JP2006016144A - Transfer robot - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transfer robot capable of attaining the scale-down of a workpiece conveyance system, miniaturizing a device, and delivering a workpiece smoothly while preventing adhesion of dust. <P>SOLUTION: This transfer robot A1 is provided with a frame member 4 having an open space 40 opened in the vertical direction, a plurality of slide arm mechanisms 5 provided in the frame member 4 like beams across the open space 40 and expanding and contracting in the horizontal direction while supporting a lower face of the workpiece W, and an air vent stage 6 provided to be stored in the open space 40 without interfering with the plurality of slide arm mechanisms 5 in the vertical direction and positioned at a higher place than the open space 40 relatively when the frame member 4 lowers, moves, and is at a predetermined position to levitate and hold the workpiece W by pneumatic pressure. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a transfer robot for transferring a plate-like workpiece such as a glass substrate for a liquid crystal panel from a predetermined part to another part while keeping it horizontal.

  An example of this type of transfer robot is disclosed in Patent Document 1. As shown in FIGS. 13 and 14 of the present application, the transfer robot disclosed in Patent Document 1 includes a hand 400 that holds a plate-like workpiece W horizontally, and the hand 400 in a predetermined horizontal linear movement process S. A linear movement mechanism 300 that moves forward and backward along the linear movement mechanism 300 and a lifting mechanism 200 that moves the support base 310 included in the linear movement mechanism 300 in the vertical direction are provided. In addition to the support base 310, the linear movement mechanism 300 includes a first horizontal link arm 320 having a base end connected to the support base 310, and a base end connected to the tip of the first horizontal link arm 320. And a second horizontal link arm 330 that supports the hand 400 at the tip so as to be rotatable about the vertical axis. The elevating mechanism 200 includes a first standing link arm 210 having a base end connected to the fixed base 100, a base end connected to the tip of the first standing link arm 210, and the support base horizontally. The second upright link arm 220 is configured to be rotatable around an axis and supported at the distal end portion. The support base 310 is moved in the vertical direction while maintaining a constant posture by the first and second standing link arms 210 and 220 rotating around the horizontal axis. As the first and second horizontal link arms 320 and 330 rotate about the vertical axis, the hand 400 moves forward and backward along the horizontal linear movement stroke S while maintaining a constant posture. The support base 310 is provided with a rotating member 311 that rotates about the vertical axis, and the support base 310 and the first horizontal link arm 320 are connected to each other via the rotating member 311.

  As shown in FIG. 13, such a transfer robot X has a robot unit adjacent to the buffer unit B so that the workpiece W can be received from the cassette unit C containing a large number of workpieces W via the buffer unit B. R is installed. In the cassette part C, a large number of workpieces W are held on the elevating stage C1 in a state where they are overlapped at a predetermined interval in the vertical direction. When the elevating stage C1 moves downward, the work W held at the lowermost stage is placed on the roller conveyor C2 of the cassette unit C. A plurality of wires (not shown) that support the lower surface of the workpiece W are laid across the lifting stage C1 along the conveyance width direction of the roller conveyor C2, and these wires enter the gap of the roller conveyor C2. be able to. Thereby, when the elevating stage C1 moves downward, the wire moves below the roller conveyor C2, and the workpiece W supported by the wire is left on the roller conveyor C2 and placed. Is done.

  Thereafter, the workpiece W is conveyed from the roller conveyor C2 of the cassette unit C onto the roller conveyor B1 of the buffer unit B. As shown in FIG. 14, a gap B2 into which the hand 400 of the transfer robot X can be inserted is provided in the roller conveyor B1 of the buffer B. The transfer robot X operates the lifting mechanism 200 and the linear movement mechanism 300 to place the hand 400 in the gap B2 of the roller conveyor B1, and further raises the hand 400 above the roller conveyor B1. . As a result, the workpiece W that has been on the roller conveyor B <b> 1 of the buffer unit B is transferred onto the hand 400. After that, the transfer robot X moves the hand 400 back to a predetermined position of the robot part R, rotates the rotating member 311 by, for example, 180 degrees or 90 degrees, and straightens again in a posture in which the hand 400 faces the workpiece processing unit (not shown). The moving mechanism 300 is activated. Thereby, the transfer robot X transfers the workpiece W received from the cassette unit C via the buffer unit B to the workpiece processing unit serving as a transfer destination.

JP 2003-275980 A

  However, in the above-described conventional transfer robot X, since the work W must be lifted from below the roller conveyor B1 and placed on the hand 400, the work W is transferred between the robot part R and the cassette part C. Buffer part B must be provided. That is, since the equipment of the buffer unit and the installation space are required, the work transfer system including the transfer robot becomes large.

  As shown in FIG. 13, the roller conveyors B1 and C2 must transport the workpiece W from the cassette unit C to the buffer unit B with a distance L0, while the transfer robot X includes the robot unit R and the buffer unit B. The hand 400 must be moved forward and backward with a distance L1 between the two and both of them must move a relatively long distance with respect to the work and the hand. In particular, the transfer robot has a drawback that the longer the distance L1 for moving the hand, the larger the robot in terms of ensuring stability during operation.

  Furthermore, since the lower surface of the workpiece W is in direct contact with the roller conveyors B1 and C2 and the hand 400, dust or the like is easily attached to the workpiece W, and the lower surface of the workpiece W may be damaged. From such a point, when delivering the workpiece W, the roller conveyors B1 and C2 and the hand 400 are moved relatively slowly. With this, the workpiece W cannot be delivered smoothly.

  The present invention has been conceived under the circumstances described above, and can reduce the scale of the work transfer system and the size of the apparatus, and can smooth the work while preventing adhesion of dust and the like. The challenge is to provide a transfer robot that can be handed over to other companies.

  In order to solve the above problems, the present invention takes the following technical means.

  The transfer robot provided by the present invention is a transfer robot that receives a plate-like workpiece from a predetermined portion while keeping the plate-like workpiece horizontal, and delivers the received workpiece to another portion, including a base member and the base A frame member supported by the member so as to be movable up and down, a plurality of slide arm mechanisms which are provided on the frame member and extend and contract in the horizontal direction while supporting the lower surface of the work, and the plurality of slide arm mechanisms, An air vent stage that is supported by the base member so as not to interfere in the vertical direction, and that floats the workpiece by air pressure when the frame member is moved downward and is in a predetermined position. It is a feature.

  As a preferred embodiment, the air vent stage is supported by the base member so as to be horizontally movable.

  According to such a configuration, for example, when receiving a workpiece from a predetermined part, the transfer robot places the air vent stage on the part. At this time, the frame member moves downward and is in a predetermined position. For this reason, the air vent stage is positioned relatively above the frame member. Thus, the air vent stage can move in the horizontal direction without being held by the frame member or the slide arm mechanism, and can take a posture closest to the predetermined portion. After that, the workpiece is conveyed from a predetermined part. At this time, the workpiece gradually moves on the air vent stage, and the workpiece is lifted by air pressure on the air vent stage. That is, the work moves on the air vent stage in a non-contact state with respect to the air vent stage. Thereby, a workpiece | work can be received smoothly, preventing adhesion of the dust etc. with respect to a workpiece | work effectively. Thereafter, the air vent stage returns to above the frame member while holding the workpiece. After that, when the frame member moves upward, the work is transferred from the air vent stage so as to be held by the plurality of slide arm mechanisms. Then, the plurality of slide arm mechanisms extend the work in the horizontal direction while holding the work, thereby delivering the work to another part.

  Therefore, according to the transfer robot according to the present invention, since the work can be received in a state where the air vent stage is placed sideways at the predetermined part, the equipment such as a conventional buffer part and its installation space are not required, and the work transfer system Can be scaled down. Further, the transfer robot can be miniaturized by shortening the horizontal movement distance of the air vent stage and the slide arm mechanism as much as possible. Furthermore, since the workpiece can be held in a non-contact state while floating on the air vent stage by air pressure, the workpiece can be smoothly delivered while preventing the attachment of dust and the like.

  As a preferred embodiment, the air vent stage is provided with a plurality of driving rollers or driving belts for moving the work in the horizontal direction while supporting the lower surface of the work. According to such a configuration, for example, when the workpiece is conveyed onto the air vent stage, the workpiece can be received more smoothly via the driving roller or the driving belt while the workpiece is lifted.

  In a preferred embodiment, the base member is configured to be rotatable about a vertical axis, and the base member is provided with an air supply source for sending air to the air vent stage. According to such a structure, even if it is the state which hold | maintained the workpiece | work on the air vent stage, for example, a base member can be rotated without trouble.

  As a preferred embodiment, the slide arm mechanism includes a guide rail that is directly fixed to the frame member, and a first slide arm that is slidably supported by the guide rail. The slide arm mechanism further includes a second slide arm that is slidably supported by the first slide arm and is in direct contact with the lower surface of the workpiece. According to such a configuration, for example, when the work held on the second slide arm is handed over, the first and second slide arms are extended to move the work to a target location while keeping the work horizontal. be able to.

  As a preferred embodiment, the frame member is provided with a clamp mechanism capable of clamping a diagonal portion or both side portions of the workpiece. According to such a configuration, the posture of the work held on the air vent stage or the slide arm mechanism can be corrected by the clamp mechanism, and the position adjustment of the work can be appropriately performed each time.

  In a preferred embodiment, the frame member and the plurality of slide arm mechanisms constitute a hand stage that moves in a vertical direction and a horizontal direction while holding a workpiece, and these hand stages are adjacent to each other vertically. The first hand stage and the second hand stage are in a stepped shape. According to such a configuration, workpiece transfer can be performed more efficiently by using two sets of hand stages alternately.

  As a preferred embodiment, an elevating mechanism for moving the base member in the vertical direction is provided. According to such a configuration, the height of the air vent stage and the slide arm mechanism can be adjusted to the height of each part, and the workpiece can be appropriately transferred to and from these parts.

  Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the accompanying drawings.

  Hereinafter, preferred embodiments of the present invention will be specifically described with reference to the drawings. 1 to 10 show an embodiment of a transfer robot according to the present invention. In each figure, constituent elements and some of them are omitted as appropriate.

  1 to 4, the transfer robot A1 of this embodiment is roughly divided into a lifting mechanism 2, a base member 3 that is moved up and down by the lifting mechanism 2, and a vertical movement to the base member 3. The frame member 4 that is supported, a plurality of slide arm mechanisms 5 provided in a beam shape on the frame member 4, and the open space of the frame member 4 without interfering with the plurality of slide arm mechanisms 5 in the vertical direction A plurality of air vent stages 6 are provided so as to be accommodated within 40. The frame member 4 and the plurality of slide arm mechanisms 5 constitute a hand stage that moves the workpiece W in a predetermined direction while holding the workpiece W. Such hand stages are stepwise adjacent to each other. As described above, an upper hand stage 4A and a lower hand stage 4B are provided. The air vent stage 6 is supported by the base member 3 so as to be horizontally movable. In the following description and drawings, the horizontal direction in which the workpiece W is moved is the x-axis direction, the horizontal direction orthogonal to the x-axis direction is the y-axis direction, and the vertical direction is orthogonal to both the x-axis and y-axis directions. Is the z-axis direction.

  As shown well in FIG. 9, the elevating mechanism 2 includes a fixed base 1, a first elevating motor M <b> 1 provided on the fixed base 1, and a base end portion that is rotatable about the y axis with respect to the fixed base 1. The base end 21a is connected to the first erecting link arm 20 to which 20a is connected, the second elevating motor M2 built in the front end 20b of the first erecting link arm 20, and the front end 20b of the first erecting link arm 20. The second upright link arm 21 that supports a pedestal 21c that supports a base 30 of the base member 3 to be described later on the front end portion 21b, and the first and second upright link arms 20 and 21 that are linked to the first and second upright link arms 20 and 21. Two auxiliary arms 22 and 23 are provided.

  The base end portion 20a of the first upright link arm 20 rotates around the y-axis when a rotational force is transmitted from the first elevating motor M1 via a speed reduction mechanism (not shown). The base end portion 21a of the second upright link arm 21 receives the rotational force from the second elevating motor M2 via a speed reduction mechanism (not shown), and thus uses the front end portion 20b of the first upright link arm 20 as a fulcrum. Rotate around y-axis. The first and second upright link arms 20 and 21 are configured to rotate in the opposite directions with the same angle. The first and second auxiliary arms 22 and 23 are intermediate members that are rotatably supported about the y axis between the distal end portion 20b of the first standing link arm 20 and the proximal end portion 21a of the second standing link arm 21. 24 are connected. The first and second auxiliary arms 22 and 23 are paired with the first and second standing link arms 20 and 21 so as to always form a parallelogram so that one end of each of the first and second auxiliary arms 22 and 23 is fixed to the fixed base 1 and the base 21c. And are rotatably connected. Accordingly, when the base end portions 20a and 21a of the first and second standing link arms 20 and 21 are rotated in a predetermined direction around the y axis, the distal end portion 21b of the second standing link arm 21 is substantially along the z axis direction. Accordingly, the pedestal 21c and the base member 3 move in the z-axis direction while maintaining a horizontal posture.

  As shown in FIGS. 2 to 4, the base member 3 includes a base 30 fixed to the base 21 c, a main body block 31 fixed on the base 30, and standing parts 31 a at both ends in the y-axis direction. The pair of upper and lower sliders 32 are supported on the inner wall of the standing portion 31a so as to be movable up and down, and the horizontal slider 33 is supported at the center upper portion of the main body block 31 so as to be horizontally movable.

  As shown well in FIG. 4, the base 30 of the base member 3 includes an upper part 30 a and a lower part 30 b that can be divided vertically. The lower portion 30b is directly fixed to the pedestal 21c, while the upper portion 30a is held so as to be rotatable around the z axis with respect to the lower portion 30b. In such a base 30, a rotation drive motor M3 is provided. When the rotational force of the rotation driving motor M3 is transmitted to the upper part 30a via a speed reduction mechanism (not shown), the main body block 31 rotates around the z axis together with the upper part 30a. On the other hand, as shown well in FIG. 3, the up and down slider 32 is supported on the standing portion 31 a of the main body block 31 via a pair of rails 31 b along the z-axis direction. A motor M4 for moving the vertical slider 32 up and down is provided in the vicinity of the standing portion 31a. A rotation shaft M4a of the motor M4 is connected to a ball screw shaft 32b built in the vertical slider 32 through a drive belt 32a. Both side portions of the frame member 4 are fixed to the inner wall side of the vertical slider 32. Thus, when the motor M4 is driven to rotate, the vertical slider 32 moves in the z-axis direction along the rail 31b, and the frame member 4 moves in the z-axis direction integrally with the vertical slider 32. In addition, a horizontal slider 33 is supported by a pair of rails 31 c along the x-axis direction at the center upper portion of the main body block 31. The horizontal slider 33 is provided with a plurality of support columns 33a so as to penetrate the open space 40 of the frame member 4 in the z-axis direction, and a plurality of air vent stages 6 are supported on the support columns 33a. Yes. Between the central upper portion of the main body block 31 and the horizontal slider 33, a ball screw mechanism 33b for moving the horizontal slider 33 in the x-axis direction and a motor (not shown) for driving the same are provided. Yes. Accordingly, when the motor is driven to rotate, the horizontal slider 33 moves along the rail 31c in the x-axis direction, and the air vent stage 6 moves together with the horizontal slider 33 in the x-axis direction. However, the air vent stage 6 is movable in the x-axis direction within a range in which the column portion 33 a of the horizontal slider 33 does not interfere with the frame member 4.

  As shown in FIG. 2, the frame member 4 has an open space 40 having a rectangular shape in plan view that is open in the z-axis direction. As is well shown in FIG. 3, the frame member 4 of the upper hand stage 4A and the frame member 4 of the lower hand stage 4B have an interval at which the workpiece W and the air vent stage 6 can enter between them. Both are fixed to the upper and lower sliders 32 while being overlapped while being opened. A plurality of (four per frame member in this embodiment) slide arm mechanisms 5 are provided on the upper portions of the frame members 4 so as to straddle the open space 40 along the x-axis direction. Further, the plurality of air vent stages 6 are arranged so as to occupy an area that is not straddled by the slide arm mechanism 5 in the open space 40 of the frame member 4. Accordingly, as shown in FIG. 4, in the state where the air vent stage 6 is at a predetermined home position, the slide arm mechanism 5 and the air vent stage can be moved even if the frame member 4 moves integrally with the upper and lower sliders 32 in the z-axis direction. 6 do not interfere with each other. Further, as shown by the solid line in FIG. 4, when the frame member 4 is at the lowest position, the air vent stage 6 is relatively positioned above the open space 40. Thereby, the air vent stage 6 can be moved in the x-axis direction. Further, as well shown in FIG. 2, clamps that can hold the diagonal portion of the workpiece W held on the slide arm mechanism 5 or the air vent stage 6 at the diagonal portion of the frame member 4. A mechanism 7 is provided. Such a clamp mechanism 7 extends outward from the outer portion of the frame member 4 along a diagonal direction (a horizontal direction that forms approximately 45 ° with the x-axis and the y-axis), as well shown in FIG. A horizontal rod 73a, an L-shaped metal fitting 73b fixed to the tip of the horizontal rod 73a, and a pair of guide rollers 73c supported so as to be rotatable around the z-axis with respect to the tips of the metal fitting 73b are provided. It is configured. In addition, an actuator 74 for moving the horizontal rod 73a in a diagonal direction is provided inside the frame member 4. The guide roller 73c is initially in a position where it does not contact the workpiece W, while the workpiece W is held on the slide arm mechanism 5 or the air vent stage 6, and when the workpiece W reaches a predetermined home position, the horizontal rod 73 a is pulled into the frame member 4 by the actuator 74. As a result, the guide roller 73c comes into contact with the diagonal portion of the workpiece W. Such a clamp mechanism 7 is provided to appropriately correct the posture of the work W held on the slide arm mechanism 5 or the air vent stage 6.

  As shown in FIG. 8, the slide arm mechanism 5 is slidably supported by the guide rail 50 and the guide rail 50 that are directly fixed to the frame member 4 (not shown in FIG. 8) along the x-axis direction. The first slide arm 51, the second slide arm 52, which is slidably supported by the first slide arm 51 and directly supports the lower surface of the workpiece W, and the first and second slide arms 51, 52 are arranged in the x-axis direction. A sliding motor M5 for sliding is provided.

  The guide rail 50 is fixed so as to straddle both front and rear ends of the frame member 4, and a sliding motor M5 is provided near the rear end of the guide rail 50 (see FIG. 4). As well shown in FIG. 8, inside the guide rail 50 are a first pulley gear 50a that is rotationally driven by a sliding motor M5, and a first pulley that travels in the x-axis direction via the first pulley gear 50a. A belt 50b is provided. A first slide arm 51 is connected to the first pulley belt 50b. A rack gear 50 c is provided inside the guide rail 50, while a pinion gear 51 a that meshes with the rack gear 50 c is provided inside the first slide arm 51. Further, inside the first slide arm 51, there are a second pulley gear 51c connected to the pinion gear 51a via the idle gear 51b, and a second pulley belt 51d running in the x-axis direction via the second pulley gear 51c. Is provided. A second slide arm 52 is connected to the second pulley belt 51d. Thus, when the slide motor M5 is rotationally driven in a predetermined direction, for example, the first slide arm 51 moves so as to extend along the guide rail 50, and the second slide arm 52 is also linked to the first slide arm 52 in the first direction. The first and second slide arms 51 and 52 are extended at the same time by moving along the slide arm 51. Conversely, when contracting, the first and second slide arms 51 and 52 contract simultaneously.

  As shown in FIG. 5, the air vent stage 6 includes a rectangular stage body 60 having a large number of openings 60b on the upper surface 60a, a porous disk body 61 fitted in each opening 60b, and the like. Configured. Each stage main body 60 is fixed to an upper portion of a support portion 33 a (not shown in FIG. 5) of the horizontal slider 33 and is integrated with the horizontal slider 33. In particular, a plurality of driving rollers 62 for forcibly moving the workpiece W in the x-axis direction while supporting the lower surface of the side portion of the workpiece W are provided on the outer sides of the stage body 60 located at both ends in the y-axis direction. (See FIGS. 2 and 6). At appropriate portions of the stage body 60 at both ends, a roller rotating motor 64, a transmission belt 66, and a pulley gear 67 for rotating a plurality of driving rollers 62 are incorporated (see FIG. 6). These drive rollers 62 are arranged at regular intervals along the x-axis direction. Further, as well shown in FIG. 6, the driving roller 62 protrudes slightly above the upper surface 60a of the stage body 60 and comes into contact with the lower surface of the workpiece W, and outside the small diameter portion 62a. A large-diameter portion 62b that regulates the workpiece W is integrally formed. The rotational force from the roller rotating motor 64 is transmitted to the plurality of driving rollers 62 via the transmission belt 66 and the pulley gear 67, whereby the plurality of driving rollers 62 rotate simultaneously. Note that the shape of the opening of the air vent stage and the disc body may not be particularly circular, and may be, for example, elliptical or rectangular. Further, as means for moving the workpiece W in the x-axis direction, for example, a roller conveyor using a driving belt may be used instead of the driving roller 62.

  Further, as well shown in FIG. 5, each stage body 60 has a plurality of air supply pipes 60c for sending air to the opening 60b and a plurality of air reservoirs of air sent from the air supply pipes 60c. A partition wall 60d is provided below the opening 60b. Air is sent to each stage main body 60 from the air supply source 8 (not shown in FIG. 5) via a flexible air pipe 80. As shown in FIG. 2, the air supply source 8 is provided at an appropriate portion of the base member 3. Thereby, even if the base member 3 rotates around the z-axis, the air pipe 80 drawn around the lower portion of the stage body 60 without changing the relative positional relationship between each stage body 60 and the air supply source 8. The posture is kept constant. That is, the base member 3 can be rotated without any trouble while air is sent from the air supply source 8 to the stage main body 60 via the air pipe 80.

  As described above, the stage main body 60 of the air vent stage 6 is positioned relatively above the open space 40 when the frame member 4 is at the lowest position. At this time, as shown in FIG. 2 and FIG. 10, the stage main body 60 is laterally attached to the cassette unit C by being advanced along the x-axis direction from a predetermined home position. When the workpiece W is sent from the cassette unit C, air is sent from the air supply source 8 to the stage body 60. The air is ejected to the upper surface 60 a of the stage body 60 through the disc body 61. Such a disc body 61 is made of, for example, a ceramic sintered body, and air is blown out from the lower portion of the opening 60b to the upper surface 60a of the stage body 60 through the minute holes to float the workpiece W. Note that the workpiece W can be similarly levitated even in a mechanism in which a plurality of small-diameter holes are provided on the upper surface of the stage main body 60 in place of the disc body 61 and air is ejected. At this time, the plurality of drive rollers 62 provided on the stage main bodies 60 at both ends are rotated. As a result, the work W sent from the cassette part C is floated through the ultrathin air layer between the upper surface 60a without contacting the upper surface 60a of the stage body 60, and the driving roller 62 rotates. Is forcibly moved in the x-axis direction. As a result, the workpiece W is held on the air vent stage 6. Thereafter, the stage main body 60 of the air vent stage 6 returns to a predetermined home position while holding the workpiece W from a state of being laid on the cassette part C. Thereafter, when the frame member 4 moves upward, the slide arm mechanism 5 is relatively positioned above the stage main body 60. As a result, the lower surface of the work W held on the air vent stage 6 comes into contact with the second slide arm 52 of the slide arm mechanism 5, and the work W is transferred from the air vent stage 6 to the slide arm mechanism 5. After that, the slide arm mechanism 5 is turned to the transfer destination of the workpiece W by the rotation of the base member 3, and then the first and second slide arms 51 and 52 of the slide arm mechanism 5 are extended. Then, the workpiece W received from the cassette unit C is delivered to another part as a transfer destination.

  Next, the operation of the transfer robot A1 will be described.

  As shown in FIG. 10, the transfer robot A1 is installed to transfer a workpiece W such as a glass substrate for a liquid crystal panel from the cassette unit C to a workpiece processing unit that is a transfer destination outside the figure. . More specifically, the transfer robot A1 is installed in the robot part R adjacent to the cassette part C as main equipment constituting the work transfer system. The transfer robot may be mounted on a carrier base that can move horizontally on the floor.

  The cassette unit C is generally provided with a configuration similar to that of the conventional one, but a configuration similar in part to the transfer robot A1 is employed as the cassette unit C of the present embodiment. That is, as well shown in FIGS. 11 and 12, a plurality of floating units having the same configuration as the air vent stage 6 of the transfer robot A1 are provided at a predetermined height where the workpiece W of the elevating stage C1 is lowered. 90 is installed. As shown well in FIG. 12, these levitation units 90 are arranged so as not to cross the wire (not shown) spanned on the elevating stage C1 to support the lower surface of the work W. It is installed at predetermined intervals along the direction of feeding W (conveyance direction). Further, on both sides of the floating unit 90 along the conveyance direction of the workpiece W, a plurality of conveyance rollers 91 or conveyance belts for forcibly feeding the workpiece W are provided at predetermined intervals. Each levitation unit 90 is provided with an opening 90a and a disc body 60b similar to those of the air vent stage 6, and is configured such that air is sent into the levitation unit 90 from an air supply source (not shown). According to the levitation unit 90 and the conveying roller 91, the workpiece W lowered from the elevating stage C1 is levitated via an extremely thin air layer between the upper surface of the levitation unit 90 without contacting the upper surface of the levitation unit 90. In addition, the workpiece W is forcibly moved by the conveying roller 91 that rotates in a predetermined direction. Thus, the workpiece W is sent out from the floating unit 90 of the cassette unit R toward the robot unit R where the transfer robot A1 is installed. At this time, the workpiece W is smoothly sent out in a substantially non-contact state with respect to the floating unit 90 except for a portion in contact with the conveyance roller 91. In addition, since air is blown against the lower surface of the workpiece W, dust and the like are effectively prevented from adhering to the workpiece W.

  The floating unit 90 provided in the front row in the cassette unit C has its front end positioned near the workpiece delivery port T provided between the cassette unit C and the robot unit R, and the workpiece W is floated in the front row. It is conveyed by the conveying roller 91 until it exceeds the front end of the unit 90. That is, the distance that the workpiece W is transported in the cassette unit C is approximately the distance L0 'shown in FIG.

  On the other hand, as well shown in FIG. 10, the transfer robot A <b> 1 of the robot part R has the air vent stage 6 placed on the front end of the frontmost floating unit 90 prior to receiving the workpiece W. At this time, the upper hand stage 4A and the lower hand stage 4B are in the state of being lowered to the lowest position. Therefore, the air vent stage 6 is positioned relatively above the open space 40 of the frame member 4 and can easily take a position advanced from the predetermined home position along the horizontal direction (x-axis direction). it can. That is, the distance that the air vent stage 6 moves in the horizontal direction to receive the workpiece W is approximately the distance L1 'shown in FIG. Thereafter, conveyance of the workpiece W in the cassette unit C is started, and the workpiece W moves onto the air vent stage 6.

  When the workpiece W moves onto the air vent stage 6, both sides of the lower surface of the workpiece W are supported by a plurality of rotating drive rollers 62, and the workpiece W is supported by the plurality of driving rollers 62. Moved up. The rotation of the driving roller 62 is stopped after a predetermined time has elapsed since the conveyance of the workpiece W was started. A stopper that restricts the movement of the workpiece is provided at the rear end of the air vent stage, and the rotation of the drive roller is stopped after a certain period of time, or a sensor that detects the workpiece is provided at the rear end of the air vent stage. Alternatively, the rotation of the driving roller may be stopped when a workpiece is detected by this sensor. Even when the workpiece W is transferred onto the air vent stage 6 in this manner, the workpiece W is smoothly received in a state of almost no contact with the air vent stage 6 except for a portion in contact with the drive roller 62. Further, since air is blown from the air vent stage 6 to the lower surface of the work W, adhesion of dust and the like to the work W is effectively prevented.

  Thereafter, the air vent stage 6 moves backward while holding the workpiece W, and is positioned immediately above the open space 40 of the frame member 4. After that, for example, the upper hand stage 4 </ b> A is moved up so as to be positioned relatively higher than the air vent stage 6. At this time, the workpiece W held on the air vent stage 6 is lifted by the slide arm mechanism 5, and the workpiece W is transferred from the air vent stage 6 to the second slide arm 52 of the slide arm mechanism 5. At this time, the second slide arm 52 comes into contact with the lower surface of the work W, and the posture of the work W may become inappropriate due to an impact or the like at that time. Therefore, when the workpiece W is placed on the second slide arm 52, the transfer robot A1 operates the clamp mechanism 7. As a result, the workpiece W on the second slide arm 52 is in a state where the two diagonal portions are sandwiched by the clamp mechanism 7 and is corrected to an appropriate posture in plan view. The clamp mechanism 7 may be operated when the workpiece W is moved from the cassette unit C onto the air vent stage 6 and the workpiece W is held on the air vent stage 6, for example.

  After that, the transfer robot A1 rotates the base member 3 by 180 degrees or 90 degrees, for example, so that the slide arm mechanism 5 of the upper hand stage 4A on which the work W is placed faces a desired work processing unit. The transfer robot A1 moves the workpiece W held on the upper hand stage 4A to the workpiece processing unit by operating the lifting mechanism 2 and the slide arm mechanism 5. By performing the series of operations as described above, the transfer robot A1 can efficiently transfer the workpiece W from the cassette unit C to the workpiece processing unit as the transfer destination. If the height when the workpiece W is received from the cassette unit C and the height when the workpiece W is delivered to the workpiece processing unit are greatly different, the transfer robot A1 operates the lifting mechanism 2 each time to move the base member 3 to each other. Adjust the height. Thereby, even if there is a considerable difference in height between the cassette unit C and the workpiece processing unit, the workpiece W can be transferred from the cassette unit C to the workpiece processing unit without any trouble. When moving the workpiece W from the workpiece processing section to the cassette section C, the workpiece W is taken out from the workpiece processing section using the lower hand stage 4B, and then the air vent stage 6 and the like are reversed to the above procedure. Operate to be. Thus, normally, the upper hand stage 4A is used to move the workpiece W from the cassette unit C to the workpiece processing unit, and the lower hand stage 4B is used to move the workpiece W in the opposite direction. Of course, you can use the opposite.

  Therefore, according to the transfer robot A1 of the present embodiment, the air vent stage 6 can be placed sideways on the cassette C, and the workpiece W can be received directly from the cassette portion C. In addition, the buffer section and the installation space therefor are not necessary, and the work transport system can be scaled down.

  Further, the transfer robot A1 can be installed as close as possible to the cassette part C, and the distance L1 ′ for moving the air vent stage 6 horizontally is considerably shorter than the conventional distance L1 (see FIG. 13). can do. Therefore, when receiving the workpiece W, it is only necessary to slightly move the air vent stage 6 in the horizontal direction, and the air vent stage 6 can be moved in a stable posture. Further, since the operating range of the lifting mechanism 2 and the air vent stage 6 may be smaller than that of the conventional one, it is possible to adopt a thing that is as small as possible, thereby miniaturizing the robot itself.

  Furthermore, by lifting the workpiece W onto the air vent stage 6 by air pressure, it is possible to hold the workpiece in a substantially non-contact state, so that there is almost no generation of static electricity that adversely affects the workpiece W and adhesion of dust and the like is prevented. The workpiece W can be received smoothly while preventing it.

  In addition, this invention is not limited to said embodiment.

  The transfer robot may be provided with one hand stage.

  Further, when the height at the time of receiving the workpiece from the cassette portion and the height at the time of delivering the workpiece to the workpiece processing portion are almost the same, there is no need for a lifting mechanism.

  The lifting mechanism is not limited to the link mechanism as in the above embodiment, and may be another mechanism that can be moved in the vertical direction or the horizontal direction, for example.

  The problem of the present invention can also be solved by providing a stage having a roller mechanism instead of the air vent stage of the above embodiment.

1 is an overall perspective view showing an embodiment of a transfer robot according to the present invention. FIG. 2 is an overall top view of the transfer robot shown in FIG. 1. It is a partial front view of the transfer robot shown in FIG. It is a whole side view of the transfer robot shown in FIG. FIG. 2 is a partially cut perspective view of an air vent stage included in the transfer robot shown in FIG. 1. FIG. 2 is a partial cross-sectional view of an air vent stage included in the transfer robot shown in FIG. 1. It is sectional drawing of the crank mechanism contained in the transfer robot shown in FIG. It is an internal structure figure of the slide arm mechanism contained in the transfer robot shown in FIG. It is an internal structure figure of the raising / lowering mechanism contained in the transfer robot shown in FIG. It is explanatory drawing for demonstrating operation | movement of the transfer robot shown in FIG. It is a partial front view of the cassette part shown in FIG. It is an internal top view of the cassette part shown in FIG. It is explanatory drawing for demonstrating the conventional transfer robot. It is explanatory drawing for demonstrating the conventional transfer robot.

Explanation of symbols

2 Lifting mechanism 3 Base member 4A Upper hand stage 4B Lower hand stage 4 Frame member 5 Slide arm mechanism 50 Guide rail 51 First slide arm 52 Second slide arm 6 Air vent stage 62 Drive roller 7 Clamp mechanism 8 Air supply source A1 Transfer robot W Work

Claims (9)

A transfer robot that receives a plate-like workpiece from a predetermined part while keeping it horizontal, and delivers the received workpiece to another part.
A base member;
A frame member supported by the base member so as to be vertically movable;
A plurality of slide arm mechanisms that are provided on the frame member and extend and contract in the horizontal direction while supporting the lower surface of the workpiece;
An air vent that is supported by the base member so as not to interfere with the plurality of slide arm mechanisms in the vertical direction, and that floats the workpiece by air pressure when the frame member is moved downward and is in a predetermined position. Stage,
A transfer robot characterized by comprising:   The transfer robot according to claim 1, wherein the air vent stage is supported by the base member so as to be horizontally movable.   The transfer robot according to claim 1, wherein the air vent stage is provided with a plurality of driving rollers or driving belts for moving the work in a horizontal direction while supporting a lower surface of the work.   The base member is configured to be rotatable about a vertical axis, and the base member is provided with an air supply source for sending air to the air vent stage. The transfer robot described.   5. The slide arm mechanism includes a guide rail that is directly fixed to the frame member, and a first slide arm that is slidably supported by the guide rail. Transfer robot described in 1.   The transfer robot according to claim 5, wherein the slide arm mechanism further includes a second slide arm that is slidably supported by the first slide arm and is in direct contact with the lower surface of the workpiece.   The transfer robot according to claim 1, wherein the frame member is provided with a clamp mechanism capable of clamping a diagonal part or both side parts of the workpiece.   The frame member and the plurality of slide arm mechanisms constitute a hand stage that moves in a vertical direction and a horizontal direction while holding a workpiece. As the hand stage, first steps that are stepped adjacent to each other in the vertical direction. The transfer robot according to claim 1, further comprising a second hand stage.   The transfer robot according to claim 1, further comprising a lifting mechanism that moves the base member in a vertical direction.

Images