CN101512748A - Substrate conveying apparatus, and substrate conveying method - Google Patents

Substrate conveying apparatus, and substrate conveying method Download PDF

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Publication number
CN101512748A
CN101512748A CNA2007800331981A CN200780033198A CN101512748A CN 101512748 A CN101512748 A CN 101512748A CN A2007800331981 A CNA2007800331981 A CN A2007800331981A CN 200780033198 A CN200780033198 A CN 200780033198A CN 101512748 A CN101512748 A CN 101512748A
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CN
China
Prior art keywords
conveyer
branch
glass plate
substrate
aforesaid substrate
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Granted
Application number
CNA2007800331981A
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Chinese (zh)
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CN101512748B (en
Inventor
平田贤辅
水野智夫
村山晋
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IHI Corp
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IHI Corp
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Publication of CN101512748A publication Critical patent/CN101512748A/en
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Publication of CN101512748B publication Critical patent/CN101512748B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Engineering (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Relays Between Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)

Abstract

A substrate transfer apparatus is provided with a main conveyer for individually transferring substrates; a branched conveyer horizontally branched from the main conveyer; and a substrate receiving and transferring section for receiving the substrates from the main conveyer and transferring them to the branched conveyer or for receiving the substrates from the branched conveyer and transferring them to the main conveyer, while horizontally turning the substrates to maintain the direction of the substrates with respect to the advancing direction.

Description

Base-board conveying device and substrate transfer method
Technical field
The present invention relates to a kind ofly be used for individual and transport for example base-board conveying device and the substrate transfer method of the substrate of semiconductor wafer and glass for flat panel display plate etc.
The present invention is willing to advocate priority 2006-245829 number for the spy who filed an application on September 11st, 2006, and quotes its content at this.
Background technology
In the base-board conveying device of the factory that is arranged on factory that makes semiconductor device and the flat-panel monitor of making liquid-crystal apparatus, PDP, EL device etc. etc., transport the substrate of semiconductor wafer and glass plate etc. and use loader and mechanical arm etc. at the various processing unit of film forming device, Etaching device, experimental rig etc. with transport the handing-over of carrying out substrate between the pathway.In such base-board conveying device, substrate generally is (with reference to the patent documentation 1) that transports under the state in being accommodated in the box that can take in many substrates.
In recent years along with the big pictureization of the flat-panel monitor of LCD TV etc. and substrate is maximized.Therefore, the box etc. of taking in substrate is maximization/weightization also, and travelling speed is reduced, so for example cause the increase etc. of product inventory, is difficult to transport expeditiously.
Therefore, individual that many transports substrate at high speed transports receive publicity (with reference to patent documentation 1).
Patent documentation 1: the spy opens flat 9-58844 communique
But when individual transported substrate, comparing when transporting by box had increased the number of individuals that transports.Therefore, in order to realize with identical or must transport substrate more at high speed in the past more in the past than the processing speed that made progress.
Particularly main conveyer and and this main conveyer handing-over speed of the substrate between branch's conveyer of branch flatly, transport when realizing in the high speed that makes substrate and to become extremely important.Therefore, the technology of the handing-over speed lifting of the substrate between main conveyer and the branch's conveyer is expected.
In addition, transport in the base-board conveying device of glass plate at individual, between main conveyer and branch's conveyer, need sometimes not make with respect to direct of travel towards handing-over substrate with changing.
With substrate reception to box and in the base-board conveying device in the past that transports, for example, do not make with respect to direct of travel towards change with substrate when main conveyer is handed off to branch's conveyer, temporarily stop at transporting of the box that transports on the main conveyer, after box is rotated, it is handover to branch's conveyer.
But, transport in the base-board conveying device of substrate at individual, if sharp using the same method carried out the handing-over of substrate, the substrate delivery/reception that then needs to stop the operation of transporting of substrate and will stop is to the operation of branch's conveyer, so the affiliative need spended time of the substrate between main conveyer and branch's conveyer.
Summary of the invention
The present invention puts in view of the above-mentioned problems and proposes, and when purpose is not make between main conveyer and branch's conveyer the direct of travel of substrate to join substrate with changing, the handing-over speed of the substrate between main conveyer and the branch's conveyer is promoted.
In order to reach above-mentioned purpose, base-board conveying device of the present invention has: main conveyer, and individual transports substrate; Branch's conveyer is from above-mentioned main conveyer branch flatly; Substrate delivery/reception portion, make aforesaid substrate flatly rotate with keep (not changing) aforesaid substrate with respect to direct of travel towards, simultaneously aforesaid substrate is handover to above-mentioned branch conveyer or is handover to above-mentioned main conveyer from above-mentioned branch conveyer from above-mentioned main conveyer.
According to this base-board conveying device, from above-mentioned main conveyer to above-mentioned branch conveyer or during handing-over from above-mentioned branch conveyer to the substrate of above-mentioned main conveyer, by substrate delivery/reception portion, make substrate flatly rotate with keep (not changing) substrate with respect to direct of travel towards, carry out the handing-over of substrate simultaneously.
In addition, can adopt following formation in base-board conveying device of the present invention: the aforesaid substrate junction has: the top, control the outer rim of aforesaid substrate; Drive division is that the center is rotated this top water level land with set rotating shaft; Arm, an end are connected with above-mentioned top and the other end is connected with above-mentioned drive division.
In addition, in base-board conveying device of the present invention, can adopt following formation: have during the handing-over of the aforesaid substrate that is undertaken by the aforesaid substrate junction from below the supporting aforesaid substrate support.
In addition, can adopt following formation in base-board conveying device of the present invention: above-mentioned support uses compressed air aforesaid substrate to be floated and supporting substrates.
Then, substrate transfer method of the present invention is, individual transports substrate by main conveyer, make aforesaid substrate on the above-mentioned main conveyer flatly rotate with keep aforesaid substrate with respect to direct of travel towards, simultaneously it is given on branch's conveyer of branch flatly from above-mentioned main conveyer.
According to this substrate transfer method, make substrate flatly rotate with keep substrate with respect to direct of travel towards, simultaneously it is handover on branch's conveyer from main conveyer.
Then, substrate transfer method of the present invention is, by from main conveyer flatly branch's conveyer of branch transport substrate, make aforesaid substrate on the above-mentioned branch conveyer flatly rotate with keep aforesaid substrate with respect to direct of travel towards, simultaneously it is handed off on the main conveyer.
According to this substrate transfer method, flatly rotational substrate so that substrate with respect to direct of travel towards not changing, simultaneously it is handover on the main conveyer from branch's conveyer.
According to the present invention, make aforesaid substrate flatly rotate with keep (not changing) substrate with respect to direct of travel towards, simultaneously it is handover to branch's conveyer or is handover to main conveyer from branch's conveyer from main conveyer.Therefore, on main conveyer or branch's conveyer, substrate is stopped and can carrying out the handing-over of substrate at high speed.
Therefore, according to the present invention, do not make the direct of travel of substrate between main conveyer and branch's conveyer, during the handing-over substrate, the handing-over speed of the substrate between main conveyer and the branch's conveyer be promoted with changing.
Description of drawings
Fig. 1 is the schematic diagram of the base-board conveying device of expression first execution mode of the present invention.
Fig. 2 is the figure of the detailed formation of the main conveyer of expression.
Fig. 3 is the figure of the formation of the plate junction of expression branch conveyer and component.
Fig. 4 A is the figure of the action (with glass plate when main conveyer is introduced into branch's conveyer) of the base-board conveying device of expression first execution mode of the present invention.
Fig. 4 B is the figure of the action (with glass plate when main conveyer is introduced into branch's conveyer) of the base-board conveying device of expression first execution mode of the present invention.
Fig. 4 C is the figure of the action (with glass plate when main conveyer is introduced into branch's conveyer) of the base-board conveying device of expression first execution mode of the present invention.
Fig. 4 D is the figure of the action (with glass plate when main conveyer is introduced into branch's conveyer) of the base-board conveying device of expression first execution mode of the present invention.
Fig. 5 A is the figure of the action (with glass plate when branch's conveyer is handover to main conveyer) of the base-board conveying device of expression first execution mode of the present invention.
Fig. 5 B is the figure of the action (with glass plate when branch's conveyer is handover to main conveyer) of the base-board conveying device 1 of expression first execution mode of the present invention.
Fig. 5 C is the figure of the action (with glass plate when branch's conveyer is handover to main conveyer) of the base-board conveying device 1 of expression first execution mode of the present invention.
Fig. 5 D is the figure of the action (with glass plate when branch's conveyer is handover to main conveyer) of the base-board conveying device 1 of expression first execution mode of the present invention.
Fig. 6 is the figure of the formation of the plate junction of branch's conveyer in the base-board conveying device of expression second execution mode of the present invention and component.
Description of reference numerals
P glass plate (substrate)
1 base-board conveying device
10 main conveyers
12 air float the unit
15 delivery section
20 branch's conveyers
40 plate junctions (substrate delivery/reception portion)
41 arms
42 tops
43 motors (drive division)
200 free roller units (support)
Embodiment
Below, with reference to an execution mode of description of drawings base-board conveying device of the present invention and substrate transfer method.In addition, in the following accompanying drawing, for the size that can discern the engineer's scale of each parts has been carried out change aptly in order to make each parts.
(first execution mode)
Fig. 1 is the schematic diagram of the base-board conveying device 1 of this 1st implementation method of expression.
Base-board conveying device 1 be in the factory of the flat-panel monitor of making liquid-crystal apparatus, PDP, EL device etc. many individual transport the device of glass plate P, have: main conveyer 10, with respect to a plurality of branches conveyer 20 of main conveyer 10 branch in horizontal plane, the plate junction 40 of between main conveyer 10 and branch's conveyer 20, carrying out the handing-over of glass plate P, blanket the not shown control part of controlling these etc.
Main conveyer 10 be flatly mounting glass plate P and under certain speed with it to the device that transports along its surperficial direction, comprise utilize air that glass plate P is floated and non-contactly the air of supporting glass plate float (with reference to Fig. 2 and Fig. 3) such as unit 12 (support) and delivery section 15.Thus, in the present embodiment, the function of the support among the present invention is assembled to be become owner of in the part of conveyer 10.
Main conveyer 10 roughly is configured on the interior floor of the clean room of factory linearity.And, on a plurality of positions of main conveyer 10 with respect to main conveyer 10 approximate vertical and flatly link the end that branch's conveyer 20 is arranged.
Branch's conveyer 20 be with main conveyer 10 in the same manner flatly mounting glass plate P and under certain speed with it to the device that transports along its surperficial direction, comprise that air floats unit 12 (support) and delivery section 15 etc.Thus, in the present embodiment, the function of the support among the present invention also is assembled in the part of branch's conveyer 20.
Configuration/binding has various processing unit such as film forming device 5, Etaching device 6, experimental rig 7 on another of branch's conveyer 20 is distolateral.Configured in parallel has two branch's conveyers 20 respectively on various processing unit such as film forming device 5, Etaching device 6, experimental rig 7.
For example, in the branch's conveyer 21,22 (branch's conveyer 20) that links with film forming device 5, branch's conveyer 21 is to be used for glass plate P is transported into to the conveyer of film forming device 5, and branch's conveyer 22 is to be used for conveyer that glass plate P is transported from film forming device 5.
Equally, branch's conveyer 23,25 (branch's conveyer 20) is to be used for glass plate P is transported into to the conveyer of Etaching device 6, experimental rig 7, and branch's conveyer 24,26 (branch's conveyer 20) is to be used for conveyer that glass plate P is transported from Etaching device 6, experimental rig 7.
In addition, glass plate P is transported into branch's conveyer 21,23,25 to the various processing unit is configured in main conveyer 10 with respect to branch's conveyer 22,24,26 that glass plate P is transported from various processing unit upstream side.
Plate junction 40 is respectively with respect to glass plate P being transported into the branch's conveyer 21,23,25 to the various processing unit and be configured in the upstream side of main conveyer 10, and the downstream that is configured in main conveyer 10 from various processing unit with respect to branch's conveyer 22,24,26 that glass plate P is transported.
These plate junctions 40 be make glass plate P flatly rotate with keep glass plate P with respect to direct of travel towards, simultaneously glass plate P is handover to branch's conveyer 20 or glass plate P is handover to the device of main conveyer 10 from branch's conveyer 20 from main conveyer 10.
Fig. 2 is the figure of the detailed formation of the main conveyer 10 of expression.
Main conveyer 10 is to utilize air that glass plate P is floated and with its device that direction is transported to horizontal direction, comprise that air floats unit 12 and delivery section 15 etc. as mentioned above.
It is the parts with plane upper surface that air floats unit 12, and the compressed-air actuated a plurality of fluid ejection ports 13 of configuration density formation ejection with approximate equality are gone up on surface (mounting surface) thereon.Air floats unit 12 and is formed and overlooks rectangular-shapedly, and sets in its length direction mode consistent with the carriage direction of glass plate P.In addition, it is narrow slightly that air floats the Width (direction vertical with carriage direction) that the horizontal direction (Width) of unit 12 forms than glass plate P.
And compressed air is supplied to air by illustrated compressed air feedway never and floats unit 12, thereby makes compressed air from each fluid ejection port 13 ejection.Thereby, make by compressed air to be positioned in that air floats that glass plate P on the unit 12 floats and supporting glass plate P non-contactly from 13 ejections of each fluid ejection port.
Delivery section 15 has a plurality of rollers 16 and is installed in is with 17 around these a plurality of rollers 16.In addition, on 17 surface along with 17 length direction (carriage direction of main conveyer 10) with a plurality of projections 18 of being arranged at intervals with of equalization.
Delivery section 15 is configured in the both sides that air floats unit 12 along the carriage direction of glass plate P.And the configuration space (distance) of a pair of delivery section 15 is roughly the same with the Width of glass plate P.
The upper end of each roller 16 of delivery section 15 disposes in the mode that is positioned on the same horizontal plane, thus be arranged on 17 lip-deep projection 18 be configured to be positioned at float unit 12 than air upper surface slightly by the position of top.And, projection 18 be positioned in outer rim (both end sides of the Width) butt that air floats the lower surface of the glass plate P on the unit 12.
Each roller 16 of delivery section 15 is by not shown motor etc. and rotate to same direction with same rotary speed.Thereby can float unit 12 supporting glass plate P and can float unit 12 along air by delivery section 15 and transport glass plate P non-contactly by air.
In addition, delivery section 15 constitute can by not shown lowering or hoisting gear up and down direction move.
When delivery section 15 is risen, each projection 18 be positioned at float unit 12 than air upper surface slightly by the position of top.At this moment, the projection 18 of delivery section 15 can be transported glass plate P with the lower surface butt of glass plate P.
On the other hand, when delivery section 15 was descended, each projection 18 is positioned at than air floated the position of the upper surface of unit 12 by the below.At this moment, delivery section 15 (each projection 18) is separated from glass plate P, and glass plate P is in fully and is bearing in air by noncontact and floats state on the unit 12.Therefore, only otherwise apply external force on glass plate P, glass plate P just can float under the state on the unit 12 and be held stopping at air.
And main conveyer 10 constitutes a plurality of air of binding and floats unit 12 and delivery section 15.That is, make each air float unit 12 and each delivery section 15 reciprocally near and dispose side by side along horizontal direction.At this moment, each air upper surface (mounting surface) of floating unit 12 is adjusted into and is positioned at same horizontal plane.
In addition, branch's conveyer 20 comprises that also the air that main conveyer 10 is had floats unit 12 and delivery section 15.In addition, as shown in Figure 1, in the present embodiment, branch's conveyer 20 comprises that single air floats unit 12 and floats two delivery section 15 of unit 12 configurations across this air, but can comprise that also a plurality of air float unit 12 and delivery section 15.
Fig. 3 is the figure of formation of the component of expression main conveyer 10 and branch's conveyer 21.
As shown in the drawing, be provided with plate junction 40 at upstream side place with respect to the main conveyer 10 of branch's conveyer 21.
Plate junction 40 has arm 41, top 42, motor 43 (drive division).
Arm 41 1 ends are connected with top 42 and the other end is connected with motor 43, and are flatly disposed.
Top 42 constitutes the peripheral edge portion that can control glass plate P, more specifically can control near one side of Width of glass plate P.Keep the side surface of glass plate P to control glass plate P thereby can adsorb, thereby upper surface and lower surface that also can clamping glass plate P be controlled glass plate P.
Motor 43 is to be the device at rotation top 42, central horizontal ground with vertical rotation axis L, rotates top 42 via arm 41 to the direction of arrow (and arrow rightabout) as shown in Figure 3.
And, by plate junction 40 with such formation, rotate on the main conveyer 10 glass plate P so that glass plate P with respect to direct of travel towards not changing, simultaneously it is handover on branch's conveyer 20.
In addition, be arranged on respect to the plate junction 40 on the upstream side of the main conveyer 10 of branch's conveyer 23,25 and also have same formation, rotate on the main conveyer 10 glass plate P so that glass plate P with respect to direct of travel towards not changing, simultaneously it is handover on branch's conveyer 20.
In addition, be arranged on respect to the plate junction 40 on the downstream of the main conveyer 10 of branch's conveyer 22,24,26 and also have the formation identical with plate junction shown in Figure 3 40, but, rotate on branch's conveyer 20 glass plate P so that glass plate P with respect to direct of travel towards not changing, simultaneously it is handover on the main conveyer 10, this point is different with plate junction 40 shown in Figure 3.
The action (substrate transfer method) of base-board conveying device 1 then, is described.
The glass plate P that explanation will be transported on main conveyer 10 with reference to Fig. 4 A～Fig. 4 D is handover to situation on branch's conveyer 20 (being set at the action of plate junction 40 of the upstream side of main conveyer 10 with respect to branch's conveyer 21,23,25).
At first, each air that compressed air is supplied to main conveyer 10 and branch's conveyer 20 floats unit 12, makes compressed air from each fluid ejection port 13 ejection.In addition, drive delivery section 15, make each roller 16 with certain rotary speed rotation.At this moment, by not shown lowering or hoisting gear each delivery section 15 is risen.
And, at the upstream side of main conveyer 10, many ground mounting glass plate P, thus glass plate P is transported by individual.
And shown in Fig. 4 A, if the glass plate P on the main conveyer 10 moves to the position that the top 42 of plate junction 40 is arrived, then the top 42 of plate junction 40 moves to an end of branch's conveyer 20, controls the outer rim of the glass plate P on the main conveyer 10.Afterwards, the delivery section 15 of main conveyer 10 and branch's conveyer 20 descends by not shown lowering or hoisting gear.At this moment, the glass plate P compressed air that floated each fluid ejection port 13 ejections of unit 12 from each air floats supporting.
And shown in Fig. 4 B and Fig. 4 C, the top 42 of controlling glass plate P is rotated in horizontal plane via arm 41 by motor 43, thereby glass plate P is transported on branch's conveyer 20 from main conveyer 10.At this moment, the direct of travel of glass plate P is the direct of travel of branch's conveyer 21,23,25 from the change in travel direction of main conveyer 10, but because glass plate P rotation, so not the changing ahead of glass plate P with respect to direct of travel.
That is, according to the base-board conveying device 1 of present embodiment, the glass plate P on the main conveyer 10 flatly rotated so that glass plate P with respect to direct of travel towards not changing, be handover to simultaneously on branch's conveyer 20.
In addition, in the present embodiment, top 42 constitutes and can not move to the direction identical with the direction of rotation of delivery section 15, so in order to prevent that glass plate P and delivery section 15 from rubbing, and preferably when controlling the outer rim of glass plate P, stop the driving of delivery section 15.But, can make glass plate P and delivery section 15 friction situation not take place (for example, can be when glass plate P be controlled at top 42 decline delivery section 15 situation, can control the situation of glass plate P, the situation that the top can be moved to the direction identical with the direction of rotation of delivery section 15 etc. at top 42 after the decline delivery section 15) under, not necessarily need when controlling the outer rim of glass plate P, stop the driving of delivery section 15.
And shown in Fig. 4 D, if glass plate P is transported on branch's conveyer 20, the delivery section 15 of then main conveyer 10 and branch's conveyer 20 rises once more by not shown lowering or hoisting gear.Afterwards, be disengaged based on the controlling of glass plate P at the top 42 of plate junction 40, glass plate P is branched conveyer 20 and transports to the direction of separating from main conveyer 10.
In addition, identical during with above-mentioned outer rim of controlling glass plate P when removing in the present embodiment based on the controlling of the glass plate P at top 42, preferably stop the driving of delivery section 15 in order to prevent glass plate P and delivery section 15 from friction taking place.
In addition, glass plate P is branched conveyer 20 and transports, and is handover in the various processing unit such as film forming device 5, Etaching device 6, experimental rig 7.
In addition, be handover to the glass plate P in each processing unit (film forming device 5, Etaching device 6, experimental rig 7 etc.), in various processing unit, implement to be transported to the outside of each processing unit after the set processing.
Then, with reference to Fig. 5 A～Fig. 5 D explanation glass plate P is handover to the situation (being set at the action of plate junction 40 in the downstream of main conveyer 10 with respect to branch's conveyer 22,24,26) of main conveyer 10 from branch's conveyer 20.
The action that glass plate P is handover to main conveyer 10 from branch's conveyer 20 is the action that action that glass plate P is handover to branch's conveyer 20 from main conveyer 10 is roughly reversed.
At first, each air that compressed air is supplied to main conveyer 10 and branch's conveyer 20 floats unit 12, makes compressed air from each fluid ejection port 13 ejection.In addition, drive delivery section 15, each roller 16 is rotated under certain rotary speed.At this moment, by not shown lowering or hoisting gear delivery section 15 is risen.
Then, glass plate P is handover on branch's conveyer 20 by the various processing unit from film forming device 5, Etaching device 6, experimental rig 7 etc.Glass plate P is branched conveyer 20 and transports, and moves to the position that the top 42 of plate junction 40 is arrived.And shown in Fig. 5 A, the outer rim of the glass plate P on branch's conveyer 20 is controlled at the top 42 of plate junction 40.Afterwards, the delivery section 15 of main conveyer 10 and branch's conveyer 20 descends by not shown lowering or hoisting gear.At this moment, the glass plate P compressed air that floated each fluid ejection port 13 ejections of unit 12 from each air floats supporting.
And, shown in Fig. 5 B, Fig. 5 C and Fig. 5 D, controls the top 42 of glass plate P and rotate in horizontal plane via arm 41, thereby glass plate P is transported on the main conveyer 10 from branch's conveyer 20 by motor 43.At this moment, the direct of travel of glass plate P is the direct of travel of main conveyer 10 from the change in travel direction of branch's conveyer 22,24,26, but owing to glass plate P is rotated, so not the changing ahead with respect to direct of travel of glass plate P.
That is, according to the base-board conveying device 1 of present embodiment, the glass plate P on branch's conveyer 20 flatly rotated so that glass plate P with respect to direct of travel towards not changing, be handover to simultaneously on the main conveyer 10.
As described above such, the base-board conveying device 1 of present embodiment has: main conveyer 10, and individual transports glass plate P; Branch's conveyer 20 is with respect to main conveyer 10 branch flatly; Plate junction 40, flatly rotate glass plate P so that glass plate P with respect to direct of travel towards not changing, simultaneously glass plate P is handover to branch's conveyer 20 or is handover to main conveyer 10 from branch's conveyer 20 from main conveyer 10.
Base-board conveying device 1 and substrate transfer method according to such present embodiment, flatly rotate glass plate P so that glass plate P with respect to direct of travel towards not changing, simultaneously glass plate P is handover to branch's conveyer 20 or is handover to main conveyer 10 from branch's conveyer 20 from main conveyer 10.Therefore, need not for make glass plate P with respect to direct of travel towards consistent and on main conveyer 10 or branch's conveyer 20, glass plate P is stopped, can carrying out the handing-over of glass plate P at high speed.
Therefore, base-board conveying device 1 and substrate transfer method according to present embodiment, when between main conveyer 10 and branch's conveyer 20, not making the direct of travel of glass plate P join glass plate P, the handing-over speed of the glass plate P between main conveyer 10 and the branch's conveyer 20 is promoted with changing.
In addition, in the base-board conveying device 1 of present embodiment, use compressed-air actuated each air of ejection to float unit 12 and be bearing in the glass plate P that is joined between main conveyer 10 and the branch's conveyer 20 from the below.
So, when handing-over from below supporting glass plate P, bend thereby can suppress glass plate P.
In addition, use compressed air to float supporting glass plate P, thereby be equal under the state that does not have frictional resistance, handing-over glass plate P between main conveyer 10 and branch's conveyer 20.Therefore, though at high speed handing-over can not produce during speed owing to apply the damage of the glass plate P that impact causes yet.
(second execution mode)
Then, second execution mode of the present invention is described.In addition, in the explanation of this second execution mode, omit or simplify explanation about the part identical with above-mentioned first execution mode.
Fig. 6 is the figure of the formation of the main conveyer 10 in the base-board conveying device of expression present embodiment and the component of branch's conveyer 21.As shown in the drawing, in the present embodiment, main conveyer 10 and branch's conveyer 21 constitute, and substitute that air in above-mentioned first execution mode floats unit 12 and free roller unit 200 with a plurality of spherical free rollers 300 of assortment (support).
According to the base-board conveying device of the present embodiment with such formation, when carrying out the handing-over of glass plate P between main conveyer 10 and branch's conveyer 20, glass plate P is supported from the below by spherical free roller 300.
Therefore, identical according to the base-board conveying device of present embodiment with the base-board conveying device 1 of above-mentioned first execution mode, can suppress glass plate P when between main conveyer 10 and branch's conveyer 20, carrying out the handing-over of glass plate P and bend.
In addition, all shapes of each component parts shown in the above-mentioned execution mode or combination or sequence of movement etc. are examples, can carry out all changes based on designing requirement etc. in the scope that does not break away from aim of the present invention.
For example, in the above-described embodiment, illustrated that main conveyer 10 and branch's conveyer 20 are configured to the formation at right angle.But the present invention is not limited thereto, and also can be applicable to the formation that main conveyer 10 and branch conveyer 20 are configured with different angles.
In addition, in the above-described embodiment, thereby delivery section 15 constitutes when descending between main conveyer 10 and branch's conveyer 20 handing-over glass plate P by not shown lowering or hoisting gear and can prevent that glass plate P from contacting with delivery section 15.But the present invention is not limited thereto, and also can replace delivery section 15 to descend and floats unit 12 by air and rise and prevent that glass plate P and delivery section 15 from coming in contact.At this moment, the air of conveyer of the handing-over side upper surface that floats unit 12 be positioned at rise after the air upper surface that floats unit 12 be position with one side.
In the above-described embodiment, illustrated that individual transports the situation of glass plate P, but be not limited thereto.For example, also can be thin plate-shaped member such as semi-simple body wafer.
In the above-described embodiment, the situation of the various processing unit of another distolateral configuration/binding film forming device 5 at branch's conveyer 20, Etaching device 6, experimental rig 7 etc. has been described, but has been not limited thereto.It also can be the situation that also links branch's conveyer 20 in the downstream of branch's conveyer 20 (another is distolateral).
In addition, except the various processing unit of film forming device 5, Etaching device 6, experimental rig 7 etc., also can dispose the accumulator of the substrate of temporarily preserving a plurality of glass plate P etc.
In the above-described embodiment, illustrated and on the various processing unit of film forming device 5, Etaching device 6, experimental rig 7 etc., disposed the situation that is transported into branch's conveyer 21,23,25 of glass plate P and transports branch's conveyer 22,24,26 of glass plate P, but be not limited thereto.It also can be the situation that is transported into/transports that branch's conveyer 20 carries out glass plate P.
In addition, in the above-described embodiment, the situation of using compressed air to float supporting glass plate P has been described, but has been not limited thereto.For example, also can be applied on the glass plate P and float supporting glass plate P by the vibration wave that will in the space, propagate.
Utilize possibility on the industry
Based on base-board conveying device of the present invention and substrate transfer method, can be used in main and carry When not making the direct of travel of substrate join substrate between device and the branch's conveyer, make main defeated with changing Send the handing-over speed of the substrate between device and the branch's conveyer to promote.

Claims (6)

1. base-board conveying device has:
Main conveyer, individual transports substrate;
Branch's conveyer is from above-mentioned main conveyer branch flatly;
Substrate delivery/reception portion, make aforesaid substrate flatly rotate with keep aforesaid substrate with respect to direct of travel towards, simultaneously aforesaid substrate is handover to above-mentioned branch conveyer or is handover to above-mentioned main conveyer from above-mentioned branch conveyer from above-mentioned main conveyer.
2. base-board conveying device as claimed in claim 1 is characterized in that, the aforesaid substrate junction has:
The outer rim of aforesaid substrate is controlled at the top;
Drive division is that the center is rotated this top water level land with set rotating shaft;
Arm, an end are connected with above-mentioned top and the other end is connected with above-mentioned drive division.
3. base-board conveying device as claimed in claim 1 is characterized in that, have during the handing-over of the aforesaid substrate that is undertaken by the aforesaid substrate junction from below the supporting aforesaid substrate support.
4. base-board conveying device as claimed in claim 3 is characterized in that, above-mentioned support uses compressed air that aforesaid substrate is floated and supports aforesaid substrate.
5. substrate transfer method,
Individual transports substrate by main conveyer,
Make aforesaid substrate on the above-mentioned main conveyer flatly rotate with keep aforesaid substrate with respect to direct of travel towards, simultaneously aforesaid substrate is handed off on branch's conveyer of branch flatly from above-mentioned main conveyer.
6. substrate transfer method,
By from main conveyer flatly branch's conveyer of branch transport substrate,
Make aforesaid substrate on the above-mentioned branch conveyer flatly rotate with keep aforesaid substrate with respect to direct of travel towards, simultaneously aforesaid substrate is handed off on the main conveyer.
CN200780033198.1A 2006-09-11 2007-02-15 Substrate conveying apparatus, and substrate conveying method Expired - Fee Related CN101512748B (en)

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JP2006245829A JP4957133B2 (en) 2006-09-11 2006-09-11 Substrate transport apparatus and substrate transport method
PCT/JP2007/052669 WO2008032455A1 (en) 2006-09-11 2007-02-15 Substrate transfer apparatus and substrate transfer method

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JP4957133B2 (en) 2012-06-20

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