TWI481541B - Transport device and transport method for plate-shaped objects - Google Patents

Description

Plate-shaped body conveying device and plate-shaped body conveying method Field of invention

The present invention relates to a plate-shaped body conveying device and a plate-shaped body conveying method using the plate-shaped body conveying device. The plate-shaped body conveying device is provided with an air supply type supporting tool that supplies clean air to the lower surface of the rectangular plate-shaped body, supports the plate-shaped body in a horizontal position in a non-contact state, and contacts the plate supported by the air supply type supporting tool. The lower surface of the body is provided with a propulsive force imparting force to the plate-shaped body in the conveying direction, and is provided with an upstream-side conveying unit, a downstream-side conveying unit, and a relay conveying unit; and the upstream-side conveying unit is along the main conveying direction. The sheet-shaped body is conveyed, and the downstream-side conveying unit conveys the plate-shaped body in the sub-transporting direction that is orthogonal to the main conveying direction, and the intermediate conveying direction of the plate-shaped body received by the intermediate-transporting unit from the upstream conveying unit is from the main conveying direction. The vehicle is switched to the sub-transport direction and transferred to the downstream side transport unit.

Background of the invention

In the plate-like conveying device, the plate-shaped body is conveyed in the main conveying direction in the upstream conveying direction, and the plate-shaped body is transferred to the intermediate conveying unit, and the conveyance direction of the plate-shaped body is transferred from the main conveyance unit in the intermediate conveying unit. The device that shifts the direction to the sub-transporting direction and transports the plate-shaped body in the sub-transporting direction in the sub-transporting direction and transports the plate-shaped body to the downstream-side conveying unit to transport the plate-shaped body is applied to the conveyance of the plate-shaped body. When the direction is changed from the main conveyance direction to the sub conveyance direction (for example, refer to Patent Document 1).

In Patent Document 1, a pair of main conveyance propulsion power giving means The main conveyance propelling force imparting tool on the upstream side in the sub-transporting direction is disposed from the upstream side transporting portion to the intermediate transporting portion, but the main transporting propelling force imparting tool on the downstream side in the sub-transporting direction is It is disposed only in the upstream side conveying unit and is not disposed in the intermediate conveying unit.

In the pair of sub-transporting force application tools, the sub-transporting force application tool that is located on the downstream side in the main conveying direction is disposed from the intermediate transfer unit to the downstream side conveying unit, but is located in the main conveying direction. The sub-transporting propulsion force application tool on the upstream side is disposed only in the downstream side conveying portion and is not disposed in the intermediate transfer conveying portion.

In the transfer conveyance unit, when the plate-shaped body is conveyed in the main conveyance direction, only the main conveyance thrust force on the upstream side in the sub-transport direction is given to the lower surface of the plate-shaped body, and the plate-like body is conveyed along the main conveyance. When the plate-shaped body is conveyed in the direction of the sub-transport, only the sub-transporting propulsive force on the downstream side in the main conveying direction is given to the lower surface of the plate-like body, and the propelling force is applied to the plate-shaped body in the sub-transporting direction. .

Prior technical literature Patent literature

Patent Document 1: JP-A-2005-75543

Summary of invention

In the plate-shaped body transfer device of the above-mentioned Patent Document 1, the main transfer force application tool on the downstream side in the sub-transport direction and the sub-transport force application tool on the upstream side in the main conveyance direction are provided in the intermediate transfer unit, even in the middle. Transfer When the conveying unit conveys the plate-like body in the main conveying direction, the main conveying force is applied to the lower surface of the both ends of the plate-shaped body in the sub-transporting direction, and the tool is applied to the plate by a pair of main conveying thrusts. When the body is appropriately propelled in the main conveying direction and the plate-shaped body is conveyed in the sub-transporting direction, the sub-transporting propulsive force is given to the lower surface of the both ends of the tool-contacting plate-shaped body in the main conveying direction, and a pair is used. The sub-transporting force application tool appropriately applies a propulsive force to the plate-like body in the sub-transporting direction, thereby transporting the plate-like body in the main conveying direction or the sub-transporting direction.

On the other hand, when the plate-shaped body is supported by the air-supply supporting tool in the vicinity of the propelling force applying tool, the contact pressure of the tool to the plate-like body is lowered due to the floating of the plate-shaped body. In order to suppress the lowering of the contact pressure of the tool to the lower surface of the plate-like body, between the pair of main conveyance propelling force imparting tools and the pair of sub-transporting propulsive force giving means In the tool, it is necessary to give the tool to the upstream side in the side of the sub-transporting direction with respect to the main conveyance force on the downstream side in the sub-transporting direction, and to provide the tool to the downstream side in the main conveyance direction with respect to the sub-transporting force application tool on the upstream side in the main conveyance direction. The state to set.

However, when the plate-shaped body is transported from the upstream side transfer unit to the intermediate transfer unit, the plate-shaped body is the first one formed between the sub-transporting force application tool and the intermediate transfer-type support tool on the upstream side in the main conveyance direction. The upper side of the gap is conveyed. However, since the air supply type supporting tool is not provided in the first gap, the center portion of the plate-shaped body in the sub-transporting direction is bent downward. Thus, the curved plate-shaped body is present. The downstream side of the conveyance direction is conveyed and comes into contact with the intermediate feed air type support tool and is damaged.

In addition, when the intermediate transfer conveyance unit is transported to the downstream side conveyance unit, the transfer is performed in the upper side of the second gap formed between the main conveyance force application tool and the intermediate feed air supply support tool on the downstream side in the sub conveyance direction. The central portion of the main conveying direction of the plate-like body is bent downward to cause breakage.

The present invention has been made in view of the above-described circumstances, and it is an object of the present invention to provide a plate-shaped body conveying device which can appropriately prevent a plate-like body from being damaged when a plate-shaped body is appropriately conveyed when a plate-shaped body is conveyed.

The plate-shaped body conveying device of the present invention is provided with an air supply type support tool that supplies clean air to the lower surface of the rectangular plate-shaped body, and supports the plate-shaped body in a horizontal posture in a non-contact state, and the contact is the air supply type support. a pushing force applying means for imparting a propulsive force in the conveying direction to the lower surface of the plate-shaped body supported by the tool, wherein the plate-shaped body conveying device is provided with an upstream side conveying portion, a downstream side conveying portion, and a transfer conveyance In the device, the upstream transporting unit transports the plate-shaped body in the main transport direction, and the downstream transporting unit transports the plate-shaped body in the sub-transporting direction that is orthogonal to the main transporting direction, and the intermediate transporting unit is to be transported from the upstream side. The conveyance direction of the plate-shaped body received by the conveyance unit is switched from the main conveyance direction to the sub-transport direction and to the downstream conveyance unit, and the propulsion force application tool is provided to transfer from the upstream conveyance unit to the intermediate transfer conveyance unit. And the contact plate-shaped body is provided on the lower surface of the both ends of the sub-transporting direction, and one of the propulsive forces in the main conveyance direction is given to the plate-shaped body. Into the force applying tool, and the transfer from the transport unit When the sheet-like body is placed on the lower surface of the both ends in the main conveyance direction, the sheet-like body is given one of the propulsive forces in the sub-transporting direction to the sub-transporting propulsive force. The air supply type support tool is provided between the pair of main conveyance force application tools, and is disposed on the upstream side in a state in which the pair of main conveyance driving force is given to the tool in the sub conveyance direction. The upstream side air supply type supporting tool is provided on the downstream side in a state in which the pair of sub transporting force is given to the tool in the main transport direction between the pair of sub air transporting force applying tools. a downstream air supply type supporting tool of the conveying unit and a state in which the pair of main conveying force is given to the tool in the sub conveying direction to separate the pair of main conveying force applying means between the pair of main conveying force applying means, and In the state in which the auxiliary conveyance force is given to the tool, the tool is provided in the main conveyance direction so as to separate each of the pair of conveyance thrusts. In the intermediate transfer air supply supporting means of the intermediate transfer conveying unit, the intermediate transfer conveying unit is disposed so as to be relatively movable up and down by the pair of main conveying force applying means and the pair of auxiliary conveying force applying means The grounding is switched such that the pair of main conveyance driving force is applied to the lower surface of the plate-like body, and the conveyance direction of the plate-shaped body is switched to the main conveyance state in the main conveyance direction, and the pair of sub-transport propulsion members are brought into contact with the tool. The lower surface of the plate-shaped body is disposed in the sub-transporting state in the sub-transporting direction, and the air supply unit that supplies the clean air to the lower surface of the plate-like body is disposed in the intermediate transfer unit. At least one of a pair of gaps between the pair of sub transporting force applying means and the intermediate air blowing supporting tool is located at a first gap upstream of the main conveying direction The main transport auxiliary air blowing tool is provided with at least one of a pair of gaps between the pair of main transporting force applying means and the intermediate transfer air supporting tool for disposing the air supply unit in the intermediate transfer unit a sub-transporting auxiliary air blowing tool of the second gap on the downstream side of the sub-transporting direction; the main conveying auxiliary air blowing tool and the sub-transporting auxiliary air blowing tool are each arranged to be freely switchable in a non-contact state to support the air supply in the non-contact state a supply state of the clean air is supplied to the upper plate-shaped body, and a supply stop state in which the clean air is supplied from the air supply unit is stopped, and a blowing state switching tool is provided, and the intermediate transfer unit is switched from the sub-transporting state. In the main transport state, the main transport assist air supply tool is switched to the supply state, and the sub transport assist air supply tool is switched to the supply stop state, and the intermediate transfer transport unit is switched from the main transport state to the aforementioned In the sub-transport state, the main transport assist air supply tool is switched to the aforementioned supply In the stopped state, the sub-delivery assist air supply tool is switched to the supply state.

In other words, by switching the intermediate transfer unit to the main transfer state, the pair of main transfer force application tools can be used to apply the propulsive force to the plate-like body in the main conveyance direction, and the plate-shaped body can be transported from the upstream transfer unit. Transfer and transfer department. After the transfer of the plate-shaped body to the intermediate transfer unit, the intermediate transfer conveyance unit is switched to the sub-transporting state, and the pair of sub-propulsion propelling force giving means can be used to apply the propulsive force to the plate-shaped body in the sub-transport direction. The plate-shaped body is transported from the intermediate transfer unit to the downstream transfer unit.

In the case where the intermediate transfer unit is switched to the main transport state, the main transport assist air supply tool is switched to the supply state and the sub transport allowance is applied. When the air supply tool is switched to the supply stop state, when the plate-shaped body is transported from the upstream side transfer unit to the intermediate transfer unit, the main transfer assist air supply tool is switched to the supply state, and the sub-transport assist air supply tool is switched to the supply stop state.

Therefore, when the plate-shaped body is transported from the upstream side conveying unit to the intermediate conveying unit, the plate-shaped body is the first between the sub-transporting force application tool and the intermediate-transporting wind-supporting tool formed on the upstream side in the main conveying direction. The upper side of the gap is transported, and the air supply unit of the main transport assist air supply tool is provided in the first gap, and the main transport assist air supply tool is switched to the supply state. Therefore, when the plate-shaped body is conveyed above the first gap, the plate-shaped body can be supported by the main conveyance-assisted air-supply tool, and the plate-shaped body can be prevented from being bent when the plate-shaped body is conveyed in the main conveyance direction, and the plate-shaped body can be prevented from being damaged. The situation is not there.

In this case, the second gap is located below the end on the downstream side in the sub-transport direction of the plate-like body, and the air supply unit of the sub-transporting air supply tool is provided in the second gap. Since the tool is switched to the supply stop state, the end portion on the downstream side in the sub-transport direction of the plate-shaped body is not supported by the sub-transport-assisted air supply tool. Therefore, the contact pressure of the main conveyance propelling force imparting tool to the end portion is not lowered, and the plate-like body can be accurately conveyed in the main conveyance direction by the pair of main conveyance driving force.

When the plate-shaped body is transported from the intermediate transfer unit to the downstream side transport unit, the main transport assist air supply tool is switched to the supply stop state and the sub-transport assist air supply tool is switched to the supply state. Therefore, it is possible to prevent the plate from being transported in the sub-transport direction. The bending of the plate-shaped body during the body can prevent the plate-shaped body from being damaged by contact with other objects, and can also be used in the sub-delivery driving force. When the contact pressure with respect to the plate-shaped body is not lowered, the pair of sub-propulsion driving force is given to the tool to accurately convey the plate-like body in the sub-transporting direction.

In the meantime, the main transporting force imparting tool and the pair of sub transporting force applying means are provided in the intermediate transporting portion, and the air supply unit of the main transport assisting air supply tool is provided in the first gap, and the sub transporting subsidy is provided in the second gap. In the air supply unit of the air supply unit, the state in which the main conveyance assist air supply tool and the sub-transport auxiliary air supply tool are switched to the supply state and the supply stop state is switched depending on the switching state of the intermediate transfer unit and the main transfer state. When the plate-shaped body is conveyed in the main conveyance direction and the sub-transport direction, the plate-like body can be appropriately given a propulsive force, and the plate-shaped body can be prevented from being damaged.

In the embodiment of the plate-shaped body conveying device of the present invention, the air-sending state switching device is preferably arranged to switch from the main transfer state to the sub-transport state in the intermediate transfer unit, and the board is started in the intermediate transfer unit. Before the body is transported in the sub-transport direction, the main transport assist air supply tool is switched to the supply stop state, and the sub-transport assist air supply tool is switched to the supply state.

In other words, the intermediate transport unit is switched from the main transport state to the sub transport state, and the main transport assist air supply tool is switched to the supply stop state before the transfer of the plate-shaped body to the sub-transport direction. When the conveyance-assisted air-supply tool is switched to the supply state, the plate-shaped body can be supported in a non-contact manner by the sub-transporting air supply tool from the start of the conveyance, so that the bending of the plate-shaped body during the conveyance in the sub-transport direction can be suppressed, and it is possible to prevent The occurrence of damage to the plate-shaped body is not the case.

In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable that the main conveying force application tool is disposed such that a plurality of contact plate-like bodies are arranged in parallel along the main conveying direction, and the plate-shaped body is advanced. In the rotating body of the force, the sub-transporting force application tool is disposed such that a plurality of the rotating bodies are arranged side by side in the sub-transporting direction, and the air supply unit in the main conveying auxiliary air blowing device is from the first side in plan view a gap is provided between the rotating bodies adjacent to the sub-transporting direction in the sub-transporting force application tool, and the air supply unit in the sub-transporting auxiliary air blowing device is horizontally viewed from the second gap The main transfer propulsion force is provided between the rotating bodies adjacent to the main conveyance direction in the tool.

In other words, the air supply unit in the main conveyance assist air blower is provided not only in the first gap but also between the rotary bodies provided in the sub-transport direction from the first gap. The plate-shaped body conveyed in the main conveyance direction supports the plate-shaped body in a wide range by the main conveyance-assisted air supply tool along the main conveyance direction, so that it can be widely suppressed in the main conveyance direction when conveyed in the main conveyance direction. Bending of the plate body. Further, by providing the air supply portion between the rotating bodies, since the plate-like body can be supported over a wide range as described above, and the air supply portion can be provided in the vicinity of the plate-shaped body that is supported by the rotating body, it is possible to A relatively small amount of clean air is sprayed from the air supply portion to support the plate-like body.

In addition, the air supply unit in the sub-transporting air supply tool is provided between the second gap and the rotating body, and the plate-shaped body can be widely suppressed in the sub-transporting direction when transported in the sub-transporting direction. And can The plate-shaped body is supported by ejecting a relatively small amount of clean air from the air supply portion.

In an embodiment of the plate-shaped body conveying device of the present invention, it is preferable that the air supply unit of the main conveyance-assisted air blowing tool traverses the upstream side air supply type supporting tool including the first gap, and the intermediate air supply unit The gap between the support tools is set to be the full width of the main conveyance direction, and the air supply unit of the sub-transport auxiliary air supply tool crosses the intermediate transfer air type support tool including the second gap, and The entire width of the sub-transport direction in the gap between the downstream side air supply supporting tools is provided.

In other words, between the upstream side air supply type support tool and the intermediate air supply type support tool, a large gap is formed in the main conveyance direction in order to provide the first gap for the purpose of providing the sub conveyance propulsion force, but Since the air supply portion is provided at the full width of the gap, when the plate-shaped body is conveyed in the main conveyance direction, the bending of the plate-like body can be suppressed over the entire range between the upstream side air supply type support tool and the intermediate air supply type support tool.

Further, since the air supply portion is provided at the full width of the gap between the intermediate air supply supporting tool and the downstream side air supply supporting tool, when the plate-shaped body is conveyed in the sub-transporting direction, the air-feeding supporting tool and the downstream are provided in the intermediate conveying direction. The entire range between the side air supply support tools can suppress the bending of the plate body.

In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable that the air supply unit in the main conveyance-assisted air-sending device is the air supply on the end side in the sub-transporting direction of the intermediate transfer conveying unit. The interval between the portions is larger than the interval between the air supply portions in the central portion of the intermediate transfer direction in the intermediate transfer portion, along the sub-transport direction In the air supply unit, the air supply unit in the sub-transporting air supply unit is spaced apart from the air supply unit on the end side in the main transport direction of the intermediate transfer unit in the intermediate transfer unit. In a state where the interval between the air supply portions in the central portion of the main conveyance direction is large, a plurality of them are arranged side by side in the main conveyance direction.

In other words, the plate-shaped body conveyed in the main conveyance direction is supported by the pair of main conveyance thrusts at both ends in the sub-transporting direction, so that the center of the sub-transporting direction is formed substantially downward. In the state of being bent, when the main conveyance-assisted air supply tool is non-contact-supported and bent into such a plate-like body, the air supply portion is provided at a narrow interval in the central portion where the bending is large to supply a large amount of clean air, and the bending is gradually increased. The smaller end side provides the air supply unit at a wide interval to supply a small amount of clean air, so that the plate body can be supplied with an appropriate amount of clean air according to its posture, and the main conveyance auxiliary air supply tool can be appropriately supported along the main conveyance direction. The center of the sub-transport direction of the plate-shaped body to be conveyed. In addition, the center portion of the main conveyance direction of the plate-shaped body conveyed in the sub-transport direction can be appropriately supported by the sub-transporting air supply tool.

In the embodiment of the plate-shaped body conveying device of the present invention, the air supply unit is preferably constituted by a nozzle having a slit-shaped discharge port.

That is, the clean air is ejected from the slit-shaped discharge port, whereby the clean air is ejected from the discharge port to supply the clean air to the lower surface of the plate-shaped body, and the airflow of the clean air ejected from the discharge port can be used to attract the surrounding air. Clean the air and supply the surrounding clean air to the underside of the plate.

Therefore, a large amount of clean air can be supplied to the lower surface of the plate-like body by ejecting a small amount of clean air, so that the amount of clean air supplied to the lower surface of the plate-like body can be ensured to achieve miniaturization of the air supply portion.

In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable to provide a contact body that is freely movable between the restriction position and the release restriction position, wherein the restriction position is in the main conveyance state and is subjected to the pair of main conveyance advancement. The force is applied to the side of the plate-shaped body on which the support is placed, and the side of the plate-shaped body that is supported by the pair of sub-transporting propelling force imparting tools in the sub-transporting state on the downstream side in the main conveying direction The unrestricted contact restriction position is a lower surface of the plate-shaped body that is supported by the pair of main conveyance driving force application tools in the main conveyance state, and is in the sub-transport state in the sub-transport state. The conveyance force is applied to the lower side of the lower surface of the plate-shaped body on which the support is placed, and is located further downstream than the above-described restriction position in the main conveyance direction.

In other words, when the contact body is first moved to the restriction position, the plate-shaped body conveyed to the downstream side in the main conveyance direction can be blocked, because the pair of sub-transport propulsion forces give the tool position to the plate-like body thus blocked in the main conveyance. When the transfer conveyance unit is switched from the main conveyance state to the sub conveyance state, the pair of sub conveyance thrusts can be given to the lower surface of both ends of the main conveyance direction of the tool support plate-like body. The conveyance direction of the plate-shaped body can be appropriately switched from the main conveyance direction to the sub-transport direction.

When the contact body is first moved to the release position, the plate body is conveyed in the sub-transport direction by the pair of sub-propulsion propelling forces, and the contact body does not abut the plate-like body, so the sub-transport direction is provided. When transporting the plate body, The plate body is prevented from being damaged by the abutting body abutting the plate body.

Further, when the restriction position is released, since the contact position is lower than the plate-like body, when the plate-shaped body is conveyed in the sub-transport direction, the plate-shaped body does not abut even if the plate-shaped body is displaced from the main conveyance direction. To the abutment body. In other words, since it is not necessary to consider that the plate-like body is displaced from the main conveying direction, the abutting body is largely moved in the downstream direction of the main conveying direction, so that the abutting body can be provided in the small space in the main conveying direction.

Further, when the contact body is linearly moved from the restriction position to the release restriction position, the contact body moves obliquely downward on the downstream side in the main conveyance direction. When the contact body is moved obliquely downward on the downstream side in the main conveyance direction and moved from the restriction position to the release restriction position, friction between the contact body and the plate-shaped body blocked by the contact body does not occur, and it is possible to prevent The damage of the plate body caused by the friction is not prior.

Further, the present invention includes a method corresponding to the above configuration, and an action and an effect corresponding to the above configuration can be expected in the method.

In other words, the method according to the present invention is a plate-shaped body conveying method using a plate-shaped body conveying device provided with an upstream-side conveying unit, a downstream-side conveying unit, and a relay conveying unit, wherein the upstream side of the plate-shaped conveying device is conveyed The portion is provided with a supply air to the lower surface of the rectangular plate-shaped body, the plate-shaped body is supported in a horizontal position by the air supply supporting tool in a non-contact state, and the plate-shaped body supported by the air supply supporting tool is contacted. In the following, the plate-shaped body is provided with a propulsive force imparting force in the conveying direction, and the downstream conveying unit conveys the plate-like body in the sub-transporting direction that is orthogonal to the main conveying direction, and the intermediate conveying unit is to be upstream. The conveyance side of the plate-shaped body received by the side conveyance unit The transfer force is supplied from the main transfer direction to the downstream transfer unit, and the push force application tool is disposed from the upstream transfer unit to the intermediate transfer unit, and is in contact with the plate-shaped body. In the lower surface of the both ends of the sub-transporting direction, one of the propulsive forces in the main transport direction is given to the plate-shaped body, and the main transporting force is given to the plate, and the intermediate transfer portion is passed from the intermediate transfer portion to the downstream transfer portion. And the contact plate-shaped body is provided on the lower surface of the both end portions in the main conveyance direction, and one of the propulsive forces in the sub-transporting direction is given to the plate-shaped body, and the sub-transporting propulsive force is given to the plate-shaped body; In the state in which the pair of main conveyance driving force is given to the tool in the sub-transporting direction, the upstream side air supply type support is provided between the pair of main conveyance force application tools. The tool and each of the pair of sub-delivery force application tools are provided in the main conveyance direction so as to alienate the pair of sub-propulsion propelling force imparting tools. The downstream side air supply type support tool provided in the downstream side conveyance unit and the pair of main conveyance force application means are provided in the sub conveyance direction to evacuate each of the pair of main conveyance force application means In the state in which the pair of sub-transporting force application tools are separated from each other in the main conveyance direction, the intermediate transfer conveyance unit is provided in the intermediate transfer conveyance unit. The support tool is configured such that the pair of main transporting force imparting means and the pair of sub transporting thrust applying means are relatively moved up and down so as to be movable to advance the pair of main transporting The force is applied to the lower surface of the plate-shaped body, and the conveying direction of the plate-shaped body is switched to the main conveying state in the main conveying direction, and the pair of sub-transporting is performed. The propelling force application tool contacts the lower surface of the plate-like body and switches the conveying direction of the plate-shaped body to the sub-transporting state in the sub-transporting direction, and the air supply unit that supplies the clean air to the lower surface of the plate-shaped body is disposed in the aforementioned The main conveyance assist air supply tool of the first gap between the pair of sub-transporting force application tools and the intermediate transfer air-type support tool, at least in the first gap on the upstream side in the main conveyance direction, is provided in the transfer conveyance unit. At least one of a pair of gaps between the pair of main conveyance driving force applying means and the intermediate transfer air type supporting tool in which the air supply unit is disposed in the intermediate transfer unit is at least in the downstream side of the sub transport direction In the non-contact state, each of the main transport auxiliary air supply tool and the sub-transport air supply tool is configured to be freely switchable to a plate-like body that is supported above the air supply unit in a non-contact state. a supply state of supplying clean air, and a supply stop state for stopping supply of clean air from the air supply unit; a plate-shaped body transfer method package When the intermediate transporting unit is switched from the sub-transporting state to the main transporting state, the main transport-assisted air-supply tool is switched to the supply state, and the sub-transporting auxiliary air blowing tool is switched to the supply-stop state. When the transfer unit is switched from the main transfer state to the sub-transport state, the main transfer assist air supply tool is switched to the supply stop state, and the sub-transport assist air supply tool is switched to the air supply state switching step of the supply state.

In the embodiment of the present invention, it is preferable that, in the air blowing state switching step, when the intermediate transfer unit is switched from the main transport state to the sub transport state, the intermediate transport unit starts to move the plate-shaped body toward the intermediate transport unit. The aforementioned vice Before the conveyance direction is conveyed, the main conveyance assist air supply tool is switched to the supply stop state, and the sub-transport auxiliary air supply tool is switched to the supply state.

According to an embodiment of the present invention, there is provided an abutting body that is freely movable between a restricted position and a release-restricted position, wherein the restricted position is placed in the main conveyance state and is placed by the pair of main conveyance thrust imparting means The supporting plate-like body has the same height, and is in contact with the side surface on the downstream side in the main conveyance direction of the plate-shaped body supported by the pair of sub-transporting propulsion supporting means in the sub-transporting state, and the contact restriction position is In the main conveyance state, the lower surface of the plate-shaped body that is supported by the pair of main conveyance driving force application means is placed in the sub-transporting state in comparison with the pair of sub-transporting propulsion power application tools. The lower side of the lower surface of the support plate-shaped body, and the position on the downstream side in the main conveyance direction from the restriction position is preferably included when the intermediate transfer conveyance unit is switched from the main conveyance state to the sub-transport state. And moving the contact body from the restriction position to the release restriction position before the intermediate transfer conveyance unit starts conveying the plate-shaped body to the sub-transporting direction. The abutting member position switching step.

Simple illustration

Fig. 1 is a plan view showing a plate-shaped body conveying apparatus according to an embodiment of the present invention.

Fig. 2 is a plan view showing a transfer unit in the embodiment of the present invention.

[Fig. 3] A side view of the transfer unit in the embodiment of the present invention.

[Fig. 4] A side view of the intermediate transfer unit in the main transport state according to the embodiment of the present invention.

[Fig. 5] A side view of the intermediate transfer unit in the sub-transport state according to the embodiment of the present invention.

[Fig. 6] (a) to (b) side views of the auxiliary air blowing tool according to the embodiment of the present invention.

[Fig. 7] A perspective view of a main lift type propulsion force applying portion according to an embodiment of the present invention.

Fig. 8 is a schematic view showing an air supply unit provided side by side in the embodiment of the present invention.

[Fig. 9] (a) to (b) schematic views of the abutting body of the embodiment of the present invention.

[Fig. 10] A transfer operation diagram of the plate-shaped object conveying device according to the embodiment of the present invention.

[Fig. 11] A transfer operation diagram of the plate-shaped object conveying device according to the embodiment of the present invention.

[Fig. 12] A control block diagram of an embodiment of the present invention.

Fig. 13 is a flow chart showing the control of the transfer unit in the embodiment of the present invention.

Form for implementing the invention

Hereinafter, the plate-shaped body conveying device of the present invention will be described based on the drawings.

As shown in Fig. 1, the plate-shaped body conveying device is provided with a supply air supply tool 2 that supplies clean air to the lower surface of the liquid crystal glass substrate 1 as a rectangular plate-like body and supports the glass substrate 1 in a non-contact state. And a driving force giving means 3 for contacting the lower surface of the supporting glass substrate 1 and imparting a propulsive force in the conveying direction to the glass substrate 1.

In addition, the plate-shaped conveying device transports the upstream side conveying portion A of the glass substrate 1 in the main conveying direction X, and the downstream conveying portion C that conveys the glass substrate 1 in the sub-transporting direction Y that is orthogonal to the main conveying direction X. The transport direction of the glass substrate 1 received from the upstream transport unit A is switched from the main transport direction X to the sub transport direction Y, and is transferred to the downstream transport unit C intermediate transport unit B, and the transport unit A is configured. ~C is provided with the air supply type support tool 2 and the propulsion force application tool 3, respectively, and is arranged in a unit shape. Further, the conveying units A to C are arranged to convey the glass substrate 1 at the same height.

The intermediate transfer unit B is disposed in parallel with the downstream side of the main transport direction X of the upstream transport unit A, and is disposed to support the glass substrate 1 in a non-contact state by the air supply type support tool 2, and is in contact with the tool 3 by the propulsive force. In the state in which the glass substrate 1 is supported, the propelling force is applied to the glass substrate 1 by the propelling force imparting tool 3 toward the downstream side in the main transport direction X, and the glass substrate 1 is transported from the upstream transport unit A to the intermediate transport unit B. In the glass substrate 1, the glass substrate 1 is transported to the upstream side of the main transport direction X by the propelling force application tool 3, and the glass substrate 1 is transported from the intermediate transport unit B to the upstream transport unit A.

In addition, the downstream side conveying unit C is arranged in parallel on the downstream side of the sub-transporting direction Y of the intermediate conveying unit B, and is arranged to support the glass substrate 1 in a non-contact state by the air blowing type supporting tool 2, and to give the tool 3 with the propulsive force. In the state in which the glass substrate 1 is supported in a contact state, the glass substrate 1 is transported to the downstream side by the propelling force applying tool 3 in the downstream direction of the sub-transporting direction Y, and the glass substrate 1 is transported from the intermediate transfer unit B to the downstream side conveying unit. C, the glass substrate 1 is given the upstream side in the sub-transport direction Y by the propelling force imparting tool 3 The driving force of the glass substrate 1 is transferred from the downstream side conveying unit C to the intermediate conveying unit B.

In this way, the plate-like-body conveyance device is disposed so that the glass substrate 1 is transported from the upstream-side conveyance unit A to the downstream-side conveyance unit C in the forward direction, and the glass substrate 1 is further downstream. The side transport unit C is transported to the upstream transport unit A via the relay transport unit B in the opposite direction.

[propulsion power giving tool]

The propulsion power application tool 3 is provided with a pair of main transporting force application tools 5 and a pair of sub transporting force application tools 6, and the pair of main transporting propulsion power feeding tools 5 are spanned from the upstream side transporting unit A to the intermediate transporting unit B. In addition, the glass substrate 1 is placed on the lower surface of the both ends of the sub-transporting direction Y, and the glass substrate 1 is given a propulsive force in the main transport direction X. The pair of sub-transporting propelling force applying means 6 is transferred from the transfer. The portion B is disposed so as to be in contact with the downstream side conveying portion C, and is in contact with the lower surface of both end portions of the glass substrate 1 in the main conveying direction X, and gives the glass substrate 1 a pushing force in the sub-transporting direction Y.

As shown in FIG. 2, FIG. 4, and FIG. 5, each of the pair of main conveyance driving force application tools 5 is disposed so as to be arranged in parallel along the main conveyance direction X as a plurality of the lower surfaces of the contact supporting glass substrates 1 in the sub conveyance direction Y. The rotating roller 7 of the rotating body at the end is provided with an electric motor 8 that rotationally drives the rotating roller 7 for each of the plurality of rotating rollers 7. Then, the electric motor 8 is used to individually rotate and drive the plurality of rotating rollers 7, so that the glass substrate 1 contacting the rotating roller 7 is given a propulsive force in the main conveying direction X.

As shown in FIGS. 4 and 5, a plurality of rotating rollers 7 and an electric motor 8 that rotationally drives it are supported by a series of support frames 9, and a plurality of rotating rollers 7 The plurality of electric motors 8 are supported on the inner side of the air supply supporting tool 2 positioned in the sub-transporting direction Y with respect to the support frame 9, and the plurality of electric motors 8 are supported in the sub-transporting direction Y with respect to the support frame 9. The position on the outside side.

As shown in Fig. 6 and Fig. 7, each of the rotating rollers 7 provided in the main conveyance driving force application tool 5 is disposed to have a small diameter portion 7a on the lower surface on which the O-ring mounting supporting glass substrate 1 is attached, and is located The large-diameter portion 7b in which the glass substrate 1 moves in the sub-transporting direction Y is restricted by the side surface of the glass substrate 1 being abutted on the outer side of the small-diameter portion 7a in the sub-transporting direction Y.

In addition, as shown in Fig. 1, the portion of the main conveyance propulsion power application tool 5 that is provided in the upstream side conveyance unit A (hereinafter referred to as the main stationary propulsion force application portion 5b) is set in a positionally fixed state. The upstream side conveyance unit A is provided in the intermediate conveyance force application tool 5 (hereinafter referred to as the main lift type propulsion power application unit 5a), and is provided in the middle of the transfer mechanism Transfer unit B.

In addition, each of the pair of sub-transporting force application tools 6 is disposed such that a plurality of rotating rollers 7 that contact the lower end of the glass substrate 1 in the main conveying direction X are arranged side by side in the sub-transporting direction Y, and along the main conveying direction X. The main transporting propelling force imparting tool 5 provided is the same except that the setting direction is different. In other words, the sub-transporting force application tool 6 is different from the main conveyance force application tool 5 in that it is provided along the sub-transporting direction Y. However, the main conveyance driving force application tool 5 is provided with the revolving roller 7 in the same manner as the main conveyance driving force application tool 5 and Electric motor 8. In addition, the portion of the sub-transporting force application tool 6 that is provided in the intermediate transfer unit B (hereinafter referred to as the sub-lifting-type propulsion unit 6a) is provided in the intermediate transfer unit B so as to be movable up and down. About sub-delivery The portion of the propulsion force application tool 6 that is provided in the downstream side conveying portion C (hereinafter referred to as the sub-fixed propulsion power applying portion 6b) is provided in the downstream side conveying portion C in a positionally fixed state.

[Air supply support tool]

In addition, the air supply type support tool 2 is provided between the pair of main conveyance force application tools 5, and is separated from the main conveyance force application tool 5 in the sub conveyance direction Y, and is provided in the upstream conveyance unit. The upstream side air supply supporting tool 11 of A and the pair of sub transporting force application tools 6 are separated from each other in the main conveying direction X in a state of being separated from each other in the main conveying direction X, and are provided on the downstream side. The downstream side air supply type support tool 13 of the conveyance unit C and the pair of main conveyance force application tools 5 are separated from each other in the sub conveyance direction Y by the pair of main conveyance force application tools 5, and Between the pair of auxiliary conveyance force application tools 6, the state in which each of the pair of auxiliary conveyance force application tools 6 is separated in the main conveyance direction X is provided, and the air conveyance tool 12 is transferred to the intermediate conveyance unit B.

As shown in FIG. 3, the relay air supply supporting tool 12 is provided with a dust removing filter 14 for removing dust, and is disposed below the dust removing filter 14 to be supplied to the lower surface of the glass substrate 1 by the dust removing filter 14. The air supply fan 15 of the air supply tool for cleaning air. In the first embodiment, as shown in Fig. 1, a plurality of air supply fans 15 that are arranged in the main transport direction X and the sub transport direction Y are arranged in parallel, and the air blowing fan 15 that rotates around the vertical axis is covered. The fan-shaped filter unit 16 is integrally assembled with the plate-shaped dust filter 14 above the blower fan 15.

Moreover, the intermediate air supply support tool 12 is configured to utilize a blower fan The air supply function of 15 attracts the air under the air supply support tool 12, and the air passing through the dust filter 14 is sprayed as clean air to the upper side of the intermediate air supply support tool 12; thus, by spraying the clean air, the air is blown The clean air is supplied to the lower surface of the glass substrate 1 conveyed by the intermediate transfer unit B, whereby the glass substrate 1 is supported in a horizontal posture. In the present specification, the concept of "horizontal posture" includes not only the posture in which the glass substrate 1 is parallel to the horizontal direction (complete horizontal posture) but also the inclination of the glass substrate 1 in the horizontal direction by a predetermined angle (for example, an angle of 5 degrees or less) Or a posture of an angle of 10 degrees or less, etc. (substantially horizontal posture). Further, the state in which the glass substrate 1 is supported in a posture inclined in the horizontal direction is caused by, for example, an error in manufacturing, or is intentionally realized by design.

Incidentally, the intermediate air supply supporting tool 12 is in a positionally fixed state, and the upper surface of the intermediate conveying portion B that is disposed to discharge the clean air is located below the supporting height of the supporting glass substrate 1 in the propulsion supporting tool 3 position.

Further, the upstream side air supply type support tool 11 and the downstream side air supply type support tool 13 have the same configuration as the relay air supply type support tool 12, and are provided with the dust filter 14 and the air supply fan 15, except for the size of the fan filter unit 16. Other than this, the configuration is the same. Further, the upstream side air supply type support tool 11, the downstream side air supply type support tool 13, and the intermediate air supply type support tool 12 are provided at the same height.

[Transfer Transfer Department]

Next, the transfer transfer unit B will be described.

As shown in FIGS. 4 and 5, the intermediate transfer unit B is configured to pass one The main conveyance driving force application tool 5 and the pair of auxiliary conveyance force application tools 6 are relatively moved up and down, and can be freely switched so that the pair of main conveyance driving force imparting tools 5 contact the lower surface of the glass substrate 1 to place the glass substrate 1 The conveyance direction is switched to the main conveyance state in the main conveyance direction X (see FIG. 4), and the pair of sub conveyance driving force application tools 6 are brought into contact with the lower surface of the glass substrate 1 to switch the conveyance direction of the glass substrate 1 to the sub conveyance direction Y. The sub-transport state (refer to Figure 5).

In addition, the pair of main lift type propulsive force applying sections 5a are arranged such that the support frame 9 supporting the lift frame is lifted and moved by the main transport lift operation tool 17 (see FIG. 6), thereby being fixed to a pair of mains. The rising position of the lift force applying portion 5b or the pair of sub-fixed thrust force applying portions 6b at the same height (see FIG. 4) and the lowering position (see FIG. 5) lower than the rising position are freely moved up and down. .

In addition, the pair of sub-lifting type propelling force applying portions 6a are also arranged to be lifted and moved by the sub-transporting lifting and lowering operation tool 18, and the pair of main fixed type propelling force giving portions 5b or one The ascending position of the sub-fixed propulsion force application unit 6b at the same height (see FIG. 5) and the lowering position (see FIG. 4) lower than the rising position are freely moved up and down.

In addition, in this example, the main conveyance lifting operation tool 17 and the sub-transport lifting operation tool 18 are each made of an air cylinder.

Then, as shown in Fig. 4, when the main lift type propulsion unit 5a is raised to the raised position and the sub-lift type propulsion unit 6a is lowered to the down position, the intermediate transfer unit B is switched to the main transport state. . Switch to like this In the state of the main conveyance state, the main lift type propulsion power application unit 5a comes into contact with the lower surface of the glass substrate 1, and the sub-lifting force application unit 6a is separated downward from the lower surface of the glass substrate 1.

In addition, as shown in Fig. 5, the main lift type propulsion unit 5a is lowered to the lowered position and the sub-lifting type propulsive force applying unit 6a is raised to the raised position, and the intermediate transfer unit B is switched to the sub-transporting state. . In the state of being switched to the sub-transport state as described above, the main lift-type propulsive force applying portion 5a is separated downward from the lower surface of the glass substrate 1, and the sub-lifting-type propulsive force applying portion 6a is in contact with the lower surface of the glass substrate 1.

[Subsidized air supply tool]

As shown in Fig. 2, in the intermediate transfer unit B, in addition to the air supply type support tool 2 (transit air supply type support tool 12), a main conveyance assist air supply tool 19 for supporting the glass substrate 1 in a non-contact state is provided. The sub-delivery air supply tool 20 is transported. Each of the main conveyance assist air blower 19 and the sub transport assist air blower 20 has an air supply unit 21 that supplies clean air to the lower surface of the glass substrate 1 and a pipe that supplies clean air to the air supply unit 21. Filters (not shown) and switching valves (not shown) on the way.

Each of the main conveyance assist air blower 19 and the sub transport assist air blower 20 is disposed so as to be freely switchable to support the glass substrate 1 positioned above the air supply unit 21 in a non-contact state by a switch operation of the on-off valve. The supply state of the clean air and the supply stop state of the supply of the clean air from the air supply unit 21 are stopped.

Further, as shown in FIGS. 6 and 7, the air supply unit 21 is constituted by a nozzle having a slit-shaped discharge port 21a, that is, a so-called air knife. Attached one It is noted that the discharge port 21a is formed at the upper end portion of the air supply portion 21, and the air supply portion 21 is disposed to discharge the clean air upward from the discharge port 21a. Further, as shown in Fig. 6, the air supply unit 21 is provided in the intermediate transfer unit B in a positionally fixed state, and the height of the discharge port 21a is formed at a position lower than the upper surface of the air supply type support tool 2.

The main transport-assisted air-supply tool 19 is configured such that the air supply unit 21 is disposed in the intermediate transfer transport unit B and is formed in the pair of sub-transport propulsion power application tools 6 (the sub-lifting propulsion force application unit 6a) and the intermediate transfer air. Among the pair of gaps between the support tools 12, the first gap g1 located on the upstream side in the main conveyance direction X and the at least the first gap g1 located in the third gap g3 on the downstream side in the main conveyance direction X. In the present embodiment, as shown in FIG. 2, the main conveyance assist air blower 19 is configured such that the air supply unit 21 is disposed in both the first gap g1 and the third gap g3.

In the present embodiment, the air supply unit 21 provided in the first gap g1 of the main transport auxiliary air blowing tool 19 is provided in parallel along the sub-transport direction Y (in other words, in the present example, six in this example). Each of the plurality of air supply units 21 is traversed from the first gap g1 in the plan view in the main conveyance direction X, and is traversed in the sub-transporting force application tool 6 located on the upstream side in the main conveyance direction X. It is provided between the rotating rollers 7 adjacent to the sub-transport direction Y. In the same manner, the air supply unit 21 provided in the third gap g3 of the main conveyance air supply tool 19 is provided in parallel in the sub-transport direction Y, and the plurality of air supply units 21 are each in the main conveyance direction by the discharge port 21a. The posture of the X is adjacent to the sub-transporting force imparting tool 6 in the sub-transporting direction Y from the third gap g3 in the plan view, across the downstream side in the main transport direction X. It is set between the rotating rollers 7.

Incidentally, as shown in Fig. 6, the support body 24 supporting the air supply unit 21 is located in the first gap g1 (or the second gap g2), and the air supply unit 21 is supported by the support body 24 in a cantilever manner, and is rotated. The rollers 7 are disposed in a state of being aligned in the sub-transporting direction Y.

In addition, as shown in Fig. 1, the air supply unit 21 provided in the first gap g1 and the air supply unit 21 provided in the third gap g3 of the main conveyance assist air blower 19 are each in the present embodiment. Six transporting directions Y are arranged side by side, and two rotating rollers 7 are provided between the two air supply portions 21 on the most central side in the sub-transporting direction Y, and the air supply portion 21 and the air on the outer side of the sub-transporting direction Y are provided. There are three rotating rollers 7 between the supply portions 21, and there are four rotating rollers 7 between the air supply portion 21 and the air supply portion 21 located on the outermost side in the sub-transporting direction Y.

In other words, as shown in Fig. 8, the air supply unit 21 in the main conveyance assist air supply unit 19 is a transfer ratio of the air supply unit 21 in the center portion of the intermediate transfer direction Y in the intermediate transfer unit B. In the state in which the air supply portions 21 on the end side of the sub-transporting direction Y are spaced apart from each other in the transport unit B, a plurality of (six in this example) are arranged side by side in the sub-transport direction Y.

In this way, the main conveyance assist air blowing tool 19 is disposed to supply a larger amount of clean air to the center portion than the end portion side of the sub-transporting direction Y, and is formed at an end side higher than the sub-transporting direction Y of the glass substrate 1. The support force does not contact the central portion of the support.

In addition, the air supply unit 21 provided in the first gap g1 of the main conveyance assist air blowing tool 19 crosses the first gap g1 as shown in Fig. 6 . The side air supply type support tool 11 is provided at the full width of the main conveyance direction X in the gap between the intermediate air supply type support tools 12. In the present specification, the term "crossing the full width" means not only the width of the air supply portion 21 but also the width of the gap between the upstream side air supply supporting tool 11 and the intermediate air supply supporting tool 12. In the case where the widths are uniform, the width of the air supply portion 21 is small even with respect to the gap width, as long as the width of the air supply portion 21 is included in a predetermined ratio (for example, 80% or 90% or the like) of the gap width. In the present embodiment, as shown in Fig. 6, the width of the air supply portion 21 is about 90% of the gap width between the upstream air supply type support tool 11 and the intermediate air supply type support tool 12, and the air supply portion 21 Both the upstream side air supply type support tool 11 and the intermediate air supply type support tool 12 are disposed in an alienated manner.

In addition, in the main conveyance direction X, a comparison is made between the upstream side air supply type support tool 11 and the intermediate air supply type support tool 12 in order to provide the sub-elevation type propulsion power application part 6a and form the first gap g1. A large gap is provided, but by providing the air supply portion 21 as described above, the glass substrate 1 can be appropriately supported between the upstream side air supply type supporting tool 11 and the intermediate air supply type support tool 12.

The sub-transport-assisted air-supply tool 20 is disposed in a pair of gaps formed between the pair of main conveyance propulsion power application tools 5 (the main lift-type propulsion force application portion 5a) and the intermediate-transport air-supporting tool 12 in the intermediate transfer portion B. In the middle, the air supply unit 21 is disposed in the second gap g2 on the downstream side in the sub-transport direction Y and at least the second gap g2 in the fourth gap g4 on the upstream side in the sub-transport direction Y. In the present embodiment, as shown in FIG. 2, the sub-transporting air supply tool 20 is disposed such that the air supply unit is disposed in both the second gap g2 and the fourth gap g4. twenty one.

In the air supply unit 21 provided in the second gap g2 of the sub-transporting air supply tool 20, a plurality of (in other words, six in this example) are arranged side by side in the main conveyance direction X, and the plurality of air supply units 21 each In the posture of the discharge port 21a in the sub-transporting direction Y, the main conveyance force imparting tool 5 that is adjacent to the downstream side in the sub-transporting direction Y is adjacent to the main conveyance direction X from the second gap g2 in plan view. It is set between the rotating rollers 7. In the same manner, the air supply unit 21 provided in the fourth gap g4 of the sub-transport-assisted air-supply tool 20 is arranged in parallel in the main transport direction X. The plurality of air supply units 21 are each in the sub-transport direction Y by the discharge port 21a. The posture is provided between the rotating rollers 7 adjacent to each other in the main conveying direction X from the fourth gap g4 in the plan view, and the main conveying force applying tool 5 on the upstream side in the sub-transporting direction Y.

In the same manner as the air supply unit 21 of the main conveyance-assisted air supply tool 19, the air supply unit 21 of the sub-transporting air supply tool 20 is an air supply unit on the end side of the main transport direction X in the intermediate transport unit B. The interval between the 21s is larger than the interval between the air supply portions 21 in the central portion of the main transport direction X in the intermediate transport unit B, and a plurality of them are arranged in the main transport direction X (six in this example).

In addition, the air supply unit 21 provided in the second gap g2 of the sub-transporting air supply tool 20 is the same as the air supply unit 21 provided in the first gap g1 of the main conveyance-assisted air blowing tool 19, and includes the second gap g2. The gap between the relay air supply supporting tool 12 and the downstream side air supply supporting tool 13 is disposed across the entire width of the sub conveying direction Y.

[restricted parts]

As shown in Fig. 2, the glass substrate 1 that is conveyed in the forward direction of the downstream side of the main conveyance direction X by the main conveyance driving force imparting tool 5 is placed in the intermediate conveyance unit B, and is conveyed to the main conveyance direction X. The downstream end terminal position is further conveyed to the downstream side of the main conveyance direction X (the corresponding contact body) 25, and the main conveyance force application tool 6 is restricted to the upstream side of the sub conveyance direction Y. The glass substrate 1 is transported to the sub-transport restriction member 26 on the upstream side in the sub-transport direction Y from the upstream end position in the sub-transport direction Y.

Incidentally, in the state in which the glass substrate 1 is located at the downstream end position in the main conveyance direction X, the small diameter portion 7a of the rotary roller 7 in the sub-elevation type propulsion power application portion 6a is formed in the main portion of the glass substrate 1. The large-diameter portion 7b of the rotating roller 7 in the sub-lifting-type propulsion-force giving portion 6a is located further outward than the both ends of the glass substrate 1 in the main conveying direction X. The state of the side. In the state in which the glass substrate 1 is located at the upstream end position in the sub-transporting direction Y, the small-diameter portion 7a of the rotating roller 7 in the main lift-type propulsive force applying portion 5a is formed in the sub-transporting direction of the glass substrate 1. The large-diameter portion 7b of the rotating roller 7 in the main lifting-type propulsion-force giving portion 5a is located further outward than the both ends of the sub-transporting direction Y of the glass substrate 1 status.

As shown in Fig. 9, the main conveyance regulating member 25 is disposed so as to be the same height as the glass substrate 1 placed and supported by the pair of main conveyance driving force applying means 5 in the main conveyance state, and is abutted in the sub conveyance state. The glass substrate 1 on which the pair of auxiliary conveyance force application tools 6 are placed is supported on the downstream side in the main conveyance direction X. In the lower surface of the glass substrate 1 which is supported by the pair of main transporting force application tools 5 and the sub-transporting state, the pair of side members are replaced by the pair of side members (see Fig. 9(a)). The conveyance force application tool 6 is placed on the lower surface side of the glass substrate 1 on which the support is placed, and is freely movable between the release restriction positions (see FIG. 9(b)) on the downstream side of the main conveyance direction X. In other words, the restriction position of the main conveyance regulating member 25 is at a position on the downstream side of the glass substrate 1 in the main conveyance direction X at the downstream end position of the main conveyance direction X.

Further, the main limiting transfer operating tool 28 is used to linearly move the support member 27 supporting the main conveyance regulating member 25 in the oblique direction so that the main conveyance regulating member 25 moves up and down between the restriction position and the release restriction position. In other words, the main conveyance regulating member 25 is disposed to move downward from the restriction position to the downstream side in the main conveyance direction X, to move obliquely until the restriction position is released, and to the main conveyance from the release restriction position. The upstream side moving side of the direction X moves to the upper side, and moves obliquely until the restricted position.

In addition, the sub-transport restriction member 26 is arranged in the same manner as the main conveyance restriction member 25, and the support member 27 supporting the sub-transport restriction member 26 is linearly moved up and down by the sub-restriction lifting and lowering operation tool 29, thereby restricting the position and releasing the restriction. Free movement between positions. The restriction position of the sub-transportation regulating member 26 is the same height as the glass substrate 1 placed and supported by the pair of sub-transporting force application tools 6 in the sub-transporting state, and is given by a pair of main conveyance thrusts in the main conveyance state. The tool 5 mounts the position of the glass substrate 1 supported on the upstream side in the sub-transporting direction Y, and the release restriction position of the sub-transport restriction member 26. In the lower surface of the glass substrate 1 that is supported by the pair of main conveyance force application tools 5 and the glass substrate 1 that is supported by the pair of auxiliary conveyance force application tools 6 in the sub-transport state in the main conveyance state, Next, the lower side is further moved to the position on the upstream side of the sub-transporting direction Y than the restricted position. In other words, the restriction position of the sub-transport restriction member 26 abuts on the side surface on the upstream side in the sub-transport direction Y of the glass substrate 1 positioned at the upstream end position in the sub-transport direction Y.

[control device]

As shown in Fig. 12, the plate-shaped body conveying device is provided with an operation for controlling the air supply type supporting tool 2 and the propulsion power supply tool 3, and a main conveying auxiliary air blowing device 19 and a sub-transporting auxiliary air supply in the intermediate transfer unit B. The tool 20, the main conveyance lifting operation tool 17, the sub-transport lifting operation tool 18, the main restriction lifting operation tool 28, and the sub-limit lifting operation tool 29 are operated by the control device H. Furthermore, the actuation control of each tool is implemented by a software program installed in a microcomputer equipped with the control device H.

When the control device H is arranged to switch the intermediate transfer and delivery unit B from the sub-transporting state to the main-transporting state, the main transport-assisted air-supply tool 19 is switched to the supply state, and the sub-transport assisted air supply tool 20 is switched to the supply-stop state. When the intermediate transfer unit B is switched from the main transport state to the sub transport state, the main transport assist air supply tool 19 is switched to the supply stop state, and the sub transport assist air supply tool 20 is switched to the supply state. Furthermore, the control device H corresponds to a blowing state switching tool.

In addition, the main conveyance first detection sensor 31, the main conveyance second detection sensor 32, and the sub conveyance first detection feeling are set to detect the presence or absence of the glass substrate 1. The detection information of the detector 33 and the sub-transport second detection sensor 34 is input to the control device H. As shown in Fig. 10, the four detecting sensors 31 to 34 are disposed in a plan view surrounded by a pair of main lift type propulsion power giving portions 5a and a pair of sub-lifting force applying portions 6a. Within the space.

In addition, the main conveyance second detection sensor 32 is disposed further downstream of the main conveyance direction X than the main conveyance first detection sensor 31, and the glass substrate 1 conveyed downstream of the main conveyance direction X is set to be conveyed by the main conveyance. After being detected by the first detection sensor 31, the second detection sensor 32 is again detected by the main conveyance.

In addition, the sub-transport second detecting sensor 34 is disposed on the upstream side of the sub-transporting direction Y than the sub-transport first detecting sensor 33, and the glass substrate 1 transported to the upstream side in the sub-transporting direction Y is set to be transported by the sub-transport After the first detection sensor 33 detects the second detection sensor 34, it is detected by the sub-transfer second detection sensor 34.

In addition, when the glass substrate 1 is in an appropriate position (a state in which the glass substrate 1 is at the downstream end position in the main transport direction X and is located at the upstream end position in the sub transport direction Y), the four detecting sensors 31 are provided. All of ~34 are in the state of the glass substrate 1 in which the detection position is in place.

Next, the operation of the intermediate transfer unit B will be described in accordance with the control device H.

First, a case where the glass substrate 1 is transported in the forward direction will be described based on Fig. 13 . Incidentally, when the glass substrate 1 is conveyed in the forward direction, the intermediate transfer air supply supporting tool 12 is switched to the operating state before the downstream end portion of the main transport direction X of the glass substrate 1 is transported to the first gap g1. The main lift type propulsion power giving unit 5a is moved up to the raised position, and the sub-lifting type propulsive force giving unit 6a is moved down to the lowered position, and the main conveyance assisting air supply tool 19 is cut. When the supply state is changed, the sub-transport assist air supply tool 20 is switched to the supply stop state, the main conveyance restriction member 25 is moved to the restriction position, and the sub-transport restriction member 26 is moved to the release restriction position, whereby the intermediate transfer portion B is switched to the positive position. Direction of the main transport status.

The glass substrate 1 is conveyed to the downstream side of the main conveyance direction X at a normal conveyance speed by the main conveyance force to the tool 5 (the main lift type propulsion force application part 5a) <S1>.

At this time, the main conveyance assist air supply tool 19 is switched to the supply state, because the clean air blown from the main conveyance assist air supply tool 19 can be used, and the non-contact support upstream side air supply type support tool 11 and the intermediate transfer air type support tool 12 can be used. Since the glass substrate 1 is formed in the gap formed therebetween, the glass substrate 1 can be suitably supported. In addition, it is difficult for the glass substrate 1 to be lifted from the main conveyance force application tool 5 at both ends of the sub-transporting direction Y, and the glass substrate 1 can be given the glass substrate by the main conveyance force application tool 5. 1 Properly push the force.

The glass substrate 1 is conveyed to the downstream side in the main conveyance direction X, and as shown in FIG. 10, when the main conveyance first detection sensor 31 detects the glass substrate 1 <S2>, the main lift type propulsion unit 5a is placed ( The main conveyance force is decelerated by the operation speed of the tool 5), and the conveyance speed by the main conveyance propulsion power supply tool 5 is decelerated to the low speed conveyance speed, and the glass substrate 1 <S3> is conveyed.

After that, when the glass substrate 1 is detected, the main conveyance second detection sensor 32 detects the time from the start of the detection to the stop (the detection is performed from the glass substrate 1 by the second detection sensor 32, and is carried. The time required to the appropriate position) After the passage of <S4>, the main lift type propulsion unit 5a (main transfer) The propulsive force is given to the operation of the tool 5) to stop <S5>. At this time, the glass substrate 1 is transported to the downstream end position in the main transport direction X and is positioned at an appropriate position as shown in FIG.

In the state in which the glass substrate 1 is placed in an appropriate position as described above, the main conveyance-assisted air blowing tool 19 is switched to the supply-stop state, and the sub-transporting auxiliary air blowing tool 20 is switched to the supply state, and the air-state switching step is performed. The main lift-type propulsion unit 5a is lowered, and the sub-lifting-type propulsion unit 6a is raised, and the main conveyance regulating member 25 is moved to the contact position switching step of the release-restricted position, and the intermediate-transport unit B is switched. In the positive direction sub-transport state <S6>. Incidentally, the switching of the supply-stopping state of the main conveyance-assisted air-supply tool 19, the switching of the supply state of the sub-transporting-assisted air-supply tool 20, the rise of the sub-lifting-type propulsion-force giving unit 6a, and the main lift-type propulsive force are given. The lowering of the portion 5a and the movement of the main transport restriction member 25 to the release restriction position may be performed as appropriate, and some or all of them may be simultaneously performed.

In this way, the intermediate transport unit B is switched from the main transport state to the sub transport state, and before the transfer of the glass substrate 1 to the sub transport direction Y is started in the intermediate transport unit B, the main transport assist air supply tool 19 is set. Switching to the supply stop state and switching the sub-transport assist air supply tool 20 to the supply state. Then, the intermediate transfer unit B is switched from the main transport state to the sub transport state, and before the transfer of the glass substrate 1 to the sub transport direction Y is started in the intermediate transport unit B, the main transport restriction member 25 is set to be released. Limit the movement of the position.

After that, let the sub-delivery propulsion force give the tool 6 to start to operate normally. The speed conveys the glass substrate 1 <S7> to the downstream side of the sub-transport direction Y.

At this time, since the main conveyance-assisted air-supply tool 19 has been switched to the supply-stop state, it is difficult for the glass substrate 1 to be lifted from the sub-transporting force application tool 6 at both ends of the main conveyance direction X. The glass substrate 1 is given an appropriate propulsive force. In addition, the sub-transport-assisted air-supply tool 20 is switched to the supply state, and the clean air ejected from the sub-transport-assisted air supply tool 20 can be used between the non-contact support intermediate transfer air support tool 12 and the downstream side air supply support tool 13. The glass substrate 1 on the formed gap can appropriately support the glass substrate 1.

After the operation of the sub-transporting propulsion power application tool 6 is started, the switching setting time (the time required for the glass substrate 1 to be transported from the intermediate transfer transport unit B to the downstream transport unit C) is over <S8>, and the intermediate transport unit B is switched. It will be switched to the positive direction main transport state <S9>.

Next, a case where the glass substrate 1 is conveyed in the reverse direction will be described. Incidentally, when the glass substrate 1 is transported in the reverse direction, before the glass substrate 1 is transported to the intermediate transport unit B from the downstream transport unit B, the intermediate feed air supply supporting tool 12 is first switched to the active state, and the main lift type is used. The propulsion-forced portion 5a is moved down to the lowered position, the sub-lifting-type propulsive force giving portion 6a is moved up to the ascending position, the main transport-assisted air-supply tool 19 is switched to the supply-stop state, and the sub-transport-assisted air blower 20 is switched to the supply state. The main conveyance restriction member 25 is moved to the release restriction position, and the sub conveyance restriction member 26 is moved to the restriction position, whereby the intermediate transfer conveyance unit B is switched to the reverse conveyance state.

Then, the sub-transporting force is applied to the tool 6 to transport the glass substrate 1 to the upstream side of the sub-transporting direction Y at the normal conveying speed, and the sub-transporting unit When the detection sensor 33 detects the glass substrate 1, the conveyance speed of the sub-transporting force application tool 6 is decelerated to the low-speed conveyance speed to convey the glass substrate 1, and the sub-transport second detection sensor 34 detects the glass. In the case of the substrate 1, the operation of the sub-delivery force application tool 6 is stopped after the detection for the set time. At this time, the glass substrate 1 is transported to an appropriate position at the upstream end position of the sub-transport direction Y.

In a state in which the glass substrate 1 is placed at an appropriate position as described above, the main conveyance-assisted air blowing tool 19 is switched to the supply state, and the sub-transporting auxiliary air blowing tool 20 is switched to the supply-stop state, and the air-state state switching step is performed. The lift-type propulsion unit 5a is raised, the sub-lifting-type propulsion unit 6a is lowered, and the sub-transport restriction member 26 is moved to the release-restricted position, thereby switching the intermediate-transport unit B to the reverse-direction main conveyance state.

After that, the main conveyance driving force is given to the tool 5, and the glass substrate 1 is conveyed to the upstream side in the main conveyance direction X at a normal conveyance speed.

After the main conveyance driving force is applied to the tool 5, the switching set time (the time required for the entire glass substrate 1 to be transported to the upstream side transport unit A) is turned over, and the intermediate transfer unit B is switched to the reverse side transfer. status.

In the first gap g1, the air supply unit 21 of the main conveyance assist air blower 19 is provided, and the air supply unit 21 of the sub-transport air blower 20 is provided in the second gap g2, and the intermediate transport unit B is in the sub transport state. Switching between the main conveyance air supply tool 19 and the auxiliary conveyance air supply tool 20 is switched between the supply state and the supply stop state, and can be switched between the main conveyance direction X and the sub conveyance direction Y. The glass substrate 1 can be accurately conveyed, and the damage of the glass substrate 1 can be prevented.

[Other implementations]

(1) In the above-described embodiment, the intermediate transfer unit B is switched from the main transfer state to the sub transfer state, and before the transfer of the glass substrate 1 to the sub transport direction Y in the intermediate transfer unit B is started, When the main conveyance assist air blower 19 is switched to the supply stop state and the sub-transport assist air blower 20 is switched to the supply state, the transfer of the glass substrate 1 to the downstream side of the sub-transport direction Y may be started or tightened in the intermediate transfer unit B. Then, the main conveyance assist air supply tool 19 is switched to the supply stop state, and the sub-transport assist air supply tool 20 is switched to the supply state.

(2) In the above-described embodiment, the main conveyance driving force application tool 5 is disposed such that a plurality of contact glass substrates 1 are arranged side by side in the main conveyance direction X, and a roller type of the rotary roller 7 that imparts a propulsive force to the glass substrate 1 is provided. In the configuration, the main conveyance propelling force imparting tool 5 may be disposed so as to be disposed in a belt-like configuration in which the lower surface of the glass substrate 1 is placed in the main conveyance direction X and the endless belt is given a propulsive force to the glass substrate 1.

Incidentally, in the case where the main conveyance driving force imparting tool 5 is formed into a belt type structure, the endless belt as the rotating body may be arranged in parallel along the main conveying direction X, or a single endless belt may be provided along the main conveying direction X. can.

Similarly, the sub-transporting force application tool 6 may be arranged in a belt type.

(3) In the above-described embodiment, the air supply unit 21 in the main conveyance assist air blowing tool 19 is disposed between the rotating rollers 7 from the first gap g1 in plan view, and includes the first gap g1. In the gap between the upstream side air supply supporting tool 11 and the intermediate air supply supporting tool 12, the upstream side is sent Both the wind support tool 11 and the intermediate air supply support tool 12 are arranged in an alienated manner. However, the air supply unit 21 in the main conveyance assist air supply tool 19 may be provided in contact with the upstream side air supply type support tool 11 and the intermediate transfer type air supply type. Support either or both of the tools 12. Further, the air supply unit 21 in the main conveyance assist air blowing tool 19 may be disposed only in the first gap g1 in plan view.

Similarly, the air supply unit 21 in the sub-transporting air supply tool 20 may be provided to contact either or both of the intermediate-transporting wind-supporting tool 12 and the downstream-side air-assisted supporting tool 13, or the sub-transporting auxiliary air supply may be provided. The air supply portion 21 in the tool 20 is disposed to be positioned only in the second gap g2 in plan view.

(4) In the above-described embodiment, the air supply unit 21 in the main air supply unit 19 is disposed at an interval between the air supply units 21 on the end side of the intermediate transport direction Y in the intermediate transport unit B. In a state in which the air supply portions 21 in the center portion of the sub-transporting direction Y are spaced apart from each other in the intermediate transport direction B, a plurality of them are arranged side by side in the sub-transporting direction Y. However, the air in the main air-assisted air blowing tool 19 may be transported. The supply unit 21 is provided in plural at equal intervals in the sub-transport direction Y. Incidentally, even when a plurality of air supply portions 21 are arranged side by side in the sub-transport direction Y at equal intervals, the flow rate of the clean air from the air supply portion 21 located on the center side in the sub-transport direction Y may be arranged. The flow rate of the clean air from the air supply portion 21 on the end side is increased so as not to contact the center portion with a supporting force higher than the end side of the sub-transporting direction Y of the glass substrate 1. The same applies to the air supply unit 21 in the sub-transport assist air supply tool 20.

(5) In the above-described embodiment, the air supply unit 21 is configured by a nozzle having a slit-shaped discharge port. However, the air supply unit 21 may be configured by a nozzle having one or a plurality of circular discharge ports. The air supply unit 21 may be configured by a small fan filter unit.

Further, in the above-described embodiment, the plurality of air supply portions 21 are arranged side by side in the first gap g1 and the second gap g2. However, the nozzle having the slit-shaped discharge port 21a may be transported along the sub-discharge port 21a. The posture of the direction Y is set in the first gap g1, and is provided in the second gap g2 or the like in a posture in which the discharge port 21a is in the main conveyance direction X, whereby the single air supply unit 21 is provided in the first gap g1 and the second gap g2. .

(6) In the above embodiment, the main conveyance regulating member 25 is disposed such that the release restriction position of the main conveyance restriction member 25 is lower than the restriction position and is further downstream than the restriction position in the main conveyance direction X. The main conveyance regulating member 25 at the restriction position is moved obliquely downward and moved to the release restriction position. However, the main conveyance restriction member 25 located at the restriction position may be horizontally moved on the downstream side in the main conveyance direction X. It is also possible to move to the release restriction position, and the main conveyance restriction member 25 located at the restriction position may be vertically moved downward to move to the release restriction position. Further, the main conveyance restriction member 25 may not be provided. The same applies to the sub-transport restriction member 26.

(7) In the above-described embodiment, the upstream side conveying unit A is arranged in parallel with the upstream side of the main conveying direction X of the intermediate conveying unit B, and the downstream side conveying unit is arranged side by side in the downstream side of the sub conveying direction Y of the intermediate conveying unit B. C. The plate-shaped conveying device is arranged in an L shape, but the main conveying device of the intermediate conveying unit B may be used. The second downstream side conveying unit having the same configuration as the upstream side conveying unit A is arranged in parallel with the downstream side of the X, or the upstream side of the sub conveying direction Y of the intermediate conveying unit B is arranged in parallel with the downstream side conveying unit C. In the second upstream side conveying unit, the plate-shaped body conveying device is disposed in a T shape, and both the second downstream side conveying unit and the second upstream side conveying unit may be arranged in parallel, and the plate-shaped body conveying device may be arranged in a cross shape. .

In addition, in the intermediate transfer unit B, the glass substrate 1 can be transported from the upstream transport unit A to the second downstream transport unit via the intermediate transport unit B without changing the transport direction of the glass substrate 1, or the glass substrate can be transported. The first upstream transfer unit is transported to the downstream transfer unit C via the intermediate transfer unit B.

(8) In the above-described embodiment, the pair of main conveyance driving force applying means 5 and the pair of auxiliary conveyance force applying means 6 are arranged to move up and down, thereby switching the intermediate transfer portion B to the main In the transporting state and the sub-transporting state, the main transporting power supply tool 5 and the pair of sub-transporting power application tools 6 may be moved up and down to switch the intermediate transport unit B to the main Transport status and sub-transport status. In this arrangement, although the heights of the support plate-like body 1 in the main conveyance state and the sub-transport state are different, the height of the intermediate feed-type support tool 12 can be changed to match the change in the support height of the plate-like body 1, and can be arranged in the middle. The transfer wind support tool 12 is free to move up and down.

(9) In the above embodiment, the case where the glass substrate 1 for liquid crystal corresponds to the "rectangular plate-like body" in the present invention is described as an example, but a rectangular plate-shaped body may be used. A glass substrate used for applications other than liquid crystals, and a plate material other than glass (for example, a semiconductor) body.

1‧‧‧glass substrate (plate-like body)

2‧‧‧Air supply support tool

3‧‧‧Promoting tools

5‧‧‧The main transport propulsion tool

5a‧‧‧Main Lifting Propulsion

5b‧‧‧Main fixed propulsion

6‧‧‧ Deputy propulsion power giving tool

6a‧‧‧ Deputy Lifting Propulsion

6b‧‧‧Deputy fixed propulsion

7‧‧‧Rotating body

7a‧‧‧Little Trails Department

7b‧‧‧Great Path Department

8‧‧‧Electric motor

11‧‧‧Upstream side air supply support tool

12‧‧‧Transfer air support tool

13‧‧‧ downstream side air supply support tool

14‧‧‧Dust filter

15‧‧‧Air supply fan

16‧‧‧Fan filter unit

17‧‧‧Main transport lifting operation tool

18‧‧‧Dumping lifting operation tool

19‧‧‧Main transport subsidy air supply tool

20‧‧‧ Deputy transfer subsidy air supply tool

21‧‧‧Air Supply Department

21a‧‧‧Spray outlet

24‧‧‧Support

25‧‧‧Main transport restriction parts (contact body)

26‧‧‧Sub transport restrictions

27‧‧‧Support parts

28‧‧‧Main limit lifting operation tool

29‧‧‧Sub-limit lifting operation tool

31‧‧‧Main transport 1st detection sensor

32‧‧‧Main transport second detection sensor

33‧‧‧Send the first detection sensor

34‧‧‧Second transport second detection sensor

A‧‧‧Upstream side transport department

B‧‧‧Transportation Department

C‧‧‧Downstream Transport Department

G1‧‧‧1st gap

G2‧‧‧2nd gap

G3‧‧‧3rd gap

G4‧‧‧4th gap

H‧‧‧Air supply status switching tool

X‧‧‧Main transport direction

Y‧‧‧Sub transport direction

Fig. 1 is a plan view showing a plate-shaped body conveying apparatus according to an embodiment of the present invention.

Fig. 2 is a plan view showing a transfer unit in the embodiment of the present invention.

[Fig. 3] A side view of the transfer unit in the embodiment of the present invention.

[Fig. 4] A side view of the intermediate transfer unit in the main transport state according to the embodiment of the present invention.

[Fig. 5] A side view of the intermediate transfer unit in the sub-transport state according to the embodiment of the present invention.

[Fig. 6] (a) to (b) side views of the auxiliary air blowing tool according to the embodiment of the present invention.

[Fig. 7] A perspective view of a main lift type propulsion force applying portion according to an embodiment of the present invention.

Fig. 8 is a schematic view showing an air supply unit provided side by side in the embodiment of the present invention.

[Fig. 9] (a) to (b) schematic views of the abutting body of the embodiment of the present invention.

[Fig. 10] A transfer operation diagram of the plate-shaped object conveying device according to the embodiment of the present invention.

[Fig. 11] A transfer operation diagram of the plate-shaped object conveying device according to the embodiment of the present invention.

[Fig. 12] A control block diagram of an embodiment of the present invention.

Fig. 13 is a flow chart showing the control of the transfer unit in the embodiment of the present invention.

1‧‧‧ glass substrate

2‧‧‧Air supply support tool

3‧‧‧Promoting tools

5‧‧‧The main transport propulsion tool

5a‧‧‧Main Lifting Propulsion

5b‧‧‧Main fixed propulsion

6‧‧‧ Deputy propulsion power giving tool

6a‧‧‧ Deputy Lifting Propulsion

6b‧‧‧Deputy fixed propulsion

11‧‧‧Upstream side air supply support tool

12‧‧‧Transfer air support tool

13‧‧‧ downstream side air supply support tool

16‧‧‧Fan filter unit

19‧‧‧Main transport subsidy air supply tool

20‧‧‧ Deputy transfer subsidy air supply tool

21‧‧‧Air Supply Department

A‧‧‧Upstream side transport department

B‧‧‧Transportation Department

C‧‧‧Downstream Transport Department

G1‧‧‧1st gap

G2‧‧‧2nd gap

G3‧‧‧3rd gap

G4‧‧‧4th gap

Claims (10)

A plate-shaped body conveying device is provided with an air supply type supporting tool that supplies clean air to a lower surface of a rectangular plate-like body and supports the plate-like body in a horizontal posture in a non-contact state, and is in contact with the air supply type supporting tool The lower surface of the supporting plate-shaped body is provided with a propulsive force for imparting a propulsive force in the conveying direction to the plate-shaped body, and the plate-shaped body conveying device is provided with an upstream side conveying portion that conveys the plate-shaped body in the main conveying direction. And a downstream conveyance unit that conveys the plate-shaped body in the sub-transport direction that is orthogonal to the main conveyance direction, and a conveyance direction of the plate-shaped body received from the upstream conveyance unit is switched from the main conveyance direction to the vice In the plate-shaped conveying device of the intermediate conveying unit of the downstream conveying unit, the propulsion power feeding device is disposed from the upstream conveying unit across the intermediate conveying unit and is in contact with the plate shape. One of the propulsive forces in the main transport direction is given to the plate-like body on the lower surface of the both ends in the sub-transporting direction, and the main transporting propelling force is given to the plate-like body, and the former The transfer conveyance unit is disposed across the downstream side conveyance unit and contacts one of the end faces of the plate-like body in the main conveyance direction, and gives the plate-like body a pair of thrust forces in the sub-transport direction. The sub-propulsion power supply tool is provided in the state in which the pair of main conveyance force application tools are separated from each other in the sub-transport direction from the pair of main conveyance force application tools. The upstream side air supply type supporting tool of the upstream side conveying portion, and the pair of sub transporting pushes The downstream side air supply type support tool provided in the downstream side conveyance unit in the state in which the pair of auxiliary conveyance force application tools are separated from each other in the main conveyance direction, and the pair of main conveyance advances In the state in which the force is given to the tool, each of the pair of auxiliary conveyance force imparting means is separated from the sub-transporting direction, and between the pair of sub-transporting propulsive force giving means, the pair of sub-transporting propulsion is given Each of the tools is disposed in the intermediate transport direction, and is disposed in the intermediate transport unit, and the intermediate transport unit is disposed to transmit the pair of main propulsion power to the tool and the pair of pairs. The conveyance force is given to the tool to move up and down relatively, and is freely switchable so that the pair of main conveyance driving force is applied to the lower surface of the plate-like body and the conveyance direction of the plate-shaped body is switched to the main conveyance state in the main conveyance direction. And the pair of sub-delivery driving force is applied to the lower surface of the plate-like body, and the conveying direction of the plate-shaped body is switched to the aforementioned sub-transport In the sub-transporting state, the plate-shaped conveying device is provided with a main conveying auxiliary air blowing device, and the air supply unit that supplies the clean air to the lower surface of the plate-shaped body is disposed in the intermediate transfer conveying unit. a first gap of at least one of a pair of gaps between the propelling force applying tool and the intermediate transfer air supporting tool located on the upstream side in the main conveying direction, wherein the plate-shaped body conveying device is provided with a sub-transporting auxiliary air blowing device that performs the air The supply unit is disposed in the second transfer chamber between the pair of main transfer force application tools and the intermediate transfer air supply support tool, and at least the second side of the downstream side in the sub-transport direction In the gap, the main conveyance assist air blowing tool and the sub-transporting air supply tool are each arranged to be freely switchable to supply a clean air supply state in a plate-like body that is positioned above the air supply unit in a non-contact state. And a supply stop state in which the supply of the clean air from the air supply unit is stopped, and the plate-shaped body transfer device is provided with a blower state switching tool, and the intermediate transfer conveyance unit is switched from the sub-transport state to the main conveyance. In the state, the main conveyance assist air supply tool is switched to the supply state, and the sub-transport assist air supply tool is switched to the supply stop state, and the intermediate transfer conveyance unit is switched from the main conveyance state to the sub-transport state. At this time, the main conveyance assist air blowing tool is switched to the supply stop state, and the sub-transport assist air supply tool is switched to the supply state. The sheet conveying apparatus according to the first aspect of the invention, wherein the air blowing state switching device is configured such that the intermediate conveying unit is switched from the main conveying state to the sub conveying state, and the intermediate conveying unit starts Before the conveyance of the plate-shaped body in the sub-transporting direction, the main conveyance-assisted air-supply tool is switched to the supply-stop state, and the sub-transport-assisted air-supply tool is switched to the supply state. The plate-shaped conveying device according to the first or second aspect of the invention, wherein the main conveying force application tool is disposed such that a plurality of contact plate-like bodies are arranged in parallel along the main conveying direction and the plate-like shape is formed body In the rotary body to which the propulsive force is applied, the sub-delivery force application tool is disposed such that a plurality of the rotators are arranged side by side in the sub-transporting direction, and the air supply unit in the main transport-assisted air-supply tool is in the plan view from the first The gap is provided between the rotating bodies adjacent to the sub-transporting direction in the sub-transporting force application tool, and the air supply unit in the sub-transporting air supply tool is horizontally viewed from the second gap. The main transfer propulsion force is provided between the rotating bodies adjacent to the main conveyance direction in the tool. The sheet-shaped conveying apparatus according to the first or second aspect of the invention, wherein the air supply unit of the main conveyance-assisted air-supply tool includes the upstream side air supply type support tool including the first gap, and the middle The clearance between the air-type support tools is provided across the entire width of the main conveyance direction, and the air supply unit of the sub-transport-assisted air supply tool transfers the air-type support tool to the intermediate transmission including the second gap. The gap between the downstream side air supply type supporting tools is provided across the entire width of the sub-transporting direction. The sheet-shaped conveying apparatus according to the first aspect of the invention, wherein the air supply unit of the main conveyance-assisted air-supply tool is an end side of the intermediate conveyance unit in the sub-transporting direction. The interval between the air supply portions is the same as that in the intermediate transfer portion In a state in which the air supply portions in the center portion of the sub-transporting direction are large, a plurality of the air supply units are arranged in parallel in the sub-transporting direction, and the air supply unit in the sub-transporting air supply unit is the aforementioned one of the intermediate transfer units. The distance between the air supply portions on the end side in the main transport direction is larger than the interval between the air supply portions in the central portion of the intermediate transport direction in the intermediate transport unit, and is arranged side by side in the main transport direction. Multiple. The plate-shaped conveying apparatus according to the first or second aspect of the invention, wherein the air supply unit is constituted by a nozzle having a slit-shaped discharge port. The plate-shaped object conveying device according to the first or second aspect of the invention, wherein the plate-shaped body conveying device is provided with a contact body, and is freely movable to be supported by the pair of main conveying force applying means in the main conveying state. The plate-like body has the same height and is in contact with the side surface of the side surface on the downstream side in the main conveyance direction of the plate-shaped body supported by the pair of sub-transporting force application tools in the sub-transporting state. In the main conveyance state, the lower surface of the plate-shaped body that is supported by the pair of main conveyance propulsion power supply tools and the lower surface of the plate-shaped body that is supported by the pair of sub-transporting propulsion power application tools in the sub-transporting state are further The lower side is located at a release restriction position on the downstream side of the main conveyance direction from the restriction position. A plate-shaped body conveying method is a plate-shaped body conveying method using a plate-shaped body conveying device that supplies clean air to a lower surface of a rectangular plate-like body and supports the plate-like body in a horizontal posture. Yu Fei The air supply type support tool in the contact state and the lower surface of the plate-shaped body supported by the air supply type support tool are provided with a propulsive force imparting a propulsive force to the plate body in the transport direction, and the plate body is transported The apparatus is provided with an upstream side conveying unit that conveys the plate-shaped body in the main conveying direction, and a downstream side conveying unit that conveys the plate-shaped body in the sub-transporting direction that is orthogonal to the main conveying direction, and the conveying unit that will convey the upstream side from the upstream side The conveyance direction of the received plate-shaped body is switched from the main conveyance direction to the sub- conveyance direction, and is transferred to the downstream conveyance unit intermediate conveyance unit, wherein the thrust force application tool is provided to traverse from the upstream conveyance unit. The intermediate transfer conveyance unit is disposed in contact with the lower end portions of the plate-like body in the sub-transporting direction, and one of the propulsive forces in the main conveyance direction is given to the plate-shaped body. And the intermediate transfer conveying portion is disposed across the downstream side conveying portion and contacts the lower surface of both ends of the plate-shaped body in the main conveying direction, and the plate-shaped body is given before One of the propulsive forces in the sub-transporting direction is provided to the sub-transporting propulsive force, and the air-supply supporting tool is provided between the pair of main transporting propelling force applying tools, and each of the pair of main transporting propelling force is provided The state in which the sub-transport direction is detached is provided in the upstream side air supply type supporting tool of the upstream side conveying unit, and between the pair of sub-transporting propulsive force applying tools, each of the pair of sub-delivery driving force is given to the tool The state in which the conveyance direction is separated is provided in the downstream side air supply type support tool of the downstream side conveyance unit, and the pair of main conveyance pushes In the state in which the pair of sub-transporting force is given to each other in the sub-transporting direction, and the pair of sub-transporting propelling force is given to the tool, the propelling force is transmitted from the pair of sub-transporting force imparting tools. Each of the tools is provided in a state of being separated from the main conveyance direction, and the wind transfer support unit is disposed in the intermediate transfer conveyance unit, and the intermediate transfer conveyance unit is disposed such that the pair of main conveyance driving force is given to the tool and the pair The sub-transporting propelling force is relatively moved up and down, and is freely switched so that the pair of main conveyance driving force is applied to the lower surface of the plate-like body, and the conveying direction of the plate-shaped body is switched to the main conveying state in the main conveying direction. And the pair of sub transporting propelling force is applied to the lower surface of the plate-shaped body to be in contact with the tool, and the conveying direction of the plate-shaped body is switched to the sub-transporting state in the sub-transporting direction, and the plate-shaped conveying device is provided with a main conveying auxiliary air blowing device. The air supply unit that supplies the clean air to the lower surface of the plate-shaped body is disposed in the intermediate transfer conveyance unit and the pair of sub-transport propulsion At least one of a pair of gaps between the tool and the intermediate transfer air supporting tool is located on the upstream side in the main conveying direction, and the plate-shaped conveying device is provided with a sub-transporting auxiliary air blowing device that supplies the air supply unit The second gap that is disposed at least on the downstream side in the sub-transport direction of the pair of gaps between the pair of main transporting force applying means and the intermediate transfer air supporting tool in the intermediate transfer unit, the main transport Each of the auxiliary air supply tool and the sub-transporting air supply tool is configured to be freely switchable to a non-contact state. a supply state in which clean air is supplied to the plate-shaped body above the air supply unit, and a supply stop state in which the supply of clean air from the air supply unit is stopped, and the plate-shaped body transfer method is included in the intermediate transfer unit. When the sub-transporting state is switched to the main conveyance state, the main conveyance-assisted air-supply tool is switched to the supply state, and the sub-transport auxiliary air-supply tool is switched to the supply-stop state, and the intermediate transfer unit is transported from the main conveyance unit. When the state is switched to the sub-transport state switching, the main conveyance-assisted air-supply tool is switched to the supply-stop state, and the sub-transport-assisted air-supply tool is switched to the supply state of the supply state. In the above-described air blowing state switching step, when the intermediate transfer state is switched from the main transport state to the sub transport state, the intermediate transport unit starts in the intermediate transport unit. Before transporting the plate-shaped body to the sub-transporting direction, the main transfer assist air supply tool is switched to the supply stop state, and the sub-transport assist air supply tool is switched to the supply state. The plate-shaped body transfer method according to the eighth or ninth aspect of the present invention, wherein the contact body is provided to be freely movable to be placed in the main conveyance state by the pair of main conveyance driving force application tools. The plate-like body of the support has the same height, and is in contact with the side position of the side surface on the downstream side in the main conveyance direction of the plate-shaped body supported by the pair of sub-transporting force application tools in the sub-transporting state, and the ratio In the main conveyance state, the pair of main conveyance thrusts are placed on the tool. In the lower surface of the plate-shaped body and the sub-transporting state, the lower surface of the plate-shaped body that is supported by the pair of sub-transporting propelling force application tools is located on the lower side, and is located downstream of the main conveyance direction from the restriction position. When the transfer conveyance unit is switched from the main conveyance state to the sub conveyance state, the transfer conveyance unit starts to convey the plate-shaped body to the sub conveyance direction, An abutting body position switching step of moving the abutting body from the restriction position to the release restriction position.