JPH0826475A - Conveyor for glass base - Google Patents

Abstract

PURPOSE:To provide a conveyor for a glass base capable of avoiding any dropping accident of the glass base. CONSTITUTION:A first support part 30, a second support part 35, a working table 21, a first mounting base 13 and a second mounting base 15 are designed to attract and hold the lower surface of a glass base D. The first support part 30 and the second support part 35 are moved on a straight line by a linear motor 25 and the working table 21 is moved between a delivery station S1 and a working station by means of XY motors 17, 19.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate carrying device for carrying a glass substrate such as a liquid crystal panel.

[0002]

2. Description of the Related Art Recently, glass substrates such as liquid crystal panels have been used for T
A mounting apparatus for automatically mounting a CP (Tape Carrier Package) device has come into practical use. As such a mounting apparatus, a glass substrate carrying device for carrying a glass substrate is used.

FIG. 20 is a perspective view of a conventional glass substrate transporting apparatus. 1 is a glass substrate such as a liquid crystal panel, 2 is a suction pad 3 for sucking the upper surface of the glass substrate 1, and X tables XT and Y are provided. It is a transfer head that moves in the XY directions by the table YT. That is, the conventional glass substrate transporting device includes a suction pad 3, a transfer head 2, an X table XT, and a Y table.
A table YT is provided. A is a positioning device for positioning the glass substrate 1. Of the positioning devices A, 4 is X
An X table driven by the motor 5, and a Y motor 7
The Y table 8 driven by the jig 8 is a jig provided on the Y table 6 and having a square-shaped ground surface 8a for grounding the lower surface of the glass substrate 1, and 8b is a suction hole opened to the ground surface 8a.

[0004]

As described above, the conventional glass substrate transporting device sucks the upper surface of the glass substrate 1 from above by the suction pad 3 and sends the glass substrate 1 together with the transfer head 2 to a predetermined position. , The adsorption was released and the conveyance was completed.

However, if the suction of the suction pad 3 is incomplete, or if an unexpected situation such as a power failure occurs during transportation, the glass substrate 1 may come off from the suction pad 3 and fall. In particular, the glass substrate 1 is a very fragile member, and if such a fall accident occurs, the glass substrate 1 is inevitably damaged.

[0006] Therefore, an object of the present invention is to provide a glass substrate carrying device which can safely carry a glass substrate without fear of a fall accident.

[0007]

A glass substrate transporting apparatus of the present invention holds a lower surface of a glass substrate in a state where a part of the lower surface of the glass substrate is exposed, and between a first position and a target position and a first position. A work table that moves between the second position and the target position, a first support that moves on the first track and transports the glass substrate to the work table that is located at the first position, and a second track that moves on the second track. A second supporting portion that receives and carries out the glass substrate on the working table located at the second position is provided, and the first supporting portion and the second supporting portion are suction portions that suck the lower surface of the glass substrate exposed from the working table. It is prepared.

[0008]

With the above construction, even if an unexpected situation such as a power failure occurs during the transportation of the glass substrate, the lower surface of the glass substrate is held by at least one of the first support portion, the second support portion and the work table. It does not fall.

[0009]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a perspective view of a glass substrate carrying device according to a first embodiment of the present invention, FIGS. 2 (a) to 2 (c), and FIG.
(A)-(c) is a transfer operation explanatory drawing of the glass substrate conveyance apparatus in the 1st Example of this invention, FIGS. 4-11 is the glass substrate conveyance apparatus in the 1st Example of this invention. FIG.

In FIG. 1, reference numeral 9 is a base, and a first base is provided on both sides of the base.
A sub stand 10 and a second sub stand 11 are provided. 13 is horizontally supported by a column 12 which is erected on the first sub-stand 10, and Y
A U-shaped first mounting table that opens in the direction, and 15 is a second mounting table that is horizontally supported by a column 14 that is erected on the second sub-table and that has the same shape as the first mounting table 13. . 16 is a base table placed on the base 9 with the X direction as the longitudinal direction, and 18 is placed on the base table 16 so as to be movable in the X direction with the Y direction as the longitudinal direction.
The X table 20 driven by the X motor 17 provided in 6 moves in the X direction, and 20 is movably mounted on the X table 18 in the Y direction, and is moved in the Y direction by the Y motor 19 provided on the X table 18. Moving plate, 21 is moving plate 20
Is a work table that is provided in the center of the table and holds the lower surface of the glass substrate 70 (see FIG. 2) by suction. Here, the work table 21 has a built-in θ motor (not shown), and is configured so that the glass substrate D sucked and held can be rotated horizontally by 90 degrees, 180 degrees, and the orientation of the glass substrate D can be changed. In the state shown in FIG. 1, the work table 21 is located at the delivery station S1. In addition, the glass substrate D is suction-held on the work table 21, and the X motor 17, Y
When the motor 19 is driven, the glass substrate D can be moved XY on the base 9. The first mounting table 1
3. The second mounting table 15 is located on both sides of the moving area of the work table 21.

Reference numeral 22 is a column 2 which is erected on the rear portion of the base 9.
3, 24 is an under-substrate receiving rod horizontally laid horizontally with the X direction as the longitudinal direction, and the under-substrate receiving rod 22 is a glass when the TCP device P is mounted on the glass substrate D at the work station S2. Mounting part of board D (edge)
It is a member that supports the vicinity from below. It should be noted that, although it is a component other than the glass substrate transporting device, 40 is a rotating mounting head, and 41 and 42 are nozzles that are provided downward on the circumference of the mounting head 40 and that adsorb the TCP device P.

Reference numeral 25 is a linear motor provided in the front portion of the base 9 with the X direction as the moving direction, and 26 is a linear motor 25.
The first moving body 27, which is moved in the X direction by means of, is provided on the first moving body 26, and the first actuator such as an air cylinder for raising and lowering the raising and lowering rod 28 thereof. The connected first arm 30 is substantially parallel to the X direction and the opening 3 opened to the work table 21 side.
It is a first support portion having 0a and is connected to the tip end portion of the arm 29. Reference numeral 31 is a second moving body that is moved independently of the first moving body 26 by the linear motor 25, 32 is a second actuator provided on the second moving body 31, 33 is an elevating rod of the second actuator 32, and 34 is an elevating rod. It is a second arm that connects 33 and the second support portion 35. Reference numeral 35 is a second support portion that has the same shape as the first support portion 30 and that is connected to the tip end portion of the second arm 34 in a posture in which the direction in the horizontal plane differs by 180 ° from the first support portion 30. Therefore, the second support portion 3
The opening 35a of No. 5 is also open toward the work table 21 side. Further, as shown in the drawing, the lower surface of the glass substrate D is detachably attached to the upper surfaces of the first mounting table 13, the second mounting table 15, the work table 21, the first supporting portion 30, and the second supporting portion 35. The suction hole h (suction portion) is opened. Then, the first support portion 30 and the second support portion 35 have the openings 3
The work table 21 can be loosely fitted inside 0a, 35a, and the lower surface of the glass substrate D exposed from the periphery of the work table 21 can be suction-held.

Next, referring to FIG. 2, the first mounting table 13
The operation in the up-down direction from the time when the glass substrate D is supplied to the process until the glass substrate D is held on the work table 21 will be described. First, as shown in FIG. 2A, when the glass substrate D is placed on the first placing table 13, the elevating rod 28 of the first actuator 27 is retracted so that the height of the upper surface of the first supporting portion 30 is adjusted to the first level. The linear motor 25 is driven in a state in which it is lower than the first mounting table 13, and the first support portion 30 is moved to directly below the first mounting table 13 as indicated by an arrow N1. Next, FIG.
As indicated by the arrow N2 in (b), the first actuator 27
Is driven to cause the elevating rod 28 to project, thereby moving the first support portion 30 above the first mounting table 13, and the suction holes h of the first support portion 30 suction-hold the glass substrate D. Of course, at this time, the suction of the suction holes h of the first mounting table 13 is stopped. Then, the linear motor 25 is driven to bring the opening 30a of the first support portion 30 directly above the work table 21 as indicated by an arrow N3. Next, suction is started from the suction hole h of the work table 21, and the suction hole h of the first support portion 30 is started.
Stop sucking from. Then, as shown by an arrow N4 in FIG. 2C, the first actuator 27 is driven to move the lifting rod 28.
The work table 21 from the height above the work table 21
The support portion 30 is lowered to loosely fit the work table 21 inside the opening portion 30a. As a result, the lower surface of the glass substrate D exposed from the opening 30a lands on the upper surface of the work table 21, and the glass substrate D is suction-held by the work table 21. After that, the first support portion 30 is separated from the work table 21 as indicated by an arrow N5, and the next glass substrate is made to stand by until it is supplied to the first mounting table 13.

Next, referring to FIG. 3, the work table 2
The operation of holding the glass substrate D on No. 1 on the second mounting table 15 will be described. This operation is basically the same as the operation of FIG. 2 reversed. That is, when the glass substrate D is held on the work table 21, the second support portion 35 is horizontally moved at a height lower than that of the glass substrate D as shown by an arrow N6 in FIG. The work table 21 is loosely fitted to the work table 21, the suction from the suction hole h of the work table 21 is stopped, and the suction from the suction hole of the second support portion 35 is started. The second supporting portion 35 raises and holds the lower surface of the glass substrate D exposed around the work table 21. The second support portion 35 is brought right above the second mounting table 15 as shown by an arrow N8. Then, as shown by an arrow N9 in FIG. 3C, the second supporting portion 35 is lowered to place the glass substrate D on the second mounting table 1.
5 and holds the second support portion 35 as shown by an arrow N10.
Is separated from the second mounting table 15.

Next, with reference to FIGS. 4 to 11, the entire operation of the glass substrate carrying apparatus in the first embodiment will be described. Here, in FIG. 4, CO is a common reference point for the first position and the second position, and the work table 21 in FIG.
Is at the reference point CO. The center of the first mounting table 13 is the first origin C1 and the center of the second mounting table 15 is the second origin C2.
I will call it. Then, the first track of the first support part 30 is the line segment C1CO, and the second track of the second support part 35 is the line segment C2CO. Further, in this embodiment, the first trajectory and the second trajectory are on a straight line parallel to the X direction. Therefore, in the present embodiment, the first support portion 30 and the second support portion 35 can be configured to be moved on one line by the linear motor 25 serving as the common X-direction moving means, and the entire apparatus can be simplified. And it can be formed compactly.

When the glass substrate D is supplied to the first mounting table 13 as shown in FIG. 4, the lower surface of the glass substrate D is held by the first supporting portion 30 as shown in FIG. Then, by the operation described in FIG. 2, the first support portion 30 is moved to the reference point CO.
Then, the glass substrate D is delivered to the work table 21. Here, as shown in FIG. 6, the first supporting portion 30 can hold the glass substrate D evenly around the center of gravity of the glass substrate D without interfering with the work table 21.
The delivery operation can be performed accurately without causing tilting or displacement of the. Next, as shown in FIG. 7, after the glass substrate D is delivered to the work table 21, the first support portion 30 leaves the work table 21, and the X motor 17 and the Y motor 19 are driven as shown in FIG. The glass substrate D together with 21 is transferred to the work station S2 side. In this example, C3 in FIG. 8 is set as the target position. When the glass substrate D reaches the target position C3, the edge portion of the glass substrate D is received by the substrate lower receiving rod 22. Then, the mounting operation of the TCP device P on the glass substrate D is performed by the nozzle 41 shown in FIG. There may be a plurality of target positions C3.

Next, when this mounting operation is completed, the X motor 17 and the Y motor 19 are driven again as shown in FIG. 9, and the center of the work table 21 returns to the reference point CO. Further, in this example, the next glass substrate DN is supplied onto the first mounting table 13 at this point.

Next, by the operation described with reference to FIG. 3, the second support portion 35 is loosely fitted to the work table 21, and the mounted glass substrate D is held by the second support portion 35. On the other hand, the next glass substrate DN supplied on the first mounting table 13 moves in parallel with this operation by the movement of the first support portion 30,
It is held by the first support portion 30. Next, the first support portion 30 and the second support portion 35 are moved together to the right in FIG. 11, and the glass substrate D on the work table 21 is instantly replaced with the next glass substrate DN. As a result, useless operating time can be suppressed as much as possible. The mounted glass substrates D that have been moved to the second mounting table 15 are successively carried out to the next step.

Next, a second embodiment of the present invention will be described. FIG. 12 is a perspective view of a glass substrate carrying device according to the second embodiment of the present invention, and FIGS. 13 to 19 are operation explanatory views of the glass substrate carrying device according to the second embodiment of the present invention. The second embodiment is different from the first embodiment in that
Only the support part 50. That is, the second support portion 50 has a shape in which the first support portion 30 is horizontally rotated 90 degrees counterclockwise, and the opening portion 50a opened toward the work station S2.
Form a horseshoe. Here, the second supporting unit 50 moves the mounted glass substrate D from the work table 21 to the second mounting table 1
Although it is the support portion on the side of carrying out to 5, the tact time can be further shortened as compared with the first embodiment as will be described below by making such a direction.

Next, the operation of the glass substrate transporting device of the second embodiment will be described with reference to FIGS. First, FIGS. 13 to 16 show the same operations as those of FIGS. 4 to 7 of the first embodiment, and a description thereof will be omitted. Then, as shown in FIG. 17, when the glass substrate D moves to the target position C3 together with the work table 21, in the second embodiment, the second supporting portion 5 is used.
Position 0 at the reference point CO and wait for the work table 21 to return to the reference point CO. Then, when mounting of the glass substrate D is completed and the work table 21 returns to the reference point CO, the opening 50a of the second support part 50 has a shape opened toward the work station S2 as shown in FIG. Therefore, the work table 21 can enter the inside of the opening of the second support portion 50 without reaching the second support portion 50 and reaches the reference point CO. At this time, the first support portion 30 holds the next glass substrate DN as in the first embodiment. As shown in FIG. 19 below, the operation corresponding to FIG. 11 of the first embodiment is performed. That is, in the second embodiment, the retracting operation of the second support portion 50, which changes from the state of FIG. 9 of the first embodiment to the state of FIG. 10, can be omitted, and the tact time can be further shortened.

[0021]

The glass substrate carrying apparatus of the present invention holds the lower surface of the glass substrate while exposing a part of the lower surface of the glass substrate, and between the first position and the target position and between the second position and the target position. A work table that moves between positions, a first support that moves on a first track and transports a glass substrate to a work table that is located on a first position, and a second support that moves on a second track to a second position. Since the second support part that receives and carries out the glass substrate on the positioned work table is provided, and the first support part and the second support part are provided with the suction part that sucks the lower surface of the glass substrate exposed from the work table. Even if an unforeseen situation such as a power failure occurs, there is no danger of the glass substrate falling, and safe transportation can be realized.

[Brief description of drawings]

FIG. 1 is a perspective view of a glass substrate carrying device according to a first embodiment of the present invention.

FIG. 2A is a transfer operation explanatory diagram of the glass substrate transfer device according to the first embodiment of the present invention. FIG. 2B is a transfer operation explanatory diagram of the glass substrate transfer device according to the first embodiment of the present invention. (C) Explanatory drawing of the transfer operation of the glass substrate carrying apparatus in the first embodiment of the present invention

FIG. 3A is a transfer operation explanatory diagram of the glass substrate transfer device according to the first embodiment of the present invention. FIG. 3B is a transfer operation explanatory diagram of the glass substrate transfer device according to the first embodiment of the present invention. (C) Explanatory drawing of the transfer operation of the glass substrate carrying apparatus in the first embodiment of the present invention

FIG. 4 is an operation explanatory diagram of the glass substrate transport device according to the first embodiment of the present invention.

FIG. 5 is an operation explanatory view of the glass substrate carrying device according to the first embodiment of the present invention.

FIG. 6 is an operation explanatory view of the glass substrate carrying device according to the first embodiment of the present invention.

FIG. 7 is an operation explanatory view of the glass substrate carrying device according to the first embodiment of the present invention.

FIG. 8 is an operation explanatory diagram of the glass substrate transport device according to the first embodiment of the present invention.

FIG. 9 is an operation explanatory view of the glass substrate carrying device according to the first embodiment of the present invention.

FIG. 10 is an operation explanatory diagram of the glass substrate carrying device according to the first embodiment of the present invention.

FIG. 11 is an operation explanatory diagram of the glass substrate transporting device according to the first embodiment of the present invention.

FIG. 12 is a perspective view of a glass substrate carrying device according to a second embodiment of the present invention.

FIG. 13 is an operation explanatory view of the glass substrate carrying device according to the second embodiment of the present invention.

FIG. 14 is an operation explanatory view of the glass substrate carrying device according to the second embodiment of the present invention.

FIG. 15 is an operation explanatory view of the glass substrate carrying device according to the second embodiment of the present invention.

FIG. 16 is an operation explanatory diagram of the glass substrate carrying device according to the second embodiment of the present invention.

FIG. 17 is an operation explanatory view of the glass substrate carrying device according to the second embodiment of the present invention.

FIG. 18 is an operation explanatory view of the glass substrate carrying device according to the second embodiment of the present invention.

FIG. 19 is an operation explanatory diagram of the glass substrate carrying device according to the second embodiment of the present invention.

FIG. 20 is a perspective view of a conventional glass substrate carrying device.

[Explanation of symbols]

 13 1st mounting base 15 2nd mounting base 21 Work table 30 1st support part 35 2nd support part D Glass substrate CO 1st position (2nd position) C1CO 1st track C2CO 2nd track C3 Target position

Claims (3)

[Claims] 1. A work table which holds the lower surface of the glass substrate while exposing a part of the lower surface of the glass substrate and moves between the first position and the target position and between the second position and the target position. A first supporting portion that moves on a first track and transports a glass substrate to the work table that is located at the first position, and a work table that moves on a second track and is located at the second position Second to receive and carry out the glass substrate of
A glass substrate transporting device, comprising: a support portion, wherein the first support portion and the second support portion each include a suction portion that sucks a lower surface of the glass substrate exposed from the work table. 2. The glass according to claim 1, wherein the first position and the second position are the same position, and the first trajectory and the second trajectory are on the same straight line. Substrate transfer device. 3. A first mounting table on which the glass substrate is temporarily mounted is provided on the first track, and a second mounting table on which the glass substrate is temporarily mounted is provided on the second track. The glass substrate transport device according to claim 1, wherein the glass substrate transport device is a glass substrate transport device.