JP5093618B2 - Board transfer equipment - Google Patents

Description

  The present invention provides a container transporting means for transporting a storage container that stores a plurality of substrates in a horizontal posture at intervals in the vertical direction to a substrate transfer position, and takes out the substrate from the storage container positioned at the substrate transfer position. Alternatively, the present invention relates to a substrate transfer facility provided with a substrate transfer device for transferring a substrate to store the substrate in the storage container.

Such substrate transfer equipment stores the substrate by transferring the storage container to the substrate transfer position by the container transfer means and then taking out the substrate from the storage container by the substrate transfer device or storing the substrate in the storage container. It is used when a plurality of substrates are accommodated in a container and conveyed together, and a substrate taken out from the storage container or a substrate accommodated in the storage container is conveyed.
In such a substrate transfer facility, conventionally, the storage container is formed in a cylindrical shape in a sideways posture, an opening for transferring the substrate is formed at one end thereof, and a container main body for storing a plurality of substrates therein A swing plate that includes a lid member that closes the entire surface of the opening, and a portion of the lid member facing the opening of the container main body is swingable about a horizontal axis along the lateral width direction of the opening intersecting the substrate transfer direction. They were arranged side by side in the vertical direction. When the substrate transfer device does not transfer the substrate to the storage container, the container is moved by closing the substrate transfer gap between the swing plates with the swing plate positioned in the vertical direction. It is possible to prevent dust from entering the container main body from the opening of the main body, and to prevent the substrate in the container main body from being contaminated with dust. When the substrate is transferred, the substrate is transferred to the storage container by the substrate transfer device by opening the gap for transferring the substrate between the swing plates with the swing plate positioned along the substrate transfer direction. It was made possible to transfer (for example, refer to Patent Document 1).

JP 2008-94494 A

However, in the above-described conventional substrate transport equipment, the container body with the lid member mounted on the container body is transported to the substrate transfer position by the container transport means, and the substrate body is transferred by the substrate transfer device. Since there is a lid member between the substrate transfer device and the substrate transfer device, the presence of this lid member prevents the container body from being sufficiently close to the substrate transfer device in the substrate transfer direction. As a result, the stroke required to transfer the substrate to the storage container becomes long, and it is difficult to transfer the substrate by the substrate transfer device.
Therefore, it is required to facilitate the transfer of the substrate by the substrate transfer apparatus, but it is desirable to facilitate the transfer of the substrate by the substrate transfer apparatus with a simple configuration.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a substrate transport facility that can easily transfer a substrate by a substrate transfer apparatus with a simple configuration.

The substrate transport facility according to the present invention includes a container transport unit that transports a storage container that stores a plurality of substrates in a horizontal posture with an interval in the vertical direction to a substrate transfer position, and the storage that is positioned at the substrate transfer position. A substrate transfer device for removing the substrate from the container or transferring the substrate to store the substrate in the storage container, wherein the first characteristic configuration is:
The storage container is formed in a cylindrical shape in a sideways posture, an opening for transferring a substrate is formed at one end of the storage container, and a container main body for storing a plurality of substrates therein, and the container main body from above And a lid member that closes the entire surface of the opening when the container is mounted on the container main body and is configured to be detachable upward. The container transporting unit moves the storage container downward. It is configured to convey to the substrate transfer position, and receives and supports the supported portion of the lid member during the downward movement of the storage container to the substrate transfer position by the container conveying means, and the lid member A receiving support for separating from the container body is provided, and the substrate transfer device is configured to transfer the substrate through the opening to the container body from which the lid member is detached. That.

That is, when the substrate is not transferred to the storage container by the substrate transfer device, dust is intruded into the container body from the opening by attaching a lid member to the storage container and closing the opening of the storage container. The substrate in the container body can be prevented from being contaminated by dust, and when the substrate is transferred to the storage container by the substrate transfer device, the lid is removed by the lid removing means. By detaching the member from the container main body, the substrate can be directly transferred to the container main body of the storage container by the substrate transfer device through the opening of the storage container not equipped with the lid member.
That is, since the storage container from which the lid member is detached from the container main body by the lid removing means is transferred to the substrate transfer position by the container transfer means, the substrate is transferred to the storage container by the substrate transfer device. Sometimes there is no lid member between the substrate transfer device, so that the container body can be brought close to the substrate transfer device in the substrate transfer direction, and the substrate transfer device can transfer the substrate by a stroke. Since it becomes short, it becomes easy to transfer the substrate by the substrate transfer device. In addition, when a substrate is transferred by the substrate transfer device, it is not necessary to form a gap for transferring the substrate in the lid member and transfer the substrate so as to pass through the gap. Thus, it becomes easy to transfer the substrate by the substrate transfer device.

During the downward movement of the storage container to the substrate transfer position by the container transport means, the supported portion of the lid member is received and supported by the receiving support body, and the lid member is detached from the container body. That is, in order to release the lid member from the storage container by using the downward movement of the storage container by the container transport means for transporting the storage container to the substrate transfer position, the support member is provided on the lid member and moved downward. When the container is located at the lid release position, the lid member is arranged so that the substrate transfer device can be easily transferred by a simple configuration that only provides a receiving support for receiving and supporting the supported portion of the lid member. It can be detached from the container body.
Therefore, it has become possible to provide a substrate transport facility that can easily transfer a substrate by the substrate transfer apparatus with a simple configuration.

  According to a second characteristic configuration of the substrate transport facility according to the present invention, in the first characteristic configuration, the supported portion rotates about a horizontal axis along a horizontal width direction intersecting an arrangement direction of the container body and the lid member. A plurality of free rotating bodies are arranged side by side, and the receiving support body includes an engaging concave portion into which the plurality of rotating bodies are engaged.

That is, when the lid member is supported by the receiving support body, the plurality of rotating bodies of the lid member are in the state of being received and supported in the engaging recesses of the receiving support body. The lid member can be supported in a state where it is difficult to swing and difficult to shift in the horizontal direction.
Further, even when the lid member deviates in the horizontal substrate transfer direction with respect to the receiving support body, the rotating body becomes difficult to slide in contact with the engaging recess when the rotating body rotates. Generation of dust when supported by can be suppressed.
Therefore, it is possible to support the lid member in a state where the lid member is not easily rocked and displaced in the horizontal direction by the receiving support body, and it is possible to suppress the generation of dust when the lid member is supported by the receiving support body. It has come to be able to provide a substrate transfer facility.

  According to a third characteristic configuration of the substrate transport facility according to the present invention, in the first characteristic configuration, the supported portion is configured by a plate-shaped body formed in a plate shape, and the receiving support body is the plate-shaped body. It is in the point comprised with the engagement recessed part which engages.

That is, when the lid member is supported by the receiving support body, the plate-like body of the lid member is in a state of being received and supported in a large area by being engaged with the engaging recess of the receiving support body. The lid member can be supported in a stable state that is difficult to be displaced in the horizontal direction by being received and supported in a wide area by the receiving support body.
Accordingly, it is possible to provide a substrate transport facility that can support the lid member in a stable state by the receiving support.

  According to a fourth characteristic configuration of the substrate transport facility according to the present invention, in the second characteristic configuration, the supported portion includes two rotating bodies at an upper end portion of the lid member, and the container body and the lid member are arranged. Due to its own weight more than a set angle to the side of the lid member away from the storage container when supported by the receiving support body. This is in that a restricting portion for restricting the swing is provided.

That is, the supported portion is configured by arranging the two rotating bodies in the arrangement direction so that the two rotating bodies are positioned on both sides of the center of gravity of the lid member in the arrangement direction. When the supported portion of the lid member is received and supported by the receiving support body, the two rotating bodies located on both sides of the lid member are received and supported by the engaging recesses, and thus supported by the receiving support body. The lid member can be prevented from swinging such that the lower part of the lid member moves away from the container body and the lid member swinging such that the lower part of the lid member approaches the container body. Can be prevented from coming into contact with the container body. In addition, since the restricting portion is provided with a restricting portion that restricts the swinging of the lid member due to its own weight beyond the set angle toward the side away from the storage container, the lid can be moved even when the lid member swings along the alignment direction. The swinging of the member can be easily settled, and the contact of the lid member to the container body can be prevented also in this respect.
Accordingly, it has become possible to provide a substrate transport facility that can prevent the lid member from coming into contact with the container body when the lid member is detached from the container body.

  According to a fifth feature configuration of the substrate transport facility according to the present invention, in any one of the first to fourth feature configurations, the substrate transfer device is provided in a fixed position, and the container transport means includes the storage. In order to position the substrate to be transferred in the container at a transfer height corresponding to the substrate transfer device, the receiving container is configured to support the storage container so as to be movable up and down at the substrate transfer position. However, the removed lid member is moved to close the portion of the opening of the storage container located at the substrate transfer position above the substrate to be transferred, by the removed lid member. It is configured to support a position above the target substrate and close to the opening of the storage container at the substrate transfer position in the substrate transfer direction, and the storage container positioned at the substrate transfer position In the opening The substrate is fixed at a position below the transfer target substrate and close to the opening of the storage container at the substrate transfer position in the substrate transfer direction so as to close a portion below the transfer target substrate. The lid is provided in a fixed position.

That is, the storage container is moved up and down by the container transfer means, and the substrate to be transferred is positioned at the transfer height corresponding to the substrate transfer device among the plurality of substrates, thereby transferring the substrate to be transferred. Can be transferred at random to a predetermined height of the storage container.
In addition, by moving the storage container up and down by the container transfer means, there is no need to move up and down the substrate transfer device having a more complicated structure than the storage container, so the height direction between the substrate to be transferred and the substrate transfer device Can be easily aligned.

Then, the lid member closes the portion above the transfer target substrate at the opening of the storage container, and closes the portion below the transfer target substrate at the opening of the storage container with the fixed lid. When the substrate is transferred to the storage container, the upper part and the lower part of the substrate to be transferred in the opening of the container body are closed by the lid member and the fixed lid, and stored in the substrate transfer device. When the substrate is transferred to the container, it is possible to prevent dust from entering the container body from the opening as much as possible, and it is possible to suppress the substrate in the container body from being contaminated with dust.
In addition, the lid member removed from the container body by the lid removing means is used to close the portion above the substrate to be transferred in the opening of the storage container. Therefore, it is possible to close the upper part and the lower part of the opening of the storage container with a simple configuration.
Therefore, the substrate to be transferred can be randomly transferred to a predetermined height of the storage container, and the alignment of the substrate to be transferred and the substrate transfer device in the height direction can be easily performed. While being able to do so, it has become possible to provide a substrate transport facility that can suppress contamination of the substrate when transferring the substrate to the container body with a simple configuration.

  According to a sixth feature configuration of the substrate transport facility according to the present invention, in any one of the first to fifth feature configurations, the container body includes a plurality of support plates for placing and supporting a rectangular substrate in a vertical direction. The substrate transfer device is configured in a state of being spaced apart, and the substrate transfer device is downstream in the substrate take-out direction in the support plate provided in the container main body in a state where the storage container is located at the substrate transfer position. A levitation air ejector that is disposed at a location adjacent to the container adjacent to the end and ejects air between a lower surface of a substrate to be taken out and an upper surface of the support plate on which the substrate is placed and supported; A take-out means for taking out the substrate to be taken out from the support plate that has floated from the support plate due to the air blown out by the air blower for use from the storage container in a state of passing over the floating air blower, and Lies in toward between the lower surface of the substrate of the extraction subject withdrawn at surface and the retrieving means is constituted by an auxiliary air ejection member for ejecting air.

That is, by forming an air layer that flows from the downstream side to the upstream side in the substrate extraction direction between the substrate to be extracted and the support plate, the substrate to be extracted is supported by this air layer, and the substrate Can be taken out by the substrate transfer device so as to pass above the floating air jetting body.
And since the auxiliary air ejecting body for ejecting air is provided between the upper surface of the floating air ejecting body and the lower surface of the substrate to be taken out taken out by the substrate transfer device, the auxiliary air ejecting body Since an air layer is formed above the floating air jet body by the jetted air, the substrate to be taken out is supported by this air layer also above the floating air jet body.
Accordingly, it has become possible to provide a substrate transport facility in which the substrate to be taken out does not come into contact with the flying air jet when passing over the floating air jet.

The side view which shows the board | substrate conveyance equipment in 1st Embodiment The perspective view which shows the storage container in 1st Embodiment. The perspective view which shows the cover member side of the storage container in 1st Embodiment. The side view which shows the state in which the cover member in 1st Embodiment is received and supported The side view which shows the raising / lowering position of the storage container in 1st Embodiment. The side view which shows the raising / lowering position of the storage container in 1st Embodiment. The perspective view which shows a mode that the cover member in 1st Embodiment is removed. The perspective view which shows a mode that the cover member in 2nd Embodiment is removed. The side view which shows the raising / lowering position of the storage container in another embodiment (1) Side view showing supported part in another embodiment (8) Side view showing a plurality of rotating bodies in another embodiment (9) The figure which shows the plate-shaped body in another embodiment (9). Front view of substrate processing equipment Side view of substrate processing equipment Plan view of substrate processing equipment Side view of substrate transfer device Perspective view of storage container Perspective view of storage container Diagram showing support plate Plan view of board relay unit Side view showing the gripping part in the gripping position A plan view showing the gripping portion at the gripping position Side view showing the gripping portion in the grip release position Plan view showing the gripping portion at the grip release position Side view showing the gripping portion at the pressing end position Side view showing gripping part in retracted position Plan view showing the holding portion in the retracted position Side view showing air jetting body for levitation and air jetting body for supply The perspective view which shows the air jet body for levitation | floating and the air jet body for supply Schematic showing the detection sensor Control block diagram

<< First Embodiment >>
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
As shown in FIG. 1, the substrate transport facility includes a container transport unit 111 that transports the storage container 2, and a substrate transfer device that transfers the substrate 1 to the storage container 2 transported by the container transport unit 111. 112.
The substrate transfer device 112 is configured to take out the substrate 1 from the storage container 2 transported by the container transport means 111 and store the substrate 1 in the storage container 2. It is configured to both take out the substrate 1 from the container 2 and store the substrate 1 in the storage container 2.
Incidentally, the substrate in the present embodiment is a rectangular substrate such as a glass substrate used for a liquid crystal display or a plasma display.

[Storage container]
As shown in FIGS. 1 and 2, the storage container 2 includes a container body 41 that is formed in a cylindrical shape in a sideways posture and that stores a plurality of substrates 1 therein, and a lid that is attached to one end of the container body 41. A member 42 and a fan filter unit 43 attached to the other end of the container body 41 are provided.
As shown in FIG. 17, the container main body 41 is configured to include a plurality of support plates 45 as support portions for placing and supporting the substrate 1 in a state of being spaced apart in the vertical direction. A plurality of rectangular substrates 1 are held and stored in a horizontal posture at intervals in the vertical direction in a form in which the substrates 1 are placed and supported separately.

The lid member 42 is attached to one end of the container main body 41 so as to close and close the entire surface of the substrate loading / unloading port 44 as an opening for transferring the substrate formed in one end of the cylindrical container main body 41. The fan filter unit 43 closes and closes the entire surface of the substrate inlet / outlet port 44 formed at the other end portion of the cylindrical container body 41 and ventilates the container body 41 from the other end side toward the one end side. It is attached to the other end portion of the container body 41 in order to make it possible. The lid member 42 and the fan filter unit 43 are configured to be detachable from the container main body 41.
Incidentally, the lid member is formed larger than the width in the vertical direction of the substrate loading / unloading port 44 of the container body and larger than the width in the horizontal width direction.
For convenience, the direction in which the container body 41 and the lid member 42 are arranged is referred to as an arrangement direction, and the direction along the horizontal direction intersecting with the arrangement direction is referred to as a lateral direction.

As shown in FIG. 4, the lid member 42 is engaged with and supported by the engagement portion 114 by engaging with the engagement portion 114 located at the upper end portion of the one end portion of the container body 41 from above. A joint portion 115 is provided. That is, the lid member 42 can attach the lid member 42 to the container main body 41 by moving the lid member 42 downward with respect to the container main body 41 to engage the engaged portion 115 with the engaging portion 114. The engaging member 115 is disengaged from the engaging portion 114 by moving the lid member 42 upward with respect to the container body 41, and the lid member 42 can be detached from the container body 41. Yes.
As described above, the lid member 42 is configured to be attachable to the container body 41 from the upper side and detachable from the upper side.

  The engaged portion 115 of the lid member 42 is supported in a state of projecting downward at the tip end portion of the tongue piece 117 provided at the upper end portion of the lid body 116 with the lid member 42 projecting toward the container body side. The lid member 42 is provided so as to be positioned within the lateral width of the container main body 41 and the lid member 42 when the lid member 42 is mounted on the container main body 41. Moreover, the front-end | tip part located in the lower end of the to-be-engaged part 115 is formed in the spherical shape.

The engaging portion 114 of the container body 41 has a circular shape in plan view and is formed to be recessed downward, and a pair of lid members 42 provided in the state where the lid member 42 is mounted on the container body 41. It is formed at a position corresponding to each of the engaged portions 115.
When the shape of the engaging portion 114 is described, the bottom portion of the engaging portion 114 has a cylindrical shape with the same diameter in the vertical direction, and the diameter of the distal end portion so that the engaged portion 115 is fitted. It is formed in a size with a slightly larger diameter. Further, the inlet side portion of the engaging portion 114 is formed in a shape such that the lower end has the same diameter as the bottom side portion and has a larger diameter toward the upper side so as to guide the engaged portion 115 to the bottom side portion.
Incidentally, as shown in FIGS. 2 and 3, the tongue piece 117 is provided on each of the one side portion and the other side portion of the lid body 116 in the lateral width direction, and the engaged portion 115 is a pair of tongue pieces. 117 is supported by each of them. Further, the engaging portion 114 in the container body 41 is formed at a location above the substrate loading / unloading port 44, and is formed so that the engaged portion 115 is engaged above the substrate loading / unloading port 44.

Therefore, as shown in FIG. 4, the storage container 2 has the engaging portion 114 and the engaged portion 115 formed as described above. The portion 115 is easily engaged with the engaging portion 114, and the lid member 42 is easily attached to the container main body 41.
Further, when the lid member 42 is mounted on the container main body 41, the engaged portion 115 is fitted to the bottom side portion of the engaging portion 114, so that the lid member 42 is mounted on the container main body 41. 42 is restricted from moving in the horizontal direction with respect to the container body 41.
Further, in a state where the lid member 42 is mounted on the container main body 41, the distal end portion of the engaged portion 115 is formed in a spherical shape, and the portion above the distal end portion is positioned at the inlet side portion of the wide engaging portion 114. Therefore, the lid member 42 is configured to be swingable about the horizontal axis along the horizontal width direction around the engaging portion 114 in a state where the lid member 42 is mounted on the container main body 41.
Then, by providing the engaged portion 115 on the lid member 42 as described above, the engaged portion 115 is provided closer to the container body than the center of gravity of the lid member 42 in the alignment direction. Therefore, when the lid member 42 is mounted on the container body 41 as shown in FIG. 4A, the lid member 42 is urged toward the container body by its own weight, and the lid member 42 is pressed against the container body 41 by the urging by its own weight. Thus, the lid member 42 is difficult to swing.

In a state where the lid member 42 is attached to one end of the container body 41, an exhaust gap E is formed between the container body 41 and the lid member 42.
In other words, the lid member is formed so that the spacer 118 for forming the exhaust gap E is positioned between the container body 41 and the lid member 42 in a state where the lid member 42 is mounted on the container body 41. 42 is provided on the surface of the container main body.
Thus, by providing the spacer 118 in the lid member 42, the lid member 42 is formed in a shape in which an exhaust gap E is formed between the lid body 42 and the container body 41 when the lid member 42 is mounted on the container body 41. The air introduced into the container main body 41 by the fan filter unit 43 passes outside through an exhaust gap E formed between the container main body 41 and the lid member 42 as indicated by an arrow in FIG. Exhausted.
The lid member 42 is in contact with the container body 41 only at the engaged portion 115 and the spacer 118, and the exhaust gap E is partially closed around the substrate loading / unloading port 44 due to the presence of the spacer 118. In this state, it is formed over the entire circumference.

As shown in FIGS. 3 and 4, the lid member 42 is provided with supported portions 119 on both sides in the lateral width direction at the upper end portion of the lid body 116 so as to protrude outward in the lateral width direction from the lid body 116. .
The supported portion 119 is configured by arranging two rotating bodies 120 that are rotatable around a horizontal axis along the horizontal width direction along the alignment direction. These two rotating bodies 120 are provided on the lid member 42 so as to be positioned at the same height, and are formed with the same diameter.
Of the two rotating bodies 120, the rotating body 120 located on the lid member side in the alignment direction is placed on the lid body 116 so as to be positioned above the center of gravity of the lid member 42 and on the lid member side in the alignment direction from the center of gravity. The rotating body 120 that is provided and located on the container body side in the arrangement direction is provided on the lid body 116 so as to be located above the center of gravity of the lid member 42 and on the container body side in the arrangement direction from the center of gravity. As a result, the center of gravity of the lid member 42 is positioned between the centers of the two rotators 120 and below, and when the lid member 42 is detached from the container main body 41 by receiving and supporting it in the engaging recess 124 described later. It is possible to prevent the lid member 42 from coming into contact with the container main body 41 by suppressing the swinging of the lid member 42 along the alignment direction.

[Substrate transfer device]
As shown in FIG. 28A, the substrate transfer device 112 is a floating air that blows out air between the lower surface of the substrate 1 to be transferred and the upper surface of the support plate 45 that supports the substrate 1. The substrate 1 to be transferred, which has been levitated from the support plate 45 by the ejection of air from the ejection body 71 and the flying air ejection body 71, is transferred to the storage container 2 in a state where the substrate 1 passes above the flying air ejection body 71. And a substrate loading / unloading mechanism 73 configured to transfer the substrate 1 through the substrate loading / unloading port 44 from the container main body 41 from which the lid member 42 is detached.
The levitation air ejector 71 is configured to cause the ejected air to flow on the upper surface of the levitation air ejector 71, and the substrate transferred on the upper surface of the levitation air ejector 71 and the substrate loading / unloading mechanism 73. It is comprised so that the auxiliary | assistant air ejection body which ejects air toward between may also be used.
Further, as shown in FIG. 6, the substrate transfer device 112 is positioned on one end side where the substrate loading / unloading port 44 of the container main body 41 is formed with respect to the storage container 2 positioned at the substrate transfer position P4. The fixed position is provided on the floor surface.

[Container transport means]
As shown in FIGS. 1, 5, and 6, the container transport unit 111 includes an elevating unit 61 provided adjacent to the upstream side of the substrate transfer apparatus 112 in the substrate take-out direction, and a substrate of the elevating unit 61. The stacker crane 7 is provided in a state adjacent to the upstream side in the take-out direction.
When the storage container 2 is transported to the substrate transfer position P4 (see FIG. 6) by the container transport means 111, the storage container 2 is first moved upward toward the downstream side in the substrate take-out direction by the stacker crane 7. After horizontally moving to the position P1 (see FIG. 5A), the storage container 2 is moved vertically downward from the upper position P1 to the intermediate position P3 (see FIG. 5C), and the storage container 2 is moved up and down. It is wholesaled so as to be placed and supported on the means 61. Thereafter, the storage container 2 is moved vertically downward from the intermediate position P3 to the substrate transfer position P4 (see FIG. 6) by the lifting means 61.
Further, when the storage container 2 is transported from the substrate transfer position P4 by the container transport means 111, the storage container 2 is first moved vertically upward from the substrate transfer position P4 to the intermediate position P3 by the lifting means 61. . Thereafter, the storage container 2 on the elevating means 61 is scooped up by the stacker crane 7, and the storage container 2 is moved up vertically from the intermediate position P3 to the upper position P1, and then the storage container 2 is moved from the upper position P1 to the substrate. Move horizontally toward the upstream side in the removal direction.

The storage container 2 passes through the lid removal position P2 (see FIG. 5B) while the stacker crane 7 moves the storage container 2 up and down in the vertical direction between the upper position P1 and the intermediate position P3. In addition, a lid removal position P2 is set.
That is, the lifting means 61 places and supports the storage container 2 and moves the storage container 2 vertically downward from the intermediate position P3 above the substrate transfer position P4 and below the lid removal position P2 to the substrate transfer position P4. The stacker crane 7 corresponds to a moving platform lowering table and moves the storage container 2 vertically downward from the upper position P1 above the lid release position P2 to the intermediate position P3 in order to place the storage container 2 on the lifting means 61. Corresponding to the transfer device to be moved, the container transport means 111 constituted by the stacker crane 7 and the lifting means 61 moves the storage container 2 downward downward from the lid removal position P2 to the substrate transfer position P4. It is comprised so that it may carry.

As shown in FIG. 1, the elevating means 61 guides the pair of left and right support bases 63 that move up and down by placing and supporting the container body 41 in the storage container 2, and the pair of left and right support bases 63 so as to be movable up and down separately. It comprises a pair of left and right guide columns 64 to support.
And as shown in FIG. 6, the raising / lowering means 61 is to position the support plate 45 for placing and supporting the substrate 1 to be transferred in the storage container 2 at a transfer height corresponding to the substrate transfer device 112. The storage container 2 is configured to be movable up and down at the substrate transfer position P4.
That is, the lifting / lowering means 61 moves up the substrate transfer position P4 as the substrate transfer position P4 for positioning the substrate 1 stored in the lowest position of the container body 41 at a height that can be transferred by the substrate transfer device 112. The position P5 (see FIG. 6D) and the lowering as the substrate transfer position P4 for positioning the substrate 1 stored in the uppermost position of the container body 41 at a height that can be transferred by the substrate transfer device 112. The storage container 2 is moved up and down across the side substrate transfer position P6 (see FIG. 6E), and the substrate 1 to be transferred in the storage container 2 and the support plate 45 for mounting and supporting it are transferred to the substrate. It is configured to be positioned at the transfer height corresponding to the mounting device 112.

[Fixed lid]
In the substrate transfer facility, the substrate transfer port 44 of the storage container 2 located at the substrate transfer position P4 is closed below the transfer target substrate 1 and the substrate transfer port so as to close a portion below the transfer target substrate 1. A fixed lid 121 is provided in a fixed position at a position close to the substrate loading / unloading port 44 of the storage container 2 positioned at the substrate transfer position P4 in the loading direction. A portion below the substrate 1 to be transferred is closed in the substrate loading / unloading port 44 of the storage container 2 that moves up and down between P5 and the lower side substrate transfer position P6.
Further, the fixed lid 121 is provided so as to overlap with the floating air jet 71 of the substrate transfer device 112 in the vertical direction, and the substrate 1 is transferred by the substrate loading / unloading mechanism 73 and the floating air jet 71. The substrate 1 is provided below the substrate transfer device 112 in a state of being close to the substrate transfer device 112 so as not to hinder the floating of the substrate 1 due to the above.

[Lid attachment / detachment means]
As shown in FIG. 5, the substrate transport facility is provided with a lid attaching / detaching means 122 as a lid removing means for removing the lid member 42 from the container main body 41 in a state where the storage container 2 is located at the lid removing position P2. The lid attaching / detaching means 122 is configured to attach the lid member 42 to the container main body 41 in a state where the storage container 2 is located at the lid removing position P2 in addition to the above-described removal of the lid member 42. Has been.
The lid attaching / detaching means 122 receives and supports the supported portion 119 of the lid member 42 at the lid removing position P2 in the middle of the downward movement of the storage container 2 to the substrate transfer position P4 by the container conveying means 111 to cover the lid member 42. Is provided with a receiving support 123 for detaching the container from the container main body 41.
That is, as shown in FIGS. 5 and 7, the storage container 2 to which the lid member 42 is attached is moved downward in the vertical direction so that the stacker crane 7 passes the lid removal position P2 from the upper position P1 to the intermediate position P3. At this time, the supported portion 119 of the lid member 42 is received and supported by the receiving support 123 at the lid removal position P2, and the lid member 42 is detached from the container body 41.
Further, when the storage container 2 from which the lid member 42 has been detached is moved upward vertically by the stacker crane 7 from the intermediate position P3 to the upper position P1 so as to pass the lid removal position P2, the lid is at the lid removal position P2. The engaged portion 115 of the member 42 is engaged and supported by the engaging portion 114 of the container main body 41, and the lid member 42 is attached to the container main body 41.

The receiving support 123 will be described. As shown in FIG. 1, the receiving support 123 is placed at the substrate transfer position P4 so as to receive and support the supported portions 119 located on both sides of the lid member 42 in the width direction. It is provided on both sides in the width direction of the storage container 2 and is supported by the elevating means 61 in a form supported by each of the pair of guide columns 64.
As shown in FIG. 4, the receiving support 123 is provided so as to protrude from the guide column 64 to the downstream side in the substrate take-out direction, and a supported portion 119 (two rotating bodies 120) is provided at the tip. An engaging recess 124 for engaging is provided.

As shown in FIG. 4, the bottom surface that receives and supports the supported portion 119 in the engaging recess 124 is formed as an inclined surface that is positioned higher toward the downstream side in the substrate take-out direction.
Therefore, the bottom surface of the engaging recess 124 is formed as an inclined surface as described above, and the two rotating bodies 120 having the same diameter are provided on the lid member 42 at the same height. Since the center of gravity of the lid member 42 is located between the centers of the two rotating bodies 120 and below, and the lid member 42 is supported by the container body 41 so as to be swingable around the horizontal axis, the storage container When the two rotating bodies 2 are moved downward and receive and support the two rotating bodies 120 by the receiving support body 123, first, the rotating bodies 120 on the lid member side in the alignment direction (downstream side in the substrate take-out direction) As the lid member 42 first comes into contact with the bottom surface and moves relatively upward with respect to the container body 41, the lid member 42 swings so that the lower part is separated from the container body 41 with the engaged portion 115 as a fulcrum. Move.
Thereafter, the rotating body 120 on the container body side in the alignment direction (upstream side in the substrate take-out direction) comes into contact with the bottom surface of the engaging recess 124, and the swinging of the lid member 42 so that the lower part is separated from the container body 41 is restricted. . Then, as the lid member 42 moves further upward relative to the container body 41, the engaged portion 115 is disengaged from the engaging portion 114 of the container body 41, and the lid member 42 is detached from the container body 41. Is done. When the lid member 42 is detached from the container main body 41 in this way, the two rotating bodies 120 are received and supported by the bottom surface of the engaging recess 124 so that the lower part of the lid member 42 is supported by the container main body 41. In addition to restricting the swinging of the lid member 42 so as to move away from the container, the swinging of the lid member 42 so that the lower part of the lid member 42 approaches the container body 41 is also restricted. And the contact of the lid member 42 to the container body 41 is prevented.

Further, the lid member 42 received and supported by the receiving support 123 is received and supported by the inclined surface of the engaging recess 124 so that the lower side is inclined away from the container body 41. Therefore, when the storage container 2 is moved up and down between the lid removal position P2 and the substrate transfer position P4 in a state where the cover member 42 is received and supported by the reception support 123, the storage container is stored at the substrate transfer position P4. When the 2 is moved up and down, the container main body 41 and the lid member 42 are not easily rubbed, and the dust is hardly generated.
Incidentally, the engaging recess 124 corresponds to a restricting portion that restricts the swinging of the lid member 42 due to its own weight more than a set angle toward the side away from the container body 41 when the lid member 42 is supported by the receiving support 123. To do.

  The side surfaces of both sides of the engaging recess 124 in the substrate transfer direction are formed as inclined surfaces located on the inner side of the recess in the substrate transfer direction toward the lower side, and the supported portion 119 is engaged in the engaging recess 124. At this time, the supported portion 119 is easily engaged with the engaging recess 124, and the receiving support 123 is configured to easily receive and support the lid member 42. In addition, the inclination of the bottom surface of the engaging recess 124 is gentler than the inclination of the side surface.

Then, as shown in FIG. 6, the lid attaching / detaching means 122 (receiving support 123) is the object to be transferred at the substrate loading / unloading port 44 of the storage container 2 located at the substrate transfer position P4 by the removed lid member 42. The lid member 42 that has been detached is closed to the substrate loading / unloading port 44 of the storage container 2 located at the substrate transfer position P4 above the substrate 1 to be transferred and in the substrate transfer direction so as to close the portion above the substrate 1. The cover member 42 is configured so as to be supported at an adjacent position, and is moved up and down between the ascending side substrate transfer position P5 and the descending side substrate transfer position P6 by the lid member 42 detached by the lid removing means 122. A portion above the substrate 1 to be transferred in the substrate loading / unloading port 44 of the storage container 2 is closed.
That is, the lid detachment position P2 is a position where the lid member 42 attached to the storage container 2 located at the lid detachment position P2 overlaps with the flying air ejection body 71 of the substrate transfer device 112 in the vertical direction. Also, the lid member 42 attached to the storage container 2 located at the lid release position P2 does not hinder the transfer of the substrate 1 by the substrate loading / unloading mechanism 73 or the floating of the substrate 1 by the flying air ejector 71. The position is set to be close to the substrate transfer device 112 above the mounting device 112.
Since the lid member 42 attached to the storage container 2 located at the lid release position P2 overlaps with the flying air ejection body 71 of the substrate transfer device 112 in the vertical direction, the container transport means 111 The lid member 42 can be detached from the container main body 41 by simply moving the storage container 2 to the substrate transfer position P4 by moving downward from the lid removal position P2 vertically, and at the substrate transfer position P4. The space between the container body 41 and the substrate transfer device 112 in the substrate transfer direction can be made smaller than the thickness of the lid member 42 in the substrate transfer direction (alignment direction). The mounting device 112 and the container main body 41 of the storage container 2 can be brought close to each other in the substrate transfer direction. Thereby, it becomes easy to transfer the substrate to the container body 41 of the storage container 2 by the substrate transfer device 112.

In the case of transporting the storage container 2 to the substrate transfer position P4 (position below the ascending side substrate transfer position P5, position below the descending side substrate transfer position P6) by the container transport means 111, first, the stacker crane 7 After the storage container 2 is horizontally moved to the upper position P1 (see FIG. 5A) toward the downstream side in the substrate take-out direction, the storage container 2 is moved from the upper position P1 to the intermediate position P3 (see FIG. 5C). The lid member 42 is detached from the container body 41 by the lid attaching / detaching means 122 at the lid removal position P2 (see FIG. 5B) during the downward movement, and the lid member 42 is detached. The storage container 2 is unloaded so as to be placed on and supported by the lifting means 61. Thereafter, the storage container 2 from which the lid member 42 has been detached is moved downward by the elevating means 61 from the intermediate position P3 to the substrate transfer position P4 vertically downward.
Further, when the storage container 2 is transported from the substrate transfer position P4 (position of the ascending side substrate transfer position P5 or lower, position of the descending side substrate transfer position P6 or higher) by the container transport means 111, first, the lifting means 61 is moved to the lifting / lowering means 61. Then, the storage container 2 from which the lid member 42 has been detached is moved upward and vertically from the substrate transfer position P4 to the intermediate position P3. Thereafter, the storage container 2 on the lifting / lowering means 61 is scooped up by the stacker crane 7, and the storage container 2 is moved up vertically from the intermediate position P3 to the upper position P1, and at the lid removal position P2 during the upward movement. After the lid member 42 is attached to the container body 41 by the lid attaching / detaching means 122, the storage container 2 to which the lid member 42 is attached is moved horizontally from the upper position P1 toward the upstream side in the substrate take-out direction.

<< 2nd Embodiment >> Plate-shaped body support type Hereinafter, 2nd Embodiment of this invention is described based on drawing.
The second embodiment is configured in the same manner as the first embodiment except that the configuration of the supported portion 119 is different. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted. The configuration different from the first embodiment will be mainly described.

As shown in FIG. 8, the lid member 42 is provided with supported portions 119 on both sides in the lateral width direction at the upper end portion of the lid body 116 so as to protrude from the lid body 116 outward in the lateral width direction and toward the container body side. Yes.
The supported portion 119 is composed of a plate-like body 126 formed in a plate shape, and its lower surface is formed as a horizontal flat surface along the alignment direction. Further, the engaged portion 115 is supported in a state in which the engaged portion 115 protrudes downward from the distal end portion of the supported portion 119 on the container body side.
The plate-like body 126 is provided in a posture along the alignment direction from the container body side to the lid member side in the alignment direction with respect to the gravity center above the gravity center of the lid member 42. Although the shape of the engaging recess 124 in the receiving support 123 is slightly different from that of the first embodiment, the configuration is the same as that of the first embodiment in that the bottom surface and side surfaces are formed as inclined surfaces. Has been.

  Therefore, the bottom surface of the engaging recess 124 is formed as an inclined surface as described above, the lower surface of the plate-like body 126 is formed as a horizontal flat surface along the alignment direction, and the lid member 42 is Since the container body 41 is supported so as to be swingable around the horizontal axis, when the plate-like body 126 is received and supported by the receiving support 123, first, the lid member side in the arrangement direction of the plate-like body 126 is used. The portion (on the downstream side in the substrate take-out direction) comes into contact with the bottom surface of the engaging recess 124 first, and the lid member 42 is engaged as the lid member 42 moves upward relative to the container body 41. The lower portion of the plate-like body 126 swings so that the lower portion is separated from the container main body 41 with the joint portion 115 as a fulcrum. On the lid member 42 in contact Swing is restricted. Then, as the lid member 42 moves further upward relative to the container body 41, the engaged portion 115 is disengaged from the engaging portion 114 of the container body 41, and the lid member 42 is detached from the container body 41. Is done.

<< 3rd Embodiment >> Frame support type Hereinafter, 3rd Embodiment of this invention is described based on drawing.
The third embodiment is configured in the same manner as the first embodiment except for the configuration of the engaging portion 114, the engaged portion 115, the supported portion 119, and the receiving support 123. Constituent elements similar to those of the embodiment are given the same reference numerals and description thereof is omitted. Mainly different structures from the first embodiment will be described.

As shown in FIG. 17, the engaged portion 115 of the lid member 42 is configured by an engaged frame 46 provided at the upper end portion of the lid main body 116 with the lid member 42 protruding toward the container main body side. Yes.
The engaged frame 46 is formed in a U shape having a lower opening when viewed in the width direction, and a connecting frame portion 46a in which the lower end portion on the lid member side in the arrangement direction is connected and supported by the lid body 116 is arranged in the width direction. A pair of engaging bar-like portions 46b that are connected and supported at the lower end of the connecting frame portion 46a on the container body side in the arrangement direction are installed across the pair of connecting frame portions 46a. It is configured to engage with the joint portion 114 from above.

  Further, the engaged frame 46 is provided with a support bar-like portion 46c that is received and supported by an engaging member 65 as a receiving support 123, and this support bar-like portion 46c is provided in the connecting frame portion 46a. It is connected and supported by the lower end part of the container main body side of the arrangement direction, and is spanned over a pair of connection frame part 46a. That is, the engaged frame 46 is configured to also serve as a supported portion 119 that is received and supported by the engaging member 65, and the engaged frame 46 is located upward from the upper end portion of the lid body 116. It is provided in a protruding state.

  As shown in FIG. 16, the receiving support 123 has a lid body in a state where the storage container 2 is positioned at the upper position P <b> 1 so as to receive and support the supported portions 119 positioned on both sides of the lid member 42 in the lateral width direction. 116 is provided in a state of being supported by the ceiling portion so as to be positioned between the upper surface of 116 and the supporting rod-shaped portion 46 c of the engaged frame 46.

<< Another Embodiment >>
(1) In the first embodiment, the storage container 2 passes through the lid removal position P2 while the stacker crane 7 moves the storage container 2 up and down in the vertical direction between the upper position P1 and the intermediate position P3. As shown in FIG. 9, the storage container 2 is moved while the storage container 2 is moved up and down in the vertical direction between the intermediate position P3 and the substrate transfer position P4 as shown in FIG. The lid detachment position P2 may be set so as to pass through the lid detachment position P2.
In this case, the lifting / lowering means 61 corresponds to a support lowering table that places and supports the storage container 2 and moves the storage container 2 downward from the upper position P1 above the lid removal position P2 to the substrate transfer position P4. 7 corresponds to a preliminary transport means for transporting the storage container 2 to the upper position P1 so as to place the storage container 2 on the support lowering table. Incidentally, the stacker crane 7 moves the storage container 2 along the horizontal direction to the downstream side in the substrate removal direction, and horizontally moves the storage container 2 to the upper end position P0 (see FIG. 9A) above the upper position. After that, the storage container 2 is moved vertically downward from the upper end position P0 to the upper position P1 (see FIG. 9B), and the storage container 2 is placed so as to be placed on and supported by the lifting means 61.
Incidentally, in each of the above embodiments, the stacker crane 7 may move the storage container 2 downward toward the upper position P1 while moving the storage container 2 toward the downstream side in the substrate take-out direction.

(2) In each of the above embodiments, the container transporting means 111 moves the storage container 2 vertically downward from the upper position P1 or the lid release position P2 to the intermediate position P3, and the storage container 2 is moved to the intermediate position P3. The container transport means 111 is configured to move the storage container 2 vertically downward from the upper position P1 or the lid release position P2 to the substrate transfer position P4. You may comprise by the stacker crane 7 moved down.

(3) In each of the above embodiments, the lid removal means 122 is a part above the substrate 1 to be transferred in the substrate loading / unloading port 44 of the storage container 2 located at the substrate transfer position P4 by the lid member 42 that has been removed. So as to be close to the substrate loading / unloading port 44 of the storage container 2 positioned at the substrate transfer position P4 above the transfer target substrate 1 passing through the detached lid member 42 and in the substrate transfer direction. The lid removing means 122 is moved to the substrate transfer position P4 so as not to close the substrate loading / unloading port 44 of the storage container 2 located at the substrate transfer position P4 by the lid member 42 that has been removed. You may comprise so that it may support in the position spaced apart from the substrate loading / unloading port 44 of the storage container 2 located in the board | substrate transfer position P4 above the storage container 2 located, or a board | substrate transfer direction.
Further, although the fixed lid 121 for closing the portion below the substrate 1 to be transferred in the substrate loading / unloading port 44 of the storage container 2 located at the substrate transfer position P4 is provided, the fixed lid 121 may not be provided.

(4) In each of the above embodiments, the container body 2 is configured with the support plate 45 for placing and supporting the substrate 1 in a state where the substrate plate 2 is spaced apart in the vertical direction, and the substrate transfer device 112 is configured to eject the floating air The body 1 and the take-out means 73 are provided, and the substrate 1 that has been levitated by the floating air jet 71 is transferred by the take-out means 73. A support device for mounting and supporting the substrate in a state spaced apart in the vertical direction, and the substrate transfer device 112 includes a fork device for mounting and supporting the intermediate portion in the horizontal width direction of the substrate 1. The substrate may be configured to be placed and supported and transferred.

(5) In each of the above embodiments, the engaged portion that is recessed downward is provided on the upper surface of the one end portion of the container body, and the lid member is engaged with the upper end portion of the container body. An engaged portion that protrudes laterally outward may be provided on the lateral side of the container, and the lid member may be configured to engage with the lateral side of the container body.

(6) In each of the above embodiments, the storage container 2 at the substrate transfer position P4 out of the substrate transfer device 112 and the storage container 2 at the substrate transfer position P4 is moved up and down to be transferred in the storage container 2. Although the support plate 45 that supports the substrate 1 is positioned at a height corresponding to the substrate transfer device 112, the substrate transfer device 112 of the substrate transfer device 112 and the storage container 2 at the substrate transfer position P4. The support plate 45 that supports the substrate 1 to be transferred in the storage container 2 may be positioned at a height corresponding to the substrate transfer device.

(7) In each of the above embodiments, the substrate is a rectangular substrate such as a glass substrate used for a liquid crystal display or a plasma display, but a circular substrate such as a semiconductor wafer used for an IC chip. For example, the application used and the shape of the substrate can be appropriately changed.

(8) In the first embodiment, the two rotating bodies 120 constituting the supported portion 119 are arranged in a state where the diameters are formed to be the same size and the rotation axes of the rotating bodies 120 are at the same height. The lower ends of the two rotating bodies 120 are arranged at the same height, and the lower ends of the rotating bodies 120 located on the lid member side are the same as the lower ends of the rotating bodies 120 located on the container body side. You may make it become lower than height.
That is, as shown in FIG. 13A, the two rotating bodies 120 constituting the supported portion 119 are formed with the same diameter and the rotating bodies 120 positioned on the lid member side in the arranging direction are arranged in the arranging direction. 13 may be arranged side by side in the arrangement direction in a state where the height is lower than the height of the rotating body 120 located on the container main body side, and as shown in FIG. 13B, it is located on the lid member side in the arrangement direction. The rotating bodies 120 may be formed in a larger diameter than the rotating bodies located on the container main body side in the arrangement direction, and the rotation axes of the respective rotating bodies 120 may be arranged side by side in the arrangement direction.
Even in such a configuration, when the revenue container 2 moves downward and receives and supports the two rotating bodies 120 by the receiving support 123, as in the first embodiment, first, the lid members in the alignment direction are first used. The rotating member 120 on the side contacts the bottom surface of the engaging recess 124 first, and the lid member 42 swings, and then the rotating body 120 on the container body side in the arrangement direction contacts the bottom surface of the engaging recess 124 and the lid The swing of the member 42 is restricted.
By the way, the shape of the bottom surface of the engaging recess 124 may be any shape as long as the rotating body 120 on the lid member side in the arrangement direction contacts the bottom surface of the engaging recess 124 before the rotating body 120 on the container body side. For example, the shape of the bottom surface of the engaging recess 124 can be appropriately changed.

(9) In the first and second embodiments, the plurality of rotating bodies 120 are provided on the lid member 42 in a state where they are arranged in the arrangement direction, or the plate-like body 126 is provided on the lid member 42 in a posture along the arrangement direction. The supported portion 119 is provided on the lid member 42 in a state along the alignment direction. However, as shown in FIG. 11A, the plurality of rotating bodies 120 are provided on the lid member 42 in a state in which they are aligned in the vertical direction. As shown in FIG. 12A, the supported portion 119 may be provided on the lid member 42 in a state along the vertical direction by providing the plate-like body 126 on the lid member 42 in a posture along the vertical direction.
When the supported portion 119 is thus provided on the lid member 42 in a state along the vertical direction, as shown in FIGS. 11 (b) and 12 (b), the substrate at the entrance side portion of the engagement recess 124 is provided. The side surfaces on both sides in the transfer direction are formed as inclined surfaces positioned inward in the substrate transfer direction toward the lower side, and the side surfaces on both sides in the substrate movement direction in the bottom side portion of the engagement recess 124 are formed on the inlet side portion. It is formed on a vertical plane extending vertically downward from the lower end. Then, when the lid member 42 is detached from the container main body 41, the supported portion 119 is fitted to the bottom side portion that is recessed vertically below the engaging recessed portion 124 so that the inclination of the supported portion 119 is regulated. By doing so, the rocking | fluctuation along the alignment direction of the cover member 42 can be suppressed.
Incidentally, although not shown, the side surfaces on both sides in the substrate transfer direction in the bottom portion of the engaging recess 124 are formed as inclined surfaces extending obliquely downward from the lower end of the inlet portion, and the lid member 42 is formed from the container body 41. When the cover member 42 is received and supported by the receiving support 123 so that the supported portion 119 is fitted to the bottom side portion that is recessed obliquely below the engaging recess 124 when being detached. You may comprise so that it may become the inclination attitude | position which leaves | separates from the container main body 41. FIG.

(10) In the first and second embodiments, the supported portion 119 is received and supported by the engagement recess 124 in a state where the swinging of the lid member 42 along the alignment direction is restricted. The supported portion 119 is configured to be received and supported by the engaging recess 124 in a state where the swinging of the lid members 42 along the arrangement direction is not restricted, such as the supported portion 119 is configured by one rotating body 120. May be.
Incidentally, even when configured as described above, when the lid member 42 is mounted on the container body 41, the pivot axis of the lid member 42 when the supported portion 119 is received and supported by the engaging recess 124 is covered with the lid. By setting so as to be closer to the lid member side in the alignment direction than the center of gravity of the member 42, when the supported portion 119 is received and supported by the engagement recess 124, the lid member 42 is separated from the container body 41 toward the lower side. Can tilt to.

<< Reference Embodiment >>
As a reference embodiment, the substrate transport facility to which the present invention is applied includes an automatic warehouse for storing a storage container, and a substrate that is taken out from the storage container and a conveyor for placing and transporting the substrate stored in the storage container. This will be described with reference to the drawings. In addition, in the following description, what applied 3rd Embodiment of this invention is illustrated, However, 1st and 2nd Embodiment of this invention is applicable.

As shown in FIG. 13, the substrate processing facility includes an article storage shelf 5 including a plurality of storage units 4 that store a plurality of storage containers 2 that hold a plurality of rectangular substrates 1 in a state where they are arranged at intervals in the vertical direction. And a stacker crane 7 as a storage container transport device for transporting the storage container 2 between the storage section 4 and the substrate input / output section 6, and taking out the substrates 1 one by one from the storage container 2 located in the substrate input / output section 6. The apparatus includes a substrate transfer apparatus 8 that transfers a substrate 1 to the substrate container 1 at a time.
In this substrate processing equipment, while storing the storage container 2 in the article storage shelf 5, the stored storage container 2 is transferred to the substrate input / output unit 6, and the substrate is transferred from the storage container 2 transferred to the substrate input / output unit 6 to the substrate. 1 is taken out in units of one sheet, transported to a substrate processing apparatus and subjected to a predetermined process, and the substrate 1 on which the predetermined process has been performed is stored in a unit of one sheet in a storage container 2 located in the substrate loading / unloading unit 6 I try to let them.

As shown in FIGS. 13 and 14, the article processing facility is provided with a downflow type purified air ventilation means 23 for allowing the purified air to flow from the ceiling to the floor in the clean space 13. In the clean space 13, a storage shelf 5, a stacker crane 7, and a substrate transfer device 8 are provided.
When the purified air ventilation means 23 is described further, as shown in FIG. 14, the purified air ventilation means 23 has a floor portion of the clean space 13 formed of a porous grating floor 14, and a ceiling portion of the clean space 13. An air filter 15 formed of a HEPA filter or the like, and an intake chamber 16 formed on the lower side of the grating floor 14 and a chamber chamber 17 formed on the upper side of the air filter 15 are connected to the ventilation fan 18 and the prefilter. The air in the clean space 13 is circulated while being cleaned by the pre-filter 21 and the air filter 15, and the purified air is ventilated from the ceiling to the floor. It is configured as follows. The circulation path 19 is connected to the outside air intake passage 20 upstream of the ventilation fan 18 and is connected to the exhaust passage 22 downstream of the ventilation fan 18, and is circulated by the purified air ventilation means 23. A part of the air in the clean space 13 is exchanged with outside air.

  As shown in FIG. 13, the substrate transport area 24 for transporting the substrate 1 between the storage container 2 of the substrate loading / unloading unit 6 and the substrate processing apparatus by the substrate transport device 8 has an end on the article storage shelf 5 side. Is provided, and a partition wall 25 is provided to cover the substrate transfer space so that the end on the substrate processing apparatus side communicates with the substrate processing apparatus, and a plurality of area fan filter units 26 are provided on the ceiling of the partition wall 25. It has been. Then, the purified air obtained by further purifying the purified air in the clean space 13 is ventilated from the ceiling side to the floor side by the plurality of area fan filter units 26, so that the substrate transfer space covered by the partition wall 25 is formed. It is a downflow space.

As shown in FIG. 13 and FIG. 14, each of the article storage shelves 5 is configured such that a column set 28 composed of a pair of front and rear columns arranged in the longitudinal direction of the shelf is erected side by side in the horizontal direction of the shelf. A plurality of article support portions 29 are arranged in a vertical direction across a pair of front and rear columns, and the storage portions 4 for storing the storage container 2 in a state where the storage container 2 is placed and supported by the article support portions 29 are arranged vertically and horizontally. A plurality are provided in a state where Incidentally, a pair of article storage shelves 5 are provided on the grating floor 14 so as to face each other.
A part of the plurality of storage units 4 provided on the article storage shelf 5 is a substrate loading / unloading unit 6. When the explanation is added, as shown in FIG. 15, a part of the storage units 4 among the plurality of storage units 4 at the lowermost stage provided in the article storage shelf 5 is stored in the storage container 2 stored in the storage unit 4. On the other hand, the substrate transporting device 8 can take out the substrates 2 one by one or store them one by one through the back side of the article storage shelf 5.

  As shown in FIGS. 14 and 15, the stacker crane 7 includes a moving carriage 31 that travels along a longitudinal direction in a moving space formed between a pair of storage shelves 5 provided in a state of facing each other. The elevator 33 is supported by a pair of elevator masts 32 erected on the movable carriage 31 and arranged in the direction of carriage, and the container is supported by the elevator 33 between the storage unit 4 and itself. 2 and a fork-type article transfer device 34 that can transfer the substrate 2. The substrate loading / unloading unit 6 is operated by the horizontal movement of the movable carriage 31, the elevation movement of the elevation platform 33, and the operation of the article transfer device 34. It is comprised so that the storage container 2 may be conveyed between the storage part 4 and other storage parts 4 as this.

  As shown in FIG. 15, the article transfer device 34 includes a swivel base 35 that can swivel around a vertical axis, and a link that supports a placement portion 36 provided on the swivel base 35 so as to be movable in and out. The mechanism 37 is configured. The article transfer device 34 can be switched between a state in which the article transfer device 34 is retracted on the lifting platform 33 by extension and contraction of the link mechanism 37 and a state in which the article transfer device 34 is protruded to the storage unit 4 side. In addition, the direction of the article transfer device 34 can be changed by 180 degrees by turning the turntable 35.

As shown in FIG. 15 and the like, the substrate transfer device 8 is configured to deliver the substrates 1 one by one between the storage container 2 located in the substrate loading / unloading unit 6 and the substrate transfer conveyor 51. The substrate transport device 8 includes a storage container 2 in which a plurality of support plates 45 for mounting and supporting the substrate 1 are arranged in parallel in a state of being spaced apart in the vertical direction, and a substrate transport conveyor for mounting and transporting the substrate 1. 51, a substrate relay unit 70 for taking out the substrates 1 from the storage container 2 one by one and delivering them to the substrate transport conveyor 51 and storing the substrates 1 received from the substrate transport conveyor 51 one by one in the storage container 2, and a substrate input / output unit Elevating means 61 for supporting the storage container 2 positioned at 6 so as to be movable up and down, and a control device H (see FIG. 31) for controlling the operation of the substrate transfer device 8 are provided.
Next, the substrate transfer device 8 will be described in detail. The downstream side in the substrate take-out direction (upstream side in the substrate storage direction) is the front side, and the upstream side in the substrate take-out direction (downstream side in the substrate storage direction) is the rear side. The direction along the substrate take-out direction (substrate storage direction) is referred to as the front-rear direction, and the direction intersecting this direction may be described as the lateral width direction.

[Storage container]
As shown in FIGS. 17 and 18, the storage container 2 has a container body 41 formed in a rectangular tube shape in a sideways posture with front and rear surfaces open, and the front opening is closed at the front end of the container body 41. The lid member 42 provided in a state, the fan filter unit 43 provided in a state in which the opening of the rear surface is closed at the rear end portion of the container body 41, and the storage container 2 with a space in the vertical direction. A plurality of support plates 45 arranged side by side are provided.

  The container body 41 is formed in a rectangular cylinder shape in a sideways posture in which the front and rear surfaces are opened by forming a frame in a rectangular parallelepiped shape with a frame material and closing the openings on the left and right surfaces and the upper and lower surfaces with plate materials. Yes. The opening on the front surface of the container body 41 is used as a substrate loading / unloading port 44 so that the substrate 1 can be loaded into and unloaded from the container body 41 through the substrate loading / unloading port 44.

As shown in FIG. 17, the lid member 42 is formed by a frame material for forming a lid so that an opening having the same shape as the substrate loading / unloading port 44 is formed, and the opening is closed by a transparent plate material. Has been.
The lid member 42 is provided with an engaged frame 46 that engages with the container body 41 from above. That is, the lid member 42 can attach the lid member 42 to the container body 41 by moving the lid member 42 downward relative to the container body 41 and engaging the engaged frame 46 with the container body 41. The lid member 42 can be detached from the container main body 41 by moving the lid member 42 upward with respect to the container main body 41.
The lid member 42 is formed in a shape in which a gap is formed between the lid body 42 and the container body 41 when the lid member 42 is attached to the container body 41, and is introduced into the storage container 2 by the fan filter unit 43. The air is discharged outside through a gap formed between the container body 41 and the lid member 42.

As shown in FIG. 18, the fan filter unit 43 is detachably attached to the rear end portion of the container body 41 so as to ventilate from the opening on the rear surface of the container body 41 toward the substrate loading / unloading port 44.
Although detailed description is omitted, the fan filter unit 43 includes a power receiving unit and a battery that stores electric power supplied to the power receiving unit. The fan filter unit 43 includes the storage container 2 and a storage unit. 4 is operated by the power supplied to the power receiving unit from the power supply unit provided in each of the storage units 4, and the power receiving unit when the storage container 2 is transported by the stacker crane 7. In the state where power is not supplied to the power receiving unit away from the power feeding unit, the power receiving unit is configured to operate with the power stored in the battery.

As shown in FIG. 19, each of the plurality of support plates 45 includes a support substrate 47 formed with a plurality of projections 48 protruding upward by press working, and a lateral width direction and a rear side of the substrate 1 placed and supported. And a regulating member 49 that regulates the movement of. The upper surface of the protrusion 48 is formed on a horizontal plane and serves as a mounting surface 48 a for mounting and supporting the substrate 1.
Further, as shown in FIG. 21 and the like, each of the plurality of support plates 45 is formed in an inclined plane in which the upper surface of the front end portion 45a is positioned downward toward the front side, and a portion other than the front end portion 45a and the protrusion 48. Is formed in a horizontal plane, and a planned support area E for placing and supporting the substrate 1 is set from the front end portion 45a to the other portions.
Incidentally, the protrusion 48 is formed in a circular shape having a diameter of 10 mm and a thickness of 0.2 mm that is thinner than the thickness of the glass substrate 1.

Each of the plurality of support plates 45 is provided with a recessed portion 50 by arranging the protrusions 48 on the support substrate 47 in the front-rear direction and the lateral width direction.
In other words, a portion of the support plate 45 where the protrusion 48 is not formed is recessed below the placement surface 48a. By arranging the projections 48 side by side on the support substrate 47 as described above, the recesses 50 that are recessed below the placement surface 48a are formed in a lattice shape, and the recesses 50 thus formed are formed. Is formed in a shape extending from the central portion of the planned support region E to the outside of the planned support region E, and in a shape extending linearly from the front end portion to the rear end portion in the planned support region E. By supplying air between the upper surface of the support plate 45 and the lower surface of the substrate 1, the substrate 1 floats from the support plate 45, but the space between the upper surface of the support plate 45 and the lower surface of the substrate 1 is increased. When the supply of air is stopped, for example, as indicated by the dotted arrow in FIG. 19, the air existing between the support plate 45 and the substrate 1 moves along the recessed portion 50 in the planned support region E. It will flow to the outside. As a result, air existing between the support plate 45 and the substrate 1 can be quickly discharged, and the substrate 1 can be stably placed and supported by the protrusions 48.

  The restriction members 49 are arranged side by side in the front-rear direction at both left and right ends of the support substrate 47 so as to be located on both the left and right sides of the planned support area E, and are supported on the rear side of the planned support area E. The rear end portion of the substrate 47 is arranged in parallel in the width direction.

[Elevating means]
As shown in FIGS. 15 and 16, the elevating means 61 is provided in the substrate loading / unloading section 6, and is a pair of left and right for moving up and down by the elevating motor 62 (see FIG. 31) to place and support the storage container 2. And a pair of left and right guide columns 64 that guide and support the pair of left and right support tables 63 so as to be movable up and down separately.
Then, as shown in FIG. 16, in the substrate loading / unloading portion 6, an engagement member 65 that engages with the engaged frame 46 of the lid member 42 in the storage container 2 is supported by the ceiling portion of the partition wall 25. The engaged frame 46 is engaged with the engaging member 65 as the stacker crane 7 is loaded into the substrate loading / unloading section 6 so that the storage container 2 is placed and supported by the lifting / lowering means 61 by the stacker crane 7. In addition, the lid member 42 is detached from the container main body 41 by being detached from the container main body 41, and the engaged portion frame 46 is moved to the container main body 41 as the storage container 2 is unloaded from the substrate loading / unloading portion 6 by the stacker crane 7. The lid member 42 is attached to the container main body 41 by being disengaged from the engaging member 65.
Therefore, by lifting and lowering the support base 63 on which the container main body 41 of the storage container 2 is placed and supported by the lifting means 61, the lid member 42 is supported by the engagement member 65 and the cover member 42 other than the cover member 42 of the storage container 2. This portion is moved up and down to change the opening amount of the substrate loading / unloading port 44.

[Board relay unit]
Next, the board relay unit 70 will be described.
As shown in FIGS. 15 and 16, the board relay unit 70 is configured to be movable in the horizontal width direction by a traveling carriage 74 that runs in the horizontal width direction, and the storage container 2 positioned at the board loading / unloading portion 6. When the substrates 1 are taken out or stored one by one, the substrate relay unit 70 is arranged at a position adjacent to the storage container 2 positioned in the substrate loading / unloading section 6 by traveling of the traveling carriage 74. .
As shown in FIG. 20, the substrate relay unit 70 is a floating air ejector that ejects air between the lower surface of the substrate 1 to be taken out or stored and the upper surface of the support plate 45 on which the substrate 1 is placed and supported. 71, a supply air jet 72 for supplying air to the downstream side in the substrate take-out direction with respect to the floating air jet 71, and an object to be picked up that has floated from the support plate 45 by the jet of air from the floating air jet 71 The substrate 1 to be stored is taken out of the storage container 2 in a state in which the substrate 1 is passed over the levitation air ejector 71 and the supply air blast body 72 and is levitated by the ejection of air by the levitation air ejector 71. A substrate loading / unloading machine for storing the substrate 1 in the storage container 2 in a state of passing over the floating air ejection body 71 and the supply air ejection body 72 so as to be positioned on the support plate 45 on which the substrate 1 is placed and supported. It is constituted by a 73.
Incidentally, the substrate loading / unloading mechanism 73 is used as both a take-out means for taking out the substrate 1 from the storage container 2 and a storage means for storing the substrate 1 in the storage container 2.

[Travel cart]
As shown in FIGS. 15 and 16, the traveling carriage 74 is provided corresponding to each of a pair of traveling rails 76 provided along the lateral width direction and is driven to rotate by a traveling motor 77. A wheel 78 is provided, and is configured to support the flying air jet 71, the supply air jet 72, and the substrate loading / unloading mechanism 73. The unit 70 is moved and moved in the lateral width direction so as to be movable between a position adjacent to the storage container 2 and a position adjacent to the substrate transport conveyor 51.

[Substrate in / out mechanism]
The substrate loading / unloading mechanism 73 includes a gripping transport unit 81 for gripping and transporting the substrate 1 and a mounting support transporting unit 88 for mounting and transporting the substrate 1.
When the holding and conveying unit 81 takes out the substrate 1 from the storage container 2, the holding unit 82 holding the downstream end of the substrate 1 to be taken out in the direction of taking out the substrate is moved along the movement path along the substrate taking-out direction. By moving from the upstream side to the downstream side in the take-out direction, a part of the substrate 1 to be taken out from the storage position (see FIGS. 21 and 22) where the whole substrate 1 to be taken out is located in the storage container 2 is stored in the storage container. 2, when the substrate 1 to be taken out is transported to a relay position (see FIGS. 23 and 24) located outside, and the substrate 1 is stored in the storage container 2, the holding portion 82 is moved along the movement path. The substrate 1 to be stored is moved from the upstream side to the downstream side in the carry-in direction, and is transported from the relay position to the storage position while being pressed by the tip end portion of the holding portion 82. That.
When the substrate 1 is taken out from the storage container 2, the holding and conveying means 81 holds both ends in the horizontal width direction of the substrate 1 to be taken out, and when the substrate 1 is stored in the storage container 2, A pair of holding portions 82 are provided in the width direction so as to press both ends in the width direction. Thereby, while preventing the rotation of the substrate 1 around the vertical axis and transporting the substrate 1 in a stable posture, the position in contact with the substrate 1 is very small at the downstream end in the substrate take-out direction. Can be part.

  The holding part 82 includes a pair of holding action parts 83 that hold the substrate 1 in the vertical direction in cooperation, and a support part 84 that supports the pair of holding action parts 83. The pair of sandwiching action portions 83 are supported so as to be able to move toward and away from each other in a state of protruding to the lateral side of the support portion 84. The pair of clamping action portions 83 includes a clamping state (see FIG. 23) in which the pair of clamping action portions 83 are brought close to each other to clamp the substrate 1 and a clamping release state in which the pair of clamping action portions 83 are separated from each other ( 21) and a pressed state (see FIG. 25) in which the pair of gripping action portions 83 are brought closer to each other and brought into contact with each other than the gripped state (see FIG. 25).

The clamping unit 82 is supported by a moving body 87 that is linearly movable along a movement path along the substrate take-out direction. The movement of the moving body 87 along the movement path moves the holding unit 82 in the board take-out direction. It is configured freely. An upper part of the moving body 87 is provided with a swinging connection member 85 that is swingably connected to the moving body 87 about the axis of the vertical axis. A clamping part 82 is fixedly supported on the upper part of the part. Thereby, the holding part 82 is supported by the moving body 87 so as to be swingable around the vertical axis.
Incidentally, the vertical axis on which the gripping portion 82 swings is located at a location deviating from the location where the support portion 84 is present in plan view, and is located at the location where the gripping action portion 83 is present.

Further, the holding and conveying means 81 is configured to remove the holding portion 82 that has been released from the holding of the take-out target substrate 1 while the take-out target substrate 1 is transferred to the relay position. A swing guide member 89 is provided as a retracting operation means for moving to a retracted position retracted from a transport path of the substrate 1 (a space occupied by the substrate 1 when transporting the substrate 1).
The swing guide member 89 is in contact with the holding portion 82 by movement along the moving path of the moving body 87, and the vertical axis so as to guide the holding portion 82 outward in the lateral width direction intersecting the substrate take-out direction. By swaying around the core, the holding portion 82 is retracted to the retracted position.

The swing guide member 89 includes a guide groove 89 a that guides the swing connecting member 85 and the guide roller 86. That is, the swing connecting member 85 is provided so as to contact the inner wall of the guide groove 89a in a state of passing through the plate body in which the guide groove 89a is formed, and the guide roller 86 is provided with the swing connecting member 85. A pair is provided at the end of the portion extending in the substrate take-out direction so as to contact the inner wall of the guide groove 89 on the lower side.
The guide groove 89a is formed such that the upstream portion in the substrate take-out direction is linear along the movement path of the moving body 87, and the downstream portion continuous with the upstream portion is outward in the lateral width direction. It is formed in a curved shape that bends.
That is, as shown in FIGS. 21 to 25, the moving body 87 is moved along the movement path so as to transfer the substrate 1 to be taken out from the storage position to the relay position or to transfer the substrate 1 to be stored from the relay position to the storage position. Since the guide roller 86 is linearly guided by the linearly formed portion of the guide groove 89a, the gripping portion 82 moves between the gripping action portion 83 and the support portion 84. It is held in a posture aligned in the direction along the route.
Then, as shown in FIGS. 26 and 27, after releasing the holding with respect to the substrate 1 to be taken out of the storage position, the guide roller 86 is guided by moving the moving body 87 downstream in the substrate taking-out direction. Since the curved portion of the groove 89 a is guided so as to move outward in the lateral width direction, the support portion 84 is positioned in the lateral width direction with respect to the gripping action portion 83. The posture is changed to be inclined with respect to the movement path so as to be located on the outer side. Further, by moving the moving body 87 to the upstream side in the substrate taking-out direction from this state, the guide roller 86 is curved so as to move inward in the lateral width direction at the curved portion in the guide groove 89a. Therefore, the holding portion 82 is changed to a posture in which the holding action portion 83 and the support portion 84 are aligned in the direction along the movement path.
As shown in FIGS. 22 and 24, when the holding portion 82 is aligned in the direction along the movement path, the pair of holding action portions 83 and the support portions 84 are within the lateral width of the transport path of the substrate 1 in a plan view. Therefore, it can be clamped or pressed against the substrate 1 from the downstream side in the substrate take-out direction. As shown in FIG. Since the part and the support portion 84 are located laterally outward from the transport path of the substrate 1, the substrate 1 can be transported by the mounting support transport means 88 without being obstructed by the holding portion 82. .
Incidentally, the gripping part 82 is located at the retracted position (see FIGS. 26 and 27) in a posture inclined with respect to the movement path. At this time, the pair of gripping action portions 83 are present on the transport path of the substrate 1 in plan view, but the passage of the substrate 1 is allowed by setting the pair of gripping action portions 83 to the grip release state. be able to.

[Placement support transport means]
When taking out the substrate 1 from the storage container 2, the placement support conveyance unit 88 places and supports the substrate 1 to be taken out, which has been carried to the relay position by the holding conveyance unit 81, and removes the substrate 1 to be taken out. When the entire substrate 1 to be taken out is transferred from the relay position to the take-out position (see FIG. 26) located outside the storage container 2, and the substrate 1 is stored in the storage container 2, the storage received from the substrate transfer conveyor 51 is received. The target board 1 is transported from the take-out position to the relay position.
Incidentally, the placement support transport means 88 places and supports the substrate 1 at the take-out position where the entire substrate 1 is positioned on the placement support transport means 88 and moves the substrate relay unit 70 to the take-out position. The substrate 1 to be taken out is transferred to the substrate transfer conveyor 51, and the substrate 1 to be stored received from the substrate transfer conveyor 51 is transferred to the take-out position.

The mounting support transport unit 88 will be described. The mounting support transport unit 88 supplies air toward the lower surface of the substrate 1 and supports the substrate in a non-contact state in a horizontal posture. Propulsive force imparting means 53 that imparts a propulsive force in the transport direction to the substrate 1 supported by the blow type support means 52 is provided.
The blower-type support means 52 is provided on the lower side of the transport path of the substrate 1 and blows air upward, and the porous wind regulation provided between the blower 54 and the transport path of the substrate 1. A plate 55 and a conveyor air supply device 56 (see FIG. 31) for supplying air to the blower 54 are provided. Further, the propulsion force applying means 53 is arranged in parallel in the substrate take-out direction and is in contact with the lower surface of the substrate 1, and the support conveying roller 57 is in contact with the upper surface of the substrate 1 located at the relay position. The supporting conveyance roller 57 and the holding conveyance roller 58 are configured to support and hold the both ends of the substrate 1 in the widthwise direction. A pair of rollers 58 are provided in the width direction.

As the plurality of support conveyance rollers 57, a support conveyance roller 57 with a ridge having a ridge that restricts movement of the substrate 1 in the lateral width direction and a support conveyance roller 57 without a ridge without a ridge are provided. The supporting transport roller 57 without wrinkles is in contact with the lower surface of the substrate 1 located at the relay position and holds the substrate 1 in cooperation with the holding transport roller 58. 88 (substrate loading / unloading mechanism 73) is disposed at the upstream end in the substrate unloading direction, and the support roller 57 with a hook is placed so as not to contact the lower surface of the substrate 1 located at the relay position. The support conveyance means 88 (substrate loading / unloading mechanism 73) is arranged in parallel on the downstream side in the substrate removal direction from the wrinkle-free support conveyance roller 57.
Incidentally, the holding conveyance roller 58 is disposed at the upstream end in the substrate take-out direction of the placement support conveyance means 88 (substrate loading / unloading mechanism 73), like the supporting conveyance roller 57 without wrinkles.
That is, the mounting support conveyance means 88 is supported at the downstream end in the substrate take-out direction of the substrate 1 by the support conveyance roller 57 without wrinkles in the plurality of support conveyance rollers, and with the holding conveyance roller 58. The substrate 1 to be taken out by the holding and conveying means 81 is held between the supporting transfer roller 57 and the holding transfer roller 58 so as to be held by the cooperation of The substrate 1 is transported so that the downstream end portion in the substrate take-out direction is positioned at the upstream end portion in the substrate take-out direction of the placement support transport means 88.
In short, the intermediate position is such that the downstream end of the substrate 1 in the substrate take-out direction is disposed at the upstream end in the substrate take-out direction of the placement support transfer means 88 and the support transfer roller 57 without wrinkles and the holding transfer Since it is a position that is held by cooperation with the roller 58 and is close to the storage position, the transfer distance of the substrate 1 by the holding transfer device 81 is shortened, so that the moving distance of the holding portion 82 can be shortened. .

  Further, the support conveyance roller 57 and the holding conveyance roller 58 are placed on the support and holding portion so that the support conveyance roller 57 and the holding conveyance roller 58 are on the outer side in the lateral width direction than the holding portion of the holding conveyance unit 81. A conveying roller 58 is provided. Thereby, the conveyance range of the board | substrate 1 by the clamping conveyance means 81 and the conveyance range of the board | substrate 1 by the mounting support conveyance means 88 are comprised so that it may overlap in a board | substrate taking-out direction. Therefore, the substrate 1 can be transported to the relay position where the substrate 1 can be transported by the placement support transport means 88 by the sandwiching transport means 81, and conversely, the transport by the sandwich transport means 81 by the placement support transport means 88. The substrate 1 can be transported to a possible relay position. As a result, the delivery between the nipping and conveying means 81 and the mounting support and conveying means 88 can be performed accurately. In addition, when the substrate 1 is transferred from the sandwiching and conveying means 81 to the placement support and transportation means 88, the substrate 1 is shifted from the state of being sandwiched by the sandwiching portion 82 to the state of being placed and supported. Since the substrate 1 can be conveyed while being held in cooperation with the holding conveyance roller 58, the substrate 1 can be transferred while accurately delivering the substrate 1 between the holding conveyance device 81 and the mounting support conveyance device 88. It can be transported properly.

The mounting support conveyance means 88 supports the central portion of the substrate 1 in the width direction in a non-contact state by the blower-type support means 52, and both ends of the substrate 1 in the width direction of the substrate 1 by the propulsion force applying means 53. The substrate 1 is transported along the transport direction by rotating and driving the support transport roller 57 and the grip transport roller 58 by the transport motor 59 while supporting and holding the contact.
By the way, the substrate transport conveyor 51 is similar to the mounting support transport means 88, and is provided with a blower support means including a blower, an air conditioning plate, and an air supply device, and a propulsive force applying means including a plurality of support transport rollers. And is configured. The substrate transport conveyor 51 is not provided with a gripping transport roller.

  As shown in FIG. 28, the levitating air jet 71 has an air jet 91 for jetting air upward, and a shape extending upward from the upstream end in the substrate take-out direction of the air jet 91. And a guide curved surface 92 for guiding the air jetted upward from the air jet outlet 91 so as to flow in the horizontal direction toward the storage container 2 along the upper surface of the flying air jet 71. Then, in the container adjacent portion A, air is blown out between the substrate 1 to be taken out taken out by the substrate taking-in / out mechanism 73 and the lower surface of the substrate 1 to be stored and the upper surface of the floating air blowing body 71. It is comprised so that the auxiliary | assistant air ejection body to be used may also be used.

  That is, as shown by the arrow in FIG. 28A, the air jetted upward from the air jet 91 of the flying air jet 71 flows along the induction curved surface 92 by the Coanda effect, and then Since it flows in the horizontal direction along the upper surface of the floating air ejection body 71 connected to the guide curved surface 92 and flows in the horizontal direction toward the storage container 2 located upstream in the substrate take-out direction, The ejected air is guided by the guiding curved surface 92 so that the air is ejected between the lower surface of the substrate 1 to be taken out and the upper surface of the flying air ejection body 71, and thereafter the substrate to be taken out. 1 flows in a horizontal direction toward the storage container 2 so that air is ejected between the lower surface of 1 and the upper surface of the support plate 45 on which the substrate 1 is placed and supported.

The supply air spouting body 72 is an ejecting body configured in the same manner as the levitation air ejecting body 71 so that the direction of the air flowing in the horizontal direction is reversed, and the air is directed upward. The reverse direction air jet 93 to be ejected and the reverse direction air jet 93 located above the reverse direction air jet 93 and downstream in the substrate take-out direction were ejected upward from the reverse direction air jet 93. A reverse-direction guiding curved surface 94 that guides air to flow in the horizontal direction toward the side opposite to the storage container 2 side along the upper surface of the supply air jetting body 72 is configured. The air ejected from the direction air jet 93 is the container 2 side so that the air is supplied to the downstream side in the substrate take-out direction from the air jet 91 of the flying air jet 71 in the container adjacent location A. Opposite direction of substrate removal It flows in the horizontal direction toward the downstream side.

As shown in FIG. 20 and FIG. 29, a plurality of floating air jets 71 are arranged side by side in a state spaced apart in the horizontal width direction, and the supply air jets 72 are arranged in the horizontal width direction of the floating air jets 71. The plurality of floating air jets 71 and the plurality of supply air jets 72 are alternately arranged in a row in the horizontal width direction with the floating air jets 71 positioned at both ends in the horizontal width direction. Are lined up. Thus, as shown by the arrows in FIG. 29, when the substrate 1 is transported, the air ejected by the supply air ejection body 72 is taken out from the air ejection port 91 of the levitation air ejection body 71 in the substrate take-out direction. It can supply to the downstream side. Thereby, even if the downstream side in the substrate take-off direction becomes negative pressure due to the ejection of air from the air ejection port 91 of the levitation air ejection body 71, the portion is positively pressurized by the air from the supply air ejection body 72. Thus, the substrate 1 can be properly supported.
At the upstream end of the substrate take-out mechanism 73 in the substrate take-out direction, the continuous plate 96 is in a state in which the height of the upper surface is the same as the upper surface of the air conditioning plate 55 and extends upstream in the substrate take-out direction. The supply air spouting body 72 is supported by the connecting plate 96 in a state where the upper surface thereof is the same height as the upper surface of the connecting plate 96 and continues in the substrate take-out direction. The body 71 is such that the upper surface of the body 71 is located below the upper surface of the continuous plate 96 by several millimeters (for example, about 2 to 3 mm), and the air ejected from the air ejection port 91 passes downstream in the substrate take-out direction. It is supported by the connecting plate 96 in a state where a gap is formed.
In other words, the floating air ejection body 71 is provided such that its upper surface is located several millimeters below the upper surface of the supply air ejection body 72.

  Air is supplied to the levitation air jet 71 and the supply air jet 72 from a jet air supply device 95 (see FIG. 31) as an air supply device, and the jet air supply device 95 supplies air. The supply amount is adjustable. Then, by supplying air from the air supply unit 95 for the levitation body to the air blast body 71 for levitation and the air blast body 72 for supply, the air blast body 71 for levitation and the air blast body 72 for supply eject the air. By switching to the state and stopping the supply of air from the ejector air supply device 95 to the levitating air ejector 71 and the supply air ejector 72, the levitating air ejector 71 and the supply air ejector 72 are stopped. Is switched to an ejection stop state in which the ejection of air is stopped.

Next, the control device H will be described.
As shown in FIGS. 30 and 31, the substrate relay unit 70 includes a substrate 1 that is held by the holding portion 82 and a substrate presence / absence detection sensor 101 that detects whether the substrate 1 is pressed by the holding portion 82. A container height detection sensor 102 for detecting whether or not the storage container 2 is positioned at an appropriate height for taking out and storing the substrate 1; and a takeout position for detecting whether or not the substrate 1 is located at the takeout position. A detection sensor 103, a relay position detection sensor 104 that detects whether or not the substrate 1 is located at the relay position, and a deceleration position detection sensor 105 that decelerates the transport speed of the substrate 1 by the mounting support transport means 88 are provided. The substrate inlet / outlet portion 6 is provided with a substrate protrusion detection sensor 106 for detecting whether or not a part of the substrate 1 protrudes from the storage container 2 to the outside. Detection information from the service is configured to be input to the control unit H.

  Then, the control device H operates the traveling carriage 74, the substrate loading / unloading mechanism 73 and the ejector air supply device 95 in the substrate relay unit 70, as well as ascending / descending, based on commands from these detection sensors and the host controller. The operation of the means 61 and the substrate transfer conveyor 51 is controlled.

The control device H controls the operation of the ejector air supply device 95 so that the amount of air ejected from the levitating air ejector 71 and the supply air ejector 72 increases stepwise toward the target supply amount. The air supply control means and the height of the support plate 45 for placing and supporting the substrate 1 to be taken out or stored (the height for taking out and It also has a function as an elevating control means for controlling the operation of the elevating means 61 so as to be positioned at the storage height).
That is, when the control device H switches the levitation air ejector 71 and the supply air ejector 72 from the ejection stop state to the ejection state, the levitation air ejector 71 and the supply air are supplied from the ejector air supply device 95. The amount of air supplied to the ejection body 72 is increased stepwise, and the amount of air ejected from the floating air ejection body 71 and the supply air ejection body 72 is increased stepwise toward the target supply amount. The operation of the ejector air supply device 95 is controlled.
Further, when the control device H takes out or stores the substrate 1 from the storage container 2, the control device H corresponds to the support plate 45 for placing and supporting the substrate 1 to be taken out or stored corresponding to the floating air ejector 71 and the substrate loading / unloading mechanism 73. And is ejected between the lower surface of the substrate 1 from which the air ejected from the levitation air ejector 71 is taken out or stored and the upper surface of the mounting plate 45 for mounting and supporting the substrate 1, The operation of the elevating means 61 is controlled so that the substrate 1 that has been levitated by the ejection of air by the levitating air ejector 71 can be held or pressed by the holding portion 82.

  A pair of substrate presence / absence sensors 101 are provided in each of the pair of holding portions 82 so as to detect the presence / absence of the substrate 1 immediately before the holding action portion 83, and the control means H includes both of the pair of substrate presence / absence sensors 101. It is determined that the substrate 1 is held or pressed when it is in the detection state for detecting the presence of the substrate 1, and the substrate is detected when one or both of the pair of substrate presence / absence sensors 101 are not detecting the substrate 1. If the substrate 1 is determined not to be held and pressed in a state where it is held or pressed by the holding portion 82, the operation of the substrate transfer device 8 is activated. Stop.

  The container height detection sensor 102 is provided so as to detect the presence or absence of a plurality of detection plates 107 arranged in parallel in the vertical direction corresponding to each of the plurality of support plates 45 in the storage container 2. The storage container 2 is located at a height corresponding to the floating air jet 71 and the substrate loading / unloading mechanism 73 and any one of the plurality of detection plates is detected by the container height detection sensor 102. If the storage container 2 is in an appropriate state, the container height detection sensor 102 shifts in a vertical direction from the corresponding height and the container height detection sensor 102 detects any of the plurality of detection plates. It is configured to determine that the storage container 2 is not at an appropriate height when it is in a non-detection state where it is not detected. When the substrate 1 is taken in and out of the storage container 2, the storage container 2 is at an appropriate height. If it is determined that there is not, the substrate transfer device 8 It stops the operation.

  A pair of take-out position detection sensors 103 is provided at a position corresponding to the upstream end in the substrate take-out direction of the substrate 1 located at the take-out position and a position corresponding to the downstream end. 1 is located at the take-out position and the pair of take-out position detection sensors 103 are in a detection state in which the substrate 1 is detected, it is determined that the substrate 1 is located at the take-out position. When one or both of the take-out position detection sensors 103 are in a non-detection state, it is determined that the substrate 1 is not located at the take-out position.

  A pair of relay position detection sensors 104 is provided in a state adjacent to the downstream end of the substrate 1 in the substrate removal direction at the relay position and a position further downstream from this position in the substrate removal direction. The control means H is in a detection state in which the relay position detection sensor 104 positioned upstream in the substrate take-out direction detects the substrate 1 and is in a non-detection state in which the relay position detection sensor 104 positioned downstream is not detecting the substrate 1. If it is determined that the board 1 is located at the relay position, the board 1 is shifted from the relay position, and if both the pair of relay position detection sensors 104 are in the detection state or the non-detection state, the board 1 is in the relay position. It is configured to determine that it is not located.

  The deceleration position detection sensor 105 is provided so that a pair of take-out and storage is located within the front-rear width of the substrate 1 located at the take-out position. When the substrate 1 is transferred from the relay position to the take-out position, the transfer speed is accelerated immediately after the start of the transfer so that the transfer high speed is reached, and when the take-off deceleration position detection sensor 105 enters the detection state for detecting the substrate 1, the transfer is performed. When the substrate 1 received from the substrate transport conveyor 51 is transported to the take-out position by the mounting support transport means 88, the speed is decreased from the substrate transport conveyor 51. When the conveyance speed of the substrate 1 to be received is maintained and the decelerating position detection sensor 105 for storage enters a detection state in which the substrate 1 is detected, the conveyance of the substrate having received the conveyance speed is performed. As to decelerate so that the low speed of the conveying lower speed than the speed, is configured to control the operation of the propulsion force applying means 53.

  The substrate protrusion detection sensor 106 is provided so as to detect the presence or absence of the substrate 1 immediately before the storage container 2, and the control means H is in a detection state where the substrate protrusion detection sensor 106 detects the substrate 1. Is determined to be protruding from the storage container 2, and if the substrate protrusion detection sensor 106 is in a non-detection state where the substrate 1 is not detected, it is determined that the substrate 1 does not protrude from the storage container 2. .

The operation of the substrate transfer device 8 by the control means H will be described in the case where the substrate 1 is taken out from the storage container 2 located in the substrate loading / unloading section 6 and transferred to a substrate processing apparatus not shown.
First, the traveling carriage 74 is caused to travel so that the substrate relay unit 70 is positioned adjacent to the storage container 2 positioned at the substrate loading / unloading portion 6. Next, the storage container 2 is moved up and down by the lifting / lowering means 61 so that the support plate 45 for placing and supporting the substrate 1 to be taken out has a height corresponding to the floating air jetting means 71 and the substrate loading / unloading mechanism 73. Then, the ejector air supply device 95 is actuated to bring the levitation air ejector 71 and the supply air ejector 72 into the ejected state, and the conveyor air supply device 56 is actuated to regulate the air blowing support means 52. Air is ejected upward from the plate 55. At this time, the floating air ejection body 71 and the supply air ejection body 72 are disposed at the container adjacent portion A adjacent to the downstream end in the substrate removal direction of the support plate 45 that supports the substrate 1 to be removed. It will be. As a result, the air ejected by the flying air ejection body 71 can be properly supplied between the lower surface of the substrate 1 to be taken out and the support plate 45, and the substrate 1 to be taken out can be accurately supported by the support plate 45. Can emerge from. In a state where the substrate 1 to be taken out is lifted from the support plate 45 by the ejection of air from the flying air jet 71, the holding portion 82 in the holding release state can hold the substrate 1 to be taken out in the storage position ( 21 and 22), the moving body 87 is moved from the downstream side to the upstream side in the substrate take-out direction.

  Then, the holding unit 82 is switched to the holding state to hold the substrate 1 to be taken out by the holding unit 82, and the supporting conveyance roller 57 and the holding conveyance roller 58 move the substrate 1 from the upstream side to the downstream side in the substrate extraction direction. The movable body 87 is moved downstream from the upstream side in the substrate take-out direction so that the holding portion 82 in the holding state is moved to the holding release position (see FIGS. 23 and 24) corresponding to the relay position in the state where it is rotated so as to be conveyed. The substrate 1 is moved to the relay position. At this time, since air is also supplied to the upper part of the floating air jet 71 and the supply air jet 72, the floating air jet 71 and the supply air jet are formed by the air layer formed by the air. The substrate 1 passing through the upper portion of 72 can be accurately supported. After that, while the substrate 1 is transported to the relay position, the rotation of the support transport roller 57 and the holding transport roller 58 is stopped, and the operation of the air supply device 95 for the ejector is stopped to raise the air ejecting body 71 for levitation. Is stopped.

Then, after switching the gripping part 82 to the gripping release state, the moving body 87 is moved from the upstream side to the downstream side in the substrate take-out direction so as to move the gripping part 82 in the gripping release state to the retracted position (see FIGS. 26 and 27). The support transport roller 57 and the gripping transport roller 58 are rotated so that the substrate 1 is transported from the upstream side to the downstream side in the substrate take-out direction, and the substrate 1 is transported to the take-out position. The rotation of the conveying roller 57 and the holding conveying roller 58 is stopped.
Thereafter, with the traveling carriage 74 traveling so that the substrate relay unit 70 is positioned adjacent to the substrate conveyance conveyor 51, the supporting conveyance roller 57 and the holding conveyance roller 58 are disposed upstream of the substrate removal direction. The substrate 1 is rotated so as to be conveyed from the side to the downstream side, the substrate 1 is transferred to the substrate conveyance conveyor 51, and the substrate 1 is conveyed to the substrate processing apparatus by the substrate conveyance conveyor 51.

Next, the case where the substrate 1 carried out from the substrate processing apparatus is stored in the storage container 2 located in the substrate input / output unit 6 will be described.
First, the traveling carriage 74 is caused to travel so that the substrate relay unit 70 is positioned adjacent to the substrate transporting conveyor 51, and the air supply device 56 for the conveyor is operated so that the blowing type support means 52 is moved upward from the air conditioning plate 55. The air is spouted out. In this state, the support conveyance roller 57 and the holding conveyance roller 58 rotate the substrate 1 so as to convey the substrate 1 from the upstream side to the downstream side in the substrate storage direction, and are carried out of the substrate processing apparatus by the substrate conveyance conveyor 51. The substrate 1 to be transported is received and transported to the take-out position. Thereafter, the rotations of the support conveyance roller 57 and the holding conveyance roller 58 are stopped, and the traveling carriage 74 is caused to travel so that the substrate relay unit 70 is positioned adjacent to the storage container 2 positioned at the substrate loading / unloading unit 6.

The storage container 2 is moved up and down by the lifting / lowering means 61 so that the support plate 45 for placing and supporting the substrate 1 to be stored has a height corresponding to the floating air jetting means 71 and the substrate loading / unloading mechanism 73. Then, the ejector air supply device 95 is operated to bring the floating air ejector 71 and the supply air ejector 72 into the ejected state. In such a state, the movable body 87 is moved in the substrate storing direction so that the holding portion 82 in the pressed state is moved to the pressing end position (see FIG. 25) on the upstream side in the substrate storing direction by the holding amount of the substrate 1 from the holding position. The substrate 1 is transported from the upstream side to the downstream side to the storage position. Thereafter, the rotation of the supporting conveyance roller 57 and the holding conveyance roller 58 is stopped, and the ejector air supply device 95 and the conveyor air supply device 56 are stopped, and the substrate 1 is then stored. The moving body 87 is moved from the downstream side in the substrate storage direction so as to move the holding portion 82 to the retracted position, and to move the holding portion 82 to the holding release position if the substrate 1 is to be taken out next. Move upstream.
By stopping the ejector air supply device 95 in this manner, the floating air ejector is in the ejection stop state, and therefore, between the upper surface of the substrate to be stored and the upper surface of the support plate for mounting and supporting the substrate. As described above, the air existing between the substrate and the support plate is discharged.

DESCRIPTION OF SYMBOLS 1 Substrate 2 Storage container 41 Container body 42 Lid member 44 Opening 45 Support plate 71 Levitation air ejector 71 Auxiliary air ejector 73 Extraction means 111 Container transport means 112 Substrate transfer device 119 Supported part 120 Rotating body 121 Fixed lid 123 Receiving support 124 Engaging recess (regulator)
126 Plate-like body P4 Substrate transfer position

Claims (6)

Container transport means for transporting a plurality of storage containers for storing a plurality of substrates in a horizontal posture at intervals in the vertical direction to a substrate transfer position;
A substrate transfer facility provided with a substrate transfer device for removing a substrate from the storage container located at the substrate transfer position or transferring a substrate to store the substrate in the storage container,
The storage container is formed in a cylindrical shape in a sideways posture, an opening for transferring a substrate is formed at one end of the storage container, and a container main body for storing a plurality of substrates therein, and the container main body from above A lid member configured to be attachable and detachable upward and to close the entire surface of the opening in a state of being attached to the container body;
The container transport means is configured to move the storage container down and transport it to the substrate transfer position;
A receiving support for receiving and supporting the supported portion of the lid member during the downward movement of the storage container to the substrate transfer position of the container by the container conveying means and detaching the lid member from the container main body is provided,
The substrate transfer equipment, wherein the substrate transfer device is configured to transfer the substrate through the opening to the container body from which the lid member has been removed. The supported portion is configured by arranging a plurality of rotating bodies that are rotatable around a horizontal axis along a horizontal width direction that intersects an arrangement direction of the container body and the lid member,
The substrate transfer facility according to claim 1, wherein the receiving support is configured to include an engagement recess into which the plurality of rotating bodies are engaged. The supported portion is composed of a plate-like body formed in a plate shape,
The board | substrate conveyance equipment of Claim 1 comprised by the said receiving support body being provided with the engagement recessed part in which the said plate-shaped body engages. The supported portion is configured by arranging the two rotating bodies in the arrangement direction so as to be positioned at the upper end portion of the lid member and on both sides of the center of gravity of the lid member in the arrangement direction of the container body and the lid member. ,
The substrate transfer facility according to claim 2, further comprising a restricting portion that restricts swinging of the lid member due to its own weight more than a set angle toward the side away from the storage container when supported by the receiving support. The substrate transfer device is provided in a fixed position;
The container transport means supports the storage container so as to be movable up and down at the substrate transfer position so that the transfer target substrate in the storage container is positioned at a transfer height corresponding to the substrate transfer apparatus. Composed of
The lid member removed by the receiving support so as to close a portion above the substrate to be transferred in the opening of the storage container located at the substrate transfer position by the detached lid member. Is supported above the substrate to be transferred and at a position close to the opening of the storage container at the substrate transfer position in the substrate transfer direction.
The substrate transfer is performed below the transfer target substrate and in the substrate transfer direction so as to close a portion below the transfer target substrate in the opening of the storage container located at the substrate transfer position. The board | substrate conveyance equipment of any one of Claims 1-4 with which the fixed lid | cover is provided in the position close | similar to the said opening of the said storage container in the position fixed state. The container body is configured to include a plurality of support plates that place and support a rectangular substrate in a state spaced apart in the vertical direction,
The substrate transfer device is disposed at a container adjacent position adjacent to the downstream end in the substrate take-out direction of the support plate provided in the container body in a state where the storage container is located at the substrate transfer position. A floating air ejector for ejecting air between the lower surface of the substrate to be taken out and the upper surface of the support plate for mounting and supporting the substrate;
A take-out means for taking out the substrate to be taken out, which has been levitated from the support plate by the ejection of air from the levitation air ejector, from the storage container in a state of passing above the levitation air ejector;
6. An auxiliary air jet body that jets air toward the space between the upper surface of the floating air jet body and the lower surface of the substrate to be taken out that is taken out by the take-out means. The substrate transfer facility according to any one of the above.

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