TWI491548B - Transport device and transport method - Google Patents

Description

Transport device and transport method Field of invention

The present invention relates to an air supply type support tool that is provided with a carrier that supports air in a non-contact state in a horizontal posture or a substantially horizontal posture, and that is in contact with the air supply type support tool. And a conveyance tool for imparting a propulsive force to the conveyance in the conveyance direction, and a posture adjustment tool for rotating the conveyance conveyed by the conveyance tool around the vertical axis to change the conveyance posture of the conveyed object, and A conveying device that controls the operation of the conveying tool and the posture adjusting tool, and a conveying method using the conveying device.

Background of the invention

In the above-described conveyance device, the conveyance device is supported by the air supply type support tool, and the conveyance device is conveyed by the propulsion force to give the conveyance force in the conveyance direction of the conveyance in the contact state. In the case of a glass substrate for FPD, such as a liquid crystal monitor, for example, a central portion in the left-right direction when the transport direction of the glass substrate is in the front-rear direction is supported by the air supply type supporting tool in a non-contact state. The propulsive force is applied to the left and right end portions when the conveyance direction is the front-rear direction to give a propulsive force, and is conveyed under the left and right center portions of the protective glass substrate that are productized.

In the case where the conveyance is conveyed between the processing apparatuses that perform processing such as processing on the conveyed object, the conveyance posture of the conveyed object with respect to the conveyance device in the processing device of the preceding program and the processing device of the subsequent program (also In other words, when the posture at the time of reception or delivery is different, there is a case where it is necessary to change the transport posture of the transported object transported by the transport device. In the conventional example of the conveyance device that can change the posture of the conveyed object, the conveyance device is provided with a posture adjustment tool that rotates the conveyance conveyed by the conveyance tool about the vertical axis to change the conveyance posture of the conveyed object (for example, Refer to Patent Document 1).

In the past, as disclosed in Patent Document 1, the rotation position at which the conveyance is rotated to change the conveyance posture can be set, and the suction portion that is adsorbed on the bottom surface of the conveyed object to hold the conveyed object can be arranged in the rotation position. The axis is free to rotate and freely moves up and down to form an attitude adjustment tool. In the state where the absorbing portion is lowered to the lowered position and the conveyed object is transported to the rotational position and stopped, the absorbing portion is raised to the raised position, and the absorbing portion is sucked and held by the absorbing portion, and in this state, The suction portion is rotated by a predetermined angle around the longitudinal axis, thereby rotating the conveyed object to change the conveyance posture. When the rotation of the conveyed material is completed, the suction and holding of the absorbing portion is released, and the absorbing portion is lowered to the lowered position, and the conveyance of the conveyed object is resumed.

Prior technical literature Patent literature

[Patent Document 1] JP-A-2005-145651

In the past, since the conveyance is stopped at a certain rotation position in the conveyance direction, the suction portion is sucked and held and rotated to change the posture. Therefore, if the rotation speed of the suction portion is accelerated, the posture adjustment is shortened. When the rotation speed is accelerated and decelerated, the inertia torque generated at the center of rotation of the conveyance becomes larger than the suction holding force of the absorbing portion, and the retention due to the conveyance of the absorbing portion is uncontrollable. The rotation of the conveyed object. Therefore, it is necessary to rotate the absorbing portion at a low speed, and it takes time to change the posture of the conveyed object. In addition, when the conveyance is rotated by the posture adjustment tool, the conveyance stops at the rotation position, and the movement of the conveyed object by the conveyance tool in the conveyance direction is stagnated. As described above, when the posture adjustment tool is provided in such a manner that the posture of the conveyed object can be changed, there is a problem that the conveying ability of the conveying device is lowered.

The present invention has been made in view of the above circumstances, and it is an object of the invention to provide a conveying apparatus capable of changing the posture of a conveyed object and having a high conveying capability.

In order to achieve the object, the conveying apparatus of the present invention is provided with a blower type supporting tool that supports the conveyed object in a non-contact state in a horizontal posture or a substantially horizontal posture by supplying air to the lower surface of the conveyed object, and The conveyance of the conveyance supported by the air supply type support tool is given to the conveyance tool of the tool in the conveyance direction, and the conveyance conveyed by the conveyance tool is rotated about the vertical axis to change the conveyance posture of the conveyed object. In the posture adjustment tool and the conveyance device that controls the operation of the conveyance tool and the posture adjustment tool, the posture adjustment tool is configured to include a plurality of conveyances supported in a non-contact state in a plan view. The end portion is formed with a holding portion for holding the conveyed material freely, a rotary tool for rotating the holding portion about the vertical axis, and a moving tool for moving the holding portion in the conveying direction; and the retaining portion is used for the holding position. The conveyance in a state of being supported in a non-contact state is held, and the aforementioned moving tool is utilized While the holding portion is moved and the conveyed material in a state of being supported in a non-contact state is transported from the holding position to the holding-releasing position on the downstream side in the conveyance direction, the moving portion is moved by the moving tool. The rotation tool rotates the holding portion to rotate the conveyance posture of the conveyed object about the vertical axis by a predetermined angle, and releases the conveyance at the holding release position, and the control tool is configured to hold the holding portion. Actuation, movement of the moving tool, and rotation of the rotating tool are controlled.

With such a configuration, the conveyance tool is controlled by the control tool, and the conveyance is conveyed in the conveyance direction by the propulsive force of the propelling force imparting tool in a state where the air supply type support tool is supported in a non-contact state. The conveyance device includes an attitude adjustment tool including a rotation tool that holds the conveyance portion of the conveyance by a plurality of end portions of the conveyed object in a plan view, and rotates the holding portion about the vertical axis. A moving tool that moves the holding portion in the conveying direction. By controlling the operation of the posture adjustment tool, the control tool holds the conveyance by holding the plurality of ends of the conveyance in the plan view at the holding position, and holds the conveyance by the holding portion, and uses the rotary tool and the moving tool. The holding portion that holds the conveyance while being engaged rotates while moving, and the conveyance posture of the conveyed object can be rotated by a predetermined angle around the vertical axis.

In this way, by holding the plurality of end portions of the conveyed object in a plan view, the holding portion of the conveyed object is rotated and held, and the held conveyed object can be rotated about the vertical axis. Therefore, even if the holding portion rotates. It is also difficult to remove the conveyed material from the holding portion, and the conveyed object can be rotated at a high speed while being held by the holding portion. Therefore, the posture change of the conveyed object can be performed in a short time.

Further, since the control tool controls the rotary tool and the moving tool to move the holding portion in the conveying direction of the rotating edge, the conveyed object is held by the holding portion at the holding position, and is moved in the conveying direction while rotating, and is held in the releasing position. The retention of the holding unit will be released. In other words, the movement in the transport direction by the transport tool does not stagnate while the conveyance posture of the transport object is changed, and the transported object moves in the transport direction while the transport posture is changed. The conveying capacity of the device is high.

In this way, a transport device that can change the posture of the transported object and has a high transport capability is obtained.

In the embodiment of the transport apparatus of the present invention, the holding portion includes an engagement posture that can be joined to the end portion of the conveyance by swinging about the horizontal axis, and a release posture in which the engagement of the end portion is released. The plurality of engagement portions that are freely switchable between the engagement positions are preferably set such that the conveyance is held once the engagement posture is formed, and the conveyance is released when the release posture is formed, and the control tool should be set to The posture switching operation of the engagement action portion is controlled in the holding position and the holding release position.

According to this configuration, the plurality of engagement portions that are joined to each other at a plurality of end portions in the plan view are swung around the horizontal axis, and the posture is switched to the engagement posture and the release posture, and the posture can be executed. The movement of the conveyance and release of the conveyance. In this case, since the posture of the plurality of engagement portions that change only a part of the holding portion is completed, the large-scale operation of the entire lift holding portion or the like is not performed, and the conveyance can be executed in a short time with a simple configuration. Keep and release the hold. Therefore, the miniaturization of the posture adjustment tool can be achieved, and the holding and releasing of the conveyance performed by the holding portion can be completed in a relatively short time. For example, when the conveyance and the release of the conveyance by the holding unit are performed while the conveyance is stopped, the stop time of the holding position and the holding release position can be extremely shortened, and the reduction of the conveyance ability can be suppressed.

In the embodiment of the conveying apparatus of the present invention, the conveying tool is set to sequentially move a plurality of conveyed objects, and the moving tool is set such that the holding portion is transported along the holding position and the holding release position. The conveyance direction of the tool is moved back and forth, and the conveyance of the conveyance conveyance is carried out while maintaining the conveyance posture of the conveyance in the conveyance direction of the conveyance tool from the introduction position on the upstream side of the holding position to the holding position. The control tool is configured to repeatedly control the operation of the posture adjusting tool to move the holding unit from the holding position to the holding release position after the holding state of the conveyed object is held. The holding portion in the non-holding state is moved back to the holding position to repeatedly control the operation of the motion pattern changing tool, and is preferably set to control the operation of the introduction conveyance tool so as to allow the holding portion in the holding state. Starting to move from the aforementioned holding position to the aforementioned holding release position After, to the non-holding portion in a state moved to the holding position until the end of the period of return, the subsequent transfer material is conveyed to the holding position.

In this configuration, the introduction and transport tool for transporting the transported object while maintaining the transport position of the transported object in the transport direction of the transport tool is provided in the transport position of the transfer tool. When the holding portion in the holding state in which the conveyed object is held is moved from the holding position to the holding release position, the holding portion in the non-holding state in which the conveyed object is not held is moved back to the holding position, and can be conveyed by introduction. The tool first transports the subsequent conveyed material to the holding position.

In other words, when the plurality of conveyed objects are sequentially transported, the holding portion moves from the holding position to the holding release position on the downstream side while holding the preceding conveyed object, and then returns to the holding position again without holding the conveyed object. In the meantime, the conveyance tool is conveyed to the holding position by the introduction conveyance tool. Therefore, when the holding portion returns to the holding position in the non-holding state, the conveyance of the next holding object can be made ready in the holding position. .

In this way, the transfer conveyance is carried out by the introduction conveyance tool from the introduction position to the holding position, and the conveyance of the conveyed object by the posture adjustment tool from the holding position to the holding release position can adjust the posture of the conveyed object and can be effectively performed. Transfer.

In an embodiment of the conveying apparatus of the present invention, the control tool is preferably configured to control the operation of the rotating tool and the moving tool to simultaneously or substantially rotate the rotation of the holding portion and the movement of the holding portion from the holding position. Start at the same time.

With such a configuration, since the movement of the holding portion from the holding position is started, the rotation of the holding portion starts simultaneously or substantially simultaneously. Therefore, when the holding portion moves back and is in the holding position, the conveyed object has been transported to the conveying tool. When the position is held, the conveyance can be held immediately and the conveyance posture of the conveyed object can be started. Therefore, the distance by which the holding portion moves in the conveying direction can be extremely shortened until the rotation of the conveyed material is started. Therefore, the posture adjusting tool can be made small in the moving direction of the holding portion.

In the embodiment of the conveying apparatus of the present invention, the conveying tool is configured to sequentially convey a plurality of conveyed objects, and the moving tool is configured to transport the holding portion along the holding position and the holding release position. The conveyance direction of the tool is moved back and forth, and the conveyance posture of the conveyed object is maintained in the conveyance direction of the conveyance tool from the conveyance release position to the discharge position on the downstream side of the conveyance release position. The control conveyance tool is configured to repeatedly control the operation of the posture adjustment tool so that the holding portion in the holding state in which the conveyed object is held is moved from the holding position to the holding release position. Further, the holding portion in the non-holding state in which the conveyed material is not held is moved back to the holding position, and is preferably set to control the operation of the lead-out conveying tool so that the holding portion in the holding state is in the above-described holding release After the position of the conveyed object is released, it is kept Holding portions of the following conveying the object is moved to the holding state during the releasing position until the holding is released from the conveyance position is released by the holding portion of the conveyed objects.

With such a configuration, the delivery/transfer tool that transports the transported object while maintaining the transport posture of the transported object in the transport direction of the transport tool is provided in the transport position from the hold release position to the downstream of the hold release position. When the holding portion is released in the state in which the holding portion is held in the holding release position, and the holding portion that holds the subsequent conveyed object moves to the holding release position, the delivery conveyance tool can be first released from the holding release position. The conveyance which was carried out by the holding part is carried away.

In other words, when the plurality of conveyed objects are sequentially transported, the holding portion releases the preceding transported material at the holding release position, and then returns to the hold release position while maintaining the next next transported object. When the conveyance tool transports the previous conveyance to the delivery position, when the holding portion returns to the release release position, the conveyance that has been previously released can be prepared in advance from the hold release position, and the release release position becomes available. .

In this way, it is possible to adjust the posture of the conveyed object while being transported by the posture adjustment tool from the holding position to the holding release position, and to transfer the conveyed material separately from the holding release position to the lead-out position. Transfer.

In the embodiment of the conveying apparatus of the present invention, the control tool is preferably configured to control the rotation of the rotating tool and the moving tool so as to simultaneously rotate the holding portion and the movement of the holding portion to the holding release position. Or roughly at the same time.

With such a configuration, the rotation of the holding portion is completed at the same time as or substantially at the same time as the movement from the holding portion to the holding release position. Therefore, the conveyance from the holding release position to the delivery position is carried out by the delivery conveyance tool, and the holding portion is held. After moving to the hold release position, the conveyance can be immediately released at the hold release position and moved back to the holding position where the subsequent conveyance is to be held. Therefore, after the rotation of the conveyed object is completed, the distance in which the holding portion moves in the conveying direction can be extremely shortened, so that the posture adjusting tool can be made small in the moving direction of the holding portion.

Further, the present invention includes a method corresponding to the above configuration, and in the method, an action and an effect corresponding to the above configuration can be expected.

In other words, according to the method of the present invention, the air supply type supporting tool that supports the conveyance in a horizontal posture or a substantially horizontal posture in a non-contact state by providing air supplied to the lower surface of the conveyed object, and the air supply type The conveyance tool that supports the conveyance force in the conveyance direction is given to the conveyance tool of the tool, and the conveyance tool conveyed by the conveyance tool is rotated around the vertical axis to adjust the posture adjustment tool of the conveyance posture of the conveyed object, and a control tool that controls the operation of the transport tool and the posture adjustment tool, and the posture adjustment tool includes a plurality of end portions in a plan view of the transport object supported in a non-contact state, thereby facilitating the holding of the transport object. And a rotating tool for moving the holding portion around the vertical axis and a conveying method of the moving device for moving the holding portion in the conveying direction, wherein the holding portion is supported by the holding portion in a non-contact state The step of holding the conveyed material in the state and the use of the aforementioned moving tool to protect the aforementioned When the moving portion is transported in the non-contact state, the transported object is transported in the transporting direction to the holding release position on the downstream side of the holding position, and the moving portion is moved by the moving tool. The rotary tool rotates the holding portion to rotate the conveyance posture of the held conveyed object about the vertical axis by a predetermined angle, and the step of releasing the conveyed object at the holding release position.

In the embodiment of the present invention, the holding portion is provided with an engagement posture that can be joined to the end portion of the conveyed object by swinging about the horizontal axis, and the engagement of the end portion is released. Preferably, the plurality of engagement portions that are freely switchable between the postures include a step of switching the posture of the engagement action portion between the holding position and the holding release position.

In the embodiment of the present invention, the conveyance is conveyed in the conveyance direction of the conveyance tool while maintaining the conveyance posture of the conveyed object from the introduction position set to the upstream side of the holding position to the holding position. In the introduction conveyance tool, the conveyance method is set to sequentially move a plurality of conveyed articles, and the moving tool moves the holding portion back and forth along the conveyance direction of the conveyance tool between the holding position and the holding release position. In the step of moving back and forth, the holding portion in the holding state in which the conveyed object is held is moved from the holding position to the holding release position, and then the holding portion in the non-holding state in which the conveyed object is not held is moved back. In the step of the holding position, after the holding portion in the holding state starts moving from the holding position to the holding release position, the period from when the holding portion in the non-holding state is returned to the holding position is preferably included. The subsequent conveyance tool is transported to the aforementioned insurance by the introduction and transfer tool Step position.

In the embodiment of the present invention, in the step of rotating the conveyance posture of the conveyed object about the vertical axis by a predetermined angle during the conveyance of the conveyed object, the step of controlling the operation of the rotary tool and the moving tool preferably includes the step of The rotation of the holding portion and the movement of the aforementioned holding portion from the aforementioned holding position start simultaneously or substantially simultaneously.

In the embodiment of the present invention, the conveyance is carried along the conveyance tool while maintaining the conveyance posture of the conveyed object from the holding release position to the lowering position on the downstream side of the holding release position. In the direction of transporting the transport tool, the transport method is configured to sequentially transport a plurality of transport objects, and the moving tool includes the transport unit to move back and forth between the holding position and the holding release position along the transport direction of the transport tool. In the step of moving, the step of moving back and forth includes moving the holding portion in the holding state in which the conveyed object is held from the holding position to the holding release position, and then performing the non-holding state in which the conveyed object is not held. In the step of moving the holding portion back to the holding position, it is preferable that the holding portion in the holding state releases the held conveyed object in a state of being positioned at the holding release position, and then holding the held state of the subsequent conveyed object. The period from when the lower holding portion moves to the above-described holding release position The step of conveying the position of the holding portion is released the transport of objects.

In the embodiment of the present invention, in the step of rotating the conveyance posture of the conveyed object about the vertical axis by a predetermined angle during the conveyance of the conveyed object, the step of controlling the operation of the rotary tool and the moving tool preferably includes the step of The rotation of the holding portion and the movement of the holding portion to the holding release position are simultaneously or substantially simultaneously.

Simple illustration

[Fig. 1] Overall plan view of the conveying device.

[Fig. 2] An overall side view of the conveying device.

[Fig. 3] An oblique view of the transport unit.

[Fig. 4] A longitudinal sectional view of the transport unit.

[Fig. 5] A longitudinal sectional view of the posture adjustment unit.

[Fig. 6] A pattern diagram of the attitude adjustment tool.

[Fig. 7] An enlarged view of the end of the rotating arm.

[Fig. 8] A side view of the introduction conveyor.

[Fig. 9] Control block diagram of the control device.

[Fig. 10] Flow chart of the control operation of the control device.

[Fig. 11 (a) to (c)] The transfer operation diagram of the transport device.

[12th (d) to (e)] The transfer operation diagram of the transport device.

[Fig. 13] An operation timing chart of each device in the transport device.

Form for implementing the invention

In the embodiment of the transport apparatus of the present invention, a transport apparatus 1 for transporting a glass substrate W for a liquid crystal display as a transport object will be described as an example with reference to the drawings.

As shown in Fig. 1 and Fig. 2, the conveying device 1 is disposed such that the upstream conveyor 2 and the downstream conveyor 3 are arranged in a line in the same direction in the respective conveying directions, and are disposed upstream. The posture adjusting unit 4 between the side conveyor 2 and the downstream side conveyor 3 is provided with a control device H for controlling the operation of the upstream side conveyor 2, the downstream side conveyor 3, and the posture adjusting unit 4.

In the conveyance device 1 , the direction from the upstream conveyor 2 to the downstream conveyor 3 in the first and second drawings is the conveyance direction, and the plurality of glass substrates W are horizontally or substantially horizontally arranged along the linear conveyance path. The glass substrate W is rotated to the vertical axis X1 in the middle of the linear transport path, and the transport posture of the glass substrate W is adjusted from the upstream side of the upstream conveyor 2 to the downstream. The downstream side attitude in the side conveyor 3. Here, the substantially horizontal posture refers to a posture in which, for example, 10 degrees or less is inclined from the horizontal direction. In this embodiment, the glass substrate W is rectangular in plan view, the crucible extending in one direction (short direction) is shorter than the crucible extending in the other direction (long direction), and the upstream side conveyor 2 is to glass the substrate W The short conveyance is carried in the posture in the conveyance direction, and the downstream conveyor 3 conveys the glass substrate W in the longitudinal direction in the conveyance direction.

The upstream conveyor 2, the downstream conveyor 3, and the attitude adjustment unit 4 constitute a transport tool D including the air supply type support tool 10 and the propulsion power supply tool 11. Moreover, the control apparatus H functions as a control tool which controls the operation of the conveyance tool D. Hereinafter, the upstream conveyor 2, the downstream conveyor 3, and the attitude adjusting unit 4 will be specifically described.

Each of the upstream conveyor 2 and the downstream conveyor 3 is disposed in a state in which a plurality of transport units 6 provided on the gantry 5 are arranged in the transport direction, and adjacent elements are connected to each other. The transport unit 6a of the upstream conveyor 2 and the transport unit 6b of the downstream conveyor 3 have the same basic configuration except for the length in the left-right direction (the direction perpendicular to the transport direction), so that the upstream conveyor 2 is configured. The transport unit 6a will be described as an example of the transport unit 6, and the description of the transport unit 6b constituting the downstream conveyor 3 will be omitted.

As shown in FIGS. 3 and 4, the transport unit 6a is configured such that the air supply type support tool 10a and the propulsion power applying tool 11a are provided in the casing 9 composed of the upper cover 7 and the support frame 8.

The air supply type support tool 10a of the transport unit 6a is configured to include a plurality of fan filter units 12 that supply clean air to the lower surface of the glass substrate W, and a plurality of vent holes 13a are mounted on the fan filter unit 12 for supply. The clean air 13 under the glass substrate W is subjected to a rectifying wind plate 13. The fan filter unit 12 is coupled and fixed to the support frame 8, and is a dust removing filter 14 for removing dust, and is disposed under the dust removing filter 14 to supply clean air to the lower surface of the glass substrate W through the dust removing filter 14. The blower fan 15 is integrally assembled. In this embodiment, the air supply supporting tool 10a is provided with a total of four fan filter units 12, two adjacently arranged in the front-rear direction, and two fan filter units 12 arranged in the left-right direction. In the posture adjusting unit 4, the downstream side of the air-conditioning panel 13 of the air-sending support tool 10a of the transport unit 6a adjacent to the upstream side is formed in the transport direction so that the introduction conveyor described later can protrude to the air-feeding support tool. The introduction conveyor of the upper part 10a uses the slit 13b.

The thrust force application tool 11a of the transport unit 6a is arranged side by side in the transport direction at both end portions in the left-right direction, and is attached to the lower surface of the left and right end portions of the glass substrate W that is supported in a non-contact state, and the glass substrate W is attached. A plurality of drive rollers 16 that give a propulsive force in the transport direction and a drive roller motor M1 that drives the drive rollers 16 to rotate (see FIG. 9).

The support frame 8 that supports the drive roller 16 and the housing 9 for driving the roller motor M1 has a bottom plate 18 that is provided with an air introduction port 17 into which the outside air is introduced, and is mounted in a fixed state along the conveyance direction on both sides of the support frame 8 in the left-right direction. The configuration of the pair of right and left storage frames 19. Further, the upper cover 7 is mounted across the storage frame 19 on both sides. Each of the pair of left and right storage frames 19 is provided with a transmission mechanism including a drive roller motor M1 and a drive shaft 20 that distributes the rotational drive force of the drive roller motor M1 to the plurality of drive rollers 16. In addition, the drive roller 16 is provided with a side surface that contacts the both end portions of the glass substrate W in the left-right direction, and blocks the large-diameter portion 16a in which the glass substrate W moves in the left-right direction.

Next, the configuration of the posture adjustment unit 4 will be described. As shown in FIG. 1, FIG. 2, and FIG. 5, the posture adjusting unit 4 is equipped with a blower type support tool 10b and a propulsive force in a casing 23 composed of an upper cover 21 and a support frame 22 which is generally rectangular in shape. The tool 11b is given.

The air supply type support tool 10b of the attitude adjustment unit 4 and the air supply type support tool 10a of the transport unit 6 have the same configuration. That is, as shown in Fig. 5, a plurality of fan filter units 12 for supplying clean air to the lower surface of the glass substrate W are provided, and a plurality of vent holes 13a are formed and supported on the fan filter unit 12, and supplied thereto. The clean air below the glass substrate W is subjected to a rectifying wind plate 13. The fan filter unit 12 is coupled and fixed to the support frame 22, and is a dust removing filter 14 for removing dust, and is disposed under the dust removing filter 14 to electrically supply clean air to the lower surface of the glass substrate W through the dust removing filter 14. The fan 15 is assembled and integrated.

In the air supply type support tool 10b of the attitude adjustment unit 4, a plurality of fan filter units 12 supported by the support frame 22 are placed and placed in the adjacent state in the front-rear direction, but the number of the left and right directions is from the upstream side to the downstream side. It is two, three, two, and the direction of transportation is different. The two fan filter units 12 arranged at the upstream end are identical in size and posture to the two fan filter units 12 arranged at the downstream end, and the size and posture of the fan filter units 12 are in the middle of the transport direction. The three fan filter units 12 differ in size and posture. In addition, the introduction conveyor narrow slit 13c (see FIG. 1) is formed in the upstream side portion of the air-conditioning panel 13 in the air-sending support tool 10b of the posture adjustment unit 4, so that the introduction conveyor 29, which will be described later, can be protruded to the air supply type. The support tool 10b is further above. The introduction conveyor narrow slit 13c is connected to the posture adjustment unit 4 at the upstream side and the introduction conveyor narrow slit 13b of the air-conditioning panel 13 formed in the air-feeding support tool 10a of the adjacent conveyance unit 6a.

The posture adjustment unit 4 includes an attitude adjustment tool 24 that rotates the glass substrate W about the vertical axis X1, and the propulsion force application tool 11b of the posture adjustment unit 4 also serves as the posture adjustment tool 24.

As shown in FIG. 2, FIG. 5 and FIG. 6, the posture adjusting tool 24 includes a rotating arm 25 as a plurality of ends of the glass substrate W supported in a non-contact state with respect to the air-supplying supporting tool 10b in a plan view. The holding portion that is joined to hold the glass substrate W freely, and the rotating portion 26 is a rotary tool that rotates the rotating arm 25 about the vertical axis X1, and the sliding portion 27 moves the rotating arm 25 in the conveying direction. Mobile tool.

As shown in Fig. 5, Fig. 6, and Fig. 7, the swivel arm 25 is disposed above the height of the glass substrate W supported by the blower type support tool 10b in a non-contact state, and is equipped at both ends thereof. The pair of nip portions 28 are joined to each other at a pair of end portions of the glass substrate W in a plan view by the swinging about the horizontal axis, and the engagement posture at which the joining of the end portions is released is released. A plurality of joint action portions are freely switched between the postures. When the pair of nip portions 28 are in the joined posture, the glass substrate W is held, and when the detachment posture is formed, the glass substrate W is released. In addition, although the detailed description is abbreviate|omitted, the clamping motor M2 which drives the attitude which switches the pair of crimping parts 28 is the inside of the both ends of the rotating arm 25 (refer FIG. 9).

The rotating arm 25 is formed of a long-length hollow element corresponding to the short side length of the glass substrate W which is rectangular in plan view, and the pair of clamping portions 28 provided at both ends are joined to the left and right sides of the glass substrate W, respectively. The glass substrate W is held in a manner of a substantially central portion of the direction. Each of the pair of nip portions 28 includes two abutting pieces 28a and 28b arranged in the direction of the horizontal axis Y1, and the two central portions of the long sides of the glass substrate W are formed in two places by the two contact pieces 28a and 28b. The pair of clamp portions 28 are in the engaged posture, and the relative rotation of the glass substrate W with respect to the rotary arm 25 is restricted. Further, an elastic member such as polyurethane rubber is provided on the abutting surface of the abutting piece 28a‧28b of the pair of nip portions 28, and the glass substrate W and the pair of nip portions 28 can be elastically contacted.

The rotation unit 26 includes a rotation motor M3 that drives the rotation arm 25 to rotate in one direction and the opposite direction (see FIG. 9), and detects rotation of the rotation position of the rotation arm 25 as the rotation drive amount of the rotation motor M3. The rotary encoder RE1 for detecting the rotational position of the position detecting tool (refer to Fig. 9).

The slide portion 27 is provided with a guide rail 27a provided in the transport direction in a state in which a plurality of places are supported by the pair of front and rear support frames 22a provided in the support frame 22, and is provided to be guided by the guide rail 27a to make the glass base W a slide block 27b that is located between the retracted limit position of the holding position P3 (refer to FIG. 11(b)) and the forward limit position where the glass substrate W is located at the holding release position P4 (refer to FIG. 12(d)) The drive slider 27b advances from the upstream to the downstream in the conveyance direction, and drives the movement motor M4 that retreats from the downstream to the upstream in the conveyance direction (see FIG. 9). The method of transmitting the driving force of the moving motor M4 to the slider 27b can be constructed by a conventional technique. For example, the slider 27b can be fixed to a member that is screwed to the screw shaft that is rotated by the movement motor M4. In another example, the moving motor M4 may be indirectly connected to the shaft center of one pulley disposed at one end region of the guide rail 27a directly or via a gear, and the freely rotatable pulley may be disposed at the other end region of the guide rail 27a, and the endless belt may be wound. Between the two pulleys, the slider 27b is fixed to one place of the endless belt. Further, at the front and rear end portions of the guide rail 27a, the holding position detecting sensor S3 (see FIG. 9) of the slider 27b for detecting the backward limit position is provided, and the holding releasing position of the slider 27b for detecting the forward limit position is provided. The sensor S4 for detection (refer to Fig. 9).

At the holding position P3, the control device H changes the pair of clamping portions 28 of the rotating arm 25 from the releasing posture to the holding posture, whereby the rotating arm 25 holds the glass substrate W. Further, at the holding release position P4, the control device H changes the pair of clamping portions 28 of the rotating arm 25 from the holding posture to the releasing posture, whereby the rotating arm 25 releases the glass substrate W. That is, the control device H is set to control the posture switching operation of the pair of nip portions 28 at the holding position P3 and the holding release position P4.

In the state in which the pair of nip portions 28 are switched to the engagement posture in which the glass substrate W is joined, the posture adjustment tool 24 rotates the rotation arm 25 about the vertical axis X1 by the rotation unit 26, and uses the sliding portion 27 to The rotating portion 26 moves along the guide rail 27a in the conveyance direction, and the glass substrate W is rotated in the conveyance direction while rotating the glass substrate W around the vertical axis X1 while the glass substrate W is supported by the air supply type supporting tool 10b. The force is carried in the transport direction.

In this manner, the posture adjustment unit 4 includes the attitude adjustment tool 24 that also uses the propulsion power application tool 11b. In addition to the posture adjustment function of the glass substrate W, the attitude adjustment member 4 also has a function of bringing the glass substrate W into contact and giving a propulsive force in the transport direction. The moving direction of the vertical axis of rotation X1 of the rotating arm 25 in the conveying direction caused by the posture adjusting unit 4 coincides with the conveying direction of the upstream conveyor 1 and the downstream conveyor 2 .

In the conveyance device 1, as shown in FIG. 1, FIG. 4, FIG. 5, and FIG. 11, an introduction conveyor 29 is provided, and the glass substrate W is set from the conveyance posture while maintaining the glass substrate W in the conveyance direction. The introduction conveyance tool is conveyed to the holding position P3 at the introduction position P2 on the upstream side of the holding position P3. The attitude adjustment unit 4 is provided with a pair of right and left stoppers 40 that block the end portion on the downstream side of the glass substrate W conveyed by the introduction conveyor 29.

As shown in Fig. 1, the posture adjusting unit 4 has two gaps formed between the three fan filter units 12 arranged in the left-right direction at the intermediate position in the transport direction, and a pair of stoppers 40 are disposed in each of the gaps. One. The pair of stoppers 40 are disposed so as to be rotatable in one direction and the reverse direction by the stopper raising/lowering motor M9 (refer to FIG. 9), and can be freely switched to the abutment and conveyed conveyor 29 to be carried and held. At the two positions on the downstream side of the transport of the glass substrate W at the position P3, while maintaining the glass substrate W in the upstream posture, the glass substrate W is restricted from moving toward the downstream side in the transport direction, and the glass substrate W is allowed to pass. The lowering position of the downstream side of the transport direction.

In the conveyance device 1, as shown in FIG. 1, the delivery conveyor 30 is provided as the conveyance posture of the glass substrate W in the conveyance direction, and is conveyed from the holding release position P4 to the conveyance position. The delivery transport tool until the release position P5 on the downstream side of the release position P4 is held. Since the introduction conveyor 29 and the delivery conveyor 30 are basically the same in arrangement positions, the introduction conveyor 29 will be specifically described as an example.

As shown in FIG. 1 , FIG. 4 , FIG. 5 , and FIG. 8 , the introduction conveyor 29 has a center in the left-right direction of the glass substrate W in the upstream side posture (the downstream side posture in the case where the conveyor 30 is led out). The introduction side belt type propulsion force applying portion 31 forms a contact support. As shown in FIGS. 4 and 5, the introduction side belt type propulsion power application unit 31 is provided with an elongated gap G formed in the front-rear direction formed at the intermediate position in the left-right direction by arranging the two fan filter units 12 in the left-right direction. in.

As shown in Fig. 8, the side belt type propelling force applying tool 31 is driven by the driving drive motor 32 driven by the introduction conveyor driving motor M5 on the upstream side in the conveying direction, and is positioned on the upstream side in the conveying direction. The freely rotatable driven wheel 33 and the winding of the driving wheel 32 and the driven wheel 33, contact the timing belt 34 supporting the lower surface of the glass substrate W and giving the propulsive force, and supporting the timing belt from the inner peripheral side The inner support wheel 35 of the transport path portion of 34 and the support frame 36 supporting these members are constructed. Further, as shown in Fig. 8, the support frame 36 is provided with a pair of front and rear introduction conveyor lifting/lowering motors M6 for performing the lifting operation of the introduction side belt type propulsive force applying portion 31, and each of the introduction conveyor lifting motors M6 The output gear 37 meshes with a rack 38 formed on the side of the fan filter unit 12.

The pair of introduction conveyor lifting/lowering motors M6 are driven to rotate in one direction and in the opposite direction in a synchronized state, whereby the introduction side belt type propulsive force giving portion 31 is set to the outer peripheral surface of the path portion on the upper side of the timing belt 34. The upper portion of the glass substrate W is freely accessible to the upper portion of the upstream side of the upstream side conveyor 2 and the posture adjusting unit 4, and the outer peripheral surface of the upper side of the timing belt 34 is located at the upper position of the upper surface of the glass substrate W. The position lower than the wind deflector 13 provided in the upstream conveyor 2 and the attitude adjusting unit 4 is freely raised and lowered without being in contact with the lowering position of the lower surface of the glass substrate W. When the belt type propulsive force applying portion 31 moves up and down, the path portion on the upper side of the timing belt 34 passes through the slit 13b.13c of the wind plate 13 provided in the upstream conveyor 2 and the posture adjusting unit 4 in a continuous state.

The lead conveyor 30 includes a lead conveyor drive motor M7 and a pair of lead conveyor lift motors M8 (see Fig. 9). When the lead conveyor driving motor M7 is driven to rotate, the timing belt of the side belt type propelling force imparting tool 39 is wound, and the leading conveyor lifting motor M8 is driven to rotate in the forward and reverse directions in a synchronized state. The lead-side thrust force imparting tool 39 is lifted and actuated.

Next, the control structure of the conveying device 1 will be described. As shown in Fig. 9, in the control device H for controlling the operation of the conveying device 1, each of the electric power provided in the upstream conveyor 2, the introduction conveyor 29, the posture adjusting unit 4, the delivery conveyor 30, and the downstream conveyor 3 The motor, fan filter unit 12 and various sensor types are connected.

In the control device H, the preparation position in the transport unit 6a at the most downstream of the upstream conveyor 2 is used to connect the plurality of drive roller motors M1 and the plurality of fan filter units 12 in the library sensor S1 and each transport unit 6a. . The preparation position of the upstream conveyor 2 is used in the library sensor S1 to detect that the glass substrate W has been transported to the preparation position P1 set to the downstream end of the upstream conveyor 2 in the transport direction (see Fig. 11(a)). The optical sensor of the situation.

Similarly, in the control device H, the completion position in the most upstream conveying unit 6b of the downstream conveyor 3 is used in the library sensor S2, the plurality of driving roller motors M1 and the plurality of fan filter units 12 in each of the conveying units 6b. Connected. The completion position of the downstream conveyor 3 is used in the library sensor S2 to detect that the glass substrate W has been transported to the completion position P6 of the downstream end of the downstream conveyor 3 in the transport direction (refer to Fig. 12(e)). The optical sensor of the situation.

In the control device H, the pair of jig motor M2, the rotation motor M3, the movement motor M4, the rotational position detecting rotary encoder RE1, and the pair of stopper lifting motors in the posture adjusting tool 24 of the posture adjusting unit 4 M9 and a plurality of fan filter units 12 are connected.

In the control device H, the introduction conveyor drive motor M5 and the pair of introduction conveyor lift motors M6 that are introduced into the conveyor 29 are connected. Similarly, in the control device H, the lead-out conveyor drive motor M7 that leads to the conveyor 30 and the pair of lead-out conveyor lift motors M8 are connected.

The control device H controls the holding operation of the rotating arm 25, the movement of the sliding portion 27, and the rotating operation of the rotating portion 26 to hold the glass substrate W in the non-contact state with the rotating arm 25 in the holding position. In the case where the sliding portion 27 is moved by the sliding portion 27 and the glass substrate W is conveyed in the non-contact state, the glass substrate W is transported from the holding position P3 to the holding-release position P4 on the downstream side in the conveyance direction. When the rotating arm 25 is moved, the rotating arm 25 is rotated by the rotating portion 26, and the conveyance posture of the held glass substrate W is rotated by 90 degrees about the vertical axis X1, and the holding of the glass substrate W is released at the holding release position P4.

In order to move the rotating arm 25 in the holding state in which the glass substrate W is held from the holding position P3 to the holding release position P4, the rotating arm 25 in the non-holding state in which the glass substrate W is not held is moved back to the holding position P3. The control device H repeatedly controls the holding operation of the rotating arm 25, the movement of the sliding portion 27, and the rotation of the rotating portion 26.

The control device H controls the operations of the rotating portion 26 and the sliding portion 27 so that the rotation of the rotating arm 25 in the held state and the movement of the rotating arm 25 from the holding position P3 in the holding state are started simultaneously or substantially simultaneously, and at the same time, in order to maintain After the movement of the rotating arm 25 in the state from the holding position P3 to the holding release position P4 is started, the subsequent glass substrate W is carried and held until the return movement of the rotating arm 25 to the holding position P3 in the non-holding state is completed. Position P3 controls the actuation of the introduction conveyor 29.

The control device H controls the operations of the rotating portion 26 and the sliding portion 27 so that the rotation of the rotating arm 25 in the held state and the movement of the rotating arm 25 to the holding release position P4 in the holding state are simultaneously or substantially simultaneously, and at the same time, When the rotating arm 25 releases the held glass substrate W in a state where the holding arm is held in the holding release position P4, the rotating arm 25 is moved to the holding release position P4 while the holding glass substrate W is held, and is released from the holding. The position P4 conveys the glass substrate W released by the rotating arm 25, and controls the operation of the lead conveyor 30. Here, the term generally means that the time difference is, for example, within 1 second, and more desirably means that the time difference is within 0.5 second.

The control operation of the control device H will be described based on the flowchart of Fig. 10 and the operation diagrams of Figs. 11 and 12. The flow chart of Fig. 10 shows a period in which the glass substrate W conveyed to the preparation position P1 by the upstream conveyor 2 is conveyed while being conveyed in the conveyance direction from the preparation position P1 to the completion position P6. The operations of the upstream conveyor 2, the downstream conveyor 3, the attitude adjustment unit 4, the introduction conveyor 29, and the delivery conveyor 30.

Further, among the step groups shown in the left and right rows of FIG. 10, the steps in the left column indicate the operations of the upstream conveyor 2, the downstream conveyor 3, the introduction conveyor 29, and the delivery conveyor 30, and the center column. The group of steps indicates the operation of the posture adjustment tool 24, and the group of steps in the right column indicates the operation of the stopper 40.

First, in step #1 to step #4, if the preparation position is used in the library sensor S1 to detect that the glass substrate W has been transported to the preparation position P1, the transport unit 6a which is the most downstream of the upstream conveyor 2 will be located at the preparation position. The glass substrate W of P1 is conveyed to the introduction position P2 in the upstream side attitude (refer FIG. 11 (a)). In the step #2, the introduction conveyor 29 that has been in the lowered position starts to rise, and in step #3, the introduction conveyor 29 starts the conveyance operation. Thereby, the glass substrate W conveyed by the upstream side conveyor 2 to the introduction position P2 can be conveyed by the introduction conveyor 29 immediately to the holding position P3. Further, the transfer operation may be started before the introduction conveyor 29 is switched to the raised position.

The glass substrate W conveyed to the holding position P3 is guided by the roller 16 disposed at the downstream end of the upstream conveyor 2 while the left and right end portions of the upstream side portion are guided by the introduction conveyor 29 in the left-right direction. Since the center portion is oriented in the direction of the conveyance, it is conveyed in a state in which the posture is maintained in the upstream posture until it is conveyed to the holding position P3. Further, since two places on the downstream side of the glass substrate W are blocked by the pair of left and right stoppers 40 provided in the posture adjusting unit 4, the glass substrate W is positioned at the holding position P3 (see FIG. 11(b)).

After the conveyance operation of the introduction conveyor 29 is stopped in step #5, the introduction conveyor 29 is switched to the lowering position in step #6, and the clamp portion 28 is switched from the release posture to the engagement posture in step #7, in step #8. A pair of stops 40 are switched to the lowered position.

At step #9, the posture change of the glass substrate W driven by the posture adjustment tool 24 and the movement in the transport direction are started. That is, the rotation of the rotating arm 25 about the longitudinal axis X1 in the positive direction (rightward direction) and the movement in the downstream direction of the conveying direction start simultaneously. By this, the nip portion 2 is joined to the respective long sides, and the glass substrate W that is held by the rotating arm 25 is rotated about the vertical axis X1, and is changed from the upstream side posture to the downstream side posture while being in the transport direction. It is moved to the hold release position P4 (refer to Fig. 11 (c)).

When the glass substrate W approaches or reaches the holding release position P4, the delivery conveyor 30 is switched from the lowered position to the raised position in step #10, and the delivery conveyor 30 is ready. Then, at step #11, the posture change of the glass substrate W driven by the posture adjusting tool 24 and the movement in the transport direction are completed. That is, the rotation arm 25 rotates in the forward direction (rightward direction) of the vertical axis X1 and the movement to the downstream side in the conveyance direction, or substantially simultaneously. Here, substantially simultaneously means that the time difference is, for example, within 1 second, and more suitably means that the time difference is within 0.5 seconds.

The rotation position detecting rotary encoder RE1, the holding position detecting sensor S3, and the holding release position detecting sensor S4 for detecting the rotational position of the rotating arm 25 are based on the rotation control of the rotating arm 25 and the stop control of the movement operation. The detection information is used for feedback control.

In this manner, the rotational actuation and the movement of the rotary arm 25 are simultaneously or substantially simultaneously activated, simultaneously or substantially simultaneously. That is, the rotational speed and the moving speed of the rotating arm 25 are formed, and the time required for the rotating portion 26 to rotate the rotating arm 25 by 90 degrees and the sliding portion 27 to move the rotating arm 25 from the holding position P3 to the holding release position P4 The time required is almost the same. Here, the term "substantially, almost uniformly" means that the time difference is within, for example, 1 second, and more suitably means that the time difference is within 0.5 seconds.

When the rotation operation and the movement of the swing arm 25 are stopped, the clamp portion 28 is switched from the engagement posture to the release posture in step #12, and the glass substrate W is released at the holding release position P4. Then, the conveyance operation of the take-up conveyor 30 at the rising position in step #13 is started, and the glass substrate W is conveyed to the lead-out position P5 from the hold release position P4 while maintaining the downstream side posture (see FIG. 12(d)). As a result, the glass substrate W conveyed by the posture adjusting tool 24 to the holding release position P4 is immediately conveyed by the take-up conveyor 30 toward the lead-out position P5. Furthermore, the transfer operation may be started before the export conveyor 30 is switched to the raised position.

When the squeezing unit 28 is switched to the release position in the step #12, the transporting glass substrate W is transported from the holding release position P4 to the lead-out position P5 by the take-up conveyor 30, and is always transported until the hold release position P4. In order to convey the subsequent glass substrate W, the rotating arm 25 of the target glass substrate W retreats to the holding position P3 in steps #15 to #16, and rotates in the reverse direction until the rotational position for the holding position P3, and is in the holding position. P3 returns to a state in which the subsequent glass substrate W can be held (refer to Fig. 12 (d) (e)).

In addition, the pair of stoppers 40 that position the glass substrate W at the holding position P3, and the pair of the descending positions of the transfer target glass substrate W in the step #9 to step #10 are advanced and forwardly rotated by the rotary arm 25 After the stopper 40 is above, it will return to the raised position in step #14. By this, before the rotation of the rotary arm 25 to the holding position P3 and the end of the reverse rotation, the glass substrate W of the next subsequent conveyance target can be conveyed from the preparation position P1, and the upstream side posture is used in advance at the introduction position P3 ( Refer to Figure 12 (e)).

The glass substrate W conveyed to the lead-out position P5 is guided by the roller 16 disposed at the upstream end of the downstream conveyor 3 while the left and right end portions of the downstream side portion are guided by the take-up conveyor 30 in the left-right direction. Since the center portion is oriented in the direction of the conveyance, it is conveyed while the posture is maintained in the downstream posture (see Fig. 12(d)).

When the glass substrate W is transported to the lead-out position P5, the transport operation of the lead conveyor 30 is stopped in step #18, and the lead conveyor 30 is switched to the down position in step #19. The glass substrate W that has been transported to the lead-out position P5 is transported to the completion position P6 by the downstream conveyor 3 in the downstream side in steps #17 to #20 (see FIG. 12(e)).

By the control operation of the control device H described above, the glass conveyor W can be transported from the introduction position P2 to the delivery position P5 by the introduction conveyor 29, the posture adjustment unit 4, and the delivery conveyor 30. The preceding glass substrate W also conveys the subsequent glass substrate W. Specifically, as shown in Fig. 13, the rotating arm 25 of the posture adjusting unit 4 holds the glass substrate W to be transported at the holding position P3 and moves from the holding position P3, and the subsequent glass is moved by the upstream conveyor 2 The substrate W is transported from the preparation position P1 to the introduction position P2 until the rotary arm 25 returns to the holding position P3, and the subsequent glass substrate W can be transported to the holding position P3 by the introduction conveyor 29.

As a result, as shown in the timing chart of FIG. 13, the time required for moving the one glass substrate W from the preparation position P1 to the completion position P6 can be shortened from the start position for starting the glass substrate W. The conveyance of P1 is a program operation time (takt time) until the next glass substrate W is started to be transported from the preparation position P1. For example, in the timing chart of Fig. 13, when 1 grid is 2 seconds, the transport time required for one glass substrate W is 33 seconds, and the tact time is about 17 seconds. In this way, when the plurality of glass substrates W are changed in posture from the preparation position P1, the transportation efficiency when sequentially transported in the transport direction is improved.

[Other implementations]

(1) Regarding the stop control of the movement of the swing arm 25, the holding position detecting sensor S3 and the holding release position detecting sensor S4 are provided on the front and rear end portions of the guide rail 27a, and the sensing is performed based on the sensing. The detection information of the device is a feedback control method. However, the present invention is not limited thereto, and the detection of the movement amount of the slide portion 27 from the movement start position (for example, the reverse limit position) may be performed to detect the rotation direction of the rotary arm 25 in the conveyance direction. The position or the moving position detecting tool at the position of the guide rail 27a performs feedback control based on the detected information of the moving position detecting tool. Further, feedback control of the movement of the rotating arm 25 may be performed based on the detection information of the rotational position detecting rotary encoder RE1. In this case, the rotating portion 26 and the slider 27b are connected in linkage, and the sliding portion 27 drives the movement of the rotating arm 25 in conjunction with the rotation of the rotating arm 25 driven by the rotating portion 26.

(2) The stop control of the conveyance operation of the introduction conveyor 29 can be controlled by the feedforward control in the step #3 of Fig. 10, so that the conveyance operation of the introduction conveyor 29 is stopped after the set time elapses from the start, and the feed can be fed back. The holding position at which the conveyance of the detection glass substrate W is set at the holding position P3 is controlled by the library sensor so that the conveyance operation is stopped based on the detection information of the library sensor based on the holding position.

(3) In the above embodiment, the glass conveyor W is transported from the introduction position P2 to the holding position P3 by the introduction conveyor 29, but the extension conveyor may be measured upstream without providing the introduction conveyor 29. The movement range of the conveyance direction of 25 is set to a position corresponding to the introduction position P2 in the above-described embodiment, and the operation of the rotation unit 26, the movement unit 27, and the clamp portion 28 is controlled by the control device H so as to The glass substrate W is held at a position corresponding to the introduction position P2 in the above-described embodiment, and then the rotation of the rotating arm 25 is started after moving the set amount by the downstream side in the conveying direction without rotating the rotating arm 25.

(4) In the above-described embodiment, the glass conveyor W is transported from the holding release position P4 to the lead-out position P5 by the lead conveyor 30. However, the lead conveyor 30 may not be provided and the rotation may be extended on the downstream side. The movement range of the arm 25 in the conveyance direction is set at a position corresponding to the derivation position P5 in the above-described embodiment, and the control unit H controls the operation of the rotation unit 26, the movement unit 27, and the nip portion 28, In order to move the rotating arm 25 holding the glass substrate W from the position corresponding to the holding release position P4 in the above-described embodiment, the set amount is moved downstream of the transport direction without rotation, and is equivalent to the above-described embodiment. The position at the position P5 is released to release the holding of the glass substrate W.

(5) In the above-described embodiment, the embodiment is characterized in that the introduction conveyance tool and the delivery conveyance tool are configured by a belt conveyor that can be freely raised and lowered. However, the present invention is not limited thereto, and the adsorption portion that can be freely adsorbed may be lifted and lowered. The configuration of the bottom surface of the conveyance is freely movable in the conveyance direction. In addition, it is also possible to form a structure in which the protrusions that form the joint on the upstream end portion of the bottom surface of the conveyance are attached to the bottom of the conveyance.

In addition, a configuration may be adopted in which a protruding belt that protrudes from the upstream end portion of the bottom surface of the conveyance is provided in a state in which the outer side of the winding of the endless belt is protruded. If the winding path of the protruding belt is disposed lower than the bottom surface of the conveyance supported by the air supply supporting tool in a non-contact state, and when the protrusion is located at the upper side winding portion, the position is highlighted to The height of the bottom surface of the conveyed object supported by the air supply supporting tool in a non-contact state is higher, and the protruding belt is not required to be freely movable. In this case, when a plurality of projections are provided, the interval between the adjacent projections in the winding direction in the winding direction may be set to be longer than the conveyance distance of the introduction conveyance tool.

(6) In the above-described embodiment, the introduction conveyance tool and the delivery conveyance tool are disposed below the conveyed conveyance. Alternatively, the introduction conveyance tool and the delivery conveyance tool may be disposed in the same manner. Above the transported goods.

(7) In the above-described embodiment, the upstream conveyor 2 is configured to convey the glass substrate W in a short direction along the conveyance direction, and the downstream conveyor 3 has a longitudinal direction along the conveyance direction. It is conveyed in the opposite attitude.

(8) In the above-described embodiment, the holding portion is provided with a joining action portion formed by two short sides facing each other in a rectangular shape in a plan view at both end portions, and is short along the conveyed object. The posture maintains the state of the conveyed object, but the specific configuration of the holding portion is not limited thereto. For example, a design including three or more engagement portions may be provided. As an example, it is also possible to provide four engagement working portions that respectively join the four sides of the conveyance that is rectangular in plan view.

(9) In the above-described embodiment, the plurality of engagement portions of the holding portion are exemplified by being capable of freely switching the posture by swinging about the horizontal axis, and forming a joint engagement posture with the end portion of the conveyed object. And the release posture in which the engagement of the end portions is released, but the plurality of engagement action portions of the holding portion may be freely switchable so that the height of the lower end portion is in non-contact with the air supply type support tool. The lower side of the conveyance of the state-supported conveyance has a joint height at which the end portion of the conveyed object is joined, and the height of the lower end portion is higher than the upper surface of the conveyed object supported by the blow-up type support tool in a non-contact state. In the upper state, the design of the release height of the joint at the end of the conveyance is released.

(10) In the above-described embodiment, the conveyance posture of the conveyed object is rotated by a predetermined angle by 90 degrees around the vertical axis to adjust the conveyance posture. However, the angle of rotation of the conveyed object can be appropriately changed.

(11) In the above-described embodiment, the conveying direction of the conveying device is a straight line. For example, the conveying direction may be the conveying portion on the upstream side and the conveying portion on the downstream side of the posture adjusting tool. different. In this case, the moving tool in the posture adjusting tool may be set such that the holding portion moves in either of the upstream conveying direction or the downstream conveying direction.

(12) In the above embodiment, the air supply type support tool exemplifies the vertical and horizontal arrangement of a plurality of fan filter units, but the air supply type support tool may be assembled without using a fan filter unit. For example, the air supply passage that supplies the clean air from the outside may be connected to the transport device, and the air supply support tool may supply the clean air supplied from the external supply passage to the lower surface of the transport object.

(13) In the above-described embodiment, the thrust imparting tool 11a of the transport unit 6 in the upstream conveyor 2 and the downstream conveyor 3 is exemplified as a design having a plurality of guide rollers, but the propulsion power is given to the tool. 11a may be various changes such as a design including a conveyor belt.

(14) In the above-described embodiment, the entire posture adjustment tool and the conveyance tool are arranged so as to be in an overlapping position in a plan view. However, the present invention is not limited thereto, and may be arranged, for example, to adjust the posture. A part of the moving tool in the tool is placed on the lateral side of the conveying tool or the like, and a part of the posture adjusting tool is positioned at a position away from the existence area of the conveying tool in a plan view. With such an arrangement, the height of the position where the posture adjustment tool is placed in the transport device can be lowered.

Specifically, the posture adjusting tool 24 may be configured such that the guide rail 27a in the above-described embodiment is disposed on the lateral side portion of the posture adjusting unit 4, from the guide rail 27a to the inside of the posture adjusting unit 4, along the horizontal plane and The conveyance direction is perpendicular to the direction in which the conveyance direction intersects, and the slide arm in the elongated state is slidably moved in the conveyance direction, and the rotation arm 25 is rotatably provided around the longitudinal axis at the front end portion of the slide arm.

In addition, the posture adjusting tool 24 may be formed by providing a rocking arm that is swingable around the longitudinal axis in the state of the posture adjusting unit 4 in a normal view, and is in the swinging radial direction and the outer portion of the swinging arm ( For example, the front end portion is configured to freely rotate the rotating arm 25 about the longitudinal axis (or freely rotatable about the longitudinal axis and free to move along the swing arm). In this case, the control tool may be controlled by the swinging motion of the swing arm (or the swinging motion of the swing arm and the movement of the swing arm 25 along the swing arm).

1. . . Transport device

2. . . Upstream conveyor

3. . . Downstream conveyor

4. . . Attitude adjustment component

5. . . shelf

6. . . Transport unit

6a. . . Transport unit

6b. . . Transport unit

8. . . Support frame

9. . . case

10. . . Air supply support tool

10a. . . Air supply support tool

10b. . . Air supply support tool

11. . . Propulsion tool

11a. . . Propulsion tool

11b. . . Propulsion tool

12. . . Fan filter unit

13. . . Wind plate

13a. . . Vent

13b. . . Long slit

13c. . . Long slit

14. . . Dust filter

15. . . Electric air supply fan

16. . . Drive wheel

16a. . . Large diameter department

17. . . Air inlet

18. . . Bottom plate

19. . . Storage box

twenty one. . . Upper cover

twenty two. . . Support frame

22a. . . Support frame

twenty three. . . case

twenty four. . . Gesture adjustment tool

25. . . Rotating arm

26. . . Rotating part

27. . . Sliding portion

27a. . . guide

27b. . . Sliding block

28. . . a pair of clamping parts

28a, 28b. . . Abutment piece

29. . . Import conveyor

30. . . Export conveyor

31. . . Introducing side belt type propulsion unit

32. . . Drive wheel

33. . . driven wheel

34. . . Timing belt

35. . . Inner support wheel

36. . . Support frame

37. . . Output gear

38. . . rack

39. . . Export side belt type propulsion tool

40. . . Pair of stops

D. . . Transport tool

H. . . Control device

M1. . . Drive roller motor

M2. . . Fixture motor

M3. . . Rotary motor

M4. . . Mobile motor

M5. . . Import conveyor drive motor

M6. . . Import conveyor lift motor

M7. . . Export conveyor drive motor

M8. . . Export conveyor lift motor

M9. . . Lifting motor

P1. . . Preparation location

P2. . . Import location

P3. . . Hold position

P4. . . Release position

RB1. . . Rotary encoder

S1. . . Library sensor

W. . . glass substrate

X1. . . Around the longitudinal axis

Y1. . . Horizontal axis

[Fig. 1] Overall plan view of the conveying device.

[Fig. 2] An overall side view of the conveying device.

[Fig. 3] An oblique view of the transport unit.

[Fig. 4] A longitudinal sectional view of the transport unit.

[Fig. 5] A longitudinal sectional view of the posture adjustment unit.

[Fig. 6] A pattern diagram of the attitude adjustment tool.

[Fig. 7] An enlarged view of the end of the rotating arm.

[Fig. 8] A side view of the introduction conveyor.

[Fig. 9] Control block diagram of the control device.

[Fig. 10] Flow chart of the control operation of the control device.

[Fig. 11 (a) to (c)] The transfer operation diagram of the transport device.

[12th (d) to (e)] The transfer operation diagram of the transport device.

[Fig. 13] An operation timing chart of each device in the transport device.

1. . . Transport device

2. . . Upstream conveyor

3. . . Downstream conveyor

4. . . Attitude adjustment component

6. . . Transport unit

6a, 6b. . . Transport unit

10a, 10b. . . Air supply support tool

11,11a,11b. . . Propulsion tool

12. . . Fan filter unit

13b, 13c. . . Long slit

twenty two. . . Support frame

22a. . . Support frame

twenty three. . . case

twenty four. . . Gesture adjustment tool

29. . . Import conveyor

30. . . Export conveyor

31. . . Introducing side belt type propulsion unit

39. . . Export side belt type propulsion tool

40. . . Pair of stops

D. . . Transport tool

H. . . Control device

W. . . glass substrate

Claims (12)

A conveyance device is provided with an air supply type support tool that supplies air to the lower surface of the conveyed object and supports the conveyed object in a horizontal posture or a substantially horizontal posture in a non-contact state, and a conveyer supported by the air supply type support tool a conveyance tool that gives a propulsive force in the conveyance direction to the conveyance tool of the tool, and an attitude adjustment tool that rotates the conveyance conveyed by the conveyance tool around the vertical axis to change the conveyance posture of the conveyed object, and controls the conveyance tool and the posture In the conveyance device of the control tool for adjusting the operation of the tool, the posture adjustment tool is configured to hold the conveyance in a non-contact state in a plurality of end portions in a plan view. And a rotating tool that rotates the holding portion about a longitudinal axis and a moving tool that moves the holding portion in a conveying direction, wherein the control tool is set to move the holding portion and move the moving tool. And rotating the rotating tool to control the holding portion The holding position is held by the conveyance in a state in which the holding position is supported in a non-contact state, and the conveyance unit is moved by the moving tool to support the conveyed object in a non-contact state in the conveyance direction from the holding position. While the holding unit is moved by the moving tool, the holding unit is rotated by the rotating tool, and the conveyance posture of the held conveyed object is rotated by a predetermined angle around the vertical axis. The holding of the conveyed object is released at the holding release position. The conveying device according to the first aspect of the invention, wherein the holding portion has a plurality of joining action portions, and the posture can be switched to swing around the horizontal axis, and the end portion of the conveyed object can be joined. In the engagement posture and the release posture in which the engagement of the end portion is released, the control tool is set to control the posture switching operation of the engagement action portion at the holding position and the holding release position. The transporting device according to the first or second aspect of the invention, wherein the transporting tool is configured to sequentially transport a plurality of transporting objects, and the moving tool is set such that the holding portion is in the holding position and the holding is released Between the positions, the transporting direction of the transport tool is moved back and forth, and the transport position of the transport object is maintained while the transport position is maintained from the lead-in position set on the upstream side of the hold position to the hold position. In the conveyance direction conveyance conveyance conveyance tool, the control tool is set to repeatedly control the operation of the posture adjustment tool so that the holding portion holding the conveyance state of the conveyed object moves from the holding position to the holding release position, Further, the holding portion that does not hold the conveyed material in the non-holding state is moved back to the holding position, and is set to control the operation of the introduction conveyance tool so as to be moved from the holding position to the holding portion from the holding state. After the movement of the aforementioned release position is started, to the foregoing Holding portion to the holding state during the return movement until the end of the holding position, the subsequent transfer material is conveyed to the holding position. The conveying device according to claim 3, wherein the controller is configured to control an operation of the rotating tool and the moving tool to move the holding portion and the movement of the holding portion from the holding position At the same time or at about the same time. The transport apparatus according to the first or second aspect of the invention, wherein the transport tool is configured to sequentially transport a plurality of transport objects, and the moving tool is set such that the holding portion is in the holding position and the holding release position. In the transport direction of the transport tool, the conveyance direction of the transport tool is maintained, and the transport object is transported from the hold release position to the hold release position while maintaining the transport posture of the transport object. Further, the control conveyance tool is configured to repeatedly control the operation of the posture adjustment tool so that the holding portion holding the conveyance state of the conveyed object is moved from the holding position to the holding release position. After the movement, the holding portion that does not hold the conveyed material in the non-holding state is moved back to the holding position, and is set to control the operation of the lead-out conveying tool so that the holding portion in the holding state is located in the foregoing Release the held transport while keeping the position released After a holding portion holding the subsequent transport of the objects to move the holding state during the releasing position until the holding, the position will be released from the holding portion releasing the conveyed objects conveyed away. The transfer device according to claim 5, wherein the control tool is configured to control an operation of the rotary tool and the moving tool to move the holding portion and move the holding portion to the holding release position. At the same time or at the same time. A conveyance method is provided by providing an air supply type support tool that supports a conveyed object in a non-contact state in a horizontal posture or a substantially horizontal posture with air supplied to the lower surface of the conveyed object, and is supported by the air supply type support tool. The conveyance tool that gives the propulsive force of the propelling force in the conveyance direction to the conveyance tool of the tool, and the posture adjustment tool that rotates the conveyance conveyed by the conveyance tool around the vertical axis to change the conveyance posture of the conveyed object, and controls the conveyance tool And a control tool for actuating the posture adjustment tool, wherein the posture adjustment tool includes a plurality of end portions that are supported in a non-contact state in a normal view, so that the conveyance can be kept freely maintained. And a transfer tool for moving the rotating tool that rotates the holding portion around the vertical axis and a moving tool that moves the holding portion in the conveying direction, and includes a state in which the holding position is supported in a non-contact state. a step of holding the lower conveyance by the holding portion, and using the aforementioned moving tool to make the aforementioned When the holding portion is moved and the conveyed material in a state of being supported in a non-contact state is transported from the holding position to the holding release position on the downstream side in the conveyance direction, the holding portion is moved by the moving tool The rotary tool rotates the holding portion to rotate the conveyance posture of the conveyed object about the vertical axis by a predetermined angle, and the step of releasing the conveyance at the holding release position. The transport method according to the seventh aspect of the invention, wherein the holding portion has a plurality of joint action portions, and the posture of the transfer shaft is arbitrarily switched, and the end portion of the transport material is joined to each other. The engagement posture and the release posture in which the engagement of the end portion is released are included in the step of switching the posture of the engagement action portion in the holding position and the holding release position. The transport method according to the seventh or eighth aspect of the invention, wherein the transporting posture of the transporting object is maintained, and the transporting object is set upstream of the transporting position in the transporting direction of the transporting tool. The introduction position of the side is introduced into the transfer tool until the holding position, and the transfer method is set to sequentially transport a plurality of conveyed objects, and the moving tool includes the holding unit at the holding position and the holding release position. And the step of moving back and forth along the transport direction of the transport tool, and the step of moving back and forth includes moving the holding portion that holds the transported state from the holding position to the holding release position, and then The step of moving the holding portion that does not hold the conveyance in the non-holding state to return to the holding position, and including the movement of the holding portion in the holding state from the holding position to the holding release position, to the non-holding state During the period from the end of the return movement of the holding portion to the holding position, Introducing conveying means conveying step subsequent to the holding position thereof to the conveyed. The transport method according to the seventh aspect of the invention, wherein the step of rotating the transport object by a predetermined angle about the longitudinal axis during the transport of the transport object includes controlling the operation of the rotary tool and the moving tool And a step of simultaneously or substantially simultaneously starting the rotation of the holding portion and the movement of the holding portion from the holding position. The transport method according to the seventh aspect or the eighth aspect of the present invention, wherein the conveyance posture of the conveyance object is maintained, and the conveyance is conveyed from the holding release position in the conveyance direction of the conveyance tool. The delivery transport tool that holds the release position further downstream of the release position, and the transport method is configured to sequentially transport a plurality of transport objects, and includes the moving tool to move the holding portion between the holding position and the holding release position a step of moving back and forth along the transport direction of the transport tool, and the step of moving back and forth includes moving the holding portion that holds the transported state from the holding position to the holding release position, and then not maintaining The step of moving the holding portion in the non-holding state of the conveyed material to the holding position further includes, after the holding portion in the holding state is released from the holding release position, and then holding the held object The holding portion of the aforementioned holding state of the subsequent conveyance moves to the aforementioned retention solution Period up position, the holding portion is released in the transport position was conveyed away step of releasing from the holding. The transport method according to the seventh aspect of the invention, wherein the step of rotating the transport object by a predetermined angle about the longitudinal axis during the transport of the transport object includes controlling the operation of the rotary tool and the moving tool The step of rotating the holding portion and the movement of the holding portion to the holding release position simultaneously or substantially simultaneously.