CN219180478U - Automatic film pouring machine - Google Patents

Abstract

The utility model discloses an automatic film pouring machine, which comprises a bottom plate, wherein a feeding mechanism and a defective product discharging mechanism are respectively arranged on one side of the bottom plate, a front film pouring turntable device is arranged at the outlet end of the feeding mechanism, the defective product discharging mechanism is connected with the front film pouring turntable device, a back film pouring turntable device is arranged on one side of the front film pouring turntable device, a back film pouring feeding conveying mechanism is arranged between the discharging end of the front film pouring turntable device and the feeding end of the back film pouring turntable device, and a lifting buffer warehouse is arranged at the outlet of the back film pouring turntable device. The beneficial effects of the utility model are as follows: the front film pouring turntable device can detect the wafer, and the qualified detection can tear off the white film on the surface of the wafer and paste a blue film, so that the front film pouring of the wafer is completed, and the defective product is prevented from being conveyed downwards if the detection is unqualified.

Description

Automatic film pouring machine

Technical Field

The utility model relates to the technical field of semiconductor product processing, in particular to an automatic film pouring machine.

Background

In the wafer processing process, the wafer needs to be subjected to film pouring treatment, the wafer is separated from the iron ring, the front film pouring and the back film pouring are generally required to be carried out on the wafer, the existing equipment is low in automation degree and low in efficiency, and the automatic film pouring machine is provided for solving the problems.

Disclosure of Invention

The utility model aims to overcome the defects of the prior art and provides an automatic film pouring machine.

The aim of the utility model is achieved by the following technical scheme:

the utility model provides an automatic film pouring machine, includes the bottom plate, bottom plate one side is provided with feed mechanism and defective goods discharge mechanism respectively, feed mechanism's exit is provided with openly and falls membrane carousel device, defective goods discharge mechanism and openly fall the connection of membrane carousel device, openly fall membrane carousel device one side and be provided with back and fall membrane carousel device, be provided with back and fall membrane pan feeding transport mechanism between the discharge end of openly falling membrane carousel device and the pan feeding end of back and falling membrane carousel device, back falls membrane carousel device exit and is provided with the lift and delays storehouse, lift is delayed and is provided with ejection of compact transport mechanism between storehouse and the back and falls membrane carousel device export.

Preferably, the feeding mechanism comprises a feeding conveyer belt positioned at one side of a bottom plate, a feeding lifting and transferring assembly is arranged at an outlet of the feeding conveyer belt, a feeding carrying assembly is arranged on the bottom plate, and the feeding carrying assembly is positioned at a connection position of the feeding lifting and transferring assembly; the defective product discharging mechanism comprises a discharging conveying belt positioned at one side of a bottom plate, a discharging lifting transfer assembly is arranged at the inlet of the discharging conveying belt, a defective product discharging carrying assembly is further arranged on the bottom plate, and the defective product discharging carrying assembly is positioned at the connection position of the discharging lifting transfer assembly; the feeding lifting transfer assembly comprises a lifting movement module fixedly installed in a bottom plate installation groove, a lifting frame is installed at the power output end of the lifting movement module, the feeding lifting transfer assembly and the discharging lifting transfer assembly are identical in structure, the feeding conveying assembly is used for transferring an iron ring from a feeding conveying belt to a front film pouring turntable device, and the defective product discharging conveying assembly is used for transferring defective products detected by the front film pouring turntable device to a discharging lifting transfer assembly and transferring the defective products out through a discharging conveying belt.

Preferably, the front film pouring turntable device comprises a first turntable which is rotatably arranged on the upper surface of the bottom plate, and further comprises a first detection device, a first film tearing mechanism, a blowing and feeding mechanism, a film pasting mechanism and a material transferring mechanism which are fixedly arranged on the upper surface of the bottom plate and are sequentially arranged relative to the rotation direction of the first turntable, wherein the first detection device is positioned between the feeding mechanism and the defective product discharging mechanism.

Preferably, the first film tearing mechanism comprises a first two-shaft driving module fixedly installed on the upper surface of the bottom plate, a first rotating motor is fixedly installed at the power output end of the first two-shaft driving module, a rotating frame is installed at the output end of the first rotating motor, and a film tearing clamping clamp, a film tearing suction nozzle and a film tearing clamping jaw are installed on the rotating frame.

Preferably, the blowing and feeding mechanism comprises a first linear motion module fixedly mounted on the upper surface of the bottom plate, a first lifting module and an air exhaust cover are mounted on a fixed plate of a power end of the first linear motion module, a blowing knife is fixedly mounted on the inner top end of the air exhaust cover, and a plurality of first suction nozzles are arranged on a fixed plate of a power output end of the first lifting module.

Preferably, the film pasting mechanism comprises a frame fixedly installed on the upper surface of the bottom plate, a film supply assembly is arranged on the side face of the frame, a three-shaft driving module is arranged on the upper surface of the film supply assembly, and sucking discs and rolling wheels are respectively arranged at the output ends of the three-shaft driving module.

Preferably, the back film pouring turntable device comprises a second turntable which is rotatably arranged on the upper surface of the bottom plate, and further comprises a second film tearing mechanism, an iron ring discharging and conveying assembly, a separation sheet conveying assembly, a release film feeding and conveying assembly and a second detection device which are fixedly arranged on the upper surface of the bottom plate and are sequentially arranged in relation to the rotation direction of the second turntable, wherein iron ring storage and lifting assemblies and feeding and lifting assemblies are respectively arranged below the iron ring discharging and conveying assembly and the feeding and lifting assembly, and a transfer belt is arranged between the separation sheet conveying assembly and the blowing and feeding mechanism.

Preferably, the material loading lifting assembly includes that fixed mounting is located the bottom plate upper surface and is the erection column that the rectangle distributes, every the erection column slides and is provided with the direction traveller, the upper surface of direction traveller is provided with the lifter plate, the center department fixedly connected with drive post of lifter plate bottom surface, bottom plate bottom surface fixed mounting is provided with driving motor, driving motor power take off end is connected with gear drive assembly, and gear drive assembly is connected with the drive post transmission.

Preferably, the back film pouring feeding and conveying mechanism comprises an adjusting device which is arranged on the bottom plate and positioned between the discharging end of the front film pouring turntable device and the feeding end of the back film pouring turntable device, and one side of the adjusting device is provided with a transverse conveying device for conveying; the transverse carrying device comprises a second biaxial driving assembly fixedly arranged on the upper surface of the bottom plate, a transfer plate is fixedly arranged at the power output end of the second biaxial driving assembly, and a plurality of second suction nozzles are arranged on the transfer plate; the adjusting device comprises a bearing frame at one side of the transverse carrying device, a plurality of brackets are arranged on the upper surface of the bearing frame, and a heating assembly, a film scraping assembly, a turnover assembly and a back film pouring and feeding transfer mechanism are sequentially arranged above the bearing frame along the conveying direction; the heating assembly comprises a third biaxial driving assembly, a heating block is arranged at the power output end of the third biaxial driving assembly, the film scraping assembly comprises a fourth biaxial driving assembly, and a film scraping head is arranged at the power output end of the fourth biaxial driving assembly; the overturning assembly comprises a fifth second shaft driving assembly, a movable plate is fixedly arranged at the power output end of the fifth second shaft driving assembly, and clamping rotating assemblies are arranged on two sides of the inner wall of the movable plate; the back film pouring and feeding transfer mechanism comprises a sixth second shaft driving assembly, and a magnetic suction plate is arranged at the power output end of the sixth second shaft driving assembly.

Preferably, the ejection of compact transport mechanism is including being located the lift slow storehouse and the back falls the lift of installing on the bottom plate between the membrane carousel device export and plugging into the subassembly, the lift is plugged into the subassembly upper surface and is provided with the tray, the lift is plugged into one side of subassembly and is provided with the pushing cylinder, the lift is plugged into the subassembly top and is provided with unloading handling device, unloading handling device is including installing the linear drive module on the bottom plate, linear drive module power take off end installation is provided with the second rotating electrical machines, the lift cylinder is installed to the mounting panel bottom of second rotating electrical machines output, be provided with a plurality of third suction nozzles on the fixed plate of lift cylinder output.

The utility model has the following advantages:

1. according to the utility model, the iron sheet filled with the wafer is transported to the front film pouring turntable device through the feeding mechanism, the front film pouring turntable device can detect the wafer, the white film on the surface of the wafer is torn off and attached with the blue film after the detection is qualified, so that the front film pouring of the wafer is completed, if the detection is unqualified, the wafer is transported out through the defective product discharging mechanism, the defective product is prevented from being transported downwards, the wafer with the front film poured from the front film pouring turntable device is transported to the back film pouring turntable device through the back film pouring feeding and transporting mechanism, the white film on the back is torn off through the back film pouring turntable device, the patch and the isolation sheet are transported out and attached with the release film, and therefore the film pouring of the back film is completed.

2. According to the utility model, the first detection device is arranged between the feeding mechanism and the defective product discharging mechanism, the first detection device is used for detecting the wafer conveyed into the front film pouring turntable device, and the defective product wafer is prevented from being conveyed into the front film pouring turntable device so as to be unnecessarily operated, and the defective product wafer is conveyed out through the defective product discharging mechanism.

Drawings

Fig. 1 is a schematic top view of the present utility model.

Fig. 2 is a schematic overall perspective view of the present utility model.

Fig. 3 is a schematic diagram of the feeding and discharging handling components of the present utility model.

Fig. 4 is a schematic structural view of a first film tearing mechanism and a second film tearing mechanism according to the present utility model.

FIG. 5 is a schematic view of the structure of the air blowing and loading mechanism and the spacer handling assembly of the present utility model.

FIG. 6 is a schematic view of the internal structure of the suction hood of the present utility model.

Fig. 7 is a schematic structural diagram of a film sticking mechanism according to the present utility model.

Fig. 8 is a schematic diagram of a back side film pouring and feeding structure according to the present utility model.

Fig. 9 is a schematic diagram of a second turntable according to the present utility model.

Fig. 10 is a schematic structural diagram of a blanking conveying device according to the present utility model.

Fig. 11 is a schematic structural diagram of a loading lifting assembly according to the present utility model.

Fig. 12 is a schematic view of a back side film pouring feed transfer mechanism of the present utility model.

Fig. 13 is a schematic view of the feeding and discharging handling components of the present utility model.

Fig. 14 is a schematic structural diagram of a release film feeding and transporting assembly according to the present utility model.

In the figure, 1, a bottom plate; 2. a feed mechanism; 21. a feeding conveyer belt; 22. a feed handling assembly; 23. the feeding lifting and transferring assembly; 231. a lifting movement module; 232. a lifting frame; 3. a defective product discharging mechanism; 31. a discharge conveyor belt; 32. the defective product discharging and carrying assembly; 33. a discharging lifting transfer assembly; 4. lifting the slow warehouse; 5. a front side film pouring turntable device; 51. a first turntable; 52. a first film tearing mechanism; 521. a first biaxial drive module; 522. a first rotating electric machine; 523. a rotating frame; 524. a film tearing clamp; 525. a film tearing suction nozzle; 526. a film tearing clamping jaw; 53. a blowing and feeding mechanism; 531. a first linear motion module; 532. a first lifting module; 533. a first suction nozzle; 534. an air-extracting cover; 535. a blowing knife; 54. a film pasting mechanism; 541. a frame; 542. a three-axis driving module; 543. a suction cup; 544. a rolling wheel; 545. a membrane supply assembly; 55. a material transferring mechanism; 56. a first detection device; 6. a back film pouring and feeding carrying mechanism; 61. a transverse handling device; 611. a second biaxial drive assembly; 612. a transfer plate; 613. a second suction nozzle; 62. an adjusting device; 621. a carrier; 622. a heating assembly; 6221. a third biaxial drive assembly; 6222. a heating block; 623. a film scraping assembly; 6231. a fourth biaxial drive assembly; 6232. a film scraping head; 624. a flip assembly; 6241. a fifth biaxial drive assembly; 6242. a moving plate; 6243. clamping the rotating assembly; 625. a back film pouring and feeding transfer mechanism; 6251. a sixth biaxial drive assembly; 6252. a magnetic suction plate; 7. a back film pouring turntable device; 71. a second turntable; 72. a second film tearing mechanism; 73. an iron ring discharging and carrying assembly; 74. a spacer handling assembly; 75. a feeding lifting assembly; 751. a mounting column; 752. a guide strut; 753. a drive column; 754. a driving motor; 755. a gear drive assembly; 756. a lifting plate; 76. the iron ring stores the lifting assembly; 77. a release film feeding and carrying assembly; 78. a second detection device; 8. a transfer belt; 9. a discharging and carrying mechanism; 91. lifting the connection assembly; 92. a tray; 93. a pushing cylinder; 94. a blanking and carrying device; 941. a linear driving module; 942. a second rotating electric machine; 943. a lifting cylinder; 944. and a third suction nozzle.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, based on the embodiments of the utility model, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the utility model.

The embodiment shown in fig. 1-13:

the utility model provides an automatic film pouring machine, includes bottom plate 1, bottom plate 1 one side is provided with feed mechanism 2 and defective goods discharge mechanism 3 respectively, the exit of feed mechanism 2 is provided with openly and falls membrane carousel device 5, defective goods discharge mechanism 3 is connected with openly and falls membrane carousel device 5, openly fall membrane carousel device 5 one side and be provided with back and fall membrane carousel device 7, be provided with back and fall membrane pan feeding transport mechanism 6 between the discharge end of openly falling membrane carousel device 5 and the pan feeding end of back falling membrane carousel device 7, back falls membrane carousel device 7 exit and is provided with lift slow storehouse 4, be provided with ejection of compact transport mechanism 9 between lift slow storehouse 4 and the back and fall membrane carousel device 7 export.

Referring to fig. 1 and 2, the iron ring of the wafer is transported to the front film pouring turntable device 5 through the feeding mechanism 2, the front film pouring turntable device 5 can detect the wafer, the qualified white film on the surface of the wafer is torn off and attached with the blue film, thereby completing the front film pouring of the wafer, if the detection is unqualified, the wafer with the front film poured from the front film pouring turntable device 5 is transported out through the defective product discharging mechanism 3, the defective products are prevented from being transported downwards, the wafer with the front film poured from the front film pouring turntable device 5 is transported to the back film pouring turntable device 7 through the back film pouring turntable device 6, the white film on the back is torn off through the back film pouring turntable device 7, the iron ring and the isolation sheet are transported out and attached with the release film, thereby completing the film pouring of the back film, the film pouring is automatically detected and transported without manual participation in the process of the front and back film pouring of the wafer, the film pouring efficiency is greatly improved, and the degree of automation is improved.

The feeding mechanism 2 comprises a feeding conveyer belt 21 positioned at one side of the bottom plate 1, a feeding lifting and transferring assembly 23 is arranged at the outlet of the feeding conveyer belt 21, a feeding carrying assembly 22 is arranged on the bottom plate 1, and the feeding carrying assembly 22 is positioned at the connection position of the feeding lifting and transferring assembly 23; the defective product discharging mechanism 3 comprises a discharging conveying belt 31 positioned at one side of the bottom plate 1, a discharging lifting transferring assembly 33 is arranged at the inlet of the discharging conveying belt 31, a defective product discharging carrying assembly 32 is further arranged on the bottom plate 1, and the defective product discharging carrying assembly 32 is positioned at the connection position of the discharging lifting transferring assembly 33; the feeding lifting transferring assembly 23 comprises a lifting movement module 231 fixedly installed in an installation groove of the bottom plate 1, a lifting frame 232 is installed at a power output end of the lifting movement module 231, the feeding lifting transferring assembly 23 and the discharging lifting transferring assembly 33 are identical in structure, the feeding carrying assembly 22 is used for transferring an iron ring located on the feeding conveying belt 21 to the front film pouring turntable device 5, and the defective product discharging carrying assembly 32 is used for transferring defective products detected by the front film pouring turntable device 5 to the discharging lifting transferring assembly 33 and transferring the defective products out through the discharging conveying belt 31.

Referring to fig. 1 to 3, the feeding conveyor belt 21 is started to drive a material box with iron rings to be conveyed to the lifting frame 232, a plurality of iron rings are sequentially placed in the material box from top to bottom, white films are attached to two sides of a patch, the white films are adhered to the iron rings, a wafer is arranged between the two white films, the iron rings are annular, the wafer is positioned in the annular rings, the material box is driven to move up and down by starting the lifting movement module 231, so that the feeding conveying assembly 22 is convenient to convey the iron rings to the front side film pouring turntable device 5, the front side film pouring turntable device 5 can be rotated and conveyed to the next station when detecting that the wafer is qualified, and the wafer is conveyed to the material box in the discharging lifting conveying assembly 33 by the defective product discharging conveying assembly 32 when detecting that the wafer is unqualified, and is conveyed by the discharging conveyor belt 31;

the lifting movement module 231 may be a motor screw driving assembly or a motor synchronous belt driving assembly, and in this embodiment, the lifting movement module 231 is a motor screw driving assembly, which is well known to those skilled in the art, and the specific structure is not described in detail herein.

Referring to fig. 13, the feed carrying assembly 22 and the reject discharge carrying assembly 32 have the same structure, and can both move in the transverse and longitudinal directions, and specifically, the feed carrying assembly is composed of two single screw rod driving assemblies, and the output end of the feed carrying assembly is provided with a magnetic plate which can adsorb an iron ring, thereby completing the transfer

The front film pouring turntable device 5 comprises a first turntable 51 which is rotatably arranged on the upper surface of the bottom plate 1, a first detection device 56 which is fixedly arranged on the upper surface of the bottom plate 1 and sequentially arranged relative to the rotation direction of the first turntable 51, a first film tearing mechanism 52, a blowing upper piece mechanism 53, a film pasting mechanism 54 and a material rotating mechanism 55, wherein the first detection device 56 is positioned between the feeding mechanism 2 and the defective product discharging mechanism 3.

Referring to fig. 1 and 2, the first detecting device 56 detects the wafer in the iron ring conveyed from the feeding mechanism 2, after the detection is qualified, the wafer is transferred to the station of the first film tearing mechanism 52 through the rotation of the first rotating disc 51, the first film tearing mechanism 52 tears off the white film attached to the iron ring and the front surface of the wafer, after the white film is torn off, the iron ring from which the white film is torn off is transferred to the blowing upper sheet mechanism 53 through the rotation of the first rotating disc 51 again, the blowing upper sheet mechanism 53 transfers the recycled separation sheet from the back side film pouring turntable device 7 to the iron ring, then the separation sheet positioned on the iron ring is transferred to the station of the film pasting mechanism 54, then the iron ring, the separation sheet and the wafer with the blue film attached are transferred to the transfer mechanism 55 through the first rotating disc 51 and transferred to the back side film pouring material conveying mechanism 6 through the transfer mechanism 55, and the transfer mechanism 55 is the same as the back side film pouring turntable device 625 in the transfer mechanism.

The first film tearing mechanism 52 comprises a first two-shaft driving module 521 fixedly installed on the upper surface of the base plate 1, a first rotating motor 522 is fixedly installed at the power output end of the first two-shaft driving module 521, a rotating frame 523 is installed at the output end of the first rotating motor 522, and a film tearing clamping clamp 524, a film tearing suction nozzle 525 and a film tearing clamping jaw 526 are installed on the rotating frame 523.

Referring to fig. 4, when the detected wafer is transferred to the station of the first film tearing mechanism 52 for film tearing, first, the first two-axis driving module 521 and the first rotating motor 522 are started to move the film tearing clamp 524, the film tearing suction nozzle 525 and the film tearing clamping jaw 526 to a preset position under the linkage, then the film tearing suction nozzle 525 adsorbs the white film, at the moment, a gap is formed between the white film and the edge of the iron ring, then the film tearing clamping jaw 526 is inserted into the gap, the white film is clamped by the film tearing clamp 524, and the white film of the clamping column is torn off from the iron ring through the first two-axis driving module 521 and the first rotating motor 522 again, so that film tearing is completed;

the first two-axis driving module 521 is formed by assembling two linear modules, and in this embodiment, the first two-axis driving module 521 is formed by assembling two motor screw driving assemblies, so as to realize lateral movement and vertical two axial movements, and the specific motor screw assemblies are well known to those skilled in the art and will not be described in detail.

The air blowing and feeding mechanism 53 comprises a first linear motion module 531 fixedly installed on the upper surface of the base plate 1, a first lifting module 532 and an air suction cover 534 are installed on a fixed plate at the power end of the first linear motion module 531, an air blowing cutter 535 is fixedly installed at the inner top end of the air suction cover 534, and a plurality of first suction nozzles 533 are arranged on a fixed plate at the power output end of the first lifting module 532.

Referring to fig. 5 and 6, the spacer sucked by the first suction nozzle 533 is transferred to the iron ring at the station under the linkage between the first linear movement module 531 and the first lifting module 532, the spacer is also in a ring shape, dust possibly located on the wafer can be blown off by the blowing blade 535, and then the blown dust is sucked off by the suction hood 534, so that the dust is prevented from drifting into the working environment to damage the wafer or the apparatus; in this embodiment, the first linear motion module 531 is a motor screw assembly, the first lifting module 532 is an air cylinder, and the air cylinder drives the first suction nozzle 533 to move up and down.

The film pasting mechanism 54 comprises a frame 541 fixedly installed on the upper surface of the bottom plate 1, a film feeding assembly 545 is arranged on the side face of the frame 541, a three-shaft driving module 542 is arranged on the upper surface of the film feeding assembly 545, and a sucker 543 and a rolling wheel 544 are respectively arranged at the output end of the three-shaft driving module 542.

Referring to fig. 7, when film pasting is required, firstly, the suction cup 543 is transferred to the connection position of the film feeding assembly 545 through the three-axis driving module 542, then the film feeding assembly 545 transfers the blue film to the connection position, the film feeding assembly 545 adsorbs the blue film at the connection position, and after the blue film is sucked, the suction cup 543 is transferred to the isolation sheet positioned on the station of the film feeding assembly 545 through the three-axis driving module 542 to carry out film pasting, so that the film pasting process is completed.

The back film pouring turntable device 7 comprises a second turntable 71 which is rotatably arranged on the upper surface of the bottom plate 1, a second film tearing mechanism 72, an iron ring discharging and conveying assembly 73, a separation sheet conveying assembly 74, a release film feeding and conveying assembly 77 and a second detection device 78 which are fixedly arranged on the upper surface of the bottom plate 1 and are sequentially arranged in terms of the rotation direction of the second turntable 71, iron ring storage and lifting assemblies 76 and feeding and lifting assemblies 75 are respectively arranged below the iron ring discharging and conveying assembly 73 and the feeding and lifting assembly 75, and a transfer belt 8 is arranged between the separation sheet conveying assembly 74 and the blowing and loading mechanism 53.

Referring to fig. 1, fig. 2, fig. 9 and fig. 11, firstly, the back film pouring and feeding carrying mechanism 6 can turn over the wafer with the attached blue film from the front film pouring turntable device 5, so that the blue film faces downwards, the white film on the back faces upwards, the white film on the back is torn off through the second film tearing mechanism 72, the second film tearing mechanism 72 and the first film tearing mechanism 52 have the same structure and function, the iron ring is carried to the iron ring storage lifting assembly 76 through the iron ring discharging carrying assembly 73 after the film tearing is finished, only the blue film, the wafer and the separation sheet are left on the station, and then the separation sheet carrying assembly 74 takes off and carries the separation sheet to the transfer belt 8 after the separation sheet carrying assembly 74 is transported to the blowing and loading mechanism 53 through the transfer belt 8, so that the recycling is convenient, and only the blue film and the wafer are located on the transfer station; when transferring to the station of the release film feeding and conveying assembly 77, the release film feeding and conveying assembly 77 attaches the release film positioned on the feeding and lifting assembly 75 to the wafer, then the wafer positioned between the release film and the blue film is transferred to the second detecting device 78, the second detecting device 78 detects the wafer, the wafer is conveyed to the lifting and buffering warehouse 4 for buffering through the discharging and conveying mechanism 9, in the embodiment, the second detecting device 78 and the first detecting device 56 adopt CCD detecting modules, the iron ring storage and lifting assembly 76 and the feeding and lifting assembly 75 are identical in structure, the isolating sheet conveying assembly 74 and the blowing and feeding mechanism 53 are identical in structure, the iron ring storage and lifting assembly 76 buffers the iron ring conveyed by the iron ring discharging and conveying assembly 73, and the feeding and lifting assembly 75 supplies materials for the release film feeding and conveying assembly 77.

Referring to fig. 14, the release film feeding and carrying assembly 77 is composed of a linear module and a cylinder, an adsorption plate is arranged at an output end, and the linear module and the cylinder are linked to enable the adsorption plate to move transversely and up and down, so that the release film at the feeding and lifting assembly 75 can be transported and attached

The feeding lifting assembly 75 comprises mounting columns 751 fixedly mounted on the upper surface of the bottom plate 1 and distributed in a rectangular mode, guide sliding columns 752 are slidably arranged on each mounting column 751, lifting plates 756 are arranged on the upper surface of the guide sliding columns 752, driving columns 753 are fixedly connected to the centers of the bottom surfaces of the lifting plates 756, driving motors 754 are fixedly mounted on the bottom surface of the bottom plate 1, power output ends of the driving motors 754 are connected with gear transmission assemblies 755, and the gear transmission assemblies 755 are in transmission connection with the driving columns 753.

Referring to fig. 11, the driving motor 754 is started to drive the gear transmission assembly 755 to rotate, so as to drive the driving post 753 to lift, and further make the lifting plate 756 lift, where the gear transmission assembly 755 may be a gear, and the driving post 753 is provided with teeth adapted to mesh with the gear on the gear transmission assembly 755, so that the driving post 753 can drive the lifting plate 756 to lift up and down, and other transmission mechanisms may be used, including the above structure but not limited to.

The back film pouring feeding and conveying mechanism 6 comprises an adjusting device 62 which is arranged on the bottom plate 1 and is positioned between the discharging end of the front film pouring turntable device 5 and the feeding end of the back film pouring turntable device 7, and one side of the adjusting device 62 is provided with a transverse conveying device 61 for conveying; the transverse carrying device 61 comprises a second biaxial driving assembly 611 fixedly arranged on the upper surface of the bottom plate 1, a transfer plate 612 is fixedly arranged at the power output end of the second biaxial driving assembly 611, and a plurality of second suction nozzles 613 are arranged on the transfer plate 612; the adjusting device 62 comprises a bearing frame 621 at one side of the transverse carrying device 61, a plurality of brackets are arranged on the upper surface of the bearing frame 621, and a heating component 622, a film scraping component 623, a turnover component 624 and a back film pouring and feeding transfer mechanism 625 are sequentially arranged above the bearing frame 621 along the conveying direction; the heating assembly 622 includes a third biaxial driving assembly 6221, a heating block 6222 is installed at the power output end of the third biaxial driving assembly 6221, the film scraping assembly 623 includes a fourth biaxial driving assembly 6231, and a film scraping head 6232 is installed at the power output end of the fourth biaxial driving assembly 6231; the turnover assembly 624 includes a fifth biaxial driving assembly 6241, a moving plate 6242 is fixed at the power output end of the fifth biaxial driving assembly 6241, and clamping and rotating assemblies 6243 are disposed on two sides of the inner wall of the moving plate 6242; the back film pouring and feeding transfer mechanism 625 comprises a sixth second shaft driving assembly 6251, and a magnetic suction plate 6252 is arranged at the power output end of the sixth second shaft driving assembly 6251.

Referring to fig. 1, fig. 2 and fig. 8, the second biaxial driving assembly 611 can move left and right and up and down, the transfer mechanism 55 carries the wafer with the attached blue film onto the feeding station of the carrier 621, and then the wafer is sequentially carried to the stations of the heating assembly 622, the film scraping assembly 623, the turnover assembly 624 and the back film pouring transfer mechanism 625 under the linkage of the second biaxial driving assembly 611 and the second suction nozzle 613, when the wafer is carried to the stations of the heating assembly 622, the third biaxial driving assembly 6221 drives the heating block 6222 to move to the stations and move downwards, the heating block 6222 is an electric heating device, and heating can be performed by using heating devices such as heating wires, and an ejection mechanism (not shown in the drawings) is further arranged below the stations of the heating assembly 622, and the heating block 6222 moves downwards to heat the blue film, so that the wafer and the white film are attached tightly, and the wafer is prevented from falling in the subsequent carrying process; then the wafer is conveyed to a station of a film scraping component 623, and a film scraping head 6232 is driven by a fourth biaxial driving component 6231 to scrape the blue film, so that the blue film is smoother; the wafer is carried to a station of the turnover assembly 624, firstly, the fifth biaxial driving assembly 6241 moves the moving plate 6242 to the wafer at the station, then the iron ring, the isolation sheet and the blue film are clamped by the clamping rotating assembly 6243, and then the motor (not shown) on the side wall of the moving plate 6242 drives the clamping rotating assembly 6243 to rotate, so that the turnover function is realized, the clamping rotating assembly 6243 consists of a clamping cylinder and a motor, and the motor drives the clamping cylinder to perform the fanning; the turned wafer is conveyed to a station of a back film pouring and feeding transfer mechanism 625, and a magnetic suction plate 6252 for adsorbing an iron ring is driven to move by a sixth biaxial driving assembly 6251, so that the iron ring, a separation sheet, the wafer and a blue film are conveyed to a back film pouring turntable device 7;

each two-shaft driving assembly in the back film pouring and feeding carrying mechanism 6 is composed of a motor screw driving module and a lifting cylinder or other modules capable of realizing linear motion.

The ejection of compact handling mechanism 9 is including being located the lift slow storehouse 4 and the back and pouring the lift of installing on bottom plate 1 between the membrane carousel device 7 export and plugging into subassembly 91, the lift is plugged into the subassembly 91 upper surface and is provided with tray 92, the lift is plugged into one side of subassembly 91 and is provided with pushing cylinder 93, the lift is plugged into the subassembly 91 top and is provided with unloading handling device 94, unloading handling device 94 is including installing the linear drive module 941 on bottom plate 1, linear drive module 941 power take off end is installed and is provided with second rotating electrical machines 942, lift cylinder 943 is installed to the mounting panel bottom of second rotating electrical machines 942 output, be provided with a plurality of third suction nozzles 944 on the fixed plate of lift cylinder 943 output.

After the linear driving module 941 and the second rotating motor 942 are started and linked to enable the lifting cylinder 943 and the third suction nozzle 944 to move to an outlet station of the back film pouring turntable device 7, the lifting cylinder 943 and the third suction nozzle 944 are started to enable the lifting cylinder 943 and the third suction nozzle 944 to be linked to suck and convey the wafer positioned between the blue film and the release film to a tray 92 positioned on the lifting and connecting assembly 91, the lifting and connecting assembly 91 is started to drive the tray 92 to ascend and connect with the third suction nozzle 944 to enable the wafer to be conveyed into the tray 92, then the lifting and connecting assembly 91 drives the tray 92 to return to an initial position, a pushing cylinder 93 (not shown) at one side is started to push the tray 92 and the wafer positioned on the tray 92 into the lifting and buffering warehouse 4 to be buffered, the tray 92 can be fed by an external mechanical arm or other structures and placed on the lifting and connecting assembly 91, and the operation conveying process is repeated for other wafers; the lifting connection assembly 91 has the same structure as the feeding lifting assembly 75 and the iron ring storage lifting assembly 76, and plays a role in lifting.

The working process of the utility model is as follows: the iron ring with the wafer is transported to the front film pouring turntable device 5 through the feeding mechanism 2, the wafer is detected through the first detection device 56 in the front film pouring turntable device 5, the unqualified product is transported out through the defective product discharging mechanism 3, the qualified product is transported out through the steps of tearing films, separating films, adhering films and the like through the first tearing mechanism 52, the blowing film feeding mechanism 53 and the film adhering mechanism 54 in the front film pouring turntable device 5, the wafer is transported to the turnover 6 through 55 after the film pouring is finished, the wafer is transported to the back film pouring turntable device 7 through the back film pouring material transporting mechanism 6, the second tearing mechanism 72, the iron ring discharging material transporting assembly 73, the separating film transporting assembly 74 and the material lifting assembly 75 in the back film pouring turntable device 7 are used for respectively tearing films, separating films and the like, the wafer is transported to the buffer storage 4 through the discharging mechanism 9 after the film pouring is detected.

Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.

Claims (10)

1. An automatic film pouring machine comprises a bottom plate (1), and is characterized in that: the automatic film pouring machine is characterized in that a feeding mechanism (2) and a defective product discharging mechanism (3) are respectively arranged on one side of the bottom plate (1), a front film pouring turntable device (5) is arranged at the outlet end of the feeding mechanism (2), the defective product discharging mechanism (3) is connected with the front film pouring turntable device (5), a back film pouring turntable device (7) is arranged on one side of the front film pouring turntable device (5), a back film pouring feeding carrying mechanism (6) is arranged between the discharging end of the front film pouring turntable device (5) and the feeding end of the back film pouring turntable device (7), a lifting buffer warehouse (4) is arranged at the outlet of the back film pouring turntable device (7), and a discharging carrying mechanism (9) is arranged between the lifting buffer warehouse (4) and the outlet of the back film pouring turntable device (7).

2. An automatic film pouring machine as claimed in claim 1, wherein: the feeding mechanism (2) comprises a feeding conveying belt (21) positioned at one side of the bottom plate (1), a feeding lifting transfer assembly (23) is arranged at the outlet of the feeding conveying belt (21), a feeding carrying assembly (22) is arranged on the bottom plate (1), and the feeding carrying assembly (22) is positioned at the connection position of the feeding lifting transfer assembly (23); the defective product discharging mechanism (3) comprises a discharging conveying belt (31) positioned at one side of the bottom plate (1), a discharging lifting transferring assembly (33) is arranged at the inlet of the discharging conveying belt (31), a defective product discharging conveying assembly (32) is further arranged on the bottom plate (1), and the defective product discharging conveying assembly (32) is positioned at the connection position of the discharging lifting transferring assembly (33); the feeding lifting transferring assembly (23) comprises a lifting movement module (231) fixedly installed in a mounting groove of the bottom plate (1), a lifting frame (232) is installed at a power output end of the lifting movement module (231), the feeding lifting transferring assembly (23) and the discharging lifting transferring assembly (33) are identical in structure, the feeding conveying assembly (22) is used for transferring an iron ring located on the feeding conveying belt (21) to the front film pouring turntable device (5), and the defective product discharging conveying assembly (32) is used for transferring defective products detected by the front film pouring turntable device (5) to the discharging lifting transferring assembly (33) and transferring the defective products out through the discharging conveying belt (31).

3. An automatic film pouring machine as claimed in claim 1, wherein: the front film pouring turntable device (5) comprises a first turntable (51) which is rotatably arranged on the upper surface of the bottom plate (1), and further comprises a first detection device (56), a first film tearing mechanism (52), a blowing film feeding mechanism (53), a film sticking mechanism (54) and a material transferring mechanism (55), wherein the first detection device (56) is fixedly arranged on the upper surface of the bottom plate (1) and sequentially arranged relative to the rotation direction of the first turntable (51), and the first detection device (56) is located between the feeding mechanism (2) and the defective product discharging mechanism (3).

4. An automatic film pouring machine according to claim 3, wherein: the first film tearing mechanism (52) comprises a first two-shaft driving module (521) fixedly arranged on the upper surface of the bottom plate (1), a first rotating motor (522) is fixedly arranged at the power output end of the first two-shaft driving module (521), a rotating frame (523) is arranged at the output end of the first rotating motor (522), and a film tearing clamping clamp (524), a film tearing suction nozzle (525) and a film tearing clamping jaw (526) are arranged on the rotating frame (523).

5. An automatic film pouring machine according to claim 3, wherein: the air blowing and feeding mechanism (53) comprises a first linear movement module (531) fixedly arranged on the upper surface of the bottom plate (1), a first lifting module (532) and an air suction cover (534) are arranged on a fixed plate of the power end of the first linear movement module (531), an air blowing knife (535) is fixedly arranged at the inner top end of the air suction cover (534), and a plurality of first suction nozzles (533) are arranged on a fixed plate of the power output end of the first lifting module (532).

6. An automatic film pouring machine according to claim 3, wherein: the film pasting mechanism (54) comprises a frame (541) fixedly installed on the upper surface of the bottom plate (1), a film feeding assembly (545) is arranged on the side face of the frame (541), a three-shaft driving module (542) is arranged on the upper surface of the film feeding assembly (545), and sucking discs (543) and rolling wheels (544) are respectively arranged at the output ends of the three-shaft driving module (542).

7. An automatic film pouring machine according to claim 3, wherein: the back film pouring turntable device (7) comprises a second turntable (71) which is rotatably arranged on the upper surface of the bottom plate (1), a second film tearing mechanism (72), an iron ring discharging and conveying assembly (73), a separation sheet conveying assembly (74), a release film feeding and conveying assembly (77) and a second detection device (78) which are fixedly arranged on the upper surface of the bottom plate (1) and sequentially arranged in the rotation direction of the second turntable (71), an iron ring storing and lifting assembly (76) and a feeding and lifting assembly (75) are respectively arranged below the iron ring discharging and conveying assembly (73) and the feeding and lifting assembly (75), and a transfer belt (8) is arranged between the separation sheet conveying assembly (74) and the blowing and feeding mechanism (53).

8. An automatic film pouring machine as recited in claim 7, wherein: the feeding lifting assembly (75) comprises mounting columns (751) which are fixedly mounted on the upper surface of a bottom plate (1) and are distributed in a rectangular mode, guide sliding columns (752) are arranged in the mounting columns (751) in a sliding mode, lifting plates (756) are arranged on the upper surface of the guide sliding columns (752), driving columns (753) are fixedly connected to the centers of the bottom surfaces of the lifting plates (756), driving motors (754) are fixedly mounted on the bottom surface of the bottom plate (1), power output ends of the driving motors (754) are connected with gear transmission assemblies (755), and the gear transmission assemblies (755) are in transmission connection with the driving columns (753).

9. An automatic film pouring machine as claimed in claim 1, wherein: the back film pouring and feeding conveying mechanism (6) comprises an adjusting device (62) which is arranged on the bottom plate (1) and is positioned between the discharging end of the front film pouring turntable device (5) and the feeding end of the back film pouring turntable device (7), and one side of the adjusting device (62) is provided with a transverse conveying device (61) for conveying; the transverse carrying device (61) comprises a second shaft driving assembly (611) fixedly arranged on the upper surface of the bottom plate (1), a transfer plate (612) is fixedly arranged at the power output end of the second shaft driving assembly (611), and a plurality of second suction nozzles (613) are arranged on the transfer plate (612); the adjusting device (62) comprises a bearing frame (621) at one side of the transverse carrying device (61), a plurality of brackets are arranged on the upper surface of the bearing frame (621), and a heating component (622), a film scraping component (623), a turnover component (624) and a back film pouring and feeding transfer mechanism (625) are sequentially arranged above the bearing frame (621) along the conveying direction; the heating component (622) comprises a third biaxial driving component (6221), a heating block (6222) is arranged at the power output end of the third biaxial driving component (6221), the film scraping component (623) comprises a fourth biaxial driving component (6231), and a film scraping head (6232) is arranged at the power output end of the fourth biaxial driving component (6231); the overturning assembly (624) comprises a fifth second shaft driving assembly (6241), a moving plate (6242) is fixedly arranged at the power output end of the fifth second shaft driving assembly (6241), and clamping rotating assemblies (6243) are arranged on two sides of the inner wall of the moving plate (6242); the back film pouring and feeding transfer mechanism (625) comprises a sixth biaxial driving assembly (6251), and a magnetic suction plate (6252) is arranged at the power output end of the sixth biaxial driving assembly (6251).

10. An automatic film pouring machine as claimed in claim 1, wherein: the utility model provides a discharging transport mechanism (9) is including being located lift slow storehouse (4) and back fall membrane carousel device (7) export between install lift assembly (91) on bottom plate (1), lift assembly (91) upper surface is provided with tray (92) that lift is connected, one side that lift assembly (91) was connected is provided with pushing cylinder (93), lift assembly (91) top is provided with unloading handling device (94), unloading handling device (94) are including installing linear drive module (941) on bottom plate (1), linear drive module (941) power take off end is installed and is provided with second rotating electrical machines (942), lift cylinder (943) are installed to the mounting panel bottom of second rotating electrical machines (942) output, be provided with a plurality of third suction nozzles (944) on the fixed plate of lift cylinder (943) output.

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