JPH11204630A - Substrate accommodating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate accommodating device of a structure capable of preventing adhesion of foreign matter or mist from a manufacturing environment, preventing adverse effects on substrates accommodated in a device, when substrates accommodated in a cassette are transported or kept, and facilitates handling when the substrates are handled and cleaned. SOLUTION: A cassette 1 having substrates 6 accommodated therein is covered with a door 7, having an openable mechanism of a conductive metal and with a cover 10. The cover 10 is provided therein with a view window 11 for the confirmation of the substrates 6 in the cassette 1. The cover 10 is fixed to the cassette 1 by means of screws, so that only the projections provided at several positions of the cover are made to contact support members 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate storage device used for storing, transporting, or storing substrates.

[0002]

2. Description of the Related Art Conventionally, a device having a fine pattern such as a liquid crystal display device is manufactured in a clean room in which foreign matter is controlled at a micron level because the manufacturing yield is reduced due to contamination from a manufacturing environment. During the manufacturing process, the substrates constituting the liquid crystal display device are stored in a cassette in multiple stages, and are repeatedly transported and stored, such as between manufacturing devices, transferred to a storage, and stored in a storage. In addition, foreign matter such as dust scattered from an operator or a device or mist such as an organic gas may adhere to the liquid crystal display device, which may deteriorate the quality of the liquid crystal display device. Therefore, the conventional cassette has been covered with a door and a cover having an opening / closing mechanism for loading and unloading substrates. FIG. 7 is a view showing a conventional substrate storage device including a cassette and a cover. The cassette 1 formed in a box shape by an upper plate 2, a lower plate 3, and a plurality of support members 4 provided on a pair of opposed side surfaces. And a door 7 having an opening and closing mechanism 9 provided on an opening surface 8 for carrying in and out the substrate 6, and a cover 10 for covering the other side surface of the cassette 1. The cover 10 is fixed to the support member 4 of the cassette 1. The door 7 provided on the opening 8
The cover 10 is composed of a transparent resin plate and a transparent resin sheet so that the presence or absence of the substrate 6 in the substrate storage device can be confirmed. A groove 5 for holding a plurality of substrates 6 one by one at intervals on the inner wall surface of the support member 4.
Are formed.

[0003]

The conventional substrate storage device is configured as described above, and the substrate storage device is provided with a TFT.
When a glass substrate for a liquid crystal display device on which a (thin film transistor) is mounted is housed, when the substrate housing device is transported or stored, the cover 10 is rubbed with a person, a transport guide, or the like.
When the cover 10 made of resin is charged and the TFT is electrostatically damaged, or the cover 10 is stained or scratched,
There is a problem that the sensor cannot detect the substrate 6 through the sensor. Furthermore, when the cover 10 is soiled or scratched, if the cover 10 is of a three-sided integral type except for the opening 8, the entire cover 10 must be replaced. Further, when the substrate storage device is washed and dried, the cover 10 made of resin is deformed, and when the substrate storage device is transferred to the transfer device or the processing device, the positioning of the cassette 1 portion storing the substrate 6 and the positioning of the door 7 are performed. Since the cover 10 is inadvertently opened and closed, and the cover 10 is fixed in close contact with the support member 4, the support member 4 in close contact with the cover 1
When dust enters the gaps of 0, there is a problem that cleaning is difficult and drying is slow.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and is intended to solve the problem described above. When transporting and storing substrates stored in a cassette, mist such as dust or organic gas from a manufacturing environment is removed. It is an object of the present invention to provide a substrate storage device which has a structure capable of preventing the adhesion of the substrate, can prevent an adverse effect on the stored substrate, and can be easily handled at the time of work or cleaning.

[0005]

A substrate storage device according to the present invention is formed in a box shape by an upper plate and a lower plate made of a conductive resin material and a plurality of supporting members provided on a pair of opposing side surfaces. A cassette, a metal door provided on an opening surface for carrying in and out the substrate and supported in an openable and closable manner, and a metal cover covering three sides other than the opening surface, and formed on the inner wall surface of the support member. The holding section holds a plurality of substrates one by one at intervals. Further, the metal cover is fixed to the cassette by screwing a projection provided at a predetermined position of the cover to the support member. Further, an opening for confirming a substrate housed in a cassette is provided in a part of the metal cover, and a resin sheet subjected to an antistatic treatment is fitted into the opening. further,
One side of the resin sheet was sandwiched between the supporting member and the metal cover, the center of the opposite side was screwed to the metal cover, and both ends of the opposite side were attached to the cover. It is fixed by a hook.

[0006] In addition, there is provided a structure in which the opening and closing of the door can be confirmed by a photoelectric sensor using a cutout portion provided on the upper side of the opening surface of the metal cover and bent portions provided on both sides of the metal door. Things. Further, when the metal door is closed, a magnet catch having a structure in which the yoke plate portion and the magnet portion are fixed is attached to the cassette in order to fix the door to the cassette. In addition, an ID tag is attached to a transparent resin material that has been subjected to an antistatic treatment and is fitted in an opening provided in a part of a metal cover. Further, a hook for opening and closing the door, which can be gripped by a robot hand or the like, is provided below the metal door.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Hereinafter, a substrate storage device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a substrate storage device according to a first embodiment of the present invention, FIG. 2 is an enlarged view showing a structure of a portion for attaching a cover to the cassette in FIG. 1, and FIG. 3 is provided on the cover in FIG. FIG. 4 is an enlarged view showing a structure of a viewing window for checking a substrate in a cassette, FIG. 4 is an enlarged view showing a mounting structure of an ID tag, and FIG. 5 is a mechanism for opening and closing a door for loading and unloading a substrate in FIG. It is an enlarged view which shows the structure of a part.

In FIG. 1, reference numeral 1 denotes a cassette for accommodating a substrate 6, an upper plate 2 and a lower plate 3 made of a conductive resin material, and a plurality of support members 4 provided on a pair of opposed side surfaces.
To form a box. Reference numeral 5 denotes a groove which forms a holding portion for holding the substrates 6 formed on the inner wall surface of the support member 4 one by one at intervals. 7 is a substrate 6
A door having an opening / closing mechanism section 9 provided on an opening surface 8 for carrying in / out the door, and is formed using a conductive metal.
Reference numeral 10 denotes a cover formed by using a conductive metal to cover the side surface of the cassette 1 other than the opening surface 8 provided with the door 7, and is fixed to the support member 4 of the cassette 1. 1
1 is a viewing window for confirming the presence or absence of the substrate 6 in the cassette 1, 12 is a transport handle provided on the cover 10, 13 is an ID tag, 28 is an opening / closing hook attached to the lower part of the door 7, and 32 is a door. 7 is a magnet catch for fixing 7.

In FIG. 2, reference numeral 14 denotes a plurality of projections provided on the cover 10, and only the projections 14 are used as support members 4.
And the cover 10 and the support member 4 are fixed by screws 15. 16 is the cover 1 except for the projection 14
0 and a space formed between the support member 4.

[0010] In FIG. 3, FIG.
3B is a cross-sectional view as viewed from above, and FIG.
Reference numeral 8 denotes an opening provided on the metal cover 10 for forming the viewing window 11, and 19 denotes a transparent antistatic treated resin sheet for forming the viewing window 11, one side of the supporting member 4 and the cover 10. While being sandwiched therebetween, the center of the opposite side is fixed to the cover 10 with screws 20, and both ends thereof are fixed with hooks 21 attached to the cover 10.

In FIG. 4, reference numeral 23 denotes an antistatic transparent resin material to which the ID tag 13 is attached, which is attached to an opening 24 provided in the metal cover 10.

In FIG. 5, reference numeral 26 denotes an opening / closing mechanism 9 of the door 7.
The flange 27 is attached to the upper end of the upper plate 2 on the side of the opening surface 8, and 27 is a rotation support shaft inserted through the flange 26, and the door 7 is fixed to the rotation support shaft 27. 2
Reference numeral 9 denotes a cutout portion provided on the upper side of the opening surface 8 of the cover 10, reference numeral 30 denotes a bent portion provided on both sides of the door 7 for reinforcement, and reference numeral 31 denotes a photoelectric sensor provided so as to correspond to the cutout portion 29. When the door 7 is open, the light of the photoelectric sensor 31 is transmitted through the cutout portion 29, and when the door 7 is closed, the light of the photoelectric sensor 31 is blocked by the bent portion 30 of the door 7. Confirm opening and closing of 7. Further, the magnet catch 32 for fixing the door 7 to hermetically hold the substrate storage device has a structure in which the yoke plate portion and the magnet portion are fixed. As shown in FIG. 6, the opening / closing hook 28 attached to the door 7 has a structure that is easy to grasp, and the robot hand 33 is provided with a balancer 34 and the like, and can be automatically opened / closed easily by the rotation driving unit 35. .

According to the present invention, since the cassette 1 accommodating the substrate 6 is covered by the door 7 and the cover 10, foreign substances such as dust and organic gas from the manufacturing environment when transporting and storing the cassette 1 are provided. Can be prevented from adhering to the substrate 6, and since the door 7 and the cover 10 are formed of conductive metal, the door 7 and the cover 10 are not charged and are stored in the cassette 1. Does not adversely affect the substrate. Further, the cover 10 is not deformed during hot water washing and hot air drying. Further, since the space 16 is provided between the cover 10 and the support member 4 to which the cover 10 is fixed, it is easy to wash and remove dust and the like entering between the cassette 1 and the cover 10 and to dry the substrate storage device. And can be done quickly.

Further, since the cover 10 is provided with the viewing window 11 on which the transparent resin sheet 19 subjected to the antistatic treatment is disposed, the substrate 6 housed in the substrate housing device can be detected. Further, the resin sheet 19 has one side sandwiched between the support member 4 and the cover 10, and the opposite ends of the opposite side are fixed by the hooks 21 attached to the cover 10, so that thermal deformation can be prevented.
Even if the resin sheet 19 constituting the above is damaged, the resin sheet 19 alone can be replaced. Further, the opening and closing of the door 7 can be confirmed by the photoelectric sensor 31. Further, since the ID tag 13 attached to the substrate storage device is attached to the transparent resin material 23 which has been subjected to antistatic treatment, there is no magnetic disturbance due to metal, and erroneous detection can be prevented. The door 7 can be automatically opened and closed by providing an openable and closable hook 28 at the lower portion of the door 7. Further, since the magnet catch 32 for fixing the door 7 to hold the substrate storage device tightly has a structure in which the yoke plate portion and the magnet portion are fixed, the yoke plate portion and the magnet portion are rubbed by vibration or the like. Dust can be prevented.

[0015]

According to the present invention, in a substrate storing apparatus for storing a plurality of substrates and transferring between manufacturing apparatuses or to a storage and storing in the storage, the cassette for storing the substrates has conductivity. By covering with a door and a cover having an opening / closing mechanism formed of metal, it is possible to prevent foreign substances and mist from the manufacturing environment from adhering to the substrate when transporting and storing the cassette containing the substrate, and to prevent the door and the cover from being covered. Charge can be prevented, so that the elements formed on the substrate stored in the substrate storage device are not adversely affected by electrostatic destruction or the like, and furthermore, the cover is deformed during hot water washing and hot air drying. Substrate storage device can be provided. Further, according to the second aspect of the present invention, since a space is provided between the cover and the support member to which the cover is fixed, a cleaning and removal of dust and the like entering between the cassette and the cover and a substrate storage device are provided. Can be easily and quickly dried. According to the third and fourth aspects of the present invention, since the cover is provided with the viewing window on which the transparent resin sheet subjected to the antistatic treatment is disposed, the detection of the substrate stored in the substrate storage device can be performed. It is possible, and since the resin sheet is fixed to the cover on both sides, deformation due to heat can be prevented. Further, even if the resin sheet constituting the viewing window is damaged or the like, only the resin sheet can be replaced, so that the cost can be reduced.

According to the fifth aspect of the present invention, the opening and closing of the door can be easily confirmed using the photoelectric sensor. According to the sixth aspect of the present invention, the magnet catch for fixing the door for holding the substrate storage device in a sealed state has a structure in which the yoke plate portion and the magnet portion are fixed. Dust generation due to friction between the plate portion and the magnet portion can be prevented. According to the invention according to claim 7, the ID tag attached to the substrate storage device is
Since it is attached to a transparent resin material that has been subjected to antistatic treatment, there is no magnetic disturbance due to metal, and false detection can be prevented. According to the invention of claim 8, the door can be automatically opened and closed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a substrate storage device according to a first embodiment of the present invention.

FIG. 2 is an enlarged view showing a structure of a mounting portion of a cassette and a cover of the substrate storage device according to the first embodiment of the present invention.

FIG. 3 is an enlarged view showing a structure of a viewing window provided on a cover of the substrate storage device according to the first embodiment of the present invention.

FIG. 4 is an enlarged view showing an ID tag mounting structure of the substrate storage device according to the first embodiment of the present invention.

FIG. 5 is an enlarged view showing the structure of a door opening / closing mechanism and an opening / closing confirmation detecting unit of the substrate storage device according to the first embodiment of the present invention.

FIG. 6 is an enlarged view showing a structure of an opening / closing mechanism of the substrate storage device according to the first embodiment of the present invention.

FIG. 7 is a perspective view showing a conventional substrate storage device of this type.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 cassette, 2 upper plate, 3 lower plate, 4 support member, 5 groove portion, 6 substrate, 7 door, 8 opening surface, 9 opening / closing mechanism, 10 cover, 11 viewing window, 12 transport handle, 13 ID tag, 14 Protrusion, 15 screw, 1
6 space, 18 opening, 19 resin sheet, 20 screw, 21 hook, 23 resin material, 24 opening, 26
Flange, 27 rotation support shaft, 28 opening / closing hook, 2
9 Notch, 30 bend, 31 photoelectric sensor, 32 magnet catch.

Claims (8)

[Claims] 1. A cassette formed in a box shape by an upper plate and a lower plate made of a conductive resin material and a plurality of supporting members provided on a pair of opposing side surfaces, and provided on an opening surface for carrying a substrate in and out. A metal door that is openably and closably supported, and a metal cover that covers three side surfaces other than the opening surface. A plurality of substrates are placed one by one by a holding portion formed on an inner wall surface of the support member. A substrate storage device configured to be held at an interval. 2. The metal cover is fixed to the cassette by screwing a projection provided at a predetermined position of the cover to a support member.
The substrate storage device as described in the above. 3. A part of a metal cover is provided with an opening for confirming a substrate housed in a cassette, and a resin sheet subjected to an antistatic treatment is fitted into the opening. The substrate storage device according to claim 1 or 2, wherein: 4. A resin sheet, one side of which is sandwiched between a support member and a metal cover, and a central portion of the side opposite to the one side is screwed to the cover, and the side of the opposite side is screwed to the cover. 4. The substrate storage device according to claim 3, wherein both ends are fixed by hooks attached to the cover. 5. A structure in which the opening and closing of the metal cover can be confirmed by a photoelectric sensor by using a cutout portion provided at an upper portion on the opening side of the metal cover and a bent portion provided on both sides of the metal door. The substrate storage device according to any one of claims 1 to 4, further comprising: 6. A magnet catch having a structure in which a yoke plate portion and a magnet portion are fixed to the cassette in order to fix the door to the cassette when the metal door is closed. Claim 1
6. The substrate storage device according to claim 5. 7. An antistatic transparent resin material fitted into an opening provided in a part of a metal cover.
2. A D tag is attached.
The substrate storage device according to any one of claims 1 to 6. 8. The substrate according to claim 1, wherein a hook for opening and closing the door, which can be gripped by a robot hand or the like, is provided below the metal door. Storage device.