JP5915358B2 - 搬送装置 - Google Patents
搬送装置 Download PDFInfo
- Publication number
- JP5915358B2 JP5915358B2 JP2012100556A JP2012100556A JP5915358B2 JP 5915358 B2 JP5915358 B2 JP 5915358B2 JP 2012100556 A JP2012100556 A JP 2012100556A JP 2012100556 A JP2012100556 A JP 2012100556A JP 5915358 B2 JP5915358 B2 JP 5915358B2
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- JP
- Japan
- Prior art keywords
- workpiece
- transport
- suction
- unit
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
図1は、第1の実施形態における搬送装置100の構造を説明するための説明図である。特に、図1(a)は、搬送装置100の上面図を示し、図1(b)は、搬送装置100の正面図を示し、図1(c)は、搬送装置100の側面図を示す。ただし、図1においては、説明の便宜上、後述するカバー部116を破線で示し、搬送方向の長さを短く示している。
図4は、変形例における吸引部218を説明するための説明図である。変形例の搬送装置200は、減圧部118の代わりに、ベルヌーイチャック機構で構成される吸引部218を備える。ベルヌーイチャック機構は、ワークWの表面に気体を噴き付けて、当該ワークWの表面に負圧を生じさせるものである。
次に、第2の実施形態の搬送装置300における搬送部312とその駆動機構、および、吸引部318について説明する。第2の実施形態では、上記第1の実施形態と、搬送部312とその駆動機構、および、吸引部318のみが異なる。したがって、ここでは上記第1の実施形態と同じ構成については説明を省略し、構成が異なる搬送部312とその駆動機構、および、吸引部318についてのみ説明する。
W …ワーク
100、200、300 …搬送装置
110 …回転体
112 …搬送部
112a …突起部
116 …カバー部
116a …開口部
118 …減圧部
318 …吸引部
Claims (1)
- 複数の回転体と、
可撓性を有するワークを接触支持する複数の突起部を有し、前記複数の回転体によって無端状に張架され、前記ワークを搬送する、搬送方向に平行に対向配置された複数の搬送部と、
前記搬送部の搬送方向に移動する搬送部位および搬送方向の逆方向に移動する非搬送部位のいずれも覆うカバー部と、
前記カバー部の内部を減圧する減圧部と、
前記カバー部に設けられ前記突起部よりも鉛直下方に位置する開口部と、
前記開口部に形成され、前記突起部の両側に対向して位置し、前記ワークを鉛直下方に吸引する力が働く吸引領域と、
を備え、
前記開口部は、前記搬送方向の前記突起部の軌道に沿って延在することを特徴とする搬送装置。
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012100556A JP5915358B2 (ja) | 2012-04-26 | 2012-04-26 | 搬送装置 |
CN201710131976.6A CN106743657A (zh) | 2012-04-26 | 2013-02-26 | 搬运装置 |
CN201380020061.8A CN104245546A (zh) | 2012-04-26 | 2013-02-26 | 搬运装置 |
PCT/JP2013/054986 WO2013161375A1 (ja) | 2012-04-26 | 2013-02-26 | 搬送装置 |
KR1020147029617A KR101610215B1 (ko) | 2012-04-26 | 2013-02-26 | 반송 장치 |
PCT/JP2013/054989 WO2013161376A1 (ja) | 2012-04-26 | 2013-02-26 | 搬送装置 |
CN201380021075.1A CN104245547B (zh) | 2012-04-26 | 2013-02-26 | 输送装置 |
KR1020147029615A KR20140144236A (ko) | 2012-04-26 | 2013-02-26 | 반송 장치 |
TW102106990A TWI483883B (zh) | 2012-04-26 | 2013-02-27 | Handling device |
TW102106991A TWI495607B (zh) | 2012-04-26 | 2013-02-27 | Handling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012100556A JP5915358B2 (ja) | 2012-04-26 | 2012-04-26 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013227128A JP2013227128A (ja) | 2013-11-07 |
JP5915358B2 true JP5915358B2 (ja) | 2016-05-11 |
Family
ID=49482716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012100556A Active JP5915358B2 (ja) | 2012-04-26 | 2012-04-26 | 搬送装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5915358B2 (ja) |
KR (1) | KR20140144236A (ja) |
CN (2) | CN106743657A (ja) |
TW (1) | TWI483883B (ja) |
WO (1) | WO2013161375A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI583608B (zh) * | 2016-11-29 | 2017-05-21 | 盟立自動化股份有限公司 | 用以運送一平板構件之氣浮平台 |
JP6588181B1 (ja) * | 2019-04-25 | 2019-10-09 | 株式会社日立パワーソリューションズ | 帯状ワーク供給装置 |
TWI692432B (zh) * | 2019-05-15 | 2020-05-01 | 晶彩科技股份有限公司 | 薄板輸送裝置及其方法 |
CN111232650B (zh) * | 2020-01-13 | 2020-09-01 | 江苏科技大学 | 一种可重构模块化的气浮输运装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0351711U (ja) * | 1989-09-22 | 1991-05-20 | ||
JP2001196438A (ja) * | 2000-01-14 | 2001-07-19 | Toray Eng Co Ltd | 薄板状材の搬送装置 |
JP2004210440A (ja) * | 2002-12-27 | 2004-07-29 | Ishikawajima Harima Heavy Ind Co Ltd | 板状体の搬送装置 |
JP4183525B2 (ja) * | 2003-02-14 | 2008-11-19 | シーケーディ株式会社 | 薄板の搬送用支持装置 |
JP2007008644A (ja) * | 2005-06-29 | 2007-01-18 | Ckd Corp | 板状ワークの搬送装置 |
JP5028919B2 (ja) * | 2006-09-11 | 2012-09-19 | 株式会社Ihi | 基板搬送装置及び基板搬送方法 |
JP4896148B2 (ja) * | 2006-10-10 | 2012-03-14 | 株式会社日本設計工業 | 薄板状材料搬送装置 |
JP4753313B2 (ja) * | 2006-12-27 | 2011-08-24 | 東京エレクトロン株式会社 | 基板処理装置 |
JP4344755B2 (ja) * | 2007-04-09 | 2009-10-14 | 株式会社日本設計工業 | 薄板状材料搬送用ローラユニット及び薄板状材料搬送装置 |
JP2008260591A (ja) * | 2007-04-10 | 2008-10-30 | Nippon Sekkei Kogyo:Kk | 薄板状材料搬送装置及び方法 |
JP5200868B2 (ja) * | 2008-11-11 | 2013-06-05 | 株式会社Ihi | 浮上搬送装置 |
JP2010126295A (ja) * | 2008-11-27 | 2010-06-10 | Nippon Sekkei Kogyo:Kk | 薄板状材料の搬送方法及び装置 |
JP5707713B2 (ja) * | 2010-03-11 | 2015-04-30 | 株式会社Ihi | 浮上搬送装置及びローラ駆動ユニット |
-
2012
- 2012-04-26 JP JP2012100556A patent/JP5915358B2/ja active Active
-
2013
- 2013-02-26 KR KR1020147029615A patent/KR20140144236A/ko not_active Application Discontinuation
- 2013-02-26 CN CN201710131976.6A patent/CN106743657A/zh active Pending
- 2013-02-26 WO PCT/JP2013/054986 patent/WO2013161375A1/ja active Application Filing
- 2013-02-26 CN CN201380020061.8A patent/CN104245546A/zh active Pending
- 2013-02-27 TW TW102106990A patent/TWI483883B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI483883B (zh) | 2015-05-11 |
WO2013161375A1 (ja) | 2013-10-31 |
CN106743657A (zh) | 2017-05-31 |
CN104245546A (zh) | 2014-12-24 |
TW201343521A (zh) | 2013-11-01 |
JP2013227128A (ja) | 2013-11-07 |
KR20140144236A (ko) | 2014-12-18 |
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