TWI393205B - Substrate transmission apparatus and substrate transmission method - Google Patents

Description

Substrate transfer device and substrate transfer method

The present invention relates to a substrate transfer apparatus and a substrate transfer method for monolithically transferring a substrate such as a semiconductor wafer or a flat panel display glass plate.

The present application claims the priority of Japanese Patent Application No. 2006-245829, filed on Sep.

In a factory for manufacturing a semiconductor device, and a substrate transfer device for manufacturing a flat panel display such as a liquid crystal device, a PDP or an EL device, a substrate such as a semiconductor wafer or a glass plate is transported, and a carrier and a robot arm are used. The substrate is transferred between various processing devices such as a thin film forming device, an etching device, and a test device, and a transfer path. In the above-described transport apparatus, the substrate is generally transported in a state in which it is housed in a cooker that can accommodate a plurality of substrates (see Patent Document 1).

In recent years, with the large screen of flat panel displays such as liquid crystal televisions, the number of substrates has also increased. Therefore, the cookware or the like for accommodating the substrate is also increased in size and weight, and the transport speed is lowered, thereby causing, for example, an increase in the inventory of unfinished products, which makes efficient transport difficult.

Therefore, the single-piece conveyance in which the substrates are conveyed at a high speed one by one is attracting attention (see Patent Document 1).

(Patent Document 1) Japanese Patent Publication No. 9-58844

However, the number of cases in which the substrate is transported in a single piece is increased as compared with the case of being transported by the cookware. Therefore, in order to achieve a processing speed equal to or higher than the conventional one, it is necessary to further transport the substrate at a high speed.

In particular, the transfer speed of the substrate between the main conveyor belt and the branch conveyor belt that is horizontally diverged from the main conveyor belt is extremely important in achieving the conveyance speed of the substrate. Therefore, it is desirable to have a technique for increasing the transfer speed of the substrate between the main conveyor belt and the branch conveyor belt.

Further, in the substrate transfer apparatus which transports the glass sheet in a single piece, the substrate may be transferred between the main conveyance belt and the branch conveyer belt without changing the orientation with respect to the traveling direction.

In a conventional substrate transport apparatus that transports a substrate in a cooker and transports it, for example, when the substrate autonomous transport belt is transferred to the branch conveyor without changing the orientation with respect to the traveling direction, it is transported to the main transport. The transfer of the cookware on the belt is temporarily stopped, and the transfer is carried out to the branch conveyor after the cookware is rotated.

However, in the substrate transfer apparatus that transports the substrate in a single piece, when the substrate is transferred in the same manner, the step of stopping the substrate transfer and the step of transferring the stopped substrate to the branch conveyor are necessary. It takes time to transfer the substrate between the main conveyor belt and the divergent conveyor belt.

The present invention has been made in view of the above problems, and an object thereof is to improve the space between the main conveyor belt and the branch conveyor belt when the substrate is transferred between the main conveyor belt and the branch conveyor belt without changing the traveling direction of the substrate. Substrate transfer speed.

In order to achieve the above object, a substrate transfer apparatus according to the present invention includes: a main conveyor belt that performs single-piece conveyance on a substrate; a branch conveyor belt that is horizontally branched from the main conveyor belt; and a substrate transfer portion that is maintained (not changing) the substrate is horizontally rotated with respect to the direction of travel of the substrate, and the substrate is transferred from the main conveyor to the branch conveyor or from the branch conveyor to the main conveyor band.

By the substrate transfer device, when the main conveyor belt is transferred from the main conveyor belt or the main conveyor belt is transferred from the branch conveyor belt, the substrate delivery portion can be maintained (not changed) relative to the substrate. In the state in which the traveling direction is oriented, the substrate is transferred while the substrate is horizontally rotated.

Further, in the substrate transfer apparatus of the present invention, the substrate transfer portion may be configured to include a head portion for holding the outer edge of the substrate, and a drive portion for centering the predetermined rotation axis Horizontal rotation; and an arm connecting one end to the head and the other end to the driving portion.

Moreover, the substrate transfer apparatus of the present invention may be configured to include a support portion for supporting the substrate from below while the substrate is being transferred by the substrate transfer portion.

Further, in the substrate transfer apparatus of the present invention, the support portion may be configured to float and support the substrate by using compressed air.

Next, in the substrate transfer method of the present invention, the substrate is transferred by the main conveyance belt in a single sheet, and the substrate on the main conveyance belt is horizontally maintained while maintaining the orientation with respect to the traveling direction of the substrate. Rotating, the substrate is transferred from the main conveyor to the horizontally divergent conveyor belt.

According to the substrate transfer method, the substrate autonomous transfer belt can be transferred to the branch conveyor while the substrate is horizontally rotated without changing the orientation with respect to the traveling direction of the substrate.

Next, in the substrate transfer method of the present invention, the substrate is transported from the branch conveyor belt that is horizontally branched from the main conveyor belt, and the branch belt is placed on the branch conveyor while maintaining the orientation with respect to the traveling direction of the substrate. The substrate is horizontally rotated to transfer the substrate to the main conveyor.

According to the substrate transfer method, the substrate can be transferred from the branch conveyor to the main conveyer belt while the substrate is horizontally rotated without changing the orientation of the traveling direction of the counter substrate.

According to the present invention, while the substrate is horizontally rotated while maintaining the orientation (unchanged) with respect to the traveling direction of the substrate, the substrate autonomous conveyor belt is transferred to the branch conveyor or the branch conveyor is transferred to the main conveyor belt. . Therefore, on the main conveyor belt or the branch conveyor belt, the substrate can be transferred at high speed without stopping the substrate.

Therefore, according to the present invention, when the substrate is transferred between the main conveyor belt and the branch conveyor belt without changing the traveling direction of the substrate, the delivery speed of the substrate between the main conveyor belt and the branch conveyor belt can be improved.

Hereinafter, an embodiment of the substrate transfer apparatus and the substrate transfer method of the present invention will be described with reference to the drawings. Further, in the following drawings, in order to make each member a recognizable size, the proportional dimensions of the respective members are appropriately changed.

(First embodiment)

Fig. 1 is a schematic view showing a substrate transfer apparatus 1 according to the first embodiment.

The substrate transfer device 1 is a device for manufacturing a flat panel display such as a liquid crystal device, a PDP, or an EL device, and the glass plate P is transported one by one, and includes a main conveyor 10; a plurality of differential conveyances. The belt 20 is branched in the horizontal plane with respect to the main conveyor belt 10; the board intersection portion 40 is used to transfer the glass sheet P between the main conveyor belt 10 and the branch conveyor belt 20; and a control unit (not shown) Control these in a comprehensive manner.

The main conveyor belt 10 is a device for horizontally placing the glass sheet P and transporting it at a fixed speed in the direction of the surface thereof, by the floating unit 12 (support portion), which floats the glass sheet P by air. It is supported in a non-contact manner, and is constituted by a conveyor belt portion 15 or the like (see FIGS. 2 and 3). As described above, in the present embodiment, the function of the support portion of the present invention is incorporated in one of the main conveyor belts 10.

The main conveyor belt 10 is disposed substantially in a straight line on the floor surface of the clean room of the factory. Further, at a plurality of portions of the main conveyor belt 10, one end of the branch conveyor belt 20 is connected to the main conveyor belt 10 substantially orthogonally and horizontally.

Similarly to the main conveyor belt 10, the branch conveyor belt 20 is a device that horizontally mounts the glass sheet P and conveys it at a fixed speed along the surface thereof, and is provided by the air floating unit 12 (support portion), and The conveyor belt unit 15 and the like are configured (see FIGS. 2 and 3). As described above, in the present embodiment, the function of the support portion of the present invention is also incorporated in one of the branch conveyor belts 20.

On the other end side of the branch conveyor 20, various processing apparatuses such as the film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7 are disposed and connected. In the various processing apparatuses such as the film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7, two branch conveyor belts 20 are arranged in parallel.

For example, among the branch conveyor belts 21, 22 (dividing conveyor belts 20) connected to the film forming apparatus 5, the branch conveyor belt 21 is used to carry the glass sheet P into the conveyor belt of the film forming apparatus 5, and the branch conveyor belt 22 is used. A conveyor belt for carrying out the glass sheet P from the film forming apparatus 5.

Similarly, the divergent conveyor belts 23, 25 (divergent conveyor belts 20) are used to carry the glass sheets P into the conveyor belt of the etching device 6, the testing device 7, and the divergent conveyor belts 24, 26 (divergent conveyor belts) are used to The glass plate P is conveyed from the etching device 6 and the test device 7 by a conveyor belt.

Further, the branch conveyor belts 21, 23, and 25 for carrying the glass sheet P into various processing apparatuses are disposed upstream of the main conveyor belt 10 with respect to the branch conveyor belts 22, 24, 26 from which the glass sheets P are carried out from various processing apparatuses. side.

The board delivery unit 40 is provided on the upstream side of the main conveyor 10 with respect to the branch conveyors 21, 23, and 25 that carry the glass sheets P into the respective processing apparatuses, and the differential conveyance of the glass sheets P from the respective processing apparatuses. The belts 22, 24, 26 are provided on the downstream side of the main conveyor belt 10, respectively.

The board intersection 40 is configured to transfer the glass sheet P autonomous conveyor belt 10 to the branch conveyor belt 20 or self-differentially conveyed while the glass sheet P is horizontally rotated without changing the orientation with respect to the traveling direction of the glass sheet P. The belt 20 is handed over to the main conveyor belt 10.

Fig. 2 is a view showing the detailed configuration of the main conveyor belt 10.

As described above, the main conveyor belt 10 is a device that floats the glass sheet P by air and conveys it in one of the horizontal directions, and includes a plurality of air floating units 12, a conveyor belt unit 15, and the like.

The air floating unit 12 is provided with a flat upper surface member, and a plurality of fluid ejection holes 13 for discharging compressed air are formed on the upper surface (mounting surface) at a substantially uniform arrangement density. The air floating unit 12 is formed in a rectangular shape in plan view, and its longitudinal direction is set to coincide with the conveying direction of the glass sheet P. Moreover, the short side direction (width direction) of the air floating unit 12 is formed to be slightly narrower than the width direction of the glass sheet P (the direction orthogonal to the conveyance direction).

Moreover, the compressed air is supplied to the air floating unit 12 from a compressed air supply device (not shown), and the compressed air is ejected from the respective fluid ejection holes 13. Thereby, the glass sheet P placed on the air floating unit 12 is floated by the compressed air ejected from the respective fluid ejection holes 13, so that it can be supported in a non-contact manner.

The conveyor belt portion 15 includes a plurality of rollers 16 and a belt 17 attached around the plurality of rollers 16. Further, on the surface of the belt 17, in the longitudinal direction of the belt 17 (the conveying direction of the main conveyor 10), a plurality of projections 18 are provided at equal intervals.

The conveyor belt portion 15 is disposed on both sides of the air floating unit 12 in the conveying direction of the glass sheet P. Moreover, the arrangement interval (distance) between the pair of conveyor belt portions 15 is substantially the same as the width direction of the glass sheet P.

The upper ends of the rollers 16 of the conveyor belt portion 15 are disposed at the same horizontal plane, whereby the projections 18 provided on the surface of the belt 17 are disposed slightly above the upper surface of the air floating unit 12. Then, the projection 18 is formed to abut against the outer edge (both end sides in the width direction) of the lower surface of the glass sheet P placed on the air floating unit 12.

Each of the rollers 16 of the belt portion 15 is formed to rotate in the same direction at the same rotational speed by a motor or the like (not shown). Thereby, the glass sheet P is supported by the air floating unit 12 in a non-contact manner, and can be transported along the air floating unit 12 by the conveyor belt portion 15.

Further, the conveyor belt portion 15 is configured to be movable in the vertical direction by a lifting device (not shown).

When the conveyor belt portion 15 is raised by the lifting device, the projections 18 are formed slightly above the upper surface of the air floating unit 12. At this time, the projections 18 of the conveyor belt portion 15 abut against the lower surface of the glass sheet P, and the glass sheet P can be conveyed.

On the other hand, when the conveyor belt portion 15 is lowered, the projections 18 are formed below the upper surface of the air floating unit 12. At this time, the conveyor belt portion 15 (each projection 18) is separated from the glass sheet P, and the glass sheet P is in a state of being completely supported in a non-contact manner on the air floating unit 12. Therefore, as long as no external force is applied to the glass sheet P, the glass sheet P is held on the air floating unit 12 in a stopped state.

Further, the main conveyor belt 10 is configured by connecting the air floating unit 12 and the conveyor belt unit 15 in plural. That is, each of the air floating unit 12 and the conveyor belt portion 15 are close to each other, and are arranged side by side in the horizontal direction. At this time, the upper surface (mounting surface) of each air floating unit 12 is adjusted to be in the same horizontal plane.

Further, the branch conveyor belt 20 is also constituted by the air floating unit 12 and the conveyor belt unit 15 provided in the main conveyor belt 10. Further, as shown in Fig. 1, in the present embodiment, the branch conveyor belt 20 is constituted by a single air floating unit 12 and two conveyor belt portions 15 disposed to surround the air floating unit 12. However, it may be further configured by a plurality of air floating units 12 and a conveyor belt portion 15.

Fig. 3 is a view showing the configuration of a divided portion of the main conveyor belt 10 and the branch conveyor belt 20.

As shown in Fig. 3, a plate intersection 40 is provided on the upstream side of the main conveyor 10 with respect to the branch conveyor 21.

The board intersection 40 is provided with an arm portion 41, a head portion 42, and a motor 43 (drive portion).

The arm portion 41 is connected to the head portion 42 at one end and to the motor 43 at the other end, and is horizontal.

The head portion 42 is configured to hold the outer edge portion of the glass sheet P, and specifically, to hold the vicinity of one side in the width direction of the glass sheet P. It is also possible to hold the glass sheet P by adsorbing and holding the side surface of the glass sheet P, or to hold the glass sheet P by holding the upper and lower surfaces of the glass sheet P.

The motor 43 rotates the head 42 horizontally about the vertical rotation axis L, and the head portion 42 is rotated by the arm portion 41 in the arrow direction (and the reverse arrow direction) shown in FIG.

Moreover, the glass plate P on the main conveyor 10 is transferred to the branch conveyor 20 while being rotated with respect to the traveling direction of the glass plate P by the plate delivery portion 40 having the above configuration.

Further, the board interface portion 40 provided on the upstream side of the main conveyor belt 10 on the opposite side of the conveyor belts 23, 25 has the same configuration, and the glass sheet P on the main conveyor belt 10 is oriented in the direction of the glass sheet P. On the other hand, the side is turned to the branch conveyor 20 while being turned.

Further, the plate intersection portion 40 provided on the downstream side of the main conveyor belt 10 with respect to the branch conveyor belts 22, 24, 26 also has the same structure as the panel interface portion 40 shown in Fig. 3, but is conveyed in a divergent manner. The glass plate P on the belt 20 is different from the plate intersection 40 shown in Fig. 3 in that the direction in which the glass sheet P travels is not changed with respect to the traveling direction of the glass sheet P while being transferred to the main conveyance belt 10.

Next, the operation of the substrate transfer device 1 (substrate transfer method) will be described.

Referring to FIGS. 4A to 4D, the case where the glass sheet P conveyed on the main conveyance belt 10 is transferred to the branch conveyor belt 20 (the upstream side of the main conveyor belt 10 with respect to the branch conveyor belts 21, 23, 25) will be described. The action of the board interface 40).

First, compressed air is supplied to each of the air elevating unit 12 of the main conveyor 10 and the branch conveyor 20, and compressed air is ejected from each of the fluid ejecting holes 13. Further, the conveyor belt portion 15 is driven to rotate the rollers 16 at a fixed rotational speed. At this time, each conveyor belt portion 15 is first raised by a lifting device (not shown).

Then, on the upstream side of the main conveyor belt 10, the glass sheets P are placed one by one, and the glass sheets P are conveyed in a single piece.

Further, as shown in FIG. 4A, when the glass sheet P on the main conveyor belt 10 is moved to a position where the head portion 42 of the board intersection portion 40 can reach, the head portion 42 of the board intersection portion 40 is moved to the branch conveyor belt 20 At one end, the outer edge of the glass sheet P on the main conveyor belt 10 is held. Thereafter, the main conveyor belt 10 and the conveyor belt portion 15 of the branch conveyor belt 20 are lowered by a lifting device (not shown). At this time, the glass sheet P is floated and supported by the compressed air ejected from the respective fluid ejection holes 13 of the respective air floating units 12.

Further, as shown in FIGS. 4B and 4C, the head portion 42 holding the glass sheet P is rotated by the motor 43 through the arm portion 41 in the horizontal plane, thereby transporting the glass sheet P from the main conveyor belt 10 to the difference. On the conveyor belt 20. At this time, the traveling direction of the glass sheet P changes from the traveling direction of the main conveyor belt 10 to the traveling direction of the branch conveyor belts 21, 23, and 25, but since the glass sheet P rotates, the foremost end advances with respect to the glass sheet P. The direction system has not changed.

In other words, in the substrate transfer apparatus 1 of the present embodiment, the glass sheet P on the main conveyor 10 is transferred to the branch conveyor 20 while being horizontally rotated while being oriented unchanged with respect to the traveling direction of the glass sheet. .

Further, in the present embodiment, since the head portion 42 is not movable in the same direction as the rotation direction of the conveyor belt portion 15, it is preferable to hold the glass sheet P in order to prevent the glass sheet P from rubbing against the belt portion 15. At the outer edge, the driving of the conveyor belt portion 15 is stopped. However, in the case where the glass sheet P and the belt portion 15 can be prevented from rubbing (for example, the belt portion 15 can be lowered while the head portion 42 holds the glass sheet P; the belt portion 15 can be lowered first. And the case where the glass plate P is held by the head 42; and the head can be moved in the same direction as the rotation direction of the conveyor belt portion 15, etc.), and does not necessarily have to hold the outer edge of the glass plate P, The driving of the conveyor belt portion 15 is stopped.

Further, as shown in Fig. 4D, when the glass sheet P is conveyed to the branch conveyor 20, the main belt 10 and the belt portion 15 of the branch belt 20 are again raised by a lifting device (not shown). Thereafter, the head portion 42 of the board delivery portion 40 releases the holding of the glass sheet P, whereby the glass sheet P is conveyed in the direction away from the main conveyor belt 10 by the branch conveyor belt 20.

Further, in the present embodiment, when the glass sheet P is released by the head portion 42, the friction between the glass sheet P and the belt portion 15 is preferably prevented in the same manner as when the outer edge of the glass sheet P is held. The driving of the conveyor belt portion 15 is stopped.

Further, the glass sheet P is conveyed by the branch conveyor 20, and is delivered to various processing apparatuses such as the film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7.

Further, the glass sheets P delivered to the respective processing apparatuses (the thin film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7, etc.) are subjected to predetermined processing by each processing apparatus, and then carried out to the outside of each processing apparatus.

Next, with reference to FIGS. 5A to 5D, the case where the glass sheet P is transferred from the branch conveyor 20 to the main conveyor belt 10 (the downstream side of the main conveyor belt 10 with respect to the branch conveyor belts 22, 24, 26) will be described. The action of the board interface 40).

The operation of transferring the glass sheet P from the branch conveyor belt 20 to the main conveyor belt 10 is such that the operation of transferring the glass sheet P autonomous conveyor belt 10 to the branch conveyor belt 20 is substantially reversed.

First, compressed air is supplied to each of the air floating unit 12 of the main conveyor 10 and the branch conveyor 20, and compressed air is discharged from each of the fluid discharge holes 13. Further, the conveyor belt portion 15 is driven to rotate the rollers 16 at a fixed rotational speed. At this time, each conveyor belt portion 15 is first raised by a lifting device (not shown).

Next, the glass sheet P is transferred to the branch conveyor 20 from various processing apparatuses such as the film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7. The glass sheet P is conveyed by the branch conveyor 20 and moved to a position where the head 42 of the board intersection 40 can reach. Further, as shown in Fig. 5A, the head portion 42 of the panel intersection portion 40 holds the outer edge of the glass sheet P on the branch conveyor 20. Thereafter, the main conveyor belt 10 and the conveyor belt portion 15 of the branch conveyor belt 20 are lowered by a lifting device (not shown). At this time, the glass sheet P is floated and supported by the compressed air ejected from the respective fluid ejection holes 13 of the respective air floating units 12.

Then, as shown in FIGS. 5B, 5C, and 5D, the head 42 of the holding glass plate P is rotated by the motor 43 through the arm portion 41 in the horizontal plane, thereby the glass plate P is self-constrained by the conveyor belt 20. It is transported onto the main conveyor belt 10. At this time, the traveling direction of the glass sheet P changes from the traveling direction of the branch conveyor belts 22, 24, 26 to the traveling direction of the main conveyor belt 10, but since the glass sheet rotates, the traveling direction of the foremost end with respect to the glass sheet P The system has not changed.

In other words, the substrate transfer apparatus 1 of the present embodiment can transfer the glass sheet P on the branch conveyor 20 to the main conveyance belt 10 while horizontally rotating while being oriented unchanged with respect to the traveling direction of the glass sheet P. .

As described above, the substrate transfer apparatus 1 of the present embodiment includes the main conveyor belt 10 for transporting the glass sheets P in a single sheet, and the branch conveyor belt 20 being horizontally divided with respect to the main conveyor belt 10; The plate intersection portion 40 is such that the glass sheet P is transferred from the main conveyor belt 10 to the branch conveyor belt 20 or is transferred from the branch conveyor belt 20 while being rotated in a direction opposite to the traveling direction of the glass sheet P. To the main conveyor belt 10.

According to the substrate transfer apparatus 1 and the substrate transfer method of the present embodiment described above, the glass sheet P can be transferred from the main conveyance belt 10 while being rotated while being oriented with respect to the direction in which the glass sheet P travels. The divergent conveyor belt 20 is either handed over from the divergent conveyor belt 20 to the main conveyor belt 10. Therefore, it is not necessary to stop the glass sheet P on the main conveyor belt 10 or the branch conveyor belt 20 in order to match the direction of the traveling direction of the glass sheet P, and the glass sheet P can be transferred at a high speed.

Therefore, according to the substrate transfer apparatus 1 and the substrate transfer method of the present embodiment, when the glass sheet P is transferred between the main conveyance belt 10 and the branch conveyance belt 20 without changing the traveling direction of the glass sheet P, the main conveyance belt can be improved. 10 The transfer speed of the glass plate P between the two different conveyor belts.

Further, in the substrate transfer apparatus 1 of the present embodiment, each of the air floating units 12 for discharging compressed air is used to support the glass sheet which is transferred between the main conveyor belt 10 and the branch conveyor belt 20 from below. P.

As described above, by supporting the glass sheet P from below at the time of the transfer, the bending of the glass sheet P can be suppressed.

Further, by using the compressed air to float the glass plate P, the glass plate P is transferred between the main conveyor 10 and the branch conveyor 20 in a state equal to the frictionless resistance. Therefore, when the delivery speed is increased, the glass sheet P is not damaged by the impact.

(Second embodiment)

Next, a second embodiment of the present invention will be described. In the description of the second embodiment, the description of the same portions as those of the first embodiment will be omitted or simplified.

Fig. 6 is a view showing the structure of a divided portion of the main conveyor 10 and the branch conveyor 20 of the substrate transfer apparatus of the embodiment. As shown in Fig. 6, in the present embodiment, the main conveyor belt 10 and the branch conveyor belt 21 are provided with a plurality of spherical free rollers 300 (supporting portions) instead of the air floating unit 12 of the first embodiment. The free roller unit 200 is constructed.

When the glass sheet P is transferred between the main conveyance belt 10 and the branch conveyance belt 20 by the substrate conveyance apparatus of this embodiment configured as described above, the glass sheet P is supported by the spherical free roller 300 from below.

Therefore, in the same manner as the substrate transfer device 1 of the first embodiment, when the glass sheet P is transferred between the main conveyance belt 10 and the branch conveyance belt 20, the glass sheet P can be suppressed. bending.

In addition, the shapes and combinations of the respective constituent members shown in the above-described embodiments, and the order of the operation are examples, and various modifications can be made depending on the design requirements and the like without departing from the scope of the invention.

For example, in the above embodiment, the configuration in which the main conveyor belt 10 and the branch conveyor belt 20 are disposed at right angles has been described. However, the present invention is not limited thereto, and can be applied to a configuration in which the main conveyor belt 10 and the branch conveyor belt 20 are disposed at different angles.

Further, in the above-described embodiment, the conveyor belt portion 15 is lowered by a lifting device (not shown), and when the glass sheet P is transferred between the main conveyor belt 10 and the branch conveyor belt 20, the glass sheet P can be prevented from being Contact of the conveyor belt portion 15. However, the present invention is not limited thereto, and instead of the lowering of the conveyor belt portion 15, the contact of the glass sheet P with the belt portion 15 may be prevented by the rise of the air floating unit 12. At this time, the upper surface of the air floating unit 12 of the conveyor on the delivery side is positioned at the same position as the upper surface 12 of the raised air floating unit.

In the above embodiment, the case where the glass sheet P is transported in a single piece is described, but the invention is not limited thereto. For example, it may be a thin plate-shaped member such as a semiconductor wafer.

In the above embodiment, various processing apparatuses such as the film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7 are disposed and connected to the other end side of the branch conveyor 20, but the invention is not limited thereto. On the downstream side (the other end side) of the branch conveyor 20, the branch conveyor 20 may be further connected.

Further, in addition to various processing apparatuses such as the thin film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7, a stocker for temporarily storing the plurality of substrates such as the glass sheet P may be disposed.

In the above-described embodiments, various processing apparatuses such as the film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7 are disposed, and the branch conveyor belts 21, 23, and 25 for carrying the glass sheet P and the branch conveyor belt for carrying out the glass sheet P are disposed. 22, 24, 26, but not limited to this. It is also possible to carry out the loading/removing of the glass sheet P for one of the branch conveyor belts 20.

Further, in the first embodiment described above, the case where the glass sheet P is floated and supported by the compressed air is described, but the invention is not limited thereto. For example, the glass plate P may be floated and supported by imparting a vibration wave propagating into the space to the glass sheet P.

[Industrial availability]

In the substrate transfer apparatus and the substrate transfer method of the present invention, in the case where the substrate is transferred between the main conveyance belt and the branch conveyance belt without changing the traveling direction of the substrate, the main conveyance belt and the differential conveyance can be utilized. The substrate transfer speed between the tapes.

1. . . Substrate transfer device

5. . . Film forming device

6. . . Etching device

7. . . Test device

10. . . Main conveyor belt

12. . . Air floating unit

13. . . Fluid ejection hole

15. . . Conveyor belt

16. . . Wheel

17. . . Belt

18. . . Protrusion

20, 21, 22, 23, 24, 25, 26. . . Divergent conveyor belt

40. . . Board interface

41. . . Arm

42. . . head

43. . . motor

200. . . Free roller unit

300. . . Spherical free roller

L. . . Rotary axis

P. . . glass plate

Fig. 1 is a schematic view showing a substrate transfer apparatus according to a first embodiment of the present invention.

Figure 2 is a diagram showing the detailed construction of the main conveyor belt.

Fig. 3 is a view showing the configuration of a divided portion with the board intersection of the branch conveyor belt.

Fig. 4A is a view showing the operation of the substrate transfer apparatus according to the first embodiment of the present invention (when a glass plate autonomous conveyance belt is introduced to a branch conveyor).

Fig. 4B is a view showing the operation of the substrate transfer apparatus according to the first embodiment of the present invention (when the glass plate autonomous conveyance belt is introduced to the branch conveyor).

Fig. 4C is a view showing the operation of the substrate transfer apparatus according to the first embodiment of the present invention (when a glass plate autonomous conveyance belt is introduced to a branch conveyor).

Fig. 4D is a view showing the operation of the substrate transfer apparatus according to the first embodiment of the present invention (when the glass plate autonomous conveyance belt is introduced to the branch conveyor).

Fig. 5A is a view showing the operation of the substrate transfer apparatus according to the first embodiment of the present invention (when the glass sheet is transferred from the branch conveyor to the main conveyor).

Fig. 5B is a view showing the operation of the substrate transfer apparatus 1 according to the first embodiment of the present invention (when the glass sheet is transferred from the branch conveyor to the main conveyor).

Fig. 5C is a view showing the operation of the substrate transfer apparatus 1 according to the first embodiment of the present invention (when the glass sheet is transferred from the branch conveyor to the main conveyor).

Fig. 5D is a view showing the operation of the substrate transfer apparatus 1 according to the first embodiment of the present invention (when the glass sheet is transferred from the branch conveyor to the main conveyor).

Fig. 6 is a view showing the structure of a branching portion of the substrate transfer device of the second embodiment of the present invention and the plate transfer portion of the branch conveyor.

1. . . Substrate transfer device

5. . . Film forming device

6. . . Etching device

7. . . Test device

10. . . Main conveyor belt

20, 21, 22, 23, 24, 25, 26. . . Divergent conveyor belt

40. . . Board interface

P. . . glass plate

Claims (4)

A substrate transfer device includes a main conveyor belt having a conveyor belt portion that can be lifted and lowered to abut the lower surface of the substrate and transport the substrate, and the substrate is transported in a single piece; a conveyor belt portion that can be lifted and lowered to abut against a lower surface of the substrate to transport the substrate, and horizontally branched from the main conveyor belt; the substrate intersection portion has a head for holding the outer edge of the substrate, and By rotating the horizontal plane of the substrate during the transport, the substrate is horizontally rotated while maintaining the orientation with respect to the traveling direction of the substrate, so as to be in the same direction as the traveling direction of the substrate. Changing the orientation of the substrate, the substrate is transferred from the main conveyor to the branch conveyor or from the branch conveyor to the main conveyor; and the means for attaching the substrate to the head while the conveyor is being transported The case where the belt portion is lowered, the head portion can hold the substrate after the belt portion is lowered, or the head portion can be oriented in the same direction as the rotation direction of the belt portion Moving the substrate from the main conveyor belt to the divergent conveyor belt or from the divergent conveyor belt to the main conveyor belt; and supporting means for the conveyor belt portion of the main conveyor belt and the divergence When the conveyor belt portion of the conveyor belt is descending, the substrate is supported by the compressed air. The substrate transfer device according to claim 1, wherein the substrate transfer portion includes: a drive portion that horizontally rotates the head centering on a predetermined rotation axis; and an arm portion that connects one end to the head And connect the other end to the drive. A substrate transfer method is a single-piece transfer of a substrate by a main conveyance belt, wherein a substrate transfer portion holds a side surface of the substrate, and the substrate transfer portion is rotated along a horizontal plane including the substrate during the transfer. While maintaining the orientation in the traveling direction of the substrate, the substrate is horizontally rotated, and the orientation of the substrate is changed so as to be in the same direction as the traveling direction of the substrate. a conveyor belt that is transferred from the main conveyor belt to a horizontally divergent conveyor belt; and a conveyor belt portion that is disposed on the main conveyor belt and that is movable up and down and abuts against the lower surface of the substrate when the vehicle is raised, and is disposed on the divergent conveyor belt And elevating and lowering and lowering the lower surface of the substrate when rising, and when the conveyor belt portion for transporting the substrate is descending, rotating the substrate and supporting the substrate by compressed air; holding the substrate at the head while The case where the conveyor belt portion is lowered, the head portion can hold the substrate after the conveyor belt portion is lowered, or the head portion can be turned toward the belt portion When the direction of movement in the same direction, the substrate is transferred from the main conveyor belt to the differences, or differences from the transfer conveyor to the main conveyor belt. A substrate transfer method is a method of transporting a substrate by a bifurcated conveyor belt that is horizontally diverged from a main conveyor belt, wherein the substrate transfer portion holds a side surface of the substrate, and the substrate transfer portion rotates along a horizontal plane including the substrate during the transport. In the state in which the substrate on the branch conveyor is horizontally rotated while maintaining the orientation with respect to the traveling direction of the substrate, the orientation of the substrate is changed so as to be in the same direction as the traveling direction of the substrate. The substrate is transferred to the main conveyor belt; the conveyor belt portion that is disposed on the main conveyor belt and that can be raised and lowered and abuts against the lower surface of the substrate when the vehicle is raised, and is disposed on the divergent conveyor belt and is movable up and down When the conveyor belt portion that conveys the substrate is lowered while rising, the substrate is rotated and the substrate is floated and supported by compressed air; the substrate is held at the head while the conveyor belt portion is being lowered. a case of falling, a condition in which the head can hold the substrate after the belt portion is lowered, or a direction in which the head can be rotated in the same direction as the belt portion Moving the case, the substrate is transferred from the main conveyor belt to the differences, or differences from the transfer conveyor to the main conveyor belt.