WO2011148548A1 - Appareil pour transfert de panneau plat - Google Patents

Appareil pour transfert de panneau plat Download PDF

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Publication number
WO2011148548A1
WO2011148548A1 PCT/JP2011/001445 JP2011001445W WO2011148548A1 WO 2011148548 A1 WO2011148548 A1 WO 2011148548A1 JP 2011001445 W JP2011001445 W JP 2011001445W WO 2011148548 A1 WO2011148548 A1 WO 2011148548A1
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WO
WIPO (PCT)
Prior art keywords
flat plate
air
production line
glass substrate
conveying apparatus
Prior art date
Application number
PCT/JP2011/001445
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English (en)
Japanese (ja)
Inventor
神徳千幸
Original Assignee
シャープ株式会社
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Filing date
Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Publication of WO2011148548A1 publication Critical patent/WO2011148548A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a flat plate transport device that transports a flat plate such as a glass substrate used for a liquid crystal display to a work position on a production line, and particularly relates to dust generation countermeasures.
  • Patent Document 1 the glass substrate is supported while being floated from below by an air flow so that the glass substrate does not hang down due to its own weight in the conveyance process, and both edges in the width direction are contact-supported and conveyed by a roller conveyor.
  • a flat plate conveying device is disclosed.
  • Patent Document 2 discloses a flat plate transport device that transports a glass substrate while floating and supporting it from below by an air flow.
  • Japanese Patent Laying-Open No. 2005-154040 paragraph 0016, FIG. 3
  • Japanese Patent Laying-Open No. 2005-206304 paragraph 0024, paragraph 0028, FIG. 2
  • the present invention has been made in view of the above points, and an object of the present invention is to efficiently prevent contamination in the process of transporting a flat plate such as a glass substrate.
  • the present invention is characterized in that dust is prevented from adhering to the flat plate by using the floating support by the air flow as described in Patent Documents 1 and 2 above.
  • the present invention is directed to a flat plate transport device that transports a flat plate to a work position provided in a production line, and has taken the following solutions.
  • the first invention is a region in the transport direction leading to the work position of the manufacturing line, a flat plate transfer region between the manufacturing line and the work position, and a flat plate transport driving unit installed between the work positions in the manufacturing line.
  • air levitation means that blows and supports the flat plate by air flow by blowing air on the back surface of the flat plate, and is separated from the air levitation means so as not to hinder the plate floating by the air levitation means.
  • air discharging means for sucking the air blown onto the back surface of the flat plate and discharging it out of the production line.
  • the flat plate is supported at both edges in the width direction by a roller conveyor formed by arranging a large number of rollers in two rows on both sides of the production line in the flat plate conveyance direction.
  • the rollers in the area in the transport direction leading to the work position of the production line are in contact with the both edges in the width direction of the flat plate, and the portions excluding the both edges in the width direction are lifted and supported by the air levitation means.
  • a posture correcting function for correcting the transport posture, and the air discharging means is provided so as to surround the roller portion.
  • a flat plate support member and a drive unit for moving the flat plate support member in the flat plate transfer area are provided in the flat plate transfer area between the production line and the work position.
  • a flat plate delivery device is disposed, and the air discharge means is provided so as to surround the drive unit.
  • a fourth invention is the invention according to any one of the first to third inventions, wherein the flat plate is formed by a roller conveyor formed by juxtaposing a plurality of rollers in two rows on both sides of the production line in the flat plate conveying direction. Both end edges are supported, and portions excluding the width direction both end edges are supported by the air levitation means and conveyed, and the plurality of rollers include driving rollers, and are flat plates between work positions in the production line.
  • a flat plate conveyance drive unit that is integrally connected to the drive roller is installed, and configured to convey the flat plate by rotating the drive roller by driving the flat plate conveyance drive unit,
  • the air discharge means is provided so as to surround the flat plate conveyance driving unit.
  • a position detection means for detecting the transport position of the flat plate is provided in front of the installation area of the air levitation means and the air discharge means.
  • the air levitation means and the air discharge means are configured to operate from the approach of the flat plate to the installation area based on the detection signal of the position detection means until the plate leaves.
  • the flat plate is suction-held at the center by suction holding means moving on the production line, and the portion excluding the suction holding part is supported by the air floating means.
  • the suction holding means is a movable body movably mounted on a guide rail extending along the production line, a suction pad provided on the movable body for sucking and holding the flat plate, and the movement
  • a drive unit that moves the body, and the guide rail has an air discharge port formed continuously or intermittently through the entire length in the longitudinal direction, and the air discharge means constitutes the air discharge port. It is characterized by.
  • the flat plate is a glass substrate used for a liquid crystal display panel.
  • the area in the transport direction leading to the work position of the production line, the flat plate transfer area between the production line and the work position, and the flat plate transport drive unit installation area between the work positions in the production line are: It is a dust generation location, and the dust generated at the dust generation location can be effectively discharged out of the production line by the air discharge means using the air flow for supporting the floating plate.
  • the both ends of the flat plate in the width direction come into contact with the roller, so that the scraps of the flat plate and the roller are dust.
  • the dust can be discharged out of the production line by the air discharge means using the air flow for supporting the floating plate.
  • the third invention when the flat plate is transferred in the flat plate transfer area between the production line and the work position, dust is generated from the periphery of the driving portion of the flat plate transfer device.
  • the flow can be discharged out of the production line by air discharge means.
  • the generated dust can be discharged out of the production line by energy saving operation.
  • the flat plate that is floated and supported by the air flow while being sucked and held by the suction pad is transported through the production line by the moving body moving along the guide rail by the drive unit. At this time, dust is generated from the drive unit, and the dust can be discharged out of the production line from the air discharge port of the guide rail using an air flow for supporting the floating plate.
  • dust can be prevented from being attached to the glass substrate for liquid crystal display panels whose size is increasing, and the glass substrate can be efficiently transported to the work position of the production line. .
  • FIG. 1 is a plan view of the flat plate conveying device according to the first embodiment.
  • FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
  • FIG. 3 is a plan view of the flat plate delivery device.
  • FIG. 4 is a plan view showing another form of the flat plate conveyance driving unit.
  • FIG. 5 is a plan view of the flat plate conveying device according to the second embodiment.
  • FIG. 6 is a cross-sectional view taken along line VI-VI in FIG.
  • FIG. 1 shows a flat plate conveyance device 1 according to Embodiment 1 of the present invention.
  • the flat plate conveyance device 1 is disposed on a production line L of a liquid crystal display panel (not shown), for example, and is on the production line L side.
  • a glass substrate (for example, 3 m ⁇ 3 m ⁇ 0.7 mm) G as a flat plate is transported to a work position provided on the side.
  • the cassette 3 for stacking a plurality of glass substrates G in a multi-layer shape is illustrated as an operation position. Includes other work positions.
  • the flat plate conveying device 1 includes a roller conveyor 5 that conveys the glass substrate G.
  • the roller conveyor 5 includes a driving roller 7 and a plurality of free rollers 9 arranged in parallel on both sides of the driving roller 7 in the flat plate conveying direction. A large number of these drive rollers 7 and free rollers 9 are arranged in two rows in the flat plate conveying direction so as to face both sides of the production line L. Both the driving roller 7 and the free roller 9 are provided on the shaft 13 so as to rotate together.
  • the rollers 7 and 9 support the both edges in the width direction of the glass substrate G from below and convey them along the production line L. (See FIG. 2).
  • a plurality of air nozzles 11 as air levitation means are arranged in two rows in the flat plate conveying direction, and these air nozzles 11 are provided on the back surface of the glass substrate G.
  • the glass substrate G is transported while air A is blown and the portions of the glass substrate G excluding both edges in the width direction are levitated and supported by an air flow.
  • a duct 16 (see FIG. 2) that constitutes an air discharge means is provided so as to surround the posture correcting roller 15 from below in an area S1 (front side in FIG. 1) that reaches the cassette 3 of the production line L.
  • the duct 16 is connected to a negative pressure source (not shown), and the air A blown to the back surface of the glass substrate G is sucked into the duct 16 and discharged out of the production line L.
  • the duct 16 is separated from the air nozzle 11 by a predetermined distance so as not to prevent the air nozzle 11 from floating on the glass substrate G.
  • the flat plate delivery device 19 includes a gantry 21 movably mounted on the delivery rail 17 and a fork-like flat plate support member 23 movably supported on the pedestal 21, and the flat plate support member 23 is provided with a suction pad 25 for sucking and holding the glass substrate G from below.
  • the pedestal 21 moves on the delivery rail 17 by activation of the first motor 27 constituting the drive unit, and the flat plate support member 23 moves on the gantry 21 by activation of the second motor 29 constituting the drive unit.
  • the flat plate transfer device 19 is rotated 180 ° in a horizontal plane to change its direction. G is to be handed over. During this delivery, glass waste is generated as dust due to contact between the glass substrate G and the flat plate support member 23.
  • the flat plate transport drive unit 31 includes a third motor 33, a drive pulley 35 fixed to the output shaft 33a of the third motor 33, a driven pulley 37 fixed to the shaft 13 of the drive roller 7, A belt 39 wound around the drive pulley 35 and the driven pulley 37 is constituted.
  • the driving roller 7 is rotated by driving the flat plate conveyance driving unit 31 (starting of the third motor 33), and the glass substrate G is conveyed in a state of being floated by the cooperation of the free roller 9 and the air nozzle 11. I am doing so.
  • the third motor 33 is driven, belt scraps and the like are generated as dust from around the third motor 33. Therefore, the conveyance direction to the cassette 3 of the production line L is not shown in the corresponding portion.
  • a duct 16 constituting air discharge means is provided so as to surround the flat plate transport drive unit 31 from below, and the duct 16 is connected to a negative pressure source outside the figure.
  • the flat plate conveyance drive unit 31 is installed in all the drive roller assemblies 7 of the production line L, but in FIG. 3, the flat plate conveyance drive unit 31 is omitted for convenience.
  • the flat plate transport driving unit 31 includes a third motor 33, a driving air gear 41 fixed to the output shaft 33 a of the third motor 33, and the driving roller assembly 7. You may be comprised with the driven gear 43 fixed to the shaft 13.
  • FIG. 4 the flat plate transport driving unit 31 includes a third motor 33, a driving air gear 41 fixed to the output shaft 33 a of the third motor 33, and the driving roller assembly 7. You may be comprised with the driven gear 43 fixed to the shaft 13.
  • the air blowing by the air nozzle 11 and the duct 16 are performed.
  • the exhaust gas is configured to operate during the period from when the glass substrate G approaches each installation area until it leaves.
  • the region S1 in the transport direction leading to the cassette 3 in the production line L will be described as an example.
  • An optical sensor 44 such as a laser displacement meter is installed.
  • a non-contact sensor or the like can be used instead of the optical sensor 44.
  • the air nozzle 11 and the duct 16 are configured to operate during the period from when the glass substrate G approaches each installation area until it leaves, based on the detection signal of the optical sensor 44.
  • the generated dust is efficiently and effectively discharged out of the production line L from the duct 16 using the air flow blown from the air nozzle 11. Therefore, it is possible to prevent dust from adhering to the glass substrate G for liquid crystal display panels, which are becoming increasingly popular, and damage to the glass substrate G due to adhering dust.
  • the duct 16 is separated from the air nozzle 11 by a predetermined distance, the air A blown to the back surface of the glass substrate G is surely sucked into the duct 16 to efficiently remove dust scattered by the air flow. It can be discharged from the duct 16. Further, the air A blown to the back surface of the glass substrate G is not sucked into the duct 16 more than necessary, and the amount of air required for air levitation can be reduced.
  • the air nozzle 11 and the duct 16 operate only when necessary, the generated dust can be discharged out of the production line L by energy saving operation.
  • FIG. 5 and 6 show the flat plate conveying device 1 according to the second embodiment.
  • suction conveyance is adopted instead of conveyance by the roller conveyor 5 of the first embodiment. That is, the glass substrate G is transported while the central portion of the glass substrate G is sucked and held by the sucking and holding means, and the portion excluding the sucking and holding portion is levitated and supported by the air A blown out from the air nozzle 11.
  • a single guide rail 45 is laid so as to extend over the entire length along the production line L, and the suction holding means can move to the guide rail 45.
  • a moving body 47 mounted on the vehicle is provided.
  • the moving body 47 is provided with a pair of rotating shafts 49 arranged at intervals in the longitudinal direction of the guide rail 45, and suction pads 51 for sucking and holding the glass substrate G at the upper ends of the rotating shafts 49.
  • suction pads 51 for sucking and holding the glass substrate G at the upper ends of the rotating shafts 49.
  • the moving body 47 is provided with a duct 16 between both the rotating shafts 49, and a fourth motor 53 constituting a driving unit is installed on a side portion of the moving body 47, The movable body 47 is moved by driving the fourth motor 53.
  • a slit-like air discharge port 55 is continuously formed through the guide rail 45 over the entire length in the longitudinal direction, and the air discharge means is configured by the air discharge port 55 and the duct 16. Note that the air discharge port 55 may be formed to be intermittently penetrated.
  • the glass substrate G floated and supported by the air flow while being sucked and held by the suction pad 51 is conveyed along the production line L by the moving body 47 being moved along the guide rail 45 by the fourth motor 53.
  • dust is generated from the drive portion (around the fourth motor 53), that is, from the contact portion between the moving body 47 and the guide rail 45.
  • An air flow blown out from the air nozzle 11 is introduced into the duct 16.
  • the dust is adhered to the glass substrate G for the liquid crystal display panel which is efficiently and effectively discharged from the air discharge port 55 of the guide rail 45 to the outside of the production line L, and the size of the glass substrate G is increasing.
  • the substrate G can be prevented from being damaged.
  • the duct 16 is separated from the air nozzle 11 by a predetermined distance, and therefore, the air A blown to the back surface of the glass substrate G is reliably sucked into the duct 16 and the air flow.
  • the dust scattered by the can can be efficiently discharged from the duct 16.
  • the air A blown to the back surface of the glass substrate G is not sucked into the duct 16 more than necessary, and the amount of air required for air levitation can be reduced.
  • the flat plate transfer area S2 between the production line L and the cassette 3 if the same configuration as that of the second embodiment is adopted, the flat plate is transferred when the glass substrate G is transferred between the production line L and the cassette 3. Even if dust is generated from around the first and second motors 27 and 29 by driving the first and second motors 27 and 29 of the delivery device 19, the air flow in which the dust is blown out from the air nozzle 11 is ducted. 16 and introduced into the production line L, efficiently and effectively discharged, and adherence to the glass substrate G for liquid crystal display panels, which are increasing in size, and damage to the glass substrate G due to adhering dust Can be prevented.
  • the installation area of the suction holding means and the air discharge means may be one or two of the above three areas depending on the state of dust generation. Further, not only in these areas, the area in the transport direction leading to the work position of the production line L, the flat plate transfer area between the production line L and the work position, and the flat plate transport drive unit installed between the work positions in the production line L Any area may be used as long as it is an area.
  • the present invention is useful for a flat plate conveying apparatus that conveys a flat plate such as a glass substrate used for a liquid crystal display to a work position on a production line.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un appareil pour transférer un panneau plat, dans lequel une région frontale (S1) dans la direction de transfert, ladite région frontale atteignant une cassette sur une ligne de production (L), une région de livraison du panneau plat entre la ligne de production et la cassette, et une région où une section de commande de transfert de panneau plat est installée, ladite région étant disposée entre des positions de marche sur la ligne de production, sont pourvues de : une buse à air (11), qui fait flotter et supporte un substrat de verre (G) au moyen d'un courant d'air en soufflant de l'air (A) à la surface arrière du substrat de verre (G) ; et un conduit (16), qui est disposé à une distance de la buse à air (11) de telle sorte que le flottement du substrat de verre (G) ne soit pas perturbé, ledit flottement étant généré par la buse à air (11), et qui aspire l'air (A) soufflé à la surface arrière du substrat de verre (G), et décharge l'air à l'extérieur de la ligne de production. Par conséquent, la contamination dans le procédé de transfert du substrat de verre (G) peut être éliminée efficacement.
PCT/JP2011/001445 2010-05-24 2011-03-11 Appareil pour transfert de panneau plat WO2011148548A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-118137 2010-05-24
JP2010118137 2010-05-24

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WO2011148548A1 true WO2011148548A1 (fr) 2011-12-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2905807A1 (fr) * 2014-02-11 2015-08-12 Süss Microtec Lithography GmbH Méthode et appareil pour empêcher la déformation d'un substrat supporté à sa périphérie
CN109132546A (zh) * 2018-08-23 2019-01-04 通彩智能科技集团有限公司 一种薄板输送装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061326U (ja) * 1992-06-10 1994-01-11 村田機械株式会社 ローラコンベア
JPH09278181A (ja) * 1996-04-11 1997-10-28 Canon Inc ワーク搬送装置及び搬送方法
JPH09298137A (ja) * 1996-03-08 1997-11-18 Kokusai Electric Co Ltd 基板処理装置
JP2006024841A (ja) * 2004-07-09 2006-01-26 Tohoku Univ 平板状部材の搬送装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061326U (ja) * 1992-06-10 1994-01-11 村田機械株式会社 ローラコンベア
JPH09298137A (ja) * 1996-03-08 1997-11-18 Kokusai Electric Co Ltd 基板処理装置
JPH09278181A (ja) * 1996-04-11 1997-10-28 Canon Inc ワーク搬送装置及び搬送方法
JP2006024841A (ja) * 2004-07-09 2006-01-26 Tohoku Univ 平板状部材の搬送装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2905807A1 (fr) * 2014-02-11 2015-08-12 Süss Microtec Lithography GmbH Méthode et appareil pour empêcher la déformation d'un substrat supporté à sa périphérie
WO2015121284A1 (fr) * 2014-02-11 2015-08-20 Süss Microtec Lithography Gmbh Procédé et appareil pour empêcher la déformation d'un substrat porté au niveau de sa zone de bord
CN106062941A (zh) * 2014-02-11 2016-10-26 苏斯微技术光刻有限公司 用于防止在边缘区域被支撑的基板的变形的方法和装置
US10103049B2 (en) 2014-02-11 2018-10-16 Suss Microtec Lithography Gmbh Method and apparatus for preventing the deformation of a substrate supported at its edge area
CN109132546A (zh) * 2018-08-23 2019-01-04 通彩智能科技集团有限公司 一种薄板输送装置

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