JP2012194025A - Substrate one-sided conveying mechanism in substrate visual inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate one-sided conveying mechanism for use in a substrate visual inspection device that not only is capable of conveying an inspection object substrate in a correct conveying attitude in a clean state while achieving cost reduction but also excels in durability.SOLUTION: A substrate one-sided conveying mechanism comprises: a pair of endless conveyor belts 13 and 14 that convey an inspection object substrate 51; and a reference side substrate guide 23 and a movable side substrate guide 33 arranged with a substrate conveying face 19 in-between. On an inside face 24 of the reference side substrate guide 23, a guide slope 26 rising forward is disposed; a level-gapped face 36 whose face height is lower than a face height of a rear inside face 34b is disposed on a front inside face 34a of the movable side substrate guide 33; an elastic contact part 37 formed of a plurality of thin sheet spring pieces 38 inclined forward and arranged in a longitudinal array is arranged on the level-gapped face 36; this configuration enables orientation and position of the inspection object substrate 51 to be corrected while conveying the substrate pulling over toward the reference side substrate guide via the elastic contact part 37 and to deliver the substrate toward an inspection camera 42.

Description

  The present invention is a technique related to a substrate width-conveying mechanism in a substrate visual inspection apparatus that finally inspects the presence or absence of defects such as scratches, dirt, and foreign matter on a substrate to be inspected using an inspection camera.

  As an appearance inspection method for inspecting the suitability of the appearance of a substrate to be inspected made of a printed circuit board, in addition to an inspection method visually confirmed by humans, for example, “a printed circuit board hole filling portion defect inspection system” There is also an inspection method using an imaging unit for inspecting the appearance of a substrate to be inspected.

JP 2008-124306 A

  And the inspection method by the imaging | photography unit for board | substrate external appearance inspection currently disclosed by patent document 1 uses the printed circuit board with which the filling material was filled in the through hole as a to-be-inspected board, and formed in the hole filling part of this to-be-tested board The depth of the concave portion to be detected is detected with high accuracy so that the presence or absence of a defect can be determined with high accuracy.

  In this case, the substrate to be inspected that is conveyed so as to pass through the inspection position via the conveying means receives the line-shaped irradiation light from the line-shaped irradiation body at the inspection position, and the reflected light is line-shaped by the inspection camera. The presence / absence of a defect is determined after imaging.

  Further, in this case, it is necessary for the inspection camera provided in the imaging unit for inspecting the appearance of the substrate to be inspected so that the substrate to be inspected is width-aligned and accurately positioned and fed so as not to cause a positional shift in the captured image. is there.

  Patent Document 2 discloses a substrate transport apparatus necessary for the imaging unit for inspecting a substrate to be inspected in Patent Document 1 and the like.

  The substrate transport apparatus includes a width-shifting mechanism for width-aligning and accurately positioning the substrate. The width adjusting mechanism in this case is configured to include a substrate pressing jig that comes into contact with the width direction end of the substrate, and a spring that presses the substrate pressing jig toward the center in the width direction.

JP 2009-85719 A

  Further, Patent Document 3 discloses a substrate transfer device applied to a glass substrate used in a large liquid crystal display panel or a plasma display panel, but from one side in a direction orthogonal to the transfer direction to the reference side. A width adjusting mechanism is disclosed that includes a width adjusting roller that is pushed into a certain other side to be positioned and accurately positioned.

JP 2002-176091 A

  On the other hand, FIG. 4 is a perspective view showing another conventional example of a substrate width-conveying mechanism provided with a width-adjusting roller, as in Patent Document 3, and is an endless conveying belt that conveys a substrate P to be inspected while being controlled endlessly. 1, 1, a reference side substrate guide 3 fixedly disposed on one side of the endless transport belt 1, 1 in the moving direction of the endless transport belt 1, and the reference side on the other side The movable-side substrate guide 4 is arranged so as to be adjustable in width with the substrate guide 3.

  In addition, the movable substrate guide 4 is formed with a guide slope 5 for gradually bringing the substrate P to be inspected toward the reference substrate guide 3 side, and on the downstream side of the guide slope 5. A width-adjusting roller unit 6 having two rollers 7 and 8 that are rotationally driven by a motor is arranged.

  In this case, the substrate P to be inspected is gradually moved toward the reference-side substrate guide 3 through the guide inclined surface 5. At this time, the substrate P to be inspected is slightly inclined. As a result of the conveyance, clogging is likely to occur between the reference side substrate guide 3 and the movable side substrate guide 4 whose distance is narrow.

  For this reason, the inspected substrate P can be smoothly fed out in the transport direction without being clogged while being forcibly pressed toward the reference side substrate guide 3 by the two rotating rollers 7 and 8. Become.

  By the way, in the case of the width adjusting mechanism disclosed in Patent Document 2, a substrate pushing jig and a spring are provided on the flap portion that is prepared separately from the transport means and places one or more substrates to be inspected and moves up and down. Therefore, there is a disadvantage that the mechanism itself becomes complicated and the cost increases.

  Further, when using a width-shifting roller as shown in Patent Document 3, depending on the direction of the substrate to be inspected being conveyed, the substrate to be inspected may jump out of the conveyance path by the width-aligning roller, or the width Since the substrate to be inspected is pressed against the substrate guide on the reference side by the alignment roller, there is a problem that the consumption of the substrate guide is accelerated, and the width alignment mechanism itself is expensive.

  Further, when the width-adjusting roller unit 6 shown in FIG. 4 is used, depending on the direction of the substrate P to be inspected, it may run on the reference-side substrate guide 3 or the two rollers 7 and 8. Since the substrate P to be inspected is pressed against the reference side substrate guide 3 with the force of the force, the wear on the side of the reference side substrate guide 3 is accelerated, or the direction and height of the rollers 7 and 8 depending on the thickness and size of the substrate P to be inspected. In addition to the disadvantage that the substrate P to be inspected is soiled when it comes into contact with the two rollers 7 and 8, there is also a problem that the installation cost of the width adjusting roller unit 6 itself is high. there were.

  In view of the above-described problems found in the prior art, the present invention simplifies the mechanism necessary for width adjustment of the substrate to be inspected, while reducing the cost and stably stabilizing the substrate to be inspected, And it aims at providing the board | substrate width | variety conveyance mechanism in the board | substrate external appearance inspection apparatus which can be conveyed without becoming dirty and is also rich in durability.

  The present invention has been made to achieve the above object, and a pair of endless transport belts for transporting a substrate to be inspected to enable appearance inspection by an inspection camera arranged downstream in the transport direction, and these endless transports A reference-side substrate guide that is fixedly arranged on one side of the substrate conveyance surface secured between the belts and a reference-side substrate guide that is fixedly arranged on the other side are arranged so as to be adjustable. At least a movable side substrate guide, and provided on the inner side surface of the reference side substrate guide is a guide slope that rises forward from the introduction start end where the substrate to be inspected is introduced toward the downstream direction as appropriate. Of the inner surface of the movable side substrate guide, the front inner surface located upstream including the introduction start end is provided with a step surface whose surface height is lower than the surface height of the other rear inner surface located downstream. Provide the length of the stepped surface Is provided with an elastic contact portion made of a plurality of thin leaf springs arranged in tandem in a forward-tilt direction in the downstream direction, and the width in the inner side surface direction of the reference side substrate guide via the elastic contact portion. The most important feature is that the direction and position of the substrate to be inspected are corrected while being moved, and the feeding in the direction of the inspection camera is made possible.

  In this case, the length of the step surface is such that when the rear end of the inspected substrate of various sizes prepared in advance having the longest length in the transport direction reaches the introduction start end, the front end side is It is preferable that the length is not achieved.

  Further, it is desirable that the thin plate spring material is provided with a bent guide portion that is in surface contact with a side end surface facing in the transport direction of the substrate to be inspected at a tip portion thereof. Further, it is desirable that the separation distance between the tip position of the thin leaf spring material and the step surface is a length that substantially matches the surface height position of the rear inner surface.

  The pair of endless transport belts are disposed on the downstream side of the pair of endless introduction belt portions and the pair of endless introduction belt portions for introducing the substrate to be inspected from the introduction start end side toward the substrate transport surface. It is also possible to adopt a two-part configuration with a pair of endless feeding belt portions that feed the substrate to be inspected toward the inspection camera.

  According to the first aspect of the present invention, regardless of the surface size of the substrate to be inspected, the orientation of the reference side substrate guide is determined via the guide inclined surface of the reference side substrate guide and the elastic contact portion provided on the rear inner surface of the movable side substrate guide. And the position can be corrected, and the inspection camera can be passed stably. In addition, the mechanism required for the width adjustment of the substrate to be inspected can have a simple configuration, so that the substrate to be inspected can be widthened stably and without fouling while reducing costs. It can also be made durable.

  According to the second aspect of the present invention, the length of the step surface, which is the front inner surface of the movable-side substrate guide 33, is the longest in the transport direction among substrates of various sizes prepared in advance. When the rear end of the object reaches the introduction start end, the length of the front end is not reached. The width can be smoothly shifted to the side.

  According to the invention of claim 3, since the thin leaf spring material constituting the elastic contact portion includes the bending guide portion that is in surface contact with the side end surface facing in the transport direction of the substrate to be inspected, It is possible to smoothly approach the reference side substrate guide without causing damage while elastically contacting the side end surface via the bent guide portion.

  According to the fourth aspect of the present invention, the thin leaf spring material is disposed as an elastic contact portion whose length between the tip position and the step surface is substantially the same as the height position of the rear inner surface. Therefore, the substrate to be inspected can be smoothly fed in the direction of the inner surface of the rear portion while contacting the side end surfaces that are in a positional relationship facing each other in the transport direction of the substrate to be inspected.

  According to the invention of claim 5, the pair of endless transport belts is divided into a pair of endless introduction belt portions and a pair of endless feed belt portions for feeding the substrate to be inspected toward the inspection camera. Therefore, the introduction / feeding of the substrate to be inspected toward the substrate transfer surface 19 can be performed more smoothly.

The perspective view which shows the schematic structural example of this invention. The top view which shows the structural example of the board | substrate width adjusting means in FIG. The perspective view which shows the structural example of the elastic contact part with which a movable-side board | substrate guide is provided in FIG. The schematic perspective view of the conventional board | substrate width-shifting conveyance mechanism.

  As apparent from FIGS. 1 and 2, the board width adjusting and conveying mechanism 12 constituting a part of the board appearance inspection apparatus 11 according to the present invention is an appearance by the inspection camera 42 disposed on the downstream side in the conveying direction. A pair of endless transport belts 13 and 14 that transport the inspected substrate 51 so as to be inspected, and a substrate transport surface 19 secured between the endless transport belts 13 and 14 are fixedly arranged on one side thereof. And a movable side substrate guide 33 disposed on the other side so as to be able to adjust the width between the reference side substrate guide 23 and the reference side substrate guide 23.

  Of these, one endless transport belt 13 is arranged in a positional relationship such that it always stands close to the inner surface 24 of the reference-side substrate guide 23, and the other endless transport belt 13 is a movable-side substrate. In the vicinity of the inner surface 34 of the guide 33, the movable side substrate guide 33 is arranged in a positional relationship that follows the movement in the width direction.

  According to FIG. 1, the pair of endless transport belts 13 and 14 in this case includes a pair of endless introduction belt portions 15 and 16 for introducing the inspected substrate 51 from the introduction start ends 25 and 35 toward the substrate transport surface 19. The endless introduction belt portions 15 and 16 are disposed on the downstream side of the endless introduction belt portions 15 and 16 and divided into a pair of endless infeed belt portions 17 and 18 for feeding the substrate 51 to be inspected toward the inspection camera 42 shown in FIG. In this way, by dividing into two, introduction of the substrate 51 to be inspected toward the substrate transport surface 19 can be performed more smoothly.

  In addition, the pair of endless transport belts 13 and 14 (the pair of endless introduction belt portions 15 and 16 and the pair of endless feed belt portions 17 and 18) are formed using a material having a high friction coefficient such as a cloth belt. Can be used suitably, and is arranged so as to be spanned between the driving side belt wheels 20 and 20 including the motors M and M and the driven side belt wheel 22 so as to be rotated endlessly. It is installed.

  Further, on the inner side surface 24 of the reference-side substrate guide 23 that is fixedly arranged on the apparatus main body (not shown) side of the substrate appearance inspection apparatus 11, an appropriate length downstream from the introduction start end 25 where the substrate 51 to be inspected is introduced. A guide slope 26 that rises in the direction toward the direction is provided.

  On the other hand, among the inner side surfaces 34 of the movable-side substrate guide 33 that is movably disposed on the apparatus main body (not shown) side of the substrate visual inspection apparatus 11, the front inner side surface 34 a located on the upstream side including the introduction start end 35. Is provided with a step surface 36 whose surface height is lower than the surface height of the remaining rear inner side surface 34b located on the downstream side.

  In this case, when the rear end 51a having the longest length a in the transport direction among the substrates 51 to be inspected of various sizes prepared in advance reaches the introduction start end 35, the step end surface 36b It is formed with an unachieved length.

  In addition, in the length direction of the stepped surface 36, an elastic contact portion 37 made up of a plurality of thin plate spring members 38 that are arranged in tandem with being inclined forward in the downstream direction is disposed. That is, according to the detailed example shown in FIG. 3, the elastic contact portion 37 is formed by a plurality of thin leaf spring members 38 arranged in tandem at equal intervals.

  In this case, each thin leaf spring member 38 is extended in a forward inclined posture from the base end portion 38a fixed to the stepped surface 36 using an appropriate fixing method such as screwing, and the front end edge of the base end portion 38a. A forwardly inclined main body portion 38b and a bent guide portion 38c extending from the open end edge of the forward inclined main body portion 38b toward the front direction (downstream direction) substantially parallel to the base end portion 38a. Yes.

  Moreover, the entire thin leaf spring member 38 is elastic so that the distance between the tip position where the bending guide portion 38c is located and the step surface 36 is substantially the same as the height of the rear inner side surface 34b. The contact portion 37 is arranged so that the bent guide portion 38c is brought into surface contact with the side end surface 52 in a positional relationship opposite to the substrate 51 in the conveyance direction, and the substrate 51 to be inspected in the direction of the rear inner side surface 34b. Can be sent smoothly.

  Therefore, the substrate 51 to be inspected can be sent in the direction of the inspection camera 42 with its direction and position being corrected while being narrowed in the direction of the inner surface 24 of the reference side substrate guide 23 via the elastic contact portion 37. become.

  The position of the movable substrate guide 33 is moved so that the width secured between the movable substrate guide 33 and the reference substrate guide 23 corresponds to the width of the substrate 51 to be inspected. 62 An endless belt 63 is passed between the two, a handle 64 connected to one belt wheel 62 is rotated, and a ball screw (not shown) is driven to rotate in this rotational motion, thereby moving forward and backward in parallel to the reference side substrate guide 23. It is done by letting

  That is, when the substrate 51 to be inspected passes through the inspection camera 42 installed at a predetermined position on the substrate transport surface 19 located on the downstream side, the inner surface 24 of the reference-side substrate guide 23 and the movable side already exist. The direction and the position of the substrate guide 33 can be corrected with respect to the elastic contact portion 37.

  Next, the operation and effect of the present invention having the above configuration will be described. First, the movable-side substrate guide 33 is moved and the distance from the reference-side substrate guide 23 is set to the width of the substrate 51 to be inspected this time. Let me correspond to.

  After the adjustment of the distance on the movable side substrate guide 33 side with respect to the reference side substrate guide 23, the inspected substrate 51 is fed into the introduction start ends 25, 35 from the front end 51b side, and between the endless introduction belt portions 15, 16 Is introduced and placed on the substrate transfer surface 14 secured.

  The inspected substrate 51 placed on the substrate transport surface 14 starts to move in the downstream direction in accordance with the movement of the endless introduction belt portions 15 and 16.

  In this case, the movement of the inspected substrate 51 includes a pattern in which the introduced inspected substrate 51 moves while being in contact with the guide slope 26 of the reference side substrate guide 23, and the introduced inspected substrate 51 is in the reference side. There are two patterns: a pattern that moves without contacting the guide slope 26 of the substrate guide 23.

  In the case of the former pattern, the inspected substrate 51 is conveyed while being moved toward the movable side substrate guide 33 by the guide inclined surface 26 of the reference side substrate guide 23.

  Then, the inspected substrate 51 brought close to the movable side substrate guide 33 side has its side end face 52 in turn on each bent guide portion 38c in each leaf spring material 38 constituting the elastic contact portion 37. By being elastically contacted, it is conveyed while being gradually moved toward the reference side substrate guide 23 side.

  In addition, the elastic contact portion 37 has a front end 51b when the rear end 51a having the longest length in the transport direction among the substrates 51 to be inspected of various sizes prepared in advance reaches the introduction start end 25. Since it is arranged up to a length range in which the side does not reach, the width can be surely shifted toward the reference side substrate guide 23 side while flexibly corresponding to the size of the substrate 51 to be inspected.

Thus, the substrate 51 to be inspected after passing through the elastic contact portion 37 passes through the pair of endless feed belt portions 17 and 18 positioned at the rear stage of the pair of endless introduction belt portions 15 and 16, thereby providing a parallel reference. Inspection that is taken by the inspection camera 42 in a stable conveying posture that is sandwiched between the inner side surface 24 of the side substrate guide 23 and the rear inner side surface 34b of the movable side substrate guide 33 and whose direction and position are corrected. The positions T _{1 to} T ₃ can be passed.

  On the other hand, in the case of the latter pattern, the side end surface 52 of the loaded substrate 51 to be inspected is first elastically moved toward the thin spring member 38 constituting the elastic contact portion 37 in the movable substrate guide 33. Contact.

  The inspected substrate 51 that sequentially contacts the individual thin spring members 38 constituting the elastic contact portion 37 in this manner is guided by the respective bending guide portions 38c and gradually becomes the reference side substrate guide 23. It is conveyed while being brought to the side.

  In addition, the elastic contact portion 37 has a front end 51b when the rear end 51a having the longest length in the transport direction among the substrates 51 to be inspected of various sizes prepared in advance reaches the introduction start end 25. Since it is arranged up to a length range in which the side does not reach, the width can be surely shifted toward the reference side substrate guide 23 side while flexibly corresponding to the size of the substrate 51 to be inspected.

Thus, as in the former pattern, the substrate 51 to be inspected after passing through the elastic contact portion 37 is a pair of endless feeding belt portions 17, 18 located at the subsequent stage of the pair of endless introduction belt portions 15, 16. Is interposed between the parallel inner side surface 24 of the reference-side substrate guide 23 and the rear inner side surface 34b of the movable-side substrate guide 33, and takes a stable transport posture in which its direction and position are corrected. The inspection positions T _{1 to} T ₃ taken by the inspection camera 42 can be passed.

  For this reason, according to the present invention, regardless of the surface size of the substrate to be inspected, the guide slope 26 of the reference side substrate guide 23 and the elastic contact portion 37 provided on the rear inner side surface 34b of the movable side substrate guide 33 are provided. Thus, the inspection camera 42 can be stably passed after the orientation and position thereof are corrected.

  Further, since the mechanism necessary for the width alignment of the substrate to be inspected can be a simple configuration that does not require the width alignment roller unit 6 as shown in FIG. 4, the cost to be inspected can be reduced. The substrate 51 can be stably and without being soiled, and can be made highly durable.

  Further, the length of the stepped surface 36, which is the front inner side surface 34a of the movable-side substrate guide 33, is the rear end 51a having the longest length in the transport direction among various sizes of substrates 51 to be inspected prepared in advance. When the introduction start end 35 is reached, the length of the front end 51b is unreached, so that the inner surface of the reference-side substrate guide 23 can be used even for the inspected substrate 51 having the longest length in the transport direction. The width can be smoothly adjusted to the 24 side.

  Furthermore, since the thin leaf spring material 38 constituting the elastic contact portion 37 is provided with a bending guide portion 38c in surface contact with the side end surface 52 facing in the transport direction of the substrate 51 to be inspected. In addition, the side end face 52 can be elastically brought into contact with the side end face 52 via the bent guide portion 38c and can be smoothly brought closer to the inner side face 24 side of the reference side board guide 23.

  Further, the entire thin leaf spring member 38 is elastically contacted so that the distance between the tip position where the bending guide portion 38c is located and the step surface 36 is substantially the same as the surface height position of the rear inner side surface 34b. Since it is disposed as the portion 37, the bending guide portion 38c is in surface contact with the side end face 52 in a positional relationship facing the inspection substrate 51 in the conveyance direction with a weak pressure while being in the rear inner side surface 34b direction. 51 can be fed smoothly.

  Moreover, the pair of endless transport belts 13 and 14 inspects the inspected substrate 51 and the pair of endless introduction belt portions 15 and 16 for introducing the inspected substrate 51 from the introduction start ends 25 and 35 toward the substrate transport surface 19. Since the pair of endless feeding belt portions 17 and 18 fed in the direction of the camera 42 are divided into two parts, introduction / feeding of the inspected substrate 51 in the direction of the substrate transport surface 19 can be performed more smoothly. It will be possible.

  The above is the description of the present invention based on FIGS. 1 to 3, and the gist of the present invention is not limited to this. For example, the pair of endless conveyor belts 13 and 14 are divided into a pair of endless introduction belt portions 15 and 16 and a pair of endless feed belt portions 17 and 18 as shown in FIG. It is also possible to form a single unit over the entire length in the transport direction.

  Further, the length of the stepped surface 36 on which the thin plate spring members 38 are arranged is such that the rear end 51a having the longest length in the transport direction among various sizes of substrates 51 to be inspected is the introduction start end. When reaching 35, the front end 51 b side may have a length that reaches the rear inner side surface 34 b of the movable-side substrate guide 33.

  Furthermore, the thin leaf spring members 38 constituting the elastic contact portion 37 can be arranged without being arranged at regular intervals as necessary. In addition, each thin leaf spring member 38 can be formed by a base end portion 38a that does not have a bending guide portion 38c and a forward tilted main body portion 38b if desired. Furthermore, if each leaf spring material 38 has a length that makes contact with the side end face 52 facing in the transport direction of the substrate 51 to be inspected, the height of the rear inner side surface 34b of the movable side substrate guide 33 is increased. The thing of the length which protrudes a little may be sufficient.

DESCRIPTION OF SYMBOLS 11 Board | substrate visual inspection apparatus 12 Board | substrate width adjustment conveyance mechanism 13,14 Endless conveyance belt 15,16 Endless introduction bell part 17,18 Endless feeding belt part 19 Substrate conveyance surface 20 Drive side belt wheel 21 Drive side belt wheel 23 Reference | standard side belt Part 24 Inner side 25 Introduction start end 26 Guide slope 33 Movable substrate guide 34 Inner side 34a Front inner side 34b Rear inner side 35 Introduction start end 36 Stepped surface 37 Elastic contact part 38 Thin leaf spring material 38a Base end part 38b Forward tilting main body part 38c bent guide portion 42 inspection camera 51 to be inspected substrate 51a rear 51b front 52 side end surface 61, 62 pulley 63 endless belt 64 handle T ₁ through T ₃ testing position M motor

Claims (5)

A pair of endless transport belts that transport the substrate to be inspected to enable visual inspection by an inspection camera arranged on the downstream side in the transport direction, and a substrate transport surface secured between these endless transport belts. At least a reference side substrate guide fixedly arranged on one side and a movable side substrate guide arranged on the other side so as to be able to adjust the width between the reference side substrate guide,
Provided on the inner surface of the reference side substrate guide is a guide slope that rises forward from the introduction start end where the substrate to be inspected is introduced toward the downstream direction of the appropriate length,
Of the inner surface of the movable side substrate guide, the front inner surface located on the upstream side including the introduction start end has a step height lower than that of the other rear inner surface located on the downstream side. Provide a surface,
In the length direction of the stepped surface, an elastic contact portion made of a plurality of thin leaf spring materials arranged in tandem with being inclined forward in the downstream direction is disposed,
The substrate can be fed in the direction of the inspection camera by correcting the direction and position of the substrate to be inspected while narrowing the reference side substrate guide in the direction of the inner surface through the elastic contact portion. Substrate width-conveying mechanism for a substrate visual inspection apparatus. The length of the stepped surface is that when the rear end of the substrate to be inspected of various sizes prepared in advance having the longest length in the transport direction reaches the introduction start end, the front end side is not reached. The board | substrate width adjustment conveyance mechanism for the board | substrate visual inspection apparatus of Claim 1 which is the length which becomes. 3. The substrate width adjustment for a substrate visual inspection apparatus according to claim 1, wherein the thin plate spring material has a bent guide portion in surface contact with a side end surface facing in the transport direction of the substrate to be inspected at a tip portion thereof. Transport mechanism. 4. The board appearance inspection apparatus according to claim 1, wherein a separation distance between a front end position of the thin leaf spring material and the stepped surface is a length that substantially coincides with a surface height position of the rear inner surface. Substrate widening transport mechanism for The pair of endless transport belts are disposed on the downstream side of the pair of endless introduction belt portions and a pair of endless introduction belt portions for introducing the substrate to be inspected from the introduction start end side toward the substrate transport surface. The board | substrate width adjustment conveyance mechanism for the board | substrate external appearance inspection apparatus in any one of Claim 1 thru | or 4 made into the 2 division | segmentation structure with a pair of endless feeding belt part which sends an inspection board | substrate to the said inspection camera direction.

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