JP2008063130A - Substrate inspection device - Google Patents

Substrate inspection device Download PDF

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JP2008063130A
JP2008063130A JP2006245739A JP2006245739A JP2008063130A JP 2008063130 A JP2008063130 A JP 2008063130A JP 2006245739 A JP2006245739 A JP 2006245739A JP 2006245739 A JP2006245739 A JP 2006245739A JP 2008063130 A JP2008063130 A JP 2008063130A
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substrate
suction
transport
unit
stage
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JP2008063130A5 (en
JP5265099B2 (en
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Hiroshi Fujimori
洋志 藤森
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Olympus Corp
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Olympus Corp
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Priority to JP2006245739A priority Critical patent/JP5265099B2/en
Priority to TW096133454A priority patent/TWI416095B/en
Priority to CN2007101492516A priority patent/CN101144920B/en
Priority to KR1020070091423A priority patent/KR101424017B1/en
Publication of JP2008063130A publication Critical patent/JP2008063130A/en
Publication of JP2008063130A5 publication Critical patent/JP2008063130A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a substrate from being deformed even if a conveying passage is long and convey the substrate with an excellent accuracy in a substrate inspection device. <P>SOLUTION: This substrate inspection device comprises floating stages 1A, 2A, 3A for conveying a sheet-like substrate 4 as a subject and sucking and conveying parts 5, 6, 7 disposed on the sides of the floating stages in one of the directions crossing each other in the conveying direction, holding the end of the substrate 4, and imparting a conveying force to the substrate 4. The substrate 4 is conveyed by sequentially delivering the substrate 4 between the sucking and conveying parts. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は基板検査装置に関する。例えば、液晶ガラス基板などのような薄板状の基板を水平搬送して表面欠陥を検査する基板検査装置に関する。   The present invention relates to a substrate inspection apparatus. For example, the present invention relates to a substrate inspection apparatus that inspects a surface defect by horizontally conveying a thin plate-like substrate such as a liquid crystal glass substrate.

近年、液晶ディスプレイの大型化に伴い、液晶ガラス基板も大型化している。そのため、このような薄板状の基板の表面欠陥を検査する基板検査装置は、製造工程にある基板をガス浮上ステージなどの搬送ステージに移載し、基板の端部を例えば吸着保持するなどして検査部に搬送し、検査部において基板を水平移動することで基板表面の検査を行うものが多い。それにより、基板移動のための時間、エネルギーロス、および搬送による基板へのダメージなどを低減している。
例えば、特許文献１には、基板を浮上させる浮上ブロックと、浮上ブロック上の基板の両端を吸着保持して一方向に基板を搬送する基板搬送部を備える基板搬送装置が記載されている。
また、特許文献２には、ころ搬送部の片側に搬送方向に沿ってＹテーブルが設けられ基板の片側を把持機構により厚さ方向に把持して搬送するフラットパネル検査装置が記載されている。
特開２００４−２７９３３５号公報（図１） 特開２０００−９６６１号公報（図１〜３） In recent years, with the increase in size of liquid crystal displays, the size of liquid crystal glass substrates has also increased. Therefore, a substrate inspection apparatus for inspecting surface defects of such a thin plate substrate transfers the substrate in the manufacturing process to a transfer stage such as a gas levitation stage, and holds the end portion of the substrate by suction or the like, for example. In many cases, the substrate surface is inspected by being transferred to the inspection unit and horizontally moving the substrate in the inspection unit. This reduces the time for moving the substrate, energy loss, and damage to the substrate due to conveyance.
For example, Patent Document 1 describes a substrate transport apparatus including a floating block that floats a substrate and a substrate transport unit that transports the substrate in one direction by sucking and holding both ends of the substrate on the floating block.
Patent Document 2 describes a flat panel inspection apparatus in which a Y table is provided on one side of a roller transport unit along the transport direction and grips and transports one side of a substrate in the thickness direction by a gripping mechanism.
JP 2004-279335 A (FIG. 1) JP 2000-9661 (FIGS. 1 to 3)

しかしながら、上記のような従来の基板検査装置には、以下のような問題があった。
特許文献１に記載の技術では、基板搬送部により、基板の両端を吸着保持して搬送するので、基板の大型化に伴いたわみやすくなっている薄板状の基板では、基板搬送部の平行度の狂いなどにより基板が変形しやすくなり、基板が歪むことで検査精度に影響するといった問題がある。
また、特許文献１に記載の基板検査装置では、浮上ブロックに対して、共通の基板搬送部を設けているが、搬送路のレイアウトや検査部の数などによっては複数の浮上ブロックを配列して長大な搬送路を形成するとともに、搬送路中に複数の製造装置や検査装置を配置する必要がある場合がある。このような場合、複数の浮上ブロックと各装置に共通する両端保持の基板搬送部を設けるには、互いの配置精度を高精度にする必要があるため、基板検査装置の設置の手間や組立コストが増大してしまうという問題がある。特に基板検査装置は、外部からの振動を遮断するために除振台に載せられている。このように除振台に載せられた装置の場合、基板の移動にともない除振台に載せられた浮上ブロックの上面が傾いたり、外部からの振動により複雑な動きを行うため、共通の基板搬送部を設けることができないという問題がある。
後者の問題を回避するため、基板搬送部を浮上ブロックごとに分割して設けることも考えられるが、一方の基板搬送部から他方の基板搬送部に載せ替えるための搬送ロボットなどが必要となり、装置構成が複雑となってしまうという問題がある。
また、特許文献２に記載の技術では、基板を下流側の搬送部に受け渡す場合に基板を一度離す必要がある。このとき、基板は水平方向の拘束がなくなるので、基準位置にアライメントされた基板の位置決め状態が損なわれてしまう。そのため、受け渡し後に再度アライメント調整を行わなければならないという問題がある。 However, the conventional substrate inspection apparatus as described above has the following problems.
In the technique described in Patent Document 1, since both ends of the substrate are sucked and held by the substrate transfer unit, the parallelism of the substrate transfer unit is reduced in the thin plate-like substrate that is easily bent as the size of the substrate increases. There is a problem that the substrate is easily deformed due to a deviation or the like, and the inspection accuracy is affected by the distortion of the substrate.
Moreover, in the board | substrate inspection apparatus of patent document 1, although the common board | substrate conveyance part is provided with respect to the floating block, depending on the layout of a conveyance path, the number of inspection parts, etc., several floating blocks are arranged. While forming a long conveyance path, it may be necessary to arrange a plurality of manufacturing apparatuses and inspection apparatuses in the conveyance path. In such a case, in order to provide a plurality of floating blocks and a substrate transporting unit that is held at both ends in common with each device, it is necessary to increase the accuracy of the mutual arrangement. There is a problem that increases. In particular, the substrate inspection apparatus is placed on a vibration isolation table in order to block external vibration. In the case of an apparatus mounted on a vibration isolation table in this way, the upper surface of the floating block that is mounted on the vibration isolation table tilts as the substrate moves, or a complicated movement occurs due to external vibration. There is a problem that a part cannot be provided.
In order to avoid the latter problem, it is conceivable to divide and provide the substrate transfer unit for each floating block. However, a transfer robot or the like for transferring from one substrate transfer unit to the other substrate transfer unit is required. There is a problem that the configuration becomes complicated.
Moreover, in the technique described in Patent Document 2, it is necessary to separate the substrate once when the substrate is transferred to the downstream transport unit. At this time, since the substrate is not restrained in the horizontal direction, the positioning state of the substrate aligned with the reference position is impaired. Therefore, there is a problem that alignment adjustment must be performed again after delivery.

本発明は、上記のような問題に鑑みてなされたものであり、搬送路が長くなっても、基板が変形することなく、しかも良好な精度で基板を搬送することができる基板検査装置を提供することを目的とする。   The present invention has been made in view of the above problems, and provides a substrate inspection apparatus capable of transporting a substrate with good accuracy without deformation of the substrate even when the transport path becomes long. The purpose is to do.

上記の課題を解決するために、本発明の基板検査装置は、被検体である薄板状の基板を搬送するための搬送ステージと、該搬送ステージの、搬送方向に直交する方向のいずれかの側方に配置され、前記基板の端部を保持して該基板に搬送力を付勢する複数の片側搬送部とを備え、該複数の片側搬送部の間で前記基板を順次受け渡すことにより、該基板の搬送を行うようにしたことを特徴とする。   In order to solve the above-described problems, a substrate inspection apparatus according to the present invention includes a transport stage for transporting a thin plate-like substrate as a subject, and either side of the transport stage in a direction orthogonal to the transport direction. A plurality of one-sided conveyance units that are arranged on the side and hold the end of the substrate and bias the conveyance force to the substrate, and sequentially transfer the substrate between the plurality of one-sided conveyance units, The substrate is transported.

本発明の基板検査装置によれば、複数の片側搬送部の間で基板を受け渡して搬送するので、搬送長さが長くなっても、基板が変形することなく、しかも良好な精度で基板を搬送することができるという効果を奏する。   According to the substrate inspection apparatus of the present invention, the substrate is transferred and transferred between a plurality of one-side transfer units. Therefore, even if the transfer length is increased, the substrate is not deformed and transferred with good accuracy. There is an effect that can be done.

以下では、本発明の実施の形態について添付図面を参照して説明する。すべての図面において、実施形態が異なる場合であっても、同一または相当する部材には同一の符号を付し、共通する説明は省略する。   Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In all the drawings, even if the embodiments are different, the same or corresponding members are denoted by the same reference numerals, and common description is omitted.

［第１の実施形態］
本発明の第１の実施形態に係る基板検査装置について説明する。
図１は、本発明の第１の実施形態に係る基板検査装置の概略構成を示す平面図である。図２（ａ）は、図１のＡ部の部分拡大図である。図２（ｂ）は、図２（ａ）のＢ視正面図である。 [First Embodiment]
A substrate inspection apparatus according to a first embodiment of the present invention will be described.
FIG. 1 is a plan view showing a schematic configuration of a substrate inspection apparatus according to the first embodiment of the present invention. FIG. 2A is a partially enlarged view of part A in FIG. FIG. 2B is a front view as seen from B in FIG.

本実施形態は、例えば液晶ガラス基板などからなる薄板状の基板４を被検体とし、基板４を水平方向に、浮上させながら搬送して、基板４の表面を検査する基板検査装置１００に適用したものである。
基板検査装置１００の概略構成は、図１に示すように、基板搬入部１、検査部２、および基板搬出部３が、搬送方向に沿ってこの順に配置されてなる。
基板４の平面視形状は、搬送方向の長さがＬ、搬送方向に直交する方向（以下、搬送幅方向と略称する）の幅がＷの略矩形状であるとして説明する。 The present embodiment is applied to a substrate inspection apparatus 100 in which a thin plate-like substrate 4 made of, for example, a liquid crystal glass substrate is used as an object, and the substrate 4 is transported while being floated in the horizontal direction to inspect the surface of the substrate 4. Is.
As shown in FIG. 1, the schematic configuration of the substrate inspection apparatus 100 includes a substrate carry-in unit 1, an inspection unit 2, and a substrate carry-out unit 3 arranged in this order along the carrying direction.
The planar view shape of the substrate 4 will be described assuming that the length in the transport direction is L and the width in the direction orthogonal to the transport direction (hereinafter abbreviated as the transport width direction) is W.

基板搬入部１は、装置外部から、例えば搬送ロボットなどにより搬送された基板４を複数のリフトピンを備えたリフタにより受け取り、浮上ステージ１Ａに載置し、浮上ステージ１Ａ上に浮上した基板４を、水平面内で搬送方向および搬送幅方向に位置決めする基準ピン８ａ、８ａ、８ｂと押付けピン８ｃ、８ｃからなる基板位置決め機構を備え、さらに、浮上ステージ１Ａおよび吸着搬送部５（片側搬送部）を備える。
浮上ステージ１Ａは、基板４を水平方向に載置して水平方向に移動自在とし、基板４を低荷重で一定方向に搬送するための搬送ステージである。本実施形態では、不図示のエア供給源に接続されたエア噴射孔Ｎがステージ表面に多数設けられ、これらエア噴射孔Ｎからエアを噴射することで、基板４を浮上支持するガス浮上ステージにより構成されている。
浮上ステージ１Ａの大きさは、搬送方向の長さが、基板４の搬送方向長Ｌよりも長く、搬送幅方向の幅が、基板４の幅Ｗよりわずかに狭い設定とされる。 The substrate carry-in unit 1 receives the substrate 4 transported by, for example, a transport robot from the outside of the apparatus using a lifter having a plurality of lift pins, places the substrate 4 on the floating stage 1A, and floats the substrate 4 floating on the floating stage 1A. A substrate positioning mechanism comprising reference pins 8a, 8a, 8b and pressing pins 8c, 8c for positioning in the transport direction and transport width direction within a horizontal plane is provided, and further a floating stage 1A and a suction transport unit 5 (one-side transport unit) are provided. .
The levitation stage 1A is a transfer stage for placing the substrate 4 in the horizontal direction so as to be movable in the horizontal direction, and for transferring the substrate 4 in a certain direction with a low load. In the present embodiment, a large number of air injection holes N connected to an air supply source (not shown) are provided on the surface of the stage. By injecting air from these air injection holes N, the gas levitation stage that supports the substrate 4 to float is provided. It is configured.
The size of the floating stage 1 </ b> A is set such that the length in the transport direction is longer than the transport direction length L of the substrate 4 and the width in the transport width direction is slightly narrower than the width W of the substrate 4.

基準ピン８ａ、８ａは、基板４の搬送幅方向側の端部に突き当てることで、搬送幅方向の位置決めを行うための係止部材であり、浮上ステージ１Ａの搬送方向に向かって右側（図１の下側、以下、搬送方向右側と略称する）の固定配置で、基板４の載置面に対して上下方向に出没可能に設けられている。
基準ピン８ｂは、基板４の搬送方向側の端部に突き当てることで、搬送方向の位置決めを行うための係止部材であり、浮上ステージ１Ａの搬送方向下流側において、基板４の載置面に対して上下方向に出没可能に設けられている。
なお、図１は模式図のため大きさなどが誇張されている結果、基準ピン８ｂがスライドガイド９と干渉するような位置関係に描かれているが、基準ピン８ｂは、スライドガイド９から少し離れた位置に設けられ、さらにスライダ１０と干渉しないように基板４の位置決め後に下降して後述する吸着搬送部５と干渉しない位置に退避できるように構成される。
押付けピン８ｃは、基板４を押圧して基準位置に設置された基準ピン８ａ、８ａ、８ｂ側に付勢するための押圧部材であり、浮上ステージ１Ａの搬送方向に向かって左側（図１の上側、以下、搬送方向左側と略称する）と浮上ステージ１Ａの搬送方向上流側において、基板４に向けて移動可能に設けられている。 The reference pins 8a and 8a are locking members for positioning in the transport width direction by abutting against the end of the substrate 4 on the transport width direction side, and are located on the right side in the transport direction of the levitation stage 1A (see FIG. 1 (hereinafter, abbreviated as the right side in the conveyance direction), and is provided so as to be able to appear in the vertical direction with respect to the mounting surface of the substrate 4.
The reference pin 8b is a locking member for positioning in the transport direction by abutting against an end of the substrate 4 on the transport direction side, and on the downstream side of the floating stage 1A in the transport direction, the mounting surface of the substrate 4 It is provided so that it can appear in the up-down direction.
Note that FIG. 1 is a schematic diagram, and as a result of exaggerating the size and the like, the reference pin 8b is drawn in a positional relationship such that the reference pin 8b interferes with the slide guide 9. It is provided at a distant position, and is configured so that it can be lowered after positioning the substrate 4 so as not to interfere with the slider 10 and can be retracted to a position where it does not interfere with the suction conveyance unit 5 described later.
The pressing pin 8c is a pressing member for pressing the substrate 4 and biasing it toward the reference pins 8a, 8a, 8b installed at the reference position, and is on the left side (in FIG. 1) in the conveying direction of the levitation stage 1A. It is provided so as to be movable toward the substrate 4 on the upper side, hereinafter abbreviated as the left side in the transport direction) and upstream in the transport direction of the levitation stage 1A.

なお、基準ピン８ａ、８ｂ、押付けピン８ｃは、基板４の端部を傷つけることなく当接することができる係止部材であれば、ピン状部材には限定されず、例えばブロック状の部材であってもよい。また、押圧部材は、表面が緩衝材などに覆われていてもよい。   The reference pins 8a and 8b and the pressing pin 8c are not limited to pin-like members as long as they can be brought into contact with each other without damaging the end of the substrate 4, and are, for example, block-like members. May be. The pressing member may have a surface covered with a cushioning material or the like.

吸着搬送部５は、浮上ステージ１Ａの搬送方向右側に沿って配置され、浮上ステージ１Ａ上に浮上支持された基板４の搬送方向右側の裏面側を吸着保持し、搬送方向に搬送力を付勢するものである。
吸着搬送部５の概略構成は、図２（ａ）、（ｂ）に示すように、スライドガイド９、スライダ１０、昇降機構１１、昇降ベース１２、吸着ベース１３、および吸着ブロック１４からなる。 The suction conveyance unit 5 is disposed along the right side in the conveyance direction of the levitation stage 1A, sucks and holds the back side on the right side in the conveyance direction of the substrate 4 that is levitated and supported on the levitation stage 1A, and urges the conveyance force in the conveyance direction. To do.
As shown in FIGS. 2A and 2B, the schematic configuration of the suction conveyance unit 5 includes a slide guide 9, a slider 10, a lifting mechanism 11, a lifting base 12, a suction base 13, and a suction block 14.

スライドガイド９およびスライダ１０は、スライドガイド９をガイド部材として、スライダ１０を一定の直線上で往復移動せしめる移動機構であり、本実施形態では、リニアモータを採用しているが、ボールネジなどを用いた１軸駆動機構を採用することもできる。
吸着搬送部５のスライドガイド９は、図１に示すように、浮上ステージ１Ａの搬送方向右側に沿って配置され、浮上ステージ１Ａにおける基準位置決め領域Ｐ１の中間部から、浮上ステージ２Ａの上流側の基板受渡し領域Ｐ２の中間部まで延ばされている。 The slide guide 9 and the slider 10 are moving mechanisms that use the slide guide 9 as a guide member to reciprocate the slider 10 on a certain straight line. In this embodiment, a linear motor is used, but a ball screw or the like is used. It is also possible to employ a uniaxial drive mechanism.
Slide guide 9 of the suction conveyance unit 5, as shown in FIG. 1, are arranged along the conveying direction right floating stage 1A, from the middle portion of the reference positioning region P 1 in the floating stage 1A, upstream of the floating stage 2A It is extended to an intermediate portion of the substrate transfer area P 2 in.

昇降機構１１は、スライダ１０上に固定され、基板４を搬送する際に吸着ベース１３を上昇させ、基板４を受渡して、元の位置に戻る際に基板４に干渉しないように下降させるものである。
昇降ベース１２は、昇降機構１１の上端面に設けられた吸着ベース１３を保持する保持部材である。
吸着ベース１３は、複数の吸着ブロック１４を上面側に固定するために設けられた、基板４の搬送方向長さＬよりわずかに短い長さの矩形状の支持部材であり、長手方向が浮上ステージ１Ａの端面に平行となる状態で昇降ベース１２上に固定されている。
吸着ブロック１４は、その上端面で、基板４の搬送方向右側の端部を裏面側から吸着するための吸着パッドであり、各上端面が平面上に整列した状態で、吸着ベース１３上に適宜間隔をあけて複数設けられている。本実施形態では、基板４の搬送方向幅方向の端部の全長Ｌを略等分割する位置に６個設けられ、片側の端部が全体的に吸着されている。
吸着ブロック１４の構成としては、例えば、平面視矩形状の吸着面に凹部１４ａと、この凹部１４ａの中央に、吸引源により真空吸引を行う吸引孔１４ｂが設けられた構成を採用することができる。 The elevating mechanism 11 is fixed on the slider 10, raises the suction base 13 when transporting the substrate 4, delivers the substrate 4, and lowers it so as not to interfere with the substrate 4 when returning to the original position. is there.
The lifting base 12 is a holding member that holds the suction base 13 provided on the upper end surface of the lifting mechanism 11.
The suction base 13 is a rectangular support member having a length slightly shorter than the transport direction length L of the substrate 4 provided to fix the plurality of suction blocks 14 on the upper surface side. It is fixed on the lifting base 12 in a state parallel to the end face of 1A.
The suction block 14 is a suction pad for sucking the end of the substrate 4 on the right side in the transport direction from the back side at the upper end surface, and is appropriately placed on the suction base 13 with the upper end surfaces aligned on a plane. A plurality are provided at intervals. In the present embodiment, six are provided at positions where the entire length L of the end portion of the substrate 4 in the width direction of the substrate 4 is substantially equally divided, and one end portion is adsorbed as a whole.
As the configuration of the suction block 14, for example, a configuration in which a suction surface 14 b that performs vacuum suction by a suction source at the center of the recess 14 a and a recess 14 a in a rectangular suction surface in plan view can be employed. .

検査部２は、基板搬入部１から搬送された基板４を検査し、基板搬出部３に受け渡すものである。
検査部２は、不図示のベース上に固定された門型のガントリー２ａと、このガントリー２ａの水平アームに移動可能に設けられた顕微鏡等の検査ヘッド２ｂと、浮上ステージ２Ａおよび吸着搬送部６からなる。検査部２は、検査時に外部振動の影響を受けないように、除振台上に設置されることが好ましい。 The inspection unit 2 inspects the substrate 4 conveyed from the substrate carry-in unit 1 and delivers it to the substrate carry-out unit 3.
The inspection unit 2 includes a portal gantry 2a fixed on a base (not shown), an inspection head 2b such as a microscope movably provided on a horizontal arm of the gantry 2a, a floating stage 2A, and a suction conveyance unit 6. Consists of. The inspection unit 2 is preferably installed on a vibration isolation table so as not to be affected by external vibration during inspection.

浮上ステージ２Ａは、基板４を水平方向に載置して一定方向に搬送するための搬送ステージであり、本実施形態では、浮上ステージ１Ａと同様のガス浮上ステージを採用している。ただし、検査部２の浮上ステージ２Ａの大きさは、搬送幅方向の幅は浮上ステージ１Ａと同幅としているが、搬送方向の長さは２・Ｌ以上に設定している。そのため、浮上ステージ２Ａの基板受渡し領域Ｐ２の下流側に、検査領域Ｐ３を設ける場合、浮上ステージ２Ａ上の基板受渡し領域Ｐ２で基板４を吸着搬送部５から吸着搬送部６に受渡した状態で、検査ヘッド２ａにより基板４の全面を検査できるように基板４を検査ヘッド２ａの検査ラインに対して搬送方向の先端から後端まで移動させることができる長さが確保されていればよい。
検査部２は、基板４を基板搬入部１から搬入する際、除振台をロックして浮上ステージ２Ａを浮上ステージ１Ａと同高さとすることが好ましい。 The levitation stage 2A is a transport stage for placing the substrate 4 in the horizontal direction and transporting the substrate 4 in a certain direction. In the present embodiment, a gas levitation stage similar to the levitation stage 1A is employed. However, as for the size of the floating stage 2A of the inspection unit 2, the width in the conveyance width direction is the same as that of the floating stage 1A, but the length in the conveyance direction is set to 2 · L or more. Therefore, on the downstream side of the substrate transfer region P 2 of the floating stage 2A, the case of providing the inspection area P 3, was passed to the suction conveyance unit 6 in the substrate transfer region P 2 on the floating stage 2A the substrate 4 from the suction conveyance unit 5 In this state, it is only necessary to ensure that the substrate 4 can be moved from the front end to the rear end in the transport direction with respect to the inspection line of the inspection head 2a so that the entire surface of the substrate 4 can be inspected by the inspection head 2a. .
When the inspection unit 2 carries the substrate 4 from the substrate carry-in unit 1, it is preferable to lock the vibration isolation table so that the levitation stage 2A has the same height as the levitation stage 1A.

吸着搬送部６は、図２（ｂ）に示された吸着搬送部５の構成と同様の構成を備え、図１に示すように、吸着搬送部５と反対側の浮上ステージ２Ａの搬送方向左側に沿って配置され、基準位置に位置決めされた状態で、吸着搬送部５から基板４を受け取って浮上搬送させるものである。
吸着搬送部６は、複数の吸着ブロック１４によって、基板４の搬送方向左側の裏面を吸着し、基板４に搬送力を付勢できるようになっている。
検査部２のスライドガイド９は、図１に示すように浮上ステージ２Ａの搬送方向左側に沿って配置され、浮上ステージ２Ａの上流側が基板受渡し領域Ｐ２の中間部から下流側の基板受渡し領域（検査領域）Ｐ３の中間部まで延ばされている。このスライドガイド９の長さは、隣り合う２つの基板受渡し領域Ｐ２、Ｐ３でスライダ１０が浮上ステージ２Ａの搬送方向長さの範囲を往復移動できる長さであればよく、浮上ステージ２Ａの搬送方向長さと略同じ長さでもよい。
したがって、平面視において、吸着搬送部５のスライドガイド９と、吸着搬送部６のスライドガイド９とが浮上ステージ２Ａを挟んで互いに平行に対向している。対向配置された吸着搬送部５、６は、基板受渡し領域Ｐ２で基板４の受渡しができればスライダ１０が必ずしも基板受渡し領域Ｐ２の中間（Ｌ／２）でなくともよいが、位置決めされた基板を正確、かつ安定に搬送するためにはそれぞれのスライダ１０を基板受渡し領域Ｐ２の中間（Ｌ／２）に移動させるとよい。
本実施形態では、吸着搬送部５で吸着搬送された基板４を浮上ステージ２Ａ上の基板搬送領域Ｐ２で吸着搬送部６に受け渡すことができるように設定する。すなわち、図２に示すように基板４の搬送幅方向の端部全体を、吸着搬送部５の各吸着ブロック１４、吸着搬送部６の各吸着ブロック１４により吸着保持できるようにしているため、吸着搬送部５のスライダ１０の移動範囲を基準位置決め領域Ｐ１と基板受渡し領域Ｐ２のそれぞれの中間位置に設定されている。
同様に吸着搬送部６のスライダ１０の移動範囲は、基板受渡し領域Ｐ２、Ｐ３のそれぞれの中間位置に設定されている。 The suction conveyance unit 6 has the same configuration as that of the adsorption conveyance unit 5 shown in FIG. 2B, and as shown in FIG. 1, the left side in the conveyance direction of the floating stage 2A on the opposite side to the adsorption conveyance unit 5 The substrate 4 is received from the suction conveyance unit 5 and floated and conveyed in a state where the substrate 4 is positioned along the reference position.
The suction transport unit 6 can suck the back surface on the left side in the transport direction of the substrate 4 by a plurality of suction blocks 14 and bias the transport force to the substrate 4.
Slide guide 9 of the inspection unit 2 is disposed along the conveying direction left floating stage 2A as shown in FIG. 1, the upstream side of the substrate transfer region downstream from the intermediate portion of the substrate transfer region P 2 of the floating stage 2A ( are extended to an intermediate portion of the inspection area) P 3. The length of the slide guide 9 may be any length that allows the slider 10 to reciprocate in the transport direction length range of the floating stage 2A in the two adjacent substrate transfer areas P 2 and P 3 . The length may be substantially the same as the length in the transport direction.
Accordingly, in plan view, the slide guide 9 of the suction conveyance unit 5 and the slide guide 9 of the suction conveyance unit 6 face each other in parallel with the levitation stage 2A interposed therebetween. Substrate suction conveying portion 5, 6 arranged opposite may but need not an intermediate substrate transfer region P 2 in the slider 10 is always the substrate transfer region P 2 if delivery is possible for the substrate 4 (L / 2), which is positioned accurate, and may for carrying stably moves the respective slider 10 to the intermediate (L / 2) of the substrate transfer region P 2.
In this embodiment, set to be able to pass the suction conveyance unit 6 substrate 4 adsorbed conveyed by the suction conveyance unit 5 in the substrate transfer region P 2 on the floating stage 2A. That is, as shown in FIG. 2, the entire end of the substrate 4 in the conveyance width direction can be adsorbed and held by each adsorption block 14 of the adsorption conveyance unit 5 and each adsorption block 14 of the adsorption conveyance unit 6. It is set the moving range of the slider 10 of the transport unit 5 to the respective intermediate positions of the reference positioning region P 1 and the substrate transfer region P 2.
Similarly, the movement range of the slider 10 of the suction conveyance unit 6 is set to an intermediate position between the substrate delivery areas P 2 and P 3 .

基板搬出部３は、検査部２での検査が終了した基板４を、例えば搬送ロボットにより装置外部に搬出するためのものであり、浮上ステージ３Ａと吸着搬送部７とを備える。
浮上ステージ３Ａ、吸着搬送部７は、それぞれ、浮上ステージ１Ａ、吸着搬送部５と同様な構成を備え、吸着搬送部６と反対側の浮上ステージ３Ａの搬送方向右側に沿って配置されている。ただし、吸着搬送部７のスライドガイド９は、浮上ステージ２Ａの下流側の基板受渡し領域Ｐ３の中間部から浮上ステージ３Ａの基板搬出領域Ｐ４の中間部まで延出されている。
したがって、吸着搬送部６のスライドガイド９と、吸着搬送部７のスライドガイド９とのそれぞれの一部が浮上ステージ２Ａの基板受渡し領域Ｐ３を挟んで互いに平行に対向しているため、吸着搬送部６で吸着搬送された基板４を浮上ステージ２Ａの上流側の浮上ステージ３Ａに隣接する基板受渡し領域Ｐ３で吸着搬送部７に受け渡すことができるようになっている。 The substrate carry-out unit 3 is for carrying out the substrate 4 that has been inspected by the inspection unit 2 to the outside of the apparatus by, for example, a transfer robot, and includes a levitation stage 3 </ b> A and an adsorption transfer unit 7.
The levitation stage 3A and the suction conveyance unit 7 have the same configuration as the levitation stage 1A and the adsorption conveyance unit 5, respectively, and are arranged along the right side in the conveyance direction of the levitation stage 3A opposite to the adsorption conveyance unit 6. However, the slide guide 9 of the suction conveyance unit 7 is extended from the middle portion of the substrate transfer region P 3 on the downstream side of the floating stage 2A to the intermediate portion of the substrate carry-out area P 4 of the floating stage 3A.
Therefore, since the slide guide 9 of the suction conveyance unit 6, are opposed in parallel to each other, each part across the substrate transfer region P 3 of the floating stage 2A of the slide guide 9 of the suction conveyance unit 7, the suction conveyor and it can now be passed to the suction conveyance unit 7 in the substrate transfer region P 3 adjacent the substrates 4 adsorbed transported to floating stage 3A upstream of the floating stage 2A in parts 6.

このように、本実施形態の基板検査装置１００では、浮上ステージ１Ａ、２Ａ、３Ａが、搬送方向に順次隣接して延ばされ、その搬送方向の左右に、吸着搬送部５、６、７が千鳥状に配置することにより、浮上ステージ１Ａと浮上ステージ２Ａ、浮上ステージ２Ａと浮上ステージ３Ａとの間で基板４の受渡しを行うそれぞれの基板受渡し領域Ｐ２、Ｐ３で基板受渡し位置となる位置決めされた基板４を吸着搬送部５から吸着搬送部６へ、また、吸着搬送部６から吸着搬送部７へそれぞれ順次受け渡して搬送することができる構成となっている。 As described above, in the substrate inspection apparatus 100 according to the present embodiment, the floating stages 1A, 2A, and 3A are sequentially extended adjacent to each other in the transport direction, and the suction transport units 5, 6, and 7 are provided on the left and right sides of the transport direction. By arranging in a staggered manner, the substrate transfer positions P 2 and P 3 for transferring the substrate 4 between the levitation stage 1A and the levitation stage 2A and between the levitation stage 2A and the levitation stage 3A are positioned as substrate transfer positions. The substrate 4 thus formed can be sequentially transferred and transferred from the suction transfer unit 5 to the suction transfer unit 6 and from the suction transfer unit 6 to the suction transfer unit 7.

次に、本実施形態の基板検査装置１００の動作について、基板４の搬送動作を中心に説明する。
図３、４は、本発明の第１の実施形態に係る基板検査装置の動作について説明する平面図である。 Next, the operation of the substrate inspection apparatus 100 of this embodiment will be described focusing on the transfer operation of the substrate 4.
3 and 4 are plan views for explaining the operation of the substrate inspection apparatus according to the first embodiment of the present invention.

まず、図１の図示左端側に示すように、吸着搬送部５のスライダ１０を搬送開始側に移動させる。このとき、昇降機構１１の高さを調整し、吸着ブロック１４の上端面が、基板４の裏面の浮上高さより低い状態にしておく。
そして、不図示の搬送ロボットなどによって、検査を行う基板４を浮上ステージ１Ａ上より突出したリフタの各リフトピン上に移載する。リフタは、搬送ロボットから基板４を受け取った後、下降して基板４を浮上ステージ１Ａ上に載置する。浮上ステージ１Ａ上に移載された基板４は浮上ステージ１Ａから上方に噴射されるエアにより所定高さに浮上される。 First, as shown on the left end side in FIG. 1, the slider 10 of the suction conveyance unit 5 is moved to the conveyance start side. At this time, the height of the lifting mechanism 11 is adjusted so that the upper end surface of the suction block 14 is lower than the flying height of the back surface of the substrate 4.
Then, the substrate 4 to be inspected is transferred onto each lift pin of the lifter protruding from the floating stage 1A by a transfer robot (not shown). After receiving the substrate 4 from the transfer robot, the lifter descends and places the substrate 4 on the floating stage 1A. The substrate 4 transferred onto the levitation stage 1A is levitated to a predetermined height by the air jetted upward from the levitation stage 1A.

次に、押付けピン８ｃ、８ｃを移動して、浮上状態の基板４を基準ピン８ａ、８ａ、８ｂに押し付けて基準位置に位置決めを行う。
これらの動作により、浮上ステージ１Ａ上に浮上した基板４の２辺が基準ピン８ａ、８ａ、８ｂに押し付けられることで、平面視の位置が搬送幅方向、搬送方向の基準位置に対してそれぞれ位置決めされる。基板４は、浮上ステージ１Ａ上に浮上されているので、平面方向の移動が自由となっており、基板４のサイズが大きくてもわずかの負荷で移動できる（図１左端側参照）。 Next, the pressing pins 8c and 8c are moved, and the substrate 4 in a floating state is pressed against the reference pins 8a, 8a and 8b to be positioned at the reference position.
By these operations, the two sides of the substrate 4 that has floated on the floating stage 1A are pressed against the reference pins 8a, 8a, and 8b, so that the position in plan view is positioned with respect to the reference position in the transport width direction and the transport direction, respectively. Is done. Since the substrate 4 is levitated on the levitation stage 1A, the movement in the plane direction is free, and even if the size of the substrate 4 is large, it can be moved with a slight load (see the left end side in FIG. 1).

この状態で、昇降機構１１を駆動して、吸着ブロック１４を基板４の裏面の高さまで上昇させ、基板４を真空吸着する（図２（ａ）参照）。
真空吸着が完了した後、基準ピン８ｂを下降あるいは退避させる。
そして、吸着搬送部５のスライダ１０を搬送方向に移動し、基板４を検査部２の基板受渡し領域Ｐ２まで搬送する。
このとき、吸着搬送部６のスライダ１０は、昇降機構１１を下降させ、吸着ブロック１４の上端面が、基板４の裏面の高さより低くなるようにして、浮上ステージ１Ａの基板受渡し領域Ｐ２まで移動し待機する（図３参照）。 In this state, the elevating mechanism 11 is driven to raise the suction block 14 to the height of the back surface of the substrate 4 and vacuum-suck the substrate 4 (see FIG. 2A).
After the vacuum suction is completed, the reference pin 8b is lowered or retracted.
Then, the slider 10 of the suction conveyance unit 5 is moved in the transport direction, to transport the substrate 4 to the substrate transfer region P 2 of the inspection unit 2.
At this time, the slider 10 of the suction conveyance unit 6, the lifting mechanism 11 is lowered, the upper end surface of the suction block 14, so as to be lower than the height of the back surface of the substrate 4, to the substrate transfer region P 2 of the floating stage 1A Move and wait (see FIG. 3).

この結果、図３に示すように、浮上ステージ２Ａ上の基板受渡し領域Ｐ２に移動した基板４の下面には、吸着搬送部５、６の各スライダ１０が、互いに対向する位置に配置される。この状態で、吸着搬送部６の吸着ブロック１４の上端面が基板４の裏面に当接するまで昇降機構１１を上昇させる。そして基板４を吸着搬送部５の吸着ブロック１４で吸着保持した状態で、吸着搬送部６により真空吸着する。このとき、搬送幅方向に対向する基板４の端部がそれぞれ吸着搬送部５、６の各吸着ブロック１４により略全長にわたって吸着保持されている。
吸着終了後、吸着搬送部５の吸着を解除し、吸着搬送部５の昇降機構１１を下降させる。吸着搬送部５は、基板搬入部１の基板位置決め領域Ｐ１に移動され、上記の搬送開始時の状態に復帰し、次の基板４を搬送に備える。
これにより、基板位置決め機構で位置決めされた基板４は、位置決めされた状態で搬送方向右側の吸着搬送部５から、搬送方向左側の吸着搬送部６に受け渡される。
このように、吸着搬送部５により搬送された基板４の反対側を吸着搬送部６で吸着保持した状態で吸着搬送部５の吸着を解除することにより、基板４の平面方向の基準位置は不変であり、基板４は基板位置決め機構により基準位置が維持された状態で対向する吸着搬送部６に受け渡すことができる。 As a result, as shown in FIG. 3, the lower surface of the substrate 4 which has moved to the substrate transfer region P 2 on the floating stage. 2A, each slider 10 of the suction conveyance unit 5,6 is arranged in a position facing each other . In this state, the elevating mechanism 11 is raised until the upper end surface of the suction block 14 of the suction transport unit 6 contacts the back surface of the substrate 4. Then, the substrate 4 is vacuum-sucked by the suction transport unit 6 while being sucked and held by the suction block 14 of the suction transport unit 5. At this time, the end portions of the substrate 4 facing in the transport width direction are sucked and held over substantially the entire length by the suction blocks 14 of the suction transport portions 5 and 6, respectively.
After completion of the adsorption, the adsorption of the adsorption conveyance unit 5 is released, and the lifting mechanism 11 of the adsorption conveyance unit 5 is lowered. Suction conveyance unit 5 is moved to the board positioning areas P 1 of the substrate carry-in section 1, returns to the state of the transport starting above comprises the following substrate 4 to the transport.
Thereby, the substrate 4 positioned by the substrate positioning mechanism is transferred from the suction conveyance unit 5 on the right side in the conveyance direction to the suction conveyance unit 6 on the left side in the conveyance direction in a positioned state.
Thus, the reference position in the plane direction of the substrate 4 remains unchanged by releasing the suction of the suction transport unit 5 while the suction transport unit 6 sucks and holds the opposite side of the substrate 4 transported by the suction transport unit 5. Thus, the substrate 4 can be transferred to the opposite suction conveyance unit 6 while the reference position is maintained by the substrate positioning mechanism.

次に、吸着搬送部６のスライダ１０を検査領域Ｐ３に移動し、浮上ステージ２Ａ上において、浮上ステージ３Ａ側に向けて基板４を搬送する（図４参照）。このとき、検査部２での検査の必要に応じて予め設定された一定速度で搬送したり、所定の速度変化をつけて搬送したり、所定の位置移動を行って搬送したりする。本実施形態では、基板４上の各欠陥の座標データに基づいて、指定された欠陥が検査ヘッド２ｂの検査ラインに一致するように基板４を搬送して停止させるとともに、検査ヘッド２ｂの光軸が欠陥に一致するように検査ヘッド２ｂをガントリー２ａに沿って移動させる。このようにして基板４と検査ヘッド２ｂを相対的にＸＹ移動させることで基板４の任意の位置を検査することができる。
このとき、吸着搬送部７のスライダ１０は、昇降機構１１を下降させ、吸着ブロック１４の上端面が、基板４の裏面の高さより低くなるようにして、浮上ステージ２Ａの基板受渡し領域Ｐ３まで移動し待機する。
そして、基板４が浮上ステージ２Ａの搬送方向の端部に移動されると、基板４の下面には、吸着搬送部６、７のスライダ１０が対向して配置される。この状態で、吸着搬送部７の昇降機構１１を駆動し、吸着搬送部７の吸着ブロック１４の上端面が基板４の裏面に当接するまで上昇させる。そして基板４を吸着搬送部６の吸着ブロック１４で吸着保持した状態で吸着搬送部７により真空吸着する。このとき、搬送幅方向に対向する基板４の端部がそれぞれ吸着搬送部６、７の各吸着ブロック１４により略全長にわたって吸着保持されている。
吸着搬送部７の吸着終了後、吸着搬送部６の吸着を解除し、吸着搬送部６の昇降機構１１を下降させる。吸着搬送部６は、基板位置決め領域Ｐ１に移動され、上記の基板受け取り時の状態に復帰し、次の基板４の受け取りに備える。 Next, move the slider 10 of the suction conveyance unit 6 to the inspection area P 3, on the floating stage 2A, transports the substrate 4 toward the floating stage 3A side (see FIG. 4). At this time, it is transported at a predetermined constant speed according to the necessity of inspection in the inspection unit 2, transported with a predetermined speed change, or transported with a predetermined position movement. In the present embodiment, based on the coordinate data of each defect on the substrate 4, the substrate 4 is transported and stopped so that the designated defect coincides with the inspection line of the inspection head 2b, and the optical axis of the inspection head 2b. The inspection head 2b is moved along the gantry 2a so as to match the defect. Thus, the arbitrary position of the board | substrate 4 can be test | inspected by XY-moving the board | substrate 4 and the test | inspection head 2b relatively.
At this time, the slider 10 of the suction conveyance unit 7, the lifting mechanism 11 is lowered, the upper end surface of the suction block 14, so as to be lower than the height of the back surface of the substrate 4, to the substrate transfer region P 3 of the floating stage 2A Move and wait.
Then, when the substrate 4 is moved to the end of the floating stage 2 </ b> A in the transport direction, the sliders 10 of the suction transport units 6 and 7 are disposed to face the lower surface of the substrate 4. In this state, the lifting / lowering mechanism 11 of the suction conveyance unit 7 is driven and raised until the upper end surface of the suction block 14 of the suction conveyance unit 7 contacts the back surface of the substrate 4. Then, the substrate 4 is vacuum-sucked by the suction transport unit 7 while being sucked and held by the suction block 14 of the suction transport unit 6. At this time, the end portions of the substrate 4 facing in the transport width direction are sucked and held over substantially the entire length by the suction blocks 14 of the suction transport portions 6 and 7, respectively.
After the adsorption of the suction conveyance unit 7 is finished, the adsorption of the adsorption conveyance unit 6 is released, and the elevating mechanism 11 of the adsorption conveyance unit 6 is lowered. Suction conveyance unit 6 is moved to the board positioning areas P 1, then return to the state at the time of the above substrate receiving comprises the receipt of the next board 4.

次に、吸着搬送部７のスライダ１０を移動して、基板４を浮上ステージ３Ａ上に搬送する。そして、不図示の搬送ロボットなどに基板４を受け渡すとともに、吸着搬送部７の吸着を解除し、次の基板４を受け取るため、吸着搬送部７のスライダ１０を基板受渡し領域Ｐ３に復帰させる。
このようにして、基板４の受入、検査、搬出が終了する。 Next, the slider 10 of the suction conveyance unit 7 is moved to convey the substrate 4 onto the floating stage 3A. Then, the substrate 4 is delivered to a transport robot (not shown), the suction of the suction transport unit 7 is released, and the slider 10 of the suction transport unit 7 is returned to the substrate delivery region P 3 in order to receive the next substrate 4. .
In this way, the reception, inspection and unloading of the substrate 4 are completed.

このように、本実施形態の基板検査装置１００によれば、基板４の搬送幅方向の片方の端部を吸着搬送部５、６、７によりそれぞれ保持して、基板４を浮上ステージ１Ａ、２Ａ、３Ａ上を順次搬送することができる。このように片側搬送を行うことにより、基板４の搬送時には、吸着搬送部５、６、７により基板４の一方端部のみが吸着保持されるため、両側を保持して搬送する場合のようなストレスを基板４に与えなくて済むので、検査時に基板４が歪んだり、たわんだりしないようにして、搬送することができる。
また、各片側搬送部の配置精度を緩くしたり、必要に応じて、搬送方向を搬送ステージごとに切り替えたりすることが可能となる。
また、浮上ステージ１Ａから浮上ステージ２Ａへの移行、浮上ステージ２Ａから浮上ステージ３Ａへの移行する際に、浮上ステージ２Ａの基板受渡し領域Ｐ２、Ｐ３に基板４を配置した状態で、吸着搬送部５、６、および吸着搬送部６、７により搬送幅方向の両端部を吸着して、基板４の受け渡しを行うため、浮上ステージ１Ａ上で位置決めした状態を維持して搬送することができる。これにより受け渡しのたびに位置調整などを行う手間を省くことができ、基板検査装置１００の調整機構を簡素化することができるとともに、検査効率を向上することができる。
また、基板４の位置決め状態を維持しながら基板搬出領域Ｐ４まで搬送できるため、基板４を搬送ロボットに正確に受け渡すことができるため、搬送ロボットにより基板４がカセットの側壁にぶつかることなく基板４をカセット内に搬送することができる。 As described above, according to the substrate inspection apparatus 100 of the present embodiment, one end of the substrate 4 in the conveyance width direction is held by the adsorption conveyance units 5, 6, and 7, respectively, and the substrate 4 is floated on the levitation stages 1A and 2A. 3A can be sequentially conveyed. By carrying one side in this way, only one end of the substrate 4 is sucked and held by the sucking and transporting parts 5, 6 and 7 when the substrate 4 is transported. Since it is not necessary to apply stress to the substrate 4, the substrate 4 can be transported without being distorted or bent during inspection.
In addition, it is possible to loosen the placement accuracy of each one-side transport unit, or to switch the transport direction for each transport stage as necessary.
Further, when transferring from the levitation stage 1A to the levitation stage 2A and from the levitation stage 2A to the levitation stage 3A, the substrate 4 is placed in the substrate transfer areas P 2 and P 3 of the levitation stage 2A and sucked and transferred. Since both the end portions in the transport width direction are sucked by the sections 5 and 6 and the suction transport sections 6 and 7 and the substrate 4 is transferred, the transported state can be maintained while being maintained on the floating stage 1A. Thereby, it is possible to save the trouble of performing position adjustment at every delivery, simplify the adjustment mechanism of the substrate inspection apparatus 100, and improve the inspection efficiency.
The substrate without order to be transported to the substrate carry-out area P 4 while maintaining the positioning of the substrate 4, since the substrate 4 can be passed precisely to the transport robot, which by the transfer robot substrate 4 hits the side wall of the cassette 4 can be transported into the cassette.

次に、本実施形態の変形例について説明する。
図５は、本発明の第１の実施形態の変形例の基板検査装置の概略構成を示す平面図である。 Next, a modification of this embodiment will be described.
FIG. 5 is a plan view showing a schematic configuration of a substrate inspection apparatus according to a modification of the first embodiment of the present invention.

本変形例の基板検査装置１１０は、図５に示すように、上記第１の実施形態の基板検査装置１００の吸着搬送部５、７に代えて、吸着搬送部１５（片側搬送部）を備えたものである。以下、上記第１の実施形態と異なる点を中心に説明する。
吸着搬送部１５は、吸着搬送部５のスライドガイド９を、吸着搬送部７のスライドガイド９の位置まで延長したスライドガイド１６に代えるとともに、吸着搬送部５のスライダ１０に代えて、同様の構成からなる２つのスライダ１０Ａ、１０Ｂをスライドガイド１６上で移動可能に設けたものである。
なお、スライダ１０Ａ、１０Ｂの上部には、図２（ｂ）に示すように、昇降機構１１、昇降ベース１２、吸着ベース１３、および吸着ブロック１４を備える。
すなわち、上記第１の実施形態の吸着搬送部５、７をそれぞれのスライドガイド９を接続して一体化した場合の構成に相当している。 As shown in FIG. 5, the substrate inspection apparatus 110 according to this modification includes a suction conveyance unit 15 (one-side conveyance unit) instead of the adsorption conveyance units 5 and 7 of the substrate inspection apparatus 100 of the first embodiment. It is a thing. Hereinafter, a description will be given centering on differences from the first embodiment.
The suction conveyance unit 15 replaces the slide guide 9 of the suction conveyance unit 5 with a slide guide 16 extended to the position of the slide guide 9 of the adsorption conveyance unit 7 and replaces the slider 10 of the adsorption conveyance unit 5 with the same configuration. These two sliders 10A and 10B are provided so as to be movable on the slide guide 16.
As shown in FIG. 2B, the sliders 10A and 10B are provided with a lifting mechanism 11, a lifting base 12, a suction base 13, and a suction block 14, as shown in FIG.
That is, this corresponds to a configuration in which the suction conveyance units 5 and 7 of the first embodiment are integrated by connecting the respective slide guides 9.

本変形例の基板検査装置１１０によれば、上記第１の実施形態の吸着搬送部５のスライダ１０と、吸着搬送部６のスライダ１０とを、それぞれ吸着搬送部１５のスライダ１０Ａ、１０Ｂに代えることにより、まったく同様の動作を行うことができる。そのため、上記第１の実施形態と同様の作用効果を備える。
さらに、本変形例によれば、吸着搬送部５、７が吸着搬送部１５として一体化されるので、部品点数を低減することができる。また、スライダ１０Ａ、１０Ｂが、浮上ステージ２Ａ側の任意の位置に移動することができるので、基板４の長さＬが変わった場合でも容易に対応できるとともに、浮上ステージ２Ａの基板受渡し領域Ｐ２、Ｐ３の位置を容易に変更することができるという利点がある。 According to the substrate inspection apparatus 110 of this modification, the slider 10 of the suction conveyance unit 5 and the slider 10 of the suction conveyance unit 6 of the first embodiment are replaced with the sliders 10A and 10B of the adsorption conveyance unit 15, respectively. Therefore, the same operation can be performed. For this reason, the same operational effects as those of the first embodiment are provided.
Furthermore, according to this modification, the suction conveyance units 5 and 7 are integrated as the suction conveyance unit 15, so that the number of parts can be reduced. Further, since the sliders 10A and 10B can be moved to any position on the floating stage 2A side, it is possible to easily cope with the case where the length L of the substrate 4 is changed, and the substrate delivery region P 2 of the floating stage 2A. , P 3 can be easily changed.

［第２の実施形態］
本発明の第２の実施形態に係る基板検査装置について説明する。
図６は、本発明の第２の実施形態に係る基板検査装置の概略構成を示す平面図である。 [Second Embodiment]
A substrate inspection apparatus according to a second embodiment of the present invention will be described.
FIG. 6 is a plan view showing a schematic configuration of a substrate inspection apparatus according to the second embodiment of the present invention.

本実施形態の基板検査装置１２０は、図６に示すように、上記第１の実施形態の基板検査装置１００の吸着搬送部５、６に代えて、吸着搬送部１７、１９（片側搬送部）を備え、吸着搬送部７を削除したものである。以下、上記第１の実施形態と異なる点を中心に説明する。
吸着搬送部１７は、基板検査装置１００の吸着搬送部５のスライドガイド９を浮上ステージ２Ａ側に延長し、浮上ステージ２Ａの搬送方向の略全長の範囲で、スライダ１０を移動できるようにしたスライドガイド１８に代えたものである。
吸着搬送部１９は、吸着搬送部６のスライドガイド９を浮上ステージ３Ａ側に延長し、吸着搬送部７のスライドガイド９の可動範囲に、スライダ１０を移動できるようにしたものである。 As shown in FIG. 6, the substrate inspection apparatus 120 of this embodiment replaces the suction conveyance sections 5 and 6 of the substrate inspection apparatus 100 of the first embodiment with suction conveyance sections 17 and 19 (one-side conveyance sections). And the suction conveyance unit 7 is deleted. Hereinafter, a description will be given centering on differences from the first embodiment.
The suction conveyance unit 17 extends the slide guide 9 of the suction conveyance unit 5 of the substrate inspection apparatus 100 to the floating stage 2A side, and slides the slider 10 so that it can move within a substantially full length range in the conveyance direction of the floating stage 2A. Instead of the guide 18.
The suction conveyance unit 19 extends the slide guide 9 of the suction conveyance unit 6 toward the floating stage 3 </ b> A so that the slider 10 can be moved within the movable range of the slide guide 9 of the adsorption conveyance unit 7.

このような構成により、吸着搬送部１７により基板搬入部１と検査部２との範囲で、また、吸着搬送部１９により検査部２と基板搬出部３との範囲で、それぞれ基板４を搬送することができる。そして、吸着搬送部１７、１９の搬送範囲が共有される浮上ステージ２Ａ上の任意の位置で、基板４を吸着搬送部１７から吸着搬送部１９に受け渡すことができる。すなわち、浮上ステージ２Ａ上の受け渡し位置は、浮上ステージ２Ａの浮上ステージ１Ａ側、浮上ステージ３Ａ側、あるいは、それらの中間位置など任意の位置に、必要に応じて選択することができる。   With such a configuration, the substrate 4 is transported in the range between the substrate carry-in unit 1 and the inspection unit 2 by the suction transport unit 17 and in the range between the inspection unit 2 and the substrate carry-out unit 3 by the suction transport unit 19. be able to. The substrate 4 can be transferred from the suction transport unit 17 to the suction transport unit 19 at an arbitrary position on the floating stage 2A where the transport ranges of the suction transport units 17 and 19 are shared. That is, the delivery position on the levitation stage 2A can be selected as necessary at any position such as the levitation stage 1A side, the levitation stage 3A side, or an intermediate position thereof.

このように、本実施形態は、３つの搬送ステージに対して、２つの片側搬送部を配置することにより、各片側搬送部の間で基板を受け渡して搬送する構成を実現した例となっている。これは、本発明において、３つの搬送ステージに対して最小限の片側搬送部を備える構成例である。
本実施形態によれば、片側搬送部の数を第１の実施形態に比べて低減することができる。
また、本実施形態では、吸着搬送部１７、１９が、浮上ステージ２Ａの搬送方向の略全長の搬送範囲を共有しているため、検査部２内で、吸着保持する端部を左右交代させることができる。そのため、例えば、吸着ブロック１４が検査の障害となるような検査、例えば、図１に示すように検査ヘッド２ｂを基板４の搬送幅方向に走査する場合あっても、検査ヘッド２ｂが基板４を吸着保持している側の吸着ブロック１４と干渉する場合には、反対側の吸着ブロック１４により基板４を持ち替えることにより、それぞれの端部での検査が可能となる。 As described above, the present embodiment is an example of realizing a configuration in which a substrate is transferred and transferred between each one-side transfer unit by arranging two one-side transfer units with respect to three transfer stages. . This is an example of a configuration in which the minimum one-side transport unit is provided for three transport stages in the present invention.
According to the present embodiment, the number of one-side transport units can be reduced compared to the first embodiment.
Moreover, in this embodiment, since the adsorption conveyance parts 17 and 19 share the conveyance range of the substantially full length of the conveyance direction of the levitation | floating stage 2A, the edge part which carries out adsorption | suction holding in the inspection part 2 is changed right and left. Can do. For this reason, for example, even if the suction block 14 becomes an obstacle to the inspection, for example, when the inspection head 2b is scanned in the conveyance width direction of the substrate 4 as shown in FIG. In the case of interference with the suction block 14 on the suction holding side, the inspection can be performed at each end by changing the substrate 4 with the suction block 14 on the opposite side.

［第３の実施形態］
本発明の第３の実施形態に係る基板検査装置について説明する。
図７は、本発明の第３の実施形態に係る基板検査装置の概略構成を示す平面図である。 [Third Embodiment]
A substrate inspection apparatus according to a third embodiment of the present invention will be described.
FIG. 7 is a plan view showing a schematic configuration of a substrate inspection apparatus according to the third embodiment of the present invention.

本実施形態の基板検査装置１３０は、図７に示すように、上記第１の実施形態の基板検査装置１００の検査部２に代えて、検査部２ａ、２ｂを複数備え、それに応じて吸着搬送部６に代えて吸着搬送部６ａ、６ｂ（片側搬送部）を複数備え、さらに各検査部２ａ、２ｂの間に吸着搬送部７０（片側搬送部）を追加したものである。以下、上記第１の実施形態と異なる点を中心に説明する。   As shown in FIG. 7, the substrate inspection apparatus 130 of the present embodiment includes a plurality of inspection units 2 a and 2 b instead of the inspection unit 2 of the substrate inspection apparatus 100 of the first embodiment, and sucks and conveys accordingly. Instead of the unit 6, a plurality of suction conveyance units 6a and 6b (single-side conveyance units) are provided, and a suction conveyance unit 70 (single-side conveyance unit) is added between the inspection units 2a and 2b. Hereinafter, a description will be given centering on differences from the first embodiment.

検査部２ａ、２ｂは、それぞれ異なる検査を行うためのもので、特に図示しないが、それぞれの検査に応じて異なる検査部分を備える。検査部分以外の構成は、検査部２ａは、浮上ステージ２Ａと吸着搬送部６ａ、検査部２ｂは、浮上ステージ２Ａと吸着搬送部６ｂとを備える。
そして、基板搬入部１と検査部２ａの隣接位置近傍では、第１の実施形態と同様の位置関係に吸着搬送部５が配置されている。
また、吸着搬送部７０のスライドガイドは、検査部２ａ、２ｂの隣接する検査領域Ｐ３と基板受渡し領域Ｐ２の中間部まで延出されている。吸着搬送部７０の構成は、スライドガイド９０の長さが異なるのみで、他の構成は吸着搬送部７と同様である。
また、検査部２ｂと基板搬出部３との隣接位置近傍では、第１の実施形態と同様の位置関係に吸着搬送部７が配置されている。 The inspection units 2a and 2b are for performing different inspections, and are not particularly illustrated, but include different inspection portions according to the respective inspections. As for the configuration other than the inspection part, the inspection unit 2a includes the levitation stage 2A and the suction conveyance unit 6a, and the inspection unit 2b includes the levitation stage 2A and the adsorption conveyance unit 6b.
In the vicinity of the adjacent position between the substrate carry-in unit 1 and the inspection unit 2a, the suction conveyance unit 5 is arranged in the same positional relationship as in the first embodiment.
Further, the slide guide of the suction conveyance unit 70 extends to an intermediate portion between the inspection region P3 and the substrate delivery region P2 adjacent to the inspection units 2a and 2b. The configuration of the suction conveyance unit 70 is the same as that of the suction conveyance unit 7 except that the length of the slide guide 90 is different.
Further, in the vicinity of the adjacent position between the inspection unit 2b and the substrate carry-out unit 3, the suction conveyance unit 7 is arranged in the same positional relationship as in the first embodiment.

このような構成により、第１の実施形態と同様にして、基板搬入部１で位置決めされた基板４を吸着搬送部６ａに受け渡すことができる。そして、検査部２ａでの検査後、吸着搬送部６ａと吸着搬送部７０との間で搬送範囲が共有された浮上ステージ２Ａの検査領域Ｐ３で、基板４を吸着搬送部７０に受け渡すことができる。
吸着搬送部７０に吸着保持された基板４は、同様にして、隣の検査部２ｂの基板受渡し領域Ｐ２まで搬送され、吸着搬送部６ｂに基板を受け渡すことができる。
そして、検査部２ｂで検査終了した基板４は、吸着搬送部６ａにより、下流側の基板受渡し領域Ｐ３に搬送され、この基板受渡し領域Ｐ３で、基板４を吸着搬送部７に受け渡し、基板搬出部３の吸着搬送部７により基板搬出領域Ｐ４まで搬送して図示しない搬送ロボットにより装置外部に搬送することができる。 With such a configuration, the substrate 4 positioned by the substrate carry-in unit 1 can be transferred to the suction conveyance unit 6a in the same manner as in the first embodiment. Then, after the inspection of the inspection portion 2a, in the inspection area P 3 of the floating stage 2A in which the transport range is shared between the suction conveyance unit 70 and the suction transport unit 6a, by passing the substrate 4 receives the suction conveyance unit 70 Can do.
Substrate 4 held by suction to the suction conveyance unit 70, similarly, is transported to the substrate transfer region P 2 of the next inspection unit 2b, it is possible to pass the substrate to the suction conveying portion 6b.
The transfer substrate 4 examined terminated by the inspection unit 2b, the suction conveying portion 6a, is transported to the substrate transfer region P 3 on the downstream side, in the substrate transfer region P 3, the substrate 4 to the suction conveyance unit 7, the substrate It can be carried to the substrate carry-out area P 4 by the suction carrying part 7 of the carry-out part 3 and carried outside the apparatus by a carrying robot (not shown).

このように、本実施形態は、検査部を複数設けた場合の例となっている。このように、本発明では、基板搬入部１と基板搬出部３との間に、複数の検査部２を増設することができる。
したがって、それぞれの搬送ステージ、片側搬送部の搬送距離が短くても、それらを隣接して配列することで、全体の搬送距離を伸ばすことができる。 Thus, this embodiment is an example when a plurality of inspection units are provided. Thus, in the present invention, a plurality of inspection units 2 can be added between the substrate carry-in unit 1 and the substrate carry-out unit 3.
Therefore, even if the transport distances of the respective transport stages and the one-side transport unit are short, the entire transport distance can be extended by arranging them adjacent to each other.

［第４の実施形態］
本発明の第４の実施形態に係る基板検査装置について説明する。
図８は、本発明の第４の実施形態に係る基板検査装置の概略構成を示す平面図である。 [Fourth Embodiment]
A substrate inspection apparatus according to a fourth embodiment of the present invention will be described.
FIG. 8 is a plan view showing a schematic configuration of a substrate inspection apparatus according to the fourth embodiment of the present invention.

本実施形態の基板検査装置１４０は、図８に示すように、上記第１の実施形態の基板検査装置１００の浮上ステージ１Ａ、２Ａ、３Ａに代えて、ローラステージ１Ｂ、２Ｂ、３Ｂ（搬送ステージ）を備えるものである。以下、上記第１の実施形態と異なる点を中心に説明する。   As shown in FIG. 8, the substrate inspection apparatus 140 of the present embodiment replaces the floating stages 1A, 2A, 3A of the substrate inspection apparatus 100 of the first embodiment with roller stages 1B, 2B, 3B (conveyance stage). ). Hereinafter, a description will be given centering on differences from the first embodiment.

ローラステージ１Ｂ、２Ｂ、３Ｂは、平面視でそれぞれ浮上ステージ１Ａ、２Ａ、２Ｂと同様大きさの矩形状のステージ面上に、一定高さで基板４を水平方向に搬送する搬送ローラ３０が適宜間隔で多数配列されたものである。
搬送ローラ３０としては、例えば、ローラステージ１Ｂ、２Ｂ、３Ｂの水平面内で３６０°方向に回転自在に支持された円筒ローラや、球状のローラなどを採用することができる。
このような構成によれば、基板４が、搬送ローラ３０上でローラ搬送される点を除いて、上記第１の実施形態と同様の動作を行うことができるので、上記第１の実施形態と同様の作用効果を有する。 The roller stages 1B, 2B, and 3B are appropriately provided with a transport roller 30 that transports the substrate 4 in a horizontal direction at a fixed height on a rectangular stage surface having the same size as the floating stages 1A, 2A, and 2B in plan view. Many are arranged at intervals.
As the transport roller 30, for example, a cylindrical roller or a spherical roller that is rotatably supported in a 360 ° direction within the horizontal plane of the roller stages 1B, 2B, and 3B can be employed.
According to such a configuration, the same operation as in the first embodiment can be performed except that the substrate 4 is roller-conveyed on the conveyance roller 30. It has the same effect.

なお、上記の説明では、搬送ステージが複数隣接して配置された場合の例で説明したが、１つの搬送ステージが搬送方向に延設され、複数の片側搬送部が、搬送方向に直交する方向のいずれかの側方に配置され、それら複数の片側搬送部の間で、基板を受け渡して搬送する構成としてもよい。例えば、上記各実施形態、変形例において、浮上ステージ１Ａ、２Ａ、３Ａや、ローラステージ１Ｂ、２Ｂ、３Ｂなどをそれぞれ一体の搬送ステージとするように変形した構成としてもよい。
この場合、基板搬送精度を決定する片側搬送部を搬送方向にわたって複数に分けることができるので、例えば、搬送精度が必要な１つの検査部分ごとに片側搬送部を分割することにより、搬送路全長にわたって高精度な搬送を行う片側搬送部を１つ設ける場合に比べて、簡素かつ安価な構成とすることができる。 In the above description, an example in which a plurality of transfer stages are arranged adjacent to each other has been described. However, one transfer stage extends in the transfer direction, and a plurality of one-side transfer units are orthogonal to the transfer direction. It is good also as a structure which is arrange | positioned in any one of these and transfers and conveys a board | substrate between these several one side conveyance parts. For example, in each of the above-described embodiments and modifications, the floating stages 1A, 2A, and 3A, the roller stages 1B, 2B, and 3B may be modified so as to be integrated with each other.
In this case, since the one-side conveyance unit that determines the substrate conveyance accuracy can be divided into a plurality of portions in the conveyance direction, for example, by dividing the one-side conveyance unit for each inspection portion that requires conveyance accuracy, Compared with the case where one single-side transport unit that performs highly accurate transport is provided, a simple and inexpensive configuration can be achieved.

また、上記の説明では、搬送ステージが複数に分割されている場合において、基板の受け渡し位置が、隣接する搬送ステージの一方の端部側に位置する場合の例で説明したが、搬送ステージの段差が十分小さい場合には、図５、６に示すように、基板が隣接する搬送ステージの両方に跨る位置で、基板受け渡しを行う構成としてもよい。   In the above description, when the transfer stage is divided into a plurality of parts, the transfer position of the substrate is described as an example where the transfer position is located on one end side of the adjacent transfer stage. 5 is sufficiently small, the substrate may be delivered at a position where the substrate straddles both adjacent transfer stages.

また、上記の説明では、複数の片側搬送部が、基板の受け渡し位置で搬送ステージを挟んで対向可能となる位置に設けられた例で説明したが、基板の受け渡しが可能であれば、複数の片側搬送部を、搬送ステージの同方向側の側方で、搬送方向に直交する方向に対向可能となる位置に設けてもよい。   Further, in the above description, the description has been given of the example in which the plurality of one-side transfer units are provided at positions where the transfer stage can be opposed to each other with the transfer stage interposed therebetween. You may provide a one-side conveyance part in the position which can oppose in the direction orthogonal to a conveyance direction by the side of the same direction side of a conveyance stage.

また、上記の説明では、検査部２が除振台に保持されることが好ましいとしたが、必要に応じて、いずれの搬送ステージ、片側搬送部を除振台上に配置してもよい。本発明によれば、このような除振台は、搬送ステージごと、片側搬送部ごとに個別に設置することもできるので、装置の設置が容易になるという利点がある。   In the above description, it is preferable that the inspection unit 2 is held by the vibration isolation table. However, if necessary, any conveyance stage or one-side conveyance unit may be arranged on the vibration isolation table. According to the present invention, such an anti-vibration table can be individually installed for each transfer stage and for each one-side transfer unit, so that there is an advantage that the apparatus can be easily installed.

また、上記に説明した各実施形態、変形例の各構成要素は、技術的に可能であれば、本発明の技術的思想の範囲内で適宜組み合わせて実施してもよい。   In addition, the constituent elements of the embodiments and modifications described above may be appropriately combined and implemented within the scope of the technical idea of the present invention, if technically possible.

本発明の第１の実施形態に係る基板検査装置の概略構成を示す平面図である。1 is a plan view showing a schematic configuration of a substrate inspection apparatus according to a first embodiment of the present invention. 図１のＡ部の部分拡大図、およびそのＢ視正面図である。It is the elements on larger scale of the A section of FIG. 1, and the B view front view. 本発明の第１の実施形態に係る基板検査装置の動作について説明する平面図である。It is a top view explaining operation | movement of the board | substrate inspection apparatus which concerns on the 1st Embodiment of this invention. 本発明の第１の実施形態に係る基板検査装置の動作について説明する平面図である。It is a top view explaining operation | movement of the board | substrate inspection apparatus which concerns on the 1st Embodiment of this invention. 本発明の第１の実施形態の変形例の基板検査装置の概略構成を示す平面図である。It is a top view which shows schematic structure of the board | substrate inspection apparatus of the modification of the 1st Embodiment of this invention. 本発明の第２の実施形態に係る基板検査装置の概略構成を示す平面図である。It is a top view which shows schematic structure of the board | substrate inspection apparatus which concerns on the 2nd Embodiment of this invention. 本発明の第３の実施形態に係る基板検査装置の概略構成を示す平面図である。It is a top view which shows schematic structure of the board | substrate inspection apparatus which concerns on the 3rd Embodiment of this invention. 本発明の第４の実施形態に係る基板検査装置の概略構成を示す平面図である。It is a top view which shows schematic structure of the board | substrate inspection apparatus which concerns on the 4th Embodiment of this invention.

符号の説明Explanation of symbols

１ 基板搬入部
１Ａ、２Ａ、３Ａ 浮上ステージ（搬送ステージ）
１Ｂ、２Ｂ、３Ｂ ローラステージ（搬送ステージ）
２ 検査部
３ 搬出部
４ 基板
５、６、７、１５、１７、１９ 吸着搬送部（片側搬送部）
８ａ、８ｂ 基準ピン
８ｃ 押付けピン
１４ 吸着ブロック
３０ 搬送ローラ
１００、１１０、１２０、１３０、１４０ 基板検査装置 1 Substrate carry-in part 1A, 2A, 3A Levitation stage (conveyance stage)
1B, 2B, 3B Roller stage (conveyance stage)
2 Inspection part 3 Unloading part 4 Substrate 5, 6, 7, 15, 17, 19 Adsorption conveyance part (one side conveyance part)
8a, 8b Reference pin 8c Pressing pin 14 Suction block 30 Transport rollers 100, 110, 120, 130, 140 Substrate inspection device

Claims (4)

被検体である薄板状の基板を搬送するための搬送ステージと、
該搬送ステージの、搬送方向に直交する方向のいずれかの側方に配置され、前記基板の端部を保持して該基板に搬送力を付勢する複数の片側搬送部とを備え、
該複数の片側搬送部の間で前記基板を順次受け渡すことにより、該基板の搬送を行うようにしたことを特徴とする基板検査装置。 A transport stage for transporting a thin plate-shaped substrate as a subject;
A plurality of one-side transport units that are arranged on either side of the transport stage in a direction perpendicular to the transport direction and hold an end of the substrate and bias a transport force to the substrate;
A substrate inspection apparatus, wherein the substrate is transferred by sequentially transferring the substrate between the plurality of one-side transfer units. 前記搬送ステージが、前記搬送方向に隣接して複数配置されるとともに、
前記各搬送ステージの隣接位置において、
前記隣接する搬送ステージのいずれか一方の端部に前記基板が位置する状態で、
前記複数の片側搬送部の１つが前記複数の片側搬送部の他の１つに前記基板を受け渡すことができるように、前記複数の片側搬送部が配置されたことを特徴とする請求項１に記載の基板検査装置。 A plurality of the transport stages are arranged adjacent to the transport direction,
In the adjacent position of each transfer stage,
In the state where the substrate is located at one end of the adjacent transfer stage,
2. The plurality of one-side transport units are arranged so that one of the plurality of one-side transport units can deliver the substrate to another one of the plurality of one-side transport units. The board inspection apparatus according to 1. 前記複数の片側搬送部の１つと、前記複数の片側搬送部の他の１つとが、前記基板の受け渡し位置で前記搬送ステージを挟んで対向する位置に設けられたことを特徴とする請求項２に記載の基板検査装置。   3. One of the plurality of one-side transport units and the other one of the plurality of one-side transport units are provided at positions facing each other across the transport stage at the substrate transfer position. The board inspection apparatus according to 1. 前記搬送ステージが、前記基板をガス噴射で浮上させるガス浮上ステージからなることを特徴とする請求項１〜３のいずれかに記載の基板検査装置。   The substrate inspection apparatus according to claim 1, wherein the transfer stage includes a gas levitation stage that levitates the substrate by gas injection.
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