JP2008063130A5 - - Google Patents

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Publication number
JP2008063130A5
JP2008063130A5 JP2006245739A JP2006245739A JP2008063130A5 JP 2008063130 A5 JP2008063130 A5 JP 2008063130A5 JP 2006245739 A JP2006245739 A JP 2006245739A JP 2006245739 A JP2006245739 A JP 2006245739A JP 2008063130 A5 JP2008063130 A5 JP 2008063130A5
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Japan
Prior art keywords
substrate
transfer
rectangular
rectangular substrate
unit
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JP2006245739A
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Japanese (ja)
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JP5265099B2 (en
JP2008063130A (en
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Priority to JP2006245739A priority Critical patent/JP5265099B2/en
Priority claimed from JP2006245739A external-priority patent/JP5265099B2/en
Priority to TW096133454A priority patent/TWI416095B/en
Priority to CN2007101492516A priority patent/CN101144920B/en
Priority to KR1020070091423A priority patent/KR101424017B1/en
Publication of JP2008063130A publication Critical patent/JP2008063130A/en
Publication of JP2008063130A5 publication Critical patent/JP2008063130A5/ja
Application granted granted Critical
Publication of JP5265099B2 publication Critical patent/JP5265099B2/en
Expired - Fee Related legal-status Critical Current
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Claims (10)

薄板状の矩形基板を検査領域に搬送して検査する基板検査装置において、
前記矩形基板を水平にして搬送するための搬送ステージと、
前記矩形基板の搬送方向に沿う前記搬送ステージの両側にそれぞれ往復移動可能に配置され、前記搬送方向に沿う前記矩形基板の片側端部を保持して前記搬送方向に搬送力を付勢する片側搬送部と、
前記それぞれの片側搬送部が前記矩形基板の受渡し領域に移動して一方の片側搬送部から反対側に位置する他方の片側搬送部に前記矩形基板を受渡すことにより、前記矩形基板の搬送を行うようにしたことを特徴とする基板検査装置。
 In a board inspection apparatus that transports and inspects a thin rectangular substrate to an inspection area,
A transport stage for transporting the rectangular substrate horizontally ;
One- sided transfer that is reciprocally arranged on both sides of the transfer stage along the transfer direction of the rectangular substrate , holds one end of the rectangular substrate along the transfer direction, and biases the transfer force in the transfer direction. And
By to transfer the rectangular substrate on the other side conveyance section located on the opposite side from the one side conveying portion moves to the delivery area of each side conveyance section the rectangular substrate, for transporting of the rectangular substrate A substrate inspection apparatus characterized in that it is configured as described above.
前記片側搬送部は、前記矩形基板の受渡し領域に対して前記搬送ステージの両側に前記矩形基板の受渡し領域から上流側と前記矩形基板の受渡し領域から下流側にそれぞれ往復移動可能に設けられることを特徴とする請求項１に記載の基板検査装置。
 The one-side transfer unit is provided on both sides of the transfer stage with respect to the rectangular substrate transfer region so as to be reciprocally movable from the rectangular substrate transfer region to the upstream side and from the rectangular substrate transfer region to the downstream side. The board inspection apparatus according to claim 1, wherein
前記片側搬送部は、前記搬送ステージの複数個所に配置された前記矩形基板の受渡し領域に対して隣り合う前記矩形基板の受渡し領域間に往復移動可能に設けられるとともに、上流側の端に位置する前記矩形基板の受渡し領域から上流側と下流側の端に位置する前記矩形基板の受渡し領域から下流側にそれぞれ往復移動可能に設けられることを特徴とする請求項１に記載の基板検査装置。
 The one-side transport unit is provided so as to be reciprocally movable between the delivery areas of the rectangular substrates adjacent to the delivery areas of the rectangular substrates arranged at a plurality of locations on the transport stage, and is positioned at an upstream end. 2. The substrate inspection apparatus according to claim 1, wherein the substrate inspection apparatus is provided so as to be reciprocally movable from the rectangular substrate delivery region located at the upstream and downstream ends to the downstream side from the rectangular substrate delivery region .
前記片側搬送部は、前記搬送ステージの複数個所に配置された前記矩形基板の受渡し領域に対して隣り合う前記矩形基板の受渡し領域間に設けられることを特徴とする請求項１に記載の基板検査装置。
 2. The substrate inspection according to claim 1, wherein the one-side transfer unit is provided between the transfer regions of the rectangular substrates adjacent to the transfer regions of the rectangular substrates arranged at a plurality of locations on the transfer stage. apparatus.
前記片側搬送部は、前記搬送ステージを挟んで前記搬送ステージの両側に沿って交互に複数設けられることを特徴とする請求項１から４に記載の基板検査装置。5. The substrate inspection apparatus according to claim 1, wherein a plurality of the one-side transfer units are alternately provided along both sides of the transfer stage with the transfer stage interposed therebetween.
前記片側搬送部は、前記搬送ステージの片側に沿って交互に複数設けられることを特徴とする請求項１から４に記載の基板検査装置。5. The substrate inspection apparatus according to claim 1, wherein a plurality of the one-side transfer units are alternately provided along one side of the transfer stage.
前記搬送ステージは、前記矩形基板を搬入する基板搬入部と、この基板搬入部の下流側に配置され前記矩形基板の全面を検査するための基板検査部と、この基板検査部の下流側に配置され前記基板検査部で検査された基板を搬出する基板搬出部で構成され、The transport stage is disposed on the downstream side of the substrate loading unit for loading the rectangular substrate, on the downstream side of the substrate loading unit, for inspecting the entire surface of the rectangular substrate, and on the downstream side of the substrate inspection unit. And a substrate unloading unit for unloading the substrate inspected by the substrate inspection unit,
前記検査部は、上流側から搬送された前記矩形基板を受ける上流側の基板受渡し領域と、前記矩形基板を検査して基板搬出部に渡す下流側の基板受渡し領域とが隣り合って設けられることを特徴とする請求項１に記載の基板検査装置。The inspection unit is provided with an upstream substrate delivery region that receives the rectangular substrate transported from the upstream side and a downstream substrate delivery region that inspects the rectangular substrate and passes it to the substrate carry-out unit. The substrate inspection apparatus according to claim 1.
前記矩形基板の受渡し領域は、搬入された前記矩形基板を基準位置に位置決めするアライメント機構を備えた基板搬入部と、前記矩形基板の全面を検査するための基板検査部の検査領域との間に設けられ、前記アライメント機構により位置決めされた状態で前記矩形基板を上流側の片側搬送部から下流側の片側搬送部に受け渡して前記検査部の検査領域に搬送することを特徴とする請求項７に記載の基板検査装置。The delivery area of the rectangular substrate is between a substrate carry-in portion provided with an alignment mechanism that positions the carried rectangular substrate at a reference position and an inspection area of a substrate inspection portion for inspecting the entire surface of the rectangular substrate. 8. The rectangular substrate, which is provided and positioned by the alignment mechanism, is transferred from an upstream one-side transport unit to a downstream one-side transport unit and transported to an inspection region of the inspection unit. The board | substrate inspection apparatus of description.
前記搬送ステージは、前記矩形基板を浮上させる浮上ステージよりなることを特徴とする請求項１から４に記載の基板検査装置。5. The substrate inspection apparatus according to claim 1, wherein the transfer stage includes a floating stage for floating the rectangular substrate.
前記搬送ステージは、前記矩形基板を一定高さで水平に支える多数のローラが配列されたローラステージよりなることを特徴とする請求項１から４に記載の基板検査装置。5. The substrate inspection apparatus according to claim 1, wherein the transfer stage includes a roller stage in which a plurality of rollers that horizontally support the rectangular substrate at a certain height are arranged.
JP2006245739A 2006-09-11 2006-09-11 Board inspection equipment Expired - Fee Related JP5265099B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006245739A JP5265099B2 (en) 2006-09-11 2006-09-11 Board inspection equipment
TW096133454A TWI416095B (en) 2006-09-11 2007-09-07 Substrate inspection apparatus
CN2007101492516A CN101144920B (en) 2006-09-11 2007-09-07 Substrate detecting device
KR1020070091423A KR101424017B1 (en) 2006-09-11 2007-09-10 Substrate inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006245739A JP5265099B2 (en) 2006-09-11 2006-09-11 Board inspection equipment

Publications (3)

Publication Number Publication Date
JP2008063130A JP2008063130A (en) 2008-03-21
JP2008063130A5 true JP2008063130A5 (en) 2009-10-15
JP5265099B2 JP5265099B2 (en) 2013-08-14

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JP2006245739A Expired - Fee Related JP5265099B2 (en) 2006-09-11 2006-09-11 Board inspection equipment

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JP (1) JP5265099B2 (en)
KR (1) KR101424017B1 (en)
CN (1) CN101144920B (en)
TW (1) TWI416095B (en)

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CN109926792B (en) * 2019-04-25 2021-04-06 大族激光科技产业集团股份有限公司 Laser cutting microscope carrier
CN112595722B (en) * 2021-03-02 2021-06-08 苏州天准科技股份有限公司 Sectional type air flotation platform, platform module and detection equipment

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JP4426276B2 (en) * 2003-10-06 2010-03-03 住友重機械工業株式会社 Conveying device, coating system, and inspection system
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