TW201221455A - Transport device and transport method for plate-shaped objects - Google Patents

Abstract

Device and method for conveying a plate-shaped object are provided to prevent damage to a plate-shaped object by supporting the plate-shaped object with a first blowing unit and curbing the bending of the plate-shaped object. A device for conveying a plate-shaped object comprises first and second blowing units(19,20). The air supply unit(21) of the first blowing unit is installed on a first gap(g1) at an intermediate conveying unit(B). The air supply unit of the second blowing unit is installed on a second gap(g2) at the intermediate conveying unit. If the intermediate conveying unit is converted from a sub conveying state to a main conveying state, the first blowing unit is converted to a supply state, and the second blowing unit is converted to a stop state. If the intermediate is converted from the main conveying state to the sub conveying state, then the first blowing unit is converted to a stop state, and the second blowing unit is converted to a supply state.

Description

[Technical Field] The present invention relates to a plate-shaped body conveying device and a plate-shaped body conveying method using the plate-shaped body conveying device. The plate-shaped body conveying device is provided with an upstream-side conveying unit, a downstream-side conveying unit, and a relay conveying unit, and the upstream-side conveying unit is provided with a cleaning air supplied to the .7 surface of the rectangular plate-shaped body to bring the plate-shaped body into a non-contact state. Under the financial level (4), the private catching tool and the contact are the underside of the plate-shaped body supported by the wind-driven branch building tool, and the touch-plate body gives the propulsion force in the direction of the moving force. The plate-shaped body is conveyed in the main conveyance direction, and the downstream conveyance unit conveys the plate-shaped m (four) feed portion in the sub-transport direction that is orthogonal to the main conveyance direction, and conveys the conveyance direction of the plate-shaped body received from the (four) upstream-side conveyance unit from the main conveyance. The direction is switched to the front/rear transport direction and transferred to the downstream side transport unit. [Prior Art 3] In the plate-like body transfer device, the plate-shaped body is conveyed in the main conveyance direction in the upstream conveyance direction, and the plate-shaped body is transferred to the intermediate transfer conveyance portion, and the plate transfer mechanism is formed in the intermediate transfer conveyance portion. The apparatus for transferring the transport direction of the body from the main transport direction to the sub transport direction, and transporting the plate-like body in the intermediate transport direction in the sub transport direction and transporting the plate-shaped body to the downstream transport unit is used in the apparatus for transporting the plate-shaped body. When the conveyance direction of the plate-shaped body is changed from the main conveyance direction to the sub- conveyance direction (for example, refer to Patent Document 1). In the case of the first transfer conveyance force imparting tool, the 201221455 = the hard-moving force imparting tool for the cutting side in the sub-transporting direction is disposed from the upstream transfer portion to the intermediate transfer portion. However, the main conveyance propelling force imparting tool on the downstream side of the side is only disposed in the upstream side conveying unit and the Taocai (10) conveying unit. In addition, among the pair of sub-delivery force application tools, the misfeeding force imparting tool on the downstream side in the main conveyance direction is transferred from the relay. In the upstream side, the sub-transporting force application tool is disposed only in the downstream side conveying unit and is not disposed in the intermediate conveying unit. In the transfer conveyance unit, when the plate-shaped body is conveyed in the main conveyance direction, the main conveyance force on the upstream side in the sub-transport direction is given to the lower surface of the tool-contacting plate-shaped body in the main conveyance direction. When the plate-shaped body is conveyed in the direction of the transport of the field, the sub-transporting force on the downstream side in the main transport direction is given to the lower surface of the plate-like body, and the plate-shaped body is pushed in the sub-transport direction. force. CITATION LIST OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION In the plate-shaped body conveying device of Patent Document 1, the intermediate transfer unit is provided in the intermediate transfer unit. The main conveyance propulsion power supply tool on the downstream side of the conveyance direction and the sub-transportation propulsion power supply tool on the upstream side in the main conveyance direction are used to convey the plate-like body in the main conveyance direction even when the transfer unit 4 201221455 is fed in the main conveyance direction. The main conveyance propelling force is applied to the lower surface of the both ends of the plate-shaped body in the sub-transporting direction, and the pair of main conveyance propelling force is applied to the plate-like body to appropriately impart the propulsive force in the main conveyance direction and to be conveyed in the sub-transporting direction. In the case of the plate-like body, the sub-transporting force is applied to the lower surface of the both end portions of the tool-contacting plate-like body in the main conveying direction, and the pair of sub-propulsion driving force is applied to the plate-like body in the sub-transporting direction as appropriate. The propulsive force is given, and the plate-shaped body is transported in the main transport direction or the sub-transport direction. On the other hand, if the plate-like body is supported by the air-supply supporting tool in the vicinity of the propelling force applying tool, the contact pressure of the tool to the plate-like body is lowered due to the floating of the plate-like body. In order to suppress the lowering of the contact pressure of the tool to the lower surface of the plate-like body, between the pair of main conveyance propelling force imparting tools and the pair of sub-transporting propulsive force giving means In the tool, it is necessary to give the upstream side of the main conveyance direction to the downstream side of the main conveyance direction, and to the downstream side of the main conveyance direction with respect to the auxiliary conveyance force of the upstream side of the main conveyance direction. The state to set. However, when the plate-shaped body is transported from the upstream side transfer unit to the intermediate transfer unit, the plate-shaped body is the first one formed between the sub-transporting force application tool and the intermediate transfer-type support tool on the upstream side in the main conveyance direction. The upper side of the gap is conveyed. However, since the air supply type supporting tool is not provided in the first gap, the center portion of the plate-shaped body in the sub-transporting direction is bent downward. Thus, the curved plate-shaped body is present. The downstream side of the conveyance direction is conveyed and comes into contact with the intermediate feed air type support tool and is damaged. In the case of the second transfer which is formed between the main conveyance force application tool and the intermediate transfer air supply support tool on the downstream side in the sub conveyance direction, At the time of conveyance, the center portion of the main conveyance direction of the plate-like body is bent downward and is broken. The present invention has been made in view of the above-described facts, and an object of the present invention is to provide a propulsion force to the plate-like body appropriately. When the plate-shaped body is conveyed, it is possible to prevent the plate-shaped body from being damaged in the case of the plate-shaped body conveying device. Means for Solving the Problem The plate-shaped body conveying device of the present invention is provided with an upstream side conveying unit, a downstream side conveying unit, and a relay conveying unit, and the upstream side conveying unit is provided with a lower surface of a rectangular plate-shaped body. Clean the air, and the plate-shaped body is supported in a horizontal position in the non-contact state of the air supply type supporting device, and is in contact with the lower surface of the plate-shaped body read by the air supply type branch tool and is conveyed to the plate-shaped body. The propulsive force of the propulsive force in the direction is given to the tool, and the downstream side conveying unit conveys the plate-shaped body in the direction in which the main conveying direction is orthogonal to the direction in which the main conveying direction is formed, and the intermediate transfer unit receives the plate shape from the upstream conveying unit. The body-feeding direction is switched from the main conveyance direction to the front-side conveyance direction, and is transferred to the side conveyance unit. # ▲ The propulsion force application tool is provided, and the upstream conveyance unit is disposed across the transfer conveyance unit. And the contact plate-shaped body is provided on the lower surface of the both ends of the sub-transporting direction, and the plate-like body is given the "the line-feeding force giving item" from the _ turn = (four) to the downstream side of the sputum. It is arranged and is in contact with In the lower surface of the rain end portion of the main transport direction of the above-mentioned 6 201221455, the propulsion force in the sub-transporting direction is given to the plate-shaped body, and the propelling force is supplied to the k-shaped device; a pair of main transporting propelling force is provided between the tools in the sub-transporting direction to evacuate the pair of main transporting propellant tools, and is provided on the upstream side air supply supporting tool of the upper transporting unit. Between the pair of sub-transporting propelling force-applying tools, each of the pair of sub-transporting propulsive force imparting means is disposed in the main transporting direction, and the downstream side air-supply supporting tool is disposed on the lower-transporting unit. In the state in which the pair of main conveyance propulsion forces are given, the tool is given to each of the pair of main conveyance propulsive forces in the sub-transporting direction, and the tool is given to the sub-transport propulsion force. a state in which each of the pair of the urging force imparting means is disposed in the above-mentioned main conveying direction, and is disposed in the intermediate conveying member of the intermediate conveying portion; The transport unit is configured to be freely switched so that the two pairs of masters are transported by means of the above-described one-way main transport propulsion power application tool and the pair of sub-transport propulsion powers And the knives and the main conveyance state in the main conveyance direction, and the pair of i-forces are applied to the lower surface of the plate-like body and the sub-transported state of the transfer direction of the plate-shaped body is provided (The air supply to the clean air is mixed in the above-mentioned transfer type = the description of the pair of gaps between the auxiliary transfer force imparting tool and the intermediate transfer air tool* is at least on the main transport side Iw: the transfer-receiving air-supply jade, which is provided between the above-mentioned tool and the above-mentioned transfer-type air-sending tool that the air supply is supplied to the relay transfer unit in 201221455. The second gap on the downstream side of the direction is at least erroneously arranged; the grading is arranged to be freely switchable from each of the wind turbines, and is supplied to the plate-like body above the air supply unit by the non-contact tool. Bit The clean air (4) is supplied from the air supply unit, and the "main transfer/wind: switch to the supply state" is performed in the "π-feed state", and the sub-transportation subsidy is switched to the supply stop state. When the transfer child is switched to the sub-transport state, the main transport assist air supply guard cuts the supply stop state, and the sub-transport lion air supply cooker is switched to the supply H 1 , that is, By switching the intermediate transfer unit to the main transfer state, it is possible to give the propulsion force to the plate-shaped body in the main conveyance direction by using the main conveyance propulsion force, and to transfer the plate-shaped body from the upstream transfer portion to the intermediate transfer.杳Ρ 0 〜, after the plate-shaped body is transported to the intermediate transfer unit, the transfer is carried out by the transfer. When the ρ is switched to the sub-transporting state, the urging force is applied to the sub-transporting force imparting tool to the plate-like body in the sub-transporting direction, and the plate-shaped body can be transported from the intermediate transfer conveying portion to the lower conveying portion. In the case where the relay transport unit is switched to the main transport state, the main transport assist air supply tool is switched to the supply state and the sub transport assist air supply tool is switched to the supply stop state. Therefore, the plate-shaped body is moved from the upstream side. 8 201221455 When the transfer unit is delivered to the 2nd transfer unit, the main transfer subsidy will be switched to the ',' ί. When the body is transferred from the upstream side transfer unit to the intermediate transfer unit, the sub-transport force is formed on the upstream side in the main conveyance direction, and between the front and the transfer air-cutting tool. When the lion is transported, it is switched to the supply state. Therefore, when the plate-shaped body is transported, the wind core can be sent by the main transport: the plate body is used to transport the plate body in the main transport direction. In addition, in this case, the second _ position is in the display side of the plate-shaped body: the side of the plate-shaped body, and the sub-transportation subsidy is provided in the second gap. In the case of the air supply, the four supply parts are provided, and the end portion 2 on the downstream side of the service direction of the plate-shaped body is supported by the auxiliary conveyance air supply 4. Therefore, the contact support end = The main propulsion power is given to the worker. The contact pressure on the plate body is not lowered. x The use of the propulsion force for the main conveyance force can be carried out along the main body. (4) The transfer of the plate body from the transfer is carried out. When it is sent to the downstream conveying unit, the main conveying subsidy air supply tool is cut. When the air supply tool is switched to the supply state, the air supply tool can be switched to the supply state. Therefore, Y can be used to assist in the bending of the plate-shaped body when the plate-shaped body is transported, and the damage is caused by the /σ4 transport direction (four). Sending propulsion 2 The contact pressure of the object to the plate body is not lowered, and it is transported by one pair:

S 201221455 Gives the tool a precise transfer of the plate body in the sub-transport direction. In short, a pair of main transporting propellant tools and a pair of sub transporting force imparting tools are provided in the intermediate transporting unit, and an air supply unit of the main auxiliary air blowing tool is provided in the second gap, and a sub-transporting auxiliary air supply is provided in the second gap. The air supply unit of the tool is switched to the supply state and the supply stop state in a state in which the main (four) auxiliary air supply and the auxiliary conveyance air supply device are in accordance with the switching state of the intermediate transfer unit and the main transfer state s. In the case of transporting the plate-like body in the main conveyance direction and the sub-transport direction, the propulsion force can be appropriately applied to the plate-shaped body, and the plate-shaped body can be prevented from being damaged. . * In the actual money sample towel of the plate-shaped-feeding device of the present invention, the air supply is changed and the gi is set to 'the intermediate transfer state is switched from the main transfer state (4), and the cap portion is started. The main conveyance auxiliary air supply tool is switched to the paper feeding operation, and the sub-transporting auxiliary air supply tool is switched to the supply state before the transfer of the plate-shaped body to the sub-transporting direction. . In addition, the main transporting state is changed from t77 to the sub-transporting state, and the main transporting subsidy is sent to the wind transporting month before the intermediate transporting state starts to transport the sheet-shaped body in the forward transporting direction. Since the starting tool supports the plate-shaped body in a non-contact manner, the bending of the plate-like body can be suppressed, and the plate-shaped body can be prevented from being switched to the supply stop state, and the sub-transporting auxiliary air supply tool can be switched to the supply state. In the event that the sub-transport direction is damaged during transport, it may be damaged. In the embodiment of the plate-shaped body moving device of the present invention, it is desirable that the first 10 201221455

The main conveyance propulsion power application tool is disposed such that a plurality of contact plate-like bodies are disposed along the lower surface of the main conveyance, and a push-side rotary body is provided to the plate-shaped body, and the sub-transport propulsion force is disposed along the above-mentioned A plurality of the above-mentioned revolving bodies are arranged side by side in the feeding direction, and the air supply unit in the main conveyance/removing tool is in the plan view, and the sub-transporting propulsion force is given to the k-belt along the front (four) A in the plan view. In the inter-floor arrangement, the air supply unit is disposed in the plane view, and is disposed from the second gap across the main body of the propellant material X along the body to the phase. In the first gap, the air gap inspection unit in the main conveyance assist air supply tool is provided in the first gap from the first gap to the side of the sub-transport direction. It is possible to widely suppress the main transport direction in the main transport direction when transporting in the main transport direction when transporting the lion air supply tool in a wide range from the board (4) that is transported in the main transport direction Bending of the plate body. Further, by providing the air supply portion between the rotary bodies, since the plate-like body can be supported in a wide range as described above, the air supply portion can be provided in the vicinity of the plate-shaped body that is in contact with the branch body of the rotary body. The air supply portion ejects a relatively small amount of clean air to support the plate-like body. In addition, the air supply unit that is squeezing the sub-transporting air supply tool towel between the second and the second slewing bodies can suppress the plate-shaped body in the sub-transport direction in the sub-transport direction. Further, it is possible to eject a small amount of clean air from the air supply portion to support the plate-like body. In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable that the air supply unit of the main conveyance-assisted air blowing tool traverses, and the upstream side air supply type supporting tool and the middle portion are included in the first gap. The gap between the air-type supporting tools is provided at a full width of the main conveying direction, and the air supply unit of the sub-transporting auxiliary air blowing tool is traversed, and includes the second gap, and the intermediate transfer air type The support tool and the downstream side air supply type support tool are provided in the gap between the sub-transport directions. In other words, between the upstream side air supply type support tool and the intermediate air supply type support tool, a large gap is formed in the main conveyance direction in order to provide the first gap for the purpose of providing the sub conveyance propulsion force, but Since the air supply portion is provided at the full width of the gap, when the plate-shaped body is conveyed in the main conveyance direction, the bending of the plate-like body can be suppressed over the entire range between the upstream side air supply type support tool and the intermediate air supply type support tool. Further, since the air supply portion is provided at the full width of the gap between the intermediate air supply supporting tool and the downstream side air supply supporting tool, when the plate-shaped body is conveyed in the sub-transporting direction, the air-feeding supporting tool and the downstream are provided in the intermediate conveying direction. The entire range between the side air supply support tools can suppress the bending of the plate body. In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable that the air supply unit in the main conveyance-assisted air-sending device is the air on the end side in the sub-transporting direction of the intermediate transfer conveying unit. In a state in which the distance between the air supply portions in the center portion of the sub-transporting direction is large, the plurality of sub-transporting air supply tools are arranged side by side in the sub-transporting direction. In the air supply unit, the air supply unit is the center of the main transport direction of the intermediate transfer unit in the intermediate transfer direction of the intermediate transfer direction in the intermediate transfer unit. In a state where the interval between the air supply portions is large, a plurality of the air supply portions are arranged side by side in the main transport direction. In other words, the plate-shaped body conveyed in the main conveyance direction is supported by the pair of main conveyance thrusts at both ends in the sub-transporting direction, so that the center of the sub-transporting direction is formed substantially downward. In the state of being bent, when the main conveyance-assisted air supply tool is non-contact-supported and bent into such a plate-like body, the air supply portion is provided at a narrow interval in the central portion where the bending is large to supply a large amount of clean air, and the bending is gradually increased. The smaller end side provides the air supply unit at a wide interval to supply a small amount of clean air, so that the plate body can be supplied with an appropriate amount of clean air according to its posture, and the main conveyance auxiliary air supply tool can be appropriately supported along the main conveyance direction. The center of the sub-transport direction of the plate-shaped body to be conveyed. In addition, the center portion of the main conveying direction of the plate-like body conveyed in the sub-transporting direction can be appropriately supported by the sub-transporting auxiliary air blowing tool. In the embodiment of the plate-shaped body conveying device of the present invention, the air supply portion is preferably constituted by a nozzle having a slit-shaped discharge port. That is, the clean air is ejected from the slit-shaped discharge port, so that the clean air is ejected from the discharge port to supply the clean air to the lower surface of the plate-like body, and at the same time, the clean air flow from the discharge port can be utilized. The surrounding clean air is attracted and the surrounding clean air is also supplied to the underside of the plate. Therefore, a small amount of clean air is sprayed to supply a large amount of clean air to the underside of the plate-shaped body, so that the amount of clean air supplied to the lower portion of the plate-shaped body can be ensured to achieve miniaturization of the air supply portion. . In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable to provide a contact body that is freely movable between the restriction position and the release restriction position, wherein the restriction position is in the main conveyance state and is subjected to the pair of main conveyance advancement. In the sub-transport state, the plate-like body that is placed on the support by the pair of sub-transporting propulsion-forced tools is placed on the downstream side in the main transport direction. The side surface of the unrestricted contact restriction position is a lower surface of the plate-shaped body that is supported by the pair of main conveyance driving force application tools in the main conveyance state, and is located in the sub-transportation direction. The pair of sub-transporting propulsive forces are applied to the lower side of the lower surface of the plate-shaped body of the tool-mounted building, and further to the downstream side of the main conveying direction than the restricting position. In other words, when the abutting body is first moved to the restricted position, the plate-shaped body that is transported to the downstream side in the main conveying direction can be blocked, because the pair of sub-transporting propulsion forces give the tool position to the plate-like body thus blocked. When the transfer conveyance unit is switched from the main conveyance state to the sub conveyance state, the pair of sub conveyance thrusts can be given to the lower ends of the both ends of the main conveyance direction of the tool support plate-shaped body. The conveyance direction of the plate-shaped body can be appropriately switched from the main conveyance direction to the sub-transport direction. When the contact body is first moved to the release position, the plate body is conveyed in the sub-transport direction by the sub-transport force, and the contact body does not abut the plate-shaped body. When the plate-shaped body is conveyed, it is possible to avoid damage of the plate-shaped body due to the contact of the abutting body against the plate-like body. 201221455 In addition, when the restraining position is released, since the abutting position is lower than the plate-shaped body, when the plate-shaped body is conveyed in the sub-transporting direction, the plate-shaped body does not abut even if the plate-shaped body is displaced from the main conveying direction. Receive a contact body. In other words, since it is not necessary to consider that the plate-like body is displaced from the main conveying direction, the abutting body is largely moved in the downstream direction of the main conveying direction, so that the abutting body can be placed in the small space in the main conveying direction. Further, when the contact body is linearly moved from the restriction position to the release restriction position, the contact body moves obliquely downward in the downstream side in the main conveyance direction. When the contact body is moved obliquely downward on the downstream side in the main conveyance direction and moved from the restriction position to the release restriction position, friction between the contact body and the plate-shaped body blocked by the contact body does not occur, and it is possible to prevent The damage of the plate body caused by the friction is not prior. Further, the present invention includes a method corresponding to the above configuration, and an action and an effect corresponding to the above configuration can be expected in the method. In other words, the method according to the present invention is a method of using a plate-shaped stomach material of a plate-shaped body conveying device provided with an upstream side conveying β downstream side conveying unit and a relay conveying unit, and a sheet-shaped cage feeding device. The material part is provided with a clean air supplied to the lower surface of the plate-shaped body of the moment shape, and the plate-shaped body is read by the air supply type branching tool in the horizontal posture under non-contact =, and the contact is the branch of the sending and supporting device. The lower surface of the plate-shaped body is given to the plate-shaped body by the propulsive force of the propulsive force in the direction described, and the downstream-side conveying unit conveys the plate-shaped body in the sub-transporting direction orthogonal to the crucible conveyance direction, in which == == The conveyance side of the plate-shaped body received from the upstream-side conveyance unit is described in the main conveyance direction, and the sub-transport direction is cut and transferred to the above-mentioned 15 201221455 r. In the upstream, you will be able to transfer the transfer of the plate-shaped body in the direction of the front transfer === 'the plate-shaped body is given the transfer in the above-mentioned main article. And, from the front end of the front end in the main transport direction *,. The contact plate is provided on the lower surface of the propulsion unit in the sub-transporting direction, and the air-feeding support tool 吱+曰丨 conveys the propulsive force between the tools and the tool. ^方=说—For the main transport propulsion force, the tool is given to each of the tools __ to the main transport push η~ state, the upstream side air supply type support tool of the set side < a, the upstream side transport part In the above-mentioned main transport direction, the propulsion force is conveyed in the direction of the main transport, and the green transport of each of the tools is applied to the sub-transport propulsion μ, Ί 'the front side air supply type support tool, and the upstream side. In the above-mentioned sub-transporting direction, the propelling force is given to each of the tools in the sub-transporting direction, and the distance between the tools and the propelling force is set to 2, and the transfer force is given to the main transfer propulsion force. In the state of each of the tools, the two-way-to-sub-transfer push-and-transfer wind-type support tool is set; the front-to-back transfer transfer section of the transfer transfer unit is transferred to the main transfer propulsion power and the former fans ^ Set, use, make, and Yi moving up and down the side of the self word ':: propulsion auxiliary transfer conveyance main propulsion administration tool into contact plate ::::' so that the conveyance direction is switched to the main transport,:. In the lower part of the sub-transporting propulsion, the sub-transporting force is given to the sub-transporting state, and the sub-transporting force is switched to the sub-transporting state of the sub-transporting direction. At least one of a pair of gaps between the pair of sub-transporting force applying means and the intermediate-transporting wind supporting tool disposed in the intermediate transfer portion of the air supply portion that supplies clean air to the lower surface of the plate-shaped body is at least The main conveyance assist air supply tool of the first gap on the upstream side in the main conveyance direction is provided with the pair of main conveyance propulsion power supply tools and the intermediate transfer air supply support tool that arrange the air supply unit in the intermediate transfer conveyance unit. a sub-transporting auxiliary air blowing tool at least in the second gap between the pair of gaps on the downstream side in the sub-transporting direction; the main conveying auxiliary air blowing tool and the sub-transporting auxiliary air blowing tool are each arranged to be freely switchable Supporting the plate-shaped body positioned above the air supply unit in a non-contact state, supplying the supply state of the clean air, and stopping the supply of the air from the air supply The supply of the clean air to the supply stop state; the plate-shaped body transfer method includes switching the main transfer assist air supply tool to the supply state when the intermediate transfer conveyance unit is switched from the sub-transport state to the main transfer state, and When the intermediate transfer auxiliary air supply unit is switched from the main transport state to the sub transport state, the main transport assist air supply unit switches the main transport assist air supply tool to the supply stop state and the sub transport allowance The air blowing tool is switched to the air supply state switching step of the supply state described above. In the embodiment of the present invention, it is preferable that, in the air blowing state switching step, when the intermediate transfer unit is switched from the main transport state to the sub transport state, the intermediate transport unit starts to move the plate-shaped body toward the intermediate transport unit. Before the transfer in the sub-transport direction, the main transport-assisted air-supply tool is switched to the "reported and stopped state" of "20122012/05455", and the sub-transport assisted air supply tool is switched to the supply state. According to an embodiment of the present invention, there is provided an abutting body that is freely movable at a restricted position and a release limit, wherein the restricted position is in the main transport state and the reading is given to the main transporting propelling force. #板体同131度' and in the aforementioned sub-transport state, abutting on the side of the downstream side of the main moving direction of the front side of the main moving direction In the above-described main conveyance state, the restriction position is the lower side of the plate-shaped body in which the pair of main conveyance driving force is applied to the tool placement support, and in the sub-transport state, the position is higher than the above-mentioned In the lower side of the lower surface of the plate-shaped body having the mounting branch, the center of the downstream side of the main conveying direction is included in the center of the transfer direction, and the transfer is carried out from the main transfer state. In the 彳 conveyance state, before the towel transfer conveyance unit starts to convey the plate-like state in the conveyance direction, the contact body is switched from the restriction position to the release-restriction position. Description, Fig. 2 is a plan view of a sheet conveying apparatus according to an embodiment of the present invention. Fig. 3 is a plan view showing an embodiment of the present invention. [4th aspect] A side view of the main wire transfer unit of the present invention. Fig. 5 is a side view of the intermediate transfer conveyance state of the embodiment of the present invention. Fig. 6 is a side view of the auxiliary air blowing tool according to the embodiment of the present invention. Fig. 7 is a perspective view of the main lifting type propelling portion of the embodiment of the present invention. Fig. 8 is a schematic view showing an air supply unit arranged side by side according to an embodiment of the present invention. [Fig. 9] (a) to (b) a schematic view of an abutment body according to an embodiment of the present invention. Fig. 11 is a view showing the transfer operation of the plate-shaped body transfer device according to the embodiment of the present invention. Fig. 12 is a view showing the operation of the plate-shaped body transfer device according to the embodiment of the present invention. The control block diagram of the aspect. [Fig. 13] The embodiment of the present invention transfers [Embodiment] The present invention will be described below with reference to the drawings. The plate-shaped body conveying device of the present invention will be described with reference to the drawings. The clean air is supplied to the lower surface of the liquid crystal glass substrate 矩形 of the rectangular plate-shaped body, and the non-contact state «« 幻 之 送 读 读 读 和 和 和 和 , , , , , 并对 并对 并对 并对 并对 并对 并对 并对 并对 并对 并对 并对 并对 并对The propelling force of the propulsive force in the direction is given to the tool 3. Further, the plate-shaped conveying device conveys the upstream side conveying portion A of the glass substrate 19 201221455 in the main conveying direction 和, and forms a straight line along the main conveying direction χ In the sub-transporting direction Y, the downstream side transporting unit C of the glass substrate is transported, and the transport direction of the glass substrate 1 received from the upstream transport unit A is switched from the main transport direction X to the sub-transport direction Y and is transferred to the downstream transport. The part c intermediate transfer conveying unit B is configured such that the conveying members A to c are provided with the air blowing type supporting tool 2 and the propulsion power feeding tool 3, respectively, and are arranged in a unit shape. Further, the transport units A to c are arranged to transport the glass substrate 1 at the same height. The intermediate transfer unit B is disposed in parallel with the downstream side of the main transport direction X of the upstream transport unit A, and is disposed to support the glass substrate 1 in a non-contact state by the air supply type support tool 2, and is in contact with the tool 3 by the propulsive force. In the state in which the glass substrate 1 is supported by the state, the propelling force is applied to the glass substrate 1 by the propelling force imparting tool 3, and the glass substrate 1 is transported from the upstream side transport unit A to the intermediate transport unit b. The propelling force is applied to the glass substrate 1 by the propelling force to the upstream side of the main transport direction ,, and the glass substrate 1 is transported from the intermediate transport unit B to the upstream transport unit A, and the intermediate transport unit B The downstream side conveying portion C is disposed side by side on the downstream side of the sub-transporting direction γ, and is disposed so as to support the glass substrate 1 in a non-contact state by the air blowing type supporting tool 2, and to give the tool 3 in a contact state with the propulsion force to support the glass substrate 1 In the state in which the driving force is applied to the glass substrate 1 by the propelling force imparting tool 3, the glass substrate 1 is transported from the intermediate transfer unit B. The downstream side conveyance unit c applies the propulsion force to the upstream side of the sub-transport direction γ to the glass substrate 1 by the propulsion power supply tool 3, and transports the glass substrate 1 from the downstream side conveyance unit c to the transfer unit 20 201221455 . In this manner, the plate-like-body conveying device is disposed so that the glass substrate 1 is transported from the upstream-side conveying unit A to the downstream-side conveying unit C in the forward direction by the intermediate conveying unit A, and the glass substrate 1 is further downstream. The side transport unit C is transported to the upstream transport unit A via the relay transport unit B in the opposite direction. [propulsion power supply tool] The propulsion power supply tool 3 is provided so as to be disposed from the upstream side transfer unit A to the intermediate transfer unit B, and is in contact with the glass substrate 1 at the lower end portions of the sub-transport direction Y, and The glass substrate 1 is supplied with one of the propulsive forces in the main conveyance direction X, and the main conveyance force is given to the tool 5, and the intermediate transfer portion B is disposed so as to be in contact with the glass substrate 1 in the main conveyance direction. On the lower surface of both end portions of the X, the glass substrate 1 is given one of the propulsive forces in the sub-transporting direction γ to the sub-transporting propulsive force giving means 6. As shown in FIG. 2, FIG. 4, and FIG. 5, each of the pair of main conveyance driving force application tools 5 is disposed so that a plurality of the lower side of the contact glass substrate 1 are arranged side by side in the main conveyance direction X. The slewing roller 7 of the slewing body at the end of the γ direction is provided with an electric motor 8 for slewing the slewing roller 7 individually for each of the plurality of slewing rollers 7. Then, the electric motor 8 is used to individually drive the plurality of rotary rollers 7 to rotate, and the glass substrate 1 contacting the rotary roller 7 is given a propulsive force in the main conveyance direction X. As shown in Figs. 4 and 5, a plurality of rotary rollers 7 and an electric motor 8 for driving it are supported by a series of support frames 9, and a plurality of rotary rollers 7 are supported at a position relative to the support frame 9. In the inner side of the air supply type support tool 2 in the conveyance direction γ, a plurality of electric motors 8 are supported on the outer side of the sub-transport direction γ in the support frame 9 at 21 201221455. And shown in Figure 7, equipped with the main propulsion

Each of the revolving rollers 7 of J is disposed to have a small-diameter portion 7a on the lower surface of which the supporting glass substrate 1 is mounted, and is located outside the small-diameter portion 7a to the outside of the transport direction Y. On the side, the large-diameter portion 7b in which the breaker substrate 1 moves in the sub-transport direction γ is restricted by abutting against the side surface of the glass substrate 1. In addition, as shown in Fig. 1, the portion of the main conveyance propulsion power supply tool $ that is provided in the upstream side conveyance unit A (hereinafter referred to as the f-force application portion is provided in the positional fixation state in the upstream tank with respect to the main conveyance The portion of the propulsion force application tool 5 that is provided in the intermediate transfer unit B (hereinafter referred to as the main lift type propulsive force giving unit (4) is provided in the intermediate transfer unit B so as to be freely movable. 〇The tools 6 are arranged in the 彳 彳 彳 彳 设置 设置 设置 设置 设置 设置 设置 设置 设置 设置 设置 & & & & & & & & & & & & & & & & & & & & & & & & & & & & & 工具 工具 工具 工具 工具 工具 工具 工具 工具The force is given to the guard 5 in addition to the direction of the setting. The configuration is the same. That is, the sub-delivery force is given to the tool; the sub-transport direction Y is set to this point and the main transport propulsion is given to the tool _ but with the main transport In the case where the propulsion force is provided, the roller 7 and the electric motor 8 are provided in the same manner, and the sub-transporting propulsive force is supplied to the intermediate transfer unit B (hereinafter referred to as the sub-lift type). Good department (four), free to move up and down The position is set in the downstream transfer unit C (hereinafter referred to as 1 (four) fixed propulsion to cut 6b), and the position is the position.固 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 Support workers and 11 σ σ 如 如 迗 卩Λ 卩Λ 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游 上游曰, each state m is given to each of the tools 6 and the downstream side of the main part C is provided with a wind-splitting tool 13 2 (four) force between the guards 5 'to move along the sub-transporter to the pair of main propulsion The state of each of the garments 5 is given, and between the two pairs of the auxiliary conveyance force application means 6, the state of each of the tools 6 is conveyed in the direction of the main conveyance direction. Transfer the wind-type support tool 12 to the transport unit. As shown in Fig. 3, the structure of the transfer-type wind-up branch tool U A dust removing filter 14 for removing dust and a blowing fan 15 disposed below the dust removing filter 14 as a blowing air cleaning tool for supplying the clean air to the lower surface of the glass substrate 1 through the dust removing filter 14 is provided. As shown in FIG. 1 , the configuration of the intermediate-transporting wind-type floor building tool 12 is such that a plurality of air-sending fans 15 that rotate around the vertical axis are arranged side by side in the main conveying direction X and the sub-transporting direction 覆盖, and the blowing fan 15 is covered. The upper plate-shaped dust filter 14 is integrally assembled to form the fan filter unit 16. Further, the intermediate air supply support tool 12 is configured to attract the intermediate air supply support tool by the air blowing action of the air supply fan 15. The air below 12' will pass the air passing through the dust filter 14 as a clean air jet to the middle.

S 23 201221455 Wind-type support: The top of the 11-piece 12; the lower side of the glass substrate 搬 conveyed by the transfer conveyance part B like this: = «Wei material ^, in Qian Ming two = flat posture" _# contains only The posture of the glass filament in the direction of the parallel horizontal direction (complete horizontal posture) also includes a posture (a substantially horizontal posture) in which the glass base is inclined by a predetermined angle (for example, an angle of 5 degrees or less or an angle of 10 degrees or less) in the horizontal direction. Further, the state in which the glass plate 1 is tilted in the horizontal direction is supported by, for example, manufacturing errors, or is intentionally realized by design. Incidentally, the intermediate air supply type control tool 12 is disposed in the positional fixed state, and is disposed in the intermediate transfer unit B such that the upper surface on which the clean air is ejected is located at a specific thrust force. In the tool 3, the height of the branch of the glass substrate of the branch building is further down. The upstream side air supply type support tool 11 and the downstream side air supply type support tool 13 have the same configuration as the relay air supply type floor tool 12, and are provided with a dust filter 14 and a blower fan 15, except for the size of the fan filter unit 16. The difference is the same except for this point. Further, the upstream side air supply supporting tool 11 and the downstream side air supply supporting tool 13 and the intermediate air supply supporting tool 12 are disposed at the same height. [Intermediate Transfer Unit] Next, the transfer transfer unit B will be described. As shown in FIG. 4 and FIG. 5, the intermediate transfer unit b is disposed so that the pair of main conveyance driving force applying means 5 and the pair of auxiliary conveyance force applying means 6 are relatively moved up and down, thereby being freely switchable. The pair of main conveyance advances 24 201221455 The force application tool 5 is in contact with the lower surface of the glass substrate 1 to switch the conveyance direction of the glass substrate 1 to the main conveyance state in the main conveyance direction X (see FIG. 4) and to perform a pair of sub-transports. The driving force application tool 6 is in contact with the lower surface of the glass substrate 以 to switch the conveying direction of the glass substrate 1 to the sub-transporting state of the sub-transporting direction γ (see FIG. 5). In addition, the pair of main lift type propulsion power application parts 5a are arranged so that the support frame 9 which supports this is raised and moved by the main conveyance lifting operation tool 17 (refer FIG. 6), and the pair of main The fixed thrust force applying portion 5b or the pair of sub-fixed thrust force applying portions 上升 are raised at the same height (see FIG. 4) and are lowered and lowered (see FIG. 5) at a lower position than the raised position (see FIG. 5). mobile. In addition, the pair of sub-lifting type propelling force applying portions are also arranged such that the support frame 9 for supporting the lifting and lowering operation tool 18 is lifted and lowered by the pair of main fixed type propulsion unit or A pair of sub-fixing = the rising position of the same height of the propulsion-force giving portion 6b (see Fig. 5) and the lowering position (see Fig. 4) of the upper juice position and the lowering position (see Fig. 4) are freely moved up and down. In the example, the main transport lifting operation tool 17 and the sub-transport lifting operation X tool 18' are each made of gas red. Then, as shown in Fig. 4, the main lift type propulsion force is raised to the rising position when the portion is raised, and the auxiliary correcting force feed pin is lowered to the lowering position. The main 'transporting portion B is switched to the main transfer state. . When the main lift-up force application unit 5a comes into contact with the lower surface of the substrate i, the sub-lifting force application unit 6a is separated downward from the lower surface of the glass substrate 25 201221455 1 in the state of being switched to the transport state. In addition, as shown in Fig. 5, the main lift type propulsion unit 5a is lowered to the lowered position, and the sub-lift type propulsion unit 6a is raised to the up position. The intermediate transfer unit B is switched to the sub-transport state. . When the main lift-type propulsive force applying unit 5a is detached from the lower surface of the susceptor 1 in the state of being cut and moved to the μ-transfer state, the sub-elevation propulsion timing portion 6a contacts the lower surface of the glass substrate 1. . [Assisted air supply tool] As shown in Fig. 2, the intermediate transfer unit B is provided to be supported in a non-contact state in addition to the air supply type branch tool 2 (t air supply type support tool 12); The support of the air supply jade 19 and the sub-delivery of the lion to send the wind. The main transfer auxiliary air supply tool 19 and the sub-transportation auxiliary air supply unit are each provided with a clean air supply to the lower surface of the glass substrate 1 . The line supply unit (10) is supplied with a filter (not shown) and an on-off valve (not shown) on the way to clean the air white 1. All are equipped with 2 to send a subsidy to send the 19 and the job to pay the money to the wind king of 20 orders will be in! It can be switched to the state of the switch by the switching operation of the on-off valve.::: The glass substrate 1 above the part 21 is given to the clean state and stops from a _ narrow: two: part 21 Lifting, the spout is made up of a so-called air knife. Incidentally - μ is set as gas supply 21 (4), air supply is sprayed out σ2_ directly above the clean air. Further, as shown in Fig. 201221455, the air supply unit 21 is provided in the intermediate transfer unit B in a positionally fixed state, and the height of the discharge port 21a is located further downward than the upper surface of the blower support tool 2. . The main conveyance-assisted air-supply tool 19 is configured such that the air supply unit 21 is disposed in the intermediate transfer unit B and is formed in the pair of sub-transport propulsion power application tools 6 (the sub-lifting force application unit 6a) and the intermediate feed air. Among the pair of gaps between the support tools 12, the first gap gl on the upstream side in the main conveyance direction X and at least the first gap gl in the third gap g3 on the downstream side in the main conveyance direction X. In the present embodiment, as shown in Fig. 2, the main conveyance assist air blower 19 is configured such that the air supply unit 21 is disposed in both the first gap gl and the third gap g3. In the present embodiment, the air supply unit 21 provided in the first gap gl of the main conveyance air supply tool 19 is arranged in parallel along the sub-transport direction Y (in other words, in the present example, six in this example). Each of the plurality of air supply units 21 is traversed from the first gap gl in the plan view in the main conveyance direction X, and is traversed in the sub-transporting force application tool 6 located on the upstream side in the main conveyance direction X. It is provided between the adjacent rotating rollers 7 in the sub-transport direction Y. In the same manner, the air supply unit 21 provided in the third gap g3 of the main conveyance air supply tool 19 is provided in parallel in the sub-transport direction Y, and the plurality of air supply units 21 are each in the main conveyance direction by the discharge port 21a. The posture of the X is provided between the slewing rollers 7 adjacent to the downstream side in the sub-transporting direction Y from the third gap g3 in the plan view. Incidentally, as shown in Fig. 6, the support body 27 201221455 24 supporting the air supply portion 21 is located at the second time _ (or the second gap g2), and the gas supply is supported by the support 24 in a cantilever manner, and And the slewing roller 7, χ is set in the state in which the service direction γ is arranged in a row. In addition, as shown in Fig. 1, the air supply unit 21 provided in the main conveyance assist air blower 19 and the air supply unit 2 provided in the third gap (2) are arranged side by side in the present embodiment. Between the two air supply units 21 located at the most central side in the sub-transport direction 有, there are two revolving rollers 7 between the air supply unit 2 and the air supply near the outer side of the sub-transport direction γ. There are three rotary materials 7, and there are four rotary rollers 7 between the air supply portion 21 and the air supply portion 21 located on the outermost side in the sub-transport direction. In other words, as shown in Fig. 8, the air supply unit 21 attached to the main transport auxiliary air supply unit is a transfer ratio of the air supply unit in the central portion of the intermediate transfer direction γ of the intermediate transfer transport unit. In the state in which the distance between the air supply portions 21 on the end side of the sub-transporting direction Y is wide, a plurality of (in this example, six) are arranged side by side in the sub-transporting direction Y. In this way, the main conveying auxiliary air blowing tool 19 is disposed so as to supply a larger amount of clean air than the end portion side of the sub-transporting direction Y, and form an end portion higher than the sub-transporting direction γ of the glass substrate 丨. The side of the branch is not in contact with the central part of the support. In addition, the air supply unit 21 provided in the main conveyance assist air supply unit 19 is disposed as shown in Fig. 6 'crossing the LF^:gl, and the upstream side air supply type U and the towel are transferred. The gap between the wind cutting tools 12 is set to the full width of the main conveying direction X. Further, in the present specification, the concept of "crossing the full width" as referred to in 28 201221455 refers not only to the width of the air supply portion 21 but also to the gap between the upstream side air supply supporting tool 11 and the intermediate air supply supporting tool 12. In the case where the width (gap width) is uniform, even if the width of the air supply portion 21 is small with respect to the gap width, the width of the air supply portion 21 is equal to or greater than a predetermined ratio (for example, 80% or 90%, etc.) of the gap width. Included. In the present embodiment, as shown in Fig. 6, the width of the air supply portion 21 is about 90% of the gap width between the upstream side air supply type supporting tool 11 and the intermediate air supply type supporting tool 12, and the air supply portion 21 Both the upstream side air supply type support tool 11 and the intermediate air supply type support tool 12 are disposed in an alienated manner. In addition, in the main conveyance direction X, a comparison is made between the upstream side air supply type support tool 11 and the intermediate air supply type support tool 12 in order to provide the sub-elevation type propulsion power application part 6a and form the first gap gl. A large gap is provided, but by providing the air supply portion 21 as described above, the glass substrate 1 can be appropriately supported between the upstream side air supply type supporting tool 11 and the intermediate air supply type support tool 12. The sub-transport-assisted air-supply tool 20 is disposed in a pair between the pair of main conveyance propulsion power supply tools 5 (the main lift-type propulsion force application unit 5a) and the intermediate-transport air-supporting tool 12 in the intermediate transfer unit B. In the gap, the air supply unit 21 is disposed in the second gap g2 on the downstream side in the sub-transport direction Y and at least the second gap g2 in the fourth gap g4 on the upstream side in the sub-transport direction Y. In the second embodiment, as shown in FIG. 2, the sub-transporting air supply tool 20 is disposed in the second gap g2 and the fourth gap g4, and is disposed in the air supply unit 2 Air supply 29 of the second gap g2 In the 201221455 section 21, a plurality of (in other words, six in this example) are arranged side by side in the main conveyance direction X, and each of the plurality of air supply sections 21 is in the sub-transport direction by the discharge port 21a. In the main conveyance force imparting tool 5 located on the downstream side in the sub-transporting direction γ, the posture of the Y is set in the plane from the second gap g2 to the revolving roller 7 adjacent to the main conveyance direction X. . In addition, the air supply unit 21 provided in the fourth gap g4 of the sub-transport-assisted air-supply tool 2 is also arranged in the same manner in the main conveyance direction X, and the plurality of air supply units 21 are respectively arranged in the sub-transport direction by the discharge port 21a. The posture of γ is set between the slewing rollers 7 that are adjacent to each other in the main conveyance direction, and the traverse between the slewing rollers 7 that are adjacent to each other in the main conveyance direction from the fourth gap g4 ′ in the plan view. . In the same manner as the air supply unit 21 of the main conveyance assist air supply unit 19, the air supply unit 21 of the sub-transporting air supply tool 2 supplies air to the end side of the main transport direction B in the intermediate transport unit B. In a state in which the distance between the air supply portions 21 in the central portion of the main transport direction 中 is larger than the distance between the air supply portions 21 in the main transport direction χ, the plurality of portions are arranged side by side in the main transport direction ( (in this example, six) . In addition, the air supply unit 21 is provided in the second gap g2 in the sub-transporting air supply tool 20, and the air-feeding unit (4) is provided in the (10) gap 21-like type in the fourth (including) gap. The gap between the tool 12 and the downstream side air supply type supporter 13 is provided across the entire width of the conveyance direction Y. [Restriction member] As shown in Fig. 2, the glass substrate 1 that is transported in the forward direction of the downstream side of the main conveyance direction X by the main conveyance tool 30 is provided in the intermediate conveyance unit b. The main conveyance restricting member (corresponding to the abutting body) 25 and the 'restricted by the sub-transporting propulsive force giving means 6 toward the sub-transporting direction γ are transported to the downstream end position of the main transport direction X and the downstream side of the main transport direction X. The glass substrate 1 ′ conveyed in the opposite direction to the upstream side is transported to the sub-transport restriction member 26 on the upstream side in the sub-transport direction γ from the upstream end position in the sub-transport direction Y. In the state in which the glass substrate 1 is located at the downstream end position in the main conveyance direction X, the small diameter portion 7a of the rotary roller 7 in the sub-elevation type propulsion power application portion 6a is formed in the main portion of the glass substrate 1. The large-diameter portion 7b of the slewing roller 7 in the sub-lifting-type propulsion-force giving portion 6a is positioned further outward than the both ends of the glass substrate χ in the main conveying direction χ The state of the side. In the state in which the glass substrate 1 is located at the upstream end position in the sub-transporting direction ,, the small-diameter portion 7a of the revolving roller 7 in the main elevating-type propulsion unit 5a is formed in the sub-transport direction of the glass substrate 丨. The large-diameter portion 7b of the slewing roller 7 in the main lift-type urging force imparting portion 5a is located on the outer side of the both ends of the sub-transporting direction Y of the glass substrate}. status. As shown in Fig. 9, the main conveyance regulating member 25 is disposed so that the height of the glass substrate 1 placed and supported by the pair of main conveyance driving force applying means 5 is the same in the main conveyance state, and the sub-transporting state is offset. The glass substrate 1 on which the pair of sub-transporting force is applied to the tool 6 is placed at a position restricting the side surface on the downstream side in the main conveyance direction X (see FIG. 9( a )), and is paired in the main conveyance state. In the lower side of the glass substrate i on which the pair of sub-transporting propulsion power feeding tools 6 are placed, the lower side of the glass substrate i on which the sub-transporting force is applied to the tool 6 is placed on the lower side of the glass substrate 1 in which the main transporting force is applied to the tool 5, and The limit position is freely moved between the release restriction positions on the downstream side of the main conveyance direction X (see FIG. 9(b)), that is, the restriction position of the main conveyance restriction member 25 is in contact with the main conveyance. The position of the glass substrate 丨 at the downstream end position of the direction X is on the side of the downstream side in the main conveyance direction X. Further, the main regulating lifting/lowering tool 28 is used to linearly move the supporting member 27 supporting the main conveying regulating member 25 up and down in the oblique direction so that the main conveying regulating member 25 moves up and down between the restriction position and the release restriction position. In other words, the main conveyance regulating member 25 is disposed so as to move downward from the restriction position to the downstream side in the main conveyance direction ,, to move downward until the restriction position is released, and to the main position from the release restriction position. The upstream side of the transport direction 移动 moves to the upper side, and moves obliquely until the limit position. In addition, the sub-transport restriction member 26 is arranged in the same manner as the main conveyance restriction member 25, and the support member 27 supporting the sub-transport restriction member 26 is linearly moved up and down by the sub-restriction lifting operation tool 29, thereby being restricted and released. Limit free movement between positions. In the sub-transporting state, the position of the sub-transporting control member 26 is the same as that of the glass substrate 1 on which the pair of sub-transporting force application tools 6 are placed, and is in contact with the main transporting state. The position of the side surface on the upstream side in the sub-transporting direction Y is placed on the side of the side of the upstream side in the sub-transporting direction Y, and the release-restriction position of the sub-transportation regulating member 26 is set to be given by the pair of main conveyance driving force 5 in the main conveyance state. In the lower surface of the glass substrate 1 on which the branch is placed and in the sub-transport state, the pair of sub-transports 32 201221455 propulsion, and the lower surface of the glass substrate 1 on which the tool 6 is placed on the tool 6 is further lowered to the lower side than the restricted position. The position on the upstream side of the sub-transport direction γ. In other words, the restriction position of the sub-transport restriction member 26 abuts on the side surface of the glass substrate 位 located at the upstream end position of the sub-transport direction Y on the upstream side in the sub-transport direction γ. [Control device] Α (4) The non-plate-shaped conveying device towel is provided, the air supply type support worker/, 2 and the propulsion power supply tool 3 are controlled, and the main transfer conveying unit B is used to transfer the auxiliary air supply tool. 19. The sub-transporting auxiliary air supply tool 2〇, the main conveyance lifting operation tool 17, the sub-transport lifting operation lifting operation ^28, and the sub-_ turn to the qΜ, the control device H. Further, the operation control of each tool The system is implemented in the software program of the microcomputer equipped with the control unit. The control unit is configured to change the transfer unit to the main moving day. In the state, the sub-transportation air supply eliminator 2G is switched to the supply stop state, and the transfer transport unit B is switched from the main transport state to the sub-transport I, and the main transport assist air supply 19 is switched to the supply stop state. The air-feeding tool 20 is switched to the supply state, and the wind-up state switching tool is controlled. In addition, it is set to detect whether the glass-based magic is present, the sensor 31, and the main transport. Second detection sensor 32, sub-feeling The detection information of the detector 33 and the sub-transportation second detection sensor 34 is set to lie. As shown in Fig. 10, the four detection sensors 31 to Jl 33 201221455 are arranged in a plane view. The main lift type propulsion power giving unit 5a and the pair of sub-lift type propulsive force applying units are enclosed in a space. The main transport second detecting sensor 32 is provided in the main transporting first detecting sensor 31. On the downstream side of the transport direction X, the glass substrate 1 transported to the downstream side in the main transport direction X is set to be detected by the main transport first detecting sensor 31 and then detected by the main transport second detecting sensor 32. In addition, the sub-transport second detecting sensor 34 is disposed on the upstream side of the sub-transporting direction Y than the sub-transport first detecting sensor 33, and is set to be placed on the glass substrate 1 that is transported to the upstream side in the sub-transporting direction Y. After being conveyed by the first detection sensor 33, it is detected by the sub-transport second detection sensor 34. Further, when the glass substrate 1 is in the proper position (the glass substrate 1 is in the downstream end of the main transport direction X) 4 positions when the position is in the state of the upstream terminal position in the sub-transport direction Y) All of the sensors 31 to 34 are in a state in which the glass substrate 1 at the appropriate position is detected. Next, the operation of the intermediate transfer unit b will be described in accordance with the control device 。. First, the glass will be described in accordance with FIG. In the case where the substrate 1 is transported in the forward direction, when the glass substrate 搬 is transported in the forward direction, the downstream end portion of the main transport direction X of the glass substrate i is transported to the second gap before the transfer is performed. When the supporter 12 is switched to the active state, the main lift-type propulsive force giving portion 5a is moved up to the raised position, and the lift-up (four) propulsion-force giving portion is moved down to the lowered position, and the main conveyance subsidy is sent to the winder. In the case of the S 科 风 ^ 2 2 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ status. In the operation of the main conveyance force 5 (the main lift type propulsion unit 5a), the glass substrate is conveyed to the downstream side of the main conveyance direction 〈 at the normal conveyance speed <S1>. At this time, the main conveyance auxiliary air supply tool 19 is switched to the supply state, because the clean air of the main lion is provided when the wind guard is supplied, and the non-contact support upstream side air supply type support guard (10) towel transfer wind type branch building tool Since the glass substrate 丨 is formed on the gap formed between 12, the glass substrate 1 can be appropriately supported. In addition, since the sub-transporting and assisting air supply tool 2 is switched to the supply-stop state, it is difficult for the glass substrate to be lifted from the main conveyance force application tool 5 at both ends of the service direction γ, and the glass substrate can be given by the main conveyance force application tool 5. 1 Properly push the force. When the glass substrate 丨<s2> is detected by the main conveyance first detecting sensor 31, the main lifting force applying unit 5a is conveyed to the downstream side of the main conveying direction X. The operation speed of the main conveyance propelling force imparting tool 5 is decelerated, and the conveyance speed of the main conveyance driving force imparting tool 5 is decelerated to a low speed conveyance speed to convey the glass substrate 幻 <illusion>. After that, when the glass substrate is detected, the main conveyance second detection sensor 32 detects the time from the start of the spurt to the stop (the stalk substrate 检测 is detected by the main detection second detection sensor 32, and is transported to When the time required for the appropriate position is passed, <S4>', the main lifting force is given to the unit (the main conveying force is given to the tool to stop the operation <S5>. At this time, the glass substrate is magnetically transported to the downstream side of the main conveying direction X. The position of the terminal is in the appropriate position as shown in Fig. 35 201221455. In the state where the glass substrate is placed in the proper position, the guest will move the main tool 19_ hiding. In the air supply state switching step of the sub-drilling subsidy, the red-breasted chest is changed to the supply state, and the main lift-type propulsive force giving unit 5&amp; falls and the (four) lift-type f-force applying unit 6a is raised, and the main transport restricting unit is moved. 25 moves to the abutting body position switching step except the restriction position, and switches the towel transfer conveying unit B to the positive direction sub-transporting state (10). Incidentally, the main delivery auxiliary air blowing tool 19 is switched to the supply stop state, and the pair is replaced. move When the auxiliary air supply tool 2 is supplied, the lowering/main lift type propulsive force giving unit 5a is lowered, and the main transport restricting unit U is moved to the release limit position. The order may be set as appropriate, and some or all of them may be performed at the same time. / In this case, the intermediate transfer unit B is switched from the main transfer state to the sub transfer state: the middle transfer unit B starts to break. The glass substrate (the transport W to the sub-transport direction Y is set to switch the main transport auxiliary air supply 419 to the supply stop state, and the miscellaneous lion is sent to the pickup __ supply form from /.' B is switched from the main transfer state to the sub-transport state, and is transferred in the intermediate transfer. Before the transfer of the glass substrate to the sub-transport direction Y is started in the PB, the wire feed limit (four) 25 is released to the release position. When the sub-transporting propulsion power is applied to the tool 6 to start the operation, the glass substrate 1 <S7> is transported to the downstream side of the sub-transport direction ¥ at a normal speed. At this time, since the main transport assist air supply tool 19 has been switched to the supply stop 36 201221455 In the state of the glass substrate 1, it is difficult for the glass substrate 1 to be lifted from the sub-transporting force application tool 6 at the both ends of the main conveyance direction x. Therefore, the sub-transporting force can be applied to the visor 6 to give an appropriate propulsive force to the glass substrate 1. The air supply unit 20 is switched to the supply state, and the clean air blown from the sub-delivery auxiliary air supply tool 2 is used to transfer between the non-contact support intermediate air supply support _12 and the downstream side air supply support tool 13. The glass substrate 1 can be appropriately supported by the glass substrate 1 in the gap formed. After the operation of the sub-transporting force application tool 6 is started, the switching time is set (the glass substrate 1 is transported from the intermediate transfer unit B to the downstream side). When the time required for the conveyance unit c is changed to <S8>, the intermediate transfer unit B is switched to the forward main conveyance state <S9>. Next, a case where the glass substrate 1 is conveyed in the reverse direction will be described. Incidentally, when the glass substrate 1 is transported in the reverse direction, before the glass substrate i is transported to the intermediate transfer unit B from the downstream side transport unit B, the intermediate feed air supply supporting tool 12 is first switched to the active state, and the main lift type is used. When the propulsion power supply unit % is lowered and moved to the lowering position, the sub-lifting-type propulsion power giving unit is moved up to the rising position, the main conveyance-assisted air blowing tool 19 is switched to the supply stop state, and the sub-transporting auxiliary air supply tool 20 is switched to the supply state, and The main conveyance restriction member 25 is moved to the release restriction position, and the sub conveyance restriction member 26 is moved to the restriction position, whereby the intermediate transfer conveyance unit B is switched to the reverse conveyance state. Then, the sub-transporting propulsion power is given to the tool 6, and the glass substrate i is transported to the upstream side of the sub-transporting direction Y at the normal transport speed, and the sub-transport first detecting sensor 33 detects the glass substrate 1, and the sub-transfer The transport speed of the transporting force imparting tool 6 is decelerated to the low speed transport speed to transport the glass 37 201221455 glass substrate 1 and the sub transport second detecting sensor 34 detects the glass substrate ,, then the test is started. After the set time is stopped, the operation of the sub-transport propulsion force giving tool 6 is stopped. At this time, the glass substrate 1 is transported to the appropriate position at the upstream end position of the sub-transport direction Y. In the state in which the glass substrate 1 is placed at the appropriate position as described above, the main conveyance-assisted air blowing tool 19 is switched to the supply state, and the sub-transporting auxiliary air blowing tool 2 is switched to the supply-stop state, and the air-state switching step is performed. When the main lift type propulsion unit 5a is raised and the sub-lifting force application unit 6a is lowered, the sub-transport restriction member 26 is moved to the release restriction position ', and the intermediate transfer unit B is switched to the reverse main conveyance state. After that, the main conveyance driving force is given to the tool 5, and the glass substrate 1 is conveyed to the upstream side in the main conveyance direction X at a normal conveyance speed. After the main conveyance driving force is applied to the tool 5, the switching setting time (the time required for the entire glass substrate 1 to be transported to the upstream side conveying unit A) is switched to the reverse side conveying unit. status. In other words, the air supply unit 21 of the main conveyance assist air blower 19 is provided in the first gap gl, and the air supply unit 21' of the sub-transport air blower 20 is provided in the second gap g2, and the sub transport state is in accordance with the intermediate transport unit b. Switching between the main conveyance air supply tool 19 and the auxiliary conveyance air supply tool 20 is switched between the supply state and the supply stop state, and can be switched between the main conveyance direction X and the sub conveyance direction γ. Precisely transporting the glass substrate 1' prevents damage to the glass substrate. [Other Embodiments] (1) In the above-described embodiment, the intermediate transfer unit B is switched from the main transport 38 201221455 state to the sub-transport state, and before the middle transfer direction is started, In the delivery unit B, the glass substrate 1 has been replaced by the main conveyance subsidy and the wind is supplied to the stop state, and the __ aid is exchanged with the chest; the state is provided, but the transfer unit can also be used.

At the same time as the start of the conveyance of the downstream side of the direction γ, the nuclear main transport U air supply tool (4) is switched to the supply stop state, and the sub transport assist air supply bean 20 is switched to the supply state. (7) In the above-described embodiment, the main conveyance propelling force imparting tool 5 is disposed in a roller type in which a plurality of contact glass substrates are arranged side by side in the main conveyance direction X, and the rotary roller 7 that gives the propulsion force to the glass substrate 1 is arranged. In the configuration, the main conveyance propelling force imparting tool 5 may be disposed such that the lower end of the glass plate 1 is disposed in the main conveyance direction X, and the belt type structure of the endless belt that gives the thrust force to «(4). The formula (10) is accompanied by the fact that the main moving force is given to the tool 5 to form a belt-type structure, and the endless belt as a rotating body can be arranged side by side in the main conveying direction '[or, along the field conveying direction χ [no material Belt is also available. Similarly, the 'about _ send propulsion power giving tool 6 can also be configured as the air-rolling supply unit 21 on the belt (3) (4) "sample +, phase will be recorded _ view tool _, in Fushun, the day in the thousand face From the first gap __turn roller 7 ^, and in the upstream side of the air supply type supporting wind transfer support support 12, the upstream side is sent and the air is sent to the upstream side. The U-shaped private U sides form an alienation place, but the 疋 can also send the air supply to the 39 取 Η 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 The party or both. Further, the air supply unit 21 in the main conveyance assist air blowing device 19 may be disposed only in the i-th gap gl in plan view. Similarly, in the T, the air supply unit 21 in the sub-transporting air supply tool 2 is provided in either or both of the contact towel transfer type wind support (4) and the downstream side air supply type branch tool 13, or may be provided as a pair. The air supply unit 21 that transports the auxiliary air blowing tool 2G towel is disposed only in the second gap g2 in plan view. (4) In the above-described embodiment, the air supply unit 2 of the social transport auxiliary air supply tool (4) has a larger interval between the air supply and supply portions 21 on the end side of the sub transport direction γ in the intermediate transfer transport. In the state in which the air supply portions 21 in the center portion of the sub-transporting direction Y are spaced apart from each other in the sub-transporting direction Y, the air supply in the main transport assist air supply tool 19 may be provided. The plurality of portions 21 are arranged in parallel at equal intervals in the sub-transport direction γ. Incidentally, even if a plurality of air supply portions 21 are arranged side by side at equal intervals in the sub-transport direction, the flow rate of the clean air from the air supply portion 21 located at the center side of the sub-transport direction γ may be arranged. The flow rate of the clean air from the air supply portion 21 on the end side is increased so as not to contact the center portion with a supporting force higher than the end side of the sub-transporting direction Y of the glass substrate 1. The same applies to the air supply unit 21 in the sub-transporting air supply tool 2〇. (5) In the above-described embodiment, the air supply unit 2 is configured by a nozzle having a slit-shaped nozzle outlet, but is sprayed with one or a plurality of circular shapes. The air supply unit 21 may be configured, and the air supply unit 21 may be configured as the air supply unit. In the case of the work, in the gap g2, a plurality of air supply portions 2 are arranged side by side in the gap g2. "The first green-shaped sputum σ21 ί 彳 疋 疋 can also be a nozzle having a slit-like discharge port 21a to the discharge port. , /D甽 The direction of the transport direction Y. In the first gap gl' and the discharge port 21 &amp; ^ ι ι σ ^ ^ 姿势 设 迗 迗 迗 设 设 设 设 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 The main conveyance regulating member 设有 is provided in the above-described embodiment, and is disposed so that the _restricted position of the main detaching member 25 is lower than the restricted position and further downstream than the restricted position in the main conveying direction χ The side is moved to the restricted position (10) to the unrestricted position of the restricted position (4) member 25, but may be arranged such that the main conveyance restricting member 25 at the restricted position is corrected in the main conveyance direction. It is also possible to move to the release restriction position. Alternatively, the main conveyance restriction member 25 located at the restriction position may be moved vertically downward to move to the release restriction position. The main conveyance restriction member 25 may not be provided. The auxiliary conveyance restriction member 26 is also The same. (7) The above implementation In the aspect, the upstream side transport unit A is arranged in parallel with the upstream side in the main transport direction X of the intermediate transport unit β, and the downstream side transport unit C is arranged side by side in the sub transport direction Y of the intermediate transport unit ,. The body transporting device is arranged in an L shape, but the second downstream side transporting unit having the same configuration as the upstream side transporting unit A may be arranged side by side on the downstream side of the main transporting direction X of the intermediate transporting unit β, or may be transported in the middle. In the upstream direction 41 of the sub-transporting direction γ of the unit B, the 201221455 side is arranged in parallel with the downstream side conveying unit C. The second upstream side conveying unit ′ is arranged in a T-shape, and the second plate side conveying device may be arranged in parallel. Both the downstream conveying unit and the second upstream conveying unit arrange the plate-shaped conveying device in a cross shape. In the intermediate conveying unit B, the glass substrate can be moved from the upstream without switching the direction of the glass substrate. The side conveyance unit A conveys the (four) two-transporting unit or the 'transporting glass substrate 丨 from the second upstream conveying unit to the downstream conveying unit C via the intermediate conveying unit B via the intermediate conveying unit B. (8) In the above-described embodiment Although configured to ―The main transporting force is given to the tool 5 and the auxiliary transporting force is applied to the auxiliary transporting force 6 to move the intermediate transporting unit B to the main transporting state and the sub-transporting state. The pair of main conveyance driving force application tools 5 and the pair of 4 conveyance driving forces are moved up and down by the hand 6 to switch the intermediate transfer unit B to the main conveyance state and the delivery state. The height of the main conveying state and the sub-transporting state continued to be different from each other, but the height of the intermediate conveying member 12 can be adjusted to match the variation of the supporting height of the plate-like body 1 to enable the intermediate-feeding and cutting tool (12) In the above-described embodiment, the case where the glass substrate for liquid crystal is equivalent to the "rectangular plate-like body" of the present invention is described as an example, but a rectangular plate is used. As the shape, a glass substrate to be used for applications other than liquid crystal and a plate-like body of a material other than glass (for example, a semiconductor) may be used. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view of a plate-shaped body conveying apparatus according to an embodiment of the present invention. Fig. 2 is a plan view showing a transfer unit in the embodiment of the present invention. [Fig. 3] A side view of the transfer unit in the embodiment of the present invention. Fig. 4 is a side view showing the intermediate transfer unit in the main transport state according to the embodiment of the present invention. [Fig. 5] Fig. 5 is a side view of the intermediate transfer unit in the sub-transport state in the embodiment of the present invention. [Fig. 6] (a) to (b) side views of the auxiliary air blowing tool according to the embodiment of the present invention. Fig. 7 is a perspective view showing the main lift type propulsive force applying portion of the embodiment of the present invention. Fig. 8 is a schematic view showing an air supply unit provided side by side in the embodiment of the present invention. [Fig. 9] (8) to (b) Schematic diagram of the abutting body of the embodiment of the present invention. Fig. 10 is a diagram showing the transfer operation of the plate-like conveying apparatus according to the embodiment of the present invention. [Fig. 11] A transfer operation diagram of the plate-shaped object conveying device according to the embodiment of the present invention. [Fig. 12] A control block diagram of an embodiment of the present invention. [Fig. 13] A control flow chart of the transfer unit in the embodiment of the present invention. [Description of main component symbols] 1...Glass substrate (plate-shaped body) 2··. Air supply type support tool 43 201221455 3... Propulsion power supply tool 5. Main conveyance force application tool 5a... Main lift type propulsion The urging portion 5b is a main fixed type of urging force giving unit 6 . . . . . . . . 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副 副Body 7a... Small diameter portion 7b... Large diameter portion 8. Electric motor 11.. Upstream side air supply type support tool 12.. Transit air supply support tool 13.. Downstream side air supply type support Tool 14: Dust filter 15.. Ventilation fan 16.. Fan filter unit 17.. Main transport lifting operation tool 18.. Sub-transport lifting operation tool 19.. Main conveying subsidy air supply tool 20.. Sub-delivery-assisted air supply tool 21. Air supply unit 21a, discharge port 24, support body 25, main transport restriction member (contact body) 26.. Sub-transport restriction member 27 .. support member 28.. main lifting lifting operation tool 29.. sub-restriction lifting operation tool 31.. main conveying first detection sensor 32.. main conveying second detection Detector 33.. sub-transport first detection sensor 34.. sub-transport second detection sensor A. .. upstream transfer unit B. .. transfer transfer unit C. .. downstream transfer unit Gl... first gap g2... second gap g3... third gap g4... fourth gap H... air supply state switching tool X. . . main transport direction Y. .. sub transport direction 44

Claims (1)

201221455 VII. Scope of application for patents: L - a kind of plate-shaped body to transport dreams to clean _, 糸, with a rectangular plate-like body under the bottom of the feeding plate, the non-contact state of the plate-shaped body under the touch of the far-reaching wind type The pushing force of the supporting force of the branching tool is given to the body in the direction of the transport, and the plate transported in the direction of the transport of the upper side of the upper moving body of the upper moving body (four) receiving part of the receiving part of the receiving part When the conveyance direction is transferred to the above-described main conveyance direction and switched to the above-described plate-shaped conveyance device, the intermediate transfer conveyance portion of the front f downstream conveyance portion is provided in advance, and the both ends of the upstream side conveyance portion are laterally== The propulsion force of the contact plate-shaped body in the sub-transporting direction is disposed in the main conveyance side. The main conveyance force is given to the main conveyance force, and the tool is placed in the downstream side conveyance portion. The plate-shaped body is provided on the lower surface of the both ends of the sub-transporting portion, and the tool is given to the plate-shaped body, and the propulsive force is transmitted to the force-providing work. Along the foregoing The state in which the upstream side of each of the delivery portions of the main transporting force application tool is removed is provided in the upstream side, the first support tool, and between the pair of sub transport pushes 45 201221455, and the force is given to the tool. The downstream side air supply type supporting tool provided in the downstream side conveying unit in a state in which the pair of auxiliary conveying force applying means is separated from the main conveying direction, and the pair of main conveying force applying means are Each of the pair of sub-delivery force application tools is separated from each of the pair of sub-delivery force application tools in the main conveyance direction in the main conveyance direction. In the state in which the intermediate transfer conveyance unit is disposed, the intermediate transfer conveyance unit is disposed such that the pair of main conveyance driving force applying means and the pair of sub conveyance driving force imparting means are relatively raised and lowered. Move, freely switch to, and move the pair of main conveyance propelling forces to the lower surface of the plate-shaped body to move the plate-shaped body The direction is switched to the main transport state in the main transport direction, and the pair of sub transport conveyance force is applied to the lower surface of the tool contact plate-like body to switch the conveyance direction of the plate-shaped body to the sub-transport state in the sub-transport direction, and is provided. The main conveyance assist air supply tool is disposed in the air supply unit that supplies the clean air to the lower surface of the plate-shaped body, and the pair of sub-transport propulsion power application tools and the intermediate transfer air support tool are in the intermediate transfer unit The first gap between the pair of gaps at least on the upstream side in the main conveyance direction is provided with a sub-transporting air supply means for disposing the air supply unit, and the pair of main conveyances in the intermediate transfer unit a second gap of at least a downstream side of the pair of gaps in the sub-transport direction between the pair of gaps between the propelling force applying tool and the intermediate transfer air supporting tool, 46 201221455, the main conveying auxiliary air blowing tool and the sub-transporting auxiliary air blowing tool are respectively Arranged to be freely switchable to support a plate-shaped body positioned above the air supply portion in a non-contact state a supply state of the clean air and a supply stop state in which the supply of the clean air from the air supply unit is stopped, and a blowing state switching tool is provided, wherein the intermediate transfer unit is switched from the sub-transport state to the main In the transport state, the main transport assist air supply tool is switched to the supply state, and the sub-transport assist air supply tool is switched to the supply stop state, and the intermediate transfer transport unit is switched from the main transport state to the sub-transport In the state, the main conveyance assist air blowing tool is switched to the supply stop state, and the sub-transport assist air supply tool is switched to the supply state. 2. The plate-shaped conveying device according to the first aspect of the invention, wherein the air-sending state switching device is configured such that the intermediate transfer unit is switched from the main transport state to the sub-transport state and the intermediate transport unit Before the conveyance of the plate-shaped body to the sub-transporting direction is started, the main conveyance-assisted air blowing tool is switched to the supply-stop state, and the sub-transporting auxiliary air blowing tool is switched to the supply state. 3. The plate-shaped conveying device according to the first or second aspect of the invention, wherein the main conveying force application tool is disposed such that a plurality of contact plate-like bodies are arranged side by side in the main conveying direction and In the above-described sub-transporting force application tool, the plurality of the revolving power supply tools are arranged in parallel with each other in the sub-transporting direction, and the air supply unit in the main conveyance assist air supply tool is In the plan view, the first gap is provided between the sub-transporting force imparting means in the sub-transporting direction adjacent to the revolving body, and the air supply unit in the sub-transporting air supply tool is in plan view. The second gap is provided between the rotating bodies adjacent to the main conveying direction of the main conveyance driving force imparting tool. 4. The plate-shaped conveying device according to the first or second aspect of the invention, wherein the air supply unit of the main conveying auxiliary air blowing tool includes the upstream side air supply supporting tool and the first gap; The gap between the intermediate transfer air supporting tools is provided across the entire width of the main conveying direction, and the air supply unit of the sub-transporting air supply tool transfers the air supply support in the middle gap including the second gap The gap between the tool and the downstream side air supply supporting tool is provided across the full width of the sub-transporting direction. 5. The plate-shaped conveying device according to the first or second aspect of the invention, wherein the air supply unit of the main conveyance-assisted air-sending device is in the sub-transporting direction of the intermediate transfer unit In the intermediate portion of the intermediate transfer direction in the intermediate transfer direction, the interval between the air supply portions in the intermediate transfer direction is 48 201221455, and the plurality of air supply portions are arranged side by side in the sub-transport direction. In the air supply unit of the sub-transporting air-supply tool, the air supply unit on the end side in the main transport direction of the intermediate transport unit is spaced apart from each other in the intermediate transport unit. In a state where the interval between the air supply portions in the central portion of the main conveyance direction is large, a plurality of them are arranged side by side in the main conveyance direction. 6. The plate-shaped conveying apparatus according to the first or second aspect of the invention, wherein the air supply unit is constituted by a nozzle having a slit-shaped discharge port. 7. The plate-shaped conveying device according to the first or second aspect of the invention, wherein the abutting body is provided to be freely movable, and in the main conveying state, the pair of main conveying propulsion forces are received The plate-like body to which the tool is placed on the support has the same height, and is in contact with the side surface on the downstream side in the main conveyance direction by the plate-shaped body supported by the pair of sub-transporting force application tools in the sub-transporting state. The lower limit position and the lower surface of the plate-shaped body that is supported by the pair of main conveyance force application tools in the main conveyance state and the plate that is supported by the pair of sub-transport propulsion powers in the sub-transport state. The lower surface of the body is located on the lower side, and is located at a release restriction position on the downstream side of the main conveyance direction from the restriction position. 8. A method of conveying a sheet-like body by using an air supply type supporting tool that supplies clean air to a lower surface of a rectangular plate-like body and supports the plate-like body in a horizontal posture in a non-contact state, and contacts the air supply by the air supply The lower surface of the plate-shaped body supported by the support tool is provided with a propulsive force for the propulsive force in the transport direction 49 201221455, and the upstream side transport portion for transporting the plate-shaped body in the transport direction. The plate shape conveyed in the sub-transport direction in which the downstream side of the main conveyer plate-shaped body is moved, and the dragon feed station receives the sub-transport direction and transfers to the main detail 1 direction to In the above-described portion, the downstream side transfer unit transfers the propulsive force to the lower W/body in the lateral direction of the lower W/body in the horizontal direction of the upper middle conveyance unit. _·,,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1 In the aforementioned sub-transport The lower part of the part is given a propulsive force in the direction of the tool-feeding direction - the sub-transporting propulsive force is given to the support, and the above-mentioned - the main transport is propelled along the aforementioned (four) four pairs of lines to listen to the force In the upstream side of each of the units, the upstream side of the transporting force is given to the worker, and the first side of the transporting unit is provided in the downstream side of the transporting unit. In the state of the front:: the downstream side: 2, the force is given to the tool, and the state of the main transport 1 is separated from the main throwing force by the pair of the main throwing force.副 50 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 The transport unit is configured to move the pair of main transporting force applying means and the pair of sub transporting force applying means to each other so as to be relatively movable up and down, and to switch between the pair of main transporting propulsive forces. The lower surface of the tool-contacting plate-shaped body switches the conveying direction of the plate-shaped body to the main conveying state in the main conveying direction, and the pair of sub-transporting driving force is applied to the lower surface of the tool-contacting plate-shaped body to switch the conveying direction of the plate-shaped body. In the sub-transporting state of the sub-transporting direction, a main conveyance assist air blowing tool is provided, and an air supply unit that supplies clean air to the lower surface of the plate-shaped body is disposed, and the pair of sub-transports are transported in the intermediate transfer unit a first gap that is located at least on the upstream side in the main conveying direction of the pair of gaps between the propulsion force applying tool and the intermediate transfer air supporting tool, and a sub-transporting auxiliary air blowing device that arranges the air supply unit The second gap in the pair of gaps between the pair of main transporting force applying means and the intermediate transfer air supporting tool in the intermediate transfer conveying portion on the downstream side in the sub-transporting direction, the main transporting allowance Each of the air blowing tool and the sub-transporting air supply tool is configured to be freely switchable so that the support position is in the empty state in a non-contact state. The supply state of the clean air is supplied to the plate-shaped body above the gas supply unit, and the plate-shaped body transfer device 51 of the plate-shaped body transfer device that stops the supply of the clean air from the air supply unit is stopped. When the intermediate transporting unit is switched from the sub-transporting state to the main transporting state, the main transporting auxiliary air-supply guard is switched to the |supply state, and the sub-transporting auxiliary air-supplying tool is cut-off (s) into the stopped state' When the conveyance unit switches from the main conveyance state to the sub conveyance state, the main conveyance assistance conveyance tool is switched to the supply stop state, and the sub conveyance correction tool is switched to the supply state of the supply state. 9. The plate-shaped body transport method according to the eighth aspect of the present invention, wherein the transfer mechanism is switched from the main transfer state to the convergent state in the transfer state, and the towel transfer is performed. Before the conveyance unit starts to convey the plate-shaped body to the above-mentioned service direction, the main conveyance auxiliary air supply jade is switched to the supply and stop state, and the sub-transport auxiliary air supply tool is switched to the supply state. 10. The method of conveying a plate-shaped body according to the eighth or ninth aspect of the invention, wherein the contact body is provided to be freely movable, and in the main conveyance state, the pair of main conveyances is just described. The plate-like body to which the force is applied to the tool is placed at the same height, and in the sub-transporting state, the plate-shaped body that is placed on the tool by the pair of sub-transporting force application tools is placed on the downstream side in the main conveyance direction. The position of the side surface is placed in the lower side of the plate-shaped body in which the pair of main conveyance force is applied to the tool and the sub-transporting state is placed by the pair of sub-transporting force application means in the main conveyance state. The lower surface of the supporting plate-shaped body is located on the lower side and is located at a lower limit of the lower side of the main transport direction 52 201221455 on the side of the travel restriction, and includes the transfer of the intermediate transport unit from the main transport state. In the sub-transporting state, the contact body is released from the restriction position to the release before the intermediate transfer unit starts transporting the plate-shaped body in the sub-transporting direction. The positional switching step of the positional movement. 53