WO2011148548A1 - Apparatus for transferring flat board - Google Patents

Apparatus for transferring flat board Download PDF

Info

Publication number
WO2011148548A1
WO2011148548A1 PCT/JP2011/001445 JP2011001445W WO2011148548A1 WO 2011148548 A1 WO2011148548 A1 WO 2011148548A1 JP 2011001445 W JP2011001445 W JP 2011001445W WO 2011148548 A1 WO2011148548 A1 WO 2011148548A1
Authority
WO
WIPO (PCT)
Prior art keywords
flat plate
air
production line
glass substrate
conveying apparatus
Prior art date
Application number
PCT/JP2011/001445
Other languages
French (fr)
Japanese (ja)
Inventor
神徳千幸
Original Assignee
シャープ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Publication of WO2011148548A1 publication Critical patent/WO2011148548A1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a flat plate transport device that transports a flat plate such as a glass substrate used for a liquid crystal display to a work position on a production line, and particularly relates to dust generation countermeasures.
  • Patent Document 1 the glass substrate is supported while being floated from below by an air flow so that the glass substrate does not hang down due to its own weight in the conveyance process, and both edges in the width direction are contact-supported and conveyed by a roller conveyor.
  • a flat plate conveying device is disclosed.
  • Patent Document 2 discloses a flat plate transport device that transports a glass substrate while floating and supporting it from below by an air flow.
  • Japanese Patent Laying-Open No. 2005-154040 paragraph 0016, FIG. 3
  • Japanese Patent Laying-Open No. 2005-206304 paragraph 0024, paragraph 0028, FIG. 2
  • the present invention has been made in view of the above points, and an object of the present invention is to efficiently prevent contamination in the process of transporting a flat plate such as a glass substrate.
  • the present invention is characterized in that dust is prevented from adhering to the flat plate by using the floating support by the air flow as described in Patent Documents 1 and 2 above.
  • the present invention is directed to a flat plate transport device that transports a flat plate to a work position provided in a production line, and has taken the following solutions.
  • the first invention is a region in the transport direction leading to the work position of the manufacturing line, a flat plate transfer region between the manufacturing line and the work position, and a flat plate transport driving unit installed between the work positions in the manufacturing line.
  • air levitation means that blows and supports the flat plate by air flow by blowing air on the back surface of the flat plate, and is separated from the air levitation means so as not to hinder the plate floating by the air levitation means.
  • air discharging means for sucking the air blown onto the back surface of the flat plate and discharging it out of the production line.
  • the flat plate is supported at both edges in the width direction by a roller conveyor formed by arranging a large number of rollers in two rows on both sides of the production line in the flat plate conveyance direction.
  • the rollers in the area in the transport direction leading to the work position of the production line are in contact with the both edges in the width direction of the flat plate, and the portions excluding the both edges in the width direction are lifted and supported by the air levitation means.
  • a posture correcting function for correcting the transport posture, and the air discharging means is provided so as to surround the roller portion.
  • a flat plate support member and a drive unit for moving the flat plate support member in the flat plate transfer area are provided in the flat plate transfer area between the production line and the work position.
  • a flat plate delivery device is disposed, and the air discharge means is provided so as to surround the drive unit.
  • a fourth invention is the invention according to any one of the first to third inventions, wherein the flat plate is formed by a roller conveyor formed by juxtaposing a plurality of rollers in two rows on both sides of the production line in the flat plate conveying direction. Both end edges are supported, and portions excluding the width direction both end edges are supported by the air levitation means and conveyed, and the plurality of rollers include driving rollers, and are flat plates between work positions in the production line.
  • a flat plate conveyance drive unit that is integrally connected to the drive roller is installed, and configured to convey the flat plate by rotating the drive roller by driving the flat plate conveyance drive unit,
  • the air discharge means is provided so as to surround the flat plate conveyance driving unit.
  • a position detection means for detecting the transport position of the flat plate is provided in front of the installation area of the air levitation means and the air discharge means.
  • the air levitation means and the air discharge means are configured to operate from the approach of the flat plate to the installation area based on the detection signal of the position detection means until the plate leaves.
  • the flat plate is suction-held at the center by suction holding means moving on the production line, and the portion excluding the suction holding part is supported by the air floating means.
  • the suction holding means is a movable body movably mounted on a guide rail extending along the production line, a suction pad provided on the movable body for sucking and holding the flat plate, and the movement
  • a drive unit that moves the body, and the guide rail has an air discharge port formed continuously or intermittently through the entire length in the longitudinal direction, and the air discharge means constitutes the air discharge port. It is characterized by.
  • the flat plate is a glass substrate used for a liquid crystal display panel.
  • the area in the transport direction leading to the work position of the production line, the flat plate transfer area between the production line and the work position, and the flat plate transport drive unit installation area between the work positions in the production line are: It is a dust generation location, and the dust generated at the dust generation location can be effectively discharged out of the production line by the air discharge means using the air flow for supporting the floating plate.
  • the both ends of the flat plate in the width direction come into contact with the roller, so that the scraps of the flat plate and the roller are dust.
  • the dust can be discharged out of the production line by the air discharge means using the air flow for supporting the floating plate.
  • the third invention when the flat plate is transferred in the flat plate transfer area between the production line and the work position, dust is generated from the periphery of the driving portion of the flat plate transfer device.
  • the flow can be discharged out of the production line by air discharge means.
  • the generated dust can be discharged out of the production line by energy saving operation.
  • the flat plate that is floated and supported by the air flow while being sucked and held by the suction pad is transported through the production line by the moving body moving along the guide rail by the drive unit. At this time, dust is generated from the drive unit, and the dust can be discharged out of the production line from the air discharge port of the guide rail using an air flow for supporting the floating plate.
  • dust can be prevented from being attached to the glass substrate for liquid crystal display panels whose size is increasing, and the glass substrate can be efficiently transported to the work position of the production line. .
  • FIG. 1 is a plan view of the flat plate conveying device according to the first embodiment.
  • FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
  • FIG. 3 is a plan view of the flat plate delivery device.
  • FIG. 4 is a plan view showing another form of the flat plate conveyance driving unit.
  • FIG. 5 is a plan view of the flat plate conveying device according to the second embodiment.
  • FIG. 6 is a cross-sectional view taken along line VI-VI in FIG.
  • FIG. 1 shows a flat plate conveyance device 1 according to Embodiment 1 of the present invention.
  • the flat plate conveyance device 1 is disposed on a production line L of a liquid crystal display panel (not shown), for example, and is on the production line L side.
  • a glass substrate (for example, 3 m ⁇ 3 m ⁇ 0.7 mm) G as a flat plate is transported to a work position provided on the side.
  • the cassette 3 for stacking a plurality of glass substrates G in a multi-layer shape is illustrated as an operation position. Includes other work positions.
  • the flat plate conveying device 1 includes a roller conveyor 5 that conveys the glass substrate G.
  • the roller conveyor 5 includes a driving roller 7 and a plurality of free rollers 9 arranged in parallel on both sides of the driving roller 7 in the flat plate conveying direction. A large number of these drive rollers 7 and free rollers 9 are arranged in two rows in the flat plate conveying direction so as to face both sides of the production line L. Both the driving roller 7 and the free roller 9 are provided on the shaft 13 so as to rotate together.
  • the rollers 7 and 9 support the both edges in the width direction of the glass substrate G from below and convey them along the production line L. (See FIG. 2).
  • a plurality of air nozzles 11 as air levitation means are arranged in two rows in the flat plate conveying direction, and these air nozzles 11 are provided on the back surface of the glass substrate G.
  • the glass substrate G is transported while air A is blown and the portions of the glass substrate G excluding both edges in the width direction are levitated and supported by an air flow.
  • a duct 16 (see FIG. 2) that constitutes an air discharge means is provided so as to surround the posture correcting roller 15 from below in an area S1 (front side in FIG. 1) that reaches the cassette 3 of the production line L.
  • the duct 16 is connected to a negative pressure source (not shown), and the air A blown to the back surface of the glass substrate G is sucked into the duct 16 and discharged out of the production line L.
  • the duct 16 is separated from the air nozzle 11 by a predetermined distance so as not to prevent the air nozzle 11 from floating on the glass substrate G.
  • the flat plate delivery device 19 includes a gantry 21 movably mounted on the delivery rail 17 and a fork-like flat plate support member 23 movably supported on the pedestal 21, and the flat plate support member 23 is provided with a suction pad 25 for sucking and holding the glass substrate G from below.
  • the pedestal 21 moves on the delivery rail 17 by activation of the first motor 27 constituting the drive unit, and the flat plate support member 23 moves on the gantry 21 by activation of the second motor 29 constituting the drive unit.
  • the flat plate transfer device 19 is rotated 180 ° in a horizontal plane to change its direction. G is to be handed over. During this delivery, glass waste is generated as dust due to contact between the glass substrate G and the flat plate support member 23.
  • the flat plate transport drive unit 31 includes a third motor 33, a drive pulley 35 fixed to the output shaft 33a of the third motor 33, a driven pulley 37 fixed to the shaft 13 of the drive roller 7, A belt 39 wound around the drive pulley 35 and the driven pulley 37 is constituted.
  • the driving roller 7 is rotated by driving the flat plate conveyance driving unit 31 (starting of the third motor 33), and the glass substrate G is conveyed in a state of being floated by the cooperation of the free roller 9 and the air nozzle 11. I am doing so.
  • the third motor 33 is driven, belt scraps and the like are generated as dust from around the third motor 33. Therefore, the conveyance direction to the cassette 3 of the production line L is not shown in the corresponding portion.
  • a duct 16 constituting air discharge means is provided so as to surround the flat plate transport drive unit 31 from below, and the duct 16 is connected to a negative pressure source outside the figure.
  • the flat plate conveyance drive unit 31 is installed in all the drive roller assemblies 7 of the production line L, but in FIG. 3, the flat plate conveyance drive unit 31 is omitted for convenience.
  • the flat plate transport driving unit 31 includes a third motor 33, a driving air gear 41 fixed to the output shaft 33 a of the third motor 33, and the driving roller assembly 7. You may be comprised with the driven gear 43 fixed to the shaft 13.
  • FIG. 4 the flat plate transport driving unit 31 includes a third motor 33, a driving air gear 41 fixed to the output shaft 33 a of the third motor 33, and the driving roller assembly 7. You may be comprised with the driven gear 43 fixed to the shaft 13.
  • the air blowing by the air nozzle 11 and the duct 16 are performed.
  • the exhaust gas is configured to operate during the period from when the glass substrate G approaches each installation area until it leaves.
  • the region S1 in the transport direction leading to the cassette 3 in the production line L will be described as an example.
  • An optical sensor 44 such as a laser displacement meter is installed.
  • a non-contact sensor or the like can be used instead of the optical sensor 44.
  • the air nozzle 11 and the duct 16 are configured to operate during the period from when the glass substrate G approaches each installation area until it leaves, based on the detection signal of the optical sensor 44.
  • the generated dust is efficiently and effectively discharged out of the production line L from the duct 16 using the air flow blown from the air nozzle 11. Therefore, it is possible to prevent dust from adhering to the glass substrate G for liquid crystal display panels, which are becoming increasingly popular, and damage to the glass substrate G due to adhering dust.
  • the duct 16 is separated from the air nozzle 11 by a predetermined distance, the air A blown to the back surface of the glass substrate G is surely sucked into the duct 16 to efficiently remove dust scattered by the air flow. It can be discharged from the duct 16. Further, the air A blown to the back surface of the glass substrate G is not sucked into the duct 16 more than necessary, and the amount of air required for air levitation can be reduced.
  • the air nozzle 11 and the duct 16 operate only when necessary, the generated dust can be discharged out of the production line L by energy saving operation.
  • FIG. 5 and 6 show the flat plate conveying device 1 according to the second embodiment.
  • suction conveyance is adopted instead of conveyance by the roller conveyor 5 of the first embodiment. That is, the glass substrate G is transported while the central portion of the glass substrate G is sucked and held by the sucking and holding means, and the portion excluding the sucking and holding portion is levitated and supported by the air A blown out from the air nozzle 11.
  • a single guide rail 45 is laid so as to extend over the entire length along the production line L, and the suction holding means can move to the guide rail 45.
  • a moving body 47 mounted on the vehicle is provided.
  • the moving body 47 is provided with a pair of rotating shafts 49 arranged at intervals in the longitudinal direction of the guide rail 45, and suction pads 51 for sucking and holding the glass substrate G at the upper ends of the rotating shafts 49.
  • suction pads 51 for sucking and holding the glass substrate G at the upper ends of the rotating shafts 49.
  • the moving body 47 is provided with a duct 16 between both the rotating shafts 49, and a fourth motor 53 constituting a driving unit is installed on a side portion of the moving body 47, The movable body 47 is moved by driving the fourth motor 53.
  • a slit-like air discharge port 55 is continuously formed through the guide rail 45 over the entire length in the longitudinal direction, and the air discharge means is configured by the air discharge port 55 and the duct 16. Note that the air discharge port 55 may be formed to be intermittently penetrated.
  • the glass substrate G floated and supported by the air flow while being sucked and held by the suction pad 51 is conveyed along the production line L by the moving body 47 being moved along the guide rail 45 by the fourth motor 53.
  • dust is generated from the drive portion (around the fourth motor 53), that is, from the contact portion between the moving body 47 and the guide rail 45.
  • An air flow blown out from the air nozzle 11 is introduced into the duct 16.
  • the dust is adhered to the glass substrate G for the liquid crystal display panel which is efficiently and effectively discharged from the air discharge port 55 of the guide rail 45 to the outside of the production line L, and the size of the glass substrate G is increasing.
  • the substrate G can be prevented from being damaged.
  • the duct 16 is separated from the air nozzle 11 by a predetermined distance, and therefore, the air A blown to the back surface of the glass substrate G is reliably sucked into the duct 16 and the air flow.
  • the dust scattered by the can can be efficiently discharged from the duct 16.
  • the air A blown to the back surface of the glass substrate G is not sucked into the duct 16 more than necessary, and the amount of air required for air levitation can be reduced.
  • the flat plate transfer area S2 between the production line L and the cassette 3 if the same configuration as that of the second embodiment is adopted, the flat plate is transferred when the glass substrate G is transferred between the production line L and the cassette 3. Even if dust is generated from around the first and second motors 27 and 29 by driving the first and second motors 27 and 29 of the delivery device 19, the air flow in which the dust is blown out from the air nozzle 11 is ducted. 16 and introduced into the production line L, efficiently and effectively discharged, and adherence to the glass substrate G for liquid crystal display panels, which are increasing in size, and damage to the glass substrate G due to adhering dust Can be prevented.
  • the installation area of the suction holding means and the air discharge means may be one or two of the above three areas depending on the state of dust generation. Further, not only in these areas, the area in the transport direction leading to the work position of the production line L, the flat plate transfer area between the production line L and the work position, and the flat plate transport drive unit installed between the work positions in the production line L Any area may be used as long as it is an area.
  • the present invention is useful for a flat plate conveying apparatus that conveys a flat plate such as a glass substrate used for a liquid crystal display to a work position on a production line.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Disclosed is an apparatus for transferring a flat board, wherein a front region (S1) in the transfer direction, said front region reaching a cassette on a production line (L), a flat board delivery region between the production line and the cassette, and a region where a flat board transfer drive section is installed, said region being disposed between operation positions on the production line, are provided with: an air nozzle (11), which floats and supports a glass substrate (G) by means of an air flow by blowing air (A) to the rear surface of the glass substrate (G); and a duct (16), which is disposed at a distance from the air nozzle (11) such that the floating of the glass substrate (G) is not disturbed, said floating being generated by the air nozzle (11), and which sucks the air (A) blown to the rear surface of the glass substrate (G), and discharges the air to the outside of the production line. Consequently, contamination in the transfer process of the glass substrate (G) can be efficiently eliminated.

Description

平板搬送装置Flat plate conveyor
　この発明は、例えば液晶ディスプレイに使用するガラス基板等の平板を製造ラインで作業ポジションに搬送する平板搬送装置に関し、特に発塵対策に関するものである。 The present invention relates to a flat plate transport device that transports a flat plate such as a glass substrate used for a liquid crystal display to a work position on a production line, and particularly relates to dust generation countermeasures.
　特許文献１には、ガラス基板が搬送過程で自重により中垂れしないように、該ガラス基板をエア流により下方から浮上支持しながら幅方向両端縁をローラコンベアで接触支持して搬送するようにした平板搬送装置が開示されている。 In Patent Document 1, the glass substrate is supported while being floated from below by an air flow so that the glass substrate does not hang down due to its own weight in the conveyance process, and both edges in the width direction are contact-supported and conveyed by a roller conveyor. A flat plate conveying device is disclosed.
　また、特許文献２にも、ガラス基板をエア流により下方から浮上支持しながら搬送するようにした平板搬送装置が開示されている。 Also, Patent Document 2 discloses a flat plate transport device that transports a glass substrate while floating and supporting it from below by an air flow.
特開２００５－１５４０４０号公報（段落００１６、図３）Japanese Patent Laying-Open No. 2005-154040 (paragraph 0016, FIG. 3) 特開２００５－２０６３０４号公報（段落００２４、段落００２８、図２）Japanese Patent Laying-Open No. 2005-206304 (paragraph 0024, paragraph 0028, FIG. 2)
　しかし、特許文献１のようにガラス基板をローラコンベアで接触支持すると、ガラス基板がローラとの接触により削れ、この削れ屑が塵として発生してガラス基板を汚染する。 However, when the glass substrate is contacted and supported by the roller conveyor as in Patent Document 1, the glass substrate is scraped by contact with the roller, and the shavings are generated as dust to contaminate the glass substrate.
　また、上記の特許文献１，２では共に、エア吹出部とエア排気部とが隣り合って接近しているため、ガラス基板の裏面に吹き付けられたエアがエア排気部外に大量に流れ、エア流により飛散した塵を効率良くエア排気部から排出できない。また、エア吹出部から吹き出されたエアがエア排気部に直ぐに吸引されるため、エア浮上に大量のエアが必要となる。 In both Patent Documents 1 and 2, since the air blowing part and the air exhaust part are adjacent to each other, the air blown to the back surface of the glass substrate flows in a large amount outside the air exhaust part. Dust scattered by the flow cannot be efficiently discharged from the air exhaust. Further, since the air blown out from the air blowing portion is immediately sucked into the air exhaust portion, a large amount of air is required for air levitation.
　この発明はかかる点に鑑みてなされたものであり、その目的とするところは、ガラス基板等平板の搬送過程における汚染を効率良く防止することである。 The present invention has been made in view of the above points, and an object of the present invention is to efficiently prevent contamination in the process of transporting a flat plate such as a glass substrate.
　上記の目的を達成するため、この発明は、上記の特許文献１，２の如きエア流による浮上支持を利用して塵が平板に付着しないようにしたことを特徴とする。 In order to achieve the above object, the present invention is characterized in that dust is prevented from adhering to the flat plate by using the floating support by the air flow as described in Patent Documents 1 and 2 above.
　具体的には、この発明は、製造ラインに設けられた作業ポジションに平板を搬送する平板搬送装置を対象とし、次のような解決手段を講じた。 Specifically, the present invention is directed to a flat plate transport device that transports a flat plate to a work position provided in a production line, and has taken the following solutions.
　すなわち、第１の発明は、上記製造ラインの作業ポジションに至る搬送方向手前領域、上記製造ラインと上記作業ポジションとの間の平板受渡し領域、及び上記製造ラインにおける作業ポジション間の平板搬送駆動部設置領域のうち少なくとも１つの領域には、上記平板裏面にエアを吹き付けて該平板をエア流により浮上支持するエア浮上手段と、上記エア浮上手段による平板浮上を阻害しないように該エア浮上手段から離間し、上記平板裏面に吹き付けられたエアを吸引して製造ライン外に排出するエア排出手段とが設けられていることを特徴とする。 That is, the first invention is a region in the transport direction leading to the work position of the manufacturing line, a flat plate transfer region between the manufacturing line and the work position, and a flat plate transport driving unit installed between the work positions in the manufacturing line. In at least one of the regions, air levitation means that blows and supports the flat plate by air flow by blowing air on the back surface of the flat plate, and is separated from the air levitation means so as not to hinder the plate floating by the air levitation means. And air discharging means for sucking the air blown onto the back surface of the flat plate and discharging it out of the production line.
　第２の発明は、第１の発明において、上記平板は、製造ラインの両側で多数個のローラを２列に平板搬送方向に並設してなるローラコンベアにより幅方向両端縁が支持されるとともに、該幅方向両端縁を除く部分が上記エア浮上手段により浮上支持されて搬送され、上記製造ラインの作業ポジションに至る搬送方向手前領域のローラは、平板の幅方向両端縁と接触して該平板の搬送姿勢を修正する姿勢修正機能を有していて、当該ローラ部分を囲むように上記エア排出手段が設けられていることを特徴とする。 According to a second invention, in the first invention, the flat plate is supported at both edges in the width direction by a roller conveyor formed by arranging a large number of rollers in two rows on both sides of the production line in the flat plate conveyance direction. The rollers in the area in the transport direction leading to the work position of the production line are in contact with the both edges in the width direction of the flat plate, and the portions excluding the both edges in the width direction are lifted and supported by the air levitation means. And a posture correcting function for correcting the transport posture, and the air discharging means is provided so as to surround the roller portion.
　第３の発明は、第１の発明において、上記製造ラインと上記作業ポジションとの間の平板受渡し領域には、平板支持部材と、該平板支持部材を上記平板受渡し領域で移動させる駆動部とを有する平板受渡し装置が配置され、当該駆動部を囲むように上記エア排出手段が設けられていることを特徴とする。 According to a third invention, in the first invention, in the flat plate transfer area between the production line and the work position, a flat plate support member and a drive unit for moving the flat plate support member in the flat plate transfer area are provided. A flat plate delivery device is disposed, and the air discharge means is provided so as to surround the drive unit.
　第４の発明は、第１ないし第３のいずれか１つの発明において、上記平板は、製造ラインの両側で多数個のローラを２列に平板搬送方向に並設してなるローラコンベアにより幅方向両端縁が支持されるとともに、該幅方向両端縁を除く部分が上記エア浮上手段により浮上支持されて搬送され、上記多数個のローラは、駆動ローラを含み、上記製造ラインにおける作業ポジション間の平板搬送駆動部設置領域には、上記駆動ローラに回転一体に接続された平板搬送駆動部が設置され、該平板搬送駆動部の駆動により上記駆動ローラを回転させて平板を搬送するように構成され、上記平板搬送駆動部を囲むように上記エア排出手段が設けられていることを特徴とする。 A fourth invention is the invention according to any one of the first to third inventions, wherein the flat plate is formed by a roller conveyor formed by juxtaposing a plurality of rollers in two rows on both sides of the production line in the flat plate conveying direction. Both end edges are supported, and portions excluding the width direction both end edges are supported by the air levitation means and conveyed, and the plurality of rollers include driving rollers, and are flat plates between work positions in the production line. In the conveyance drive unit installation area, a flat plate conveyance drive unit that is integrally connected to the drive roller is installed, and configured to convey the flat plate by rotating the drive roller by driving the flat plate conveyance drive unit, The air discharge means is provided so as to surround the flat plate conveyance driving unit.
　第５の発明は、第１ないし第４のいずれか１つの発明において、上記エア浮上手段及びエア排出手段の設置領域手前には、上記平板の搬送位置を検知する位置検知手段が設けられ、上記エア浮上手段及びエア排出手段は、上記位置検知手段の検知信号に基づき各々の設置領域に平板が接近してから離れるまでの間、作動するように構成されていることを特徴とする。 According to a fifth invention, in any one of the first to fourth inventions, a position detection means for detecting the transport position of the flat plate is provided in front of the installation area of the air levitation means and the air discharge means. The air levitation means and the air discharge means are configured to operate from the approach of the flat plate to the installation area based on the detection signal of the position detection means until the plate leaves.
　第６の発明は、第１の発明において、上記平板は、上記製造ラインを移動する吸着保持手段により中央部が吸着保持されるとともに、当該吸着保持部分を除く部分が上記エア浮上手段により浮上支持されて搬送され、上記吸着保持手段は、上記製造ラインに沿って延びるガイドレールに移動可能に乗載された移動体と、該移動体に設けられ上記平板を吸着保持する吸着パッドと、上記移動体を移動させる駆動部とを備え、上記ガイドレールには、エア排出口が長手方向全長に亘って連続又は間欠して貫通形成され、これらエア排出口により上記エア排出手段が構成されていることを特徴とする。 In a sixth aspect based on the first aspect, the flat plate is suction-held at the center by suction holding means moving on the production line, and the portion excluding the suction holding part is supported by the air floating means. The suction holding means is a movable body movably mounted on a guide rail extending along the production line, a suction pad provided on the movable body for sucking and holding the flat plate, and the movement A drive unit that moves the body, and the guide rail has an air discharge port formed continuously or intermittently through the entire length in the longitudinal direction, and the air discharge means constitutes the air discharge port. It is characterized by.
　第７の発明は、第１ないし第６のいずれか１つの発明において、上記平板は、液晶表示パネルに使用するガラス基板であることを特徴とする。 According to a seventh invention, in any one of the first to sixth inventions, the flat plate is a glass substrate used for a liquid crystal display panel.
　第１の発明によれば、製造ラインの作業ポジションに至る搬送方向手前領域、製造ラインと上記作業ポジションとの間の平板受渡し領域、及び製造ラインにおける作業ポジション間の平板搬送駆動部設置領域は、発塵箇所であり、当該発塵箇所で発生する塵を平板浮上支持用のエア流を利用してエア排出手段により製造ライン外に効果的に排出できる。 According to the first invention, the area in the transport direction leading to the work position of the production line, the flat plate transfer area between the production line and the work position, and the flat plate transport drive unit installation area between the work positions in the production line are: It is a dust generation location, and the dust generated at the dust generation location can be effectively discharged out of the production line by the air discharge means using the air flow for supporting the floating plate.
　第２の発明によれば、製造ラインの作業ポジションに至る搬送方向手前領域で平板の搬送姿勢を修正する際、平板の幅方向両端縁がローラに接触することで平板やローラの削れ屑が塵として発生するが、この塵を平板浮上支持用のエア流を利用してエア排出手段により製造ライン外に排出できる。 According to the second aspect of the present invention, when correcting the transport posture of the flat plate in the region in the transport direction before reaching the work position of the production line, the both ends of the flat plate in the width direction come into contact with the roller, so that the scraps of the flat plate and the roller are dust. However, the dust can be discharged out of the production line by the air discharge means using the air flow for supporting the floating plate.
　第３の発明によれば、製造ラインと作業ポジションとの間の平板受渡し領域で平板を受け渡す際、平板受渡し装置の駆動部周りから塵が発生するが、この塵を平板浮上支持用のエア流を利用してエア排出手段により製造ライン外に排出できる。 According to the third invention, when the flat plate is transferred in the flat plate transfer area between the production line and the work position, dust is generated from the periphery of the driving portion of the flat plate transfer device. The flow can be discharged out of the production line by air discharge means.
　第４の発明によれば、製造ラインの作業ポジション間で平板を搬送する過程で、平板が駆動ローラを通過する際、駆動ローラを回転駆動させる平板搬送駆動部周りから塵が発生するが、この塵を平板浮上支持用のエア流を利用してエア排出手段により製造ライン外に排出できる。 According to the fourth invention, in the process of transporting the flat plate between the work positions of the production line, when the flat plate passes the drive roller, dust is generated from the periphery of the flat plate transport driving unit that rotationally drives the drive roller. Dust can be discharged out of the production line by the air discharge means using the air flow for supporting the floating plate.
　第５の発明によれば、エア浮上手段及びエア排出手段が必要なときだけ作動するので、発生した塵を省エネ操業により製造ライン外に排出できる。 According to the fifth aspect of the invention, since the air levitation means and the air discharge means operate only when necessary, the generated dust can be discharged out of the production line by energy saving operation.
　第６の発明によれば、吸着パッドで吸着保持されながらエア流により浮上支持された平板は、移動体が駆動部によりガイドレールに沿って移動することで製造ラインを搬送される。この際、上記駆動部から塵が発生するが、この塵を平板浮上支持用のエア流を利用して上記ガイドレールのエア排出口から製造ライン外に排出できる。 According to the sixth aspect of the invention, the flat plate that is floated and supported by the air flow while being sucked and held by the suction pad is transported through the production line by the moving body moving along the guide rail by the drive unit. At this time, dust is generated from the drive unit, and the dust can be discharged out of the production line from the air discharge port of the guide rail using an air flow for supporting the floating plate.
　第７の発明によれば、大型化が進んでいる液晶表示パネル用のガラス基板への塵付着や、付着塵によるガラス基板の傷付きを防止して、効率良く製造ラインの作業ポジションに搬送できる。 According to the seventh aspect of the present invention, dust can be prevented from being attached to the glass substrate for liquid crystal display panels whose size is increasing, and the glass substrate can be efficiently transported to the work position of the production line. .
図１は、実施形態１に係る平板搬送装置の平面図である。FIG. 1 is a plan view of the flat plate conveying device according to the first embodiment. 図２は、図１のII－II線における断面図である。FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 図３は、平板受渡し装置の平面図である。FIG. 3 is a plan view of the flat plate delivery device. 図４は、平板搬送駆動部の別形態を示す平面図である。FIG. 4 is a plan view showing another form of the flat plate conveyance driving unit. 図５は、実施形態２に係る平板搬送装置の平面図である。FIG. 5 is a plan view of the flat plate conveying device according to the second embodiment. 図６は、図５のVI－VI線における断面図である。FIG. 6 is a cross-sectional view taken along line VI-VI in FIG.
　以下、この発明の実施形態について図面に基づいて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　（実施形態１）
　図１は、この発明の実施形態１に係る平板搬送装置１を示し、この平板搬送装置１は、例えば、液晶表示パネル（図示せず）の製造ラインＬ上に配置され、この製造ラインＬ側方に設けられた作業ポジションに平板としてのガラス基板（例えば、３ｍ×３ｍ×０．７ｍｍ）Ｇを搬送する役割を担っている。図１では、作業ポジションとして、複数枚のガラス基板Ｇを重層状に積み込むカセット３を例示しているが、これに限らず、レジスト塗布場所等、液晶表示パネルの製造ラインＬに設けられている他の作業ポジションを含むものである。 (Embodiment 1)
FIG. 1 shows a flat plate conveyance device 1 according to Embodiment 1 of the present invention. The flat plate conveyance device 1 is disposed on a production line L of a liquid crystal display panel (not shown), for example, and is on the production line L side. A glass substrate (for example, 3 m × 3 m × 0.7 mm) G as a flat plate is transported to a work position provided on the side. In FIG. 1, the cassette 3 for stacking a plurality of glass substrates G in a multi-layer shape is illustrated as an operation position. Includes other work positions.
　上記平板搬送装置１は、上記ガラス基板Ｇを搬送するローラコンベア５を備え、該ローラコンベア５は、駆動ローラ７と、該駆動ローラ７の平板搬送方向両側に並設された複数のフリーローラ９とからなり、これら駆動ローラ７及びフリーローラ９が上記製造ラインＬの両側に対向するように２列に平板搬送方向に多数個並設されている。上記駆動ローラ７及びフリーローラ９は共に、シャフト１３に回転一体に設けられ、これらローラ７，９はガラス基板Ｇの幅方向両端縁を下方から支持して製造ラインＬに沿って搬送するようになっている（図２参照）。 The flat plate conveying device 1 includes a roller conveyor 5 that conveys the glass substrate G. The roller conveyor 5 includes a driving roller 7 and a plurality of free rollers 9 arranged in parallel on both sides of the driving roller 7 in the flat plate conveying direction. A large number of these drive rollers 7 and free rollers 9 are arranged in two rows in the flat plate conveying direction so as to face both sides of the production line L. Both the driving roller 7 and the free roller 9 are provided on the shaft 13 so as to rotate together. The rollers 7 and 9 support the both edges in the width direction of the glass substrate G from below and convey them along the production line L. (See FIG. 2).
　上記製造ラインＬのカセット３に至る搬送方向手前領域（図１左側）Ｓ１の３つのフリーローラ９のシャフト１３両端には、他のフリーローラよりに外側に位置する大径の姿勢修正ローラ１５が回転一体に設けられていて、上流側２つの姿勢修正ローラ１５の内側面はテーパ面１５ａに形成され、このテーパ面１５ａは、図２に示すように、ガラス基板Ｇが通過する過程で、ガラス基板Ｇの幅方向両端縁と接触して該ガラス基板Ｇの搬送姿勢を修正する姿勢修正機能を有している（図１実線及び仮想線参照）。そして、ガラス基板Ｇの姿勢を修正する際、ガラス基板Ｇの幅方向両端縁が姿勢修正ローラ１５に接触することでガラス基板Ｇや姿勢修正ローラ１５の削れ屑が塵として発生する。 At the both ends of the shafts 13 of the three free rollers 9 in the transport direction front area (left side in FIG. 1) S1 reaching the cassette 3 of the production line L, large-diameter posture correcting rollers 15 positioned outside the other free rollers. The inner surfaces of the two upstream posture correction rollers 15 are formed on a tapered surface 15a, and the tapered surface 15a is formed in the process of passing the glass substrate G as shown in FIG. It has a posture correcting function for correcting the conveying posture of the glass substrate G by contacting both edges in the width direction of the substrate G (see the solid line and the virtual line in FIG. 1). And when correcting the attitude | position of the glass substrate G, the scraps of the glass substrate G and the attitude | position correction roller 15 generate | occur | produce as dust because the width direction both ends edge of the glass substrate G contacts the attitude | position correction roller 15.
　上記製造ラインＬの対向する駆動ローラ７間及びフリーローラ９間には、エア浮上手段としてのエアノズル１１が２列に平板搬送方向に多数個並設され、これらエアノズル１１により上記ガラス基板Ｇ裏面にエアＡを吹き付けて該ガラス基板Ｇの幅方向両端縁を除く部分をエア流により浮上支持してガラス基板Ｇを搬送するようになっている。 Between the driving rollers 7 and the free rollers 9 facing each other in the production line L, a plurality of air nozzles 11 as air levitation means are arranged in two rows in the flat plate conveying direction, and these air nozzles 11 are provided on the back surface of the glass substrate G. The glass substrate G is transported while air A is blown and the portions of the glass substrate G excluding both edges in the width direction are levitated and supported by an air flow.
　また、上記製造ラインＬのカセット３に至る搬送方向手前領域（図１左側）Ｓ１には、エア排出手段を構成するダクト１６（図２参照）が上記姿勢修正ローラ１５を下方から囲むように設けられ、該ダクト１６は図外の負圧源に接続されていて、ガラス基板Ｇ裏面に吹き付けられたエアＡを上記ダクト１６内に吸引して製造ラインＬ外に排出するようにしている。上記ダクト１６は、上記エアノズル１１によるガラス基板Ｇ浮上を阻害しないように該エアノズル１１から所定距離だけ離間している。 Further, a duct 16 (see FIG. 2) that constitutes an air discharge means is provided so as to surround the posture correcting roller 15 from below in an area S1 (front side in FIG. 1) that reaches the cassette 3 of the production line L. The duct 16 is connected to a negative pressure source (not shown), and the air A blown to the back surface of the glass substrate G is sucked into the duct 16 and discharged out of the production line L. The duct 16 is separated from the air nozzle 11 by a predetermined distance so as not to prevent the air nozzle 11 from floating on the glass substrate G.
　上記製造ラインＬと上記カセット３との間の平板受渡し領域Ｓ２には、図３に示すように、２条の受渡しレール１７が製造ラインＬと交差するように敷設され、該受渡しレール１７には平板受渡し装置１９が移動可能に配置されている。該平板受渡し装置１９は、上記受渡しレール１７上に移動可能に乗載された架台２１と、該架台２１上に移動可能に支持されたフォーク状の平板支持部材２３とを備え、該平板支持部材２３には、ガラス基板Ｇを下方から吸着保持する吸着パッド２５が設けられている。上記架台２１は、駆動部を構成する第１モータ２７の起動により受渡しレール１７上を移動し、上記平板支持部材２３は、駆動部を構成する第２モータ２９の起動により架台２１上を移動するとともに、水平面内で１８０°旋回して向きを変えるようになっており、上記平板受渡し装置１９は、平板受渡し領域Ｓで製造ラインＬとカセット３との間を水平移動して両者間でガラス基板Ｇを受け渡すようになっている。この受渡しの際、ガラス基板Ｇと平板支持部材２３との接触によりガラス屑が塵として発生する。 In the flat plate delivery area S2 between the production line L and the cassette 3, two delivery rails 17 are laid so as to intersect the production line L, as shown in FIG. A flat plate transfer device 19 is movably disposed. The flat plate delivery device 19 includes a gantry 21 movably mounted on the delivery rail 17 and a fork-like flat plate support member 23 movably supported on the pedestal 21, and the flat plate support member 23 is provided with a suction pad 25 for sucking and holding the glass substrate G from below. The pedestal 21 moves on the delivery rail 17 by activation of the first motor 27 constituting the drive unit, and the flat plate support member 23 moves on the gantry 21 by activation of the second motor 29 constituting the drive unit. At the same time, the flat plate transfer device 19 is rotated 180 ° in a horizontal plane to change its direction. G is to be handed over. During this delivery, glass waste is generated as dust due to contact between the glass substrate G and the flat plate support member 23.
　上記製造ラインＬにおける作業ポジション間、例えばカセット３とその搬送方向上流側の作業ポジション（図示せず）との間の平板搬送駆動部設置領域Ｓ３には、上記駆動ローラ７に回転一体に接続された平板搬送駆動部３１が設置されている。該平板搬送駆動部３１は、第３モータ３３と、該第３モータ３３の出力軸３３ａに固設された駆動プーリ３５と、上記駆動ローラ７のシャフト１３に固設された従動プーリ３７と、これら駆動プーリ３５及び従動プーリ３７に巻き掛けられたベルト３９とで構成されている。そして、上記平板搬送駆動部３１の駆動（第３モータ３３の起動）により上記駆動ローラ７を回転させてガラス基板Ｇを上記フリーローラ９及びエアノズル１１との共働により浮上させた状態で搬送するようにしている。この際、第３モータ３３が駆動することで、該第３モータ３３周りからベルト屑等が塵として発生するため、当該箇所にも、図示しないが、上記製造ラインＬのカセット３に至る搬送方向手前領域（図１左側）Ｓ１と同様に、エア排出手段を構成するダクト１６が上記平板搬送駆動部３１を下方から囲むように設けられ、該ダクト１６は図外の負圧源に接続されていて、ガラス基板Ｇ裏面に吹き付けられたエアＡを上記ダクト１６内に吸引して製造ラインＬ外に排出するようにしている。上記ダクト１６は、上記エアノズル１１によるガラス基板Ｇ浮上を阻害しないように該エアノズル１１から所定距離だけ離間している。上記平板搬送駆動部３１は、製造ラインＬの全ての駆動ローラ集合体７に設置されているが、図３では、便宜上、平板搬送駆動部３１を省略している。 Between the work positions in the production line L, for example, in the flat plate transport drive unit installation area S3 between the cassette 3 and the work position (not shown) on the upstream side in the transport direction, the drive roller 7 is integrally connected to the drive roller 7. A flat plate conveyance drive unit 31 is installed. The flat plate transport drive unit 31 includes a third motor 33, a drive pulley 35 fixed to the output shaft 33a of the third motor 33, a driven pulley 37 fixed to the shaft 13 of the drive roller 7, A belt 39 wound around the drive pulley 35 and the driven pulley 37 is constituted. Then, the driving roller 7 is rotated by driving the flat plate conveyance driving unit 31 (starting of the third motor 33), and the glass substrate G is conveyed in a state of being floated by the cooperation of the free roller 9 and the air nozzle 11. I am doing so. At this time, since the third motor 33 is driven, belt scraps and the like are generated as dust from around the third motor 33. Therefore, the conveyance direction to the cassette 3 of the production line L is not shown in the corresponding portion. Similar to the front area (left side in FIG. 1) S1, a duct 16 constituting air discharge means is provided so as to surround the flat plate transport drive unit 31 from below, and the duct 16 is connected to a negative pressure source outside the figure. Thus, the air A blown onto the back surface of the glass substrate G is sucked into the duct 16 and discharged out of the production line L. The duct 16 is separated from the air nozzle 11 by a predetermined distance so as not to prevent the air nozzle 11 from floating on the glass substrate G. The flat plate conveyance drive unit 31 is installed in all the drive roller assemblies 7 of the production line L, but in FIG. 3, the flat plate conveyance drive unit 31 is omitted for convenience.
　なお、上記平板搬送駆動部３１は、図４に示すように、第３モータ３３と、該第３モータ３３の出力軸３３ａに固設された駆動気ギヤ４１と、上記駆動ローラ集合体７のシャフト１３に固設された従動ギヤ４３とで構成されていてもよい。 As shown in FIG. 4, the flat plate transport driving unit 31 includes a third motor 33, a driving air gear 41 fixed to the output shaft 33 a of the third motor 33, and the driving roller assembly 7. You may be comprised with the driven gear 43 fixed to the shaft 13. FIG.
　上記製造ラインＬのカセット３に至る搬送方向手前領域Ｓ１、及びカセット３とその搬送方向上流側の作業ポジションとの間の平板搬送駆動部設置領域Ｓ３では、上記エアノズル１１によるエア吹出し及びダクト１６による排気は、各々の設置領域にガラス基板Ｇが接近してから離れるまでの間、作動するように構成されている。つまり、上記製造ラインＬのカセット３に至る搬送方向手前領域Ｓ１を例に挙げて説明すると、上記エアノズル１１及びダクト１６の設置領域手前に、上記ガラス基板Ｇの搬送位置を検知する位置検知手段としてのレーザ変位計等の光学センサ４４が設置されている。なお、位置検知手段としては、光学センサ４４の代わりに非接触センサ等を用いることができる。そして、上記エアノズル１１及びダクト１６は、上記光学センサ４４の検知信号に基づき各々の設置領域にガラス基板Ｇが接近してから離れるまでの間、作動するように構成されている。 In the area S1 in the transport direction leading to the cassette 3 in the production line L and in the flat plate transport drive unit installation area S3 between the cassette 3 and the upstream work position in the transport direction, the air blowing by the air nozzle 11 and the duct 16 are performed. The exhaust gas is configured to operate during the period from when the glass substrate G approaches each installation area until it leaves. In other words, the region S1 in the transport direction leading to the cassette 3 in the production line L will be described as an example. As a position detection means for detecting the transport position of the glass substrate G in front of the installation region of the air nozzle 11 and the duct 16. An optical sensor 44 such as a laser displacement meter is installed. As the position detection means, a non-contact sensor or the like can be used instead of the optical sensor 44. The air nozzle 11 and the duct 16 are configured to operate during the period from when the glass substrate G approaches each installation area until it leaves, based on the detection signal of the optical sensor 44.
　したがって、発塵箇所である上記２つの領域Ｓ１，３において、発生した塵をエアノズル１１から吹き出したエア流を利用してダクト１６から製造ラインＬ外に効率良くかつ効果的に排出して、大型化が進んでいる液晶表示パネル用のガラス基板Ｇへの塵付着や、付着塵によるガラス基板Ｇの傷付きを防止できる。 Therefore, in the two regions S1 and S3, which are dust generation locations, the generated dust is efficiently and effectively discharged out of the production line L from the duct 16 using the air flow blown from the air nozzle 11. Therefore, it is possible to prevent dust from adhering to the glass substrate G for liquid crystal display panels, which are becoming increasingly popular, and damage to the glass substrate G due to adhering dust.
　また、上記ダクト１６は、エアノズル１１から所定距離だけ離間しているので、ガラス基板Ｇの裏面に吹き付けられたエアＡをダクト１６内に確実に吸引して、エア流により飛散した塵を効率良くダクト１６から排出できる。また、ガラス基板Ｇの裏面に吹き付けられたエアＡを必要以上にダクト１６内に吸引せず、エア浮上に要するエア量を低減できる。 Further, since the duct 16 is separated from the air nozzle 11 by a predetermined distance, the air A blown to the back surface of the glass substrate G is surely sucked into the duct 16 to efficiently remove dust scattered by the air flow. It can be discharged from the duct 16. Further, the air A blown to the back surface of the glass substrate G is not sucked into the duct 16 more than necessary, and the amount of air required for air levitation can be reduced.
　さらに、上記エアノズル１１及びダクト１６が必要なときだけ作動するので、発生した塵を省エネ操業により製造ラインＬ外に排出できる。 Furthermore, since the air nozzle 11 and the duct 16 operate only when necessary, the generated dust can be discharged out of the production line L by energy saving operation.
　（実施形態２）
　図５及び図６は実施形態２に係る平板搬送装置１を示す。実施形態２では、実施形態１のローラコンベア５による搬送に代えて吸着搬送を採用している。つまり、ガラス基板Ｇの中央部を吸着保持手段により吸着保持するとともに、当該吸着保持部分を除く部分をエアノズル１１から吹き出したエアＡにより浮上支持してガラス基板Ｇを搬送するようにしている。 (Embodiment 2)
5 and 6 show the flat plate conveying device 1 according to the second embodiment. In the second embodiment, suction conveyance is adopted instead of conveyance by the roller conveyor 5 of the first embodiment. That is, the glass substrate G is transported while the central portion of the glass substrate G is sucked and held by the sucking and holding means, and the portion excluding the sucking and holding portion is levitated and supported by the air A blown out from the air nozzle 11.
　具体的には、製造ラインＬ上には、１条のガイドレール４５が製造ラインＬに沿って全長に亘って延びるように敷設されており、上記吸着保持手段は、上記ガイドレール４５に移動可能に乗載された移動体４７を備えている。この移動体４７には、ガイドレール４５長手方向に間隔をあけて配置された一対の回転軸４９が立設され、これら回転軸４９の上端には、上記ガラス基板Ｇを吸着保持する吸着パッド５１がそれぞれ取り付けられ、両回転軸４９の軸心回りの回転動作によりガラス基板Ｇを正規の姿勢に修正して搬送するようにしている。また、上記移動体４７には、ダクト１６が上記両回転軸４９間に亘って設けられているとともに、上記移動体４７の側部には駆動部を構成する第４モータ５３が設置され、該第４モータ５３の駆動により移動体４７を移動させるようにしている。さらに、上記ガイドレール４５には、スリット状のエア排出口５５が長手方向全長に亘って連続して貫通形成され、該エア排出口５５及び上記ダクト１６によりエア排出手段が構成されている。なお、上記エア排出口５５は間欠して貫通形成されていてもよい。 Specifically, on the production line L, a single guide rail 45 is laid so as to extend over the entire length along the production line L, and the suction holding means can move to the guide rail 45. A moving body 47 mounted on the vehicle is provided. The moving body 47 is provided with a pair of rotating shafts 49 arranged at intervals in the longitudinal direction of the guide rail 45, and suction pads 51 for sucking and holding the glass substrate G at the upper ends of the rotating shafts 49. Are attached to each other, and the glass substrate G is corrected to a normal posture by a rotational operation around the axis of both rotary shafts 49 and is transported. Further, the moving body 47 is provided with a duct 16 between both the rotating shafts 49, and a fourth motor 53 constituting a driving unit is installed on a side portion of the moving body 47, The movable body 47 is moved by driving the fourth motor 53. Further, a slit-like air discharge port 55 is continuously formed through the guide rail 45 over the entire length in the longitudinal direction, and the air discharge means is configured by the air discharge port 55 and the duct 16. Note that the air discharge port 55 may be formed to be intermittently penetrated.
　そして、吸着パッド５１で吸着保持されながらエア流により浮上支持されたガラス基板Ｇは、移動体４７が第４モータ５３によりガイドレール４５に沿って移動することで製造ラインＬを搬送される。この際、上記駆動部（第４モータ５３周り）、つまり移動体４７とガイドレール４５との接触部から塵が発生するが、この塵をエアノズル１１から吹き出したエア流をダクト１６内に導入し、上記ガイドレール４５のエア排出口５５から製造ラインＬ外に効率良くかつ効果的に排出して、大型化が進んでいる液晶表示パネル用のガラス基板Ｇへの塵付着や、付着塵によるガラス基板Ｇの傷付きを防止できる。 Then, the glass substrate G floated and supported by the air flow while being sucked and held by the suction pad 51 is conveyed along the production line L by the moving body 47 being moved along the guide rail 45 by the fourth motor 53. At this time, dust is generated from the drive portion (around the fourth motor 53), that is, from the contact portion between the moving body 47 and the guide rail 45. An air flow blown out from the air nozzle 11 is introduced into the duct 16. The dust is adhered to the glass substrate G for the liquid crystal display panel which is efficiently and effectively discharged from the air discharge port 55 of the guide rail 45 to the outside of the production line L, and the size of the glass substrate G is increasing. The substrate G can be prevented from being damaged.
　また、実施形態１と同様に、上記ダクト１６は、エアノズル１１から所定距離だけ離間しているので、ガラス基板Ｇの裏面に吹き付けられたエアＡをダクト１６内に確実に吸引して、エア流により飛散した塵を効率良くダクト１６から排出できる。また、ガラス基板Ｇの裏面に吹き付けられたエアＡを必要以上にダクト１６内に吸引せず、エア浮上に要するエア量を低減できる。 Further, similarly to the first embodiment, the duct 16 is separated from the air nozzle 11 by a predetermined distance, and therefore, the air A blown to the back surface of the glass substrate G is reliably sucked into the duct 16 and the air flow. The dust scattered by the can can be efficiently discharged from the duct 16. Further, the air A blown to the back surface of the glass substrate G is not sucked into the duct 16 more than necessary, and the amount of air required for air levitation can be reduced.
　なお、製造ラインＬとカセット３との間の平板受渡し領域Ｓ２においても、実施形態２と同様の構成を採用すれば、ガラス基板Ｇを製造ラインＬとカセット３との間で受け渡す際、平板受渡し装置１９の第１及び第２モータ２７，２９が駆動することで、これら第１及び第２モータ２７，２９周りから塵が発生しても、この塵をエアノズル１１から吹き出したエア流をダクト１６内に導入して製造ラインＬ外に効率良くかつ効果的に排出して、大型化が進んでいる液晶表示パネル用のガラス基板Ｇへの塵付着や、付着塵によるガラス基板Ｇの傷付きを防止できる。 In addition, in the flat plate transfer area S2 between the production line L and the cassette 3, if the same configuration as that of the second embodiment is adopted, the flat plate is transferred when the glass substrate G is transferred between the production line L and the cassette 3. Even if dust is generated from around the first and second motors 27 and 29 by driving the first and second motors 27 and 29 of the delivery device 19, the air flow in which the dust is blown out from the air nozzle 11 is ducted. 16 and introduced into the production line L, efficiently and effectively discharged, and adherence to the glass substrate G for liquid crystal display panels, which are increasing in size, and damage to the glass substrate G due to adhering dust Can be prevented.
　また、上記吸着保持手段及びエア排出手段の設置領域は、発塵の状況によっては上記３つの領域のうち１つでもよく、２つでもよい。また、これらの領域に限らず、製造ラインＬの作業ポジションに至る搬送方向手前領域、製造ラインＬと作業ポジションとの間の平板受渡し領域、及び製造ラインＬにおける作業ポジション間の平板搬送駆動部設置領域であれば、如何なる領域であってもよい。 Also, the installation area of the suction holding means and the air discharge means may be one or two of the above three areas depending on the state of dust generation. Further, not only in these areas, the area in the transport direction leading to the work position of the production line L, the flat plate transfer area between the production line L and the work position, and the flat plate transport drive unit installed between the work positions in the production line L Any area may be used as long as it is an area.
　この発明は、例えば液晶ディスプレイに使用するガラス基板等の平板を製造ラインで作業ポジションに搬送する平板搬送装置について有用である。 The present invention is useful for a flat plate conveying apparatus that conveys a flat plate such as a glass substrate used for a liquid crystal display to a work position on a production line.
１　　平板搬送装置
３　　カセット（作業ポジション）
５　　ローラコンベア
７　　駆動ローラ
９　　フリーローラ
１１　エアノズル（エア浮上手段）
１５　姿勢修正ローラ
１６　ダクト（エア排出手段）
１９　平板受渡し装置
２３　平板支持部材
２７　第１モータ（駆動部）
２９　第２モータ（駆動部）
３１　平板搬送駆動部
３３　第３モータ（駆動部）
４４　光学センサ（位置検知手段）
４５　ガイドレール
４７　移動体（吸着保持手段）
５１　吸着パッド（吸着保持手段）
５３　第４モータ（駆動部、吸着保持手段）
５５　エア排出口（エア排出手段）
Ａ　　エア
Ｇ　　ガラス基板（平板）
Ｌ　　製造ライン
Ｓ１　製造ラインのカセット（作業ポジション）に至る搬送方向手前領域
Ｓ２　製造ラインとカセット（作業ポジション）との間の平板受渡し領域
Ｓ３　製造ラインにおける作業ポジション間（カセットとその搬送方向上流側の作業ポジションとの間）の平板搬送駆動部設置領域 1 Flat plate conveyor 3 Cassette (working position)
5 Roller conveyor 7 Driving roller 9 Free roller 11 Air nozzle (air floating means)
15 Posture correction roller 16 Duct (air discharge means)
19 Flat plate delivery device 23 Flat plate support member 27 1st motor (drive part)
29 Second motor (drive unit)
31 Flat plate conveyance drive unit 33 Third motor (drive unit)
44 Optical sensor (position detection means)
45 Guide rail 47 Moving body (Suction holding means)
51 Suction pad (Suction holding means)
53 Fourth motor (drive unit, suction holding means)
55 Air discharge port (Air discharge means)
A Air G Glass substrate (flat plate)
L Production line S1 Area in front of conveyance direction S2 to production line cassette (work position) S2 Flat plate delivery area S3 between production line and cassette (work position) Between work positions in production line (on the upstream side of the cassette and its conveyance direction) Installation area of flat plate transport drive unit (between working positions)

Claims (7)

  1. 　製造ラインに設けられた作業ポジションに平板を搬送する平板搬送装置であって、
    　上記製造ラインの作業ポジションに至る搬送方向手前領域、上記製造ラインと上記作業ポジションとの間の平板受渡し領域、及び上記製造ラインにおける作業ポジション間の平板搬送駆動部設置領域のうち少なくとも１つの領域には、
    　上記平板裏面にエアを吹き付けて該平板をエア流により浮上支持するエア浮上手段と、
    　上記エア浮上手段による平板浮上を阻害しないように該エア浮上手段から離間し、上記平板裏面に吹き付けられたエアを吸引して製造ライン外に排出するエア排出手段とが設けられていることを特徴とする平板搬送装置。     A flat plate transport device for transporting a flat plate to a work position provided in a production line,
    At least one of the area in the transport direction leading to the work position of the manufacturing line, the flat plate transfer area between the manufacturing line and the work position, and the flat plate transport driving unit installation area between the work positions in the manufacturing line. Is
    Air levitation means for blowing air onto the back surface of the flat plate to support the flat plate by air flow;
    Air discharge means is provided so as to be separated from the air levitation means so as not to obstruct the plate levitation by the air levitation means and to suck out the air blown to the back surface of the flat plate and discharge it outside the production line. A flat plate transport device.
  2. 　請求項１に記載の平板搬送装置において、
    　上記平板は、製造ラインの両側で多数個のローラを２列に平板搬送方向に並設してなるローラコンベアにより幅方向両端縁が支持されるとともに、該幅方向両端縁を除く部分が上記エア浮上手段により浮上支持されて搬送され、
    　上記製造ラインの作業ポジションに至る搬送方向手前領域のローラは、平板の幅方向両端縁と接触して該平板の搬送姿勢を修正する姿勢修正機能を有していて、当該ローラ部分を囲むように上記エア排出手段が設けられていることを特徴とする平板搬送装置。     In the flat plate conveying apparatus according to claim 1,
    The flat plate is supported at both ends in the width direction by a roller conveyor in which a large number of rollers are arranged in two rows on both sides of the production line in the flat plate conveying direction, and the portion excluding the both ends in the width direction is the air It is supported by levitation means and is conveyed.
    The roller in the area in the transport direction leading to the work position of the manufacturing line has a posture correcting function that corrects the transport posture of the flat plate by contacting both edges in the width direction of the flat plate so as to surround the roller portion. A flat plate conveying apparatus comprising the air discharging means.
  3. 　請求項１に記載の平板搬送装置において、
    　上記製造ラインと上記作業ポジションとの間の平板受渡し領域には、平板支持部材と、該平板支持部材を上記平板受渡し領域で移動させる駆動部とを有する平板受渡し装置が配置され、当該駆動部を囲むように上記エア排出手段が設けられていることを特徴とする平板搬送装置。     In the flat plate conveying apparatus according to claim 1,
    A flat plate delivery device having a flat plate support member and a drive unit that moves the flat plate support member in the flat plate delivery region is disposed in the flat plate transfer region between the manufacturing line and the work position, and the drive unit is A flat plate conveying apparatus, wherein the air discharge means is provided so as to surround the flat plate conveying apparatus.
  4. 　請求項１ないし３のいずれか１項に記載の平板搬送装置において、
    　上記平板は、製造ラインの両側で多数個のローラを２列に平板搬送方向に並設してなるローラコンベアにより幅方向両端縁が支持されるとともに、該幅方向両端縁を除く部分が上記エア浮上手段により浮上支持されて搬送され、
    　上記多数個のローラは、駆動ローラを含み、
    　上記製造ラインにおける作業ポジション間の平板搬送駆動部設置領域には、上記駆動ローラに回転一体に接続された平板搬送駆動部が設置され、該平板搬送駆動部の駆動により上記駆動ローラを回転させて平板を搬送するように構成され、上記平板搬送駆動部を囲むように上記エア排出手段が設けられていることを特徴とする平板搬送装置。     In the flat plate conveying apparatus according to any one of claims 1 to 3,
    The flat plate is supported at both ends in the width direction by a roller conveyor in which a large number of rollers are arranged in two rows on both sides of the production line in the flat plate conveying direction, and the portion excluding the both ends in the width direction is the air It is supported by levitation means and is conveyed.
    The plurality of rollers include a driving roller,
    A flat plate conveyance drive unit is installed in the flat plate conveyance drive unit installation area between the work positions in the production line, and is rotated and integrated with the drive roller. The drive roller is rotated by driving the flat plate conveyance drive unit. A flat plate conveying apparatus configured to convey a flat plate, wherein the air discharge means is provided so as to surround the flat plate conveyance driving unit.
  5. 　請求項１ないし４のいずれか１項に記載の平板搬送装置において、
    　上記エア浮上手段及びエア排出手段の設置領域手前には、上記平板の搬送位置を検知する位置検知手段が設けられ、
    　上記エア浮上手段及びエア排出手段は、上記位置検知手段の検知信号に基づき各々の設置領域に平板が接近してから離れるまでの間、作動するように構成されていることを特徴とする平板搬送装置。     In the flat plate conveying apparatus according to any one of claims 1 to 4,
    Position detection means for detecting the transport position of the flat plate is provided in front of the installation area of the air levitation means and air discharge means,
    The air levitation means and the air discharge means are configured to operate from the approach of the flat plate to the installation area based on the detection signal of the position detection means until the flat plate moves away. apparatus.
  6. 　請求項１に記載の平板搬送装置において、
    　上記平板は、上記製造ラインを移動する吸着保持手段により中央部が吸着保持されるとともに、当該吸着保持部分を除く部分が上記エア浮上手段により浮上支持されて搬送され、
    　上記吸着保持手段は、上記製造ラインに沿って延びるガイドレールに移動可能に乗載された移動体と、該移動体に設けられ上記平板を吸着保持する吸着パッドと、上記移動体を移動させる駆動部とを備え、
    　上記ガイドレールには、エア排出口が長手方向全長に亘って連続又は間欠して貫通形成され、これらエア排出口により上記エア排出手段が構成されていることを特徴とする平板搬送装置。     In the flat plate conveying apparatus according to claim 1,
    The flat plate is sucked and held at the center by the sucking and holding means that moves along the manufacturing line, and the portion excluding the sucking and holding part is lifted and supported by the air levitation means, and conveyed.
    The suction holding means includes a movable body movably mounted on a guide rail extending along the production line, a suction pad provided on the movable body for sucking and holding the flat plate, and a drive for moving the movable body. With
    An air discharge port is formed through the guide rail continuously or intermittently over the entire length in the longitudinal direction, and the air discharge means is constituted by the air discharge port.
  7. 　請求項１ないし６のいずれか１項に記載の平板搬送装置において、
    　上記平板は、液晶表示パネルに使用するガラス基板であることを特徴とする平板搬送装置。     The flat plate conveying apparatus according to any one of claims 1 to 6,
    The flat plate conveying apparatus according to claim 1, wherein the flat plate is a glass substrate used for a liquid crystal display panel.
PCT/JP2011/001445 2010-05-24 2011-03-11 Apparatus for transferring flat board WO2011148548A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-118137 2010-05-24
JP2010118137 2010-05-24

Publications (1)

Publication Number Publication Date
WO2011148548A1 true WO2011148548A1 (en) 2011-12-01

Family

ID=45003550

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/001445 WO2011148548A1 (en) 2010-05-24 2011-03-11 Apparatus for transferring flat board

Country Status (1)

Country Link
WO (1) WO2011148548A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2905807A1 (en) * 2014-02-11 2015-08-12 Süss Microtec Lithography GmbH Method and apparatus for preventing the deformation of a substrate supported at its edge area
CN109132546A (en) * 2018-08-23 2019-01-04 通彩智能科技集团有限公司 A kind of thin board transfer apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061326U (en) * 1992-06-10 1994-01-11 村田機械株式会社 Roller conveyor
JPH09278181A (en) * 1996-04-11 1997-10-28 Canon Inc Work carrying device and carrying method
JPH09298137A (en) * 1996-03-08 1997-11-18 Kokusai Electric Co Ltd Substrate treating apparatus
JP2006024841A (en) * 2004-07-09 2006-01-26 Tohoku Univ Device for carrying flat member

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061326U (en) * 1992-06-10 1994-01-11 村田機械株式会社 Roller conveyor
JPH09298137A (en) * 1996-03-08 1997-11-18 Kokusai Electric Co Ltd Substrate treating apparatus
JPH09278181A (en) * 1996-04-11 1997-10-28 Canon Inc Work carrying device and carrying method
JP2006024841A (en) * 2004-07-09 2006-01-26 Tohoku Univ Device for carrying flat member

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2905807A1 (en) * 2014-02-11 2015-08-12 Süss Microtec Lithography GmbH Method and apparatus for preventing the deformation of a substrate supported at its edge area
WO2015121284A1 (en) * 2014-02-11 2015-08-20 Süss Microtec Lithography Gmbh Method and apparatus for preventing the deformation of a substrate supported at its edge area
CN106062941A (en) * 2014-02-11 2016-10-26 苏斯微技术光刻有限公司 Method and apparatus for preventing the deformation of a substrate supported at its edge area
US10103049B2 (en) 2014-02-11 2018-10-16 Suss Microtec Lithography Gmbh Method and apparatus for preventing the deformation of a substrate supported at its edge area
CN109132546A (en) * 2018-08-23 2019-01-04 通彩智能科技集团有限公司 A kind of thin board transfer apparatus

Similar Documents

Publication Publication Date Title
JP4197129B2 (en) Work transfer device
KR100596050B1 (en) Glass substrate transferring system
JP4344755B2 (en) Roller unit for thin plate material conveyance and thin plate material conveyance device
KR100900381B1 (en) Conveyer for sheet material and method for conveying sheet material
KR101365074B1 (en) Glass Edge Grinding System
JP2010207687A (en) Substrate conveying apparatus
JP4692924B2 (en) Protective sheet separating method and protective sheet separating apparatus
JP2017154966A (en) Substrate parting device and substrate conveying method of substrate parting device
JP2010232472A (en) Substrate transfer device and substrate processing apparatus
JP2004345744A (en) Pneumatic floating device and pneumatic floating type carrier
WO2008032456A1 (en) Substrate transfer apparatus and substrate transfer method
JP2008066661A (en) Substrate conveying apparatus, and substrate conveying method
JP2010245336A (en) Transfer-direction changing device and levitation transfer system
WO2011148548A1 (en) Apparatus for transferring flat board
JP4752858B2 (en) Plate-like body conveying device and control method thereof
WO2018180651A1 (en) Method and device for producing glass sheet
TWI635058B (en) Scribing device
JP2004026569A (en) Apparatus for working glass plate
JP4229670B2 (en) Method and apparatus for conveying thin plate material
JP5915358B2 (en) Transport device
JP2005067899A (en) Carrier system
JP2007250871A (en) Substrate transport apparatus
JP2011184186A (en) Floating conveying device and roller drive unit
WO2011148547A1 (en) Flat-plate conveying device
JP2011207552A (en) Floating carrying device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11786252

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11786252

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP