TW201144195A - Transport device and transport method - Google Patents

Abstract

The subject of this invention is to provide a transport device capable of varying the attitude of the object to be transported while having high transport capability. The solution of this invention is a transport device that in an attitude adjusting tool (24), the holding action of a holding part (25), the moving action of a moving tool (27), and the rotating action of a rotating tool are subject to the control of a control tool; at a holding position (P3), the holding part (25) is utilized to hold an object to be transported (W) supported in a non-contact manner; then, the moving tool (27) is utilized to move the holding part (25), transporting the object to be transported (W) supported in a non-contact manner from the holding position (P3) to a holding release position (P4) on the downstream side along the transporting direction; and during this period, the rotating tool is utilized to rotate the holding part (25) while the moving part (27) is utilized to move the holding part (25), making the attitude of the held object to be transported (W) rotate a predetermined angle around the vertical axis and release the holding of the object to be transported (W) at the holding release position (P4).

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact state in which a posture is provided in a horizontal posture or a substantially horizontal position by supplying air to a lower surface of a conveyed object. The air supply supporting tool that supports the conveyance material, and the conveyance tool that is in contact with the conveyed object supported by the air supply type support tool and that imparts a propulsive force to the conveyance direction in the conveyance direction, and the conveyance tool of the tool is conveyed by the conveyance tool The posture adjustment tool that rotates the conveyance around the vertical axis to change the conveyance posture of the conveyed object, and the conveyance device that controls the operation of the conveyance tool and the posture adjustment tool, and the conveyance method using the conveyance device.

In the above-mentioned conveyance device, the conveyance device is used to convey the conveyance in the non-contact state, and the propellant is used to convey the conveyance in the conveyance direction of the conveyance in the contact state. In the case of transporting a glass substrate for FPD, such as a liquid crystal monitor, as a transporting object, the center portion in the left-right direction when the transport direction of the glass substrate is in the front-rear direction is supported in a non-contact state by a blower type supporting tool. The propulsive force is applied to the left and right end portions when the conveyance direction is the front-rear direction to give a propulsive force, and the conveyance is carried out under the left and right center portions of the protective glass substrate which are productized. In the case where the transport device is transported between the processing devices that perform processing such as processing on the transported object, the transport device of the transport device is transported by the processing device of the preceding program and the device of the subsequent program 3 201144195 When the transmission posture (that is, the posture at the time of reception or delivery) is different, there is a case where it is necessary to change the conveyance posture of the conveyed object conveyed by the conveyance device. In the conventional example of the conveyance device that can change the posture of the conveyed object, the conveyance device is provided with a posture adjustment tool that rotates the conveyance conveyed by the conveyance tool about the vertical axis to change the conveyance posture of the conveyed object (for example, Refer to Patent Document 1). In the past, as disclosed in Patent Document 1, the rotation position at which the conveyance is rotated to change the conveyance posture can be set, and the suction portion that is adsorbed on the bottom surface of the conveyed object to hold the conveyed object can be arranged in the rotation position. The axis is free to rotate and freely moves up and down to form an attitude adjustment tool. In the state where the absorbing portion is lowered to the lowered position and the conveyed object is transported to the rotational position and stopped, the absorbing portion is raised to the raised position, and the absorbing portion is sucked and held by the absorbing portion, and in this state, The suction portion is rotated by a predetermined angle around the longitudinal axis, thereby rotating the conveyed object to change the conveyance posture. When the rotation of the conveyed material is completed, the suction holding of the absorbing portion is released, and the absorbing portion is lowered to the lowered position, and the conveyance of the conveyed material is resumed. CITATION LIST OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION In the prior art, the conveyance is stopped at a constant rotational position in the transport direction. The suction portion is held by the suction portion and rotated to change the posture of 201144195. Therefore, if the _ speed of the suction portion is accelerated to adjust the time required for the posture adjustment, the inertia torque generated at the rotation center of the conveyance when the rotation speed is accelerated and decelerated. The suction holding force of the absorbing portion is larger than that of the absorbing portion, and the rotation of the conveying member due to the detachment of the absorbing portion cannot control the rotation of the conveying object. Therefore, it is necessary to rotate the absorbing portion at a low speed, and it takes time to change the posture of the conveyed object. In addition, during the rotation of the conveyance by the posture adjusting guard, the conveyance stops at the rotation position, and the movement of the conveyed object by the conveyance tool in the conveyance direction is stagnated. As described above, when the posture adjustment tool is configured to change the posture of the conveyed object, there is a problem that the conveying ability of the conveying device is lowered. The present invention has been made in view of the above circumstances, and an object of the invention is to provide a conveying apparatus capable of changing the posture of a conveyed object and having a high conveying capacity. In order to achieve the object, the conveying apparatus of the present invention is configured to provide a conveyance in a non-contact state in a horizontal posture or a substantially horizontal posture by providing air to the lower surface of the conveyed object. The air-supporting anal device, and the propelling force for propelling the propelling force in the direction in which the inspecting object is supported by the air-supply supporter, and the transporting tool for transporting the object conveyed by the transporting tool around the vertical axis, In the conveyance device that continuously rotates the posture adjustment tool for changing the conveyance posture of the conveyed object, and the control device that controls the operation of the conveyance tool and the posture adjustment tool, the posture reduction tool is constructed to be in a non-contact state. The supported conveyance is formed by joining the ends of the Wei in the head view. The holding portion for holding the conveyance and the rotation of the holding portion about the longitudinal axis and the reduction of the former county holding portion are possible. (4) tool for moving the direction of movement; the shape holding position is sent purely by the holding portion in a non-contact state, and the aforementioned moving tool is used to make the aforementioned In the state in which the contact state is received, the conveyance is carried out from the holding position to the holding release position on the downstream side (4) while the moving portion is moved by the moving tool, and the holding portion is held by the second Rotating to move the conveyed object to be held in the following position: Turning = and releasing the accompanying holding position, and the control tool is constructed to move the shovel of the holding portion and the movement of the moving tool. And the control of the above-mentioned rotating work. If such a configuration is used, the conveyance tool is controlled by the control worker, and the conveyed object is in a non-contact state by the air supply type branch tool [

In the state in which the propelling force is applied to the tool in the transporting direction, the device is provided with an attitude adjusting tool. The posture adjusting tool includes a portion that holds the transported object by forming a joint at a plurality of ends of the transported object in a plan view. 'The rotation tool that rotates the holding portion about the longitudinal axis and the moving tool that moves the holding portion in the conveying direction. The 'control tool controls the posture; the operation of the whole tool' is held at the holding position by the holding portion to the conveyed object; the plurality of end portions are joined to form the holding portion to hold the conveyed object, and the rotating tool and the moving tool are used. The "holding portion that holds the conveyance while engaging - while rotating - rotating" allows the conveyance posture of the conveyed object to be rotated by a predetermined angle around the vertical axis. In this way, by forming a joint of a plurality of ends of the conveyed object in a plan view, the conveyed object can be rotated about the vertical axis, so that the holding portion is rotated. When the speed is increased, it is difficult for the conveyed object to be detached from the (fourth) portion, and the conveyed object can be rotated at a high speed while being held by the holding portion. Therefore, the posture change of the conveyance can be performed in a short time. Further, since the control tool controls the rotary tool and the moving tool to move the holding portion in the conveying direction of the rotating edge, the conveyed object is held by the holding portion at the holding position, and the edge is conveyed in the conveying direction (four), and in the holding release position. The retention of the holding unit will be released. In other words, during the transfer of the transporting position of the transported material, the transport in the transport direction by the transport tool is not expected, and the transporting age (4) is also moved in the transport direction. The device has high inspection capability. In this way, a transport device that can change the posture of the transported object and has a high transport capability is obtained. In the embodiment of the conveying apparatus of the present invention, the holding portion is provided with a swing that can pass through the %杈 axis, and is joined to the end portion of the conveyed object, and is connected to the end position I, and the joint of the end portion is In the plurality of joints that are in the switching posture of the release posture, the joint action portion is preferably configured to hold the conveyed object once the joint posture is formed, and to form the release posture (fourth conveyance) It is preferable to set the guard to control the posture switching operation of the receiving material at the holding position and the holding release position. According to this configuration, the plurality of engagement working portions that are joined by the plurality of 201144195%% of the conveyed objects in the plan view are swung around the horizontal axis, and the posture is switched to the engaged posture and the released posture. The action of holding and releasing the object is carried out. In this case, since only the posture of the plurality of joint action portions of the one-putter of the holding portion is changed, the posture of the lift-and-hold portion is not accompanied by the overall configuration of the lift-and-hold portion, and the conveyance can be performed in less than two times. Maintain and release insurance and hold. Therefore, the attitude redness can be achieved, and the maintenance of the conveyance of the maintenance line can be completed in a relatively short period of time. For example, in the case where the conveyance kiosk is stopped, the holding and releasing of the conveyed object by the holding unit is advanced, and the stop time of the holding position and the holding release position is extremely shortened, thereby suppressing the reduction of the conveyance ability. . In the embodiment of the conveying apparatus of the present invention, the conveying tool is set to be sequentially arranged, and the material moving (four) is set such that the holding portion moves along the front conveying tool between the holding position and the holding release position. The conveyance of the square wire is rotated, and the conveyance posture of the conveyance direction is maintained from the guide position set on the upstream side of the front holding position to the conveyance direction of the tool. The above-mentioned control tool is set to be repeatedly controlled by the younger brother: the posture of the employee is made to move, so as to maintain the phase of the conveyance of the nr material (4) silk purely placed to the scale release position = after the non-maintained conveyance In the holding state, the holding portion moves to the return position, and the operation of the movement type I change operation is repeatedly controlled (4), and the operation of the guide person transfer 4 is controlled to facilitate the holding portion in the holding state. After the movement from the scale position to the holding unit at 8 201144195 is moved to the subsequent movement stop release position, the movement to the non-holding state to the maintenance position is returned. In the case of the above-described holding position, the conveyance is carried to the holding position. The conveyance of the conveyance is maintained in the direction in which the guard is conveyed from the position of the guide to the holding position on the upstream side. In the case of the conveyance of the conveyance, the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of the conveyance of When the part moves back to the _4 position, it can be moved to the holding position. m2 'The money order is sent to the sewing position _, and the position is kept from the holding position. When moving to the holding release side on the downstream side, the shape of the first transported material 11 is again held in the position, so that (4) the 31th member is transported to carry the subsequent inspection object to the transfer position, and the phase non-holding state is returned to the holding position. It is possible to make the next transported item appear in a state where it has been prepared in the hold position. Transfer, two hold;:==Keep _^ The eight PL j sent is released until the position is released. Way 'can be Adjusting the posture of the conveyed object, in the embodiment, the control means that the rotation of the holding portion and the movement of the moving member are the same, or the same as:: the holding portion is in front of her 201144195 because the holding portion is from the holding position (4) Movement - The conveyance tool is transported to the holding position, and the == the delivery object has been introduced into the conveyance posture of the rotary conveyance. The following: The distance between the movable object and the movement of the holding portion in the conveyance direction can be started. In the direction of the movement, the attitude is as follows: In the implementation of the transportation device of the Baoming, the above-mentioned reversal worker c/order carries the Wei conveyer, and the above-mentioned Yicheng f =::= and the aforementioned retention _ The position::= movement, the conveyance is performed from the conveyance posture of the holding release object, and the posture adjustment is performed by the q-repetition control. The tool is held in the holding state of the object from the above:::: After the movement, the non-retaining sub-cardiac holding portion that does not hold the conveyed object is moved to the holding position, and the operation of the ejecting and transporting tool is controlled to be controlled, and the holding portion of the state is in the above-mentioned simple release. Status of location The transport security: was released to hold the conveying object of the subsequent holding state holding period until said retention release position 'is released from the conveyance position holding portion 4 is simply to send Chi thereof. In the above-described configuration, the delivery of the transported object is maintained while maintaining the transport posture of the transported material in the transport direction of the transport tool, from the position where the transport release position is set to the downstream of the hold release position. In the state in which the holding member is released while the holding portion is in the holding release position, the holding portion that holds the subsequent conveyed material moves to the holding release position, and can be held by the delivery conveyance tool first. In the release position, the conveyed object that has been released by the holding portion is transported away.丨 丨 矸隹 解除 解除 解除 解除 解除 解除 放 放 放 放 放 放 放 放 放 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , By the conveyance to the delivery position, the holding unit returns to the hold state to prepare the state in which the previously released conveyance is released from the security and image and the release position is made available. Like reading, from holding position to keeping workers. In the present invention, the position of the transported object is adjusted by the transfer of the transported state. Second, the rotation tool and the aforementioned movement are made, and the rotation of the holding portion and the movement of the holding portion 4 are preferably performed so that the movement of the stop ends simultaneously or substantially simultaneously. The hold release position is the hold release position: :4: The rotation is completed at the same time as the transfer position to the release position from the holding portion to the release position. Therefore, the load is held from the hold to the hold: the transfer tool After the placement, it can be immediately maintained at 201144195. When the conveyance is released from the position and the movement of the conveyance of the conveyance in the position of the conveyance is stopped, the distance of the movement of the holding portion in the conveyance direction is extremely shortened, so that the movement direction of the holding portion is extremely large. 'The attitude adjustment tool can be made small. In the present invention, a method corresponding to the above configuration is included, and the function and effect corresponding to the above configuration can be expected in the method bow. Further, according to the method of the present invention, the air supply type private device having the air supply in a non-contact state and supporting the water in a non-contact state with a supply of air to the bottom of the object, and The conveyance in the conveyance direction is given by the conveyance of the conveyance direction by the conveyance tool of the above-mentioned conveyance tool: the conveyance tool to which the tool is conveyed, and the conveyance posture of the conveyance object is adjusted by (4) and the escape axis (4) conveyed by the conveyance tool. The posture adjustment tool controls a control tool that describes the operation of the conveyance tool and the posture adjustment tool, and the posture adjustment tool is provided with a plurality of end portions in a plan view that is received by the branch 2 in a non-contact state. a holding device for holding the object and a rotating device for rotating the holding portion around the vertical axis: and a transporting and transporting method of the moving tool for moving the holding portion in the conveying direction, wherein the holding portion is included in the holding portion The step of holding the conveyed object in the non-contact i state to the branch state and moving the holding portion by using the moving tool to be in a non-contact state When the conveyance in the state of the tooth is conveyed in the conveyance direction to the holding release position on the front downstream side, the movement is held by the above-mentioned movement=: holding_4_4 tool to hold the conveyance In the case of the conveyance posture, the rotation of the predetermined angle is 12, 2011, 195, and the step of releasing the conveyance in the holding release position. (4) In the embodiment of July, the above-mentioned holding portion is provided with a swing that can be connected to the person, and the joint portion is formed to be joined to the end portion of the conveyed object. It is preferable to include a plurality of engagement portions of the engagement postures between the release postures in which the engagement is released, and it is preferable to include the posture switching of the engagement operation portion in the holding release position (1). In the middle, it is provided with the above-mentioned holding position from the limbs, and the maintenance position is maintained: (4) The object is transported along the transporting tool: The package =::: method Set to move in order _ 匕 3, the moving tool makes the aforementioned holding portion first; =:::::: solution: wide _ one-to-one delivery back movement step includes holding to hold the release bit = Γ:: :: the above-mentioned _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The transfer of (4) is carried out during the transfer of the transported object, and the above steps of the _:::= angle are controlled. ,... The step of the transposition and the movement of the mobile tool is so that it is 13 201144195 :::::: The above-mentioned maintenance department of the previous maintenance department is set up in the above-mentioned (four) release position! The sigh is further downstream in the "remaining release position" In the transfer position of the side, the conveyance posture of the conveyance object is conveyed in the conveyance direction, and the conveyance tool is conveyed in the conveyance direction, and the conveyance of the conveyance is carried out, and the conveyance is carried out in a plurality of conveyances. And the above-mentioned holding release position: between the moving direction of the holding device and the moving direction of the holding device, the carrying device holding the conveyance of the conveyance "the step of moving back and forth includes the setting of the holding to the aforementioned holding solution =: = keeping from the aforementioned holding position The holding portion in the state moves back to the step of holding the conveyed material, and preferably includes the holding state of the holding state U, and the state is maintained; and the holder is held in the holding state in which the holding release position is conveyed; In the period of the subsequent conveyance, the step of feeding the object from the holding release:: to the holding release position is carried out. In the above-described step of controlling the conveyance, the conveyance is controlled to rotate the conveyance by the conveyance, and the step of the predetermined angle is preferably included in the step of the rotation of the holding portion and the operation of the movement aid. The movement is simultaneous or substantially simultaneous, and the J ^ holding portion is at the position of the above-mentioned holding release position. The first circle is the entire flat plate of the conveying device 14 201144195 [Fig. 2] The overall side view of the conveying device. [Fig. 3] [Fig. 4] A longitudinal sectional view of the transport unit. [Fig. 5] A longitudinal sectional view of the attitude adjustment unit. [Fig. 6] A schematic diagram of the attitude adjustment tool. [Fig. 7] The end of the arm is enlarged. [Fig. 8] A side view of the introduction conveyor. [Fig. 9] Control block diagram of the control device. [Fig. 10] Flow chart of the control operation of the control device. [Fig. 11 (a) to (c)] The transfer operation diagram of the transport device. [12th (d) to (e)] The transfer operation diagram of the transport device. [Fig. 13] An operation timing chart of each device in the transport device. I. Embodiment 3 In the embodiment of the present invention, the transport apparatus 1 for transporting the glass substrate W for a liquid crystal display as a transport material will be described as an example. As shown in Fig. 1 and Fig. 2, the conveying device 1 is disposed such that the upstream conveyor 2 and the downstream conveyor 3 are arranged in a line in the same direction in the respective conveying directions, and are disposed upstream. The posture adjusting unit 4 between the side conveyor 2 and the downstream side conveyor 3 is provided with a control device 控制 for controlling the operation of the upstream side conveyor 2, the downstream side conveyor 3, and the posture adjusting unit 4. In the conveyance device 1, the direction from the upstream conveyor 2 toward the lower 15 201144195 of the side conveyor 3 in the first and second drawings is the conveyance direction, and the plurality of glass substrates W are horizontally or substantially along the linear conveyance path. The horizontal posture is sequentially transported to the downstream side from the upstream side, and the glass substrate W is rotated about the vertical axis X1 in the middle of the linear transport path, and the transport posture of the glass substrate W is shifted from the upstream side of the upstream conveyor 2 The downstream side posture in the downstream side conveyor 3 is adjusted. Here, the "substantially horizontal posture" means a posture having an inclination of, for example, 10 degrees or less from the horizontal direction. In this embodiment, the glass substrate W is rectangular in a plan view, and the side extending in one direction (short direction) is shorter than the side extending in the other direction (long direction), and the upstream conveyor 2 is the glass substrate w. The conveyance is performed in a short direction in the conveyance direction, and the downstream conveyor 3 conveys the glass substrate w in the longitudinal direction of the conveyance direction. The upstream conveyor 2, the downstream conveyor 3, and the attitude adjusting unit 4' constitute a conveying tool D including a blower type building tool 1 and a propulsion power feeding tool η. Further, the control device η functions as a control tool for controlling the operation of the transport tool D. Hereinafter, the upstream conveyor 2, the downstream conveyor 3, and the attitude adjusting unit 4 will be specifically described. Each of the upstream conveyor 2 and the downstream conveyor 3 is disposed in a state in which a plurality of transport units 6 provided on the gantry 5 are arranged in the transport direction, and adjacent 7L members are connected to each other. The transport unit 6a of the upstream conveyor 2 and the transport unit of the downstream conveyor 3 have the same basic configuration except for the length in the left direction (the direction perpendicular to the transport direction), so that the upstream conveyor 2 is configured. The transport unit 6a will be described as an example of the transport unit 6, and the description of the transport unit constituting the downstream conveyor 3 will be omitted. As shown in Fig. 3 and Fig. 3, the transport unit 6& is configured such that the air supply type supporting tool 10a and the pushing force applying tool 11a are provided in the casing 9 composed of the upper cover 16 201144195 cover 7 and the support frame 8. The air supply type support tool 1a of the transport unit 6a is configured to include a plurality of fan transition units 12 that supply clean air to the lower surface of the glass substrate w, and a plurality of vent holes 13a are supported by the fan overrun unit. J2 is a wind deflecting plate 13 for rectifying the clean air supplied to the glass substrate W. The fan filter unit 12 is coupled and fixed to the sub-frame 8, and is a dust-removing filter 14 for removing dust, and is disposed under the dust-removing transition device 14 to supply clean air to the lower surface of the glass substrate W through the dust-removing transition device 14. The air blowing fan 15 is integrally assembled. In this embodiment, the air supply supporting tool 1 〇a is provided with a total of four fan filter units 12, and two fan filters 12 are arranged adjacent to each other in the front-rear direction b. In the posture adjusting unit 4, the downstream side of the air-conditioning panel 13 of the air-sending support tool 10a of the transport unit 6a adjacent to the upstream side is formed in the transport direction so that the introduction conveyor described later can protrude to the air-feeding support tool. L〇a The upper and lower introduction conveyor uses a slit 13b. The thrust force application tool 11a of the transport unit 6a is arranged side by side in the transport direction at both end portions in the left-right direction, and is attached to the lower surface of the left and right end portions of the glass substrate W that is supported in a non-contact state, and is attached to the glass substrate. A plurality of drive rollers 16 for giving a propulsive force in the transport direction, and a drive roller motor M1 for driving the drive rollers 16 to rotate (see FIG. 9). The support frame 8 of the casing 9 supporting the drive roller 16 and the drive roller motor M1 has a bottom plate 18 equipped with an air introduction port π for introducing external air, and 'installed in a fixed state along the conveyance direction on both sides of the support frame 8 in the left-right direction. 17 The structure of a pair of left and right storage frames 19 of 201144195. Further, the upper cover 7 is mounted across the storage frame 19 on both sides. Each of the pair of right and left storage frames 19 is provided with a transmission mechanism including a motor for driving the roller Μ1 and a drive shaft 2〇 for distributing the rotational driving force of the motor for driving the drive wheel μ1 to the plurality of drive rollers 16. In addition, the drive roller 16 is provided with a side surface that contacts the both end portions of the glass substrate w in the left-right direction, and blocks the large-diameter portion 16a in which the glass substrate w moves in the left-right direction. Next, the configuration of the posture adjustment unit 4 will be described. As shown in FIG. 2, FIG. 2, and FIG. 5, the posture adjusting unit 4 is equipped with a blower type support tool 10b and a propulsive force in a casing 23 composed of an upper cover 21 and a support frame 22 which is generally considered to be substantially rectangular. It is constructed by giving the tool lib. The air supply type supporting tool 1b of the posture adjusting unit 4 and the air supply type supporting tool 10a of the conveying unit 6 are configured in the same manner. That is, as shown in Fig. 5, a plurality of fan-transition units 12 that supply clean air to the lower surface of the glass substrate W and 'the placement of a plurality of vent holes 13a are cut on the fan-transition unit 12' are supplied to The clean air under the glass substrate is used for the wind-reducing wind plate 13. The wind turbine and the unit 12 are connected to the ribs, which are the dust removing transition device 14 for removing dust, and disposed under the dust removing transition device 14, and the second dust removing filter 14 supplies clean air to the underside of the glass base (four). The electric blower fan 15 is assembled and integrated. The air supply type of the attitude adjustment unit 4 is supported by the % scales. The number of fans is set to Γ 个 _ _ ' ' ' ' ' ' ' ' ' ' ' ' 组 组 组 组 组 组 组 组 组 组 组 组 2 2 2 2 2 2 2 2 2 2 2, 2, 2, 2 fan filter units 12 in the direction of transport, and arrangement: 2 winds 201144195 transition unit 12 not listed on the upstream side and the side of the swim side are the same size and posture The size and attitude of these fan filter units 12 are different from those of the three fan filter units 12 located in the middle of the transport direction. In addition, the introduction conveyor narrow slit 13c (see FIG. 1) is formed in the upstream side portion of the air-conditioning plate 13 in the air-sending support tool 100b of the posture adjustment unit 4, so that the introduction conveyor 29, which will be described later, can be protruded to the ratio. The air supply support tool 10b is further above. The introduction conveyor is connected to the posture adjustment unit 4 by the slits 13c', and is connected to the introduction conveyor narrow slit 13b of the air-conditioning plate 13 of the air-sending support tool 1A formed in the adjacent conveyance unit 6a on the upstream side. The posture adjustment unit 4 includes an attitude adjustment tool 24 that rotates the glass substrate W about the vertical axis XI, and the propulsion force application tool lib of the posture adjustment unit 4 is also used for the posture adjustment tool 24. As shown in FIG. 2, FIG. 5 and FIG. 6, the posture adjustment tool 24 is provided with a rotation #25' as a plural number of the glass substrate W supported by the air supply type supporting tool 1〇b in a non-contact state in a plan view. The end portions are joined to each other to hold the holding portion of the glass substrate w freely, and the rotating portion 26 is a rotary tool that rotates the rotating arm 25 about the longitudinal axis XI, and the sliding portion 27 is such that the rotating arm 25 is in the conveying direction Mobile mobile tool. As shown in Fig. 5, Fig. 6, and Fig. 7, the swivel arm 25 is disposed above the height of the glass substrate w which is cut in a non-contact state by the blower type support jig, and is equipped at both ends thereof. The pair of clamping portions 28 are formed by joining the opposite ends of the glass base by means of a crane around the horizontal axis, and the joint of the material portion is released (four) between the postures Freely switch the posture of the complex number of cooperation (four). This is the case where the glass substrate W is held by the holding portion 201144195 portion 28 when the joint posture is formed. When the posture is released, the glass substrate W is released. Further, although detailed description is omitted, a clamping motor M2 that drives the attitude of switching the pair of clamping portions 28 is incorporated in both end portions of the rotating arm 25 (see Fig. 9). The swivel arm 25 is formed of a long-length hollow element having a short side length corresponding to a rectangular glass substrate in a plan view. The pair of nip portions 28 provided at both ends are joined to the left and right sides of the glass substrate W, respectively. The glass substrate W is held in a manner of a substantially central portion of the direction. Each of the pair of clamping portions 28 includes two abutting pieces 28a arranged in the direction of the horizontal axis Y1.  28b, the two contact pieces 28a and 28b are in contact with each other at a substantially central portion of the long side of the glass substrate w at two places, and the pair of jig portions 28 are in an engaged posture, and are opposed to the glass substrate W of the rotating arm 25. The rotation is limited. Further, an elastic member 'glass member W such as polyurethane rubber and a pair of nip portions 28 are provided on the abutting faces of the abutting pieces 28a and 28b of the pair of nip portions 28 to form elastic contact. The rotation unit 26 includes a rotation motor M3 (see FIG. 9) that drives the rotation arm 25 to rotate in one direction and the opposite direction, and detects the rotation position of the rotation arm 25 as the rotation drive amount of the rotation motor M3. The rotary encoder RE1 for detecting the rotational position of the rotational position detecting tool (refer to Fig. 9). The slide portion 27 is provided with a guide rail 27a provided in the transport direction in a state in which a plurality of places are supported by the pair of front and rear support frames 22a provided in the support frame 22, and is provided to be guided by the guide rail 27a. A sliding block located at the retracted limit position of the holding position P3 (refer to FIG. 11(b)) and the forward limit position where the glass substrate W is located at the holding release position P4 (refer to FIG. 12(d)) 20 201144195 27b and 27, the drive slide block 27b advances from the upstream to the downstream in the conveyance direction, and drives the movement motor M4 which retreats from the downstream to the upstream in the conveyance direction (refer FIG. 9). The method of transmitting the driving force of the moving motor M4 to the slider 27b can be constructed by a conventional technique. For example, the slider 27b can be fixed to a member that is screwed to a screw shaft that is rotated by the moving motor M4. In another example, the moving motor M4 may be indirectly connected to the shaft center of one pulley disposed at the end region of the guide rail 27a directly or via a gear, and the freely rotatable pulley 'and the endless belt may be disposed at the other end region of the guide rail 27a. Wrap between the two pulleys and fix the slider 27b to a place of the endless belt. Further, the front and rear end portions of the guide 27a are provided with a holding position detecting sensor S3 (see Fig. 9) of the slider 271 for detecting the backward limit position, and the holding of the slider 27b for detecting the forward limit position. The position detecting sensor S4 is released (refer to Fig. 9). At the holding position P3, the control device H changes the pair of clamping portions 28 of the rotating arm 25 from the releasing posture to the holding posture, whereby the rotating arm 25 holds the glass substrate W. Further, at the holding release position p4, the control device η adjusts the position of the rotating arm 25 to the material posture, thereby causing the rotating arm 25 to release the glass substrate W. That is, the control device 设定 is set to control the posture switching operation of the pair of nip portions 28 at the holding position Ρ3 and the holding release position Ρ4. In the state in which the pair of crimping portions 28 are switched to the bonding wires that form the bonding to the glass substrate W, the posture adjusting tool 24 rotates the rotating arm 25 about the vertical axis X1. The portion 27 moves the guide rail 27a that rotates (10) in the conveyance direction, and rotates the glass substrate w around the vertical axis *X1 while the glass substrate W is supported by the blower support tool 21 201144195 l〇b, while the glass substrate is rotated. W gives the propulsion force in the transport direction to carry the transport in the transport direction. In the above-described posture adjustment unit 4, the attitude adjustment tool 24 is provided with the propulsion power application tool nb. In addition to the posture adjustment function of the glass substrate W, the glass substrate W is brought into contact with the glass substrate W, and the propulsive force in the transport direction is given. The moving direction of the rotation longitudinal axis XI of the rotating arm 25 which is the conveying direction by the posture adjusting unit 4 coincides with the conveying direction of the upstream conveyor 丨 and the downstream conveyor 2 . In the conveyance device 1, as shown in Fig. 1, Fig. 4, Fig. 5, and Fig. 5, an introduction conveyor 29 is provided to hold the glass substrate W while maintaining the conveyance posture of the glass substrate in the conveyance direction. The introduction conveyance tool that is conveyed to the holding position P3 at the introduction position P2 on the upstream side from the holding position p3 is set. The posture adjusting unit 4 is provided with a pair of right and left stoppers 4B that block the end portion on the downstream side of the glass substrate W conveyed by the introduction conveyor 29. As shown in Fig. 1, the posture adjusting unit 4 forms two gaps between the three fan passing units 12 arranged in the left-right direction at the intermediate position in the conveying direction. 'A pair of stoppers 40 are arranged in each gap. One. The pair of stoppers 40 are disposed so as to be rotatable in one direction and the reverse direction by the stopper raising/lowering motor M9 (refer to FIG. 9), and can be freely switched to the abutment and conveyed conveyor 29 to be carried and held. At the two positions on the downstream side of the glass substrate w at the position P3, the glass substrate is held in the upstream posture, and the position at which the glass substrate W moves to the downstream side in the transport direction is restricted, and the glass substrate W is allowed to proceed. The lowering position of the downstream side of the transport direction. In addition, as shown in the first embodiment, the transfer conveyor 30 is provided with the transfer conveyor 30 as the transport position of the glass substrate W in the transport direction, and is transported from the hold release position P4 to the transfer position. The delivery conveyance tool is derived from the lowering position p5 on the downstream side of the holding release position P4. Since the introduction conveyor 29 and the delivery conveyor 3 are basically the same in arrangement positions, the introduction of the conveyor 29 will be specifically described as an example. As shown in FIG. 1 , FIG. 4 , FIG. 5 , and FIG. 8 , the introduction conveyor 29 has a horizontal direction of the glass substrate W in the upstream side posture (the downstream side posture in the case where the conveyor 30 is taken out). The central portion forms the introduction side belt type propulsive force giving portion 31 that is in contact with the support. As shown in FIGS. 4 and 5, the introduction side belt type propulsion power applying unit 31 is provided with an elongated gap G formed in the front-rear direction formed at the intermediate position in the left-right direction by arranging the two fan filter units 12 in the left-right direction. in. The side belt type propelling force applying tool 31 is introduced, and as shown in Fig. 8, the driving wheel 32 that is driven to rotate by the introduction conveyor driving motor on the upstream side in the conveying direction is positioned upstream of the conveying direction. The freely rotatable driven wheel 33 on the side and the driving wheel 32 and the driven wheel 33 are wound around, and the timing belt 34 which supports the lower surface of the glass substrate w and gives the propulsive force is supported from the inner peripheral side. The inner support wheel 35 of the conveying path portion of the belt 34 and the support frame 36 supporting these members are constructed. Further, as shown in Fig. 8, the support frame 36 is provided with a pair of front and rear guide motors for performing the lifting operation of the introduction side belt type pushing force applying portion 31, and the introduction conveyors are lifted and lowered. The output gear 37 of the motor M6 is meshed with a rack 38B formed on the side of the fan filter unit. 23 201144195 Driving a pair of induction conveyors for lifting and lowering the motor to rotate in the - direction and in the opposite direction in a synchronized state, so that the guide side belt type propulsion force is given to the portion 31 to be set to 'on the side of the timing belt 34 A part of the outer peripheral surface is located above the wind deflector ο provided by the upstream conveyor 2 and the attitude adjusting unit 4, and is freely accessible to the lower rising position of the glass substrate, and the upper portion of the timing belt 34. The position of the opposite surface is raised and lowered up and down between the lower position of the lower surface of the glass substrate W than the upper surface of the wind deflector 13 provided by the transport unit 2 and the attitude adjusting unit 4. When the belt type propulsive force applying portion 31 is lifted up and down, the path portion on the upper side of the timing belt is passed through the slit 13b of the wind plate 13 provided in the upper_conveyor 2 and the posture adjusting unit 4 in a continuous state.  The i3c derivation conveyor 30 is provided with a delivery conveyor drive motor % to derive the conveyor elevating motor M8 (see Fig. 9). The side belt type propulsion force is terminated by driving the lead conveying drive motor M7 to rotate.  When the timing belt of the "D" tool 39 is wound, the lead-type propulsion force imparting tool 39 is lifted and lowered by causing the induction conveyor lifting and lowering motor M8 to be driven to rotate in the forward and reverse directions in a synchronized state. Next, the control structure of the conveying device 1 will be described. - In the case of the control device 控制 which controls the operation of the conveying device 1, the upstream side wheel 2, the introduction conveyor 29, the posture adjusting unit 4, the lead conveyor 3, and the lower side conveyor 3 are each provided. The electric motor, fan filter stage 12 and various detectors are connected. Among the plurality of drive control devices in the transport unit 6a, the most downstream preparation position of the upstream conveyor 2 is used in the library sensor S1, each transport unit such as 24 201144195 moving roller motor M1 and a plurality of fan filter units 12 is connected. The preparation position of the upstream conveyor 2 is used in the storage sensor s, and the glass substrate W has been conveyed to the preparation position P1 which is set to the downstream end of the upstream conveyor 2 in the conveyance direction (see the figure...) The optical sensor of the case. Similarly, in the control device, the completion position in the most upstream conveying unit 6b of the downstream conveyor 3 is used in the library sensor S2, the plurality of driving roller motors Μ1, and the plurality of fan filter units in each of the conveying units 丨2 is connected. The completion position of the downstream conveyor 3 is used in the library sensor s 2 to detect that the glass substrate W has been transported to the completion position p6 of the downstream end of the downstream conveyor 3 in the transport direction (refer to Fig. 12 (e) The optical sensor of the case. In the control device, the pair of jig motor M2, the rotation motor Μ3, the movement motor Μ4, the rotational position detecting rotary encoder RE1, and the pair of stopper lifting motors in the posture adjusting tool 24 of the posture adjusting unit 4 Μ9 and a plurality of fan filter units 12 are connected. In the control device, the introduction conveyor driving motor Μ5 of the introduction conveyor 29 and the pair of introduction conveyor lifting motor rivers 6 are connected. Similarly, in the "control device", the lead-out conveyor driving motor 7 and the pair of lead-out conveyor lifting motors are connected to each other. The control device Η controls the holding operation of the rotating arm 25, the movement of the sliding portion 27, and the rotating operation of the rotating portion 26, so that the glass base (four) in the state of being in the non-contact state by the rotating arm is held by the rotating arm. In the position Ρ3, the glass substrate W in the state in which the rotating arm 25 is moved by the sliding portion 27 and the branch is received in the non-contact state 25 201144195 is transported from the holding position p3 to the holding-release position P4 on the downstream side in the transport direction. By the sliding portion 27, the rotating arm 25 is moved, and the if/village% rotates the rotating buckle, and the conveyance posture of the held glass substrate W is rotated by 9 degrees around the vertical axis X1, and the glass substrate is released at the holding release position P4. W's stay. In order to move the rotating arm 25 in the holding state in which the glass substrate w is held from the holding position P3 to the holding release position 4, the rotating arm 25 in the non-holding state of the unpolished glass substrate w is moved back to the holding position p3. The control device 反复 repeatedly controls the holding operation of the rotation f25, the sliding movement, and the rotation of the rotating portion 26. The control device Η controls the rotation of the rotating portion 26 and the sliding portion 27 to rotate in the holding state. The rotation of the arm 25 and the movement of the rotary buckle in the holding state from the holding position Ρ3 are started simultaneously or substantially simultaneously, and at the same time, the movement of the positional arm ρ4 is released from the holding position 1 > 3 to the (four) in the holding state. In the period from the start to the end of the rotation of the rotation state f 25 to the holding position ρ3, the subsequent glass substrate is conveyed to the holding position P3, and the operation of the introduction conveyor 29 is controlled. The control device Η controls the operations of the rotating portion 26 and the sliding portion 27 so that the rotation of the rotating arm 25 in the holding state and the movement of the rotating arm 25 to the holding release position Ρ4 in the holding state are simultaneously or substantially simultaneously at the same time, and at the same time, In the case where the rotating arm 25 is held in the holding position of the releasing position £p4, the rotating arm 25 is moved to the holding release position (10), and the rotating arm 25 is held in the holding state in which the subsequent glass plate w is held. When the glass substrate w that has been released by the rotating arm 25 is moved from the holding release position P4, the operation of the lead-out conveyance 26 201144195 machine 30 is controlled. Here, the term generally means that the time difference is, for example, within 1 second. More desirably, the time difference is within 〇 5 seconds. The control operation of the control device 将 will be described based on the flowchart of the first drawing and the operation diagrams of Figs. 11 and 12. The flow chart of the first drawing shows that the glass substrate w that has been transported to the preparation position P1 by the upstream side transfer machine 2 is adjusted while being transported in the transport direction from the preparation position P1 to the completion position!> The operation of the upstream conveyor 2, the downstream conveyor 3' attitude adjustment unit 4, the introduction conveyor 29, and the delivery conveyor 3〇 occurring during the posture. Further, among the step groups shown in the third row and the third row of FIG. 10, the steps in the left column indicate the operations of the upstream conveyor 2, the downstream conveyor 3, the introduction conveyor 29, and the delivery conveyor 3, and the center. The step group of the column indicates the operation of the posture adjusting tool 24, and the step group in the right column indicates the action of the stopper 4〇. First, in steps #1 to #4, if the preparation position is used in the library sensor S1, it is detected that the glass substrate W has been transported to the preparation position. 1. Will the transport unit 6a, which is the most downstream of the upstream side conveyor 2, be in the ready position? The glass substrate W of 1 is transported to the introduction position P2 in the upstream direction (see Fig. (a)). In the step #2, the introduction conveyor 29 that has been in the lowered position starts to rise, and in step #3, the introduction conveyor 29 starts the conveyance operation. Thereby, it is conveyed to the introduction position by the upstream conveyor 2? The glass substrate w of 2 can be directly conveyed by the introduction conveyor 29 to the holding position P3. Further, the transfer operation may be started before the transfer conveyor 29 is switched to the raised position. The glass substrate 搬 conveyed to the holding position P3 is guided by the roller 16 disposed at the downstream end of the upstream conveyor 2 at the left and right end portions of the upstream side portion 27 201144195. Since the center of the machine is applied in the direction of the conveyance direction in the direction of the center in the left and right directions, the vehicle is transported to the holding position P3H, and the money is conveyed in the state of the side. In addition, two places on the downstream side of the glass substrate W are blocked by the pair of left and right stoppers 4 provided in the posture isolating unit 4, so that the glass substrate W is positioned at the holding position P3 (refer to the figure) Made)). After the transport operation of the introduction conveyor 29 is stopped in step & the transfer conveyor 29 is switched to the lowering position in step #6, and the clamp portion 28 is removed from the money to the joint in step #7, in step __ _ The stopper 4 is switched to the lowered position. At step #9, the posture change of the glass substrate w and the movement in the transport direction by the posture adjusting tool 24 are started. That is, the rotation of the rotary arm 25 about the longitudinal direction XI (rightward direction) and the movement to the downstream side in the transport direction start simultaneously. Thereby, the nip portion 2 is joined to the opposite long sides, and the glass substrate which is rotated by the rotation 125 is rotated about the longitudinal axis X丨, and the side is swayed from the side. 4 is further moved to the holding release position P4 in the transport direction in the downstream side posture (see Fig. 11(c)). Does the glass substrate W approach or reach the release position? 4. The export conveyor 30 will be replaced from the lowered position rib to the ascending position during the step, and the conveyor 3G will be ready. Then, at step _u, the posture change of the glass substrate w moved by the posture adjusting tool 24 and the movement in the transport direction are ended. That is, the rotation of the rotating arm 25 about the longitudinal axis of the longitudinal axis (rightward) and the movement to the downstream side of the transporting direction are simultaneously completed at the same time. Here, roughly the same as 28 201144195 means that the time difference is within, for example, a leap second, and more suitably means that the time difference is 0. Within 5 seconds. The rotation position detecting rotary encoder RE1, the holding position detecting sensor S3, and the holding release position detecting sensor for detecting the rotational position of the rotating arm 25 are based on the rotation control of the rotating arm 25 and the stop control of the movement operation. The detection information of S4 is feedback control. In this manner, the rotational actuation and the movement of the rotary arm 25 are simultaneously or substantially simultaneously activated, simultaneously or substantially simultaneously. That is, the rotational speed and the moving speed of the rotating arm 25 are formed, and the time required for the rotating portion 26 to rotate the rotating arm 25 by 90 degrees and the sliding portion 27 to move the rotating arm 25 from the holding position p3 to the holding release position P4 The time required is almost the same. Here, it is said that substantially simultaneous, almost identical means that the time difference is within, for example, a leap second, and more suitably means that the time difference is 0. Within 5 seconds. When the rotation operation and the movement of the swing arm 25 are stopped, the nip portion is switched from the engagement posture to the release posture in step #12, and the glass substrate w is released at the holding release position P4. However, it is located at step #13. When the conveyance operation of the lead-out conveyor 30 is started, the glass substrate w is conveyed to the lead-out position p5 from the hold release position P4 while maintaining the downstream posture. (FIG. 12(d)). The glass substrate W conveyed to the holding release position p4 is immediately conveyed by the take-up conveyor 30 toward the lead-out position p5. Further, the transfer operation may be started before the transfer conveyor 30 is switched to the raised position. When the transfer destination glass substrate W is transported from the holding release position material to the 29 201144195 derivation position P5, the conveyance glass is held until the release position P4 is held. The rotating arm 25 of the substrate W retreats to the holding position P3 in steps #15 to #16 in order to convey the subsequent glass substrate W, and is rotated in the reverse direction until the protection. At the position P3 for the rotation position of the position P3, the state in which the subsequent glass substrate W can be held is returned (see Fig. 12 (4) 0). Further, a pair of stoppers for positioning the glass substrate W at the holding position P3 40. The transfer target glass substrate W is returned to the upper side of the pair of stoppers 40 at the lowering position by the forward and reverse rotation of the rotary arm 25 in steps #9 to #1, and then returns to the step #14. By the rising position, the glass substrate W of the next next conveyance target can be conveyed from the preparation position P1 before the rotation of the rotary arm 25 to the holding position P3 and the reverse rotation is completed, and the upstream side posture is advanced at the introduction position P3. (see Fig. 12(e)). The glass substrate W conveyed to the lead-out position P5 is received by the roller 16 disposed at the upstream end of the downstream conveyor 3 at the left and right end portions of the downstream side portion. In the state in which the center of the left-right direction is guided by the lead-out conveyor 30 in the direction of the conveyance, the guide is carried forward in a state in which the posture is maintained in the downstream posture (see FIG. 12( d )). glass When the glass substrate W is transported to the lead-out position P5, the transport operation of the lead conveyor 30 is stopped in step #18, and the transport conveyor 3 is switched to the down position in step #19. The glass substrate W at the position P5 is transported to the completion position P6 by the downstream conveyor 3 in the downstream side in steps #17 to #20 (refer to Fig. 12(e)). If the control device described above is usedΗ In the control operation, the glass substrate W can be transported by the introduction conveyor 29, the posture adjustment unit 4, and the delivery conveyor 30, and the glass substrate W is transported from the introduction position P2 to the delivery position P5. The subsequent glass substrate W is conveyed. Specifically, as shown in Fig. 13, the rotating arm 25 of the posture adjusting unit 4 holds the glass substrate W to be transported at the holding position P3 and moves from the holding position p3, and the subsequent glass is moved by the upstream conveyor 2 The substrate w is transported from the preparation position P1 to the introduction position P2 until the rotary arm 25 returns to the holding position P3. The subsequent transfer of the glass substrate w to the holding position P3 by the introduction conveyor 29 is prepared. By the time shown in the timing chart of FIG. 13 , the time required for moving one glass substrate W from the preparation position P1 to the completion position p6 can be shortened from the start position for starting the glass substrate W. ? The program operation time until the next glass substrate W is started from the preparation position P1 (takt time). For example, in the timing chart of Fig. 13, when 1 grid is 2 In the second, the transfer time required for the glass substrate W is 33 seconds, and the tact time is about 17 seconds. Thus, the plurality of glass substrates are changed in posture from the preparation position P1 while being in the transport direction. [Other Embodiments] (1) Regarding the stop control of the movement of the swing arm 25, it is exemplified that the sensor for holding the position detection is provided at the front and rear ends of the guide rail 27a. s 3 and the sensor for resuming the position detecting sensor S4 and performing feedback control based on the detection information of the sensors, but the present invention is not limited thereto, and the detecting slide portion 27 may be used to move from the movement start position (for example, backward). The limit position is the amount of movement 31 201144195. The method of detecting the position of the rotating arm 25 in the conveying direction or the moving position detecting tool at the position of the guide rail 27a is based on the moving position. The detection information of the measuring tool is used for the feedback control. In addition, the feedback control of the rotating arm 25 by the rotational position detecting rotary encoder RE1 may be used for the feedback control of the movement of the rotating arm 25. In this case, the rotating portion 26 and the sliding block 27b should be connected in linkage. The sliding portion 27 causes the movement of the rotating arm 25 to move in conjunction with the rotation of the rotating arm 25 by the rotating portion 26. (2) The stopping control of the conveying operation of the introduction conveyor 29 can be performed in the step #3 of the drawing. The feedforward control causes the conveyance operation of the introduction conveyor 29 to be stopped after the set time elapses from the start, or the feedback control can be adopted, and the holding position for detecting the conveyance of the glass substrate w at the holding position P3 is used in the library sensor. In order to stop the conveyance operation based on the detection information of the library sensor based on the holding position, (3) In the above embodiment, the glass substrate W is conveyed from the introduction position P2 to the holding position p3 by the introduction of the transfer machine 29. In the same manner, the introduction conveyor 29 may be omitted, and the moving range of the extending direction of the rotating arm 25 may be measured upstream, and the holding position may be set to be equivalent. The position of the introduction position P2 in the bear sample is performed as described above, and the operation of the rotating portion %, the moving portion 27, and the nip portion 28 is controlled by the control device η so as to be at a position corresponding to the introduction position Ρ2 in the above-described embodiment. After holding the glass substrate, the rotation of the rotating arm 25 is started after moving the set amount by the downstream side in the conveyance direction without rotating the rotating arm 25. (4) In the above embodiment, the drawing is illustrated as an exporting wheel. The transporting machine 3 transports the glass substrate W from the holding release position Ρ4 to the lead-out position? 5, and the detachment is performed. 32 201144195 The extension conveyor 30' may be omitted, and the moving range of the rotating arm 25 in the transport direction may be extended on the downstream side. The holding release position is set at a position corresponding to the lead-out position P5 in the above-described embodiment, and the operation of the rotating portion 26 and the moving portion 27 and the nip portion 28 is controlled by the control device η so that the rotating arm holding the glass substrate W is held 25 is moved from the position corresponding to the holding release position Ρ4 in the above-described embodiment to the downstream side in the transport direction without rotation, and corresponds to the above-described embodiment. The leadout rot position holding the glass substrate W is released. (5) In the above-described embodiment, the embodiment is characterized in that the introduction conveyance tool and the delivery conveyance tool are configured by a belt conveyor that can be freely raised and lowered. However, the present invention is not limited thereto, and the adsorption portion that can be freely adsorbed may be lifted and lowered. The configuration of the bottom surface of the conveyance is freely movable in the conveyance direction. Further, it is also possible to form a structure in which the protrusions that form the joint on the upstream side end portion of the bottom surface of the conveyance are attached to the movable side and are freely movable. In addition, the shape I which is attached to the outer side of the winding of the endless belt may be attached to the upper side of the bottom surface of the conveyance. If the winding path of the protruding belt is disposed lower than the bottom surface of the conveyance supported by the air supply supporting tool in a non-contact state, and when the protrusion is located at the upper side winding portion, the position is large. The height of the bottom surface of the conveyed object that is not in contact with the air supply type cylinder is higher than the height of the bottom surface of the conveyed object that is not in contact with the state, so that the protruding belt does not need to be set to be lowered. In this case, a plurality of sudden corrections are set, as long as the winding is performed. In the direction, the phase-protrusion is set to be longer than the transport distance of the introduction conveyance tool in the winding direction. In the above-described embodiment, the introduction and delivery tool is arranged to be placed next to the conveyed object, and may be imported. The transport tool and the top of the transport object that is transported and transported. (7) In the above-described embodiment, the upstream conveyor 2 is configured to convey the glass plate W in a short direction along the conveyance direction, and the downstream conveyor 3 is called the longitudinal direction along the conveyance direction. The delivery can also be carried out in the opposite direction. (1) In the above-described dumping, the __ holding portion is provided with a joining action portion formed by two short sides facing each other in a rectangular shape in the plan view, and is arranged in the short direction along the conveyed object. The posture of the conveyance is kept, but it is the secret of the holding part. It is also possible to sigh (4), and to provide a design of the joint action portion of _ or more, and as an example thereof, it is also possible to provide the design 0 (9) of the four joint action portions that respectively join the four-side conveyances in a plan view. In the embodiment, the plurality of engaging portions of the holding portion can be freely switched to the engagement posture of the end portion of the conveyed object by the swing about the horizontal axis, and the opposite end. The engagement of the portion is released, but the plurality of engagement portions of the holding portion may be configured to be freely switchable, and the height of the lower end portion is supported in a non-contact state by the air supply support tool. In a state of the lower side of the object, the joint height of the end portion of the conveyed object and the height of the lower end portion are higher than the upper surface of the conveyed object supported by the blown support tool in a non-contact state. The design of the release height of the joint of the end of the conveyance 34 201144195 is released. (1) In the above-described embodiment, the conveyance posture of the conveyed object is rotated by a predetermined angle by 90 degrees around the vertical axis to adjust the conveyance posture. However, the angle of rotation of the conveyed object can be appropriately changed. (11) In the above-described embodiment, the conveyance direction of the conveyance device is a straight line. For example, the conveyance direction may be the conveyance portion on the upstream side and the conveyance portion on the downstream side of the posture adjustment tool. different. In this case, the moving tool in the posture adjusting tool may be set such that the holding portion moves in either of the upstream conveying direction or the downstream conveying direction. (12) In the above embodiment, the air supply type supporting tool exemplifies the vertical and horizontal arrangement of a plurality of fan filter units, but the air supply type support tool may be assembled without using the fan filter unit. For example, the air supply passage for supplying the clean air from the outside may be connected to the transport device, and the air supply support tool may supply the clean air supplied from the external supply passage to the lower surface of the transport object. (13) In the above-described embodiment, the thrust imparting tool 11a of the transport unit 6 in the upstream conveyor 2 and the downstream conveyor 3 is exemplified as a design having a plurality of guide rollers, but the propulsion power is given to the tool. 11a may be various changes such as a design including a conveyor belt. (14) In the above-described embodiment, the entire posture adjustment tool and the conveyance tool are arranged so as to be in an overlapping position in a plan view. However, the present invention is not limited thereto, and may be arranged, for example, to adjust the posture. A part of the moving tool in the tool is placed on the lateral side of the conveying tool, and the position/part of the posture adjusting device 35 201144195 is located in a position away from the existence area of the conveying tool in a normal view. With such an arrangement, it is possible to lower the height of the position where the posture adjustment X is set in the conveying device. Specifically, the posture adjustment tool 24 may be configured such that the guide rail 27a in the above-described embodiment is disposed on the lateral side portion of the posture adjustment unit 4, and the guide rail 27a is disposed on the inner side of the posture adjustment unit 4 along the horizontal plane. The direction in which the conveying direction intersects perpendicularly, the sliding arm in the elongated state is slidably moved in the conveying direction, and the rotating arm 25 is rotatably provided around the longitudinal axis at the front end portion of the sliding arm. In addition, the posture adjusting tool 24 may be formed as a 'shake arm that is swingable around the longitudinal axis outside the posture adjusting unit 4 in a plan view, and is in the swing radius direction and the outer portion of the swing arm ( For example, the front end portion is configured to freely rotate the rotating arm 25 about the longitudinal axis (or freely rotatable about the longitudinal axis and free to move along the swing arm). In this case, the control tool may be controlled by the swinging motion of the swing arm (or the swinging motion of the swing arm and the movement of the swing arm 25 along the swing arm). [Simplified illustration of the drawings] [Fig. 1] Overall plan view of the conveying device. [Fig. 2] An overall side view of the conveying device. [Fig. 3] An oblique view of the transport of Zhuoyuan. [Fig. 4] A longitudinal sectional view of the transport unit. [Fig. 5] A longitudinal sectional view of the posture adjustment unit. [Fig. 6] A pattern diagram of the attitude adjustment tool. [Fig. 7] An enlarged view of the end of the rotating arm. 36 201144195 [Fig. 8] Side view of the introduction conveyor. [Fig. 9] Control block diagram of the control device. [Fig. 10] Flow chart of the control operation of the control device. [Fig. 11 (a) to (c)] The transfer operation diagram of the transport device. [12th (d) to (e)] The transfer operation diagram of the transport device. [Fig. 13] Operation timing chart of each device in the transport device Description of main components: 1] Transport device 12... Fan filter unit 2: Upstream conveyor 13... Wind plate 3... Downstream conveyor 13a... Ventilation hole 4···Azimuth adjustment unit 13b"Slong slit 5...Abutment 13c···Long slit 6···Transport unit 14...Dust filter 6a...Transport unit 15...Electric air blower fan 6b...Transport unit 16 ... drive roller 8... support frame 16a··. Large diameter portion 9 ... housing 17 ... air inlet 10 ... air supply type support tool 18 ... bottom plate 10 a · · air supply type support tool 19 · storage box 10b ... air supply type support tool 21 ... upper cover 11 ... propulsion power giving tool 22...Support frame 11a··· propulsion force giving tool 22a...support frame lib...propulsion force giving tool 23···casing 37 201144195 24...attitude adjustment tool 25...rotor arm 26...rotating portion 27...sliding portion 27a...rail 27b···sliding block 28...single pair of clamping portions 28a and 28b...contacting piece 29...introduction conveyor 30...extracting conveyor 31...introduction side belt type propulsive force giving unit 32...driving wheel 33...driven wheel 34... Timing belt 35... Inner support wheel 36... Branch frame 37... Output gear D... Transfer tool Η... Control Jun Μ 1···Drive roller motor Μ2... Cooling motor M3... Rotary motor Μ4···Moving Motor Μ5···Introduction to the tractor drive motor Μ6...Importing the hoisting machine for the hoisting machine Μ7···Exporting the conveyor drive motorΜ8···Exporting the conveyor lifting motorΜ9···Elevating motor P1 ...preparation position P2···import Set P3...Keep position P4...Remove position Xian1···Rotary encoder S1...Library sensor Sub-...Aniseed W...Slate substrate 39...Extracted side belt propulsion force giving tool X1. . . Around the longitudinal axis 40... a pair of stops Υ1. . . Horizontal axis 38

Claims (1)

201144195 VII. Patent application scope: 1) A type of conveying device is provided with an air supply type supporting tool that supplies air to the lower surface of the conveyed object in a horizontal posture or a substantially horizontal posture and supports the conveyed object in a non-contact state, and The conveyance of the conveyance by the conveyance-supporting tool of the air supply type support tool is given to the conveyance tool of the tool, and the conveyance of the conveyance conveyed by the conveyance tool is rotated about the vertical axis to adjust the posture of the conveyance posture of the conveyed object. And a transfer device that controls the transfer tool and the control tool for controlling the operation of the posture adjustment tool, wherein the posture adjustment tool is configured to include a plurality of ends of the conveyance supported in a non-contact state in a plan view Forming the (4) part of the object (4) and the rotating tool for rotating the material and rotating the holding portion in the conveying direction (4), the control tool is set to be escaping, the foregoing The movement of the moving tool, and the control of the movement to control the 'to facilitate the aforementioned rotation tool The conveyance moving tool in a state in which the rotation contact state is supported, the movement of the holding portion is moved, and the movement is carried out in a state in which the state of the contact is supported, and the direction of 24 is not transferred to the downstream release position. When the holding portion is moved, the transfer tool 1 is rotated by the rotary tool 1 to move the (4) conveyance money P to the vertical axis, and the rotation is predetermined to be approximately 39 201144195 angle 'and maintained in the foregoing Release the position to release the transported object. 2. The conveying device according to the first aspect of the invention, wherein the holding portion has a plurality of joining action portions, and the posture can be switched to the end portion of the conveyed object by swinging around the horizontal axis. The engagement posture of the engagement and the release posture for releasing the engagement of the end portions, the control tool is set to control the posture switching operation of the engagement action portion at the holding position and the holding release position. 3. The transfer device according to the first or second aspect of the invention, wherein the transfer tool is set to sequentially transport a plurality of conveyances, wherein the moving tool is set such that the holding portion is in the holding position. Between the holding position and the holding position, the transporting direction of the transfer tool is moved back and forth, and the transfer position of the side (four) is provided from the introduction position set on the upstream side of the holding position to the holding position. In the transport direction of the transport tool, the transport position of the transport transport object is controlled to control the amount of the position; and the movement is performed so that the hold state of the transport object is held before the seal is described: the position is moved to the hold release position 1 := In the non-holding state, the holding portion is moved and retracted, and is set to be held by the introduction/transport tool to maintain the holding state from the holding position of the holding state in the holding state from the front 40 201144195 holding position to the holding releasing position. The return movement of the part to the above-mentioned holding position is the transport split described in the third item of the range === range, wherein the aforementioned control System: the movement of the rotating tool and the moving tool is moved in a position to be moved, and at the same time, most of the conveying devices are recorded from the first or second item of the above-mentioned maintenance, wherein the front part is broken and the order is carried. The conveyance, the position=moving tool is set such that the holding portion moves between the holding and holding position of the holding member 7 in the conveyance direction of the conveyance guard, and the conveyance direction of the conveyance tool is (4) The control tool is set to repeatedly control the posture adjustment tool while maintaining the conveyance of the conveyed object while transporting the conveyed material from the holding solution to the leading position on the downstream side of the set release position. After the movement of the material in the state in which the conveyance is held is moved from the holding position to the holding release position, the movement of the holding portion in the non-holding state in which the workpiece is held is returned to: The position 'and is set to perform (4) on the I movement of the above-described export conveyance tool so that the simple state of the above-described holding state is at the front position and the release position. After the conveyance is held in the state in which the holder is held, the conveyance unit in the above-described holding state of the conveyer is moved to the release position, and the conveyance is released from the release position. 6. The conveying device according to claim 5, wherein the control tool is configured to control an operation of the rotating tool and the moving tool to rotate the holding portion and the holding portion to the foregoing The movement to the release position is completed at the same time or substantially at the same time. 7. The conveyance method is to support the conveyance in a non-contact state in a horizontal posture or a substantially horizontal posture by providing the air supplied to the lower surface of the conveyed object. The air supply supporting tool and the conveying tool for imparting the propulsive force of the conveying force in the conveying direction to the conveying material supported by the air blowing supporting tool, and the conveying tool conveyed by the conveying tool to rotate around the vertical axis Position adjustment tool for changing the conveyance posture of the conveyed object, and before control In the control tool for the operation of the conveyance tool and the posture adjustment tool, the posture adjustment tool includes a plurality of end portions that are supported by the conveyance in a non-contact state in a plan view, and the conveyance can be freely held. The holding portion and the transfer tool that rotates the holding portion about the vertical axis and the transfer device that moves the holding portion in the conveying direction, and the conveying method of the conveying device, which is included in the holding position, is supported in a non-contact state In the state in which the conveyance is held by the holding portion, and the conveyance portion is moved by the moving tool, and the conveyance is carried out in the state of being held in the state of non-42 201144195, in the conveyance direction. From the former secret position to the downstream _ keep the release position, the side moves the JL to rotate the four materials, and uses the aforementioned rotary worker: to make the other teacher turn the 'transfer posture of the protected material around the vertical axis The step of rotating the predetermined angle of the heart and the step of releasing the conveyance of the conveyance at the holding release position. The transfer method according to Item 7, wherein the holding portion has a plurality of joint action portions, and by swinging about the horizontal axis, the money can be switched to the former job. The part forming the engagement posture and the release posture in which the engagement of the end portion is released, and the step of switching the posture of the engagement operation portion in the holding position and the holding release position. 9. The transport method according to the seventh or the eighth aspect of the patent application, wherein the transporting of the (four) transporting wire is carried out while the transporting direction of the transporting object is carried out in the transport direction of the transporting device. The introduction position of the upstream side is the guide conveyance tool that is transported to the holding position, and the transfer method is set to sequentially transport a plurality of conveyed objects, and the moving tool is provided to move the holding portion to the holding position and escape a step of moving between the release positions and moving along the transport direction of the transport tool, and the step of moving back and forth includes: holding the holding portion holding the transfer material from the holding position to the holding position After the holding and releasing movement, the holding of the non-holding state of the uncontained material is returned to the holding position (fourth step), and the holding portion of the holding state is removed from the fixing holding release position. Moving and the period of the non-holding state of the non-holding state of the above-mentioned non-holding state is completed by the end of the return movement of the holding position ^The moving cooker transports the subsequent transport to the above steps. 10. The transport method according to the seventh aspect of the present invention, wherein the step of: shifting the conveyance posture of the conveyed object about the vertical axis by a predetermined angle during the conveyance of the conveyed object includes controlling the rotation tool and the movement The actuating of the protector causes the rotation of the holding portion and the movement of the holding portion from the holding position to start simultaneously or substantially simultaneously. (4) The transfer method according to the seventh aspect or the eighth aspect of the present invention, wherein the transporting posture of the transported object is carried out from the transport release direction in the transport direction of the transporter The delivery conveyance tool is formed in a delivery position on the downstream side of the holding release position, and the monthly transfer method is set to sequentially transport a plurality of conveyances, and includes the moving tool of the month 1 described above. a step of moving back and forth between the holding position and the holding release position in the conveying direction of the conveying tool, and the step of moving back and forth in the step 44 201144195 includes holding the holding portion holding the conveyed state from the holding position After the movement of the holding release position, the step of moving the holding portion that does not hold the non-holding state of the conveyed material back to the holding position is further included, wherein the holding portion in the holding state is placed in the state of the holding release position. After the conveyed material is held, the holding state of the subsequent conveyed material is maintained. The holding portion is moved to hold up during the release position, the holding portion is released in the transport position was conveyed away step of releasing from the holding. The transport method according to claim 7, wherein the step of rotating the transport object by a predetermined angle about the vertical axis during the transport of the transport object includes controlling the rotary tool and the moving tool The operation is a step of simultaneously or substantially simultaneously ending the rotation of the holding portion and the movement of the holding portion to the holding release position. 45