きを規制するので、前記第1実施形態に係る搬送装置10におけるよりもガラス基板12は更に確実に平面に近い形状に保持され、更に確実にガラス基板12の振動も抑制される。   The transport device 50 regulates the movement of the glass substrate 12 at positions where the plurality of air guide units 24 are spaced apart in the transport direction at intervals shorter than the length of the glass substrate 12 in the transport direction. The glass substrate 12 is more reliably held in a shape close to a plane than in the transfer device 10, and the vibration of the glass substrate 12 is further reliably suppressed.

次に、本発明の第3実施形態について説明する。   Next, a third embodiment of the present invention will be described.

本第3実施形態に係る搬送装置60は、図5に示されるように、2つのエアガイドユニット24の間に、ガラス基板12を検査するための検査ユニット62が備えられたことを特徴としている。他の構成については前記第2実施形態に係る搬送装置50と同様であるので図4と同一符号を用いることとして説明を適宜省略する。   As shown in FIG. 5, the transport device 60 according to the third embodiment is characterized in that an inspection unit 62 for inspecting the glass substrate 12 is provided between the two air guide units 24. . Since other configurations are the same as those of the transport apparatus 50 according to the second embodiment, the same reference numerals as those in FIG.

検査ユニット62は、搬送面14の下側に配置された光源64と、光源64の上方に配置されたカメラ66と、を有し、ガラス基板12の傷や異物の付着を検出するように構成されている。   The inspection unit 62 includes a light source 64 disposed below the conveyance surface 14 and a camera 66 disposed above the light source 64, and is configured to detect scratches on the glass substrate 12 and adhesion of foreign matter. Has been.

搬送装置60は、複数のエアガイドユニット24が搬送方向のガラス基板12の長さよりも短い間隔で該搬送方向に離間した位置でガラス基板12の動きを規制し、ガラス基板12はこれらエアガイドユニット24の間において平面に近い形状に確実に保持されるので、ガラス基板12を高精度で検査できる。このように、搬送装置60においてガラス基板12を検査することができるので、専用の固定テーブルにガラス基板を移載してガラス基板の検査を行う場合に対し、生産性を向上させることができる。   The transport device 60 regulates the movement of the glass substrate 12 at positions where the plurality of air guide units 24 are spaced apart in the transport direction at intervals shorter than the length of the glass substrate 12 in the transport direction. The glass substrate 12 can be inspected with high accuracy because it is securely held in a shape close to a flat surface between 24. Thus, since the glass substrate 12 can be inspected in the transport device 60, productivity can be improved as compared with the case where the glass substrate is transferred to a dedicated fixed table and the glass substrate is inspected.

次に、本発明の第4実施形態について説明する。   Next, a fourth embodiment of the present invention will be described.

本第4実施形態に係る搬送装置70は、図6及び図7に示されるように、駆動ユニット72が、ガラス基板12における幅方向の両端近傍を下方から支持してガラス基板12を駆動するローラ74と、ガラス基板12の幅方向の中央近傍を非接触で支持するエアテーブル76と、を備えることを特徴としている。他の構成については前記第3実施形態に係る搬送装置60と同様であるので図5と同一符号を用いることとして説明を適宜省略する。   As shown in FIGS. 6 and 7, the transport device 70 according to the fourth embodiment is a roller in which the drive unit 72 drives the glass substrate 12 by supporting the vicinity of both ends of the glass substrate 12 in the width direction from below. 74 and an air table 76 that supports the vicinity of the center in the width direction of the glass substrate 12 in a non-contact manner. Since other configurations are the same as those of the transfer device 60 according to the third embodiment, the same reference numerals as those in FIG.

ローラ74は、ガラス基板12の下面に接触するローラ部74Aとガラス基板12の幅方向の動きを規制するフランジ部74Bとを有している。   The roller 74 has a roller portion 74 </ b> A that contacts the lower surface of the glass substrate 12 and a flange portion 74 </ b> B that restricts the movement of the glass substrate 12 in the width direction.

エアテーブル76は、下側エアガイド18と同様の構成の略直方体の中空の箱体であり、幅がガラス基板12の(幅方向の)幅よりも若干小さく、略平坦な上面部78がガラス基板12の下面に近接するように配置されている。   The air table 76 is a substantially rectangular parallelepiped hollow box having the same configuration as that of the lower air guide 18. The width of the air table 76 is slightly smaller than the width (in the width direction) of the glass substrate 12. It arrange | positions so that the lower surface of the board | substrate 12 may be adjoined.

エアテーブル76の上面部78には上面部78を上下方向に貫通し、エアテーブル76の外側及び内側に連通する多数の通気孔78Aが形成されている。エアテーブル76には給気管を介してブロア又はコンプレッサ等の給気ユニット及びエアフィルタ(いずれも図示省略)が連結されており、エアフィルタで異物が除去された空気が上面部78の通気孔78Aから上方に噴出されるようになっている。   A large number of ventilation holes 78A are formed in the upper surface portion 78 of the air table 76 so as to penetrate the upper surface portion 78 in the vertical direction and communicate with the outside and the inside of the air table 76. An air supply unit such as a blower or a compressor and an air filter (both not shown) are connected to the air table 76 via an air supply pipe, and air from which foreign matter has been removed by the air filter is a vent hole 78A in the upper surface portion 78. It is designed to be ejected upward.

駆動ユニット72は、ガラス基板12における幅方向の両端近傍を下方から支持してガラス基板12を駆動するローラ74と、ガラス基板12の幅方向の中央近傍を非接触で支持するエアテーブル76と、を備える構成であるので、ガラス基板12における両端近傍以外の領域への異物の付着を抑制できると共に、ガラス基板12の振動やこれに伴うガラス基板の欠損を抑制できる。   The driving unit 72 includes a roller 74 that drives the glass substrate 12 by supporting the vicinity of both ends in the width direction of the glass substrate 12 from below, and an air table 76 that supports the vicinity of the center of the glass substrate 12 in the width direction in a non-contact manner. Therefore, it is possible to suppress adhesion of foreign matters to regions other than the vicinity of both ends of the glass substrate 12, and it is possible to suppress vibration of the glass substrate 12 and chipping of the glass substrate associated therewith.

次に、本発明の第5実施形態について説明する。   Next, a fifth embodiment of the present invention will be described.

本第5実施形態に係る搬送装置80は、図8に示されるように、搬送面82が水平面に対して搬送方向と垂直な幅方向に15度以内の傾斜角δだけ傾斜して設定され、エアガイドユニット24は下側エアガイド18の上面部16及び上側エアガイド22の下面部20が水平面に対して幅方向に傾斜角δだけ傾斜した構成であり、且つ、ガラス基板12における幅方向の下側の側端に接触してガラス基板12を搬送方向に駆動するローラ(駆動部材)84を有する駆動ユニット86が備えられたことを特徴としている。他の構成については前記第1実施形態に係る搬送装置10と同様であるので図1〜3と同一符号を用いることとして説明を適宜省略する。   As shown in FIG. 8, the conveyance device 80 according to the fifth embodiment is configured such that the conveyance surface 82 is inclined with respect to a horizontal plane by an inclination angle δ of 15 degrees or less in a width direction perpendicular to the conveyance direction. The air guide unit 24 is configured such that the upper surface portion 16 of the lower air guide 18 and the lower surface portion 20 of the upper air guide 22 are inclined with respect to the horizontal plane by an inclination angle δ in the width direction, and in the width direction of the glass substrate 12. A drive unit 86 having a roller (drive member) 84 that contacts the lower side end and drives the glass substrate 12 in the transport direction is provided. Since other configurations are the same as those of the transport apparatus 10 according to the first embodiment, the same reference numerals as those in FIGS.

駆動ユニット86は、ローラ84の回転軸が鉛直方向に対して幅方向に傾斜角δだけ傾斜し、図示しない回転駆動機構に連結されている。ローラ84の円周側面は軸方向の中央部から軸方向の両端部に向かって拡径する形状であり、外径が最も小さい中央部においてガラス基板12における幅方向の下側の側端に接触してガラス基板12を搬送方向に駆動するようになっている。   The drive unit 86 has a rotation axis of the roller 84 inclined in the width direction with respect to the vertical direction by an inclination angle δ, and is connected to a rotation drive mechanism (not shown). The circumferential side surface of the roller 84 has a shape that increases in diameter from the central portion in the axial direction toward both end portions in the axial direction, and contacts the lower side end in the width direction of the glass substrate 12 at the central portion having the smallest outer diameter. Then, the glass substrate 12 is driven in the transport direction.

このように搬送面82を水平面に対して幅方向に傾斜させても、エアガイドユニット24も下側エアガイド18の上面部16及び上側エアガイド22の下面部20が水平面に対して幅方向に傾斜角δだけ傾斜した構成であり、ガラス基板12の動きを上下方向両側において非接触で規制するので、ガラス基板12は平面に近い形状に確実に保持される。   Thus, even if the conveyance surface 82 is inclined in the width direction with respect to the horizontal plane, the air guide unit 24 also has the upper surface portion 16 of the lower air guide 18 and the lower surface portion 20 of the upper air guide 22 in the width direction with respect to the horizontal plane. The structure is inclined by the inclination angle δ, and the movement of the glass substrate 12 is regulated in a non-contact manner on both sides in the vertical direction, so that the glass substrate 12 is reliably held in a shape close to a plane.

更に、ローラ84がガラス基板12における幅方向の下側の側端に接触してガラス基板12を搬送方向に駆動することで、ガラス基板12の幅方向の挙動も安定する。   Furthermore, the roller 84 contacts the lower side edge of the glass substrate 12 in the width direction to drive the glass substrate 12 in the transport direction, so that the behavior of the glass substrate 12 in the width direction is also stabilized.

尚、上記第1〜第4実施形態において、駆動ユニット38、72は、ローラ40、74がガラス基板12の下面に接触してガラス基板12を搬送方向に駆動する構成であるが、例えばエアテーブルだけで構成される駆動ユニットのように、下方から搬送面に向けて、且つ、搬送方向に傾斜した方向に気体を噴射してガラス基板12を非接触で搬送方向に駆動する構成としてもよい。   In the first to fourth embodiments, the drive units 38 and 72 are configured such that the rollers 40 and 74 contact the lower surface of the glass substrate 12 to drive the glass substrate 12 in the transport direction. Like the drive unit comprised only by it, it is good also as a structure which drives the glass substrate 12 to a conveyance direction non-contactingly toward a conveyance surface from the downward direction, and injecting in the direction inclined in the conveyance direction.

この場合も、エアガイドユニット24によりガラス基板12の動きを上下方向両側において非接触で規制するので、ガラス基板12を平面に近い形状に確実に保持しつつ表ガラス基板12を搬送面14に沿って滑らかに搬送できる。   Also in this case, since the movement of the glass substrate 12 is regulated by the air guide unit 24 on both sides in the vertical direction, the front glass substrate 12 is moved along the transport surface 14 while the glass substrate 12 is securely held in a shape close to a plane. Can be transported smoothly.

又、上記第1〜第5実施形態において、下側エアガイド18は箱体であるが、上面部が略平坦で上面部の複数の部位から上方に気体を噴出可能であれば、下側エアガイドの形状や構造は特に限定されない。例えば、下側エアガイド18は上面部16に上面部16を上下方向に貫通する通気孔16Aが形成された構造であるが、セラミック等の多孔質材料、フェルト状材料等の材料自体が通気性を有する材料で上面部を構成してもよい。上側エアガイド22や駆動ユニットのエアテーブルについても同様である。   In the first to fifth embodiments, the lower air guide 18 is a box. However, if the upper surface portion is substantially flat and gas can be ejected upward from a plurality of portions on the upper surface portion, the lower air guide 18 The shape and structure of the guide are not particularly limited. For example, the lower air guide 18 has a structure in which a ventilation hole 16A penetrating the upper surface portion 16 in the vertical direction is formed in the upper surface portion 16. The upper surface portion may be made of a material having The same applies to the upper air guide 22 and the air table of the drive unit.

又、上記第1〜第5実施形態において、下側エアガイド18、上側エアガイド22から噴出する気体は空気であるが、下側エアガイド18、上側エアガイド22から、例えば、窒素ガス、希ガス等の他の気体を噴出させてもよい。   In the first to fifth embodiments, the gas ejected from the lower air guide 18 and the upper air guide 22 is air. From the lower air guide 18 and the upper air guide 22, for example, nitrogen gas, rare gas Other gases such as gas may be ejected.

又、上記第3実施形態において、2つのエアガイドユニット24の間にガラス基板12の表面の傷や異物の付着を検査するための検査ユニット62が備えられているが、2つのエアガイドユニット24の間には他の検査を行うための検査ユニットを備えてもよい。又、2つのエアガイドユニット24の間に、例えば、液状材料の塗布、紫外線や電子線の露光又は照射等の加工処理を行う加工ユニットを備えてもよい。   Further, in the third embodiment, the inspection unit 62 for inspecting the surface of the glass substrate 12 and the adhesion of foreign matter is provided between the two air guide units 24. An inspection unit for performing other inspections may be provided in between. In addition, a processing unit that performs processing such as application of a liquid material, exposure to ultraviolet rays or electron beams, or irradiation may be provided between the two air guide units 24.

又、上記第2〜第4実施形態において、2つのエアガイドユニット24が備えられているが、ガラス基板12の長さ等に応じて3つ以上のエアガイドユニットを備えてもよい。   In the second to fourth embodiments, the two air guide units 24 are provided. However, three or more air guide units may be provided according to the length of the glass substrate 12 or the like.

又、上記第1〜第5実施形態は、ガラス基板12を搬送するためのものであるが、面積に比較して板厚の薄いいわゆる薄板状材料であれば、他の材料の搬送にも本発明は適用可能である。例えば、金属薄板状材料、樹脂の薄板状材料等の撓みを生じ易い材料の搬送の場合に適用される。   Moreover, although the said 1st-5th embodiment is for conveying the glass substrate 12, if it is what is called a thin plate-like material whose plate | board thickness is thin compared with an area, this material is also used for conveyance of other materials. The invention is applicable. For example, the present invention is applied to the case of transporting a material that is likely to be bent, such as a metal thin plate material or a resin thin plate material.

本発明は、液晶表示(LCD)パネル、プラズマディスプレイパネル(PDP)などの平面板ディスプレイに用いる大型で薄いガラス基板のような薄板状材料の搬送に用いることができる。   The present invention can be used for transporting a thin plate-like material such as a large thin glass substrate used in a flat plate display such as a liquid crystal display (LCD) panel or a plasma display panel (PDP).

本発明の第1実施形態に係る搬送装置を示す側面図The side view which shows the conveying apparatus which concerns on 1st Embodiment of this invention. 同平面図Plan view 同前面図Front view 本発明の第2実施形態に係る搬送装置を示す側面図The side view which shows the conveying apparatus which concerns on 2nd Embodiment of this invention. 本発明の第3実施形態に係る搬送装置を示す側面図The side view which shows the conveying apparatus which concerns on 3rd Embodiment of this invention. 本発明の第4実施形態に係る搬送装置を示す側面図The side view which shows the conveying apparatus which concerns on 4th Embodiment of this invention. 図6におけるVII−VII線に沿う断面図Sectional drawing which follows the VII-VII line in FIG. 本発明の第5実施形態に係る搬送装置を示す前面図The front view which shows the conveying apparatus which concerns on 5th Embodiment of this invention.

符号の説明Explanation of symbols

10、50、60、70、80…搬送装置
12…ガラス基板(薄板状材料)
14、82…搬送面
16…上面部
16A、20A、78A…通気孔
18…下側エアガイド
20…下面部
22…上側エアガイド
24…エアガイドユニット
38、72、86…駆動ユニット
40、74、84…ローラ(駆動部材)
10, 50, 60, 70, 80 ... conveying device 12 ... glass substrate (thin plate-like material)
DESCRIPTION OF SYMBOLS 14, 82 ... Conveying surface 16 ... Upper surface part 16A, 20A, 78A ... Vent 18 ... Lower air guide 20 ... Lower surface part 22 ... Upper air guide 24 ... Air guide unit 38, 72, 86 ... Drive unit 40, 74, 84: Roller (drive member)

Claims (14)

薄板状材料を所定の搬送面に沿う搬送方向に搬送する薄板状材料の搬送方法において、
略平坦な上面部の複数の部位から上方に気体を噴射可能である下側エアガイド及び略平坦な下面部の複数の部位から下方に気体を噴射可能である上側エアガイドを有してなるエアガイドユニットを、前記下側エアガイドの上面部が前記薄板状材料の下面に近接し、且つ、前記上側エアガイドの下面部が前記下側エアガイドの上方において前記薄板状材料の上面に近接するように配置し、前記下側エアガイドの上面部及び前記上側エアガイドの下面部から前記薄板状材料に気体を噴射して該薄板状材料の動きを上下方向の両側において非接触で規制しつつ該薄板状材料を前記搬送面に沿って搬送することを特徴とする薄板状材料の搬送方法。
In the conveyance method of the thin plate material that conveys the thin plate material in the conveyance direction along the predetermined conveyance surface,
Air having a lower air guide capable of injecting gas upward from a plurality of parts on a substantially flat upper surface part and an upper air guide capable of injecting gas downward from a plurality of parts on a substantially flat lower surface part In the guide unit, the upper surface portion of the lower air guide is close to the lower surface of the thin plate material, and the lower surface portion of the upper air guide is close to the upper surface of the thin plate material above the lower air guide. The gas is ejected from the upper surface portion of the lower air guide and the lower surface portion of the upper air guide to the thin plate material, and the movement of the thin plate material is regulated in a non-contact manner on both sides in the vertical direction. A method for transporting a thin plate material, comprising transporting the thin plate material along the transport surface.
請求項1において、
前記エアガイドユニットを前記薄板状材料の前記搬送方向の長さよりも短い間隔で該搬送方向に離間して複数配置し、前記薄板状材料の動きを前記搬送方向に離間した複数の位置において規制することを特徴とする薄板状材料の搬送方法。
In claim 1,
A plurality of the air guide units are spaced apart in the transport direction at intervals shorter than the length of the thin plate material in the transport direction, and the movement of the thin plate material is restricted at a plurality of positions spaced in the transport direction. A method for transporting a thin plate material.
請求項2において、
前記複数のエアガイドユニットよりも前記搬送方向の上流側及び下流側において前記薄板状材料を前記搬送方向に駆動することを特徴とする薄板状材料の搬送方法。
In claim 2,
A method for transporting a thin plate material, wherein the thin plate material is driven in the transport direction on the upstream side and the downstream side in the transport direction with respect to the plurality of air guide units.
請求項3において、
前記薄板状材料の下面に駆動部材を接触させて該薄板状材料を前記搬送方向に駆動することを特徴とする薄板状材料の搬送方法。
In claim 3,
A method for transporting a thin plate material, wherein a driving member is brought into contact with the lower surface of the thin plate material to drive the thin plate material in the transport direction.
請求項3において、
下方から前記薄板状材料の下面に向けて、且つ、前記搬送方向に傾斜した方向に気体を噴射して該薄板状材料を非接触で前記搬送方向に駆動することを特徴とする薄板状材料の搬送方法。
In claim 3,
A thin plate-like material characterized by driving gas in a non-contact manner in the transport direction by injecting gas from below to a lower surface of the thin plate-like material and in a direction inclined in the transport direction. Transport method.
請求項2乃至5のいずれかにおいて、
前記複数のエアガイドユニットのうちのいずれかのエアガイドユニットとこれに隣り合う他のエアガイドユニットとの間において、前記薄板状材料を加工する加工処理及び前記薄板状材料を検査する検査処理の少なくとも一方を行うことを特徴とする薄板状材料の搬送方法。
In any of claims 2 to 5,
A processing process for processing the thin plate material and an inspection process for inspecting the thin plate material between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. A method for conveying a thin plate material, wherein at least one of them is performed.
請求項1又は2において、
前記搬送面を水平面に対して前記搬送方向と垂直な幅方向に15度以内の傾斜角だけ傾斜させて設定し、前記エアガイドユニットの前記下側エアガイドの上面部及び前記上側エアガイドの下面部も水平面に対して前記幅方向に前記傾斜角だけ傾斜させて配置し、且つ、前記薄板状材料における前記幅方向の下側の側端に駆動部材を接触させて該薄板状材料を前記搬送方向に駆動することを特徴とする薄板状材料の搬送方法。
In claim 1 or 2,
The conveying surface is set to be inclined with respect to a horizontal plane by an inclination angle of 15 degrees or less in a width direction perpendicular to the conveying direction, and the upper surface portion of the lower air guide and the lower surface of the upper air guide of the air guide unit The part is also arranged to be inclined by the inclination angle in the width direction with respect to a horizontal plane, and a driving member is brought into contact with a lower side end of the thin plate material in the width direction to convey the thin plate material. A method for conveying a thin plate material, characterized by being driven in a direction.
薄板状材料を所定の搬送面に沿う搬送方向に搬送するための薄板状材料の搬送装置において、
略平坦な上面部の複数の部位から上方に気体を噴射可能であり該上面部が前記搬送面の下側に近接するように配置された下側エアガイドと、略平坦な下面部の複数の部位から下方に気体を噴射可能であり該下面部が前記搬送面の上側に近接するように前記下側エアガイドの上方に配置された上側エアガイドと、を有してなるエアガイドユニットが備えられ、前記薄板状材料の動きを上下方向の両側において非接触で規制するように構成されたことを特徴とする薄板状材料の搬送装置。
In the thin plate material transport device for transporting the thin plate material in the transport direction along the predetermined transport surface,
A lower air guide that is capable of injecting gas upward from a plurality of portions of a substantially flat upper surface portion and is arranged so that the upper surface portion is close to the lower side of the transport surface, and a plurality of substantially flat lower surface portions And an upper air guide disposed above the lower air guide so that gas can be injected downward from the portion and the lower surface portion is close to the upper side of the transport surface. The thin plate-shaped material conveying device is configured to restrict the movement of the thin plate-shaped material in a non-contact manner on both sides in the vertical direction.
請求項8において、
前記エアガイドユニットが前記搬送方向の前記薄板状材料の長さよりも短い間隔で該搬送方向に離間して複数備えられたことを特徴とする薄板状材料の搬送装置。
In claim 8,
A thin plate material conveying apparatus comprising a plurality of the air guide units spaced apart in the conveying direction at intervals shorter than the length of the thin plate material in the conveying direction.
請求項9において、
前記複数のエアガイドユニットよりも前記搬送方向の上流側及び下流側に前記薄板状材料を前記搬送方向に駆動するための駆動ユニットが備えられたことを特徴とする薄板状材料の搬送装置。
In claim 9,
A thin plate-shaped material conveying apparatus comprising a drive unit for driving the thin plate-shaped material in the conveying direction on the upstream side and the downstream side in the conveying direction with respect to the plurality of air guide units.
請求項10において、
前記駆動ユニットは、前記薄板状材料の下面に接触して該薄板状材料を前記搬送方向に駆動する駆動部材を有する構成であることを特徴とする薄板状材料の搬送装置。
In claim 10,
The drive unit for a thin plate material, wherein the drive unit includes a drive member that contacts the lower surface of the thin plate material and drives the thin plate material in the transport direction.
請求項10において、
前記駆動ユニットは、下方から前記搬送面に向けて、且つ、前記搬送方向に傾斜した方向に気体を噴射して該薄板状材料を非接触で前記搬送方向に駆動する構成であることを特徴とする薄板状材料の搬送装置。
In claim 10,
The drive unit is configured to drive the thin plate-like material in the transport direction in a non-contact manner by injecting gas in a direction inclined from the bottom toward the transport surface and in the transport direction. A device for transporting thin plate materials.
請求項9乃至12のいずれかにおいて、
前記複数のエアガイドユニットのうちのいずれかのエアガイドユニットとこれに隣り合う他のエアガイドユニットとの間に、前記薄板状材料を加工するための加工ユニット及び前記薄板状材料を検査するための検査ユニットの少なくとも一方が備えられたことを特徴とする薄板状材料の搬送装置。
In any of claims 9 to 12,
A processing unit for processing the thin plate material and an inspection of the thin plate material between any one of the plurality of air guide units and another air guide unit adjacent to the air guide unit. At least one of the inspection units is provided.
請求項8又は9において、
前記搬送面は水平面に対して前記搬送方向と垂直な幅方向に15度以内の傾斜角だけ傾斜して設定され、前記エアガイドユニットは前記下側エアガイドの上面部及び前記上側エアガイドの下面部が水平面に対して前記幅方向に前記傾斜角だけ傾斜した構成であり、且つ、前記薄板状材料における前記幅方向の下側の側端に接触して該薄板状材料を前記搬送方向に駆動する駆動部材を有する駆動ユニットが備えられたことを特徴とする薄板状材料の搬送装置。
In claim 8 or 9,
The conveyance surface is set to be inclined with respect to a horizontal plane by an inclination angle of 15 degrees or less in a width direction perpendicular to the conveyance direction, and the air guide unit includes an upper surface portion of the lower air guide and a lower surface of the upper air guide. The part is configured to be inclined in the width direction by the inclination angle with respect to a horizontal plane, and contacts the lower side edge of the sheet material in the width direction to drive the sheet material in the transport direction. A thin plate-shaped material conveying apparatus comprising a driving unit having a driving member.
JP2005239101A 2005-08-19 2005-08-19 Method and apparatus for conveying thin sheet-like material Pending JP2007051001A (en)

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