JP5200868B2 - Levitation transfer device - Google Patents

Description

  The present invention relates to a levitating and conveying apparatus that conveys a substrate such as a glass substrate in a levitated state.

  2. Description of the Related Art In recent years, various developments have been made on levitation conveyance apparatuses in the field of clean conveyance. Patent Documents 1 and 2 disclose prior art levitation conveyance apparatuses that take into consideration the cleanliness of the surface of a substrate. And the structure of the levitating conveyance apparatus based on a prior art is as follows.

  That is, the levitation transport device according to the prior art is provided with a device frame extending in the transport direction as a base, and the transport region of the device frame uses the pressure of compressed air (air) as a levitation gas. A plurality of levitating units for levitating the substrate are provided at intervals in the transport direction. Further, the interior of each floating unit is connected to a compressed air supply source (an example of a floating gas supply source) such as a fan, and a nozzle for ejecting compressed air is formed on the top surface of each floating unit.

  On both sides of the transport area in the apparatus frame, a plurality of transport rollers that directly support the back surface of the substrate are provided at intervals in the transport direction, and each transport roller has an axis that is parallel to the transport width direction. It can be rotated around. A transport motor that rotates a plurality of transport rollers around an axis parallel to the transport width direction is provided at an appropriate position of the apparatus frame.

Therefore, the compressed air is ejected from the nozzles of each floating unit by appropriately operating the air supply source and supplying the compressed air to the inside of each floating unit. Further, the plurality of transport rollers are rotated around the axis parallel to the transport width direction by driving the transport motor. As a result, the substrate supplied to the levitation conveyance device can be conveyed in the conveyance direction in a state where the substrate is levitated.
JP 2006-182563 A JP 2005-154040 A

  By the way, in order to avoid the interference between the substrate and the levitation unit during the conveyance of the substrate, it is necessary to increase the pressure of the compressed air ejected from the nozzle of the levitation unit to improve the levitation performance of the levitation unit. On the other hand, if the pressure of the compressed air ejected from the nozzle of the levitation unit is increased, the contact pressure (frictional force) between the transport roller and the substrate cannot be sufficiently secured, and the amount of slippage of the substrate with respect to the transport roller increases. The substrate transfer efficiency by the levitation transfer device is reduced. That is, there is a problem that it is difficult to increase the substrate transfer efficiency by the levitation transfer apparatus while avoiding the interference between the substrate and the levitation unit during the substrate transfer.

  As shown in Patent Document 2, even when a suction hole capable of sucking a substrate is formed in the upper surface of the floating unit in the vicinity of the transport roller, the suction force of the suction hole is canceled by the lift force of the floating unit, and the transport is performed. The contact pressure between the roller and the substrate cannot be secured sufficiently, and the above-mentioned problem still remains.

  Accordingly, an object of the present invention is to provide a levitating conveyance device and a conveyance roller having a novel configuration that can solve the above-described problems.

The present invention is characterized in that, in a levitation transport apparatus that transports a substrate in the transport direction in a state of being floated, a nozzle that is disposed along the transport direction in the transport region of the apparatus frame and that jets levitation gas is formed on the upper surface. , A plurality of levitation units for levitating the substrate using the pressure of the levitation gas, and rotatable about an axis parallel to the conveyance width direction at intervals along the conveyance direction in the conveyance area of the apparatus frame A plurality of transport rollers that are provided in a plurality of rows in the transport width direction and support the back surface of the substrate directly or indirectly, and a plurality of transport rollers that are parallel to the transport width direction. and conveying the actuator rotated about mind, the transport rollers in adjacent relation to the conveying direction while sandwiching from both sides of the conveyance width direction, the conveyance to be adjacent to the transport direction So as to close both sides of the lower and the conveying width direction between over La, negative pressure space to the cross-sectional shape exhibits a U-shape, thereby generating a negative pressure between the conveying rollers to be adjacent to the transport direction And a suction pipe that communicates with the negative pressure space and is connected to an air suction source.

  In the claims and specification of the present application, “provided” means not only directly provided but also indirectly provided via an interposed member such as a bracket. Similarly, “arranged” means not only directly disposed but also indirectly disposed via an interposed member such as a bracket. In addition, “floating gas” means compressed air (air), argon gas, nitrogen gas, etc., and “transport width direction” refers to a direction orthogonal to the transport direction.

  According to the characteristics of the present invention, the floating gas is supplied to the inside of each floating unit, and the floating gas is ejected from the nozzle of each floating unit. In addition, a negative pressure is generated in the negative pressure space by the operation of the air suction source, and the plurality of transport rollers are parallel to the transport width direction by driving the transport actuator while sucking the substrate toward the transport rollers. Rotate around the center axis. Accordingly, the substrate supplied to the levitating and conveying apparatus can be conveyed in the conveying direction in a state where the substrate is levitated.

  The wall member divides the negative pressure space between the conveyance rollers adjacent to each other in the conveyance direction, and the suction pipe communicates with the negative pressure space. Even if the floating gas pressure is increased to improve the floating performance of the floating unit, the suction force of the negative pressure space is canceled by the floating force of the floating unit or diffused (dispersed) in the circumferential direction of the transport roller The contact pressure (frictional force) between the transport roller and the substrate can be sufficiently ensured.

  According to the present invention, even if the pressure of the floating gas ejected from the nozzle of the floating unit is increased to improve the floating performance of the floating unit, the contact pressure between the transport roller and the substrate can be sufficiently ensured. Therefore, the substrate transfer efficiency by the levitation transfer apparatus can be sufficiently increased while avoiding interference between the substrate and the levitation unit during substrate transfer.

  An embodiment of the present invention will be described with reference to FIGS. Here, FIG. 1 is a perspective view showing the peripheral structure of the transport roller according to the embodiment of the present invention, FIG. 2 is a cross-sectional view showing the peripheral structure of the transport roller of the embodiment of the present invention, and FIG. FIG. 4 is a view taken along the line IV-IV in FIG. 3, FIG. 5 is a view showing the arrow V in FIG. 3, and FIG. FIG. 4 is a view taken along line IV-IV in FIG. 3. In the drawings, “FF” indicates the forward direction, “FR” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  As shown in FIGS. 3 to 6, the levitating / conveying apparatus 1 according to the embodiment of the present invention moves in the conveying direction (front-rear direction (forward or backward)) with a substrate W such as a glass substrate floating. An apparatus for transporting the apparatus includes an apparatus frame (support frame) 3 extending in the front-rear direction. The apparatus frame 3 includes a support base 5 extending in the front-rear direction, a plurality of support columns 7 integrally provided on the lower side of the support table 5, and a plurality of support frames 7 connected to the plurality of support columns 7. The reinforcing member 9 is provided.

  A plurality of chambers 11 extending in the left-right direction (conveyance width direction) and containing compressed air (air) as a floating gas are provided in the conveyance area A of the support base 5 at intervals in the front-rear direction. In addition, a plurality of introduction holes 13 through which compressed air (air) as a floating gas can be introduced are formed through the lower surface of each chamber 11, and a plurality of communication holes 15 are formed on the upper surface of each chamber 11. Is formed through. Furthermore, a fan (an example of a floating gas supply source) 17 that supplies air to the inside of the chamber 11 is provided via a bracket 19 at the peripheral portion of each introduction hole 13 in each chamber 11. An opening 21 extending in the left-right direction and opened to the floor B side is formed between the chambers 11 adjacent to each other in the front-rear direction.

  A hollow levitation unit 23 that levitates the substrate W using the pressure of compressed air is provided at the peripheral edge of each communication hole 15 in each chamber 11, in other words, the transport area A of the support base 5. A plurality of floating units 23 are provided along the front-rear direction and the left-right direction via the plurality of chambers 11. Further, the side view shape and the front view shape of each levitation unit 23 are each T-shaped, and the inside of each levitation unit 23 is connected to the fan 17 via the chamber 11. Further, a frame-like nozzle 25 for ejecting compressed air is formed through the top surface of each levitation unit 23, and each nozzle 25 is arranged in the vertical direction as shown in JP-A-2006-182563. On the other hand, it is configured to incline toward the unit center side (center side of the floating unit 23). Instead of the frame-like nozzle 25 penetratingly formed on the upper surface of each floating unit 23, a plurality of round nozzles may be formed penetrating.

  As shown in FIGS. 3 and 5, roller support members 27 extending in the transport direction are provided on both the left and right sides (both sides in the transport width direction) of the transport area A in the support base 5. The member 27 is provided with a plurality of transport rollers 29 that directly support the back surface of the substrate W at intervals along the front-rear direction. In other words, a plurality of transport rollers 29 are provided on the left and right sides of the transport area A on the support base 5 with a distance along the front-rear direction via a pair of roller support members 27 and the like. Each transport roller 29 can rotate around an axis parallel to the transport width direction via a bearing 31. The transport roller 29 may support the back surface of the substrate W indirectly via an elastic body such as an O-ring instead of directly supporting the back surface of the substrate W.

  A pair of transport motors 33 (an example of a transport actuator) that rotate a plurality of transport rollers 29 around an axis parallel to the transport width direction are provided on the front left portion and the front right portion of the support base 5. A drive shaft 35 extending in the front-rear direction is rotatably provided in the vicinity of each roller support member 27 in the support base 5 via a bearing or the like. Linked to the output shaft. Further, each drive shaft 35 is provided with a plurality of worms 37 at intervals in the front-rear direction, and a worm wheel 39 meshed with the corresponding worm 37 is integrally formed on the roller shaft of each transport roller 29. Is provided.

  As shown in FIG. 1 and FIG. 2, each roller support member 27 is provided with a plurality of substantially U-shaped wall members 41 at intervals in the front-rear direction via brackets 43. Defines a negative pressure space S in order to generate a negative pressure between the conveying rollers 29 adjacent to each other in the conveying direction. Further, a pair of endless winding ropes 45 are wound between the conveyance rollers 29 adjacent to each other in the conveyance direction, and the pair of winding ropes 45 are divided according to the roller width of the conveyance rollers 29. Only in the conveyance width direction (in other words, in the roller width direction of the conveyance roller 29). The winding rope 45 may protrude radially outward with respect to the circumferential surface of the transport roller 29. In this case, the transport roller 29 passes the back surface of the substrate W through the winding rope 45. Indirect support. In addition, the height position of the upper edge of each wall member 41 does not create a gap with the winding rope 45, and is therefore the same as or slightly lower than the support height position of the substrate W by the transport roller 29. .

  A suction pipe (suction port) 47 is provided at an appropriate position on the lower surface of each wall member 41 (in other words, an appropriate position between the floating units 23 adjacent to each other in the transport direction). Each suction pipe 47 communicates with the negative pressure space S and is connected via a pipe 51 to a common air suction source 49 such as a vacuum pump or an ejector that sucks air.

  Then, the effect | action and effect of embodiment of this invention are demonstrated.

  Each fan 17 is operated appropriately, and compressed air is supplied from the nozzle 25 of each floating unit 23 by supplying compressed air to the inside of each floating unit 23 through the chamber 11. In addition, the air suction source 49 is appropriately operated to generate a negative pressure in the negative pressure space S, and the plurality of transport rollers 29 are driven by driving the pair of transport motors 33 while sucking the substrate W toward the transport rollers 29. Is rotated around an axis parallel to the conveyance width direction. As a result, the substrate W supplied to the levitation transport apparatus 1 can be transported in the transport direction in a state of being levitated.

  In the embodiment of the present invention, the negative pressure space S is partitioned between the transport rollers 29 adjacent to each other in the transport direction by the wall member 41, and the suction pipe communicates with the negative pressure space S. Even if the pressure of the compressed air ejected from the nozzle 25 of the levitation unit 23 is increased and the levitation performance of the levitation unit 23 is increased, the suction force of the negative pressure space S is canceled by the levitation force of the levitation unit 23 or conveyed. The contact pressure between the transport roller 29 and the substrate W (where the area corresponding to the gap between the transport rollers 29 adjacent in the transport direction does not diffuse (disperse) in the circumferential direction of the roller 29 is defined as a negative pressure area). (Friction force) can be sufficiently secured.

  Therefore, according to the embodiment of the present invention, even if the pressure of the compressed air ejected from the nozzle 25 of the levitation unit 23 is increased and the levitation performance of the levitation unit 23 is increased, the contact pressure between the transport roller 29 and the substrate W is increased. Since it can be ensured sufficiently, it is possible to sufficiently increase the efficiency of transport of the substrate W by the levitation transport apparatus 1 while avoiding interference between the substrate W and the levitation unit 23 and the like during transport of the substrate W.

(Modification)
The modification of embodiment of this invention is demonstrated with reference to FIG.6 and FIG.7. Here, FIG. 7 is a perspective view showing the peripheral structure of the transport roller according to the modification of the embodiment of the present invention, and FIG. 8 is a cross-sectional view showing the peripheral structure of the transport roller according to the modification of the embodiment of the present invention. FIG.

  As described above, instead of winding a pair of endless winding ropes 45 between the conveyance rollers 29 adjacent to each other in the conveyance direction, as shown in FIGS. An endless winding belt 53 may be wound around a certain conveying roller 29, and a plurality of belt holes 55 may be formed through the circumferential surface of each winding belt 53 at intervals.

  And also in the modified example of embodiment of this invention, there exists the same effect | action and effect as above-mentioned embodiment of this invention.

  In addition, this invention is not restricted to description of the above-mentioned embodiment, In addition, it can implement in a various aspect. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

It is a perspective view which shows the periphery structure of the conveyance roller which concerns on embodiment of this invention. It is sectional drawing which shows the periphery structure of the conveyance roller of embodiment of this invention. It is a partial top view of the levitation conveyance apparatus concerning a 1st embodiment of the present invention. FIG. 4 is a view taken along line IV-IV in FIG. 3. It is a figure which shows the arrow view part V in FIG. FIG. 4 is a view taken along line VI-VI in FIG. 3. It is a perspective view which shows the periphery structure of the conveyance roller which concerns on the modification of embodiment of this invention. It is sectional drawing which shows the periphery structure of the conveyance roller which concerns on the modification of embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Levitation conveyance apparatus 3 Apparatus frame 17 Fan 23 Levitation unit 25 Nozzle 29 Conveyance roller 33 Conveyance motor 41 Wall member 45 Winding rope 47 Suction pipe 49 Air suction source 53 Winding belt 55 Belt hole

Claims (4)

In the levitation transport device that transports the substrate in the transport direction with the substrate levitated,
A plurality of levitation units that are arranged in the conveyance region of the apparatus frame along the conveyance direction, and a nozzle that ejects levitation gas is formed on the upper surface, and the substrate is levitated using the pressure of the levitation gas;
The apparatus frame is provided with a plurality of rows in the transport width direction in the transport area in the transport width direction, spaced apart from each other along the transport direction and rotatable about an axis parallel to the transport width direction. A plurality of conveying rollers that directly or indirectly support the back surface of
A transport actuator that rotates a plurality of the transport rollers around an axis parallel to the transport width direction;
In a state where the conveyance rollers adjacent to each other in the conveyance direction are sandwiched from both sides in the conveyance width direction, the lower side and the both sides in the conveyance width direction between the conveyance rollers adjacent to each other in the conveyance direction are blocked. A wall member that has a U-shaped cross-sectional shape and partitions a negative pressure space together with the transport roller for generating a negative pressure between the transport rollers adjacent to each other in the transport direction;
A levitation conveyance apparatus comprising: a suction pipe communicating with the negative pressure space and connected to an air suction source.   The levitation conveyance apparatus according to claim 1, wherein the height position of the upper edge of the wall member is the same as or slightly lower than the height position of the substrate supported by the conveyance roller.   2. An endless pair of winding ropes wound around the transport rollers adjacent to each other in the transport width direction and separated by a width corresponding to the roller width of the transport rollers. Or the levitating conveyance apparatus of Claim 2.   An endless winding belt wound around the transporting rollers adjacent to each other in the transporting width direction, and having a plurality of belt holes formed in the peripheral surface thereof at intervals along the circumferential direction. The levitation conveyance apparatus according to claim 1 or 2, wherein

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