TWM335496U - Positioning apparatus for conveying slab - Google Patents

Positioning apparatus for conveying slab Download PDF

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Publication number
TWM335496U
TWM335496U TW97200004U TW97200004U TWM335496U TW M335496 U TWM335496 U TW M335496U TW 97200004 U TW97200004 U TW 97200004U TW 97200004 U TW97200004 U TW 97200004U TW M335496 U TWM335496 U TW M335496U
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TW
Taiwan
Prior art keywords
substrate
carrier
transfer
right sides
shifting
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TW97200004U
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Chinese (zh)
Inventor
wen-xin Li
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Gthink Technology Integration Inc
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Priority to TW97200004U priority Critical patent/TWM335496U/en
Publication of TWM335496U publication Critical patent/TWM335496U/en

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

M335496 八、新型說明: 【新型所屬之技術領域】 =創作有_製程設備,尤財關於麟輸送加 的設備。 【先前技術】M335496 VIII. New description: [New technology field] = Creation of equipment with _ process, Yucai about equipment for lining. [Prior Art]

二參閱圖lj與「圖2」所示,習知用於移載基板1 進入-乘載架2的輸送裝置,其包含—馬達3、__元 件4與複數滾輪軸承5,該複數滾輪軸承5上分別套設有 若干滾輪6 ’且該複數滾輪轴承5間隔排列,並使該複數 滾輪6形成—運送面7,該馬達3透職侧元件4的傳 動而驅動該複數滾輪軸承5轉動,據而當該基板〗置放於 該運送面7時,可被該複數滾輪6帶動而於該運送面7上 移動進入該乘載架2。 如上所述的輸送裝置,其雖可移載基板i移動進入該 乘載架2,然在該基板1被置放於該運送面7時,該基板工 有可能為歪斜狀的擺放,因而該基板丨被送進該乘載架7 時,該基板1有可能撞擊該乘載架7而毀損,或者當該基 板1歪斜的擺放於該乘載架7内,其容易造成夾板而需暫 停機台的運作,其不但降低製造良率,亦會增加停機時間, 甚至會造成機台的損壞。 【新型内容】 爰此,本創作之主要目的在於揭露一種可在移載基板 的同時定位該基板的輸送裝置,使基板方正的擺放,避免 基板夾板,以增加良率,提高產能,降低成本。 M335496 本創作為-鮮板運敎位裝置,可聽移載定位一 土板’、包3複數移載裝置、至少二驅動馬達與二偵測元 件’、中°亥複數移載裝置分設於左右兩邊且設於同-水平 面,以讓魏數移絲置的上邊緣形成—運送面。該基板 f於該運送面上,並藉該二_元件分麟基板的兩側以 /、位置方向,且該二驅動馬達各自分別對應連接左右Referring to FIG. 1j and FIG. 2, a conventional conveying device for transferring the substrate 1 into the carrier 2 includes a motor 3, a component 4 and a plurality of roller bearings 5, and the plurality of roller bearings 5, a plurality of rollers 6' are respectively sleeved, and the plurality of roller bearings 5 are arranged at intervals, and the plurality of rollers 6 are formed into a conveying surface 7, and the motor 3 drives the transversal member 4 to drive the plurality of roller bearings 5 to rotate. Accordingly, when the substrate is placed on the transport surface 7, it can be moved by the plurality of rollers 6 to move into the carrier 2 on the transport surface 7. The transport device as described above moves the substrate i into the carrier 2, but when the substrate 1 is placed on the transport surface 7, the substrate may be skewed. When the substrate is fed into the carrier 7, the substrate 1 may be damaged by the carrier 7, or when the substrate 1 is placed obliquely in the carrier 7, it is easy to cause a splint. Suspending the operation of the machine not only reduces the manufacturing yield, but also increases the downtime and even causes damage to the machine. [New content] Therefore, the main purpose of this creation is to disclose a transport device that can position the substrate while transferring the substrate, so that the substrate is placed squarely, and the substrate splint is avoided to increase the yield, increase the productivity, and reduce the cost. . M335496 This creation is a fresh-plate transporting device, which can be used to record and move a soil plate, a package 3 complex transfer device, at least two drive motors and two detection components, and a medium-heavy complex transfer device. The left and right sides are arranged on the same-horizontal plane to allow the upper edge of the Wei number to be placed to form a transport surface. The substrate f is on the transport surface, and the two sides of the two-component board are in the / direction direction, and the two driving motors are respectively connected to the right and left.

兩邊的該魏移健置’該二轉馬賴依據該基板的位 置方向各自獨立鶴該複數移餘置以移載該基板。 據此’本創作只要個別控制該二驅動馬達,即可分開 控制左右兩邊的該移載裝置移載該基板的速度,因而當該 基板歪斜的毅於該運送科,可分糊整該二驅動馬達 的輸出轉速’讓左右_的移難置具不_移載該基板The two-way </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> According to this, as long as the two driving motors are individually controlled, the speed of transferring the substrate by the left and right sides of the substrate can be separately controlled, so that when the substrate is skewed, the two driving units can be separated. The output speed of the motor 'allows the left and right _ to move the susceptor without _ transferring the substrate

逮度,據而在移載該基板的同時,可修正該基板的位置方 位’讓該基板方正的擺放D 【實施方式】 為俾使貴委員對本創作之特徵、目的及功效,有著 更加深入讀触湖舉錄纽锻配合圖式說 明如后: 請參閱「圖3」、「圖4」與「圖5」所示,其為本創作 的較佳實關,可跋移奴位—额10,其包含複數移 健置20、二侧元件30與二驅動馬達4(),其中該複數 移载褒置20分設社細邊岭㈣—水伟,且該複數 移载裝置20的上邊緣形成-運送面5〇,該運送面5〇並延 伸入-乘載架60。該基板1Q置於該運送面5{)上,且藉該 M335496 -侧耕30分設該基板㈣左右__得該基板ι〇 的位置方向’該二驅動馬達4G各自分別對應連接左右兩邊 的该稷數移載裝置20,又該二驅動馬達4〇並各自獨立驅 動左右兩邊_複數賴錢2G,而使左柄邊的該複數 移載裝置20具不同的移載速度。 因此當該基板10歪斜的置放於該運送面5〇時(如「圖 4」所示),本創作依據該基板1〇的位置方向,可藉由操控 該二驅動馬達4G,讓左右_的移餘置2Q具不同的^ 載速度,因而即可在移載的過程中,使該基板1()轉向來修 正該基板10的位置方位,最後即可讓該基板1〇方正的置 放於該運送面50上(如「圖5」所示),以安全的進入該乘 載架60。 ^ 請參閱「圖6」所示,其為本創作另一較佳實施方式, 其中該驅動馬達40的數量對應該複數移載裝置2〇,因而 該複數移載裝置20可各自獨立連接該複數驅動馬達4〇, 並各自獨立受該複數驅動馬達40的驅動而移載該基板 10,據此其同樣可以達到前述的效果,且運送面5〇上可連 續移載多個基板10 ’並同時完成前述的基板1〇定位作業。 請參閱「圖7」與「圖8」所示,其為本創作又一較佳 實施方式,本創作可實施設置於乘載架60内,其中乘載架 60内设置複數移載裝置20與複數驅動馬達40,該複數移 載裝置20分設於該乘載架60内的左右兩邊,且各自受該 複數驅動馬達40的獨立驅動而移載該基板1〇位移,而該 乘載架60的左右兩側設有該二偵測元件30,且該乘載架 M335496 ^的力底部林—感應元件31,當絲板ίο歪斜的進入該 乘載木60日寸’該基板1〇會持續前進直至觸發該感應元件 31為止而^下’此時該二偵;則元件30可偵測該基板10的 位置方向,因而可依據該偵測元件30所取得該基板10的 :置方向,調整控制該複數驅動馬達40控制左右兩邊的該 複數移载裝置2〇具不同的移載速度,以定位該基板1〇, 使魏板1〇方正的擺置於該乘載架⑼内。 1明參閱「圖9」、「圖10」與「圖11」所示,其中該乘 載木60可以集合數個前後左右並列設置,並各自具有複數 移載裝置2G、複數㈣馬達40、二_元件3〇與一感應 兀件31,其可以增加該乘載架6〇的應用範圍,不同該乘 載架⑼皆可單獨使用置放正常尺寸的基板10,又當基板 n車乂大尺寸時’該基板n可以同時橫跨2個乘載架即 而定位擺置(如「圖9」所示),或者如基板12的尺寸,其 • 可以橫跨四個乘載架60定位擺置(如「圖1〇」所示),又 如基板13的尺寸,其可以橫跨一個半乘載架6〇定位擺置 (如「圖11」所示)。 、一如上所述’本創作透過不同的驅動馬達40的驅動與偵 測兀件30的監控’讓左右兩側的移载裝置2〇具不同的移 載速度’即可導正該基板10的位置方向,其可避免卡板, 降低生產製造時間,以滿足使用者的需求。 綜上所述僅為本創作之較佳實施例而已,並非用來把 定本創作之實施範圍,即凡依本創作申請專利範圍所㈣ 均等變化與修錦,皆為本創作申請專鋪_涵罢。 M335496 【圖式簡單說明】 圖1,係習知平板運送定位裝置結構側視圖。 圖2,係習知平板運送定位裝置結構前視圖。 圖3,係本創作平板運送定位裝置結構圖。 圖4,係本創作置放基板之示意圖。 圖5,係本創作導正基板後之示意圖。 圖6,係本創作另一實施方式示意圖。 圖7,係本創作再一實施方式示意圖。 圖8,係本創作再一實施方式導正基板後示意圖。 圖9,係本創作又一實施方式示意圖一。 圖10,係本創作又一實施方式示意圖二。 圖11,係本創作又一實施方式示意圖三。 【主要元件符號說明】 習知 1 :基板 2 β·乘載架 3 :馬達 4 :偵測元件 5:滾輪軸承 6 :滾輪 7 :運送面 本創作 10、11、12、13 :基板 20 :移載裝置 M335496 30 :偵測元件 31 :感應元件 40 :驅動馬達 50 :運送面 60 :乘載架The degree of catching, according to the transfer of the substrate, the positional orientation of the substrate can be corrected to allow the substrate to be placed correctly. [Embodiment] In order to enable the member to have a deeper understanding of the features, purposes and effects of the creation. Read the description of the New Zealand forging and matching diagrams as follows: Please refer to Figure 3, Figure 4 and Figure 5, which are the best of the creations, and can be transferred to the slaves. 10, which comprises a plurality of moving devices 20, two side members 30 and two driving motors 4 (), wherein the plurality of moving devices 20 are divided into a set of fine sides (four) - water, and the upper transfer device 20 The edge forming-transport surface 5〇 extends into the carrier 60. The substrate 1Q is placed on the transport surface 5{), and the M335496-side ploughing 30 sets the substrate (four) left and right __ to obtain the position direction of the substrate ι. The two drive motors 4G are respectively connected to the left and right sides. The plurality of transfer devices 20, and the two drive motors 4, respectively, independently drive the left and right sides _ plural money 2G, and the complex transfer device 20 of the left shank has different transfer speeds. Therefore, when the substrate 10 is placed obliquely on the transport surface 5 (as shown in FIG. 4), the creation can be performed by manipulating the two drive motors 4G according to the position direction of the substrate 1〇. The shifting residual 2Q has different loading speeds, so that the substrate 1() can be turned to correct the position and orientation of the substrate 10 during the transfer process, and finally the substrate can be placed in a square manner. On the transport surface 50 (as shown in FIG. 5), the passenger carrier 60 is safely accessed. ^ Please refer to FIG. 6 , which is another preferred embodiment of the present invention, wherein the number of the driving motors 40 corresponds to the plurality of transfer devices 2 , and thus the plurality of transfer devices 20 can independently connect the plurality The driving motor 4〇 is independently driven by the plurality of driving motors 40 to transfer the substrate 10, whereby the same effect can be achieved, and the plurality of substrates 10' can be continuously transferred on the transport surface 5〇 while The aforementioned substrate 1 〇 positioning operation is completed. Please refer to FIG. 7 and FIG. 8 , which are still another preferred embodiment of the present invention. The present invention can be implemented in the carrier 60 , wherein a plurality of transfer devices 20 are disposed in the carrier 60 . The plurality of driving motors 40 are disposed on the left and right sides of the carrier 60, and are respectively driven by the independent driving motor 40 to transfer the substrate 1 〇 displacement, and the carrier 60 is displaced. The two detecting elements 30 are disposed on the left and right sides, and the bottom of the carrier M335496 ^ is the bottom sensing element 31. When the wire board is slanted into the carrier wood 60 days, the substrate 1 continues The component 30 can detect the position direction of the substrate 10 according to the direction of the substrate 10, and can be adjusted according to the direction of the substrate 10 obtained by the detecting component 30. The complex drive motor 40 is controlled to control the plurality of transfer devices 2 on the left and right sides to have different transfer speeds to position the substrate 1〇 so that the Wei plate is placed in the carrier (9). 1 see "Figure 9", "Figure 10" and "Figure 11", wherein the carrier wood 60 can be assembled in a plurality of front, back, left and right, and each has a plurality of transfer devices 2G, a plurality of (four) motors 40, two _ component 3 〇 and an inductive element 31, which can increase the application range of the carrier 6 ,, differently, the carrier (9) can be used separately to lay the substrate 10 of normal size, and when the substrate n is large When the substrate n can be positioned across two carriers at the same time (as shown in FIG. 9), or as the size of the substrate 12, it can be positioned across the four carriers 60. (As shown in Figure 1), as well as the size of the substrate 13, it can be placed across a half-carrier 6 (as shown in Figure 11). As described above, the present invention can guide the substrate 10 by driving the driving and detecting components 30 of the different driving motors 40 to allow the transfer devices 2 on the left and right sides to have different transfer speeds. Positioning direction, which avoids the card board and reduces manufacturing time to meet the needs of users. In summary, the description is only for the preferred embodiment of the present invention, and is not intended to be used for the scope of the creation of the original creation, that is, the equal variation and revision of the patent application scope (4) of this creation is the exclusive application for the creation. stop. M335496 [Simple description of the drawings] Fig. 1 is a side view showing the structure of a conventional flat transport positioning device. Figure 2 is a front elevational view of the conventional flat transport positioning device. Figure 3 is a structural diagram of the tablet transport positioning device. Figure 4 is a schematic view of the substrate placed in the present invention. Figure 5 is a schematic view of the substrate after the creation of the substrate. Figure 6 is a schematic view of another embodiment of the present creation. FIG. 7 is a schematic diagram of still another embodiment of the present creation. FIG. 8 is a schematic view showing the substrate after the implementation of the present embodiment. FIG. 9 is a first schematic view of another embodiment of the present creation. FIG. 10 is a second schematic diagram of still another embodiment of the present creation. FIG. 11 is a third schematic diagram of still another embodiment of the present creation. [Explanation of main component symbols] Convention 1: Substrate 2 β·carrier 3: Motor 4: Detection component 5: Roller bearing 6: Roller 7: transport surface creation 10, 11, 12, 13: substrate 20: shift Carrier device M335496 30 : Detection element 31 : Induction element 40 : Drive motor 50 : Transport surface 60 : Carrier

Claims (1)

M335496 九、申請專利範圍: ^一種平板運送定位裝置,祕賴—基板,其包含: 複數移載裝置,該複數移概置分設於左右兩邊且設 於同水平面,哺該複數移餘置的上雜形成一運送 面,而該基板置於該運送面上; 至少二驅動馬達,該二驅動馬達各自分賴應連接左 右兩邊的該複數移載褒置,並該二驅動馬達依據該基板的 位置方位各自獨立驅動左右兩邊的該複數移載裝置移載該 基板移動。 2·如申凊專利範圍第1項所述之平板運送定位裝置, 其中該驅動馬達的數量對應該移載裝置,以讓該移載裝置 各自獨立連接該购馬達,並該鶴馬達各自獨立驅動該 , 移載裝置位移。 3·如申睛專利範圍第1項所述之平板運送定位裝置, • 其設於一乘載架内,該複數移載裝置分設於該乘載架内的 左右兩邊,該驅動馬達的數量對應該移載裝置,以讓該移 载裝置各自獨立連接該驅動馬達,並該驅動馬達各自獨立 驅動該移餘置轉,碰乘健上設有二侧元件與〆 感應元件,該二偵測元件分設該乘載架的左右兩側,該感 應元件設於該乘載架的底部。 4·如申睛專利範圍第3項所述之平板運送定位裝置, 其中該乘載架集合數個前後左右並列設置。M335496 IX. Patent application scope: ^ A flat-plate transport positioning device, the secret--substrate, comprising: a plurality of transfer devices, the plurality of shifting devices are arranged on the left and right sides and are arranged on the same horizontal plane, and the plurality of shifting devices are fed. a plurality of transport surfaces are formed on the upper surface, and the substrate is placed on the transport surface; at least two drive motors are respectively disposed on the plurality of transfer devices connected to the left and right sides, and the two drive motors are disposed according to the substrate The positional orientation independently drives the plurality of transfer devices on the left and right sides to transfer the substrate movement. 2. The flatbed transport positioning device according to claim 1, wherein the number of the driving motors corresponds to the transfer device, so that the transfer device is independently connected to the purchased motor, and the crane motors are independently driven. The shifting device is displaced. 3. The flatbed transport positioning device according to claim 1, wherein the flat transport positioning device is disposed in a passenger carrier, and the plurality of transfer devices are disposed on the left and right sides of the carrier, and the number of the driving motors is Corresponding to the transfer device, so that the transfer device is independently connected to the drive motor, and the drive motor independently drives the shifting and shifting, and the touch-up is provided with two side components and a sensing element, the two detecting The components are divided into left and right sides of the carrier, and the sensing element is disposed at the bottom of the carrier. 4. The flatbed transport positioning device according to the third aspect of the invention, wherein the plurality of carrier frames are arranged side by side and arranged side by side.
TW97200004U 2008-01-02 2008-01-02 Positioning apparatus for conveying slab TWM335496U (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102285527A (en) * 2010-05-17 2011-12-21 株式会社日立工业设备技术 Substrate conveying device and substrate inclination correction method
CN102485677A (en) * 2010-12-02 2012-06-06 佶新科技股份有限公司 Flat panel transferring and loading module with transportable bearing rack
CN102485620A (en) * 2010-12-02 2012-06-06 佶新科技股份有限公司 Fine-adjustment method for flat-plate shifting and fine-adjusting device
CN102774609A (en) * 2011-05-12 2012-11-14 佶新科技股份有限公司 Direct transmission type flat plate conveying device
TWI619659B (en) * 2017-03-10 2018-04-01 盟立自動化股份有限公司 Sheet conveyor
CN112658082A (en) * 2020-11-24 2021-04-16 嘉善欧本轴承有限公司 Edge rolling equipment with feeding device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102285527A (en) * 2010-05-17 2011-12-21 株式会社日立工业设备技术 Substrate conveying device and substrate inclination correction method
CN102285527B (en) * 2010-05-17 2014-05-21 株式会社日立制作所 Substrate conveying device and substrate inclination correction method
TWI485095B (en) * 2010-05-17 2015-05-21 Hitachi Ltd Substrate transfer device and substrate tilt correction method
CN102485677A (en) * 2010-12-02 2012-06-06 佶新科技股份有限公司 Flat panel transferring and loading module with transportable bearing rack
CN102485620A (en) * 2010-12-02 2012-06-06 佶新科技股份有限公司 Fine-adjustment method for flat-plate shifting and fine-adjusting device
CN102774609A (en) * 2011-05-12 2012-11-14 佶新科技股份有限公司 Direct transmission type flat plate conveying device
TWI619659B (en) * 2017-03-10 2018-04-01 盟立自動化股份有限公司 Sheet conveyor
CN112658082A (en) * 2020-11-24 2021-04-16 嘉善欧本轴承有限公司 Edge rolling equipment with feeding device

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