JP2004345744A - Pneumatic floating device and pneumatic floating type carrier - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pneumatic floating device with an inexpensive structure capable of floating a relatively large object to be floated such as a glass plate. <P>SOLUTION: A supporting plate material with many air jet holes 9 formed at prescribed intervals, having strength to support the object to be floated such as punching metal is used as an upper wall plate 2 of a box body 6 in which an air chamber 5 supplied with air is formed, and an air dispersing member 7 composed of a porous material such as a porous ceramic plate is arranged on an inner surface of the upper wall plate 2 in a side of the air chamber 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an air levitation device and an air levitation transfer device using the air levitation device.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, as a device for transferring a transferred object such as a wafer which requires a clean surface, there is a non-contact type using an air jet, that is, an air floating type.
[0003]
In this air-floating transfer device, a large number of small-diameter air ejection holes are formed at predetermined intervals on a transfer surface, and air is ejected from these air ejection holes to transfer a wafer in a floating state. (For example, see Patent Document 1).
[0004]
[Patent Document 1]
JP 2000-100896 A
[0005]
[Problems to be solved by the invention]
By the way, in recent years, flat panel displays have been increasing in size, and accordingly, glass plates or resin panels used for displays have also become larger and thinner for weight reduction. Therefore, air-floating type conveyance is desired.
[0006]
However, as described above, the conventional air-floating transfer device has a large number of small-diameter air ejection holes formed at predetermined intervals on a transfer surface.For example, in order to float a large glass plate, You need to blow out the air with considerable momentum.
[0007]
When such a device is used, for example, in a clean room, air is gustyly blown out from a large number of air blowout holes, so that there is a problem that dust is wound up. In the case of deviation, there is a problem that air escapes and the glass plate cannot be floated sufficiently.
[0008]
If the air ejection hole is made very small, that is, fine, in order to prevent air from escaping, a lot of labor and time are required for the manufacturing process, leading to an increase in manufacturing cost.
[0009]
Therefore, the present invention provides an air levitation device that can levitate a relatively large object such as a glass plate with an inexpensive configuration, and an air levitation that can reliably convey a relatively large object to be conveyed by an air levitation method. It is an object of the present invention to provide a transport device of the type.
[0010]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, an air levitation device according to claim 1 of the present invention is configured such that a large number of air ejection holes are formed at predetermined intervals as a predetermined wall member forming an air chamber to which air is supplied. An air dispersion member made of a porous material is disposed on a support plate capable of supporting an object to be levitated, and on the inner surface of the support plate on the air chamber side.
[0011]
According to a second aspect of the present invention, there is provided an air levitation device, wherein an intermediate support plate member having a large number of air ejection holes formed at predetermined intervals is arranged on the inner surface of the air dispersion member in the first aspect of the invention. In addition, the positions of the air ejection holes formed in the supporting plate and the intermediate supporting plate are shifted from each other.
[0012]
According to the configuration of each of the above air levitation devices, a supporting plate is used as a wall member on which the object to be levitated is placed, and an air dispersion member made of a porous material is arranged on the inner surface of the plate, that is, Since the member for supporting the object to be levitated and the member for ejecting air are separately provided, the object to be levitated is heavy, such as a glass plate, and in particular, a relatively large area requires flatness accuracy. However, by providing the supporting plate material with strength and accuracy, it is possible to sufficiently support the air dispersing member without worrying about the strength and accuracy of the air dispersion member, and thus obtain an inexpensive material. In addition, since the air dispersion member made of a porous material is disposed on the inner surface of the wall member, air can be jetted uniformly and little by little over the entire support surface. Therefore, for example, a glass plate floats in a clean room. In doing so, there is no need to worry about rolling up dust, and there is no need to worry about air escaping from the air ejection holes coming off the glass plate and insufficient buoyancy.
[0013]
In addition, the air levitation type transport device according to claim 3 of the present invention is configured to contact both sides of the air levitation device according to claim 1 with both side edges of the conveyed object levitated by the air levitation device. A moving device for moving in a predetermined direction is arranged.
[0014]
According to a fourth aspect of the present invention, there is provided a pneumatic levitation type conveying device, wherein one side of the air levitation device according to the first aspect is in contact with one side edge portion of the conveyed object levitated by the air levitation device. A moving device for moving in the direction is arranged, and a guiding device for guiding the other side edge of the conveyed object is arranged on the other side.
[0015]
According to a fifth aspect of the present invention, there is provided an air levitation type transport device in which the air levitation device according to the first aspect is inclined so that one side edge portion is located at a lower position, and the transported device floated by the air levitation device. A moving device is provided for moving the transferred object in a predetermined direction by contacting one side edge of the object.
[0016]
According to the configuration of each of the air levitation transfer devices described above, since a moving device that moves a conveyed object levitated by air is disposed on at least one side portion of the air levitation device, or air is disposed on one side portion. Since the moving device that moves the conveyed object floated by is arranged and the guide device that guides the conveyed object is arranged on the other side part, the conveyed object can be easily and reliably inexpensively configured. Can be transported.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an air levitation device according to an embodiment of the present invention and an air levitation transfer device using the air levitation device will be described with reference to the drawings.
[0018]
First, an air levitation device will be described. This device causes an object placed on the support surface to float in the air by ejecting air from a support surface (or a placement surface) that supports the object. It is.
[0019]
As shown in FIGS. 1 and 2, the air levitation device 1 has a rectangular shape in plan view and is disposed between the upper wall plate 2, the lower wall plate 3, and the peripheral portions of the two wall plates 2, 3. The box-shaped body 6 in which the air chamber 5 of a predetermined height is formed inside by the spacer 4 and the inner surface of the upper wall plate 2 on the air chamber 5 side (for example, attached). An air dispersing member 7 and an air supply device (not shown, for example, a blower is used) for supplying air at a predetermined pressure from an air supply port 3 a formed in the center of the lower wall plate 3. ing. The two wall plates 2 and 3 and the spacer 4 are integrated by bolts and nuts 8.
[0020]
The upper wall plate (which is a predetermined wall member, more specifically, a supporting plate material) 2 has a thickness capable of exhibiting strength capable of supporting an object to be levitated and has a small diameter [plate thickness. Air ejection holes 9 having a hole diameter of about 1/2 or more (a diameter as long as it can be press-processed, which can be manufactured at a low cost by using press processing), and a predetermined interval (for example, about 1 to 10 mm) are provided. And a metal plate formed in a staggered number with a hole diameter of about 2 to 5 times is preferable (for example, an aluminum, stainless steel, or steel punching metal is used. A synthetic resin such as polytetrafluoroethylene or polyamide (nylon) may be used.) As the air dispersion member 7, for example, a porous (porous) resin plate (porous material) having an infinite number of fine holes formed therein One In, for example, polytetrafluoroethylene, polyvinyl alcohol, etc.) are used.
[0021]
In the above configuration, if air at a predetermined pressure is supplied into the air chamber 5 from the air supply port 3a, the air passes through countless holes formed in the air dispersion member 7 and is uniformly and in a small amount from the entire surface. Each of them is jetted through the air jet holes 9 formed in the upper wall plate 2 to float a floating object placed on the upper wall plate 2, for example, a glass plate W. Of course, the floated glass plate W can be easily moved, for example, by hand or another moving device.
[0022]
In order to reduce the escape of air from the air ejection holes 9 where no floating object exists, and to allow a sufficient amount of air to be ejected also from the air discharging holes 9 located below the floating object, it is necessary to use a porous material. The larger the air resistance is, the better the air resistance is. However, if it is too high, the air pressure to be supplied becomes high, so that it cannot be increased indiscriminately. Therefore, the air resistance ΔP (the air pressure P which is ejected from the air ejection holes 9) by the air dispersion member 7 which is a porous resin plate. ₁ And the air pressure P supplied to the air chamber 5 ₀ If the upper limit is equal to or less than 10 times the contact pressure of the object to be levitated, the problem does not occur so efficiently.
[0023]
According to the configuration of the air levitation device 1, the upper wall plate 2 on which the object to be levitated is placed is formed of a large number of small-diameter holes at predetermined intervals and a metal plate having a predetermined thickness. Even if the object is relatively heavy and has a large area (large area) such as a glass plate, the object can be sufficiently supported, and thus can be supported on the supporting surface (mounting surface) supporting the floating object. Flatness can be ensured. Further, since the air dispersion member 7 made of a porous material is disposed on the inner surface of the upper wall plate 2, air can be blown out uniformly and little by little over the entire upper wall plate 2, and therefore, in a clean room. When floating the glass plate, unlike the related art, there is no need to worry about rolling up dust, and there is no need to worry that air escapes from the air ejection holes 9 separated from the object to be floated and the levitation force is insufficient. In addition, since a porous material is used as the air dispersion member 7, an inexpensive member can be obtained as compared with a member that is fine and has many holes.
[0024]
Furthermore, since the air dispersion member 7 does not directly support the floating object, even when a porous resin plate is used, it is not necessary to maintain the flatness of the surface with high accuracy, and the strength is not so high. Since it is not required, furthermore, not narrow ones but narrow ones can be used side by side, so that it can be manufactured easily at low cost.
[0025]
Although a resin plate material has been described as the air dispersion member 7, for example, a ceramic, glass, or metal porous material may be used. In addition, a fiber material (for example, cloth or Paper).
[0026]
By the way, in the above-described embodiment, the box-shaped body in which the spacer is interposed between the upper wall body and the lower wall body has been described. However, for example, a flange portion corresponding to the spacer is integrally formed around the upper wall body. May be formed (projected).
[0027]
Further, in the above-described embodiment, the case where the air dispersion member is disposed on the inner surface of the upper wall body has been described. However, for example, as shown in FIGS. The same material as the upper wall 2, that is, a metal intermediate supporting plate 11 in which a large number of small-diameter air ejection holes 10 are formed in a staggered manner at predetermined intervals may be arranged on the surface.
[0028]
However, in this case, the position of the air ejection hole 9 formed in the upper wall plate 2 and the position of the air ejection hole 10 formed in the intermediate support plate 11 side are shifted from each other.
When the positions of the two air ejection holes 9 and 10 are shifted from each other in this way, the path of the air passing therethrough becomes longer as shown by the arrow in FIG. The amount of air that escapes is reduced.
[0029]
Next, an air levitation transfer device using the above air levitation device will be described.
First, an air levitation transfer device according to the first embodiment will be described with reference to FIGS.
[0030]
This air levitation type transport device is for transporting an object to be transported along a predetermined transport path in a state of being floated by air, and the above-described air levitation device is used.
That is, as shown in FIGS. 5 and 6, the air-floating transfer device 21 includes a plurality of box-shaped members 22 each having a plurality of air ejection holes formed on an upper surface and an air chamber provided therein. An air supply device (not shown, for example, a blower is used) for supplying air to each of the box-shaped bodies 22 through an air supply duct 23, and a total of six box-shaped bodies, for example, three in two rows And a moving device 24 arranged on both sides of the transport path formed at 22 for moving the transported object W.
[0031]
Needless to say, the box-shaped body 22 has the same configuration as that described in the above-mentioned air levitation device. Specifically, the upper wall plate (upper surface) 31 has many air ejection holes 32. An air distribution member (not shown) is disposed on the inner surface of the upper wall plate 31 while being formed therein. Note that the box-shaped members according to the second and subsequent embodiments described below have the same configuration, and thus the description thereof will be omitted.
[0032]
In addition, the moving devices 24 are arranged in two rows to form a transport path. It is constituted by a roller 33. Of course, as the transport roller 33, a rotary drive type (for example, driven by an electric motor) is used, but it may be a freely rotatable roller (in this case, it is manually moved). Can be done).
[0033]
In the above-described configuration, when a conveyed object (for example, a glass plate, which is also described as a glass plate in the following second and subsequent embodiments) W is transported, the air in each box-shaped body 22 is conveyed. The glass plate W is supported by the transport rollers 33 on both sides in a state where air is supplied into the room and the glass plate W is floated on the box-shaped body 22. The glass plate W which needs to maintain the degree and is relatively heavy can be easily and reliably moved, that is, conveyed.
[0034]
Although a glass plate has been described as an object to be conveyed, the air levitation type conveyance device according to the present embodiment conveys an object that is heavy and needs to maintain flatness, such as a glass plate. This is, of course, appropriate.
[0035]
Next, an air-floating transfer device according to a second embodiment will be described with reference to FIGS.
This air levitation type transport device is for transporting an object to be transported in a predetermined direction in a state where it is levitated by air, similarly to the first embodiment. Can be
[0036]
Briefly, in the first embodiment, the movement is provided on both sides of the transfer path formed of six (2 rows × 3) box-shaped members and supports and moves the transferred object. Although a transport roller is used as an apparatus, a belt is used in the second embodiment.
[0037]
That is, as shown in FIGS. 7 and 8, in the air-floating transfer device 41, a predetermined interval is provided on each side (on both sides) of the transfer path formed by the box-shaped body 22 and along the transfer path. A moving device comprising a plurality of belt driving rollers (e.g., driven by an electric motor) 42 disposed at every other end, and a transport belt 43 wound endlessly around the driving rollers 42 on each side. 44 are provided. Further, an upwardly folded portion (transfer surface side) is provided at the outer edge of the transport belt 43 to prevent the transported object from being distorted in the horizontal plane (displaced direction). are doing. It is not necessary to drive all of the driving rollers 42.
[0038]
Also in this case, similarly to the first embodiment, in a state where the glass plate W as the object to be conveyed is levitated by the air jetted from the box-shaped body 22, the driving roller 42 rotates to move the glass plate W to the conveyance path. The glass plate W, which needs to maintain flatness over a large area and is relatively heavy, can be transported (moved) easily and reliably. In particular, since the sheet is conveyed while being supported on both sides by the conveyance belt 43, the conveyance operation is performed more reliably.
[0039]
Next, an air levitation transfer device according to a third embodiment will be described with reference to FIGS.
This air levitation type transport device is for transporting an object to be transported in a predetermined direction in a state of being floated by air, similarly to the above-described embodiments, and the above-described air levitation device is also used.
[0040]
Briefly, in the second embodiment, the moving device for moving the object to be transferred is disposed on both sides of the transfer path formed by the six box-shaped members. However, the third embodiment is different from the third embodiment. In this configuration, a moving device is disposed on one side of a transport path, and a guide device for guiding an object to be transported is disposed on the other side.
[0041]
That is, as shown in FIGS. 9 and 10, in the air-floating transfer device 51, a pair of transfer members formed at one side of the transfer path formed by the box-shaped body 22 and at the front and rear ends of the transfer path. And a transfer device 54 including a transfer belt 53 wound around the drive roller 52 endlessly, and the other side of the transfer path along the transfer path. And a guide device 56 including a plurality of guide rollers 55 supported so as to freely rotate around a vertical axis at predetermined intervals. The driving roller 52 only needs to be at least one of which is driven to rotate by an electric motor or the like.
[0042]
Further, the transport belt 53 is disposed on the surface of the box-shaped body 22. For this reason, the upper wall plate 31 of the box-shaped body 22 is formed with a concave portion 31a correspondingly. A folded portion 53a is provided on the outer edge of the belt 53 for upward (transfer surface side) to prevent the transported object from being distorted (displaced) in a horizontal plane.
[0043]
Also in this case, similarly to the first embodiment, the glass plate W, which is the object to be conveyed, is floated by the air jetted from the box-shaped body 22, and one edge of the glass plate W is guided. Since the glass sheet W is conveyed by moving the other edge portion by the conveying belt 53 while being guided by the rollers 55, it is necessary to maintain flatness over a wide area, and It is possible to easily and reliably convey (move) a glass plate W having a substantial weight. In particular, since the other side edge is supported by the transport belt 53 and one side edge is guided and transported by the guide roller 55, the transport operation is performed more reliably.
[0044]
Next, an air-floating-type conveying device according to a fourth embodiment will be described with reference to FIGS.
This air levitation type transport device is for transporting an object to be transported in a predetermined direction in a state of being floated by air, similarly to the above-described embodiments, and the above-described air levitation device is also used.
[0045]
In the fourth embodiment as well, as shown in the third embodiment, basically, the moving device is arranged on one side of the transport path formed of the box-shaped body, and Although a guide device for guiding a conveyed object is disposed laterally, both the moving device and the guide device use rollers.
[0046]
That is, as shown in FIGS. 11 and 12, in the air-floating-type transfer device 61, the air-floating transfer device 61 is arranged on one side of the transfer path formed by the box-shaped body 22 and at predetermined intervals along the transfer path. A moving device 63 composed of a plurality of moving rollers 62 driven to rotate (for example, driven by an electric motor) around a vertical axis is provided on the other side of the conveying path. An elongate mounting plate 64 disposed along the path, a plurality of guide rollers 65 provided on the mounting plate 64 at predetermined intervals and rotatably about a vertical axis; A guide device 67 including an urging member, for example, a spring body 66, for urging the guide roller 65 against the edge of the conveyed object by urging the guide roller 65 against the conveyed object is provided.
[0047]
Also in this case, similarly to the third embodiment, the glass plate W, which is the object to be conveyed, is floated by the air ejected from the box-shaped body 22, and the glass plate W is guided by the guide rollers 65. Since the glass plate W is conveyed by the rotational driving force of the moving roller 62 by pressing against the moving roller 62, it is necessary to maintain the flatness over a wide area and the relatively heavy glass is required. The plate W can be transported (moved) easily and reliably.
[0048]
Next, an air-floating transfer device according to a fifth embodiment will be described with reference to FIGS.
This air levitation type transport device is for transporting an object to be transported in a predetermined direction in a state of being floated by air, similarly to the above-described embodiments, and the above-described air levitation device is also used.
[0049]
Briefly, in the fourth embodiment, the guide roller is used as the guide device arranged on the other side of the transport path formed by the box-shaped body. In the embodiment, the side edge of the transported object is guided by air.
[0050]
That is, as shown in FIGS. 13 and 14, in the air-floating-type transfer device 71, the air-floating transfer device 71 is disposed at one side of the transfer path formed by the box-shaped body 22 and at predetermined intervals along the transfer path. A moving device 73 including a plurality of moving rollers 72 that are rotationally driven (e.g., driven by an electric motor) around a vertical axis is provided at the other side of the transport path and in the box-shaped body 22. At the corresponding position, a pneumatic guide device 74 that supports and guides the edge of the glass plate W, which is the object to be transferred, with air is provided.
[0051]
As shown in FIG. 15, the guide device 74 has a concave portion 77a formed so as to wrap the edge of the glass plate W from three sides, and a large number of air ejection holes 75 are formed on the surface of the concave portion 77a. A side air ejection box 77 having an air chamber 76 provided therein, and an air dispersion member (air) disposed (attached) to the inner surface of the concave portion 77a corresponding to the air ejection hole 75 on the air chamber 76 side. The same device as that described in the levitation device is used) 78, and an air supply device (not shown, for example, a blower is used) for supplying air to the side air ejection box 77.
[0052]
To make sure, an air ejection hole 75 for pressing the glass plate W guided by the concave portion 77a against the moving roller 72 is also formed on the innermost end surface of the concave portion 77a. ing.
[0053]
Also in this case, similarly to the fourth embodiment, the glass plate W, which is the object to be conveyed, is floated by the air jetted from the box-shaped body 22, and is jetted from the side air jet box 77. Since the glass plate W is pressed against the moving roller 72 by the air and the glass plate W is conveyed by the rotational driving force of the moving roller 72, it is necessary to maintain the flatness over a wide area. In addition, the relatively heavy glass plate W can be easily (reliably) transported (moved).
[0054]
Next, an air levitation transfer device according to a sixth embodiment will be described with reference to FIGS.
This air levitation type transport device is for transporting an object to be transported in a predetermined direction in a state of being floated by air, similarly to the above-described embodiments, and the above-described air levitation device is also used.
[0055]
In brief, in the fourth and fifth embodiments, a moving device for moving an object to be conveyed is arranged on one side of a conveying path formed by a box-shaped body, and the other side is moved. In the sixth embodiment, the guide device is omitted in order to urge the transferred object toward the moving device.
[0056]
That is, as shown in FIGS. 16 and 17, in the air-floating-type transfer device 81, the surfaces of a plurality of (2 rows × 3) box-shaped members 22 forming the transfer path are made to be on the same horizontal plane. Instead of being arranged straight, it is inclined at a predetermined angle θ with respect to the horizontal plane so that one side is lower than the other side in the width direction of the transport path, and the inclined one side , A moving device 83 including a plurality of moving rollers 82 arranged at predetermined intervals along the transport path and driven to rotate (for example, driven by an electric motor) around a vertical axis. Things.
[0057]
In this case as well, the glass plate W, which is the object to be conveyed, is floated in a state of being inclined in the width direction by the air jetted from the box-shaped body 22, and the inclined edge is supported by the moving roller 82. Since the glass plate W is guided and conveyed by the rotational driving force of the moving roller 82, it is necessary to maintain the flatness over a wide area and the glass plate W having a relatively heavy weight can be easily formed. It can be transported (moved) quickly and reliably. In particular, when the glass sheet W is transported, the roller group provided on the transport path may be installed on one side, which is economical.
[0058]
In the air-floating transfer device described in the third to fifth embodiments, a moving device for moving a glass plate as an object to be transferred, and a guiding device when the glass plate is pressed against the moving device side. However, the guide device can be considered as a part of the moving device. In this case, for example, the moving device includes a moving roller (or a transport belt) and a guiding roller (or an air ejection box). The device is provided.
[0059]
By the way, in the air levitation device and the air levitation type transport device according to each of the above-described embodiments, it has been described that air is ejected from the surface to float the floating object, or to transport the floating object by floating. Conversely, by arranging the air ejection holes on the lower surface of the box-shaped body, the device itself can be floated on the floor surface, for example, or can be floated and moved.
[0060]
Furthermore, in the air levitation device and the air levitation type transport device according to each of the above-described embodiments, the description has been made such that the levitation object or the convergence object is levitated using air. Alternatively, a fluid such as water can be used.
[0061]
【The invention's effect】
As described above, according to the configuration of the air levitation apparatus of the present invention, a supporting plate is used as a wall member on which an object to be levitated is placed, and an air dispersion member made of a porous material is arranged on the inner surface of the plate. That is, since the member for supporting the object to be levitated and the member for ejecting the air are separately provided, the object to be levitated requires a relatively large area such as a glass plate to have planar accuracy. Also, by giving the strength and precision to the supporting plate, it is possible to sufficiently support the air dispersion member without worrying about the strength and precision of the air dispersion member, and therefore, the support surface (the mounting surface) for supporting the floating object Flatness can be ensured. In addition, since the air dispersion member made of a porous material is disposed on the inner surface of the wall member, air can be jetted uniformly and little by little over the entire support surface. Therefore, for example, a glass plate floats in a clean room. In this case, there is no need to worry about rolling up dust as in the related art, and there is no need to worry about the escape of air from the air ejection holes separated from the glass plate and insufficient floating force. Further, since the air dispersion member does not directly support the floating object, for example, even when a porous ceramic plate is used, it is not necessary to maintain the flatness of the surface with high accuracy, and the strength is not so high. Since they are not required, they can therefore be manufactured cheaply and easily.
[0062]
Furthermore, according to the configuration of each of the air levitation transporting devices of the present invention, a moving device that moves an object levitated by air is disposed on at least one side of the air levitation device, or A moving device that moves the conveyed object levitated by air is arranged in the section, and a guide device that guides the conveyed object is arranged on the other side part, so that the conveyed object can be easily arranged while having an inexpensive configuration. And it can be conveyed reliably.
[Brief description of the drawings]
FIG. 1 is a plan view showing a schematic configuration of an air levitation device according to an embodiment of the present invention.
FIG. 2 is a sectional view showing a schematic configuration of the air levitation device.
FIG. 3 is a sectional view showing a schematic configuration of a modification of the air levitation device.
FIG. 4 is an enlarged view of a main part of FIG. 3;
FIG. 5 is a plan view showing a schematic configuration of the air-floating transfer device according to the first embodiment of the present invention.
6 is a view taken in the direction of arrows BB in FIG. 5;
FIG. 7 is a plan view showing a schematic configuration of an air-floating transfer device according to a second embodiment of the present invention.
8 is a view as viewed in the direction of arrows CC in FIG. 7;
FIG. 9 is a plan view showing a schematic configuration of an air-floating transfer device according to a third embodiment of the present invention.
FIG. 10 is a sectional view taken along line DD of FIG. 9;
FIG. 11 is a plan view showing a schematic configuration of an air-floating transfer device according to a fourth embodiment of the present invention.
12 is a partially omitted view taken along the line EE of FIG. 11;
FIG. 13 is a plan view illustrating a schematic configuration of an air-floating transfer device according to a fifth embodiment of the present invention.
FIG. 14 is a view as viewed in the direction of arrows FF in FIG. 13;
FIG. 15 is an enlarged view of a portion G in FIG. 14;
FIG. 16 is a plan view showing a schematic configuration of an air-floating transfer device according to a sixth embodiment of the present invention.
FIG. 17 is a view as viewed in the direction of arrows HH in FIG. 16;
[Explanation of symbols]
1 Air levitation device
2 Upper wall board
3 Lower wall board
3a Air supply port
5 air chamber
6 box
7 Air dispersion member
9 Air outlet
10 Air outlet
11 Intermediate support plate
21 Air-floating transfer device
22 Box-shaped body
23 Air supply duct
24 moving equipment
31 Upper wall board
32 air outlet
33 Transport rollers
34 Drive rollers
35 Conveyor belt
41 Air-floating transfer device
42 Drive rollers
43 Conveyor belt
44 Moving device
51 Air-floating transfer device
52 Drive roller
53 Conveyor belt
54 Moving device
55 Guide Roller
56 Guide device
61 Air-floating transfer device
62 Moving roller
63 Moving device
65 Guide roller
66 Spring body
67 Guidance device
71 Air-floating transfer device
72 Moving roller
73 Moving device
74 Guide device
75 Air outlet
76 air chamber
77 Side air ejection box
78 Air dispersion member
81 Air-floating transfer device
82 Moving roller
83 Moving device

Claims (5)

As a predetermined wall member forming an air chamber to which air is supplied, a support plate material having a large number of air ejection holes formed at predetermined intervals and capable of supporting a floating object is used, and the air chamber of the support plate material is used. An air levitation device characterized in that an air dispersion member made of a porous material is disposed on the inner surface on the side. On the inner surface of the air dispersion member on the side of the air chamber, there are arranged intermediate support plate members in which a large number of air ejection holes are formed at predetermined intervals, and air ejection holes formed in the support plate members and the intermediate support plate members. The air levitation apparatus according to claim 1, wherein the positions of the air levitation are shifted from each other. 2. An air levitation device, wherein a moving device is provided on both sides of the air levitation device according to claim 1, which moves in a predetermined direction by contacting both side edges of the conveyed object levitated by the air levitation device. Type transfer device. A moving device that contacts one side edge of a conveyed object levitated by the air levitating device and moves in a predetermined direction on one side of the air levitating device according to claim 1, and the other side. An air-floating type conveying device, wherein a guide device for guiding the other side edge of the conveyed object is arranged on the conveying device. The air levitation device according to claim 1, wherein the air levitation device is inclined so that one side edge is at a lower position, and the conveyance object is brought into contact with one side edge of the object floated by the air levitation device. An air-floating transfer device, comprising a moving device for moving the device in a predetermined direction.

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