JP2010091683A - Display panel module assembling device, assembling method, and substrate conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a display panel module assembling device, wherein respective processing operation devices are allowed to be connected with a required minimum width, to shorten the total length of the display panel module assembling device, and it is made possible to perform highly accurate and high speed processing of substrates having various sizes from small to large sizes. <P>SOLUTION: A substrate holding means and a substrate conveying means are united by disposing a plurality of slender substrate holding members and substrate conveying members side by side in a fixed direction, especially in a substrate conveying direction to achieve a substrate holding/conveying means capable of conveying the substrates having various sizes from small to large sizes. Connection of respective processing operation devices with required minimum width is made possible by collectively conveying display panel substrates in respective processing operation position at the same timing. Highly accurate and high speed substrate conveyance and processing operation can be attained by transferring the substrate conveying means after conveying operation to a conveyance upstream side within substrate processing operation time. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention is a so-called TAB (Mounting IC) around the display panel (display cell substrate) of FPD (= Flat Panel Display) such as liquid crystal or plasma, COF (Chip on Film), FPC (Flexible Printed Circuits), etc. The present invention relates to a display panel module assembling apparatus that mounts = Tape Automated Bonding) and a peripheral board (PCB = printed circuit board). More specifically, the present invention relates to a display panel substrate transfer apparatus that can arrange each processing step in the display panel module assembly apparatus more efficiently.

  The display panel module assembling apparatus sequentially performs a plurality of processing work steps on a display panel substrate of FPD such as plasma (hereinafter simply abbreviated as a substrate, and clearly described as a PCB substrate in the case of a PCB), A device for mounting a driving IC, a TAB, a PCB substrate, and the like around the substrate.

  For example, as an example of the processing process, (1) a terminal cleaning process that cleans the TAB application part at the edge of the substrate, and (2) an anisotropic conductive film (ACF = Anisotropic Conductive Film) is attached to the substrate edge after cleaning. ACF process, (3) Mounting process for positioning the substrate wiring at the position where ACF is pasted and mounting TAB and IC, (4) Crimping process for fixing the mounted TAB by ACF film, 5) Inspection process for inspecting the position and connection status of the mounted TAB and IC, (6) PCB process (multiple processes) in which a PCB substrate is pasted and mounted on the opposite side of the TAB substrate with ACF. Furthermore, the number of processing apparatuses, a processing unit for rotating the substrate, and the like are required depending on the number of sides of the substrate to be processed and the number of TABs and ICs to be processed.

  In the display panel module assembling apparatus, the processing work devices for performing these processing work steps are continuously arranged, and the substrate is transferred between them by the substrate transfer means, thereby performing the substrate peripheral processing.

As a method for transporting a substrate between each processing work apparatus, Patent Document 1 discloses that a substrate is lifted from below from the mounting table on which the substrate before work is placed to the work stage, and from the work stage to the mounting table, and is carried in and out. A conveyance method using a mechanism that performs this is disclosed. Further, in Patent Document 2, the substrate transfer method is further improved, and a substrate holding / transfer stage composed of comb-shaped arms is arranged in each processing work device, so that the substrates are transferred between the work processing devices and sequentially transferred. A scheme is disclosed.
Furthermore, in Patent Document 3, as a conveying method that can shorten the arrangement interval between each processing work device (working stage) in order to shorten the overall length of the device, a conveying means by a pair of belt conveyors and a panel support arranged therebetween A substrate transport configuration comprising a table is disclosed.

JP-A-8-26475 JP 2007-99466 A JP 2003-76290 A

  In the display panel module assembling apparatus using the conventional transfer mechanism of Patent Document 1 described above, the substrate transfer mechanism is arranged along the arrangement line of each processing work apparatus, so that it goes straight in the arrangement direction of the processing work apparatus unit. Direction, that is, the width direction of the apparatus is widened, and a standby position of each transfer arm is required, so that the interval between the processing work apparatuses is widened, and the apparatus length in the processing work apparatus arrangement direction, that is, the display panel module assembly. The overall length of the device becomes very long.

  Similarly, Patent Document 2 also requires a place for delivering the substrate between the processing work apparatuses, so that the total length of the display panel module assembling apparatus becomes long. Further, the substrate transfer means of the processing work apparatus needs to go to the upstream processing work apparatus to receive the next processing substrate after delivering the substrate to the downstream processing work apparatus. Since each processing work apparatus waits until the next processing substrate is carried in, there is a problem that the working efficiency of each processing work apparatus is lowered.

  Patent Document 3 is a configuration in which a substrate before processing and a substrate after processing are unloaded into each processing work device by using a conveyor-like transport unit of each processing work device. It is not necessary to provide a stand-by position for the substrate and the arm, and it is possible to dispose each processing work apparatus close to each other, thereby shortening the total length of the display panel module assembling apparatus.

  However, some problems remain in the method disclosed in Patent Document 3.

  The minimum width required for each processing work apparatus generally depends on the length of the side of the substrate to be processed. The minimum width of the processing work apparatus required for processing the long side and the short side of the processing substrate is different, and the diagonal length of the substrate is required at the minimum in the processing work unit that rotates the substrate. Furthermore, even in a processing work device that processes the same side, a difference occurs in the minimum width of the required processing work device. For example, in the main press-bonding process that requires high pressure and temperature, it is necessary to ensure the strength of the processing unit housing, and therefore, the required width of the processing work apparatus tends to be larger than others. In addition, the required minimum width differs slightly depending on each processing work device.

  However, in the configuration proposed in Patent Document 3, the substrate is carried out and carried in from each processing station simultaneously by driving the same belt conveyor. However, in order to carry out and carry in by the same belt conveyor, it is necessary to make the board | substrate conveyance speed and distance between process work apparatuses the same. For this reason, it is necessary to make the pitch between each processing work apparatus the same. In order to do this, each processing work device must be aligned with the maximum width of the processing work devices to be connected. For this reason, also in the board | substrate conveyance system of patent document 3, each processing work apparatus comprised by the minimum required width cannot be arrange | positioned in the closest state.

  In this method, if there is a difference in the belt conveyance speed of each processing work device, it is possible in principle to make a difference in the amount of movement of the substrate to be conveyed. Because there is a belt contact with a difference in speed, there is a high possibility that the substrate surface will be scratched, and it is difficult to ensure the conveyance accuracy. .

  Moreover, even if the belt transfer speed of each processing work apparatus is controlled to be the same, the method of transferring the substrate between the belt-shaped conveyors installed in each processing work apparatus shown in Patent Document 3 It is impossible to completely remove the dangers such as a decrease in transport accuracy (delivery accuracy) and scratches on the substrate surface. For this reason, in order to avoid this, there is a limit to the substrate transfer speed that can be transferred and delivered, and high-speed substrate transfer is difficult.

  Furthermore, in the method of Patent Document 3, since the substrate is transported by a pair of belt-shaped conveyors, the substrate to be transported needs to be a substrate of a size that can be placed on a pair of (both) conveyors. For this reason, it has the subject that it is difficult to respond to a small substrate.

SUMMARY OF THE INVENTION An object of the present invention is to provide a display panel module assembling apparatus or assembling method or a substrate conveying apparatus that can be configured in a small size, particularly by shortening the overall length of the apparatus, by improving the substrate conveying means.
Another object of the present invention is to provide a display panel capable of delivering and transporting substrates of various sizes at high speed and / or with high accuracy between successive processing devices or processing units by the same transport means or transport method. It is to provide a module assembling apparatus or assembling method or a substrate transfer apparatus.
Furthermore, another object of the present invention is to provide a display panel module assembling apparatus or a substrate transfer apparatus capable of continuously connecting and arranging each processing work apparatus at a minimum interval necessary for each processing work apparatus.

  In order to achieve the above object, the present invention provides a substrate holding means in which a plurality of substrate holding members elongated in a certain direction are juxtaposed in a plane parallel to the conveying surface of the substrate, and the substrate conveying member elongated in the certain direction includes the substrate. A plurality of substrate transport members arranged in parallel with a surface parallel to the transport surface, and at least one of the substrate transport members disposed between the substrate holding members. The substrate transport means is disposed on the substrate holding member. The first feature is that the substrate is transported by holding the placed substrate and moving linearly in the substrate transport direction.

  In order to achieve the above object, the present invention provides a substrate transfer device for transferring a display panel substrate, a substrate holding means having a substrate holding member for holding the display panel substrate at a work position of the processing work apparatus, and display panel substrate processing. It has a substrate transport means for transporting the display panel substrate to the substrate holding member on the downstream side of the procedure, and the substrate transport means comprises an operating means that can move linearly in the transport section. Is the second feature.

  Furthermore, in order to achieve the above object, in addition to the first or the second feature, the present invention provides a substrate transport means that raises the substrate transport member relative to the substrate holding member of the substrate holding means and A third feature is that it has means for lowering and has an operation mechanism capable of reciprocating the substrate transport member in a specified range along the substrate transport direction.

  In addition to the third feature, the display panel module assembling apparatus of the present invention to achieve the above object includes a plurality of the substrate transfer means, and the reciprocating distance of each substrate transfer means can be set independently. The fourth feature is that the plurality of substrate transfer means simultaneously slide the substrates on the substrate holding means in the substrate transfer direction at the same timing.

  In order to achieve the above object, in addition to the fourth feature, the display panel module assembling apparatus of the present invention can change the reciprocating distance according to each processing apparatus, processing substrate conditions, and the like. A fifth feature is to have a conveyance distance varying means.

  Furthermore, in order to achieve the above object, the display panel module assembling apparatus of the present invention includes, in addition to the first to third features, a substrate posture detecting means for detecting the posture of the substrate, and a detection result of the substrate posture detecting means. And a substrate posture correcting means for correcting the substrate posture based on the sixth feature.

  In order to achieve the above object, in addition to the sixth feature, the display panel module assembling apparatus of the present invention is such that the substrate posture is a posture at the working position of each processing work device, and the substrate holding means A plurality of substrate holding units are arranged corresponding to the processing work apparatus, and at least one of the substrate holding units corrects the substrate posture based on the substrate posture detection unit that detects the substrate posture at the work position and the detection result of the substrate posture detection unit. A seventh feature is that the substrate posture correcting means is provided.

  In order to achieve the above object, the display panel module assembling apparatus of the present invention, in addition to the first or second feature, each processing apparatus performs at least a predetermined process on the edge of the substrate that has been transferred. There is provided at least one processing unit and a substrate posture detecting means for detecting the posture of the transferred substrate, and correcting the relative position of the processing unit with respect to the substrate based on the detection result of the substrate posture detecting means. Eight features.

  Further, in order to achieve the above object, the display panel module assembling apparatus of the present invention has a plurality of the substrate transfer devices in addition to the first or second feature, and the posture of the substrate between the substrate transfer devices. Alternatively, a ninth feature is to have means for changing the transport direction.

  In order to achieve the above object, in the display panel module assembling apparatus or the substrate transfer apparatus of the present invention, the holding means has a low friction substrate holding portion having a low frictional resistance on the opposite side of the processing work apparatus. A tenth feature is provided.

  In order to achieve the above object, in the display panel module assembling method of the present invention, the means for transporting the substrate is provided corresponding to the work position after the work at the work position of the processing work apparatus is completed. Receiving the substrate from the substrate holding means, linearly moving the substrate to a working position downstream of the working position, and passing the substrate to the substrate holding means provided corresponding to the downstream working position; The eleventh feature is that the linear movement and return to the original work position is completed by the end of the work at the downstream work position.

  Finally, in order to achieve the above object, the substrate transfer apparatus of the present invention receives the substrate from the substrate holding means, and linearly moves the substrate to another substrate holding means downstream of the substrate holding means. A first feature is that the substrate is transported, the substrate is transferred to the other substrate holding means, and after the substrate is transferred, the substrate is linearly moved back to the original substrate holding means.

  According to the present invention, a plurality of substrate holding members that are elongated in the substrate transfer direction are juxtaposed in a direction perpendicular to the substrate transfer direction at the work position in each processing work apparatus, and the plurality of elongated substrate holding members of the substrate holding means are held. Similarly, by using a substrate transfer means in which a plurality of substrate transfer members elongated in the substrate transfer direction are juxtaposed between the members, it is possible to hold and transfer from a small to a large substrate.

  In the substrate transfer operation, the substrate transfer member is lifted and separated from the substrate holding part by raising the substrate transfer member relative to the substrate holding member, and is slid and transferred at a high speed to a predetermined position. This method of lowering the substrate relative to the substrate holding member and transferring the substrate to the substrate holding portion again enables the substrate to be moved with a minimum of movement, and is transferred and transferred between high-speed and high-precision processing work devices. Is possible.

  By arranging a plurality of the above-mentioned substrate transfer means in a series of continuous substrate transfer apparatuses and making the reciprocating distance of each substrate transfer means independent, in this method, the distance between each processing work position can be set freely. .

  Further, since the plurality of substrate transfer means simultaneously move the substrates on the substrate holding means in the substrate transfer direction at the same timing, each substrate is placed between the processing work positions while being adjacent to each other by the distance between the processing work apparatuses. Can be moved. Accordingly, it is possible to provide a display panel substrate transport apparatus that can continuously connect and arrange each processing work apparatus at a necessary minimum interval.

  In addition, the reciprocating distance in the substrate transfer direction of the plurality of substrate transfer means installed can be set independently for each substrate transfer means, so that the optimum distance between the processing work positions according to each processing work device, processing substrate conditions, etc. Can also be realized.

  Further, some of the substrate holding means are provided with a substrate posture detecting unit for detecting the substrate posture at the work position and a substrate posture correcting unit for correcting the substrate posture based on the detection result of the substrate posture detecting unit. In addition, it is possible to correct the change in the posture of the substrate that occurs when transported continuously between a large number of processing work apparatuses, and in the overall length of the display panel module assembly apparatus configured by connecting a large number of processing work apparatuses, The substrate can be transferred at high speed and with high accuracy. In addition, each processing work apparatus is provided with at least one processing unit that performs a predetermined process on the edge of the transported substrate, and a substrate posture detection unit that detects the posture of the transported substrate, Since it is possible to correct the relative position of the processing unit with respect to the substrate based on the detection result of the substrate posture detection means, the processing work such as mounting of electronic components performed around each substrate is more accurate. Can be implemented.

  According to the present invention, substrates of various sizes from small to large substrates can be transferred and transferred between each successive processing unit at high speed and with high precision by the same transport means, and each processing work device can be processed by each processing work. A display panel module assembling apparatus and method that can be continuously connected and arranged, and a substrate such as a display panel can be transported at a necessary minimum interval.

Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a view showing an embodiment for explaining the basic configuration of a display panel substrate transfer device and a display panel module assembly device using the same according to the present invention.

  The apparatus of FIG. 1 is an apparatus for performing mounting and assembling work such as IC and TAB by performing various processing operations on the peripheral portion of the substrate while sequentially transporting the substrate 10 from left to right in the drawing. In the apparatus shown in FIG. 1, first, processing is performed on the long side of the substrate (source side) by the processing work apparatus group 1 on the long side of the substrate (source side), and then the substrate is rotated by the rotating means 2 and then. The processing work apparatus group 3 on the short side (gate side) of the substrate is configured to perform processing on the short side (gate side) of the substrate. In the apparatus of FIG. 1, as the processing on the long side (source side) of the substrate, from the left, (1) a terminal cleaning process for cleaning the TAB pasting portion at the substrate end, (2) anisotropy at the substrate end after cleaning ACF process for attaching conductive film (ACF), (3) Mounting process for mounting TAB and IC by positioning with substrate wiring at the position where ACF is applied, (4) By thermocompression bonding the mounted TAB and IC , The crimping process of fixing with the ACF film is performed sequentially, and 4-7 in the figure are the terminal cleaning processing work device 4, the ACF sticking processing work device 5, and the TAB / IC mounting processing work device 6, respectively. , The present crimping processing apparatus 7 is shown.

  In the apparatus of FIG. 1, only the terminal cleaning processing work device 8 and the ACF application processing work device 9 are shown as the processing work on the short side of the substrate (gate side), and the subsequent processing work device group is omitted. is doing. In addition to the processing work apparatus shown in FIG. 1, the display panel module assembling apparatus as a whole has two remaining substrates (long side, long side, in addition to processing work on the short side (gate side) not shown). A lot of processing processes for short side), PCB processing process (consisting of multiple processing processes) where PCB substrate is pasted and mounted on the opposite side of the TAB substrate side with ACF, etc. These processing work apparatuses are configured in series. It goes without saying that what kind of processing work apparatuses need to be connected depends on the configuration of the display panel module that performs the assembly work.

  The present embodiment provides a display panel substrate transfer apparatus that transfers the substrate 10 between these various connected processing apparatuses with high efficiency.

  The display panel substrate transfer apparatus of the present embodiment first, the substrate holding means 12 that holds the substrate 10 at each processing work apparatus position and the substrate 10 held by the substrate holding means 12 to the position of the adjacent processing work apparatus, It comprises substrate transport means 11 for transport. In FIG. 1, before each processing work apparatus, independent substrate holding means 12a to e (subscript alphabet represents a processing work apparatus) and substrate transfer means 11a to e (subscript alphabet represents a processing work apparatus). However, four sets on the source side and two sets on the gate side are shown.

  As shown in FIG. 2 to be described later, the substrate holding means 12 has a structure in which a plurality of substrate holding members 12A elongated in the substrate transport direction are juxtaposed in a direction perpendicular to the substrate transport direction. As shown in FIG. 2, the substrate transfer means 11 has a structure in which a plurality of elongated substrate transfer members 11A are juxtaposed in the substrate transfer direction between the plurality of elongated substrate holding members 12A. In FIG. 1, the substrate 10 is shown in a partially broken view and the outer shape is indicated by a dotted line in order to illustrate the substrate holding means 12 and the substrate transport means 11 disposed below the substrate 10. The substrate transfer members juxtaposed in front of the same processing work apparatus 13 are integrally formed, and move the substrate 10 held by the substrate holding means 12 to the next processing work apparatus position.

  FIG. 2 and FIG. 3 are diagrams for schematically explaining the operation state during each processing operation and substrate transport. 2 shows a cross section from the side of the apparatus, and FIG. 3 shows a cross section from the side of the apparatus. The substrate transfer means 11 is provided with a plurality of substrate transfer members 11A to 11C (three in FIG. 2, hereinafter collectively referred to as 11A regardless of the number and form) in the gap of the substrate holding means 12, The substrate transport members 11A to the substrate holding members 12A to D (four in FIG. 2, hereinafter collectively referred to as 12A regardless of the form and form) of the substrate holding means 12 are integrally formed. Substrate transport member raising / lowering means 14 for raising and lowering is relatively provided.

  After the processing operation on the substrate 10 in each processing work apparatus is completed (FIG. 3- (1)), the substrate transfer means 11 raises the substrate transfer members 11aA, 11bA, etc., and the substrate holding members 12aA, 12bA, etc. The substrate 10 placed above is lifted by a small amount (FIG. 3- (2)), and then slid along the gap direction of the substrate holding members 12aA, 12bA (FIG. 3- (3)), so that The substrate 10 can be transported to the work processing apparatus. As means for sliding the substrate transport means 11, general slide stage mechanisms 29 and 15 such as linear motors and ball screws can be applied. The conveyance direction of the substrate 10 in FIG. 2 is a direction perpendicular to the paper surface. The substrate transfer means 11 that has transferred the substrate 10 to the next transfer processing position lowers the substrate transfer members 11aA, 11bA and the like so that the substrate 10 is placed on the substrate holding means 11 of the next work processing apparatus. Hand it over (Figure 3- (4)). The substrate transfer means 11 that has transferred the substrate 10 onto the substrate holding means 12 returns to the original processing work apparatus position while being lowered (FIG. 3- (5)). Since this return operation can be performed during the processing operation of each processing work apparatus, there is no time loss and it is possible to contribute to the improvement of the operating rate. In addition, even if the lengths between the processing work devices are different, this return operation can be performed during the processing work, so that it can be performed at the same timing between the adjacent processing work devices with sufficient time. Then, the substrate 10 can be successively transferred to the downstream processing work apparatus position.

  In the substrate transport system of the above embodiment, the substrate 10 can be transported by the substrate transport means 11 with the shortest straight line between the processing work apparatuses, while the amount of the substrate 10 being raised and lowered by the substrate transport means 11 can be suppressed very little. Is possible. Thereby, it is possible to move the plurality of substrates 10 between the processing work apparatuses almost simultaneously at a high speed in combination with the conveyance of each substrate 10 described below at the same timing.

  The amount of substrate lift by the transport means during the actual substrate transport includes the deflection and warpage during the transport of the substrate 10, the flatness of the holding surface of the substrate holding means, and the height alignment accuracy of the substrate holding means between adjacent processing equipment In consideration of the height position accuracy during ascending conveyance of the substrate conveying means, it is necessary to determine within a range where the substrate 10 does not contact the surface of the substrate holding member 12A. Needless to say, the amount of descent during the return operation of the substrate transfer means 11 needs to be determined within a range where the substrate transfer member 11A does not contact the lower surface of the substrate. In this embodiment, the amount by which the substrate 10 is lifted from the substrate holding means during conveyance is about 1 to 2 mm.

  However, the substrate 10 with TAB attached needs to be lifted so that the tip of the TAB does not contact the substrate holding member 12A during conveyance. If the TAB length is about 20 mm, the substrate is conveyed relative to the substrate holding member 12A. It is necessary to raise the member 11A by about 20 mm.

  The substrate transfer means 11 of the present embodiment is configured to separate the substrate holding means 12 and the substrate 10 by the minimum required up / down movement in the vertical direction of the substrate transfer means before and after the specified amount slide transfer in the horizontal direction. Since the re-holding method is used, it is possible to suppress a change in substrate posture and a decrease in arrangement accuracy due to the transfer operation.

  The substrate holding member 12A and the substrate transporting member 11A in the present embodiment have a length that supports the entire length of the substrate in the substrate transport direction even when transporting the largest size substrate to be held and transported, and have the minimum size substrate to be held and transported. It is necessary that the width of the substrate holding member 12A and the substrate transport member 11A be equal to or smaller than a width that allows at least one pair to be arranged in the direction perpendicular to the transport. As a result, the substrate holding member 12A and the substrate transport member 11A of the present embodiment have an elongated shape.

  In the above-described embodiment, the substrate holding member 12A and the substrate transport member 11A are represented as elongated shapes. However, the contact surface with the substrate 10 is also elongated at a constant interval.

  Further, although not shown in FIGS. 1 to 3, in the present embodiment, suction holes are arranged at a constant pitch on the surfaces of the substrate holding member 12A and the substrate transport member 11A, and the substrate is mounted by negative pressure. It is configured so that it can be attracted to the holding means and the substrate transport means. As a result, the substrate 10 is firmly fixed to the substrate holding means 12 and the substrate transport means 11, so that the substrate 10 is not displaced from the substrate holding means 12 or the substrate transport means 11 during the substrate processing operation or the substrate transport. This is not generated, and it is possible to realize high-accuracy substrate conveyance in combination with the above-described conveyance method that separates the micro ascent / descent operation and the horizontal conveyance operation.

  However, in the above vacuum suction method, in order to fix the substrate 10 stably and reliably, it is essential that the substrate 10 is in close contact with the suction port. However, the substrate 10 often has a warp, and it is necessary to press the substrate 10 against the suction hole in order to reliably suck the warped substrate 10 into the vacuum suction hole. In the transport mechanism of the present embodiment, it is configured and controlled so that the suction force of the transfer source is held at a specified value at the time of transfer to both the substrate holding unit and the substrate transfer unit, so that the suction hole of the transfer destination By delivering the substrate 10 while pressing the substrate 10 against the suction hole, a reliable, stable and highly accurate substrate delivery operation is realized. Details of the delivery method using vacuum suction will be described later.

  FIG. 4 is a diagram for explaining processing and a transfer sequence of the display panel substrate 10 in the entire display panel substrate transfer device and a display panel module assembly device using the display panel substrate transfer device. In FIG. 4, for the sake of explanation, the processing operation is described separately from Step 1 to Step 6.

  First, in Step 1, the substrate 10 is arranged at the position of each processing work device, and each processing on the gate side (short side) is completed after the processing by each processing work device on the source side (long side) is completed. The work device is continuing the processing work. At this time, the turntable 2 performs alignment in the direction of the arrow.

  In Step 2, the substrate transfer means 11 under each substrate 10 on the source side (long side) rises, so that the substrate 10 is lifted by a small amount, and the substrate 10 is transferred to the downstream substrate processing apparatus position, and at that position. Then, the substrate transfer means 11 is lowered and transferred to the substrate holding means 12. Each processing work device on the gate side (short side) is continuing the processing work. The turntable 2 receives a substrate from the source side.

  At this time, the substrate transfer means 11 holding each substrate 10 can be moved to the next processing work apparatus position without contacting the substrates at each processing work apparatus position by moving at the same timing. It becomes. In the display panel substrate transfer apparatus of the present embodiment, each substrate transfer unit is configured to be driven by an independent drive unit. In the apparatus of the embodiment of FIG. 3, an independent operating element is arranged on the same linear slider, and this is controlled independently. With this configuration, even when the distances between the processing work apparatuses are different, it is possible to smoothly convey at the same timing. In the embodiment of FIG. 4, the width of the main crimping processing device is larger than that of other processing devices, but the transport distance is longer. By adopting such a configuration, by applying the display panel substrate transfer device of the present embodiment, it is possible to connect each processing work device with the necessary minimum width, and thus a display panel module manufacturing apparatus with a short overall length is provided. It becomes possible.

  Next, in Step 3, the substrate transfer means 11 lowered below the substrate holding means 12 on the source side (substrate long side) returns to the original processing work apparatus position. In this embodiment, at this time, the substrate 10 is held by the substrate holding means 12 and each processing operation is performed, and there is no processing time loss due to the return operation of the substrate transport means 11. A new substrate is loaded into the processing work apparatus 4, and each processing work apparatus on the source side (long side) starts processing work. Each processing work device on the gate side (short side) is continuing the processing work.

  In Step 4, the substrate 10 is rotated 90 degrees on the turntable 2, and the position of the substrate short side (gate side), which is the next substrate processing side, is aligned with the processing line of the downstream processing work apparatus with an arrow. As shown, it slides in a direction perpendicular to the substrate transport direction. Each processing device on the source side (long side) is in processing. Each processing work device on the gate side (short side) is also continuing the processing work.

  Step 5 and Step 6 correspond to Step 2 and Step 3 of each processing work device on the source side (long side), and the substrate transport means 11 of each processing work device on the gate side (short side) in Step 5 is on the upstream side. Returning to step 6, the substrate holding means 12 slides and transfers the substrate 10 to each processing work apparatus on the gate side (short side). At this time, each processing apparatus on the source side (long side) located upstream of the turntable 2 is continuing processing. That is, each processing work device on the source side (long side) starts processing at Step 3, continues processing from Step 4k to Step 6, and ends processing at Step 1. On the other hand, each processing work apparatus on the short side (gate side) of the substrate located on the downstream side of the turntable starts processing at Step 1 and ends processing at Step 5. In this way, the processing phase of each processing operation on the gate side (short side) located on the downstream side of the turntable and each processing operation on the source side (long side) located on the upstream side of the turntable are in the processing phase. Although there are deviations, the substrate 10 can be transported and processed in basically the same process and at the same time interval, and the entire display panel module assembling apparatus can continuously process the substrate 10.

  As described above, the display panel module assembling apparatus is an apparatus configured by connecting a large number of processing work apparatuses. For this reason, the number of times of delivery of the substrate 10 is large, and even if the display panel substrate carrying device of this embodiment is used, it is difficult to completely guarantee the posture and arrangement accuracy of the substrate 10 to be carried over the entire length of the device. Therefore, in order to maintain the posture and placement accuracy of the substrate 10 that moves in the display panel module assembly apparatus, a method for providing a means for correcting the posture and position of the transferred substrate 10 in a part of the substrate holding means 12 Is effective.

  In particular, since it is necessary to apply high temperature and high pressure to the end of the substrate, the position of the substrate is likely to be shifted at the position of the present crimping apparatus. Further, even with a turntable that rotates the substrate 10, there is a high possibility that the position of the substrate is shifted due to the centrifugal force applied to the substrate 10 or the like. Therefore, in the display panel module assembly apparatus configuration of the present invention shown in FIG. 1, it is effective to provide a mechanism for correcting the substrate position on the substrate holding means at the positions of the terminal cleaning devices 4, 8 and the main crimping device 7. It is.

  FIG. 5 is a diagram for explaining a substrate position correction method by the substrate holding means 12. A slight gap 17 is formed between the substrate holding member 12A elongated in the substrate transport direction and the substrate transport member 11A. The substrate holding member 12A is configured to be operable within this gap. The operating direction is the direction of rotation in the substrate plane in addition to the three axes (X, Y, Z directions in the figure): the direction perpendicular to the substrate transfer direction within the substrate plane, the substrate transfer direction, and the direction perpendicular to the substrate surface. It is desirable that correction can be made in the (θ direction in the figure).

  The position correction operation of the substrate 10 is performed after the substrate 10 carried to the substrate holding means 12 detects a reference mark or the like at the edge of the substrate by a camera mechanism (not shown) or the like, and then a substrate position correction amount calculation control means (not shown) Thus, the correction operation amount of the substrate 10 is calculated, and the substrate holding member 12A is operated based on the calculation result. In each processing work apparatus, the reference position of the substrate 10 serving as a reference is determined in advance. A substrate position correction operation is performed so that the substrate position is corrected and moved to the reference arrangement position of the processing work apparatus.

  The position correction mechanism for the substrate 10 can be provided not on the substrate holding means 12 but on the substrate transport means side 11. Since the substrate transport means 11 moves between the processing work apparatuses, when a position correction mechanism for the substrate 10 is added, the mechanism configuration becomes complicated. However, the substrate holding means side 12 has an advantage that a special operation mechanism or the like is not required and the configuration is simplified. Whether the substrate holding means 12 is provided with the position correction mechanism for the substrate 10 or the substrate transfer means side 11 needs to be determined in consideration of the overall configuration of the apparatus such as final wiring and piping.

  FIG. 6 is a schematic diagram for explaining the force applied to the substrate 10 generated during the delivery of the substrate, the deformation of the substrate 10, and the like. FIG. 6a shows a delivery operation from the substrate holding means 12 to the substrate carrying means 11, that is, a substrate carrying member lifting operation, and FIG. 6b shows a delivery operation from the substrate carrying means 11 to the substrate holding means 12. That is, the substrate transporting member descending operation is shown.

  As described above, the suction holes 18 and 19 are arranged at a constant pitch on the surfaces of the substrate holding member 12A and the substrate transport member 11A. As a result, the substrate 10 can be adsorbed to the substrate holding means 12 and the substrate transfer means 11, and the displacement of the substrate 10 during the transfer operation can be prevented. Further, by performing the transfer operation of the substrate 10 between the substrate holding unit 12 and the substrate transport unit 11 while adsorbing the substrate 10, a force for pressing the substrate 10 against the adsorption hole is generated. As a result, the delivery suction operation can be reliably performed even on the substrate 10 with the warp.

  However, in the transfer operation of the substrate 10 performed in a state where both the substrate holding means 12 and the substrate transfer means 11 are attracted, the substrate 10 is deformed as shown in FIG. If the deformation of the substrate 10 at the time of delivery becomes large, it becomes a factor of positional deviation of the substrate 10 due to the delivery operation.

  As a method of reducing the deformation of the substrate at the time of delivery, a method of suppressing the suction pressure of the substrate 10 at the time of delivery can be considered. However, the suction pressure needs to secure a certain degree of suction force in order to reliably suck and deliver the warped substrate 10 at the point of preventing the substrate 10 from being displaced during the substrate processing operation or the substrate transfer. As another method for reducing the deformation of the substrate during delivery, a method for reducing the gap between the substrate holding means and the substrate transport means of the substrate 10 is effective.

  As a result of the experiment, when the gap 17 between the substrate holding member 12A and the substrate transport member 11A is about 30 to 10 mm, the amount of transfer deviation of the substrate 10 is about several hundred μm, and when the gap is 10 mm or less, the amount of transfer deviation is almost 100 μm or less. Was secured. In the present embodiment, the target of the substrate transfer time deviation amount is several tens of μm or less, and the gap between the substrate holding member 12A and the substrate transport member 11A is 6 mm. At this time, the operating range of the substrate holding means was ± 5 mm. Since the deviation of the posture and arrangement accuracy of the main crimping part and the substrate 10 after rotation is 1 mm or less at the maximum, it is possible to secure a sufficient operating range of the substrate holding means as the substrate posture correcting mechanism.

  FIG. 7 is a diagram for explaining the holding of the substrates 10 having different sizes by the substrate holding means 12 and the substrate transport means 11 of the present embodiment. The substrate holding means 12 and the substrate transfer means 11 of the present embodiment have a plurality of elongated substrate holding members 12A and substrate transfer members 11A arranged in the substrate transfer direction, from the small substrate arrangement region 20 to the large substrate arrangement region 21. A wide range of substrate sizes 10 can be held.

  Suction holes 18 and 19 are provided on the surfaces of the substrate holding member 12A and the substrate transport member 11A for sucking the substrate 10 during processing operations and substrate transport. In the case of a small substrate, the substrate 10 contacts only a part of the suction holes provided in the substrate holding member 12A and the substrate transport member 11A.

  In this case, there is a problem that a large amount of air flows from the suction holes that are not attracted to the substrate 10 and the suction force of the suction holes that are attracted to the substrate 10 is reduced. Therefore, in this embodiment, as shown in the drawing, the suction chamber 22 below the suction hole 18 formed in the substrate holding member 12A is divided into a plurality of parts. A negative pressure system 24 supplied from a suction pump (not shown) or the like is connected to the divided suction chambers 22a to 22c through open / close valves 23a to 23c. Then, the open / close valves 23a to 23c are controlled according to the size of the substrate to be transferred, the suction chambers 22a to 22c for generating a negative pressure are selected, and only the suction holes 18 in the region where the substrate 10 exists are sucked. As a result, since the substrate can be adsorbed only in the region matched to the substrate size, the holding force of the substrate 10 can be obtained stably.

  In FIG. 7, the opening / closing valve 23 is installed in the suction chamber immediately below the suction hole. However, it is desirable to install the opening / closing valve 23 in the suction chamber 22 as close to the suction hole 18 as possible. If an open / close valve is installed at a position where it is desired to move away from the suction hole or suction chamber via piping, the suction operation after switching the valve will be delayed, and the suction pressure will become unstable due to pressure loss in the piping. Failure occurs. As a matter of course, the substrate conveying member 11A side needs to have the same divided suction chamber configuration.

  FIG. 8 is a diagram for explaining a substrate transport mechanism when a larger substrate transport is assumed. When an ultra-large substrate 10 such as a substrate exceeding 50 inches is transported, the number of substrate holding members 12A and substrate transport members 11A can be reduced only by the method of arranging a plurality of substrate holding members 12A and substrate transport members 11A in this embodiment. The problem arises that the structure is increased and the structure becomes complicated.

  Therefore, as shown in FIG. 8, a substrate holding / transporting means including a plurality of substrate holding members 12A and a substrate transporting member 11A is arranged on the lower surface of the substrate 27 on the side 27 close to the processing side of the substrate 10, and the substrate The low-friction substrate holding part 26 with a small frictional resistance is arranged on the lower surface of the substrate 28 on the side 28 far from the processing side. In addition to a method of supporting a part of the substrate 10 with a support guide member with a low frictional resistance using a fluorine-based or silicon-based material and a method of supporting the substrate 10 with a large number of rotating balls In addition, it is possible to use an air levitation method in which the substrate 10 is levitated by ejecting air from a large number of minute holes. Among these methods, from the viewpoint of preventing damage to the lower surface of the substrate, the air floating method that does not contact the lower surface of the substrate is the most effective method. However, it is more preferable to use a mechanical low-friction substrate holding mechanism together with an air levitation method as a countermeasure against unexpected substrate contact during substrate transportation.

  That is, when transporting a large substrate, the substrate 27 is transported on the side 27 close to the processing side by the substrate transport means 11 similar to FIG. 7, and the side 28 far from the processing side is on the low friction substrate holding part 26, for example. Move while flying air. Further, when holding a large substrate, the substrate 10 is held by the substrate holding means 12 similar to that in FIG. 7 on the side 27 close to the processing side and held by the low friction substrate holding unit 26 on the side far from the processing side.

  On the other hand, since the substrate holding / transporting means is the same as that in FIG. 7 when transporting the small substrate, in the substrate holding / transporting configuration of the present embodiment shown in FIG. A wide range of substrate sizes applicable up to 25 can be supported.

As a problem of this method, when only the substrate end side of a very large substrate is held and the substrate 10 is accelerated at a high speed, a large rotational moment is generated in the substrate 10, which may cause the substrate 10 to be transported out of position. There is. In order to prevent this, it is effective to install an auxiliary substrate transport member and an auxiliary substrate holding member near the center of gravity of the large substrate, that is, near the center of the substrate. As a result, the generation of a rotational moment during substrate acceleration can be prevented, and stable high-speed conveyance can be realized even for large substrates. Needless to say, if an auxiliary substrate transfer member and an auxiliary substrate holding member are installed at the center of the maximum substrate to be transferred, there is an effect of suppressing the generation of rotational moment even when a smaller substrate is transferred.
The left half of FIG. 8 shows a configuration example when an auxiliary substrate transport member 11S and an auxiliary substrate holding member 12S are installed near the center of gravity of a large substrate.

  FIG. 9 is a diagram for explaining a method for further simplifying the mechanism of the display panel substrate transfer apparatus of the present embodiment. The display panel module assembling apparatus is an apparatus configured by connecting a large number of processing work apparatuses, and it is necessary to stop the substrate 10 at each processing work apparatus position. In addition, in the case of the conventional substrate transfer means described in Patent Documents 1 and 2, approximately the same number of substrate transfer means as each processing work apparatus is required.

  However, in the present invention, as shown in FIG. 9, the plurality of substrates 10 arranged in the plurality of processing work apparatuses 4, 5a, 5b are collectively transferred only by increasing the length of the substrate transfer member 11aA. be able to. As a result, the number of transport mechanisms for the substrate 10 can be greatly reduced, and the configuration of the transport apparatus can be simplified.

  In the system of the above embodiment, the plurality of substrates 10 are simultaneously transported by one processing work apparatus by the same long substrate transporting member, so that the movement distances of the respective substrates 10 are the same. The transfer by the long substrate transfer member can be applied only in a region where the distance between the substrate arrangement positions between the processing work apparatuses is constant.

  Further, the embodiment of FIG. 9 has a configuration in which two substrate transport members 11A are arranged between four substrate holding members 12A. 1 to 8, the substrate transfer member 11A is arranged between all the substrate holding members 12A. However, as shown in FIG. 9, the number of the substrate holding members 12A and the substrate transfer members 11A is thinned out. Is also possible. Decide the number and arrangement of substrate transport members 11A and holding members, taking into account the size and weight of the substrate to be processed and transported, as well as the relationship between the force to adsorb and fix the substrate 10 and the force applied to the substrate 10 during processing and transport. is required. In this example, a condition for sufficiently holding the substrate 10 during processing and transport could be obtained by arranging about 2 to 4 substrate transport members 11A and holding members having a width of about 2 cm.

Next, a description will be given of an improvement in processing efficiency and a further increase in processing tact time by applying the display panel substrate transfer apparatus and the display panel module assembly apparatus of the present embodiment.
In the display panel module assembling apparatus, apparatuses for performing a plurality of processing operations are connected, and various processing operations are continuously performed on the substrate 10. Naturally, there is a difference in the processing time of each processing operation process. Since the processing work device for a short time process waits for the end of the processing work device for a time-consuming process, the transfer interval of the substrate 10 is limited by the processing work device for the time-consuming process, In the processing work apparatus of a short process, the time during which work is stopped occurs.

  In order to operate each processing work device more efficiently, a large number of processing work devices in a time-consuming process are connected to a processing work device in a short-time process so that the tact balance of each processing process is achieved. It is possible. FIG. 9 shows an example in which two temporary press-bonding processing apparatuses are connected. However, in this method, the number of processing work apparatuses to be connected increases, and the entire length of the display panel module assembling apparatus becomes very long.

  FIG. 10 is a diagram for explaining a method for solving the problem. In the apparatus of FIG. 10, a plurality of processing units 30 that actually perform processing work are arranged in one processing work apparatus. By adopting such a method, it becomes possible for a plurality of processing units 30 to work simultaneously on one processing work device 13, that is, one substrate 10, and the work efficiency of each processing work device is improved. The same effect is obtained.

In general, reference marks are provided on the processing side and processing position of the substrate 10.
FIG. 11 is a diagram illustrating an example of a reference mark provided on the substrate 10. FIG. As the reference marks, a mounting position mark 32 indicating the mounting position of TAB, IC, etc. is formed together with an end mark 31 indicating the end of the display panel.

  In the processing work apparatus of the embodiment shown in FIG. 10, the processing position is adjusted by moving the substrate side because a plurality of processing units 30 work simultaneously at different locations on the processing side of one substrate 10. However, it is almost impossible to match the processing positions of the two processing units 30 at the same time. In order to solve this problem, a function is provided in which each processing unit 30 in the processing work apparatus recognizes the mounting position to be processed for each processing unit 30 from the mounting position mark 32 and positions it independently.

  FIG. 12 shows an embodiment of the processing unit 30 for realizing such a function. The processing unit 30 includes a CCD camera 34 that detects a reference mark on the substrate and XYZθ operating means 33 that moves the entire processing unit in the XYZ and θ directions. The processing unit 30 calculates the correction amount of the processing unit 30 from the reference marks 31 and 32 information detected from the CCD camera 34 by the processing position correction unit 35 and corrects the processing position by the XYZθ operation unit 33. Then, processing operations such as pasting ACF and mounting TAB are performed at specified positions on the board. Since each processing unit provided in the processing work apparatus independently detects and positions the substrate processing position, it is possible to process a plurality of processing positions on one substrate 10 at the same time.

  In the embodiment of FIG. 12, the X-axis operating means is disposed at the lowest position. This is because the working distance becomes the longest because the X axis is the working means in the direction parallel to the processing side of the substrate 10. With this configuration, the X-axis guide rail 15S can be shared by a plurality of processing units 30 provided in the processing work device.

  In the embodiment of FIG. 12, the configuration in which the CCD camera 34 is mounted on each processing unit 30 is disclosed. However, the CCD camera 34 is mounted on the processing work device 13, and the end mark 31 and the predetermined mounting position mark 32 are mounted. From the above, there is a method of detecting the posture of the entire substrate to be processed and converting it into processing position correction information in each processing unit 30 to perform the processing position correction operation of each processing unit 30. This method has an advantage that the number of cameras for detecting the reference mark can be reduced. However, each position information processed by each processing unit 30 is calculated by calculation from some marks, so it can be used for mounting ICs that require extremely high positioning accuracy such as several μm or less. Care must be taken in application.

  Furthermore, in the method in which a plurality of processing units 30 work simultaneously on one substrate 10, it is necessary to operate the processing units 30 at a short distance. In particular, when processing a small substrate or a substrate 10 having a short processing side, it is necessary to perform the processing operation of the processing unit 30 in an adjacent state. For this reason, there is a high possibility that problems such as interference and collision between processing units occur during the processing operation. Therefore, in order to avoid collision between the processing units, processing unit operation timing control means is provided so that the processing units 30 that perform processing operations on the processing sides of the same substrate 10 are driven at the same timing. An example of the basic control procedure for each processing unit by the processing unit operation timing control means is as follows. (1) Processing position information and a movement command are transmitted to each processing unit from the processing unit operation timing control means. (2) When the movement is completed, each processing unit reports the movement completion to the processing unit operation timing control means. (3) The processing unit operation timing control means instructs each processing unit to start processing work to the processing unit. (4) When each processing unit finishes the prescribed processing work, it reports the work end to the processing unit operation timing control means. (5) The processing unit operation timing control means commands each processing unit to move to the next processing position. When an abnormality occurs during each processing work or movement operation, the processing unit operation timing control means stops the next work or movement processing by reporting the fact to the processing unit operation timing control means. It is possible to prevent the processing unit from colliding.

  As described above, each processing unit 30 includes the reference mark detection and processing position correction means and the operation timing control means of each processing unit 30, thereby arranging a plurality of processing units 30 in the processing work apparatus 13. The processing efficiency of the two substrates 10 can be improved.

  Next, a method for realizing a smaller and more efficient display panel module assembling apparatus using the processing unit will be described.

  In a conventional apparatus configuration that processes one substrate 10 for each processing work apparatus, each processing work apparatus requires an apparatus width that is equal to or larger than the width of the maximum substrate to be processed. For this reason, it can be said that the apparatus is longer than necessary when processing a small substrate.

  In addition, there is a limit to the method in which a plurality of processing units work simultaneously on a single substrate 10. In order to process a small substrate by this method, the width of the processing unit needs to be as narrow as possible. However, since the width of each processing unit has a mechanical limit and a certain width (about 150 to 200 mm or more) is required, a substrate that can be processed by multiple processing units for one processing side There is a limit to the size. Substrate conditions that cannot be processed by a plurality of processing units are determined by the length L of the pixel portion on the processing side, the number n of TABs to be processed, the closest possible distance W between the processing units, and the like. In the case of substrate conditions that can be processed by only one processing unit, the processing efficiency cannot be improved even if a plurality of processing units are mounted on the processing work apparatus.

  However, a display panel module assembling apparatus capable of assembling more efficiently from a small size to a large substrate can be realized by another method combining the display panel substrate transfer method and the processing unit of the present invention. FIG. 13 is a view for explaining an embodiment of a display panel module assembling apparatus capable of high-efficiency assembly from small to large substrates according to the present invention.

  The display panel substrate transfer apparatus according to the present embodiment includes a substrate holding unit configured by a plurality of substrate holding members 12A elongated in the substrate transfer direction and a substrate transfer unit configured by a plurality of substrate transfer members 11A elongated in the substrate transfer direction. It is a substrate holding / conveying means.

  This transport system has a feature that the transport amount of the substrate 10 can be freely changed by changing the reciprocating distance of the transport means.

  As shown in FIG. 13, by configuring the substrate holding member 12A so as to extend over a plurality of substrate stop positions, the substrate 10 can be transported and held at various pitches by changing the reciprocating distance of the substrate transport means 11. Configured. Further, a plurality of processing units 30 that perform processing operations are arranged and configured to be movable in the substrate transport direction across a plurality of substrate stop positions.

  In other words, in FIG. 9, a plurality of substrates 10 arranged in the three processing work apparatuses are collectively collected by increasing the length of the substrate transfer member 11aA over the three processing work apparatuses 13 in the substrate transfer means 11. Conveyed. Further, in FIG. 13, the length of the substrate holding member 12A is also extended over the three processing work apparatuses, so that the substrate transfer means 11 can be stopped at an arbitrary position, and each substrate 10 is placed on the holding means 12 at the stop position. By passing, it becomes possible to process at an arbitrary position. By adopting the above structure over the entire length as shown in FIG. 13, the processing operation can be performed at an arbitrary position over the entire length.

  That is, the apparatus according to the present embodiment is not a processing work apparatus that fixes and processes the substrate 10 at a predetermined fixed position as in the past, but the stop position of the substrate 10 is variable, and the processing unit mechanism is It moves to that position and performs each processing operation.

  In the apparatus of the present embodiment, as shown in FIG. 13, when processing a large substrate (FIG. 13a), the substrate is transferred with a transfer width corresponding to the width in the transfer direction of the large substrate, and when transferring a small substrate (FIG. 13b). The substrate is transported with a transport width corresponding to the transport direction width of the small substrate. When processing a large substrate, high processing efficiency can be realized by performing simultaneous processing on a single substrate by a plurality of processing unit mechanisms. In the case of a small substrate, by reducing the substrate transport pitch, it is possible to increase the number of substrate stop positions and efficiently arrange a plurality of processing units.

  In the method of the present embodiment, there is no concept of a fixed processing position of the substrate 10 or a divided processing work device, and it is possible to realize the transport pitch and processing work position of the substrate 10 according to the substrate size within a specified section. From a small substrate to a large substrate, it is possible to perform highly efficient assembly work with a short entire apparatus length. The plurality of processing units may combine different processing operations. In the embodiment of FIG. 13, the ACF attachment processing work and the TAB mounting processing work are combined.

  The number of processing units that can be processed with respect to one substrate 10 is determined by the length L of the pixel portion on the substrate processing side, the number n of TABs to be processed, the closest possible distance W between the processing units, and the like. In order to realize the optimum processing operation according to various substrate conditions, the display panel module assembly apparatus of the present embodiment uses the above parameters as input values to set processing work setting conditions on the apparatus side such as the transport width and processing unit arrangement conditions. It is also necessary to provide a processing condition calculation control system for determining and switching.

  The substrate transfer member 11A in the substrate transfer means in this system is easy to cope with various transfer pitches by taking a long substrate transfer member 11aA that simultaneously transfers a plurality of substrates 10 as shown in FIG. The transport mechanism can be simplified. However, in this case, as described above, the pitch between the substrate holding positions in the section is constant. When it is necessary to vary the pitch between the substrate holding positions in the processing section, it is necessary to use a transfer method in which a plurality of substrate transfer means are combined.

  In the substrate processing position variable section, it is difficult to correct the substrate posture and the arrangement position at the time of conveyance, and there is a possibility that a certain amount of error is accumulated in the substrate posture and the arrangement position at the time of conveyance. The processing position itself on the substrate 10 in the section can be solved by using the processing unit correction method described in FIG. However, the display panel module assembling apparatus itself is a long apparatus that combines many processing operations. In order to maintain the substrate transfer posture and the arrangement accuracy in the entire apparatus, it is desirable to perform substrate position correction by the substrate position correction method described in FIG. 5 before and after the substrate processing position variable section.

  FIG. 14 and FIG. 15 are diagrams for explaining an embodiment of the control method of the display panel substrate transfer apparatus and the display panel module assembly apparatus using the same according to an embodiment of the present invention.

  In FIG. 14, A-1 to A-6 indicate each processing work apparatus 13, and B-1 to B-4 denote substrate transfer means 11 for transferring the substrate 10 held in front of each processing work apparatus. Is shown. B-1 to B-4 indicated by broken lines indicate the positions of the substrate transfer means 11 after the substrate transfer. As described above, the substrate transfer means 11 moves linearly in front of the processing apparatus 13, but for the convenience of illustration, the position of the substrate transfer means 11 after transfer indicated by the broken line is the substrate transfer means before transfer. Shown below the 11 position. Actually, the center lines written on the substrate transfer means 11 before and after transfer coincide with each other.

  Further, the substrate transfer means B-1 and B-3 are arranged across the plurality of processing work devices 13, but this is configured to simultaneously transfer the plurality of substrates 10 as described in FIG. A substrate transfer means is shown.

  Each substrate transport means is driven by an independent driving device 43 (M-1 to M-4). As the drive device, general linear drive means such as a linear motor or a ball screw system can be used. In FIG. 14, S-1 to S-4 are sensors 42 that detect the coordinate positions of the substrate transfer means B-1 to B-4.

  In the control apparatus of this embodiment, system operation timing control means 37 (MC) for controlling the basic operation timing of the entire apparatus system is arranged at the highest level. Substrate, substrate transfer operation control means 46 (BC-1) and each processing work apparatus control means 40 (AC-1 to AC-6) are arranged. As another configuration, as a case where a plurality of substrate transport operations are required, in the case where the substrate transport means of the present invention is configured at a plurality of locations separated from each other, the substrate transport operation control means 46 (BC-1) includes a plurality of substrate transport operations. There is also a case configuration.

  Next, a substrate transfer operation control signal in this control system will be described. As a basic operation, first, the system operation timing control unit 37 (MC) transmits a transfer operation start signal 47 to the substrate transfer operation control unit 46 (BC-1). In response to this, the substrate transfer operation control means 46 (BC-1) drives the drive means of each substrate transfer member 11A to perform the substrate transfer operation. After the transfer of the substrate 10 to the next processing work apparatus is completed, the substrate transfer operation control means 46 (BC-1) transmits a substrate transfer end signal 48 to the system operation timing control means 37 (MC).

  In response to the substrate transfer end signal 48, the system operation timing control means 37 (MC) simultaneously transmits each processing start signal 38 to each processing work apparatus control means. Each processing work device control means 40 (AC-1 to AC-6) that has received each processing work start signal 38 performs each specified processing, and after each processing is completed, each processing work device control means 40 ( AC-1 to AC-6) transmit each processing work completion signal 39 to the system operation timing control means 37 (MC).

  Upon receiving each processing work end signal 39, the system operation timing control means 37 (MC) transmits the next transfer operation start signal 47 to the substrate transfer operation control means 46 (BC-1), and repeats this. The substrate transfer processing operation is continuously controlled.

  In addition to the above, the substrate transport operation control means 46 (BC-1) and each processing work device control means 40 (AC-1 to AC-6) also provide error information at the time of occurrence of an abnormality, etc. Need to be sent to MC). As a result, the system operation timing control means 37 (MC) can collectively perform error management of the entire system and system control based on it.

  In addition to the error signal, several signals are transmitted and received by the system operation timing control means 37 (MC), the substrate transfer operation control means 46 (BC-1), and each processing work apparatus control means 40 (AC-1 to Required between AC-6). For example, the substrate transport means B-1 to B-4 need to move to the transport base position after transporting the substrate, and in each processing work apparatus A-1 to A-6, depending on the work, during the substrate transport time There is also a possibility of processing. In order to cope with these processes, the system operation timing control means 37 (MC) is used by the substrate transfer operation control means 46 (BC-1) and each processing work apparatus control means 40 (AC-1 to AC-6). It is necessary to transmit the transfer operation start signal 47 and each process start signal 38 after receiving a signal such as operation start preparation completion.

  The details of these communication signals are omitted because they depend on the function and operation mode of each processing work device, but it goes without saying that it is important to determine the function and operation mode after careful examination.

  In FIG. 14, the blocks UC-1 to UC-3 are described in A-3 of the processing work device 13. A-3 of the processing work apparatus 13 in FIG. 14 shows a configuration having a plurality of processing units 30 in the processing work apparatus shown in FIG. The blocks UC-1 to UC-3 are the control means 49 of these processing units 30. In the present embodiment, it is assumed that the processing work apparatus A-3 has three processing units 30 disposed therein.

  Thus, in the configuration having a plurality of processing units 30 in the processing work device, each processing unit mechanism control means 49 (UC-1 to UC-) is subordinate to each processing work device control means 40 (AC-3). 3) is arranged, and control of operation timing and the like is performed by each processing work device control means 40 (AC-3).

  FIG. 15 shows system operation timing control means 37 (MC), substrate transfer operation control means 46 (BC-1), and each processing work apparatus control means 40 (AC-1 to AC-6) in the embodiment of FIG. It is a figure which illustrates typically the basic signal between.

  In response to the rise of the substrate transfer control signal 50 of the system operation timing control means 37 (MC), the substrate transfer operation signal 52 of the substrate transfer operation control means 46 (BC-1) is being transferred. After the substrate transfer is completed, the substrate transfer operation signal 52 of the substrate transfer operation control means 46 (BC-1) is received and the substrate transfer control signal 50 of the system operation timing control means 37 (MC) is lowered and processed. The device operation control signal 51 is raised. Each processing work device control means 40 (AC-1 to AC-6) receives the rise of the processing device operation control signal 51, starts each processing work operation, and raises the processing device operation signal 53. After each processing work operation is completed, each processing work device control means 40 (AC-1 to AC-6) causes the processing device operation signal 53 to fall. In response to this, the system operation timing control means 37 lowers the processing apparatus operation control signal 51 and raises the substrate transfer control signal 50 for the next substrate transfer. By repeating this, continuous processing operation control is performed.

  When a malfunction occurs in the substrate transport means 11 or each processing work device 13, error occurrence information 39 is transmitted to the system operation timing control means 37 (MC). Further, the system operation timing control means 37 may be considered to be an error when the substrate transfer means and each processing operation are not completed within a specified time.

  In addition to the embodiments of the present invention described with reference to FIGS. 14 and 15, it is also possible to consider a method in which each processing work device control means 40 (AC-1 to AC-6) independently controls each drive of the substrate transport means 11. It is done. In this case, it is difficult to accurately match the movement timing between the substrate transfer means 11 because the plurality of processing work apparatus control means 40 (AC-1 to AC-6) controls the plurality of substrate transfer means 11. There is a possibility that a collision occurs between the adjacent substrate transfer means 11.

  As a method for preventing this, when moving the substrate transfer means 11 downstream, from the substrate transfer means 11 on the downstream side, when moving the substrate transfer means 11 upstream, from the substrate transfer means 11 on the upstream side, By using the method of moving sequentially, it is possible to prevent collision between adjacent substrate transfer means 11. That is, when moving the substrate transport means 11 to the downstream side, first, the processing work device control means 40 that controls the drive of the most downstream substrate transport means 11 moves and controls the most downstream substrate transport means 11, In this method, the information on the completion of the movement is transmitted to the processing work apparatus control means 40 for controlling the substrate conveying means 11 adjacent to the upstream side, and the substrate conveying means 11 is sequentially moved toward the upstream side. The same applies to the case where the substrate transport means 11 is moved to the upstream side. In this case, the processing work apparatus control means 40 is arranged so as to move the upstream substrate transport means 11 sequentially from the drive control of the most upstream substrate transport means 11. In addition, timing information is transferred.

  In this method, the substrate transfer operation control means 46 (BC-1) is unnecessary, but a waiting time occurs between the reciprocating operations of the substrate transfer means 11. For this reason, the substrate transfer means 11 must be stopped for a certain period of time on the upstream side and the downstream side. In the operation of the entire system, this method is not suitable when it is necessary to strictly define the time for the substrate transfer means 11 to stop at the upstream side or the downstream side.

  Finally, another embodiment of the display panel substrate transfer apparatus for realizing the present invention will be described with reference to FIGS.

  In FIG. 16, the substrate holding means 12 and the substrate transfer means 11 are composed of comb-shaped transfer members facing each other. The substrate holding means 12 is integrated on the processing work apparatus 13 side, that is, on the substrate processing side (a portion surrounded by A in the figure). Thereby, the substrate processing side can hold the substrate 10 smoothly. The substrate transfer means 11 has an integrated comb structure opposite to the processing work apparatus 13, that is, on the opposite side of the substrate processing side.

  18 is a diagram showing a side view (cross section BB) of the configuration of the display panel substrate transfer device of FIG. As shown in FIG. 18, the substrate holding member 12A is a structure that is cantilevered by an integrated part (A part in FIG. 16) on the substrate processing side. Further, the substrate transport member 11A facing this is a structure that is cantilevered by an integral part on the opposite side of the substrate processing side.

Next, the basic transfer operation of the display panel substrate transfer apparatus according to the embodiment of the present invention shown in FIGS. 16 and 18 will be described.
In FIG. 16, the substrate transport member 11A is positioned below the substrate holding member 12A, and the substrate 10 to be processed at this time is held by the substrate holding member 12A. However, the substrate 10 is not shown in FIG.

  At the time of substrate transfer, first, the substrate transfer member 11A is moved upward by the substrate transfer member lifting / lowering means 14. As a result, the substrate 10 disposed on the substrate holding member 12A is transferred onto the substrate transport member 11A. The substrate transfer means 11 is raised to a height at which the substrate transfer member 11A as a comb portion does not collide with the substrate holding member 12A when moving in the transfer direction (X direction). The broken line in FIG. 18 indicates the raised position of the substrate transport member 11A. Thereafter, the substrate transport means 11 transports the substrate 10 by moving the slider 29 in the X direction to the next processing work apparatus position. The substrate transfer means 11A moves down to the next processing work apparatus position and then descends to deliver the held substrate 10 to the substrate holding member 12A at the next work position. The substrate transport means 11 is moved to a position where the substrate transport member 11A, which is a comb portion, does not collide with the substrate holding member 12A, and then moves on the guide rail 15 of the slide stage to the original substrate 10 receiving position. Move to and go back. In FIG. 18, the solid line indicates the lowered position of the substrate transport member 11A.

  Even with such a structure, the substrate 10 between the processing work apparatuses according to the present invention can be sequentially linearly moved from the substrate holding means member 12A at the transfer start point to the substrate holding member 12A at the transfer end point. Can be transported simultaneously in synchronization.

  However, in the configuration of this embodiment, as described above, it is necessary to raise and lower the substrate transport member 11A that is the comb portion to a position that avoids the substrate holding member 12A that is the comb portion. On the other hand, in FIG. 1, which is the previous embodiment, the upper and lower sides are sufficient so that the substrate transport member 11A separates the substrate 10 from the substrate holding member 12A regardless of the height of the substrate holding member 12A. Therefore, in the structure of the embodiment of the present invention shown in FIGS. 16 and 18, the substrate in the large vertical direction (Z direction) is larger than at least the height of the substrate holding member 12A before and after transporting the substrate, compared to the structure of the previous embodiment. The transport member 11A needs to be moved. This has a weak point that the moving time of the substrate 10 tends to be longer than the configuration of the embodiment of FIG. However, in other respects, it is one configuration that satisfies the basic functions of the present invention.

  Conversely, the structure of another embodiment of the present invention shown in FIGS. 16 and 18 is separated from the mechanical parts of the substrate holding means 12 and the substrate transport means 11 as compared with the configuration shown in the embodiment of FIG. There is an advantage that it is easy to simplify the configuration, for example, it can be arranged at a position.

  In the structure of the embodiment of the present invention shown in FIGS. 16 and 18, when the size of the substrate to be transferred is large, the cantilever comb portions that are the substrate holding member 12A and the substrate transfer member 11A become long. For this reason, in order to maintain the strength of the comb portion, it is necessary to increase the thickness of the comb portion in the Z direction. For this reason, when applied to a large television substrate 10 of several tens of inches or more, it is difficult to say that the configuration is very preferable.

  However, in the case of a relatively small substrate 10 such as 20 inches or less, the thickness of the comb portion does not need to be so large, so the vertical movement distance is reduced, and the configuration is simplified. It is an effective implementation means of the invention.

FIG. 17 and FIG. 19 are diagrams for explaining still another embodiment of the display panel substrate transfer apparatus for realizing the present invention. FIG. 19 is a side view (cross-section BB) of the configuration of the display panel substrate transfer apparatus of FIG.
17 and FIG. 19, the portion supporting the substrate transport member 11A, which is a comb portion of the substrate transport means 11, is disposed between the substrate holding means 12. Further, the substrate holding means 12 is divided into two parts and arranged on the side opposite to the processing work apparatus 13 side.

  The substrate transfer operation in the configuration of the embodiment of the display panel substrate transfer apparatus of the present invention shown in FIGS. 17 and 19 is basically the same as the operation described with reference to FIGS.

  By adopting the embodiment of the display panel substrate transfer device of the present invention shown in FIGS. 17 and 19, the cantilever length of the comb portion of the substrate transfer member 11A and the substrate holding member 12A can be shortened. That is, it is possible to use a relatively thin comb structure, and it is possible to reduce the movement distance of the up and down movement when the substrate is transported. In other words, the structure of this embodiment is easier to handle a larger substrate than the embodiments shown in FIGS. However, it is needless to say that the configuration is more complicated than the configuration of the embodiment of FIGS.

  By using the display panel substrate transfer apparatus of the present invention as described above, a wide variety of substrates from small to large substrates can be transferred with high accuracy and high speed.

  Furthermore, flexible substrate holding and carrying operations according to the substrate size are possible. In the display panel module assembling apparatus of the present invention, continuous processing of substrates with the minimum width required for each processing mechanism according to the substrate size. Can be realized.

  According to the present invention, a display panel substrate transport apparatus capable of transporting and assembling a wide range of substrates from small to large substrates with high accuracy and high speed, and further reducing the overall length of the apparatus, and a display panel module assembly using the display panel substrate transport apparatus Equipment can be provided.

It is a figure for demonstrating the basic composition of the display panel board | substrate conveyance apparatus of this invention, and the display panel module assembly apparatus using the same. It is a figure for demonstrating typically the operation state at the time of each processing operation and a board | substrate conveyance, and is a figure which shows the cross section from the conveyance direction of a board | substrate. It is a figure for demonstrating typically the operation state at the time of each process operation and a board | substrate conveyance, and is a figure which shows the cross section from an apparatus side. It is a figure explaining Step1 to Step4 among processing and conveyance sequence of a substrate in a display panel substrate conveyance device and the whole display panel module assembly device using the same. FIG. 5 is a diagram for explaining Step 5 and Step 6 in the substrate processing and transport sequence following FIG. It is a figure for demonstrating the board | substrate position correction system by a board | substrate holding means. It is a schematic diagram explaining the force applied to a board | substrate produced at the time of board | substrate delivery, a deformation | transformation of a board | substrate, etc. FIG. It is a figure for demonstrating holding | maintenance of the board | substrate from which size differs by the board | substrate holding means and board | substrate conveyance means of this invention. It is a figure for demonstrating the display panel board | substrate conveyance mechanism at the time of envisioning a very large-sized board | substrate conveyance. It is a figure for demonstrating the system which simplifies the mechanism of the display panel board | substrate conveying apparatus of this invention more. It is a figure for demonstrating the system with which several process units work simultaneously with respect to one board | substrate. It is a figure which shows an example of the reference mark provided in the board | substrate. It is a figure which shows one Example of the processing unit structure which performs the positioning process with respect to a board | substrate. It is a figure explaining one Example of the new display panel module assembly apparatus by the display panel board | substrate conveyance apparatus and processing unit mechanism of this invention. It is a figure for demonstrating one Example of the control part structure in the display panel board | substrate conveyance apparatus of this invention. It is a figure explaining one Example of the basic control system in the display panel board | substrate conveyance apparatus of this invention. It is a figure explaining the other Example structure in the display panel board | substrate conveyance apparatus of this invention. It is a figure explaining further another Example structure in the display panel board | substrate conveyance apparatus of this invention. FIG. 17 is a side sectional view of the embodiment of the present invention shown in FIG. FIG. 18 is a side sectional view of the embodiment of the present invention shown in FIG.

Explanation of symbols

1: Substrate long side (source side) processing equipment group 2: Substrate rotating means 3: Substrate short side (gate side) processing equipment group 4: Terminal cleaning processing equipment (source side)
5: ACF application processing equipment (source side)
6: TAB / IC processing equipment (source side)
7: Main crimping processing equipment (source side)
8: Terminal cleaning processing equipment (gate side)
9: ACF application processing equipment (gate side)
10: Substrate (display panel substrate) 11: Substrate carrying means 11A: Substrate carrying member 11S: Auxiliary substrate carrying member 12: Substrate holding means 12A: Substrate holding member 12S: Auxiliary substrate holding member 13: Processing device 14 : Substrate transport member elevating means 15: guide rail 16 of slide stage 16: operating range of substrate holding member 17: gap between substrate holding member and substrate transport means 18: suction hole on substrate transport means surface 19: suction hole on substrate support means surface 20: Arrangement area of small substrate 21: Arrangement area of large substrate 22: Suction chamber under suction hole 23: Opening / closing valve 24: Negative pressure system supplied from suction pump or the like 25: Arrangement area of very large substrate 26: Friction Substrate holding part 27 with low resistance: side closer to the processing side of the substrate (substrate holding / transfer area)
28: Side far from the processing side of the substrate (substrate low friction holding region)
29: Slide stage slider 30: Processing unit for processing operation 31: End mark indicating display panel end 32: Mounting position mark indicating mounting position of TAB, IC, etc. 33: XYZθ operating means for moving the entire processing unit 34: CCD camera 35 for detecting a reference mark on the substrate 35: Processing position correction means 36: Processing unit mechanism B (processing unit different from 30) for processing processing
37: System operation timing control means (MC)
38: Each processing work start signal 39: Each processing work end signal (including error signal and work processing signal)
40: Each processing work device control means (AC-1 to AC-6)
41: Control communication signal 42 between each processing work device control means and each processing work device 42: Sensor 43 for detecting the coordinate position of the substrate transport members B-1 to B-4, etc .: Drive device for each substrate transport member (M− (1 to M-4)
44: Detection signal such as coordinate position of each substrate transport member 45: Operation signal 46 of the driving device for each substrate transport member: Substrate transport operation control means (BC-1)
47: Transfer operation start signal 48: Substrate transfer end signal 49: Processing unit mechanism control means (UC-1 to UC-3) in the processing work apparatus
50: Substrate transfer control signal of system operation timing control means 51: Processing device operation control signal of system operation timing control means 52: Substrate transfer operation signal of substrate transfer operation control means 53: Processing device operation signal of each processing work device control means (1) (2) (3) ...

Claims (21)

In a display panel module assembling apparatus for assembling a display panel by sequentially transporting a display panel substrate between a plurality of processing devices and mounting electronic components on the edge of the display panel substrate,
The substrate transfer apparatus for transferring the display panel substrate includes a substrate holding means in which a plurality of substrate holding members elongated in a certain direction are arranged in parallel to a surface parallel to the substrate conveying surface, and the substrate conveying member elongated in a certain direction includes the substrate holding means. A plurality of substrate transport members arranged in parallel on a surface parallel to the substrate transport surface, and at least one of the substrate transport members disposed between the substrate holding members; A display panel module assembling apparatus, which holds a display panel substrate disposed on the substrate and conveys the substrate by linearly moving in the substrate conveyance direction.   The display panel module assembling apparatus according to claim 1, wherein the certain direction is a conveyance direction of the substrate.   The display panel module assembling apparatus according to claim 1, wherein the certain direction is a direction perpendicular to a transport direction of the substrate. In a display panel module assembling apparatus for assembling a display panel by sequentially transporting a display panel substrate between a plurality of processing devices and mounting electronic components on the edge of the display panel substrate,
The substrate transfer device for transferring the display panel substrate includes a substrate holding means having a substrate holding member for holding the display panel substrate at a work position of the processing work apparatus and other substrate holding members downstream of the display panel substrate processing procedure. An apparatus for assembling a display panel module, comprising substrate transport means for transporting the display panel substrate, the substrate transport means comprising operating means linearly movable in the transport section.   The substrate transfer means has means for raising and lowering the substrate transfer member relative to the substrate holding member of the substrate holding means and moving the substrate transfer member within a specified range along the substrate transfer direction. 5. The display panel module assembling apparatus according to claim 1, further comprising an operation mechanism capable of reciprocating movement.   A plurality of the substrate transfer means are arranged, and the reciprocation distance of each substrate transfer means can be set independently, and the plurality of substrate transfer means place the display panel substrate on the substrate holding means in the substrate transfer direction at the same timing. The display panel module assembling apparatus according to claim 5, wherein the display panel module assembling apparatus is moved.   7. The display panel module assembling apparatus according to claim 6, further comprising a transfer distance varying means capable of changing the reciprocation distance according to each processing work apparatus, processing substrate conditions and the like.   6. The substrate posture detecting means for detecting the posture of the substrate, and the substrate posture correcting means for correcting the substrate posture based on the detection result of the substrate posture detecting means. Display panel module assembly equipment.   The substrate posture is the posture at the working position of each processing work apparatus, a plurality of the substrate holding means are arranged corresponding to each processing work apparatus, and at least one of the plurality of arranged substrate holding means is: 9. The display panel module assembling apparatus according to claim 8, further comprising the substrate attitude detecting means and the substrate attitude correcting means.   The substrate posture is at least one of the substrate posture at the processing position of the processing work position and the substrate posture at the time of the transfer operation, and the substrate posture correcting means is configured based on the detection result of the substrate posture detecting means. 9. The display panel module assembling apparatus according to claim 8, wherein the transfer means is means for correcting the substrate posture position when the substrate is transferred to and from the substrate holding means.   Each of the processing work apparatuses includes at least one processing unit that performs a predetermined process at the edge of the substrate that has been transported, and substrate posture detection means that detects the posture of the substrate that has been transported. 5. The display panel module assembling apparatus according to claim 1, further comprising a processing unit posture correcting unit that corrects a relative position of the processing unit with respect to the substrate based on a detection result of the posture detecting unit.   5. The display panel module assembling apparatus according to claim 1, wherein the holding means has a low friction substrate holding portion having a small frictional resistance on the opposite side of the processing work device.   5. The display panel module assembling apparatus according to claim 1, further comprising a plurality of the substrate transfer devices, and means for changing a posture or a transfer direction of the substrate between the substrate transfer devices. In a display panel module assembling method for assembling a display panel by sequentially transporting a display panel substrate between a plurality of processing devices and mounting electronic components on the edge of the display panel substrate,
The means for transporting the substrate receives the substrate from the substrate holding means provided corresponding to the work position after the work at the work position of the processing work apparatus is completed, and receives the substrate on the downstream side of the work position. Moves linearly to the work position, passes the substrate to the substrate holding means provided corresponding to the work position on the downstream side, and straightens to the original work position until the work is completed at the work position on the downstream side. Display panel module assembling method, wherein the display panel module moves back and forth.   15. The display panel module assembling method according to claim 14, wherein the means for transporting the substrate transports the plurality of substrates arranged linearly in the transport direction at a time. In the substrate transfer apparatus that sequentially and sequentially transfers a plurality of substrates arranged on the transfer,
A substrate holding means in which a plurality of substrate holding members elongated in a certain direction are juxtaposed in a plane parallel to the transfer surface of the substrate, and a plurality of substrate holding members elongated in a certain direction are juxtaposed in a plane parallel to the transfer surface of the substrate. , At least one of the substrate transport members includes a substrate transport unit disposed between the substrate holding members, and the substrate transport unit holds the substrate disposed on the substrate holding member, and the substrate transport direction A substrate transport apparatus for transporting a substrate by linearly moving the substrate.   The substrate transport apparatus according to claim 16, wherein the certain direction is a transport direction of the substrate.   The substrate transport apparatus according to claim 16, wherein the certain direction is a direction perpendicular to a transport direction of the substrate. In a substrate transfer apparatus for transferring a plurality of substrates arranged on the transfer in order,
Receiving the substrate from the substrate holding means, linearly moving the substrate to another substrate holding means downstream of the substrate holding means, transporting the substrate, passing the substrate to the other substrate holding means, A substrate transfer apparatus characterized by linearly moving back to the original substrate holding means after passing the substrate.   20. The substrate transfer apparatus according to claim 16, wherein the holding means has a region having a small frictional resistance on the opposite side of the processing work apparatus.   20. The substrate transfer apparatus according to claim 19, further comprising a plurality of the substrate transfer apparatuses, and means for changing a posture or a transfer direction of the substrate between the substrate transfer apparatuses.

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