CN101814407B - Assembling device and method for display panel and a treatment device thereof and a baseplate delivery mechanism - Google Patents

Assembling device and method for display panel and a treatment device thereof and a baseplate delivery mechanism Download PDF

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Publication number
CN101814407B
CN101814407B CN 200910179069 CN200910179069A CN101814407B CN 101814407 B CN101814407 B CN 101814407B CN 200910179069 CN200910179069 CN 200910179069 CN 200910179069 A CN200910179069 A CN 200910179069A CN 101814407 B CN101814407 B CN 101814407B
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China
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substrate
processing
panel
processing unit
panel substrate
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CN101814407A (en
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宫坂彻
片保秀明
山崎不二夫
斧城淳
渡边丰
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Hitachi Ltd
Hitachi High Tech Corp
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Hitachi Ltd
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Priority claimed from JP2008259960A external-priority patent/JP5479701B2/en
Priority claimed from JP2008259944A external-priority patent/JP5317618B2/en
Priority claimed from JP2009022100A external-priority patent/JP5506203B2/en
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
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Abstract

This invention provides an assemblying device for display panel, where different dealing devices can be connected with each other with a necessary minimal width, therefore, reducing the whole length of the display module assemblying device, furthermore, providing varied substrates with different sizes ranged from small size to great size so as to forming a high precision and high speed dealing process. By mean of arranging multiple slight substrate holding components and substrate transmitting components side-by-side along certain direction especially in the substrate transmitting direction, an integrated substrate holding component and substrate transmitting mechanism achieves the object to transmit varied substrates with different sizes ranged from small size to great size. In addition, the display panel substrate that transmits different dealing devices all together and with same time order, can connect different dealing devices with a necessary width, furthermore, by means of moving the substrate transmitting mechanism after transmitting motion to the transmitting upstream during substrate dealing operation, high precision and high speed substrate transmitting and dealing motion can be achieved.

Description

Display floater apparatus for assembling and method and processing operation apparatus and base board delivery device
Technical field
The present invention relates to periphery lift-launch drive IC or so-called the TAB (=Tape Automated Bonding belt automatic welding) connections such as COF (the flexible soft board of Chip on Film), FPC (Flexible Printed Circuits flexible printed circuit) at the display floater (display unit substrate) of the FPD such as liquid crystal or plasma (=Flat Panel Display flat-panel monitor), and the display panel module assembly device of peripheral substrate (PCB=printed circuit board printed circuit board (PCB)) is installed.More particularly, can more effectively configure each treatment process in display panel module assembly device or the panel substrate conveying device of carrying display floater of more stably passing on.
Background technology
Display panel module assembly device is to carry out successively a plurality for the treatment of process by the panel substrate of the FPD of plasma etc. (or for example writing the substrate for PCB exactly in the situation of PCB referred to as substrate, other substrates), and the device of drive IC, TAB and PCB substrate etc. is installed at the periphery of described substrate.
for example, an example as treatment process, comprise: (1) removes the terminal cleaning process of the TAB attaching section of substrate end, (2) the ACF operation of the substrate end attaching anisotropic conducting film (ACF=Anisotropic Conductive Film) after removing, (3) attaching the position positioning baseplate distribution of ACF, carry the lift-launch operation of TAB or IC, (4) by the TAB that carries is added thermo-compressed, utilize the fixing crimping process of ACF film, (5) check TAB or the position of IC or the inspection operation of connection status of carrying, (6) at the opposition side of the substrate-side of TAB with attaching PCB substrates such as ACF and PCB operation (a plurality of operation) of carrying etc.And then, according to quantity or the TAB of processing or the quantity of IC etc. on the limit of the substrate of processing, need to respectively process the quantity of position or make the processing unit etc. of substrate rotation.
Display panel module assembly device carries out the processing operation apparatus of these processing operations by continuous configuration, utilize substrate carrying mechanism with substrate conveying substrate between it, carries out substrate periphery and processes.
As the method for managing throughout conveying substrate between apparatus for work, described in patent documentation 1 and 3, disclose when reaching from the operation objective table to mounting table from the mounting table of the placement of the substrate before operation to the operation objective table, use is lifted substrate from the below, send into the mode of movement of the mechanism that sends.In addition, in patent documentation 2 and then improve the carrying method of substrate, disclose and managed throughout the substrate that the apparatus for work configuration comprises the interdigitated electrode structure arm and keep carrying objective table, passed on thus substrate between each job processing apparatus, the mode of carrying successively.
And then, in patent documentation 3 in order to shorten the device total length, as the carrying method that can shorten the configuration space between each processing operation apparatus (operation mounting table), the substrate structure for conveying that comprises based on the conveying mechanism of a pair of belt conveyer and the panel supporting table that configures between it is disclosed.
In addition, the display panel conveying device with regard to the conveying mechanism that used 4 records of above-mentioned patent documentation 1 and patent documentation discloses and has utilized absorption affinity to keep display floater, switches the device of carrying when being adsorbed to destination locations.
As each processing operation apparatus, in patent documentation 1, the work operations platform that carries out each processing operation and structure from the mechanism that sends panel substrate to described work operations platform that send into are disclosed.In this structure, the work operations platform of sending into panel substrate keeps panel substrate, can be in width, length and the horizontal rotatio direction adjusted of substrate, carry out the location of the processing position of panel substrate at the work operations platform, implement each processing operation.
In addition, in patent documentation 2, disclose manage throughout apparatus for work configuration can be with the structure of panel substrate to the interdigitated electrode structure arm of three axles and horizontal rotatio direction running.In this structure, utilize the described interdigitated electrode structure arm be provided with each processing operation apparatus, pass on the location action of processing position of the action of panel substrate and panel substrate.
And then, in patent documentation 3, configuration display floater supporting table is disclosed between the conveying mechanism of a pair of belt conveyer and so on, utilize described display floater supporting table, carry out the method for location action of the processing position of panel substrate.
[patent documentation 1] Japanese kokai publication hei 8-26475 communique
[patent documentation 2] TOHKEMY 2007-99466 communique
[patent documentation 3] TOHKEMY 2003-76290 communique
[patent documentation 4] TOHKEMY 2008-134439 communique
At first, consider the problem of the method for conveying substrate between apparatus for work of managing throughout.In the display panel module assembly device of the conveying mechanism in the past that has used above-mentioned patent documentation 1, conveying mechanism along the configuration line configuration substrate of processing operation apparatus, therefore, the direction of keeping straight on the configuration direction of processing operation apparatus unit is namely installed Width and is broadened, and, need the position of readiness of each conveying arm etc., therefore, interval between processing operation apparatus broadens, and the device length of processing operation apparatus configuration direction is that the total length of display panel module assembly device becomes very long.
Need to pass on too the place of substrate in patent documentation 2 between processing operation apparatus, therefore, the display panel module assembly device total length is elongated.And then the substrate carrying mechanism of processing operation apparatus need to be gone to the processing operation apparatus of upstream side and accept ensuing treatment substrate after the processing operation apparatus of side passes on downstream with substrate.Each processing operation apparatus standby to ensuing treatment substrate is sent into, and therefore, has the problem of the operating efficiency reduction of each processing operation apparatus.
Patent documentation 3 is by the banded conveying mechanism of the transmission of using each processing operation apparatus, carry out simultaneously the structure of sending of the substrate after the sending into and process of the processing prebasal plate of each processing operation apparatus, do not need to manage throughout the position of readiness that substrate or arm are set between apparatus for work, each processing operation apparatus can be approached and configures, can shorten the display panel module assembly device total length.
Yet, also stayed some problems in disclosed mode in patent documentation 3.
The required minimum widith of each processing operation apparatus roughly depends on the length on limit of the substrate of processing.The minimum widith of the processing operation apparatus that the long limit for the treatment of substrate and the processing of minor face are required is different, and in making the processing operation section of substrate rotation, the diagonal angle length of substrate needs minimum.And then, in processing with processing operation apparatus on one side, also produce difference on the minimum widith of the processing operation apparatus of needs.For example, in the formal crimping process of the high pressure of needs or temperature, need to guarantee the intensity of processing unit framework etc., therefore, the necessary width of processing operation apparatus is in than other and becomes large tendency.In addition, manage throughout apparatus for work in each, necessary minimum widith is also slightly different.
But, in patent documentation 3 in the structure of suggestion, utilize the driving of same belt conveyer to carry out simultaneously sending and sending into from the substrate of each treating stations.But, owing to utilizing same belt conveyer to send and send into, therefore, need substrate conveying speed or distance between processing operation apparatus identical.Therefore, need the spacing between each processing operation apparatus also identical.For like this, each processing operation apparatus need to be consistent with the Breadth Maximum of the processing operation apparatus that links.Therefore, in the substrate mode of movement of patent documentation 3, can not be configured to each processing operation apparatus that minimum necessary width consists of with closest approach.
In this mode, if manage throughout on the transporting velocity of band of apparatus for work and have difference, also may make on principle on the amount of movement of substrate of conveying and have difference, but the band between pass on the time, the band with speed difference contacts with substrate surface, therefore, the possibility of substrate surface being given damage etc. is high, and, cause being difficult to problem that ensures delivery precision etc., can not adopt in reality.
In addition, pass between disclosed in patent documentation 3, as to manage throughout the apparatus for work setting banded conveyer in the mode of substrate, even the band transporting velocity of each processing operation apparatus is controlled to be identical, the delivery precision that can not eliminate the transfering department place fully reduces the danger of the damage of (pass on precision) or substrate surface etc.Therefore, naturally for it is avoided, there is the limit on the substrate conveying speed that can carry and pass on, is difficult to carry out substrate at a high speed and carries.
Enter, in the mode of patent documentation 3, with a pair of banded conveyer conveying substrate, therefore, the substrate of conveying need to be for loading in the substrate of the size of the conveyer of a pair of (two sides).Therefore, also has the problem that is difficult to tackle small-sized substrate.
In addition, the panel substrate conveying device of having used the conveying mechanism of patent documentation 1 and patent documentation 4 records is to utilize absorption affinity to keep display floater, switches the device of carrying when being adsorbed to destination locations.Thereby, if due to each shortening of processing the activity duration, make to carry to become at a high speed, existing when passing at a high speed the switching of attraction of part of the fixed part of display floater and acceptance, to need to improve the problem of the reliability of carrying at a high speed and passing on.In addition, in the absorption of panel substrate is carried, the absorption mistake in the time of may passing on.
Secondly, consider the problem of the structure of each processing operation apparatus.In the structure of disclosed each processing operation apparatus in the past, all keep carrying the substrate of coming in above-mentioned patent documentation 1～3, and, after positioning action, implement each processing operation.
As mentioned above, display panel module assembly device links multiple processing operation apparatus, and display floater is carried out various processing operations continuously.In the structure of disclosed processing operation apparatus, due to its processing operation content, produce difference at processing operation on the time in above-mentioned patent documentation 1～3.Therefore, the processing operation apparatus of the operation that the time is short need to be waited for the end of processing operation apparatus of the operation of spended time, the delivery interval of substrate is limited by the processing operation apparatus of the operation of spended time, and, the time that operation stops occurs in the processing operation apparatus of short operation of time.
For efficient each processing operation apparatus that turns round more well, consider the processing operation apparatus of the operation of spended time is accelerated and the processing operation apparatus of short operation of the time that is linked to, obtain the productive temp balance of each treatment process.But in this mode, the quantity with processing operation apparatus of link increases, the problem that the length of display panel module assembly device integral body becomes very long.
Summary of the invention
The first purpose of the present invention is to provide by improving the conveying mechanism of substrate, can constitute display panel module assembly device or assemble method or the panel substrate conveying device of small-sized special shortening device total length.
In addition, the second purpose of the present invention is to provide can utilize same conveying mechanism or carrying method, with the substrate of various sizes between each continuous processing operation apparatus or each processing unit with at a high speed and/or high accuracy pass on display panel module assembly device or assemble method or the panel substrate conveying device of carrying.
And then the 3rd purpose of the present invention is to provide for each processing operation apparatus, can link continuously with the minimum interval of necessity display panel module assembly device or the panel substrate conveying device that configures each processing operation apparatus.
In addition, the 4th purpose of the present invention is to improve the reliability that the high speed in the conveying of panel substrate is carried and passed on.
And then the 5th purpose of the present invention is to be provided in the absorption conveying of panel substrate, avoids panel substrate conveying device or panel substrate carrying method or the display panel module assembly device of the generation of the absorption mistake when passing on.
In addition, the 6th purpose of the present invention is to provide and can constitutes the display floater apparatus for assembling that shortens the display panel module assembly device total length.
And then the 7th purpose of the present invention is to improve the operating efficiency of each processing operation in comprising the display panel module assembly device or assemble method that shows multiple processing operation.
At last, the 8th purpose of the present invention is to provide and can realizes the above-mentioned the 6th and the 7th these two purpose panel substrate assembling processing operation apparatus.
In order to realize the above-mentioned first or the second or the 3rd purpose, First Characteristic of the present invention is to have: substrate holding mechanism, and it is disposed on the face parallel with the conveyor surface of described panel substrate at substrate holding structure elongated on certain orientation side by side with a plurality of; Substrate carrying mechanism, it is disposed on the face parallel with the conveyor surface of described panel substrate at substrate transfer member elongated on described certain orientation side by side with a plurality of, at least one of described substrate transfer member is disposed between described substrate holding structure, described substrate carrying mechanism keeps the described panel substrate that is disposed on described substrate holding structure, and move point-blank on the substrate throughput direction, carry thus described panel substrate.
In addition, in order to realize the above-mentioned first or the second or the 3rd purpose, Second Characteristic of the present invention is, carry the panel substrate conveying device of panel substrate to have: substrate holding mechanism, it has the substrate holding structure that keeps panel substrate at the job position of described processing operation apparatus; Substrate carrying mechanism, it is delivered to panel substrate other described substrate holding structures in the downstream of panel substrate treatment step, and described substrate carrying mechanism possesses: works, it can move point-blank in the interval of described conveying.
And then, in order to realize the above-mentioned first or the second or the 3rd purpose, the present invention except first or Second Characteristic, the 3rd is characterised in that, described substrate carrying mechanism has the mechanism that makes described substrate transfer member relatively rise and descend with respect to the described substrate holding structure of described substrate holding mechanism, and, have and can make described substrate transfer member along coming and going mobile actuating mechanism in the scope of the regulation of substrate throughput direction.
In addition, in order to realize the above-mentioned first or the second or the 3rd purpose, display panel module assembly device of the present invention is except the 3rd feature, the 4th is characterised in that, dispose a plurality of described substrate carrying mechanisms, and can set independently the round displacement of each described substrate carrying mechanism, described a plurality of substrate carrying mechanisms move the described panel substrate on described substrate holding mechanism with identical sequential on described substrate throughput direction.
In addition, in order to realize the above-mentioned first or the second or the 3rd purpose, display panel module assembly device of the present invention is except the 4th feature, and the 5th is characterised in that, can change according to described processing operation apparatus or treatment substrate condition etc. the fed distance changeable mechanism of described round displacement.
And then, in order to realize the above-mentioned first or the second or the 3rd purpose, the described feature of any one, the 6th is characterised in that display panel module assembly device of the present invention in first～the 3rd, have: substrate posture detection mechanism, it detects the posture of described panel substrate; Substrate posture correction mechanism, it revises the posture of described panel substrate based on the testing result of described substrate posture detection mechanism.
in addition, in order to realize the above-mentioned first or the second or the 3rd purpose, display panel module assembly device of the present invention is except the 6th feature, the 7th is characterised in that, the posture of described panel substrate is the posture at the job position place of each described processing operation apparatus, described substrate holding mechanism is corresponding with each described processing operation apparatus and configure a plurality of, at least one described substrate holding mechanism has the substrate posture correction mechanism based on the testing result correction substrate posture of the substrate posture detection mechanism of the substrate posture that detects the job position place and described substrate posture detection mechanism.
In addition, in order to realize the above-mentioned first or the second or the 3rd purpose, display panel module assembly device of the present invention except first or Second Characteristic, the 8th is characterised in that, described each processing operation apparatus possesses: the processing unit of at least more than one of the processing that the edge of the described panel substrate of coming in conveying is stipulated; Detect to carry the substrate posture detection mechanism of the posture of the described panel substrate of coming, based on the testing result of described substrate posture detection mechanism, revise the relative position with respect to the described processing unit of substrate.
And then, in order to realize the above-mentioned first or the second or the 3rd purpose, display panel module assembly device of the present invention is except first～Second Characteristic, the 9th is characterised in that, have a plurality of described panel substrate conveying devices, have the posture of the described panel substrate of change or the mechanism of throughput direction between described panel substrate conveying device.
In addition, in order to realize the above-mentioned first or the second or the 3rd purpose, display panel module assembly device of the present invention or base board delivery device, the 9th is characterised in that, described substrate holding mechanism has the little low rubbed substrate maintaining part of frictional resistance at the opposition side of described processing operation apparatus.
and then, in order to realize the above-mentioned first or the second or the 3rd purpose, the 11 of display module assemble method of the present invention is characterised in that, the mechanism that carries panel substrate is after the end of job at the job position place of described processing operation apparatus, from accepting described panel substrate with the substrate holding mechanism of the corresponding setting of described job position, described panel substrate is moved to point-blank the job position in the downstream of described job position, give substrate holding mechanism with the corresponding setting of job position in described downstream with described panel substrate, and mobilely point-blank before the end of job at the job position place in described downstream be back to original job position.
In addition, in order to realize the above-mentioned first or the second or the 3rd purpose, panel substrate conveying device of the present invention, the 12 is characterised in that, accepts described substrate from substrate holding mechanism, described panel substrate is moved to point-blank other substrate holding mechanisms in the downstream of described substrate holding mechanism, carry described substrate, pass on described panel substrate to described other substrate holding mechanisms, pass on after described substrate, mobilely point-blank be back to original described substrate holding mechanism.
In addition, in order to realize the above-mentioned the 4th or the 5th purpose, and then, the of the present invention the 13 is characterised in that, in the panel substrate conveying device, have adsorption system, it produces the above attraction state of three phases at least of state as described below, the first attraction state, do not occur under will the acceleration and deceleration when panel substrate is carried panel substrate come off or the first attraction force acts of position skew in panel substrate; The second attraction state will not have the second attraction force acts of confining force in panel substrate to panel substrate; The 3rd attraction state, with three attraction force acts of size between described the first attraction and described the second attraction in panel substrate.
In addition, in order to realize the above-mentioned the 4th or the 5th purpose, and then the of the present invention the 14 is characterised in that, has a plurality of described adsorption systems, and wherein at least two adsorption system pressure losses link.
In order to realize the above-mentioned the 6th or the 7th or the 8th above-mentioned purpose, make the processing operation of processing operation apparatus consist of around display panel module assembly device or assemble method or panel substrate assembling processing operation apparatus.
Perhaps, shorten production line length ground formation display panel module assembly device or assemble method or the panel substrate assembling processing operation apparatus of display panel module assembly device.
Specifically, in order to realize the above-mentioned the 6th or the 7th or the 8th above-mentioned purpose, the 15 is characterised in that, in display panel module assembly device or assemble method, in at least more than one described processing operation apparatus, one side have the plural at least processing unit that carries out simultaneously processing operation to a panel substrate.
In addition, in order to realize the above-mentioned the 6th or the 7th or the 8th above-mentioned purpose, the 16 is characterised in that, in display panel module assembly device or assemble method, have: cut apart long processing limit operation of processing time in described various processing, and carry out simultaneously the plural at least processing unit of processing operation.
And then, in order to realize the above-mentioned the 6th or the 7th or the 8th above-mentioned purpose, the above-mentioned the 15 and sixteenth feature base on, the 17 is characterised in that, described refer to simultaneously before described panel substrate is carried to ensuing job position during the meaning that finishes of processing operation.
In addition, in order to realize the above-mentioned the 6th or the 7th or the 8th above-mentioned purpose, except above-mentioned any feature of the 15～the 17, the 18 is characterised in that, described processing unit detects the posture of the panel substrate of carrying out processing operation, based on described result, revise the processing limit of panel substrate and the relative position of described processing unit.
In addition, in order to realize the above-mentioned the 6th or the 7th or the 8th purpose, except above-mentioned any feature of the 15～the 17, the 19 is characterised in that, described processing unit can move on the direction parallel with described processing edge direction.
And then, in order to realize the above-mentioned the 6th or the 7th or the 8th purpose, except above-mentioned any feature of the 15～the 17, the 20 is characterised in that, carry out simultaneously the processing operation in described a plurality of processing unit, the operation timing of mobile transfer shift action is moved and shifts to ensuing job position in the processing in a plurality of processing units of the described processing operation of control.
At last, in order to realize above-mentioned the 8th purpose, the 21 is characterised in that, in processing operation apparatus is used in the panel substrate assembling, have at least more than one the processing unit that one side of a panel substrate is carried out operation, described processing unit has the mechanism that can move on the direction parallel with described processing edge direction.
The invention effect
According to the invention described above as can be known, manage throughout on the job position in apparatus for work, to be disposed at side by side on the direction of keeping straight on the substrate throughput direction at substrate holding structure elongated on the substrate throughput direction, and, form the substrate carrying mechanism that has configured equally side by side substrate transfer member elongated on the substrate throughput direction between the elongated a plurality of described substrate holding structure of described substrate holding mechanism, can keep and carry to large substrate small-sized.
Carry in action at substrate, the substrate transfer member is relatively risen with respect to described substrate holding structure, thus substrate is lifted separation from the substrate maintaining part with small quantity, after high-speed slide is delivered to the position of regulation, described substrate transfer member is relatively descended with respect to described substrate holding structure, the manner of again substrate being passed on to the substrate maintaining part can be carried out substrate by minimal movement and be moved, and can carry out the conveying of passing between high speed and high-precision processing operation apparatus.
In a series of continuous substrate conveying device, configure a plurality of aforesaid substrate conveying mechanisms, make the round displacement of each substrate carrying mechanism independent, in the manner, can freely set the distance of respectively processing between job position thus.
And then, described a plurality of substrate carrying mechanism moves the substrate on described substrate holding mechanism simultaneously with identical sequential on the substrate throughput direction, therefore, each substrate can be moved to manage between apparatus for work throughout under the adjacent original state of the distance between processing operation apparatus.Thus, can provide and each processing operation apparatus can be linked continuously the panel substrate conveying device of configuration with necessity minimal interval.
In addition, the round displacement that is provided with the substrate throughput direction of a plurality of substrate carrying mechanisms can be set independently by each substrate holding mechanism, can also according to each processing operation apparatus or treatment substrate condition etc., realize the distance between the optimization process job position thus.
And then, the substrate posture detection mechanism of the substrate posture that detects the job position place is set and based on the substrate posture correction mechanism of the testing result correction substrate posture of described substrate posture detection mechanism in several of described substrate holding mechanism, can also revise thus in the situation that carry continuously the variation of the posture of the substrate that occurs between a plurality of processing operation apparatus, in the display panel module assembly device total length that links a plurality of processing operation apparatus formations, can high speed and high accuracy conveying substrate.And, manage throughout processing that edge that the substrate that conveying is come is set in apparatus for work stipulates at least more than one processing unit and detect the substrate posture detection mechanism of the posture of carrying the substrate of coming, can be based on the testing result of described substrate posture detection mechanism, correction is with respect to the relative position of the described processing unit of substrate, therefore, can be implemented in more accurately the processing operations such as installation of the electronic component that the periphery of each substrate carries out.
In addition, according to the invention described above as can be known, realization can utilize identical same conveying mechanism, with the substrate of small-sized various sizes to large substrate between continuous each processing unit at a high speed and pass on accurately conveying, and, each processing operation apparatus can be linked continuously display panel module assembly device and the method for configuration with each processing operation apparatus required minimum interval, can carry the substrate of display floater etc.
And then according to the invention described above as can be known, when the passing on of display floater, stress does not put on panel, and can prevent that panel from coming off, and when carrying at a high speed, can carry out the stable action of passing on yet.
In addition, according to the invention described above as can be known, produce the absorption mistake at least one position, occur in the situation of pressure decreased, in other adsorption systems, sharply pressure decreased can not occur yet, therefore, panel can not come off sharp.In addition, attraction remains in neighbour's pad, and therefore, the pad that can also expect to attract error location is the effect of absorption more also.Its result can stably be carried out passing on of display floater, therefore, can provide reliability high display panel module assembly device.
And then, according to the invention described above as can be known, in display panel module assembly device or assemble method, the section of mechanism of each processing operation of carrying out of blocking processing operation apparatus, and, at least plural processing unit carries out processing operation simultaneously on one side of a panel substrate, can improve thus the operating efficiency of slow processing operation apparatus.
In addition, according to the invention described above as can be known, a plurality of processing units can be based on the testing result of panel substrate posture, revise the processing limit of panel substrate and the relative position of processing unit, therefore, can process the limit to one of panel substrate and position independently processing, process when can carry out simultaneously based on above-mentioned a plurality of processing unit.
And then, according to the invention described above as can be known, described a plurality of processing unit is provided with the works that can move on the direction parallel with the processing edge direction of panel substrate, each processing unit can to position movement arbitrarily, can improve the operating efficiency of processing unit thus.
In addition, according to the invention described above as can be known, by controlling the processing action in a plurality of processing units and shift mobile transfer shift action between the processing position on substrate limit, can prevent from carrying out the interference such as collision of a plurality of processing units of processing operation, one of same panel substrate be processed the limit carry out simultaneously processing operation based on a plurality of processing units.
Through above result as can be known, by being adjusted in the processing units quantity of each processing operation apparatus configuration, the processing operation of each processing operation apparatus can be made around, in the display panel module assembly device that comprises multiple processing operation or assemble method, the running rate of processing operation can be improved.
In addition, can be provided in the display panel module assembly device that comprises multiple processing operation, can shorten the display panel module assembly device that consists of the display panel module assembly device total length.
And then, the panel substrate assembling that can realize above-mentioned two effects processing operation apparatus can be provided.
About above-mentioned purpose of the present invention, feature, effect and above-mentioned beyond purpose, feature, effect, further illustrate in following record.
Description of drawings
Fig. 1 is be used to panel substrate conveying device of the present invention being described and having used the figure of basic structure of its display panel module assembly device.
Fig. 2 is for when schematically illustrating each processing operation and the figure of the operate condition of substrate when carrying, and means the figure from the section of the throughput direction of substrate.
Fig. 3 is for when schematically illustrating each processing unit and the figure of the operate condition of substrate when carrying, and means from the figure that installs the section of side.
Fig. 4 (a) is the figure of step 1～step 4 in explanation panel substrate conveying device and the processing of having used the substrate in its display panel module assembly device integral body and sequence of batching products.
Fig. 4 (b) is continuously in Fig. 4 (a), and the figure of step 5 and step 6 in the processing of substrate and sequence of batching products is described.
Fig. 5 is for the figure of explanation based on the substrate position correcting mode of substrate holding mechanism.
Fig. 6 is explanation puts on the power of substrate or the distortion of substrate etc. when substrate passes on schematic diagram.
Fig. 7 is be used to illustrating that substrate holding mechanism of the present invention reaches the figure based on the maintenance of the different substrate of the size of substrate holding mechanism.
Fig. 8 has imagined the figure of the panel substrate conveying mechanism in the situation that superhuge substrate carries for explanation.
Fig. 9 is the figure for the mode of the mechanism of the further simplification of explanation panel substrate conveying device of the present invention.
Figure 10 is be used to illustrating that a plurality of processing units carry out the figure of the mode of operation simultaneously to a substrate.
Figure 11 means the figure of an example of the reference mark that arranges at substrate.
Figure 12 means the figure of an embodiment that substrate is positioned the processing unit structure of processing.
Figure 13 is that explanation is based on the figure of an embodiment of the new display panel module assembly device of panel substrate conveying device of the present invention and processing unit mechanism.
Figure 14 is the figure for an embodiment of the control part structure that panel substrate conveying device of the present invention is described.
Figure 15 is the figure of an embodiment of the basic control mode in explanation panel substrate conveying device of the present invention.
Figure 16 is the figure of other example structure in explanation panel substrate conveying device of the present invention.
Figure 17 is the figure of another other example structure in explanation panel substrate conveying device of the present invention.
Figure 18 means the figure of the side section of embodiments of the invention shown in Figure 16.
Figure 19 means the figure of the side section of embodiments of the invention shown in Figure 17.
Figure 20 is the structure of the module assembling apparatus of the embodiment of the present invention.
Figure 20-1st, the conveying flow chart till the panel substrate destination locations of the embodiment of the present invention.
Figure 20-2nd, the large substrate of the embodiment of the present invention and small-sized substrate pass on the vertical view of carrying.
Figure 21 be the embodiment of the present invention be used for passing on the panel fixed part carried and the vertical view of panel movable part.
Figure 22 be the embodiment of the present invention be used for passing on the panel fixed part carried and the profile of panel movable part.
The knee-action figure of the panel movable part when Figure 23 is passing on of the embodiment of the present invention.
Figure 24 means that absorption affinity that the desirable panel of the embodiment of the present invention passes on is switched and the figure of action sequence.
Figure 25 means the action of passing on for the embodiment of the present invention, the figure of the situation that the attraction of a side of panel of passing on remove to postpone.
Figure 26 means the action of passing on for the embodiment of the present invention, and the attraction of a side of panel of passing on is removed the figure of situation in advance.
Figure 27 means the sequential for the attraction that weakens the embodiment of the present invention, the figure of the situation that the action of panel of passing on shifts to an earlier date.
Figure 28 means the sequential for the attraction that weakens the embodiment of the present invention, the figure of the situation that the action of panel of passing on postpones.
Figure 29 means and passes on the figure of the situation that the attraction of a side of panel of the embodiment of the present invention remove to postpone.
Figure 30 means and passes on the figure of the weak situation of the attraction of a side of panel of the embodiment of the present invention.
Figure 31 means and passes on a little less than the attraction of a side of panel of the embodiment of the present invention, and the figure of limitary situation.
Figure 32 means and passes on the figure of the situation that the action of a side of panel of the embodiment of the present invention shifts to an earlier date.
Figure 33 means and passes on the figure of the situation that the action of a side of panel of the embodiment of the present invention postpones.
Figure 34 means the relief valve due to the embodiment of the present invention, and the attraction of a side of passing on becomes the figure of the situation of weak level.
Figure 35 means the switching of the valve of the suction pump that utilizes comparative example of the present invention, switches the figure of the mode that attracts.
Figure 36 means the relief valve that utilizes the embodiment of the present invention, the figure of the attraction system of the attraction in stage a little less than producing.
Figure 37 means in the absorption layer that makes the embodiment of the present invention figure that an attraction when leaking reduces.
Figure 38 is the adsorption system of cutting apart the embodiment of the present invention, produces pressure loss and the figure of the mode that links.
In figure: the processing operation apparatus group of 1-substrate long side (source); The rotating mechanism of 2-substrate; The processing operation apparatus group of 3-substrate short brink (grid (gate) side); 4-terminal clean apparatus for work (source); 5-ACF attaches processing operation apparatus (source); 6-TAB/IC carries processing operation apparatus (source); The formal crimping processing operation apparatus of 7-(source); 8-terminal clean apparatus for work (grid side); 9-ACF attaches processing operation apparatus (grid side); 10-substrate (panel substrate); The 11-substrate carrying mechanism; 11A-substrate transfer member; The complementary substrate transfer member of 11S-; The 12-substrate holding mechanism; The 12A-substrate holding structure; The complementary substrate holding structure of 12S-; The 13-processing operation apparatus; 14-substrate transfer member elevating mechanism; The guide rail of 15-slip objective table; The operating range of 16-substrate holding structure; The gap of 17-substrate holding structure and substrate transfer member; The attraction hole on 18-substrate transfer member surface; The attraction hole on 19-substrate holding structure surface; The configuring area of the small-sized substrate of 20-; The configuring area of 21-large substrate; Attraction chamber under the 22-adsorption hole; 23,63-open and close valve; 24-is by the negative pressure system of the supplies such as suction pump; The configuring area of 25-ultra-large type substrate; The substrate maintaining part that 26-frictional resistance is little; 27-is near a side (substrate maintenance conveyor zones) on the processing limit of substrate; 28-is from the outlying side of the processing of substrate (the low friction of substrate retaining zone); The slide block of 29-slip objective table; 30-carries out the processing unit of processing operation; 31-represents the threshold marker 31 of display floater end; 32-represents the loading position mark of the loading position of TAB or IC etc.; 33-makes the XYZ θ works of processing unit integrated moving; 34-detects the ccd video camera of the reference mark on substrate; 35-processing position correction mechanism; 36-carries out the processing unit B of mechanism (with 30 different types of processing units) of processing operation; 37-system acting sequential control mechanism (MC); Each processing operation commencing signal of 38-; 39-respectively processes end of job signal (also comprise rub-out signal or effect process in signal etc.); Each processing operation apparatus controlling organization of 40-(AC-1～AC-6); Control signal of communication between each processing operation apparatus controlling organization of 41-and each processing operation apparatus; The transducer of the coordinate position of 42-detection substrate transfer member B-1～B-4 etc.; The drive unit of each substrate transfer member of 43-(M-1～M-4); The detection signal of the coordinate position of each substrate transfer member of 44-etc.; The actuating signal of the drive unit of each substrate transfer member of 45-; The 46-substrate is carried action control mechanism (BC-1); 47-carries the action commencing signal; The 48-substrate is carried end signal; Processing unit mechanism controls mechanism in the 49-processing operation apparatus (UC-1～UC-3); The substrate pipage control signal of 50-system acting sequential control mechanism; The processing unit action control signal of 51-system acting sequential control mechanism; The 52-substrate is carried the substrate conveying actuating signal of action control mechanism; The processing unit actuating signal (1) (2) (3) of each processing operation apparatus controlling organization of 53-The 101-panel substrate; 102-substrate transfer member; The 103-substrate holding structure; The 104-processing operation apparatus; 105-substrate transfer member lowering or hoisting gear; The guide rail of 106-slide block objective table; The attraction hole on 107-substrate transfer member surface; The attraction hole on 108-substrate transfer member surface; The configuring area of the small-sized substrate of 109-; The configuring area of 110-large substrate; Attraction chamber under the 111-adsorption hole; 112,143-open and close valve; 113-is by the negative pressure system of the supplies such as suction pump; The slide block of 115-slip objective table; The 116-processing unit; The 140-absorption layer; The 141-relief valve; The 142-suction pump; 142a-is to the air pipe arrangement of substrate transfer member; 142b-is to the air pipe arrangement of substrate fixed component; The telescopic pipe arrangement of 142c-.
Embodiment
Below, use Fig. 1～Fig. 5 that one embodiment of the present invention is described.
Fig. 1 means be used to panel substrate conveying device of the present invention being described and having used the figure of an embodiment of basic structure of its display panel module assembly device.
The device of Fig. 1 is when substrate 10 is carried successively from scheming the left direction right side, carries out various processing operations at the periphery of substrate, carries out the device of the installation assembling operation of IC or TAB etc.In the device of Fig. 1, at first, utilize the processing operation apparatus group 1 of substrate long side (source), after carrying out the processing of substrate long side (source), utilize rotating platform 2 to make the substrate rotation, secondly, utilize the processing operation apparatus group 3 of substrate short brink (grid side), carry out the processing operation of substrate short brink (grid side).in the device of Fig. 1, processing as substrate long side (source), carry out successively from left beginning the terminal cleaning process that (1) removes the TAB attaching section of substrate end, (2) the ACF operation of the substrate end attaching anisotropic conducting film (ACF) after removing, (3) in the position that has attached ACF, the lift-launch operation of carrying TAB or IC with substrate distribution location, (4) TAB or the IC that carry by adding thermo-compressed, the crimping process that utilizes the ACF film to fix, in Fig. 7,4～7 represent respectively terminal clean apparatus for work 4, ACF attaches processing operation apparatus 5, TAB/IC carries processing operation apparatus 6, formal crimping processing operation apparatus 7.
In the device of Fig. 1, as the processing operation of substrate short brink (grid side), terminal clean apparatus for work 8 and ACF only are shown attach processing operation apparatus 9, the processing operation apparatus group after omitting.Except processing operation apparatus shown in Figure 1, whole as display panel module assembly device, except the processing operation of not shown substrate short brink (grid side), carry a large amount of processing operation apparatus link such as the PCB treatment process (comprising a plurality for the treatment of process) of PCB substrate and the inspection operation of the substrate after processing operation and consist of with attaching such as ACF to the treatment process of remaining substrate both sides (long limit, minor face) or at the opposition side of the substrate-side of TAB.Certainly, need to link what kind of processing operation apparatus and depend on the display module structure of carrying out assembling operation.
The panel substrate conveying device of efficient conveying substrate 10 between the present embodiment is provided at that these connect with large quantity various processing position.
At first the panel substrate conveying device of the present embodiment comprises: the substrate holding mechanism 12 of managing throughout apparatus for work position maintenance substrate 10; Be used for to be delivered to the substrate carrying mechanism 11 of the position of adjacent processing operation apparatus at the substrate 10 that described substrate holding mechanism 12 keeps.In Fig. 1, before managing apparatus for work throughout, diagram has 2 groups of 4 groups of sources and grid sides independently substrate holding mechanism 12a～e (adding the letter representation processing operation apparatus) and substrate carrying mechanism 11a～e (interpolation letter representation processing operation apparatus).
Shown in Figure 2 as described later, substrate holding mechanism 12 has at substrate holding structure 12A elongated on the substrate throughput direction along a plurality of structure of alignment arrangements on the direction of keeping straight at the substrate throughput direction.As shown in Figure 2, substrate carrying mechanism 11 forms between elongated a plurality of described substrate holding structure 12A and alignment arrangements has a plurality of structures at the elongated substrate transfer member 11A of substrate throughput direction.In Fig. 1, substrate 10 blocks a part and illustrates for substrate holding mechanism 12 or the substrate carrying mechanism 11 of illustrated arrangement in its below, and, be shown in broken lines profile.Substrate transfer member in the 13 front configurations arranged side by side of same treatment apparatus for work consists of integratedly, makes the substrate 10 that remains in substrate holding mechanism 12 move to ensuing processing operation apparatus position.
Fig. 2 and Fig. 3 are when schematically illustrating each processing operation and the figure of the operate condition of substrate when carrying.Fig. 2 represents the section from the throughput direction of substrate 10, and Fig. 3 is from installing the section of side.Substrate carrying mechanism 11 has many foundation plate transfer member 11A～C (to be 3 in Fig. 2 in the gap configuration of substrate holding mechanism 12, below no matter radical, form, all general name and be expressed as 11A), these are integral, the described substrate holding structure 12A～D that has with respect to described substrate holding mechanism 12 (is 4 in Fig. 2, below no matter radical, form, all general name and be expressed as 12A), the substrate transfer member elevating mechanism 14 that makes described substrate transfer member 11A relatively rise and descend.
After managing throughout the processing release to substrate 10 (Fig. 3-(1)) in apparatus for work, substrate carrying mechanism 11 is by rising described substrate transfer member 11aA, 11bA, the substrate 10 that will configure on substrate holding structure 12aA, 12bA etc. lifts (Fig. 3-(2)) with small quantity, then, its gap direction along substrate holding structure 12aA, 12bA etc. is slided (Fig. 3-(3)), substrate 10 can be delivered to ensuing job processing apparatus thus.Mechanism as substrate carrying mechanism 11 is slided can be suitable for the common slide block stage mechanism 29,15 based on linear motor or ball-screw etc.The throughput direction of the substrate 10 in Fig. 2 is directions vertical with paper.Substrate 10 is delivered to the substrate carrying mechanism 11 of ensuing transport process position by making the declines such as substrate transfer member 11aA, 11bA, for substrate 10, substrate 10 is passed on (Fig. 3-(4)) to the substrate holding mechanism 11 of ensuing job processing apparatus.The substrate carrying mechanism 11 that substrate 10 is passed on the substrate holding mechanism 12 carries out return action to the processing operation apparatus position (Fig. 3-(5)) of raw material under the state that descends.This return action can be managed throughout in the processing operation of apparatus for work and carry out, and therefore, can play contribution in the situation that not free loss improves running rate.In addition, even the length between each processing operation apparatus is different, also can carry out this return action in processing operation, therefore, can be in time with surplus ground carrying out with identical sequential between processing operation apparatus, substrate 10 downstream processing operation apparatus position successively can be carried continuously.
In the substrate mode of movement of above-described embodiment, can seldom suppress the rise and fall amount based on the substrate 10 of substrate carrying mechanism 11, and, can manage throughout the conveying of carrying out substrate 10 between apparatus for work with the shortest straight line.Thus, can complement each other with the conveying based on identical sequential of following each substrate 10, a plurality of substrates 10 are managed between apparatus for work throughout roughly to move simultaneously at a high speed.
The substrate ascending amount based on conveying mechanism when carrying for the substrate of reality, the height aligning accuracy of the substrate holding mechanism between the flatness of the maintenance face of the deflection when need considering the conveying of substrate 10 or perk, substrate holding mechanism, adjacent processing operation apparatus, the height and position precision the when rising the when rising of substrate carrying mechanism is carried is carried etc. are not determined with the scope of substrate holding structure 12A Surface Contact with substrate 10.Slippage during about the return action of substrate carrying mechanism 11, substrate transfer member 11A also determines with the scope that does not contact with base lower surface certainly.The ascending amount from the substrate 10 of substrate holding mechanism during the conveying of the present embodiment is about 1～2mm left and right.
But the substrate 10 that has attached TAB need to be when carrying, and the ascending amount of the degree that the TAB front end does not contact with substrate holding structure 12A if TAB length is the 20mm left and right, needs to make substrate transfer member 11A with respect to substrate holding structure 12A rising 20mm left and right.
The substrate carrying mechanism 11 of the present embodiment is to slide in the horizontal direction to carry the front and back of ormal weight, necessary minimal rise and fall amount action vertically by substrate carrying mechanism, carry out the mode of separating or keeping again of substrate holding mechanism 12 and substrate 10, therefore, can reduce to suppress to carry the change of the substrate posture that action causes or the reduction of configuration precision.
Substrate holding structure 12A in the present embodiment and substrate transfer member 11A need to have when the maximum sized substrate that keeps and carry is carried also more than the length of the substrate total length of supporting substrates throughput direction, and for configuring below the width of at least one pair of substrate holding structure 12A and substrate transfer member 11A on the direction of keeping straight in the substrate of the minimum dimension that keeps and carry is carried.As its result, the substrate holding structure 12A of the present embodiment and substrate transfer member 11A are elongated shape.
In addition, in the above-described embodiments, substrate holding structure 12A and substrate transfer member 11A are expressed as elongated shape, but form at certain intervals the form of convex also as elongated shape with the contact-making surface of substrate 10.
And then, not shown in Fig. 1～Fig. 3, but in the present embodiment, dispose with certain spacing on the surface of substrate holding structure 12A and substrate transfer member 11A and attract the hole, utilize the negative pressure can be with substrate adsorption at substrate holding mechanism or substrate carrying mechanism.Thus, substrate 10 is firmly fixed at substrate holding mechanism 12 or substrate carrying mechanism 11, therefore, can not occur in the processing substrate operation or the skew from substrate holding mechanism 12 or substrate carrying mechanism 11 of the substrate 10 of substrate in carrying, can complement each other with the mode of movement that has separated the action of above-mentioned small rise and fall action and horizontal feed, realize high-precision substrate conveying.
But, in above-mentioned vacuum suction mode, for fixing base 10 stable and reliably, substrate 10 and adsorption orifice are connected airtight.But it is in the majority that substrate 10 has the situation of perk, is adsorbed in reliably the vacuum suction hole in order to make the substrate 10 with perk, substrate 10 need to be pressed in adsorption hole.In the conveying mechanism of the present embodiment, to any pass on of substrate holding mechanism and substrate carrying mechanism the time, the attraction that originates from of also passing on keeps ground to consist of control with setting, thus for passing on the adsorption hole of destination, substrate 10 is pressed in adsorption hole, pass on simultaneously, thereby realize that reliable and stable, high-precision substrate passes on action.About the details of the mode of passing on of having utilized vacuum suction in rear narration.
Fig. 4 is the processing of the panel substrate 10 in explanation panel substrate conveying device and the display panel module assembly device integral body of having used it and the figure of sequence of batching products.In Fig. 4, in order to illustrate, will to process to move to be divided into from step 1 to step 6 and put down in writing.
At first, in step 1, the position configuration of managing throughout apparatus for work has substrate 10, and under the state that finishes based on the processing of each processing operation apparatus of source (long side), each processing operation apparatus of grid side (short brink) is for continuing in processing operation.At this moment, the direction by arrow is carried out contraposition in rotating platform 2.
In step 2, rise by the substrate carrying mechanism 11 under each substrate 10 of source (long side), lift substrate 10 with small quantity, substrate 10 is delivered to the processing substrate apparatus for work position in downstream, substrate carrying mechanism 11 is descended, it is passed on to substrate holding mechanism 12.Each processing operation apparatus of grid side (short brink) is for continuing in processing operation.Rotating platform 2 is accepted substrate from source.
At this moment, keep the substrate carrying mechanism 11 of each substrate 10 to move with identical sequential, thus can be not making in the situation that contact between the substrate of each processing operation apparatus position, to ensuing processing operation apparatus position movement.In addition, in the panel substrate conveying device of the present embodiment, utilizing independently, driving mechanism drives each substrate carrying mechanism.In the device of the embodiment of Fig. 3, the configuration part that independently turns round, independently control it on same linear slide block.By described structure, manage throughout in the different situation of distance between apparatus for work, also can carry out with the conveying under identical sequential smoothly.In the embodiment of Fig. 4, the width of formal crimping processing operation apparatus is larger than other processing operation apparatus, but fed distance is elongated.By adopting such structure, the panel substrate conveying device of applicable the present embodiment can be carried out the link with necessary minimum widith of each processing operation apparatus thus, therefore, can provide the display module manufacturing installation of total length.
Secondly, in step 3, the substrate carrying mechanism 11 of below that drops to the substrate holding mechanism 12 of source (substrate long side) returns to original processing operation apparatus position.In the present embodiment, at this moment, substrate 10 is kept by substrate holding mechanism 12, is implemented each processing operation, the processing time loss that does not have the return action of substrate carrying mechanism 11 to cause fully.Drop into new substrate in processing operation apparatus 4, each processing operation apparatus of source (long side) begins processing operation.Each processing operation apparatus of grid side (short brink) is for continuing in processing operation.
In step 4, in order to make substrate 10 90-degree rotations with rotating platform 2, and, make as the position of the substrate short brink (grid side) on ensuing processing substrate limit and align with the process for producing line of the processing operation apparatus in downstream, slide on the direction vertical with the substrate throughput direction as shown by arrows.Each processing operation apparatus of source (long side) is in processing operation.Each processing operation apparatus of grid side (short brink) is also for continuing in processing operation.
Step 5 and step S6 are corresponding to step 2 and the step 3 of each processing operation apparatus of source (long side), in step 5, the substrate carrying mechanism 11 of each processing operation apparatus of grid side (short brink) returns to upstream side, in step 6, utilize substrate holding mechanism 12 that substrate 10 is carried to each processing operation apparatus slip of grid side (short brink).At this moment, each processing operation apparatus that is arranged in the source (long side) of the upstream side of rotating platform 2 is processed for continuing.That is, each processing operation apparatus of source (long side) begins to process in step 3, continues to process end process in step 1 in step 6 in step 4.On the other hand, each processing operation apparatus for the substrate short brink (grid side) in the downstream that is positioned at rotating platform for each processing operation, begins to process end process in step 5 in step 1.Like this, the phase place of processing of each processing operation of source (long side) that is positioned at each processing operation of grid side (short brink) in downstream of rotating platform and the upstream side that is positioned at rotating platform is different, but can carry out substantially the same operation, can carry out at the same time conveying and the processing of substrate 10, whole as display panel module assembly device, can carry out the processing action of continuous substrate 10.
Display panel module assembly device is to connect as described above much more very processing operation apparatus and the device that consists of.Therefore, the panel substrate conveying device of the present embodiment is used in passing on often of substrate 10, also is difficult to ensure fully posture or the configuration precision of the substrate 10 of carrying on the device total length.Therefore, for posture or the configuration precision that remains in display panel module assembly device mobile substrate 10, the method for the mechanism of revising the posture of carrying the substrate 10 of coming or position is set in the part of substrate holding mechanism 12 effectively.
Especially, because needs apply HTHP to the substrate end, therefore, in formal compression bonding apparatus position, substrate position easily departs from.In addition, in the rotating platform that makes substrate 10 rotating operations, also due to centrifugal force that puts on substrate 10 etc., the possibility of the position deviation of substrate position is high.Therefore, in display panel module assembly device structure of the present invention shown in Figure 1, effectively terminal cleaning device 4,8 and the substrate holding mechanism of formal compression bonding apparatus 7 positions be provided for revising the mechanism of substrate position.
Fig. 5 is for the figure of explanation based on the substrate position correcting mode of substrate holding mechanism 12.Be formed with some gaps 17 between substrate holding structure 12A elongated on the substrate throughput direction and substrate transfer member 11A.Substrate holding structure 12A constitutes and can turn round in the scope in this gap.Preferably for rotation direction, except three axles (be X, Y, Z direction in figure) of the direction of keeping straight on along the substrate throughput direction in real estate, substrate throughput direction, the direction vertical with real estate, the direction of rotation (θ direction in figure) in can also be in real estate goes up correction.
The position correction action of substrate 10 is carried out as described below, that is: the substrate 10 of transporting to substrate holding mechanism 12 is after the reference mark that detects the substrate end with video camera mechanism (not shown) etc. etc., utilize substrate position correction s operation control mechanism (not shown), the corrective action amount of computing substrate 10, based on this operation result, running substrate holding structure 12A.Manage throughout in apparatus for work, pre-determine the allocation position benchmark as the substrate 10 of benchmark.Make substrate position carry out movably the substrate position corrective action to the baseline configuration position correction of processing operation apparatus.
Also can not make substrate holding mechanism 12, and make substrate carrying mechanism 11 possess the position correction mechanism of substrate 10.Substrate carrying mechanism 11 is managed between apparatus for work throughout and is moved, and therefore, has added in the situation of position correction mechanism of substrate 10, and it is complicated that described mechanism structure becomes.But, do not need special works etc. in substrate holding mechanism side 12, also have the structure simple advantage that becomes.Need to consider final distribution or the device overall structures such as processing of pipe arrangement, determine to make substrate holding mechanism 12 to possess the position correction mechanism of substrate 10, still make substrate carrying mechanism 11 possess the position correction mechanism of substrate 10.Fig. 6 is the schematic diagram of the power that puts on substrate 10 of explanation generation when substrate passes on or the distortion of substrate 10 etc.Fig. 6 a) shown in from substrate holding mechanism 12 to substrate carrying mechanism 11 pass on during when action substrate transfer member vertical motion, the b of Fig. 6) shown in from substrate carrying mechanism 11 to substrate holding mechanism 12 pass on during action during substrate transfer member down maneuver.
As mentioned above, dispose with certain spacing on the surface of substrate holding structure 12A and substrate transfer member 11A and attract hole 18,19.Thus, substrate 10 can be adsorbed in substrate holding mechanism 12 or substrate carrying mechanism 11, the skew of the substrate 10 in the time of can preventing from carrying action etc.And then, in the time of by absorption substrate 10, carry out between substrate holding mechanism 12 and substrate carrying mechanism 11 substrate 10 pass on action, thereby generation substrate 10 is pressed in the power of adsorption hole.Thus, in the substrate 10 with perk, also can implement reliably to pass on the absorption action.
But, passing in action of substrate 10 that the state that all adsorbs with substrate holding mechanism 12 and substrate carrying mechanism 11 carries out, when passing on, the deflection deformation of substrate 10 as shown in Figure 6 occurs.If it is large that the distortion of the substrate when this passes on 10 becomes, become and pass on the essential factor of the substrate 10 positions skews that action causes.
The method of the substrate distortion when reducing this and pass on considers to weaken the method for the suction pressure of the substrate 10 when suppressing to pass on.But, when preventing the processing substrate operation or the substrate 10 skew this point and reliably adsorb of substrate when carrying pass on the substrate 10 with perk, suction pressure need to be guaranteed absorption affinity to a certain degree.The additive method of the substrate distortion when reducing to pass on effectively reduces the method in the gap of the substrate holding mechanism of substrate 10 and substrate carrying mechanism.
Result through experiment, the gap 17 of substrate holding structure 12A and substrate transfer member 11A is in the situation of 30～10mm left and right, the side-play amount of passing on of substrate 10 is several 100 about μ m, in the situation that the gap is below 10mm, can guarantee 100 μ m roughly following pass on side-play amount.In the present embodiment, substrate is passed on the target of hour offset amount be made as below several 10 μ m, the gap of substrate holding mechanism 12 and substrate transfer member 11A is made as 6mm.At this moment, the operating range of substrate holding mechanism is ± 5mm.The posture of formal pressure contact portion or postrotational substrate 10 and configuration accuracy error maximum are also below 1mm, therefore, can guarantee fully the operating range as the substrate holding mechanism of substrate posture correction mechanism.
Fig. 7 is for the figure of explanation based on the maintenance of the different substrate 10 of the size of the substrate holding mechanism 12 of the present embodiment and substrate carrying mechanism 11.Dispose a plurality of substrate holding structure 12A elongated on the substrate throughput direction and substrate transfer member 11A in the substrate holding mechanism 12 of the present embodiment and substrate carrying mechanism 11, from the configuring area 20 of small-sized substrate to the substrate 10 that can keep the wide size of width the configuring area 21 of large substrate.
Be provided with at processing operation the time on the surface of substrate holding structure 12A and substrate transfer member 11A or the adsorption hole 18,19 of substrate absorption substrate 10 when carrying.In the situation that small-sized substrate, 10 of substrates contact with the part of the adsorption hole that arranges at substrate holding structure 12A and substrate transfer member 11A.
In this case, exist air to flow in a large number from the non-adsorbable adsorption hole of substrate 10, the problem that causes the absorption affinity of the adsorption hole of substrate 10 absorption to reduce.Therefore, in the present embodiment, as shown in the figure, be divided into the attraction chamber 22 under the adsorption hole 18 that substrate holding structure 12A forms a plurality of.Pass through open and close valve 23a～c from the negative pressure system 24 of the supplies such as suction pump (not shown), be connected with attraction chamber 22a～c of cutting apart.In addition, according to the substrate size of carrying, control open and close valve 23a～c, select to produce the attraction chamber 22a～c of negative pressure, make it only attract the adsorption hole 18 in the zone of substrate 10 existence.Thus, only can carry out therefore, stably obtaining the confining force of substrate 10 corresponding to the substrate adsorption in the zone of substrate size.
In Fig. 7, open and close valve 23 is arranged at the attraction chamber under adsorption hole, but preferred open and close valve 23 is arranged near the attraction chamber 22 of adsorption hole 18 etc. as far as possible.Via pipe arrangement etc., with open and close valve be arranged at from adsorption hole or attract chamber away from the situation of position under, in the absorption action after valve switches, time of origin postpones, and, due to the pressure loss in pipe arrangement, cause occuring the suction pressure fault such as unstable that easily becomes.Certainly, substrate transfer member 11A side also needs to form the same attraction chamber structure of cutting apart.
Fig. 8 is the figure for the substrate carrying mechanism in the situation that explanation is imagined and then large-scale substrate is carried.Surpass the superhuge substrates 10 such as substrate of 50 inches in the situation that carry, only in the situation of the method for the substrate holding structure 12A of a plurality of the present embodiment of utilization configuration and substrate transfer member 11A, it is many that the quantity of substrate holding structure 12A and substrate transfer member 11A becomes, the problem that recurring structure becomes complicated.
Therefore, as shown in Figure 8, comprise that in the base lower surface configuration near the side 27 on the processing limit of substrate 10 substrate of many foundation plate retaining member 12A and substrate transfer member 11A keeps conveying mechanism, and, from the processing of substrate 10 outlying from the few low rubbed substrate maintaining part 26 of base lower surface configuration frictional resistance of a side 28.As the few substrate hold mode of frictional resistance, except the method or the method with a plurality of screw supporting substrates 10 of a part of the few supporting substrates 10 such as supporting guiding elements of the frictional resistance of fluorine system or silicon based material used in utilization, can also utilize by from a plurality of micro hole ejection air, make the air that substrate 10 floats-floating upper type etc.In these modes, from preventing to the viewpoint of the loss of base lower surface, the most effective mode is the air that do not contact with base lower surface-floating upper type.But the countermeasure of the uncertain substrate contacts when carrying as substrate etc. is more preferably together share the low rubbed substrate maintaining body of mechanicalness with air-floating upper type.
That is, when large substrate is carried, for substrate 10, use the substrate carrying mechanism identical with Fig. 7 11 to carry a side 27 of processing the limit near it, make from its process outlying from a side 28 move in for example on air-floating on rubbed substrate maintaining part 26.In addition, when large substrate keeps, for substrate 10, use the substrate holding mechanism identical with Fig. 7 12 to keep it to process the limit, with low rubbed substrate maintaining part 26 keep from process outlying from a side 28.
On the other hand, when small-sized substrate is carried, become the substrate identical with Fig. 7 and keep conveying mechanism, therefore, keep in structure for conveying at the substrate of the present embodiment shown in Figure 8, can tackle the wide substrate size of width that can be applicable to from the configuring area 20 of small-sized substrate to the configuring area 25 of large substrate.
As the problem of the manner, only keep the substrate end side of ultra-large type substrate, in the situation that substrate 10 is highly accelerated, produce large rotating torques at substrate 10, therefore, the conveying skew of substrate 10 may occur.In order to prevent it, the method for complementary substrate transfer member and complementary substrate holding structure near being substrate center, the center of gravity section of large substrate is set effectively.Thus, can prevent the generation of the rotating torques when substrate accelerates, therefore, also can realize stable high speed conveying at large substrate.If the center at the maximum substrate of carrying arranges complementary substrate transfer member and complementary substrate holding structure, certainly has the produce an effect that also suppresses rotating torques when carrying compared with little substrate.
The left-half of Fig. 8 shows in the situation that be provided with the structure example of complementary substrate transfer member 11S and complementary substrate holding structure 12S near the center of gravity section of large substrate.
Fig. 9 is the figure for the mode of the mechanism of the panel substrate conveying device of the further simplification of explanation the present embodiment.Display panel module assembly device is to connect a plurality of processing operation apparatus and the device that consists of, need to manage throughout the apparatus for work position substrate 10 is stopped.In addition, in the situation that in patent documentation 1 or 2 record substrate carrying mechanism in the past, need to the substrate carrying mechanism of the roughly the same quantity of each processing operation apparatus.
But, in the present invention, as shown in Figure 9, only by lengthening the length of substrate transfer member 11aA, just can carry in the lump a plurality of substrates 10 in a plurality of processing operation apparatus 4,5a, 5b configuration.Thus, can significantly cut down the quantity of the conveying mechanism of substrate 10, can make transport conveyor constructions simple.
In the mode of above-described embodiment, utilize same rectangular substrate transfer member, a plurality of substrates 10 are carried a processing operation apparatus amount simultaneously, therefore, the displacement of each substrate 10 is identical.Only can be applicable to certain zone, interval of the substrate allocation position between each processing operation apparatus based on the conveying of this rectangular substrate transfer member.
In addition, in the embodiment of Fig. 9,2 foundation plate transfer member 11A have been configured between 4 foundation plate retaining member 12A.In the embodiment of Fig. 1～Fig. 8, configured substrate transfer member 11A in all between substrate holding structure 12A, as shown in Figure 9, can also spacer substrate retaining member 12A or the radical of substrate transfer member 11A.Need to the substrate size of process carrying or weight together, consider the power of absorption fixing base 10 and in the relation of processing the power that puts on substrate 10 when carrying etc., determine the radical of substrate transfer member 11A or retaining member or configuration etc.In the present embodiment, the width by configuring 2～4 left and right is substrate transfer member 11A or the retaining member of 2cm approximately, can access the condition that keeps processing fully the substrate 10 when carrying.
Secondly, application the panel substrate conveying device of the present embodiment and display panel module assembly device processing operation high efficiency or process the further high speed of beat.
Display panel module assembly device connects the device that carries out a plurality of processing operations, continuously substrate 10 is carried out various processing operations.Certainly, manage throughout in processing time of flow chart and have difference.The end of the processing operation apparatus of the operation of the processing operation apparatus wait spended time of the operation that the time is short, therefore, the delivery interval of substrate 10 is limited because of the processing operation apparatus of the operation of spended time, and, in the processing operation apparatus of short operation of time, produce the time that operation stops.
For efficient each processing operation apparatus that turns round more well, consider that how the processing operation apparatus quantity of the operation that the processing operation apparatus of the operation of spended time is short with respect to the time link, obtain the beat balance of each treatment process.In Fig. 9 formerly, show the example that has linked 2 interim crimping processing operation apparatus.But in this mode, the quantity of the processing operation apparatus of link increases, and it is very long that the total length of display panel module assembly device integral body becomes.
Figure 10 solves the figure of the method for described problem for explanation.In the device of Figure 10, dispose many and carry out the actual processing unit 30 that carries out processing operation in a processing operation apparatus.By being made as such mode, be a substrate 10 for a processing operation apparatus 13, a plurality of processing units 30 can carry out operation simultaneously, obtain the identical effect of situation that improves with the operating efficiency of each processing operation apparatus.
Usually, processing limit and the treatment sites at substrate 10 is provided with reference mark.Figure 11 means the figure of an example of the reference mark that arranges at substrate 10.As reference mark, with the threshold marker 31 of expression display floater end together, be formed with the loading position mark 32 etc. of the loading position of expression TAB or IC etc.
In the processing operation apparatus of embodiment shown in Figure 10, operation is carried out at the different position on the processing limit in 30 pairs of substrates 10 of a plurality of processing units simultaneously, therefore, even moving substrate side, regulate to process in the situation of position, the processing position of two processing units 30 that align simultaneously is almost impossible.Therefore, in order to solve it, the each processing unit 30 in processing operation apparatus is provided with by each the loading position that should process of loading position mark 32 identification each processing units 30, the function of location-independent.
An embodiment at the processing unit 30 that is used for realizing such function shown in 15S Figure 12.Processing unit 30 possesses: the ccd video camera 34 that detects the reference mark on substrate; The XYZ θ works 33 that processing unit integral body is moved to XYZ and θ direction.Reference mark 31,32 information of processing unit 30 by being detected by ccd video camera 34, utilization processing position correction mechanism 35, calculate the correction of processing unit, utilize XYZ θ works 33 correcting process positions, the position of the regulation on substrate is carried out the attaching of ACF or the lift-launch of TAB etc. and is processed action thus.The each processing unit that arranges in processing operation apparatus is carried out detection and the location action that aforesaid substrate is processed the position independently, thus can be for a substrate 10, process simultaneously a plurality of processing positions.
In the embodiment of Figure 12, the X-axis works is disposed at below.This be because: owing to being that X-axis is and the works of the parallel direction in the processing limit of substrate 10, therefore, the running distance is the longest.By forming such structure, the X-axis guide rail can also generalization in a plurality of processing units 30 that processing operation apparatus possesses.
In this embodiment, for make processing unit between the processing position of substrate mobile purpose and respectively process the position the location purpose and use the X-axis works.In order to realize simultaneously movement and the high-precision location to processing the position between processing position at a high speed, except making processing unit the large X-axis of running distance mobile between the processing position of substrate, for high-precision location to processing the position, also consider the microcall works of X-axis and the works of other axles are together arranged.Need a plurality of X-axis in reality, therefore, need to consider cost and claimed accuracy and choice structure.
In the embodiment of Figure 12, disclose and managed throughout the structure that unit 30 carries ccd video camera 34, but also have ccd video camera 34 to be equipped on processing operation apparatus 13, posture by the substrate integral body of the Check processings such as threshold marker 31 or predetermined loading position mark 32, be transformed to the processing position correction information in each processing unit 30, carry out the method for the processing position correction action of each processing unit 30.In the situation that the method has advantages of the quantity of the video camera that reduces the detection reference mark.But each position information exchange that each processing unit 30 is processed is crossed by the computing of the mark of a part and is calculated, and therefore, should be noted that to a few μ m of needs applicable with in the lift-launch of the IC of inferior very high-precision positioning accuracy etc.
And then, in 30 pairs of substrates 10 of a plurality of processing units carry out the mode of operation simultaneously, need to make processing unit 30 with closely operation.Especially, when processing little substrate or process the short substrate 10 of the length on limit, processing unit 30 need to be processed action with adjacent states.Therefore, in processing action, properly the possibility of situation generation is not high for the interference between processing unit 30 or collision etc.Therefore, for fear of the collision between processing unit 30, control to the processing limit of same substrate carry out processing operation each processing unit 30 action sequence and be provided with processing unit action sequence controlling organization with driving.
The embodiment to the basic controlling step of each processing unit based on processing unit action sequence controlling organization is as follows.(1) utilize processing unit action sequence controlling organization to each processing unit 30 transmission processing positional information and moves.(2) each processing unit 30 after mobile end, is reported mobile end to processing unit action sequence controlling organization.(3) instruction that begins to each processing unit 30 transmission processing operations of processing unit action sequence controlling organization.(4) each processing unit 30 after the processing operation of regulation finishes, is reported the end of job to processing unit action sequence controlling organization.(5) processing unit action sequence controlling organization sends to the instruction of the movement of ensuing processing position to each processing unit 30.Manage throughout in operation or shift action, caused in abnormal situation, to processing unit action sequence controlling organization report, processing unit action sequence controlling organization stops ensuing operation or mobile the processing thus with its meaning, thereby can prevent the collision etc. of each processing unit.
As mentioned above, manage throughout on the unit, detect and process the processing unit action sequence controlling organization that position correction mechanism together possesses each processing unit with base plate mark, a plurality of processing units of configuration in processing operation apparatus thus, thus can improve the treatment effeciency of a panel substrate.
In addition, as mentioned above, in the present embodiment, many have been configured in the interior actual processing unit mechanism that carries out processing operation 30 of processing operation apparatus 13.As described above, by forming such structure, be that a plurality of processing unit mechanism 13 can carry out operation simultaneously to a panel substrate 10 at a processing operation apparatus 13, obtain the identical effect of situation that improves with the operating efficiency of each processing operation apparatus 13.
In addition, the each processing unit 30 in the processing operation apparatus of the present embodiment be provided with by the reference position mark identification each processing unit 30 of substrate each should process loading position, the function of location-independent.Therefore, only the fixing panel substrate side of job processing apparatus that keeps also can.That is, do not need as the disclosed mechanism that carries out with the relative position correction of processing unit in patent documentation 1～3.
Therefore, conveying device that can small simplified panel substrate can be suitable for and describedly disclosedly comprises that straight line carries the panel substrate mode of movement of maintaining body.
In the situation that be suitable for the present embodiment, in the quantity of the processing unit 30 for the treatment of substrate operation simultaneously, the limit is arranged also.Especially, in the situation that small-sized substrate in order to process with a plurality of processing units 30, need to constitute processing unit extremely thin.But, manage throughout on the width of unit 30, there is the limit in mechanism, need width (approximately more than 150～200mm left and right) to a certain degree, therefore, the substrate size that can process a processing limit with a plurality of processing units 30 etc. also has the limit.
The substrate condition that can not process with a plurality of processing units 30 is by can amplitude peak determining near distance W etc. between the quantity n of the TAB of the length L of the pixel section that processes the limit and processing and processing unit.In the situation that can only by the substrate condition of a processing unit 30 processing, even carry a plurality of processing units at processing operation apparatus, can not improve treatment effeciency.
Therefore, in the situation that can not be with the small-sized substrate of the simultaneously treated degree of a plurality of processing units, in order to obtain the beat balance of each treatment process, need to carry out a plurality of processing substrate position of same processing, become the elongated essential factor of display panel module assembly device total length.Especially, carry out in the apparatus structure in the past of processing of a panel substrate at each processing operation apparatus 13, each processing operation apparatus needs the above device width of width of maximum panel substrate to be processed.Therefore, when small-sized processing substrate, the device of the above length that causes necessitating.
By having made up based on the processing mode of the slim processing unit 30 of the present embodiment with in the present embodiment in the mode of the straight line mode of movement of the panel substrate of explanation, can also address these problems, and then can realize and the small-sized display panel module assembly device that to large substrate can carry out efficient assembling wide to width.
Secondly, by other mode of panel substrate mode of movement of the present invention and processing unit combination, can realize and small-sized to large substrate can the carry out display panel module assembly device efficiently assembled wide to width.Figure 13 is to the small-sized figure that can carry out an embodiment of the efficient display panel module assembly device of assembling to large substrate of the present invention for explanation.
The panel substrate conveying device of the present embodiment comprises that the substrate of the substrate carrying mechanism that utilizes substrate holding mechanism that a plurality of substrate holding structure 12A elongated on the substrate throughput direction consist of and utilization or consist of at the elongated a plurality of substrate transfer member 11A of substrate throughput direction keeps conveying mechanism.
In this mode of movement, have by changing the round displacement of conveying mechanism, can change freely the speciality of the conveying capacity of substrate 10.
As shown in figure 13, in long way consists of by substrate holding structure 12A being striden across a plurality of substrate stop positions, can change the round displacement of substrate carrying mechanism 11, can carry with various spacings thus to keep substrate 10.And then, configure many processing units 30 that carry out processing operation, and, can stride across a plurality of substrate stop positions, move on the substrate throughput direction.
In other words, in the 9th figure, substrate carrying mechanism 11 across three processing operation apparatus 13, is lengthened the length of substrate transfer member 11aA, carry in the lump thus a plurality of substrates 10 three processing operation apparatus configurations.And then, in Figure 13, substrate holding structure 12A also forms the length across described three processing operation apparatus, substrate carrying mechanism 11 can stop at position arbitrarily thus, pass on each substrate 10 at described stop position to substrate holding mechanism 12, can carry out the state of processing operation in position arbitrarily thereby form.As shown in figure 13, by forming said structure across total length, can across total length, carry out at an arbitrary position processing operation.
That is, the device of the present embodiment is not the processing operation apparatus of processing at predetermined fixed position fixing base 10 as in the past, changes the stop position of substrate 10, and processing unit mechanism carries out each processing operation to described position movement.
In the device of the present embodiment, as shown in figure 13, (Figure 13 is a) with the conveying width conveying substrate corresponding to the throughput direction width of large substrate when large substrate is processed, when small-sized substrate is carried (Figure 13 b), with the conveying width conveying substrate corresponding to the throughput direction width of small-sized substrate.In the situation that carry out the processing operation of large substrate, process when a substrate being carried out based on a plurality of processing unit mechanism, can realize high treatment effeciency.In the situation that small-sized substrate by reducing the conveying spacing of substrate, increases the stop position of substrate, thereby can efficient configure well a plurality of processing units.
If unthink, by a plurality of processing units 30 are considered as respectively processing operation apparatus 13, share the operation of a substrate, can in the situation that there is no need above lengthening display panel module assembly device total length, realize display panel module assembly device thus.
Like this, by utilizing slim processing unit and the control mode thereof of the present embodiment, can realize and to carry out the display panel module assembly device of assembling efficiently to small-sized to large substrate.
In the mode of the present embodiment, the concept of the processing operation apparatus that there is no the processing position of fixing base 10 or cut apart, can realize conveying spacing and processing operation apparatus corresponding to the substrate 10 of substrate size in the interval of regulation, therefore, can carry out efficient assembling operation under short device total length to large substrate to small-sized substrate.In addition, the different processing operation of a plurality of processing unit combination also can.In the embodiment of Figure 13, made up ACF and attached processing operation and TAB lift-launch processing operation.
The processing unit number that can process a substrate 10 is by can amplitude peak determining near distance W etc. between the quantity n of the TAB of the length L of the pixel section on processing substrate limit and processing and processing unit.In order to realize the optimization process action corresponding to various substrate conditions, in the display panel module assembly device of the present embodiment, also need to possess for above-mentioned parameter as input value, determine to switch carry the treatment conditions that the processing operation of the device sides such as width or processing unit configuration condition imposes a condition to calculate control system.
Substrate transfer member 11A in substrate carrying mechanism in the manner carries the substrate transfer member 11aA of the length of a plurality of substrates 10 time shown in Figure 9 by adopting, the reply of various conveying spacings become easily, and, can carry out the simplification of conveying mechanism.But, in this case, as mentioned above, the constant gap between the substrate holding position in interval.In the situation that the spacing between the substrate holding position of needs in changing between treatment region needs use to make up the mode of movement of a plurality of substrate carrying mechanisms.
In processing substrate position changeable interval, the substrate posture when being difficult to carry or the correction of allocation position may be accumulated error to a certain degree on the substrate posture when carrying or allocation position.The processing position self to substrate 10 in solving in the interval by the mode of using processing unit correction illustrated in fig. 12.But display panel module assembly device self is the device that has made up the length of a plurality of processing operations.Carry posture or configuration precision for the substrate in holdout device integral body, preferably in front and back, processing substrate position changeable interval, carry out the substrate position correction based on the substrate position correcting mode illustrated in fig. 5.
Figure 14 and Figure 15 are as the display panel module assembly device of one embodiment of the invention and used the figure of an embodiment of control mode of its display panel module assembly device for explanation.
In Figure 14, A-1～A-6 represents each processing operation apparatus 13, and B-1～B-4 represents to carry the substrate carrying mechanism 11 of managing throughout the substrate 10 that keeps before apparatus for work.B-1～the B-4 that is shown in broken lines represents the position of the substrate carrying mechanism 11 after substrate is carried.As mentioned above, substrate carrying mechanism 11 moves before processing operation apparatus 13 point-blank, but for the ease of diagram, the downside of substrate carrying mechanism 11 positions before substrate carrying mechanism 11 locations drawing after the conveying shown in dashed lines are shown in and carry.In fact, be plotted in the center line of the substrate carrying mechanism 11 before and after carrying consistent.
In addition, substrate carrying mechanism B-1 and B-3 configure across a plurality of processing operation apparatus 13, but this is as the explanation in Fig. 9, and the substrate carrying mechanism of the structure of a plurality of substrates 10 is carried in expression simultaneously.
(M-1～M-4) drives each substrate carrying mechanism to utilize independently drive unit 43.As drive unit, can utilize the common straight line driving mechanisms such as linear motor or ball-screw mode.S-1～S-4 in Figure 14 is the transducer 42 that detects the coordinate position etc. of substrate carrying mechanism B-1～B-4.
The control device of the present embodiment disposes system acting sequential control mechanism 37 (MC) for the elemental motion sequential of control device entire system at upper.Carry action control 46 (BC-1) of mechanism and each processing operation apparatus controlling organization 40 (AC-1～AC-6) at its next substrate that disposes.As other structures, carry the situation of action as a plurality of substrates of needs, by substrate carrying mechanism of the present invention away from a plurality of positions situation about consisting of etc., substrate carries action control 46 (BC-1) of mechanism also to have the structure of a plurality of situations.
Next illustrates that the substrate in this control system is carried the action control signal.As elemental motion, at first, system acting sequential control mechanism 37 (MC) is carried action control mechanism 46 (BC-1) to send to substrate and is carried action commencing signal 47.Substrate carries action control 46 (BC-1) of mechanism to accept it, drives the driving mechanism of each substrate transfer member 11A, implements substrate and carries action.After the conveying to ensuing processing operation apparatus of substrate 10 finished, substrate was carried action control 46 (BC-1) of mechanism to send substrate to system acting sequential control mechanism 37 (MC) and is carried end signal 48.
Accept substrate and carry end signal 48, system acting sequential control mechanism 37 (MC) sends simultaneously to each processing operation apparatus controlling organization and respectively processes commencing signal 38.Accepted respectively to process each processing operation apparatus controlling organization 40 (AC-1～AC-6) processing of each regulation of enforcement of commencing signal 38, after reason finishes throughout, each processing operation apparatus controlling organization 40 (AC-1～AC-6) respectively process end signal 39 to system acting sequential control mechanism 37 (MC) transmission.
Accept respectively to process end signal 39, system acting sequential control mechanism 37 (MC) carries action control mechanism 46 (BC-1) to send to substrate ensuing conveying action commencing signal 47, by it is carried out repeatedly, the action of continuous control substrate transport process.
Except above-mentioned, substrate is carried action control 46 (BC-1) of mechanism or each processing operation apparatus controlling organization 40, and (AC-1～AC-6) also needs the error message when extremely occuring etc. to send to system acting sequential control mechanism 37 (MC).Thus, system acting sequential control mechanism 37 (MC) is the mistake of management system integral body in the lump, and, can carry out controlling based on its system.
And then, except above-mentioned rub-out signal, (transmission of carrying out some signals between AC-1～AC-6) is accepted also need to carry action control 46 (BC-1) of mechanism or each processing operation apparatus controlling organization 40 at system acting sequential control mechanism 37 (MC) and substrate.For example, substrate carrying mechanism B-1～B-4 need to move to after substrate is carried and carry the basic point position, and, manage throughout in apparatus for work A-1～A-6, also can have according to operation the processing of carrying out in the substrate time of delivery.For corresponding these processing, system acting sequential control mechanism 37 (MC) need to be accepted substrate and carry action control 46 (BC-1) of mechanism or each processing operation apparatus controlling organization 40 (action of AC-1～AC-6) begins to prepare after ends wait signal, sends conveying and moves commencing signal 47 or respectively process commencing signal 38.
Therefore the details of these signals of communication depends on function or the pattern of each processing operation apparatus, omits, and to determine that yes after function or pattern vital but think over.
In Figure 14, in the A-3 of processing operation apparatus 13, put down in writing the assembly of UC-1～UC-3.The A-3 of the processing operation apparatus 13 of Figure 14 shows the structure that has a plurality of processing units 30 in processing operation apparatus shown in Figure 10.The assembly of UC-1～UC-3 is the controlling organization 49 of these processing units 30.In the present embodiment, imagination processing operation apparatus A-3 has 3 processing units 30 in internal configurations.
Like this, have in processing operation apparatus in the structure of a plurality of processing units 30, manage throughout (the UC-1～UC-3) of the next configuration each processing unit mechanism controls mechanism 49 of apparatus for work controlling organization 40 (AC-3), utilize each processing operation apparatus controlling organization 40 (AC-3), the control of enforcement action sequence etc.
Figure 15 schematically illustrates system acting sequential control mechanism 37 (MC), substrate in the embodiment of described Figure 14 to carry action control 46 (BC-1) of mechanism, each processing operation apparatus controlling organization 40 (figure of the baseband signal between AC-1～AC-6).
Accept the rising of the substrate pipage control signal 50 of system acting sequential control mechanism 37 (MC), substrate carries the substrate of action control 46 (BC-1) of mechanism to carry actuating signal 52 to become in conveying.After substrate is carried end, accepting substrate carries the substrate of action control 46 (BC-1) of mechanism to carry the decline of actuating signal 52, reduce the substrate pipage control signal 50 of system acting sequential control mechanism 37 (MC), and, processing unit action control signal 51 improved.(AC-1～AC-6) accept the rising of processing unit action control signal 51 begins each processing operation action to each processing operation apparatus controlling organization 40, improves processing unit actuating signal 53.After managing throughout the operation release, (AC-1～AC-6) reduces processing unit actuating signal 53 to each processing operation apparatus controlling organization 40.Accept it, system acting sequential control mechanism 37 reduces processing unit action control signal 51, and, carry for ensuing substrate, improve substrate pipage control signal 50.By repeating it, carry out continuous processing action control.
In the situation that substrate carrying mechanism 11 or each processing operation apparatus 13 have occured to move is bad, send the wrong signal 39 that occurs to system acting sequential control mechanism 37 (MC).In addition, going back situation that taking into account system action sequence controlling organization 37 finishes at substrate carrying mechanism or each processing operation within the stipulated time judges and is the method for mistake etc.
Except Figure 14, embodiments of the invention illustrated in fig. 15, (AC-1～AC-6) carries out the method that the driving separately of substrate carrying mechanism 11 is controlled independently also to consider each processing operation apparatus controlling organization 40.In this case, be difficult in order to make a plurality of processing operation apparatus controlling organizations 40 (a plurality of substrate carrying mechanisms 11 of degree of control of AC-1～AC-6), make the mobile sequential between each substrate carrying mechanism 11 correctly consistent, may bump between adjacent substrate carrying mechanism 11.
As the method that prevents it, by using in the situation that with substrate carrying mechanism 11 side shifting downstream, move successively from substrate carrying mechanism 11 beginnings in downstream, in the situation that with substrate carrying mechanism 11 side shifting upstream, method from substrate carrying mechanism 11 beginnings of upstream side are moved successively can prevent the collision between adjacent substrate carrying mechanism 11.Namely, the method is in the situation that make substrate carrying mechanism 11 side shifting downstream, at first, the processing operation apparatus controlling organization 40 of driving of controlling the substrate carrying mechanism 11 in downstream moves the substrate carrying mechanism 11 of controlling downstream, with the information of described mobile end to processing operation apparatus controlling organization 40 transmissions of controlling the substrate carrying mechanism 11 adjacent with upstream side, the side mode of carrying out the movement of substrate carrying mechanism 11 upstream successively.Upstream side shifting is too in the situation that make substrate carrying mechanism 11, in this case, the driving of the substrate carrying mechanism 11 by upstream is controlled, and the substrate carrying mechanism 11 that makes successively upstream side passes on time sequence information to processing operation apparatus controlling organization 40 movably.
In this mode, it is useless that substrate is carried action control 46 (BC-1) of mechanism, but produces the stand-by period on the round traveling time of substrate carrying mechanism 11.Therefore, substrate carrying mechanism 11 need to must stop certain hour at upstream side or downstream.In the action of entire system, need regulation substrate carrying mechanism 11 strictly to stop at the situation etc. of the time in upstream side or downstream, be not suitable for the manner.
At last, use Figure 16 to Figure 19 explanation to realize other example structure of panel substrate conveying device of the present invention.
In Figure 16, substrate holding mechanism 12 and substrate carrying mechanism 11 comprise mutual opposed interdigitated electrode structure transfer member.Substrate holding mechanism 12 is that the processing substrate limit is integral (part of surrounding with A in the drawings) in processing operation apparatus 13 sides.Thus, the processing substrate avris can keep substrate 10 smoothly.Substrate carrying mechanism 11 is opposed therewith, the interdigitated electrode structure structure that the opposition side that is the processing substrate limit at the opposition side of processing operation apparatus 13 forms as one.
Figure 18 means the figure of end view (section B-B) of the panel substrate transport conveyor constructions of Figure 16.As shown in figure 18, substrate holding structure 12A is by the tectosome of a body of processing substrate avris (the A section of Figure 16) cantilever support.In addition, opposed substrate transfer member 11A is by the tectosome of a body cantilever support of the opposition side on processing substrate limit therewith.
Secondly, the basic conveying that Figure 16 and display panel module assembly device as embodiments of the invention shown in Figure 180 be described is moved.
In Figure 16, substrate transfer member 11A is positioned at the below of substrate holding structure 12A, and the substrate 10 that process this moment is kept by substrate holding structure 12A.But, in Figure 16, not shown substrate 10.
When substrate was carried, at first, substrate transfer member 11A utilized substrate transfer member elevating mechanism 14 to turn round up and down.Thus, the substrate 10 that is disposed on substrate holding structure 12A is passed on substrate transfer member 11A.Substrate carrying mechanism 11 rise to as the described substrate transfer member 11A of comb teeth part when mobile along throughput direction (directions X) not with the height of substrate holding structure 12A collision.The dotted line of Figure 18 represents the lifting position of substrate transfer member 11A.Then, substrate carrying mechanism 11 utilizes the movement of the slide block 29 of directions X, and substrate 10 is delivered to ensuing processing operation apparatus position.Substrate carrying mechanism 11A descends after moving to ensuing processing operation apparatus position, thus the substrate 10 that the keeps substrate holding structure 12A to ensuing job position is passed on.Substrate carrying mechanism 11 moves on the guide rail 15 of slide block objective table after the height that will be reduced to as the described substrate transfer member 11A of comb teeth part not with substrate holding structure 12A collision, the position is returned move to original substrate 10 and accept the position.In Figure 18, solid line represents the down position of substrate transfer member 11A.
In such structure, also can the substrate holding structure 12A that carry terminal point will be moved to point-blank successively from the substrate holding structure 12A that carries starting point as the substrate 10 between processing operation apparatus of the present invention, and, can make a plurality of substrates 10 synchronous, carry simultaneously.
Yet, in the structure of the present embodiment, as mentioned above, need to rise as the substrate transfer member 11A of comb teeth part or drop to the position of avoiding as the substrate holding structure 12A of comb teeth part.On the other hand, in the Fig. 1 as previous embodiment, with the height of substrate holding structure 12A irrespectively substrate transfer member 11A make substrate 10 from substrate holding structure 12A away from being enough to up and down of degree.Thereby, in Figure 16 and embodiments of the invention shown in Figure 180 structure, compare with previous example structure, before and after substrate is carried, need at least above large (Z direction) the along the vertical direction moving substrate transfer member 11A of height of substrate holding structure 12A.Thus, exist the traveling time of substrate 10 than the easy elongated shortcoming of the example structure of Fig. 1.But, on point in addition, be a structure that satisfies basic function of the present invention.
On the contrary, structure shown in the embodiment of Figure 16 and other example structure of the present invention shown in Figure 180 and Fig. 1 is compared, have advantages of the section of mechanism of substrate holding mechanism 12 and substrate carrying mechanism 11 can be disposed at away from position etc. easily make simple in structure.
In addition, in Figure 16 and embodiments of the invention structure shown in Figure 180, in the large situation of the substrate size of conveying, elongated as the comb teeth part of the single armed of substrate holding structure 12A and substrate transfer member 11A.Therefore, in order to keep the intensity of comb teeth part, need the thickness of the Z direction of increase comb teeth part.Therefore, the large-scale tv machine more than tens inches of being applicable to the situation such as substrate 10 under, difficultly say into preferred structure.
But, for example, wait below 20 inches in the situation of more small-sized substrate 10, do not need comb teeth part is increased to so large, therefore, the distance that moves up and down diminishes, and becomes simple on structure, is therefore effective embodiment of the present invention.
Figure 17 and Figure 19 are another other the figure of example structure that explanation realizes panel substrate conveying device of the present invention.Figure 19 means the figure of end view (section B-B) of the panel substrate transport conveyor constructions of Figure 17.
In the example structure of Figure 17 and Figure 19, the supporting of substrate carrying mechanism 11 as the partial configuration of the substrate transfer member 11A of comb teeth part between substrate holding mechanism 12.In addition, substrate holding mechanism 12 forms and is divided into two structures that are disposed at processing operation apparatus 13 side opposition sides.
Substrate in the example structure of Figure 17 and panel substrate conveying device of the present invention shown in Figure 19 carries action with substantially the same at described Figure 16 and action illustrated in fig. 18, therefore omission.
By adopting the example structure of Figure 17 and panel substrate conveying device of the present invention shown in Figure 19, can shorten the cantilever portion length of the comb teeth part of substrate transfer member 11A and substrate holding structure 12A.That is, can the thinner comb structure of suitable thicknesses, the displacement of the knee-action when can extremely short inhibition substrate carrying.That is, this example structure and Figure 16 and embodiment shown in Figure 180 are in a ratio of the structure of the large substrate of easy reply.But certainly, structure is more complicated than the example structure of Figure 16 and Figure 18.
By using panel substrate conveying device of the present invention as above, can be for small-sized substrate to the wide size of the width of large substrate, with high accuracy and high speed conveying substrate.
And then, can carry out keeping carrying action corresponding to the flexible substrate of substrate size, in display panel module assembly device of the present invention, can be corresponding to substrate size, needing to realize the continuous processing of the substrate under the minimum widith of processor structure.
By the present invention, can provide to carry and to assemble and process small-sized substrate to the wide size of the width of large substrate, and then, can also shorten the panel substrate conveying device of device total length and use its display panel module assembly device.
Secondly, use Figure 20～Figure 38 explanation stably to pass on the embodiments of the present invention of conveying substrate in display panel module assembly device.
Figure 20 is especially related with the mechanism of the transportation panel part of special expression, about circuits system, control system hardware/software, and the detailed part of near the supply unit of the product circuit substrate assembled the periphery of panel substrate 101 or assembled portion etc. diagram not.
As with carry larger related mechanism, comprise conveying system and suction system.Suction pump 142 is arranged in attraction system, from suction pump 142 respectively to the air pipe arrangement 142a of substrate transfer member 102, and connect to the air pipe arrangement 142b of substrate holding structure 103.And then, be respectively arranged with the open and close valve 143 of the switching of carrying out air at described pipe arrangement.Also have, utilize to attract switch controller 144, control the switching of open and close valve 143, be connected with holding wire at controller between valve.
On the other hand, the part as maintenance/transportation panel is that delivery system device comprises: keep panel substrate 101 and the substrate transfer member 102 of conveying; Fixedly maintenance utilizes the substrate holding structure 103 of the panel substrate 101 that substrate transfer member 102 moves, and is provided with substrate transfer member surface sorption hole 107 for the absorption panel substrate, substrate holding structure surface sorption hole 8 at separately member.In addition, for described delivery system device, utilize substrate delivery section controller 145 to control and carry action.Also have, in the pipe arrangement 142a of substrate transfer member 102, for do not occur to the deficiency of the piping length of the displacement of substrate transfer member, as a result pipe arrangement skew or to the stress of pipe arrangement, be provided with telescopic pipe arrangement 142c as an example in figure, move the mechanism that also can not exert an influence fully to pipe arrangement even form the substrate transfer member.
In addition, the substrate delivery section controller 145 of controlling the conveying action of substrate transfer member utilizes holding wire namely to attract switch controller 144 to be connected with the controller of the switching of controlling aspirating valve, makes the switching sequence of carrying action and attraction corresponding.
Figure 20-1 means the flow chart of the operate condition when carrying range of action to spend panel substrate 101 20-1a downstream transport before carry as the display floater of current location.
At first, panel substrate 101 is positioned at [20-1a] as current location.Secondly, the substrate transfer member becomes [20-1b] that begins to rise from the below, removes the absorption of substrate holding structure when the substrate transfer member arrives the position of panel substrate, becomes simultaneously [20-1c] of the attraction of beginning substrate transfer member.Also have, the substrate delivery section is under the state that has adsorbed panel substrate, from substrate maintaining part further rise ([20-1d]), the substrate transfer member is ([20-1e]) to destination party to horizontal feed, with the panel substrate horizontal feed, deliver to targeted delivery position ([20-1f]).At destination locations, substrate transfer member 102 begins descend ([20-1g]) under the state that has adsorbed display floater, when panel substrate has arrived the position of substrate holding structure, remove the attraction of substrate transfer member, begin simultaneously the attraction ([20-1h]) of substrate holding structure 103.And then the substrate transfer member descends ([20-1i]) than substrate holding structure, and panel substrate is fixing by substrate holding structure absorption at the purpose transfer position, finishes a delivery cycle ([20-1j]).After, by repeating successively described circulation, that carries out panel substrate is delivered to the distance that achieves the goal repeatedly.
And then, describe in detail as the panel substrate of embodiment with Figure 20-2 and carry.
The display panel module assembly device of Figure 20-2 is when panel substrate 101 is carried successively from the left direction in Figure 20-2 is right-hand, and the periphery of substrate is carried out various processing operations, carries out the device that IC or TAB etc. install assembling operations.State when Figure 20-2 higher level a represents large substrate conveying and processing operation.From the position of panel substrate 101a successively to the position of panel substrate 101b, the position movement of panel substrate 101c.In the position of panel substrate 101a, utilize processing unit 116a and processing unit 116b to accept processing operation.In the position of panel substrate 101b, utilize processing unit 116c and processing unit 116d to accept processing operation.In addition, the processing units 116 such as processing unit 116a, processing unit 116b, processing unit 116c, processing unit 116d have the mobile device that can move on the guide rail 106 of slide block objective table.State when Figure 20-2 b of subordinate) representing small-sized substrate conveying and processing operation.From the position of panel substrate 101d successively to the position of panel substrate 101e, the position of panel substrate 101f, the position of panel substrate 101g, the position of panel substrate 101h, the position movement of panel substrate 101i.In the position of panel substrate 101d, utilize processing unit 116a to accept processing operation.In the position of panel substrate 101e, utilize processing unit 116b to accept processing operation.In the position of panel substrate 101f, utilize processing unit 116c to accept processing operation.In the position of panel substrate 101g, utilize processing unit 116d to accept processing operation.In addition, the processing units 116 such as processing unit 116a, processing unit 116b, processing unit 116c, processing unit 116d have the mobile device that can move on the guide rail 106 of slide block objective table.Can make processing unit 116 mobile mobile device on the guide rail 106 of slide block objective table be provided to the slide block objective table also can.
In Figure 20-2, at first, showing the processing operation apparatus group of utilizing substrate long side (source) is that processing unit 116a is to processing unit 116d, the appearance of carrying out the processing of substrate long side (source).Then, though not shown, utilize whirligig to make the substrate rotation, secondly, carry out the processing operation of substrate short brink (grid side).
In addition, the conveying mechanism that substrate 101 is carried to the unit that carries out these installations illustrates with substrate transfer member 102 and substrate holding structure 103 as shown in Figure 20-2.Have at substrate holding structure elongated on the substrate throughput direction 103 and keep straight on the substrate throughput direction and configure side by side a plurality of structures.Also have, form a plurality of substrate transfer members 102 are disposed at structure between described substrate holding structure side by side.
In addition, side by side the substrate transfer member of configuration consists of integratedly, forms to make after the panel substrate 101 that substrate holding structure 103 keeps rises to ensuing processing operation apparatus position, moves horizontally and the mechanism that carries.
Figure 21 means vertical view and its A-A profile of the detailed structure of described substrate transport portion.Described in Figure 22, the section of part illustrates the appearance of the rise and fall of the transport portion when carrying.And then, as shown in figure 21, attract the hole on the surface of retaining member and transfer member with certain spacing configuration, utilize negative pressure display floater can be adsorbed in substrate holding structure or substrate transfer member.
In addition, in Figure 21, for substrate transfer member 102 or the substrate holding structure 103 of illustrated arrangement in its below, the configuring area 9 of small-sized substrate, the configuring area 110 of large substrate block a part, and, be shown in broken lines profile.Be provided with the attraction hole 108 on substrate transfer member surface sorption hole 107, substrate holding structure surface in the substrate-side of substrate transfer member 102 or substrate holding structure 103.After with the processing release of each processing operation apparatus to substrate, make substrate transfer member 102 increase, the panel substrate that will configure on substrate holding structure 103 is thus lifted with small quantity, then, gap direction along substrate holding structure 103 is slided, thereby becomes the mechanism that panel substrate is delivered to ensuing job processing apparatus.As the carriage that the substrate transfer member is slided, though not shown, can be suitable for the common slide block stage mechanism based on linear motor or ball-screw etc.In addition, as shown in the A-A profile of Figure 21 subordinate, the negative pressure system 113 that is provided with attraction chamber 111 under adsorption hole, open and close valve 112, supplies with from suction pump etc.
Substrate transfer member 102 has many foundation plate transfer member in the gap configuration of substrate holding structure 103, and these are integral, and described substrate transfer member 102 relatively rises and descends with respect to described substrate holding structure 103.
The throughput direction of the substrate in Figure 22 is the direction vertical with paper.The substrate transfer member 102 that substrate is delivered to ensuing transport process position utilize can elevation base plate transfer member 102 substrate transfer member lowering or hoisting gear 105 descend.Substrate transfer member lowering or hoisting gear 105 is being formed on the guide rail 106 of slide block objective table on the slide block 115 of slide block objective table, can pass on for panel substrate 101 thus substrate ground on the substrate holding structure 103 of ensuing processing operation apparatus 4 mobile.The position relationship when position relationship during each processing operation of Fig. 3 left side expression, Figure 22 right side represent that substrate is carried.The substrate transfer member 102 that panel substrate 101 is passed on the substrate holding structure 103 carries out return action to original processing operation apparatus position under the state that descends.By synchronously carrying out this action between adjacent processing operation apparatus 104, panel substrate 101 can be successively downstream the position of processing operation apparatus 104 carry continuously.
Also have, in substrate transfer member 102, slide in the horizontal direction and carry the front and back of ormal weight, when the rise and fall vertically of substrate transfer member 102 are moved, need to carry out separating or keeping again of substrate holding structure 103 and panel substrate 101.Explanation later on is at the switching sequence and the sequential of carrying action of absorption described in conveying.
Passing on of a) expression panel substrate 101 of 103 from substrate transfer member 102 to substrate holding structure of Figure 23, the b of Figure 23) panel substrate 101 of expression from substrate holding structure to substrate transfer member 102 passes on.If when the passing on of panel substrate 101, residual attraction of passing on side in the attraction hole 108 on the attraction hole 7 on substrate transfer member surface or substrate holding structure surface, as shown in figure 23, stress puts on panel substrate 101, therefore, breaking or adsorbing the problems such as vestige is residual of panel substrate 101 occurs in its result.
Figure 24 means in the panel substrate of the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, and when carrying out the passing on of panel substrate, the absorption affinity of optimal fixed part and delivery section changes and passes on the sequential of action.Also have, in Figure 24, at first the position that panel substrate is shown is positioned at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and drops to the new fixed part of carrying the destination, the action till when finishing once to pass on.
Secondly, so the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previous explanation, the initial absorption of display floater remains in fixed part in the drawings.Secondly, for display floater is passed on to movable part, weaken the absorption affinity that keeps display floater with fixed part.In order to accept from fixed part, improve the attraction of movable part simultaneously.Sequential 118 when the two dies down corresponding to the attraction of fixed part and movable part, movable part is become identical with fixed part rise from down position to heavens, rise to panel and pass on the position, namely, in the sequential of symbol 118, keep display floater with fixed part and the two absorption of movable part.And then, continue to rise by movable part, display floater is become estranged from fixed part, in this stage, the attraction of movable part rises to strong level, and therefore, even carry out horizontal feed, display floater does not cause the position skew yet.On the other hand, the reduction of the attraction of fixed part namely can not used at the position that does not need to adsorb useless attraction air.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption being fixed in the fixed part of destination locations, movable part is descended, but this time with previous explanation on the contrary, weaken the absorption affinity of the movable part that keeps panel, in order to accept display floater from movable part, improve the attraction of fixed part simultaneously.Also have, the sequential 119 when the two dies down corresponding to the attraction of movable part and fixed part drops to movable part to become the panel of the height identical with fixed part to pass on the position.That is, in the sequential of symbol 119, for display floater, adsorb the maintenance display floater with movable part and this two side of fixed part.And then movable part continues to descend, and display floater is stayed fixed part thus, and display floater is become estranged from movable part.Also have, in that stage, the attraction of fixed part rises to strong level, adsorbs securely fixed display panel.Also have, the attraction of the movable part that reducing is through with carries, thus can not use at the position that does not need to adsorb useless attraction air.Like this, carrying out a display floater carries.By carrying out continuously this action, carry out downstream the continuous conveying of display floater from the upstream.
In the present embodiment, suction pressure at fixed part and movable part just in time becomes under weak sequential, pass on panel from fixed part to movable part or from movable part to fixed part, therefore, can expect following effect, that is: due to the residual effect that absorption affinity is arranged, do not cause the position skew of panel, and owing to attracting weak effect, when passing on, when panel was peeled off from absorption layer, the problems such as panel ruptures did not occur yet.Mode at Figure 34 of rear explanation is best mode, if but can make sequential corresponding, be the second best mode.
Secondly, the example that weakens when passing on the sequential time delay of suction pressure of panel side is described.
During the panel substrate that Figure 25 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time delay that the absorption affinity of the part of display floater weakens.Also have, in Figure 25, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, improve the attraction of movable part, in addition, make it increase from down position.But, keep this moment the attraction of the fixed part of display floater still to be strong state, the pass of fixed part at that time and the attraction of movable part is 120.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 120 sequential, with fixed part and this two sides absorption maintenance display floater of movable part.And then then, the attraction of having accepted the movable part of display floater rises to strong level, horizontal feed as described above.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with previous explanation on the contrary movable part directly descend with the strong state of the absorption affinity of the movable part that keeps panel, drop to the panel that becomes the height identical with fixed part and pass on the position.That is, in 121 sequential, this two sides absorption of movable part and fixed part keeps display floater.
In the present embodiment, the suction pressure of fixed part is still in strong sequential, passes on panel from fixed part to movable part, in addition, in the suction pressure of movable part still strong sequential, passes on panel from movable part to fixed part.In the situation that both sides, all because remaining in very doughtily, absorption affinity passes on the effect of side, even can further expect the swing such as vibration-generating, also compare with the embodiment of Figure 24, do not cause the effect of the position skew of panel.If can make up the residual pressure that utilizes absorption, make breaking or the crooked another kind of purposes mechanism that does not occur of panel, be best mode.
Secondly, illustrate to weaken and pass on the sequential of suction pressure of a side of the panel example when shifting to an earlier date.
During the panel substrate that Figure 26 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time advance that the absorption affinity of the part of display floater weakens.Also have, in Figure 26, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, improve the attraction of movable part, in addition, make it increase from down position.But, this moment keep display floater fixed part attraction a little less than, the pass of the fixed part in this moment and the attraction of movable part is 122.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 122 sequential, with fixed part and this two sides absorption maintenance display floater of movable part.And then then, the attraction of having accepted the fixed part of display floater rises to strong level, horizontal feed as described above.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with previous explanation on the contrary movable part with the absorption affinity of the movable part that keeps panel weak state directly descend, drop to the panel that becomes the height identical with fixed part and pass on the position.That is, in 123 sequential, this two sides absorption of movable part and fixed part keeps display floater.
In the present embodiment, the suction pressure of fixed part is in weak sequential, passes on panel from fixed part to movable part, in addition, at the suction pressure of movable part in weak sequential, passes on panel from movable part to fixed part.In the situation that both sides, all owing to there is no the effect of absorption affinity passing on side, compare with the embodiment of Figure 24, can further expect not cause at panel and break or crooked effect.If can be combined in another kind of purposes mechanism of position skew that panel does not occur when passing on, it is best mode.
Secondly, illustrate to weaken and pass on the sequential time delay of suction pressure of panel one side, and weaken the example that the sequential of the suction pressure of a side of being passed on shifts to an earlier date.
During the panel substrate that Figure 27 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time delay that the absorption affinity of the part of display floater weakens.Also have, in Figure 27, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, make movable part increase from down position.But, keep this moment the attraction of fixed part of display floater still strong, in addition, the attraction of movable part is still strong original state.The pass of the fixed part of this situation and the attraction of movable part is 124.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 124 sequential, only with fixed part absorption maintenance display floater.And then, then, make the attraction of the movable part of having accepted display floater increase, as described above horizontal feed.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with previous explanation on the contrary movable part directly descend with the strong state of the absorption affinity of the movable part that keeps panel, drop to the panel that becomes the height identical with fixed part and pass on the position.That is, in 125 sequential, movable part absorption keeps display floater.
In the present embodiment, the suction pressure of fixed part is still in strong sequential, passes on panel from fixed part to movable part, in addition, in the suction pressure of movable part still strong sequential, passes on panel from movable part to fixed part.In the situation that both sides, all because remaining in very doughtily, absorption affinity passes on the effect of side, even can further expect vibration-generating etc., also compare with the embodiment of Figure 24, do not cause the effect of the position skew of panel.If can make up the residual pressure that utilizes absorption, make breaking or the crooked another kind of purposes mechanism that does not occur, the mechanism that prevents the position skew of panel in a side of passing on of panel, be best mode.
Secondly, illustrate to weaken and pass on the sequential of suction pressure of a side of panel and shift to an earlier date, and weaken the example of sequential time delay of the suction pressure of a side of being passed on.
During the panel substrate that Figure 28 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time delay that the absorption affinity of the part of display floater weakens.Also have, in Figure 28, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, make movable part increase from down position.But, this moment keep display floater fixed part attraction a little less than, in addition, the attraction of movable part is strong.The pass of fixed part at this moment and the attraction of movable part is 126.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 126 sequential, only with movable part absorption maintenance display floater.But because the attraction of fixed part is weak state, therefore, display floater is become estranged when fixed part causes the position skew.Its result, the possibility that the display floater occurrence positions that passes on to movable part is offset uprises.And then then, the attraction of movable part of having accepted display floater is strong, therefore, keeps its original state, as described above horizontal feed.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with previous explanation on the contrary movable part with the absorption affinity of the movable part that keeps panel weak state directly descend, drop to the panel that becomes the height identical with fixed part and pass on the position.
In the present embodiment, at the suction pressure of fixed part in weak sequential, pass on panel from fixed part to movable part, in addition, at the suction pressure of movable part in weak sequential 127, pass on panel from movable part to fixed part.In the situation that both sides, all owing to there is no the effect of absorption affinity passing on side, compare with the embodiment of Figure 24, can further expect not cause at panel and break or crooked effect.If can be combined in another kind of purposes mechanism of position skew that panel does not occur when passing on, it is best mode.
Secondly, the embodiment for Figure 24 is described, the suction pressure of the side that will pass on is not made as zero and example that pass on.
Figure 29 shows in the panel substrate of the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, carry out pass on 128,129 o'clock of panel substrate, for described optimal fixed part shown in Figure 24 and the absorption affinity variation of delivery section and the sequential of moving of passing on, the attraction level is not made as zero state as feature.
In the present embodiment, in the suction pressure of fixed part and movable part just in time becomes weak sequential, pass on panel from fixed part to movable part or from movable part to fixed part, therefore, can expect following effect, that is: due to the residual effect that absorption affinity is arranged, do not cause the position skew of panel, and owing to attracting weak effect, when passing on, when panel was peeled off from absorption layer, the problems such as panel ruptures did not occur yet.Mode at Figure 34 of rear explanation is best mode, but can make sequential corresponding, will not attract air often to be made as zero, therefore in the situation that to produce the amount of attraction air of the large or use of the capacity of pump of suction pressure few be the second best mode.
Secondly, illustrate to weaken and pass on the sequential of suction pressure of the panel side example when shifting to an earlier date.
During the panel substrate that Figure 30 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time advance that the absorption affinity of the part of display floater weakens.Also have, in Figure 30, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.In order to accept display floater from fixed part, make movable part increase from down position.But, this moment keep display floater fixed part attraction a little less than, in addition, the attraction of movable part a little less than.The pass of the fixed part of this moment and the attraction of movable part is 130.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 130 sequential, with fixed part and movable part absorption maintenance display floater.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.The fixed part that keeps the movable part of panel and accept panel is weak state of absorption affinity, movable part is dropped to become the panel of the height identical with fixed part to pass on the position.That is, in 131 sequential, this two sides absorption of movable part and fixed part keeps display floater.Movable part has lost confining force when descending, therefore, when passing on to fixed part, pass on swimmingly.
In the present embodiment, in sequential a little less than the suction pressure of fixed part, pass on panel or the panel that passes on from movable part to fixed part from fixed part to movable part, therefore, can expect due to the residual effect of absorption affinity, not cause the position skew of panel, and owing to attracting weak effect, when peeling off panel from absorption layer when passing on, the very good effect that the problems such as panel ruptures also do not occur.Mode at Figure 34 of rear explanation is best mode, but will not attract air often to be made as zero, therefore in the situation that to produce the large or amount attraction air that uses of the capacity of pump of suction pressure few be the second best mode.
Secondly, illustrate to weaken and pass on the sequential time delay of suction pressure of a side of panel, and suction pressure is the example of weak pattern.
During the panel substrate that Figure 31 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time delay that the absorption affinity of the part of display floater weakens.Also have, in Figure 31, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, improve the attraction of movable part, in addition, make it increase from down position.But, keep this moment the attraction of the fixed part of display floater to be still strong state, the pass of the fixed part of this moment and the attraction of movable part is 123.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 132 sequential, with fixed part and this two sides absorption maintenance display floater of movable part.But if movable part continues to rise with original state, the attraction of fixed part is still strong state, and therefore, display floater is become estranged unreasonably from fixed part.Its result may be broken or bending at display floater.And then, then, make the attraction of the fixed part of having accepted display floater rise to strong level, horizontal feed as described above.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with previous explanation on the contrary, movable part directly descends with the strong state of absorption affinity of the movable part that keeps panel, drops to the panel that becomes the height identical with fixed part and passes on the position.That is, in 133 sequential, this two sides absorption of movable part and fixed part keeps display floater.
In the present embodiment, the suction pressure of fixed part is still in strong sequential, passes on panel from fixed part to movable part, in addition, in the suction pressure of movable part still strong sequential, passes on panel from movable part to fixed part.In the situation that both sides, all because remaining in very doughtily, absorption affinity passes on the effect of side, even can further expect vibration-generating etc., also compare with the embodiment of Fig. 5, do not cause the effect of the position skew of panel.Combination utilizes the residual pressure of absorption, make breaking or the crooked another kind of purposes mechanism that does not occur of panel, in addition, will not attract air often to be provided with zero, therefore, produce in the situation that the capacity of pump of suction pressure is large or the amount attraction air that uses is few and be best mode.
Secondly, illustrate to weaken and pass on the sequential time delay of suction pressure of a side of panel, and suction pressure is the example of weak pattern.
During the panel substrate that Figure 32 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time delay that the absorption affinity of the part of display floater weakens.Also have, in Figure 32, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, make it with the attraction of movable part a little less than state rise from down position.But, keep this moment the attraction of the fixed part of display floater to be still strong state, the pass of the fixed part of this moment and the attraction of movable part is 134.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 134 sequential, with fixed part and this two sides absorption maintenance display floater of movable part.But if movable part continues to rise with original state, the attraction of fixed part is still strong state, and therefore, display floater is become estranged unreasonably from fixed part.Its result may be broken or bending at display floater.And then, then, make the attraction of the movable part of having accepted display floater rise to strong level, horizontal feed as described above.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with previous explanation on the contrary movable part directly descend with the absorption affinity of the movable part that keeps panel also strong state, drop to the panel that becomes the height identical with fixed part and pass on the position.That is, in 135 sequential, this two sides absorption of movable part and fixed part keeps display floater.
In the present embodiment, in the same manner as described above, in the suction pressure of fixed part still strong sequential, pass on panel from fixed part to movable part, in addition, in the suction pressure of movable part still strong sequential, pass on panel from movable part to fixed part.In the situation that both sides, all because remaining in very doughtily, absorption affinity passes on the effect of side, even can further expect vibration-generating etc., also compare with the embodiment of Figure 24, do not cause the effect of the position skew of panel.Combination utilizes the residual pressure of absorption, make breaking or the crooked another kind of purposes mechanism that does not occur of panel, in addition, will not attract air often to be set to zero, therefore, produce in the situation that the capacity of pump of suction pressure is large or the amount attraction air that uses is few and be best mode.
Secondly, illustrate to weaken and pass on the sequential of suction pressure of a side of panel and shift to an earlier date, and suction pressure is the example of weak pattern.
During the panel substrate that Figure 33 is illustrated in the conveying adsorption conveying mechanism that has used Figure 20～Figure 23 is carried, will be when carrying out the passing on of panel substrate, the sequential of passing on action when keeping time delay that the absorption affinity of the part of display floater weakens.Also have, in Figure 33, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, improve the attraction of movable part, in addition, make it increase from down position.But, keep this moment the attraction of fixed part of display floater for a little less than still, the pass of the attraction of fixed part at this moment and movable part is 136.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 136 sequential, with fixed part and this two sides absorption maintenance display floater of movable part.Also have, if movable part continues to rise with original state, display floater is become estranged from fixed part.And then, then, make the movable part horizontal feed as described above of having accepted display floater.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with previous explanation keep on the contrary panel movable part absorption affinity also a little less than, movable part descends, and drops to the panel that becomes the height identical with fixed part and passes on the position.That is, in 137 sequential, this two sides absorption of movable part and fixed part keeps display floater.
In the present embodiment, in sequential a little less than the suction pressure of fixed part, pass on panel from fixed part to movable part, or pass on panel from movable part to fixed part, therefore, can expect due to the residual effect of absorption affinity, do not cause the position skew of panel, and due to the effect a little less than attracting, when peeling off panel from absorption layer when passing on, the very good effect that the problems such as panel ruptures also do not occur.Mode at Figure 34 of rear explanation is best mode, but will not attract air often to be made as zero, therefore in the situation that to produce the large or amount attraction air that uses of the capacity of pump of suction pressure few be the second best mode.
Secondly, most preferred mode in the embodiment of so far explanation is described.
Figure 34 represents for solving the so far sequential of the conveying adsorption conveying mechanism of the problem of Figure 24～Figure 33 of explanation.Also have, in Figure 34, show the position of panel substrate at first at fixed part, secondly, movable part rises and accepts, then, movable part is after the suitable distance of throughput direction horizontal feed, movable part descends, and is reduced to the new fixed part of carrying the destination, the action till when finishing once to pass on.
And then the lifting position, the panel that illustrate strong, weak, 0 the switching of attraction of fixed part and movable part and movable part action pass on the sequential of position, down position.As previously explained, in the drawings, the initial absorption of display floater remains in fixed part.For display floater is accepted from fixed part, improve the attraction of movable part, in addition, make it increase from down position.Simultaneously, a little less than keeping the attraction of fixed part of display floater this moment, the pass of the fixed part of this moment and the attraction of movable part is 138.In order to enlarge the sequential of passing on of mode shown in Figure 24, in the manner, be provided with time width on the weak level of the part that keeps display floater.Also have, corresponding to its sequential, movable part is become with fixed part equal height ground rise from down position, make it rise to panel and pass on the position, in 138 sequential, with fixed part and this two sides absorption maintenance display floater of movable part.Also have, if movable part continues to rise with original state, display floater is become estranged from fixed part, but does not break or bending at display floater.And then, then, make the attraction of the movable part of having accepted display floater rise to strong level, horizontal feed as described above.
Also have, utilize the movable part horizontal feed to destination locations, for display floater absorption is fixed in the fixed part of destination locations and movable part is descended.This time with the previous explanation decline of the state of movable part a little less than with the absorption affinity of the movable part that keeps panel on the contrary, drop to the panel that becomes the height identical with fixed part and pass on the position.That is, in 139 sequential, this two sides absorption of movable part and fixed part keeps display floater.And then movable part continues to descend, and display floater is passed on swimmingly.Like this, in the sequential of Figure 34, when passing on, cause break or the possibility of crooked problem low, as shown in figure 29, when not attracting, do not need to produce the attraction air of weak level yet, therefore, have the effect of the consumption that can further reduce to attract air.
Figure 35 is the comparative example of suction system, and absorption layer 140 utilizes the switching of valve to carry out generation and the releasing of the absorption affinity of absorption layer 140 from pump P pipe arrangement.In this mode, yes, and pipe arrangement is longer, and in fact the attraction response variation of the switching of valve and absorption layer during charging apparatus, till being difficult to arrive absorbed portion from pump via valve, configures with short distance.
Pass on display floater from fixed part to movable part as device so far, or pass on from movable part to fixed part in the situation of the device that the action of display floater postpones, time when passing on is also elongated, therefore, in the mode of Figure 35, in strengthening or weakening the mode of attraction, follow delay also no problem.But in the situation that the high speed conveying production line, if the original state of this manner of comparison, Figure 24～Figure 28 is described as described, and the strong and weak sequential that is very difficult to make the sequential of passing on and attraction corresponding problem best occurs.
Therefore, the mode be used to addressing this problem shown in Figure 36.It is will be formerly the sequential 138,139 of weak attraction of Figure 34 of explanation can be in the situation that be subjected to the impact apart from the piping length of pump as described problem, realize and pass on the best corresponding concrete structure of sequential of action.In Figure 36, absorption layer 140 utilizes the switching of valve to carry out generation and the releasing of the absorption affinity of absorption layer 140 from pump P pipe arrangement.And then, in order to weaken attraction, be opened in the relief valve 141 that chamber arranges.Like this, can weaken at short notice the absorption affinity of absorption layer 140.In the situation that this mode in the switching of valve, does not change the absorption affinity of absorption layer, therefore, during actual charging apparatus, even the distance that arrives via valve till absorbed portion from pump is elongated, also no problem.Also have, secondly, illustrate and verified the switching that utilizes open and close valve 141, can weaken the result of the situation of suction pressure.
Figure 37 represents to have carried out opening by open and close valve 141 with the chart of the result of the disposable experiment that weakens of suction pressure.Face and 70 absorption layers of display floater are all connected airtight, namely close fully under the state of absorption layer, all keep the suction pressure that is produced by pump, each absorption layer produces the purpose attraction.Secondly as can be known, if an absorption layer is opened intentionally to atmosphere, disposable the weakening to half left and right of suction pressure that is produced by pump.And then as can be known, continuation is with a plurality of (in figure the being 7) atmosphere opening that has a mind, and the described suction pressure that dies down also changes.Utilize this characteristic, have relief valve near absorption layer, only the opening operation of the relief valve by being equivalent to an absorption layer, just can make the best weak state that attracts simply in display floater passes on action.
On the other hand, with absorption layer absorption fixed display panel the time, if panel have large perk or locality concavo-convex etc., be attached with in addition the foreign matters such as chip, absorption layer and the display floater that should contact with described part connect airtight abnormally, and like this, the described attracting pad part that contacts by halves can not keep suction pressure, its result causes suction pressure to be reduced near the problem of atmospheric pressure.
Therefore, the attraction mechanism that designs in order to solve described problem shown in Figure 38.Schematic cross sectional view and the vertical view of section of figure expression mechanism.Also have, the structure of Figure 38 is an example, and the number of the chamber in figure etc. is not limited to this.
Figure 38 represents the set adsorption section at a certain position, keeps the chamber of suction pressure to be divided into respectively A system, B system, C is these three.And, utilize thin flexible pipe or thin pipe arrangement to link between minute other chamber.Connect suction pump in the destination that links, utilize described suction pump, produce suction pressure at each absorption layer.In addition, be provided with purpose relief valve 141 with the instantaneous change of pressure of chamber interior at each chamber, can switch by the power that the suction pressure of each absorption layer is carried out in the switching of relief valve 141.
This mechanism shown in Figure 38 has two effects.First, with absorption layer absorption display floater the time, produce the concavo-convex or difference of height of locality in a part of absorption layer section, or bite chip etc., the absorption mistake occurs, cause the suction pressure of described part to be reduced near atmospheric pressure, its result, the suction pressure that is fixed with the chamber integral body of described absorption layer reduces, and the whole absorption affinity of absorption layer that is provided with chamber reduces, also because the pipe arrangement that links between chamber is thin, thereby produce large pressure loss between chamber, therefore, even cause pressure oscillation at a chamber, also prevent from affecting simultaneously other chambers of reduction.The second, be that B is that C is the absorption layer disposed adjacent that arranges at A, therefore, even in the chamber of any, suction pressure occurs to be reduced, pressure decreased does not sharply occur in adjacent pads yet, attract panel by adjacent part, therefore, the effect of the possibility of absorption again is improved.
As mentioned above, the panel substrate conveying device of the application of the invention prevents when the conveying of substrate, applies necessary above suction pressure, in the residual accident generation of breaking or adsorbing vestige of panel substrate, or the coming off or the problem such as position skew generation of the panel substrate that causes of attraction deficiency, in addition, for the high speed conveying substrate, high speed passes on sequential, the set of time certain hour of the suction pressure that also will be fit to pass on obtains boundary, therefore, can stably pass on.
And then, can provide the effect that links with those pressure loss of cutting apart of utilizing adsorption system, the panel substrate conveying device of the generation that comes off of the panel substrate that can the restrain adsorption mistake causes and used its display panel module assembly device.
Also have, one of the present invention is characterised in that the pressure that attracts part changes.In addition, though not shown, utilizing the comb sword to pass in the mechanism of panel substrate, also can expect identical effect by in the sequential of passing on, suction pressure being reduced best, therefore, can be suitable for.
As mentioned above, the object of the invention is to address the problem, that is: for example in display panel module assembly device, under the state of the absorption affinity of a residual side of passing on, carry out in the situation of passing on of panel, stress puts on panel, breaks or the problem such as residual absorption vestige, in addition, when passing in opposite weak situation, the occurrence positions skew, or absorption comes off, due to the perk of panel self, floating from the absorption part occurs.Therefore, for example, the absorption affinity in the time of will passing on display floater in substrate is carried is reduced to weak pattern, and stress also puts on panel thus, in addition, attracts also can not come off.Also have, specifically, open attraction system by utilizing relief valve, can easily make stable weak attraction pattern.And then as weak stage suction pressure, the open hour of the enough relief valves of energy are controlled, and therefore, even high speed, it is also easy to control.
And then, cut apart attraction system, and then produce pressure loss respectively and link, with the absorption layer of those other systems or attract the hole approach and configure, even cause the absorption mistake in certain system thus, also can pass through pressure loss, postpone the pressure decreased of other system, its result can be expected the effect of avoiding panel to come off.
Also have, display panel module assembly device is to carry out successively a plurality for the treatment of components by the panel substrate of the FPD such as plasma, and the device of drive IC, TAB and PCB substrate etc. is installed at the periphery of described panel substrate.
for example, an example as treatment process, comprise: (1) removes the terminal cleaning process of the TAB attaching section of substrate end, (2) the ACF operation of the substrate end attaching anisotropic conducting film (ACF=Anisotropic Conductive Film) after removing, (3) in the position that has attached ACF, locate with the substrate distribution, carry the lift-launch operation of TAB or IC, (4) carried TAB by adding thermo-compressed, the crimping process that utilizes the ACF film to be fixed, (5) check TAB or the position of IC or the inspection operation of connection status of carrying, (6) the PCB operation (a plurality of operation) of utilizing ACF etc. to attach to carry at the opposition side of the panel substrate side of TAB etc.And then quantity or the TAB of processing or the quantity of IC etc. according to the limit of the substrate of processing need the quantity of each processing unit or the processing unit of rotary plate etc.
Display panel module assembly device carries out the processing operation apparatus of these treatment components by continuous configuration, utilize substrate carrying mechanism conveying substrate betwixt, carries out substrate periphery and processes.
As the structure of each processing operation apparatus, described in Japanese kokai publication hei 8-26475 communique, form and comprise the work operations platform that carries out each processing operation and also can to the structure that described work operations platform is sent into the mechanism that sends panel substrate.In this structure, the work operations platform of sending into panel substrate keeps panel substrate, can be in width, length and the horizontal rotatio direction adjusted of substrate, carry out the location of the processing position of panel substrate with the operation workbench, implement each processing operation and also can.
In addition, described in TOHKEMY 2007-99466 communique, form and manage throughout in apparatus for work configuration the structure of the interdigitated electrode structure arm of panel substrate action also can.As this structure, to utilize and to manage throughout the described interdigitated electrode structure arm that apparatus for work arranges, the location action of implementing to pass on the processing position of the action of panel substrate and panel substrate also can.
And then, as described in TOHKEMY 2003-76290 communique, can utilize described display floater supporting table for configuration display floater supporting table between the same conveying mechanism of a pair of belt conveyer, carry out the method for location action of the processing position of panel substrate.
Replenish as follows about accompanying drawing, the situation that Figure 29 passes on a little less than representing adsorption levels is made as, the situation that the time of the situation that Figure 30 passes on a little less than representing adsorption levels is made as is long, Figure 31 represents to pass under the strong original state of the absorption of the side of passing on the situation of action, after Figure 33 represents the absorption affinity grow of the side accepted, pass on the action situation, Figure 34 represents to solve an example of the optimal cases of the present invention of all problems so far.

Claims (25)

1. display panel module assembly device, it carries panel substrate successively between processing operation apparatus, by various processing are carried out on the processing limit of described panel substrate, electronic component is installed, it is characterized in that,
In at least more than one described processing operation apparatus, one side have the plural at least processing unit that carries out simultaneously processing operation to a panel substrate,
Processing operation comprises at least one in following operation, and the operation that described operation refers to the position that will carry electronic unit on substrate is cleaned, the position after the cleaning attach the operation of ACF, the operation of carrying the operation of electronic unit in the position that has attached ACF, the electronic unit that carries and substrate being carried out crimping.
2. display panel module assembly device according to claim 1, is characterized in that,
Described refer to simultaneously before described panel substrate is carried to ensuing job position during the meaning that finishes of processing operation.
3. display panel module assembly device according to claim 1 and 2, is characterized in that,
Described processing unit has:
Panel substrate posture detection mechanism, the posture of the described panel substrate of processing operation is carried out in its detection;
Processing unit position correction mechanism, it revises the processing limit of described panel substrate and the relative position of described processing unit based on the result of described panel substrate posture detection mechanism.
4. display panel module assembly device according to claim 1 and 2, is characterized in that,
Described processing unit has: the mechanism that can move on the direction parallel with the processing edge direction of described panel substrate.
5. display panel module assembly device according to claim 1 and 2, is characterized in that,
Described processing unit has: the mechanism that can move on the direction parallel with the configuration direction of described processing unit.
6. display panel module assembly device according to claim 1 and 2, is characterized in that,
Carry out simultaneously the processing operation in plural described processing unit, described display panel module assembly device has: processing unit action sequence controlling organization, the operation timing of mobile transfer shift action is moved and shifts to ensuing job position in the processing in the plural described processing unit of the described processing operation of its control.
7. display panel module assembly device according to claim 1 and 2, is characterized in that,
For plural described processing unit, have independently in the direction of rotation of Width, thickness direction, length direction and each axle of described panel substrate the correction mechanism of the each processing unit position at least more than one direction at each described processing unit, and be disposed at can be in mechanism mobile on the throughput direction of described panel substrate.
8. display panel module assembly device, it carries panel substrate successively, by various processing are carried out on the processing limit of described panel substrate, electronic component is installed, and it is characterized in that having:
Cut apart long processing limit operation of processing time in described various processing, and carry out simultaneously the plural at least processing unit of processing operation,
Processing operation comprises at least one in following operation, and the operation that described operation refers to the position that will carry electronic unit on substrate is cleaned, the position after the cleaning attach the operation of ACF, the operation of carrying the operation of electronic unit in the position that has attached ACF, the electronic unit that carries and substrate being carried out crimping.
9. display panel module assembly device according to claim 8, is characterized in that,
Described refer to simultaneously before described panel substrate is carried to ensuing job position during the meaning that finishes of processing operation.
10. according to claim 8 or 9 described display panel module assembly devices, is characterized in that,
Described processing unit has:
Panel substrate posture detection mechanism, the posture of the described panel substrate of processing operation is carried out in its detection;
Processing unit position correction mechanism, it revises the processing limit of described panel substrate and the relative position of described processing unit based on the result of described panel substrate posture detection mechanism.
11. according to claim 8 or 9 described display panel module assembly devices is characterized in that,
Described processing unit has: the mechanism that can move on the direction parallel with the processing edge direction of described panel substrate.
12. according to claim 8 or 9 described display panel module assembly devices is characterized in that,
Described processing unit has: the mechanism that can move on the direction parallel with the configuration direction of described processing unit.
13. according to claim 8 or 9 described display panel module assembly devices is characterized in that,
Carry out simultaneously the processing operation in plural described processing unit, described display panel module assembly device has: processing unit action sequence controlling organization, the operation timing of mobile transfer shift action is moved and shifts to ensuing job position in the processing in the plural described processing unit of the described processing operation of its control.
14. according to claim 8 or 9 described display panel module assembly devices is characterized in that,
For plural described processing unit, have independently in the direction of rotation of Width, thickness direction, length direction and each axle of described panel substrate the correction mechanism of the each processing unit position at least more than one direction at each described processing unit, and be disposed at can be in mechanism mobile on the throughput direction of described panel substrate.
15. a display module assemble method is carried panel substrate successively between processing operation apparatus, by various processing are carried out on the processing limit of described panel substrate, electronic component is installed, it is characterized in that,
Plural at least processing unit at least more than one described processing operation apparatus carries out processing operation simultaneously to one side of described panel substrate,
Processing operation comprises at least one in following operation, and the operation that described operation refers to the position that will carry electronic unit on substrate is cleaned, the position after the cleaning attach the operation of ACF, the operation of carrying the operation of electronic unit in the position that has attached ACF, the electronic unit that carries and substrate being carried out crimping.
16. display module assemble method according to claim 15 is characterized in that,
Described refer to simultaneously before described panel substrate is carried to ensuing job position during the meaning that finishes of processing operation.
17. according to claim 15 or 16 described display module assemble methods is characterized in that,
Described processing unit detects the posture of the panel substrate of processing, and based on testing result, revises the processing limit of described panel substrate and the relative position of described processing unit.
18. according to claim 15 or 16 described display module assemble methods is characterized in that,
Described processing unit moves on the direction parallel with the processing edge direction of described panel substrate.
19. a display module assemble method is carried panel substrate successively, by various processing are carried out on the processing limit of described panel substrate, electronic component is installed, it is characterized in that,
At least plural processing unit is cut apart long processing limit operation of processing time in described various processing, and carries out simultaneously processing operation,
Processing operation comprises at least one in following operation, and the operation that described operation refers to the position that will carry electronic unit on substrate is cleaned, the position after the cleaning attach the operation of ACF, the operation of carrying the operation of electronic unit in the position that has attached ACF, the electronic unit that carries and substrate being carried out crimping.
20. display module assemble method according to claim 19 is characterized in that,
Described refer to simultaneously before described panel substrate is carried to ensuing job position during the meaning that finishes of processing operation.
21. according to claim 19 or 20 described display module assemble methods is characterized in that,
Described processing unit detects the posture of the panel substrate of processing, and based on testing result, revises the processing limit of described panel substrate and the relative position of described processing unit.
22. according to claim 19 or 20 described display module assemble methods is characterized in that,
Described processing unit moves on the direction parallel with the processing edge direction of described panel substrate.
23. panel substrate assembling processing operation apparatus, panel substrate is processed to assemble in its processing limit to panel substrate, it is characterized in that,
Have the plural at least processing unit that one side of a panel substrate is carried out simultaneously operation,
Described processing unit has the mechanism that can move on the direction parallel with described processing edge direction,
Processing operation comprises at least one in following operation, and the operation that described operation refers to the position that will carry electronic unit on substrate is cleaned, the position after the cleaning attach the operation of ACF, the operation of carrying the operation of electronic unit in the position that has attached ACF, the electronic unit that carries and substrate being carried out crimping.
24. processing operation apparatus is used in panel substrate assembling according to claim 23, it is characterized in that,
Described panel substrate assembling is that ACF attaches processing operation apparatus or TAB carries processing operation apparatus with processing operation apparatus.
25. processing operation apparatus is used in panel substrate assembling according to claim 23, it is characterized in that,
Described processing unit has:
Panel substrate posture detection mechanism, the posture of the described panel substrate that its detection is processed;
Processing unit position correction mechanism, it revises the processing limit of described panel substrate and the relative position of described processing unit based on the result of described panel substrate posture detection mechanism.
CN 200910179069 2008-10-06 2009-10-09 Assembling device and method for display panel and a treatment device thereof and a baseplate delivery mechanism Expired - Fee Related CN101814407B (en)

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JP2008-259944 2008-10-06
JP2008-259960 2008-10-06
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