CN102484088A - Cassette - Google Patents
Cassette Download PDFInfo
- Publication number
- CN102484088A CN102484088A CN2010800215910A CN201080021591A CN102484088A CN 102484088 A CN102484088 A CN 102484088A CN 2010800215910 A CN2010800215910 A CN 2010800215910A CN 201080021591 A CN201080021591 A CN 201080021591A CN 102484088 A CN102484088 A CN 102484088A
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- Prior art keywords
- mentioned
- card casket
- main part
- projection
- gate structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Abstract
A containment cassette which can minimize the adhesion of foreign matter to the surface of a substrate contained within the cassette and has an opening/closing structure which occupies a reduced area. A cassette (100) for containing a substrate (40), comprising a cassette body (10) in which the substrate (40) is disposed, a cassette opening (20) which is formed in a part of the cassette body (10), and a shutter structure (30) which includes a closing plate (32) for closing the cassette opening (20). Protrusions (14, 34) extending in the opening and closing direction (50) of the closing plate (32) are formed on the cassette body (10) and on the shutter structure (30) so as to be respectively located at the surfaces of portions (12) of the cassette body (10), said portions (12) being located at peripheral edges of the cassette opening (20), and at the surfaces of the shutter structure (30), said surfaces of the portions (12) of the cassette body (10) and said surfaces of the shutter structure (30) facing each other. The protrusions (14) on the cassette body (10) side and the protrusions (34) on the shutter structure (30) side are separated from each other.
Description
Technical field
The present invention relates to take in the card casket of substrate, particularly relate to the card casket of the glass substrate that uses in the manufacturing approach that is accommodated in liquid crystal panel.
In addition, the application requires based on Japanese patent application 2009-121559 number the priority of filing an application on May 20th, 2009, and the full content of this application is introduced in this specification as reference.
Background technology
Have as the liquid crystal panel of the component parts of liquid crystal indicator and to make a pair of glass substrate guarantee structure relative under the state of voids.Be accompanied by maximization, the mass production of liquid crystal panel, the glass substrate that liquid crystal panel is used maximizes year by year.In the substrate conveying system of the such large-scale liquid crystal glass base of the second generation of carrying, use take in the multilayer liquid crystal glass substrate take in card casket (for example, patent documentation 1～3 etc.).
The card casket of taking in of taking in glass substrate is used in following situation: the portion of putting of carrying from the liquid crystal panel manufacturing installation in the manufacturing process in Clean room perhaps takes care of glass substrate to the portion's of the putting carrying of carrying of other manufacturing installation.In addition, take in the card casket and also be used in following situation: carrying/keeping glass substrate between the Storage Department that carries the portion of putting and card casket safe-deposit vault of liquid crystal panel manufacturing installation.
In the atmosphere in the Clean room; The sufficient air cleannes have been guaranteed; But the foreign matters such as dust that when the card casket is taken in carrying/keeping, disperse from operator, floor etc. sometimes are attached to substrate surface, and perhaps the mist of organic gas during treatment substrate etc. is floating and be attached to substrate surface in Clean room.And when under the state that foreign matter, mist adhere to, substrate being carried out PROCESS FOR TREATMENT, the quality of liquid crystal panel might reduce.
Therefore, be set as the lid of taking in that comprises upper plate and 4 side plates is covered in the state of taking in the card casket and carries/take care of so that foreign matter etc. are non-cohesive.Therefore at this, taking in the card casket is independently with taking in lid, need take in the overwrite job of lid, but when picking and placeing substrate, carries out trouble of overwrite job, and its automation difficulty.
Following structure is disclosed in patent documentation 1: the taking in the card casket of box-shaped with the peristome that can pick and place substrate; Be provided with for open and open and close supported freely and the switching mechanism that opens and closes this with airtight its peristome; According to the disclosed card casket of taking in the patent documentation 2, when carrying/keeping, foreign matter can be alleviated, mist adheres to the substrate surface of being taken in; In addition, can make the switching automation of door.
The prior art document
Patent documentation
Patent documentation 1: the spy opens flat 9-115997 communique
Patent documentation 2: the spy opens the 2005-142480 communique
Patent documentation 3: the spy opens the 2005-145628 communique
Summary of the invention
The problem that invention will solve
The inventor finds: patent documentation 1 disclosed taking in the card casket, can alleviate foreign matter etc. really and be attached to substrate surface, but have following problem.This takes in the switching mechanism that the card casket is provided with shutter door, under the situation of utilizing the switching mechanism shutter door, is that the center is rotated door significantly with the switching mechanism, therefore need guarantee bigger free space on every side what take in card casket.That is, take under the situation of card casket at this, the occupied area during switching is bigger, and obstacle is arranged when generally using in the manufacturing process of the liquid crystal panel in Clean room.Especially, the glass substrate that liquid crystal panel is used maximizes year by year, when taking in such glass substrate take in the card casket opening and closing structure that adopts door the time, take in card casket around need much more very occupied areas, practicality reduces more.
The present invention accomplishes in view of such aspect, and its main purpose is: provide can alleviate that foreign matter, mist be attached to the substrate surface of being taken in and have a less opening and closing structure of occupied area take in the card casket.
The scheme that is used to deal with problems
Card casket of the present invention is a card casket of taking in substrate, possesses: card casket main part, and it is at the internal configurations substrate; Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And gate structure; It comprises the shut of the above-mentioned card casket of shutoff peristome; Be formed with projection along the switching direction of above-mentioned shut respectively on the position of the periphery that is positioned at above-mentioned card casket peristome in above-mentioned card casket main part and the mutual relative face of above-mentioned gate structure, the above-mentioned projection that is positioned at above-mentioned card casket main part side is separated from each other with the above-mentioned projection that is positioned at above-mentioned gate structure side.
Certain preferred embodiment in, the above-mentioned projection that is positioned at above-mentioned card casket main part side and the above-mentioned projection that is positioned at above-mentioned gate structure side are respectively the projections of the rib shape that slenderly extends along the switching direction of above-mentioned shut.
Certain preferred embodiment in, the switching direction of above-mentioned shut is the short transverse of above-mentioned card casket main part.
Certain preferred embodiment in, except the projection that forms along the short transverse of above-mentioned card casket main part, also on above-mentioned gate structure, be formed with the projection of extending along horizontal direction.
Certain preferred embodiment in, the above-mentioned projection that is arranged in above-mentioned card casket main part side is a plurality of projections with the arbitrary side's projection that is positioned at the above-mentioned projection of above-mentioned gate structure side, the opposing party's projection with respect to above-mentioned side's projection between above-mentioned a plurality of projections.
Certain preferred embodiment in, it is the shape of L word shape that the above-mentioned projection that is positioned at above-mentioned card casket main part side has the cross section vertical with the switching direction of above-mentioned opening-closing plate respectively with the above-mentioned projection that is positioned at above-mentioned gate structure side.
Certain preferred embodiment in, be provided with the fastener that card ends above-mentioned gate structure at above-mentioned card casket main part, on above-mentioned gate structure, be formed with guide portion, guide sections is taken in the above-mentioned fastener of being located at above-mentioned card casket main part.
Other card casket of the present invention is a card casket of taking in substrate, possesses: card casket main part, and it is at the internal configurations substrate; Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And gate structure; It comprises the shut of the above-mentioned card casket of shutoff peristome, is provided with the fastener that card ends above-mentioned gate structure at above-mentioned card casket main part, on above-mentioned gate structure, is formed with guide portion; Guide sections is taken in the above-mentioned fastener of being located at above-mentioned card casket main part; Above-mentioned fastener is a roller bearing, is formed with the groove that can dispose above-mentioned roller bearing in guide sections, and above-mentioned groove extends with respect to the short transverse of above-mentioned card casket main part obliquely.
Certain preferred embodiment in, above-mentioned roller bearing is located at the topmost of above-mentioned card casket main part.
Certain preferred embodiment in, above-mentioned roller bearing except that being located at above-mentioned topmost, also be located at than above-mentioned topmost by under the position.
Certain preferred embodiment in, above-mentioned roller bearing is provided with one at least at the central portion of the short transverse of above-mentioned card casket main part.
Certain preferred embodiment in; The combination of guide sections and above-mentioned roller bearing is provided with a plurality of along the short transverse of above-mentioned card casket main part, the length of the horizontal direction of the guide sections above above-mentioned short transverse is positioned at is longer than the length of the horizontal direction that is positioned at the guide sections below leaning on than it.
Another other card casket of the present invention is a card casket of taking in substrate, possesses: card casket main part, and it is at the internal configurations substrate; Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And gate structure; It comprises the shut of the above-mentioned card casket of shutoff peristome; On above-mentioned gate structure, be provided with fastener, above-mentioned fastener is limited to above-mentioned card casket main part with this gate structure, is formed with guide portion at above-mentioned card casket main part; Guide sections is taken in the above-mentioned fastener of being located on the above-mentioned gate structure; Above-mentioned fastener is a roller bearing, is formed with the groove that can dispose above-mentioned roller bearing in guide sections, and above-mentioned groove extends with respect to the short transverse of above-mentioned card casket main part obliquely.
Another other card casket of the present invention is a card casket of taking in substrate, possesses: card casket main part, and it is at the internal configurations substrate; Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And gate structure, it comprises the shut of the above-mentioned card casket of shutoff peristome, is provided with the position with wedge-type shape at above-mentioned card casket main part, on above-mentioned gate structure, is provided with the position with wedge-type shape accordingly with above-mentioned position with wedge-type shape.
Certain preferred embodiment in, many lines in the internal arrangement of above-mentioned card casket main part, aforesaid substrate is a glass substrate, above-mentioned glass substrate is supported by above-mentioned line.
Certain preferred embodiment in; Above-mentioned card casket main part has box-formed shape; Above-mentioned card casket peristome is formed on the one side at least in the front and back of above-mentioned box-formed shape, is formed with the peristome that the Handling device that supplies the carrying aforesaid substrate inserts in the bottom surface of above-mentioned box-formed shape.
The invention effect
In card casket of the present invention, be formed with card casket peristome in the part of the card casket main part of internal configurations substrate, and possess gate structure, above-mentioned gate structure comprises the shut of this card casket peristome of shutoff.And; Short transverse along card casket main part on the position of the periphery that is positioned at card casket peristome in card casket main part and the mutual relative face of gate structure is formed with projection; These projections are separated from each other; So can provide and take in the card casket as follows: it can alleviate foreign matter, mist adheres to the substrate surface of being taken in, and has the less opening and closing structure of occupied area.
Description of drawings
Fig. 1 is the stereogram of the card casket 100 of execution mode of the present invention.
Fig. 2 (a) and (b) be the side view of card casket 100.
Fig. 3 is the side view of the card casket 100 of execution mode of the present invention.
Fig. 4 is the side view of the card casket 100 of execution mode of the present invention.
Fig. 5 (a) is the partial enlarged drawing of gate structure 30 and card casket main part 10, (b) is the sectional view along the line VB-VB in (a).
Fig. 6 is the sectional view along the line VI-VI among Fig. 2 (b).
Fig. 7 is the stereogram of the card casket 100 of execution mode of the present invention.
Fig. 8 (a) is the local amplification sectional view of the periphery of projection 13A, (b) is the local amplification sectional view of the periphery of projection 13E13F.
Fig. 9 is the stereogram of the card casket 100 of execution mode of the present invention.
Figure 10 is the stereogram of the card casket 1000 of comparative example.
Figure 11 (a) and (b) be respectively the stereogram and the side view of the card casket 1100 of comparative example.
Figure 12 (a) and (b) be respectively the stereogram and the side view of the card casket 1200 of comparative example.
Figure 13 is the stereogram of the card casket 1300 of comparative example.
Figure 14 is the side view of the card casket 100 of execution mode of the present invention.
Figure 15 is the sectional view along the line X-X among Figure 14.
Figure 16 is the side view of the card casket 100 of execution mode of the present invention.
Figure 17 is the sectional view of formation that the card casket 100 of ply-yarn drill casket mode is shown.
Embodiment
Following one side is explained execution mode of the present invention on one side with reference to accompanying drawing.In the accompanying drawing below,, represent to have in fact the inscape of identical function with identical Reference numeral for the simplicity of explaining.In addition, the invention is not restricted to following execution mode.
On one side the card casket 100 of execution mode of the present invention is described referring to figs. 1 through Fig. 4 at first, on one side.
Fig. 1 schematically shows the stereogram that the integral body of the card casket 100 of this execution mode constitutes.The card casket 100 of this execution mode can be taken in substrate 40.Substrate 40 is glass substrates of using of liquid crystal panel for example.This glass substrate 40 both can be the preceding female glass of size that cuts into liquid crystal panel, also can be the glass of the size of the liquid crystal panel after the cutting.And glass substrate 40 both can be an array base palte (perhaps it makes array base palte midway) of making thin-film transistor (TFT) on it, also can be the CF substrate (perhaps it makes CF substrate midway) that forms colored filter (CF) on it.In addition, substrate 40 also can be other such thin plate of wafer except being the glass substrate.
And, be not limited to the substrate 40 that liquid crystal panel is used, also can be the thin base (be not limited to glass, can in the ply-yarn drill casket, get final product) that when making PDP, organic EL panel, other flat-panel monitor, adopts with the sheet keeping.
The ply-yarn drill casket 100 of this execution mode comprises: card casket main part 10; Card casket peristome 20, it is formed at the part of card casket main part 10; And gate structure 30, it comprises the shut 32 of shutoff card casket peristome 20.Can be at the internal configurations substrate 40 of card casket main part 10.In addition, can pick and place substrate 40 from card casket peristome 20.
On card casket main part 10 and gate structure 30 mutual relative face separately, be formed with projection (14,34).Particularly.The position 12 that in card casket main part 10, is positioned at the periphery of card casket peristome 20 is formed with projection 14, on the other hand, in gate structure 30, is formed with projection 34 on the face relative with peripheral part 12.The projection of this execution mode (14,34) is extended along the switching direction of shut 32.In addition, in the formation of this execution mode, the switching direction of gate structure 30 is short transverses 50 of card casket main part 10, i.e. gravity direction (vertical).
In this example, projection 14 is located at the position, the left and right sides of the peripheral part 12 in the card casket main part 10.On the other hand, projection 34 is located at the left and right edges portion of the shut 32 of gate structure 30.In addition, the projection of this execution mode (14,34) is the projection of the rib shape that slenderly extends along short transverse 50.
Under the situation that gate structure 30 is arranged at card casket main part 10 (reference arrow 55), can become the state of the shut 32 shutoff card casket peristomes 20 that utilize gate structure 30.Under this state, in the formation of this execution mode, the projection 14 that is positioned at card casket main part 10 sides is separated from each other with the projection 34 that is positioned at gate structure 30 sides.Be set as the formation of when shut 32 shutoff card casket peristomes 20 projection 14 and projection 34 separated states, can eliminate the mutual slip of projection 14 and projection 34 thus, perhaps can reduce slip.
The card casket main part 10 of this execution mode has box-formed shape.For example, can utilize frame structure to make the part on the limit of card casket main part 10, utilize plate structure to make the part of the face of card casket main part 10.In this case, the part of frame structure can comprise metal (for example, aluminium, iron, stainless steel etc.), and the part of plate structure can comprise resin plate, metallic plate (for example, aluminium sheet) etc.
In formation example shown in Figure 1, the skeleton of card casket main part 10 has frame structure, and side (left side/right side) 11A and the top 11B of card casket main part 10 are covered by plate structure (for example, metallic plate).In this example, card casket peristome 12 is formed at the front of card casket main part 10, but also can be formed at the front and be formed at the back.Both form under the situation of card casket peristome 12 in the front and back of card casket main part 10, can both pick and place substrate 40 from front and back.
In addition, the bottom surface of card casket main part 10 has form that is covered by plate structure and the form that does not cover.Under the situation of the bottom surface that covers card casket main part 10 by plate structure, import for example robots arm at card casket peristome 20, utilize this robots arm to carry out picking and placeing of substrate 40.On the other hand; Form herein under the situation of peristome in the bottom surface that covers card casket main part 10 without plate structure; Peristome in this bottom surface imports the roller path that lowering or hoisting gear possessed, and can utilize this roller path to pick and place substrate 40 from card casket peristome 20.
In addition, be provided with the fastener 16 that card ends gate structure 30 at card casket main part 10.On the other hand, on gate structure 30, be formed with guide portion 36, this guide portion 36 is taken in the fastener 16 of being located at card casket main part 10.The fastener 16 of this execution mode is a roller bearing.In addition, be formed with groove in guide portion 36, in this groove, taken in roller bearing 16, therefore, gate structure 30 is fixed in card casket main part 10.In addition, guide portion 36 is set, on the other hand, also fastener 16 can be set on gate structure 30 at card casket main part 10.
Supporting member 15 below the bottom of card casket main part 10 is provided with support gate structure 30.Particularly, the position (lower position) that in card casket main part 10, is positioned at the periphery of card casket peristome 20 is formed with supporting member 15.In this example, supporting member 15 is (with respect to the rectangular direction of short transverse 50) projections of slenderly extending of extending in the horizontal direction, support gate structure 30 shut 32 below.In addition, as long as can support the bottom of gate structure 30, supporting member 15 can be other form, for example can be the projection (projection of the projection of rectangle, circle etc.) of shorter length.
Fig. 2 (a) and (b) side of the card casket 100 of schematically illustrated execution mode constitute.In addition, in formation shown in Figure 2, with comparison shown in Figure 1, difference mainly is: the combination (16A and 36A, 16B and 36B) of fastener 16 and guide portion 36 is provided with a plurality of along short transverse 50.But, in formation shown in Figure 2, also can be as Fig. 1 the combination (for example, 16A and 36A) of fastener 16 and guide portion 36 be provided with 1 along short transverse 50.
In the formation shown in Fig. 2 (a), fastener 16 (16A, 16B) is a roller bearing.And (36A, 36B) is formed with groove 37 in guide portion 36, can in this groove 37, dispose roller bearing 16.In addition, this groove 37 extends with respect to the short transverse 50 of card casket main part 10 obliquely.
So, shown in Fig. 2 (b), only rotation a little in groove 37 of roller bearing 16, the shut 32 of gate structure 30 just moves by arrow 55, shutoff card casket peristome 20.Meanwhile, gate structure 30 is fixed in card casket main part 10, so can break off from the reciprocating mechanism that is connected in gate structure 30.Therefore, can move by gate structure 30 and card casket main part 10 incorporate card caskets 100.In this example, gate structure 30 is fixed by the roller bearing 16 (16A, 16B) and the supporting member 15 of card casket main part 10.
In addition, in the formation of this execution mode, the length of the guide portion 36A above making is longer than the length of the guide portion 36B of below, so that gate structure 30 breaks away from from card casket main part 10 easily when making gate structure 30 continue to rise.In addition, the combination of roller bearing 16 and guide portion 36 is not limited to 2 of formation shown in Figure 2, can be 3 or more than 4.Also the length of the guide portion of preferred top is longer than the length of the guide portion of below in this case.
In addition, be that as shown in Figure 3, roller bearing 16 can be located at the topmost (the for example zone of the size L of Fig. 2 (b)) of card casket main part 10 under 1 the situation in the combination of roller bearing 16 and guide portion 36.Be positioned at roller bearing shown in Figure 3 16 under the state of topmost, gate structure 30 is supported in gravity (vertical) direction by supporting member 15, but unfixing in the horizontal direction.So gate structure 30 is the fulcrum vibration with guide portion 36 easily.Therefore, as shown in Figure 4, also can the combination of roller bearing 16 and guide portion 36 be located at the central portion of card casket main part 10.Like this, can reduce the amplitude of gate structure 30 with structure comparison shown in Figure 3.But, in structure shown in Figure 4, require to guarantee to be positioned in the gate structure 30 intensity of leaning on last position than guide portion 16.
Certainly, formation as shown in Figure 2 is such, when the combination with roller bearing 16 and guide portion 36 is made as when a plurality of, can make the fixing more stable of gate structure 30 and card casket main part 10, so preferred.But under the situation of a plurality of formations, the components number that constitutes card casket 100 increases.Therefore, if on-off action and the seal of card casket 100 are good,, also has the advantage of cost aspect (manufacturing cost, parts/material cost) etc. even then the combination of roller bearing 16 and guide portion 36 is 1.
Fig. 5 (a) is the enlarged drawing from the periphery of the supporting member 15 of Fig. 2 (a) when Fig. 2 (b) shifts.Projection 34 is extended and is formed to the direction of card casket main part 10 from the shut 32 of gate structure 30.On the other hand, projection 14 is extended and is formed to the direction of the shut 32 of gate structure 30 from the peripheral part 12 of card casket main part 10.As stated, gate structure 30 can 52 move along the vertical direction, when gate structure 30 move downwards and to the direction of supporting member 15 near the time, shut 32 shutoff card casket peristomes 20.
Fig. 5 (b) is the schematic cross-section along the line VB-VB among Fig. 5 (a) (perhaps Fig. 2 (b)).In this example, projection 34 is provided with 2 (34A, 34B), and projection 14 is provided with 1, and projection 14 is disposed between projection 34A and the projection 34B.And projection 14 is separated from each other with projection 34 (34A, 34B), so even becoming gate structure 30 52 moves along the vertical direction, also do not slide the each other formation of (perhaps not sliding in fact) of projection 14 and projection 34.
Like Fig. 5 (a) with (b), the combination of projection 14 and projection 34 with when from the side surface direction (horizontal direction) of this projection when watching a part of overlapping mode of each projection dispose.Through such configuration,, also be difficult to get into even the ambient atmos on every side of card casket 100 wants to press the inside that gets into card casket 100 shown in the arrow 51 (with reference to Fig. 5 (b)).That is, the path in the gap between projection 14 and the projection 34 is crooked, and this becomes obstruction, so ambient atmos is difficult to invade the inside of card casket 100.Thus, even projection 14 and projection 34 are separated from each other, also can improve the seal of card casket 100 inside with respect to the ambient atmos around the card casket 100.
The combination of projection 14 and projection 34 is not limited to the example shown in Fig. 5 (b), can be that other constitutes example.For example, can projection 14 be made as 2, projection 34 is made as 1, make these projections mesh.Perhaps, can projection 14 be made as a plurality ofly, projection 34 be made as a plurality of, make these projections mesh.The number of projection (14,34) is many more, and the path in the gap between projection 14 and the projection 34 is more crooked and hinder to increase, and ambient atmos is difficult to invade the inside seal raising of ambient atmos (that is, with respect to) of card casket 100.
In addition; Even projection 14 is respectively 1 with projection 34; If but with from the side surface direction (horizontal direction) of this projection when watching a part of overlapping mode of each projection dispose; Then can improve the seal of card casket 100 inside, so also can adopt such formation example with respect to the ambient atmos around the card casket 100.At this; Gas (air) even if 1 in passage but have crooked place, then it becomes the bigger obstruction that gas is advanced, so on this meaning; Even projection 14 is respectively 1 with projection 34, also can guarantee seal with respect to ambient atmos (koniology).
Fig. 6 is the schematic cross-section along the line VI-VI among Fig. 2 (b).In this example, guide portion 36 is extended from the shut 32 of gate structure 30, has taken in fastener (roller bearing) 16 in the groove 37 on being formed at guide portion 36.Roller bearing 16 links through support portion 17 and card casket main part 10.In addition, in this example,, adopt roller bearing, but also can adopt other structure as fastener 16.
According to the card casket 100 of this execution mode, be formed with card casket peristome 20 in a part of blocking casket main part 10, possess gate structure 30, this gate structure 30 comprises the shut 32 of this card casket peristome 20 of shutoff.And, in card casket main part 10, being positioned on the mutual relative face of position 12 and gate structure 30 of periphery of card casket peristome 20 and being formed with projection (14,34) along the short transverse 50 of blocking casket main part 10, these projections (14,34) are separated from each other.
Therefore, even if make shut 32 edges of gate structure 30 open and close card casket peristome 20 switchings that direction (perhaps short transverse 50) moved and made card casket main part 10, projection (14,34) also can not be slided each other, and can make shut 32 carry out on-off action.Consequently: can suppress to follow the on-off action of shut 32 and produce dust, so can alleviate the surface that dust is attached to the substrate of taking in card casket main part 10 inside 40.
And gate structure 30 is not to be the mode that the center is rotated door significantly with the switching mechanism, but the mode that moves up and down.Therefore, though taking in during mode for door card casket around need much more very occupied areas, in the formation of this execution mode, do not have this necessity, that can realize having the less opening and closing structure of occupied area takes in card casket 100.
Especially; Because in guide portion 36, possess the structure of taking in fastener 16 (roller bearing) in the groove 37 of diagonally extending; So the shut 32 that only makes gate structure 30 (with reference to the arrow 52 among Fig. 2 (a)) downwards moves, just can make the direction slip (with reference to arrow 55 in Fig. 2 (b)) of shut 32 at shutoff card casket peristome 20.Therefore, even do not adopt complicated controlling organization, the sealing that yet can utilize easy mechanism (mechanical structure) to block casket peristome 20.In addition, roller bearing 16 rotates only in being accommodated in groove 37 time a little, just can accomplish the sealings of 32 pairs of cards of shut casket peristome 20, so can suppress considerably lessly by the amount of dust that roller bearing 16 produces.Therefore, in the structure aspects of fastener (roller bearing) 16, also can alleviate the on-off action of following shut 32 and produce dust.
And; If will dispose the size L (the size L among Fig. 2 (b)) of upper area of the card casket main part 10 of roller bearing 16 designs lessly; (for example; Be set as that gate structure 30 can not be tens of mm degree because of vibration waits the size that comes off and can guarantee that roller bearing 16 has the size of the diameter of abundant intensity when carrying card casket), then can make the angle of roller bearing 16 rotations when carrying out the shutter opening and closing action very little.If like this, the action that can further make strong (because the dust that friction causes generation the is less) roller bearing 16 of original slip is for minimum, consequently: can make because the dust generation that causes of sliding extremely reduces.
In addition, as shown in Figure 1 in this execution mode, be illustrated in the formation of the combination of projection 14 that short transverse 50 extends and projection 34, but in addition, as shown in Figure 7, also can be formed on the projection 13A that horizontal direction is extended on the top of gate structure 30.In example shown in Figure 7, be arranged on the projection 13A that horizontal direction is extended on the top of the shut 32 of gate structure 30.In addition, with projection 13A accordingly, also be formed on the projection 13B that horizontal direction is extended on the top of card casket main part 10.And as shown in Figure 7, the projection 13 that can extend in the horizontal direction is not formed at card casket main part 10 sides, only is formed at gate structure 30 sides.
And, shown in Fig. 8 (a), can change the shape of the projection 13 of extending in the horizontal direction.Fig. 8 (a) is illustrated in the local amplification sectional view of the periphery of the projection 13A that the top of the shut 32 of gate structure 30 is provided with.
In the formation shown in Fig. 8 (a), the projection 13A that slenderly extends is in the horizontal direction connecting the projection 13C that extends equally in the horizontal direction.In addition, 11B is provided with the projection 13D that extends in the horizontal direction on card casket main part 10.Projection 13D extends to the top, and projection 13C forms with the mode of surrounding this projection 13D.Like this, through combination projection 13A, 13C, 13D, can suppress air and invade from the top of card casket main part 10.
In addition, shown in Fig. 8 (b), can projection 13E and 13F be installed in the bottom of the shut 32 of gate structure 30.Fig. 8 (b) is illustrated in the local amplification sectional view of the periphery of projection 13E that the bottom of the shut 32 of gate structure 30 is provided with, 13F.Projection 13E and projection 13F extend in the horizontal direction.Projection 13F is located at the part (is base plate at this) of card casket main part 10, extends to the top.Projection 13E forms with the mode of surrounding this projection 13F.Projection 13E is installed on the gate structure 30.Like this, through combination projection 13E, 13F, can suppress air and invade from the bottom of card casket main part 10.
For Fig. 8 (a) with the formation (b), can adopt both (that is, the upper and lower), and can be arbitrary side (that is, top or bottom).In addition, Fig. 8 (a) and (b) shown in formation surely suitably change to suitable formation.For example, in the formation shown in Fig. 8 (a), projection 13A and projection 13C can be by the structure manufactures of one, also can be by a plurality of structure manufacture projection 13C.And, also can be formed on the projection 13 that horizontal direction is extended continuously with guide portion 36.Make projection 13 and guide portion 36 incorporate formation examples shown in Fig. 9.
In addition, in this execution mode, be that the example of the short transverse 50 (that is, vertical) of card casket main part 10 is illustrated to the switching direction of the shut 32 of gate structure 30, but the switching direction of shut 32 can be a horizontal direction.In this case, projection 14 is respectively the formation of extending in the horizontal direction with projection 34.
At this, the card casket of this execution mode 100 and other substrate reception card casket (comparative example) are compared research.Figure 10 illustrates the card casket 1000 of the slidingtype that possesses sliding part 140.In card casket 1000 shown in Figure 10, be located at card casket peristome 120 on the card casket main part 110 around be formed with slide construction (sliding part) 140.The lid 130 of shutoff card casket peristome 120 slides on slide construction 140 on one side and carries out knee-action (arrow 152) on one side.In this case, near the card casket peristome 120 that picks and places substrate 40, this slide construction 140 becomes dust and produces the source, therefore, is inappropriate at Clean room at this and uses.
Figure 11 (a) and (b) the card casket 1100 of the detachable that possesses hooking structure 150 is shown.Figure 11 (a) and (b) be respectively the stereogram and the side view of card casket 1100.Card casket 1100 shown in Figure 11 has the structure of the lid 130 that tangles detachable from the top.Under the situation of this structure, can avoid covering 130 and suppress dust with the slip of card casket main part 110 and produce, but be difficult to guarantee to cover 130 with block the airtight of (arrow 155) between the casket main part 110.At this, when will guaranteeing when airtight, then between lid 130 and card casket main part 110, seal etc. is set, so, on sealing part etc., produce slip, consequently produced dust.In addition, also have when lid 130 and be easy to generate loosening shortcoming during with the coupling difference of blocking (arrow 155) between the casket main part 110.
Figure 12 (a) and (b) the possess embedded structure card casket 1200 of detachable of (161,162) is shown.Figure 12 (a) and (b) be respectively the stereogram and the side view of card casket 1200.Card casket 1200 shown in Figure 12 has the structure that embeds the lid 130 of detachable from the side.Under the situation of this structure, the airtight ratio between lid 130 and the card casket main part 110 is easier to guarantee.But, whenever when card casket main part 110 picks and places substrate 40, need unload lower cover 130 or to card casket main part 110 insert covers 130 from card casket main part 110, need be kept for covering the space of 130 on-off action (for example, arrow 154, arrow 156) significantly.This card casket 1200 be not have a less opening and closing structure of occupied area take in the card casket.
Figure 13 illustrates the card casket 1300 that plate 135 opens and closes for gate-type.Same with the card casket of above-mentioned patent documentation 1 disclosed gate-type, the card casket 1300 of gate-type shown in Figure 13 be not have a less opening and closing structure of occupied area take in the card casket.That is, shown in figure 13, even the card casket 1300 of double-open type also need be guaranteed rotation space (158) in the switching of plate 135, therefore, be the card casket that needs more occupied area.
As stated, with card casket 100 comparisons of this execution mode, card casket 1000～1300 all has shortcoming, is difficult to structurally solve this shortcoming.On the other hand, the card casket 100 of this execution mode can be avoided such shortcoming.
Promptly; Card casket 100 according to this execution mode; The projection 14 that is positioned at card casket main part 10 sides is separated from each other with the projection 34 that is positioned at gate structure 30 sides; And the seal that the projection 14,34 of utilizing the two is guaranteed with respect to ambient atmos (air), so can realize taking in as follows the card casket: it can alleviate foreign matter, mist is attached to the substrate surface of being taken in, and has the less opening and closing structure of occupied area.At this, airtight the getting final product of form that the state that so-called projection 14 and projection were opened in 34 minutes produces dust so long as not sliding with projection 14 and projection 34.Promptly; If the mode that is separated from each other with projection 14 and projection 34 designs/constitutes; Then the result is: even produce the position that projection 14 contacts with projection 34, also can not produce dust or not produce dust in fact from projection (14,34), so can be such state.Therefore, such result is: even producing under the situation of contact condition, this state also can be contained in the state that projection 14 and projection were opened in 34 minutes.
In addition, the card casket 100 of this execution mode also can change as follows.Figure 14 is the card casket 100 of the change example of this execution mode.The mode that gate structure 30 is fixed in card casket main part 10 is not limited to the mode of Fig. 2 shown in waiting, if gate structure 30 along with move downwards because of gravity to the direction of the card casket peristome 20 of card casket main part 10 near method, then can suitably adopt.
In example shown in Figure 14, be formed with the position 18 of wedge-type shape on the top of card casket main part 10.Corresponding therewith, on gate structure 30, also be formed with the position 38 of wedge-type shape.The position 38 of the wedge-type shape of gate structure 30 is connected in shut 32 through supporting member 39.
According to formation shown in Figure 14, when shut 32 moves downwards (reference arrow 52), the position of both wedge-type shapes (18,38) contact.Then, while gate structure 30 is pressed wedge-type shape moves downwards to the direction of the card casket peristome 20 of card casket main part 10 near, shut 32 ability shutoff card casket peristomes 20.Should constitute even use, it is minimum also making sliding action, and the switching that can block casket peristome 20.And this formation also can not use complicated mechanism just to block the switching of casket peristome 20 easily.And, can be with the formation different with projection 14 and projection 34, obtain following shut 32 to move downwards and the effect of shutoff card casket peristome 20 automatically, and, this effect value that self possesses skills.
And the cross section that ambient atmos is difficult to be not limited to the structure that the inside (air) of card casket main part 10 is invaded horizontal direction shown in Figure 5 (direction vertical with short transverse 50) is the projection of rectangle (perhaps essentially rectangular).For example, shown in figure 15, be positioned at the projection 14 and the cross sectional shape that the projection 34 that is positioned at gate structure 30 sides has the L font respectively of card casket main part 10 sides, utilize both to form the shape of key shape.In such formation, the path in the gap between projection 14 and the projection 34 is also crooked, and this becomes obstruction, so ambient atmos is difficult to invade the inside of card casket 100.In addition, raised structures shown in Figure 15 (14,34) not only is applicable to and certainly in formation for example shown in Figure 5, adopts formation shown in Figure 14.
In addition; Though projection 14 is formed at the peripheral part 12 of the card casket peristome 12 of card casket main part 10; But so long as can guarantee and the structure of the seal of ambient atmos (air) that the peripheral part 12 that then forms projection 14 is not limited to the front of card casket main part 10, can be the position of side 11A.In this case, will be arranged at gate structure 30, projection 34 will be set on this face with the projection that is formed at this position 14 relative faces.
Figure 16 is the card casket 100 of the another change example of this execution mode.In example shown in Figure 16, (36A, the shape of groove 37 36B) is with shown in Figure 2 different for guide portion 36.(its groove 37 is the wide shape in narrow bottom, top to guide portion 36 shown in Figure 16 for 16A, the structure of mode 16B) in order to import roller bearing 16.When gate structure 30 was descended, the roller bearing 16 that gets into the bottom of groove 37 then was directed to the inside of groove 37, and roller bearing 16 is fixed in the position of the inwall that tangles groove 37.
In formation shown in Figure 16, can between shut 32 and card casket main part 10, produce some gaps.But, in this case,, then can cover this gap by projection 13 if adopt the top shown in Fig. 7 (perhaps Fig. 8 (a), Fig. 9) to have the structure of masking structure (projection 13) at gate structure 50.And; In structure shown in Figure 2; Combination with guide portion 36 and roller bearing 16 is made as under a plurality of situation; Preferably change the length of each guide portion 36 (36A, 36B) for being easy to dismounting, but under the situation of the structure of lead-in mode shown in Figure 16, have the advantage that does not limit such length change especially.
In addition; Under the situation of taking in the card casket of using the form of stretching out on the inwall of the monolithic of support glass substrate 4 being located at card casket main part 10; Therefore the area of the monolithic of support glass substrate 40 is little, might follow the maximization of glass substrate in recent years, glass substrate deflection and produce distortion.Therefore, taking in/situation of the glass substrate of carrying large under, suppressing preferably to use aspect such distortion before and after on the inwall of card casket main part 10 the ply-yarn drill casket of configuring multi-layer line side by side sometimes.
Figure 17 is the sketch map of the example under the situation of formation with ply-yarn drill casket mode of card casket 100 that this execution mode is shown.The line 60 of supporting substrate 40 in the internal arrangement of card casket main part 10.Particularly, support a substrate 40 by many lines 60, these many line lines 60 are arranged in multilayer.Because line 60 is arranged in multilayer, thereby can take in compound glass substrate 40 in the inside of card casket main part 10.
At this, gate structure 30 is connected in the for example part of lift 65, can move at above-below direction 52.In addition, be formed with peristome (lower aperture portion) 22 below the card casket main part 10, insert the roller path 61 that links with lifting frame 62 at this peristome 22.Roller path 61 is from contacting with substrate 40 between the line 60, and, see substrate 40 off from card casket peristome 20.The substrate of seeing off from card casket peristome 20 40 moves on the Handling device 64, and then, substrate 40 is supplied to the operation that needs, and is perhaps taken care of in the place of needs.
In addition; Under the situation of the shut that utilizes gate structure 30 32 shutoff card casket peristomes 20; Use lift 65 to make shut 32 move (reference arrow 52) downwards, for example Fig. 2 (a) with (b) shown in that kind, need only by shut 32 shutoff card casket peristomes 20.Also on gate structure 30, be formed with projection 34 under the situation of ply-yarn drill casket mode, be formed with projection 14, so can guarantee seal with respect to card casket 100 inside of ambient atmos at card casket main part 10.
In addition, in the example shown in Figure 17, roller path 61 is gone up and down, but can be that roller path 61 is fixing and make the descend formation of (perhaps up-down) of card casket main part 10.In this case, card casket main part 10 is descended, the bottom surface peristome 22 at card casket main part 10 inserts roller path 61 thus.
Utilize above the present invention preferred embodiment has been described, but such record not to limit item, surely carry out various changes.For example; In this execution mode, the formation example that can utilize many lines to take in the ply-yarn drill casket of substrate 40 is illustrated; But the technology of this execution mode is not limited to the ply-yarn drill casket, can be applied to take in the device beyond the line substrate reception card casket (for example, put sheet stretches out form take in the card casket) of substrate 40.And the substrate transfer apparatus as being used for seeing off from card casket main part 10 substrate 40 except that roller path, also can use air-floating type conveyor, and this air-floating type conveyor has the structure that for example can utilize air to make substrate 40 come-ups and move.
Utilizability in the industry
According to the present invention, can provide and take in the card casket as follows: it can alleviate foreign matter, mist is attached to the substrate surface of being taken in, and has the less opening and closing structure of occupied area.
Description of reference numerals
10 card casket main parts
12 peripheral parts
13 projections
14 projections
15 supporting members
16 fasteners (roller bearing)
17 support portions
The position of 18 wedge-type shapes
20 card casket peristomes
30 gate structures
32 shuts
34 projections
36 guide portion
37 grooves
The position of 38 wedge-type shapes
39 supporting members
40 substrates (glass substrate)
50 short transverses (vertical)
60 lines
61 roller paths
62 lifting frames
64 Handling devices
65 lifts
100 card caskets
1000～1300 card caskets
Claims (16)
1. one kind is blocked casket, and it takes in substrate, possesses:
Card casket main part, it is at the internal configurations substrate;
Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And
Gate structure, it comprises the shut of the above-mentioned card casket of shutoff peristome,
Be formed with projection along the switching direction of above-mentioned shut respectively on the position of the periphery that is positioned at above-mentioned card casket peristome in above-mentioned card casket main part and the mutual relative face of above-mentioned gate structure,
The above-mentioned projection that is positioned at above-mentioned card casket main part side is separated from each other with the above-mentioned projection that is positioned at above-mentioned gate structure side.
2. card casket according to claim 1,
The above-mentioned projection that is positioned at above-mentioned card casket main part side and the above-mentioned projection that is positioned at above-mentioned gate structure side are respectively the projections of the rib shape that slenderly extends along the switching direction of above-mentioned shut.
3. card casket according to claim 1 and 2 is characterized in that,
The switching direction of above-mentioned shut is the short transverse of above-mentioned card casket main part.
4. card casket according to claim 3 is characterized in that,
Except the projection that the short transverse along above-mentioned card casket main part forms, also on above-mentioned gate structure, be formed with the projection of extending along horizontal direction.
5. according to each the described card casket in the claim 1 to 4,
The above-mentioned projection that is arranged in above-mentioned card casket main part side is a plurality of projections with the arbitrary side's projection that is positioned at the above-mentioned projection of above-mentioned gate structure side,
The opposing party's projection with respect to above-mentioned side's projection between above-mentioned a plurality of projections.
6. according to each the described card casket in the claim 1 to 4,
It is the shape of L word shape that the above-mentioned projection that is positioned at above-mentioned card casket main part side has the cross section vertical with the switching direction of above-mentioned opening-closing plate respectively with the above-mentioned projection that is positioned at above-mentioned gate structure side.
7. according to each the described card casket in the claim 1 to 6,
Be provided with the fastener that card ends above-mentioned gate structure at above-mentioned card casket main part,
On above-mentioned gate structure, be formed with guide portion, guide sections is taken in the above-mentioned fastener of being located at above-mentioned card casket main part.
8. one kind is blocked casket, and it takes in substrate, possesses:
Card casket main part, it is at the internal configurations substrate;
Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And
Gate structure, it comprises the shut of the above-mentioned card casket of shutoff peristome,
Be provided with the fastener that card ends above-mentioned gate structure at above-mentioned card casket main part,
On above-mentioned gate structure, be formed with guide portion, guide sections is taken in the above-mentioned fastener of being located at above-mentioned card casket main part,
Above-mentioned fastener is a roller bearing,
Be formed with the groove that can dispose above-mentioned roller bearing in guide sections,
Above-mentioned groove extends with respect to the short transverse of above-mentioned card casket main part obliquely.
9. according to claim 7 or 8 described card caskets,
Above-mentioned roller bearing is located at the topmost of above-mentioned card casket main part.
10. card casket according to claim 9,
Above-mentioned roller bearing except that being located at above-mentioned topmost, also be located at than above-mentioned topmost by under the position.
11. card casket according to claim 8,
Above-mentioned roller bearing is provided with one at least at the central portion of the short transverse of above-mentioned card casket main part.
12. card casket according to claim 8 is characterized in that,
The combination of guide sections and above-mentioned roller bearing is provided with a plurality of along the short transverse of above-mentioned card casket main part,
The length of the horizontal direction of the guide sections above above-mentioned short transverse is positioned at is longer than the length of the horizontal direction that is positioned at the guide sections below leaning on than it.
13. a card casket, it takes in substrate, possesses:
Card casket main part, it is at the internal configurations substrate;
Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And
Gate structure, it comprises the shut of the above-mentioned card casket of shutoff peristome,
On above-mentioned gate structure, be provided with fastener, above-mentioned fastener is limited to above-mentioned card casket main part with this gate structure,
Be formed with guide portion at above-mentioned card casket main part, guide sections is taken in the above-mentioned fastener of being located on the above-mentioned gate structure,
Above-mentioned fastener is a roller bearing,
Be formed with the groove that can dispose above-mentioned roller bearing in guide sections,
Above-mentioned groove extends with respect to the short transverse of above-mentioned card casket main part obliquely.
14. a card casket, it takes in substrate, possesses:
Card casket main part, it is at the internal configurations substrate;
Card casket peristome, the part that it is formed at above-mentioned card casket main part is used to pick and place aforesaid substrate; And
Gate structure, it comprises the shut of the above-mentioned card casket of shutoff peristome,
Be provided with position at above-mentioned card casket main part with wedge-type shape,
On above-mentioned gate structure, be provided with position accordingly with wedge-type shape with above-mentioned position with wedge-type shape.
15. according to each the described card casket in the claim 1 to 14,
Internal arrangement at above-mentioned card casket main part many lines,
Aforesaid substrate is a glass substrate,
Above-mentioned glass substrate is supported by above-mentioned line.
16. card casket according to claim 15,
Above-mentioned card casket main part has box-formed shape,
Above-mentioned card casket peristome is formed on the one side at least in the front and back of above-mentioned box-formed shape,
Be formed with the peristome of the Handling device insertion that supplies the carrying aforesaid substrate in the bottom surface of above-mentioned box-formed shape.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-121559 | 2009-05-20 | ||
| JP2009121559 | 2009-05-20 | ||
| PCT/JP2010/058294 WO2010134492A1 (en) | 2009-05-20 | 2010-05-17 | Cassette |
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| Publication Number | Publication Date |
|---|---|
| CN102484088A true CN102484088A (en) | 2012-05-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010800215910A Pending CN102484088A (en) | 2009-05-20 | 2010-05-17 | Cassette |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2010134492A1 (en) |
| CN (1) | CN102484088A (en) |
| WO (1) | WO2010134492A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102807028A (en) * | 2012-08-16 | 2012-12-05 | 上海鸿润科技有限公司 | Container cover attachment structure and container |
| CN106597814A (en) * | 2017-01-11 | 2017-04-26 | 深圳市大川光电设备有限公司 | Multifunctional exposure platform |
| CN112644841A (en) * | 2020-12-03 | 2021-04-13 | Tcl华星光电技术有限公司 | Cartridge and automatic clean storage |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5729148B2 (en) * | 2011-06-07 | 2015-06-03 | 東京エレクトロン株式会社 | Opening / closing device for substrate transfer container, opening / closing device for lid and semiconductor manufacturing device |
| CN103350886B (en) * | 2013-07-19 | 2015-06-17 | 深圳市华星光电技术有限公司 | Article position correcting device |
| JP6414535B2 (en) | 2015-10-28 | 2018-10-31 | 株式会社ダイフク | Storage container |
| KR20200100200A (en) | 2018-01-12 | 2020-08-25 | 신에츠 폴리머 가부시키가이샤 | Panel storage container |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11145269A (en) * | 1997-11-11 | 1999-05-28 | Starlite Co Ltd | Sealed substrate cassette and manufacturing device, using the same |
| JP2005145628A (en) * | 2003-11-14 | 2005-06-09 | Shiraitekku:Kk | Cassette for glass substrate |
| JP2007210655A (en) * | 2006-02-10 | 2007-08-23 | Fujitsu Ltd | Storage case |
| CN100365443C (en) * | 2002-07-22 | 2008-01-30 | 大日本印刷株式会社 | Production line system and automated warehouse used in the system |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06171684A (en) * | 1992-11-24 | 1994-06-21 | Matsushita Electric Works Ltd | Lead frame transportation magazine |
| JP2000007148A (en) * | 1998-06-19 | 2000-01-11 | Advanced Display Inc | Glass board cassette |
| JP2008150855A (en) * | 2006-12-18 | 2008-07-03 | Hitachi Plant Technologies Ltd | Shutter device |
| JP4765986B2 (en) * | 2007-03-23 | 2011-09-07 | 村田機械株式会社 | Transport system |
| JP4958017B2 (en) * | 2008-08-13 | 2012-06-20 | 大日本印刷株式会社 | Color filter production line system |
| JP2010058802A (en) * | 2008-09-02 | 2010-03-18 | Sharp Corp | Substrate storing case |
| JP5136860B2 (en) * | 2008-09-12 | 2013-02-06 | 株式会社ダイフク | Board transfer equipment |
-
2010
- 2010-05-17 CN CN2010800215910A patent/CN102484088A/en active Pending
- 2010-05-17 WO PCT/JP2010/058294 patent/WO2010134492A1/en active Application Filing
- 2010-05-17 JP JP2011514404A patent/JPWO2010134492A1/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11145269A (en) * | 1997-11-11 | 1999-05-28 | Starlite Co Ltd | Sealed substrate cassette and manufacturing device, using the same |
| CN100365443C (en) * | 2002-07-22 | 2008-01-30 | 大日本印刷株式会社 | Production line system and automated warehouse used in the system |
| JP2005145628A (en) * | 2003-11-14 | 2005-06-09 | Shiraitekku:Kk | Cassette for glass substrate |
| JP2007210655A (en) * | 2006-02-10 | 2007-08-23 | Fujitsu Ltd | Storage case |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102807028A (en) * | 2012-08-16 | 2012-12-05 | 上海鸿润科技有限公司 | Container cover attachment structure and container |
| US10046886B2 (en) | 2012-08-16 | 2018-08-14 | Shanghai Hongyan Returnable Transit Packagings Co., Ltd. | Container and lid hanging structure thereof |
| CN106597814A (en) * | 2017-01-11 | 2017-04-26 | 深圳市大川光电设备有限公司 | Multifunctional exposure platform |
| CN106597814B (en) * | 2017-01-11 | 2018-02-23 | 深圳市大川光电设备有限公司 | Multi-functional exposure stage |
| CN112644841A (en) * | 2020-12-03 | 2021-04-13 | Tcl华星光电技术有限公司 | Cartridge and automatic clean storage |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2010134492A1 (en) | 2012-11-12 |
| WO2010134492A1 (en) | 2010-11-25 |
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Application publication date: 20120530 |