JP4854256B2 - Panel processing apparatus and processing method - Google Patents

Description

  The present invention relates to a panel processing apparatus and a processing method for performing a plurality of processes on flat display panels such as liquid crystal panels and plasma panels, and other panels.

  As a flat display panel, for example, a liquid crystal panel needs to be subjected to various processing steps. For example, in order to connect the drive circuit to the panel, an anisotropic conductive sheet is attached to the panel, a semiconductor circuit device constituting a driver circuit is connected, and a printed circuit board is connected to the other end of the semiconductor circuit device. Make it connected. For this purpose, at least a stage for attaching an anisotropic conductive sheet to a panel that has been carried in, a stage for mounting a semiconductor circuit device, and a connection stage for a printed circuit board are required. There are cases where more stages are provided, such as performing two steps of temporary pressing and main pressing.

For example, in Patent Document 1, a plurality of stages are arranged in a line, and each stage is provided with a table for supporting a panel, so that the position of each table can be adjusted at least in the horizontal direction. As a configuration that can be adjusted in the X-axis and θ directions, the panel is sequentially carried into each stage, and predetermined processing is performed in a state where the panel is fixedly held by vacuum suction on a table provided on each stage. What has been configured to do is disclosed. In order to transfer the panel between the stages, pick and place means is provided, and the panel is transferred between the front and rear stages by the pick and place means.
JP 2004-6467 A

  By the way, in each stage, since the process is performed on the front surface side of the panel, each table is fixed by vacuum suction on the back surface side of the panel. For this reason, the pick-and-place means for transferring the panel between the stages adsorbs the surface side of the panel and lifts the panel against gravity. In the case of a panel that is a large and thin display, regardless of whether the panel is thick and small, a large load is applied when the surface is vacuum-adsorbed and lifted by pick-and-place means. Will work. Therefore, there is a disadvantage that damage such as distortion or deformation may occur on the panel during the repeated transfer between a plurality of stages.

  The present invention has been made in view of the above points, and an object of the present invention is to enable a panel to be smoothly and reliably transferred between processing stages without damaging the panel. There is.

In order to achieve the above-described object, the configuration of the panel processing apparatus according to the present invention is such that a panel is transported between a plurality of processing stages, and predetermined processing is sequentially performed on the panel at each processing stage. A panel processing apparatus , in which a plurality of holder arms on which a back surface of the panel is placed is mounted on a horizontal rotation portion, is arranged corresponding to each processing stage, and is positioned on an odd-numbered processing stage. At least one of the panel holder and the panel holder positioned on the even-numbered processing stage is provided with a driving means for performing a lifting operation and a moving operation of the panel in the transport direction, and the panel holder positioned on the odd-numbered processing stage When the holder arm of the panel holder located on the even-numbered processing stage is brought close to each other, the other is placed between one adjacent holder arm Are those holder arm enters, said odd-numbered processed disposed panels holder stage and the even-numbered arranged processing stages panels holder be the same as the drive means said panel holder Z-axis driving means for moving up and down, X-axis driving means for driving in the X-axis direction of two orthogonal axes in the horizontal direction, and Y-axis driving means for driving in the Y-axis direction It is.

  In the panel processing apparatus, there are at least two processing stages, and after the panel is loaded into the first stage constituting the panel processing apparatus from the previous process and processed by the final stage, the next process is performed. It is carried out to. There are no particular restrictions on the processing performed at each stage. Stages that perform surface processing, component mounting, wet processing including liquid application and cleaning, dry processing including light irradiation, inspection, and other various processing Is provided. The case where a plurality of processes are performed in one stage is also included.

  The holder arm that constitutes the panel holder supports the back surface of the panel, but preferably includes means for holding the panel in a fixed manner when the panel is placed. The panel may be mechanically clamped, but is preferably configured to be detachably fixed by vacuum suction. For this purpose, a suction pad made of an elastic member provided with suction holes on the surface of each holder arm is mounted.

  The panel holder is provided with driving means, and either one of the panel holder located on the odd-numbered processing stage or the panel holder located on the even-numbered processing stage, preferably both the panel holders are provided with driving means. In addition, at least a lifting operation and a movement in the transport direction are possible. Further, it is possible to provide means for displacing the stage to a position for executing processing on the panel and a position for transferring the panel between the stages. In the case where driving means are provided in both the panel holder located in the odd-numbered processing stage and the panel holder located in the even-numbered processing stage, the driving means can be configured differently, and the same configuration The driving means can also be used. More preferably, all the driving means have the same configuration, the Z-axis driving means for raising and lowering the panel holder, the X-axis driving means for driving in the X-axis direction of the two orthogonal axes in the horizontal direction, and Y for driving in the Y-axis direction It comprises shaft drive means.

  In the odd-numbered processing stage panel holder and the even-numbered panel holder, for example, one panel holder can be constituted by two holder arms, and the other panel holder can be constituted by three holder arms. From the standpoint of stably holding the panel, one panel holder is provided with three holder arms, the other panel holder is provided with four holder arms, and the number of holder arms is further increased. You can also. Moreover, the space | interval between the adjacent holder arms in one panel holder must be larger than the width dimension of the holder arm of the other panel holder. Accordingly, when one panel holder and the other panel holder are brought close to each other, the mutual holder arms are intricately arranged. The panel holders of the odd-numbered processing stages and the even-numbered processing stages may be configured by the same number of holder arms, and the interval between the holder arms may be larger than the width of the holder arms. Furthermore, these drive means can also have the same structure. In this case, at least during the delivery of the panel, one of the panel holder and the other panel holder is arranged so as to shift the position of the holder arm in the arrangement direction. In any case, the receiving-side panel holder is positioned below the delivery-side panel holder, and the receiving-side panel holder is raised or lowered by lowering the delivery-side panel holder. Delivery takes place.

  A plurality of holder arms provided in each panel holder may be fixedly held, but all or some of the holder arms may be movable arm holders movable in the arrangement direction. For example, one panel holder is provided with one fixed holder arm in the center and two movable holder arms movable in the direction of approaching / separating on the left and right sides of the fixed holder arm in parallel. The panel holder is provided with two fixed holder arms arranged so as to be wider than the width of the fixed holder arm of one of the panel holders, and in parallel with the positions outside both the fixed holder arms. Two movable holder arms that can move in the direction of approaching / separating each fixed holder arm can be provided. When the movable holder arm is provided as described above, a plurality of types of panels having different sizes can be handled.

And, for the panel processing method of the present invention, by providing a panel holder fitted with a plurality of holders arms horizontally rotating unit for vacuum suction the rear surface of the panel to the processing stage of the multiple, the between respective panel holder Therefore to sequentially transferring the panel, the a performs predetermined processing on the panel at each processing stage, the panel placed on the panel holder in the preceding processing stages in the processing stage After the processing is completed, the panel holder of the preceding processing stage is used as the delivery-side panel holder so that the holder arm is directed to the receiving-side holder arm that is a panel holder provided in the subsequent processing stage. The holder arm of the receiving side panel holder is positioned below the holder arm of the receiving side panel holder. Then, it is arranged in a direction facing this holder arm, and these two panel holders are displaced in the approaching direction so that each holder arm of these two panel holders is positioned so as to interpose with each other's respective holder arm, The panel on the receiving side is raised or the panel holder on the receiving side is lowered to transfer the panel from the delivering side to the receiving side panel holder, and the receiving side panel holder is placed on the processing stage. It is characterized in that the processing at the processing stage is performed by moving it to a predetermined position.

  As a result, when the panel is transferred between the processing stages, when the panel is lifted, the panel is not damaged, such as stress or deformation, and can be smoothly and reliably transferred between the processing stages.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. First, as shown in FIG. 1, as a process for the panel, a semiconductor device 2 made up of a plurality of TCP (Tape Carrier Package) is provided on each of the long side 1a and the short side 1b of the panel 1, and a TAB (Tape Automated Bonding) method. However, the panel processing apparatus of the present invention is not limited to this, but is described as being configured as an apparatus for connecting a printed circuit board 3 so as to be connected to the semiconductor device 2 on each side. Is not to be done.

  The panel processing apparatus has a stage configuration shown in FIG. In the figure, reference numeral 10 denotes a carry-in stage. The carry-in stage 10 is provided with a mechanism for cleaning the TAB mounting portion of the loaded panel 1. This cleaning is performed by rubbing the surface of the panel 1 by tape cleaning, for example. As a result, dirt on the TAB mounting portion of the panel 1 can be wiped off.

  A stage located on the downstream side of the carry-in stage 10 is an ACF attaching stage 11 for attaching an ACF (Anisotropic Conductive Film) tape to the TAB mounting portion of the panel 1. The ACF is preferably affixed individually to a portion where each semiconductor device 2 is mounted, but can be affixed over the entire length of the long side 1a and the short side 1b.

  The next processing stages 12 and 13 are stages for mounting the TAB on which the semiconductor device 2 is mounted. The processing stage 12 is a temporary press-bonding stage that temporarily press-bonds the semiconductor device 2 to the ACF, and the processing stage 13 is a book that is fixed to the panel 1 via the ACF by pressurizing the pre-pressed semiconductor device 2 under heating. It is a crimping stage. Here, a plurality of semiconductor devices 2 are mounted on the long side 1a and the short side 1b of the panel 1, respectively. The processing stage 14 is an inspection stage for determining whether or not the semiconductor device 2 thus crimped is mounted at a regular position.

  Further, the processing stage 15 is a PCB connection stage for connecting the printed circuit board 3. Here, a plurality of semiconductor devices 2 are mounted on each side 1a, 1b of the panel 1, and the printed circuit board 3 is electrically connected to all the semiconductor devices 2 mounted on each side 1a, 1b. Will be connected. The processing stage 16 is a resin application stage that applies a sealing resin to a connection portion between the semiconductor device 2 and the printed circuit board 3. Further, when the processing at the resin coating stage 16 is finished, the panel 1 is carried out to the next process. Therefore, this resin coating stage 16 also serves as a carry-out stage. Since the semiconductor device 2 and the printed circuit board 3 are connected to a plurality of sides of the panel 1, among the processing stages 10 to 16 described above, for example, the processing stages such as the main pressure bonding stage 13 and the PCB connection stage 15 are Two or more stage configurations may be employed.

  The processing stages 10 to 16 are each equipped with a mechanism for performing a necessary process, but the description of the configuration of each processing mechanism is omitted. And in order to support the panel 1, respectively, as the support means of the panel 1, the panel holder equipped with the several holder arm is provided in each process stage 10-16. Here, the panel holder has a three-arm configuration and a four-arm configuration. In FIG. 2, 17 indicates a panel holder having a three-arm structure, and 18 indicates a panel holder having a four-arm structure. As can be seen from the figure, the panel holders 17 and the panel holders 18 are alternately arranged. In the configuration of FIG. 2, the panel holders 17 are arranged in the odd-numbered processing stages, and the even-numbered processing stages. Is provided with a panel holder 18. The panel holders 17 and 18 may be arranged alternately, and the panel holder 18 may be provided in the odd-numbered processing stage and the panel holder 17 may be provided in the even-numbered processing stage.

  FIG. 3 shows the configuration of the panel holder 17. As is clear from this figure, the panel holder 17 has three holder arms 20C, 20L and 20R (referred to collectively as the holder arm 20), and these holder arms 20C, 20L and 20R are It is supported by the attachment member 21 and can be integrally rotated in the horizontal direction by the attachment member 21. The holder arm 20 </ b> C located at the center is a linear arm and is a fixed arm holder fixedly provided on the attachment member 21. On the other hand, the left and right holder arms 20L and 20R are substantially T-shaped, and the distance between the holder arms 20L and 20R can be adjusted by moving the holder arms 20L and 20R in a direction approaching or separating from the holder arm 20C. On the surfaces of the holder arms 20C, 20L, and 20R, suction pads 22 made of an elastic member are attached at a plurality of locations. It comes to be vacuum-adsorbed.

  As shown in FIG. 4, the panel holder 18 includes four holder arms 30C1 and 30C2, and 30L and 30R (referred to collectively as the holder arm 30). The two holder arms 30C1 and 30C2 positioned at the center are fixed holder arms fixedly held by the mounting member 31, and the holder arms 30L and 30R positioned on the left and right sides are respectively connected to the fixed holder arms 30C1 and 30C2. The distance can be adjusted by parallel movement in the approaching / separating direction. A predetermined number of suction pads 32 provided with a number of suction holes 32a are also mounted on the holder arms 30C1, 30C2, 30L, and 30R.

  In the panel holders 17 and 18, when the movable holder arms 20L, 20R and 30L, 30R located on the left and right sides are in closest contact with the fixed holder arms 20C, 30C1, 30C2, the distance between the holder arms 30C1-30C2 is as follows. It is larger than the width dimension of 20C, and the interval between the holder arms 20C-20L and 20C-20R is larger than the width dimension of the holder arms 30C1 and 30C2. Further, the interval between the holder arms 30C1-30L and 30C2-30R is larger than the width dimension of the holder arms 20L, 20R. By giving such a dimensional relationship, the panel holders 17 and 18 can be arranged in a state where the holder arms are interlaced with each other.

  Panel holders 17 and 18 are attached to a drive mechanism. FIG. 5 and FIG. 6 show the configuration of this drive mechanism. The drive mechanisms for the panel holders 17 and 18 have substantially the same configuration. 5 and 6 show a drive mechanism of the panel holder 17 having the three holder arms 20C, 20L, and 20R, the panel holder 18 is similarly configured.

  As is apparent from these drawings, the attachment members 21 of the holder arms 20C, 20L, and 20R are attached to the rotary table 40. The rotary table 40 is mounted on a horizontal rotation unit 41 provided with a rotary actuator, and is configured to be rotated by an index by, for example, an angle of 90 ° by the horizontal rotation unit 41. The horizontal rotation part 41 is attached to the Z-axis drive means. In the case of the panel holder 18, the attachment members 31 of the holder arms 30C1, 30C2, 30L, and 30R are attached to the rotary table 40.

  The Z-axis driving means is for displacing the panel holder 17 in the vertical direction. The Z-axis drive means has a Z-axis base 42, and a guide rail 43 is provided on the Z-axis base 42, and an inclined guide block 44 is attached to the guide rail 43. The inclined guide block 44 is provided with a screw shaft 46 connected to a motor 45. By operating the motor 45, the inclined guide block 44 is moved straight along the guide rail 43. . A slider 47 is attached to the lower surface of the horizontal rotating portion 41, and this slider 47 is engaged with the inclined surface portion of the inclined guide block 44. A plurality of spline shafts 48 are erected on the Z-axis base 42, and a regulating plate 49 through which the spline shafts 48 are inserted is connected to the horizontal rotation portion 41.

  Accordingly, when the motor 45 is driven, the inclined guide block 44 moves along the guide rail 43, and the slider 47 connected to the horizontal rotating portion 41 engages with the inclined surface of the inclined guide block 44, and Since the spline shaft 48 is inserted through the restriction plate 49 connected to the horizontal rotation portion 41, the rotary table 40 moves up and down. As a result, the panel holder 17 is driven up and down. In the vertical direction, the panel holder 17 receives a panel delivery position which is an intermediate position, a reception standby position below the panel delivery position, and a reception position above the panel delivery position. It is displaced to three positions with the completion position.

  The Z-axis base 42 is attached to the Y-axis drive means. The Y-axis drive means is for moving the panel holder 17 in a direction approaching or separating from each processing stage, and has a Y-axis base 50. The Y-axis base 50 is provided with a Z-axis base 42. In order to reciprocate in the Y-axis direction, a Y-axis guide 51 and a motor 52 and a screw shaft 53 for driving the Z-axis base 42 along the Y-axis guide 51 are provided. On the other hand, the Z-axis base 42 is provided with a nut 54 through which a screw shaft 53 is inserted.

  Therefore, by operating the motor 52, the panel holder 17 can be reciprocated between the processing operation position close to the processing stage and the retracted position separated from the processing stage. The processing operation position is the same in each processing stage, but may be a different position. On the other hand, the retreat position is the same position in all processing stages.

  Further, the Y-axis base 50 is attached to the X-axis drive means. The X-axis driving means is for moving the panel holder 17 in the direction in which the processing stages are arranged, that is, in the direction orthogonal to the Y-axis. A motor 57 and a screw shaft 58 are provided to reciprocate the base 50, and a nut 59 through which the screw shaft 58 is inserted is attached to the Y-axis base 50.

  By actuating the motor 57, the Y-axis base 50 moves in the X-axis direction. As a result, the panel holders 17 and 18 move to the position in the stage at the processing stage and the positions close to the processing stages before and after that. It can be displaced to the loading position.

  By configuring as described above, the panel 1 is carried into the carry-in stage 10 and is sequentially carried to the processing stages 10 to 16 including the carry-in stage 10, and predetermined processing is performed on the panel 1. Then, the resin coating stage 16 is used as a carry-out stage, and is sent to the next process. Note that the processing contents at each processing stage are well known in the art as the connection process between the semiconductor device 2 and the printed circuit board 3 in the manufacturing process of the liquid crystal panel. Is omitted.

  Thus, when the panel 1 moves to each processing stage, the panel 1 is sequentially conveyed from the processing stage on the most downstream side. That is, after unloading the panel 1 that has been completely processed from the resin coating stage 16 functioning as a unloading stage, the panel 1 from the PCB connection stage 15 is transported to the resin coating stage 16 and then the panel on the inspection stage 14. The panel 1 is transported in order such that 1 shifts to the PCB connection stage 15. Therefore, in the following, in order to distinguish between the preceding processing stage and the succeeding processing stage, F is the preceding processing stage and S is the succeeding processing stage, and FIG. 7 to FIG. 9 will be described.

  First, it is assumed that the processing of the panel 1 is completed at the preceding processing stage F located on the upstream side, and at this time, the panel 1 is already carried out at the succeeding processing stage S located on the downstream side. Here, it is assumed that the panel holder 17 is positioned in the preceding processing stage F, and the panel holder 18 is positioned in the subsequent processing stage S.

  Thus, in the state of FIG. 7, the panel holder 17 positioned at the preceding processing stage F is in the processing operation position, and the panel holder 18 positioned at the subsequent processing stage S is disposed at the transfer position to the next processing stage. Has been. In these drawings, O is the rotation center of the rotary table 40.

  Therefore, as shown in FIG. 8A, in the preceding processing stage F, by operating the Y-axis driving means, the panel holder 17 holding the panel 1 is processed as shown by the arrow A. Then, the horizontal table 41 is driven to rotate the rotary table 40 and the holder arm 20 is rotated toward the subsequent processing stage S as indicated by the arrow B. At the same time, the panel holder 18 of the subsequent processing stage S is rotated 180 ° and directed toward the panel holder 17 side. At this time, as shown in FIG. 8 (b), the panel holder 17 is set to an intermediate height panel delivery position by the Z-axis driving means, and the panel holder 18 is set to a lower receiving standby position. The difference H is given.

  From this state, the panel holder 17 and the panel holder 18 are moved to the transfer positions close to each other by the X-axis driving means. This is the state of FIG. 9, and as shown in FIG. 9A, the holder arm 20 of the panel holder 17 and the holder arm 30 of the panel holder 18 are in an intricate state. Then, as shown in FIG. 5B, the holder arm 30 is positioned lower than the holder arm 20 and therefore is positioned at the lower position of the panel 1.

  Therefore, the Z-axis driving means on the panel holder 18 side is operated to raise the panel holder 18 as indicated by the arrow U. When the panel holder 18 rises from the reception standby position to the panel delivery position (or in the previous stage), the vacuum suction on the panel holder 17 side is released, and the suction force on the panel 1 is applied on the panel holder 18 side. Then, as indicated by the phantom line in FIG. 9B, the panel holder 18 continues to rise, reaching the reception completion position, and the panel holder 17 is lowered to the reception standby position. As a result, the panel 1 has moved from the panel holder 17 of the preceding process stage F to the panel holder 18 of the subsequent process stage S.

  Then, after that, the X-axis driving means is operated, and in the subsequent processing stage S, the panel holder 18 that has received the panel 1 is displaced to the position in the stage, and then the rotary table 40 is rotated to rotate the panel holder 18. The holder arm 30 is directed toward the subsequent processing stage S, and the Y-axis driving means is further operated to displace it from the retracted position to the processing operation position. At this time, the process for the panel 1 is performed at any one of the height positions of the panel delivery position, the reception standby position, and the reception completion position. This height position is a position corresponding to the processing for the panel 1.

  On the other hand, the panel holder 17 of the preceding processing stage F that has delivered the panel 1 receives the panel 1 from the preceding processing stage. For this purpose, the panel holder 17 is rotated 180 ° in the horizontal direction so as to face the processing stage to receive the panel 1 and lowered to the reception standby position. Then, the panel 1 is received from the front processing stage by being displaced to the transfer position.

  As described above, the panel 1 is pitch-fed between the processing stages, and a required process is performed at each processing stage. While processing is being performed on the panel 1 in each processing stage, the panel holders 17 and 18 are vacuum-sucked to the panel 1 from the back surface, and the three and four holder arms 20 and 30 are respectively attached. Since the panel 1 is supported over a wide area, the panel 1 is stably held.

  Further, when the panel 1 is transferred between the processing stages, the holder arm 20 of the panel holder 17 and the holder arm 30 of the panel holder 18 are alternately arranged, that is, the holder arms 30L, 20L, 30C1. , 20C, 30C2, 20R, 30R are arranged in this order, and the state in which the back surface of the panel 1 is sucked and held by the holder arm of the delivery-side panel holder is switched to suction by the holder arm of the receiving-side panel holder, Since the transfer of the panel 1 is executed, the gravity acting on the panel 1 during the transfer is not subjected to stress such as bending or distortion, and there is no possibility that the panel 1 is deformed or damaged.

  Further, the transfer of the panel 1 is performed by the operation of raising one panel holder after the panel holder 17 and the panel holder 18 are brought close to each other so that the panel holder 18 and the panel holder 18 are intertwined. The panel 1 can be transferred smoothly. In addition, the panel 1 is held by the other panel holder until the one panel holder rises and becomes the height position of the other panel holder, and when the height position of the panel holder is reversed, the panel 1 By switching the panel holder on which the attracting force is applied, the stability of the panel 1 is improved, and the panel 1 can be prevented from being displaced during the transfer.

  The holder arms 20 and 30 constituting the panel holders 17 and 18 are attached to the attachment member 40. However, the holder arms 20 and 30 may be fixedly attached to the attachment member 40. In order to allow the panel to be processed, a part of the holder arm may be attached to the mounting member so that the position thereof can be adjusted. That is, as shown in FIG. 10, among the holder arms in the panel holders 17 and 18, the holder arm 20C located in the center and the holder arms 30C1 and 30C2 are fixedly held, and are located on both sides thereof. The holder arms 20L, 20R and 30L, 30R are attached to the holder arm 20C and the holder arms 30C1, 30C2.

  FIG. 10 shows a structure in which the panel 100 having the maximum size is held. The change in the handling size of the panel can be set stepwise or steplessly. Then, the panel is supported at one or two positions at the intermediate position and at the left and right side end positions or in the vicinity thereof. Moreover, as shown in FIG. 11, when the panel holder 17 and the panel holder 18 are assembled, the positions of the holder arms 20L, 20R and 30L, 30R are adjusted so as not to interfere with each other. Must have been.

It is explanatory drawing which shows an example of the process aspect of a panel. It is a whole block diagram of the panel processing apparatus by this invention. It is a top view which shows the structure of one panel holder. It is a top view which shows the structure of the other panel holder. It is a front view which shows the drive mechanism of a panel holder. FIG. 6 is a plan view of FIG. 5. It is an operation explanatory view showing a state before transfer in a panel transfer procedure. It is operation | movement explanatory drawing which shows the preparation stage of the transfer of a panel. It is effect | action explanatory drawing which shows the state which is performing the transfer of a panel. It is a top view which shows the state which expanded the space | interval of each holder arm which comprises a panel holder. FIG. 11 is a plan view of a state in which one panel holder and the other panel holder are interlaced with each other with the interval between the holder arms shown in FIG. 10.

Explanation of symbols

1,100 Panel 10-16 Processing stage 17, 18 Panel holder 20C, 20L, 20R, 30C1, 30C2, 30L, 30R Holder arm 21, 31 Mounting member 22, 32 Suction pad 22a, 32a Suction hole 40 Rotary table 42 Z-axis Base 50 Y-axis base 51 Y-axis guide 55 Base 56 X-axis guide

Claims (5)

In a panel processing apparatus that transports a panel between a plurality of processing stages and sequentially performs a predetermined process on the panel at each processing stage,
A panel holder in which a plurality of holder arms on which the back surface of the panel is placed is mounted on a horizontal rotation unit is arranged corresponding to each processing stage,
Provided with a driving means for performing an ascending / descending operation and a moving operation in the transport direction of the panel on at least one of the panel holder positioned at the odd-numbered processing stage and the panel holder positioned at the even-numbered processing stage;
When the holder arm of the panel holder located on the odd-numbered processing stage and the panel holder located on the even-numbered processing stage are brought close to each other, the other holder arm enters between one adjacent holder arm ,
The panel holder disposed on the odd-numbered processing stage and the panel holder disposed on the even-numbered processing stage are the same, and the driving means includes a Z-axis driving means for raising and lowering the panel holder. A panel processing apparatus comprising: an X-axis driving unit that drives in the X-axis direction of two orthogonal axes in the horizontal direction; and a Y-axis driving unit that drives in the Y-axis direction .   2. A panel processing apparatus according to claim 1, wherein each holder arm constituting each panel holder is provided with a suction pad for vacuum-sucking the back surface of the panel on the surface. Each of the two types of panel holders includes at least one fixed holder arm and a plurality of movable holder arms, and the fixed holder arm is disposed between the movable holder arms, 3. The panel processing apparatus according to claim 1, wherein each of the movable holder arms located on both sides is configured to be movable in a direction in which the movable holder arms are moved toward and away from the fixed holder arm . 4. The panel processing apparatus according to claim 3 , wherein the movable holder arm of each panel holder is disposed so as to abut on both side edges of the panel from the fixed holder arm . Each processing stage is provided by providing a plurality of processing stages with a panel holder in which a plurality of holder arms that vacuum-suck the back surface of the panel are attached to a horizontal rotation unit, and sequentially transferring the panel between these panel holders. A panel processing method for performing predetermined processing on the panel,
For the panel placed on the panel holder in the preceding processing stage, perform the processing in the processing stage,
After this process is completed, the panel holder of the preceding processing stage is displaced as a delivery-side panel holder so that the holder arm is directed toward the receiving-side holder arm that is a panel holder provided in the subsequent processing stage, In addition, the holder arm of the receiving side panel holder is disposed below the holder arm of the transferring side panel holder in a direction facing this holder arm,
Displace these two panel holders in the direction of proximity, and position each holder arm of these two panel holders so as to interlace with each other's holder arm, and raise the receiving side panel holder or transfer side By lowering the panel holder, the panel is transferred from the delivery side to the reception side panel holder,
A panel processing method characterized in that processing on a processing stage is performed by moving a receiving-side panel holder to a predetermined position with its holder arm directed toward the processing stage.

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