CN110760811B

CN110760811B - Turning device and vacuum coating equipment

Info

Publication number: CN110760811B
Application number: CN201911181284.8A
Authority: CN
Inventors: 金晨; 杨卓; 李建银
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2019-11-27
Filing date: 2019-11-27
Publication date: 2021-08-06
Anticipated expiration: 2039-11-27
Also published as: CN110760811A

Abstract

The invention provides a turnover device and vacuum coating equipment, wherein the turnover device comprises a turnover frame, two first clamping mechanisms arranged on the turnover frame relatively, two carrier assemblies respectively connected with the two first clamping mechanisms and two second clamping mechanisms respectively arranged on the two carrier assemblies, wherein each carrier assembly is used for bearing a tray; the two first clamping mechanisms are used for respectively applying pressure to the peripheral edges of the two carrier table components so as to clamp the two trays arranged between the two carrier table components; the two second clamping mechanisms are used for respectively applying pressure to the appointed positions of the two trays arranged on the two carrying platform assemblies, and the appointed positions are positions corresponding to the substrates on the trays. The turnover device provided by the invention can prevent the surface of the substrate from being damaged or falling off in the turnover process, and improve the reliability and stability of turnover clamping, thereby improving the production efficiency and the product quality.

Description

Turning device and vacuum coating equipment

Technical Field

The invention relates to the technical field of semiconductor processing, in particular to a turnover device and vacuum coating equipment.

Background

In the field of rare earth magnetic material production, the surface of a neodymium iron boron substrate needs to be subjected to deposition treatment by using a vacuum coating production line. During the process, the neodymium iron boron substrate is uniformly placed on the tray, the tray sequentially enters a process chamber of a production line for coating, and the substrate needs to be turned over after the coating of one surface of the substrate is finished according to the process requirements, so that the coating of the other surface of the substrate is facilitated. In order to realize efficient automatic production, a turnover device is required to be arranged outside the process chamber, and the turnover device is used for turning over the substrate between the two trays by fixing the two trays in a clamping manner and turning over the two trays.

However, the existing turnover mechanism often causes damage to the surface of the substrate in the turnover process, even causes the substrate to fall off, and seriously affects the production rhythm and the product quality.

Disclosure of Invention

The invention aims to at least solve one of the technical problems in the prior art, and provides a turnover device and vacuum coating equipment, which can prevent a substrate from being damaged or falling off in the turnover process, and improve the reliability and stability of turnover clamping, thereby improving the production efficiency and the product quality.

In order to achieve the above object, the present invention provides a turnover device, which comprises a turnover frame, two first clamping mechanisms oppositely arranged on the turnover frame, two carrier assemblies respectively connected with the two first clamping mechanisms, and two second clamping mechanisms respectively arranged on the two carrier assemblies, wherein,

each carrying platform assembly is used for carrying a tray;

the two first clamping mechanisms are used for respectively applying pressure to the peripheral edges of the two carrier assemblies so as to clamp the two trays arranged between the two carrier assemblies;

the two second clamping mechanisms are used for respectively applying pressure to specified positions of the two trays arranged on the two carrying platform assemblies, and the specified positions are positions corresponding to the substrates on the trays.

Optionally, each of the stage assemblies includes:

a stage;

and the conveying mechanism is arranged on the carrying platform and is used for conveying the tray.

Optionally, the conveying mechanism includes a conveyor belt mechanism or a roller mechanism.

Optionally, each of the first clamping mechanisms includes a first linear driving source, the first linear driving source is located on a side of the stage assembly away from the carrying surface for carrying the tray, and a driving shaft of the linear driving source is perpendicular to the carrying surface and is fixedly connected to the stage assembly.

Optionally, each of the second clamping mechanisms includes:

the number of the compression plates is the same as that of the substrates on the tray, the compression plates are arranged in a one-to-one correspondence manner, and each compression plate is positioned on one side of the bearing surface of the carrier assembly, which bears the tray, and is parallel to the bearing surface;

and the second linear driving source is used for driving each pressing plate to move along the direction vertical to the bearing surface.

Optionally, each of the second clamping mechanisms further includes a height adjustment assembly for adjusting a distance between the pressing plate and the tray when the pressing plate is at the initial position.

Optionally, the height adjustment assembly includes:

the fixing plate is fixedly connected with a driving shaft of the second linear driving source, a first threaded hole and a second threaded hole are formed in the fixing plate, and the axes of the first threaded hole and the second threaded hole are perpendicular to the pressing plate; the second threaded holes are multiple and are symmetrically distributed relative to the axis of the first threaded hole;

the compression bolt is matched with the first threaded hole, and one end of the compression bolt abuts against the compression plate;

and the fixing bolts are matched with the second threaded holes in a one-to-one correspondence manner, and one end of each fixing bolt is connected with the pressing plate.

Optionally, the turnover device further includes two restoring mechanisms respectively disposed on the two stage assemblies, each restoring mechanism includes two restoring assemblies, the two restoring assemblies are disposed on two sides of a carrying surface parallel to the stage assembly and carrying the tray, and are configured to fix the tray at a position of the stage assembly corresponding to the carrying surface.

Optionally, each of the normalization components includes:

the third linear driving source is arranged on the carrying platform assembly;

a connecting bracket fixedly connected with a driving shaft of the third linear driving source;

and one end of the bolt is fixedly connected with the connecting support, and the other end of the bolt, which is far away from the connecting support, is driven by the third linear driving source to move into or out of the limiting hole on one side of the tray.

Optionally, the turning device further includes:

a chassis;

and the overturning driving mechanism is arranged on the bottom frame, is connected with the overturning frame and is used for driving the overturning frame to overturn so as to enable the bearing surface of one of the carrier assemblies, which bears the tray, to face upwards.

As another technical solution, the present invention further provides a vacuum coating apparatus, which includes a feeding table, a processing chamber group, and a discharging table, and is characterized in that the vacuum coating apparatus further includes the above-mentioned turnover device provided by the present invention, for making the unprocessed surface of the substrate carried by the tray face upward.

The invention has the beneficial effects that:

according to the turnover device provided by the invention, the first clamping mechanism is used for respectively applying pressure to the peripheral edges of the two carrier platform components, so that the two trays arranged between the two carrier platform components can be clamped, and the second clamping mechanism is used for applying pressure to the positions, corresponding to the substrates on the trays, of the trays, so that the substrates on the trays can be guaranteed to be clamped, the surfaces of the substrates can be prevented from being damaged or falling off in the turnover process, the reliability and stability of turnover clamping are improved, and the production efficiency and the product quality can be improved.

According to the vacuum coating equipment provided by the invention, by adopting the turnover device provided by the invention, the surface of the substrate can be prevented from being damaged or falling in the turnover process, and the reliability and stability of turnover clamping are improved, so that the production efficiency and the product quality can be improved.

Drawings

Fig. 1 is a structural diagram of a turning device according to an embodiment of the present invention;

FIG. 2 is a diagram of a structure of a carrier assembly on a carrying side according to an embodiment of the present invention;

FIG. 3 is a block diagram of a tray used in an embodiment of the present invention;

FIG. 4 is a partial block diagram of a second clamping mechanism employed in an embodiment of the present invention;

FIG. 5 is a cross-sectional view of a centering mechanism employed in an embodiment of the present invention;

fig. 6 is a diagram illustrating a turning state of the turning device according to the embodiment of the present invention;

fig. 7 is a structural diagram of a vacuum plating apparatus according to an embodiment of the present invention.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the turning device and the vacuum coating apparatus provided by the present invention are described in detail below with reference to the accompanying drawings.

Referring to fig. 1 to 6, the turning device of the present embodiment includes a turning frame 1 that can be turned, two first clamping mechanisms 3 oppositely disposed on the turning frame 1, two stage assemblies respectively connected to the two first clamping mechanisms 3, and two second clamping mechanisms 4 respectively disposed on the two stage assemblies.

In this embodiment, the two stage assemblies each include a stage 2, the stages 2 of the two stage assemblies are disposed opposite to each other, and two surfaces opposite to each other are bearing surfaces for bearing the tray 10.

The two first clamping mechanisms 3 are configured to apply pressure to the peripheral edges of the two stages 2, respectively, to clamp the two trays 10 placed between the two stages 2, thereby indirectly clamping the substrate between the two trays 10. The two second clamping mechanisms 4 are used to apply pressure to specified positions of the two trays 10 placed on the two stages 2, respectively, the specified positions being positions corresponding to substrates on the trays 10.

The first clamping mechanism 3 is used to apply pressure to the stages 2 to clamp the two stages 2, thereby indirectly clamping the two trays 10 for the purpose of pre-clamping the trays 10. The second clamping mechanism 4 directly applies pressure to the tray 10 to further clamp the two trays 10, and meanwhile, the pressure is applied to the position, corresponding to the substrate, of the tray 10, so that each substrate on the tray 10 can be guaranteed to be clamped, the surface of the substrate can be prevented from being damaged or falling in the overturning process, the reliability and the stability of overturning clamping are improved, and the production efficiency and the product quality can be improved.

In the present embodiment, as shown in fig. 2, each stage assembly further includes a conveying mechanism 6, and the conveying mechanism 6 is disposed on the stage 2 and located at one side of the carrying surface, and is used for conveying the tray 10, so as to realize automatic loading and unloading of the tray 10. Specifically, the transport mechanism 6 employs a roller mechanism including a plurality of transmission shafts 61, a servo motor 62, a chain 63, and reinforcing ribs 64. The plurality of transmission shafts 61 are rotatably disposed on the carrying surface of the stage 2, and are arranged at intervals along a predetermined direction (for example, an X direction shown in fig. 2) and are parallel to each other. The servo motor 62 drives all the transmission shafts 61 to rotate synchronously through a chain 63 provided at one end of each of the transmission shafts 61, thereby moving the tray 10 placed on the transmission shafts 61. In addition, the reinforcing ribs 64 are provided at the middle position of each of the transmission shafts 61 and perpendicular to each of the transmission shafts 61, for improving the strength of the transmission shafts 61 and preventing the transmission shafts 61 from being bent.

It should be noted that the present invention is not limited to the above roller mechanism provided in this embodiment, and in practical applications, the conveying mechanism may also be any other mechanism that can achieve automatic loading and unloading of the tray 10, such as a conveyor mechanism.

In the present embodiment, as shown in fig. 1, each first clamping mechanism 3 includes a first linear drive source which is fixedly connected to the roll-over stand 1 and is located on the side of the carrying surface of the stage 2 away from the carrying tray 10, and a drive shaft of the linear drive source is perpendicular to the carrying surface of the stage 2 and is fixedly connected to the stage 2. Under the drive of the linear drive source, the carrier 2 can move in the direction perpendicular to the carrying surface, so that the two carriers 2 can be moved close to or away from each other, that is, the clamping function of the two carriers 2 is realized. The first linear drive source is, for example, a cylinder.

Optionally, at least two first linear driving sources are disposed on a side of each stage 2 away from the carrying surface, for example, one first linear driving source is disposed at each of four corners of each stage 2.

In the present embodiment, as shown in fig. 2 to 4, each of the second clamping mechanisms 4 includes the pressing plates 41 and the second linear drive sources 44, wherein the number of the pressing plates 41 is the same as the number of the substrates on the tray 10, and is provided in one-to-one correspondence, for example, fig. 3 shows a tray 10 whose surface is divided into 9 regions each for carrying one substrate, in the tray 10. Correspondingly, the number of the pressing plates 41 is 9, and the position of each pressing plate 41 corresponds to each area one by one. Moreover, each pressing plate 41 is positioned at one side of the bearing surface of the carrier 2 and is parallel to the bearing surface; the second linear driving source 44 is used for driving each pressing plate 41 to move in a direction perpendicular to the bearing surface, so that each pressing plate 41 is close to or far away from the tray 10, i.e. the clamping function of the tray 10 is realized. The second linear drive source 44 is, for example, an air cylinder.

It should be noted that, in order to avoid the second clamping mechanism 4 interfering with the movement of the tray 10 placed on the transfer mechanism 6, each pressing plate 41 should be lower than the transfer mechanism 6 when the transfer mechanism 6 is operated.

In addition, as shown in fig. 2, each of the pressing plates adjacent to the reinforcing bead 64 is composed of two sub-plates 41b due to the presence of the reinforcing bead 64, and the two sub-plates 41b are respectively provided on both sides of the reinforcing bead 64. While the compacting plates remote from the ribs 64 are a single flat plate 41 a.

In the present embodiment, each second clamping mechanism 4 further includes a height adjustment assembly for adjusting the distance between the pressing plate 41 and the tray 10 at the initial position. Therefore, the substrate with different thickness specifications can be clamped, and the problem that the substrate cannot be clamped due to high-temperature deformation of the tray 10 after film coating can be solved. Specifically, as shown in fig. 4, the height adjusting assembly includes a fixing plate 45, a pressing bolt 42, and a plurality of fixing bolts 43. Wherein, the fixed plate 45 is fixedly connected with the driving shaft of the second linear driving source 44, and both ends of the fixed plate 45 are used for respectively fixing the single flat plate 41a and the single sub-plate 41b, that is, the second linear driving source 44 synchronously drives the single flat plate 41a and the single sub-plate 41b to synchronously move. Of course, in practical applications, the connection mode of the second linear driving source 44 and each pressing plate 41 may be set arbitrarily.

In the present embodiment, two height adjustment assemblies are provided on the same fixing plate 45 for adjusting the heights of the flat plate 41a and the sub-plate 41b, respectively. The structure of the height adjusting assembly will be described in detail below by taking the height adjusting assembly of the flat plate 41a as an example, specifically, a first threaded hole and a second threaded hole (not shown in the figure) are provided in the fixing plate 45 corresponding to the flat plate 41a, and the axes of the first threaded hole and the second threaded hole are perpendicular to the flat plate 41 a; the second threaded holes are multiple and are symmetrically distributed relative to the axis of the first threaded hole. The pressing bolt 42 is engaged with the first threaded hole, and one end of the pressing bolt 42 abuts against the flat plate 41a, and by screwing or unscrewing the pressing bolt 42, the pressing bolt 42 can be moved relative to the fixing plate 45 in a direction perpendicular to the flat plate 41a, so that the height of the flat plate 41a can be adjusted.

The plurality of fixing bolts 43 are fitted with the plurality of second screw holes in one-to-one correspondence, and one end of each fixing bolt 43 is connected to the flat plate 41 a. By screwing or unscrewing the fixing bolts 43, the fixing bolts 43 can be moved relative to the fixing plate 45 in a direction perpendicular to the flat plate 41a, so that the height of the flat plate 41a can be adjusted, and at the same time, the levelness of the flat plate 41a can be adjusted by adjusting the difference in height between the fixing bolts 43. In addition, the plurality of fixing bolts 43 are symmetrically distributed around the pressing bolt 42, so that the flat plate 41a can be prevented from being inclined when receiving uneven force, and the reliability and stability of the turning clamping can be further improved.

In this embodiment, as shown in fig. 1 and fig. 2, the turnover device further includes two restoring mechanisms 5, which are respectively disposed on the two stages 2 and located at one side of the carrying surface. Each of the correcting mechanisms 5 includes two correcting members, and the two correcting members are disposed on two sides of the carrying surface of the carrier 2, so as to fix the tray 10 at a position of the carrier 2 corresponding to the carrying surface, thereby achieving fixing and limiting effects.

Specifically, as shown in fig. 5, each of the return assemblies includes a third linear drive source 51, a connecting bracket 53, and a latch 54, wherein the third linear drive source 51 is fixed on the stage 2 by a fixing member 52; the connecting bracket 53 is fixedly connected with the driving shaft of the third linear driving source 51; one end of the latch 54 is fixedly connected to the connecting bracket 53, and the other end of the latch 54, which is far away from the connecting bracket 53, can move into or out of the limiting hole 101 on one side of the tray 10 under the driving of the third linear driving source 51. The third linear drive source 51 is, for example, an air cylinder.

In use, under the driving of the third linear driving source 51, the pins 54 of the two oppositely arranged righting assemblies can move into the two limiting holes 101 on the opposite side of the tray 10, so as to limit the tray 10 between the pins 54 of the two righting assemblies, thereby realizing the fixing and limiting functions.

It should be noted that the two centering assemblies should be arranged opposite to each other in a direction perpendicular to the moving direction of the tray 10 to avoid interference with the movement of the tray 10. In addition, if two oppositely disposed righting assemblies are regarded as one limiting unit, a plurality of limiting units can be disposed at intervals in the moving direction parallel to the tray 10, so as to improve the stability and reliability of the structure.

In the present embodiment, as shown in fig. 1, the turnover device further includes a bottom frame 9 and a turnover driving mechanism disposed on the bottom frame 9, wherein the turnover driving mechanism includes a turnover shaft 8 and a rotation driving source 7, wherein the turnover shaft 8 is rotatably disposed on the bottom frame 9 and is fixedly connected to the turnover frame 1; the rotary driving source is used for driving the turnover frame 1 to turn over through the turnover shaft 8 so that the bearing surface of one carrier 2 faces upwards. Fig. 6 shows a turning situation of the roll-stand 1.

When in use, an empty tray is preset on the carrying platform 2 with one bearing surface facing upwards through the transmission device 6, and the empty tray is corrected and fixed by the correcting mechanism 5; and then, the overturning frame 1 is overturned at 180 ℃ by utilizing an overturning driving mechanism until the bearing surface of the carrier 2 carrying the empty tray faces downwards, and the bearing surface of the other carrier 2 faces upwards. Then, the strip tray bearing the substrate enters a loading platform 2 with an upward bearing surface from a coating production line through an automatic transmission device, and the strip tray is fixed by a correcting mechanism 5; then, the two stages 2 are driven by the first clamping mechanism 3 to move in the direction to approach each other until the empty tray and the belted tray between the two stages 2 are pre-clamped, at which time the substrate between the empty tray and the belted tray is clamped therebetween.

Then, the areas of the tray 10 corresponding to the substrates are synchronously clamped by the second clamping mechanism 4, so that all the substrates in the tray 10 can be clamped, then the overturning frame is driven by the overturning driving mechanism to overturn at 180 ℃, so that the bearing surface of the carrying platform 2 carrying the empty tray faces upwards, the bearing surface of the carrying platform 2 carrying the tray to be loaded faces downwards, and at the moment, the substrates are naturally carried by the original empty tray, and the surface without film plating faces upwards. And then, the second clamping mechanism 4 and the first clamping mechanism 3 are sequentially loosened, the correcting mechanism 5 on the carrying platform 2 with the bearing surface facing upwards is opened, and the film is conveyed back to the film coating production line through the transmission mechanism 6 to be coated again. In addition, the original tape tray becomes an empty tray, which can be left on the carrier 2 for the next turn-over.

In summary, in the turnover device provided in the embodiments of the present invention, the first clamping mechanism applies pressure to the peripheral edges of the two stage assemblies, respectively, so as to clamp the two trays disposed between the two stage assemblies, and the second clamping mechanism applies pressure to the positions of the trays corresponding to the substrates thereon, so as to ensure that the substrates on the trays can be clamped, thereby preventing the substrates from being damaged or falling off during the turnover process, and improving the reliability and stability of the turnover clamping, so as to improve the production efficiency and the product quality.

As another technical solution, referring to fig. 7, an embodiment of the present invention further provides a vacuum coating apparatus 200, where the vacuum coating apparatus 200 includes a feeding table 201, a processing chamber group, and a discharging table 208, which are sequentially arranged in a production order. Specifically, the processing chamber group comprises a sample inlet chamber 202, a cleaning chamber 203, a coating chamber 204, a buffer chamber 205, a temperature reduction chamber 206 and a sample outlet chamber 207 in sequence. The sample chamber 3 is connected to a vacuum system 209, and the vacuum system 209 is used for controlling the chamber pressure of the sample chamber 202 so as to make the vacuum degree in the chamber meet the process requirement. The cleaning chamber 203 is used for removing impurities such as oxides, oil stains, particles and the like on the surface of the substrate by adopting a plasma cleaning mode, and simultaneously, the surface roughness of the substrate is increased, so that the improvement of the coating quality is facilitated. The coating chamber 204 is used to coat the substrate. The buffer chamber 205 is used for placing the substrate on which the coating is completed. The cooling chamber 206 is used to cool the substrate. The sample outlet chamber 207 is used to convert the vacuum environment to an atmospheric environment. The feed stage 201 and the discharge stage 208 are located on the inlet side of the sample entry chamber 202 and the outlet side of the sample exit chamber 207, respectively. In addition, the vacuum coating apparatus 200 further includes a manufacturing line (not shown) for transferring trays to successively transfer the trays carrying the substrates to the corresponding chambers in a manufacturing order.

It should be noted that the chambers included in the vacuum coating apparatus are not limited to the above-mentioned chambers mentioned in this embodiment, and in practical applications, the corresponding chambers may be added or deleted according to specific needs.

The vacuum coating apparatus 200 further comprises a turnover device 210, wherein the turnover device 210 is disposed at an inlet side of the feeding table 201, and is used for turning over the substrate after coating one side of the substrate is finished so that the unprocessed side of the substrate faces upwards.

Of course, in practical applications, the turning device 210 may also be disposed on the outlet side of the discharging table 208, or on the feeding table 201 or the discharging table 208.

According to the vacuum coating equipment provided by the embodiment of the invention, by adopting the turnover device provided by the embodiment of the invention, the surface of the substrate can be prevented from being damaged or falling in the turnover process, and the reliability and stability of turnover clamping are improved, so that the production efficiency and the product quality can be improved.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims

1. A turnover device is characterized by comprising a turnover frame, two first clamping mechanisms arranged on the turnover frame oppositely, two carrier assemblies connected with the two first clamping mechanisms respectively, and two second clamping mechanisms arranged on the two carrier assemblies respectively, wherein,

each carrying platform assembly is used for carrying a tray;

2. The flipping mechanism of claim 1, wherein each of the stage assemblies comprises:

a stage;

3. The flipping mechanism of claim 2, wherein the transport mechanism comprises a conveyor belt mechanism or a roller mechanism.

4. The flipping apparatus of any one of claims 1 to 3, wherein each of the first clamping mechanisms comprises a first linear drive source located on a side of the stage assembly away from a carrying surface carrying the tray, and wherein a drive shaft of the linear drive source is perpendicular to the carrying surface and is fixedly connected to the stage assembly.

5. The flipping mechanism of any one of claims 1-3, wherein each of the second clamping mechanisms comprises:

6. The flipping mechanism of claim 5, wherein each of the second clamping mechanisms further comprises a height adjustment assembly for adjusting a spacing between the compacting plate and the tray when in the initial position.

7. The flipping mechanism of claim 6, wherein the height adjustment assembly comprises:

8. The turnover device of claim 1, further comprising two aligning mechanisms respectively disposed on the two stage assemblies, wherein each aligning mechanism comprises two aligning members, and the two aligning members are disposed opposite to each other on two sides parallel to a carrying surface of the stage assembly, the carrying surface carrying the tray, so as to fix the tray at a position of the stage assembly corresponding to the carrying surface.

9. The flipping mechanism of claim 8, wherein each of the righting assemblies comprises:

the third linear driving source is arranged on the carrying platform assembly;

10. The flipping mechanism of claim 1, further comprising:

a chassis;

11. A vacuum coating apparatus comprising an inlet table, a set of process chambers and an outlet table, characterized in that the vacuum coating apparatus further comprises a turning device according to any one of claims 1 to 10 for turning the unprocessed side of the substrate carried by the tray upward.