JP2011242534A - Substrate conveyance apparatus and correction of inclination of substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To correct the inclination of a substrate while the substrate is moving.SOLUTION: A substrate conveyance line 5 is composed of a left-side roller conveyor 5L, which is on the left side with respect to the conveyance direction (indicated by the arrow) of a lower substrate 1, and a right-side conveyor 5R, which is on the right side. The left-side roller conveyor 5L has a line of rollers 21a in the conveyance direction of the lower substrate 1, and the right-side roller conveyor 5R also has a line of rollers 21b in the conveyance direction of the lower substrate 1. They are provided with corresponding substrate detection sensors, 24a and 24b. If the lower substrate 1 being conveyed is inclined as shown in FIG. 2(b), the substrate detection sensors 24a and 24b of the roller conveyors 5L and 5R respectively detect the degree and direction of this inclination from a time difference between the timings of detection of the corresponding edges of the lower substrate 1. According to the detection result, the conveying speed of the rollers 21a of the roller conveyor 5L or the rollers 21b of the roller conveyor 5R is made different from a constant speed. The lower substrate 1 is rotated by the inclination angle.

Description

  The present invention relates to a substrate bonding system for a liquid crystal substrate, and more particularly, to a substrate transfer apparatus and a substrate tilt correction that reduce the time required for completion of bonding and minimize the substrate transfer operation by a robot in the system. .

  In the production of a liquid crystal display panel, an adhesive (hereinafter also referred to as a sealing agent) provided on the peripheral edge of a substrate with two glass substrates provided with a transparent electrode and a thin film transistor array at a very close distance of about several μm. And bonding (hereinafter, the substrate after bonding is referred to as a liquid crystal display panel), and there is a step of sealing the liquid crystal in the space between the substrates formed thereby.

  For sealing the liquid crystal, liquid crystal is dropped on one substrate drawn in a pattern in which a sealing agent is closed so as not to provide an injection port, and the other substrate is placed on the one substrate in a vacuum chamber. There is a method in which the upper and lower substrates are brought close to each other and bonded together.

  As a conventional method of laminating a liquid crystal substrate, a method is known in which a spare chamber is provided for loading / unloading a substrate into / from the vacuum chamber, and the substrate is loaded / removed in the same atmosphere as the spare chamber. (For example, refer to Patent Document 1).

  This Patent Document 1 also discloses that an upper substrate and a lower substrate are placed on a conveying jig and conveyed on a conveyor from a preliminary chamber to a bonding chamber.

  As another conventional example, the lower substrate is transferred from the first load chamber to the assembly device via the spacer spraying device, the sealing material coating device, the liquid crystal injection device, and the first preliminary alignment device, and the upper substrate is transferred to the second load chamber. Then, the two substrates are transported to the same assembly apparatus through the second preliminary alignment chamber and the preliminary chamber, and the two substrates are bonded together by the assembly apparatus, and then bonded through the sealing material curing device, the heat treatment device, and the substrate cutting device. A system for sending a substrate to an unload apparatus is known (for example, see Patent Document 2).

  Furthermore, as another conventional example, there has been proposed a printed board transport conveyor provided with a mechanism that mechanically corrects the positioning and inclination of the board (see, for example, Patent Document 3).

JP 2001-305563 A JP 2003-15101 A JP-A-10-310220

  In the technique described in Patent Document 1, in the liquid crystal substrate assembly system, when the substrate is put in and out of the bonding chamber (vacuum chamber) for bonding the substrates, the bonding chamber has the same atmosphere as the spare chamber. In addition, the bonding chamber is always kept in a vacuum state, and two substrates to be bonded together in the atmospheric state are carried into one auxiliary chamber provided on one side of the bonding chamber. The chamber is evacuated and the two substrates are transferred from the spare chamber to the bonding chamber. In the bonding chamber, these substrates are bonded to each other by holding the substrates on the upper table and the lower table and lowering the upper table onto the lower substrate held on the lower table. When the bonding of these two substrates is completed in the bonding chamber, the bonded substrates are discharged from the other spare chamber provided on the other side of the bonding chamber. Since the apparatus described in Patent Document 1 has such a configuration, the apparatus has a long structure and requires a large installation area.

  Moreover, since it is necessary to make each preliminary | backup room and bonding room into a vacuum state, it is necessary to arrange | position the apparatus for that, and also it has a limit in shortening a tact time because it takes time to make a vacuum state. is there. Furthermore, Patent Document 1 does not describe any relationship with the previous process. Furthermore, since the transfer jig is used for transferring the upper and lower substrates from the preliminary chamber to the bonding chamber, there is a problem that it takes time to transfer the substrate to the transfer jig.

  Further, the above-mentioned Patent Document 2 only describes that the substrate is moved between the apparatuses by the moving means, and a description of what conveying means is used to convey the substrate and deliver it to each apparatus. Is not disclosed at all.

  By the way, when a board | substrate is conveyed by a roller conveyor system, when mounting a board | substrate on a roller conveyor or a sudden stop of a roller conveyor, the board | substrate currently conveyed may incline at an angle with respect to the conveyance direction.

  Patent Document 3 describes a method for correcting the tilt of the substrate. When correcting the tilt of the substrate by this method, the substrate is stopped at a predetermined position, and then the stopped substrate is viewed from the side. Since the inclination is eliminated by pushing, it takes time to correct the inclination, and each mechanical mechanism for performing such an operation is required, resulting in a problem that the apparatus becomes large.

  The object of the present invention is to eliminate such problems, enable the substrate tilt correction to be performed while the substrate is moved, reduce the time required for the tilt correction, and realize the downsizing of the entire apparatus. It is another object of the present invention to provide a substrate transport apparatus and a substrate tilt correction method capable of transporting a substrate to a transport-destination mechanism unit without tilting.

  In order to achieve the above object, the present invention has a conveyor in which a left conveyor and a right conveyor are arranged in the left-right direction with respect to the conveyance direction of the substrate, and by driving the left conveyor and the right conveyor, A substrate transport device that transports a substrate at a steady speed, and is disposed on the left conveyor and the right conveyor at intervals in a direction perpendicular to the substrate transport direction, and detects a substrate to be transported, The inclination angle of the substrate to be conveyed is determined from the time difference between the substrate detection timings of the substrate detection sensor of the left conveyor and the substrate detection sensor of the right conveyor, and the substrate conveyance speed by the left conveyor is determined according to the inclination angle. And a control means for differentiating the substrate transfer speed by the right conveyor, and the substrate transfer speed by the left conveyor and the base by the right conveyor. With different and conveying speed, by rotating the substrate in the plane of the left conveyor and right conveyor is characterized in that for correcting the tilt of the substrate.

  In addition, the conveyor is composed of a plurality of section conveyors composed of a left conveyor and a right conveyor arranged in the substrate transport direction. For each section conveyor, the substrate inclination angle is detected, and the substrate is detected according to the detected inclination angle. By rotating, the tilt of the substrate is corrected.

  Furthermore, by increasing the speed of either the right-hand conveyor or the left-hand conveyor, the conveyor moves at a speed that is faster or slower than the steady speed on one side of the substrate that is being transported at a steady speed. Then, the substrate is rotated.

  In order to achieve the above object, according to the present invention, a left conveyor and a right conveyor are arranged in the left-right direction with respect to the substrate conveyance direction, and the substrate is conveyed at a steady speed by driving the left conveyor and the right conveyor. In this method, the left and right conveyors detect the substrate by a substrate detection sensor arranged in a direction perpendicular to the substrate transport direction, and based on the detection result. The board is detected on the left conveyor and the right conveyor by changing the board moving speed by the left conveyor and the board moving speed by the right conveyor according to the detected board inclination. The substrate is rotated while being transported at a speed to correct the tilt of the substrate.

  Further, according to the present invention, a plurality of section conveyors each including a left conveyor and a right conveyor are arranged in the substrate transport direction, and the inclination angle of the substrate is detected for each section conveyor, and the detected inclination angle is determined. Accordingly, the substrate tilt is corrected by rotating the substrate while transporting it at a steady speed.

  Further, according to the present invention, in the conveyor, by increasing the speed of either the right conveyor or the left conveyor, the moving speed on one side of the substrate conveyed at a steady speed is set to a speed higher than the steady speed or The substrate is rotated by moving at a slow speed.

  According to the present invention, a bonding device, a sealing agent curing device (ultraviolet irradiation device), and the like are arranged almost in series from a coating device that applies a sealing agent for substrate bonding, and a lower substrate and a liquid crystal that has been bonded. Because the panel is transported using a roller conveyor with separate left and right drive systems, the tilt of the substrate can be corrected in front of each device, and the upper and lower substrates can be simultaneously loaded into the laminating apparatus and laminating chamber. In addition, the manufacturing time of the liquid crystal panel can be greatly shortened, and the substrate tilt correction is performed before the apparatus, so that the coating and bonding accuracy is greatly improved.

It is a top view which shows the whole arrangement | positioning of the liquid crystal panel assembly system provided with the board | substrate conveyance apparatus and board | substrate inclination correction method by this invention. It is a schematic block diagram which shows one Embodiment of the board | substrate conveyance apparatus and board | substrate inclination correction method by this invention in the liquid crystal panel assembly system shown in FIG. It is a schematic block diagram which shows other embodiment of the board | substrate conveyance apparatus by this invention in the liquid crystal panel assembly system shown in FIG. 1, and the board | substrate inclination correction method. It is a longitudinal cross-sectional view which shows one specific example of the substrate bonding chamber in FIG. 1, and the board | substrate carrying-in operation from the pre-processing chamber in this board | substrate bonding chamber, and the board | substrate carrying-out operation to a post-processing chamber.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a plan view showing the overall arrangement of a liquid crystal panel assembly system equipped with a substrate transfer apparatus and a substrate tilt correction method according to the present invention, wherein 1 is a lower substrate, 2 is an upper substrate, 3 is a substrate loading robot, 4 Is an alignment mechanism, 5 is a first transfer line (inline), 6 is a second transfer line (side line), 7 is a paste applicator (seal dispenser), 8 is a short-circuit electrode forming applicator, and 9 is a liquid crystal Dropping device, 10 is a first inspection chamber, 11 is a substrate reversing device, 12 is a transfer chamber, 13 is a robot hand, 14 is a pretreatment chamber, 15 is a substrate bonding chamber (vacuum chamber), and 16 is a posttreatment chamber. , 17 is an ultraviolet irradiation chamber, 18 is a second inspection room (panel inspection room), 19 is a bonded substrate (liquid crystal panel), and 20 is a third transport line.

  In the figure, a first transport line (inline) 5 for transporting a lower substrate 1 and a second transport line (side line) for transporting an upper substrate 2 on which a TFT (Thin Film Transistor) is formed. ) 6 is provided. The 1st conveyance line 5 and the 2nd conveyance line 6 which convey the cleaned upper board | substrate 2 and the lower board | substrate 1 are comprised by the roller conveyor or belt conveyor by which a roller is arranged in 1 row in the conveyance direction. . Two roller conveyors or belt conveyors are arranged so as to be divided in the left-right direction with respect to the moving direction of the substrate, and each of them can be driven and controlled separately by a separate driving mechanism. The following description is based on the configuration of the roller conveyor. The upper and lower substrates 1 and 2 are respectively conveyed on a roller conveyor.

  In front of the first transfer line 5, there are provided a substrate carry-in robot 3 for carrying the cleaned lower substrate 1 into this system, and an alignment mechanism 4 for aligning the lower substrate 1 from the substrate carry-in robot 3. . The lower substrate 1 is transferred from the alignment mechanism 4 to the first transport line 5, and the lower substrate 1 moves in the direction of the arrow on the first transport line 5 with its bonding surface facing up. A paste applicator (seal dispenser) 7 for applying a sealant (adhesive) in a ring shape (closed loop shape) on the lower substrate 1 is provided in the middle of the first transport line 5. A short-circuit electrode-forming applicator 8 for spot-applying the conductive paste is arranged in series with the paste applicator 7 (that is, on the downstream side).

  Further, a liquid crystal dropping device 9 for dropping a desired amount of liquid crystal in the loop of the sealing agent applied as described above is disposed on the downstream side of the short-circuit electrode forming applicator 8. On the downstream side of the liquid crystal dropping device 9, a first inspection chamber 10 for inspecting the state of the applied sealing agent, the dropped liquid crystal, and the like is disposed. The lower substrate 1 inspected in the first inspection chamber 10 is transferred to a third substrate provided between the pretreatment chamber 14 and the second inspection chamber 18 by a robot hand 13 provided in the transfer chamber 12. Delivered to the transfer line 20. The third transport line 20 is also formed by a roller conveyor. By the third transfer line 20, first, the lower substrate 1 is carried into the pretreatment chamber 14 on the substrate carry-in side. Furthermore, after the upper substrate 2 conveyed by the second carrying line 6 is reversed by the substrate reversing device 11, it is carried into the pretreatment chamber 14 by the robot hand 13 provided in the transfer chamber 12. Is done.

  Note that a robot hand (not shown) that holds the upper substrate 2 and carries it into the substrate bonding chamber (vacuum chamber) 15 and a roller conveyor (not shown) that conveys the lower substrate 1 also in the pretreatment chamber 14. And provided. Further, the pretreatment chamber 14 is provided with a conveyor expansion / contraction mechanism (not shown) for expanding and contracting the roller conveyor, and a gate valve (between the pretreatment chamber 14 and the substrate bonding chamber 15). When the roller is opened, the conveyor expansion / contraction mechanism allows the roller conveyor to be connected to the roller conveyor in the substrate bonding chamber 15 beyond the gate valve.

  When both the upper and lower substrates 1 and 2 are carried into the pretreatment chamber 14, a gate valve (not shown) provided at the substrate carry-in side entrance of the pretreatment chamber 14 is closed, and the inside of the pretreatment chamber 14 is shown in FIG. A vacuum pump (not shown) evacuates until a predetermined degree of vacuum (about 150 Torr: hereinafter referred to as a semi-vacuum). When the inside of the pretreatment chamber 14 is in a semi-vacuum state, the gate valve to the substrate bonding chamber 15 is opened, and the roller conveyor is extended to the substrate bonding chamber 15 side by the conveyor expansion / contraction mechanism, so that the substrate bonding chamber 15 is opened. Connected to a roller conveyor. The lower substrate 1 moves on the roller conveyor and is carried into the substrate bonding chamber 15, and the upper substrate 2 is carried into the substrate bonding chamber 15 by a robot hand. At this time, the inside of the substrate bonding chamber 15 is in a semi-vacuum state. In the pretreatment chamber 14, the lower substrate 1 is received and transferred to the lower table of the substrate bonding chamber 15. The roller conveyor is the third transfer line 20, and the upper substrate 2 is received on the substrate bonding chamber 15. A robot hand 28 (FIG. 4) for delivery to a table (pressure plate) 31 (FIG. 4) is provided. Details of receiving the substrates 1 and 2 in the substrate bonding chamber 15 will be described later.

When the transfer of both the substrates 1 and 2 in the substrate bonding chamber 15 is finished and the upper and lower substrates 1 and 2 are respectively held on the upper and lower tables 46 and 47 (FIG. 4), they are extended from the pretreatment chamber 14. The roller conveyor that has been retracted is retracted into the pretreatment chamber 14, and the gate valve is closed. Thereafter, the inside of the substrate bonding chamber 15 is evacuated until a high vacuum (about 5 × 10 ⁻³ Torr) is obtained. Thereafter, while aligning the upper and lower substrates 1 and 2, the upper table is lowered and the upper substrate 2 is bonded to the lower substrate 1. When this bonding is completed, the inside of the substrate bonding chamber 15 is returned to a half vacuum, and a gate valve (not shown) between the substrate bonding chamber 15 and the post-processing chamber 16 is opened. At this time, the post-processing chamber 16 is in a semi-vacuum state.

  The post-processing chamber 16 is also provided with a conveyor expansion / contraction mechanism (not shown). When the gate valve to the substrate bonding chamber 15 is opened, the conveyor expansion / contraction mechanism provided in the post-processing chamber 16 operates. Then, a roller conveyor is extended from the post-processing chamber 16 and connected to the roller conveyor of the substrate bonding chamber 15, and a bonded substrate in which the upper and lower substrates 1 and 2 are bonded to the post-processing chamber 16 (that is, a liquid crystal panel). 19 is carried in. When the bonding substrate 19 is carried into the post-processing chamber 16, the roller conveyor is contracted in the post-processing chamber 16, the gate valve between the post-processing chamber 16 and the substrate bonding chamber 15 is closed, and the post-processing is performed. The inside of the chamber 16 is brought into an atmospheric state. When the inside of the post-processing chamber 16 is in an atmospheric state, a gate valve (not shown) between the post-processing chamber 16 and the ultraviolet irradiation chamber 17 is opened, and a conveyor expansion / contraction mechanism (not shown) provided in the post-processing chamber 16 is opened. To the roller conveyor of the ultraviolet irradiation chamber 17. Thereafter, the liquid crystal panel 19 is carried into the ultraviolet irradiation chamber 17 on the roller conveyor, where the sealing agent is irradiated with ultraviolet rays to cure the sealing agent. When the curing of the sealant is completed, the liquid crystal panel 19 is transported on the roller conveyor and is transported to the second inspection room (panel inspection room) 18 for inspection.

  As described above, the processing chambers 14 to 18 are arranged almost linearly and a robot hand is used for a part of the processing chambers. However, since the roller conveyor is used for transferring the substrate almost entirely, the installation area of the apparatus is minimized. It can be suppressed to the limit.

  The liquid crystal panel 19 is manufactured with the above system configuration. In this liquid crystal substrate bonding system, the substrates 1 and 2 are mostly transported by a roller conveyor. In comparison, the upper and lower substrates 1 and 2 may be rotated clockwise or counterclockwise with respect to the conveying direction, and the alignment accuracy may be lowered. Therefore, it is necessary to prevent the positional deviation of the substrate that occurs when stopping on the transport path so that there is no positional deviation when the upper and lower substrates 1 and 2 are delivered to each processing apparatus. Therefore, in this embodiment, alignment is performed before the upper and lower substrates 1 and 2 are delivered to the processing units of the first conveyor line 5 and the second conveyor line 6 on the roller conveyor (ie, the upper and lower substrates 1). , 2 (detects the rotation (inclination) and corrects the inclination).

  FIG. 2 is a schematic configuration diagram showing an embodiment of a substrate transport apparatus and a substrate tilt correction method according to the present invention in the liquid crystal panel assembly system shown in FIG. 1, wherein FIG. (B) shows a state in which the substrate 1 is conveyed in a normal posture, and FIG. 5 (b) shows a state in which the substrate is conveyed in a rotated (tilted) state. Conveyors, 5R are right roller conveyors, 21a and 21b are rollers, 22a and 22b are power transmission shafts, 23a and 23b are drive motors, and 24a and 24b are substrate detection sensors. A duplicate description is omitted. Here, the first transfer line 5 will be described, but the same applies to the second transfer line. Although the lower substrate 1 will be described here, the same applies to the upper substrate 2.

  In the figure, in the first conveyance line 5 composed of a roller conveyor, rows of rollers 21a and 21b are arranged on the left and right, respectively, and power is transmitted to drive motors 23a and 23b for driving the left and right rollers 21a and 21b, respectively. They are connected via sources 22a and 22b. The driving force of the drive motors 23a and 23b is transmitted to the rollers 21a and 21b via the power transmission sources 22a and 22b, whereby the rollers 21a and 21b are rotationally driven. By rotating the rollers 21a and 21b while the lower substrate 1 is placed on the rollers 21a and 21b, the lower substrate 1 is conveyed in the direction of the arrow.

  Here, the row of rollers 21a, the drive motor 23a, and the power transmission source 22a form the left roller conveyor 5L, and the row of rollers 21b, the drive motor 23b, and the power transmission source 22b form the right roller conveyor 5R. The left roller conveyor 5L is arranged on the left side with respect to the conveying direction (indicated by the white arrow) of the lower substrate 1, the right roller conveyor 5R is also arranged on the right side, and the lower substrate 1 is placed on the row of rollers 21a of the left roller conveyor 5L. Between the left roller conveyor 5L and the right roller conveyor 5L so that the lower substrate 1 is transported with the right side portions of the lower substrate 1 placed on the rows of rollers 21b of the right roller conveyor 5L. The interval is maintained.

  In the first transfer line 5 in which the roller conveyer including the left roller conveyer 5L and the right roller conveyer 5R is used, the left and right sides of the lower substrate 1 are passed in a direction perpendicular to the transfer direction (left and right direction). Substrate detection sensors 24a and 24b for detection are arranged. When the lower substrate 1 is transported before a table (not shown) of the paste applicator 7 (FIG. 1), the lower substrate 1 is detected by the substrate detection sensors 24a and 24b installed in the first transport line 5. 1 are detected (note that FIG. 2 shows a state after the lower substrate 1 has passed through the substrate detection sensors 24a and 24b). When one of the board detection sensors 24a and 24b on the left and right sides detects the side of the lower board 1, control means (not shown) controls to stop the drive motor 23a or 23b on the detected side. . As shown in FIG. 2A, when the substrate detection sensors 24a and 24b simultaneously detect the tips of the respective side portions of the lower substrate 1, the control means has been transported in a correct state without the lower substrate 1 tilting. The drive motors 23a and 23b are rotated as they are, and the lower substrate 1 is conveyed.

  Therefore, as shown in FIG. 2B, the lower substrate 1 is transported by being rotated (tilted) counterclockwise when viewed from the advancing direction (hereinafter the same) (that is, the left side portion of the lower substrate 1). The substrate detection sensors 24a and 24b arranged on the left roller conveyor 5L and the right roller conveyor 5R do not detect the lower substrate 1 at the same time. A substrate detection sensor 24b (hereinafter referred to as a right substrate detection sensor 24b) on the conveyor 5R detects the lower substrate 1, and then a substrate detection sensor 24a (hereinafter referred to as a left substrate detection sensor 24a) on the left roller conveyor 5L. The substrate 1 is detected. From the detection of the lower substrate 1 by the right substrate detection sensor 24b until the detection of the lower substrate 1 by the left substrate detection sensor 24a, (This is hereinafter referred to constant velocity) movement speed to transport the lower substrate 1 by keeping intact. Thereafter, when the left substrate detection sensor 24a detects the lower substrate 1, the left drive motor 23a is accelerated to move the left side of the lower substrate 1 faster than the right side (that is, faster than the steady speed). (Hereinafter, this is referred to as an inclination correction speed). As a result, the lower substrate 1 is rotated counterclockwise while being conveyed, and the inclination of the lower substrate 1 is corrected.

  Thus, in order to correct the inclination of the lower substrate 1, the control unit (not shown) detects the right side of the lower substrate 1 after the right substrate detection sensor 24b detects the left substrate detection sensor 24a. The time until the left side of the lower substrate 1 is detected is obtained, and the inclination direction and the amount of inclination of the lower substrate 1 are obtained based on the time, and the predetermined distance determined based on these is moved. The movement speed of the lower substrate 1 for correcting the inclination of the lower substrate 1 is obtained as the inclination correction speed, and the rotation speed of the left drive motor 23a is moved so that the left side portion of the lower substrate 1 moves at the inclination correction speed. Set. As a result, the left side portion of the lower substrate 1 moves at this inclination correction speed, but the right side portion of the lower substrate 1 moves at a steady speed, so that the lower substrate 1 is conveyed counterclockwise while being conveyed. Rotating in the direction, the tilt due to counterclockwise rotation is corrected.

  In this way, the inclination of the lower substrate 1 can be corrected without stopping the conveyance of the lower substrate 1 on the roll conveyor. For this reason, the paste applicator 7 and the liquid crystal dropping device 9 in FIG. It is not necessary to align the lower substrate of the tree when the lower substrate 1 is placed on a table such as the substrate bonding apparatus 15, and the working time can be shortened.

  Each of the above devices is provided with a table for performing each processing, and each table is provided with a substrate positioning mechanism for defining a stop position of the lower substrate 1. This positioning mechanism is composed of two restricting pins that move up and down to define the progression of the left and right sides of the lower substrate 1 in a direction perpendicular to the substrate transport direction. When the lower substrate 1 is conveyed into the apparatus on the roller conveyor, the restriction pins protrude above the roller conveyor so as to stop the movement of the lower substrate 1 and stop the progress of the lower substrate 1. is there.

FIG. 3 is a schematic configuration diagram showing another embodiment of the substrate transport apparatus and the substrate tilt correction method according to the present invention in the liquid crystal panel assembly system shown in FIG. 1, and FIG. The process in which the inclination is corrected from the inclined position to the normal position (showing the lower substrate 1 as an example) shows the change in the moving speed of the lower substrate 1 respectively, and 21a _{1 to} 21a. _3, 21b _{1 ~21b 3} is _{roller, 22a 1 ~22a 2, 22b 1} ~22b 3 is a power transmission _{shaft, 23a 1 ~23a 3, 23b 1} ~23b 3 is a drive _{motor, 24a 1 ~24a 3, 24b 1} ~ Reference numeral 24b ₃ denotes a substrate detection sensor, and 25 _{1 to} 25 ₃ denote section roller conveyors. Parts corresponding to those in the previous drawings are given the same reference numerals, and redundant description is omitted. Here, the first transfer line 5 will be described, but the same applies to the second transfer line. Although the lower substrate 1 will be described here, the same applies to the upper substrate 2.

In the embodiment shown in FIG. 2, the substrate detection sensors 24a and 24b are arranged at one place on the roller conveyor. However, in this embodiment shown in FIG. It is divided into a plurality of sections in the transport direction, and a roller conveyor is arranged for each section (here, it is assumed that three section roller conveyors 25 _{1 to} 25 ₃ are arranged. The driving device is provided so that the conveyance speed can be varied for each section roller conveyor.

3A, in this embodiment, the conveyance path of the lower substrate 1 having a long distance between apparatuses is divided into three sections, and a section roller conveyor 25 including a left roller conveyor and a right roller conveyor for each section. ₁ , 25 ₂ , 25 ₃ are arranged. In each of the section roller conveyors 25 ₁ , 25 ₂ , 25 ₃ , substrate detection sensors 24a ₁ , 24a ₂ , 24a ₃ are provided on the left side of the roller conveyor on the left side (that is, the left roller conveyor), and the roller on the right side thereof. Substrate detection sensors 24b ₁ , 2ba ₂ , and 24b ₃ are provided on the starting end side of the conveyor (that is, the right roller conveyor), respectively. The lower substrate 1 is transported through the section roller conveyors 25 ₁ , 25 ₂ , 25 ₃ at a constant steady speed. If the lower substrate 1 is inclined, the section roller conveyor 25 ₁ uses the substrate detection sensor. this inclination is detected by 24a _1, 24b _1, in the section roller conveyor 25 _2, this inclination is detected by the substrate detection sensor 24a _2, 24b _2, in the section roller conveyor 25 _3, the substrate detection sensor 24a _3, 24b ₃ By detecting this inclination, the inclination of the lower substrate 1 is corrected when it is conveyed by the section roller conveyors 25 ₁ , 25 ₂ , 25 ₃ .

Here, the section roller conveyor 25 _1, transmits the rotational driving force of the driving motor 23a ₁ of the roller 21a ₁ column and the drive motor 23a ₁ Toko arranged in the conveying direction of the lower substrate 1 in the roller 21a ₁ of the respective power transmitting a left roller conveyor comprising a transmission shaft 22a ₁ Tokyo, the roller 21b ₁ of each of the rotational driving force of the driving motor 23b ₁ column and the drive motor 23b ₁ Toko roller 21b ₁ arranged in the conveying direction of the lower substrate 1 is composed of a right roller conveyor comprising a power transmission shaft 22b ₁ Metropolitan to the section roller conveyor 25 ₂ Similarly, the drive motor of the roller 21a ₂ columns and the driving motor 23a ₂ Toko arranged in the conveying direction of the lower substrate 1 A left roller conveyor including a power transmission shaft 22a ₂ for transmitting the rotational driving force of 23a ₂ to each roller 21a ₂ and a roller 21 arranged in the conveying direction of the lower substrate 1 It is composed of a right roller conveyor comprising a power transmission shaft 22b ₂ Metropolitan for transmitting column and the drive motor 23b rotational driving force of the driving motor 23b ₂ of ₂ Toko of b ₂ to the roller 21b ₂ of each, also section roller conveyor 25 ₃ Similarly, consisting power transmission shaft 22a ₃ Metropolitan for transmitting a rotational driving force of the driving motor 23a ₃ columns and the driving motor 23a ₃ Toko rollers 21a ₃ arranged in the conveying direction of the lower substrate 1 in the roller 21a ₃ each and the left roller conveyor, a power transmission shaft 22b ₃ that transmitted to the roller 21b ₃ of the rotational driving force respectively of the drive motor 23b ₃ columns and the drive motor 23b ₃ Toko rollers 21b ₃ that are arranged in the conveying direction of the lower substrate 1 And a right roller conveyor.

  Next, the operation of this embodiment will be described with reference to FIG.

It is assumed that the lower substrate 1 starts to be conveyed from the section roller conveyor 25 _{1 in} a state where the lower substrate 1 is inclined by an angle θ as shown in the figure. Therefore, in the section roller conveyor 25 _1, first, among the substrate detecting sensor 24a _1, 24b _1, substrate detecting sensor 24b ₁ detects the passage of the right side portion of the lower substrate 1 (time T ₁ shown in FIG. 3 (b) ). The lower substrate 1 starts to be conveyed at an acceleration α ₁ at time T ₀ in FIG. 3B, and the moving speed of the lower substrate 1 at time T ₁ is a steady speed as shown in FIG. 3B. V ₁ (for example, V ₁ = 750 mm / sec). When traveling at this constant speed V ₁ by a distance [Delta] L _1, but the substrate detecting sensor 24a ₁ detects the left side of the lower substrate 1 (time T ₂ of the FIG. 3 (b)), when there is the detection, the lower substrate 1 From the detection time difference (T ₂ −T ₁ ) between the substrate detection sensors 24b ₁ and 24a ₁ , the transport speed V ₁ of the lower substrate ₁ and the distance K between the substrate detection sensors 24a ₁ and 24b ₁ , a control unit (not shown) An inclination angle θ (= tan ⁻¹ V ₁ · (T ₂ −T ₁ ) / K) of the lower substrate 1 is obtained.

The inclination of the lower substrate 1 theta is obtained (see FIG. 3 (b) is also a time T _2), the control unit is accelerated to the drive motor 23a ₁ of the section roller conveyor 25 ₁ to inclination correction velocity V ₂ at the acceleration alpha ₁ Thus, at time t ₁ , the roller 21a ₁ of the left roller conveyor of the section roller conveyor 25 ₁ is increased to the inclination correction speed V ₂ . Then, the side (that is, the left side) of the lower substrate 1 that has been accelerated is moved at the inclination correction speed V ₂ for t ₂ hours (the movement distance ΔD ₁ thereby. At this time, the lower substrate 1 The right side is moving at a steady speed V ₁ ), and is decelerated at a deceleration α ₂ to a steady speed V ₁ . Here, assuming that the interval of the lower substrate 1 conveyed by the roller conveyor (that is, the first conveying line 5 (FIG. 1)) is l, the time T ₁ to the time (T ₁ + t ₁ + t ₂ + t ₃ ) Is increased to the inclination correction speed V ₂ so that the distance x moved up to x = l sin θ (however, the intervals of the section roller conveyors 25 ₁ , 25 ₂ , 25 ₃ exceed this distance x) Suppose).

By the above processing, if the slope of the lower substrate 1 is 0 the inclination angle θ is corrected, becomes smaller, then the process proceeds been conveyed the lower substrate 1 by a distance [Delta] L ₂ in the next section roller conveyor 25 ₂ Then, the sides of the lower substrate 1 are similarly detected at the substrate detection sensor positions 24a ₂ and 24b ₂ (time T ₃ and T _{4 in} FIG. 3B), and if the lower substrate 1 is inclined. , in the same manner as section roller conveyor 25 _1, the inclination direction and inclination angle is detected, the correction of the inclination angle is performed. In FIG. 3B, by the section roller conveyor 25 ₂ , the speed is increased from time T ₄ to the inclination correction speed V ₃ corresponding to the inclination angle θ detected at that time and moved by a distance ΔD ₂ . The detected inclination angle θ is corrected. In the section roller conveyor 25 ₃ , the distance ΔD ₃ is increased from time T ₆ to the inclination correction speed V ₄ corresponding to the detected inclination angle θ. The inclination angle θ is corrected by moving only by this distance.

When the lower substrate 1 is no longer inclined due to the correction of the inclination angle in the section roller conveyor 25 ₁ , the inclination is not detected in the section roller conveyors 25 ₂ and 25 ₃ , and the inclination angle is not corrected. The lower substrate 1 is transported at a steady speed V ₁ as a whole, and when the lower substrate 1 is not inclined due to the inclination angle correction by the section roller conveyor 25 ₂ , the section roller conveyor 25 ₃ Since no inclination is detected, the inclination angle is not corrected, and the lower substrate 1 is conveyed at the steady speed V ₁ as a whole.

Referring to FIG. 3B in more detail, the control unit obtains the speed at which one of the left / right roller conveyors increases according to the tilt direction from the detected tilt amount to be corrected. Here, since the correction amount of the tilt amount at the section roller conveyor 25 ₁ does not reach the detected tilt amount, the tilt amount remains on the lower substrate 1 corrected by the section roller conveyor 25 _1. For this reason, the section roller conveyor 25 ₂ also detects the tilt angle of the lower substrate 1 and corrects the same, similarly to the section roller conveyor 25 ₁ . However, since the amount of inclination detected by the section roller conveyor 25 ₂ is smaller than the amount of inclination detected by the section roller conveyor 25 ₁ , the speed is increased from the steady speed V ₁ in the section roller conveyor 25 ₂ . As shown in FIG. 3B, the inclination correction speed is lower than V ₃ and the inclination correction speed V ₂ increased by the section roller conveyor 25 ₁ . However, to equal the value of the acceleration and the acceleration alpha ₁ of the section roller conveyor 25 _1, it is obtained by a small inclination correction speed V ₃ than the slope compensation velocity V ₂ which is accelerated. The section roller conveyor 25 ₂ In this incline compensation velocity V ₃ is traveled by a predetermined distance [Delta] D _2, thereafter, the section roller conveyor 25 ₁ the same deceleration alpha ₂ at a steady rate V ₁ which is decelerated from the inclination correction velocity V ₃ Move to a moving state.

On the other hand, in the roller conveyor on the other side of the section roller conveyor 25 ₂ , the lower substrate 1 is moved at a constant steady speed V ₁ . Thereby, the delayed side of the lower substrate 1 advances faster due to the inclination and is corrected to the state without the inclination, but the acceleration / deceleration state may not be an ideal value, and the inclination may not be within the allowable value. Therefore, the inclination of the lower substrate 1 is detected by the substrate detection sensors 24a ₃ and 24b ₃ of the section roller conveyor 25 ₃ . The operation based on the detection result is performed in the same manner as in the section roller conveyor 25 ₁ . That is, as shown in FIG. 3B, the lower substrate 1 is detected after the section roller conveyor 25 ₃ (time T ₆ ), and this side of the lower substrate 1 is accelerated and tilted by the roller conveyor on the side. Make corrections. In this case, the inclination correction speed V ₄ increased and the inclination correction speed V ₃ increased by the section roller conveyor 25 are smaller.

By this inclination correction, the inclination of the lower substrate 1 is within the allowable range and is stopped at a predetermined position as it is. When the substrate 1 having such a structure is finally stopped, as shown in FIG. 3B, the moving speed is reduced to the speed V ₅ and stopped according to a predetermined stop position. ing. As described above, the stop position may be the position of the stopper pin that moves up and down to a position higher than the height position of the roller conveyor, and the substrate 1 formed by the stopper pin may be stopped.

  The same applies to the upper substrate 2.

  As described above, by correcting the tilt of the substrate without stopping the movement of the substrate, the time for transporting the substrate can be significantly shortened, and it is not necessary to provide time for correcting the tilt.

  Further, in the embodiment shown in FIG. 3, the substrate inclination is corrected by increasing the edge of the substrate on the side detected later to the inclination correction speed by the roller conveyor. Of the two detection sensors in FIG. 2, the conveyance speed of the side of the substrate detected later is kept constant, and the side of the substrate detected earlier is decelerated from the steady speed, It goes without saying that the inclination can be corrected and the same effect as described above can be obtained.

  By the way, each table in the above apparatus in FIG. 1 is configured to be moved up and down by a driving mechanism (not shown), and when the lower substrate 1 is conveyed onto the table by the roller conveyor and the roller conveyor stops. By raising the table, the lower substrate 1 can be received on the table surface from the roller conveyor. It is also possible to provide a vertical moving mechanism on the roller conveyor provided on the table so that the substrate is delivered by moving the roller conveyor below the table surface.

  FIG. 4 is a longitudinal sectional view showing a specific example of the substrate bonding chamber 15 in FIG. 1 and the operation of carrying the substrate from the pretreatment chamber 14 in the substrate bonding chamber 15 and carrying the substrate into the posttreatment chamber 16. , 26 is a conveyor expansion / contraction mechanism, 27 is a roller conveyor, 28 is a robot hand, 29 is a finger portion, 30 is a suction pad, 31 is an upper table, 32 is an adhesive pin, 33 is a gate valve, 34 is a lower table, and 35 is a substrate. A roller conveyor for delivery, 36 is a gate valve, 37 is a conveyor expansion / contraction mechanism, and 38 is a roller conveyor. The parts corresponding to those in FIG.

  In FIG. 1, a pre-conveying chamber 14 (FIG. 1) is provided with a roller conveyor 27 provided with a conveyor extending / contracting mechanism 26 on the lower side, and a robot hand 28 on the ceiling side. A gate valve 33 is provided between the substrate bonding chamber 15 and the pretreatment chamber 14, and the inside of the substrate bonding chamber 15 is normally maintained at a predetermined degree of vacuum. A gate valve 36 is also provided between the substrate bonding chamber 15 and the post-processing chamber 16 (FIG. 1). As shown in the drawing, the substrate bonding chamber 15 is a vacuum chamber in which a lower table 34 for holding the lower substrate 1 and an upper table 31 for holding the upper substrate 2 are provided.

  The roller conveyor 27 of the pretreatment chamber 14 is provided with a conveyor expansion / contraction mechanism 26. When the gate valve 33 between the substrate bonding chamber 15 and the pretreatment chamber 14 is opened, the conveyor expansion / contraction mechanism 26 causes the substrate bonding to be performed. The roller conveyor 27 of the pretreatment chamber 14 extends and is connected to the roller conveyor of the chamber 15 so that the lower substrate 1 can be loaded onto the lower table 34. When the substrates are bonded, the lower substrate 1 and the upper substrate 2 are bonded together by lowering the upper table 31 toward the lower table 34 by a driving mechanism (not shown).

  A plurality of suction pads 30 are provided on the finger portion 29 of the robot hand 28 provided in the pretreatment chamber 14. As described above, a plurality of elastic adhesive pads (suction pins) 32 are also provided on the upper table 31 side of the pretreatment chamber 14, and the upper table is provided between the finger portions 29 of the robot hand 28. The adhesive pad 32 on the 31 side is lowered so that the upper substrate 2 can be sucked and held. The suction pads 30 and 32 are provided with a supply port (not shown) for supplying a negative pressure at the center thereof, and the upper substrate 2 is sucked by supplying a negative pressure to the supply port. I am doing so. Note that illustration of the negative pressure source and the supply piping is omitted.

  As described above, when delivering the upper substrate 2, the pretreatment chamber 14 and the substrate bonding chamber 15 are in a semi-vacuum state so that they can be adsorbed with a negative pressure, and are supplied to the adhesive pads 30 and 32. Has a higher degree of vacuum than that.

  When the upper substrate 2 is transferred from the pretreatment chamber 14 to the substrate bonding chamber 15, the robot hand is held after the upper substrate 2 is held by both the adhesive pad 30 on the robot hand 28 side and the adhesive pad 32 on the upper table 31 side. The negative pressure supply of the adhesive pad 30 on the 28 side is stopped, and the robot hand 28 and the extended roller conveyor 27 are retracted to the pretreatment chamber 14. Thereafter, the upper substrate 2 is lifted up to the surface of the upper table 31 by the adhesive pad 32 and is held by the plurality of adhesive pads 32. Therefore, even if the degree of vacuum is increased, the upper substrate 2 is held on the upper table 31 by the adhesive force and does not fall.

  When the bonding of the lower substrate 1 and the upper substrate 2 is completed, the adhesive pad 32 is lifted above the surface of the upper table 31 in a state where the upper table 31 is pressed against the upper substrate 2, thereby the surface of the upper substrate 2. The adhesive pad 32 can be peeled off. At this time, the adhesive pad 32 can be easily peeled off by spraying a positive pressure gas from a negative pressure supply port provided at the center of the adhesive pad 32.

  The lower table 34 is provided with an adhesive sheet (adhesive member) (not shown) and a plurality of negative pressure supply ports so that the lower substrate 1 is held so as not to move. When the adhesive member is peeled off from the lower substrate 1, the lower table 34 is not moved, but is supplied with a compressed gas from a negative pressure supply port provided at the central portion of the adhesive sheet to be peeled off. Alternatively, it is possible to peel the adhesive member from the lower substrate 1 by providing an upper and lower pin at the center of the negative pressure supply port and pushing up the lower substrate 1 with the upper and lower pins.

  The roller conveyor 27 provided in the pretreatment chamber 14 has a structure that can be expanded and contracted toward the substrate bonding chamber 15 by the expansion / contraction mechanism 26, and a gate valve between the pretreatment chamber 14 and the substrate bonding chamber 15. When 33 is closed, it is shrunk to the pretreatment chamber 14 side, and when the gate valve 33 is opened and the lower substrate 1 is transferred into the substrate bonding chamber 15, it extends to the substrate bonding chamber 15 side, and the substrate It is configured such that it can be docked on a substrate delivery roller conveyor 35 provided in the bonding chamber 15 so that the lower substrate 1 can be smoothly transferred to the lower table 34 of the substrate bonding chamber 15. The lower table 34 is provided between the section roller conveyors on the left and right sides of the roller conveyor 35 configured as shown in FIG. 2 as a receiving conveyor, and a drive mechanism is provided so as to be movable up and down.

  Further, the post-processing chamber 16 is provided with a roller conveyor 38 that can be expanded and contracted toward the substrate bonding chamber 15 by a conveyor expansion / contraction mechanism 37 provided therein, so that the lower substrate 1 and the upper substrate 2 are bonded to each other. When the gate valve 36 between the post-processing chamber 16 and the substrate bonding chamber 15 is opened, the roller conveyor 38 extends to the substrate bonding chamber 15 side and is connected to the substrate delivery roller conveyor 35. The liquid crystal panel 19 formed by bonding the substrates from the roller conveyor 35 through the roller conveyor 38 is unloaded from the substrate bonding chamber 15 and transferred to the post-processing chamber 16.

  Here, it is possible to carry the upper and lower substrates 1 and 2 into the substrate bonding chamber 15 and to place and hold them on the upper and lower tables 31 and 34 almost simultaneously, thereby greatly increasing the assembly time of the liquid crystal panel 19. Can be shortened.

  As described above, when the upper and lower substrates 1 and 2 are held from the pretreatment chamber 14 by the upper table 31 and the lower table 34, respectively, the gate valve 33 is closed. Note that the gate valve 36 between the substrate bonding chamber 15 and the post-processing chamber 16 is closed in advance. When the gate valve 33 is closed, the upper and lower substrates 1 and 2 are bonded together from the semi-vacuum state to the high vacuum state in the substrate bonding chamber 15. Although not shown, a drive mechanism for moving the upper table 31 up and down and a drive mechanism for moving the adhesive pad 32 up and down are provided outside the substrate bonding chamber 15, and a power transmission shaft provided in these drive mechanisms is provided. The upper and lower substrates 1 and 2 are bonded together by operating the driving mechanism to move the adhesive pad 32 and the upper table 31 up and down. At the time of bonding, the upper table 31 is moved to the lower table 34 side.

  When the bonding of the upper and lower substrates 1 and 2 is completed, as described above, the inside of the substrate bonding chamber 15 is set to a semi-vacuum state, and the post-processing chamber 16 that has been previously set to a semi-vacuum state is set to a high vacuum state. When the inside of the substrate bonding chamber 15 is in a semi-vacuum state, the gate valve 36 is opened, the roller conveyor 38 extends from the post-processing chamber 16 into the substrate bonding chamber 15, and the upper and lower substrates 1 on the roller conveyor 35 for substrate delivery. , 2 are bonded together to form the liquid crystal panel 19, and the product is carried out to the post-processing chamber 16. When the liquid crystal panel 19 is carried into the post-processing chamber 16, the gate valve 36 is closed, and the inside of the post-processing chamber 16 is returned to the atmospheric state. By returning the interior of the post-processing chamber 16 to the atmosphere, the atmospheric pressure is uniformly applied to the entire liquid crystal panel 19, and the interval between the upper and lower substrates 1 and 2 becomes a regular interval. Thereafter, in FIG. 1, the liquid crystal panel 19 is transported to the ultraviolet irradiation chamber 17 by the roller conveyor constituting the third transport line 20. Therefore, the sealing agent is cured by being irradiated with ultraviolet rays. When the curing of the sealant is completed, the liquid crystal panel 19 is sent to the panel inspection room 18 by the roller conveyor, and the state is inspected and sent to the next step (not shown).

  As described above, in this specific example, in order to repeat the semi-vacuum state and the high-vacuum state in the substrate bonding chamber 15 in FIG. The processing chamber 16 is provided, and the gate valves 33 and 36 are respectively provided on the processing chambers 16 to open and close, thereby receiving the upper and lower substrates 1 and 2 and sending out the liquid crystal panel 19 after bonding. Thus, while repeating the state in the substrate bonding chamber 15 between a semi-vacuum state and a high vacuum state, while shortening the time which makes the inside of the substrate bonding chamber 15 a vacuum state, substrate bonding chamber 15 to prevent a decrease in cleanliness.

  And since the upper and lower substrates 1 and 2 are carried into the board | substrate bonding apparatus 15 substantially simultaneously and hold | maintained at the upper table 31 and the lower table 34, compared with the case where it carried in separately conventionally, it is bonding. The time required for a match can be shortened.

  In addition, the arrangement of the processing chambers in the process prior to the bonding of the substrates is arranged in a substantially straight line, and the roller conveyor is used to convey the upper and lower substrates 1 and 2, so that the table configuration of each processing apparatus is changed. The configuration can be made substantially the same, the installation area of the apparatus can be reduced, and the tact time can be shortened.

  In addition, since the board is transported on a roller conveyor or belt conveyor and the horizontal tilt correction of the board can be performed without stopping the movement of the board during transport, no tilt correction is required on the table. Thus, the tact time can be improved.

1 Lower substrate 2 Upper substrate 3 Substrate loading robot 4 Alignment mechanism 5 First transfer line (inline)
5L Left roller conveyor 5R Right roller conveyor 6 Second transfer line (side line)
7 Paste applicator (seal dispenser)
8 Coating device for forming an electrode for short-circuiting 9 Liquid crystal dropping device 10 First inspection chamber 11 Substrate reversing device 12 Transfer chamber 13 Robot hand 14 Pretreatment chamber 15 Substrate bonding chamber (vacuum chamber)
16 Post-treatment room 17 UV irradiation room 18 Second inspection room (panel inspection room)
19 Bonding substrate (liquid crystal panel)
20 third transport line _{21a, 21b, 21a 1 ~21a 3} , 21b 1 ~21b 3 rollers _{22a, 22b, 22a 1 ~22a 2} , 22b 1 ~22b 3 power transmission shaft _{23a, 23b, 23a 1 ~23a 3} , 23b _{1 to} 23b ₃ drive motors 24a, 24b, 24a _{1 to} 24a ₃ , 24b _{1 to} 24b ₃ substrate detection sensors 25 _{1 to} 25 ₃ section roller conveyor 26 conveyor expansion / contraction mechanism 27 roller conveyor 28 robot hand 29 finger part 30 suction pad 31 Upper table 32 Adhesive pin 33 Gate valve 34 Lower table 35 Roller conveyor for substrate transfer 36 Gate valve 37 Conveyor expansion / contraction mechanism 38 Roller conveyor

Claims (6)

Substrate transport for transporting the substrate at a steady speed by driving the left conveyor and the right conveyor, having a conveyor in which a left conveyor and a right conveyor are arranged in the left-right direction with respect to the substrate transport direction A device,
A substrate detection sensor for detecting the substrate to be transported, arranged at an interval in a direction perpendicular to the transport direction of the substrate on the left conveyor and the right conveyor;
An inclination angle of the substrate to be conveyed with respect to the conveyance direction is obtained from a time difference in detection timing of the substrate by the substrate detection sensor of the left conveyor and the substrate detection sensor of the right conveyor, and according to the inclination angle A control means for differentiating the conveyance speed of the substrate by the left conveyor and the conveyance speed of the substrate by the right conveyor;
By differentiating the transfer speed of the substrate by the left conveyor and the transfer speed of the substrate by the right conveyor, the substrate is rotated in the plane of the left conveyor and the right conveyor, thereby tilting the substrate. A substrate transfer apparatus which corrects the substrate. The substrate transfer apparatus according to claim 1,
The conveyor is composed of a plurality of section conveyors composed of the left conveyor and the right conveyor arranged in the transport direction of the substrate,
A substrate transfer apparatus that detects the tilt angle of the substrate for each section conveyor and corrects the tilt of the substrate by rotating the substrate in accordance with the detected tilt angle. In the board | substrate conveyance apparatus of Claim 1 or 2,
In the conveyor, by accelerating one of the right conveyor and the left conveyor, the moving speed on one side of the substrate conveyed at the steady speed is a speed higher than the steady speed or A substrate transfer apparatus, wherein the substrate is rotated by moving at a low speed. A left-hand conveyor and a right-hand conveyor are disposed in the left-right direction with respect to the substrate transport direction, and the left-hand conveyor and the right-hand conveyor are driven to convey the board at a steady speed, thereby correcting the tilt of the board. Because
By detecting the substrate with a substrate detection sensor disposed in a direction perpendicular to the conveyance direction of the substrate on the left conveyor and the right conveyor, the inclination of the substrate is detected based on the detection result,
In accordance with the detected inclination of the substrate, the moving speed of the substrate by the left conveyor and the moving speed of the substrate by the right conveyor are different from each other, and the substrate is moved on the left conveyor and the right conveyor. A substrate tilt correction method, wherein the substrate tilt is corrected while being transported at a steady speed. The method of correcting a tilt of a substrate according to claim 4,
The conveyor is composed of a plurality of section conveyors composed of the left conveyor and the right conveyor arranged in the transport direction of the substrate,
An inclination angle of the substrate is detected for each of the section conveyors, and the inclination of the substrate is corrected by rotating the substrate while conveying the substrate at the steady speed according to the detected inclination angle. Substrate tilt correction method. A method for correcting a tilt of a substrate according to claim 4 or 5,
In the conveyor, by accelerating one of the right conveyor and the left conveyor, the moving speed on one side of the substrate conveyed at the steady speed is a speed higher than the steady speed or A substrate tilt correction method, wherein the substrate is rotated at a slow speed to rotate the substrate.

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