JP6803654B2 - Glass substrate inspection equipment - Google Patents

Description

An embodiment of the present invention relates to a glass substrate inspection device for inspecting a glass substrate constituting a liquid crystal panel.

Conventionally, for example, development of an inspection device for inspecting the surface pattern, light transmission, and the like of a glass substrate constituting a liquid crystal panel has been promoted. As disclosed in Patent Document 1, for example, this type of inspection apparatus transports the glass substrate in the transport direction by holding the end of the glass substrate to be inspected in the direction orthogonal to the transport direction.

JP-A-2009-214106

However, in this type of inspection apparatus, the inspection unit for inspecting the glass substrate extends long in the direction orthogonal to the transport direction. Therefore, in the configuration of holding the end portion of the glass substrate in the direction orthogonal to the transport direction, the holding portion overlaps with the inspection portion, so that the holding portion cannot be inspected. Therefore, the quality cannot be guaranteed over the entire surface of the glass substrate.

Therefore, a glass substrate inspection device capable of inspecting the entire surface of the glass substrate is provided.

The glass substrate inspection device according to the present embodiment is an inspection device that inspects the glass substrate constituting the liquid crystal panel, and includes a first transport unit and a second transport unit for transporting the glass substrate, and the first transport unit. An inspection unit provided between the and the second transport unit and inspecting the glass substrate, a first clamp portion is provided as the first transport portion, and a second clamp portion is provided as the second transport portion. The first clamp portion pushes the glass substrate toward the second clamp portion side, and the second clamp portion pulls the glass substrate from the first clamp portion side, whereby the first clamp portion to the first clamp portion. 2 The glass substrate is configured to be conveyed to the clamp portion, and the inspection unit includes an air bearing that floats the glass substrate from below by air and an inspection unit that inspects the glass substrate. The bearing has a plurality of air bearing units, and the closer the bearing is to the inspection unit, the higher the performance of suppressing rattling and shaking of the glass substrate.

According to this configuration, the first transport unit and the second transport unit are arranged with the inspection unit in between along the transport direction of the glass substrate. Therefore, the glass substrate is conveyed so as to be pushed from the first conveying portion to the second conveying portion side, and the pushed glass substrate is further conveyed so as to be pulled from the first conveying portion to the second conveying portion side. The glass substrate can be transported from the first transport portion to the second transport portion without holding the end portion of the glass substrate in the direction orthogonal to the transport direction. Then, the glass substrate can be inspected by the inspection unit while the glass substrate is being transported from the first transport unit to the second transport unit.

Further, the glass substrate is conveyed so as to be pushed from the second conveying portion to the first conveying portion side, and the pushed glass substrate is further conveyed so as to be pulled from the second conveying portion to the first conveying portion side. The glass substrate can be transported from the second transport portion to the first transport portion without holding the end portion of the glass substrate in the direction orthogonal to the transport direction. Then, the glass substrate can be inspected by the inspection unit while the glass substrate is being transported from the second transport unit to the first transport unit.

As described above, according to the glass substrate inspection apparatus according to the present embodiment, the glass substrate is transported by the first transport section and the second transport section that sandwich the inspection section, so that the glass substrate is transported in the transport direction. The glass substrate can be conveyed without holding the ends in the orthogonal directions. Therefore, the entire surface of the glass substrate can be inspected, and the quality of the entire surface of the glass substrate can be guaranteed.

A plan view showing a configuration example of a glass substrate inspection device according to the first embodiment. The figure which shows an example of the inspection operation by the inspection apparatus of the glass substrate which concerns on 1st Embodiment (the 1). The figure which shows an example of the inspection operation by the inspection apparatus of the glass substrate which concerns on 1st Embodiment (the 2). A plan view showing a configuration example of a glass substrate inspection device according to a second embodiment. A side view showing a configuration example of a glass substrate inspection device according to a third embodiment. The figure which shows an example of the inspection operation by the inspection apparatus of the glass substrate which concerns on 3rd Embodiment (the 1). The figure which shows an example of the inspection operation by the inspection apparatus of the glass substrate which concerns on 3rd Embodiment (the 2). A side view showing a configuration example of a glass substrate inspection device according to a fourth embodiment. The figure which shows an example of the inspection operation by the inspection apparatus of the glass substrate which concerns on 4th Embodiment (the 1). The figure which shows an example of the inspection operation by the inspection apparatus of the glass substrate which concerns on 4th Embodiment (the 2). A side view showing a configuration example of a glass substrate inspection device according to a fourth embodiment. Top view showing a conventional glass substrate inspection device

Hereinafter, a plurality of embodiments relating to the glass substrate inspection apparatus will be described with reference to the drawings. In each embodiment, substantially the same elements are designated by the same reference numerals, and the description thereof will be omitted. As illustrated in FIG. 12, a conventional glass substrate inspection device holds the ends of the glass substrate G to be inspected in the directions orthogonal to the transport directions A1 and A2 by the clamp C to hold the glass substrate G. It is designed to be transported in the transport directions A1 and A2. However, in this type of inspection device, since the inspection unit T for inspecting the glass substrate G extends long in the direction orthogonal to the transport directions A1 and A2, the portion of the glass substrate G held by the clamp C is inspected. Can not do it. That is, the conventional inspection device cannot inspect the entire surface of the glass substrate G. Therefore, in the present embodiment, an example of a glass substrate inspection device capable of inspecting the entire surface of the glass substrate will be disclosed.

(First Embodiment)
The glass substrate inspection device 10 illustrated in FIG. 1 includes a first roller conveyor section 11, a second roller conveyor section 12, and an inspection section 13. The glass substrate inspection device 10 includes a first roller conveyor section 11 and a second roller conveyor section 12 before and after the inspection section 13. Hereinafter, the glass substrate inspection device 10 is simply referred to as an “inspection device 10”.

The first roller conveyor unit 11 is an example of a first conveyor unit for transporting a glass substrate, and the second roller conveyor unit 12 is an example of a second conveyor unit for transporting a glass substrate. The first roller conveyor section 11 and the second roller conveyor section 12 each include a plurality of rollers 14 extending in directions orthogonal to the transport directions A1 and A2 of the glass substrate. Further, the first roller conveyor section 11 and the second roller conveyor section 12 each have a guide section 15 for guiding the glass substrate.

The guide portion 15 includes a guide plate 16 along the transport directions A1 and A2 of the glass substrate, and a guide roller 17 having a rotation axis perpendicular to the guide plate 16. The distance D between the guide portions 15 and 15 provided in the first roller conveyor portion 11 can be adjusted manually or automatically. Further, the distance D between the guide portions 15 and 15 provided in the second roller conveyor portion 12 can be adjusted manually or automatically.

The inspection unit 13 is provided between the first roller conveyor unit 11 and the second roller conveyor unit 12, and is a glass substrate and a second roller that are conveyed from the first roller conveyor unit 11 to the second roller conveyor unit 12. The glass substrate conveyed from the conveyor section 12 to the first roller conveyor section 11 is inspected. The inspection unit 13 includes, for example, the surface pattern of the glass substrate, the light transmittance of the glass substrate, the state of the alignment film made of, for example, polyimide formed on the surface of the glass substrate, the presence or absence of scratches on the surface of the glass substrate, and the like. An inspection device capable of inspecting various inspection items related to the substrate can be adopted.

In this case, the inspection unit 13 has a configuration in which the inspection unit 19 is provided between the two air bearings 18 and 18. The air bearing 18 has an air ejection hole (not shown), and the glass substrate and the second roller conveyor which are conveyed from the first roller conveyor section 11 to the second roller conveyor section 12 by the air ejected from the air ejection hole. The glass substrate conveyed from the section 12 to the first roller conveyor section 11 is floated. By adjusting the amount of air ejected from the air bearing 18, the distance between the inspection unit 13 and the glass substrate can be controlled with high accuracy, and the glass substrate can be inspected in a more stable state.

The air bearing 18 on the first roller conveyor portion 11 side and the air bearing 18 on the second roller conveyor portion 12 side are each configured by combining a plurality of, in this case, three air bearing units 18a. The air bearing unit 18a may be combined with the same performance, but the one closer to the inspection unit 19 may be used with higher performance. By enhancing the performance of the air bearing unit 18a close to the inspection unit 19, it is possible to suppress rattling and shaking of the glass substrate in the vicinity of the inspection unit 19, and it is possible to improve the inspection accuracy of the glass substrate. The number of air bearing units 18a constituting one air bearing 18 may be one, two, four or more. Further, the number of air bearing units 18a may be different between the air bearing 18 on the first roller conveyor portion 11 side and the air bearing 18 on the second roller conveyor portion 12 side.

The inspection unit 19 is a unit that mainly inspects the glass substrate conveyed from the first roller conveyor section 11 and the glass substrate conveyed from the second roller conveyor section 12. The inspection unit 19 is composed of, for example, an irradiator that irradiates a glass substrate with light for inspection. As the inspection unit 19, various units can be adopted according to the inspection items of the glass substrate to be inspected.

Next, an example of the inspection operation by the inspection device 10 will be described. When the glass substrate G is conveyed from the first roller conveyor section 11 to the second roller conveyor section 12, that is, when the glass substrate G is conveyed in the transfer direction A1, the first roller conveyor section 11 and the first roller conveyor section 11 and the first The two-roller conveyor section 12 rotates a plurality of rollers 14 in the direction of arrow R1. Then, as illustrated in FIG. 2A, the first roller conveyor section 11 pushes the glass substrate G toward the second roller conveyor section 12 side by rotating the roller 14. As a result, the glass substrate G is conveyed to the second roller conveyor section 12 side and is inspected by the inspection section 13 in the process of passing above the inspection section 13. Then, as illustrated in FIG. 2B, when the glass substrate G reaches the second roller conveyor section 12, the second roller conveyor section 12 rotates the roller 14 to transfer the glass substrate G to the first roller conveyor section 12. It is pulled from the portion 11 side to the second roller conveyor portion 12 side. As a result, as illustrated in FIG. 2C, the glass substrate G is conveyed to the second roller conveyor section 12 side.

Further, when the glass substrate G is conveyed from the second roller conveyor section 12 to the first roller conveyor section 11, that is, when the glass substrate G is conveyed in the conveying direction A2, the first roller conveyor section 11 is illustrated as shown in FIG. The second roller conveyor unit 12 rotates the plurality of rollers 14 in the direction of arrow R2. Then, as illustrated in FIG. 3A, the second roller conveyor section 12 pushes the glass substrate G toward the first roller conveyor section 11 side by rotating the roller 14. As a result, the glass substrate G is conveyed to the first roller conveyor section 11 side and is inspected by the inspection section 13 in the process of passing above the inspection section 13. Then, as illustrated in FIG. 3B, when the glass substrate G reaches the first roller conveyor section 11, the first roller conveyor section 11 rotates the roller 14 to transfer the glass substrate G to the second roller conveyor section 11. It is pulled from the portion 12 side to the first roller conveyor portion 11 side. As a result, as illustrated in FIG. 3C, the glass substrate G is conveyed to the first roller conveyor section 11 side.

The inspection device 10 according to the present embodiment has a configuration in which the first roller conveyor section 11 and the second roller conveyor section 12 are arranged with the inspection section 13 interposed therebetween along the transport directions A1 and A2 of the glass substrate G. According to this configuration, the glass substrate G can be conveyed without holding the ends of the glass substrate G in the directions orthogonal to the conveying directions A1 and A2. Therefore, the entire surface of the glass substrate G can be inspected, and the quality of the entire surface of the glass substrate G can be guaranteed.

Further, according to the inspection device 10, by appropriately adjusting the interval D between the guide portions 15 and 15, glass substrates of various sizes such as a glass substrate for a large liquid crystal television and a glass substrate for a small liquid crystal television are used. Can be inspected.

(Second Embodiment)
The glass substrate inspection device 20 illustrated in FIG. 4 includes a first roller conveyor section 21 and a second roller conveyor section 22. Hereinafter, the glass substrate inspection device 20 is simply referred to as an “inspection device 20”. In the first roller conveyor section 21 and the second roller conveyor section 22, the predetermined number on the inspection section 13 side, in this case, the interval between the four rollers 14 is narrower than the interval between the remaining rollers 14. There is. According to the inspection device 20 according to the present embodiment, the glass substrate can be supported in a more stable state by the closely arranged rollers 14 in the vicinity of the inspection unit 13. Therefore, it is possible to suppress rattling and shaking of the glass substrate due to transportation, and it is possible to improve the inspection accuracy of the glass substrate.

(Third Embodiment)
The glass substrate inspection device 30 illustrated in FIG. 5 includes a first clamp portion 31 as an example of the first transport portion, and a second clamp portion 32 as an example of the second transport unit. Hereinafter, the glass substrate inspection device 30 is simply referred to as an “inspection device 30”.

The first clamp portion 31 and the second clamp portion 32 include a rail 33 and a clamp 34, respectively. The rail 33 extends along the transport directions A1 and A2 of the glass substrate. The clamp 34 includes a holding portion 35 that opens toward the inspection portion 13 side. That is, the openings of the holding portion 35 on the first clamp portion 31 side and the holding portion 35 on the second clamp portion 32 side face each other along the transport directions A1 and A2. The clamp 34 is provided so as to be reciprocally movable along the rail 33 by a drive mechanism unit (not shown). As the drive mechanism unit, various mechanical units such as a mechanical unit using a linear motor and a mechanical unit using a servomotor can be adopted. As the drive mechanism unit, it is preferable to employ a mechanism unit capable of controlling the transport speed with higher accuracy.

Next, an example of the inspection operation by the inspection device 30 will be described. When the glass substrate G is transported from the first clamp portion 31 to the second clamp portion 32, that is, when the glass substrate G is transported in the transport direction A1, as illustrated in FIG. 6A, the first clamp portion 31 The holding portion 35 of the clamp 34 holds the end portion of the glass substrate G on the transport direction A2 side, that is, the end portion on the first clamp portion 31 side. Then, the first clamp portion 31 pushes the held glass substrate G toward the second clamp portion 32 side by moving the clamp 34 toward the second clamp portion 32 side. As a result, the glass substrate G is conveyed to the second clamp portion 32 side and is inspected by the inspection unit 13 in the process of passing above the inspection unit 13.

Then, as illustrated in FIG. 6B, when the glass substrate G reaches the second clamp portion 32, the second clamp portion 32 is at the end of the glass substrate G on the transport direction A1 side by the holding portion 35 of the clamp 34. The portion, that is, the end portion on the second clamp portion 32 side is held. Then, the second clamp portion 32 pulls the held glass substrate G from the first clamp portion 31 side to the second clamp portion 32 side by moving the clamp 34 to the side opposite to the inspection portion 13. As a result, as illustrated in FIG. 6C, the glass substrate G is conveyed to the second clamp portion 32 side. The first clamp portion 31 may be configured to release the holding of the glass substrate G when the glass substrate G is held by the second clamp portion 32. Further, the first clamp portion 31 may be configured to release the holding of the glass substrate G after a lapse of a predetermined time after the glass substrate G is held by the second clamp portion 32.

Further, when the glass substrate G is transported from the second clamp portion 32 to the first clamp portion 31, that is, when the glass substrate G is transported in the transport direction A2, as illustrated in FIG. 7A, the second clamp portion 32 Holds the end portion of the glass substrate G on the transport direction A1 side, that is, the end portion on the second clamp portion 32 side by the holding portion 35 of the clamp 34. Then, the second clamp portion 32 pushes the held glass substrate G toward the first clamp portion 31 side by moving the clamp 34 toward the first clamp portion 31 side. As a result, the glass substrate G is conveyed to the first clamp portion 31 side and is inspected by the inspection unit 13 in the process of passing above the inspection unit 13.

Then, as illustrated in FIG. 7B, when the glass substrate G reaches the first clamp portion 31, the first clamp portion 31 is at the end of the glass substrate G on the transport direction A2 side by the holding portion 35 of the clamp 34. The portion, that is, the end portion on the first clamp portion 31 side is held. Then, the first clamp portion 31 pulls the held glass substrate G from the second clamp portion 32 side to the first clamp portion 31 side by moving the clamp 34 to the side opposite to the inspection portion 13. As a result, as illustrated in FIG. 7C, the glass substrate G is conveyed to the first clamp portion 31 side. The second clamp portion 32 may be configured to release the holding of the glass substrate G when the glass substrate G is held by the first clamp portion 31. Further, the second clamp portion 32 may be configured to release the holding of the glass substrate G after a lapse of a predetermined time after the glass substrate G is held by the first clamp portion 31.

The inspection device 30 according to the present embodiment has a configuration in which the first clamp portion 31 and the second clamp portion 32 are arranged with the inspection portion 13 interposed therebetween along the transport directions A1 and A2 of the glass substrate G. According to this configuration, the glass substrate G can be conveyed without holding the ends of the glass substrate G in the directions orthogonal to the conveying directions A1 and A2. Therefore, the entire surface of the glass substrate G can be inspected, and the quality of the entire surface of the glass substrate G can be guaranteed.
The inspection device 30 may also be provided with an element corresponding to the guide unit 15. This makes it possible for the inspection device 30 to inspect glass substrates of various sizes.

(Fourth Embodiment)
The glass substrate inspection device 40 illustrated in FIG. 8 includes a first push-in portion 41 as an example of the first transport portion, and a second push-in portion 42 as an example of the second transport unit. Hereinafter, the glass substrate inspection device 40 is simply referred to as an “inspection device 40”. The first push-in portion 41 and the second push-in portion 42 include a shaft 43 and a push-in end portion 44, respectively. The shaft 43 extends along the transport directions A1 and A2 of the glass substrate, and is configured to be reciprocally movable along the transport directions A1 and A2 by a drive mechanism unit (not shown). The push-in end portion 44 extends in a direction orthogonal to the transport directions A1 and A2 of the glass substrate, and is fixed to the tip end portion of the shaft 43. The push-in end portion 44 may be configured to include a cushion material on the surface on the inspection portion 13 side.

The first pushing portion 41 has a function of pushing the glass substrate into the transport direction A1, that is, toward the second pushing portion 42. The first pushing portion 41 can push the glass substrate toward the second pushing portion 42 side until the entire glass substrate exceeds the inspection unit 19 of the inspection unit 13. Further, the second pushing portion 42 has a function of pushing the glass substrate into the transport direction A2, that is, toward the first pushing portion 41. The second pushing portion 42 can push the glass substrate toward the first pushing portion 41 until the entire glass substrate exceeds the inspection unit 19 of the inspection unit 13.

Next, an example of the inspection operation by the inspection device 40 will be described. When transporting the glass substrate G from the first push-in portion 41 to the second push-in portion 42, that is, when transporting the glass substrate G in the transport direction A1, the first push-in portion is as illustrated in FIGS. 9A and 9B. The portion 41 pushes the glass substrate G toward the second pushing portion 42. On the other hand, when the glass substrate G is conveyed from the second pushing portion 42 to the first pushing portion 41, that is, when the glass substrate G is conveyed in the conveying direction A2, as illustrated in FIGS. 10A and 10B, the first The 2 pushing portion 42 pushes the glass substrate G toward the first pushing portion 41.

The inspection device 40 according to the present embodiment has a configuration in which the first push-in portion 41 and the second push-in portion 42 are arranged with the inspection portion 13 interposed therebetween along the transport directions A1 and A2 of the glass substrate G. According to this configuration, the glass substrate G can be conveyed without holding the ends of the glass substrate G in the directions orthogonal to the conveying directions A1 and A2. Therefore, the entire surface of the glass substrate G can be inspected, and the quality of the entire surface of the glass substrate G can be guaranteed.
The inspection device 40 may also be provided with an element corresponding to the guide unit 15. As a result, the inspection device 40 can also inspect glass substrates of various sizes.

(Fifth Embodiment)
The glass substrate inspection device 50 illustrated in FIG. 11 includes a first pinch roller section 51 as an example of the first transport section, and a second pinch roller section 52 as an example of the second transport section. Hereinafter, the glass substrate inspection device 50 is simply referred to as an “inspection device 50”. The first pinch roller portion 51 and the second pinch roller portion 52 transport the glass substrate G in the transport direction A1 by rotating the roller 53 in the arrow R3 direction, and the glass substrate by rotating the roller 53 in the arrow R4 direction. G is transported in the transport direction A2.

The inspection device 50 according to the present embodiment has a configuration in which the first pinch roller portion 51 and the second pinch roller portion 52 are arranged with the inspection portion 13 interposed therebetween along the transport directions A1 and A2 of the glass substrate G. According to this configuration, the glass substrate G can be conveyed without holding the ends of the glass substrate G in the directions orthogonal to the conveying directions A1 and A2. Therefore, the entire surface of the glass substrate G can be inspected, and the quality of the entire surface of the glass substrate G can be guaranteed.
The inspection device 50 may also be provided with an element corresponding to the guide unit 15. This makes it possible for the inspection device 50 to inspect glass substrates of various sizes.

(Other embodiments)
The present embodiment is not limited to the above-described embodiment, and can be applied to various embodiments without departing from the gist thereof.
For example, the inspection device according to the present embodiment may have a configuration capable of transporting the glass substrate G in both the transport directions A1 and A2, or may have a configuration capable of transporting the glass substrate G in any one of the transport directions A1 and A2. .. Further, by incorporating the inspection device according to the present embodiment into the liquid crystal panel manufacturing line, a series of liquid crystal panel manufacturing processes including the glass substrate inspection process can be continuously performed.

Further, the transport speed of the glass substrate by the first transport section and the second transport section can be appropriately changed according to the size, thickness, strength, etc. of the glass substrate to be inspected. Further, the inspection unit may be configured to include, for example, a mechanical bearing instead of the air bearing. Further, the inspection unit may be configured not to include this type of bearing. Further, a plurality of the above-described embodiments may be combined and implemented.

In the drawings, 10, 20, 30, 40, 50 are inspection devices for glass substrates, 11 is the first roller conveyor section (first conveyor section), 12 is the second roller conveyor section (second conveyor section), and 13 is the inspection device. Units, 18 are air bearings, 21 is a first roller conveyor unit (first conveyor unit), 22 is a second roller conveyor unit (second conveyor unit), 31 is a first clamp unit (first conveyor unit), and 32 is. The second clamp portion (second conveyor portion), 41 is the first push-in portion (first conveyor portion), 42 is the second push-in portion (second conveyor portion), and 51 is the first pinch roller portion (first conveyor portion). , 52 indicate a second pinch roller portion (second transport portion).

Claims (2)

An inspection device that inspects the glass substrates that make up a liquid crystal panel.
The first transport section and the second transport section that transport the glass substrate,
An inspection unit provided between the first transport unit and the second transport unit to inspect the glass substrate,
With
A first clamp portion is provided as the first transport portion, and the first clamp portion is provided.
A second clamp portion is provided as the second transport portion.
The first clamp portion pushes the glass substrate toward the second clamp portion side, and the second clamp portion pulls the glass substrate from the first clamp portion side, whereby the second clamp portion is pulled from the first clamp portion. In addition to being configured to convey the glass substrate to the section
The inspection unit includes an air bearing that floats the glass substrate from below by air, and an inspection unit that inspects the glass substrate.
The air bearing is a glass substrate inspection device having a plurality of air bearing units, and the closer to the inspection unit, the higher the performance of suppressing rattling and shaking of the glass substrate. The second clamp portion pushes the glass substrate toward the first clamp portion side, and the first clamp portion pulls the glass substrate from the second clamp portion side, whereby the first clamp portion is pulled from the second clamp portion. inspection apparatus for a glass substrate according to claim 1 for conveying the glass substrate section.

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