JP2011219238A - Transporting apparatus - Google Patents

Transporting apparatus Download PDF

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JP2011219238A
JP2011219238A JP2010091539A JP2010091539A JP2011219238A JP 2011219238 A JP2011219238 A JP 2011219238A JP 2010091539 A JP2010091539 A JP 2010091539A JP 2010091539 A JP2010091539 A JP 2010091539A JP 2011219238 A JP2011219238 A JP 2011219238A
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Prior art keywords
holding
posture
unit
transport
conveying
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JP5077718B2 (en
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Tatsuo Nakao
多通夫 中尾
Daisuke Ikeda
大介 池田
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Daifuku Co Ltd
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Daifuku Co Ltd
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Priority to JP2010091539A priority Critical patent/JP5077718B2/en
Priority to TW100109105A priority patent/TWI491548B/en
Priority to KR1020110029407A priority patent/KR101331106B1/en
Priority to CN201110100033.XA priority patent/CN102211712B/en
Publication of JP2011219238A publication Critical patent/JP2011219238A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/67787Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks with angular orientation of the workpieces

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a transporting apparatus which can change the attitude of an object to be transported, and yet has high transporting capacity.SOLUTION: In the transporting apparatus, a controlling means controls the holding operation of a holding part 25 in an attitude changing means 24, the moving operation of a moving means 27 and the rotating operation of a rotating means, the object W to be transported which is supported in a non-contact state is held by the holding part 25 at a holding position P3, and during the period of time when the holding part 25 is moved by the moving means 27 to thereby transport the object W to be transported which is supported in a non-contact state to a holding releasing position P4 downstream from the holding position P3 along the transporting direction, the holding part 25 is rotated by the rotating means while being moved by the moving means 27, consequently the transporting attitude of the object W to be transported is rotated at a prescribed angle around a vertical axis, and the holding of the object W to be transported is released at the holding releasing position P4.

Description

本発明は、搬送物の下面に向けて空気を供給して水平姿勢又は略水平姿勢で搬送物を非接触状態で支持する送風式支持手段及び前記送風式支持手段にて支持された搬送物に接触して搬送物に搬送方向の推進力を付与する推進力付与手段を備える搬送手段と、前記搬送手段にて搬送される搬送物を縦軸心周りに回転させて搬送物の搬送姿勢を変更する姿勢変更手段と、前記搬送手段及び前記姿勢変更手段の作動を制御する制御手段とが設けられた搬送装置に関する。   The present invention provides a blower-type support means for supplying air toward a lower surface of a conveyed product to support the conveyed product in a horizontal posture or a substantially horizontal posture in a non-contact state, and a conveyed product supported by the blower-type support device. The conveying means provided with a propelling force applying means for applying a propulsive force in the conveying direction to the conveyed object and the conveyed object conveyed by the conveying means are rotated around the vertical axis to change the conveying attitude of the conveyed object. The present invention relates to a transport apparatus provided with a posture changing means for controlling, a control means for controlling the operation of the transport means and the posture changing means.

上記搬送装置は、送風式支持手段にて搬送物を非接触状態に支持し、推進力付与手段にて搬送方向の推進力を接触状態で搬送物に付与して、搬送物を搬送するものである。搬送物として、例えば、液晶モニタ等のFPD用のガラス基板を搬送する場合には、ガラス基板の搬送方向を前後方向としたときの左右中央部分を送風式支持手段にて非接触状態で支持し、搬送方向を前後方向としたときの左右両端部に対して推進力付与手段を接触させて推進力を付与することで、ガラス基板における製品化される左右中央部分を保護しながら搬送するようになっている。   The transport device supports the transported object in a non-contact state by the blow type support means, and applies the propulsive force in the transport direction to the transported object in the contact state by the propelling force applying means to transport the transported object. is there. For example, when transporting a glass substrate for an FPD such as a liquid crystal monitor as a transported object, the left and right central portions when the transport direction of the glass substrate is the front-rear direction are supported in a non-contact state by a blower-type support means. In order to transport while protecting the right and left center part to be productized in the glass substrate by applying a propulsive force by contacting the propelling force applying means to the left and right ends when the transport direction is the front-rear direction It has become.

そして、搬送物に対する加工等の処理を行う処理装置間で搬送物を搬送する場合において、前工程の処理装置と後工程の処理装置とで、搬送装置に対する搬送物の授受姿勢が異なるときなどのように、搬送装置にて搬送される搬送物の搬送姿勢を変更する必要がある場合がある。このような搬送物の姿勢を変更できる搬送装置の従来例として、搬送装置で搬送手段にて搬送される搬送物を縦軸心周りに回転させて搬送物の搬送姿勢を変更する姿勢変更手段が設けられたものがある(例えば、特許文献1参照。)。   And when transporting a transported object between processing devices that perform processing such as processing on the transported object, when the processing posture of the transported product with respect to the transporting device is different between the processing device of the previous process and the processing device of the subsequent process, etc. Thus, it may be necessary to change the conveyance posture of the conveyed product conveyed by a conveying apparatus. As a conventional example of a transport apparatus that can change the posture of such a transported object, there is an attitude changing unit that changes the transport attitude of the transported object by rotating the transported object that is transported by the transporting device around the vertical axis. Some are provided (for example, refer to Patent Document 1).

従来では、特許文献1に記載されているように、搬送物を回転させて搬送姿勢を変更する回転位置が設定され、搬送物の底面に吸着して搬送物を保持する吸着部を回転位置において縦軸心周りに回転自在にかつ昇降自在に設けて姿勢変更手段を構成している。そして、吸着部を下降位置に下降させた状態で回転位置に搬送物を搬送させて停止させた後、吸着部を上昇位置に上昇させて吸着部にて搬送物を吸着保持させ、この状態で吸着部を縦軸心周りに設定角度回転させることで、搬送物を回転させて搬送姿勢を変更する。そして、搬送物の回転が完了した後、吸着部による吸着保持を解除するとともに、吸着部を下降位置に下降させてから搬送物の搬送を再開するようにしている。   Conventionally, as described in Patent Document 1, a rotation position for changing a conveyance posture by rotating a conveyance object is set, and an adsorption unit that adsorbs to the bottom surface of the conveyance object and holds the conveyance object is set at the rotation position. The posture changing means is configured to be rotatable about the vertical axis and to be movable up and down. Then, the transported object is transported to the rotation position with the suction part lowered to the lowered position and stopped, and then the suction part is raised to the ascending position and the transported object is sucked and held by the suction part. By rotating the suction unit around the vertical axis by a set angle, the transported object is rotated to change the transport posture. Then, after the rotation of the conveyed product is completed, the adsorption holding by the adsorption unit is released, and the conveyance of the conveyed item is resumed after the adsorption unit is lowered to the lowered position.

特開2005−145651号公報JP 2005-145651 A

従来では、搬送物を搬送方向で一定の回転位置に停止させた状態で吸着部にて吸着保持して回転させて姿勢を変更するので、姿勢変更に要する時間を短縮しようとして吸着部の回転速度を速くすると、回転速度の加速時及び減速時に搬送物の回転中心に生じる慣性トルクが吸着部の吸着保持力より大きくなって、吸着部による搬送物の保持が外れてしまい搬送物の回転を制御できなくなるおそれがある。そのため、吸着部を低速で回転させる必要があり、搬送物の姿勢変更に時間を要していた。また、姿勢変更手段により搬送物を回転させている間は、搬送物は回転位置に停止したままであるので、搬送手段による搬送物の搬送方向に沿う移動が滞ってしまう。このように、姿勢変更手段を設けて搬送物の姿勢を変更できるようにすると搬送装置としての搬送能力が低下するという問題があった。   Conventionally, the posture is changed by sucking and holding the picked-up part in a state where the conveyed product is stopped at a fixed rotational position in the carrying direction, and the posture is changed. When the rotation speed is increased, the inertia torque generated at the center of rotation of the conveyed product during acceleration and deceleration of the rotation speed becomes larger than the adsorption holding force of the adsorption unit, and the conveyance of the conveyance item by the adsorption unit is released and the rotation of the conveyance item is controlled. There is a risk that it will not be possible. Therefore, it is necessary to rotate the suction portion at a low speed, and it takes time to change the posture of the conveyed product. Further, while the conveyed product is being rotated by the posture changing means, the conveyed product remains stopped at the rotation position, and thus the movement along the conveying direction of the conveyed product by the conveying means is delayed. As described above, when the posture changing means is provided so that the posture of the conveyed product can be changed, there is a problem in that the conveyance capability as the conveyance device is lowered.

本発明は上記実情に鑑みて為されたものであって、その目的は、搬送物の姿勢を変更できるものでありながら、搬送能力の高い搬送装置を提供する点にある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a transport device having a high transport capability while being able to change the posture of the transport object.

この目的を達成するために、本発明に係る搬送装置の第1特徴構成は、搬送物の下面に向けて空気を供給して水平姿勢又は略水平姿勢で搬送物を非接触状態で支持する送風式支持手段及び前記送風式支持手段にて支持された搬送物に対して搬送方向の推進力を付与する推進力付与手段を備える搬送手段と、前記搬送手段にて搬送される搬送物を縦軸心周りに回転させて搬送物の搬送姿勢を変更する姿勢変更手段と、前記搬送手段及び前記姿勢変更手段の作動を制御する制御手段とが設けられた搬送装置において、
前記姿勢変更手段が、非接触状態で支持された搬送物の平面視での複数の端部に対して係合することにより搬送物を保持自在な保持部と、前記保持部を縦軸心周りに回転させる回転手段と、前記保持部を搬送方向に沿って移動させる移動手段とを備えて構成され、前記制御手段が、非接触状態で支持された状態の搬送物を保持位置において前記保持部により保持し、前記移動手段により前記保持部を移動させて搬送方向に沿って前記保持位置より下流側の保持解除位置まで非接触状態で支持された状態の搬送物を搬送する間に、前記移動手段により前記保持部を移動させながら前記回転手段により前記保持部を回転させて保持している搬送物の搬送姿勢を縦軸心周りに所定角度回転させ、前記保持解除位置にて搬送物の保持を解除するべく、前記保持部の保持作動、前記移動手段の移動作動、及び、前記回転手段の回転作動を制御するように構成されている点にある。
In order to achieve this object, the first characteristic configuration of the transport device according to the present invention is to supply air toward the lower surface of the transport object to support the transport object in a non-contact state in a horizontal posture or a substantially horizontal posture. A conveying means provided with a propulsive force applying means for applying a propulsive force in the conveying direction to a conveyed product supported by the air-type supporting means and the blower-type supporting means; In a transport apparatus provided with posture changing means for rotating around the center to change the transport posture of the conveyed product, and control means for controlling the operation of the transport means and the posture changing means,
The posture changing means engages with a plurality of ends in a plan view of the conveyed product supported in a non-contact state, and a holding unit capable of holding the conveyed product, and the holding unit around the vertical axis And a moving means for moving the holding portion along the conveying direction, and the control means holds the conveyed product in a non-contact state at the holding position. The movement unit moves the holding unit by the moving unit and moves the conveyance unit in a non-contact state from the holding position to the holding release position downstream from the holding position along the conveyance direction. Rotating the holding unit by the rotating unit while rotating the holding unit by the means, rotating the conveying posture of the conveyed item by a predetermined angle around the vertical axis, and holding the conveyed item at the holding release position. To cancel Holding operation of the serial holding portion, movement operation of said moving means, and, in that it is configured to control the rotation operation of the rotating means.

本特徴構成によれば、制御手段により搬送手段が制御されることで、搬送物は、送風式支持手段に非接触状態で支持された状態で推進力付与手段による推進力にて搬送方向に搬送される。搬送装置は姿勢変更手段を備えており、この姿勢変更手段は、搬送物の平面視での複数の端部に対して係合することにより搬送物を保持する保持部と、保持部を縦軸心周りに回転させる回転手段と、保持部を搬送方向に沿って移動させる移動手段とを備えている。そして、制御手段が姿勢変更手段の作動を制御することで、保持位置において搬送物の平面視での複数の端部に対して保持部を係合させることにより搬送物を保持部に保持させ、回転手段及び移動手段より、搬送物を係合保持している保持部を移動させながら回転させて、搬送物の搬送姿勢を縦軸心周りに所定角度回転させることができる。   According to this characteristic configuration, the transport means is controlled by the control means, so that the transported object is transported in the transport direction by the propulsive force of the propulsion force applying means while being supported in a non-contact state by the blower-type support means. Is done. The transport device includes posture changing means. The posture changing means has a holding unit that holds the conveyed product by engaging with a plurality of end portions in plan view of the conveyed product, and a vertical axis that holds the holding unit. Rotating means for rotating around the center and moving means for moving the holding part along the transport direction are provided. Then, by controlling the operation of the posture changing means by the control means, the holding object is held in the holding part by engaging the holding part with a plurality of ends in a plan view of the conveyed object, By rotating the holding unit that engages and holds the conveyed product, the conveying unit can rotate the conveying posture of the conveyed item by a predetermined angle around the vertical axis.

このように、搬送物の平面視での複数の端部に対して係合することにより搬送物を保持している保持部を回転することで保持された搬送物を縦軸心周りに回転させることができるので、保持部の回転速度を速くしても保持部から搬送物が外れ難く、保持部にて確実に保持した状態で搬送物を高速で回転させることができる。そのため、搬送物の姿勢変更を短時間で行うことができる。   In this way, by rotating the holding unit that holds the conveyed product by engaging with a plurality of ends in plan view of the conveyed product, the conveyed conveyed product is rotated about the vertical axis. Therefore, even if the rotation speed of the holding unit is increased, the conveyed product is hardly detached from the holding unit, and the conveyed product can be rotated at a high speed while being securely held by the holding unit. Therefore, the posture change of the conveyed product can be performed in a short time.

しかも、制御手段は、回転手段と移動手段を制御して、保持部を回転させながら搬送方向に沿って移動させるので、搬送物は、保持位置にて保持部に保持された後、回転しながら搬送方向に移動して、保持解除位置にて保持部による保持が解除されることになる。つまり、搬送物の搬送姿勢が変更される間も搬送手段による搬送方向での移動が滞ることがなく、搬送物は、搬送姿勢が変更されている間も搬送方向に沿って移動されることになるので、搬送装置としての搬送能力が高いものとなる。   In addition, since the control means controls the rotation means and the movement means to move the holding portion along the conveyance direction while rotating the holding portion, the conveyance object is rotated while being held by the holding portion at the holding position. Moving in the transport direction, the holding by the holding unit is released at the holding release position. In other words, the movement of the conveyance means in the conveyance direction is not delayed while the conveyance posture of the conveyance object is changed, and the conveyance object is moved along the conveyance direction even while the conveyance posture is changed. Therefore, the conveyance capability as a conveyance device becomes high.

このように、搬送物の姿勢を変更できるものでありながら、搬送能力の高い搬送装置を得るに至った。   As described above, a transport apparatus having a high transport capability can be obtained while the posture of the transported object can be changed.

本発明に係る搬送装置の第2特徴構成は、前記保持部が、前記搬送物の端部に対して係合する係合姿勢と前記端部に対する係合が解除される解除姿勢とに横軸心周りの揺動により姿勢切換自在な複数の係合作用部を備え、この係合作用部が前記係合姿勢になると搬送物を保持し、前記解除姿勢になると搬送物を解放するように構成され、前記制御手段が、前記保持位置及び前記保持解除位置において前記係合作用部の姿勢切換作動を制御するように構成されている点にある。   A second characteristic configuration of the transport device according to the present invention is such that the holding portion engages with an end posture of the transported object and a release posture in which the engagement with the end portion is released. Provided with a plurality of engaging action portions whose postures can be switched by swinging around the center, and configured to hold the conveyed product when the engaging action portion is in the engaging posture and release the conveyed material when the releasing posture is reached. The control means is configured to control a posture switching operation of the engaging action portion at the holding position and the holding release position.

本特徴構成によれば、搬送物の平面視での複数の端部に対して係合する複数の係合作用部を横軸心周りに揺動させることにより係合姿勢と解除姿勢とにその姿勢を切り換えることで、搬送物の保持と保持解除の動作を行うことができる。そのため、保持部の一部分である複数の係合作用部の姿勢を変更させるだけで済むので、保持部全体を昇降させる等の大掛かりな動作を伴うことなく、簡素な構成でかつ短時間で搬送物の保持及び保持解除を行うことができる。したがって、姿勢変更手段のコンパクト化を図ることができるとともに、保持部による搬送物の保持や保持解除を比較的短時間で完了させることができる。例えば、保持部による搬送物の保持や保持解除を、搬送物を停止させた状態で行う場合に、保持位置や保持解除位置での停止時間を極力短くでき、搬送能力の低下を抑制できる。   According to this characteristic configuration, the plurality of engaging action portions that are engaged with the plurality of end portions in plan view of the conveyed product are swung around the horizontal axis so that the engagement posture and the release posture are obtained. By switching the posture, the operation of holding and releasing the conveyed product can be performed. Therefore, it is only necessary to change the postures of the plurality of engaging action parts that are a part of the holding part. Can be held and released. Therefore, the posture changing means can be made compact, and the holding and release of the conveyed product by the holding unit can be completed in a relatively short time. For example, when holding or releasing the conveyed product by the holding unit is performed in a state where the conveyed product is stopped, the stop time at the holding position or the holding release position can be shortened as much as possible, and a decrease in conveying ability can be suppressed.

本発明に係る搬送装置の第3特徴構成は、前記搬送手段が、複数の搬送物を順次搬送するように構成され、前記移動手段が、前記保持部を前記保持位置と前記保持解除位置との間で前記搬送手段の搬送方向に沿って往復移動させるように構成され、前記保持位置よりも上流側に設定された導入位置から前記保持位置まで搬送物を前記搬送手段の搬送方向に沿って搬送物の搬送姿勢を維持しながら搬送する導入搬送手段が設けられ、前記制御手段が、搬送物を保持している保持状態の前記保持部を前記保持位置から前記保持解除位置へ移動させた後、搬送物を保持していない非保持状態の前記保持部を前記保持位置に復帰移動させるべく、前記姿勢変更手段の作動を繰り返し制御するように構成され、かつ、前記保持状態の保持部の前記保持位置から前記保持解除位置への移動を開始させた後、前記非保持状態の保持部の前記保持位置への復帰移動を終了させるまでに、後続する搬送物を前記保持位置に搬送するべく、前記導入搬送手段の作動を制御するように構成されている点にある。   A third characteristic configuration of the transport device according to the present invention is configured such that the transport unit sequentially transports a plurality of transport objects, and the moving unit moves the holding unit between the holding position and the holding release position. It is configured to reciprocate along the transport direction of the transport means, and transports the transported material from the introduction position set upstream of the holding position to the holding position along the transport direction of the transport means Introducing conveying means for conveying while maintaining the conveying posture of the object is provided, and after the control means moves the holding portion holding the conveyed object from the holding position to the holding release position, It is configured to repeatedly control the operation of the posture changing means so as to return the holding portion in a non-holding state that does not hold a conveyed product to the holding position, and the holding of the holding portion in the holding state. Place In order to transport the subsequent transported object to the holding position after starting the movement from the holding position to the holding release position and ending the return movement of the non-holding holding section to the holding position. It is in the point comprised so that the action | operation of a conveyance means may be controlled.

本特徴構成によれば、保持位置よりも上流側に設定された導入位置から保持位置まで搬送物を搬送手段の搬送方向に沿って搬送物の搬送姿勢を維持しながら搬送する導入搬送手段を備えることで、搬送物を保持している保持状態の保持部を保持位置から保持解除位置へ移動させ始めた後、搬送物を保持していない非保持状態の保持部を復帰移動させて保持位置に位置させるまでに、導入搬送手段により後続する搬送物を保持位置に搬送しておくことができる。   According to this characteristic configuration, the conveyance device is provided that conveys the conveyed product from the introduction position set upstream of the holding position to the holding position while maintaining the conveyance posture of the conveyed product along the conveyance direction of the conveyance unit. Thus, after starting to move the holding unit holding the conveyance object from the holding position to the holding release position, the holding unit not holding the conveyance object is moved back to the holding position. Until the position is reached, the subsequent transfer object can be transferred to the holding position by the introduction transfer means.

つまり、複数の搬送物を順次搬送する場合に、保持部が、先行する搬送物を保持した状態で保持位置から下流側の保持解除位置に移動した後、搬送物を保持していない状態で再び保持位置に戻ってくる間に、導入搬送手段により、後続する搬送物を保持位置に搬送しておくことで、保持部が非保持状態で保持位置に戻ってきたときに、次の保持対象の搬送物が保持位置に準備されている状態にすることができる。   That is, when a plurality of transported objects are sequentially transported, the holding unit moves from the holding position to the downstream holding release position while holding the preceding transported object, and then again with the transported object not held. While returning to the holding position, the subsequent transfer object is transferred to the holding position by the introduction transfer means, so that when the holding unit returns to the holding position in the non-holding state, the next holding target It can be in the state where the conveyed product is prepared in the holding position.

このように、導入位置から保持位置の間は導入搬送手段にて搬送して、保持位置から保持解除位置までは姿勢変更手段にて搬送するようにして搬送物を分担して搬送することで、搬送物を姿勢変更させながら効率よく搬送することができる。   In this way, by transporting the transported object from the introduction position to the holding position by the introduction transport unit, and by transporting the transported object from the holding position to the holding release position by the posture changing unit, The conveyed product can be efficiently conveyed while changing the posture.

本発明に係る搬送装置の第4特徴構成は、前記制御手段が、前記保持部の回転と前記保持部の前記保持位置からの移動とを同時又は略同時に開始させるように、前記回転手段及び前記移動手段の作動を制御するように構成されている点にある。   A fourth characteristic configuration of the transport device according to the present invention is such that the control unit starts the rotation of the holding unit and the movement of the holding unit from the holding position simultaneously or substantially simultaneously. In the point which is comprised so that the action | operation of a moving means may be controlled.

本特徴構成によれば、保持部が保持位置からの移動を開始すると同時に又は略同時に保持部の回転が開始されるので、保持部が復帰移動して保持位置に位置したときに導入搬送手段によりすでに保持位置に搬送物が搬送されていれば、直ちに搬送物を保持して搬送物の搬送姿勢を回転させ始めることができる。したがって、搬送物の回転開始までに保持体が搬送方向に沿って移動する距離を極力短くできるので、姿勢変更手段を保持体の移動方向でコンパクトに構成できる。   According to this characteristic configuration, since the rotation of the holding unit starts at the same time as or substantially simultaneously with the movement of the holding unit from the holding position, when the holding unit returns and moves to the holding position, If the conveyed product has already been conveyed to the holding position, it is possible to immediately hold the conveyed product and start to rotate the conveyed posture of the conveyed product. Accordingly, since the distance that the holding body moves along the conveyance direction before the rotation of the conveyed product can be shortened as much as possible, the posture changing means can be configured compactly in the movement direction of the holding body.

本発明に係る搬送装置の第5特徴構成は、前記搬送手段が、複数の搬送物を順次搬送するように構成され、前記移動手段が、前記保持部を前記保持位置と前記保持解除位置との間で前記搬送手段の搬送方向に沿って往復移動させるように構成され、前記保持解除位置から前記保持解除位置よりも下流側に設定された導出位置まで搬送物を前記搬送手段の搬送方向に沿って搬送物の搬送姿勢を維持しながら搬送する導出搬送手段が設けられ、前記制御手段が、搬送物を保持している保持状態の前記保持部を前記保持位置から前記保持解除位置へ移動させた後、搬送物を保持していない非保持状態の前記保持部を前記保持位置に復帰移動させるべく、前記姿勢変更手段の作動を繰り返し制御するように構成され、かつ、前記保持状態の保持部が前記保持解除位置に位置した状態で保持している搬送物を解放させた後、後続の搬送物を保持している前記保持状態の保持部を前記保持解除位置に移動させるまでに、前記保持部から解放された搬送物を前記保持解除位置から搬送するべく、前記導出搬送手段の作動を制御するように構成されている点にある。   A fifth characteristic configuration of the transport device according to the present invention is configured such that the transport unit sequentially transports a plurality of transported objects, and the moving unit moves the holding unit between the holding position and the holding release position. The carriage is configured to reciprocate along the conveyance direction of the conveyance means between the conveyance release direction of the conveyance means from the hold release position to a derivation position set downstream of the hold release position. A derivation transport unit that transports the transported object while maintaining the transport posture of the transported object, and the control unit moves the holding unit holding the transported object from the holding position to the holding release position. After that, it is configured to repeatedly control the operation of the posture changing means so that the non-holding state holding unit that does not hold the conveyed product is returned to the holding position, and the holding unit in the holding state includes in front After releasing the conveyed product held in the state of being held at the holding release position, the holding unit holding the subsequent conveyed product is moved from the holding unit until the holding unit in the holding state is moved to the holding release position. In order to transport the released transported object from the holding release position, the operation of the lead-out transporting means is controlled.

本特徴構成によれば、保持解除位置から保持解除位置よりも下流側に設定された導出位置まで搬送物を搬送手段の搬送方向に沿って搬送物の搬送姿勢を維持しながら搬送する導出搬送手段を備えることで、保持部が保持解除位置に位置した状態で保持している搬送物を解放した後、後続の搬送物を保持している保持部を保持解除位置に移動させるまでに、導出搬送手段により保持部から解放された搬送物を保持解除位置から搬送しておくことができる。   According to this characteristic configuration, the derivation transport unit that transports the transported object from the holding release position to the derivation position set downstream of the holding release position while maintaining the transport posture of the transported object along the transport direction of the transport unit. By releasing the transported object that is held in the state where the holding unit is positioned at the holding release position, and after moving the holding unit that holds the subsequent transported object to the holding release position, The conveyed product released from the holding unit by the means can be conveyed from the holding release position.

つまり、複数の搬送物を順次搬送する場合に、保持部が、先行する搬送物を保持解除位置で開放した後、後続する次の搬送物を保持した状態で再び保持解除位置に戻ってくる間に、導出搬送手段により、先行する搬送物を導出位置に搬送しておくことで、保持部が保持解除位置に戻ってきたときに、先に開放した搬送物が保持解除位置から導出されて保持解除位置が空き状態となるように準備しておくことができる。   That is, when a plurality of transported objects are sequentially transported, the holding unit releases the preceding transported object at the holding release position and then returns to the holding release position again while holding the subsequent transported object. In addition, since the preceding transported object is transported to the deriving position by the deriving and transporting means, when the holding unit returns to the holding release position, the previously released transported object is led out from the holding release position and held. It can be prepared so that the release position becomes empty.

このように、保持位置から保持解除位置の間は姿勢変更手段にて搬送して、保持解除位置から導出位置までは導出搬送手段にて搬送するようにして搬送物を分担して搬送することで、搬送物を姿勢変更させながら効率よく搬送することができる。   In this way, the conveyance object is divided and conveyed so that it is conveyed by the posture changing means between the holding position and the holding release position, and conveyed from the holding release position to the derivation position by the derivation conveyance means. The transported object can be efficiently transported while changing its posture.

本発明に係る搬送装置の第6特徴構成は、前記制御手段が、前記保持部の回転と前記保持部の前記保持解除位置までの移動とを同時又は略同時に終了させるように、前記回転手段及び前記移動手段の作動を制御するように構成されている点にある。   A sixth characteristic configuration of the transport device according to the present invention is such that the control unit ends the rotation of the holding unit and the movement of the holding unit to the holding release position simultaneously or substantially simultaneously. In the point which is comprised so that the action | operation of the said moving means may be controlled.

本特徴構成によれば、保持部が保持解除位置までの移動を終了すると同時に又は略同時に保持部の回転が終了されるので、導出搬送手段に保持解除位置から導出位置までの搬送を担せることで、保持部が保持解除位置に移動した後は、直ちに保持解除位置で搬送物を解放して、後続の搬送物を保持するべく保持位置に復帰移動することができる。したがって、搬送物の回転が終了した後に保持体が搬送方向に沿って移動する距離を極力短くできるので、姿勢変更手段を保持体の移動方向でコンパクトに構成できる。   According to this characteristic configuration, the rotation of the holding unit is completed at the same time or substantially simultaneously with the end of the movement of the holding unit to the holding release position. Thus, after the holding unit moves to the holding release position, the conveyed product can be immediately released at the holding release position and returned to the holding position to hold the subsequent conveyed product. Therefore, since the distance that the holding body moves along the carrying direction after the rotation of the conveyed product can be shortened as much as possible, the posture changing means can be configured compactly in the moving direction of the holding body.

搬送装置の全体平面図Overall plan view of the transfer device 搬送装置の全体側面図Overall side view of transfer device 搬送ユニットの斜視図Perspective view of transport unit 搬送ユニットの縦断断面図Longitudinal section of the transport unit 姿勢変更モジュールの縦断断面図Vertical section of posture change module 姿勢変更手段の模式図Schematic diagram of posture change means 回転アームの端部拡大図Enlarged view of the end of the rotating arm 導入コンベヤの側面図Side view of introduction conveyor 制御装置の制御ブロック図Control block diagram of control device 制御装置の制御動作のフローチャートFlow chart of control operation of control device 搬送装置の搬送作用図Transfer action diagram of transfer device 搬送装置の搬送作用図Transfer action diagram of transfer device 搬送装置における各装置の動作タイミングチャートOperation timing chart of each device in the transport device

本発明に係る搬送装置の実施形態について、搬送物として液晶ディスプレイ用のガラス基板Wを搬送する搬送装置1を例に図面に基づいて説明する。   An embodiment of a transport apparatus according to the present invention will be described with reference to the drawings, taking as an example a transport apparatus 1 that transports a glass substrate W for liquid crystal display as a transported object.

図1及び図2に示すように、搬送装置1は、それぞれの搬送方向が同一方向となるように直線状に並べて配置された上流側コンベヤ2及び下流側コンベヤ3と、上流側コンベヤ2及び下流側コンベヤ3の間に配置された姿勢変更モジュール4とを備え、上流側コンベヤ2及び下流側コンベヤ3並びに姿勢変更モジュール4の作動を制御する制御装置Hを備えて構成されている。   As shown in FIGS. 1 and 2, the transport device 1 includes an upstream conveyor 2 and a downstream conveyor 3 that are arranged in a straight line so that the respective transport directions are the same direction, and the upstream conveyor 2 and the downstream conveyor. A posture change module 4 disposed between the side conveyors 3, and a control device H that controls the operations of the upstream conveyor 2, the downstream conveyor 3, and the posture change module 4.

搬送装置1は、図1及び図2で左から右に向かう方向を搬送方向として直線状の搬送経路に沿って上流側から下流側に複数のガラス基板Wを順次搬送し、直線状の搬送経路途中においてガラス基板Wを縦軸心X1周りに回転させてガラス基板Wの搬送姿勢を上流側コンベヤ2における上流側姿勢から下流側コンベヤ3における下流側姿勢に変更できるようになっている。本実施形態では、上流側コンベヤ2はガラス基板Wをその短手方向が搬送方向に沿う姿勢にて搬送し、下流側コンベヤ3はガラス基板Wをその長手方向が搬送方向に沿う姿勢にて搬送する。   The transport apparatus 1 sequentially transports the plurality of glass substrates W from the upstream side to the downstream side along the linear transport path with the direction from left to right in FIGS. 1 and 2 as the transport direction, and the linear transport path In the middle, the glass substrate W is rotated about the vertical axis X 1 so that the conveying posture of the glass substrate W can be changed from the upstream posture in the upstream conveyor 2 to the downstream posture in the downstream conveyor 3. In the present embodiment, the upstream conveyor 2 transports the glass substrate W in a posture in which the short direction is along the transport direction, and the downstream conveyor 3 transports the glass substrate W in a posture in which the longitudinal direction is along the transport direction. To do.

上流側コンベヤ2及び下流側コンベヤ3並びに姿勢変更モジュール4により、送風式支持手段10及び推進力付与手段11を備えた搬送手段Dが構成されている。また、制御装置Hが、搬送手段Dの作動を制御する制御手段として機能する。以下、上流側コンベヤ2及び下流側コンベヤ3並びに姿勢変更モジュール4について具体的に説明する。   The upstream conveyor 2, the downstream conveyor 3, and the posture changing module 4 constitute a conveying means D that includes the blower-type support means 10 and the propulsion force applying means 11. The control device H functions as a control unit that controls the operation of the transport unit D. Hereinafter, the upstream conveyor 2, the downstream conveyor 3, and the attitude changing module 4 will be described in detail.

上流側コンベヤ2及び下流側コンベヤ3のそれぞれは、架台5上に設置される複数の搬送ユニット6を搬送方向に沿って並ぶ状態で配置して隣接するもの同士を互いに接続して構成されている。上流側コンベヤ2の搬送ユニット6aと下流側コンベヤ3の搬送ユニット6bとは、左右方向(図1における紙面上下方向)の長さが異なる以外は基本的な構成は同じであるから、上流側コンベヤ2を構成する搬送ユニット6aを例に搬送ユニット6について説明し、下流側コンベヤ3を構成する搬送ユニット6bについては説明を省略する。   Each of the upstream conveyor 2 and the downstream conveyor 3 is configured by arranging a plurality of transport units 6 installed on the gantry 5 in a state of being aligned in the transport direction and connecting adjacent ones to each other. . Since the transport unit 6a of the upstream conveyor 2 and the transport unit 6b of the downstream conveyor 3 have the same basic configuration except for the length in the left-right direction (the vertical direction in FIG. 1), the upstream conveyor The conveyance unit 6 will be described by way of an example of the conveyance unit 6a constituting the No. 2, and the explanation of the conveyance unit 6b constituting the downstream conveyor 3 will be omitted.

搬送ユニット6aは、図3及び図4に示すように、上面カバー7及び支持枠8からなるケース体9に送風式支持手段10a及び推進力付与手段11aを備えて構成されている。   As shown in FIGS. 3 and 4, the transport unit 6 a includes a case body 9 including an upper surface cover 7 and a support frame 8, and is provided with a blowing type support unit 10 a and a propulsion force applying unit 11 a.

搬送ユニット6aの送風式支持手段10aは、ガラス基板Wの下面に向けて清浄空気を供給する複数個のファンフィルタユニット12と、多数の通気孔13aが形成されてファンフィルタユニット12に載置支持されてガラス基板Wの下面に供給される清浄空気の整風を行う整風板13とを備えて構成されている。ファンフィルタユニット12は、支持枠8に連結固定されており、塵埃を除去する除塵フィルタ14と、その除塵フィルタ14を通してガラス基板Wの下面に向けて清浄空気を供給する電動式の送風ファン15とを一体的に組み付けて構成されている。送風式支持手段10aは、ファンフィルタユニット12を前後方向に隣接させて2つ並べ、左右方向に間隔を隔てて2つ並べた計4つのファンフィルタユニット12を備えている。また、姿勢変更モジュール4に上流側で隣接する搬送ユニット6aの送風式支持手段10aの整風板13の下流側部分には、後述する導入コンベヤ29が送風式支持手段10aより上方に突出可能なように導入コンベヤ用スリット13bが搬送方向に沿って形成されている。   The blower-type support means 10a of the transport unit 6a includes a plurality of fan filter units 12 that supply clean air toward the lower surface of the glass substrate W and a large number of vent holes 13a. And a wind regulation plate 13 for regulating the clean air supplied to the lower surface of the glass substrate W. The fan filter unit 12 is connected and fixed to the support frame 8, a dust removal filter 14 that removes dust, and an electric blower fan 15 that supplies clean air to the lower surface of the glass substrate W through the dust removal filter 14. Are assembled integrally. The blower-type support means 10a includes a total of four fan filter units 12 in which two fan filter units 12 are arranged adjacent to each other in the front-rear direction, and two fan filter units 12 are arranged at intervals in the left-right direction. In addition, an introduction conveyor 29, which will be described later, can protrude upward from the air blowing support means 10a in the downstream portion of the air conditioning plate 13 of the air blowing support means 10a of the transport unit 6a adjacent to the posture changing module 4 on the upstream side. The introduction conveyor slit 13b is formed along the conveying direction.

搬送ユニット6aの推進力付与手段11aは、左右方向での両端部分において搬送方向に沿って並べて配置され、送風式支持手段10aにて非接触状態で支持されたガラス基板Wの左右両端部の下面に接触してガラス基板Wに搬送方向の推進力を付与する複数の駆動ローラ16とこれらの駆動ローラ16を回転駆動させる駆動ローラ用モータM1(図9参照)を備えている。   The propulsive force applying means 11a of the transport unit 6a is arranged side by side along the transport direction at both end portions in the left-right direction, and the lower surfaces of the left and right end portions of the glass substrate W supported in a non-contact state by the blower-type support means 10a. Are provided with a plurality of drive rollers 16 for applying a propulsive force in the conveying direction to the glass substrate W, and a drive roller motor M1 for rotating these drive rollers 16 (see FIG. 9).

駆動ローラ16及び駆動ローラ用モータM1を支持するケース体9の支持枠8は、外部空気を導入する空気導入口17を下面に備えた底部プレート18と、支持枠8の左右方向の両側に搬送方向に沿って固定状態で備えた左右一対の収納フレーム19とを備えて構成されている。そして、上面カバー7が両側の収納フレーム19にわたって備えられている。左右一対の収納フレーム19の夫々には、駆動ローラ用モータM1及びこの駆動ローラ用モータM1の回転駆動力を複数の駆動ローラ16に分配する伝動軸20を備えた伝動機構が内装されている。なお、駆動ローラ16には、ガラス基板Wの左右方向の両端部の側面に接当して、ガラス基板Wの左右方向への移動を受け止める大径部16aが備えられている。   The support frame 8 of the case body 9 that supports the drive roller 16 and the drive roller motor M1 is conveyed to the bottom plate 18 having an air introduction port 17 for introducing external air on the lower surface and both sides of the support frame 8 in the left-right direction. It comprises a pair of left and right storage frames 19 provided in a fixed state along the direction. An upper surface cover 7 is provided over the storage frames 19 on both sides. Each of the pair of left and right storage frames 19 includes a drive mechanism including a drive roller motor M1 and a transmission shaft 20 that distributes the rotational drive force of the drive roller motor M1 to the plurality of drive rollers 16. The driving roller 16 includes a large-diameter portion 16a that contacts the side surfaces of both end portions in the left-right direction of the glass substrate W and receives movement of the glass substrate W in the left-right direction.

次に、姿勢変更モジュール4の構成について説明する。図1、図2及び図5に示すように、姿勢変更モジュール4は、上面カバー21及び平面視が略矩形状の支持枠22からなるケース体23に送風式支持手段10b及び推進力付与手段11bを備えて構成されている。   Next, the configuration of the posture change module 4 will be described. As shown in FIGS. 1, 2 and 5, the posture changing module 4 includes a blower-type support means 10b and a propulsive force applying means 11b on a case body 23 comprising an upper surface cover 21 and a support frame 22 having a substantially rectangular shape in plan view. It is configured with.

姿勢変更モジュール4の送風式支持手段10bは、搬送ユニット6の送風式支持手段10aと同様に構成されている。すなわち、図5にも示すように、ガラス基板Wの下面に向けて清浄空気を供給する複数個のファンフィルタユニット12と、多数の通気孔13aが形成されてファンフィルタユニット12に載置支持されてガラス基板Wの下面に供給される清浄空気の整風を行う整風板13とを備えて構成されている。ファンフィルタユニット12は、支持枠23に連結固定されており、塵埃を除去する除塵フィルタ14と、その除塵フィルタ14を通してガラス基板Wの下面に向けて清浄空気を供給する電動式の送風ファン15とを一体的に組み付けて構成されている。   The blowing type support means 10b of the posture changing module 4 is configured in the same manner as the blowing type support means 10a of the transport unit 6. That is, as shown in FIG. 5, a plurality of fan filter units 12 that supply clean air toward the lower surface of the glass substrate W and a large number of vent holes 13 a are formed and placed and supported on the fan filter unit 12. And a wind regulation plate 13 for regulating the clean air supplied to the lower surface of the glass substrate W. The fan filter unit 12 is connected and fixed to the support frame 23, a dust removal filter 14 that removes dust, and an electric blower fan 15 that supplies clean air to the lower surface of the glass substrate W through the dust removal filter 14. Are assembled integrally.

姿勢変更モジュール4の送風式支持手段10bは、支持枠22に載置支持された複数のファンフィルタユニット12を前後方向に隣接する状態で備えているが、左右方向に並べる個数は上流側から下流側に向かって2個、3個、2個と搬送方向で異なっている。上流側の端部に配列される2つのファンフィルタユニット12と、下流側の端部に配列される2つのファンフィルタユニット12の大きさ及び姿勢は同じであり、これらのファンフィルタユニット12の大きさ及び姿勢は、搬送方向で中間に位置する3個のファンフィルタユニット12の大きさ及び姿勢とは異なっている。また、後述する導入コンベヤ29が送風式支持手段10bより上方に突出可能なように姿勢変更モジュール4の送風式支持手段10bにおける整風板13の上流側部分には、姿勢変更モジュール4に上流側で隣接する搬送ユニット6aの送風式支持手段10aの整風板13に形成された導入コンベヤ用スリット13bに連続するように、導入コンベヤ用スリット13cが形成されている(図1参照)。   The blowing type support means 10b of the attitude change module 4 includes a plurality of fan filter units 12 mounted and supported on the support frame 22 in a state adjacent to the front-rear direction, but the number arranged in the left-right direction is downstream from the upstream side. It differs in the conveyance direction as 2, 3, and 2 toward the side. The size and posture of the two fan filter units 12 arranged at the upstream end and the two fan filter units 12 arranged at the downstream end are the same, and the sizes of these fan filter units 12 are the same. The height and posture are different from the size and posture of the three fan filter units 12 located in the middle in the transport direction. Further, an upstream portion of the air conditioning plate 13 in the air blowing support means 10b of the attitude changing module 4 is disposed upstream of the attitude changing module 4 so that an introduction conveyor 29 described later can protrude upward from the air blowing support means 10b. An introduction conveyor slit 13c is formed so as to be continuous with the introduction conveyor slit 13b formed in the air conditioning plate 13 of the blower-type support means 10a of the adjacent transport unit 6a (see FIG. 1).

姿勢変更モジュール4は、ガラス基板Wを縦軸心X1周りに回転させる姿勢変更手段24を備えており、姿勢変更モジュール4の推進力付与手段11bは、この姿勢変更手段24にて兼用されている。   The posture changing module 4 includes posture changing means 24 for rotating the glass substrate W around the vertical axis X1. The propulsive force applying means 11b of the posture changing module 4 is also used as the posture changing means 24. .

図2、図5及び図6に示すように、姿勢変更手段24は、送風式支持手段10bにて非接触状態で支持されたガラス基板Wの平面視での複数の端部に対して係合することによりガラス基板Wを保持自在な保持部としての回転アーム25と、回転アーム25を縦軸心X1周りに回転させる回転手段としての回転部26と、回転アーム25を搬送方向に沿って移動させる移動手段としてのスライド部27とを備えている。   As shown in FIGS. 2, 5, and 6, the posture changing unit 24 is engaged with a plurality of ends in a plan view of the glass substrate W supported in a non-contact state by the blower-type support unit 10 b. As a result, the rotating arm 25 as a holding part capable of holding the glass substrate W, the rotating part 26 as rotating means for rotating the rotating arm 25 around the longitudinal axis X1, and the rotating arm 25 are moved along the transport direction. And a slide portion 27 as a moving means.

図5、図6及び図7に示すように、回転アーム25は、送風式支持手段10bにて非接触状態で支持されるガラス基板Wの高さよりも上方側に配置されており、その両端部には、ガラス基板Wの平面視での一対の端部に対して係合する係合姿勢とこれらの端部に対する係合が解除される解除姿勢とに横軸心Y1周りの揺動により姿勢切換自在な複数の係合作用部として、一対のチャック部28を備えている。この一対のチャック部28が係合姿勢になるとガラス基板Wを保持し、解除姿勢になるとガラス基板Wを解放するように構成されている。なお、詳細な説明は省略するが、一対のチャック部28の姿勢を切り換え駆動するチャック用モータM2(図9参照)が、回転アーム25の両端部に内装されている。   As shown in FIGS. 5, 6, and 7, the rotary arm 25 is disposed above the height of the glass substrate W supported in a non-contact state by the blower-type support means 10 b, and both ends thereof The position of the glass substrate W by swinging about the horizontal axis Y1 is engaged between an engagement posture that engages with a pair of end portions in plan view and a release posture that releases the engagement with these end portions. A pair of chuck portions 28 are provided as a plurality of switchable engaging portions. The glass substrate W is held when the pair of chuck portions 28 are in the engagement posture, and the glass substrate W is released when the pair of chuck portions 28 is in the release posture. Although not described in detail, chuck motors M <b> 2 (see FIG. 9) that switch and drive the postures of the pair of chuck portions 28 are provided at both ends of the rotary arm 25.

回転アーム25は、平面視で矩形状のガラス基板Wの短辺の長さに対応した長さの長尺状の中空部材にて構成され、両端に設けられた一対のチャック部28のそれぞれが、ガラス基板Wの長辺の略中央部分に係合することでガラス基板Wを保持するようになっている。一対のチャック部28の夫々は、横軸心Y1方向に並ぶ2個の当接片28a・28bを備えており、ガラス基板Wの長辺の略中央部分に対して、2個の当接片28a・28bが2箇所で当接することで、一対のチャック部28が係合姿勢であると、回転アーム25に対するガラス基板Wの相対回転が規制される。なお、一対のチャック部28における当接片28a・28bの当接面にウレタンゴム等の弾性部材を設けて、ガラス基板Wと一対のチャック部28とが弾性接触できるようにしている。   The rotary arm 25 is constituted by a long hollow member having a length corresponding to the length of the short side of the rectangular glass substrate W in plan view, and each of the pair of chuck portions 28 provided at both ends is provided. The glass substrate W is held by engaging with the substantially central portion of the long side of the glass substrate W. Each of the pair of chuck portions 28 includes two contact pieces 28a and 28b arranged in the direction of the horizontal axis Y1, and two contact pieces with respect to a substantially central portion of the long side of the glass substrate W. When the pair of chuck portions 28 are in the engagement posture, the relative rotation of the glass substrate W with respect to the rotating arm 25 is restricted by the contact of the two portions 28a and 28b. An elastic member such as urethane rubber is provided on the contact surfaces of the contact pieces 28a and 28b in the pair of chuck portions 28 so that the glass substrate W and the pair of chuck portions 28 can be in elastic contact.

回転部26は、回転アーム25を正逆双方向に回転駆動する回転用モータM3(図9参照)及び回転用モータM3の回転駆動量を検出することで回転アーム25の回転位置を検出する回転位置検出手段としての回転位置検出用ロータリエンコーダRE1(図9参照)を備えている。   The rotation unit 26 detects the rotation position of the rotation arm 25 by detecting the rotation motor M3 (see FIG. 9) that rotates the rotation arm 25 in both forward and reverse directions and the rotation drive amount of the rotation motor M3. A rotary position detecting rotary encoder RE1 (see FIG. 9) is provided as position detecting means.

スライド部27は、支持枠22が備える前後一対の支持フレーム22aにより複数箇所が支持された状態で搬送方向に沿って設けられたガイドレール27aと、このガイドレール27aに案内されて、ガラス基板Wを保持位置P3(図11(b)参照)に位置させる後退限とガラス基板Wを保持解除位置P4(図12(d)参照)に位置させる前進限との間で往復移動自在に設けられたスライドブロック27bと、スライドブロック27bを搬送方向で上流から下流に向けて前進駆動させ、かつ、搬送方向で下流から上流に向けて後退駆動させる移動用モータM4(図9参照)を備えている。また、ガイドレール27aの前後両端部には、後退限のスライドブロック27bに検出作用する保持位置検出用センサS3(図9参照)、及び、前進限のスライドブロック27bに検出作用する保持解除位置検出用センサS4(図9参照)が設けられている。   The slide part 27 is guided by the guide rail 27a provided along the transport direction in a state where a plurality of positions are supported by a pair of front and rear support frames 22a provided in the support frame 22, and the glass substrate W is guided by the guide rail 27a. Between the backward limit for positioning the glass substrate W at the holding position P3 (see FIG. 11B) and the forward limit for positioning the glass substrate W at the holding release position P4 (see FIG. 12D). A slide block 27b and a moving motor M4 (see FIG. 9) are provided to drive the slide block 27b forward from the upstream to the downstream in the transport direction and to drive backward from the downstream to the upstream in the transport direction. Further, at both front and rear ends of the guide rail 27a, a holding position detection sensor S3 (see FIG. 9) that detects the slide block 27b in the backward limit, and a holding release position detection that detects the slide block 27b in the forward limit. A sensor S4 (see FIG. 9) is provided.

保持位置P3では、制御装置Hにより回転アーム25の一対のチャック部28が解除姿勢から保持姿勢に姿勢変更されガラス基板Wが回転アーム25にて保持される。また、保持解除位置P4では、制御装置Hにより回転アーム25の一対のチャック部28が保持姿勢から解除姿勢に姿勢変更されガラス基板Wが回転アーム25から解放される。つまり、制御装置Hは、保持位置P3及び保持解除位置P4において一対のチャック部28の姿勢切換作動を制御するように構成されている。   At the holding position P <b> 3, the control device H changes the posture of the pair of chuck portions 28 of the rotary arm 25 from the release posture to the holding posture, and the glass substrate W is held by the rotary arm 25. At the holding release position P <b> 4, the control device H changes the posture of the pair of chuck portions 28 of the rotating arm 25 from the holding posture to the releasing posture, and the glass substrate W is released from the rotating arm 25. That is, the control device H is configured to control the posture switching operation of the pair of chuck portions 28 at the holding position P3 and the holding release position P4.

姿勢変更手段24は、一対のチャック部28をガラス基板Wに係合する係合姿勢に切り換えた状態で回転部26にて回転アーム25を縦軸心X1周りに回転させながらスライド部27にて回転部26を搬送方向に沿ったガイドレール27aに沿って移動させることで、ガラス基板Wを縦軸心X1周りに回転させながら、ガラス基板Wに対して搬送方向の推進力を付与して搬送方向に搬送する。   The posture changing means 24 is operated by the slide portion 27 while rotating the rotating arm 25 around the vertical axis X1 by the rotating portion 26 in a state where the pair of chuck portions 28 are switched to the engaging posture engaging with the glass substrate W. By moving the rotating unit 26 along the guide rail 27a along the transport direction, the glass substrate W is rotated around the vertical axis X1, and a propulsive force in the transport direction is applied to the glass substrate W for transport. Transport in the direction.

このように、姿勢変更モジュール4は、推進力付与手段11bを兼用する姿勢変更手段24を備えており、ガラス基板Wの姿勢変更機能に加えてガラス基板Wに対して接触して搬送方向への推進力を付与する機能を有している。姿勢変更モジュール4による搬送方向となる回転アーム25の回転縦軸心X1の移動方向は、上流側コンベヤ1及び下流側コンベヤ2の搬送方向と一致しており、図1及び図2において左から右に沿う方向となっている。   As described above, the posture changing module 4 includes the posture changing unit 24 that also serves as the propulsive force applying unit 11b. In addition to the posture changing function of the glass substrate W, the posture changing module 4 comes into contact with the glass substrate W in the transport direction. It has a function to give propulsion. The movement direction of the rotation longitudinal axis X1 of the rotary arm 25 which is the conveyance direction by the posture changing module 4 is the same as the conveyance direction of the upstream conveyor 1 and the downstream conveyor 2, and from left to right in FIGS. It is the direction along.

搬送装置1には、図1、図4、図5及び図11に示すように、保持位置P3よりも上流側に設定された導入位置P2から保持位置P3までガラス基板Wを搬送方向に沿ってガラス基板Wの搬送姿勢を維持しながら搬送する導入搬送手段として導入コンベヤ29が設けられている。導入コンベヤ29により搬送されるガラス基板Wの搬送下流側の端部を受け止める左右一対のストッパ40が姿勢変更モジュール4に設けられている。   As shown in FIGS. 1, 4, 5, and 11, the transfer device 1 moves the glass substrate W along the transfer direction from the introduction position P <b> 2 set upstream of the holding position P <b> 3 to the holding position P <b> 3. An introduction conveyor 29 is provided as introduction conveyance means for conveying the glass substrate W while maintaining the conveyance posture. A pair of left and right stoppers 40 for receiving the downstream end of the glass substrate W conveyed by the introduction conveyor 29 are provided in the posture changing module 4.

一対のストッパ40は、図1に示すように、姿勢変更モジュール4の搬送方向で中間位置において左右方向に3つ並ぶファンフィルタユニット12の間に形成される2個の隙間の夫々に1個ずつ配置されている。一対のストッパ40は、ストッパ昇降用モータM9(図9参照)を正逆に回転作動させることにより、導入コンベヤ29にて保持位置P3まで搬送されたガラス基板Wの搬送下流側の端辺の2箇所に当接して、ガラス基板Wを上流側姿勢に維持しながらガラス基板Wの搬送方向下流側への移動を規制する上昇位置と、ガラス基板Wの搬送方向下流側への移動を許容する下降位置とに、切り換え自在に構成されている(図11及び図12参照)。   As shown in FIG. 1, one pair of stoppers 40 is provided for each of two gaps formed between three fan filter units 12 arranged in the left-right direction at an intermediate position in the conveyance direction of the posture change module 4. Has been placed. The pair of stoppers 40 rotate the stopper raising / lowering motor M9 (see FIG. 9) in the forward and reverse directions so that the two downstream edges of the glass substrate W conveyed to the holding position P3 by the introduction conveyor 29 are provided. The rising position that restricts the movement of the glass substrate W in the transport direction downstream while maintaining the glass substrate W in the upstream posture, and the lowering that allows the glass substrate W to move downstream in the transport direction The position is switchable (see FIGS. 11 and 12).

また、搬送装置1には、図1に示すように、保持解除位置P4からその保持解除位置P4よりも下流側に設定された導出位置P5までガラス基板Wを搬送方向に沿ってガラス基板Wの搬送姿勢を維持しながら搬送する導出搬送手段としての導出コンベヤ30が設けられている。導入コンベヤ29及び導出コンベヤ30は配置位置が異なるものの基本的な構成は同様であるので、導入コンベヤ29を例に具体的に説明する。   In addition, as shown in FIG. 1, the transfer device 1 moves the glass substrate W from the holding release position P4 to the lead-out position P5 set downstream of the holding release position P4 along the transfer direction. A lead-out conveyor 30 is provided as a lead-out transport means for transporting while maintaining the transport posture. Although the introduction conveyor 29 and the outlet conveyor 30 have the same basic configuration, although the arrangement positions are different, the introduction conveyor 29 will be specifically described as an example.

導入コンベヤ29は、図1、図4、図5及び図8に示すように、上流側姿勢(導出コンベヤ30の場合は下流側姿勢)のガラス基板Wにおける左右方向の中央部を接触支持する導入側ベルト式推進力付与部31を備えている。この導入側ベルト式推進力付与部31は、図4及び図5に示すように、ファンフィルタユニット12を左右方向に2つ並べることにより左右方向で中間位置に形成される前後方向に細長の隙間Gに設けられている。   As shown in FIGS. 1, 4, 5, and 8, the introduction conveyor 29 is configured to contact and support the central portion in the left-right direction of the glass substrate W in the upstream posture (downstream posture in the case of the lead-out conveyor 30). A side belt type propulsive force applying unit 31 is provided. As shown in FIGS. 4 and 5, the introduction-side belt-type propulsive force imparting portion 31 is formed by arranging two fan filter units 12 in the left-right direction to form a narrow gap in the front-rear direction that is formed at the intermediate position in the left-right direction. G is provided.

導入側ベルト式推進力付与手段31は、図8に示すように、搬送方向の上流側に位置して導入コンベヤ駆動用モータM5によって回転する駆動輪32と、搬送方向の上流側に位置する回転自在な従動輪33と、これら駆動輪32と従動輪33とに亘って巻回し、ガラス基板Wの下面を接触支持して推進力を付与するタイミングベルト34と、タイミングベルト34における送り経路部分を内周面側から支持する内支持輪35と、これらを支持する支持枠36とから構成されている。そして、図8に示すように、支持枠36には、導入側ベルト式推進力付与部31を昇降操作するための導入コンベヤ昇降用モータM6が前後一対設けられており、各導入コンベヤ昇降用モータM6の出力ギヤ37と、ファンフィルタユニット12の側面に形成されたラック38とが噛み合わされている。   As shown in FIG. 8, the introduction side belt-type propulsive force applying means 31 is positioned upstream in the transport direction and is rotated by the introduction conveyor drive motor M5, and rotation is positioned upstream in the transport direction. A free driven wheel 33, a timing belt 34 wound around the driving wheel 32 and the driven wheel 33, contacting and supporting the lower surface of the glass substrate W, and a feeding path portion in the timing belt 34 are provided. It is comprised from the inner support ring 35 supported from the inner peripheral surface side, and the support frame 36 which supports these. As shown in FIG. 8, the support frame 36 is provided with a pair of front and rear introduction conveyor raising and lowering motors M <b> 6 for raising and lowering the introduction side belt-type propulsive force applying unit 31. An output gear 37 of M6 and a rack 38 formed on the side surface of the fan filter unit 12 are meshed with each other.

一対の導入コンベヤ昇降用モータM6を同期した状態で正逆方向に駆動回転させることによって、導入側ベルト式推進力付与部31は、タイミングベルト34の上側経路部分の外周面が上流側コンベヤ2及び姿勢変更モジュール4が備える整風板13よりも上方に位置してガラス基板Wの下面に接触自在な上昇位置と、タイミングベルト34の上側経路部分の外周面が上流側コンベヤ2及び姿勢変更モジュール4が備える整風板13よりも下方に位置してガラス基板Wの下面に接触しない下降位置とに上下昇降自在に構成されている。ベルト式推進力付与部31が上下昇降する際には、タイミングベルト34の上側経路部分が上流側コンベヤ2及び姿勢変更モジュール4がそれぞれ備える整風板13に連続する状態で形成されたスリット13b・13cを通過することになる。   By driving and rotating the pair of introduction conveyor lifting / lowering motors M6 in the forward and reverse directions in a synchronized state, the introduction-side belt type propulsive force applying unit 31 has the outer peripheral surface of the upper path portion of the timing belt 34 and the upstream conveyor 2 and The rising position that is positioned above the air conditioning plate 13 provided in the posture changing module 4 and that can freely contact the lower surface of the glass substrate W, and the outer peripheral surface of the upper path portion of the timing belt 34 are the upstream conveyor 2 and the posture changing module 4. It is configured to be vertically movable up and down to a lowered position that is positioned below the air conditioning plate 13 provided and does not contact the lower surface of the glass substrate W. When the belt-type propelling force applying unit 31 moves up and down, the slits 13b and 13c formed in a state where the upper path portion of the timing belt 34 continues to the air conditioning plate 13 provided in the upstream conveyor 2 and the posture changing module 4, respectively. Will pass.

導出コンベヤ30は、導出コンベヤ駆動用モータM7及び一対の導出コンベヤ昇降用モータM8を備えている(図9参照)。導出コンベヤ駆動用モータM7を回転駆動させることにより、導出側ベルト式推進力付与手段39のタイミングベルトが巻回作動し、導入コンベヤ昇降用モータM8を同期した状態で正逆方向に駆動回転させることにより、導出側ベルト式推進力付与手段39が昇降作動する。   The lead-out conveyor 30 includes a lead-out conveyor driving motor M7 and a pair of lead-out conveyor raising / lowering motors M8 (see FIG. 9). By rotating the outlet conveyor driving motor M7, the timing belt of the outlet side belt type propulsive force applying means 39 is wound, and the inlet conveyor lifting motor M8 is driven and rotated in the forward and reverse directions in a synchronized state. As a result, the lead-out side belt type propulsive force applying means 39 moves up and down.

次に、搬送装置1の制御構成について説明する。図9に示すように、搬送装置1の作動を制御する制御装置Hには、上流側コンベヤ2、導入コンベヤ29、姿勢変更モジュール4、導出コンベヤ30及び下流側コンベヤ3が備える各電動モータやファンフィルタユニット12や各種センサ類が接続されている。   Next, the control configuration of the transport apparatus 1 will be described. As shown in FIG. 9, the control device H that controls the operation of the conveying device 1 includes an electric motor and a fan included in the upstream conveyor 2, the introduction conveyor 29, the posture changing module 4, the outlet conveyor 30, and the downstream conveyor 3. The filter unit 12 and various sensors are connected.

制御装置Hには、上流側コンベヤ2の最下流の搬送ユニット6aにおける準備位置用在荷センサS1、各搬送ユニット6aにおける複数の駆動ローラ用モータM1及び複数のファンフィルタユニット12が接続されている。上流側コンベヤ2の準備位置用在荷センサS1は、上流側コンベヤ2の搬送方向で下流側の端部に設定された準備位置P1(図11(a)参照)までガラス基板Wが搬送されたことを検出する光学式センサである。   The control device H is connected to a load sensor S1 for a preparation position in the transport unit 6a at the most downstream side of the upstream conveyor 2, a plurality of drive roller motors M1 and a plurality of fan filter units 12 in each transport unit 6a. . The stock sensor S1 for the preparatory position of the upstream conveyor 2 has transported the glass substrate W to the preparatory position P1 (see FIG. 11A) set at the downstream end in the transport direction of the upstream conveyor 2. This is an optical sensor for detecting this.

同様に、制御装置Hには、下流側コンベヤ3の最上流の搬送ユニット6bにおける完了位置用在荷センサS2、各搬送ユニット6bにおける複数の駆動ローラ用モータM1及び複数のファンフィルタユニット12が接続されている。下流側コンベヤ3の完了位置用在荷センサS2は、下流側コンベヤ3の搬送方向で上流側の端部に設定された完了位置P6(図12(e)参照)までガラス基板Wが搬送されたことを検出する光学式センサである。   Similarly, the control device H is connected to a completion position load sensor S2 in the most upstream transport unit 6b of the downstream conveyor 3, a plurality of drive roller motors M1 and a plurality of fan filter units 12 in each transport unit 6b. Has been. The completion position in-stock sensor S2 of the downstream conveyor 3 has transported the glass substrate W to the completion position P6 (see FIG. 12E) set at the upstream end in the transport direction of the downstream conveyor 3. This is an optical sensor for detecting this.

制御装置Hには、姿勢変更モジュール4の姿勢変更手段24における一対のチャック用モータM2、回転用モータM3、移動用モータM4、回転位置検出用ロータリエンコーダRE1、一対のストッパ昇降用モータM9及び複数のファンフィルタユニット12が接続されている。   The control device H includes a pair of chuck motors M2, a rotation motor M3, a movement motor M4, a rotary position detection rotary encoder RE1, a pair of stopper lifting / lowering motors M9 and a plurality of motors in the posture changing means 24 of the posture changing module 4. The fan filter unit 12 is connected.

制御装置Hには、導入コンベヤ29の導入コンベヤ駆動用モータM5及び一対の導入コンベヤ昇降用モータM6が接続されている。同様に、制御装置Hには、導出コンベヤ30の導出コンベヤ駆動用モータM7及び一対の導出コンベヤ昇降用モータM8が接続されている。   The control device H is connected to an introduction conveyor drive motor M5 of the introduction conveyor 29 and a pair of introduction conveyor lifting motors M6. Similarly, the control device H is connected to a motor M7 for driving the outlet conveyor 30 and a motor M8 for raising and lowering the outlet conveyor.

制御装置Hは、非接触状態で支持された状態のガラス基板Wを保持位置P3にて回転アーム25にて保持し、スライド部27により回転アーム25を移動させて搬送方向に沿って保持位置P3より下流側の保持解除位置P4まで非接触状態で支持された状態のガラス基板Wを搬送する間に、スライド部27により回転アーム25を移動させながら回転部26により回転アーム25を回転させて保持しているガラス基板Wの搬送姿勢を縦軸心X1周りに90度回転させ、保持解除位置P4にてガラス基板Wの保持を解除するべく、回転アーム25の保持作動、スライド部27の移動作動、及び、回転部26の回転作動を制御する。   The control device H holds the glass substrate W supported in a non-contact state by the rotating arm 25 at the holding position P3, and moves the rotating arm 25 by the slide unit 27 to hold the glass substrate W along the transport direction. While the glass substrate W supported in a non-contact state is transported to the holding release position P4 on the downstream side, the rotating arm 25 is rotated and held by the rotating unit 26 while the rotating arm 25 is moved by the slide unit 27. The holding posture of the rotating arm 25 and the moving operation of the slide portion 27 are performed so as to rotate the transport posture of the glass substrate W 90 degrees around the vertical axis X1 and release the holding of the glass substrate W at the holding release position P4. And the rotation operation of the rotation part 26 is controlled.

制御装置Hは、ガラス基板Wを保持している保持状態の回転アーム25を保持位置P3から保持解除位置P4へ移動させた後、ガラス基板Wを保持していない非保持状態の回転アーム25を保持位置P3に復帰移動させるべく、回転アーム25の保持作動、スライド部27の移動作動、及び、回転部26の回転作動を繰り返し制御する。   The control device H moves the holding rotary arm 25 holding the glass substrate W from the holding position P3 to the holding release position P4, and then moves the non-holding rotary arm 25 not holding the glass substrate W. In order to return to the holding position P3, the holding operation of the rotating arm 25, the moving operation of the slide portion 27, and the rotating operation of the rotating portion 26 are repeatedly controlled.

制御装置Hは、保持状態の回転アーム25の回転と保持状態の回転アーム25の保持位置P3からの移動とを同時又は略同時に開始させるように、回転部26及びスライド部27の作動を制御するとともに、保持状態の回転アーム25の保持位置P3から保持解除位置P4への移動を開始させた後、非保持状態の回転アーム25の保持位置P3への復帰移動を終了させるまでに、後続するガラス基板Wを保持位置P3に搬送するべく、導入コンベヤ29の作動を制御する。   The control device H controls the operation of the rotating unit 26 and the slide unit 27 so that the rotation of the rotating arm 25 in the holding state and the movement of the rotating arm 25 in the holding state from the holding position P3 are started simultaneously or substantially simultaneously. At the same time, after the movement of the holding arm P3 from the holding position P3 to the holding release position P4 is started, the subsequent movement of the non-holding rotary arm 25 to the holding position P3 is terminated. In order to transport the substrate W to the holding position P3, the operation of the introduction conveyor 29 is controlled.

制御装置Hは、保持状態の回転アーム25の回転と保持状態の回転アーム25の保持解除位置P4までの移動とを同時又は略同時に終了させるように、回転部26及びスライド部27の作動を制御するとともに、保持状態の回転アーム25が保持解除位置P4に位置した状態で保持しているガラス基板Wを解放させた後、後続のガラス基板Wを保持している保持状態の回転アーム25を保持解除位置P4に移動させるまでに、回転アーム25から解放されたガラス基板Wを保持解除位置P4から搬送するべく、導出コンベヤ30の作動を制御する。   The control device H controls the operation of the rotating unit 26 and the slide unit 27 so that the rotation of the rotating arm 25 in the holding state and the movement of the rotating arm 25 in the holding state to the holding release position P4 are completed simultaneously or substantially simultaneously. At the same time, after the glass substrate W held in the state where the rotary arm 25 in the holding state is located at the holding release position P4 is released, the rotary arm 25 in the holding state holding the subsequent glass substrate W is held. The operation of the lead-out conveyor 30 is controlled so that the glass substrate W released from the rotary arm 25 is transported from the holding release position P4 until it is moved to the release position P4.

制御装置Hの制御動作について図10のフローチャートと図11及び図12の動作図に基づき説明する。図10のフローチャートは、上流側コンベヤ2により準備位置P1まで搬送されてきたガラス基板Wが準備位置P1から完了位置P6まで搬送方向に搬送されながら姿勢変更されるまでの間に発生する上流側コンベヤ2、下流側コンベヤ3、姿勢変更モジュール4、導入コンベヤ29、導出コンベヤ30の動作を示している。   The control operation of the control device H will be described with reference to the flowchart of FIG. 10 and the operation diagrams of FIGS. The flowchart of FIG. 10 shows the upstream conveyor that is generated while the glass substrate W that has been transported to the preparation position P1 by the upstream conveyor 2 is transported in the transport direction from the preparation position P1 to the completion position P6. 2, operations of the downstream conveyor 3, the posture changing module 4, the introduction conveyor 29, and the lead-out conveyor 30 are shown.

なお、図10に示す左右3列のステップ群のうち、左列のステップ群は上流側コンベヤ2及び下流側コンベヤ3並びに導入コンベヤ29及び導出コンベヤ30の動作を示し、中央列のステップ群は姿勢変更手段24の動作を示し、右列のステップ群はストッパ40の動作を示している。   In addition, among the left and right three rows of step groups shown in FIG. 10, the left row step group shows the operations of the upstream conveyor 2, the downstream conveyor 3, the introduction conveyor 29, and the outlet conveyor 30, and the center row step group is the posture. The operation of the changing means 24 is shown, and the step group in the right column shows the operation of the stopper 40.

まず、ステップ#1〜ステップ#4で、準備位置用在荷センサS1にて準備位置P1にガラス基板Wが搬送されたことが検出されると、準備位置P1に位置するガラス基板Wを上流側コンベヤ2の最下流の搬送ユニット6aにて導入位置P2まで上流側姿勢で搬送する(図11(a)参照)。この間に、ステップ#2で、下降位置に位置している導入コンベヤ29の上昇を開始させ、ステップ#3で導入コンベヤ29の搬送作動を開始させる。これにより、上流側コンベア2により導入位置P2に搬送されたガラス基板Wは、直ちに導入コンベア29に引き継がれて保持位置P3へ向けて搬送される。なお、導入コンベヤ29を上昇位置に切り換える前に搬送作動を開始させておいてもよい。   First, in step # 1 to step # 4, when it is detected by the preparatory position stock sensor S1 that the glass substrate W has been transported to the preparatory position P1, the glass substrate W located at the preparatory position P1 is moved upstream. It conveys in the upstream attitude | position to the introduction position P2 in the conveyance unit 6a of the most downstream of the conveyor 2 (refer Fig.11 (a)). During this time, at step # 2, the introduction conveyor 29 located at the lowered position is started to rise, and at step # 3, the conveying operation of the introduction conveyor 29 is started. Thereby, the glass substrate W conveyed by the upstream conveyor 2 to the introduction position P2 is immediately taken over by the introduction conveyor 29, and is conveyed toward the holding position P3. Note that the conveying operation may be started before the introduction conveyor 29 is switched to the raised position.

保持位置P3へ搬送されるガラス基板Wは、上流側部分の左右両端部が上流側コンベヤ2の下流端部で案内されながら導入コンベヤ29にて左右方向の中央部に対して搬送方向に沿う向きの推進力が付与されるため、保持位置P3まで搬送される直前までその姿勢が上流側姿勢に維持された状態で搬送される。そして、姿勢変更モジュール4が備える左右一対のストッパ40にガラス基板Wの上流側の単辺の2箇所が受け止められることで、ガラス基板Wは、保持位置P3に位置決めされる(図11(b)参照)。   The glass substrate W transported to the holding position P3 is oriented in the transport direction with respect to the central portion in the left-right direction at the introduction conveyor 29 while the left and right ends of the upstream portion are guided by the downstream end of the upstream conveyor 2. Therefore, it is conveyed in a state in which the posture is maintained in the upstream posture until immediately before being conveyed to the holding position P3. Then, the glass substrate W is positioned at the holding position P3 by receiving two positions on the single side upstream of the glass substrate W by the pair of left and right stoppers 40 included in the posture changing module 4 (FIG. 11B). reference).

ステップ#5で、導入コンベア29の搬送作動が停止された後、ステップ#6で導入コンベア29が下降位置に切り換えられ、ステップ#7でチャック部28が解除姿勢から係合姿勢に切り換えられ、ステップ#8で一対のストッパ40が下降位置に切り換えられる。   In step # 5, after the conveying operation of the introduction conveyor 29 is stopped, in step # 6, the introduction conveyor 29 is switched to the lowered position, and in step # 7, the chuck portion 28 is switched from the release posture to the engagement posture. At # 8, the pair of stoppers 40 are switched to the lowered position.

ステップ#9で姿勢変更手段24によるガラス基板Wの姿勢変更と搬送方向に沿う移動が開始される。すなわち、回転アーム25の縦軸心X1周りの正方向(右回り)の回転と搬送方向下流側への移動とが同時に開始される。これにより、対向する長辺の夫々に対してチャック部28が係合することで回転アーム25に確実に保持されたガラス基板Wは、縦軸心X1周りに回転することで上流側姿勢から下流側姿勢に姿勢が変更されながら、搬送方向に沿って保持解除位置P4まで移動される(図11(c)参照)。   In step # 9, the attitude changing means 24 starts changing the attitude of the glass substrate W and moving along the transport direction. That is, the rotation in the positive direction (clockwise) around the vertical axis X1 of the rotary arm 25 and the movement toward the downstream side in the transport direction are started simultaneously. Thus, the glass substrate W securely held by the rotating arm 25 by the chuck portion 28 engaging with each of the opposing long sides rotates from the upstream posture to the downstream by rotating around the vertical axis X1. While the posture is changed to the side posture, it is moved along the transport direction to the holding release position P4 (see FIG. 11C).

ガラス基板Wが保持解除位置P4に接近又は到着すると、ステップ#10で導出コンベヤ30が下降位置から上昇位置に切り換えられ、導出コンベヤ30が準備される。そして、ステップ#11で姿勢変更手段24によるガラス基板Wの姿勢変更と搬送方向に沿う移動が終了される。すなわち、回転アーム25の縦軸心X1周りの正方向(右回り)の回転と搬送方向下流側への移動とが同時に終了される。   When the glass substrate W approaches or arrives at the holding release position P4, the lead-out conveyor 30 is switched from the lowered position to the raised position in step # 10, and the lead-out conveyor 30 is prepared. In step # 11, the posture change of the glass substrate W by the posture change means 24 and the movement along the transport direction are completed. That is, the rotation in the positive direction (clockwise) around the vertical axis X1 of the rotary arm 25 and the movement toward the downstream side in the transport direction are finished simultaneously.

回転アーム25の回転作動及び移動作動の停止制御は、回転アーム25の回転位置を検出する回転位置検出用ロータリエンコーダRE1並びに保持位置検出用センサS3及び保持解除位置検出用センサS4の検出情報に基づいてフィードバック制御される。   The stop control of the rotation operation and the movement operation of the rotation arm 25 is based on detection information of the rotation position detection rotary encoder RE1 that detects the rotation position of the rotation arm 25, the holding position detection sensor S3, and the holding release position detection sensor S4. Feedback controlled.

このように、回転アーム25の回転作動と移動作動は同時又は略同時に開始され同時又は略同時に終了される。つまり、回転アーム25の回転速度と移動速度とは、回転部26が回転アーム25を90度回転させるときの所要時間と、スライド部27が回転アーム25を保持位置P3から保持解除位置P4まで移動させるときの所要時間とが略一致する関係となっている。   As described above, the rotation operation and the movement operation of the rotary arm 25 are started at the same time or substantially simultaneously and are ended at the same time or substantially simultaneously. That is, the rotation speed and the movement speed of the rotary arm 25 are the time required for the rotary unit 26 to rotate the rotary arm 25 by 90 degrees, and the slide unit 27 moves the rotary arm 25 from the holding position P3 to the holding release position P4. The required time for making them substantially coincides with each other.

回転アーム25の回転作動及び移動作動が停止すると、ステップ#12でチャック部28が係合姿勢から解除姿勢に切り換えられ、ガラス基板Wは保持解除位置P4で解放される。そして、ステップ#13で上昇位置にある導出コンベヤ30の搬送作動が開始され、ガラス基板Wは下流側姿勢を維持したまま保持解除位置P4から導出位置P5まで搬送される(図12(d)参照)。これにより、姿勢変更手段24により保持解除位置P4に搬送されたガラス基板Wは、直ちに導出コンベア30に引き継がれて導出位置P5へ向けて搬送される。なお、導出コンベヤ30を上昇位置に切り換える前に搬送作動を開始させておいてもよい   When the rotation operation and the movement operation of the rotation arm 25 are stopped, the chuck portion 28 is switched from the engagement posture to the release posture in step # 12, and the glass substrate W is released at the holding release position P4. In step # 13, the conveying operation of the derivation conveyor 30 in the raised position is started, and the glass substrate W is conveyed from the holding release position P4 to the derivation position P5 while maintaining the downstream posture (see FIG. 12D). ). Thereby, the glass substrate W conveyed by the attitude | position change means 24 to the holding | maintenance release position P4 is immediately taken over by the derivation conveyor 30, and is conveyed toward the derivation | leading-out position P5. The transfer operation may be started before the lead-out conveyor 30 is switched to the raised position.

搬送対象のガラス基板Wを保持解除位置P4まで保持していた回転アーム25は、ステップ#12でチャック部28が解除姿勢に切り換えられると、搬送対象のガラス基板Wを保持解除位置P4から導出位置P5に導出コンベヤ30にて搬送している間に、後続するガラス基板Wの搬送のために、ステップ#15〜ステップ#16にて保持位置P3まで後退させ、かつ、保持位置P3用の回転位置まで逆回転させて、保持位置P3にて後続するガラス基板Wを保持できる状態に復帰させておく(図12(d)(e)参照)。   The rotating arm 25 that has held the glass substrate W to be transported to the holding release position P4 moves the glass substrate W to be transported from the holding release position P4 when the chuck portion 28 is switched to the release posture in step # 12. While being transported to P5 by the lead-out conveyor 30, in order to transport the subsequent glass substrate W, it is retracted to the holding position P3 in Step # 15 to Step # 16, and the rotational position for the holding position P3 Until the glass substrate W following the glass substrate W can be held at the holding position P3 (see FIGS. 12D and 12E).

また、ガラス基板Wを保持位置P3にて位置決めする一対のストッパ40は、搬送対象のガラス基板Wが、ステップ#9〜ステップ#10において回転アーム25が前進及び正回転して下降位置の一対のストッパ40の上方を通過した後にステップ#14で上昇位置に復帰させておく。これにより、回転アーム25の保持位置P3への復帰移動及び逆回転が終了する前に、後続する次の搬送対象のガラス基板Wを準備位置P1から先行して搬送しておき、予め導入位置P3に上流側姿勢で待機させておくことができる(図12(e)参照)。   Further, the pair of stoppers 40 for positioning the glass substrate W at the holding position P3 is a pair of the glass substrate W to be transported at the lowered position when the rotary arm 25 moves forward and forward in steps # 9 to # 10. After passing over the stopper 40, it is returned to the raised position in step # 14. Thereby, before the return movement to the holding position P3 and the reverse rotation of the rotating arm 25 are completed, the subsequent glass substrate W to be transferred next is transferred in advance from the preparation position P1, and the introduction position P3 is previously set. It can be made to stand by in an upstream attitude | position (refer FIG.12 (e)).

導出位置P5へ搬送されるガラス基板Wは、下流側部分の左右両端部が下流側コンベヤ3の上流端部で案内されながら導出コンベヤ30にて左右方向の中央部に対して搬送方向に沿う向きの推進力が付与されるため、その姿勢が下流側姿勢に維持された状態で搬送される(図12(d)参照)。   The glass substrate W transported to the lead-out position P5 is oriented along the transport direction with respect to the central portion in the left-right direction at the lead-out conveyor 30 while the left and right ends of the downstream portion are guided by the upstream end of the downstream conveyor 3. Because the propulsive force is applied, the sheet is transported in a state where the posture is maintained in the downstream posture (see FIG. 12D).

ガラス基板Wが導出位置P5まで搬送されると、ステップ#18で導出コンベヤ30の搬送作動が停止され、ステップ#19で導出コンベヤ30が下降位置に切り換えられる。そして、導出位置P5まで搬送されたガラス基板Wは、ステップ#17〜ステップ#20において下流側コンベヤ3により完了位置P6まで下流側姿勢にて搬送される(図12(e)参照)。   When the glass substrate W is transported to the lead-out position P5, the transport operation of the lead-out conveyor 30 is stopped at step # 18, and the lead-out conveyor 30 is switched to the lowered position at step # 19. And the glass substrate W conveyed to the derivation | leading-out position P5 is conveyed in the downstream attitude | position to the completion position P6 by the downstream conveyor 3 in step # 17-step # 20 (refer FIG.12 (e)).

以上説明した制御装置Hの制御動作によれば、導入コンベヤ29、姿勢変更モジュール4及び導出コンベヤ30が、ガラス基板Wを導入位置P2から導出位置P5まで分担して搬送することで、先行するガラス基板Wを搬送しながら後続のガラス基板Wをも搬送することが可能となっている。具体的には、図13に示すように、姿勢変更モジュール24の回転アーム25が保持位置P3で搬送対象のガラス基板Wを保持して保持位置P3から移動している間に、上流側コンベヤ2により準備位置P1から導入位置P2へ後続のガラス基板Wを搬送し、回転アーム25が保持位置P3に復帰するまでに、導入コンベヤ29にて保持位置P3に後続のガラス基板を搬送して準備しておくことができる。   According to the control operation of the control device H described above, the leading conveyor 29, the posture changing module 4 and the derivation conveyor 30 share and convey the glass substrate W from the introduction position P2 to the derivation position P5. It is possible to carry the subsequent glass substrate W while carrying the substrate W. Specifically, as shown in FIG. 13, while the rotary arm 25 of the posture changing module 24 holds the glass substrate W to be transported at the holding position P3 and moves from the holding position P3, the upstream conveyor 2 Then, the succeeding glass substrate W is transported from the preparation position P1 to the introducing position P2, and the succeeding glass substrate is transported to the holding position P3 by the introducing conveyor 29 and prepared until the rotating arm 25 returns to the retaining position P3. I can keep it.

これにより、図13のタイミングチャートに示すように、1枚のガラス基板Wを準備位置P1から完了位置P6まで搬送する場合の所要時間に対して、ガラス基板Wについての準備位置P1からの搬送が開始されてから、後続する次のガラス基板Wについての準備位置P1からの搬送が開始されるまでのタクトタイムを短くすることができる。例えば、図13のタイミングチャートにおいて1マスを2秒とした場合、1枚のガラス基板Wについての搬送所要時間は33秒であるのに対して、タクトタイムはおよそ17秒となる。このように、複数のガラス基板Wを準備位置P1から姿勢変更させながら搬送方向に沿って順次搬送するときの搬送効率が向上する。   As a result, as shown in the timing chart of FIG. 13, the glass substrate W is transported from the preparation position P <b> 1 to the required time for transporting one glass substrate W from the preparation position P <b> 1 to the completion position P <b> 6. It is possible to shorten the tact time from the start to the start of conveyance from the preparation position P1 for the next glass substrate W that follows. For example, if one square is 2 seconds in the timing chart of FIG. 13, the required transfer time for one glass substrate W is 33 seconds, while the tact time is approximately 17 seconds. In this way, the conveyance efficiency when sequentially conveying the plurality of glass substrates W along the conveyance direction while changing the posture from the preparation position P1 is improved.

〔別実施形態〕 [Another embodiment]

(1)回転アーム25の移動作動の停止制御については、ガイドレール27aの前後両端部に保持位置検出用センサS3及び保持解除位置検出用センサS4を設けて、これらのセンサの検出情報に基づいてフィードバック制御するものを例示したが、これに限らず、スライド部27の移動開始位置(例えば、後退限)からの移動量を検出することで回転アーム25の搬送方向における位置又はガイドレール27aにおける位置を検出する移動位置検出手段を設けて、この移動位置検出手段の検出情報に基づいてフィードバック制御してもよい。また、回転位置検出用ロータリエンコーダRE1の検出情報に基づいて、回転アーム25の移動作動をフィードバック制御してもよい。この場合、回転部26とスライドブロック27bとを連動連結して、スライド部27による回転アーム25の移動作動と回転部26による回転アーム25の回転作動とを連動させることが好ましい。 (1) Regarding the stop control of the moving operation of the rotary arm 25, a holding position detection sensor S3 and a holding release position detection sensor S4 are provided at both front and rear ends of the guide rail 27a, and based on detection information of these sensors. Although what performed feedback control was illustrated, it is not restricted to this, The position in the conveyance direction of the rotation arm 25 or the position in the guide rail 27a is detected by detecting the movement amount from the movement start position (for example, backward limit) of the slide part 27. It is also possible to provide a moving position detecting means for detecting the above and feedback control based on detection information of the moving position detecting means. Further, the moving operation of the rotary arm 25 may be feedback-controlled based on the detection information of the rotary position detecting rotary encoder RE1. In this case, it is preferable that the rotating unit 26 and the slide block 27b are linked and linked so that the moving operation of the rotating arm 25 by the sliding unit 27 and the rotating operation of the rotating arm 25 by the rotating unit 26 are linked.

(2)導入コンベヤ29の搬送作動の停止制御は、図10のステップ#3で導入コンベア29の搬送作動を開始してから設定時間経過後に停止するようにフィードフォワード制御してもよいし、保持位置P3にガラス基板Wが搬送されたことを検出する保持位置用在荷センサを設けて、この保持位置用在荷センサの検出情報に基づいて搬送作動を停止するようにフィードバック制御してもよい。 (2) As for the stop control of the conveyance operation of the introduction conveyor 29, the feedforward control may be performed so that the conveyance operation of the introduction conveyor 29 is stopped in step # 3 in FIG. A holding position occupancy sensor that detects that the glass substrate W has been conveyed may be provided at the position P3, and feedback control may be performed so as to stop the conveyance operation based on the detection information of the holding position occupancy sensor. .

(3)上記実施形態では、導入位置P2から保持位置P3までガラス基板Wを導入コンベヤ29にて搬送するものを例示したが、導入コンベヤ29を設けずに、回転アーム25の搬送方向の移動範囲を上流側に延長し、保持位置を上記実施形態における導入位置P2に相当する位置に設定して、制御装置Hにて、上記実施形態における導入位置P2に相当する位置にてガラス基板Wを保持し、その後、回転アーム25を回転させずに搬送方向下流側に設定量移動させた後に回転アーム25の回転を開始するように回転部26及び移動部27並びにチャック部28の作動を制御してもよい。 (3) In the above embodiment, the glass substrate W is conveyed by the introduction conveyor 29 from the introduction position P2 to the holding position P3. However, the movement range in the conveyance direction of the rotary arm 25 is not provided without providing the introduction conveyor 29. Is extended to the upstream side, the holding position is set to a position corresponding to the introduction position P2 in the above embodiment, and the glass substrate W is held by the control device H at a position corresponding to the introduction position P2 in the above embodiment. Thereafter, the operation of the rotating unit 26, the moving unit 27, and the chuck unit 28 is controlled so that the rotation of the rotating arm 25 is started after the rotating arm 25 is moved by the set amount downstream without rotating the rotating arm 25. Also good.

(4)上記実施形態では、保持解除位置P4から導出位置P5までガラス基板Wを導出コンベヤ30にて搬送するものを例示したが、導出コンベヤ30を設けずに、回転アーム25の搬送方向の移動範囲を下流側に延長し、保持解除位置を上記実施形態における導出位置P5に相当する位置に設定して、制御装置Hにて、ガラス基板Wを保持している回転アーム25を上記実施形態における保持解除位置P4に相当する位置から回転させずに搬送方向下流側に設定量移動させて上記実施形態における導出位置P5に相当する位置にてガラス基板Wの保持を解除するように回転部26及び移動部27並びにチャック部28の作動を制御してもよい。 (4) In the above embodiment, the glass substrate W is conveyed by the derivation conveyor 30 from the holding release position P4 to the derivation position P5. However, the rotation arm 25 is moved in the conveyance direction without providing the derivation conveyor 30. The range is extended to the downstream side, the holding release position is set to a position corresponding to the lead-out position P5 in the above embodiment, and the rotating arm 25 holding the glass substrate W is controlled by the control device H in the above embodiment. The rotation unit 26 and the rotation unit 26 are configured to move the set amount downstream in the transport direction without rotating from the position corresponding to the holding release position P4 and to release the holding of the glass substrate W at the position corresponding to the lead-out position P5 in the above embodiment. You may control the action | operation of the moving part 27 and the chuck | zipper part 28. FIG.

(5)上記実施形態では、導入搬送手段及び導出搬送手段が、昇降自在なベルトコンベヤにて構成されたものを例示したが、これに限らず、搬送物の底面に吸着自在な吸着部を昇降自在にかつ搬送方向に移動自在に設けて構成してもよい。また、搬送物の底面における上流側端部に係合する突起を往復移動自在にかつ昇降自在に備えて構成してもよい。
さらに、搬送物の底面における上流側端部に係合する突起を、無端ベルトの巻回外方側に突出する状態で備えた突起付きベルトを備えて構成してもよい。送風式支持手段にて非接触状態で支持されている搬送物の底面よりも下方に突起付きベルトの巻回経路を配置して、突起が上部側巻回部分に位置するときに送風式支持手段にて非接触状態で支持されている搬送物の底面よりも上方に突出する高さに位置するように構成しておけば、突起付きベルトを昇降自在に設けずに済む。この場合、突起を複数設けるには、巻回方向で隣り合う突起の巻回方向に沿う間隔を導入搬送手段の搬送距離よりも長く設定すればよい。
(5) In the above embodiment, the introduction conveying means and the derivation conveying means are exemplified by a belt conveyor that can be raised and lowered. It may be configured to be freely movable in the transport direction. Moreover, you may comprise so that the protrusion engaged with the upstream edge part in the bottom face of a conveyed product can be reciprocated and can be raised-lowered freely.
Furthermore, you may comprise the belt with a protrusion with which the protrusion engaged with the upstream edge part in the bottom face of a conveyed product protruded in the winding outward side of an endless belt. The winding path of the belt with protrusions is disposed below the bottom surface of the conveyed product supported in a non-contact state by the blowing type supporting means, and the blowing type supporting means is used when the protrusion is positioned at the upper winding portion. If it is configured to be located at a height that protrudes upward from the bottom surface of the conveyed product supported in a non-contact state, the belt with protrusions does not have to be provided so as to be movable up and down. In this case, in order to provide a plurality of protrusions, an interval along the winding direction of adjacent protrusions in the winding direction may be set longer than the transport distance of the introduction transport unit.

(6)上記実施形態では、導入搬送手段及び導出搬送手段が搬送される搬送物より下方に配置されたものを例示したが、これに代えて、導入搬送手段又は導出搬送手段を搬送される搬送物の上方に配置してもよい。 (6) In the above embodiment, the introduction conveying unit and the derivation conveying unit are illustrated below the conveyance object to be conveyed, but instead of this, the conveyance conveying the introduction conveying unit or the derivation conveying unit is performed. It may be placed above the object.

(7)上記実施形態では、上流側コンベヤ2がガラス基板Wをその短手方向が搬送方向に沿う姿勢にて搬送し、下流側コンベヤ3がその長手方向が搬送方向に沿う姿勢にて搬送するものを例示したが、これと逆の姿勢で搬送するものであってもよい。 (7) In the said embodiment, the upstream conveyor 2 conveys the glass substrate W in the attitude | position in which the transversal direction follows a conveyance direction, and the downstream conveyor 3 conveys in the attitude | position in which the longitudinal direction follows a conveyance direction. Although the thing was illustrated, you may convey by the attitude | position contrary to this.

(8)上記実施形態では、保持部が、平面視矩形状の搬送物の対向する短辺に対して係合する2つの係合作用部を両端部に備えて、搬送物の短手方向に沿う姿勢にて搬送物を保持するものを例示したが、保持部の具体的構成がこれに限定されるものではない。例えば、3個以上の係合作用部を備えたものであってもよく、その一例としては、平面視矩形状の搬送物の四辺の夫々に係合する4つの係合作用部を備えたものであってもよい。 (8) In the above embodiment, the holding portion includes two engaging action portions that engage with the opposing short sides of the rectangular object in plan view at both ends, and in the short direction of the object to be conveyed. Although what hold | maintains a conveyed product in the attitude | position which follows is illustrated, the specific structure of a holding | maintenance part is not limited to this. For example, it may be provided with three or more engaging action parts, and as an example, it is provided with four engaging action parts that engage with each of the four sides of the rectangular object in plan view. It may be.

(9)上記実施形態では、保持部の複数の係合作用部として、搬送物の端部に対して係合する係合姿勢と端部に対する係合が解除される解除姿勢とに横軸心周りの揺動により姿勢切換自在なものを例示したが、保持部の複数の係合作用部として、その下端部が、送風式支持手段にて非接触状態で支持される搬送物の下面高さよりも下方に位置する状態で搬送物の端部に対して係合する係合高さと、その下端部が、送風式支持手段にて非接触状態で支持される搬送物の上面高さよりも上方に位置する状態で搬送物の端部に対する係合が解除される解除高さとに高さ切換自在なものでもよい。 (9) In the above-described embodiment, the plurality of engaging action portions of the holding portion have a horizontal axis centered between an engagement posture that engages with the end portion of the conveyed product and a release posture that releases the engagement with the end portion. Although the one whose posture is freely switchable by swinging around is illustrated, the lower end portions of the plurality of engaging action portions of the holding portion are lower than the height of the lower surface of the conveyed product supported in a non-contact state by the blower-type support means. The engagement height that engages with the end portion of the conveyed product in a state of being positioned below, and the lower end portion thereof are higher than the height of the upper surface of the conveyed product that is supported in a non-contact state by the blower-type support means. It may be possible to switch the height to the release height at which the engagement with the end of the conveyed product is released in the positioned state.

(10)
上記実施形態では、搬送物の搬送姿勢を縦軸心周りに所定角度として90度回転させて搬送姿勢を変更するものを例示したが、搬送物を回転させる角度は適宜変更可能である。
(10)
In the above embodiment, the conveyance posture is changed by rotating the conveyance posture of the conveyance object by 90 degrees around the vertical axis as a predetermined angle, but the angle at which the conveyance object is rotated can be changed as appropriate.

(11)
上記実施形態では、搬送装置の搬送方向が一直線に沿うものを例示したが、例えば、姿勢変更手段よりも上流側の搬送部分と下流側の搬送部分とで搬送方向が異なるものであってもよい。この場合、姿勢変更手段における移動手段は、上流側搬送方向又は下流側搬送方向の何れかに沿って保持部を移動させるように構成すればよい。
(11)
In the above-described embodiment, the conveyance direction of the conveyance device is illustrated along a straight line. . In this case, the moving means in the posture changing means may be configured to move the holding unit along either the upstream conveyance direction or the downstream conveyance direction.

(12)上記実施形態では、送風式支持手段として、ファンフィルタユニットを縦横に複数配列して構成されたものを例示したが、送風式支持手段はファンフィルタユニットを用いずに構成してもよい。例えば、清浄空気を外部から供給する空気供給路を搬送装置に接続して、送風式支持手段が外部供給路から供給される清浄空気を搬送物の下面に向けて供給するものであってもよい。 (12) In the above embodiment, the blower support means is exemplified by a plurality of fan filter units arranged vertically and horizontally. However, the blower support means may be configured without using the fan filter unit. . For example, an air supply path for supplying clean air from the outside may be connected to the transport device, and the blower support means may supply clean air supplied from the external supply path toward the lower surface of the transported object. .

(13)上記実施形態では、上流側コンベヤ2及び下流側コンベヤ3における搬送ユニット6の推進力付与手段11aとして、複数のガイドローラを備えたものを例示したが、推進力付与手段11aとしては搬送ベルトを備えたもの等、種々変更が可能である。 (13) In the above embodiment, the propulsion force applying means 11a of the transport unit 6 in the upstream conveyor 2 and the downstream conveyor 3 is exemplified as having a plurality of guide rollers, but the propulsion force applying means 11a is transported. Various modifications such as those provided with a belt are possible.

(14)上記実施形態では、姿勢変更手段の全体が搬送手段と平面視で重なる位置に配置されたものを例示したが、これに限らず、例えば、姿勢変更手段における移動手段の一部を搬送手段の横脇に配置する等、姿勢変更手段の一部を、平面視で搬送手段の存在領域から外れた位置に配置してもよい。このような配置とすることで、搬送装置における姿勢変更手段が設けられた箇所の上下高さを低く抑えることができる。 (14) In the above-described embodiment, the posture changing unit is illustrated as being disposed at a position overlapping the conveying unit in plan view. However, the present invention is not limited thereto, and, for example, a part of the moving unit in the posture changing unit is conveyed. A part of the posture changing means, such as being arranged beside the means, may be arranged at a position deviating from the region where the conveying means is present in plan view. By setting it as such an arrangement | positioning, the vertical height of the location in which the attitude | position change means in the conveying apparatus was provided can be restrained low.

具体的には、例えば、上記実施形態におけるガイドレール27aを姿勢変更モジュール4における横側部に配置して、ガイドレール27aから姿勢変更モジュール4の内方側に、水平面において搬送方向と直交する方向に沿って、延びる状態のスライドアームを、搬送方向に沿ってスライド移動自在に設けて、このスライドアームの先端部に回転アーム25を縦軸心周りに回転自在に設けて、姿勢変更手段24を構成してもよい。   Specifically, for example, the guide rail 27a in the above-described embodiment is arranged on the lateral side portion in the posture changing module 4, and the direction perpendicular to the conveying direction in the horizontal plane from the guide rail 27a to the inner side of the posture changing module 4 A slide arm extending in the direction of the slide arm is provided so as to be slidable along the conveying direction, and a rotary arm 25 is provided at the tip of the slide arm so as to be rotatable about the longitudinal axis. It may be configured.

また、平面視で姿勢変更モジュール4の外部に位置する縦軸心周りに揺動自在な揺動アームを設けて、この揺動アームの揺動半径方向で外方側の部分(例えば、先端部分)に回転アーム25を縦軸心周りに回転自在(又は、縦軸心周りに回転自在かつ揺動アームに沿って移動自在)に設けて、姿勢変更手段24を構成してもよい。この場合、制御手段は、揺動アームの揺動作動(又は、揺動アームの揺動作動及び揺動アームに沿う回転アーム25の移動作動)を制御するように構成すればよい。   Further, a swing arm that is swingable about the longitudinal axis located outside the posture change module 4 in a plan view is provided, and a portion on the outer side in the swing radius direction of the swing arm (for example, a tip portion) The posture changing means 24 may be configured by providing the rotary arm 25 so as to be rotatable about the vertical axis (or rotatable about the vertical axis and movable along the swinging arm). In this case, the control means may be configured to control the swing operation of the swing arm (or the swing operation of the swing arm and the movement operation of the rotating arm 25 along the swing arm).

2、3、4 搬送手段
10 送風式支持手段
11 推進力付与手段
24 姿勢変更手段
25 保持部
26 回転手段
27 移動手段
28 係合作用部
29 導入搬送手段
30 導出搬送手段
X1 縦軸心
Y1 横軸心
D 搬送手段
H 制御手段
W 搬送物
P2 導入位置
P3 保持位置
P4 保持解除位置
P5 導出位置
2, 3, 4 Conveying means 10 Blow type supporting means 11 Propulsion force applying means 24 Posture changing means 25 Holding part 26 Rotating means 27 Moving means 28 Engaging action part 29 Introducing conveying means 30 Deriving conveying means X1 Vertical axis Y1 Horizontal axis Center D Conveying means H Control means W Conveyed object P2 Introduction position P3 Holding position P4 Holding release position P5 Deriving position

Claims (6)

搬送物の下面に向けて空気を供給して水平姿勢又は略水平姿勢で搬送物を非接触状態で支持する送風式支持手段及び前記送風式支持手段にて支持された搬送物に対して搬送方向の推進力を付与する推進力付与手段を備える搬送手段と、
前記搬送手段にて搬送される搬送物を縦軸心周りに回転させて搬送物の搬送姿勢を変更する姿勢変更手段と、
前記搬送手段及び前記姿勢変更手段の作動を制御する制御手段とが設けられた搬送装置であって、
前記姿勢変更手段が、非接触状態で支持された搬送物の平面視での複数の端部に対して係合することにより搬送物を保持自在な保持部と、前記保持部を縦軸心周りに回転させる回転手段と、前記保持部を搬送方向に沿って移動させる移動手段とを備えて構成され、
前記制御手段が、非接触状態で支持された状態の搬送物を保持位置において前記保持部により保持し、前記移動手段により前記保持部を移動させて搬送方向に沿って前記保持位置より下流側の保持解除位置まで非接触状態で支持された状態の搬送物を搬送する間に、前記移動手段により前記保持部を移動させながら前記回転手段により前記保持部を回転させて保持している搬送物の搬送姿勢を縦軸心周りに所定角度回転させ、前記保持解除位置にて搬送物の保持を解除するべく、前記保持部の保持作動、前記移動手段の移動作動、及び、前記回転手段の回転作動を制御するように構成されている搬送装置。
Blower-type support means for supplying air toward the lower surface of the conveyed product to support the conveyed product in a horizontal or substantially horizontal posture in a non-contact state, and a conveyance direction with respect to the conveyed product supported by the blow-type support means Conveying means comprising propulsive force applying means for applying the propulsive force of
Attitude changing means for changing the conveying posture of the conveyed object by rotating the conveyed object conveyed by the conveying means around the vertical axis;
A transport device provided with a control means for controlling the operation of the transport means and the posture changing means,
The posture changing means engages with a plurality of ends in a plan view of the conveyed product supported in a non-contact state, and a holding unit capable of holding the conveyed product, and the holding unit around the vertical axis A rotating means for rotating the holding portion and a moving means for moving the holding portion along the conveying direction,
The control means holds the conveyed product supported in a non-contact state by the holding unit at a holding position, moves the holding unit by the moving unit, and moves downstream of the holding position along the conveyance direction. While transporting a transported object that is supported in a non-contact state up to the holding release position, while the transporting part is moved by the moving part, the holding part is rotated by the rotating part and held. The holding posture of the holding portion, the moving action of the moving means, and the rotating action of the rotating means are to rotate the conveying posture around the vertical axis by a predetermined angle and release the holding of the conveyed object at the holding releasing position. Conveying device configured to control.
前記保持部が、前記搬送物の端部に対して係合する係合姿勢と前記端部に対する係合が解除される解除姿勢とに横軸心周りの揺動により姿勢切換自在な複数の係合作用部を備えて構成され、
前記制御手段が、前記保持位置及び前記保持解除位置において前記係合作用部の姿勢切換作動を制御するように構成されている請求項1記載の搬送装置。
A plurality of engagements whose posture can be switched by swinging around a horizontal axis between an engagement posture in which the holding portion engages with an end portion of the conveyed product and a release posture in which the engagement with the end portion is released. It is configured with a joint part,
The transport apparatus according to claim 1, wherein the control unit is configured to control a posture switching operation of the engaging action portion at the holding position and the holding release position.
前記搬送手段が、複数の搬送物を順次搬送するように構成され、
前記移動手段が、前記保持部を前記保持位置と前記保持解除位置との間で前記搬送手段の搬送方向に沿って往復移動させるように構成され、
前記保持位置よりも上流側に設定された導入位置から前記保持位置まで搬送物を前記搬送手段の搬送方向に沿って搬送物の搬送姿勢を維持しながら搬送する導入搬送手段が設けられ、
前記制御手段が、搬送物を保持している保持状態の前記保持部を前記保持位置から前記保持解除位置へ移動させた後、搬送物を保持していない非保持状態の前記保持部を前記保持位置に復帰移動させるべく、前記姿勢変更手段の作動を繰り返し制御するように構成され、かつ、前記保持状態の保持部の前記保持位置から前記保持解除位置への移動を開始させた後、前記非保持状態の保持部の前記保持位置への復帰移動を終了させるまでに、後続する搬送物を前記保持位置に搬送するべく、前記導入搬送手段の作動を制御するように構成されている請求項1又は2記載の搬送装置。
The transport means is configured to sequentially transport a plurality of transport objects,
The moving unit is configured to reciprocate the holding unit between the holding position and the holding release position along a transfer direction of the transfer unit;
Introducing and conveying means is provided for conveying the conveyed product from the introduction position set upstream of the holding position to the holding position while maintaining the conveying posture of the conveyed product along the conveying direction of the conveying means,
After the control unit moves the holding unit holding the conveyance object from the holding position to the holding release position, the holding unit holding the conveyance object is not held. In order to return to the position, the operation of the posture changing means is repeatedly controlled, and after the movement of the holding portion in the holding state from the holding position to the holding release position is started, 2. The operation of the introducing and conveying means is controlled so as to convey a subsequent conveyed product to the holding position before the return movement of the holding unit in the holding state to the holding position is completed. Or the conveying apparatus of 2.
前記制御手段が、前記保持部の回転と前記保持部の前記保持位置からの移動とを同時又は略同時に開始させるように、前記回転手段及び前記移動手段の作動を制御するように構成されている請求項3記載の搬送装置。   The control means is configured to control the operation of the rotating means and the moving means so as to start rotation of the holding part and movement of the holding part from the holding position simultaneously or substantially simultaneously. The transport apparatus according to claim 3. 前記搬送手段が、複数の搬送物を順次搬送するように構成され、
前記移動手段が、前記保持部を前記保持位置と前記保持解除位置との間で前記搬送手段の搬送方向に沿って往復移動させるように構成され、
前記保持解除位置から前記保持解除位置よりも下流側に設定された導出位置まで搬送物を前記搬送手段の搬送方向に沿って搬送物の搬送姿勢を維持しながら搬送する導出搬送手段が設けられ、
前記制御手段が、搬送物を保持している保持状態の前記保持部を前記保持位置から前記保持解除位置へ移動させた後、搬送物を保持していない非保持状態の前記保持部を前記保持位置に復帰移動させるべく、前記姿勢変更手段の作動を繰り返し制御するように構成され、かつ、前記保持状態の保持部が前記保持解除位置に位置した状態で保持している搬送物を解放させた後、後続の搬送物を保持している前記保持状態の保持部を前記保持解除位置に移動させるまでに、前記保持部から解放された搬送物を前記保持解除位置から搬送するべく、前記導出搬送手段の作動を制御するように構成されている請求項1〜4の何れか1項記載の搬送装置。
The transport means is configured to sequentially transport a plurality of transport objects,
The moving unit is configured to reciprocate the holding unit between the holding position and the holding release position along a transfer direction of the transfer unit;
Derived conveying means for conveying the conveyed product from the holding release position to a derived position set downstream of the holding released position while maintaining the conveying posture of the conveyed object along the conveying direction of the conveying means is provided,
After the control unit moves the holding unit holding the conveyance object from the holding position to the holding release position, the holding unit holding the conveyance object is not held. In order to return to the position, the operation of the posture changing means is configured to be repeatedly controlled, and the conveyance object held in a state where the holding portion in the holding state is located in the holding release position is released. Thereafter, in order to transport the transported object released from the holding unit from the holding release position until the holding unit holding the subsequent transported object is moved to the holding release position, the derivation transport is performed. The conveying apparatus according to claim 1, wherein the conveying apparatus is configured to control the operation of the means.
前記制御手段が、前記保持部の回転と前記保持部の前記保持解除位置までの移動とを同時又は略同時に終了させるように、前記回転手段及び前記移動手段の作動を制御するように構成されている請求項5記載の搬送装置。   The control means is configured to control the operation of the rotating means and the moving means so as to finish the rotation of the holding part and the movement of the holding part to the holding release position simultaneously or substantially simultaneously. The transport apparatus according to claim 5.
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JP2014037308A (en) * 2012-08-20 2014-02-27 Tokyo Automatic Machinery Works Ltd Article transportation device
JP2015174747A (en) * 2014-03-17 2015-10-05 東レエンジニアリング株式会社 Substrate levitation device
CN111977140A (en) * 2020-08-31 2020-11-24 安徽艺云玻璃有限公司 Storage equipment for glass transportation and using method thereof
CN111977140B (en) * 2020-08-31 2022-02-11 安徽艺云玻璃有限公司 Storage equipment for glass transportation and using method thereof
WO2023155407A1 (en) * 2022-02-21 2023-08-24 上海世禹精密机械有限公司 Semiconductor element overturning apparatus

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