JPH09278181A - Work carrying device and carrying method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance yield and quality much more by reducing deflection occurring when sheet shaped works such as glass substrates and the like are carried on, and thereby preventing them from being degraded when the works are carried on. SOLUTION: A porous member 8 in a carbon series which is widely used by a commercial air static pressure bearing and the like, is provided roughly at the center portion along the carrying direction between the right and left frames 1 and 2 of a conveyor main body in such a way as to approach to the lower surface of a glass substrate G. The porous member 8 is formed in continuous length in the carrying direction, and is held by an air feeding plate 9. The air feeding plate 9 is held by a connection member 3 located at both ends in the carrying direction, and is formed with a plurality of air feeding grooves 10 opened upward, and the porous member 8 is disposed over the upper surface of the air feeding plate 9 in such a way as to block the aforesaid openings. The porous member 8 and the air feeding plate 9 form a static pressure receiving unit, and air fed into the air feeding grooves 10 is so designed as to be fed to the lower surface of the glass substrate G out of the porous member 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work transfer device, and more particularly to a work transfer device such as a conveyer and a work transfer method for transferring a glass substrate used for manufacturing a liquid crystal panel to each manufacturing process in a manufacturing line.

[0002]

2. Description of the Related Art Conventionally, as shown in FIGS. 9 and 10, a conveyor for conveying a glass substrate used for manufacturing a liquid crystal panel has a rectangular cross section having a predetermined length and width. It has a left frame 1, a right frame 2, and a connecting member 3 that connects the left frame and the right frame. The left frame 1 is provided with a plurality of left rollers 4'for supporting the vicinity of the edge portion of the glass substrate G along the transport direction, and the right frame 2 is provided with a plurality of right rollers for supporting the vicinity of the edge portion of the glass substrate G along the transport direction. Rollers 5'are provided, and the left and right rollers 5 are rotatably provided on the left and right frames 1 and 2, respectively. A central roller 8'is provided at the central portion of the shaft connecting the left frame 4'and the right frame 5 '. Further, the left frame 1 is provided with a plurality of left side rollers 6 that support an edge portion of the glass substrate G along the transport direction, and the right frame 2 is provided with a plurality of left side rollers 6 that support the edge portion of the glass substrate G along the transport direction. A right side roller 7 is provided.

In a conventional work transfer conveyor, a glass substrate G is sandwiched by a plurality of left and right rollers from the vicinity of both ends along the transfer direction, and the glass substrate G is transferred by rotating these rollers.

In addition, as the glass substrate G becomes larger and thinner, the center portion of the glass substrate may be bent due to its own weight. Therefore, a central roller 8'is arranged near the center of the glass substrate. The central portion of G is received from below to prevent the deflection due to its own weight.

[0005]

However, in the above prior art, the deflection of the central portion caused by the weight of the glass substrate is prevented by the roller arranged on the lower surface near the center and contacting the lower surface of the glass substrate. Due to this configuration, the following problems have occurred. That is, (1) Since the portion of the lower surface near the center of the glass substrate, which will be the pixel, comes into contact with the roller, fine dust or the like may adhere, resulting in poor quality.

(2) Since the rollers are arranged on the conveyor at a predetermined interval, when the glass substrate is transferred to the next roller, the edge of the glass substrate and the roller surface rub against each other and a part of the glass substrate is chipped, There is concern about dust and static electricity.

The present invention has been proposed in order to eliminate the above-mentioned drawbacks of the prior art. The object of the present invention is to reduce the deflection that occurs when a thin plate-like work such as a glass substrate is carried and to carry the work. Preventing quality deterioration due to
An object of the present invention is to provide a work transfer device and a transfer method capable of further improving yield and quality.

[0008]

In order to solve the above problems and achieve the object, a work transfer device of the present invention has the following constitution. That is, in a work transfer device that transfers a thin plate-shaped work, while supporting both ends of the work along the transfer direction, and supporting transfer means for transferring the work in a predetermined direction, and a central portion in the width direction of the work. And a pressing means for pressing upward by ejecting air from below.

Further, the work transfer method of the present invention has the following features. That is, a transport method for transporting a thin plate-shaped work from the previous process to the next process, in which a driving force is applied to the lower surface near both ends along the transport direction of the work to move the work in the transport direction, Air is jetted from below near the central portion of the work in the width direction and conveyed while being pressed upward.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[First Embodiment] <Conveyor Structure> FIG. 1 is a schematic perspective view of a work transfer conveyor according to a first embodiment, which best represents the features of the present invention.

In FIG. 1, the conveyor main body is provided with a left frame 1 having a rectangular cross section having a predetermined length and width, a right frame 2 thereof, and a connecting member 3 for connecting the left frame and the right frame, and a set of them. The three-dimensional body constitutes the outer shape of one unit of the conveyor main body, and a plurality of the one unit conveyors are connected to each other and put into the production line. The left frame 1 is provided with a plurality of left rollers 4 (five in FIG. 1) that support the vicinity of the edge of the glass substrate G along the transport direction, and each left roller 4 faces the right frame 2 of the left frame 1. It is provided rotatably below the side surface at a predetermined interval. Similarly, the right frame 2 is provided with a plurality of right rollers 5 (five in FIG. 1) that support the vicinity of the edge portion along the transport direction of the glass substrate.
Each right roller 5 is rotatably provided at a predetermined interval below a side surface of the right frame 2 facing the left frame 1. The left roller 4 and the right roller 5 are provided in the same number on the side surfaces of each frame in order to hold the left and right edges of the glass substrate G in good balance, and the glass substrate G is transported while being rotated in the transport direction by a driving unit (not shown). To do. Further, the left frame 1 is provided with a plurality of left side rollers 6 (two in FIG. 1) that support an edge portion along the transport direction of the glass substrate G, and each left side roller 6 is provided on the upper surface of the left frame 1. It is rotatably provided at a predetermined interval. Similarly, the right frame 2 is provided with a plurality of right side rollers 7 (two in FIG. 1) that support the edges of the glass substrate G along the transport direction, and each right side roller 7 is an upper surface of the right frame 2. It is rotatably provided at a predetermined interval. Left side roller 6
The right side roller 7 holds the left and right edges of the glass substrate to hold the straightness of the glass substrate G in the transport direction. A carbon-based porous member used for a commercially available aerostatic bearing or the like so as to be close to the lower surface of the glass substrate G at a substantially central portion between the left frame 1 and the right frame 2 along the transport direction. 8 are provided.
The porous member 8 is formed long in the transport direction and is held by the air supply plate 9. The air supply plate 9 is held by the connecting members 3 located at both ends in the transport direction, and a plurality of air supply grooves 10 (three in FIG. 1) having an opening at the top are formed, so that the openings are closed. The porous member 8 is arranged on the upper surface of the air supply plate 9. The porous member 8 and the air supply plate 9 constitute a static pressure receiving unit, and the air sent into the air supply groove 10 is supplied from the porous material 8 to the lower surface of the glass substrate G.

<Conveying Operation> Next, the conveying operation of the work conveying conveyor shown in FIG. 1 will be described. FIG. 2 is a side view in the width direction of the work transfer conveyor shown in FIG.

In FIG. 2, the air supply groove 1 of the air supply plate 9 is shown.
When pressurized clean air is supplied to 0 from an air supply mechanism (not shown), the clean air passes through the porous material 8 and is jetted at a predetermined pressure on the lower surface of the glass substrate G. Since both edge portions in the width direction of the glass substrate G are placed on the left roller 4 and the right roller 5, the center portion tries to bend due to its own weight, but the clean air pressure ejected from the surface of the porous member 8 It is lifted up by the action. In this way, the lower surface of the central portion of the glass substrate G can be horizontally transported without the need for a conventional physical contact holding means such as a roller.

The deflection correction amount of the glass substrate G is arbitrarily set by changing the supplied air pressure, the clearance C between the surface of the porous member 8 and the lower surface of the glass substrate G, the surface area of the porous member 8, and the like. can do.

[Second Embodiment] Next, a work transfer conveyor according to a second embodiment will be described. The same components as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

FIG. 3 is a schematic perspective view of the second embodiment of the work transfer conveyor, which best represents the features of the present invention. Further, FIG. 4 is a cross-sectional view in the width direction of the work transfer conveyor shown in FIG.

3 and 4, the work transfer conveyor of the second embodiment has a small diameter fine hole 30a (for example, .phi.0..0) instead of the porous material 8 constituting the static pressure receiving unit of the first embodiment. The plate 30 is formed with a large number of plates (about 05 mm to φ0.3 mm).

Also in the second embodiment, the same effect as that of the first embodiment can be obtained.

[Third Embodiment] Next, a work transfer conveyor according to a third embodiment will be described. The same components as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

FIG. 5 is a schematic perspective view of a work transfer conveyor of the third embodiment, which best represents the features of the present invention. 6 is a side view in the width direction of the work transfer conveyor shown in FIG.

5 and 6, in the third embodiment, the static pressure receiving unit of the first embodiment has substantially the same width as the width of the conveyor defined by the left frame 1 and the right frame 2. In the static pressure receiving unit, the air supply plate 19 has substantially the same size as the width of the conveyor, a large number of air supply grooves 20 (five in FIG. 5) are provided, and the porous member 18 is arranged on the upper surface of the air supply plate 19. It is configured by In the third embodiment, the left roller and the right roller for supporting the vicinity of both edges of the glass substrate G are omitted, and the static pressure receiving unit is used as a non-contact receiver. Since it can be received, only the left and right side rollers are required.

In the third embodiment, in addition to the effect of the first embodiment, the static pressure receiving unit has substantially the same size as the width direction, so that the left and right rollers can be omitted, and the conveyor structure can be simplified. The cost can be reduced.

[Fourth Embodiment] Next, a work transfer conveyor according to a fourth embodiment will be described. The same components as those in the second embodiment are designated by the same reference numerals and the description thereof will be omitted.

FIG. 7 is a schematic sectional view in the carrying direction of the work carrying conveyor according to the fourth embodiment, which best represents the features of the present invention.

In FIG. 7, in the fourth embodiment, the fine holes 30a of the porous member 30 are formed with an inclination angle θ with respect to the surface of the air supply plate in the conveying direction S, and the air is conveyed in the conveying direction. And make it squirt in the diagonal forward direction,
Without applying a driving force (rotational force) to the left and right rollers 4, 5, it is possible to generate a thrust force in the forward direction by the air pressure on the glass substrate G and carry it horizontally. The tilt angle θ
Is set to about 30 ° to 45 °, and the air ejection pressure is 0.
It is set to 1 to 0.2 kg / cm ^ 2 (^ 2 represents the square).

[Specifications of Glass Substrate and Conveyor] Specific values of the glass substrate and the conveyer applied in the above embodiments will be described. FIG. 8 is a perspective view showing the outer dimensions of the glass substrate G applied in each of the above embodiments.

In FIG. 8, a glass substrate G is a substrate for liquid crystal (LCD) whose surface state is a polished glass, and its dimensions are: width W: 360 to 650 mm length L: 460 to 850 mm thickness t: 0. 0.7 to 1.1 mm Weight: 500 to 1100 g (depending on the glass substrate size) can be handled, and in the present embodiment, (W ×
L × t) is (360 × 465 × 0.7 to 1.1) and the weight is about 500 g.

Further, the specifications of the conveyer are as follows: roller driving torque: 1 to 5 kg.cm (in this embodiment, about 4.3 kgcm) Air introduction pressure to the air supply groove: about 4
kg / cm ^ 2 Clearance C: It is set to 0.1 to 0.5 mm, and with an air pressure of 4 kg / cm ^ 2, it is possible to levitate a considerable heavy object like an air bearing.

Further, the transport conveyor of each of the above embodiments is
It can be used for transportation between almost all manufacturing processes in a liquid crystal manufacturing line, for example, cleaning process → drying process → coating process → baking process.

[Effect of Embodiment] Glass substrate G to be conveyed
Both end portions (outside the pixel effective range) are received by the left and right rollers 6 and 7, and a continuous static pressure receiving unit for supporting the glass substrate G in a non-contact manner by air jet is arranged in the central portion of the glass substrate G. Air is jetted upward from the surface of the static pressure receiving unit arranged in the lower part of the central portion of the glass substrate G to be conveyed, and acts to push up the lower surface of the glass substrate G by air pressure. That is,
There is an effect that the deflection near the central portion due to the weight of the thin flat plate glass is pushed up by the force of air pressure, so that the flatness can be conveyed with the flatness being guaranteed. Of course, since the primary air supplied to the static pressure receiving unit is clean air (for example, class 100 clean air) that has passed through a plurality of multi-stage filters, there is no fear of occurrence of defects due to adhesion of dust or the like. Further, it becomes possible for the supplied air to have a role as a static elimination blow for eliminating static electricity through an ionizer or the like.

In the future, as liquid crystal panels become larger and thinner, they will become larger and thinner (for example, 550 mm ×
(650 mm × 0.7 mm) The yield can be expected to be improved in the entire manufacturing line that requires the glass substrate to be transported in a horizontal state, and it will greatly contribute to the cost reduction of the liquid crystal panel. Also, as for safety, there is no need to worry because it uses air.

The present invention can be applied to a modified or modified version of the above embodiment without departing from the spirit of the present invention.

[0034]

As described above, according to the present invention,
When transporting a thin plate-shaped work, while supporting the vicinity of both ends in the transport direction of the work and supporting and transporting means for transporting the work in a predetermined direction, air is blown from below in the vicinity of the central portion in the width direction of the work. Therefore, a pressing means for pressing upward is provided.

Further, when a thin plate-shaped work is conveyed from the previous step to the next step, a driving force is applied to the vicinity of the lower surface of both ends along the conveyance direction of the work to move the work in the conveyance direction and the width of the work. Air is ejected from below in the vicinity of the central portion in the direction and is conveyed while being pressed upward.

Therefore, during conveyance of the work, the deflection near the central portion caused by its own weight is not corrected by contacting with a roller as in the conventional case, but air is blown from below so that the deflection is not applied to the work. It is possible to correct by contact, and it is possible to significantly reduce quality defects due to dust adhesion and static electricity generated by conventional roller contact.

[0037]

[Brief description of drawings]

FIG. 1 is a schematic perspective view of a work transfer conveyor according to a first embodiment that best represents the features of the present invention.

FIG. 2 is a side view in the width direction of the work transfer conveyor shown in FIG.

FIG. 3 is a schematic perspective view of a work transfer conveyor according to a second embodiment that best represents the features of the present invention.

4 is a cross-sectional view of the work transfer conveyor shown in FIG. 3 in the width direction.

FIG. 5 is a schematic perspective view of a work transfer conveyor according to a third embodiment that best represents the features of the present invention.

6 is a side view in the width direction of the work transfer conveyor shown in FIG.

FIG. 7 is a schematic cross-sectional view in the carrying direction of a work carrying conveyor according to a fourth embodiment that best represents the features of the present invention.

FIG. 8 is a perspective view showing external dimensions of a glass substrate G applied in each embodiment.

FIG. 9 is a schematic perspective view of a conventional work transfer conveyor.

FIG. 10 is a side view in the width direction of the work transfer conveyor shown in FIG.

[Explanation of symbols]

 1 Left Frame 2 Right Frame 3 Connecting Member 4 Left Roller 5 Right Roller 6 Left Side Roller 7 Right Side Roller 8, 18 Porous Material 9, 19, 30 Air Supply Plate 10 Air Supply Groove

Claims (9)

[Claims] 1. A work transfer device for transferring a thin plate-like work, and a support transfer means for supporting both ends of the work in the transfer direction and for transferring the work in a predetermined direction; A work transfer device comprising: a pressing unit that presses upward in the vicinity of the central portion by ejecting air from below. 2. The pressing means comprises an air supply plate having an air supply groove for introducing the air from the outside, and a porous member arranged so as to close an opening of the air supply groove. The work transfer device according to claim 1, wherein the work transfer device is provided. 3. The pressing member includes an air supply plate having an air supply groove for introducing the air from the outside, and a plate member having a plurality of fine holes arranged so as to close an opening of the air supply groove. The work transfer device according to claim 1, further comprising: 4. The work transfer device according to claim 1, wherein the pressing unit includes the support transfer unit. 5. The fine holes are formed to be inclined with respect to the surface of the air supply plate by a predetermined angle in the carrying direction, and the air is ejected in an obliquely forward direction with respect to the carrying direction. The work transfer device according to claim 3. 6. The work transfer device according to claim 1, wherein the work is a glass substrate for a liquid crystal display. 7. A transport method for transporting a thin plate-shaped work from a previous process to a next process, wherein a driving force is applied to the lower surface of both ends along the transport direction of the work to move the work in the transport direction. At the same time, the work is conveyed by ejecting air from below near the central portion in the width direction of the work and pushing the air upward. 8. The work transfer method according to claim 7, wherein the work is transferred by ejecting the air obliquely forward with respect to the transfer direction. 9. The work transfer method according to claim 7, wherein the work is a glass substrate for a liquid crystal display.